Humidifier, air conditioner and flow passage member

Abstract

To control humidity of the air with good accuracy.SOLUTION: A humidifier 20 includes a humidifier body 21 for supplying steam, and a flow passage member 22. The flow passage member 22 includes: a receiving port 22a for receiving steam from the humidifier body 21; an inlet 22b for receiving the air; and an outlet 22c for flowing out the air received in the inlet 22b. A wall part 23 of the flow passage member 22 extending from the inlet 22b to the outlet 22c forms a flow passage of the air flowing from the inlet 22b to the outlet 22c. The receiving port 22a is positioned in such a manner that it supplies steam to the air at the position upstream of the outlet 22c in the flow passage. Then, on the wall part 23, a tapered portion 23t whose flow passage cross-sectional area gradually decreases toward the outlet 22c is formed at least partially.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a humidifier, an air conditioning apparatus, and a flow path member. [Background technology]

[0002] In semiconductor manufacturing facilities, fluctuations in temperature and / or humidity affect yield. For example, the film formation state of the resist used in semiconductor manufacturing changes depending on the temperature or humidity. When such changes in the film formation state occur, variations in the finished product can occur, which can affect yield. For this reason, semiconductor manufacturing facilities usually perform high-precision temperature and humidity control.

[0003] In view of the above background, the present applicant has previously proposed techniques for improving the accuracy of humidity control in Patent Documents 1 and 2. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6159865 [Patent Document 2] Patent No. 6140878 Summary of the Invention [Problem to be solved by the invention]

[0005] Air conditioners are generally used to control the temperature and humidity in clean rooms and inside manufacturing equipment in semiconductor manufacturing facilities. Such air conditioners usually perform controls such as cooling, heating, and humidifying on the air before supplying it to the clean room or manufacturing equipment. Here, humidification is achieved by, for example, supplying steam to the air heading toward the clean room.

[0006] The inventors of the present invention have found that when humidifying air as described above, if stagnation or turbulence occurs in the air flow, the humidification state changes and humidity control accuracy may vary, even when air is supplied at a predetermined flow rate.

[0007] The present disclosure has been made in light of the above background, and aims to provide a humidifier, an air conditioner, and a flow path member that can accurately control the humidity of air. [Means for solving the problem]

[0008] The present disclosure relates to the following aspects:

[0009] <1> a humidifier body that supplies steam or mist-like moisture; a flow path member having an inlet for receiving the steam or the atomized water from the humidifier body, an inlet for receiving air, and an outlet for discharging the air received at the inlet, a wall portion of the flow path member extending from the inlet to the outlet forms a flow path for the air flowing from the inlet to the outlet, and the receiving port is positioned so as to supply the steam or the atomized moisture to the air at a position upstream of the outlet in the flow path, The wall portion is at least partially formed with a tapered portion in which the cross-sectional area of ​​the flow path gradually decreases toward the outlet.

[0010] <2> the tapered portion is formed at least in a range between a portion of the receiving port closest to the inlet and the outlet. <1> The humidifier according to claim 1.

[0011] <3> the humidifier body has a release part that releases the steam or the mist of water, The receiving port faces the discharge portion, The inlet is open to one side in a direction intersecting a direction in which the receiving port and the discharge portion face each other, and the outlet is open to the other side in the intersecting direction, The tapered portion is formed at least in a range of a length in the intersecting direction where the receiving opening is located. <1> or <2> The humidifier according to claim 1.

[0012] <4> The wall portion includes a pair of side wall portions spaced apart in a horizontal direction, The receiving port is located between the lower ends of the pair of side wall portions, The pair of side wall portions are formed to approach each other at least partially toward the outlet, thereby forming the tapered portion. <1> ~ <3> 10. The humidifier according to claim 9, wherein

[0013] <5> the wall portion further includes a top wall portion that closes a space between upper ends of the pair of side wall portions, The outlet opens horizontally. <4> The humidifier according to claim 1.

[0014] <6> The inlet and the outlet are open in a horizontal direction, A partition plate is further provided to cover the range from the lower end of the outlet to the center of the outlet in the vertical direction. <4> or <5> The humidifier according to claim 1.

[0015] <7> an upstream end of the tapered portion forming the inlet; <1> ~ <6> 10. The humidifier according to claim 1, wherein

[0016] <8> <1> ~ <7> a humidifier according to any one of the above items; a temperature control module; The temperature control module includes an air guide duct section connected to the inlet of the flow path member and causing the air to flow from the inlet into the inside of the flow path member, and a temperature control section arranged inside the air guide duct section and controlling the temperature of the air.

[0017] <9> The air guide duct portion and the flow path member are connected to form an L-shape or a crank shape. <8> The air conditioning apparatus described in

[0018] <10> A flow path member including an inlet for receiving steam or mist-like moisture, an inlet for receiving air, and an outlet for discharging the air received at the inlet, a wall portion of the flow path member extending from the inlet to the outlet forms a flow path for the air flowing from the inlet to the outlet, and the receiving port is positioned so as to supply the steam or the atomized moisture to the air at a position upstream of the outlet in the flow path, The wall portion is at least partially formed with a tapered portion in which the cross-sectional area of ​​the flow path gradually decreases from the inlet to the outlet. [Effects of the Invention]

[0019] According to the present disclosure, the humidity of the air can be controlled with high precision. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a side view of an air conditioning apparatus according to an embodiment. [Figure 2] FIG. 2 is a perspective view of the transverse cross section of the air conditioning apparatus shown in FIG. 1, viewed obliquely from above. [Figure 3] FIG. 2 is a perspective view of the vertical cross section of the air conditioning apparatus shown in FIG. 1, viewed obliquely from above. [Figure 4] FIG. 2 is a vertical cross-sectional view of the air conditioning apparatus shown in FIG. [Figure 5] FIG. 2 is a cross-sectional view of the air conditioning apparatus shown in FIG. [Figure 6] 2 is a graph showing the humidity of air humidity-controlled by the air conditioner shown in FIG. 1. FIG. [Figure 7] FIG. 3 is a vertical cross-sectional view of an air conditioner according to a first modified example. [Figure 8] FIG. 10 is a vertical cross-sectional view of an air conditioner according to a second modified example. [Figure 9] FIG. 10 is a vertical cross-sectional view of an air conditioner according to a third modified example. [Figure 10]10A and 10B are diagrams showing a fourth modified example, where (A) is a vertical cross-sectional view of an air conditioner according to the fourth modified example, and (B) is a horizontal cross-sectional view of an air conditioner according to the fourth modified example. [Figure 11] 5A and 5B are diagrams showing a fifth modified example, where (A) is a vertical cross-sectional view of an air conditioner according to the fifth modified example, and (B) is a vertical cross-sectional view showing a modified example of the configuration of FIG. 5A. [Figure 12] FIG. 10 is a vertical cross-sectional view of an air conditioner according to a sixth modified example. DETAILED DESCRIPTION OF THE INVENTION

[0021] An embodiment will be described below.

[0022] <Air conditioner configuration> 1 is a side view of an air conditioning apparatus 1 according to one embodiment. The air conditioning apparatus 1 includes a temperature adjustment module 10, a humidifier 20, a blower 30, an air distribution box 40, and a frame 50.

[0023] The temperature control module 10, the humidifier 20, the blower 30, and the air distribution box 40 are supported by a frame 50. The frame 50, supporting the temperature control module 10, the humidifier 20, the blower 30, and the air distribution box 40, is installed on, for example, a floor surface along a horizontal plane.

[0024] In the air conditioning apparatus 1, air is first taken into the temperature adjustment module 10 by driving the blower 30. The air taken into the temperature adjustment module 10 is sent from the temperature adjustment module 10 to the humidifier 20, passes through the humidifier 20, and is then taken into the blower 30. The air taken into the blower 30 is then sent to the air distribution box 40, and is sent from the air distribution box 40 to the object to be temperature-controlled.

[0025] In Fig. 1, the arrow indicated by the symbol UD indicates the up-down direction. The arrow indicated by the symbol H1 indicates a first horizontal direction on a horizontal plane. Furthermore, the symbol H2 indicates a second horizontal direction on a horizontal plane that is perpendicular to both the up-down direction UD and the first horizontal direction H1. In figures other than Fig. 1 used in the following explanation, arrows or positions indicating the up-down direction UD, the first horizontal direction H1, and the second horizontal direction H2 are shown in appropriate places.

[0026] (Temperature control module) The temperature adjustment module 10 includes an air guide duct section 11, a cooling section 12, and a heating section 13. Fig. 2 is a perspective view of the horizontal section of the air conditioner 1 seen from diagonally above. Fig. 3 is a perspective view of the vertical section of the air conditioner 1 seen from diagonally above. As shown in Figs. 2 and 3, the air guide duct section 11 is formed with an inlet 11A and an outlet 11B.

[0027] In the temperature adjustment module 10, air is introduced into the air guide duct 11 from the inlet 11A. In this embodiment, the air introduced into the air guide duct 11 passes through the cooling section 12 and the heating section 13 in this order. The air can be cooled and / or dehumidified by the cooling section 12, and can also be heated by the heating section 13. Then, the air that has passed through the heating section 13 is sent to the humidifier 20 from the outlet 11B.

[0028] The inlet 11A is provided at the bottom of the air guide duct 11, and the outlet 11B is provided at the top of the air guide duct 11. Therefore, air introduced into the air guide duct 11 flows upward toward the outlet 11B. Specifically, the inlet 11A and the outlet 11B open in opposite directions in the first horizontal direction H1. As a result, the air introduced into the air guide duct 11 flows upward along a crank-shaped or S-shaped path toward the outlet 11B. However, the positions of the inlet 11A and the outlet 11B are not particularly limited, and for example, the positions of the inlet 11A and the outlet 11B in the up-down direction UD do not need to be offset.

[0029] In this embodiment, the inlet 11A is covered with a filter 14 (see FIG. 1). As a result, air from which particles have been removed through the filter 14 is introduced into the inside of the air guide duct portion 11 from the inlet 11A.

[0030] The cooling unit 12 may be an evaporator in a cooling circuit in which a compressor, a condenser, an expansion valve, and an evaporator are connected by piping in that order to circulate a heat medium. Alternatively, the cooling unit 12 may be a heat exchange unit through which cooling water such as brine cooled by the evaporator in the cooling circuit passes. The heater 4 may be an electric heater or the like, or may utilize part of the heat medium that has reached a high temperature in the cooling circuit.

[0031] (humidifier) The humidifier 20 includes a humidifier main body 21 and a flow path member 22. The flow path member 22 forms a flow path for flowing air sent from the temperature adjustment module 10. The humidifier main body 21 supplies steam to the air flowing through the flow path member 22.

[0032] 2 and 3, humidifier main body 21 has a tank 21A that stores water, and a heater unit 21B provided within tank 21A. Humidifier main body 21 generates steam by heating the water within tank 21A with heater unit 21B. Humidifier main body 21 has a release unit 21A1 formed by a portion of tank 21A that opens upward, and releases steam upward from release unit 21A1.

[0033] In this embodiment, humidifier body 21 generates steam by heating water, but there are no particular limitations on the type of humidifier body 21. For example, humidifier body 21 may be of a type that emits mist-like moisture by ultrasonic vibration.

[0034] Flow path member 22 has inlet 22a that receives steam from humidifier body 21, inlet 22b that receives air, and outlet 22c that discharges the air received at inlet 22b. Flow path member 22 is arranged so that inlet 22a faces release section 21A1 of humidifier body 21. In particular, in this embodiment, inlet 22a and release section 21A1 face each other in the vertical direction, and flow path member 22 receives steam from humidifier body 21 from below via inlet 22a.

[0035] Flow path member 22 has wall portion 23 extending from inlet 22b to outlet 22c. Wall portion 23 forms a flow path for air flowing from inlet 22b to outlet 22c. Inlet port 22a is located upstream of outlet 22c in the flow path formed by wall portion 23 so that steam from humidifier main body 21 is supplied to the air in the flow path.

[0036] The wall portion 23 in this embodiment includes a pair of side walls 24, 24, a top wall portion 25, and an end wall portion 26. The pair of side walls 24, 24 are arranged above the humidifier body 21. The pair of side walls 24, 24 rise upward from the humidifier body 21 side and are arranged with a gap between them in the second horizontal direction H2. In this embodiment, the pair of side walls 24, 24 extend parallel to the up-down direction UD.

[0037] The top wall 25 closes the space between the upper ends of the pair of side walls 24. The pair of side walls 24 have one end facing the temperature control module 10 in a first horizontal direction H1 that is perpendicular to the second horizontal direction H2 that separates them on the horizontal plane. The end wall 26 is provided between the other ends of the pair of side walls 24 in the first horizontal direction H1.

[0038] In this embodiment, the lower ends of the pair of side walls 24, 24 contact the upper part of tub 21A of humidifier body 21. Inlet port 22a is located between the lower ends of the pair of side walls 24, 24. More specifically, in this embodiment, the lower ends of the pair of side walls 24, 24 are spaced apart to form inlet port 22a.

[0039] The inlet 22b is formed between one ends of a pair of side wall portions 24, 24 facing the temperature control module 10 in the first horizontal direction H1. Specifically, the inlet 22b is formed by spacing one end of the pair of side wall portions 24, 24 in the first horizontal direction H1 from each other. The outlet 22c is formed in the end wall portion 26. In this embodiment, the outlet 22c is formed in a circular (perfect circle) shape, as an example. The inlet 22b opens to one side in a direction (first horizontal direction H1 in this embodiment) intersecting with the direction in which the inlet 22a and the discharge portion 21A1 face each other (up-down direction UD in this embodiment). The outlet 22c opens to the other side in a direction intersecting with the direction in which the inlet 22a and the discharge portion 21A1 face each other (up-down direction UD in this embodiment). In this embodiment, the inlet 22b, the inlet 22a, and the outlet 22c are arranged in this order from upstream to downstream in the air flow direction. However, the inlet 22b and the receiving port 22a may be formed at the same position in the air flow direction.

[0040] 2, in this embodiment, a flange portion 27 that protrudes outward (toward the opposite side from the flow path side) is provided on each end of a pair of side wall portions 24, 24 that face the temperature adjustment module 10. The flange portion 27 contacts and is fixed to the wall surface of the periphery of the outlet 11B of the temperature adjustment module 10 (air guide duct portion 11). This connects the temperature adjustment module 10 and the flow path member 22 in this embodiment.

[0041] In this embodiment, the air guide duct portion 11 of the temperature adjustment module 10 and the flow path member 22 are connected to form an L-shape. As a result, the air flowing from the temperature adjustment module 10 to the flow path member 22 mainly flows upward in the temperature adjustment module 10, and then flows laterally (horizontally in this example) through the flow path member 22.

[0042] In this embodiment, a tapered portion 23t in which the flow path cross-sectional area gradually decreases toward the outlet 22c is formed at least partially in the wall portion 23 of the flow path member 22. As shown in Figures 1 to 3, in this embodiment, the pair of side wall portions 24, 24 and the top wall portion 25 form the tapered portion 23t. The tapered portion 23t will be described in detail below.

[0043] FIG. 4 is a longitudinal cross-sectional view of the air conditioning apparatus 1. FIG. 5 is a transverse cross-sectional view of the air conditioning apparatus 1. Referring also to FIGS. 4 and 5, in this embodiment, the pair of side wall portions 24, 24 are formed so as to approach each other at least partially toward the outlet 22c. This forms the tapered portion 23t. More specifically, in this embodiment, the pair of side wall portions 24, 24 are formed so as to approach each other toward the outlet 22c over the entire first horizontal direction. Note that the pair of side wall portions 24, 24 may also be configured to have a portion where the flow path cross-sectional area is constant toward the outlet 22c. Furthermore, in this embodiment, the upstream end of the tapered portion 23t forms the inlet 22b.

[0044] The tapered portion 23t guides the air flowing in from the temperature control module 10 toward the center or inside of the outlet 23c. The tapered portion 23t also functions to increase the air flow velocity by gradually reducing the cross-sectional area of ​​the flow path. In this embodiment, when viewed from above, both of the pair of side wall portions 24 are inclined with respect to a line connecting the center of the inlet 22b and the center of the outlet 22c. However, one of the pair of side wall portions 24 may be parallel to the line connecting the center of the inlet 22b and the center of the outlet 22c, and the other of the pair of side wall portions 24 may extend at an angle with respect to the line connecting the center of the inlet 22b and the center of the outlet 22c.

[0045] 4 and 5, the symbol P indicates the portion of the receiving port 22a closest to the inlet 22b. In this embodiment, the portion P of the receiving port 22a closest to the inlet 22b corresponds to the lower end of the inlet 22b. The tapered portion 23t is formed at least in the range between the portion P of the receiving port 22a closest to the inlet 22b and the outlet 22c. In other words, the tapered portion 23t is formed so as to be located at least between the portion P and the outlet 22c. More specifically, the tapered portion 23t in this embodiment is formed at least in the range corresponding to the length of the receiving port 22a in the first horizontal direction H1. In other words, the tapered portion 23t is formed so as to be located at least between both ends of the receiving port 22a in the first horizontal direction H1. More specifically, the tapered portion 23t extends from the upstream end forming the inlet 22b to the downstream end connected to the peripheral edge of the outlet 22c (the terminal wall portion 26 in this example) so as to continuously decrease the cross-sectional area of ​​the flow path, and traverses the entire receiving port 22a.

[0046] 5, the pair of side walls 24 are disposed inward of both ends in the second horizontal direction H2 of the upwardly opening portion of tub 21A. Therefore, the area between the pair of side walls 24 and both ends in the second horizontal direction H2 of the upwardly opening portion of tub 21A is not covered by flow path member 22. In this embodiment, a lid member 70 is provided in the area of ​​the upwardly opening portion of tub 21A that is not covered by flow path member 22. This makes it possible to prevent steam from humidifier body 21 from unnecessarily diffusing.

[0047] In this embodiment, the pair of side walls 24, 24 are rectangular plate-like bodies. This allows the tapered portion 23t to be formed easily and without much effort. Furthermore, the pair of plate-like side walls 24, 24 are formed to approach each other toward the outlet 22c, thereby forming the tapered portion 23t. In this case, the flow path cross-sectional area of ​​the flow path formed between the pair of side walls 24 gradually decreases at a smooth rate, thereby smoothing the flow of air.

[0048] 3 and 4, the humidifier 20 in this embodiment has a partition plate 28 that covers a portion of the outlet 22c. In FIG. 4, the symbol L indicates the position of the upper end of the partition plate 28. The symbol C2 indicates the central axis of the outlet 22c. As is clear from FIG. 4, the partition plate 28 covers the range from the lower end of the outlet 22c to below the center of the outlet 22c in the vertical direction. More specifically, the partition plate 28 extends upward from the lower end of the outlet 22c and covers the range from the lower end to a position below the center of the outlet 22c in the vertical direction.

[0049] Partition plate 28 prevents water condensed from steam from mixing with the air and flowing out of outlet 22c. Air flow is likely to stagnate or become turbulent in the vicinity of tub 21A in humidifier 20. Steam that comes into contact with such stagnation or turbulence is likely to condense (liquefy). Partition plate 28 prevents moisture that may be generated in the vicinity of tub 21A from flowing downstream. This stabilizes humidification control. Partition plate 28 may be a metal plate or a porous material plate.

[0050] Furthermore, in this embodiment, since inlet 22b of flow path member 22 overlaps with the peripheral edge of outlet 11B of temperature adjustment module 10, the opening range of inlet 22b that allows air to flow is smaller than the actual size of inlet 22b. Here, symbol C1 in FIG. 4 indicates the central axis of the opening range of inlet 22b. As is clear from FIG. 4, the vertical center position of the opening range of inlet 22b is located above the vertical center position of outlet 22c. In this case, the amount of air flowing toward humidifier body 21 can be reduced, thereby preventing stagnation and turbulence on the side closer to tank 21A.

[0051] (Blower and air distribution box) As shown in Fig. 1, blower 30 includes a casing 31 and an impeller 32 rotatably housed within casing 31. Blower 30 is, for example, a centrifugal blower, which draws air in the axial direction of impeller 32 and sends it outward in the radial direction. Blower 30 is connected to outlet 22c of humidifier 20 via connecting pipe 60. Blower 30 has an outlet that opens upward, and sends out air upward. Note that blower 30 is not limited to a centrifugal type, and may be an axial flow type.

[0052] The air distribution box 40 is disposed above the blower 30. The air distribution box 40 has one or more supply ports (not shown). The air distribution box 40 receives air sent out from the blower 30 and supplies the air from one or more supply ports to an external temperature-controlled object. The temperature-controlled object may be, for example, a clean room or semiconductor manufacturing equipment, but is not limited to this.

[0053] <Air conditioner operation> Next, the operation of the air conditioner 1 according to this embodiment will be described with reference to FIGS. 2 to 5. FIG.

[0054] In the air conditioning apparatus 1, air is taken into the temperature adjustment module 10 (air guide duct portion 11) from the inlet 11A of the temperature adjustment module 10 by driving the blower 30. The air taken into the temperature adjustment module 10 passes through the cooling portion 12 and the heating portion 13 in this order. During this process, the air can be cooled and / or dehumidified by the cooling portion 12, and can also be heated by the heating portion 13. Then, the air that has passed through the heating portion 13 is sent to the humidifier 20 from the outlet 11B.

[0055] Air sent from the outlet 11B to the humidifier 20 flows from the inlet 22b of the flow path member 22 through the flow path formed by the wall 23 of the flow path member 22. The air that flows into the flow path formed by the wall 23 passes across the humidifier main body 21. At this time, the air is mixed with steam supplied into the flow path from the inlet 22a of the flow path member 22. This humidifies the air. The humidified air then flows toward the outlet 22c.

[0056] In this embodiment, the wall portion 23 forming the air flow path is formed with a tapered portion 23t in which the flow path cross-sectional area gradually decreases toward the outlet 22c.

[0057] Such tapered portion 23t guides the air flowing in from the temperature control module 10 toward the center or inside of the outlet 23c. This prevents the air mixed with steam from colliding with the outer peripheral portion of the outlet 23c (terminal wall portion 26). This prevents the air from stagnating or turbulent. Furthermore, it prevents the air from colliding with the outer peripheral portion of the outlet 23c, causing the steam in the air to condense and resulting in the flow of a large amount of moisture downstream. In particular, the tapered portion 23t can guide the air mixed with steam toward the center or inside of the outlet 23c without creating a structure with an obstacle such as a sharp corner or step, or a portion where the cross-sectional area of ​​the flow path changes suddenly. This effectively prevents the air from stagnating or turbulent.

[0058] Furthermore, the tapered portion 23t can increase the air flow velocity by gradually reducing the cross-sectional area of ​​the flow path, and even if stagnation or turbulence occurs, the increased air flow velocity can suppress the stagnation or turbulence.

[0059] After passing through the humidifier 20, the air is taken in by the blower 30. The air taken in by the blower 30 is then sent to the air distribution box 40, and from the air distribution box 40 it is sent to the temperature control target. The air supplied in this manner has its humidity accurately controlled by the tapered portion 23t provided, and is then supplied to the temperature control target.

[0060] Fig. 6 shows graphs of the humidity of air humidity-controlled by the air conditioner 1 shown in Fig. 1. In detail, Fig. 6(A) is a graph of the humidity of air humidity-controlled by the air conditioner 1, and Fig. 6(B) is a graph of the humidity of air humidity-controlled by an air conditioner according to a comparative example. In the air conditioner of the comparative example, the tapered portion 23t is not formed, and a configuration is adopted in which the components corresponding to the side wall portion 24 extend straight from the temperature adjustment module 10 side in parallel to each other.

[0061] Figures 6(A) and 6(B) show the results of humidity control with a certain humidity (%RH) as the target value, where the vertical axis shows the use humidity (%RH), which is the humidity of the air after it is supplied from the air distribution box 40, and the horizontal axis shows time.

[0062] As shown in Fig. 6(A), humidity control by the air conditioner 1 according to the present embodiment can suppress variation from the target humidity to an extremely small range. On the other hand, in the comparative example, variation from the target humidity is larger than the result of the embodiment. From these results, it can be confirmed that the tapered portion 23t is beneficial.

[0063] In the air conditioner 1 according to the present embodiment described above, the humidifier 20 comprises a humidifier main body 21 that supplies steam, and a flow path member 22. The flow path member 22 has an inlet 22a that receives steam from the humidifier main body 21, an inlet 22b that receives air, and an outlet 22c through which the air received at the inlet 22b flows out. A wall 23 of the flow path member 22 extending from the inlet 22b to the outlet 22c forms a flow path for air flowing from the inlet 22b to the outlet 22c. The inlet 22a is positioned in the flow path upstream of the outlet 22c so as to supply steam to the air. A tapered portion 23t in which the flow path cross-sectional area gradually decreases toward the outlet 22c is formed at least partially in the wall 23.

[0064] In this configuration, the tapered portion 23t guides the air flowing in from the temperature control module 10 toward the center or inside of the outlet 23c. This prevents the air mixed with steam from colliding with the outer peripheral portion of the outlet 23c (the terminal wall portion 26). This prevents the air from stagnating or turbulent. Furthermore, the air from colliding with the outer peripheral portion of the outlet 23c, causing the steam in the air to condense and resulting in the flow of a large amount of moisture downstream, is also prevented. In particular, the tapered portion 23t can guide the air mixed with steam toward the center or inside of the outlet 23c without creating a structure with an obstacle such as a sharp corner or step, or a portion where the cross-sectional area of ​​the flow path changes suddenly. This effectively prevents the air from stagnating or turbulent.

[0065] Furthermore, the tapered portion 23t can increase the air flow velocity by gradually reducing the cross-sectional area of ​​the flow path, and even if stagnation or turbulence occurs, the increased air flow velocity can suppress the stagnation or turbulence.

[0066] Therefore, according to this embodiment, it is possible to effectively prevent stagnation or turbulence from occurring in the flow of air whose humidity is to be controlled, thereby enabling the humidity of the air to be controlled with high precision.

[0067] Furthermore, in this embodiment, tapered portion 23t is formed at least in the range between outlet 22c and portion P of inlet 22a that is closest to inlet 22b. Specifically, humidifier body 21 has release section 21A1 that releases steam, and inlet 22a faces release section 21A1. Inlet 22b opens to one side in a direction (first horizontal direction H1) that intersects with the direction in which inlet 22a and release section 21A1 face each other, and outlet 22c opens to the other side of the intersecting direction. Tapered portion 23t is formed at least in the range in which inlet 22a is located in the intersecting direction (first horizontal direction H1). In this case, it is possible to effectively prevent stagnation or turbulence around the intake port 22a, which may have a significant impact on the humidification state, thereby effectively improving the accuracy of humidity control.

[0068] In this embodiment, the wall portion 23 includes a pair of side walls 24, 24 spaced apart in the second horizontal direction H2. The receiving opening 22a is located between the lower ends of the pair of side walls 24, 24. The pair of side walls 24, 24 are formed to approach each other at least partially toward the outlet 22c, thereby forming a tapered portion 23t. The upstream end of the tapered portion 23t forms the inlet 22b. In this case, the flow path member 22 having the tapered portion 23t does not have a complicated structure, and the tapered portion 23t can be easily formed.

[0069] In this embodiment, the wall portion 23 further includes a top wall portion 25 that closes the space between the upper ends of the pair of side wall portions 24, 24, and the outlet 22c opens in the horizontal direction. In this case, air can be efficiently directed toward outlet 22c. In particular, in this embodiment, air with an upward component may flow into humidifier 20, but top wall 25 can prevent the air from flowing in an undesired direction.

[0070] Humidifier 20 is further provided with partition plate 28, which covers the area from the lower end of outlet 22c to below the center of outlet 22c in the vertical direction. Partition plate 28 prevents water condensed from steam from mixing with the air and flowing out of outlet 22c. Air flow is prone to stagnation and turbulence in the vicinity of tub 21A in humidifier 20. Steam that comes into contact with such stagnation and turbulence is prone to condensation (liquefaction). Partition plate 28 prevents moisture that may be generated in this manner in the vicinity of tub 21A from flowing downstream. This allows for stable humidification control.

[0071] <Modification> Modifications of the above-described embodiment will be described below. Components in the modification that are the same as those in the above-described embodiment will be assigned the same reference numerals, and duplicated descriptions will be omitted.

[0072] (First Modification) 7 is a longitudinal cross-sectional view of an air conditioner 1r1 according to a first modified example. In the first modified example, the structure of the flow path member 22 in the humidifier 20 differs from that of the above-described embodiment. In the flow path member 22 according to the first modified example, the wall portion 23 has a pair of first side wall portions 241, 241 facing each other with a gap in the first horizontal direction H1, and a pair of second side wall portions 242, 242 facing each other with a gap in the second horizontal direction H2.

[0073] The first sidewalls 241, 241 and the second sidewalls 242, 242 are connected to form a flow path with a rectangular cross section. A top wall 25 is provided at the upper ends of the first sidewalls 241, 241 and the upper ends of the second sidewalls 242, 242. A steam receiving port 22a is formed by the lower ends of the first sidewalls 241, 241 and the lower ends of the second sidewalls 242, 242. An inlet 22b is formed in the first sidewall 241 of the first sidewalls 241, 241 that is closer to the temperature control module 10. An outlet 22c is formed in the top wall 25.

[0074] In the first modified example, the portions of first side wall portions 241, 241 above inlet 22b are formed to approach each other toward outlet 22c. This forms tapered portion 23t in which the flow path cross-sectional area gradually decreases toward outlet 23c. In the first modified example, tapered portion 23t is also formed in at least the range between outlet 22c and portion P of receiving port 22a that is closest to inlet 22b.

[0075] In the first modified example, the flow path member 22 is provided so as to protrude upward relative to the temperature adjustment module 10. As a result, the air guide duct portion 11 of the temperature adjustment module 10 and the flow path member 22 are connected to form a crank shape.

[0076] The first modified example described above also provides the same effects as those of the above-described embodiment. In particular, the increased air flow velocity at tapered portion 23t makes it more difficult for air to flow toward humidifier main body 21. This makes it less likely for air to stagnate or turbulent on the humidifier main body 21 side. As a result, the effects of stagnation and turbulence on humidification control can be suppressed.

[0077] (Second Modification) 8 is a longitudinal cross-sectional view of an air conditioner 1r2 according to a second modified example. In the second modified example, the structure of the flow path member 22 in the humidifier 20 differs from that of the above-described embodiment. In the flow path member 22 according to the second modified example, the top wall portion 25 of the wall portion 23 extends obliquely downward from the temperature adjustment module 10 toward the outlet 22c.

[0078] The second modification also provides the same effects as the above-described embodiment, and is advantageous in that condensation of steam above the outlet 22c can be effectively suppressed.

[0079] (Third Modification) 9 is a vertical cross-sectional view of an air conditioner 1r3 according to a third modified example. In the third modified example, the temperature adjustment module 10 and the humidifier 20 are connected to each other in a linear manner, which differs from the above-described embodiment.

[0080] In the third modified example, the same effects as those of the above-described embodiment can be obtained.

[0081] (Fourth Modification) Fig. 10 is a diagram showing a fourth modified example. Specifically, Fig. 10(A) is a vertical cross-sectional view of an air conditioner 1r4 according to the fourth modified example, and Fig. 10(B) is a horizontal cross-sectional view of the air conditioner 1r4.

[0082] In the fourth modified example, the structure of the flow path member 22 in the humidifier 20 differs from that of the above-described embodiment. In the flow path member 22 in the fourth modified example, the wall portion 23 is composed of only a pair of side wall portions 24, 24. The lower ends of the pair of side wall portions 24, 24 form the receiving port 22a. The upstream ends of the pair of side wall portions 24, 24 form the inlet 22b. The downstream ends of the pair of side wall portions 24, 24 form the outlet 22c. The pair of side wall portions 24, 24 are arranged so as to approach each other toward the outlet 22c, thereby forming a tapered portion 23t.

[0083] In the fourth modified example, a pair of side walls 24, 24 are each installed on the upper part of the tub 21A of the humidifier body 21. The pair of side walls 24, 24 are covered from above and horizontally by a case 80. The case 80 is connected to the temperature adjustment module 10 and is also connected to the connecting pipe 60.

[0084] The fourth modification also provides the same effects as the above-described embodiment. Another advantage is that the tapered portion 23t can be formed extremely easily. This is particularly advantageous in that the tapered portion 23t can be easily added to an existing air conditioning device that does not have a tapered portion 23t.

[0085] (Fifth Modification) Fig. 11 is a diagram showing a fifth modified example. Specifically, Fig. 11(A) is a vertical cross-sectional view of an air conditioning apparatus 1r5 according to the fifth modified example. In the fifth modified example, similar to the first modified example, the wall portion 23 has a pair of first side wall portions 241, 241 facing each other with a gap in the first horizontal direction H1, and a pair of second side wall portions 242, 242 facing each other with a gap in the second horizontal direction H2. However, in the fifth modified example, the formation mode of the tapered portion 23t differs from that of the first modified example.

[0086] More specifically, in the fifth modified example, the pair of first side wall portions 241, 241 and the pair of second side wall portions 242, 242 are parallel to each other. A pair of inner members 243, 243 extending toward each other toward the outlet 22c are provided inside such a pair of first side wall portions 241, 241 and second side wall portions 242, 242, thereby forming the tapered portion 23t.

[0087] 11(B) is a modified example of FIG. 11(A). In the configuration of FIG. 11(B), the tapered portion 23t is formed by one inner member 243. The inner member 243 is provided so as to approach one of the pair of first side wall portions 241, 241 (the first side wall portion on the temperature adjustment module 10 side) as it approaches the outlet 22c. In this way, the tapered portion 23t is formed.

[0088] The fifth modified example also provides the same effects as the above-described embodiment. Another advantage is that the tapered portion 23t can be formed extremely easily. This is particularly advantageous in that the tapered portion 23t can be easily added to an existing air conditioning device that does not have a tapered portion 23t. In the example of FIG. 11, the inner member 243 is plate-shaped, but this is not a limitation. The inner member 243 may also be a block-shaped member.

[0089] (Sixth Modification) 12 is a longitudinal cross-sectional view of an air conditioner 1r6 according to a sixth modified example. In the sixth modified example, the structure of flow path member 22 in humidifier 20 differs from that of the above-described embodiment. In flow path member 22 according to the sixth modified example, inlet port 22a is formed between the lower ends of a pair of side wall portions 24, 24 in wall portion 23. Tapered portion 23t is formed only in the portion of wall portion 23 upstream of inlet port 22a.

[0090] In the sixth modified example, the same effects as those of the above-described embodiment can be obtained.

[0091] The above-described embodiment and modifications are merely examples for realizing the present invention, and the present invention can be implemented in various other forms. For example, various modifications, substitutions, omissions, or combinations thereof are possible without departing from the spirit of the present invention. Such modifications, substitutions, omissions, etc. are also included within the scope of the present invention, as well as the scope of the inventions described in the claims and their equivalents. [Explanation of symbols]

[0092] 1...Air conditioning equipment 10...Temperature control module 11...Air guide duct 11A...Inlet 11B…Outlet port 12…Cooling section 13...Heating section 14...Filter 20…humidifier 21...Humidifier body 21A…tank 21A1...Emission part 21B...Heater section 22...Flow path member 22a...Reception entrance 22b…Entrance 22c…Exit 23...Wall part 23t...Tapered section 24...Side wall 25...Top wall part 26...End wall part 27...Flange 28...Partition board 30...Blower 31...Casing 32...impeller 40...Air distribution box 50...frame 60...Connecting pipe 70…Lid material

Claims

1. a humidifier body that supplies steam or mist-like moisture; a flow path member having an inlet for receiving the steam or the atomized water from the humidifier body, an inlet for receiving air, and an outlet for discharging the air received at the inlet, a wall portion of the flow path member extending from the inlet to the outlet forms a flow path for the air flowing from the inlet to the outlet, and the receiving port is positioned so as to supply the steam or the atomized moisture to the air at a position upstream of the outlet in the flow path, The wall portion is at least partially formed with a tapered portion in which the cross-sectional area of ​​the flow path gradually decreases toward the outlet.

2. The humidifier according to claim 1 , wherein the tapered portion is formed at least in a range between a portion of the receiving port closest to the inlet and the outlet.

3. the humidifier body has a release part that releases the steam or the mist of water, The receiving port faces the discharge portion, The inlet is open to one side in a direction intersecting a direction in which the receiving port and the discharge portion face each other, and the outlet is open to the other side in the intersecting direction, The humidifier according to claim 1 , wherein the tapered portion is formed over at least a range corresponding to a length of the receiving port in the intersecting direction.

4. The wall portion includes a pair of side wall portions spaced apart in a horizontal direction, The receiving port is located between the lower ends of the pair of side wall portions, The humidifier according to claim 1 , wherein the pair of side walls are formed to converge toward each other at least partially toward the outlet, thereby forming the tapered portion.

5. the wall portion further includes a top wall portion that closes a space between upper ends of the pair of side wall portions, 5. The humidifier of claim 4, wherein the outlet opens horizontally.

6. The inlet and the outlet are open in a horizontal direction, The humidifier according to claim 4 or 5, further comprising a partition plate covering a range from a lower end of the outlet to a center of the outlet in the up-down direction or lower.

7. The humidifier of claim 1 , wherein an upstream end of said tapered portion forms said inlet.

8. The humidifier according to claim 1 ; a temperature control module; The temperature control module includes an air guide duct section connected to the inlet of the flow path member and causing the air to flow from the inlet into the inside of the flow path member, and a temperature control section arranged inside the air guide duct section and controlling the temperature of the air.

9. The air conditioning apparatus according to claim 8 , wherein the air guide duct portion and the flow path member are connected to form an L-shape or a crank-shape.

10. A flow path member including an inlet for receiving steam or mist-like moisture, an inlet for receiving air, and an outlet for discharging the air received at the inlet, a wall portion of the flow path member extending from the inlet to the outlet forms a flow path for the air flowing from the inlet to the outlet, and the receiving port is positioned so as to supply the steam or the atomized moisture to the air at a position upstream of the outlet in the flow path, The wall portion is at least partially formed with a tapered portion in which the cross-sectional area of ​​the flow path gradually decreases from the inlet to the outlet.

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