Apparatus and method

Abstract

This relates generally to position sensing, and more specifically to a robot drive device position sensor equipped with an optical encoder. [Solution] An example of a preferred embodiment of the apparatus comprises a frame, a light-emitting element connected to the frame, an optical sensor array connected to the frame, an environmental isolation partition, and a seal. The frame is attached to the housing in close proximity to an opening that penetrates the housing. The environmental isolation partition is attached to the housing in close proximity to the opening. The environmental isolation partition is partially transparent and is positioned so that the optical sensors can view images through the environmental isolation partition and the opening. The seal is positioned in close proximity to the opening and is directly placed between the environmental isolation partition and the housing.

Description

Technical Field

[0001] Exemplary and non-limiting embodiments generally relate to position sensing, and more specifically, to a robot drive device position sensor including an optical encoder. Brief description of the prior art

[0002] US Patent Application Publication Nos. 2009 / 0243413 and 2015 / 0303764, which are incorporated herein by reference in their entirety, disclose a partition wall between a non-optical encoder reading head and an encoder disk. Summary

[0003] The following summary is merely illustrative and is not intended to limit the claims.

[0004] In one aspect, an exemplary embodiment of a device is provided. The device includes a frame configured to be attached adjacent to an opening extending through a housing of a motor assembly, an optical sensor including a camera connected to the frame, and an environmental partition wall configured to be connected to the housing at the opening. The environmental partition wall is at least partially transparent and is disposed relative to the camera such that the camera can image an image within the housing through the environmental partition wall and the opening. In another aspect, a method is provided. The method includes providing a reading head including a frame and a camera connected to the frame, and connecting the reading head to a housing of a motor assembly. Here, the frame of the reading head is connected to the housing adjacent to an opening extending through the housing. The method further includes disposing an environmental partition wall at the opening to separate a first environmental region inside the housing from a second environmental region in which the camera is disposed. The environmental partition wall is at least partially transparent and is disposed relative to the camera such that the camera can image an image within the housing through the environmental partition wall and the opening. In another embodiment, the following method is provided: This method includes illuminating a reference member located inside a housing with at least one light emitter of a reading head located at least partially outside the housing of a motor assembly, and projecting at least one image of the reference member with an optical sensor array of the reading head. The optical sensor array is located at least partially outside the housing, and the image is projected by the optical sensor array through an opening in the housing and through a transparent environmental isolation wall located in the opening. The transparent environmental isolation wall seals a first environment inside the housing from a second environment in which the optical sensor array is located. The optical sensor array is located outside the first environment, and the transparent environmental isolation wall allows the optical sensor array to project the at least one image reaching from inside the housing through the environmental isolation wall and the opening.

[0005] In another embodiment, the following apparatus is provided: the apparatus comprises a frame, at least one light-emitting element connected to the frame, an optical sensor array connected to the frame, and an environmental isolation partition, wherein the frame is configured to be attached to another component, but in close proximity to an opening through the other component, and the environmental isolation partition is configured to be attached to the other component in close proximity to the opening, is at least partially transparent, and is positioned relative to the optical sensor array so that the optical sensor array can view images through the environmental isolation partition and the opening. In another embodiment, the following apparatus is provided: the apparatus comprises a frame, at least one light-emitting element connected to the frame, an optical sensor array connected to the frame, an environmental isolation partition, and a seal, wherein the frame is configured to be mounted to a housing, but in close proximity to an opening that penetrates the housing; the environmental isolation partition is configured to be mounted to the housing in close proximity to the opening, is at least partially transparent, and is positioned relative to the at least one optical sensor so that the at least one optical sensor can view an image through the environmental isolation partition and the opening; and the seal is configured to be positioned in close proximity to the opening and directly between the environmental isolation partition and the housing.

[0006] In another embodiment, the following method is provided: A reading head comprising a frame, at least one light-emitting element connected to the frame, and an optical sensor array connected to the frame; The reading head is coupled to another component, wherein the frame of the reading head is coupled to the other component near an opening through which the other component passes; To separate the first environmental region inside the other component from the second environmental region where the optical sensor array is located, an environmental separation partition is placed in the opening; The environmental isolation partition is at least partially transparent and is positioned relative to the optical sensor array so that the optical sensor array can view images through the environmental isolation partition and the opening. [Brief explanation of the drawing]

[0007] The aforementioned aspects and other features will be described in the following description, with reference to the attached drawings.

[0008] [Figure 1] Figure 1 is a schematic diagram of the substrate processing apparatus.

[0009] [Figure 2] Figure 2 shows some of the components of the device shown in Figure 1.

[0010] [Figure 3] Figure 3 is a schematic diagram showing some of the components shown in Figures 1 and 2.

[0011] [Figure 3A] Figure 3A shows another exemplary embodiment of the components shown in Figures 1 and 2.

[0012] [Figure 4] Figure 4 is a schematic diagram showing some of the components shown in Figure 3.

[0013] [Figure 4A] Figure 4A is a schematic diagram showing an example of the reading head shown in Figure 4.

[0014] [Figure 4B] Figure 4B is a schematic diagram showing an example where there are multiple reading heads as shown in Figure 4.

[0015] [Figure 5] Figure 5 shows an example of the sensor connection configuration type shown in Figures 3 and 4.

[0016] [Figure 6] Figure 6 shows examples of sensor connection types to the housing shown in Figures 3 and 4.

[0017] [Figure 7] Figure 7 is a diagram similar to Figure 4, showing another exemplary embodiment.

[0018] [Figure 8] Figure 8 is a diagram similar to Figure 4, showing another exemplary embodiment.

[0019] [Figure 9] FIG. 9 is a view similar to FIG. 4 showing another exemplary embodiment.

[0020] [Figure 10] FIG. 10 is a view similar to FIG. 4 showing another exemplary embodiment.

[0021] [Figure 11] FIG. 11 is a view similar to FIG. 4 showing another exemplary embodiment.

[0022] [Figure 12] FIG. 12 is a view similar to FIG. 4 showing another exemplary embodiment.

[0023] [Figure 13] FIG. 13 is a view similar to FIG. 4 showing another exemplary embodiment.

[0024] [Figure 14] FIG. 14 is a view similar to FIG. 4 showing another exemplary embodiment.

[0025] [Figure 15] FIG. 15 is a view similar to FIG. 4 showing another exemplary embodiment. Detailed Description of the Embodiment

[0026] <W Referring to FIG. 1, a top plan view of an exemplary substrate processing apparatus 10 including a substrate transfer device 12 is shown. Although the present invention will be described with reference to the embodiments shown in the drawings, it should be understood that it can also be realized by various other embodiments. Also, elements and materials of any suitable size, shape, or type can be used.

[0027] The substrate processing apparatus 10 includes, in addition to the substrate transport device 12, a plurality of substrate processing chambers 14 connected to a vacuum chamber 15 and a substrate cassette elevator 16. The transport device 12 is at least partially located within the chamber 15 and is configured to transport planar substrates such as semiconductor wafers and planar displays between the chambers 14 and the elevator 16. In another embodiment, the transport device 12 can be used in any suitable type of substrate processing apparatus.

[0028] Conventional vacuum environment robotic manipulators typically consist of a drive unit housing all the active components of the robotic manipulator, such as actuators and sensors, and one or more arms driven by that drive unit. The arms are usually passive mechanisms; that is, they do not contain active components such as actuators or sensors. This is mainly because gas release, power distribution, and heat removal are difficult in a vacuum environment.

[0029] Referring also to Figure 2, the substrate transport device 12 (or vacuum-compatible robot system) comprises a drive unit 18 and an arm 20. The drive unit 18 comprises two rotation axes. The arm 20 is coupled to the drive unit 18. In this exemplary embodiment, the arm 20 comprises a first link 22, a second link 24, and an end effector 26. The first link 22 is directly attached to the first rotation axis of the drive unit 18. The second link 24 is coupled to the first link 22 via a first rotary joint 28. The end effector 26 is coupled to the second link 24 via a second rotary joint 30. In the illustrated embodiment, the arm 20 comprises three rotation axes 90, 92, and 94 formed in the drive unit 18 and the joints 28, 30, respectively. In this embodiment, the second link 24 is driven via a belt / band drive unit. This belt / band drive unit may comprise a first pulley, a first belt / band, and a second pulley. The first pulley is mounted on a second rotating shaft of the drive unit 18, and the second pulley is mounted on a second link 24 of the arm 20. The end effector 26 is constrained to point substantially radially relative to the drive unit 18 via another belt / band mechanism. The other belt / band mechanism may comprise a third pulley, a second belt / band, and a fourth pulley. The third pulley is pivotally connected to the first link 22, and the fourth pulley is mounted on the end effector 26. In various exemplary embodiments, any suitable drive unit, actuator, sensor, etc. may have the features disclosed herein, in combination with U.S. Patents 9,202,733 and 8,716,909, and / or have the features disclosed in those patents. All of these references are incorporated herein by reference in their entirety.

[0030] Although the substrate transport device 12 is described in relation to a vacuum robot, any suitable substrate transport device for atmospheric or otherwise may be provided having the features described herein. The substrate transport device 12 comprises a controller 54, a drive unit 18, and an arm 20, and is configured to transport a substrate S. The controller 54 may comprise at least one processor 32, at least one memory 34, and software or computer code 36 configured to control the drive unit 18 and process input from sensors. The arm 20 is shown as a SCARA (Selective Compliance Assembly Robot Arm) type arm and is driven by the drive unit 18, but in another embodiment, any suitable arm may be provided. The substrate transport device 12 is shown with respect to a two-link arm, but any suitable number of links may be provided. Also, any suitable number of arms may be provided. Furthermore, any combination of a rotary axis and / or linear axis may be provided on any suitable arm.

[0031] The drive unit 18 forms a robot motor assembly. In this example, the robot motor assembly comprises a stator and a rotor. These stator and rotor are configured to drive a shaft connected to a first link 22 and a shaft connected to one of the pulleys in the first link. See also Figure 3, the drive unit 18 comprises a housing 38. The housing 38 isolates the internal environment 40 of the drive unit 18 and chamber 15 from the external environment 42 of the drive unit and chamber. A position encoder reference member or disk is connected to each of the rotor or shafts of the drive unit 18. An example of this is shown in Figure 3, where a position encoder reference member disk 44 is mounted on the shaft / rotor 46. The housing 38 of the motor assembly has an opening 48 that penetrates the housing. The opening 48 is aligned with the position encoder reference member disk 44. A position reading head 50 is mounted in the housing 38. A position reading head 50 is positioned in an opening 48 that penetrates the housing 38 to sense the location or position of the position encoder reference member disk 44 as the disk rotates in response to the rotation of the rotor / shaft 46. The output from the reading head 50 is supplied to the controller 54. Another example is shown in Figure 3A. Figure 3A schematically shows a robot direct drive module, such as the exemplary robot shown in Figure 1, as described in U.S. Patent Application Publication No. 2014 / 0077637. This figure shows a shaft 46a, a stator and rotor of a motor 47, a direct drive module housing 38a, an encoder track or reference member 44a, a bearing 49, and an encoder sensor 60a.

[0032] Referring also to Figure 4, in this embodiment, the position reading head 50 generally comprises a frame 56, a light emitter 58, a light sensor 60, an environment isolation wall 62, and an electronic circuit 59. In one exemplary embodiment, the sensor 60 is a plurality of light sensors arranged in an array to project at least one image, and the light emitter 58 includes a plurality of light emitters. This example is shown in Figure 4A along with the reading head 50'. In another embodiment, as shown in Figure 4B, the device may comprise a plurality of reading heads 50'', 50'''' mounted on the housing 38 and reading the same reference member 44, although the configurations of the light emitters and light sensors may differ.

[0033] Referring also to Figure 5, in this exemplary embodiment, a first connection 64 is provided between the sensor 60 and the frame 56, and a second connection 66 is provided between the separator wall 62 and the frame 56. However, as shown in Figure 6, the sensor 60 and the separator wall 62 may be an assembly integral with the sensor frame, and may have one type of connection 68 to the housing 38. The connections 64, 66, and 68 may be fixedly mounted or adjustable. In the example shown in Figure 4, the connection 64 is fixedly mounted, the connection 66 is an elastically flexible connection, and the connection 68 is adjustable.

[0034] In this exemplary embodiment, the environmental separation wall 62 is a transparent window, and the light sensor 60 is a camera. A retaining portion 70 is provided to hold the transparent window 62. The retaining portion 70 is connected to the frame 56 by a connecting portion 66. The retaining portion 70 is biased by the connecting portion 66 toward the opening 48, pressing the transparent window 62 against the seal 72. This seals the opening 48 with the seal 72 and the window 62, forming an optically transparent partition between the two environmental regions 40, 42 in the opening 48. Because the partition 62 is optically transparent, the camera 60 can capture an image from the reference member 44. Since all components of the reading head 50, including the camera 60, light emitter 58, and electronic circuitry 59, are outside the environmental region 40, there is no risk of gas release from these components within region 40. Since all components of the reading head 50, including the camera 60, light emitter 58, and electronic circuitry 59, are located outside the environmental area 40, no special design or housing of the reading head 50 or its components is required.

[0035] In addition to the features described herein, a position encoder may be incorporated into a robot direct drive module. The robot direct drive module is, for example, a drive unit 18 or one of several drive modules assembled to form the drive unit 18. For example, as shown in the exemplary embodiment in the drawings, a position encoder track such as on a disk 44 may be coupled to the driven portion 46 of the direct drive module, and a position reading head may be provided outside the housing 38 of the direct drive module.

[0036] In one exemplary embodiment, as schematically shown in Figure 4, the housing 38 of the direct drive module may feature an opening (slot) 48 positioned to provide an optical path (field of view) for the position encoder track from the outside of the housing of the direct drive module. The opening 48 may feature a separation wall 62 that separates the vacuum or other non-atmospheric environment inside the housing of the direct drive module from the environment outside the housing of the direct drive module. The separation wall 62 may be made of a substantially transparent material such as glass or acrylic. The separation wall 62 may be sealed to the housing of the direct drive module using, for example, an O-ring or a joint, or by any other suitable method.

[0037] The encoder track on the reference member 44 may have features that can be used to sense the location of the encoder track. For example, these features may be incremental tracks, and in some cases, the incremental tracks may be complemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

[0038] As shown in Figure 4, the reading head 50 may be located outside the direct drive module so as to sense the location of the encoder track through an opening in the housing of the direct drive module. The reading head may be substantially fixedly mounted to the housing of the direct drive module, or it may be movably coupled to the housing of the direct drive module so as to be adjustable relative to the encoder track. This adjustment may include the distance between the reading head and the encoder track, and the orientation of the reading head relative to the encoder track (e.g., pitch, roll, and yaw). Alternatively, the reading head may be held in any suitable manner near the opening.

[0039] Referring further to Figure 4, the reading head may also comprise an enclosure 56 and an optical system (including a sensor 60). The reading head may further comprise other components such as electronic components for controlling the reading head, processing data, and facilitating communication.

[0040] The optical system may be configured to detect the position of the encoder track relative to the reading head. For example, the optical system may include one or more light emitters, one or more photodetectors, and other optical elements such as lenses, mirrors, and masks. The light emitters and photodetectors may be arranged to detect features on the encoder track. For example, the photodetectors may detect features based on the reflection of light produced by the light emitters.

[0041] As another example, the optical system may include one or more light sources, one or more digital cameras, and other optical elements such as lenses, mirrors, and masks. The light sources may be positioned to provide illumination of the encoder track within the field of view of the digital camera. The digital camera may be positioned to periodically take photographs (images) of the encoder track. These photographs may be processed by the encoder reading head and / or outside the encoder reading head, for example, by a controller 54, to determine the location of the encoder track relative to the encoder reading head.

[0042] In another exemplary embodiment, as schematically shown in Figure 7, the housing 38 of the direct drive module may feature an opening (slot) 48 positioned to provide an optical path (field of view) for the position encoder track 44 from outside the housing of the direct drive module. The reading head 50a may be located outside the direct drive module so as to be able to sense the location of the encoder track 44 through the opening in the housing of the direct drive module.

[0043] The encoder track 44 may have features that can be used to sense the location of the encoder track. For example, these features may be incremental tracks, and in some cases, the incremental tracks may be complemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

[0044] The reading head 50a may include an enclosure 56a, a window 62, and an optical system including 58, 60. The reading head 50a may further include other components such as electronic components for controlling the reading head, processing data, and facilitating communication.

[0045] As shown in Figure 7, a window 62 may be provided in the enclosure of the read head to provide an optical path (field of view) between the optical systems 58, 60 and the encoder track 44 through an opening 48 in the housing 38 of the direct drive module. The window 62 may be made of a substantially transparent material such as glass or acrylic.

[0046] The optical system may be configured to detect the position of the encoder track 44 relative to the reading head. For example, the optical system may include one or more light emitters, one or more photodetectors, and other optical elements such as lenses, mirrors, and masks. The light emitters and photodetectors may be arranged to detect features on the encoder track. For example, the photodetectors may detect features based on the reflection of light produced by the light emitters. The light source may be arranged to provide illumination of the encoder track in the field of view of the digital camera. The digital camera 60 may be arranged to periodically take photographs (images) of the encoder track. These photographs may be processed by the encoder reading head to determine the location of the encoder track relative to the encoder reading head.

[0047] The reading head 50a may be mounted in the housing 38 of the direct drive module, and the window 62 of the reading head may be sealed to the housing 38 of the direct drive module around the opening 48 of the direct drive module, thereby isolating the vacuum or other non-atmospheric environment inside the housing of the direct drive module from the environment outside the direct drive module. This prevents the components inside the enclosure of the reading head 50a from being exposed to the vacuum or other non-atmospheric environment inside the housing of the direct drive module.

[0048] As shown in Figure 7, the reading head may be substantially fixedly mounted to the housing of the direct drive module, and the window 62 may be sealed to the housing 38 of the direct drive module using an O-ring or any other suitable seal. Further examples of sealing configurations are schematically shown in Figures 8, 9 (where the seal is compressed perpendicular to the installation direction of the reading head) and 10 (where the O-ring is compressed along the installation direction of the reading head). Figure 8 shows the housing 38b and the reading head 50b. The housing 38b has an opening 48b, and the reading head 50b comprises a frame 56b, a seal 72b, a window 62b, and optical elements including a light emitter 58 and a sensor 60. Figure 9 shows the housing 38c and the reading head 50c. The housing 38c has an opening 48c, and the reading head 50c comprises a frame 56c, a seal 72b, a window 62b, and optical elements including a light emitter 58 and a sensor 60. Figure 10 shows the housing 38b and the reading head 50d. The housing 38b has an opening 48b, and the reading head 50d comprises a frame 56c, a seal 72d, a window 62d, and optical elements including a light emitter 58 and a sensor 60. The window 62 may be shaped to provide sufficient space for the seal while simultaneously bringing the sensor components as desired close to the encoder track, as shown in Figure 11. Figure 11 shows the housing 38b and the reading head 50e. The housing 38b has an opening 48b, and the reading head 50e comprises a frame 56c, a seal 72d, a window 62e, and optical elements including a light emitter 58 and a sensor 60.

[0049] In all of the exemplary configurations shown in Figures 7 to 11, it should be noted that the window 62 is not necessarily sealed to the sensor enclosure 56, but may only be mechanically fixed, and the sealing occurs between the window 62 and the housing 38 of the direct drive module. It should also be noted that the window 62 in the examples of Figures 7 to 11 does not have to be a separate component. The window 62 may be conveniently formed by a component such as a lens of the optical system of the reading head, or by any other suitable component.

[0050] Alternatively, the reading head may be movably coupled to the housing of the direct drive module, allowing the sensor to be adjusted relative to the encoder track. This adjustment may include the distance between the reading head and the encoder track, and the orientation of the reading head relative to the encoder track (e.g., pitch, roll, and yaw). The sensor window may be sealed to the housing of the direct drive module by an O-ring, bellows, flexure, or any other suitable seal that gives the sensor sufficient range of motion while maintaining the seal.

[0051] In yet another exemplary embodiment, as schematically shown in Figure 12, the housing of the direct drive module may feature an opening (slot) positioned to provide an optical path (field of view) for the position encoder track from outside the housing of the direct drive module. The reading head may be located outside the direct drive module so as to be able to sense the location of the encoder track through the opening in the housing of the direct drive module. Figure 12 shows the housing 38 and the reading head 50f. The housing 38 has an opening 48, and the reading head 50f comprises a frame 56f, a seal 72, a window 62f, a seal 72f, and optical elements including a light emitter 58 and a sensor 60.

[0052] The encoder track may have features that can be used to sense the location of the encoder track. For example, these features may be incremental tracks, and in some cases, incremental tracks may be complemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

[0053] The reading head may include an enclosure, a window, and an optical system. The reading head may further include other components such as electronic components for controlling the reading head, processing data, and facilitating communication.

[0054] As shown in Figure 12, a window may be provided in the enclosure of the read head to provide an optical path (field of view) between the optical system and the encoder track through an opening in the housing of the direct drive module. The window may be made of a substantially transparent material such as glass or acrylic. The window may be sealed to the sensor enclosure using, for example, an O-ring or a joint.

[0055] The optical system may be configured to detect the position of the encoder track relative to the reading head. For example, the optical system may include one or more light emitters, one or more photodetectors, and other optical elements such as lenses, mirrors, and masks. The light emitters and photodetectors may be arranged to detect features on the encoder track. For example, the photodetectors may detect features based on the reflection of light produced by the light emitters.

[0056] As another example, the optical system may include one or more light sources, one or more digital cameras, and other optical elements such as lenses, mirrors, and masks. The light sources may be positioned to illuminate the encoder track within the field of view of the digital camera. The digital camera may be positioned to periodically take photographs (images) of the encoder track. These photographs may be processed by the encoder reading head to determine the location of the encoder track relative to the encoder reading head.

[0057] The reading head may be mounted in the housing of the direct drive module, sealing the sensor enclosure to the housing of the direct drive module around the opening of the direct drive module and around the window of the reading head, thereby isolating the vacuum or other non-atmospheric environment inside the housing of the direct drive module from the environment outside the direct drive module, and further isolating the components inside the reading head enclosure from the vacuum or other non-atmospheric environment inside the housing of the direct drive module. This prevents the components inside the reading head enclosure from being exposed to the vacuum or other non-atmospheric environment inside the housing of the direct drive module.

[0058] As shown in Figure 12, the reading head may be substantially fixedly mounted to the housing of the direct drive module, and the sensor enclosure may be sealed to the housing of the direct drive module using an O-ring or any suitable seal. Figures 14 and 15 show further exemplary embodiments, where the window is sealed to the enclosure of the reading head, and the enclosure of the reading head is sealed to the housing of the direct drive module. Figure 14 shows the housing 38h and the reading head 50h. The housing 38h has an opening 48h, and the reading head 50h comprises a frame 56h, seals 72h1, 72h2, a window 62h, and optical elements including a light emitter 58 and a sensor 60. Figure 15 shows the housing 38h and the reading head 50i. The housing 38h has an opening 48h, and the reading head 50i comprises a frame 56i, seals 72h1, 72h2, a window 62h, and optical elements including a light emitter 58 and a sensor 60.

[0059] The window in the example in Figure 12 does not have to be a separate component. The window may be conveniently formed by a component such as a lens of the sensor's optical system, or by any other suitable component.

[0060] Alternatively, the reading head may be movably coupled to the housing of the direct drive module, allowing adjustment of the reading head relative to the encoder track. This adjustment may include the distance between the reading head and the encoder track, and the orientation of the reading head relative to the encoder track (e.g., pitch, roll, and yaw). The reading head enclosure may be sealed to the housing of the direct drive module by an O-ring, bellows, flexure, or any other suitable seal that provides sufficient range of motion for the reading head while maintaining a seal.

[0061] In yet another exemplary embodiment, as schematically shown in Figure 13, the housing of the direct drive module may feature an opening (slot) positioned to provide an optical path (field of view) for the position encoder track from the outside of the housing of the direct drive module. Figure 13 shows the housing 38g and the reading head 50g. The housing 38g has an opening 48g, and the reading head 50g comprises frame members 56g1, 56g2, seals 72g1, 72g2, a window 62g, and optical elements including a light emitter 58 and a sensor 60. The sensor may be located on the outside of the direct drive module so as to sense the location of the encoder track through the opening in the housing of the direct drive module.

[0062] The encoder track may have features that can be used to sense the location of the encoder track. For example, these features may be incremental tracks, and in some cases, incremental tracks may be complemented by absolute tracks. As another example, these features may be patterns that can be decoded using image processing techniques.

[0063] The reading head may include a first enclosure, a window, and an optical system. The sensor may further include other components such as electronic components for controlling the reading head, processing data, and facilitating communication.

[0064] As shown in Figure 13, a window may be provided in the first enclosure of the read head to provide an optical path (field of view) between the optical system and the encoder track through an opening in the housing of the direct drive module. The window may be mechanically fixed to the first enclosure of the read head and sealed in a second enclosure (window seal in Figure 13), neither of which is the housing of the direct drive module. The second enclosure may then be sealed in the housing of the direct drive module (enclosure seal in Figure 13). This ensures that the enclosure of the read head is not intended to function as a partition between the atmospheric environment and the non-atmospheric environment in which it is used.

[0065] The window may consist of a substantially transparent material such as glass or acrylic. Alternatively, as illustrated in the examples in Figures 6 to 12, the window may be conveniently formed by components such as lenses of the optical system of the reading head, other optical elements that affect light, or any other suitable components.

[0066] The window may be sealed to the first enclosure of the read head, for example, using an O-ring or a joint. If desired, sealing may be achieved by adding features such as a flange to the window. Alternatively, sealing may be achieved using features available in commercially available read heads.

[0067] The optical system may be configured to detect the position of the encoder track relative to the reading head. For example, the optical system may include one or more light emitters, one or more photodetectors, and other optical elements such as lenses, mirrors, and masks. The light emitters and photodetectors may be arranged to detect features on the encoder track. For example, the photodetectors may detect features based on the reflection of light produced by the light emitters.

[0068] As another example, the optical system may include one or more light sources, one or more digital cameras, and other optical elements such as lenses, mirrors, and masks. The light sources may be positioned to illuminate the encoder track within the field of view of the digital camera. The digital camera may be positioned to periodically take photographs (images) of the encoder track. These photographs may be processed by the encoder reading head to determine the location of the encoder track relative to the encoder reading head.

[0069] The reading head may be mounted in the housing of the direct drive module, and the second enclosure may be sealed to the housing of the direct drive module. The second enclosure may then be sealed to the window of the reading head to isolate the vacuum or other non-atmospheric environment inside the housing of the direct drive module from the environment outside the direct drive module, and further isolate the components inside the second enclosure from the vacuum or other non-atmospheric environment inside the housing of the direct drive module. This prevents the components inside the second enclosure from being exposed to the vacuum or other non-atmospheric environment inside the housing of the direct drive module.

[0070] Alternatively, a second enclosure may be movably coupled to the housing of the direct drive module, allowing the read head to be adjusted relative to the encoder track. This adjustment may include the distance between the read head and the encoder track, and the orientation of the read head relative to the encoder track (e.g., pitch, roll, and yaw). The second enclosure may be sealed to the housing of the direct drive module by an O-ring, bellows, flexure, or any other suitable seal that provides sufficient range of motion for the read head while maintaining the seal.

[0071] In the exemplary embodiment described above, the read head is oriented radially inward, but it may also be oriented radially outward, for example, to point to the cylindrical inner surface of the disk, or axially upward or downward, for example, to point to one of the planes of the disk.

[0072] The features described herein may also be used to provide a drive mechanism (e.g., a robotic drive mechanism) that includes an optical encoder, wherein the disk of the optical encoder is in one environment (e.g., a vacuum environment), and the components of the optical encoder's read head, including the optical system and control electronics, are in another environment (e.g., an atmospheric environment), and there is a substantially transparent partition between the disk and the components of the read head.

[0073] In the exemplary embodiment, the reading head is oriented radially inward, but the sensor may be positioned to face radially outward toward the cylindrical inner surface of the disk, or axially (upward or downward) toward one of the planes of the disk 44. This arrangement may be extended to linear applications, including, for example, the exemplary linear robot described in U.S. Patent Application Publications 2015 / 0214086, 2016 / 0229296, and 2017 / 0036358. These references are incorporated herein by reference in their entirety.

[0074] An exemplary apparatus comprises a frame configured to be mounted on a motor assembly housing in close proximity to an opening extending through the housing; a position sensor including a camera connected to the frame; and an environmental isolation wall configured to be connected to the housing at the opening. The environmental isolation wall is at least partially transparent and is positioned relative to the camera so that the camera can project an image of the housing through the environmental isolation wall and the opening. The environmental isolation wall may be directly connected to the housing at the opening, or it may be indirectly connected to the housing, for example, via the frame of the apparatus. However, the environmental isolation wall at least partially constitutes an environmental seal of the opening penetrating the housing and also provides an optical path.

[0075] The apparatus may include a seal configured to be positioned directly between the environmental isolation wall and the housing of the motor assembly. The apparatus may include a first seal connected directly between the environmental isolation wall and the frame. The apparatus may include a second seal configured to be positioned directly between the frame and the housing of the motor assembly. The apparatus may include a seal and a partition wall retainer configured to press the environmental isolation wall against the seal. The partition wall retainer is configured to be pressed against the opening by the frame. The apparatus may include an elastic connector between the partition wall retainer and the frame, allowing the partition wall retainer to move relative to the frame, and when the frame is connected to the housing, the connector biases the partition wall retainer toward the opening. The environmental isolation wall may be a transparent window, which is in direct contact with the frame, and when the frame is connected to the housing, the transparent window is configured to be pressed against the opening by the frame. The apparatus may include the housing, a rotor located within the housing and equipped with a position reference member configured to be imaged by the camera, and at least one seal. The frame is connected to the housing by the at least one seal, and the environmental isolation wall seals the opening, thereby separating the first environmental region inside the housing from the second environmental region outside the housing. The frame does not need to be exposed to the first environmental region inside the housing.

[0076] An exemplary method may include providing a reading head comprising a frame and a camera connected to the frame, and connecting the reading head to a housing of a motor assembly, wherein the frame of the reading head is connected to the housing in proximity to an opening extending through the housing. The method may further include positioning an environmental isolation wall in the opening to separate a first environmental region inside the housing from a second environmental region in which the camera is located. The environmental isolation wall is at least partially transparent and is positioned relative to the camera so that the camera can project an image of the housing through the environmental isolation wall and the opening.

[0077] The method may include directly positioning a seal between the environmental isolation wall and the housing of the motor assembly. The method may include directly connecting a first seal between the environmental isolation wall and the frame. The method may include directly positioning a second seal between the frame and the housing of the motor assembly. The method may include providing a partition wall retainer that biases the environmental isolation wall toward the seal, the partition wall retainer being pressed toward the opening by the frame. The method may include providing an elastic connector between the partition wall retainer and the frame so that the partition wall retainer can move toward the frame, and when the frame is connected to the housing, the connector biases the partition wall retainer toward the opening. The environmental isolation wall may be a transparent window, the transparent window being in direct contact with the frame, and when the frame is connected to the housing, the transparent window being pressed toward the opening by the frame. A rotor may be located inside the housing, and the rotor may include a position reference member configured to be imaged by the camera, the frame being connected to the housing by at least one seal, and the environment isolation wall sealing the opening, thereby separating a first environment region inside the housing from a second environment region outside the housing. The frame may not be exposed to the first environment region inside the housing.

[0078] An exemplary method may include illuminating a reference member located inside the housing with a light emitter of a sensor located outside the housing of a motor assembly, and capturing an image of the reference member with a camera of the sensor located outside the housing. The image is visible to the camera through an opening in the housing and through a transparent environmental isolation wall located in the opening, the transparent environmental isolation wall sealing a first environment inside the housing from a second environment in which the sensor is located, the camera being located outside the first environment, and the transparent environmental isolation wall allowing the camera to capture the image from inside the housing even when the camera is outside the first environment.

[0079] An example in Figure 4 shows a viewing window in the housing of the direct drive module. Examples in Figures 7 to 11 show a seal directly positioned between the window and the housing of the direct drive module. Examples in Figures 12, 14, and 15 show a seal between the window and the enclosure of the read head, and another seal between the enclosure of the read head and the housing of the direct drive module. An example in Figure 13 shows two enclosures.

[0080] Exemplary embodiments of the apparatus may be provided. The apparatus comprises a frame configured to be mounted on a motor assembly housing in close proximity to an opening extending through the housing; at least one light emitter connected to the frame; an array of optical sensors connected to the frame; and an environmental isolation wall configured to be connected to the housing at the opening. The environmental isolation wall is at least partially transparent and is positioned relative to the array of optical sensors so that the array of optical sensors can project images of the inside of the housing through the environmental isolation wall and the opening.

[0081] Exemplary methods may be provided. The method includes providing a reading head comprising a frame, at least one light emitter connected to the frame, and an optical sensor array connected to the frame, and connecting the reading head to a housing of a motor assembly, wherein the frame of the reading head is connected to the housing in proximity to an opening extending through the housing. The method further includes positioning an environmental isolation wall in the opening to separate a first environmental region inside the housing from a second environmental region in which the optical sensor array is located. The environmental isolation wall is at least partially transparent and is positioned relative to the optical sensor array so that the optical sensor array can project images inside the housing through the environmental isolation wall and the opening.

[0082] Exemplary methods may be provided. The method includes illuminating a reference member located inside the housing with at least one light emitter of a reading head located at least partially outside the housing of a motor assembly, and projecting at least one image of the reference member with an optical sensor array of the reading head located at least partially outside the housing. The at least one image is visible to the optical sensor array through an opening in the housing and through a transparent environmental isolation wall located in the opening, the transparent environmental isolation wall sealing a first environment inside the housing from a second environment in which the optical sensor array is located, the optical sensor array being located outside the first environment, and the transparent environmental isolation wall allowing the optical sensor array to project the at least one image from inside the housing even when the optical sensor array is outside the first environment.

[0083] It should be noted that the above explanation is merely an example. Various modifications and alterations can be conceived by those skilled in the art. For example, the features described in the various dependent claims within the claims can be combined with each other in any suitable combination. In addition, it is possible to selectively combine features from the various embodiments described above to create new embodiments. Therefore, this specification encompasses all changes, alterations, and variations included in the appended claims.

[0084] The inventions described in the original claims of the application are listed below. [1] frame and; The frame is connected to at least one light-emitting element; An optical sensor array connected to the frame; Environmental separation partition and; A device equipped with, The frame is configured to be attached to another component, provided that it is configured to be attached to the other component in close proximity to an opening through which the other component passes. The environmental isolation partition is configured to be attached to the other component in close proximity to the opening, is at least partially transparent, and is positioned relative to the optical sensor array so that the optical sensor array can view images through the environmental isolation partition and the opening. Device. [2] The apparatus according to [1], further comprising a seal configured to be positioned directly between the environmental separation partition and the other component. [3] The apparatus according to [1], further comprising a first seal directly connected between the environmental isolation partition and the frame. [4] The apparatus according to [3], further comprising a second seal configured to be positioned directly between the frame and the other component. [5] The apparatus according to [1], further comprising a seal and a partition holding portion configured to press the environmental separation partition against the seal, wherein the partition holding portion is configured to be pressed toward the opening by the frame. [6] The apparatus according to [5], wherein a resilient connecting portion is provided between the partition wall holder and the frame, allowing the partition wall holder to move relative to the frame, and when the frame is attached to the other component, the connecting portion biases the partition wall holder toward the opening. [7] The apparatus according to [1], wherein the environmental separation partition has a transparent window that is in direct contact with the frame, and the transparent window is positioned so that it is pressed toward the opening by the frame when the frame is attached to the other component. [8] The other part mentioned above, A rotor having a position reference component provided inside the aforementioned other component and configured to be imaged by the optical sensor array, At least one seal and The apparatus according to [1], further comprising, wherein the frame is coupled to the other component by the at least one seal and the environmental isolation partition, and the environmental isolation partition seals the opening so as to separate a first environmental region inside the other component from a second environmental region outside the other component. [9] The apparatus according to [8], wherein the frame is not exposed to the first environmental area within the other component.

[10] The apparatus according to [1], wherein the optical sensor array has an array of cameras.

[11] Prepare a reading head comprising a frame, at least one light-emitting element connected to the frame, and an optical sensor array connected to the frame; The reading head is coupled to another component, wherein the frame of the reading head is coupled to the other component near an opening through which the other component passes; To separate the first environmental region inside the other component from the second environmental region where the optical sensor array is located, an environmental separation partition is placed in the opening; A method comprising the environmental isolation partition being at least partially transparent, and being positioned relative to the optical sensor array so that the optical sensor array can view images through the environmental isolation partition and the opening.

[12] The method of

[11] , further comprising arranging a seal so as to be directly located between the environmental separation partition and the other member.

[13] The method according to

[11] , further comprising directly bonding the first seal between the environmental separation partition and the frame.

[14] The method according to

[13] , further comprising directly positioning a second seal between the frame and the other component.

[15] The method according to

[11] , further comprising providing a partition retainer for biasing the environmental separation partition with respect to the seal, wherein the partition retainer is pressed toward the opening by the frame.

[16] The method of

[15] , further comprising providing a resilient connecting portion between the partition wall holder and the frame, which allows the partition wall holder to move relative to the frame, and the connecting portion biases the partition wall holder toward the opening when the frame is attached to the other component.

[17] The method according to

[11] , wherein the environmental isolation partition has a transparent window that is in direct contact with the frame, and the transparent window is pressed toward the opening by the frame when the frame is attached to the other component.

[18] A rotor is located inside the other component, and the rotor has a position reference component configured to be imaged by the optical sensor array, The frame is connected to the other component by at least one seal and the environmental isolation partition, The environmental separation partition seals the opening so as to separate the first environmental region inside the other component from the second environmental region outside the other component.

[11] by the method described in the following document.

[19] The method according to

[18] , wherein the frame is not exposed to the first environmental area within the other component.

[20] The method according to

[11] , wherein the optical sensor array includes at least one camera.

[21] The apparatus according to [1], wherein the other component is a first frame member of a first link of a robot arm.

[22] The apparatus according to

[21] , further comprising a seal configured to be positioned between the environmental separation partition and the other component.

[23] An image is placed on a position reference member positioned on the rotor, The frame, the environment separation partition, and the seal are configured to seal, at the opening, a first environment including the optical sensor array from a second environment different from the first environment and including the position reference member. The apparatus described in

[22] .

[24] The apparatus according to

[23] , wherein the seal includes a bonding seal having a bonding material.

[25] The apparatus according to [2], wherein the seal has a bonding material.

[26] The method of

[12] wherein the seal has a bonding material.

[27] The method according to

[26] , wherein the other component is a first frame member of the first link of the robot arm.

[28] The image is located on a position reference member placed on the rotor, The frame, the environment separation partition, and the seal are configured to seal a first environment, including the position reference member, from a second environment, which is different from the first environment and includes the optical sensor array. The method described in

[27] .

[29] The other component has a first frame member of the first rotatable link of the robot arm, The image is on a position reference member placed on the rotor, The frame, the environment separation partition, and the seal are configured to seal, at the opening, a first environment including the optical sensor array from a second environment different from the first environment and including the position reference member. The method described in

[12] .

[30] frames and; The frame is connected to at least one light-emitting element; At least one optical sensor connected to the frame; Environmental separation partition and; Seals and; A device equipped with, The frame is configured to be attached to the housing, provided that it is attached to the housing in close proximity to an opening that penetrates the housing. The environmental isolation partition is configured to be attached to the housing in close proximity to the opening, is at least partially transparent, and is positioned relative to the at least one optical sensor so that the at least one optical sensor can view an image through the environmental isolation partition and the opening. The seal is configured to be positioned in close proximity to the opening and directly between the environmental isolation partition and the housing. Device.

[31] The apparatus according to

[30] , wherein the seal has a bonding material.

[32] The apparatus according to

[31] , wherein the frame is configured to be attached to the housing by a joining material to form a seal joint, and the housing constitutes a frame component of the link of the robot arm.

Claims

1. It is a device, The device comprises a frame, the frame being configured to be attached to another component, but in proximity to an opening through which the other component passes, the other component having a first frame member for a first link of a robot arm, and the device further comprises, The frame is connected to at least one light-emitting element; An optical sensor array connected to the frame; Environmental separation partition and; The apparatus further comprises, wherein the environmental isolation partition is configured to be attached to the other component adjacent to the opening, is at least partially transparent, and is positioned relative to the optical sensor array so that the optical sensor array can view images through the environmental isolation partition and the opening, and the apparatus further, An apparatus comprising a seal located directly between the environmental separation partition and the first frame member of the first link of the robot arm, wherein the seal includes a bonding seal having a bonding material.

2. The apparatus according to claim 1, wherein the joining material is made of a material for joining.

3. The apparatus according to claim 1, further comprising another seal that directly connects the environmental isolation partition and the frame.

4. The apparatus according to claim 1, further comprising a partition holding portion configured to press the environmental separation partition against the seal, wherein the partition holding portion is configured to be pressed toward the opening by the frame.

5. The apparatus according to claim 4, wherein a resilient connecting portion is provided between the partition wall holding portion and the frame, allowing the partition wall holding portion to move relative to the frame, and the connecting portion biases the partition wall holding portion toward the opening.

6. The apparatus according to claim 1, wherein the environmental separation partition has a transparent window that is in direct contact with the frame, and the transparent window is positioned so as to be pressed toward the opening by the frame.

7. The aforementioned other part, A rotor having a position reference component provided inside the aforementioned other component and configured to be imaged by the optical sensor array, Furthermore, The frame is connected to the other component by the seal and the environmental isolation partition, the environmental isolation partition sealing the opening so as to separate a first environmental region inside the other component from a second environmental region outside the other component. The apparatus according to claim 1.

8. The apparatus according to claim 7, wherein the frame is not exposed to the first environmental area.

9. The apparatus according to claim 1, wherein the optical sensor array has an array of cameras.

10. It is a method, To provide a reading head having a frame, at least one light-emitting element connected to the frame, and an optical sensor array connected to the frame; The reading head is attached to another component; The frame of the reading head is attached to the other part, but is attached to the other part in proximity to an opening that penetrates the other part, and the other part has a first frame member for a first link of a robot arm. The method further includes arranging an environmental isolation partition in the opening to separate the first environmental region inside the other component from the second environmental region where the optical sensor array is located, wherein the environmental isolation partition is at least partially transparent and is positioned relative to the optical sensor array so that the optical sensor array can view images through the environmental isolation partition and the opening. The method further includes positioning a seal directly between the environmental separation partition and the other component, wherein the seal has a bonding material. method.

11. The method according to claim 10, further comprising positioning another seal directly between the environmental isolation partition and the frame.

12. The method according to claim 10, further comprising providing a partition wall holding portion for biasing the environmental separation partition wall with respect to the seal, wherein the partition wall holding portion is pressed toward the opening by the frame.

13. The method according to claim 12, comprising providing an elastic connecting portion between the partition wall holding portion and the frame, which allows the partition wall holding portion to move relative to the frame, and the connecting portion biases the partition wall holding portion toward the opening.

14. The method according to claim 10, wherein the environmental separation partition has a transparent window that is in direct contact with the frame, and the transparent window is pressed toward the opening by the frame.

15. A rotor is located inside the aforementioned other component, and the rotor has a position reference component configured to be imaged by the optical sensor array, The frame is connected to the other component by at least the seal and the environmental separation partition, The environmental separation partition seals the opening so as to separate the first environmental region inside the other component from the second environmental region outside the other component. The method according to claim 10.

16. The method according to claim 15, wherein the frame is not exposed to the first environmental area.

17. The method according to claim 10, wherein the optical sensor array includes at least one camera.

18. The method according to claim 10, wherein the image is located on a position reference member positioned on a rotor, and the frame, the environment separation partition, and the seal are configured to seal a first environment including the optical sensor array from a second environment different from the first environment and including the position reference member at the opening.

19. The aforementioned image is located on a position reference member placed on the rotor, The frame, the environment separation partition, and the seal are configured to seal a first environment, including the position reference member, from a second environment, which is different from the first environment and includes the optical sensor array. The method according to claim 15.

20. The aforementioned image is located on a position reference member placed on the rotor, A position reference component is placed within the first environment, The frame, the environmental separation partition, and the seal are configured to seal the first environment from the second environment at the opening. The method according to claim 19.

21. It is a device, Frame and; The frame is configured to be attached to the housing, provided that it is configured to be attached to the housing in close proximity to an opening that penetrates the housing. The frame is connected to at least one light-emitting element; At least one optical sensor connected to the frame; Environmental separation partition and; The environmental isolation partition is configured to be attached to the housing in close proximity to the opening, is at least partially transparent, and is positioned relative to the at least one optical sensor so that the at least one optical sensor can view an image through the environmental isolation partition and the opening. A seal configured to be positioned in close proximity to the opening and directly between the environmental separation partition and the housing, the seal including a bonding material; Equipped with, The housing has a frame member for the link of the robot arm, The frame is attached to the housing by a connecting material. Device.

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