Cleaning tool and method for ingot pulling equipment pull cables

Abstract

A cleaning tool for cleaning a pull cable of an ingot pulling apparatus and a method for cleaning a pull cable are disclosed. The cleaning tool includes a chamber for receiving the pull cable. Pressurized fluid is discharged from one or more nozzles to remove debris from the pull cable. The fluid and debris are collected in an exhaust plenum of the cleaning tool and exhausted through an exhaust tube. The cleaning tool includes one or more guides to guide the cleaning tool to an upper segment of the ingot pulling apparatus.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Patent Application No. 63 / 335,447, filed April 27, 2022, and incorporated herein by reference in its entirety.

[0002] The field of the disclosure relates to cleaning tools for cleaning the lifting cables of an ingot pulling apparatus and to methods for cleaning the lifting cables of an ingot pulling apparatus. [Background technology]

[0003] Single crystal silicon ingots may be grown by the so-called Czochralski process, in which a silicon seed crystal is contacted with a silicon melt. The silicon seed crystal is withdrawn from the melt to form a single crystal silicon ingot suspended on the seed crystal. The silicon seed crystal is secured to a seed chuck that is connected to a pulling cable. The pulling cable supports the chuck and the seed crystal (and the ingot during crystal growth). The pulling cable is connected to a pulling mechanism that raises and lowers the pulling cable within the ingot puller.

[0004] During ingot growth, silicon oxide may form in the melt. Silicon oxide may be carried from the melt and deposited in the ingot pulling apparatus, including on the ingot pulling cable. Other deposits, such as carbon, may be carried from the melt and adhere to the pulling cable. Deposits formed on the pulling cable may fall off the pulling cable during ingot growth, which may impair the zero-dislocation growth of the monocrystalline silicon ingot or result in the formation of defects (such as slip or twin lamellae) in the ingot. To prevent silicon oxide from falling into the melt, silicon oxide may be periodically removed from the pulling cable. Cleaning operations that come into contact with the pulling cable may cause damage to the cable. A damaged cable may break during ingot growth, allowing the ingot to fall into the melt.

[0005] A need exists for tools and methods for cleaning lift cables that can remove deposits from the lift cables and that do not damage the lift cables during the cleaning process.

[0006] This section is intended to introduce the reader to various aspects of art that may be related to various aspects of the present disclosure, which are described and / or claimed below. This discussion is believed to be helpful in providing the reader with background information to facilitate a better understanding of the various aspects of the present disclosure. As such, it should be understood that these statements are to be read in this light, and not as admissions of prior art. Summary of the Invention

[0007] One aspect of the disclosure is directed to a cleaning tool for cleaning a lift cable of an ingot lifting apparatus. The cleaning tool includes a frame and a chamber extending through the frame to receive the lift cable. One or more nozzles direct pressurized fluid toward the lift cable. An exhaust flue carries away fluid discharged from the one or more nozzles.

[0008] Yet another aspect of the disclosure is directed to a cleaning tool for cleaning a lifting cable of an ingot lifting apparatus. The cleaning tool includes a frame and a chamber extending through the frame to receive the lifting cable. One or more nozzles direct pressurized fluid at the lifting cable. The tool includes an extendable handle for raising and lowering the one or more nozzles into an upper chamber of the ingot lifting apparatus.

[0009] A further aspect of the disclosure is directed to a method for cleaning a pull cable of an ingot puller. The ingot puller includes a crystal pulling housing defining a growth chamber for pulling a silicon ingot from a silicon melt. The crystal pulling housing includes a lower domed segment and an upper cylindrical segment removably coupled to the lower domed segment. The pull cable is disposed within a chamber of a cleaning tool. Pressurized fluid is directed toward the pull cable. The pressurized fluid directed toward the pull cable is removed through an exhaust plenum of the cleaning tool for processing the pressurized fluid.

[0010] Various refinements exist in the features described in relation to the above-mentioned aspects of the disclosure. Likewise, further features may be incorporated into the above-mentioned aspects of the disclosure. These refinements and additional features may exist individually or in any combination. For example, various features described below in relation to any of the illustrated embodiments of the disclosure may be incorporated into any of the above-mentioned aspects of the disclosure, alone or in any combination. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a cross-sectional view of an ingot pulling apparatus during ingot growth. [Diagram 2] FIG. 2 is a schematic diagram of an ingot pulling apparatus having an upper segment and a lower segment that is removably connected to the upper segment. [Diagram 3]FIG. 3 is a perspective view of a cleaning tool for cleaning the pulling cable of the ingot puller. [Figure 4] FIG. 4 is another perspective view of the cleaning tool without the guide shown. [Diagram 5] FIG. 5 is a top view of the body of the cleaning tool. [Figure 6] FIG. 6 is a front view of the cleaning tool. [Figure 7] FIG. 7 is a top view of the cleaning tool. [Figure 8] FIG. 8 is a side view of the cleaning tool.

[0012] Corresponding reference characters indicate corresponding parts throughout the drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The present disclosure provides a cleaning tool for cleaning the pulling cable of an ingot puller and a method for cleaning the pulling cable of an ingot puller. An example of an ingot puller (or simply an "ingot puller") having a pulling cable is shown generally as "100" in Figure 1. The ingot puller 100 includes a crucible assembly 102 for holding a melt 104 of semiconductor or solar grade material silicon. The crucible assembly 102 is supported by a susceptor 106.

[0014] The ingot pulling apparatus 100 includes a crystal pulling housing 108 that defines a growth chamber for pulling a silicon ingot from a silicon melt 104 along a pull axis A. Referring now to FIG. 2, the growth chamber 152 includes two portions: a lower growth chamber 155 (or simply "lower chamber") and an upper growth chamber 165 (or simply "upper chamber") disposed above the lower growth chamber 155. The hot zone (e.g., crucible, reflector, susceptor, heater, etc.) of the ingot pulling apparatus 100 is disposed within the lower chamber 155. During ingot growth, the ingot 113 is pulled through the lower chamber 155 and continues to be pulled through the upper chamber 165 as the ingot lengthens.

[0015] The crystal pulling housing 108 includes a dome-shaped lower segment 119 that defines a lower chamber 155 and an upper segment 140 that defines an upper chamber 165. The lower dome-shaped segment 119 includes a dome-shaped portion 169 that tapers in size to the diameter of the upper segment 140. The upper segment 140 is generally cylindrical and includes a lower end 159 and an upper end 163. The upper segment 140 of the crystal pulling housing 108 is removably coupled to the lower segment 119 (e.g., by fasteners, gaskets, etc.). For example, the lower segment 119 may be lowered away from the upper segment 140 so that a cleaning tool 200, described below, can be inserted into the upper segment 140 to clean the pulling cable 118.

[0016] A crucible assembly 102 (FIG. 1) is disposed within the lower chamber 155. The crucible assembly 102 has sidewalls 131 and a floor 129, and rests on a susceptor 106. The susceptor 106 is supported by a shaft 105. The susceptor 106, crucible assembly 102, shaft 105, and ingot 113 share a common longitudinal axis or "pull axis" A.

[0017] A pulling mechanism 114 is provided within the ingot pulling apparatus 100 for growing and pulling an ingot 113 from the melt 104. The pulling mechanism 114 includes a pulling cable 118, a seed holder or chuck 120 coupled to one end of the pulling cable 118, and a seed crystal 122 coupled to the chuck 120 for initiating crystal growth. One end of the pulling cable 118 is connected to a pulley (not shown) or drum (not shown) of the pulling mechanism 114, and the other end is connected to the chuck 120, which holds the seed crystal 122. The pulling mechanism 114 includes a motor that rotates the pulley or drum.

[0018] In operation, the seed crystal 122 is lowered to contact the surface 111 of the melt 104. The pulling mechanism 114 is operated to raise the seed crystal 122. As a result, the single crystal ingot 113 is pulled from the melt 104.

[0019] During heating and crystal pulling, a crucible drive unit 107 (e.g., a motor) rotates the crucible assembly 102 and the susceptor 106. A lift mechanism 112 raises and lowers the crucible assembly 102 along the pulling axis A during the growth process. For example, the crucible assembly 102 may be in a lowest position (near the bottom heater 126) where a charge of solid phase silicon 133 pre-added to the crucible assembly 102 is melted. Crystal growth begins by contacting the melt 104 with the seed crystal 122 and lifting the seed crystal 122 by the pulling mechanism 114.

[0020] The crystal drive unit (not shown) may also rotate the pulling cable 118 and ingot 113 in a direction opposite (e.g., counter-rotation) from the direction that the crucible drive unit 107 rotates the crucible assembly 102. In embodiments using equal rotation, the crystal drive unit may rotate the pulling cable 118 in the same direction that the crucible drive unit rotates the crucible assembly 102.

[0021] The ingot pulling apparatus 100 includes bottom insulation 110 and side insulation 124 to retain heat within the puller 100. In the illustrated embodiment, the ingot pulling apparatus 100 includes a bottom heater 126 disposed below the crucible floor 129. The crucible assembly 102 may be moved relatively close to the bottom heater 126 to melt the solid silicon charge in the crucible assembly 102.

[0022] According to the Czochralski single crystal growth process, a quantity of solid-phase silicon, such as polycrystalline silicon or "polysilicon," is first charged into the crucible assembly 102. Semiconductor or solar-grade solid silicon introduced into the crucible assembly 102 is melted by heat provided by one or more heating elements. Once the melt 104 is fully formed, a seed crystal 122 is lowered into contact with the surface 111 of the melt 104. A pulling mechanism 114 is actuated to pull the seed crystal 122 from the melt 104. The resulting ingot 113 includes a crown portion 142 where the ingot transitions and tapers outward from the seed crystal 122 to reach a target diameter. The ingot 113 includes a constant diameter portion 145 or cylindrical "body" of the crystal that is grown by increasing the pulling rate. The body 145 of the ingot 113 has a relatively constant diameter. The ingot 113 includes a tail or end cone (not shown) where the ingot tapers in diameter after the body 145. Once the diameter is small enough, the ingot 113 is separated from the melt 104.

[0023] The crystal growth process may be a batch process in which solid silicon is initially added to the crucible assembly 102 to form a silicon melt, and no additional solid silicon is added to the crucible assembly 102 during crystal growth. In other embodiments, the crystal growth process is a continuous Czochralski process in which silicon is added to the crucible assembly during ingot growth.

[0024] The ingot pulling apparatus 100 includes a side heater 135 and a susceptor 106 surrounding the crucible assembly 102 to maintain the temperature of the melt 104 during crystal growth. The side heater 135 is positioned radially outward relative to the crucible sidewall 131 as the crucible assembly 102 moves up and down the pulling axis A. The side heater 135 and the bottom heater 126 may be any type of heater that enables the side heater 135 and the bottom heater 126 to operate as described herein. In some embodiments, the heaters 135, 126 are resistive heaters. The side heater 135 and the bottom heater 126 may be controlled by a control system (not shown) such that the temperature of the melt 104 is controlled throughout the pulling process.

[0025] The ingot pulling apparatus 100 may include a heat shield 151. The heat shield 151 may cover the ingot 113 and may be disposed within the crucible assembly 102 during crystal growth. The ingot pulling apparatus 100 may include an inert gas system to introduce and withdraw an inert gas, such as argon, from the growth chamber 152.

[0026] The illustrated ingot pulling apparatus 100 is an example, and the cleaning tool 200 described below may generally be used to clean the pulling cable 118 of any ingot pulling apparatus that includes a pulling cable 118. The pulling cable 118 may include a wire or a series of wires (e.g., stranded wire) that are joined to form a cable. The pulling cable 118 may be made of tungsten, such as stranded tungsten wire.

[0027] 3, a cleaning tool for cleaning a lifting cable of an ingot lifting apparatus is generally designated "200". The cleaning tool 200 includes a frame 210 and a chamber 214 extending through the frame 210 for receiving the lifting cable 118. The frame 210 may generally be any structure that defines the chamber 214 in which the lifting cable 118 is received. For example, the frame 210 may be a series of wires, cables, rods, plates, or other frame members through which the lifting cable 118 extends. In the illustrated embodiment, the frame 210 includes a body 220. The body 220 has a top 223 and a floor 225. One or more sidewalls 229 partially circumferentially surround the body 220. The chamber 214 extends from the top 223 to the floor 225. A slot 233 extends through the one or more sidewalls 229 and through the top 223 and the floor 225. Slot 233 provides an opening through which lift cable 118 can pass to receive lift cable 118 within chamber 214 .

[0028] The cleaning tool 200 includes one or more outer guides 240, 242, 244 that guide the cleaning tool 200 into the upper chamber 165 ( FIG. 2 ) of the ingot pulling apparatus 100 during cleaning of the pulling cables 118. In the illustrated embodiment, the one or more outer guides include three guides: a first guide 240, a second guide 242, and a third guide 244. The guides 240, 242, 244 contact an inner surface of the upper chamber 165 and move the chamber 214 into alignment with the pulling cables 118. The outer guides 240, 242, 244 are disposed radially outward relative to the body 220.

[0029] In the illustrated embodiment, the outer guides 240, 242, 244 are each arms that extend radially outward from the body 220. The outer guides 240, 242, 244 may have other shapes, such as one or more rings that surround the frame 210 (i.e., the body 220). In the illustrated embodiment, the one or more guides comprise three guides 240, 242, 244. In general, unless otherwise stated, any number of guides that enables the cleaning tool to function as described herein may be used.

[0030] Each guide 240, 242, 244 includes a roller wheel (or simply "roller") 258, 260, 262 (FIG. 7) at a distal end of the guide 240, 242, 244. Each roller 258, 260, 262 defines an arc of rotation perpendicular to the inner surface of the upper chamber 140 (FIG. 2) at the point where the respective roller 258, 260, 262 contacts the inner surface of the upper chamber 165. The rollers 258, 260, 262 aid in moving the cleaning tool 200 up and down the upper chamber 165 to clean the lifting cable 118 while reducing or eliminating contact with the lifting cable 118.

[0031] 5-6, the cleaning tool 200 includes one or more nozzles 252, 254 for directing pressurized fluid toward the lift cable 118 (FIG. 3). In general, any nozzle that directs pressurized fluid toward the lift cable 118 (e.g., increases the velocity of the fluid) may be used. In the illustrated embodiment, a first nozzle 252 and a second nozzle 254 are shown, although in other embodiments a single nozzle or two or more nozzles may be used.

[0032] Each nozzle 252, 254 is connected to a source of pressurized fluid (e.g., pressurized air or other gas such as argon or nitrogen) by a conduit 265 (FIG. 8). The cleaning tool 200 may include ports 270, 272 (FIG. 6) for connecting to a source of pressurized fluid. The pressurized fluid is directed to the lifting cable 118 through the nozzles 252, 254. The pressurized fluid may be controlled by a valve in one or more supply conduits integrated with the source of pressurized fluid. After the fluid comes into contact with the lifting cable 118, it enters an exhaust flue 276 (FIG. 5) that carries the fluid away. The exhaust flue 276 includes an exhaust plenum 279 within the body 220 of the tool 200 and an exhaust pipe 281 in fluid communication with the exhaust plenum 279. The exhaust plenum 279 is defined by the top 223, the floor 225, and one or more sidewalls 229 of the body 220. An exhaust pipe 281 is in fluid communication with the exhaust plenum 279 and extends downwardly from the body 220 .

[0033] The exhaust tube 281 may also be used as a handle for raising and lowering the body 220 within the upper chamber 165 (FIG. 2) of the ingot pulling apparatus 100 (i.e., for raising and lowering one or more nozzles 252, 254 relative to the pulling cable 118). The handle 281 may be telescopic. For example, the handle 281 may include a telescopic portion 284 (FIG. 4) that slides within the outer portion 286 to contract or extend the handle 281. The cleaning tool 200 may include a lock 288 for securing the telescopic portion 284 relative to the outer portion 286 (e.g., when the tool 200 is positioned below the upper chamber 165 and the pulling cable 118 is inserted into the chamber 214 through the slot 233 (FIG. 3)).

[0034] The exhaust 281 may be fluidly connected to one or more filters and / or a vacuum source, such as by being connected to an exhaust port 291. The exhaust 281 defines a fluid passageway extending from an inlet 293 (FIG. 4) to the exhaust port 291.

[0035] The cleaning tool 200 is used to clean the ingot pulling apparatus 100. The cleaning tool 200 and the apparatus 100 together may form part of an ingot pulling apparatus system 50 for producing single crystal silicon ingots and cleaning the system after use.

[0036] To clean the pulling cable 118, the lower dome-shaped segment 119 of the crystal pulling housing 108 is separated from the upper segment 140. The exhaust tube 281 is fluidly connected to a vacuum source (e.g., a blower or pump that creates a vacuum). The fluid ports 270, 272 (FIG. 6) are connected to a source of pressurized fluid (e.g., pressurized air). The pulling cable 118 is moved to a lowered position to allow access to the pulling cable 118. The cleaning tool 200 is moved so that the pulling cable 118 is positioned within the chamber 214 of the cleaning tool 200 through the slot 233. The cleaning tool 200 is moved up and down relative to the pulling cable 118 (i.e., from the lower end 159 toward the upper end 166 of the upper cylindrical segment 140) while pressurized fluid is directed at the pulling cable 118 through the nozzles 252, 254. The cleaning tool 200 may be raised through the upper segment 140 of the ingot pulling apparatus 100 by unlocking the lock 288 and extending the handle / exhaust tube 281. The guides 240, 242, 244 contact the inner surface of the upper segment 140 and aid in aligning the chamber 214 of the tool 200 with the lifting cable 118. The guides 240, 242, 244 rotate as the tool 200 is moved up or down to facilitate movement of the tool 200 through the cylindrical upper segment 140.

[0037] As the pressurized fluid is discharged from the first and second nozzles 252, 254, the fluid impacts the lift cable 118 causing debris and deposits to break off from the lift cable 118. The discharged fluid and debris material enters an exhaust plenum 279 within the body 220 of the tool 200. The discharged fluid and debris is drawn into an exhaust tube 281 and discharged through a port 291 for further processing (e.g., filtration).

[0038] The pulling cables 118 may be cleaned after the ingots are removed from the ingot pulling apparatus 100 and the ingot pulling apparatus 100 is cooled to ambient temperature. In other embodiments, the pulling cables are cleaned after a series of ingots have been run.

[0039] Compared with conventional cleaning tools and methods, the cleaning tool and method for cleaning the lifting cable of the present disclosure have several advantages. The cleaning tool removes debris from the lifting cable without the debris falling into the upper segment and the lower segment of the puller located below the lifting cable. Instead, the debris is pulled through the exhaust plenum and exhaust pipe for further processing. The guide of the cleaning tool allows the cleaning tool to clean the lifting cable without the cleaning tool contacting and damaging the cable. The rollers located on the guide allow the cleaning tool to be lifted more easily in the upper segment of the ingot puller. The extendable handle allows the cleaning tool to move upward in the upper segment of the ingot puller, and the lock allows the length of the upper segment to be fixed (e.g., when moving the cleaning tool below the upper chamber or when removing the tool from below the upper chamber after cleaning is completed). The use of two or more nozzles on the cleaning tool allows two or more sides of the cable to be cleaned simultaneously, improving the cleaning efficiency of the tool.

[0040] Working Example The processes of the present disclosure are further illustrated by the following examples, which should not be construed in a limiting sense.

[0041] Example 1: Ingot defect rate with and without cleaning tool The pulling cables of six ingot pullers similar to the schematic apparatus of Figure 1 were cleaned using the cleaning tool shown in Figure 3. The cleaning tool was used before each ingot growth for a period of six months. The percentage of ingots in which twin / slip was observed in those whose pulling cables were cleaned before ingot growth decreased from 1.0% to 0.3% compared to ingots whose pulling cables were not cleaned. In addition, the crystal full bottom rate (a condition in which the entire crystal without dislocations in the main body is formed) improved from 77.7% to 84.55%.

[0042] As used herein, the terms "about," "substantially," "essentially," and "approximately," when used in connection with a range of a dimension, density, temperature, or other physical or chemical property or characteristic, are meant to encompass variations that may exist at the upper and / or lower limits of the range of the property or characteristic, including, for example, variations that result from rounding, measurement methods, or other statistical variations.

[0043] When introducing elements of the present disclosure or embodiments of the present disclosure, the articles "a," "an," "the," and "said" are intended to mean that there are one or more of the elements. The terms "comprising," "including," "containing," and "having" are intended to be inclusive and mean that there may be additional elements other than the listed elements. The use of specific orientation terms (e.g., "top," "bottom," "side") is for convenience of description and does not require a specific orientation of the articles being described.

[0044] Because various changes may be made in the structure and methods described above without departing from the scope of the present disclosure, it is intended that all matter contained in the above description and shown in the accompanying drawings be interpreted in an illustrative and not a limiting sense.

Claims

1. A cleaning tool for cleaning the lifting cable of an ingot lifting device, wherein the cleaning tool is The frame that houses the main body, A chamber extending through the main body to receive the aforementioned lifting cable, One or more nozzles for directing pressurized fluid towards the lifting cable, An exhaust gas supply pipe for carrying out the fluid discharged from one or more nozzles, During cleaning of the lifting cable, one or more outer guides guide the cleaning tool into the upper chamber of the ingot lifting device, wherein the one or more outer guides are positioned radially outward from the main body, and each of the one or more outer guides is provided with a roller for contacting the inner surface of the upper chamber of the ingot lifting device, and A cleaning tool equipped with [features / equipment].

2. The main body has a base and a top, The cleaning tool according to claim 1, wherein the chamber extends through the floor portion and the top portion.

3. The aforementioned exhaust air supply pipe is The exhaust plenum inside the main body, An exhaust pipe extending from the main body, wherein the exhaust pipe is in fluid communication with the exhaust plenum. The cleaning tool according to claim 2, comprising:

4. The cleaning tool according to claim 1, wherein the cleaning tool has an extendable handle for raising and lowering one or more nozzles into the upper chamber of the ingot lifting device.

5. The cleaning tool according to claim 4, wherein the retractable handle is equipped with an exhaust pipe for carrying out the fluid discharged from one or more nozzles.

6. The cleaning tool according to claim 1, wherein the one or more nozzles comprises a first nozzle and a second nozzle.

7. An ingot pulling system for manufacturing single-crystal silicon ingots, and an ingot pulling system for cleaning the system after use, The ingot lifting system is Ingot lifting device, The cleaning tool according to claim 1 and Equipped with, The ingot lifting device is A crucible assembly for holding molten silicon, A crystal pulling housing defining a growth chamber for pulling a silicon ingot from the silicon melt, wherein the crucible assembly is located within the growth chamber and comprises the crystal pulling housing, A lifting mechanism equipped with a lifting cable Equipped with, The crystal pulling housing is Lower dome-shaped segment, The upper cylindrical segment is detachably connected to the lower dome-shaped segment. A system that has

8. A cleaning tool for cleaning the lifting cable of an ingot lifting device, wherein the cleaning tool is Frame and, A chamber extending through the frame to receive the aforementioned lifting cable, One or more nozzles for directing the pressurized fluid towards the lifting cable, A retractable handle for raising and lowering one or more nozzles into the upper chamber of the ingot lifting device, wherein the retractable handle includes a retractable portion that makes the retractable handle retractable and A system equipped with these features.

9. The aforementioned retractable handle is equipped with an exhaust pipe, The cleaning tool according to claim 8, wherein the exhaust pipe has a fluid passage through which the fluid discharged from one or more nozzles passes.

10. The cleaning tool according to claim 8, further comprising one or more external guides for guiding the cleaning tool into the upper chamber of the ingot lifting device during cleaning of the lifting cable.

11. A cleaning tool for cleaning the lifting cable of an ingot lifting device, wherein the cleaning tool comprises: A frame having the main body, A chamber extending through the main body to receive the aforementioned lifting cable, One or more nozzles for directing pressurized fluid towards the lifting cable, A retractable handle for raising and lowering one or more nozzles into the upper chamber of the ingot lifting device, During cleaning of the lifting cable, one or more outer guides guide the cleaning tool into the upper chamber of the ingot lifting device, wherein the one or more outer guides are positioned radially outward from the main body, and each of the one or more outer guides is provided with a roller for contacting the inner surface of the upper chamber of the ingot lifting device, and A cleaning tool equipped with [features / equipment].

12. An ingot pulling system for manufacturing single-crystal silicon ingots, and an ingot pulling system for cleaning the system after use, The ingot lifting system is Ingot lifting device, The cleaning tool according to claim 8 and Equipped with, The ingot lifting device is A crucible assembly for holding molten silicon, A crystal pulling housing defining a growth chamber for pulling a silicon ingot from the silicon molten liquid, wherein the crucible assembly is located within the growth chamber and comprises the crystal pulling housing, A lifting mechanism having a lifting cable Equipped with, The crystal pulling apparatus housing is Lower dome-shaped segment, The upper cylindrical segment is detachably connected to the lower dome-shaped segment. A system that includes these features.

13. The main body has a base portion and a top portion, The cleaning tool according to claim 11, wherein the chamber extends through the floor portion and the top portion.

14. comprising an exhaust gas supply pipe for carrying out the fluid discharged from one or more nozzles, The aforementioned exhaust air supply pipe is The exhaust plenum inside the main body, An exhaust pipe extending from the main body, wherein the exhaust pipe is in fluid communication with the exhaust plenum. The cleaning tool according to claim 13, comprising:

15. The cleaning tool according to claim 11, wherein the extendable handle is equipped with an exhaust pipe for carrying out the fluid discharged from one or more nozzles.

16. The cleaning tool according to claim 11, wherein the one or more nozzles comprises a first nozzle and a second nozzle.

17. An ingot pulling system for manufacturing a single crystal silicon ingot, the ingot pulling system for cleaning the system after use, The ingot lifting system is Ingot lifting device, The cleaning tool according to claim 11 and Equipped with, The ingot lifting device is A crucible assembly for holding molten silicon, A crystal pulling housing defining a growth chamber for pulling a silicon ingot from the silicon melt, wherein the crucible assembly is located within the growth chamber and comprises the crystal pulling housing, A lifting mechanism equipped with a lifting cable Equipped with, The crystal pulling housing is Lower dome-shaped segment, The upper cylindrical segment is detachably connected to the lower dome-shaped segment. A system that includes these features.

18. A method for cleaning the lifting cable of an ingot lifting apparatus, the ingot lifting apparatus comprising a crystal lifting housing defining a growth chamber for lifting a silicon ingot from a silicon molten mass, the crystal lifting housing comprising a lower dome-shaped segment and an upper cylindrical segment detachably connected to the lower dome-shaped segment, The aforementioned method, The aforementioned lifting cable is placed inside the chamber of the cleaning tool. Direct the pressurized fluid towards the lifting cable, The pressurized fluid directed towards the lifting cable is removed via the exhaust plenum of the cleaning tool for handling the pressurized fluid. The cleaning tool is raised and lowered within the upper cylindrical segment of the ingot lifting device by extending and retracting the retractable handle, and the retractable handle is provided with an extendable section that makes the retractable handle extendable and retractable. A method that includes doing so.

19. The method of claim 18, comprising moving the cleaning tool relative to the lifting cable while directing the pressurized fluid toward the lifting cable and removing the pressurized fluid through the exhaust plenum to process the pressurized fluid.

20. The method according to claim 19, comprising moving the cleaning tool through the upper cylindrical segment of the ingot lifting device.

21. The cleaning tool comprises one or more external guides, The method according to claim 20, wherein the one or more outer guides guide the cleaning tool within the upper cylindrical segment.

22. The method according to claim 20, comprising separating the upper cylindrical segment from the lower dome-shaped segment and moving the cleaning tool from the lower end to the upper end of the upper cylindrical segment.

23. The cleaning tool comprises one or more external guides, The method according to claim 22, wherein the one or more outer guides guide the cleaning tool within the upper cylindrical segment.

24. The method according to claim 19, wherein the pressurized fluid is air.

25. The method according to claim 18, wherein the lifting cable comprises a plurality of tungsten wires.

26. The cleaning tool is The frame, and here the chamber extends through the frame, One or more nozzles for directing pressurized fluid towards the lifting cable, An exhaust pipe for carrying out the fluid discharged from one or more nozzles The method according to claim 18, comprising:

27. ​​The method according to claim 26, wherein the one or more nozzles comprises a first nozzle and a second nozzle.

28. The method according to claim 26, wherein the frame comprises a main body, the main body having a floor portion and a top portion, and the chamber extends through the floor portion and the top portion.

29. The exhaust air supply pipe is The exhaust plenum inside the main body, An exhaust pipe extending from the main body, wherein the exhaust pipe is in fluid communication with the exhaust plenum. The method according to claim 28, comprising:

30. The method according to claim 26, wherein the cleaning tool comprises one or more outer guides for guiding the cleaning tool into the upper chamber of the ingot lifting device during cleaning of the lifting cable, the frame comprises a body, the chamber extends through the body, and the one or more outer guides are arranged radially outward from the body.

31. The method according to claim 30, wherein each of the one or more outer guides is provided with a roller, the roller contacts the inner surface of the upper chamber of the ingot lifting device.

32. The method according to claim 18, wherein the retractable handle comprises an exhaust pipe, the exhaust pipe having a fluid passage through which a fluid discharged from one or more nozzles passes.

33. A method for cleaning the lifting cable of an ingot lifting apparatus, the ingot lifting apparatus comprising a crystal lifting housing defining a growth chamber for lifting a silicon ingot from a silicon molten, the crystal lifting housing comprising a lower dome-shaped segment and an upper cylindrical segment detachably connected to the lower dome-shaped segment, The aforementioned method, The aforementioned lifting cable is placed inside the chamber of the cleaning tool, where the cleaning tool is located A frame comprising a main body, wherein the chamber extends through the main body, One or more nozzles, An exhaust supply pipe for carrying out fluid discharged from one or more nozzles, wherein the exhaust supply pipe includes an exhaust plenum within the main body, During cleaning of the lifting cable, one or more outer guides guide the cleaning tool into the upper cylindrical segment of the ingot lifting device, wherein the one or more outer guides are positioned radially outward from the main body, and each of the one or more outer guides is provided with a roller that contacts the inner surface of the upper cylindrical segment of the ingot lifting device. Equipped with, The pressurized fluid is directed towards the lifting cable through one or more nozzles. The pressurized fluid directed towards the lifting cable is removed via the exhaust plenum of the cleaning tool for handling the pressurized fluid. A method that includes doing so.

34. The method of claim 33, comprising moving the cleaning tool relative to the lifting cable while directing the pressurized fluid toward the lifting cable and removing the pressurized fluid through the exhaust plenum to process the pressurized fluid.

35. The method according to claim 34, comprising moving the cleaning tool through the upper cylindrical segment of the ingot lifting device.

36. The method of claim 35, comprising separating the upper cylindrical segment from the lower dome-shaped segment and moving the cleaning tool from the lower end to the upper end of the upper cylindrical segment.

37. The method according to claim 34, wherein the pressurized fluid is air.

38. A cleaning tool for cleaning the lifting cable of an ingot lifting device, The aforementioned cleaning tool is A frame, wherein the frame comprises a main body, and the main body comprises a base portion and a top portion, A chamber extending through the frame to receive the lifting cable, the chamber extending through the floor and the top, One or more nozzles for directing pressurized fluid towards the lifting cable, An exhaust pipe for carrying out the fluid discharged from one or more nozzles A cleaning tool equipped with [features / equipment].

39. The exhaust air supply pipe is The exhaust plenum inside the main body, An exhaust pipe extending from the main body, wherein the exhaust pipe is in fluid communication with the exhaust plenum. The cleaning tool according to claim 38, comprising:

40. The cleaning tool according to claim 38, wherein the cleaning tool comprises one or more external guides that guide the cleaning tool into the upper chamber of the ingot lifting device while cleaning the lifting cable.

41. The frame comprises a main body, and the chamber extends through the main body, The cleaning tool according to claim 40, wherein the one or more outer guides are arranged radially outward from the main body.

42. The cleaning tool according to claim 38, wherein the cleaning tool has an extendable handle for raising and lowering one or more nozzles into the upper chamber of the ingot lifting device.

43. The cleaning tool according to claim 42, wherein the extendable handle is equipped with an exhaust pipe for carrying out fluid discharged from one or more nozzles.

44. The cleaning tool according to claim 38, wherein the one or more nozzles comprises a first nozzle and a second nozzle.

45. An ingot pulling system for manufacturing a single crystal silicon ingot, the ingot pulling system for cleaning the system after use, The ingot lifting system is Ingot lifting device, The cleaning tool according to claim 38 and Equipped with, The ingot lifting device is A crucible assembly for holding molten silicon, A crystal pulling housing defining a growth chamber for pulling a silicon ingot from the silicon melt, wherein the crucible assembly is located within the growth chamber and comprises the crystal pulling housing, A lifting mechanism equipped with a lifting cable Equipped with, The crystal pulling housing is Lower dome-shaped segment, The upper cylindrical segment is detachably connected to the lower dome-shaped segment. A system that includes these features.

46. A cleaning tool for cleaning the lifting cable of an ingot lifting device, wherein the cleaning tool comprises: Frame and, A chamber extending through the frame to receive the aforementioned lifting cable, One or more nozzles for directing pressurized fluid towards the lifting cable, A retractable handle for raising and lowering one or more nozzles into the upper chamber of the ingot lifting device A cleaning tool equipped with [features / equipment].

47. The cleaning tool according to claim 46, wherein the extendable handle comprises an exhaust pipe, the exhaust pipe having a fluid passage through which fluid discharged from one or more nozzles passes.

48. The cleaning tool according to claim 46, further comprising one or more external guides for guiding the cleaning tool into the upper chamber of the ingot lifting device during cleaning of the lifting cable.

49. An ingot pulling system for manufacturing a single crystal silicon ingot, the ingot pulling system for cleaning the system after use, The ingot lifting system is Ingot lifting device, The cleaning tool according to claim 46 and Equipped with, The ingot lifting device is A crucible assembly for holding molten silicon, A crystal pulling housing defining a growth chamber for pulling a silicon ingot from the silicon molten liquid, wherein the crucible assembly is located within the growth chamber and comprises the crystal pulling housing, A lifting mechanism having a lifting cable Equipped with, The crystal pulling apparatus housing is Lower dome-shaped segment, The upper cylindrical segment is detachably connected to the lower dome-shaped segment. A system that includes these features.

50. A method for cleaning the lifting cable of an ingot lifting apparatus, the ingot lifting apparatus comprising a crystal lifting housing defining a growth chamber for lifting a silicon ingot from a silicon molten mass, the crystal lifting housing comprising a lower dome-shaped segment and an upper cylindrical segment detachably connected to the lower dome-shaped segment, The aforementioned method, The upper cylindrical segment is separated from the lower dome-shaped segment, The aforementioned lifting cable is placed inside the chamber of the cleaning tool. Direct the pressurized fluid towards the aforementioned lifting cable. To process the pressurized fluid, the pressurized fluid directed towards the lifting cable is removed via the exhaust plenum of the cleaning tool. The cleaning tool is moved relative to the lifting cable, directing the pressurized fluid towards the lifting cable and removing the pressurized fluid through the exhaust plenum for processing the pressurized fluid. The cleaning tool is moved through the upper cylindrical segment of the ingot lifting device, and the cleaning tool is provided with one or more outer guides, which guide the cleaning tool within the upper cylindrical segment. A method that includes doing so.

51. The method according to claim 50, wherein the cleaning tool comprises a body, the chamber extends through the body, and the one or more outer guides are arranged radially outward from the body.

52. The method according to claim 51, wherein each of the one or more outer guides comprises a roller that contacts the inner surface of the upper cylindrical segment of the ingot lifting device.

53. The method according to claim 50, wherein the cleaning tool comprises one or more nozzles for directing the pressurized fluid onto the lifting cable.

54. The method according to claim 53, wherein the one or more nozzles include a first nozzle and a second nozzle that direct the pressurized fluid toward the lifting cable.

55. The cleaning tool is A main body comprising a base portion and a top portion, the chamber extending through the base portion and the top portion, and the main body, An exhaust pipe for carrying out pressurized fluid directed towards the aforementioned lifting cable and Equipped with, The aforementioned exhaust air supply pipe is Exhaust plenum, An exhaust pipe extending from the main body, wherein the exhaust pipe is in fluid communication with the exhaust plenum. Equipped with, The method according to claim 50, wherein the pressurized fluid directed toward the lifting cable is removed through the exhaust pipe after passing through the exhaust plenum.

56. The method according to claim 50, wherein moving the cleaning tool relative to the lifting cable includes extending the retractable handle of the cleaning tool.

57. The method according to claim 56, wherein the retractable handle is provided with an exhaust pipe, and pressurized fluid directed toward the lifting cable is removed through the exhaust pipe.

58. The method according to claim 56, wherein moving the cleaning tool relative to the lifting cable includes extending the telescopic portion of the telescopic handle.

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