Discharge head, liquid discharge apparatus, and article manufacturing method

Abstract

To provide a technique advantageous for achieving both suppression of crosstalk and refill performance.SOLUTION: The discharge head includes a plurality of nozzles, a common flow path communicating with each of the plurality of nozzles, a plurality of flow paths communicating with a tank storing a liquid and the common flow path, and a plurality of porous bodies disposed inside the plurality of nozzles. The plurality of flow paths include a first flow path and a second flow path having a cross-sectional area larger than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, and the second porous body is disposed inside a nozzle facing an inlet of the second flow path via the common flow path among the plurality of nozzles.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a discharge head, a liquid discharge device, and an article manufacturing method. [Background technology]

[0002] As a conventional measure to suppress crosstalk, Japanese Patent Laid-Open Publication No. 7-148925 (Patent Document 1) discloses a droplet ejection device that uses a porous material (sintered metal) for the ink supply layer. The porous material functions to balance crosstalk with adjacent channels and the ink refill (filling) speed. Furthermore, the use of a porous material allows the use of inks with a relatively wide range of viscosities with the same head shape and also has the effect of filtering the ink. Japanese Patent Laid-Open Publication No. 2002-127417 (Patent Document 2) discloses that by specifying the surface energy of the porous material to 40 dyne / cm or less, high-speed operation (ink refill) can be achieved with long-term stability. Furthermore, Japanese Patent Laid-Open Publication No. 5753739 (Patent Document 3) does not mention porous materials, but does describe findings regarding the relationship between crosstalk and ink flow bias. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 7-148925 [Patent Document 2] Japanese Patent Application Laid-Open No. 2002-127417 [Patent Document 3] Patent No. 5753739 Summary of the Invention [Problem to be solved by the invention]

[0004] However, conventional technology fails to consider that porous bodies are resistive bodies that impede fluid flow, and does not vary the porosity between porous bodies to change resistance, which leaves room for adjustment of either crosstalk suppression or refill performance.

[0005] The present invention provides a technique that is advantageous in achieving both crosstalk suppression and refill performance. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided an ejection head comprising a plurality of nozzles, a common flow path communicating with each of the plurality of nozzles, a plurality of flow paths connecting a tank for storing liquid with the common flow path, and a plurality of porous bodies arranged inside the plurality of nozzles, wherein the plurality of flow paths include a first flow path and a second flow path having a larger cross-sectional area than the first flow path, and the plurality of porous bodies include a first porous body and a second porous body having a lower porosity than the first porous body, and wherein the second porous body is arranged inside a nozzle of the plurality of nozzles that faces an inlet of the second flow path via the common flow path. [Effects of the Invention]

[0007] According to the present invention, it is possible to provide a technique that is advantageous in achieving both crosstalk suppression and refill performance. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram showing a configuration of a liquid ejection device. [Figure 2] FIG. 2 is a diagram showing the configuration of a discharge head according to the first embodiment. [Figure 3] FIG. 10 is a diagram showing the configuration of a discharge head according to a second embodiment. [Figure 4] FIG. 10 is a diagram showing the configuration of a discharge head according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0010] First Embodiment FIG. 1 is a diagram illustrating the configuration of a liquid ejection device 100 according to an embodiment. In this specification and the drawings, directions are indicated in an XYZ coordinate system, with the XY plane being a plane parallel to the surface on which the substrate is placed. The liquid ejection device 100 may be, for example, an inkjet device equipped with an inkjet head. The inkjet device functions as a substrate processing device for processing substrates (which may be display panels or semiconductor substrates) and can deposit functional element materials on the substrate to form patterns or films. However, the present invention is not limited to devices that use inkjet heads as ejection modules. For example, the present invention may also be applied to devices equipped with slit-type ejection modules. When the liquid ejection device 100 is an inkjet device, the "liquid" may be an ink used to form patterns or films on the substrate. In this specification, the ink components are not particularly limited. For example, a liquid containing a solute and a solvent for forming an organic film may be used as the ink.

[0011] In FIG. 1, the liquid ejection device 100 includes a substrate stage 103 that moves a substrate 102 while holding it with a substrate chuck 114. The substrate 102 may be a glass substrate, a plastic substrate, or the like, as appropriate depending on the product to be manufactured. The substrate 102 is typically a plate-like member. The shape of the substrate 102 is not limited to a specific shape. For example, the substrate 102 may be a flexible film. Alternatively, the substrate 102 may be a circular substrate. For example, the substrate 102 may be a first-generation substrate with a side length of 300 mm to 400 mm. Alternatively, the substrate 102 may be a tenth-generation substrate with a side length of more than 3 m. The substrate 102 may have a pixel area 112 where ink is applied to form an array of multiple display pixels, and an evaluation area 113 where ink is test-ejected to evaluate the state of the ink.

[0012] The liquid ejection device 100 includes an ejection head 1 capable of ejecting ink droplets 104 toward a predetermined position on a substrate 102 mounted on a substrate stage 103. The ejection head may also be called a "print head." The ejection head 1 is disposed on a bridge base 106. Ink is supplied to the ejection head 1 by a pump 121 from a tank 107 that stores ink via a supply system 124. The tank 107 may be disposed inside or outside the liquid ejection device 100. A flow meter 122 that measures the flow rate of ink may be disposed downstream of the pump 121 in the supply system 124. Inside the ejection head 1, at least a portion of the supplied ink is recovered into the tank 107 via a recovery system 123. As described above, the liquid ejection device 100 of this embodiment includes a circulation system in which at least a portion of the ink supplied from the tank 107 to the ejection head 1 by the pump 121 is recovered into the tank 107. However, the present invention is not limited to the presence of a circulation system.

[0013] The liquid ejection device 100 may include a recovery unit 108 that restores ejection performance by performing cleaning processing or the like on the multiple nozzles in the ejection head 1. The liquid ejection device 100 may further include a detection unit 115 that detects non-ejecting nozzles among the multiple nozzles in the ejection head 1.

[0014] When the substrate 102 is mounted on the substrate stage 103, a placement error of the substrate 102 may occur. Furthermore, as the substrate 102 undergoes various manufacturing processes, shape distortion in the X and Y directions may also occur on the substrate 102. Therefore, the liquid ejection device 100 may be equipped with an alignment scope 109 that measures the position of the substrate 102 and the amount of distortion of the substrate 102. The alignment scope 109 may be movably disposed on the bridge base 106. To perform alignment measurement on the entire surface of the substrate 102, the alignment scope 109 and the substrate stage 103 are driven relatively in the X and Y directions. That is, at least one of the alignment scope 109 and the substrate stage 103 is driven in the X and Y directions. Furthermore, the substrate mounted on the substrate stage 103 may have variations in thickness. Therefore, when ink is ejected from the ejection head 1 while the substrate stage 103 is scanned in the Y direction, variations in the thickness of the substrate 102 may cause variations in the landing positions of droplets on the substrate 102. Therefore, the liquid ejection device 100 may also include a height sensor 110 that measures the position in the Z direction (i.e., the height) of the substrate 102. To measure the height of the entire surface of the substrate 102, the height sensor 110 and the substrate stage 103 are driven relatively in the X and Y directions. That is, at least one of the height sensor 110 and the substrate stage 103 is driven in the X and Y directions.

[0015] The control unit 111 controls each unit of the liquid ejection device 100 to supervise patterning on the substrate 102. The control unit 111 can be configured, for example, by a PLD (abbreviation for Programmable Logic Device) such as an FPGA (abbreviation for Field Programmable Gate Array), an ASIC (abbreviation for Application Specific Integrated Circuit), a general-purpose computer with an embedded program, or a combination of all or part of these.

[0016] FIG. 2 shows a detailed configuration of the ejection head 1. The ejection head 1 includes a plurality of nozzles 5 that eject liquid and a common flow path 3 that communicates with each of the nozzles 5. Each of the nozzles 5 has an inlet at the top of the drawing connected to the common flow path 3 and an outlet at the bottom of the drawing that serves as an ink ejection port. Each of the nozzles 5 is configured to eject ink supplied via the common flow path 3 in the form of droplets 104 toward a substrate 102 below. Specifically, each of the nozzles 5 is provided with a piezoelectric element 6 that serves as an ejection energy generating element. A control unit 111 provides a specific pulse signal to the piezoelectric element 6 via a nozzle driver (not shown) to activate the piezoelectric element 6. Activation of the piezoelectric element 6 generates a specific pressure wave in the piezoelectric element. This pressure wave causes ink to be ejected from the nozzle as droplets 104.

[0017] The ejection head 1 further includes a plurality of flow paths that connect the tank 107 and the common flow path 3 via a supply system 124. The plurality of flow paths can include a supply flow path 2 (first flow path) that is connected to the supply system 124 to supply ink from the tank 107 to the common flow path 3, and a recovery flow path 4 (second flow path) that is connected to a recovery system 123 to recover ink from the common flow path 3 to the tank 107. In the example of FIG. 2, there is one recovery flow path 4, while there are a plurality of supply flow paths 2.

[0018] Below, we will explain the configuration of the ejection head 1, which achieves both crosstalk suppression and refill performance. First, we will explain crosstalk suppression and refill performance. Crosstalk is a phenomenon in which pressure waves generated when ink is ejected from one nozzle of the ejection head 1 propagate to nearby nozzles. Crosstalk adversely affects the ink ejection performance of nearby nozzles, resulting in reduced printing performance. Therefore, to maintain good printing performance, it is necessary to suppress crosstalk. Refill performance refers to the ease with which ink is filled into the nozzles. In order to stably eject ink from the nozzles, it is necessary to stably fill the required amount of ink, so high refill performance is necessary.

[0019] In this embodiment, multiple porous bodies serving as crosstalk suppression members are disposed inside the ejection head 1. A porous body refers to a material containing many pores, such as a sponge. However, the porous bodies used here are limited to non-flexible materials. The material of the porous body can be selected appropriately from among resin, ceramic, metal, etc., depending on the required characteristics. For example, resin and ceramic have high chemical resistance. Furthermore, metal has the highest absorption of pressure wave energy, followed by ceramic.

[0020] The multiple porous bodies may include a first porous body 7 and a second porous body 8 having a lower porosity than the first porous body 7. Porosity refers to the ratio of air to a unit volume. The lower the porosity, the higher the absorption performance of pressure wave energy for the fluid, but the higher the resistance and the more obstructed the ink flow, resulting in lower refill performance. Conversely, the lower the porosity, the lower the resistance and the less obstructed the ink flow, but the lower the absorption performance of pressure wave energy for the fluid.

[0021] In FIG. 2, addresses a to k represent the branching positions of the common flow channel 3 to each of the multiple nozzles 5. Of the addresses a to k of the common flow channel 3, the nozzles at addresses e, f, and g are positioned opposite the inlet of the recovery flow channel 4 via the common flow channel 3. The nozzles at addresses a, b, c, d, and h, i, j, and k are not positioned opposite the inlet of the recovery flow channel 4. In the example of FIG. 2, the cross-sectional area of ​​the recovery flow channel 4 is larger than that of the supply flow channel 2. In other words, the ink flow rate of the recovery flow channel 4 is greater than that of a single supply flow channel 2. Therefore, in the configuration of the ejection head 1 shown in FIG. 2, uneven ink flow occurs at addresses e, f, and g of the common flow channel 3, and as a result, crosstalk concentrates at the nozzles branching from addresses e, f, and g. This mechanism is also described in Japanese Patent No. 5753739 (Patent Document 3). Qualitative evidence for this mechanism is provided below.

[0022] The pressure propagation velocity C in a steady flow, derived from the continuity equation and Euler's equation, is expressed by the following equation: C = √(dP / dρ) [m / s] …(1) The pressure fluctuation of a fluid flowing through a pipe, derived from Bernoulli's equation, is expressed by the following equation:

[0023] dP=(Q / cA) 2 (ρ / 2) [Pa] …(2) Substituting equation (2) into equation (1), we get C=√((ρ / 2dρ)(Q / cA) 2 ) [m / s] …(3) where P and dP are pressure ([Pa]), ρ and dρ are density ([kg / m 3 ]), Q is the flow rate ([m 3 / s]), c is the flow coefficient, A is the flow area ([m 2 ]).

[0024] Assuming that the fluid in the intermediate channel satisfies equation (3) and ρ, dρ, c, and A are constant, The qualitative relationship can be derived as follows: "Q is large" ⇒ (the speed of the piezoelectric pressure wave at C is also large) ⇒ (the kinetic energy of the piezoelectric pressure wave is also large) → "the amount of crosstalk generated is also large."

[0025] In the example of Figure 2, a second porous body 8 is placed inside the nozzles 5 that face the inlet of the recovery channel 4 across the common channel 3. A first porous body 7 is placed inside the nozzles other than the nozzle that faces the inlet of the recovery channel 4. This actively absorbs pressure wave energy and suppresses crosstalk at positions close to the recovery channel 4 where the ink flow rate is high.

[0026] As explained above, in this embodiment, the recovery channel 4 has a larger cross-sectional area than one of the supply channels 2. A first porous body 7 with high porosity is placed inside the nozzles other than the nozzle facing the inlet of the supply channel 2 whose cross-sectional area is smaller than that of the recovery channel 4. Meanwhile, a second porous body 8 with low porosity is placed inside the nozzle facing the inlet of the recovery channel 4 whose cross-sectional area is larger than that of one of the supply channels 2.

[0027] Furthermore, in the liquid ejection device 100 that forms a circulation system, the arrangement of multiple porous bodies may be determined according to the direction of ink flow (supply / recovery) relative to the ejection head 1. For example, a first porous body 7 with high porosity is arranged inside the nozzles other than the nozzle facing the inlet of the recovery flow path 4 that communicates with the recovery system 123. Meanwhile, a second porous body 8 with low porosity is arranged inside the nozzle facing the inlet of the recovery flow path 4.

[0028] Alternatively, the arrangement of multiple porous bodies may be determined according to the flow rates of ink in the supply flow channel 2 and the recovery flow channel 4. For example, a first porous body 7 with a high porosity is arranged inside the nozzles other than the nozzle facing the inlet of the recovery flow channel 4. On the other hand, a second porous body 8 with a low porosity is arranged inside the nozzle facing the inlet of the recovery flow channel 4, where the flow rate of ink in one supply flow channel 2 is high.

[0029] The configuration shown in FIG. 2 can be categorized as "high crosstalk suppression" and "medium refill performance" in comparison with the second and third embodiments described below.

[0030] Second Embodiment The ejection head 1 according to the second embodiment will be described with reference to FIG.

[0031] 2 according to the first embodiment, the recovery flow path 4 has a larger cross-sectional area than one of the supply flow paths 2. In the example of Fig. 3, the supply flow path 2 (first flow path) with a smaller cross-sectional area is connected to the common flow path 3 via a first porous body 7, and the recovery flow path 4 (second flow path) with a larger cross-sectional area than the supply flow path 2 is connected to the common flow path 3 via a second porous body 8.

[0032] Furthermore, in the liquid ejection device 100 that constitutes a circulation system, the arrangement of multiple porous bodies may be determined according to the direction of ink flow (supply / recovery) relative to the ejection head 1. For example, a supply flow path 2 (first flow path) in which ink flows in the direction in which it is supplied is connected to a common flow path 3 via a first porous body 7. On the other hand, a recovery flow path 4 (second flow path) in which ink flows in the direction in which it is recovered is connected to the common flow path 3 via a second porous body 8.

[0033] Alternatively, the arrangement of the plurality of porous bodies may be determined according to the flow rates of ink in the supply flow channel 2 and the recovery flow channel 4. For example, the supply flow channel 2 (first flow channel) is connected to the common flow channel 3 via a first porous body 7, and the recovery flow channel 4 (second flow channel) is connected to the common flow channel 3 via a second porous body 8.

[0034] The configuration shown in FIG. 3 can be categorized as "medium crosstalk suppression" and "low refill performance."

[0035] Third Embodiment Referring to FIG. 4, the ejection head 1 according to the third embodiment will be described.

[0036] 4, the recovery flow path 4 (second flow path) is connected to the common flow path 3 via the second porous body 8, as in FIG. 3 according to the second embodiment. However, FIG. 4 differs from FIG. 3 according to the second embodiment in that the supply flow path 2 (first flow path) is connected to the common flow path 3 without the intervention of the first porous body 7.

[0037] The configuration shown in FIG. 4 can be categorized into "low crosstalk suppression" and "high refill performance."

[0038] <Effects of each embodiment> In each of the first to third embodiments described above, the location of the porous body and its porosity are varied to produce differences in crosstalk suppression and refilling performance.

[0039] The reason why the first embodiment (FIG. 2) has a "high crosstalk suppression" is because the first porous body 7 and the second porous body 8 are interposed so as to block the pressure wave propagation path between adjacent nozzles. Also, the reason why the first embodiment has a "low refill performance" is because the first porous body 7 or the second porous body 8 is interposed inside all of the multiple nozzles 5 so as to block the ink supply path, and in particular the presence of the second porous body 8 with its low porosity has an impact.

[0040] The reason why the second embodiment (FIG. 3) is rated as "medium crosstalk suppression" is that only the second porous body 8 is provided between the common flow path 3 and the supply flow path 2, and no porous body is provided in the pressure wave propagation path between adjacent nozzles. With this configuration, although the pressure wave propagation path to the piping is blocked, the crosstalk suppression effect is not as good as in the first embodiment. Also, in FIG. 3, although the first porous body 7 is interposed between the supply flow path 2 and the common flow path so as to block the ink supply path from the supply flow path 2 to the nozzle 5, neither the first porous body 7 nor the second porous body 8 is positioned so as to block the inlet of the nozzle 5. This is the reason why the second embodiment is rated as "medium refill performance." On the other hand, with this configuration, the refill performance is higher than in the first embodiment.

[0041] The reason why the third embodiment has a "low crosstalk suppression" is because there is less porous material than in the second embodiment. Also, the reason why the third embodiment has a "high refill performance" is because there is nothing blocking the ink supply path from the supply flow path 2 to the nozzle 5.

[0042] Finally, we will discuss guidance for application to actual machines. Performance differs depending on the shape of the ejection head, with some tendencies toward stronger crosstalk and others toward weaker refill performance. In the former case, the first embodiment is preferable, and in the latter case, the third embodiment is preferable. In other words, by using the first to third embodiments appropriately depending on the symptoms occurring, it is possible to balance the trade-off between crosstalk suppression and refill performance in the circulation system as much as possible.

[0043] <Embodiment of an article manufacturing method> The article manufacturing method according to an embodiment of the present invention is suitable for manufacturing articles such as display panels for organic electroluminescence (EL) displays, microdevices such as semiconductor devices, and elements having fine structures. The article manufacturing method according to this embodiment includes the steps of discharging a liquid onto a substrate using the liquid discharge device described above to form a liquid film, drying the substrate on which the liquid film has been formed to obtain a substrate on which a dried film has been formed, and manufacturing an article from the substrate on which the dried film has been formed. Furthermore, this article manufacturing method also includes other well-known processes (such as baking, cooling, cleaning, oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, and packaging). The article manufacturing method according to this embodiment is advantageous over conventional methods in at least one of article performance, quality, productivity, and production cost.

[0044] The disclosure of the present specification includes at least the following techniques. (Item 1) A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating a tank for storing liquid with the common flow path; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of flow paths include a first flow path and a second flow path having a cross-sectional area larger than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the second porous body is disposed inside a nozzle among the plurality of nozzles that faces an inlet of the second flow path across the common flow path. A discharge head characterized by: (Item 2) the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; 2. The ejection head according to item 1, (Item 3) A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a supply flow path for supplying a liquid from a tank storing the liquid to the common flow path; a recovery flow path for recovering liquid from the common flow path to the tank; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the second porous body is disposed inside a nozzle among the plurality of nozzles that faces the inlet of the recovery flow path across the common flow path. A discharge head characterized by: (Item 4) 4. The ejection head according to item 3, wherein the recovery flow path has a larger cross-sectional area than the supply flow path. (Item 5) A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating a tank for storing liquid with the common flow path; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of flow paths include a first flow path and a second flow path having a liquid flow rate greater than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the second porous body is disposed inside a nozzle among the plurality of nozzles that faces an inlet of the second flow path across the common flow path. A discharge head characterized by: (Item 6) the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; 6. The ejection head according to item 5, (Item 7) A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating with a tank for storing liquid; A plurality of porous bodies; and the plurality of flow paths include a first flow path and a second flow path having a cross-sectional area larger than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the first flow path is connected to the common flow path via the first porous body, the second flow path is connected to the common flow path via the second porous body; A discharge head characterized by: (Item 8) the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; 8. The ejection head according to item 7, (Item 9) A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a supply flow path for supplying a liquid from a tank storing the liquid to the common flow path; a recovery flow path for recovering liquid from the common flow path to the tank; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the supply flow path is connected to the common flow path via the first porous body, the recovery flow path is connected to the common flow path via the second porous body; A discharge head characterized by: (Item 10) Item 10. The ejection head according to item 9, wherein the recovery flow path has a larger cross-sectional area than the supply flow path. (Item 11) A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating a tank for storing liquid with the common flow path; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of flow paths include a first flow path and a second flow path having a liquid flow rate greater than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the first flow path is connected to the common flow path via the first porous body, the second flow path is connected to the common flow path via the second porous body; A discharge head characterized by: (Item 12) the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; Item 12. The ejection head according to item 11. (Item 13) a stage that holds and moves the substrate; 13. The ejection head according to any one of items 1 to 12, which ejects liquid toward the stage; A liquid ejection device comprising: (Item 14) A step of discharging a liquid onto a substrate using the liquid discharge device according to item 13 to form a liquid film; drying the substrate on which the liquid film is formed to obtain the substrate on which a dry film is formed; manufacturing an article from the substrate on which the dry film is formed; A method for manufacturing an article, comprising:

[0045] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0046] 1: Discharge head, 2: Supply flow path (first flow path), 3: Common flow path, 4: Recovery flow path (second flow path), 5: Nozzle, 6: Piezoelectric element, 7: First porous body (high porosity), 8: Second porous body (low porosity)

Claims

1. A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating a tank for storing liquid with the common flow path; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of flow paths include a first flow path and a second flow path having a cross-sectional area larger than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the second porous body is disposed inside a nozzle among the plurality of nozzles that faces an inlet of the second flow path via the common flow path. A discharge head characterized by:

2. the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; 2. The ejection head according to claim 1.

3. A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a supply flow path for supplying a liquid from a tank storing the liquid to the common flow path; a recovery flow path for recovering liquid from the common flow path to the tank; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the second porous body is disposed inside a nozzle among the plurality of nozzles that faces an inlet of the recovery flow path via the common flow path. A discharge head characterized by:

4. The ejection head according to claim 3, wherein the recovery flow path has a cross-sectional area larger than that of the supply flow path.

5. A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating a tank for storing liquid with the common flow path; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of flow paths include a first flow path and a second flow path having a liquid flow rate greater than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the second porous body is disposed inside a nozzle among the plurality of nozzles that faces an inlet of the second flow path via the common flow path. A discharge head characterized by:

6. the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; 6. The ejection head according to claim 5.

7. A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating with a tank for storing liquid; A plurality of porous bodies; and the plurality of flow paths include a first flow path and a second flow path having a cross-sectional area larger than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the first flow path is connected to the common flow path via the first porous body, The second flow path is connected to the common flow path via the second porous body. A discharge head characterized by:

8. the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; 8. The ejection head according to claim 7.

9. A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a supply flow path for supplying a liquid from a tank storing the liquid to the common flow path; a recovery flow path for recovering liquid from the common flow path to the tank; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the supply flow path is connected to the common flow path via the first porous body, The recovery flow path is connected to the common flow path via the second porous body. A discharge head characterized by:

10. The ejection head according to claim 9, wherein the recovery flow path has a cross-sectional area larger than that of the supply flow path.

11. A plurality of nozzles; a common flow path communicating with each of the plurality of nozzles; a plurality of flow paths communicating a tank for storing liquid with the common flow path; A plurality of porous bodies disposed inside the plurality of nozzles; and the plurality of flow paths include a first flow path and a second flow path having a liquid flow rate greater than that of the first flow path, the plurality of porous bodies include a first porous body and a second porous body having a porosity lower than that of the first porous body, the first flow path is connected to the common flow path via the first porous body, The second flow path is connected to the common flow path via the second porous body. A discharge head characterized by:

12. the first flow path is a supply flow path for supplying liquid from the tank to the common flow path, the second flow path is a recovery flow path for recovering liquid from the common flow path to the tank; The ejection head according to claim 11 .

13. a stage that holds and moves the substrate; The ejection head according to claim 1 , which ejects liquid toward the stage; A liquid ejection device comprising:

14. a step of discharging a liquid onto a substrate using the liquid discharge device according to claim 13 to form a liquid film; drying the substrate on which the liquid film is formed to obtain the substrate on which a dry film is formed; manufacturing an article from the substrate on which the dry film is formed; A method for manufacturing an article, comprising:

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