Increased number of load ports on factory interface with robot that moves on track

Abstract

To provide a factory interface for an increased number of load ports on the factory interface with a robot that moves on a track, and an assembly.SOLUTION: A factory interface (FI) 100 includes a housing, a front 102 surface of the housing having multiple load ports 110, an FI robot 120 having an arm and an end effector, and a track 130 attached to a floor within the housing. The FI robot is adapted to move horizontally along the track to multiple positions from which the arm can make the end effector of the robot reach into a front opening unified pod (FOUP) attached to any of the multiple load ports.SELECTED DRAWING: Figure 1A

Description

[Technical Field]

[0001] SUMMARY OF THE INVENTION Embodiments of the present disclosure relate to an increased number of load ports on a factory interface with robots that travel on tracks. [Background technology]

[0002] Electronic device manufacturing systems can include multiple processing chambers arranged around a mainframe housing having a transfer chamber, and one or more load lock chambers configured to transfer substrates into the transfer chamber. These systems can use, for example, a transfer robot that can be housed within the transfer chamber. The transfer robot can be a selectively compliant articulated robot arm (SCARA) robot, etc., and can be adapted to transport substrates between various processing chambers and one or more load lock chambers. For example, the transfer robot can transport substrates from processing chamber to processing chamber, from load lock chamber to processing chamber, and vice versa.

[0003] Substrate processing in semiconductor component manufacturing typically occurs in multiple tools, where substrates are moved between tools in substrate carriers (e.g., front opening unified pods, or FOUPs). The FOUP can be docked to an EFEM (sometimes referred to as a "factory interface, or FI"), which contains a load / unload (or FI) robot operable to transfer substrates between the FOUP and one or more load locks of the tool, thereby passing the substrate through for processing in a processing chamber. The load lock can provide a clean environmental buffer for the substrate prior to its transfer to a transfer chamber, which typically includes a pressurized vacuum environment. Electronic device manufacturing system designs typically strive to minimize the contaminants to which substrates are exposed. Summary of the Invention

[0004] Some of the embodiments described herein include a factory interface including a housing, a front surface of the housing having multiple load ports, a robot having an arm and an end effector, and a floor-mounted track within the housing, the robot adapted to move horizontally along the track to multiple positions from which the arm can reach the robot's end effector into a front-opening unified pod attached to any of the multiple load ports.

[0005] Other embodiments described herein include an assembly including a robot having an arm and an end effector. The assembly further includes a track mountable to a floor within a factory interface, with the robot slidably mounted to the track to move the robot horizontally along the track to multiple positions, and the arm can reach the robot's end effector from the multiple positions into a front-opening unified pod mounted to any of multiple load ports in the factory interface. The assembly further includes a ball screw assembly having a ball screw shaft coupled to an electric motor via a timing belt and a nut operatively coupled between the ball screw shaft and the robot. The ball screw assembly moves the robot horizontally along the track.

[0006] At least some embodiments described herein include a method of operating an assembly having a robot slidably mounted on a track attached to the floor of a factory interface. The method can include receiving a command identifying as a destination a Front Opening Unified Pod (FOUP) attached to a first load port of a plurality of load ports of the factory interface. The method can further include horizontally moving the robot along the track to one of a plurality of positions, from which the robot arm reaches an end effector attached to the arm into the FOUP. The method can further include causing the robot arm to reach the end effector through the first load port and into the FOUP. The method can further include causing the robot arm to either pick up a substrate from the FOUP or place a substrate into the FOUP.

[0007] Many other features are provided in accordance with these and other embodiments of the present disclosure. Other features and embodiments of the present disclosure will become more fully apparent from the following detailed description, the claims and the accompanying drawings.

[0008] The present disclosure is presented by way of example, and not by way of limitation, in the figures of the accompanying drawings, in which like references indicate like elements. It should be noted that different references to a singular embodiment or "one" embodiment in the present disclosure are not necessarily references to the same embodiment, and such references mean at least one. [Brief explanation of the drawings]

[0009] [Figure 1A] FIG. 1 illustrates a perspective view of an exemplary factory interface (FI) in accordance with various embodiments. [Figure 1B] FIG. 1B is a front view of the factory interface of FIG. 1A in accordance with various embodiments. [Figure 1C] FIG. 10 illustrates another perspective view of an exemplary factory interface in accordance with various embodiments. [Figure 1D] FIG. 13 is a perspective view of a factory interface that allows removal of two middle posts as in the FI robot assembly disclosed herein, according to an embodiment. [Figure 2A] FIG. 12 is a perspective view of an FI robot assembly having an FI robot moving horizontally on a track, according to an embodiment. [Figure 2B] FIG. 2B is a perspective view of the track and drive box of the FI robot assembly of FIG. 2A in accordance with an embodiment. [Figure 2C] FIG. 2B is a top view of the FI robot assembly of FIG. 2A in accordance with an embodiment. [Figure 2D] FIG. 10 is a cross-sectional side view of a track and drive box of an FI robot assembly, according to an embodiment. [Figure 2E] FIG. 2B is an end view of the FI robot assembly of FIG. 2A in accordance with an embodiment. [Figure 3] FIG. 1 is a side view of a factory interface combined with a front-opening unified pod (FOUP) at a load port, illustrating typical gas flow according to an embodiment. [Figure 4]1 illustrates a top view of an electronics manufacturing system including a factory interface attached to a load lock, according to an embodiment. [Figure 5] 1 is a flowchart of a method for operating a robot-track assembly according to various embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0010] The embodiments described herein relate to systems and methods for an increased number of load ports on a factory interface having a robot that travels on a track. For example, existing systems can benefit from increased efficiency and throughput within the factory interface ("FI") and / or improved processing quality. Improved quality can mean moving substrates between the FI and load locks without introducing an unacceptable number of inclusions, such as particles, airborne molecular contaminants (AMC), and / or volatile organic compounds (VOCs), that reside at the factory interface or enter via gas intake from the fabrication equipment. In some embodiments, the factory interface and corresponding assembly are described as having one or two additional load ports for a total of at least six load ports, although seven or more load ports are contemplated. Because the factory interface is extended in length to accommodate at least six load ports, the FI robot can be adapted to travel along a track to extend the reach of the FI robot's arm to the load port location furthest from the FI robot.

[0011] The use of an FI robot itself introduces moving parts and potential contamination. Adding movement of the FI robot along a track increases the number of moving parts, lubricants, and potential exposure to contaminants. Therefore, various structural and factory interface modifications can be used to remove such contaminants at the track and FI robot level before they can rise (or circulate) to the level of the substrates (e.g., silicon wafers) being transferred by the robot's end effectors, and before they can escape into, for example, a front-opening unified pod (FOUP) or load lock. Because the disclosed FI uses gas recirculation, contaminant removal is more complicated than simply sucking gas out, for example, from a bottom or side vent.

[0012] Advantages of the systems and methods realized by some embodiments of the present disclosure therefore include, but are not limited to, improving factory interface design using additional load ports and therefore substrate throughput and / or storage capacity, while also reducing contaminants generated by robots moving along tracks. Other advantages will be apparent to those skilled in the art of factory interface hardware and control design discussed below.

[0013] FIG. 1A is a perspective view of an exemplary factory interface 100 according to various embodiments. FIG. 1B is a front view of the factory interface of FIG. 1A according to various embodiments. FIG. 1C is another perspective view of an exemplary factory interface 100 according to various embodiments. In these embodiments, the factory interface 100 (i.e., FI 100) includes a housing having a front 102 (i.e., front side), a back 104 (i.e., rear side), and a side 106 (i.e., side). The front 102 of the FI 100 housing can be configured with a set of load ports 110. In some embodiments, the set of load ports 110 includes at least six load ports, three load ports 110A on the left side and three load ports 110B on the right side along the length of the FI 100. However, as contemplated, in other embodiments, the set of load ports 110 is increased to include, for example, four load ports on each of the right and left sides, for a total of eight or more load ports. A FOUP, side storage pod (SSP) or other substrate container can be attached to any of a set of load ports 110, from which substrates can be removed and / or delivered to.

[0014] In at least some embodiments, the factory interface 100 includes an FI robot assembly 101 that includes an FI robot 120 and a track 130, with the FI robot 120 slidably mounted on the track 130. In these embodiments, the track 130 is attached to the bottom of the factory interface 100. In different embodiments, the bottom of the factory interface 100 is either a bottom frame piece of the FI housing or the floor of the factory interface 100 (e.g., a factory floor) if the factory interface 100 does not have a bottom frame piece. In these embodiments, the FI robot 120 is slidably mounted to the track 130 and moves horizontally along the track 130 to multiple positions from which an arm of the robot 120 can reach an end effector attached to the arm into a FOUP (or SSP or other substrate container) attached to any of a set of load ports 110. The track 130, as will be discussed in detail, can include one or more rails or guides to constrain the linear forward and backward movement of the FI robot 120.

[0015] As shown, in some embodiments, the track 130 extends along a subset of the set of load ports 110, excluding at least the outermost load ports of the set of load ports 110. The track 130 thus allows the FI robot 120 to move generally horizontally back and forth between any centrally located load ports of the set of load ports 110. For example, the robot 120 can move along the track 130 until it is positioned in one of a plurality of positions that allows the arm of the robot 120 to reach an end effector of the robot 120 into a FOUP attached to any of the set of load ports 110. These multiple positions can exclude at least the outermost two load ports of the set of load ports 110. In this manner, when the FI robot 120 is positioned in its leftmost position (as shown in FIGS. 1A-1C ), the arm and end effector of the FI robot 120 can reach into each of the three left-side load ports 110A. Similarly, when the FI robot 120 is positioned at its rightmost position, the arm and end effector of the FI robot 120 can reach into each of the three load ports 110B on the right side.

[0016] These embodiments can be expanded to additional load ports, such as four load ports to the left of the center and four load ports to the right of the center, or more. By making the track 130 shorter and limiting it to the generally central load ports, these embodiments minimize the length of the track, and therefore also minimize the contaminants that the track 130 is expected to generate. In other embodiments, the track 130 is made longer than shown, extending along the central four load ports to reach additional load port locations, for example, for six, seven, or more load ports.

[0017] In various embodiments, the FI 100 includes a gas recirculation system that includes a pressurized plenum 118 (or plenum 118 for brevity) in the top region of the FI 100 housing. This pressurized plenum 118 can include a fan (or other forced gas source) that activates and drives the gas flow of the gas recirculation system, which activates and drives the gas flow by forcing the gas downward through the housing and pulling the gas back through the FI 100 and into the pressurized plenum 118. By recirculating the gas within the housing, the FI 100 avoids continuously ingesting gas from the manufacturing environment external to the FI 100. However, the gas recirculation system also increases the risk of circulating contaminants from the FI robot 120 and track 130, particularly contaminants from moving parts back onto substrates being passed through the FI 100 by the FI robot 120.

[0018] In some embodiments, a gas recirculation system can force gas, in the form of ambient air, clean dry air (CDA), nitrogen, or other inert gas, down from a plenum 118 through the height of the FI 100 and recirculate the gas through a set of return ducts 114 (see also FIG. 3 ) back to the pressurized plenum 118. The set of return ducts 114 can include, for example, a return duct 114A inside the factory interface 100 as part of the framework between or adjacent to the framework between the individual load ports 110. The set of return ducts 114 can further include return ducts 114B at each interior corner along the height of the housing of the FI 100. This set of return ducts 114 thus runs generally from top to bottom, with fans and gas circulation ultimately forcing the return gas back through the return ducts 114. The plenum 118 can also include multiple layers of filters for filtering out chemicals, organic matter, and particles, as will be discussed in more detail with reference to Figure 3. In various embodiments, the FI 100 includes a drive box 125 surrounding the track 130 and the FI robot 120, at least a portion of which is part of or integral with the track plenum, as will be discussed in more detail with reference to Figure 2A.

[0019] In at least some embodiments, factory interface 100 further includes a first door 116A mounted on a first side of the housing for selectively covering pressurized plenum 118, and a second door 126A mounted on the first side of the housing for selectively covering space 128 occupied by robot 120 and track 130. In at least some embodiments, factory interface 100 further includes a third door 116B mounted on a second side of the housing for selectively covering pressurized plenum 118, and a fourth door 126B mounted on the second side of the housing for selectively covering space 128 occupied by robot 120 and track 130. The second door 126A and the fourth door 126B can be selectively (e.g., independently) opened while the first door 116A and the third door 116B remain closed, allowing access (e.g., for maintenance or repair) to the moving parts (e.g., robot 120, track 130, and associated components) while the pressurized plenum is protected from moisture and contaminants. Additionally, gas recirculation can remain functional to continue filtering out particles during maintenance or repair.

[0020] In the illustrated embodiment, the FI 100 further includes a controller 150 ( FIG. 1A ) that can couple with the FI robot 120 using mechanisms associated with the track 130 (e.g., to direct horizontal movement) and with different aspects of the gas recirculation system. Signals from the controller 150 can effect operation of various components of the FI robot 120 and / or adjustments to the gas recirculation system. Various sensors, such as position encoders, gas contaminant sensors, etc., can provide appropriate feedback mechanisms for one or more of the components, which can also be responsive to user input. The controller 150 can include appropriate processors, memory, and electronic components that receive inputs from the various sensors and control one or more valves, actuators, vents, etc., as described in detail below, to control environmental conditions within the mini-environment of the FI 100 in which the FI robot 120 operates.

[0021] FIG. 1D is a perspective view of a factory interface 100 in which the two intermediate posts 144A and 144B are removable, as is the case with the FI robot assembly 101 disclosed herein, according to an embodiment. As discussed, the factory interface 100 can further include a FOUP 90 (or SSP, etc.) attached to each load port of the set of load ports 110. In at least some embodiments, the two intermediate posts 144A and 144B (or another set of posts defining at least some of the load ports of the set of load ports 110) are removable. Furthermore, the FI robot assembly 101, including at least the robot 120 and the drive box 125, can also be removed (e.g., by pulling and / or lifting with a crane) once the two intermediate posts 144A and 144B are removed. The removability of the FI robot assembly 101 can facilitate cleaning and maintenance or replacement associated with the FI robot assembly 101.

[0022] 2A is a perspective view of an FI robot assembly 201 having an FI robot 120 that moves horizontally on a track 130, according to an embodiment. In some circumstances, the components of the FI robot assembly 201 can be assembled into an existing factory interface 100. In various embodiments, the FI robot assembly 201 includes an FI robot 120, a drive box 125, a track 130, a track plenum 202, and one or more gas lines 212. The FI robot 120 can include a motor assembly 210, an arm assembly 203 (or "arm" for simplicity), and an end effector 205. The motor assembly 210 can control the arm assembly 203 to perform reach-and-pick and reach-and-drop operations using the end effector 205 to move substrates from one location to another, for example, from a FOUP (e.g., FOUP 90) to a load lock, or from a load lock to a FOUP or side storage pod.

[0023] The FI robot 120 may further include one or more fans 211 integrated into the motor assembly 201 to keep the moving parts of the motor assembly 201 cool, and the one or more fans 211 may themselves emit some contaminants. Thus, in some embodiments, the one or more fans 211 include chemical and particulate filters at the outlet of the one or more fans 211 to provide some local filtering of contaminants generated local to the track plenum 202 and / or generated by the one or more fans 211.

[0024] 2B-2E, FIG. 2B is a perspective view of the track 130 and drive box 125 of the FI robot assembly 201 of FIG. 2A according to an embodiment. FIG. 2C is a top view of the FI robot assembly 201 of FIG. 2A according to an embodiment. FIG. 2D is a side cross-sectional view of the track 130 and drive box 125 of the FI robot assembly 201 according to an embodiment. FIG. 2E is an end view of the FI robot assembly of FIG. 2A according to an embodiment.

[0025] As discussed, the FI robot 120 can move horizontally along a track 130, for example, within a pair of linear guide rails 232. The track 130 can be attached to the bottom of the FI 100 (such as on a frame piece, or directly to the floor of the FI 100) using a slide table 234. The slide table 234 can include or be attached to a plurality of sliders 236 that are attached to and adapted to slide along the pair of linear guide rails 232. Each of the plurality of sliders 236 can therefore include a bearing or set of bearings (not shown) to facilitate sliding.

[0026] In at least some embodiments, the drive box 125 of the track 130 can further include a ball screw assembly 240 (FIGS. 2C-2D) that provides a controllable mechanical drive for moving the FI robot 120 along a pair of linear guide rails 232. The ball screw assembly 240 can include, for example, a ball screw shaft 242 coupled to an electric motor 252 via a timing belt 254 (or other pulley). The ball screw assembly 240 can further include a nut 246 operatively coupled between the ball screw shaft 242 and the FI robot 120. In these embodiments, the ball screw assembly 240 moves the FI robot 120 horizontally along the track 130, for example, via a set of linear guide rails 232. The drive box 125 can further include a link cable 260 (FIG. 2D) that facilitates movement of the electric cable with the electric motor 250 and the nut 246 when the electric motor 250 and the nut 246 are activated (e.g., by the controller 150) to move the FI robot 120. As mentioned, these moving parts contribute to the level of contaminants generated by the FI robot 120 from within the FI 100.

[0027] In at least some embodiments, and with additional reference to FIG. 2A , the track plenum 202 is added as an open-top box to isolate, strip, and filter out particulates or other contaminants. The track plenum 202 can be tightly fitted around the track 130 to maximize the track plenum's 202 ability to contain and control such particulates and other inclusions. In various embodiments, the controller 150 can measure (and monitor) the pressure in the track plenum 202 surrounding the FI robot 120, for example, using a pressure sensor 216 mounted inside the track plenum 202, which may include a portion disposed within the drive box 125. If the pressure in the track plenum 202 is insufficient, for example, the controller 150 can detect using the pressure sensor 216 that the pressure is below or does not meet a threshold pressure. In response to detecting such pressure, the controller 150 can deactivate the robot 120 and the set of load ports 110. Additionally or alternatively, the controller 150 may alert the operator to errors and / or prevent operation of the FI 100 to prevent operation without contamination prevention functionality of the track plenum 202 .

[0028] In some embodiments, the gas recirculation system is configured to include one or more gas lines 212, each containing a set of gas injectors 213, to generate a gas curtain around the FI robot 120 while it moves along the track 130. The one or more gas lines 212 are shown at a particular height by way of example, but could be located higher or lower relative to the robot 120 as long as the arm assembly 203 can still move freely. In various embodiments, the movement of the FI robot 120 itself can disrupt the gas flow, stirring up additional particles or contaminants within the FI robot's small environment. The gas recirculation system can be further augmented with fans, gas thrusters, gas inlet valves, or other such gas injectors within the track plenum 202 that vary the gas curtain around the FI robot 120 depending on the position and / or velocity of the FI robot 120 (or a combination of the position, velocity, and direction of the robot's movement). For example, the controller 150 can receive feedback or otherwise detect a combination of the position, velocity, and / or direction of movement of the FI robot 120. The controller 150 can then activate a set of gas injectors 213 according to a predetermined algorithm to modify the gas curtain generated by the FI robot 120 while moving in a manner that counteracts particle disturbance (or release) due to the movement of the FI robot 120, which minimizes gas and particulate disturbance due to, for example, horizontal movement of the FI robot 120.

[0029] 2A , the FI robot assembly 101 further includes a duct 204 that can be mounted between the track plenum and the set of return ducts 114 (FIGS. 1A-1C). There can be a duct 204 mounted in a generally horizontal and / or vertical position to coincide with at least one return duct in the set of return ducts 114. Each duct 204 can include a filter 206, which in some embodiments can also include a fan for filtering out contaminants generated locally within the track plenum 202.

[0030] In various embodiments, the FI 100 includes an ionizer located near or adjacent to the track 130 that generates positive and negative ions, respectively, which can discharge charged particles, eliminating their ability to stick to surfaces such as substrates. The ionizer can optionally be mounted on the track 130 or can be located next to (or integrated within) one or more gas lines 212. In some embodiments, the ionizer is located between 4 and 12 inches above the track 130. While ionizers are typically used at the substrate transfer level, placing the ionizer on or near the track 130 can help deactivate any particles that may not be filtered out, rendering them inactive.

[0031] FIG. 3 is a side view of the factory interface 100 mated with a FOUP 301 at a load port 110, illustrating typical gas flow according to an embodiment. In various embodiments, the factory interface 100 includes the previously discussed gas recirculation system, including a pressurized plenum 118 at the top and a pair of return ducts 114A and 114B located at the corners along the height of the FI housing between the load ports 110. The large arrows indicate the typical movement of forced gas within the FI 100, including the return gas path through the pair of ducts 114 that carries the forced gas back to the pressurized plenum 118. Not all possible return path flows are shown, only exemplary return gas paths from the side view. In some embodiments, the gas recirculation system also includes a heater, for example in the plenum 118, to further dry the gas and expedite filtering of particles and chemicals. The heater can reduce humidity within the small environment of the FI 100 after a maintenance event.

[0032] In at least some embodiments, the gas recirculation system further includes gas filters 312, including at least a top filter 312A and a bottom filter 312B, disposed between the plenum 118 and the interior of the FI 100, where the robot 120 moves and operates. The gas filters 312 can filter out various contaminants from the recirculated gas, e.g., ambient air, CDA, nitrogen, or other inert gases forced from a gas source in the pressurized plenum 118, such as a fan or gas source unit. For example, the top filter 312A can be a chemical filter to filter out AMCs and VOCs. Additionally, the bottom filter 312B can be a particulate filter to filter out physical particles that are not chemical or organic in nature, for example. In some embodiments, the top filter 312A and the bottom filter 312B can be selectively retractable so that only one or both can be used at a time.

[0033] In some embodiments, the controller 150 can selectively disable the return duct and selectively open the plenum 118 and floor vents to operate in ambient mode instead of recirculation mode. Functioning in ambient mode may be preferable for some substrate processes, and thus the gas recirculation system can be adapted to be selectively switched between recirculation mode and ambient mode.

[0034] 4 is a top view of an electronics manufacturing system 400 including a factory interface 100 attached to a load lock 402, according to an embodiment. The electronics manufacturing system 400 may further include a transfer chamber 405 attached to the load lock 402 and one or more processing chambers 408 attached to a facet of the transfer chamber 405. The factory interface 100 includes a set of load ports 110, e.g., a load port chamber including at least six load ports as previously discussed. In some embodiments, at least one of the set of load ports 110 is adapted to be a side storage pod (SSP) integrated within the FI 100 and adapted to store substrates. For example, in one embodiment, each of the outermost load ports 110 may instead be adapted to be an SSP.

[0035] It can be understood that the six substrates 401 shown at the front of FI 100 represent six potential FOUPs that can supply and receive substrates as they are processed. A set of additional substrates 411 can represent substrate storage locations where, for example, processed substrates can be degassed (e.g., using chlorine or bromine, etc.), cooled, and await transfer back to FI 100 via load lock 402. All wafers in a particular storage station can be returned to a particular FOUP. The FI robot is not shown in FIG. 4 for simplicity of explanation.

[0036] FIG. 5 is a flow diagram of a method 500 for operating a robot-track assembly according to various embodiments. Method 500 can be performed by processing logic, which can include hardware (e.g., a processing device, circuitry, dedicated logic, programmable logic, microcode, device hardware, integrated circuits, etc.), software (e.g., instructions running or executed on a processing device), or a combination thereof. In some embodiments, method 500 is performed by controller 150 (or a similar processing device) of FIG. 1A. Although a particular sequence or order is shown, unless otherwise noted, the order of processes can be modified. Therefore, the illustrated embodiments should be understood as examples only, and the illustrated processes can be performed in a different order, and some processes can be performed simultaneously. Furthermore, various embodiments can omit one or more processes. Therefore, not all processes are required for all embodiments. Other process flows are possible.

[0037] At operation 510, processing logic receives a command identifying as a destination a Front Opening Unified Pod (FOUP) attached to a first load port of a plurality of load ports of a factory interface.

[0038] At operation 520, processing logic causes the robot to move horizontally along the track to a position where an end effector attached to the arm can reach one of a plurality of positions where the arm of the robot should reach the FOUP. In some embodiments, causing the robot to move horizontally along the track includes controlling a ball screw assembly operatively coupled between a slide table attached to the robot and an electric motor controlled according to a horizontal destination of the robot. In at least some embodiments, the track extends along a subset of the plurality of load ports excluding at least the outermost load ports of the plurality of load ports. Thus, in at least some embodiments, causing the robot to move horizontally includes moving the robot to an outermost load port of the subset of the plurality of load ports before causing the arm of the robot to reach an end effector into one of the outermost load ports of the plurality of load ports.

[0039] At operation 530, processing logic directs the robot arm to reach the end effector through the first load port and into the FOUP.

[0040] At operation 540, processing logic causes the robot arm to either pick up a substrate from a FOUP or place a substrate in a FOUP.

[0041] The foregoing description sets forth numerous specific details, such as examples of specific systems, components, methods, etc., to provide a thorough understanding of some embodiments of the present disclosure. However, it will be apparent to those skilled in the art that at least some embodiments of the present disclosure can be practiced without these specific details. In other instances, well-known components or methods have not been described in detail or have been presented in simple block diagram form to avoid unnecessarily obscuring the disclosure. Thus, the specific details shown are merely exemplary. It is contemplated that particular implementations may vary from these example details and still be within the scope of the present disclosure.

[0042] Throughout this specification, a reference to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment. Thus, the appearances of the phrase "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or." When the term "about" or "approximately" is used herein, its use is intended to mean that the stated nominal value is accurate to within ±10%.

[0043] Although the method operations herein are shown and described in a particular order, the order of the operations of each method may be changed, and therefore certain operations may be performed in reverse order, such that certain operations may be performed at least in part concurrently with other operations. In other embodiments, instructions or sub-operations of entirely different operations may be performed in an intermittent and / or alternating manner.

[0044] It is understood that the above description is intended to be illustrative, and not restrictive. Many other embodiments will be apparent to those skilled in the art upon reading and understanding the above description. The scope of the present disclosure should, therefore, be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Claims

1. A factory interface, Housing and a front surface of the housing having a plurality of load ports; a robot having an arm and an end effector; a floor-mounted track within the housing, the robot adapted to move horizontally along the track to a plurality of positions, the arm capable of reaching the end effector of the robot from the plurality of positions into a front-opening unified pod mounted on any of the plurality of load ports; A factory interface with

2. The factory interface of claim 1 , wherein the track extends along a subset of the plurality of load ports excluding at least an outermost load port of the plurality of load ports.

3. The factory interface of claim 1 , wherein the plurality of load ports comprises six load ports, and the plurality of positions excludes at least two outermost load ports of the six load ports.

4. a gas recirculation system; a track plenum surrounding the track; a duct mounted between the truck plenum and a return duct of a gas recirculation system; The factory interface of claim 1 further comprising:

5. The factory interface of claim 4 , further comprising at least one of a fan or a filter integrated within the duct to filter out contaminants generated locally to the truck plenum.

6. a pressure sensor for measuring pressure inside the truck plenum; a controller coupled to the robot, the plurality of load ports, and the pressure sensor; and wherein the controller: using the pressure sensor to detect when pressure in the track plenum does not meet a threshold pressure; deactivating the robot and the plurality of load ports in response to detecting the pressure; The factory interface of claim 4.

7. a set of gas injectors positioned adjacent to the robot; a controller coupled to the robot and the set of gas injectors; and wherein the controller: Detecting a combination of position, velocity and direction of movement of the robot along the track; operating the set of gas injectors to modify the gas curtain generated by the robot during operation in a manner that counteracts particle disturbance due to motion of the robot; The factory interface of claim 1 .

8. a pressurized plenum located at the top of the housing and including a forced gas source forcing gas downwardly through the housing, the forced gas being clean dry air, an inert gas, or a combination thereof; a set of return ducts located at corners along the height of the housing between the plurality of load ports for conveying the forced gas back to the pressurized plenum; The factory interface of claim 1 further comprising a gas recirculation system comprising:

9. a first door attached to a side of the housing for selectively covering the pressurized plenum; a second door attached to the side of the housing for selectively covering the space occupied by the robot and the truck; and The factory interface of claim 8 further comprising:

10. 1. An assembly comprising: a robot having an arm and an end effector; a track mountable to a floor within a factory interface, the robot being slidably mounted on the track and capable of moving horizontally along the track to a plurality of positions, the arm enabling the end effector of the robot from the plurality of positions to reach into a front-opening unified pod mounted on any of a plurality of load ports of the factory interface; 1. A ball screw assembly comprising: a ball screw shaft coupled to an electric motor via a timing belt; a nut operatively coupled between the ball screw shaft and the robot; a ball screw assembly for moving the robot horizontally along the track; An assembly comprising:

11. a pair of linear guide rails attached to the floor of the truck; a slide table including a plurality of sliders attached to the pair of linear guide rails and adapted to slide along the pair of linear guide rails, the nut being attached to the slide table; and The assembly of claim 10 further comprising:

12. The assembly of claim 10 , wherein the track is of sufficient length to allow the robot to move along a subset of the plurality of load ports excluding at least the outermost load ports of the plurality of load ports.

13. The assembly of claim 10 , wherein the robot further comprises a chemical and particle filter at an outlet of the fan of the robot.

14. a track plenum surrounding and pressurizing the track; a duct that can be installed between the truck plenum and a return duct of a gas recirculation system; The assembly of claim 10 further comprising:

15. The assembly of claim 14 , further comprising at least one of a fan or a filter integrated within the duct to filter contaminants generated locally to the truck plenum.

16. a pressure sensor for measuring pressure inside the truck plenum; a controller coupled to the robot, the plurality of load ports, and the pressure sensor; and wherein the controller: using the pressure sensor to detect when pressure in the track plenum does not meet a threshold pressure; deactivating the robot and the plurality of load ports in response to detecting the pressure; 15. The assembly of claim 14.

17. a set of gas injectors positioned adjacent to the robot; a controller coupled to the robot and the set of gas injectors; and wherein the controller: Detecting a combination of position, velocity and direction of movement of the robot along the track; operating the set of gas injectors to modify the gas curtain generated by the robot during operation in a manner that counteracts particle disturbance due to motion of the robot; 11. The assembly of claim 10.

18. 1. A method of operating an assembly comprising a robot slidably mounted on a track mounted to the floor of a factory interface, the method comprising: receiving a command identifying as a destination a Front Opening Unified Pod (FOUP) attached to a first load port of a plurality of load ports of the factory interface; moving the robot horizontally along the track to one of a plurality of positions, an arm of the robot moving from the position to reach an end effector attached to the arm into the FOUP; causing the arm of the robot to reach the end effector through the first load port and into the FOUP; causing the arm of the robot to either pick up a substrate from the FOUP or place the substrate in the FOUP; A method comprising:

19. 20. The method of claim 18, wherein moving the robot horizontally along the track includes controlling a ball screw assembly operatively coupled between a slide table attached to the robot and an electric motor controlled according to a horizontal destination of the robot.

20. 20. The method of claim 18, wherein the track extends along a subset of the plurality of load ports excluding at least an outermost load port of the plurality of load ports, and wherein moving the robot horizontally includes moving the robot to an outermost load port of the subset of the plurality of load ports before causing the arm of the robot to reach the end effector into one of the outermost load ports of the plurality of load ports.

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