Latch mechanism and an irregular rectangular reticle container using the same.

Abstract

The objective is to provide a latch mechanism applicable to the door of an irregular rectangular reticle container. [Solution] The door is provided with a drive member, and a plurality of driven assemblies that each abut the drive member and, when the drive member rotates, are driven synchronously to reciprocate while protruding from or retracting from the door, and at least one of the driven assemblies can lock or unlock the side of the door of the non-equal-sided rectangular reticle container.

Description

Technical Field

[0003] , , ,

[0004]

[0001] The present invention relates to a latch mechanism, and particularly to a latch mechanism for a non-equilateral rectangular reticle container.

Background Art

[0002] With the development of EUV exposure imaging related technologies with high NA, the size of reticles has been increasing. As a result, the development of larger non-equilateral rectangular reticle containers has been demanded. The latch mechanism in the current reticle container rotates by fitting a central cam and a load port, and has a structure that operates two sets of latch mechanisms. As shown in FIG. 10, the latch mechanism in the door 800 of the conventional reticle container includes a cam 80 and two latch members 82, and the rotation of the cam 80 causes the latch members 82 to protrude or retract from the door 800. When the overall size of the reticle container increases, the weight of the container also increases. When the current latch mechanism is directly applied to a large reticle container (for example, a 6×12 size reticle container), it becomes difficult to stably connect the door to the housing with the current latch mechanism. The portion of the door not restrained by the latch mechanism becomes longer, and problems such as a decrease in airtightness and deformation of the door are likely to occur, resulting in issues such as the reticle container not being able to be opened and closed smoothly.

Summary of the Invention

Problems to be Solved by the Invention

[0003] In view of the above problems, the present invention has compatibility with the current load port, avoids the need for the manufacturer to purchase additional new machinery, and can improve the airtightness of a non-equilateral rectangular reticle container, and proposes a latch mechanism applicable to a non-equilateral rectangular reticle container.

Means for Solving the Problems

[0004] The present invention provides a latch mechanism applicable to the door of an irregular rectangular reticle container. The latch mechanism comprises a drive member provided on the door, and a plurality of driven assemblies, each in contact with the drive member, and when the drive member rotates, a plurality of driven assemblies are driven synchronously to reciprocate while protruding from or retracting from the door, and at least one of the driven assemblies can lock or unlock the side edge position of the door of the irregular rectangular reticle container.

[0005] In one specific embodiment, the plurality of driven assemblies are configured to lock or unlock the long side position of the door of the non-equal-sided rectangular reticle container.

[0006] In one specific embodiment, the plurality of driven assemblies are each located on opposing sides of the door and are connected to the drive member, and each driven assembly comprises a driven member and a latch member, the driven member having a connecting rib with one end connected to the drive member and the other end connected to the latch member, and when the drive member rotates, the driven members are driven synchronously so that the latch member protrudes or retracts from the door.

[0007] In one specific embodiment, when the drive member rotates, the driven member is driven synchronously, the connecting rib moves linearly in the lateral direction, and pushes the latch member vertically toward the side of the door, causing the latch member to protrude or retract from the door.

[0008] In one specific embodiment, each connecting rib has two opposing inclined surfaces, and the latch member is driven by the connecting rib and slides along the inclined surfaces, thereby protruding from or retracting from the side of the door.

[0009] In one specific embodiment, each of the plurality of driven assemblies comprises a connecting rib, at least one long-side latch member, and at least one short-side latch member, one end of the connecting rib being connected to the drive member, the long-side latch member being positioned on the long side of the door, and the short-side latch member being positioned on the short side of the door, and when the drive member rotates, the plurality of driven assemblies are driven synchronously, and the connecting rib moves linearly in the lateral direction, pushing the long-side latch member toward the long side of the door and the short-side latch member toward the short side of the door in a synchronous manner, thereby causing the long-side latch member and the short-side latch member to simultaneously protrude from or retract from the door.

[0010] In one specific embodiment, each connecting rib has two opposing inclined surfaces that align with the position of the long-side latch member, the short-side latch member is positioned at the end of the connecting rib away from the drive member, the long-side latch member is driven by the connecting rib to slide along the inclined surface and protrude or retract toward the long side of the door, and the short-side latch member is driven by the connecting rib to protrude or retract toward the short side of the door.

[0011] In one specific embodiment, the end of the connecting rib away from the drive member is connected to the short-side latch member, and the movement of the short-side latch member is synchronized with the movement of the connecting rib.

[0012] In one specific embodiment, when a plurality of the short-side latch members are provided on the plurality of driven assemblies, the plurality of short-side latch members are connected to the connecting rib via a connecting portion, and the movement of the plurality of short-side latch members is synchronized with the movement of the connecting rib.

[0013] In one specific embodiment, each of a plurality of driven assemblies comprises a driven member and at least one latch member, wherein the driving member and the driven member are configured as drive wheels that can be driven together to transmit power, and when the driving member rotates, the driven member is rotated synchronously, causing the latch member to protrude or retract from the door.

[0014] In one specific embodiment, the driving member has a first tooth surface, each of the driven members has a second tooth surface, and the first tooth surface and the second tooth surface are configured to engage with each other, so that when the driving member rotates, the plurality of driven members are rotated in synchronous motion.

[0015] In one specific embodiment, each of the plurality of driven assemblies comprises two of the driven members, spaced apart and located near the short side of the door.

[0016] In one specific embodiment, each of the plurality of driven assemblies comprises at least one long-side latch member and at least one short-side latch member, wherein the long-side latch member is positioned on the long side of the door and the short-side latch member is positioned on the short side of the door.

[0017] In one specific embodiment, the drive member is provided in the central region of the door, and the length and width of the central region are defined by 0.9 times the length and 0.9 times the width of the non-equal-sided rectangular reticle, respectively, and the center of the region corresponds to the geometric center of the door.

[0018] The present invention also provides an unequal rectangular reticle container equipped with the aforementioned latch mechanism. [Brief explanation of the drawing]

[0019] [Figure 1A] This is a perspective view of an asymmetrical rectangular reticle container (a dual reticle pod). [Figure 1B] Figure 1A is an exploded view. [Figure 2A] This is a schematic diagram of the latch mechanism according to the first embodiment of the present invention when it is in the locked state. [Figure 2B] This is a schematic diagram of the latch mechanism according to the first embodiment of the present invention when it is in the unlocked state. [Figure 3A] This is a schematic diagram of the latch mechanism according to the second embodiment of the present invention when it is in the locked state. [Figure 3B]Schematic diagram when the latch mechanism according to the second embodiment of the present invention is in the unlocked state. [Figure 4A] Schematic diagram when the latch mechanism according to the third embodiment of the present invention is in the locked state. [Figure 4B] Schematic diagram when the latch mechanism according to the third embodiment of the present invention is in the unlocked state. [Figure 5A] Schematic diagram when the latch mechanism according to the fourth embodiment of the present invention is in the locked state. [Figure 5B] Schematic diagram when the latch mechanism according to the fourth embodiment of the present invention is in the unlocked state. [Figure 6A] Schematic diagram when the latch mechanism according to the fifth embodiment of the present invention is in the locked state. [Figure 6B] Schematic diagram when the latch mechanism according to the fifth embodiment of the present invention is in the unlocked state. [Figure 7A] Schematic diagram when the latch mechanism according to the sixth embodiment of the present invention is in the locked state. [Figure 7B] Schematic diagram when the latch mechanism according to the sixth embodiment of the present invention is in the unlocked state. [Figure 8A] Schematic diagram when the latch mechanism according to the seventh embodiment of the present invention is in the locked state. [Figure 8B] Schematic diagram when the latch mechanism according to the seventh embodiment of the present invention is in the unlocked state. [Figure 9A] Schematic diagram when the latch mechanism according to the eighth embodiment of the present invention is in the locked state. [Figure 9B] Schematic diagram when the latch mechanism according to the eighth embodiment of the present invention is in the unlocked state. [Figure 10] Schematic diagram of a conventional reticle container and latch mechanism.

Embodiments for Carrying Out the Invention

[0020] Referring to Figures 1A and 1B, these are perspective and exploded views of an irregular rectangular reticle container applicable to the present invention. The irregular rectangular reticle container comprises an outer pod and an inner pod housed in the outer pod. The outer pod comprises a door 90 and a housing 91 that engages with the door 90. The inner pod comprises an inner base 92 and an inner lid 93 that engages with the inner base 92. The present invention is a latch mechanism applicable to an irregular rectangular reticle container, the latch mechanism being provided on the door 90 and used to lock or unlock the housing 91 and the door 90. The latch mechanism comprises a drive member that can be linked in response to the drive and a plurality of driven assemblies. When the drive member rotates, the plurality of driven assemblies are driven synchronously and reciprocate while protruding from or retracting from the door 90, so that at least one of the plurality of driven assemblies can be locked or unlocked at the side position of the door of the irregular rectangular reticle container. The structural design and operation of different embodiments of the latch mechanism will be described in detail below.

[0021] (First Embodiment) Referring to Figures 2A and 2B, these are schematic diagrams of the latch mechanism according to the first embodiment of the present invention in the locked and unlocked states, respectively.

[0022] A first embodiment of the present invention provides a latch mechanism provided on the door 90 of an irregular rectangular reticle container. The door 90 has two long sides 901A, 901B and two short sides 902A, 902B. The latch mechanism comprises a drive member 10 and a plurality of driven assemblies. The drive member 10 is located in the central region of the door 90 and is used to drive the plurality of driven assemblies synchronously. The length and width of the central region are defined by 0.9 times the length and 0.9 times the width of the irregular rectangular reticle, respectively, and the center of the region is aligned with the geometric center of the door 90. Preferably, the drive member 10 is positioned substantially at the geometric center of the door 90.

[0023] In the first embodiment, the drive member 10 is a cam, and the two driven assemblies are located on opposing sides of the door 90 (e.g., long sides 901A, 901B) and are simultaneously coupled to the drive member 10. Each driven assembly comprises at least one driven member 20A, 20B and latch members 23A to 23D, and each driven member 20A, 20B has at least one connecting rib 21A to 21D. For example, the connecting ribs 21A, 21B of the driven member 20A extend from the drive member 10 in the direction of the long side 901A at an angle θ to form a V-shaped structure, and the latch members 23A, 23B are each connected to one end of the connecting ribs 21A, 21B. Similarly, the connecting ribs 21C and 21D of the driven member 20B extend from the drive member 10 at an angle θ in the direction of the long side 901B, forming a V-shaped structure, and the latch members 23C and 23D are connected to one end of the connecting ribs 21A and 21B, respectively. The latch members 23A to 23D are all used to engage with corresponding receiving portions of the housing. Preferably, the angle θ is a right angle or an obtuse angle, i.e., θ ≥ 90°. This allows two of the latch members 23A to 23D to protrude at predetermined intervals from the long sides 901A and 901B.

[0024] In the first embodiment, when the drive member 10 rotates, for example, clockwise or counterclockwise, the two driven members 20A and 20B are driven synchronously and move linearly. As shown in Figure 2A, the latch members 23A to 23D each protrude from the two long sides 901A and 901B of the door 90 and engage with corresponding receiving parts (not shown) of the housing to lock the housing. As shown in Figure 2B, the latch members 23A to 23D each retract into the long sides 901A and 901B of the door 90, respectively, to unlock the housing. By operating the drive member 10 as described above to move the two driven members 20A and 20B back and forth, at least one of the latch members 23A to 23D can lock or unlock at two locations on at least one of the long sides 901A and 901B of the door 90 of the non-equal-sided rectangular reticle container.

[0025] (Second Embodiment) Referring to Figures 3A and 3B, schematic diagrams of the latch mechanism according to the second embodiment of the present invention in the locked and unlocked states, respectively. In the second embodiment, the latch mechanism is provided on the door 90 of an unequal rectangular reticle container, the door 90 having two long sides 901A, 901B and two short sides 902A, 902B. The latch mechanism comprises a drive member 10 and a plurality of driven assemblies, the plurality of driven assemblies each located on the two opposing short sides 902A, 902B of the door 90. Each driven assembly comprises driven members 20A, 20B and at least one latch member 31A to 31D. The driven members 20A, 20B each have connecting ribs 21A, 21B, one end of which is connected to the drive member 10 and the other end of which is connected to at least one latch member 31A to 31D. The latch members are positioned on the long sides 901A and 901B of the door 90. Specifically, the connecting rib 21A of the driven member 20A extends a predetermined length from the drive member 10 toward the short side 902A and is used to push the latch members 31A and 31B. Similarly, the connecting rib 21B of the driven member 20B extends a predetermined length from the drive member 10 toward the short side 902B and is used to push the latch members 31C and 31D. When the drive member 10 rotates, the driven members 20A and 20B are driven synchronously, and the connecting ribs 21A and 21B move linearly laterally toward the short sides 902A and 902B, respectively. The connecting rib 21A moving toward the short side 902A pushes the latch member 31A toward the long side 901A and the latch member 31B toward the long side 901B, respectively, in the vertical direction. Simultaneously, the connecting rib 21B, which moves in the direction of the shorter side 902B, pushes the latch member 31C vertically in the direction of the longer side 901A, and the latch member 31D vertically in the direction of the longer side 901B. As described above, by operating the drive member 10 to move the two driven members 20A and 20B back and forth, the latch members 31A to 31D synchronously protrude or retract from the door, making it possible to lock or unlock the door 90 of the non-equal-sided rectangular reticle container at two positions on the longer sides 901A and 901B.

[0026] In the second embodiment, each connecting rib 21A, 21B has two opposing inclined surfaces 25A, 25B and 25C, 25D, and the latch members 31A to 31D abut against the inclined surfaces 25A and 25B. For example, the connecting rib 21A of the driven member 20A has two opposing inclined surfaces 25A and 25B, with the latch member 31A abutting against inclined surface 25A and the latch member 31B abutting against inclined surface 25B. Similarly, the connecting rib 21B of the driven member 20B has two opposing inclined surfaces 25C and 25D, with the latch member 31C abutting against inclined surface 25C and the latch member 31D abutting against inclined surface 25D. The latch members 31A and 31B are driven by the connecting rib 21A and slide along the inclined surfaces 25A and 25B, respectively, while the latch members 31C and 31D are driven by the connecting rib 21B and slide along the inclined surfaces 25C and 25D, respectively. When the drive member 10 rotates, the connecting ribs 21A and 21B of the driven members 20A and 20B are driven synchronously, moving linearly laterally in the direction of the shorter sides 902A and 902B, respectively. The latch members 31A to 31D are driven by the lateral movement of the connecting ribs 21A and 21B, sliding along the inclined surfaces 25A to 25D, and moving vertically in the direction of the longer sides 901A and 901B, causing the latch members 31A to 31D to lock the door 90 from the longer sides 901A and 901B (see Figure 3A), or the latch members 31A to 31D retract into the longer sides 901A and 901B of the door 90, unlocking it (see Figure 3B).

[0027] (Third embodiment) Referring to Figures 4A and 4B, these are schematic diagrams of the latch mechanism according to the third embodiment of the present invention in the locked and unlocked states, respectively. The similarities between the third embodiment and the second embodiment will not be repeated, and only the differences will be described below. In the second embodiment, the door 90 is configured to lock and unlock on the long sides 901A and 902B, while in the third embodiment, the door 90 is configured to lock and unlock simultaneously on both the long sides 901A and 902B and the short sides 902A and 902B.

[0028] In the third embodiment, each of the multiple driven assemblies is structurally designed to lock both the long and short sides simultaneously. Specifically, each driven assembly comprises driven members 20A and 20B, at least one long-side latch member 31A to 31D, and at least one short-side latch member 26A and 26B. The connecting rib 21A of the driven member 20A extends a predetermined length from the drive member 10 in the direction of the short side 902A, the long-side latch members 31A and 31B are positioned on the long sides 901A and 901B of the door 90, respectively, and the short-side latch member 26A is positioned on the short side 902A of the door 90. Similarly, the connecting rib 21B of the driven member 20B extends a predetermined length from the drive member 10 in the direction of the short side 902B, the long side latch members 31C and 31D are positioned on the long sides 901A and 901B of the door 90, respectively, and the short side latch member 26B is positioned on the short side 902B of the door 90. When the drive member 10 rotates, the driven members 20A and 20B are driven synchronously. The connecting rib 21A of the driven member 20A moves linearly in the lateral direction, pushing the long side latch member 31A toward the long side 901A of the door, the long side latch member 31B toward the long side 901B of the door, and the short side latch member 26A toward the short side 902A of the door. The connecting rib 21B of the driven member 20B moves linearly in the lateral direction, pushing the long-side latch member 31C toward the long side 901A of the door, the long-side latch member 31D toward the long side 901B of the door, and the short-side latch member 26B toward the short side 902B of the door. From the above description of operation, in the third embodiment, when the drive member 10 rotates (for example, the locked or unlocked state is defined by clockwise or counterclockwise rotation), the connecting ribs 21A and 21B of the driven members 20A and 20B move linearly in the lateral direction, and the long-side latch members 31A to 31D and the short-side latch members 26A and 26B simultaneously protrude or retract from the long sides 901A and 901B and the short sides 902A and 902B of the door 90, respectively, making it possible to lock or unlock the door 90 of the non-equal-sided rectangular reticle container relative to its side position. The long-side latch members 31A to 31D and the short-side latch members 26A and 26B are all used to engage with the corresponding receiving parts of the housing, thereby stably connecting the long sides 901A and 901B and the short sides 902A and 902B of the door to the housing.

[0029] (Fourth Embodiment) Referring to Figures 5A and 5B, these are schematic diagrams of the latch mechanism according to the fourth embodiment of the present invention in the locked and unlocked states, respectively. The similarities between the fourth embodiment and the third embodiment will not be repeated and only the differences will be described below. In the third embodiment, the driven members 20A and 20B are configured to each have one short-side latch member 26A and 26B. The ends of the connecting ribs 21A and 21B of the driven members 20A and 20B that are away from the drive member 10 are connected to the short-side latch members 26A and 26B, respectively, so that the lateral linear movement stroke of the short-side latch member is synchronized with the movement of the connecting rib. In the fourth embodiment, each driven member 20A and 20B is configured to have multiple short-side latch members 33A to 33B and 33C to 33D, respectively.

[0030] In the fourth embodiment, the driven members 20A and 20B each further include connecting portions 27A and 27B, which connect the multiple short-side latch members 33A to 33D and the connecting ribs 21A and 21B. Specifically, the connecting rib 21A of the driven member 20A is connected to the short-side latch members 33A and 33B via the connecting portion 27A. The short-side latch members 33A and 33B are spaced apart on one side of the connecting portion 27A and are provided to face the short side 902A of the door 90. Similarly, the connecting rib 21B of the driven member 20B is connected to the short-side latch members 33C and 33D via the connecting portion 27B. The short-side latch members 33C and 33D are spaced apart on one side of the connecting portion 27B and are provided to face the short side 902B of the door 90. When the drive member 10 rotates (for example, the locked or unlocked state is defined by clockwise or counterclockwise rotation), the connecting ribs 21A and 21B of the driven members 20A and 20B move linearly in the lateral direction, and the lateral linear movement of the short-side latch members 33A to 33D is performed in synchronization with the movement of the connecting ribs 21A and 21B. The number of corresponding receiving parts of the housing is configured to correspond to the number of short-side latch members, thereby stably connecting the short sides 902A and 902B of the door 90 to the housing.

[0031] In the first to fourth embodiments, the driven member may further include an elastic member (e.g., a spring or an elastic structural member) that continuously biases the driven member and presses it in the direction of the long and short sides of the door 90. Through this elastic member, the reticle container is kept locked, preventing malfunctions in the unlocking mechanism of the load port and providing further protection for the reticle.

[0032] (Fifth embodiment) Referring to Figures 6A and 6B, these are schematic diagrams of the latch mechanism according to the fifth embodiment of the present invention in the locked and unlocked states, respectively. The similarities between the fifth embodiment and the second embodiment will not be repeated, and only the differences will be described below. In the fifth embodiment, the connecting ribs 21A and 21B of the second embodiment are replaced with drive wheels. Specifically, the latch mechanism of the fifth embodiment comprises a drive member 10 and a plurality of driven assemblies. The drive member 10 is provided in the central region of the door 90 and is used to synchronously drive the plurality of driven assemblies. Each driven assembly comprises driven members 20A and 20B and latch members 31A to 31D. The drive member 10 and the plurality of driven members 20A and 20B are configured as drive wheels capable of transmitting power to each other. When the drive member 10 rotates, the plurality of driven members 20A and 20B are rotated synchronously, causing the latch members 31A to 31D to protrude or retract from the door.

[0033] (Sixth Embodiment) Referring to Figures 7A and 7B, these are schematic diagrams of the latch mechanism according to the sixth embodiment of the present invention in the locked and unlocked states, respectively. The similarities between the sixth embodiment and the fifth and third embodiments will not be repeated, and only the differences will be described below. In the fifth embodiment, the door 90 is configured to lock and unlock on the long sides 901A and 902B, whereas in the sixth embodiment, the door 90 is configured to lock and unlock on both the long sides 901A and 902B and the short sides 902A and 902B. In the sixth embodiment, the connecting ribs 21A and 21B of the third embodiment are replaced with drive wheels. When the drive member 10 rotates (for example, the locked or unlocked state is defined by clockwise or counterclockwise rotation), a plurality of driven members 20A and 20B are rotated synchronously, causing the long side latch members 31A to 31D and the short side latch members 33A and 33B to protrude from or retract from the door 90.

[0034] (Seventh Embodiment) Referring to Figures 8A and 8B, these are schematic diagrams of the latch mechanism according to the seventh embodiment of the present invention in the locked and unlocked states, respectively. The similarities between the seventh embodiment and the sixth and fourth embodiments will not be repeated, and only the differences will be described below. In the sixth embodiment, the driven members 20A and 20B are configured to each have one short-side latch member 33A and 33B, respectively. In the seventh embodiment, the driven members 20A and 20B are configured to each have multiple short-side latch members 33A-33B and 33C-33D, respectively. In the seventh embodiment, the connecting ribs 21A and 21B and the connecting parts of the fourth embodiment are replaced with transmission wheels. When the drive member 10 rotates (for example, a locked or unlocked state is defined by clockwise or counterclockwise rotation), a plurality of driven members 20A and 20B are rotated synchronously, and the long-side latch members 31A to 31D and the short-side latch members 33A to 33D protrude from or retract from the door 90.

[0035] (Eighth embodiment) Referring to Figures 9A and 9B, these are schematic diagrams of the latch mechanism according to the eighth embodiment of the present invention in the locked and unlocked states, respectively. In the eighth embodiment, the drive member 10 and the plurality of driven members 20A to 20D are configured as drive wheels that are driven by each other to transmit power. The door 90 has two long sides 901A and 901B and two short sides 902A and 902B. The driven members 20A to 20D of the plurality of driven assemblies are each located near the four corners of the door 90 and do not interfere with each other. The driven members 20A and 20C are located on one side of the drive member 10, and the driven members 20B and 20D are located on the other side of the drive member 10. Each of the driven members 20A to 20D includes one long-side latch member and one short-side latch member.

[0036] Specifically, the latch mechanism comprises a drive member 10 and a plurality of driven assemblies. Each driven assembly comprises two driven members 20A to 20D, two long-side latch members 31A to 31D, and two short-side latch members 33A to 33D. More specifically, the driven assembly on one side of the drive member 10 comprises two driven members 20A and 20C spaced apart near the short side 902A of the door. Driven member 20A is connected to the long-side latch member 31A and the short-side latch member 33A, with the long-side latch member 31A positioned on the long side 901B and the short-side latch member 33A positioned on the short side 902A. Driven member 20C is connected to the long-side latch member 31C and the short-side latch member 33C, with the long-side latch member 31C positioned on the long side 901A and the short-side latch member 33C positioned on the short side 902A.

[0037] Specifically, the driven assembly on the other side of the drive member 10 comprises two driven members 20B and 20D spaced apart near the short side 902B of the door. Driven member 20B is connected to a long side latch member 31B and a short side latch member 33B, with the long side latch member 31B located on the long side 901B and the short side latch member 33B located on the short side 902B. Driven member 20D is connected to a long side latch member 31D and a short side latch member 33D, with the long side latch member 31D located on the long side 901A and the short side latch member 33C located on the short side 902B.

[0038] As the drive member 10 rotates, the four driven members 20A to 20D rotate synchronously, causing the four short-side latch members 33A to 33D to protrude outward from the short sides 902A and 902B of the door 90, or to retract into the short sides 902A and 902B of the door 90. Simultaneously, the four long-side latch members 31A to 31D protrude outward from the long sides 901A and 901B of the door 90, or to retract into the long sides 901A and 901B of the door 90, thereby locking or unlocking the door 90.

[0039] In the fifth to eighth embodiments, it is preferable that the driving member and the plurality of driven members be designed as transmission gears. For example, the driving member has a first tooth surface, and each driven member has a second tooth surface, and the first tooth surface and the second tooth surface are arranged to mesh with each other, so that when the driving member rotates, the plurality of driven parts are rotated in synchronously by power transmission through meshing.

[0040] In the fifth to eighth embodiments, the latch member may further include an elastic member (e.g., a spring or an elastic structural member) that continuously biases the latch member and presses it in the long and short directions of the door 90. Through this elastic member, the reticle container is kept locked, preventing malfunctions in the load port unlocking mechanism and providing further protection for the reticle. [Explanation of Symbols]

[0041] 10 Drive Member 20A, 20B Driven members 21A, 21B, 21C, 21D Connecting Ribs 23A, 23B, 23C, 23D Latch members 25A, 25B, 25C, 25D sloped surface 26A, 26B Short-side latch member 27A, 27B connection part 31A, 31B, 31C, 31D Latch members, Long-side latch members 33A, 33B, 33C, 33D Latch members, short-side latch members 800 The Door to Conventional Technology 80 Cam 82 Latch member 900 Reticle containers 90 doors 91 cabinets 92 Inner base 93 Inner lid 901A, 901B Long side 902A, 902B Short side θ angle

Claims

1. A latch mechanism applicable to the door of an irregular rectangular reticle container, A drive member provided in the door, A plurality of driven assemblies that each abut against the aforementioned drive member, Equipped with, A latch mechanism in which, when the drive member rotates, the plurality of driven assemblies are driven synchronously to reciprocate while protruding from or retracting from the door, and at least one of them can lock or unlock the side edge position of the door of the non-equal-sided rectangular reticle container.

2. The latch mechanism according to claim 1, wherein the plurality of driven assemblies are configured to lock or unlock the long side position of the door of the non-equal-sided rectangular reticle container.

3. The latch mechanism according to claim 1, wherein the plurality of driven assemblies are each located on opposite sides of the door and are connected to the drive member, and each of the plurality of driven assemblies comprises a driven member and a latch member, the driven member having a connecting rib with one end connected to the drive member and the other end connected to the latch member, and when the drive member rotates, the driven members are driven synchronously so that the latch member protrudes or retracts from the door.

4. The latch mechanism according to claim 3, wherein when the drive member rotates, the driven member is driven synchronously, the connecting rib moves linearly in the lateral direction, and pushes the latch member vertically toward the side of the door, causing the latch member to protrude from or retract from the door.

5. The latch mechanism according to claim 3, wherein each connecting rib has two opposing inclined surfaces, and the latch member is driven by the connecting rib and slides along the inclined surfaces to protrude from or retract from the side of the door.

6. The latch mechanism according to claim 1, wherein the plurality of driven assemblies comprises a connecting rib, at least one long-side latch member, and at least one short-side latch member, one end of the connecting rib is connected to the drive member, the long-side latch member is positioned on the long side of the door, and the short-side latch member is positioned on the short side of the door, and when the drive member rotates, the plurality of driven assemblies are driven synchronously, and the connecting rib moves linearly in the lateral direction, pushing the long-side latch member toward the long side of the door and the short-side latch member toward the short side of the door in a synchronous manner, so that the long-side latch member and the short-side latch member simultaneously protrude from or retract from the door.

7. The latch mechanism according to claim 6, wherein each connecting rib has two opposing inclined surfaces that align with the position of the long-side latch member, the short-side latch member is positioned at the end of the connecting rib away from the drive member, the long-side latch member is driven by the connecting rib to slide along the inclined surfaces and protrude or retract toward the long side of the door, and the short-side latch member is driven by the connecting rib to protrude or retract toward the short side of the door.

8. The latch mechanism according to claim 6, wherein the end of the connecting rib away from the drive member is connected to the short-side latch member, and the movement of the short-side latch member is performed in synchronization with the movement of the connecting rib.

9. The latch mechanism according to claim 6, wherein, when a plurality of the short-side latch members are provided on the plurality of driven assemblies, the plurality of short-side latch members are connected to the connecting rib via a connecting portion, and the movement of the plurality of short-side latch members is performed in synchronization with the movement of the connecting rib.

10. The latch mechanism according to claim 1, wherein each of the plurality of driven assemblies comprises a driven member and at least one latch member, the driving member and the driven member are configured as drive wheels that can be driven to transmit power to each other, and when the driving member rotates, the driven member is rotated synchronously, causing the latch member to protrude from or retract from the door.

11. The latch mechanism according to claim 10, wherein the driving member has a first tooth surface, each driven member has a second tooth surface, the first tooth surface and the second tooth surface are configured to engage with each other, and when the driving member rotates, the plurality of driven members are rotated in synchronous motion.

12. The latch mechanism according to claim 10, wherein each of the plurality of driven assemblies comprises two driven members spaced apart near the short side of the door.

13. Each of the plurality of driven assemblies comprises a driven member, at least one long-side latch member, and at least one short-side latch member, wherein the long-side latch member is positioned on the long side of the door, and the short-side latch member is positioned on the short side of the door, and the driving member and the driven members are configured as drive wheels that can be driven to transmit power to each other, and when the driving member rotates, the driven members are rotated synchronously, causing the long-side latch member and the short-side latch member to protrude from or retract from the door, the latch mechanism according to claim 1.

14. The latch mechanism according to claim 1, wherein the drive member is provided in the central region of the door, the length and width of the central region are defined by 0.9 times the length of the non-equal-sided rectangular reticle and 0.9 times the width of the non-equal-sided rectangular reticle, respectively, and the center of the region corresponds to the geometric center of the door.

15. An unequal rectangular reticle container equipped with a latch mechanism according to any one of claims 1 to 14.

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