Gas supply device

Abstract

The present invention provides a gas decomposition device that removes the reactive decontamination gas itself remaining in a facility after a predetermined period of time has been spent decontaminating the facility space with a composite decontamination gas containing aldehydes. [Solution] The gas decomposition apparatus comprises a first gas decomposition unit for decomposing volatile organic compounds, an irradiation unit for irradiating the first gas decomposition unit with vacuum ultraviolet light, a second gas decomposition unit equipped with a catalyst downstream of the first gas decomposition unit, and a blower unit between the first gas decomposition unit and the second gas decomposition unit, and generates and releases ozone, ·OH radicals, and oxygen radicals from the irradiation unit of the first gas decomposition unit.

Description

Technical Field

[0001] The present invention relates to a gas supply device, and particularly to a gas supply device that generates a composite gas containing aldehyde (hereinafter referred to as a decontamination gas) and performs decontamination purification such as nucleic acid degradation, sterilization, disinfection, and disinfection in a space where the gas is released.

Background Art

[0002] In the reuse of safety cabinets, cell culture equipment, breeding equipment in experimental animal facilities, etc. installed in biohazard facilities, research facilities (including BSL-3 facilities and BSL-4 facilities), laboratories, etc., sterilization at a sterilization level and purification of contamination due to nucleic acid scattering are appropriately required for infection prevention. The main purposes are the inactivation of pathogens such as bacteria and viruses, the degradation of DNA and RNA, and the destruction of pathogenic eggs.

[0003] In addition to ethylene oxide gas and ozone, which are commonly used as gases for sterilizing medical instruments, etc., a sterilization system using a composite gas containing formaldehyde and methanol generated by a catalytic reaction from methanol has a high decontamination ability to break down nucleic acids into pieces, has little residual property and corrosiveness, and is excellent in permeability and diffusibility (Patent Document 1, etc.).

[0004] Here, regarding formaldehyde generated from methanol, problems of carcinogenicity in addition to bactericidal properties have been pointed out. On the other hand, the carcinogenicity of acetaldehyde generated from ethanol is lower than that of formaldehyde. Therefore, flexible proper use is required according to the structure of the facility, the object and purpose of sterilization and decontamination.

[0005] Furthermore, in addition to the types of gases generated as described above, there is a high demand for efficient nucleic acid degradation, sterilization, disinfection, and disinfection in a more compact sealed environment than rooms such as safety cabinets and glove boxes, and miniaturization of existing apparatuses such as gas supply devices has also been desired.

Prior Art Documents

Patent Documents

[0006] [Patent Document 1] Japanese Patent Publication No. 2022-157048 [Overview of the project] [Problems that the invention aims to solve]

[0007] The present invention has been made in view of the above points, and provides a gas supply device that generates and releases a composite decontamination gas containing aldehydes to perform decontamination such as nucleic acid decomposition, sterilization, disinfection, and sterilization in a space, and miniaturizes the mechanism for generating the aldehyde gas, or miniaturizes both the mechanism for generating the aldehyde gas and the mechanism for decomposing and purifying the released gas, thereby providing a gas supply device that can be adapted to the scale of the target. [Means for solving the problem]

[0008] In other words, the gas supply device of the embodiment is characterized by comprising a heating unit that heats and vaporizes a primary alcohol by electromagnetic induction heating, an air supply unit connected downstream thereto by a pipeline to supply air, and a heating reaction unit connected downstream thereto by a pipeline to generate a decontamination gas by an oxidation reaction through contact with a porous metal catalyst that is heated by electromagnetic induction heating and oxidized by a mixture of the vaporized primary alcohol and the supplied air.

[0009] Furthermore, in the gas supply device, the heating reaction section may include a metal catalyst housing section for housing a metal catalyst, a heating cylinder section for conducting heat to the catalyst housing section, a protective section that covers the periphery of the heating cylinder section for heat insulation protection, and an induction heating coil section that wraps around the protective section from its periphery.

[0010] Furthermore, in the gas supply device, the heating reaction section may include a metal catalyst housing section that contains a copper catalyst, a protective section that covers and provides thermal insulation protection to the catalyst housing section, and an induction heating coil section that wraps around the protective section from its periphery.

[0011] Furthermore, in the gas supply device, the porous metal catalyst may be a porous copper catalyst.

[0012] Furthermore, in the gas supply device, a first gas decomposition unit for decomposing volatile organic compounds may be connected via a pipeline downstream of the heating reaction unit.

[0013] Furthermore, the gas supply device may be equipped with an irradiation unit that irradiates the first gas decomposition unit with vacuum ultraviolet light.

[0014] Furthermore, in the gas supply device, ozone, ·OH radicals, oxygen radicals, etc., may be generated from the irradiation section of the first gas decomposition unit.

[0015] Furthermore, in the gas supply device, a second gas decomposition unit equipped with a catalyst may be connected via pipeline to the downstream side of the first gas decomposition unit.

[0016] Furthermore, the gas supply device may be provided with a blower between the first gas decomposition unit and the second gas decomposition unit.

[0017] Furthermore, the gas supply device may be equipped with a heating unit in the second gas decomposition section.

[0018] Furthermore, in the gas supply device, the gas discharged from the second gas decomposition unit may be taken into the first gas decomposition unit and then proceed to the first gas decomposition unit and then the second gas decomposition unit in order to circulate the gas. [Effects of the Invention]

[0019] According to the gas supply device of the present invention, there is provided a heating unit that heats and vaporizes a primary alcohol by electromagnetic induction heating, an air supply unit that is connected to the downstream side of the heating unit through a pipeline and supplies air, and a heating reaction unit that is connected to the downstream side of the air supply unit through a pipeline and generates a decontaminated gas by an oxidation reaction caused by contact between a gas in which the vaporized primary alcohol and the supplied air are mixed and a metal catalyst having a porous structure heated and oxidized by electromagnetic induction heating. Therefore, a composite gas containing an aldehyde gas is generated to perform decontamination such as nucleic acid decomposition, sterilization, disinfection, and sterilization in the discharge space, and the mechanism for generating the gas is miniaturized, so that a gas supply device corresponding to the scale of the decontamination target can be provided.

Brief Description of the Drawings

[0020] [Figure 1] It is an overall side view of the gas supply device of one embodiment. [Figure 2] It is a schematic partial cross-sectional view near the heating unit of FIG. 1. [Figure 3] It is a schematic partial cross-sectional view near the heating unit of another embodiment. [Figure 4] It is a schematic cross-sectional view of the heating reaction unit of the first form. [Figure 5] It is a schematic cross-sectional view of the heating reaction unit of the second form. [Figure 6] (A) is a photograph of a copper catalyst, and (B) is a photograph of stacked copper catalysts. [Figure 7] It is a schematic view of a gas supply device provided with a first gas decomposition unit. [Figure 8] It is a schematic view of a gas supply device provided with a first gas decomposition unit and a second gas decomposition unit. [Figure 9] It is a side view of a configuration example in which the first gas decomposition unit and the second gas decomposition unit are integrated. [Figure 10] It is a perspective view of FIG. 9. [Figure 11] It is a block diagram showing a device configuration example of the gas supply device. [Figure 12] It is a block diagram showing the device configuration example of FIG. 9. [Figure 13] It is a schematic view showing the operation of the first gas decomposition unit. [Figure 14]Figure 11 shows a table of the operating sequence in an example of the gas supply system configuration. [Figure 15] This is a block diagram of a bag-in type gas supply device applied to a sterile isolator that constitutes Grade A, which does not use a solenoid valve, as shown in the example of the gas supply device configuration in Figure 11. [Figure 16] This is a diagram showing the actual 3D CAD data configuration that realizes Figure 15. [Modes for carrying out the invention]

[0021] The gas supply device of this embodiment is used for nucleic acid decomposition (DNA-free) for waste disposal in animal husbandry rooms, bio-related genetic engineering facilities, and for the reuse of facilities and equipment (machinery, etc.), as well as for nucleic acid decomposition, purification (achieving so-called DNA-free status), sterilization, and decontamination to a germicidal level (hereinafter referred to as "decontamination, etc.") in spaces of a predetermined size requiring sterile management, such as cell culture facilities. It is also used in enclosed environments smaller than rooms, such as safety cabinets, clean benches, and glove boxes, and for equipment requiring sterilization and nucleic acid purification, such as when replacing HEPA filters. Decontamination in the space is performed by a complex gas containing aldehyde gas produced by the oxidation of primary alcohols. Furthermore, the gas supply device is equipped with the ability to decompose volatile organic compounds (VOCs), such as the complex gas containing the produced aldehyde, and also has a deodorizing function.

[0022] The primary alcohols used as raw materials are methanol or ethanol. Primary alcohols with a larger molecular weight than methanol or ethanol have a lower decontamination capacity for complex gases containing aldehydes produced by oxidation reactions compared to formaldehyde and acetaldehyde. Methanol and ethanol can be used as raw materials, either as a mixture or individually. In the case of formaldehyde produced from methanol, due to its carcinogenicity, it is necessary that no people be present during decontamination of safety cabinets, glove boxes, etc., and that facilities and areas such as BSL-3 and BSL-4 where these are installed are unmanned and free of direct workers, requiring the use of dedicated equipment. Furthermore, when decontaminating spaces where workers are expected to enter and exit, such as animal breeding rooms and pharmaceutical factories, safety management is ensured by prohibiting human entry to avoid exposure to hazardous substances after decontamination. Depending on the application, it may also be possible to use decontamination gases containing acetaldehyde derived from ethanol. Of course, the choice of these is not uniform, and conditions such as the required performance for nucleic acid purification and pathogen decontamination, and the volume of the target space, must be taken into consideration.

[0023] Figure 1 is an overall side view of a gas supply device 1 according to one embodiment. The gas supply device 1 comprises, in order from the bottom of the page, a heating unit 10 (reference numeral 10A in Figure 2, reference numeral 10B in Figure 3), an air supply unit 30, and a heating reaction unit 50. A raw material supply unit 2 for primary alcohol, which is the raw material, is formed at the end of the heating unit 10, and a reaction gas discharge unit 3 for releasing the generated reaction gas is formed at the end of the heating reaction unit 50. The pathway for primary alcohol in the heating unit 10, air supply unit 30, and heating reaction unit 50 is formed as a main pipe unit 5.

[0024] The heating section 10, the air supply section 30, and the heating reaction section 50 are made of stainless steel for corrosion resistance to reaction gases, etc. Furthermore, a supply tank (not shown) for supplying primary alcohol to the gas supply device 1 and an air pump (not shown) for supplying air are appropriately provided. In addition, the gas supply device 1 is housed in a casing or the like (not shown).

[0025] The heating unit 10 heats primary alcohol by electromagnetic induction heating (IH), causing it to vaporize and expand before being released from a nozzle. The air supply unit 30 is connected via a pipeline downstream of the heating unit 10 and primarily supplies air (oxygen) to oxidize the primary alcohol, which is mixed with the vaporized primary alcohol and circulated within the pipeline. The heating reaction unit 50 is connected via a pipeline downstream of the air supply unit 30 and generates a decontamination gas through an oxidation-reduction reaction upon contact between a metal catalyst heated by electromagnetic induction and a mixed gas of primary alcohol and air circulating within the pipeline. The control of the heating unit may be stopped after a certain amount of reaction heat has been obtained. The system is characterized by the continuous generation of aldehyde gas by controlling only the mixing concentration of primary alcohol and air.

[0026] The heating unit 10, air supply unit 30, and heating reaction unit 50, which constitute the gas supply device 1, are each separable, and the flange portion 6 of the heating unit 10 and the flange portion 7 of the air supply unit 30 are fastened together with bolts. A sealing gasket 4 is interposed between the flange portion 6 and the flange portion 7. In addition, the flange portion 8 of the air supply unit 30 and the flange portion 9 of the heating reaction unit 50 are fastened together with bolts. A sealing packing (O-ring or gasket) 17 (see Figure 2) is interposed between the flange portion 8 and the flange portion 9 to seal it. The connection portion with the heating reaction unit 50 may have an insulating structure.

[0027] Specifically, the heating unit 10 that constitutes the gas supply device 1 is described in the schematic partial cross-sectional view of Figure 2. In Figure 2, the heating unit 10 is described as 10A. In Figure 3, a heating unit of a different form from heating unit 10A is described as 10B.

[0028] In the heating section 10A, primary alcohol supplied from a supply tank (not shown) that supplies primary alcohol to the gas supply device 1 flows from the raw material supply section 2 into the internal flow path of the heating section body 11 within the heating section 10A. A steel pipe 13 made of stainless steel such as SUS304 is arranged around the heating section body 11, and retaining flanges 14 are placed at both ends of the steel pipe 13. An induction heating coil 12 is wound around the steel pipe 13. When current is applied to the induction heating coil 12, the induced current generated in the coil heats up the steel pipe 13. As a result, the primary alcohol is heated and vaporized as it passes through the internal flow path of the heating section body 11. Inside the heating section body 11, a scouring pad-shaped diffusion member 11k made of metal such as SUS304 is provided to further promote vaporization of the primary alcohol as it passes through the heating section body 11.

[0029] A thermocouple 18 is installed in the internal flow path of the heating unit body 11 to measure the temperature. Near the flange portion 6 at the end of the heating unit 10A, an orifice 15 is provided in the internal flow path to narrow the flow path and increase the flow velocity of the primary alcohol that has vaporized (gasified) and expanded. The primary alcohol is ejected from the orifice 15 due to the pressure of the expanded gas. In addition, a diffusion mesh 16 is interposed between flange portion 8 and flange portion 9. The purpose of the diffusion mesh 16 is to diffuse the primary alcohol, whose flow velocity has increased after passing through the orifice 15, into the tube.

[0030] In the heating section 10B shown in Figure 3, primary alcohol supplied from a supply tank (not shown) that supplies primary alcohol to the gas supply device 1 flows from the raw material supply section 2 into the internal flow path of the heating section body 11 within the heating section 10B. A diffusion member 11k (a scrubbing brush-shaped surface area expanding material such as SUS304) is placed inside the heating section body 11, and a magnetic steel pipe is placed around it, with retaining flanges 14 placed at both ends of the steel pipe 11p and the heat insulating material 13. An induction heating coil 12 is wound around the heat insulating material 13. When current is applied to the induction heating coil 12, the induced current generated in the coil causes the steel pipe 11p between the heating section body 11 and the heat insulating material 13 to heat up. As a result, the primary alcohol is heated and vaporized as it passes through the internal flow path of the heating section body 11. Near the flange portion 6 at the end of the heating section 10B, an orifice 15 is provided in the internal flow path to narrow the flow path, increasing the flow velocity of the vaporized and expanded (gasified) primary alcohol. Similarly, the diffusion mesh 16 allows the primary alcohol, whose flow velocity has increased after passing through the orifice 15, to diffuse into the pipe.

[0031] The choice between the heating section 10A in Figure 2 and the heating section 10B in Figure 3 mainly depends on the size of the installation location for the gas supply device 1. If it is not easy to secure sufficient height at the installation location, the heating section 10A in Figure 2 is preferred, and if it is not easy to secure sufficient width at the installation location, the heating section 10B in Figure 3 is preferred. There is no difference in the vaporization performance of primary alcohols in either heating section.

[0032] The air supply unit 30 takes in air (oxygen) from outside the gas supply device 1. The primary alcohol, which has vaporized and expanded, and the taken-in air are mixed in the piping within the air supply unit 30. If the amount of air (oxygen) is sufficient, the efficiency of the oxidation reaction in the heating reaction unit 50 will improve. The air supply unit 30 is provided in the gas supply device 1 for forced intake.

[0033] The structure of the heating reaction section 50 disclosed in Figure 1 is shown as schematic cross-sectional views in Figures 4 and 5. The heating reaction section 50X in Figure 4 comprises, from the center, a catalyst housing section 51, a heating cylinder section 52, a protective section 53, and an induction heating coil section 55 on the outermost side. The catalyst housing section 51 houses a metal catalyst 59 and is a cylindrical body made of austenitic stainless steel such as SUS304, and is non-magnetic. The catalyst housing section 51 can be made of copper or aluminum. Since the catalyst housing section 51 is made of a non-magnetic metal, a heating cylinder section 52 made of a magnetic metal is placed outside the catalyst housing section 51. The heating cylinder section 52 is a cylindrical body made of ferritic stainless steel such as SUS430, and is magnetic. The heating cylinder section 52 can be made of plated iron plate or the like.

[0034] The heating cylinder 52 generates heat due to the induced current when the induction heating coil 55 is energized, and conducts heat to the metallic catalyst housing 51, raising the temperature of the metal catalyst 59 inside the catalyst housing 51. To prevent thermal damage to the induction heating coil 55 itself due to the heat generated by the heating cylinder 52, a protective section 53 is provided to cover, insulate, and protect the heating cylinder 52. The induction heating coil 55 is then wound around the protective section 53. Therefore, a known insulating material is used for the protective section 53.

[0035] The catalyst housing section 51 houses the metal catalyst 59 and also serves as the reaction site for the oxidation of the vaporized primary alcohol, i.e., the generation of a complex gas containing aldehyde gas. Therefore, austenitic stainless steel such as SUS304 is preferably used because it is susceptible to oxidative corrosion. However, since SUS304 is not magnetic and therefore cannot be induction heated as is, a heating cylinder section 52 made of magnetic ferritic stainless steel is further provided to enable heating of the metal catalyst 59.

[0036] The heating reaction section 50Y in Figure 5 comprises, from the center, a catalyst housing section 51 containing a metal catalyst 59, a protective section 53, and an induction heating coil section 55 on the outermost side. Unlike the aforementioned heating reaction section 50X, the catalyst housing section 51 of the heating reaction section 50Y is formed as a cylindrical body made of ferritic stainless steel and is magnetic. Therefore, induction heating of the catalyst housing section 51 itself is possible. The functions of the protective section 53 and the induction heating coil section 55 are the same as those of the aforementioned heating reaction section 50X.

[0037] The decrease in the corrosion performance of the metal in the catalyst housing 51 of the heating reaction section 50Y can be addressed by shortening the replacement interval of the catalyst housing 51 or by forming a glass coating such as enamel on the surface of the catalyst housing 51. In the heating reaction section 50Y, the heating cylinder section 52 can be omitted, reducing the number of components and enabling further miniaturization of the device.

[0038] By using an induction heating method, as in the heating reaction units 50X and 50Y, the start and stop of the heating reaction and the rise and fall of the heating temperature can be easily controlled by controlling whether or not power is applied and by raising or lowering the amount of current when power is applied. The gas supply device 1 is equipped with a control microcomputer (not shown), which controls the supply amount of primary alcohol, the supply amount of air, the heating temperature, the operating time, etc., according to the equipment to be decontaminated and the construction work. In the gas supply device 1, the combination of the heating unit 10 (10A, 10B) and the heating reaction unit 50 (50X, 50Y) can be as appropriate and can be replaced according to the required processing capacity, operating time, etc.

[0039] The metal catalyst 59 filled in the heating reaction section 50 (50X, 50Y) of the gas supply device 1 is preferably a porous copper catalyst. Of course, metals other than copper that have catalytic properties, such as nickel, manganese, and platinum, can be used as catalysts. In this embodiment, as disclosed in the photograph in Figure 6, an amorphous porous copper catalyst made of foamed metal is used. As the metal catalyst 59, a structure in which the oxidation-reduction reaction catalyst is supported on a ceramic honeycomb or metal honeycomb structured support material may be used to make it easier to quantify the amount of catalyst and pressure loss. The photograph in Figure 6(A) shows a magnified view of the copper catalyst, and Figure 6(B) shows multiple copper catalysts stacked together. This copper catalyst is a porous structure in which shells formed by roughly crushing copper spheres are appropriately aggregated to ensure permeability. By adopting this structure, the surface area of ​​the metal catalyst 59 (copper catalyst) in the catalyst housing section 51 is increased, reducing pressure loss and improving the efficiency of reaction gas generation by oxidation of primary alcohols, thereby enabling miniaturization. Known methods can be used to produce the copper foam metal in the embodiment, and there are no particular limitations.

[0040] In addition, a porous honeycomb structure is employed as the form of the metal catalyst. Structures with low pressure loss, such as a bundle of metal tubes or a composite in which a catalytically active metal such as copper is supported on ceramics with hollow parts such as through holes, can be used.

[0041] The aldehyde-containing composite gas (reaction decontamination gas) produced by the reaction with the metal catalyst (copper catalyst) under heating conditions as it passes through the heated reaction section 50 (50X, 50Y) is released to the outside of the gas supply device 1 from the reaction gas discharge section 3 (see Figure 1). After the facility's spatial decontamination is carried out for a predetermined time using the aldehyde gas (mainly acetaldehyde, sometimes a mixture of formaldehyde) generated and released by the gas supply device 1, it is necessary to remove the reaction decontamination gas itself that remains in the facility. In other words, by the time workers in the facility begin work, the harmful components of the released reaction decontamination gas containing aldehydes must be reduced to below a specified amount to protect workers from gas exposure.

[0042] From this perspective, the gas supply device 1 is further equipped with a mechanism for decomposing complex reaction decontamination gases containing aldehydes (i.e., volatile organic compounds (VOCs), the gas to be decomposed). Therefore, as shown in the schematic diagram of Figure 7 (gas decomposition device of the first embodiment), the gas supply device 1 of the embodiment is equipped with a first gas decomposition unit 60, a decomposition catalyst unit 65, and a blower 80 in that order. Also, as shown in the schematic diagram of Figure 8 (gas decomposition device of the second embodiment), a second gas decomposition unit 70 is further equipped with the first gas decomposition unit 60, the decomposition catalyst unit 65, and the blower 80 in that order (the illustration is an example of pipeline connection). The arrangement is such that, as shown in Figure 7, the connection is in the order of first gas decomposition unit 60, decomposition catalyst unit 65, and blower 80 from the upstream side, and as shown in Figure 8, the connection is in the order of first gas decomposition unit 60, decomposition catalyst unit 65, blower 80, and second gas decomposition unit 70. Since the gas supply device 1 and the first gas decomposition unit 60 and the second gas decomposition unit 70 have different purposes, they are, in principle, separate devices. However, from the viewpoint of volume compression of the device configuration, the gas supply device 1 and the first gas decomposition unit 60 and the second gas decomposition unit 70 may be configured as an integrated unit. The first gas decomposition unit 60 and the second gas decomposition unit 70 may be separated from the gas supply device 1 and operated independently.

[0043] The first gas decomposition unit 60 is connected by a pipeline downstream of the heating reaction unit 50 (50X, 50Y) (downstream of the reaction gas discharge unit 3), as shown in the schematic diagram in Figure 7 (Figure 8). The first gas decomposition unit 60 is equipped with an irradiation unit 61 that irradiates vacuum ultraviolet light. The irradiation unit 61 mainly uses an excimer lamp 61, and irradiates ultraviolet light in the short wavelength range of 200 nm or less, and in this embodiment, 172 nm, and the emitted ·OH radicals, oxygen radicals, etc., along with the ozone-decomposed volatile organic compounds by the decomposition catalyst unit 65 located downstream. Of course, other light sources can be used as long as they can irradiate ultraviolet light in the short wavelength range of 172 nm, etc.

[0044] Furthermore, when ultraviolet light is irradiated from the irradiation unit (excimer lamp) 61, ozone, ·OH radicals, and oxygen radicals are secondarily generated from oxygen in the air. This generated ozone also has a decontamination effect against viruses and bacteria. This ozone, ·OH radicals, oxygen radicals, and ozone decomposition catalyst (decomposition catalyst unit 65) connected downstream by a pipeline mix and come into contact with volatile organic compounds (VOCs) (gas to be decomposed). The volatile organic compounds are decomposed into carbon dioxide and water by oxidation upon contact with ozone, ·OH radicals, and oxygen radicals. The generated ozone is then decomposed into oxygen. The decomposition catalyst unit 65 is connected downstream of the first gas decomposition unit 60 by a pipeline, and the gas passing through the first gas decomposition unit 60 flows into the decomposition catalyst unit 65. The decomposition catalyst unit 65 is a catalyst such as manganese dioxide, and volatile organic compounds that were not decomposed in the first gas decomposition unit 60 are further decomposed in the decomposition catalyst unit 65. In addition, the ozone generated by irradiation from the irradiation unit (excimer lamp) 61 is decomposed into oxygen in the decomposition catalyst unit 65. The air that has passed through the first gas decomposition unit 60 and the decomposition catalyst unit 65 is released from the blower 80. Then, the air is taken in again from the side of the first gas decomposition unit 60, and circulated by passing through the first gas decomposition unit 60 and the decomposition catalyst unit 65, and the concentration of volatile organic compounds gradually decreases. Note that in addition to a direct pipeline connection between the first gas decomposition unit 60 and the decomposition catalyst unit 65, the decomposition catalyst unit 65 can also be positioned downstream of the first gas decomposition unit 60.

[0045] In the first gas decomposition apparatus shown in Figure 7, a first gas decomposition unit 60 and a decomposition catalyst unit 65 are combined. In the second gas decomposition apparatus, a second gas decomposition unit 70 for further decomposing volatile organic compounds is added downstream of the combination of the first gas decomposition unit 60 and the decomposition catalyst unit 65 and connected to the pipeline. The first gas decomposition apparatus relies solely on the decomposition capacity of the first gas decomposition unit 60 and the decomposition catalyst unit 65, and is therefore intended for small-scale facilities with small processing volumes, and facilities for the decomposition of low concentrations of volatile organic compounds. In contrast, the second gas decomposition apparatus shown in Figure 8 improves the decomposition capacity of volatile organic compounds by further including the second gas decomposition unit 70. Therefore, the second gas decomposition apparatus is intended for large-scale facilities with large processing volumes, and facilities for the decomposition of relatively high concentrations of volatile organic compounds.

[0046] The second gas decomposition apparatus further includes a second gas decomposition section 70 from the viewpoint of improving the decomposition capacity of volatile organic compounds. The second gas decomposition section 70 is equipped with a catalyst that exhibits performance in decomposing volatile organic compounds. For example, a nickel catalyst or a platinum catalyst may be provided. In this embodiment, a platinum catalyst 71 is provided. In order to efficiently decompose volatile organic compounds such as aldehyde gas with the platinum catalyst 71, the second gas decomposition section 70 is equipped with a heating section that heats the platinum catalyst 71 or the volatile organic compound (VOC) (gas to be decomposed). The heating section heats to a temperature that allows the catalyst, such as the platinum catalyst 71, to exhibit its catalytic function. The heating section also heats to a temperature necessary for the decomposition of the volatile organic compound (VOC) (gas to be decomposed). From the viewpoint of miniaturization, electromagnetic induction heating (IH) using the induction heating coil section 72 described later is preferably employed in the heating section.

[0047] The relationship between the platinum catalyst 71 and the heating section is the same as the configuration disclosed and detailed in Figures 4 and 5. A blower such as a sirocco fan is used for the blower 80 and is connected to a pipeline as appropriate. The blower 80 is used for supplying air to the second gas decomposition section 70 and for circulating the air that has passed through the second gas decomposition section 70 (and the platinum catalyst 71 inside it) back into the facility.

[0048] As shown by the dashed arrows in Figures 7 and 8, air supply and circulation are performed for a predetermined time, which promotes the decomposition of volatile organic compounds such as reaction gases within the facility and improves air purification. Sensors for measuring the concentration of volatile organic compounds and ozone may be provided as appropriate. Furthermore, by monitoring the ozone concentration during the operation of the first gas decomposition unit 60, it can be used as a detection guideline that when the ozone concentration begins to rise, the volatile organic compounds such as reaction gases to be decomposed have almost disappeared. In addition to the pipeline connection between the first gas decomposition unit 60 and the decomposition catalyst unit 65 in Figures 7 and 8, the aforementioned active oxygen is released from the first gas decomposition unit 60, comes into contact with the residual gas (object to be decontaminated), and then circulates together with the residual gas through a circulation duct (not shown) before being drawn into the decomposition catalyst unit 65.

[0049] In addition, as a second form of gas decomposition apparatus and method of use, when volatile organic compounds (VOCs) such as reaction gases remain in the facility at high concentrations, the second gas decomposition unit 70 accelerates the decomposition of volatile organic compounds. After the concentration is reduced to a certain extent, the combination of the first gas decomposition unit 60 and the decomposition catalyst unit 65 proceeds with the decomposition of low concentrations of volatile organic compounds. The configuration is designed to be used according to the concentration due to the difference in the mechanisms of action that contribute to the decomposition of volatile organic compounds. The second gas decomposition unit 70 tends to be less effective in the low concentration range. However, with the combination of the first gas decomposition unit 60 and the decomposition catalyst unit 65, light irradiation and residual low concentrations of volatile organic compounds are mixed with ozone, ·OH radicals, and oxygen radicals, and then decomposed by the decomposition catalyst unit 65. In this way, decomposition treatment dependent on the circulation capacity is possible.

[0050] The side view in Figure 9 and the perspective view in Figure 10 particularly show the configuration of the first gas decomposition unit 60 and the second gas decomposition unit 70 of the second embodiment of the gas decomposition apparatus. In this embodiment, the first gas decomposition unit 60 to the second gas decomposition unit 70 (first gas decomposition unit 60, decomposition catalyst unit 65, blower 80, and second gas decomposition unit 70) are integrated into a single device. An excimer lamp is provided as an irradiation unit 61 in the center of the first gas decomposition unit 60. Behind the irradiation unit 61 (towards the back of the page) is a decomposition catalyst unit 65 that holds manganese dioxide, etc. The gas to be decomposed flows in in the order of irradiation unit 61 and then decomposition catalyst unit 65. A blower 80 is connected to the first gas decomposition unit 60. A sirocco fan is used for the blower 80. The installation direction of the irradiation unit 61 may be arbitrary. When installing the irradiation unit 61, the installation direction, effective distance, and light contact time of the irradiation unit 61 are appropriately adjusted.

[0051] A second gas decomposition unit 70 is connected downstream of the blower 80 (sirocco fan). The second gas decomposition unit 70 contains a platinum catalyst 71 with thermal conductivity, as well as a metal to be heated (such as a SUS304 metal scouring pad), and an induction heating coil section 72 is provided around it. The platinum catalyst 71 (and the metal to be heated) are heated up by the operation of the induction heating coil section 72. A thermocouple 73 is provided as appropriate for temperature detection of the second gas decomposition unit 70.

[0052] As can be seen from the diagram, the integrated unit of the first gas decomposition unit 60 and the second gas decomposition unit 70 is assembled by miniaturizing each component. Therefore, it is possible to miniaturize the device configuration connected to the gas supply device 1. Furthermore, since the device configuration of the gas supply device 1 itself is small, it is highly portable. As a result, the barrier to introduction to small-scale facilities requiring decontamination is low. In addition, by preparing multiple units, it is possible to flexibly respond to the size of the facility to be decontaminated.

[0053] The block diagram in Figure 11 shows an example of the configuration of the gas supply device disclosed and explained in Figures 1 through 10. In the figure, "decontamination gas generator" corresponds to gas supply device 1, "residual gas decomposer" corresponds to the first gas decomposition unit 60, and "decontamination gas decomposer" corresponds to the second gas decomposition unit 70. Examples of piping connections and arrangements of each element are shown. For reference, a table of the operating sequence for the example configuration of the gas supply device disclosed in Figure 11 is attached (see Figure 14).

[0054] The block diagram in Figure 12 shows an example of the relationship between the first gas decomposition unit 60 and the second gas decomposition unit 70, and the configuration of the apparatus. Of course, the detailed structure and arrangement of the first gas decomposition unit 60 and the second gas decomposition unit 70 are not limited to those shown.

[0055] Figure 13 shows a schematic diagram of the first gas decomposition unit 60 and its ancillary equipment. As mentioned above, the first gas decomposition unit 60 is equipped with an excimer lamp 61, which is energized (energized) by a control power supply 64. The first gas decomposition unit 60 is equipped with a gas inlet 62 on the upstream side and a gas outlet 63 on the downstream side. Volatile organic compounds (VOCs) (gases to be decomposed), etc., flow into the first gas decomposition unit 60 from the gas inlet 62. When the excimer lamp 61 is energized, ozone, ·OH radicals, etc. are generated from oxygen in the air, and in addition to the release of ozone, ·OH radicals, etc. from the gas outlet 63, the decomposition of the gas to be decomposed by ozone, ·OH radicals, etc. is promoted.

[0056] In Figure 13, when supplying the gas to be decomposed to the first gas decomposition unit 60, flow control equipment such as a compressor, flow control valve, and flow meter are appropriately provided for flow rate adjustment.

[0057] Figure 15 shows a block diagram of a bag-in type gas supply device applied to a sterile isolator that constitutes Grade A, which does not use a solenoid valve, in relation to the gas supply device shown in Figure 11. Furthermore, Figure 16 shows a configuration diagram of the actual 3D CAD data that realizes Figure 15. [Explanation of symbols]

[0058] 1. Gas supply device 2 Raw material supply section 3. Reaction gas discharge section 4 gaskets 5 Main pipe section 6,7,8,9 Flange section 10,10A,10B heating section 11 Heating Unit Body 12 Induction heating coil 13. Insulation 14 Retaining flange 15 Orifice 16 Diffusion Mesh 17 Packing 18 Thermocouples 30 Air supply unit 50,50X,50Y heating reaction section 51 Catalyst housing 52 Heating cylinder part 53 Protection Department 55 Induction heating coil section 59 Copper catalyst 60 First gas decomposition section 61 Excimer Lamp 65 Decomposition catalyst section 70 Second gas decomposition section 71 Platinum catalyst 72 Induction heating coil section 73 Thermocouples 80 Blower

Claims

1. A first gas decomposition unit that decomposes volatile organic compounds, The first gas decomposition section is equipped with an irradiation section for irradiating it with vacuum ultraviolet light, A gas decomposition apparatus in which ozone, OH radicals, and oxygen radicals are generated and released from the irradiation section of the first gas decomposition section.

2. The gas decomposition apparatus according to claim 1, wherein a second gas decomposition unit equipped with a catalyst is provided downstream of the first gas decomposition unit.

3. The gas decomposition apparatus according to claim 2, wherein a blower is provided between the first gas decomposition unit and the second gas decomposition unit.

4. The gas decomposition apparatus according to claim 2, wherein the second gas decomposition section is provided with a heating section.

5. The gas decomposition apparatus according to claim 2, wherein the gas released from the second gas decomposition unit is taken into the first gas decomposition unit and proceeds again to the first gas decomposition unit and then the second gas decomposition unit in that order, thereby performing gas circulation.

6. The gas decomposition apparatus according to claim 1, wherein a decomposition catalyst section is provided downstream of the first gas decomposition section.

7. The gas decomposition apparatus according to claim 2, wherein the second gas decomposition unit is provided downstream of the decomposition catalyst unit.

8. The gas decomposition apparatus according to claim 1, wherein a gas supply device is connected to the gas decomposition apparatus to heat and vaporize a primary alcohol to produce a composite reaction gas containing aldehyde gas.

9. The gas decomposition apparatus according to claim 1, wherein the irradiation unit is an excimer lamp.

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