Salt, acid generator, resist composition, and method for producing resist patterns

Abstract

The objective is to provide salts, acid generators, and resist compositions containing the same that can produce resist patterns with good CD uniformity (CDU). [Solution] A salt represented by formula (I), an acid generator, and a resist composition. TIFF2026083014000156.tif75102

Description

[Technical Field]

[0001] The present invention relates to a salt for an acid generator used in semiconductor microfabrication, an acid generator containing the salt, and a resin This invention relates to a resist composition and a method for manufacturing a resist pattern. [Background technology]

[0002] Patent Document 1 contains a salt represented by the following formula, and a resist set containing the salt as an acid generator. The product is described. Patent Document 2 (TIFF2026083014000001.tif2683) describes a salt represented by the following formula, and a resist set containing the salt as an acid generator. The product is described. TIFF2026083014000002.tif3586 [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-015713 [Patent Document 2] Japanese Patent Publication No. 2018-118962 [Overview of the project] [Problems that the invention aims to solve]

[0004] The present invention relates to a resist pattern formed by a resist composition containing the above-mentioned salt. Furthermore, it provides a salt that forms a resist pattern with good CD uniformity (CDU). [Means for solving the problem]

[0005] This invention includes the following inventions. [1] A salt represented by formula (I). TIFF2026083014000003.tif75102 [In formula (I), R 、R 2 and R 3 each independently represents an iodine atom, a fluorine atom, or an alkyl fluoride group having 1 to 12 carbon atoms . R 4 、R 5 、R 6 、R 7 、R 8 and R 9 each independently represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the halo alkyl group and the hydrocarbon group may be replaced by -O-, -CO-, -CO-, - S- or -SO2-. X 1 、X 2 and X 3 each independently represents an oxygen atom or a sulfur atom. m1 represents any integer from 0 to 5, and when m1 is 2 or more, the groups within multiple parentheses may be the same as or different from each other . m2 represents any integer from 0 to 4, and when m2 is 2 or more, the groups within multiple parentheses may be the same as or different from each other . m3 represents any integer from 0 to 4, and when m3 is 2 or more, the groups within multiple parentheses may be the same as or different from each other . m4 represents any integer from 0 to 4, and when m4 is 2 or more, the plurality of R 4 s may be the same as or different from each other . m5 represents any integer from 0 to 4, and when m5 is 2 or more, the plurality of R 5 s may be the same as or different from each other . m6 represents any integer from 0 to 4, and when m6 is 2 or more, the plurality of R 6 s may be the same as or different from each other . m7 represents any integer from 0 to 5. When m7 is 2 or more, a plurality of Rs 7 may be the same as or different from each other. m8 represents any integer from 0 to 4. When m8 is 2 or more, a plurality of Rs 8 may be the same as or different from each other. m9 represents any integer from 0 to 4. When m9 is 2 or more, a plurality of Rs 9 may be the same as or different from each other. However, 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, 0 ≤ m3 + m9 ≤ 4, and at least one of m1, m2, and m3 represents an integer of 1 or more. X 4 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO-, or -SO2-. AI - represents an organic anion. [2] The salt according to [1], wherein X<00,00021>, X 2 , and X 3 are oxygen atoms. [3] The salt according to [1] or [2], wherein AI - is a sulfonic acid anion, a sulfonylimide anion, a sulfonylmethide anion, or a carboxylic acid anion. [4] The salt according to any one of [1] to [3], wherein AI<000002​​​​​​​​​​​​​​​​​​​​​​2- may be replaced by -O- or -CO-, and the water contained in the saturated hydrocarbon group The elementary atoms may be substituted with fluorine atoms or hydroxyl groups. Y 1 This is a methyl group which may have substituents or a carbon 3- which may have substituents It represents 24 alicyclic hydrocarbon groups, and the -CH2- contained in the alicyclic hydrocarbon group is -O-, It may be replaced with -SO2- or -CO-. An acid generator containing a salt described in any of [5][1] to [4]. A resist composition containing the acid generator described in [6][5] and a resin having an acid-unstable group. [7] Resins having acid-unstable groups are structural units represented by formula (a1-1) and formula (a1- The register described in [6] includes at least one selected from the group consisting of structural units represented in (2). Stress composition. TIFF2026083014000005.tif3886[In formulas (a1-1) and (a1-2), L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 -CO-O- represents k1 represents an integer from 1 to 7, and * represents an association with -CO-. R a4 and R a5 Each of these independently contains a hydrogen atom, a halogen atom, or a halogen atom. This represents an alkyl group that may have 1 to 6 carbon atoms. R a6 and R a7 These are, independently, alkyl groups with 1 to 8 carbon atoms and alkeh groups with 2 to 8 carbon atoms. Nyl group, alicyclic hydrocarbon group having 3 to 18 carbon atoms, aromatic hydrocarbon group having 6 to 18 carbon atoms, or These represent the base formed by combining them. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3. [8] Resins having acid-unstable groups include structural units represented by formula (a2-A) [6] or [7] is the resist composition described in [7]. TIFF2026083014000006.tif4653[In formula (a2-A), R a50 This is a hydrogen atom, a halogen atom, or a C1-C6 element which may have a halogen atom. It represents the alkyl group. R a51 This includes halogen atoms, hydroxyl groups, alkyl groups with 1 to 6 carbon atoms, and C1 to 6 atoms. Alkoxy group, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms Lucoxy group, C2-C4 alkylcarbonyl group, C2-C4 alkylcarbonyl This represents an oxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or * -X a51 -( A a52 -X a52 ) nb - represents -R a50 they combine This represents the bonding site with the carbon atom. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO-, respectively, independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, Number R a51 They may be identical or different from one another. [9] Further contains a salt that generates an acid that is less acidic than the acid generated by the acid generator. A resist composition according to any one of [6] to [8].

[10] (1) Apply the resist composition according to any one of [6] to [9] on a substrate. Step, (2) Dry the applied composition to form a composition layer. (3) Expose the composition layer. (4) Heat the exposed composition layer, and (5) Develop the heated composition layer. A method for manufacturing a resist pattern including these steps.

Advantages of the Invention

[0006] By using the resist composition containing the salt of the present invention, a resist pattern can be manufactured with good CD uniformity (CDU ).

Embodiments for Carrying Out the Invention

[0007] In this specification, the term “(meth)acrylic monomer” means “at least one of acrylic monomer and methacrylic monomer”. Notations such as “(meth)acrylate” and “ (meth)acrylic acid” also represent the same meaning. For the groups described in this specification , those that can take both a linear structure and a branched structure may be either of them. When -CH2- contained in a hydrocarbon group or the like is replaced by -O-, -S-, -CO- or -SO2-, the same examples shall be applied to each group. The term “combined group” means a group formed by bonding two or more of the exemplified groups, and the valences of those groups may be appropriately changed depending on the bonding form . The term “derived from” or “induced from” refers to the polymerization of the polymerizable C=C bond contained in the molecule to become a -C-C- group . When stereoisomers exist, all stereoisomers are included.

[0008] <Salt represented by formula (I)> This invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). In salt (I), the side with a negative charge is called "anion (I)," and the side with a positive charge is called "antion (I)." It is sometimes referred to as "On (I)". TIFF2026083014000007.tif80102[In this formula, all signs have the same meaning as defined above.]

[0009] R 1 , R 2 and R 3 A fluorinated alkyl group having 1 to 12 carbon atoms in this context refers to a compound containing a fluorine atom. This represents an alkyl group with 1 to 6 carbon atoms, and a perfluoroalkyl group (truffle) with 1 to 6 carbon atoms. Luoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluoropropyl group (Tyl group), and 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group 4,4,4-trifluorobutyl group, and 3,3,4,4,4-pentafluorobutyl group Examples include tyl groups. The number of carbon atoms in the alkyl fluoride is preferably 1 to 6, and more Preferably 1 to 4, and more preferably 1 to 3. 4 , R 5 , R 6 , R 7 , R 8 and R 9 The halogen atoms include fluorine, chlorine, bromine, and iodine. These are some examples. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 What are haloalkyl groups with 1 to 12 carbon atoms in this context? , represents an alkyl group having 1 to 12 carbon atoms and containing a halogen atom, such as a chloromethyl group or bromomethyl group. Tyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, perfluoro Examples include butyl. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, and more preferably More preferably 1 to 6, and even more preferably 1 to 4. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 As for hydrocarbon groups with 1 to 18 carbon atoms, a Chain hydrocarbon groups such as kill groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and combinations thereof Examples of groups formed by this process include: Alkyl groups can be linear or branched alkyl groups, such as methyl groups and ethyl groups. , propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pliers Examples of alkyl groups include hexyl, octyl, and nonyl groups. The prime numbers are preferably 1 to 12, more preferably 1 to 9, and even more preferably 1 It is ~6, and more preferably 1~4. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and monocyclic alicyclic carbon Examples of hydrogen groups include cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl groups. Examples of cycloalkyl groups include cycloheptyl, cyclooctyl, and cyclodecyl groups. Examples of polycyclic alicyclic hydrocarbon groups include the decahydronaphthyl group and the adamantyl group. Examples include norbornyl groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18. Yes, more preferably 3 to 16, and even more preferably 3 to 12. Specifically, examples of alicyclic hydrocarbon groups include the following groups. The bonding site can be at any position. It can be done this way. TIFF2026083014000008.tif44168 Aromatic hydrocarbon groups include phenyl group, naphthyl group, biphenyl group, anthryl group, Examples include phenanthryl groups and binaphthyl groups. The number of carbon atoms in the aromatic hydrocarbon group is preferred. The value is 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. . The groups formed by combining them include aromatic hydrocarbon groups and chain hydrocarbon groups. Groups that combine (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic) Aromatic hydrocarbon groups (*), groups combining alicyclic hydrocarbon groups and chain hydrocarbon groups (for example) , alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), fragrance A group that combines a fragrant hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group - alicyclic hydrocarbon group) Examples include cyclic hydrocarbon groups (*) and alicyclic hydrocarbon groups (*) (aromatic hydrocarbon groups). This indicates the joining point. Aromatic hydrocarbon groups - alkanediyl groups - * include benzyl groups, phenethyl groups, etc. One example is the larchyl group. Examples of alkyl-aromatic hydrocarbon groups include tolyl, xylyl, and coumenyl groups. It can be listed. Examples of alicyclic hydrocarbon groups - alkanediyl groups -* include cyclohexylmethyl group, cyclo Hexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1 Examples include cycloalkylalkyl groups such as -yl-1-methylethyl. Examples of alkyl-alicyclic hydrocarbon groups include methylcyclohexyl group and dimethylcyclohexyl group. Cyclohexyl group, 2-alkyladamantan-2-yl group, and other alkyl groups Examples include the lukil group. Examples of aromatic hydrocarbon groups (alicyclic hydrocarbon groups) include the phenylcyclohexyl group. It can be done. Examples of alicyclic hydrocarbon groups - aromatic hydrocarbon groups -* include the cyclohexylphenyl group. It can be done. In terms of combinations, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups are Each of these can be combined in two or more ways. In the combined groups, all groups must be benzene rings. They may be bound together.

[0010] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The haloalkyl group or hydrocarbon group in The -CH2- group may be replaced with -O-, -S-, -CO-, or -SO2-. In this case, the number of carbon atoms before replacement shall be equal to the total number of carbon atoms in the haloalkyl group or the hydrocarbon group. The number of replacements may be one or two or more. The replacement base may be hydride. roxy group (a group in which the -CH2- contained in a methyl group is replaced with -O-), thiol group (A group in which the -CH2- contained in the methyl group is replaced by -S-), Carboxy group (Ethyl (A group in which the -CH2-CH2- contained in the group is replaced by -O-CO-), alkoxy group (A group in which any -CH2- at any position within an alkyl group is replaced by -O-), Coxycarbonyl group (where any -CH2-CH2- in the alkyl group is -O- Group replaced by CO-, alkylcarbonyl group (any position within the alkyl group) (A group in which the -CH2- is replaced by -CO-), an alkylcarbonyloxy group (alkyl A group in which any -CH2-CH2- at any position within the group is replaced by -CO-O-, A lucirthio group (where -CH2- at any position within an alkyl group is replaced by -S-) (a group), alkylsulfonyl group (a -CH2- at any position within the alkyl group, - (a group replaced by SO2-), cycloalkoxy group, cycloalkylalkoxy group, aldehyde Coxycarbonyloxy group, aromatic hydrocarbon group-carbonyloxy group, etc., among these groups Examples include bases that combine two or more types. Examples of alkoxy groups include alkoxy groups having 1 to 17 carbon atoms, such as methoxy. Group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, o Cutyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, un Examples include decyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 11 or 1 to It is 6, more preferably 1 to 4, and even more preferably 1 to 3. Alkoxycarbonyl groups, alkylcarbonyl groups, and alkylcarbonyloxy groups are A carbonyl group or carbonyloxy group is bonded to the alkyl group or alkoxy group mentioned above. It represents the base. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 17 carbon atoms. For example, methoxycarbonyl groups, ethoxycarbonyl groups, butoxycarbonyl groups, etc. Examples include alkylcarbonyl groups with 2 to 18 carbon atoms. Examples include acetyl groups, propionyl groups, and butyryl groups, and alkyl groups. Examples of carbonyloxy groups include alkylcarbonyloxy groups having 2 to 17 carbon atoms. Examples include acetyloxy groups, propionyloxy groups, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11 or 2 to 6, and more preferably The number of carbon atoms in the alkylcarbonyl group is 2 to 4, and more preferably 2 or 3. Preferably 2 to 18 or 2 to 6, more preferably 2 to 4, and even more preferably The number of carbon atoms is 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11 or 2. It is ~6, more preferably 2~4, and even more preferably 2 or 3. Examples of alkylthio groups include alkylthio groups having 1 to 17 carbon atoms, for example, methyl Examples include the lutio group, ethylthio group, and propylthio group. The number of carbon atoms in the alkylthio group is Preferably 2 to 11, more preferably 2 to 6, and even more preferably 2 to 4. ru. Examples of alkylsulfonyl groups include alkylsulfonyl groups having 1 to 17 carbon atoms. Examples include methylsulfonyl groups, ethylsulfonyl groups, and propylsulfonyl groups. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to It is 6, and more preferably 1 to 4. Examples of cycloalkoxy groups include cycloalkoxy groups with 3 to 17 carbon atoms, for example Examples include cyclohexyloxy groups. Examples of cycloalkylalkoxy groups include carbon Examples include cycloalkylalkoxy groups with prime numbers 4 to 17, for example, cyclohexylmethyl Examples include alkoxycarbonyloxy groups, which have 2 to 16 carbon atoms. Examples include xycarbonyloxy groups, such as the butoxycarbonyloxy group. Aromatic hydrocarbon groups - carbonyloxy groups include aromatic hydrocarbons with 7 to 17 carbon atoms. Examples include carbonyloxy groups, such as the benzoyloxy group. Furthermore, the -CH2- contained in the alicyclic hydrocarbon group is replaced by -O- or -CO-, etc. The following groups are examples of the groups used. The bonding site can be at any position. The -O- or -CO- positions of the group represented are replaced with -S- or -SO2- respectively. It's fine if you do that. TIFF2026083014000009.tif47155

[0011] X 1 It is preferable that it is an oxygen atom. X 2 It is preferable that it is an oxygen atom. X 3 It is preferable that it is an oxygen atom. X 1 The bond position is S on the benzene ring. + Positions 0, m, relative to the position where they are joined Any of the p positions is acceptable. In particular, S + It is bonded at the p-position or m-position relative to the binding site. It is preferable that the molecule is bonded at the p-position, and more preferably that it is bonded at the p-position. X 2 and X 3 The bond position is the S of the benzene ring in the fused ring. + The position where they are joined It can be any of the O, M, or P positions. Among them, S + Binds at the p-position relative to the binding site. It is preferable that this be done. Since at least one of m1, m2, and m3 is 1 or greater, m1 is either 1 or 2. It is preferable to do so. m2 is preferably 0 or 1. m3 is preferably 0 or 1. m4 is preferably 0, 1, 2, or 4, and more preferably 1 or 2. stomach. m5 is preferably 0 or 1. m6 is preferably 0 or 1. Furthermore, since 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, and 0 ≤ m3 + m9 ≤ 4, 、 m7 is preferably 0, 1 or 2, more preferably 0 or 1. m8 is preferably 0 or 1. m9 is preferably 0 or 1. R 4 、 R 5 及び R 6 are each independently an iodine atom, a fluorine atom, a hydroxy group, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), preferably an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, more preferably an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 3 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, even more preferably an iodine atom, a fluorine atom, a hydroxy group or an alkoxy group having 1 to 3 carbon atoms, and even more preferably an iodine atom, a fluorine atom or a hydroxy group. 、 R are each independently an iodine atom, a fluorine atom, a hydroxy group, a 7 、 R 8 及び R 9 are each independently an iodine atom, a fluorine atom, a hydroxy group, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), preferably an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, more preferably an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 3 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group or an alkoxy group having 1 to 3 carbon atoms. 、 R 、 R 1 及び R 2 の結合位置は、それぞれ X 3 、 X 1 、 X 2 及び X 3 The position where they are joined can be any of the or, m, or p positions. In particular, X 1 , X 2 and X 3 It is preferable that the bond is located at the p-position or m-position relative to the bonding site. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The joining positions can be arbitrarily set according to the number of elements, etc. It is possible.

[0012] Examples of cation (I) include the following cations: TIFF2026083014000010.tif234153

[0013] TIFF2026083014000011.tif248165

[0014] TIFF2026083014000012.tif113167

[0015] TIFF2026083014000013.tif116161

[0016] AI - Examples of organic anions represented by these include sulfonic acid anions and sulfonylimido anions. Examples include ions, sulfonylmethide anions, and carboxylic acid anions. - Represented by The organic anions are, each independently, preferably sulfonic acid anions, and each independently It is more preferable that the anion is represented by formula (IA). TIFF2026083014000014.tif2965[In formula (IA), Q 1 and Q 2 Each of these independently contains a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. It represents the 'L' group. L1 This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH 2- may be replaced by -O- or -CO-, and the water contained in the saturated hydrocarbon group The elementary atoms may be substituted with fluorine atoms or hydroxyl groups. Y 1 This is a methyl group which may have substituents or a carbon 3- which may have substituents It represents 24 alicyclic hydrocarbon groups, and the -CH2- contained in the alicyclic hydrocarbon group is -O-, It may be replaced with -SO2- or -CO-.

[0017] In the anion represented by formula (IA), the -CH2- contained in the saturated hydrocarbon group is If replaced by O- or -CO-, the number of carbon atoms before replacement is the same as that of the saturated hydrocarbon group. The carbon number is used. Also, the -CH2- contained in the alicyclic hydrocarbon group is -O-, -SO2- or If it is replaced by -CO-, the number of carbon atoms before replacement is the number of carbon atoms in the alicyclic hydrocarbon group. Let's assume that.

[0018] Q 1 and Q 2 Examples of perfluoroalkyl groups with 1 to 6 carbon atoms include trifluoromethyl Group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, pe Perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group Examples include perfluoropentyl groups and perfluorohexyl groups. Q 1 and Q 2 Each of these independently consists of a fluorine atom or a trifluoromethyl group. Preferably, both are fluorine atoms, and more preferably, both are fluorine atoms.

[0019] L 1Examples of divalent saturated hydrocarbon groups in this context include linear alkanediyl groups and branched alkanediyl groups. Examples include dipropyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and these groups It may also be a group formed by combining two or more of these types. Specifically, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4 -diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1 ,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1 ,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, Tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane- 1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17- Linear alkanediyl groups such as diyl groups; Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl Branched alkanediyl groups such as the 2-methylbutane-1,4-diyl group; Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexa Cycloalkanediyl groups such as n-1,4-diyl group and cyclooctane-1,5-diyl group A monocyclic, divalent, alicyclic saturated hydrocarbon group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane- Polycyclic divalent alicyclic saturated carbon such as 1,5-diyl group and adamantane-2,6-diyl group Examples include hydrogen groups.

[0020] L 1The -CH2- contained in the divalent saturated hydrocarbon group represented by -O- or -CO- The substituted base can be represented, for example, by any of the following equations: (b1-1) to (b1-3). The bases are listed. Furthermore, the bases represented by formulas (b1-1) to (b1-3) and their specific examples are In the example bases represented by formulas (b1-4) to (b1-11), * and ** are bonding parts. The position is indicated by *, and * is -Y 1 This represents a combination of two things.

[0021] TIFF2026083014000015.tif26118[In formula (b1-1), L b2 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms. L b3 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms or hydroxyl groups, and the saturated carbon The -CH2- group contained in the hydrogenated group may be replaced by -O- or -CO-. However, L b2 and L b3 The total number of carbon atoms is 22 or less. In formula (b1-2), L b4 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms. L b5 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms or hydroxyl groups, and the saturated carbon The -CH2- group contained in the hydrogenated group may be replaced by -O- or -CO-. However, L b4 and L b5The total number of carbon atoms is 22 or less. In formula (b1-3), L b6 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms or hydroxyl groups. L b7 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms or hydroxyl groups, and the saturated carbon The -CH2- group contained in the hydrogenated group may be replaced by -O- or -CO-. However, L b6 and L b7 The total number of carbon atoms is 23 or less.

[0022] In the groups represented by formulas (b1-1) to (b1-3), the saturated hydrocarbon group is included. If -CH2- is replaced by -O- or -CO-, the number of carbon atoms before replacement is... This is the number of carbon atoms in the hydrocarbon group. As for divalent saturated hydrocarbon groups, L b1 Examples include divalent saturated hydrocarbon groups. ru. L b2 The bond is preferably a single bond. L b3 This is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b4 Preferably, the divalent saturated hydrocarbon group has 1 to 8 carbon atoms, and the divalent saturated hydrocarbon water The hydrogen atoms in the elementary group may be substituted with fluorine atoms. L b5 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b6 The saturated hydrocarbon group is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. The hydrogen atoms in the hydrogen group may be substituted with fluorine atoms. L b7 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. The -CH2- contained in the divalent saturated hydrocarbon group is replaced by -O- or -CO-. That's good too. L 1 The -CH2- contained in the divalent saturated hydrocarbon group represented by -O- or -CO- The replaced group is preferably the group represented by formula (b1-1) or formula (b1-3).

[0023] The base represented by equation (b1-1) is shown in equations (b1-4) to (b1-8), respectively. The basis for this is listed below. TIFF2026083014000016.tif48120[In formula (b1-4), L b8 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon group The hydrogen atoms contained in may be substituted with fluorine atoms or hydroxyl groups. In formula (b1-5), L b9 This represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and contains The -CH2- group may be replaced by -O- or -CO-. L b10 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms. The hydrogen atoms in the hydrogenated group may be substituted with fluorine atoms or hydroxyl groups. However, L b9 and L b10 The total number of carbon atoms is 20 or less. In formula (b1-6), L b11 This represents a divalent saturated hydrocarbon group with 1 to 21 carbon atoms. L b12This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms. The hydrogen atoms in the hydrogenated group may be substituted with fluorine atoms or hydroxyl groups. However, L b11 and L b12 The total number of carbon atoms is 21 or less. In formula (b1-7), L b13 This represents a divalent saturated hydrocarbon group with 1 to 19 carbon atoms. L b14 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. The -CH2- group contained in the hydrogenated group may be replaced by -O- or -CO-. L b15 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. The hydrogen atoms in the hydrogenated group may be substituted with fluorine atoms or hydroxyl groups. However, L b13 ~L b15 The total number of carbon atoms is 19 or less. In formula (b1-8), L b16 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and this divalent saturated hydrocarbon group The -CH2- group may be replaced by -O- or -CO-. L b17 This represents a divalent saturated hydrocarbon group with 1 to 18 carbon atoms. L b18 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms. The hydrogen atoms in the hydrogenated group may be substituted with fluorine atoms or hydroxyl groups. However, L b16 ~L b18 The total number of carbon atoms is 19 or less.

[0024] L b8 This is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b9Preferably, it is a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b10 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and more Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b11 Preferably, it is a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b12 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b13 This is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b14 This is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b15 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and more Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b16 This is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b17 This is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b18 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and more Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

[0025] The base represented by equation (b1-3) is given by equations (b1-9) to (b1-11), respectively. The bases that can be represented are listed below. TIFF2026083014000017.tif24140 formula (b1-9), L b19 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b20This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon The hydrogen atom contained in the group is a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. It may be substituted. The -CH2- contained in the alkylcarbonyloxy group is -O- Alternatively, it may be replaced with -CO-, and the hydrogen contained in the alkylcarbonyloxy group The atoms may be substituted with hydroxyl groups. However, L b19 and L b20 The total number of carbon atoms is 23 or less. In formula (b1-10), L b21 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b22 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b23 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the saturated hydrocarbon The hydrogen atom contained in the group is a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. It may be substituted. The -CH2- contained in the alkylcarbonyloxy group is -O- Alternatively, it may be replaced with -CO-, and the hydrogen contained in the alkylcarbonyloxy group The atoms may be substituted with hydroxyl groups. However, L b21 , L b22 and L b23 The total number of carbon atoms is 21 or less. In formula (b1-11), L b24 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b25 This represents a divalent saturated hydrocarbon group with 1 to 21 carbon atoms. L b26 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the saturated hydrocarbon The hydrogen atom contained in the group is a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. It may be substituted. The -CH2- contained in the alkylcarbonyloxy group is -O- Alternatively, it may be replaced with -CO-, and the hydrogen contained in the alkylcarbonyloxy group The atoms may be substituted with hydroxyl groups. However, L b24 , L b25 and L b26 The total number of carbon atoms is 21 or less.

[0026] Note that the groups represented by formulas (b1-9) to (b1-11) are saturated hydrocarbon groups. If the hydrogen atom contained in is substituted with an alkylcarbonyloxy group, before replacement The number of carbon atoms in the saturated hydrocarbon group is defined as the number of carbon atoms in the saturated hydrocarbon group.

[0027] Examples of alkylcarbonyloxy groups include acetyloxy group, propionyloxy group, and b thyryloxy group, cyclohexylcarbonyloxy group, adamantylcarbonyloxy group These are some examples.

[0028] The following are examples of bases represented by formula (b1-4): TIFF2026083014000018.tif17154

[0029] The following are examples of bases represented by formula (b1-5): TIFF2026083014000019.tif69148

[0030] The following are examples of bases represented by formula (b1-6): TIFF2026083014000020.tif44148

[0031] The following are examples of bases represented by formula (b1-7): TIFF2026083014000021.tif63153

[0032] The following are examples of bases represented by formula (b1-8): TIFF2026083014000022.tif24150

[0033] The following are examples of bases represented by formula (b1-2): TIFF2026083014000023.tif31161

[0034] The following are examples of bases represented by formula (b1-9): TIFF2026083014000024.tif44137

[0035] The following are examples of bases represented by formula (b1-10): TIFF2026083014000025.tif93165

[0036] The following are examples of bases represented by formula (b1-11): TIFF2026083014000026.tif85164

[0037] Y 1 Examples of alicyclic hydrocarbon groups represented by formulas (Y1) to (Y11), and (Y36) are: The base represented by formula (Y38) is an example. Y 1 The -CH2- contained in the alicyclic hydrocarbon group represented by -O-, -SO2-, or -C When O- is used as a replacement, the number of replacements can be one or two or more. Examples of the groups represented by equations (Y12) to (Y35) and (Y39) to (Y43) include those expressed by equations (Y12) to (Y35) and (Y39) to (Y43). * is L 1 This represents the bonding position with [the specified element].

[0038] TIFF2026083014000027.tif81163Y 1 The alicyclic hydrocarbon group represented by formula (Y1) to formula (Y20) is preferably formula (Y1) to formula (Y20), formula (Y26), Formula (Y27), Formula (Y30), Formula (Y31), Formula (Y39) ~ Formula (Y43) A group represented by any of the following, more preferably formula (Y11), formula (Y15), or formula (Y1 6), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula ( A group represented by formula (Y39), formula (Y40), formula (Y42), or formula (Y43), and more preferably The formulas are (Y11), (Y15), (Y20), (Y26), (Y27), and (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42), or formula (Y43 It is a base represented by ). Y 1 The alicyclic hydrocarbon group represented by formulas (Y28) to (Y35), (Y39), and ( In the case of spiro rings such as Y40, formula (Y42), and formula (Y43), between the two oxygen atoms The alkanediyl group preferably has one or more fluorine atoms. Among the alkanediyl groups contained in the structure, the methylene group adjacent to the oxygen atom contains a fluorine atom. It is preferable that it is not substituted.

[0039] Y 1 The substituents of the methyl group represented by this symbol include halogen atoms, hydroxyl groups, and carbon 3- 16 alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, glycidyloxy groups, - (CH2) ja -CO-OR b1 Base or -(CH2) ja -O-CO-R b1 group (in the formula, R b1 teeth , alkyl groups with 1 to 16 carbon atoms, alicyclic hydrocarbon groups with 3 to 16 carbon atoms, and groups with 6 to 18 carbon atoms Represents an aromatic hydrocarbon group or a group formed by combining these. 'ja' is an integer between 0 and 4. This represents the alkyl group and the alicyclic hydrocarbon group, where -CH2- is -O-, -SO It may be replaced with 2- or -CO-, the alkyl group, the alicyclic hydrocarbon group and the The hydrogen atoms in the aromatic hydrocarbon group are replaced by hydroxyl or fluorine atoms. Examples include: ) Y 1 The substituents of the alicyclic hydrocarbon group represented by this formula include halogen atoms, hydroxyl groups, and hydroxyl groups. A C1-C16 alkyl group which may be substituted with a droxy group (contains The -CH2- group may be replaced by -O- or -CO-. ) C3- to C16 Alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, and aralkyl groups with 7 to 21 carbon atoms. , glycidyloxy group, -(CH2) ja -CO-OR b1 Base or -(CH2) ja -OC Ure b1 group (in the formula, R b1 This includes alkyl groups with 1 to 16 carbon atoms and alicyclic carbons with 3 to 16 carbon atoms. This represents a hydrogen group, an aromatic hydrocarbon group with 6 to 18 carbon atoms, or a group combining these. , represents an integer from 0 to 4. -C contained in the alkyl group and the alicyclic hydrocarbon group. H2- may be replaced by -O-, -SO2- or -CO-, and the alkyl group, The hydrogen atoms contained in the alicyclic hydrocarbon group and the aromatic hydrocarbon group are hydroxyl groups or fu Examples include: (It may be replaced by an oxyatom atom.)

[0040] Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. ru. Examples of alicyclic hydrocarbon groups include cyclopentyl groups, cyclohexyl groups, and methyl cyclohexyl groups. Chlohexyl group, dimethylcyclohexyl group, cycloheptyl group, cyclooctyl group, no Examples include the rubornyl group and the adamantyl group. Alicyclic hydrocarbon groups are chain hydrocarbon groups. They may also contain, for example, a methylcyclohexyl group, a dimethylcyclohexyl group, etc. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 12, more preferably 3 to 10. be. Examples of aromatic hydrocarbon groups include phenyl, naphthyl, anthryl, and biphenyl groups. Examples include aryl groups such as nyl groups and phenanthryl groups. Aromatic hydrocarbon groups are chain carbon It may have a hydrogenated group or an alicyclic hydrocarbon group, and may have an aromatic carbon having a chain hydrocarbon group Examples of hydrogen groups include tolyl group, xylyl group, coumenyl group, mesityl group, and p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6- Examples include ethylphenyl groups, and aromatic hydrocarbon groups having alicyclic hydrocarbon groups include: Examples include p-cyclohexylphenyl groups and p-adamantylphenyl groups. Aromatic carbon The number of carbon atoms in the hydrogenated group is preferably 6 to 14, and more preferably 6 to 10. Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, and b Tyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group , 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group Examples include the following. The number of carbon atoms in the alkyl group is preferably 1 to 12, and more preferably 1 It is ~6, and more preferably 1~4. Alkyl groups substituted with hydroxyl groups include hydroxymethyl groups and hydroxy Examples include hydroxyalkyl groups such as ethyl groups. Examples of aralkyl groups include benzyl group, phenethyl group, phenylpropyl group, and naphthyl group. Examples include tyl groups and naphthylethyl groups. The -CH2- group in the alkyl group is replaced by -O-, -SO2-, or -CO-, etc. The groups include alkoxy groups, alkylsulfonyl groups, alkoxycarbonyl groups, and alkyl groups. Examples include carbonyl groups, alkylcarbonyloxy groups, or combinations thereof. ru. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentoxy groups. oxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group Examples include dodecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 12. Yes, more preferably 1 to 6, and even more preferably 1 to 4. Examples of alkylsulfonyl groups include methylsulfonyl group, ethylsulfonyl group, and propyl group. Examples include sulfonyl groups. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 12. Yes, more preferably 1 to 6, and even more preferably 1 to 4. Examples of alkoxycarbonyl groups include methoxycarbonyl groups and ethoxycarbonyl groups. Examples include alkoxycarbonyl groups and butoxycarbonyl groups. The number of carbon atoms in the alkoxycarbonyl group is preferred. More preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. Examples include the following. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, and more preferably The value is between 2 and 6, and more preferably between 2 and 4. Examples of alkylcarbonyloxy groups include acetyloxy groups and propionyloxy groups. Examples include the cy group and the butyryloxy group. The number of carbon atoms in the alkylcarbonyloxy group is preferred. More preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of combined groups include groups that combine an alkoxy group and an alkyl group, and A group combining a lucoxy group and an alkoxy group, or a group combining an alkoxy group and an alkylcarbonyl group. Groups combining these, groups combining an alkoxy group and an alkylcarbonyloxy group, etc. It can be listed. Examples of groups combining an alkoxy group and an alkyl group include the methoxymethyl group. Alkoxyalkyl groups such as methoxyethyl group, ethoxyethyl group, and ethoxymethyl group For example, the number of carbon atoms in the alkoxyalkyl group is preferably 2 to 12, and more preferably k is 2 to 6, and more preferably 2 to 4. Groups that combine alkoxy groups include methoxymethoxy groups and metoxy groups. Alkoxyalkoxy groups such as xyethoxy group, ethoxymethoxy group, and ethoxyethoxy group Examples include the following. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 12, and more Preferably, it is 2 to 6, and more preferably 2 to 4. Examples of groups combining an alkoxy group and an alkylcarbonyl group include methoxyacetyl. Alco groups such as methoxypropionyl group, ethoxyacetyl group, and ethoxypropionyl group Examples include xyalkylcarbonyl groups. The number of carbon atoms in an alkoxyalkylcarbonyl group is... Preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5. be. Groups that combine an alkoxy group and an alkylcarbonyloxy group include methoxya Cetyloxy group, Methoxypropionyloxy group, Ethoxyacetyloxy group, Ethoxy Examples include alkoxyalkylcarbonyloxy groups such as propionyloxy groups. The number of carbon atoms in the coxyalkylcarbonyloxy group is preferably 3 to 13, and more preferably The value of k is between 3 and 7, and more preferably between 3 and 5. The -CH2- group in the alicyclic hydrocarbon group is replaced by -O-, -SO2-, or -CO-, etc. The basis for the division is expressed by equations (Y12) to (Y35) and (Y39) to (Y43). Examples include the bases.

[0041] Y 1 The following are some examples: TIFF2026083014000028.tif161165

[0042] Y 1 This is preferably an alicyclic hydrocarbon group having 3 to 24 carbon atoms, which may have substituents. More preferably, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, which may have substituents. More preferably, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents. More preferably, alicyclic hydrocarbon groups substituted with hydroxyl groups, even more preferably k is an adamantyl group which may have substituents, and the alicyclic hydrocarbon group or adamantyl Even if the -CH2- group constituting the chill group is replaced by -CO-, -SO2-, or -CO- Good. Y 1 Specifically, preferably an adamantyl group, a hydroxyadamantyl group, or an oxo The adamantyl group or the group represented by formulas (Y42), (Y100) to (Y114). Particularly preferred are hydroxyadamantyl groups or oxoadamantyl groups, including these. These are bases or bases represented by formulas (Y42), (Y100) to (Y114).

[0043] The anions represented by formula (IA) are given by formulas (IA-1) to (IA-59). The anion represented [Hereafter, depending on the formula number, it may be referred to as "anion (IA-1)," etc.] The following is preferred: formulas (IA-1) to (IA-4), formula (IA-9), formula (I- A-10), Equations (IA-24) to (IA-33), Equations (IA-36) to (I- A-40), an anion represented by any of the formulas (IA-47) to (IA-59) More preferable.

[0044] TIFF2026083014000029.tif74141

[0045] TIFF2026083014000030.tif116155

[0046] TIFF2026083014000031.tif87144

[0047] TIFF2026083014000032.tif158157

[0048] TIFF2026083014000033.tif164160

[0049] Here R i2 ~R i7 Each of these is independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably R is a methyl group or an ethyl group. i8 For example, a chain-like hydrocarbon group having 1 to 12 carbon atoms. These include alkyl groups having 1 to 4 carbon atoms, alicyclic hydrocarbon groups having 5 to 12 carbon atoms, or combinations thereof. Groups formed by combining, more preferably methyl groups, ethyl groups, and cyclohexyl groups. Or it is an adamantyl group. L A41 These are single bonds or alkanediyl groups having 1 to 4 carbon atoms. Q 1 and Q 2This expresses the same meaning as above. Specifically, the anion represented by formula (IA) is as described in Japanese Patent Publication No. 2010-204646. Anions listed in the official gazette are among those mentioned.

[0050] Preferably, the anion represented by formula (IA) is formula (Ia-1)~(Ia- The anions represented in 38) are listed below. TIFF2026083014000034.tif218153

[0051] TIFF2026083014000035.tif183165

[0052] In particular, equations (Ia-1) to (Ia-3), and equations (Ia-7) to (Ia-1 9) An anion represented by any of equations (Ia-22) to (Ia-38) is preferred. stomach.

[0053] AI - Examples of sulfonylimid anions represented by the formula include the following: TIFF2026083014000036.tif38135

[0054] AI - The following are examples of sulfonylmethide anions that can be represented: TIFF2026083014000037.tif31127

[0055] AI - Examples of carboxylic acid anions represented by the formula include the following: TIFF2026083014000038.tif48165

[0056] Specific examples of salt (I) include salts formed by arbitrarily combining the cations and anions mentioned above. It can be produced. Specific examples of salt (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the anion and cation described above. The "~" indicates that the salt (I) and the anion (I) correspond to each other. For example, Salt (I-1) is composed of the anion shown in formula (Ia-1) and the carboxyl group shown in formula (Ic-1). Salt (I-2), which consists of thione and an anion represented by formula (Ia-2), is salt (I-2). The salt (I-55) consists of the cation shown in c-1) and the salt shown in formula (Ia-1) This shows a salt consisting of an anion and a cation represented by formula (Ic-2). TIFF2026083014000039.tif5387 [Table 1] TIFF2026083014000041.tif41144

[0057] Among them, salt (I) Formula (Ia-1) ~ Formula (Ia-4), Formula (Ia-7) ~ Formula (Ia-11), Formula (I -a-14) ~ Equations (Ia-30) and (Ia-35) ~ Equations (Ia-38) An anion represented by one of the following and one of the following equations (Ic-1) to (Ic-44) Salts combined with cations are preferred, specifically salts (I-1) to salts (I-4), salt (I-7)~Salt (I-11), Salt (I-14)~Salt (I-30), Salt (I-35)~Salt ( I-38), salt (I-39) ~ salt (I-42), salt (I-45) ~ salt (I-49), salt ( I-52) ~ Salt (I-68), Salt (I-73) ~ Salt (I-76), Salt (I-77) ~ Salt ( I-80), Salt (I-83) ~ Salt (I-87), Salt (I-90) ~ Salt (I-106), Salt (I-111)~Salt (I-114), Salt (I-115)~Salt (I-118), Salt (I-1 21) Salt (I-125), Salt (I-128), Salt (I-144), Salt (I-149) Salt (I-152), Salt (I-153) ~ Salt (I-156), Salt (I-159) ~ Salt (I- 163), Salt (I-166) ~ Salt (I-182), Salt (I-187) ~ Salt (I-190) , salt (I-191) ~ salt (I-194), salt (I-197) ~ salt (I-201), salt (I -204)~Salt (I-220), Salt (I-225)~Salt (I-228), Salt (I-229 )~Salt (I-232), Salt (I-235)~Salt (I-239), Salt (I-242)~Salt ( I-258), Salt (I-263) ~ Salt (I-266), Salt (I-267) ~ Salt (I-27 0), Salt (I-273) ~ Salt (I-277), Salt (I-280) ~ Salt (I-296), Salt (I-301)~Salt (I-304), Salt (I-305)~Salt (I-308), Salt (I-3 11) Salt (I-315), Salt (I-318), Salt (I-334), Salt (I-339) Salt (I-342), Salt (I-343) ~ Salt (I-346), Salt (I-349) ~ Salt (I- 353), Salt (I-356) ~ Salt (I-372), Salt (I-377) ~ Salt (I-380) , salt (I-381) ~ salt (I-384), salt (I-387) ~ salt (I-391), salt (I -394)~Salt (I-410), Salt (I-415)~Salt (I-418), Salt (I-419 )~Salt (I-422), Salt (I-425)~Salt (I-429), Salt (I-432)~Salt ( I-448), Salt (I-453) ~ Salt (I-456), Salt (I-457) ~ Salt (I-46 0), salt (I-463) ~ salt (I-467), salt (I-470) ~ salt (I-486), salt (I-491)~Salt (I-494), Salt (I-495)~Salt (I-498), Salt (I-5 01) Salt (I-505), Salt (I-508), Salt (I-524), Salt (I-529) Salt (I-532), Salt (I-533) ~ Salt (I-536), Salt (I-539) ~ Salt (I- 543), Salt (I-546) ~ Salt (I-562), Salt (I-567) ~ Salt (I-570) , salt (I-571) ~ salt (I-574), salt (I-577) ~ salt (I-581), salt (I -584)~Salt (I-600), Salt (I-605)~Salt (I-608), Salt (I-609 )~Salt (I-612), Salt (I-615)~Salt (I-619), Salt (I-622)~Salt ( I-638), Salt (I-643) ~ Salt (I-646), Salt (I-647) ~ Salt (I-65 0), Salt (I-653) ~ Salt (I-657), Salt (I-660) ~ Salt (I-676), Salt (I-681)~Salt (I-684), Salt (I-685)~Salt (I-688), Salt (I-6 91) Salt (I-695), Salt (I-698), Salt (I-714), Salt (I-719) Salt (I-722), Salt (I-723) ~ Salt (I-726), Salt (I-729) ~ Salt (I- 733), Salt (I-736) ~ Salt (I-752), Salt (I-757) ~ Salt (I-760) , salt (I-761) ~ salt (I-764), salt (I-767) ~ salt (I-771), salt (I -774)~Salt (I-790), Salt (I-795)~Salt (I-798), Salt (I-799 )~Salt (I-802), Salt (I-805)~Salt (I-809), Salt (I-812)~Salt ( I-828), Salt (I-833) ~ Salt (I-836), Salt (I-837) ~ Salt (I-84 0), Salt (I-843) ~ Salt (I-847), Salt (I-850) ~ Salt (I-866), Salt (I-871)~Salt (I-874), Salt (I-875)~Salt (I-878), Salt (I-8 81) Salt (I-885), Salt (I-888), Salt (I-904), Salt (I-909) Salt (I-912), Salt (I-913) ~ Salt (I-916), Salt (I-919) ~ Salt (I- 923), Salt (I-926) ~ Salt (I-942), Salt (I-947) ~ Salt (I-950) , salt (I-951) ~ salt (I-954), salt (I-957) ~ salt (I-961), salt (I -964)~Salt (I-980), Salt (I-985)~Salt (I-988), Salt (I-989 )~Salt (I-992), Salt (I-995)~Salt (I-999), Salt (I-1002)~Salt (I-1018), salt (I-1023) ~ salt (I-1026), salt (I-1027) ~ salt (I-1030), salt (I-1033) ~ salt (I-1037), salt (I-1040) ~ salt (I-1056), Salt (I-1061) ~ Salt (I-1064), Salt (I-1065) ~ Salt (I-1068), salt (I-1071) ~ salt (I-1075), salt (I-1078) ~ salt (I-1094), Salt (I-1099) ~ Salt (I-1102), Salt (I-1103) ~ Salt (I-1106), Salt (I-1109) ~ Salt (I-1113), Salt (I-1116) ~ Salt (I-1132), salt (I-1137) ~ salt (I-1140), salt (I-1141) ~ salt (I-1144), salt (I-1147) ~ salt (I-1151), salt (I-1154) ~ salt (I-1170), Salt (I-1175) ~ Salt (I-1178), Salt (I-1179) ~ Salt (I-1182), salt (I-1185) ~ salt (I-1189), salt (I-1192) ~ salt (I-1208), Salt (I-1213) ~ Salt (I-1216), Salt (I-1217) ~ Salt (I-1220), salt (I-1223) ~ salt (I-1227), salt (I-1230) ~ salt (I-1246), Salt (I-1251) ~ Salt (I-1254), Salt (I-1255) ~ Salt (I-1258), salt (I-1261) ~ salt (I-1265), salt (I-1268) ~ salt (I-1284), salt (I-1289) ~ salt (I-1292), salt (I-1293) ~ salt (I-1296), salt (I-1299) ~ salt (I-1303), salt (I-1306) ~ salt (I-1322), salt (I-1327) ~ salt (I-1330), salt (I-1331) ~ salt (I-1334), salt (I-1337) ~ salt (I-1341), salt (I-1344) ~ salt (I-1360), Salt (I-1365) ~ Salt (I-1368), Salt (I-1369) ~ Salt (I-1372), salt (I-1375) ~ salt (I-1379), salt (I-1382) ~ salt (I-1398), Salt (I-1403) ~ Salt (I-1406), Salt (I-1407) ~ Salt (I-1410), Salt (I-1413) ~ Salt (I-1417), Salt (I-1420) ~ Salt (I-1436), Salt (I-1441) ~ Salt (I-1444), Salt (I-1445) ~ Salt (I-1448), salt (I-1451) ~ salt (I-1455), salt (I-1458) ~ salt (I-1474), Salt (I-1479) ~ Salt (I-1482), Salt (I-1483) ~ Salt (I-1486), salt (I-1489) ~ salt (I-1493), salt (I-1496) ~ salt (I-1512), salt (I-1517) ~ salt (I-1520), salt (I-1521) ~ salt (I-1524), salt (I-1527) ~ salt (I-1531), salt (I-1534) ~ salt (I-1550), Salt (I-1555) ~ Salt (I-1558), Salt (I-1559) ~ Salt (I-1562), salt (I-1565) ~ salt (I-1569), salt (I-1572) ~ salt (I-1588), Salt (I-1593) ~ Salt (I-1596), Salt (I-1597) ~ Salt (I-1600), Salt (I-1603) ~ Salt (I-1607), Salt (I-1610) ~ Salt (I-1626), Salt (I-1631) ~ Salt (I-1634), Salt (I-1635) ~ Salt (I-1638), salt (I-1641) ~ salt (I-1645), salt (I-1648) ~ salt (I-1664), salts (I-1669) to salts (I-1672) are preferable.

[0058] <Method for producing salt (I)> Salt (I) is a mixture of the salt represented by formula (Ia) and the salt represented by formula (Ib) in a solvent. It can be manufactured by reaction. TIFF2026083014000042.tif84161[In the formula, all signs have the same meaning as above. R A , R B and R C Each These independently represent hydrocarbon groups with 1 to 12 carbon atoms, or R A , R B and R C together They may form an aromatic ring. D This represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. ] Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. It can be done. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0059] Examples of salts represented by formula (Ib) include the salts represented by the following formulas. This refers to the method described in Japanese Patent Publication No. 2011-116747 and Japanese Patent Publication No. 2016-047815. It can be easily manufactured by a method similar to that of the law, or by a known manufacturing method. TIFF2026083014000043.tif198162

[0060] The salt represented by formula (Ia) is the same as the salt represented by formula (Ic) and the salt represented by formula (I-d1). The compound represented by formula (I-d2) and the compound represented by formula (I-d3) It can be produced by reacting potassium carbonate in a solvent. JPEG2026083014000044.jpg72151 [In the formula, all symbols have the same meaning as described above.] Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. It can be done. The reaction temperature is typically between 15°C and 100°C, and the reaction time is typically between 0.5 and 24 hours. .

[0061] Examples of salts represented by formula (Ic) include those represented by the following formula, which are readily available on the market. It can be obtained. TIFF2026083014000045.tif57138

[0062] Compound represented by formula (I-d1), compound represented by formula (I-d2), and compound represented by formula (I-d3 Examples of compounds represented by ) include the following compounds, which are readily available from the market. It is possible. TIFF2026083014000046.tif40147

[0063] The salt represented by formula (Ia) is the same as the salt represented by formula (Ie) and the salt represented by formula (I-f1). The compound represented by formula (I-f2) and the compound represented by formula (I-f3) It can be produced by reacting it in a solvent in the presence of a base. TIFF2026083014000047.tif75151[In this formula, all symbols have the same meaning as defined above.] Examples of bases include potassium hydroxide and sodium hydride. Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. It can be done. The reaction temperature is typically between 15°C and 100°C, and the reaction time is typically between 0.5 and 24 hours. .

[0064] Examples of salts represented by formula (Ie) include those represented by the following formula, which are readily available on the market. It can be obtained. TIFF2026083014000048.tif58150

[0065] Compound represented by formula (I-f1), compound represented by formula (I-f2), and compound represented by formula (I-f3 Examples of compounds represented by ) include the following compounds, which are readily available from the market. It is possible. TIFF2026083014000049.tif20153

[0066] [Acid Generator] The acid generator of the present invention contains salt(I). It may contain one type of salt(I), or salt( I) may contain two or more types. The acid generator of the present invention, in addition to salt (I), contains an acid generator known in the resist field (hereinafter referred to as "acid generator"). It may contain a herbal agent (B), which may be used alone. You may use one type, or you may use two or more types in combination.

[0067] The acid generator (B) may be either nonionic or ionic. As herbal preparations, sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate ester) are used. Sulfonate, oximesulfonate, N-sulfonyloxiimide, sulfonyloxyke Ton, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, keto Examples include sulfones, sulfonyl diazomethanes, etc. Ionic acid generators include onions. Onium salts containing um cations (e.g., diazonium salts, phosphonium salts, sulfonium salts) Typical examples include salts (iodonium salts). An anion of anium salts is aniodonium sulfonate. Examples include sulfonylimide anions, sulfonylmethide anions, and others.

[0068] As for the acid generating agent (B), see Japanese Patent Publication No. 63-26653, Japanese Patent Publication No. 55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452 Japanese Patent Publication No. 62-153853, Japanese Patent Publication No. 63-146029, U.S. Patent No. 3,779, Patent No. 778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. Compounds that generate acid when exposed to radiation, as described in publications No. 126, 712, etc., can be used. Compounds manufactured by known methods may also be used. The acid generator (B) may consist of two or more types. They may be used in combination.

[0069] The acid generator (B) is preferably a fluorine-containing acid generator, and more preferably a fluorine-containing acid generator of formula (B1). This is a salt represented by (hereinafter sometimes referred to as "acid generator (B1)"). TIFF2026083014000050.tif2862[In formula (B1), Q b1 and Q b2 Each of these independently contains a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. It represents the 'L' group. L b1 This represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH2- may be replaced by -O- or -CO-, and the saturated hydrocarbon group is contained The hydrogen atoms may be substituted with fluorine atoms or hydroxyl groups. Y is a methyl group which may have substituents or a C3-C2 group which may have substituents 4 represents an alicyclic hydrocarbon group, and the -CH2- contained in the alicyclic hydrocarbon group is -O-, - It may be replaced with SO2- or -CO-. Z1 + This represents an organic cation.

[0070] Q in equation (B1) b1 Q b2 , L b1 And Y are, respectively, in the above-mentioned equation (IA). ruQ 1 Q 2 , L 1 and Y 1 Similar examples can be given. The sulfonic acid anion in formula (B1) is the anion represented by formula (IA) and Similar examples can be given.

[0071] Z1 + Examples of organic cations include organic onium cations and organic sulfonium cations. Organic iodium cation, organic ammonium cation, benzothiazolium cation and Examples include organic phosphonium cations. Among these, organic sulfonium cationic cations are particularly noteworthy. N and organic iodonium cations are preferred, and aryl sulfonium cations are more preferred. Specifically, a cation represented by any of formulas (b2-1) to (b2-4) ( Examples include the following, which may be referred to as "cation(b2-1)" depending on the formula number.

[0072] In formulas (b2-1) to (b2-4) of TIFF2026083014000051.tif46167, R b4 ~R b6 These are, independently, chain hydrocarbon groups with 1 to 30 carbon atoms and groups with 3 to 36 carbon atoms. This term represents an alicyclic hydrocarbon group or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and is contained in the chain-like hydrocarbon group. The hydrogen atoms present are found in hydroxyl groups, alkoxy groups with 1 to 12 carbon atoms, and lipid groups with 3 to 12 carbon atoms. The alicyclic hydrocarbon group may be substituted with a cyclic hydrocarbon group or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the hydrocarbon group are halogen atoms and aliphatic hydrocarbon groups with 1 to 18 carbon atoms. They may also be substituted with an alkylcarbonyl group or glycidyloxy group having 2 to 4 carbon atoms. The hydrogen atoms contained in the aromatic hydrocarbon group are halogen atoms, hydroxyl groups, and C1- 18 aliphatic hydrocarbon groups, C1-C12 alkyl fluorides, or C1-C12 It may be substituted with a coxy group. R b4 and R b5 These atoms bond with each other and, together with the sulfur atoms they bond to, form a ring. Even if the -CH2- contained in the ring is replaced by -O-, -S-, or -CO- good. R b7 and R b8 These are, independently, a halogen atom, a hydroxyl group, and a lipid with 1 to 12 carbon atoms. This represents a fatty hydrocarbon group or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer between 0 and 5. When m2 is 2 or more, multiple R b7 They may be the same or different, and when n2 is 2 or more, multiple Number R b8 They may be the same or different. R b9 and R b10 Each of these is independently a chain-like hydrocarbon group having 1 to 36 carbon atoms or a group having 3 to 3 carbon atoms. It represents 36 alicyclic hydrocarbon groups. R b9 and R b10 These atoms bond with each other and, together with the sulfur atoms they bond to, form a ring. It may be done, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. That's good too. R b11 This consists of a hydrogen atom, a chain hydrocarbon group with 1 to 36 carbon atoms, and an alicyclic carbon group with 3 to 36 carbon atoms. This represents a hydrogen group or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 This refers to a chain-type hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or This represents an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atoms contained in this chain-like hydrocarbon group are carbon It may be substituted with an aromatic hydrocarbon group having prime numbers 6 to 18, and the aromatic hydrocarbon group contains The hydrogen atom is a carbon-1 to carbon-12 alkoxy group or a carbon-1 to carbon-12 alkyl carbonyl group. It may be substituted with an oxy group. R b11 and R b12 These molecules bond to each other, forming a ring including the -CH-CO- groups to which they are joined. It is also possible that the -CH2- contained in the ring is replaced by -O-, -S-, or -CO-. That's fine. R b13 ~R b18 These are, independently, a halogen atom, a hydroxyl group, and a lipid with 1 to 12 carbon atoms. Alkaline hydrocarbon groups, C1-C12 alkyl fluorides, or C1-C12 alkoxy groups It represents. L b31 This represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer between 0 and 5. q2 and r2 each independently represent an integer between 0 and 4. u2 represents either 0 or 1. When o2 is 2 or more, multiple R b13 They are the same or different, and when p2 is 2 or more, multiple R b14 They are the same or different, and when q2 is 2 or more, multiple R b15They are the same or different, r2 When there are 2 or more R b16 They are the same or different, and when s2 is 2 or more, multiple R b17 teeth If the same or different, and t2 is 2 or more, multiple R b18 They are either the same or different.

[0073] Aliphatic hydrocarbon groups refer to both chain-type hydrocarbon groups and alicyclic hydrocarbon groups. Examples of chain hydrocarbon groups include methyl, ethyl, propyl, isopropyl, and butyl groups. Group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and Examples include alkyl groups with a 2-ethylhexyl group. In particular, R b9 ~R b12 The chain-like hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and monocyclic alicyclic carbon Examples of hydrogen groups include cyclopropyl group, cyclobutyl group, cyclopentyl group, and cyclohexyl group. Cycloalkyl groups such as cycloheptyl, cyclooctyl, and cyclodecyl groups Examples include the decahydronaphthyl group and adamantyl group, which are polycyclic alicyclic hydrocarbon groups. Examples include the norbornyl group and the following groups. TIFF2026083014000052.tif10159 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably These have 4 to 12 carbon atoms.

[0074] As an example of an alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, methylcyclohex xyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyl Ruadamantan-2-yl group, 2-isopropyladamantan-2-yl group, methyl nor Examples include bornyl groups and isobornyl groups. Hydrogen atoms are substituted with aliphatic hydrocarbon groups. In alicyclic hydrocarbon groups, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferable. The number is 20 or less. A fluoride alkyl group refers to an alkyl group having 1 to 12 carbon atoms and containing a fluorine atom. Examples include oromethyl groups, difluoromethyl groups, trifluoromethyl groups, and perfluorobutyl groups. The number of carbon atoms in the alkyl fluoride is preferably 1 to 9, and more preferably 1 to It is 6, and more preferably 1 to 4.

[0075] Aromatic hydrocarbon groups include phenyl, biphenyl, naphthyl, and phenanthryl groups. Examples include aryl groups and the like. Aromatic hydrocarbon groups are chain hydrocarbon groups or alicyclic hydrocarbon groups. Aromatic hydrocarbon groups that may have hydrogen groups, including tolyl groups, xyl groups, and chain-type hydrocarbon groups. Lyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl (e.g., 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group) and alicyclic groups Aromatic hydrocarbon groups having hydrocarbon groups (p-cyclohexylphenyl group, p-adamantine group) Examples include phenyl groups, etc. Furthermore, if the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, Chain-type hydrocarbon groups with 1 to 18 prime numbers and alicyclic hydrocarbon groups with 3 to 18 carbon atoms are preferred. As an aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group, p-methoxyphenyl Examples include the 'L' group. Examples of chain hydrocarbon groups in which hydrogen atoms are substituted with aromatic hydrocarbon groups include the benzyl group and the ferrous hydrocarbon group. Netyl group, phenylpropyl group, trityl group, naphthylmethyl group, naphthylethyl group, etc. Examples include aralkyl groups.

[0076] Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentoxy groups. oxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group Examples include dodecyloxy groups, etc. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. It is possible. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. ru. Examples of alkylcarbonyloxy groups include methylcarbonyloxy group and ethylcarbonyl Oxy group, propyl carbonyloxy group, isopropyl carbonyloxy group, butylcarbon Bonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy C group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyl Examples include oxy groups and 2-ethylhexylcarbonyloxy groups.

[0077] R b4 and R b5 The ring formed when these atoms bond to each other and together with the sulfur atom to which they bond is The rings may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may have 3 to 18 carbon atoms, preferably 4 to 18 carbon atoms. Furthermore, the ring containing the sulfur atom can be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. For example, the following rings can be cited. * indicates a bonding site. TIFF2026083014000053.tif24143

[0078] R b9 and R b10The rings formed by these elements together can be monocyclic, polycyclic, aromatic, or non-aromatic. The ring may be either saturated or unsaturated. Examples of rings include 3-membered to 12-membered rings. Preferably a 3-membered to 7-membered ring. For example, a thiolan-1-ium ring (tetrahydrothi Examples include the ophenium ring, thian-1-ium ring, and 1,4-oxatian-4-ium ring. It can be done. R b11 and R b12 The rings formed by these elements together can be monocyclic, polycyclic, aromatic, or non-aromatic. The ring may be either saturated or unsaturated. Examples of rings include 3-membered to 12-membered rings. Preferably a 3-membered to 7-membered ring. Oxocycloheptane ring, oxocyclohexane ring Examples include oxonorbornane rings and oxoadamantane rings.

[0079] Among cations (b2-1) to (b2-4), preferably cation (b2 -1) Examples of cations (b2-1) include the following: TIFF2026083014000054.tif73149

[0080] TIFF2026083014000055.tif110165

[0081] Examples of cations (b2-2) include the following: TIFF2026083014000056.tif18150

[0082] Examples of cations (b2-3) include the following: TIFF2026083014000057.tif25122

[0083] Examples of cations (b2-4) include the following: TIFF2026083014000058.tif127165

[0084] The acid generator (B) is a combination of the anion and the organic cation described above, and these are They can be combined in any way. Preferably, the acid generator (B) is formula (Ia-1)~ Formula (Ia-3), Formula (Ia-7) ~ Formula (Ia-16), Formula (Ia-18), Formula ( Anio represented by any of the following equations (Ia-19), (Ia-22) to (Ia-38) A combination of cation (b2-1), cation (b2-3), or cation (b2-4) The voice can be raised.

[0085] The acid generator (B) is preferably represented by formulas (B1-1) to (B1-56), respectively. Examples include those that are used. Among them, those containing arylsulfonium cations are preferred. Formula (B1-1) ~ Formula (B1-3), Formula (B1-5) ~ Formula (B1-7), Formula (B1-11) ~Formula (B1-14), Formula (B1-20) ~Formula (B1-26), Formula (B1-29), Formula (B 1-31) The form represented by formula (B1-56) is particularly preferred. TIFF2026083014000059.tif98161

[0086] TIFF2026083014000060.tif152165

[0087] TIFF2026083014000061.tif92158

[0088] TIFF2026083014000062.tif143161

[0089] TIFF2026083014000063.tif99130

[0090] TIFF2026083014000064.tif92158

[0091] When the acid generator contains salt (I) and acid generator (B), salt (I) and acid generator (B) The ratio of the content of each (mass ratio; salt (I): acid generator (B)) is usually 1:99 to 99:1. Yes, preferably 2:98 to 98:2, and more preferably 5:95 to 95:5. More preferably 10:90~90:10, and especially preferably 15:85~85: It is 15.

[0092] [Resist composition] The resist composition of the present invention comprises an acid generator containing salt (I) and a resin having an acid-unstable group ( It contains the following (sometimes referred to as "resin (A)"). Here, "acid-unstable group" refers to the elimination group. It has a group, and upon contact with an acid, the leaving group is removed, and the constituent unit becomes a hydrophilic group (for example, hydroxy This refers to a group that converts into a constituent unit having a carboxyl group or a carboxyl group. The resist composition of the present invention generates an acid that is less acidic than the acid generated by the acid generator. It may contain a quencher such as salt (hereinafter sometimes referred to as "quencher (C)"). Preferably, it contains a solvent (which may be referred to as "solvent (E)" below).

[0093] <Acid Generator> In the resist composition of the present invention, the total content of the acid generator is as follows: resin (A)1 Preferably 1 to 45 parts by mass, more preferably 1 part by mass, per 00 parts by mass 40 parts by mass or less, more preferably 3 parts by mass or more and 40 parts by mass or less, even more preferably The amount is 3 parts by mass or more and 35 parts by mass or less, and is particularly preferably 5 parts by mass or more and 35 parts by mass or less.

[0094] <Resin (A)> Resin (A) is a structural unit having an acid-unstable group (hereinafter referred to as "structural unit (a1)"). The resin (A) may further contain structural units other than structural unit (a1). Preferred. Structural units other than structural unit (a1) include structural units that do not have acid-unstable groups ( (Hereinafter referred to as "structural unit (s)"), structural unit (a1), and other structural units (s) Structural units (for example, structural units having halogen atoms as described later (hereinafter referred to as "structural unit (a4)") In some cases, this may be referred to as "structural unit ( a5) In some cases, this refers to structural units derived from monomers known in the art. These are some examples.

[0095] <Structural unit (a1)> Structural unit (a1) is a monomer having an acid-unstable group (hereinafter referred to as "monomer (a1)"). It is derived from (in some cases). The acid-unstable group contained in resin (A) is the group represented by formula (1) (hereinafter also referred to as group (1)). ) and / or a group represented by formula (2) (hereinafter also referred to as group (2)) is preferred. TIFF2026083014000065.tif2298[In formula (1), R a1 , R a2 and R a3 Each of these is an alkyl group having 1 to 8 carbon atoms, independently of the others. , alkenyl groups with 2 to 8 carbon atoms, alicyclic hydrocarbon groups with 3 to 20 carbon atoms, and groups with 6 to 18 carbon atoms R represents an aromatic hydrocarbon group or a group formed by combining these groups. a1 and R a2 They are joined together Together with the carbon atoms to which they bond, they form alicyclic hydrocarbon groups with 3 to 20 carbon atoms. ma and na each independently represent 0 or 1, and at least one of ma and na This represents 1. * represents a bond. TIFF2026083014000066.tif2378[In formula (2), R a1’ and R a2’ Each of these is independently a hydrogen atom or a carbon atom with 1 to 1 carbon atoms. Represents two hydrocarbon groups, R a3’ R represents a hydrocarbon group with 1 to 20 carbon atoms. a2’ Reach biR a3’ They bond with each other, and together with the carbon atoms and X they bond to, they have 3 to 20 carbon atoms. A heterocyclic group is formed, and the hydrocarbon group and the -CH2- contained in the heterocyclic group are -O- or - It may be replaced with S-. X represents either an oxygen atom or a sulfur atom. 'na' represents either 0 or 1. * represents a bond.

[0096] R a1 , R a2 and R a3 Examples of alkyl groups in this context include methyl group, ethyl group, and propyl group. Examples include the hydroxyl group, butyl group, pentyl group, hexyl group, heptyl group, and octyl group. R a1 , R a2 and R a3 The alkenyl groups in this context include ethenyl, propenyl, and iso Propenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, he Examples include xenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. . R a1 , R a2 and R a3 In this context, the alicyclic hydrocarbon group is either monocyclic or polycyclic. This is also acceptable. Examples of monocyclic alicyclic hydrocarbon groups include cyclopentyl group, cyclohexyl group, and cyclopentyl group. Examples include cycloalkyl groups such as chloroheptyl and cyclooctyl groups. Polycyclic and alicyclic groups. The hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following: Examples include the base (* represents a bonding). a1 , R a2 and R a3 alicyclic hydrocarbon group The number of carbon atoms is preferably 3 to 16. TIFF2026083014000067.tif10159R a1 , R a2 and R a3 Aromatic hydrocarbon groups in this context include phenyl groups and naphthyl groups. Examples of aryl groups include anthryl, biphenyl, and phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, alkylcycloalkyl groups or cycloalkylalkyl groups), benzyl groups, etc. Aromatic hydrocarbon groups having a alkyl group (p-methylphenyl group, p-ter) t-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-die Fragrances having alicyclic hydrocarbon groups (such as ethylphenyl group and 2-methyl-6-ethylphenyl group) Fragrance group hydrocarbons (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), f Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups. Preferably ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3 Examples of such groups include the following: Alicyclic hydrocarbon groups are preferably those having 3 carbon atoms. It is ~12. * represents a bond with -O-. TIFF2026083014000068.tif35157

[0097] R a1’ , R a2’ and R a3’ Examples of hydrocarbon groups in this context include alkyl groups and alicyclic carbon groups. Examples include hydrogenated groups, aromatic hydrocarbon groups, and groups formed by combining these. It is possible. Alkyl and alicyclic hydrocarbon groups are R a1 , R a2 and R a3 Similar to the base mentioned above This is one example. Aromatic hydrocarbon groups include phenyl group, naphthyl group, anthryl group, biphenyl group, Examples include aryl groups such as phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, alkylcycloalkyl groups or cycloalkylalkyl groups), benzyl groups, etc. Aromatic hydrocarbon groups having a alkyl group (p-methylphenyl group, p-ter) t-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-die Fragrances having alicyclic hydrocarbon groups (such as ethylphenyl group and 2-methyl-6-ethylphenyl group) Fragrance group hydrocarbons (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), f Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups. R a2’ and R a3’ They bond with each other and together with the carbon atoms and X they bond to, complex When forming a ring group, -C(R a1’ )(R a2’ )-XR a3’ The following are some of the reasons: * indicates a bonding action. TIFF2026083014000069.tif18124R a1’ and R a2’ Preferably, at least one of them is a hydrogen atom. na' is preferably 0.

[0098] The following are examples of base (1): In equation (1), R a1 , R a2 and R a3 is an alkyl group, ma=0, na= A group that is 1. A tert-butoxycarbonyl group is preferred as this group. In equation (1), R a1 , R a2 However, together with the carbon atoms to which these bond, adamant Forms a chill group, R a3 A group that is an alkyl group, with ma=0 and na=1. In equation (1), R a1 and R a2 Each of them is an alkyl group independently, and R a3 Adama A methyl group with ma=0 and na=1. The following are examples of base (1). * indicates a bond. TIFF2026083014000070.tif170163

[0099] The following are specific examples of base (2). * represents a bond. TIFF2026083014000071.tif68162

[0100] The monomer (a1) preferably has an acid-unstable group and an ethylenically unsaturated bond. Mer, more preferably a (meth)acrylic monomer having an acid-unstable group.

[0101] Among (meth)acrylic monomers having an acid-unstable group, preferably those having 5 to 20 carbon atoms. Examples include those having alicyclic hydrocarbon groups. A resin (A) having structural units derived from monomer (a1) is used in the resist composition. This allows for an improvement in the resolution of the resist pattern.

[0102] Preferably, a structural unit derived from a (meth)acrylic monomer having group (1) is used. , a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)). ), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1) . ) or a structural unit represented by formula (a1-2) (hereinafter referred to as structural unit (a1-2) Examples include: (a1-1) and (a1-2) These are at least one structural unit selected from the group consisting of ). It is often acceptable to use two or more types in combination. TIFF2026083014000072.tif46150[In formulas (a1-0), (a1-1), and (a1-2), L a01 , L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 - CO-O- represents a combination, where k1 is an integer from 1 to 7, and * represents the association with -CO-. vinegar. R a01 , R a4 and R a5 These are, independently, a hydrogen atom, a halogen atom, or a halogen. This represents an alkyl group having 1 to 6 carbon atoms, which may contain atoms. R a02 , R a03 and R a04 These are, independently, alkyl groups with 1 to 8 carbon atoms and alkyl groups with 3 to 8 carbon atoms. 18 alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, or combinations thereof It represents the base. R a6 and R a7 These are, independently, alkyl groups with 1 to 8 carbon atoms and axyl groups with 2 to 8 carbon atoms. Lukenyl group, alicyclic hydrocarbon group having 3 to 18 carbon atoms, aromatic hydrocarbon group having 6 to 18 carbon atoms or This represents the group formed by combining these elements. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[0103] R a01 , R a4 and R a5 This is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. It is a chill group. L a01 , L a1 and L a2 Preferably, an oxygen atom or *-O-(CH2) k01 -C OO- (where k01 is preferably an integer from 1 to 4, more preferably It is 1, more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 Alkyl groups, alkenyl groups, alicyclic groups in Examples of hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining them include R in formula (1). a1 , R a2 and R a3 Similar groups to those listed above can be cited. R a02 , R a03 , and R a04 The alkyl group in this case is preferably an alkyl group having 1 to 6 carbon atoms. It is a group, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. ru. R a6 and R a7 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms. More preferably, a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and further Preferably, it is an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms. Yes, more preferably an ethenyl group, propenyl group, isopropenyl group or butenyl group. ru. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the alicyclic hydrocarbon group is preferably The range is 5 to 12, and more preferably 5 to 10. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the aromatic hydrocarbon group is preferably The range is 6 to 12, and more precisely, 6 to 10. Groups that combine alkyl groups and alicyclic hydrocarbon groups are formed by combining these alkyl groups and alicyclic hydrocarbon groups. It is preferable that the total number of carbon atoms in the combined group is 18 or less. Groups formed by combining alkyl groups and aromatic hydrocarbon groups are composed of these alkyl groups and aromatic hydrocarbon groups. It is preferable that the total number of carbon atoms in the combined group is 18 or less. R a02 and R a03 Preferably, an alkyl group having 1 to 6 carbon atoms or an aromatic group having 6 to 12 carbon atoms. A hydrocarbon group, more preferably a methyl group, an ethyl group, a phenyl group, or a naphthyl group. ru. R a04 Preferably, an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon having 5 to 12 carbon atoms. The group is a methyl group, more preferably an ethyl group, a cyclohexyl group, or an adamantyl group. be. R a6and R a7 Preferably, alkyl groups having 1 to 6 carbon atoms, and alkenes having 2 to 6 carbon atoms. A C6 group or an aromatic hydrocarbon group having 6 to 12 carbon atoms, more preferably a methyl group or an ethyl group. , isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group, further Preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group. ru. m1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0104] Examples of structural units (a1-0) are given by equations (a1-0-1) to (a1-0-18). A structural unit represented by one of the following and R in the structural unit (a1-0) a01 This corresponds to A structure in which the til group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. The manufacturing units are listed, as in equations (a1-0-1) to (a1-0-10) and (a1-0-13). A structural unit represented by any of the formulas (a1-0-14) is preferred. TIFF2026083014000073.tif99168

[0105] As for the structural unit (a1-1), for example, as described in Japanese Patent Publication No. 2010-204646 Examples of structural units derived from monomers include those from formula (a1-1-1) to formula (a1 -1-7) Structural units represented by any of the above and R in structural units (a1-1) a4 ni The corresponding methyl group is replaced by a hydrogen atom, halogen atom, haloalkyl group, or other alkyl group. A divided structural unit is preferred, and can be represented by any of the formulas (a1-1-1) to (a1-1-4). A structural unit that can be made into a structural unit is preferable. TIFF2026083014000074.tif38164

[0106] The structural unit (a1-2) is any of the formulas (a1-2-1) to (a1-2-14). The structural unit represented by and the R in the structural unit (a1-2) a5 The methyl group corresponding to water Examples of structural units that are replaced by elementary atoms, halogen atoms, haloalkyl groups, or other alkyl groups include Equations (a1-2-2), (a1-2-5), (a1-2-6), and (a1- 2-10) A structural unit represented by any of the formulas (a1-2-14) is preferred. TIFF2026083014000075.tif67163

[0107] If resin (A) contains structural unit (a1-0), its content is the total structural unit of resin (A). For each position, it is usually 5-60 mol%, preferably 5-50 mol%, and more preferably The percentage is between 10 and 40 mol%. If resin (A) contains structural unit (a1-1) and / or structural unit (a1-2), The total content of these is typically 10 to 95 mol% relative to the total structural units of resin (A), and is preferable. More preferably 15-90 mol%, more preferably 20-85 mol%, and even more preferably More preferably, it is 25-75 mol%, and even more preferably 30-75 mol%.

[0108] A structural unit having a base (2) in structural unit (a1) is represented by formula (a1-4). Examples of structural units (hereinafter sometimes referred to as "structural units (a1-4)") include the following. TIFF2026083014000076.tif3854[In formula (a1-4), R a32This is a hydrogen atom, a halogen atom, or a C1-C6 atom which may have a halogen atom. It represents the alkyl group. R a33 This includes halogen atoms, hydroxyl groups, alkyl groups with 1 to 6 carbon atoms, and C1 to 6 atoms. Alkoxy group, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms Lucoxy group, C2-C4 alkylcarbonyl group, C2-C4 alkylcarbonyl This represents an oxy group, an acryloyloxy group, or a methacryloyloxy group. A a30 is a single bond or * -X a31 -( A a32 -X a32 ) nc - represents -R a32 they combine This represents the bonding site with the carbon atom. A a32 This represents an alkanediyl group with 1 to 6 carbon atoms. X a31 and X a32 These represent -O-, -CO-O-, or -O-CO-, respectively, independently. nc represents 0 or 1. la represents an integer between 0 and 4. If la is 2 or greater, multiple R a33 They are intertwined They may be the same or different. R a34 and R a35 Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. R a36 R represents a hydrocarbon group with 1 to 20 carbon atoms. a35 and R a36 they combine with each other and Together with the -CO- to which they bond, they form a divalent hydrocarbon group having 2 to 20 carbon atoms, and the carbonized water The -CH2- contained in the elementary group and the divalent hydrocarbon group is replaced by -O- or -S- That's good too.

[0109] Ra32 and R a33 Examples of halogen atoms in this context include fluorine, chlorine, and bromine atoms. These are some examples. R a32 C1-C6 alkyl groups that may have a halogen atom include: Trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2 ,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, pe fluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, Perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, Tyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoro Examples include pentyl groups, pentyl groups, hexyl groups, and perfluorohexyl groups. R a32 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, and the hydrogen atom, methyl group or An ethyl group is more preferable, and a hydrogen atom or a methyl group is even more preferable. R a33 The alkyl groups in this context are methyl, ethyl, propyl, and isopropyl groups. Examples include the butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. It is possible. R a33 The alkoxy groups in this context include methoxy, ethoxy, propoxy, and iso Propoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyl oxy Examples include the hydroxyl group and the hexyloxy group. Alkoxy groups are alkoxy groups with 1 to 4 carbon atoms. Preferably, a methoxy group or an ethoxy group is preferred, and a methoxy group is even more preferred. R a33 The alkoxyalkyl groups in this context are methoxymethyl group and ethoxyethyl group. , propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxy Examples include methyl groups and tert-butoxymethyl groups. Alkoxyalkyl groups have a number of carbon atoms. 2 to 8 alkoxyalkyl groups are preferred, and methoxymethyl or ethoxyethyl groups are preferred. A methoxymethyl group is more preferable, and a methoxymethyl group is even more preferable. R a33 Examples of alkoxyalkoxy groups in this context include methoxymethoxy groups and methoxyethyl groups. Xy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isoprop Xymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxy A cymethoxy group is one example. Alkoxyalkoxy groups are alkoxyal groups with 2 to 8 carbon atoms. A coxy group is preferred, and a methoxyethyl group or an ethoxyethyl group is more preferred. R a33 The alkylcarbonyl groups in this context include acetyl, propionyl, and butyric groups. Examples include lyl groups. Alkyl carbonyl groups are alkyl carbonyl groups having 2 to 3 carbon atoms. A is preferred, and an acetyl group is more preferred. R a33 Examples of alkylcarbonyloxy groups in this context include acetyloxy groups and propionyl groups. Examples include the oxy group and the butyryloxy group. The alkylcarbonyloxy group has a number of carbon atoms. Two to three alkylcarbonyloxy groups are preferred, and acetyloxy groups are more preferred. R a33 This includes halogen atoms, hydroxyl groups, C1-C4 alkyl groups, and C1-C4 An alkoxy group or an alkoxyalkoxy group having 2 to 8 carbon atoms is preferred, along with a fluorine atom and iodine. Elementary atom, hydroxyl group, methyl group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxyethoxy group A toxicmethoxy group is more preferred, along with a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, A methoxy group or an ethoxyethoxy group is even more preferred.

[0110] *-X a31 -( A a32 -X a32 ) nc - for example, *-O-, *-CO-O-, *-OC O-, *-CO-OA a32 -CO-O-, *-O-CO-A a32 -O-, *-OA a32 -CO-O-, *-CO-OA a32 -O-CO-, *-O-CO-A a32 -O-CO-, These include *-CO-O- and *-CO-OA. a32 -CO-O- or *- OA a32 -CO-O- is preferred.

[0111] Examples of alkanediyl groups include methylene group, ethylene group, propane-1,3-diyl group, Propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group , hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1, 3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group and Examples include 2-methylbutane-1,4-diyl groups. A a32 It is preferable that this is a methylene group or an ethylene group.

[0112] A a30 These are single bonds, *-CO-O- or *-CO-OA a32 Being a CO-O Preferably, it is a single bond, *-CO-O- or *-CO-O-CH2-CO-O-. More preferably, the bond is a single bond or even more preferably *-CO-O-.

[0113] la is preferably 0, 1, or 2, more preferably 0 or 1, and even more preferably 0. R a34 , R a35 and R a36 Examples of hydrocarbon groups in this context include alkyl groups and alicyclic hydrocarbon groups. Examples include aromatic hydrocarbon groups and groups formed by combining these. Alkyl groups include methyl, ethyl, propyl, butyl, pentyl, and hexyl groups. Examples include syl groups, heptyl groups, and octyl groups. The alicyclic hydrocarbon group may be monocyclic or polycyclic. Monocyclic alicyclic hydrocarbon group Examples include cyclopentyl groups, cyclohexyl groups, cycloheptyl groups, and cyclooctyl groups. Examples of cycloalkyl groups include decahydrona. Phthyl groups, adamantyl groups, norbornyl groups, and the following groups (* indicates a bonding site), etc. It can be listed. TIFF2026083014000077.tif10150 Aromatic hydrocarbon groups include phenyl group, naphthyl group, anthryl group, biphenyl group, Examples include aryl groups such as phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, cycloalkylalkyl groups), aralkyl groups such as benzyl groups, and alkyl groups. Aromatic hydrocarbon groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl- 6-ethylphenyl group, etc.), aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclophenyl group) Xylphenyl group, p-adamantylphenyl group, etc., phenylcyclohexyl group, etc. Examples include reel-cycloalkyl groups. In particular, R a36 As for, A Lukyl group, alicyclic hydrocarbon group having 3 to 18 carbon atoms, aromatic hydrocarbon group having 6 to 18 carbon atoms or Examples of groups formed by combining these include

[0114] R a34 Preferably, it is a hydrogen atom. R a35 Preferably, a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or a C3 to 12 carbon atom. It is an alicyclic hydrocarbon group, more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, or a C3 to 18 carbon atom Alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, or combinations thereof The group formed is more preferably an alkyl group having 1 to 18 carbon atoms, or a group having 3 to 1 carbon atoms. It is an 8-cell alicyclic aliphatic hydrocarbon group or an aralkyl group having 7 to 18 carbon atoms. a36 in The alkyl group and the alicyclic hydrocarbon group are preferably unsubstituted. a36 in The aromatic hydrocarbon group is preferably an aromatic ring having an aryloxy group with 6 to 10 carbon atoms.

[0115] -OC(R) in structural units (a1-4) a34 )(R a35 )-OR a36 is an acid (for example) It is eliminated upon contact with p-toluenesulfonic acid, forming a hydroxyl group. -OC(R a34 )(R a35 )-OR a36 It bonds to the ortho- or para-position of the benzene ring. It is preferable that the bond is formed at the p-position, and more preferably that it is formed at the p-position.

[0116] As for structural units (a1-4), for example, see Japanese Patent Publication No. 2010-204646. Examples include monomer-derived structural units. Preferably, formulas (a1-4-1) to (a1 -4-18) The structural units and R in the structural unit (a1-4) a32 to A structure in which the corresponding hydrogen atom is replaced by a halogen atom, a haloalkyl group, or an alkyl group. The units are listed, more preferably formulas (a1-4-1) to (a1-4-5), formula (a1 The structural units represented by equations (a1-4-10), (a1-4-13), and (a1-4-14) respectively The rank can be listed. TIFF2026083014000078.tif99165

[0117] If resin (A) has structural units (a1-4), the content thereof is the total structural unit of resin (A). Preferably, the amount is 10 to 95 mol% of the total production units, and 15 to 90 mol%. It is more preferable that it be 20 to 85 mol%, and even more preferably 20 to 70 mol It is even more preferable that it be % and particularly preferable that it be 20 to 60 mol%.

[0118] As structural units derived from (meth)acrylic monomers having group (2), formula (a1 Structural units represented by -5) (hereinafter sometimes referred to as "structural units (a1-5)") are also mentioned. It can be done. TIFF2026083014000079.tif4253 formula (a1-5), R a8 This may have a halogen atom, an alkyl group having 1 to 6 carbon atoms, a hydrogen atom, or a halogen atom. It represents an atom. Z a1 This is a single bond or *-(CH2) h3 -CO-L 54 - represents one of 1-4. Represents an integer of L, where * is L 51 This represents a combination of two things. L 51, L 52 , L 53 and L 54 These represent either -O- or -S- independently. s1 represents an integer between 1 and 3. s1' represents an integer between 0 and 3.

[0119] Examples of halogen atoms include fluorine atoms and chlorine atoms, with fluorine atoms being preferred. C1-C6 alkyl groups that may have a halogen atom include methyl group, ethyl group, Propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, fluoromethyl group Examples include tyl groups and trifluoromethyl groups. In equation (a1-5), R a8 This is a hydrogen atom, a methyl group, or a trifluoromethyl group preferable. L 51 An oxygen atom is preferred. L 52 and L 53 Preferably, one of them is -O- and the other is -S-. s1 is preferably 1. s1' is preferably an integer between 0 and 2. Z a1 A single bond or *-CH2-CO-O- is preferred.

[0120] Examples of structural units (a1-5) are described in Japanese Patent Publication No. 2010-61117. Examples of monomer-derived structural units include those from formula (a1-5-1) to formula (a1-5- 4) The structural units represented by formula (a1-5-1) or formula (a1-5-2 A structural unit represented by ) is more preferable. TIFF2026083014000080.tif31129

[0121] If resin (A) has structural units (a1-5), the content of these units is the total structural unit content of resin (A). The amount is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, and 5 to 40 mol% relative to the production unit. A mol% is more preferable, and 5 to 30 mol% is even more preferable.

[0122] In addition, the following structural units (a1) can also be listed. TIFF2026083014000081.tif27161

[0123] When resin (A) contains structural units such as (a1-3-1) to (a1-3-7) above The content is preferably 10 to 95 mol% relative to the total structural units of resin (A), and 15 ~90 mol% is more preferred, 20~85 mol% is even more preferred, and 20~70 mol% is More preferably, 20 to 60 mol% is particularly preferred.

[0124] <Structural unit (s)> A structural unit (s) is a monomer that does not have an acid-unstable group (hereinafter referred to as "monomer (s)"). It is derived from (there is a combination). The monomer that derives the structural unit (s) is an acid-resistant monomer known in the field of resists. Monomers without a stable group can be used. The structural unit (s) preferably has a hydroxyl group or a lactone ring. A structural unit having a xyl group and not having an acid-unstable group (hereinafter referred to as "structural unit (a2)") A structural unit having a lactone ring and / or not having an acid-unstable group (hereinafter referred to as "structural unit") If a resin having a "production unit (a3)" is used in the resist composition of the present invention, This improves the resolution of the resist pattern and its adhesion to the substrate.

[0125] <Structural Unit (a2)> The hydroxyl group in structural unit (a2) can be an alcoholic hydroxyl group or a phenolic group. A hydroxyl group may also be used. When manufacturing a resist pattern from the resist composition of the present invention, KrF is used as the exposure light source. High-energy beams such as excimer lasers (248 nm), electron beams, or EUV (ultra-ultraviolet light) are used. If present, the structural unit (a2) is a structural unit having a phenolic hydroxyl group ( a2) is preferred, and it is even more preferable to use the structural unit (a2-A) described later. When using an ArF excimer laser (193 nm), the structural unit (a2) is A A structural unit (a2) having a hydroxyl group is preferred, and the structural unit (a2) described later -1) is more preferable. The structural unit (a2) contains one type alone. It is acceptable to include two or more types.

[0126] Structural units having a phenolic hydroxyl group in structural unit (a2) include those of formula (a Examples of structural units represented by 2-A) (hereinafter sometimes referred to as "structural unit (a2-A)") include It is possible. TIFF2026083014000082.tif4248[In formula (a2-A), R a50 This is a hydrogen atom, a halogen atom, or a C1-C6 atom which may have a halogen atom. This represents a luquill group. R a51 This includes halogen atoms, hydroxyl groups, alkyl groups with 1 to 6 carbon atoms, and C1 to 6 atoms. Alkoxy group, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms Lucoxy group, C2-C4 alkylcarbonyl group, C2-C4 alkylcarbonyl This represents an oxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 This is a single bond or *-X a51 -( A a52 -X a52 ) nb - represents -Ra50 they combine This represents the bond between carbon atoms. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO-, respectively, independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, Number R a51 They may be identical or different from one another.

[0127] R a50 and R a51 Examples of halogen atoms in this context include fluorine, chlorine, and bromine atoms. These are some examples. R a50 Examples of C1-C6 alkyl groups that may have a halogen atom include: Fluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2 -Trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, pelf Luoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, pel Fluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropene Examples include tyl groups, pentyl groups, hexyl groups, and perfluorohexyl groups. R a50 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, and the hydrogen atom, methyl group or An ethyl group is more preferable, and a hydrogen atom or a methyl group is even more preferable. R a51 The alkyl groups in this context are methyl, ethyl, propyl, and isopropyl groups. Examples include the butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, and may have a methyl group or an ethyl group. More preferably, a methyl group is even more preferred. R a51 The alkoxy groups in this context include methoxy, ethoxy, propoxy, and iso Examples include propoxy groups, butoxy groups, sec-butoxy groups, and tert-butoxy groups. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, and is either a methoxy group or an ethoxy group. More preferably, a methoxy group is even more preferred. R a51 The alkoxyalkyl groups in this context are methoxymethyl group and ethoxyethyl group. , propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxy Examples include methyl groups and tert-butoxymethyl groups. Alkoxyalkyl groups have a number of carbon atoms. 2 to 8 alkoxyalkyl groups are preferred, and methoxymethyl or ethoxyethyl groups are preferred. A methoxymethyl group is more preferable, and a methoxymethyl group is even more preferable. R a51 Examples of alkoxyalkoxy groups in this context include methoxymethoxy groups and methoxyethyl groups. Xy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isoprop Xymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxy A cymethoxy group is one example. Alkoxyalkoxy groups are alkoxyal groups with 2 to 8 carbon atoms. A coxy group is preferred, and a methoxyethoxy group or an ethoxyethoxy group is more preferred. R a51 The alkylcarbonyl groups in this context include acetyl, propionyl, and butyric groups. Examples include lyl groups. Alkyl carbonyl groups are alkyl carbonyl groups having 2 to 3 carbon atoms. A is preferred, and an acetyl group is more preferred. R a51 Examples of alkylcarbonyloxy groups in this context include acetyloxy groups and propionyl groups. Examples include the oxy group and the butyryloxy group. The alkylcarbonyloxy group has a number of carbon atoms. Two to three alkylcarbonyloxy groups are preferred, and acetyloxy groups are more preferred. R a51 This includes halogen atoms, hydroxyl groups, C1-C4 alkyl groups, and C1-C4 An alkoxy group or an alkoxyalkoxy group having 2 to 8 carbon atoms is preferred, along with a fluorine atom and iodine. Elementary atom, hydroxyl group, methyl group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxyethoxy group A toxicmethoxy group is more preferred, along with a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, A methoxy group or an ethoxyethoxy group is even more preferred.

[0128] *-X a51 -( A a52 -X a52 ) nb - for example, *-O-, *-CO-O-, *-OC O-, *-CO-OA a52 -CO-O-, *-O-CO-A a52 -O-, *-OA a52 -CO-O-, *-CO-OA a52 -O-CO-, *-O-CO-A a52 -O-CO-, These include *-CO-O- and *-CO-OA. a52 -CO-O- or *- OA a52 -CO-O- is preferred.

[0129] Examples of alkanediyl groups include methylene group, ethylene group, propane-1,3-diyl group, Propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group , hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1, 3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group and Examples include 2-methylbutane-1,4-diyl groups. A a52 It is preferable that this is a methylene group or an ethylene group.

[0130] A a50 These are single bonds, *-CO-O- or *-CO-OA a52 Being a CO-O Preferably, it is a single bond, *-CO-O- or *-CO-O-CH2-CO-O-. More preferably, the bond is a single bond or even more preferably *-CO-O-.

[0131] mb is preferably 0, 1, or 2, more preferably 0 or 1, and particularly preferably 0. The hydroxyl group is preferably bonded to the ortho or para position of the benzene ring, and the para position It is more preferable for them to bond.

[0132] As for the structural unit (a2-A), see Japanese Patent Publication No. 2010-204634, Japanese Patent Publication No. 2012- Examples include monomer-derived structural units described in Publication No. 12577. The structural unit (a2-A) is represented by equations (a2-2-1) to (a2-2-16). In the structural units and structural units represented by formulas (a2-2-1) to (a2-2-16) R in structural unit (a2-A) a50 The methyl group corresponding to a hydrogen atom, halogen atom, Examples include structural units that are replaced by haloalkyl groups or other alkyl groups. Structural unit (a 2-A) is a structural unit represented by formula (a2-2-1), and a structural unit represented by formula (a2-2-3) Manufacturing units, structural units represented by formula (a2-2-6), structural units represented by formula (a2-2-8) Position, structural units represented by formulas (a2-2-12) to (a2-2-14) and formula (a2-2 -1) Structural units represented by formula (a2-2-3), Structural units represented by formula (a2-2-6 Structural units represented by ), structural units represented by formula (a2-2-8), formula (a2-2-12) In the structural unit represented by formula (a2-2-14), R in structural unit (a2-A) a50 Preferably, the methyl group corresponding to is replaced by a hydrogen atom in the structural unit, and the formula Structural units represented by formula (a2-2-3), structural units represented by formula (a2-2-8), formula (a 2-2-12) Structural units represented by formula (a2-2-14) and formula (a2-2-3) The structural unit being performed or the structural unit represented by formula (a2-2-8), formula (a2-2-12) to formula In the structural unit represented by (a2-2-14), R in structural unit (a2-A) a5 0 It is more preferable that the corresponding methyl group is replaced by a hydrogen atom in the structural unit, and the formula In the structural units represented by (a2-2-8) and the structural units represented by formula (a2-2-8) And, R in the structural unit (a2-A) a50 The corresponding methyl group is replaced by a hydrogen atom. It is even more preferable that the structural unit is a [specific structural unit]. TIFF2026083014000083.tif64168

[0133] Content of structural unit (a2-A) when structural unit (a2-A) is present in resin (A) This is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, relative to the total structural units. It is mol%, more preferably 15-65 mol%, and even more preferably 20- It is 65 mol%. Structural unit (a2-A) is polymerized using structural unit (a1-4), for example, and then p-Tol It can be incorporated into resin (A) by treating it with an acid such as ene sulfonic acid. After polymerization using acetoxystyrene, etc., tetramethylammonium hydroxide, etc. By treating with alkali, the structural unit (a2-A) can be incorporated into the resin (A). can.

[0134] Structural units having an alcoholic hydroxyl group in structural unit (a2) include those with the formula ( The structural unit represented by a2-1) (hereinafter sometimes referred to as "structural unit (a2-1)") It can be listed. TIFF2026083014000084.tif4156 formula (a2-1), L a3 is -O- or *-O-(CH2) k2 -CO-O- represents, k2 represents an integer between 1 and 7. * represents a combination with -CO-. R a14 represents a hydrogen atom or a methyl group. R a15 and R a16 Each of these independently represents a hydrogen atom, a methyl group, or a hydroxyl group. o1 represents an integer between 0 and 10.

[0135] In equation (a2-1), L a3 Preferably, -O-, -O-(CH2) f1 -CO-O- (where f1 represents any integer from 1 to 4), and more preferably -O-. R a14 The group is preferably a methyl group. R a15 Preferably, it is a hydrogen atom. R a16 This is preferably a hydrogen atom or a hydroxyl group. o1 is preferably an integer between 0 and 3, more preferably 0 or 1.

[0136] As for the structural unit (a2-1), for example, see Japanese Patent Publication No. 2010-204646. Examples of structural units derived from monomers are given by equations (a2-1-1) to (a2-1-6). A structural unit represented by any of the following formulas is preferred, from formula (a2-1-1) to formula (a2-1-4) A structural unit represented by either formula (a2-1-1) or formula (a2-1- The structural unit represented in 3) is even more preferable. TIFF2026083014000085.tif53150

[0137] If resin (A) contains structural units (a2-1), the content of these units is the total structural unit content of resin (A). For each position, it is usually 1 to 45 mol%, preferably 1 to 40 mol%, and more preferably The amount is 1 to 35 mol%, more preferably 1 to 20 mol%, and even more preferably The percentage is between 1 and 10 mol%.

[0138] <Structural unit (a3)> The lactone rings of structural unit (a3) ​​are a β-propiolactone ring and a γ-butyrolactone ring. It can be a monocyclic ring such as a δ-valerolactone ring, and the contraction of a monocyclic lactone ring with other rings. A ring compound is also acceptable. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or γ - A bridged ring containing a butyrolactone ring structure (e.g., a structural unit represented by the following formula (a3-2)) These are some examples.

[0139] The structural unit (a3) ​​is preferably formula (a3-1), formula (a3-2), formula (a3-3) Alternatively, it is a structural unit represented by formula (a3-4). These may be contained individually. It may contain two or more types. TIFF2026083014000086.tif51164[In formulas (a3-1), (a3-2), (a3-3), and (a3-4), L a4 , L a5 and L a6 These are, independently, -O- or *-O-(CH2) k3 - This represents a base represented by CO-O-(where k3 is an integer from 1 to 7). L a7 is -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 -O- represents vinegar. L a8 and L a9 Each of these independently represents an alkanediyl group with 1 to 6 carbon atoms. * indicates a bonding site with a carbonyl group. R a18 , R a19 and R a20 Each of these independently represents either a hydrogen atom or a methyl group. R a24 This may have a halogen atom, or it may be an alkyl group having 1 to 6 carbon atoms, a hydrogen atom or a halogen atom. It represents a chlorogenic atom. X a3 represents -CH2- or an oxygen atom. R a21 This represents an aliphatic hydrocarbon group with 1 to 4 carbon atoms. R a22 , R a23 and R a25 Each of these independently comprises a carboxyl group, a cyano group, or a carbon Represents aliphatic hydrocarbon groups with prime numbers 1 through 4. p1 represents an integer between 0 and 5. q1 represents an integer between 0 and 3. r1 represents an integer between 0 and 3. w1 represents an integer between 0 and 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a2 3 and / or R a25 They may be the same as each other, or they may be different.

[0140] R a21 , R a22 , R a23 and R a25 Examples of aliphatic hydrocarbon groups in this context include methyl and ethyl groups. group, propyl group, isopropyl group, butyl group, sec-butyl group and tert-butyl group Examples of alkyl groups include the following. R a24 The halogen atoms in this include fluorine, chlorine, bromine, and iodine. Atoms are one example. R a24 The alkyl groups in this context include methyl, ethyl, propyl, and isopropyl groups. butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group, etc. Examples include alkyl groups having 1 to 4 carbon atoms, and more preferably methyl groups. Alternatively, an ethyl group may be used. R a24 Examples of alkyl groups having a halogen atom include the trifluoromethyl group. Perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perf Perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, Lufluoropentyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl Examples include the 14-3 group and the triiodomethyl group. L a8 and L a9 Examples of alkanediyl groups in this context include methylene groups, ethylene groups, and pro groups. Pan-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, tan-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pen Examples include tan-1,4-diyl groups and 2-methylbutane-1,4-diyl groups.

[0141] In equations (a3-1) to (a3-3), L a4 ~L a6 Each is independently preferred Alternatively, -O- or *-O-(CH2) k3 In -CO-O-, k3 is 1 to 4 A base that is any integer, more preferably -O- and *-O-CH2-CO-O-, and further Preferably, it is an oxygen atom. R a18 ~R a21 The group is preferably a methyl group. R a22 and R a23 Each of these is independently preferably a carboxyl group, a cyano group, or a melanin group. It is a chill group. p1, q1, and r1 are each independently, preferably integers between 0 and 2. More preferably, it is 0 or 1.

[0142] In equation (a3-4), R a24 Preferably, a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. It is a group, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a group of the same type. It is either a hydrogen atom or a methyl group. R a25 The group is preferably a carboxyl group, a cyano group, or a methyl group. L a7 Preferably -O- or *-OL a8 -CO-O- and, far It is -O-, -O-CH2-CO-O-, or -O-C2H4-CO-O-. w1 is preferably an integer between 0 and 2, and more preferably 0 or 1. In particular, formula (a3-4)' is preferred over formula (a3-4). TIFF2026083014000087.tif4051 (in the formula, R a24 , L a7 (This expresses the same meaning as above.)

[0143] The structural unit (a3) ​​is the monomer described in Japanese Patent Publication No. 2010-204646. , monomers described in Japanese Patent Publication No. 2000-122294, Japanese Patent Publication No. 2012-41274 Examples of structural units derived from monomers described in the publication are listed below. Structural unit (a3) ​​is , formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2) , equation (a3-3-1), equation (a3-3-2), and equation (a3-4-1) ~ equation (a3-4-1 2) A structural unit represented by any of the above, and in the said structural unit, formula (a3-1) to formula ( R in a3-4) a18 , R a19 , R a20 and R a24 The methyl group corresponding to hydrogen Structural units replaced by atoms are preferred.

[0144] TIFF2026083014000088.tif118165

[0145] If resin (A) contains structural units (a3), the total content of these units is the total structural unit content of resin (A). The amount is usually 5-70 mol%, preferably 10-65 mol%, and more preferably More specifically, it is between 10 and 60 mol%. Also, structural unit (a3-1), structural unit (a3-2), structural unit (a3-3) or structure The content of units (a3-4) is 5 to 60 units relative to the total structural units of resin (A), respectively. % is preferred, 5 to 50 mol% is more preferred, and 10 to 50 mol% is even more preferred.

[0146] <Structural Unit (a4)> The following are examples of structural units (a4): TIFF2026083014000089.tif3066[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 This represents a saturated hydrocarbon group having fluorine atoms with 1 to 24 carbon atoms, and the saturated hydrocarbon The -CH2- group in the group may be replaced by -O- or -CO-. R 42 The saturated hydrocarbon group represented by this term includes chain hydrocarbon groups and monocyclic or polycyclic alicyclic hydrocarbon groups. Examples include bases, and bases formed by combining them.

[0147] Chain hydrocarbon groups include methyl group, ethyl group, propyl group, butyl group, pentyl group, Hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexa Examples include decyl groups, heptadecyl groups, and octadecyl groups. Monocyclic or polycyclic alicyclic carbides. Examples of hydrogen groups include cyclopentyl group, cyclohexyl group, cycloheptyl group, and cycloocyl group. Cycloalkyl groups such as tyl groups; decahydronaphthyl group, adamantyl group, norbornyl group Examples include polycyclic alicyclic hydrocarbon groups such as those listed below (* indicates a bond). TIFF2026083014000090.tif11159 The groups formed by the combination include one or more alkyl groups or one or more alkanes. Examples of groups formed by combining an yl group with one or more alicyclic hydrocarbon groups include -Alkanediyl group-alicyclic hydrocarbon group, -Alkanediyl group-alkyl group, -Al Examples include candiyl group-alicyclic hydrocarbon group-alkyl group, etc.

[0148] As structural units (a4), equation (a4-0), equation (a4-1), equation (a4-2), equation ( Structures represented by at least one selected from the group consisting of a4-3) and formula (a4-4) The units are listed. TIFF2026083014000091.tif4652[In formula (a4-0), R 5 represents a hydrogen atom or a methyl group. L 4a This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 4 carbon atoms. L 3a This is a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluoroalkanediyl group having 3 to 12 carbon atoms. This represents a luorocycloalkanediyl group. R 6 This represents a hydrogen atom or a fluorine atom.

[0149] L 4a Examples of divalent aliphatic saturated hydrocarbon groups in this context include methylene groups, ethylene groups, and pronitriles. Linear alkanediyl groups such as pan-1,3-diyl group and butane-1,4-diyl group, ethanol n-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2- Branching of methylpropane-1,3-diyl groups and 2-methylpropane-1,2-diyl groups, etc. Examples include alkanediyl groups. L 3a In this context, perfluoroalkanediyl groups include difluoromethylene groups and per Fluoroethylene group, perfluoropropane-1,1-diyl group, perfluoropropane -1,3-diyl group, perfluoropropane-1,2-diyl group, perfluoropropane -2,2-diyl group, perfluorobutane-1,4-diyl group, perfluorobutane-2 ,2-diyl group, perfluorobutane-1,2-diyl group, perfluoropentane-1, 5-diyl group, perfluoropentane-2,2-diyl group, perfluoropentane-3, 3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2, 2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1, 7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3, 4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1, 8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3, Examples include 3-diyl groups and perfluorooctane-4,4-diyl groups. L 3a As for the perfluorocycloalkanediyl group in this context, perfluorocyclo xandiyl group, perfluorocyclopentanediyl group, perfluorocycloheptanediyl Examples include yl groups and perfluoroadamantanediyl groups.

[0150] L 4a The is preferably a single bond, a methylene group or an ethylene group, and more preferably a single bond. The bond is a methylene group. L 3a is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and more preferably Alternatively, it is a perfluoroalkanediyl group with 1 to 3 carbon atoms.

[0151] The structural units (a4-0) include the structural units shown below and the structural units within the following structural units ( a4-0) R 5 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom include It can be done. TIFF2026083014000092.tif98165

[0152] TIFF2026083014000093.tif4466[In formula (a4-1), R a41 represents a hydrogen atom or a methyl group. R a42 This represents a saturated hydrocarbon group having 1 to 20 carbon atoms, which may have substituents. The -CH2- group in the hydrocarbon group may be replaced by -O- or -CO-. A a41 This is an alkanediyl group having 1 to 6 carbon atoms, which may have substituents, or a compound of formula (ag 1) represents the base. However, A a41 and R a42 At least one of them is a substitution It has a halogen atom (preferably a fluorine atom) as a base. TIFF2026083014000094.tif1384 [In formula (a-g1), s represents either 0 or 1. A a42 and A a44 Each of these is independently a divalent carbon atom having 1 to 5 carbon atoms, which may have substituents. This represents a saturated hydrocarbon group. A a43 This is a divalent aliphatic hydrocarbon having 1 to 5 carbon atoms, which may have single bonds or substituents. It represents the base. X a41 and X a42 These are, independently, -O-, -CO-, -CO-O-, or -O-CO - represents However, A a42 , A a43 , A a44 , X a41 and X a42 The total number of carbon atoms is 7 or less. * represents a bond, and the * on the right is -O-CO-R a42 This is a combination of [two characters].

[0153] R a42 The saturated hydrocarbon groups in this context include chain-type saturated hydrocarbon groups and monocyclic or polycyclic alicyclic groups. Examples include saturated hydrocarbon groups and groups formed by combining them. ru. Examples of chain-type saturated hydrocarbon groups include methyl, ethyl, propyl, butyl, and pentyl groups. Hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, Examples include xadecyl groups, heptadecyl groups, and octadecyl groups. Monocyclic or polycyclic alicyclic hydrocarbon groups include cyclopentyl groups, cyclohexyl groups, and cyclopentyl groups. Cycloalkyl groups such as chloroheptyl and cyclooctyl groups; decahydronaphthyl groups, ada Polycyclic alicyclic saturates such as mantyl groups, norbornyl groups, and the following groups (* indicates a bond): Examples include ammonium hydrocarbon groups. TIFF2026083014000095.tif11159 The groups formed by the combination include one or more alkyl groups or one or more alkanes. Examples of groups formed by combining an yl group with one or more alicyclic saturated hydrocarbon groups include -Alkanediyl group-alicyclic saturated hydrocarbon group, -Alkanediyl group-alkyl Examples include AL groups, -alkanediyl groups, -alicyclic saturated hydrocarbon groups, -alkyl groups, etc.

[0154] R a42 The substituents that may be present are halogen atoms and those represented by formula (a-g3). At least one selected from the following groups is mentioned. Examples of halogen atoms include fluorine atoms, Examples include chlorine atoms, bromine atoms, and iodine atoms, with fluorine atoms being preferred. TIFF2026083014000096.tif965[In formula (a-g3), X a43 * represents an oxygen atom, a carbonyl group, *-O-CO-, or *-CO-O-. A a45 This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. . * is R a42 This represents a combination of two elements. However, R a42 -X a43 -A a45 In R a42 If it does not have a halogen atom, then A a4 5 This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms and containing at least one halogen atom. .

[0155] A a45 The aliphatic hydrocarbon groups in this context include methyl, ethyl, propyl, and butyl groups. Group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, penta Alkyl groups such as decyl, hexadecyl, heptadecyl, and octadecyl groups; Monocyclic groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups Alicyclic hydrocarbon groups; as well as decahydronaphthyl groups, adamantyl groups, norbornyl groups and Examples of polycyclic alicyclic hydrocarbon groups include the following groups (* indicates a bond): TIFF2026083014000097.tif11159 The groups formed by the combination include one or more alkyl groups or one or more alkanes. Examples of groups formed by combining an yl group with one or more alicyclic hydrocarbon groups include -Alkanediyl group-alicyclic hydrocarbon group, -Alkanediyl group-alkyl group, -Al Examples include candiyl group-alicyclic hydrocarbon group-alkyl group, etc.

[0156] R a42 Preferably, the halogen atom is an aliphatic hydrocarbon group which may have a halogen atom. Aliphatic hydrocarbon groups having alkyl groups and / or groups represented by formula (a-g3) are It is preferable. R a42 If the group is an aliphatic hydrocarbon group having a halogen atom, preferably the fluorine atom It is an aliphatic hydrocarbon group, more preferably a perfluoroalkyl group or perfluoro Rocycloalkyl groups, more preferably perfluoroalkyl groups having 1 to 6 carbon atoms. The perfluoroalkyl group is particularly preferred, and is a perfluoroalkyl group having 1 to 3 carbon atoms. Examples of perfluoromethyl groups include perfluoromethyl groups, perfluoroethyl groups, and perfluoropropyl groups. Perfluorobutyl group, perfluorobutyl group, perfluoropentyl group, perfluorohexyl group, perfluorobutyl group Examples include fluoroheptyl groups and perfluorooctyl groups. Examples of lukyl groups include perfluorocyclohexyl groups. R a42 However, if it is an aliphatic hydrocarbon group having a group represented by formula (a-g3), then formula (a Including the number of carbon atoms in the group represented by -g3), R a42 The total number of carbon atoms is preferably 15 or less. Furthermore, 12 or less is more preferable. (When the group represented by formula (a-g3) is used as a substituent.) The number should preferably be one.

[0157] R a42 If R is an aliphatic hydrocarbon having a group represented by formula (a-g3), a42 is, More preferably, the group is represented by the formula (a-g2). TIFF2026083014000098.tif879[In formula (a-g2), A a46 This is a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. It represents. X a44 This represents **-O-CO- or **-CO-O- (where ** is A a46 The connection between these is shown. vinegar). A a47 This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. . However, A a46 , A a47 and X a44 The total number of carbon atoms is 18 or less, A a46 and A a47 of Of these, at least one has at least one halogen atom. * indicates a bond with a carbonyl group.

[0158] A a46 The aliphatic hydrocarbon group preferably has 1 to 6 carbon atoms, and more preferably 1 to 3 carbon atoms. A a47 The number of carbon atoms in the aliphatic hydrocarbon group is preferably 4 to 15, more preferably 5 to 12. A a47 A cyclohexyl group or an adamantyl group is more preferable.

[0159] The preferred structure of the group represented by formula (a-g2) is as follows (* represents a carbonyl group) (This is a combination of the two.) TIFF2026083014000099.tif13161

[0160] A a41 The alkanediyl groups in this include methylene group, ethylene group, propane-1, 3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 Linear alkanediyl groups such as ,6-diyl groups; propane-1,2-diyl groups, butane-1 ,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4- Examples include branched alkanediyl groups such as diyl groups and 2-methylbutane-1,4-diyl groups. ru. A a41The substituents on the alkanediyl group include a hydroxyl group and a carbon-1 to carbon-6 group. Examples include alkoxy groups. A a41 is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably a carbon number The group is an alkanediyl group of type 2 to 4, and more preferably an ethylene group.

[0161] A in the group represented by formula (a-g1) a42 , A a43 and A a44 The divalent saturation represented by The hydrocarbon groups include straight-chain or branched alkanediyl groups and monocyclic divalent alicyclic hydroxylated water carbon. Formed by combining an elementary group with an alkanediyl group and a divalent alicyclic hydrocarbon group. Examples of such groups include methylene groups, ethylene groups, and propane-1,3-di Iyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methylpropane -1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1 Examples include 2-diyl groups. A a42 , A a43 and A a44 As substituents on the divalent saturated hydrocarbon group represented by , Examples include oxy groups and alkoxy groups having 1 to 6 carbon atoms. s is preferably 0.

[0162] In the group represented by formula (a-g1), X a42 -O-, -CO-, -CO-O- or The following are examples of groups that are -O-CO-. In the following examples, * and **Each represents a bond, and ** is -O-CO-R a42 This is a combination of the two. TIFF2026083014000100.tif53162

[0163] The structural units represented by formula (a4-1) are the structural units shown below and the structural units shown below. R in the structural unit represented by formula (a4-1) a41 A methyl group corresponding to this is placed on a hydrogen atom. Examples of replaced structural units include: TIFF2026083014000101.tif167144

[0164] TIFF2026083014000102.tif66133

[0165] As a structural unit represented by formula (a4-1), the structural unit represented by formula (a4-2) is preferable. It seems so. TIFF2026083014000103.tif4366[In formula (a4-2), R f5 represents a hydrogen atom or a methyl group. L 44 This represents an alkanediyl group having 1 to 6 carbon atoms, and the -C contained in the alkanediyl group H2- may be replaced by -O- or -CO-. R f6 This represents a saturated hydrocarbon group having 1 to 20 fluorine atoms. However, L 44 and R f6 The upper limit for the total number of carbon atoms is 21.

[0166] L 44 The alkanediyl group with 1 to 6 carbon atoms is A a41 An example of an alkanediyl group in Similar to the above, the same types of bases can be cited. R f6 The saturated hydrocarbon group is R a42 Similar to the examples given earlier, the same types of bases can be cited. L 44 As for the alkanediyl groups with 1 to 6 carbon atoms, the alkanediyl groups with 2 to 4 carbon atoms are... Iyl groups are preferred, and ethylene groups are more preferred.

[0167] Examples of structural units represented by formula (a4-2) include formulas (a4-1-1) to (a4 The structural units represented in (a4-2) are as follows. R f5 The structural unit in which the corresponding methyl group is replaced by a hydrogen atom is also represented by formula (a4-2). It can be cited as a structural unit.

[0168] An example of a structural unit (a4) is the structural unit represented by formula (a4-3). TIFF2026083014000104.tif5771[In formula (a4-3), R f7 represents a hydrogen atom or a methyl group. L 5 This represents an alkanediyl group with 1 to 6 carbon atoms. A f13 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, which may contain a fluorine atom. vinegar. X f12 This represents *-O-CO- or *-CO-O- (* is A f13 (This represents a combination of two elements.) . A f14 This represents a saturated hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom. However, A f13 and A f14 At least one of them has a fluorine atom, L 5 , A f13 and A f14 The upper limit for the total number of carbon atoms is 20.

[0169] L 5 The alkanediyl group in A is a41 The ammonium compound in the divalent saturated hydrocarbon group Examples of groups similar to those exemplified by the candiyl group include those mentioned above. A f13 A preferred divalent saturated hydrocarbon group which may have a fluorine atom is ≤ a divalent aliphatic saturated hydrocarbon group which may have a fluorine atom and ≤ a fluorine atom A divalent alicyclic saturated hydrocarbon group, more preferably a perfluoroalkane. It is an yl group. Examples of divalent aliphatic hydrocarbon groups that may contain a fluorine atom include methylene groups and ethylene groups. Alkanediyl groups such as n groups, propanediyl groups, butanediyl groups, and pentanediyl groups; Difluoromethylene group, perfluoroethylene group, perfluoropropanediyl group, per Perfluoroalkanes such as fluorobutanediyl groups and perfluoropentanediyl groups Examples include yl groups. A divalent alicyclic hydrocarbon group that may contain a fluorine atom can be monocyclic or polycyclic. But that's fine too. Examples of monocyclic groups include the cyclohexanediyl group and the perfluorocyclohexa Examples include the nucleotide group. Polycyclic groups include the adamantanediyl group and norbornane. Examples include diyl groups and perfluoroadamantanediyl groups. A f14 The saturated hydrocarbon group and the saturated hydrocarbon group which may have a fluorine atom are R a42 in Similar groups to those exemplified can be cited. Among them, the trifluoromethyl group and the difluoromethyl group are particularly noteworthy. Tyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1 ,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3, 3,3-Pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2, 2,3,3,4,4-Octafluorobutyl group, butyl group, perfluoropentyl group, 2 ,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group , perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group and per Fluoroctyl groups and other alkyl fluorides, cyclopropylmethyl groups, cyclopropyl groups Cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group Xyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbol Nyl group, norbornylmethyl group, perfluoroadamantyl group, perfluoroadamantyl A methyl group is preferred.

[0170] In equation (a4-3), L 5 An ethylene group is preferred. A f13 The divalent saturated hydrocarbon groups are divalent chain hydrocarbon groups with 1 to 6 carbon atoms and 3 carbon atoms. A group containing a divalent alicyclic hydrocarbon group of ~12 is preferred, and a divalent chain-type carbon dioxide group having 2 to 3 carbon atoms is preferred. A more preferable base material is available. A f14 The saturated hydrocarbon group consists of a chain-like hydrocarbon group with 3 to 12 carbon atoms and a lipid group with 3 to 12 carbon atoms. Groups containing cyclic hydrocarbon groups are preferred, including chain hydrocarbon groups having 3 to 10 carbon atoms and groups having 3 to 1 carbon atoms. Groups containing 0 alicyclic hydrocarbon groups are even more preferred. Among them, A f14 Preferably carbon The group contains 3 to 12 alicyclic hydrocarbon groups, and more preferably cyclopropylmethyl These are the cyclopentyl group, cyclohexyl group, norbornyl group, and adamantyl group.

[0171] Examples of structural units represented by equation (a4-3) include equation (a4-1'-1) ~ equation (a The structural units represented in 4-1'-11) are listed below. Keru R f7 The structural unit in which the corresponding methyl group is replaced by a hydrogen atom is also shown in formula (a4-3). It can be cited as a structural unit.

[0172] As a structural unit (a4), the structural unit represented by formula (a4-4) can also be cited. TIFF2026083014000105.tif4466[In formula (a4-4), R f21 represents a hydrogen atom or a methyl group. A f21 is, -(CH2) j1 -,-(CH2) j2 -O-(CH2) j3 - or - (CH2) j4 - CO-O-(CH2) j5 - represents j1 through j5 each independently represent an integer from 1 to 6. R f22 This represents a saturated hydrocarbon group with 1 to 10 carbon atoms containing a fluorine atom.

[0173] R f22 The saturated hydrocarbon group is R a42 Examples include the same saturated hydrocarbon group represented by . R f22 This refers to an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom, or a carbon atom containing a fluorine atom. A cycloaliphatic hydrocarbon group having 1 to 10 carbon atoms is preferred, and an alkyl group having 1 to 10 carbon atoms and a fluorine atom is preferred. A fluorine group is more preferred, and an alkyl group having 1 to 6 carbon atoms and containing a fluorine atom is even more preferred.

[0174] In equation (a4-4), A f21 As for, -(CH2) j1 - is preferred, ethylene A group or a methylene group is more preferred, and a methylene group is even more preferred.

[0175] Examples of structural units represented by formula (a4-4) include the following structural units and the following formula In the structural unit shown, R in structural unit (a4-4) f21 The methyl group corresponding to One example is a structural unit in which a hydrogen atom has been replaced. TIFF2026083014000106.tif80148

[0176] If resin (A) has structural units (a4), the content of these units is the total structural unit content of resin (A). A percentage of the position is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and 3 to 10 mol%. A percentage is even more preferable.

[0177] <Structural Unit (a5)> The non-leaved hydrocarbon groups possessed by structural unit (a5) include linear, branched, or cyclic hydrocarbons. Groups having a group are examples. In particular, structural unit (a5) has an alicyclic hydrocarbon group. The base is preferable. Examples of structural units (a5) include the structural unit represented by formula (a5-1). . TIFF2026083014000107.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 This represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the water contained in this alicyclic hydrocarbon group The elementary atoms may be substituted with aliphatic hydrocarbon groups having 1 to 8 carbon atoms. L 55 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated hydrocarbon group The -CH2- group contained in may be replaced by -O- or -CO-.

[0178] R 52 The alicyclic hydrocarbon group in this can be either monocyclic or polycyclic. Examples of alicyclic hydrocarbon groups include cyclopropyl group, cyclobutyl group, and cyclopene. Examples include chill groups and cyclohexyl groups. Examples of polycyclic alicyclic hydrocarbon groups include, for example, Examples include adamantyl groups and norbornyl groups. Aliphatic hydrocarbon groups with 1 to 8 carbon atoms include, for example, methyl, ethyl, propyl, and iso groups. Propyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl Examples include alkyl groups such as the octyl group and the 2-ethylhexyl group. Examples of alicyclic hydrocarbon groups with substituents include the 3-methyladamantyl group. ru. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably k is an adamantyl group, a norbornyl group, or a cyclohexyl group. L 55 In this context, divalent saturated hydrocarbon groups include divalent chain saturated hydrocarbon groups and divalent lipids. Examples include cyclic saturated hydrocarbon groups, preferably divalent chain saturated hydrocarbon groups. Examples of divalent chain-type saturated hydrocarbon groups include methylene groups, ethylene groups, and propanedi groups. Examples include alkanediyl groups such as the yl group, butanediyl group, and pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be monocyclic or polycyclic. Examples of saturated hydrocarbon groups include cyclopentanediyl groups and cyclohexanediyl groups. Examples include the roalkanediyl group. Examples of polycyclic divalent alicyclic saturated hydrocarbon groups include ada Examples include mantanediyl groups and norbornanediyl groups.

[0179] L 55 The -CH2- contained in the divalent saturated hydrocarbon group represented by can be replaced with -O- or -CO-. Examples of the replaced groups include those represented by formulas (L1-1) to (L1-4). In the following formula, * and ** represent bonding sites, respectively, with * representing a bonding site with an oxygen atom. TIFF2026083014000108.tif18165 formula (L1-1), X x1This represents *-O-CO- or *-CO-O- (* is L x1 This represents a combination with ). L x1 This represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 17 carbon atoms. L x4 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 15 carbon atoms. L x6 and L x7 Each of these independently consists of a single bond or a divalent aliphatic saturated carbon with 1 to 14 carbon atoms. It represents a hydrogen group. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 This represents a divalent alicyclic saturated hydrocarbon group with 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less.

[0180] L x1 Preferably, a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably, It is a methylene group or an ethylene group. L x2 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably It is a single bond. L x3 Preferably, it is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 Preferably, a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably, It is a methylene group or an ethylene group. L x6 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably The group is either a methylene group or an ethylene group. L x7 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably A single bond or a methylene group is a single bond or a methylene group. L x9 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably A single bond or a methylene group is a single bond or a methylene group. W x1 Preferably, a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably It is either a cyclohexanediyl group or an adamantanediyl group.

[0181] Examples of groups represented by formula (L1-1) include the divalent groups shown below. TIFF2026083014000109.tif23135

[0182] TIFF2026083014000110.tif33117

[0183] Examples of groups represented by formula (L1-2) include the divalent groups shown below. TIFF2026083014000111.tif23130

[0184] Examples of groups represented by formula (L1-3) include the divalent groups shown below. TIFF2026083014000112.tif15145

[0185] Examples of groups represented by formula (L1-4) include the divalent groups shown below. TIFF2026083014000113.tif26114

[0186] L 55 Preferably, it is a single bond or a group represented by formula (L1-1).

[0187] Structural units (a5-1) include the structural units shown below and the structural units within the following structural units ( a5-1) R 51 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom include It can be done. TIFF2026083014000114.tif75150

[0188] TIFF2026083014000115.tif36150 If resin (A) has structural units (a5), the content thereof is the total structural unit of resin (A). For each position, 1 to 30 mol% is preferred, 2 to 20 mol% is more preferred, and 3 to 15 mol% is preferred. A percentage is even more preferable. <Structural Unit (a6)> Structural unit (a6) is a structural unit having an -SO2- group, and has an -SO2- group in its side chain. It is preferable to do so. A structural unit having an -SO2- group may also have a linear structure having an -SO2- group. or it may have a branched structure having an -SO2- group, or a ring having an -SO2- group It may have a ring structure (monocyclic and polycyclic structures). Preferably, a ring having an -SO2- group. A structural unit having a cyclic structure, more preferably a cyclic structure containing -SO2-O- It is a structural unit that has a Ton ring.

[0189] As a sultone ring, the following equation (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula ( T 1 A ring represented by -4) is an example. The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. This refers to a bridging ring containing -SO2-O- as the atomic group that makes up the ring, and is given by equation (T 1 -1 ) and formula (T 1 A ring represented by equation (T) is an example. A Sultone ring is given by equation (T 1 (-2) is expressed as Like a ring, in addition to -SO2-O-, there are also heteroatoms as atomic groups that make up the ring. It may also contain heteroatoms. Examples of heteroatoms include oxygen atoms, sulfur atoms, or nitrogen atoms. , preferably an oxygen atom. TIFF2026083014000116.tif3187

[0190] The sultone ring may have substituents, such as halogen atoms or hydroxyl groups. Alkyl groups with 1 to 12 carbon atoms, halogen atoms, hydroxyl groups, cyanoacrylate atoms may also be present. alkoxy groups with 1 to 12 carbon atoms, aryl groups with 6 to 12 carbon atoms, and aryl groups with 7 to 12 carbon atoms. Larkyl group, glycidyloxy group, alkoxycarbonyl group having 2 to 12 carbon atoms and carbon number Examples include 2-4 alkylcarbonyl groups.

[0191] Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. . Alkyl groups include methyl, ethyl, propyl, butyl, pentyl, and hexyl groups. Examples include syl groups, octyl groups, and decyl groups, preferably alkyl groups having 1 to 6 carbon atoms. More preferably, it is a methyl group. Examples of alkyl groups having a halogen atom include trifluoromethyl and perfluoroethyl groups. Perfluoropropyl group, perfluoroisopropyl group, perfluorobutyl group, Perfluorosec-butyl group, perfluorotert-butyl group, perfluoropentyl chloromethyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl group and triyomethyl group Examples include methyl groups, preferably trifluoromethyl groups. Examples of alkyl groups having a hydroxyl group include hydroxymethyl and 2-hydroxymethyl groups. Examples include hydroxyalkyl groups with a chill group. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentoxy groups. oxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group Examples include the dodecyloxy group. Examples of aryl groups include phenyl, naphthyl, anthryl, and p-methylphenyl groups. p-tert-butylphenyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl Examples include the 2-methyl-6-ethylphenyl group and the 2-methyl-6-ethylphenyl group. Examples of aralkyl groups include benzyl group, phenethyl group, phenylpropyl group, and naphthyl group. Examples include tyl groups and naphthyl ethyl groups. Examples of alkoxycarbonyl groups include methoxycarbonyl groups and ethoxycarbonyl groups. Examples include groups in which an alkoxy group and a carbonyl group are bonded, preferably having 6 or fewer carbon atoms. Examples include the coxycarbonyl group, and more preferably the methoxycarbonyl group. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. It can be done.

[0192] From the viewpoint of ease of manufacturing monomers that lead to structural unit (a6), substituents are not present. A sultone ring is preferred. As the sultone ring, the ring represented by the following formula (T1') is preferred. TIFF2026083014000117.tif3172[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This is an alkyl group having 1 to 12 carbon atoms, which may have a halogen atom or a hydroxyl group. C1-C12 alkoxy group, halogen atom, hydroxyl group, cyano group, C1-C12 alkoxy group, C1 6-12 aryl groups, 7-12 aralkyl groups, glycidyloxy groups, 2 carbon atoms This represents an alkoxycarbonyl group with up to 12 carbon atoms or an alkylcarbonyl group with 2 to 4 carbon atoms. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They are the same It's fine if it exists or not. The connection point can be any position. X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. ru. R 41 Examples include substituents similar to those of a sultone ring, such as halogen atoms or hydrides C1 to C12 alkyl groups, which may have a roxy group, are preferred.

[0193] As a sultone ring, the ring represented by formula (T1) is more preferable. TIFF2026083014000118.tif3149[In formula (T1), R 8 This is an alkyl group having 1 to 12 carbon atoms, which may have a halogen atom or a hydroxyl group. Groups, halogen atoms, hydroxyl groups, cyano groups, alkoxy groups with 1 to 12 carbon atoms, and 6 carbon atoms. ~12 aryl groups, aralkyl groups with 7-12 carbon atoms, glycidyloxy groups, 2- carbon atoms This represents 12 alkoxycarbonyl groups or alkylcarbonyl groups with 2 to 4 carbon atoms. m represents an integer from 0 to 9. When m is 2 or greater, multiple R 8 They are the same. They can also be different. The connection point can be any position.

[0194] R 8 R 41 Similar examples include the above. In formula (T1'), ma and in formula (T1), m are preferably 0 or 1. More preferably, it is 0.

[0195] The following are examples of rings represented by equation (T1') and equation (T1): The connection point can be at any position. TIFF2026083014000119.tif57165

[0196] The structural unit having a sultone ring preferably has the following group: * in the following group The symbol represents the bonding site. TIFF2026083014000120.tif51165

[0197] The structural unit having the -SO2- group preferably also has a group derived from a polymerizable group. The polymerizable groups include vinyl group, acryloyl group, methacryloyl group, and acryloyl Oxy group, methacryloyloxy group, acryloylamino group, methacryloylamino group, Examples include acryloylthio groups and methacryloylthio groups. In particular, the monomer that leads to the structural unit (a6) preferably has an ethylenically unsaturated bond. It is a monomer, and more preferably a (meth)acrylic monomer.

[0198] The structural unit (a6) is preferably a structural unit represented by formula (Ix). TIFF2026083014000121.tif4956[In formula (Ix), R x This is an alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, and water Represents an elementary atom or a halogen atom. A xx is an oxygen atom, -N(R c )- or represents a sulfur atom. A x This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated hydrocarbon group contains -CH2- is -O-, -CO-, or -N(R d )- may be replaced with this. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This is an alkyl group having 1 to 12 carbon atoms, which may have a halogen atom or a hydroxyl group. C1-C12 alkoxy group, halogen atom, hydroxyl group, cyano group, C1-C12 alkoxy group, C1 6-12 aryl groups, 7-12 aralkyl groups, glycidyloxy groups, 2 carbon atoms This represents an alkoxycarbonyl group with up to 12 carbon atoms or an alkylcarbonyl group with 2 to 4 carbon atoms. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They are the same It's fine if it exists or not. R c and Rd Each of these independently represents either a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[0199] R x Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. It is possible. R x Examples of alkyl groups include methyl group, ethyl group, n-propyl group, isopropyl group. Pyr group, n-butyl group, sec-butyl group, tert-butyl group, n-pentyl group and n - Examples include hexyl groups, preferably alkyl groups having 1 to 4 carbon atoms, and more preferably This is either a methyl group or an ethyl group. R x Examples of alkyl groups having a halogen atom include trifluoromethyl group, pe Perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluoroethyl group Olobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, per Fluoropentyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl Examples include the triiodomethyl group and other similar groups. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and more preferably water It is an elementary atom, a methyl group, or an ethyl group, and more preferably a hydrogen atom or a methyl group.

[0200] A x Examples of divalent saturated hydrocarbon groups include linear alkanediyl groups and branched alkanediyl groups. Examples include divalent alicyclic saturated hydrocarbon groups, monocyclic or polycyclic, and of these groups, 2 Combinations of more than one species are also acceptable. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1, 2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane- 1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, do Decane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,1 4-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1- Linear alkanediyl groups such as diyl groups and propane-2,2-diyl groups; Butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylprop Pan-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group Branched alkanediyl groups such as yl groups; Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexa Cycloalkanediyl groups such as n-1,4-diyl group and cyclooctane-1,5-diyl group A monocyclic, divalent, alicyclic saturated hydrocarbon group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane- Polycyclic divalent alicyclic saturated carbon such as 1,5-diyl group and adamantane-2,6-diyl group Examples include hydrogen groups.

[0201] R 41 , X 11 And ma can be the same as in equation (T1'). Examples of sultone rings include those mentioned above, and among them, those whose bonding positions have been identified are also noteworthy. It is preferable to do so.

[0202] The following are examples of structural units (a6): TIFF2026083014000122.tif104168

[0203] In particular, equations (a6-1), (a6-2), (a6-6), (a6-7), ( Structural units represented by formulas a6-8) and (a6-12) are preferred, and formulas (a6-1), ( a6-2), more preferably, structural units represented by formulas (a6-7) and (a6-8). If resin (A) has structural units (a6), the content of these units is the total structural unit content of resin (A). A percentage of the total volume is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and 3 to 30 mol%. A percentage is even more preferable.

[0204] <Structural Unit (II)> Resin (A) further decomposes upon exposure to generate acid, resulting in structural units (hereinafter referred to as "structural units") It may contain (II) (in some cases). Specifically, structural unit (II) is Examples include the structural unit described in Japanese Patent Publication No. 2016-79235, with a sulfonate group in the side chain. Alternatively, a structural unit having a carboxylate group and an organic cation, or a side chain with a sulfonio group. It is preferable that the structural unit has an organic anion.

[0205] Structural units having a sulfonate group or carboxylate group and an organic cation in the side chain It is preferable that the structural unit is represented by formula (II-2-A'). TIFF2026083014000123.tif35104[In formula (II-2-A'), X III3 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated hydrocarbon group contains The -CH2- that is present may be replaced by -O-, -S-, or -CO-, and the saturated coal The hydrogen atoms contained in the hydrogen group are halogen atoms, and the number of carbon atoms that may contain halogen atoms. It may be replaced by alkyl groups or hydroxyl groups numbered 1 to 6. Ax1 This represents an alkanediyl group having 1 to 8 carbon atoms, and the water contained in the alkanediyl group The elementary atoms may be substituted with fluorine atoms or perfluoroalkyl groups having 1 to 6 carbon atoms. stomach. RA - This represents a sulfonate group or a carboxylate group. R III3 This is a hydrogen atom, a halogen atom, or a C1 atom which may have a halogen atom. Represents alkyl groups up to 6. ZA + This represents an organic cation.

[0206] R III3 The halogen atoms represented include fluorine, chlorine, bromine, and yo Examples include porcini atoms. R III3 A C1-C6 alkyl group which may have a halogen atom represented by So, R a8 A C1-C6 alkyl group which may have a halogen atom represented by the same Some examples include the following. A x1 Examples of alkanediyl groups with 1 to 8 carbon atoms, represented by the methylene group and the ethylene group, are available. , propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl Group, hexane-1,6-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group yl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4- Diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl Examples include the 1,4-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. ru. A X1 The perfluoroalkyl groups having 1 to 6 carbon atoms that may be substituted in the above are: Trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoro Isopropyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorotert Examples include butyl groups, perfluoropentyl groups, and perfluorohexyl groups. X III3 Divalent saturated hydrocarbon groups having 1 to 18 carbon atoms, as represented by , can be linear or branched. Examples include alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and these These can be combined in any way. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1, 2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane- 1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, do Linear alkanediyl groups such as decane-1,12-diyl groups; butane-1,3-diyl groups, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pen Branched alkanedi such as tan-1,4-diyl group and 2-methylbutane-1,4-diyl group cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclo Cycloalkanes such as xane-1,4-diyl groups and cyclooctane-1,5-diyl groups Lu group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamanta Divalent polycyclic alicyclic saturated carbon such as n-1,5-diyl groups and adamantane-2,6-diyl groups Examples include hydrogenated groups. The -CH2- group in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO-. Examples include the divalent groups represented by equations (X1) to (X53). However, Furthermore, the -CH2- group contained in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO-. The number of carbon atoms in each preceding element is 17 or less. In the following formula, * and ** represent bonding sites. * is A x1 This represents a combination of two things. TIFF2026083014000124.tif145161

[0207] X 3 This represents a divalent saturated hydrocarbon group with 1 to 16 carbon atoms. X 4 This represents a divalent saturated hydrocarbon group with 1 to 15 carbon atoms. X 5 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms. X 6 This represents a divalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 7 This represents a trivalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 8 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms.

[0208] ZA in equation (II-2-A') + This is the cation Z1 in the salt represented by formula (B1). + Similar examples include the above.

[0209] The structural unit represented by formula (II-2-A') is the structural unit represented by formula (II-2-A) It is preferable that this be the case. TIFF2026083014000125.tif38109 [In formula (II-2-A), R III3 , X III3 and ZA + This expresses the same meaning as above. z2A represents an integer between 0 and 6. R III2 and R III4 Each of these is independently a hydrogen atom, a fluorine atom, or a carbon atom with 1 carbon atom. Represents a perfluoroalkyl group of ~6, and when z2A is 2 or more, multiple R III2 and R III4 They may be the same or they may be different. Q a and Q b Each is independently a fluorine atom or a perfluoroal with 1 to 6 carbon atoms. [Represents the kill group.] R III2 , R III4 Q a and Q b Perfluoroalkyl compounds with 1 to 6 carbon atoms, represented by As for the group Q, see the aforementioned Q b1 This is the same as a perfluoroalkyl group with 1 to 6 carbon atoms, as represented by This is one example.

[0210] The structural unit represented by formula (II-2-A) is the same as the structural unit represented by formula (II-2-A-1). It is preferable that it be in that position. TIFF2026083014000126.tif5577 [In formula (II-2-A-1), R III2 , R III3 , R III4 Q a Q b and ZA + This expresses the same meaning as above. . R III5 This represents a saturated hydrocarbon group with 1 to 12 carbon atoms. z2A1 represents an integer between 0 and 6. X I2 This represents a divalent saturated hydrocarbon group having 1 to 11 carbon atoms, and contains -CH2- may be replaced with -O-, -S-, or -CO- in the saturated carbonized water. The hydrogen atoms in the elementary group may be substituted with halogen atoms or hydroxyl groups. R III5 Examples of saturated hydrocarbon groups having 1 to 12 carbon atoms include the methyl group and the ethyl group. propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pe Nthyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group and Examples include linear or branched alkyl groups such as dodecyl groups. X I2 As a divalent saturated hydrocarbon group represented by , X III3 Divalent saturated carbon represented by Examples include those similar to hydrogenated groups.

[0211] The structural unit represented by formula (II-2-A-1) is represented by formula (II-2-A-2). A structural unit that can be made is even more preferable. TIFF2026083014000127.tif5287 [In formula (II-2-A-2), R III3 , R III5 and ZA + This expresses the same meaning as above. m and nA independently represent either 1 or 2.

[0212] Examples of structural units represented by formula (II-2-A') include the following structural unit, R III3 The group corresponding to the methyl group is a hydrogen atom, a halogen atom (for example, a fluorine atom), or a halogen. A C1-C6 alkyl group that may contain atoms (e.g., a trifluoromethyl group). Examples include structural units that have been replaced and structural units described in International Publication No. 2012 / 050015. It can be done. ZA + This represents an organic cation. TIFF2026083014000128.tif86163

[0213] A structural unit having a sulfonio group and an organic anion in its side chain is represented by formula (II-1-1). It is preferable that the structural unit is such that it can be formed. TIFF2026083014000129.tif3791 [In formula (II-1-1), A II1 This represents a single bond or a divalent linking group. R II1 This represents a divalent aromatic hydrocarbon group with 6 to 18 carbon atoms. R II2 and R II3 Each of these independently represents a hydrocarbon group with 1 to 18 carbon atoms, and R II2 and R II3 They bond to each other, forming a ring with the sulfur atoms to which they are bonded. That's fine. R II4 This is a hydrogen atom, a halogen atom, or a C1-C6 atom which may have a halogen atom. This represents a luquill group. A - This represents an organic anion. R II1 As a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms, the phenylene group is an example. Examples include naphthylene groups, etc. R II2 and R II3 Examples of hydrocarbon groups represented include alkyl groups and alicyclic hydrocarbon groups. Examples include aromatic hydrocarbon groups and groups formed by combining them. R II4 The halogen atoms represented include fluorine, chlorine, bromine, and iodine. Examples include elementary atoms. R II4 A C1-C6 alkyl group which may have a halogen atom represented by R a8 The same as an alkyl group having 1 to 6 carbon atoms which may have a halogen atom represented by Some examples can be listed. A II1 Examples of divalent linking groups represented by include divalent saturated carbons with 1 to 18 carbon atoms. A hydrogen group is one example, and the -CH2- contained in the divalent saturated hydrocarbon group is -O-, -S- or It may be replaced with -CO-. Specifically, X III3Represented by 1 to 1 carbon atoms Examples include the same divalent saturated hydrocarbon group as in 8.

[0214] The structural units containing cations in formula (II-1-1) are the structural units represented below and biR II4 The group equivalent to the methyl group is a hydrogen atom, a fluorine atom, a trifluoromethyl group, etc. Examples include replaced structural units. TIFF2026083014000130.tif84130

[0215] A - Examples of organic anions represented by this include sulfonic acid anions and sulfonylimido anions. Examples include sulfonylmethide anions and carboxylic acid anions. - It is represented The organic anion is preferably a sulfonate anion, and as for the sulfonate anion, as mentioned above. It is more preferable that the anion is contained in the salt represented by formula (B1). Anions, sulfonylmethide anions, and carboxylate anions are represented by the above formula (I). The anion AI contained in the salt - It is preferable that it be so.

[0216] Examples of structural units represented by formula (II-1-1) include the following structural units. It is possible. TIFF2026083014000131.tif88149

[0217] When resin (A) contains structural unit (II), the content of structural unit (II) is: The amount is preferably 1 to 20 mol%, and more preferably 2 to 1 mol%, relative to the total structural units of fat (A). The percentage is 15 mol%, and more preferably 3 to 10 mol%.

[0218] Resin (A) may have structural units other than those described above, and such structural units In terms of rank, well-known structural units in this field can be cited.

[0219] The resin (A) is preferably a resin consisting of structural unit (a1) and structural unit (s), In other words, it is a copolymer of monomer (a1) and monomer (s). The structural unit (a1) is preferably structural unit (a1-0), structural unit (a1-1) and structural unit (a1-0) Manufacturing unit (a1-2) (preferably having a cyclohexyl group and a cyclopentyl group) At least one, more preferably at least two, selected from the group consisting of (production units). More preferably, a group consisting of structural unit (a1-1) and structural unit (a1-2). It consists of at least two types selected from the following. The structural unit (s) is preferably from the group consisting of structural unit (a2) and structural unit (a3). At least one of the selected structural units (a2) is preferably structural unit (a2-1). Alternatively, it is a structural unit (a2-A). The structural unit (a3) ​​is preferably expressed by formula (a3-1). The structural units that are formed, the structural units represented by formula (a3-2) and the structural units represented by formula (a3-4) It is at least one of the units selected from the group. Each structural unit constituting resin (A) may be used individually or in combination of two or more types. Furthermore, using monomers that derive these structural units, known polymerization methods (e.g., radical polymerization) can be used. Therefore, it can be manufactured. The content of each structural unit in resin (A) is used in polymerization. This can be adjusted by controlling the amount of monomer used. The weight-average molecular weight of resin (A) is preferably 2,000 or more (more preferably 2,5 00 or more, more preferably 3,000 or more), 50,000 or less (more preferably 30 (less than 15,000, more preferably less than 15,000). In this specification, weight average fraction The molecular weight was determined by gel permeation chromatography under the conditions described in the examples. That is the case.

[0220] <Resins other than resin (A)> The resist composition of the present invention may also contain resins other than resin (A). Examples of resins other than resin (A) include structural unit (a4) or structural unit (a5). Examples include resins (hereinafter sometimes referred to as resin(X)). Among the resins (X), resins containing structural units (a4) are preferred. In resin (X), the content of structural unit (a4) is equal to the sum of all structural units in resin (X). In contrast, it is preferable that the amount be 30 mol% or more, and more preferably 40 mol% or more. Furthermore, it is even more preferable that the amount be 45 mol% or more. The structural units that resin (X) may further possess include structural unit (a1) and structural unit (a2) Structural units (a3) ​​and structural units derived from other known monomers are examples. In particular, resin (X) consists only of structural unit (a4) and / or structural unit (a5). It is preferable that it be made of resin. Each structural unit constituting the resin (X) may be used individually or in combination of two or more types. These monomers that induce structural units can be used in known polymerization methods (e.g., radical polymerization). Therefore, it can be manufactured. The content of each structural unit in resin (X) is used in polymerization. This can be adjusted by controlling the amount of monomer used. The weight-average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000). The value is 0 or greater, and 80,000 or less (more preferably 60,000 or less). The method for measuring the weight-average molecular weight is the same as in the case of resin (A).

[0221] If the resist composition of the present invention contains resin (X), its content is such that resin (A) 100 Preferably 1 to 60 parts by mass, and more preferably 1 to 50 parts by mass, relative to the mass. More preferably 1 to 40 parts by mass, and even more preferably 1 to 30 parts by mass. Particularly preferred is 1 to 8 parts by mass.

[0222] The content of resin (A) in the resist composition is 8 in relation to the solid content of the resist composition. Preferably, it is 0% by mass or more and 99% by mass or less, and preferably 90% by mass or more and 99% by mass or less. It is preferable. Also, if it contains resins other than resin (A), then resin (A) and resins other than resin (A) The total content of the resin is 80% by mass or more and 99% by mass or less relative to the solid content of the resist composition. It is preferable that the amount be less than 90% by mass or more and more than 99% by mass or less. Furthermore, "solid content of the resist composition" refers to the amount of solvent (E) described later, calculated from the total amount of the resist composition. This refers to the total of the components excluding ). Solid content of the resist composition and the resin content thereof. The rate is measured by known analytical means such as liquid chromatography or gas chromatography. It is possible.

[0223] <Solvent (E)> The solvent (E) content is typically 90% by mass or more and 99.9% by mass or less in the resist composition. Yes, preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more. The content of solvent (E) is 99% by mass or less. The content of solvent (E) is determined, for example, by liquid chromatography or gas chromatography. It can be measured using known analytical methods such as chromatography.

[0224] The solvent (E) includes ethyl cellosolve acetate, methyl cellosolve acetate, and Glycol ether esters such as propylene glycol monomethyl ether acetate ; Glycol ethers such as propylene glycol monomethyl ether; Ethyl lactate, vinegar Esters such as butyl acid, amyl acetate, and ethyl pyruvate; acetone, methyl isobutyl Ketones such as lucetone, 2-heptanone, and cyclohexanone; γ-butyrolactone, etc. Examples include cyclic esters; etc. One of the solvents (E) may be used alone. You may use two or more types.

[0225] <Quencher (C)> Quencher (C) is generated from a basic nitrogen-containing organic compound and an acid generator (B). Examples include salts that produce acids with weaker acidity than the acid that produces the quencher. If (C) is included, the amount of quencher (C) is based on the solid content of the resist composition. Preferably, it is about 0.01 to 15% by mass, and about 0.01 to 10% by mass. It is more preferable that it be about 0.1 to 5% by mass, and even more preferable that it be about 0.1 to 3% by mass. It is even more preferable that the amount be approximately mass percent. Basic nitrogen-containing organic compounds include amines and ammonium salts. Examples include aliphatic amines and aromatic amines. Aliphatic amines include primary amines. Examples include amines, secondary amines, and tertiary amines.

[0226] Examples of amines include 1-naphthylamine, 2-naphthylamine, aniline, and diisopropylamine. Ruaniline, 2-,3- or 4-methylaniline, 4-nitroaniline, N-methylaniline Phosphorus, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine Octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, Dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine mine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, Trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, Methyldioctylamine, methyldinonylamine, methylddecylamine, ethyl dibuty Luamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine Ethyl dioctylamine, ethyl dinonylamine, ethyl didecylamine, dicyclo Xylmethylamine, Tris[2-(2-methoxyethoxy)ethyl]amine, Triiso Propanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine Mine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3' -dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmeth , 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridazole 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl (Lu)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di( 2-Pyridyl)ketone, 4,4'-dipyridylsulfide, 4,4'-dipyridyldisulfide Examples include phenanthroline, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, etc., preferably diisopropylaniline, more preferably 2,6-diisopropylaniline. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, etc. The acidity of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is represented by the acid dissociation constant (pKa). The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is usually a salt with an acid dissociation constant of the acid generated from the salt of -3 < pKa, preferably a salt of -1 < pKa < 7, and more preferably a salt of 0 < pKa < 5.

[0227] Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, etc. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, etc. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, etc. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, etc. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, etc.

[0228] The acidity of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is represented by the acid dissociation constant (pKa). The acidity of the acid generated from the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is represented by the acid dissociation constant (pKa). The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is usually a salt with an acid dissociation constant of the acid generated from the salt of -3 < pKa, preferably a salt of -1 < pKa < 7, and more preferably a salt of 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B (B) Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) include the salts represented by the following formula, the salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator (B) is preferably the acid generator (B ) produces a salt (containing a carboxylic acid anion) that generates a carboxylic acid with weaker acidity than the acid produced from ) It is a salt of a weak acid, and more preferably an intramolecular salt of a weak acid (D). TIFF2026083014000132.tif94163

[0229] Examples of intramolecular salts (D) of weak acids include the following salts: TIFF2026083014000133.tif72165

[0230] <Other ingredients> The resist composition of the present invention may optionally include components other than those described above (hereinafter referred to as "other components"). It may be referred to as "F (F)". It may contain other components (F) in particular. There are no known additives in the resist field, such as sensitizers, dissolution inhibitors, surfactants, and stabilizers. Agents, dyes, etc. can be used.

[0231] <Preparation of resist composition> The resist composition of the present invention comprises a salt (I), a resin (A), an acid generator (B), and necessary Depending on the resin used, a resin other than resin (A), solvent (E), quencher (C), and its It can be prepared by mixing with other components (F). The mixing order is arbitrary, and in particular It is not limited to this. The mixing temperature can range from 10 to 40°C, depending on the type of resin, etc. An appropriate temperature can be selected depending on the solubility in solvents (E), etc. The mixing time is Depending on the mixing temperature, you can choose an appropriate time from 0.5 to 24 hours. There are no particular restrictions on the mixing method, and stirring and mixing can be used. After mixing each component, filter the mixture using a filter with a pore size of approximately 0.003 to 0.2 μm. It is preferable to do so.

[0232] <Method for manufacturing resist patterns> The method for manufacturing a resist pattern of the present invention is: (1) A step of applying the resist composition of the present invention onto a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) Includes a step of developing the composition layer after heating. To coat the resist composition onto the substrate, a commonly used device such as a spin coater is used. Therefore, it can be done. The substrate can be an inorganic substrate such as a silicon wafer, or an already formed Examples include resist films. Before applying the resist composition, the substrate may be cleaned. An anti-reflective coating or the like may be formed on the plate. By drying the applied composition, the solvent is removed and a composition layer is formed. Drying is performed. For example, evaporating a solvent using a heating device such as a hot plate (so-called private heating) This is done by (k) or by using a vacuum device. The heating temperature is 50-200°C. It is preferable that the heating time be 10 to 180 seconds. Also, vacuum drying The pressure used during this process is 1 to 1.0 × 10 5 It is preferable that the pressure be around Pa. The resulting composition layer is typically exposed using an exposure machine. The exposure machine is an immersion exposure machine. This is also good. As exposure light sources, KrF excimer laser (wavelength 248nm), ArF excimer Ultraviolet lasers such as lasers (wavelength 193nm) and F2 excimer lasers (wavelength 157nm) Laser light is emitted from solid-state laser sources (such as YAG or semiconductor lasers). These devices emit high-harmonic laser light in the far-ultraviolet or vacuum-ultraviolet region by wavelength conversion, such as electron beams and ultra-high-frequency lasers. Various methods can be used, such as those that irradiate with ultraviolet light (EUV). In some cases, the act of irradiating with these radiations is collectively referred to as "exposure." Typically, exposure is performed through a mask corresponding to the desired pattern. The exposure light source is electron In the case of lines, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is heat-treated to promote the deprotection reaction at the acid-unstable groups. Perform a loose post-exposure bake. The heating temperature is usually around 50-200°C, or as preferred. The temperature is approximately 70-150°C. The hydrophilicity or hydrophobicity of the resin on the surface of the composition after heating. Chemical treatments (silylation) may be performed to adjust the properties. Also, before developing, the post-exposure components may be combined. The process of coating, drying, exposure, and heating of the resist composition of the present invention is repeated on the material layer. That's good too. The heated composition layer is typically developed using a developing device and a developing solution. Examples include the dipping method, paddle method, spray method, and dynamic dispensing method. The development temperature is preferably, for example, 5 to 60°C, and the development time is, for example, 5 It is preferable that the developing time is ~300 seconds. By selecting the type of developer as follows: Positive-type resist patterns or negative-type resist patterns can be manufactured. When producing a positive-type resist pattern from the resist composition of the present invention, the developer is used as follows: An alkaline developer is used. The alkaline developer is a type of alkaline water used in this field. Any solution will do. For example, tetramethylammonium hydroxide or (2-hydroxy Examples include aqueous solutions of ethyl)trimethylammonium hydroxide (commonly known as choline). Alkaline developers may contain surfactants. After development, the resist pattern is washed with ultrapure water, and then the water remaining on the substrate and pattern is washed away. It is preferable to remove it. When manufacturing a negative-type resist pattern from the resist composition of the present invention, the developer is used as A developer containing an organic solvent (hereinafter sometimes referred to as "organic developer") is used. Organic solvents contained in organic developers include ketosols such as 2-hexanone and 2-heptanone. Solvents; glycol ethers such as propylene glycol monomethyl ether acetate Sterling solvents; ester solvents such as butyl acetate; propylene glycol monomethyl ether, etc. Glycol ether solvents; amide solvents such as N,N-dimethylacetamide; anisole Examples include aromatic hydrocarbon solvents such as the like. In organic developer solutions, the content of organic solvents is preferably 90% by mass or more and 100% by mass or less. It is more preferable that the concentration be 95% by mass or more and 100% by mass or less, and that it be substantially composed of only organic solvents. It is preferable. Among organic developers, those containing butyl acetate and / or 2-heptanone are Preferred. The total content of butyl acetate and 2-heptanone in the organic developer is 50% by mass. Preferably, the amount is 100% by mass or less, and more preferably 90% by mass or more and 100% by mass or less. It is even more preferable that the composition consists solely of butyl acetate and / or 2-heptanone. Organic developers may contain surfactants. Also, organic developers may contain trace amounts of surfactants. It may contain moisture. During development, by substituting a different type of solvent than the organic developer, development can be stopped. That's good too. It is preferable to wash the resist pattern with a rinsing solution after development. The rinsing solution can be: There are no particular restrictions as long as it does not dissolve the resist pattern, including general organic solvents. A liquid can be used, preferably an alcohol solvent or an ester solvent. After cleaning, it is preferable to remove any remaining rinse solution from the substrate and patterns.

[0233] <Application> The resist composition of the present invention is a resist composition for KrF excimer laser exposure, and ArF Resist compositions for Kishima laser exposure, resist compositions for electron beam (EB) exposure, or EU Resist compositions for V exposure, particularly resist compositions for electron beam (EB) exposure or EUV exposure It is suitable as a resist composition for use and is useful for semiconductor microfabrication. [Examples]

[0234] The present invention will be described in more detail with reference to examples. In the examples, the content or amount used is expressed Unless otherwise specified, "%" and "parts" refer to mass. The weight-average molecular weight is a value obtained by gel permuration chromatography. The analytical conditions for gel permuration chromatography are as follows: Column: TSKgel Multipore HXL-M x 3 + guard column (manufactured by Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0mL / min Detector: RI detector Column temperature: 40℃ Injection volume: 100μl Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation) The compound structure was determined by mass spectrometry (LC: Agilent 1100, MASS: Agil This was confirmed by measuring molecular ion peaks using an ent LC / MSD (manufactured by ent). In the examples, the value of this molecular ion peak is indicated by "MASS".

[0235] Example 1: Synthesis of the salt represented by formula (I-8) TIFF2026083014000134.tif97161 1.57 parts of the salt represented by formula (I-8-a), 1.1 parts of the compound represented by formula (I-8-b) Mix 0 parts of the mixture with 10 parts of dimethylformamide and stir at 23°C for 30 minutes. The resulting mixture Add 0.44 parts potassium carbonate to the mixture, stir at 23°C for 30 minutes, and then further stir at 90°C. By stirring at °C for 3 hours, a mixture containing the salt represented by formula (I-8-c) was obtained. After cooling the mixture to 23°C, add 12 parts of a 5% oxalic acid aqueous solution and heat at 23°C for 30 minutes. After stirring for minutes, add 3.20 parts of the salt represented by formula (I-8-d) and stir at 23°C for 7 hours. Mixed. To the resulting reaction product, 30 parts chloroform and 30 parts deionized water were added, and 23 After stirring at °C for 30 minutes, the organic layer was separated by liquid-liquid extraction. The resulting organic layer was subjected to ion exchange. 30 parts water was added, and the mixture was stirred at 23°C for 30 minutes. After separation, the organic layer was removed. The washing procedure was repeated seven times. After concentrating the resulting organic layer, acetonitrile 1 was added to the concentration residue. Add 0.5 parts and 30 parts of tert-butyl methyl ether, and stir at 23°C for 30 minutes. Subsequently, the supernatant liquid is removed and the solution is concentrated to obtain 3.12 parts of the salt represented by formula (I-8). Ta. MASS(ESI(+)Spectrum):M + 479.0 MASS(ESI(-)Spectrum): M - 517.1

[0236] Example 2: Synthesis of the salt represented by formula (I-16) TIFF2026083014000135.tif95159 1.57 parts of the salt represented by formula (I-8-a), 1.1 parts of the compound represented by formula (I-8-b) Mix 0 parts of the mixture with 10 parts of dimethylformamide and stir at 23°C for 30 minutes. The resulting mixture Add 0.44 parts potassium carbonate to the mixture, stir at 23°C for 30 minutes, and then further stir at 90°C. By stirring at °C for 3 hours, a mixture containing the salt represented by formula (I-8-c) was obtained. After cooling the mixture to 23°C, add 12 parts of a 5% oxalic acid aqueous solution and heat at 23°C for 30 minutes. After stirring for 1 minute, add 2.85 parts of the salt represented by formula (I-16-d) and leave at 23°C for 7 hours. Stirring was performed. To the resulting reaction product, 30 parts chloroform and 30 parts deionized water were added, and 2 After stirring at 3°C ​​for 30 minutes, the organic layer was separated by liquid-liquid extraction. The resulting organic layer was then subjected to ion exchange. After adding 30 parts of replacement water and stirring at 23°C for 30 minutes, the organic layer was separated. The washing procedure was repeated seven times. After the obtained organic layer was concentrated, the concentrated residue was treated with acetonitrile. Add 1.5 parts and 30 parts of tert-butyl methyl ether, and stir at 23°C for 30 minutes. Afterward, the supernatant is removed and the solution is concentrated to obtain 3.22 parts of the salt represented by formula (I-16). I obtained it. MASS(ESI(+)Spectrum):M + 479.0 MASS(ESI(-)Spectrum): M - 467.1

[0237] Example 3: Synthesis of the salt represented by formula (I-24) TIFF2026083014000136.tif106156 1.57 parts of the salt represented by formula (I-8-a), 1.1 parts of the compound represented by formula (I-8-b) Mix 0 parts of the mixture with 10 parts of dimethylformamide and stir at 23°C for 30 minutes. The resulting mixture Add 0.44 parts potassium carbonate to the mixture, stir at 23°C for 30 minutes, and then further stir at 90°C. By stirring at °C for 3 hours, a mixture containing the salt represented by formula (I-8-c) was obtained. After cooling the mixture to 23°C, add 12 parts of a 5% oxalic acid aqueous solution and heat at 23°C for 30 minutes. After stirring for 1 minute, add 4.59 parts of the salt represented by formula (I-24-d) and ferment at 23°C for 7 hours. Stirring was performed. To the resulting reaction product, 30 parts chloroform and 30 parts deionized water were added, and 2 After stirring at 3°C ​​for 30 minutes, the organic layer was separated by liquid-liquid extraction. The resulting organic layer was then subjected to ion exchange. After adding 30 parts of replacement water and stirring at 23°C for 30 minutes, the organic layer was separated. The washing procedure was repeated seven times. After the obtained organic layer was concentrated, the concentrated residue was treated with acetonitrile. Add 1.5 parts and 30 parts of tert-butyl methyl ether, and stir at 23°C for 30 minutes. Afterward, the supernatant is removed and the solution is concentrated to obtain 4.82 parts of salt represented by formula (I-24). I obtained it. MASS(ESI(+)Spectrum):M + 479.0 MASS(ESI(-)Spectrum): M - 793.3

[0238] Example 4: Synthesis of the salt represented by formula (I-852) TIFF2026083014000137.tif95159 1.57 parts of the salt represented by formula (I-8-a), 1 part of the compound represented by formula (I-852-b) 0.19 parts and 10 parts of dimethylformamide were mixed and stirred at 23°C for 30 minutes. To the mixture, add 0.44 parts of potassium carbonate, stir at 23°C for 30 minutes, and then further... By stirring at 90°C for 3 hours, the mixture containing the salt represented by formula (I-852-c) is obtained. The mixture was obtained. After cooling the obtained mixture to 23°C, 12 parts of 5% oxalic acid aqueous solution were added to 23°C. After stirring at °C for 30 minutes, add 2.85 parts of the salt represented by formula (I-16-d) and then at 23°C. The mixture was stirred for 7 hours. To the resulting reaction product, 30 parts chloroform and 30 parts deionized water were added. After adding and stirring at 23°C for 30 minutes, the organic layer was separated by liquid-liquid extraction. Add 30 parts of deionized water, stir at 23°C for 30 minutes, then separate and remove the organic layer. This washing procedure was repeated seven times. The resulting organic layer was concentrated, and then acetone was added to the concentrated residue. Add 1.5 parts nitrile and 30 parts tert-butyl methyl ether, and incubate at 23°C for 30 minutes. After stirring, the supernatant is removed and the mixture is concentrated to obtain the salt represented by formula (I-852). 1.98 copies were obtained. MASS(ESI(+)Spectrum):M + 497.0 MASS(ESI(-)Spectrum): M - 467.1

[0239] Example 5: Synthesis of the salt represented by formula (I-1384) TIFF2026083014000138.tif96159 1.57 parts of the salt represented by formula (I-8-a) and the compound represented by formula (I-1384-b) Mix 0.81 parts with 10 parts of dimethylformamide and stir at 23°C for 30 minutes. To the mixture, add 0.44 parts of potassium carbonate, stir at 23°C for 30 minutes, and then By stirring at 90°C for 3 hours, a mixture containing the salt represented by formula (I-1384-c) is obtained. A substance was obtained. After cooling the obtained mixture to 23°C, 12 parts of a 5% oxalic acid aqueous solution were added. After stirring at 23°C for 30 minutes, add 2.85 parts of the salt represented by formula (I-16-d), 2 The mixture was stirred at 3°C ​​for 7 hours. To the resulting reaction product, 30 parts chloroform and 30 parts deionized water were added. The mixture was added, stirred at 23°C for 30 minutes, and then separated to remove the organic layer. The resulting organic layer Add 30 parts of deionized water, stir at 23°C for 30 minutes, then separate to remove the organic layer. Removed. This washing operation was repeated 7 times. After concentrating the obtained organic layer, the concentrated residue was treated with Add 1.5 parts cetonitrile and 30 parts tert-butyl methyl ether, and bake at 23°C for 3 minutes. After stirring for 0 minutes, the supernatant is removed and concentrated to obtain the product represented by formula (I-1384). 2.98 parts of salt were obtained. MASS(ESI(+)Spectrum):M + 421.1 MASS(ESI(-)Spectrum): M - 467.1

[0240] Example 6: Synthesis of the salt represented by formula (I-1574) TIFF2026083014000139.tif96159 1.57 parts of the salt represented by formula (I-8-a) and the compound represented by formula (I-1574-b) Mix 1.81 parts and 10 parts of dimethylformamide and stir at 23°C for 30 minutes. To the mixture, add 0.44 parts of potassium carbonate, stir at 23°C for 30 minutes, and then By stirring at 90°C for 3 hours, a mixture containing the salt represented by formula (I-1574-c) is obtained. A substance was obtained. After cooling the obtained mixture to 23°C, 12 parts of a 5% oxalic acid aqueous solution were added. After stirring at 23°C for 30 minutes, add 2.85 parts of the salt represented by formula (I-16-d), 2 The mixture was stirred at 3°C ​​for 7 hours. To the resulting reaction product, 30 parts chloroform and 30 parts deionized water were added. The mixture was added, stirred at 23°C for 30 minutes, and then separated to remove the organic layer. The resulting organic layer Add 30 parts of deionized water, stir at 23°C for 30 minutes, then separate to remove the organic layer. Removed. This washing operation was repeated 7 times. After concentrating the obtained organic layer, the concentrated residue was treated with Add 1.5 parts cetonitrile and 30 parts tert-butyl methyl ether, and bake at 23°C for 3 minutes. After stirring for 0 minutes, the supernatant is removed and concentrated to obtain the product represented by formula (I-1574). 4.39 parts of salt were obtained. MASS(ESI(+)Spectrum):M + 620.9 MASS(ESI(-)Spectrum): M - 467.1

[0241] Resin synthesis The compounds (monomers) used in the synthesis of resin (A) are shown below. These are referred to as "monomers (a1-1-3)" etc., according to their formula numbers. TIFF2026083014000140.tif46154

[0242] Synthesis Example 1 [Synthesis of Resin A1] As monomers, monomer (a1-4-2), monomer (a1-1-3) and monomer (a1-2-6) is used, and its molar ratio [monomer (a1-4-2):monomer (a1-1 -3): Mix the monomers (a1-2-6) in a ratio of 38:24:38. Furthermore, this monomer mixture contains methyl methyl in an amount equal to 1.5 times the total mass of all monomers. Isobutyl ketone was mixed. To the resulting mixture, azobisisobutyronite was added as an initiator. Add lyl to a concentration of 7 mol% relative to the total number of moles of all monomers, and then heat at 85°C. Polymerization was carried out by heating for approximately 5 hours. After that, the polymerization reaction solution was mixed with the total amount of monomers. Add 2.0 times the mass of p-toluenesulfonic acid aqueous solution (2.5% by weight) to the amount, and 6 After stirring for a certain amount of time, the mixture was separated. The resulting organic layer was poured into a large amount of n-heptane to precipitate the resin. By filtering and recovering the material, the weight-average molecular weight is approximately 5.3 × 10⁻⁶. 3 The resin A1 (common A polymer was obtained in a yield of 78%. This resin A1 has the following structural units. TIFF2026083014000141.tif29126

[0243] Synthesis Example 2 [Synthesis of Resin A2] As monomers, monomer (a1-4-2) and monomer (a1-2-6) are used, The molar ratio [monomer(a1-4-2):monomer(a1-2-6)] is 38:62. Mix them together, and then add to this monomer mixture, relative to the total mass of all monomers. Then, 1.5 times the mass of methyl isobutyl ketone was mixed in. To the resulting mixture, as an initiator, Azobisisobutyronitrile is added in a quantity of 7 mol% relative to the total number of moles of all monomers. Polymerization was carried out by adding it to and heating it at 85°C for about 5 hours. After that, the polymerization reaction solution was added to , a p-toluenesulfonic acid aqueous solution (2) in an amount equal to 2.0 times the total mass of the total amount of monomers. 0.5% by weight was added, stirred for 6 hours, and then separated. The resulting organic layer was then divided into large quantities of n-hept. By pouring it into a tank to precipitate the resin, and then filtering and recovering it, the weight-average molecular weight is approximately 5.4 × 1 0 3 Resin A2 (polymer) was obtained in a yield of 89%. This resin A2 has the following structural units It possesses the following characteristics. TIFF2026083014000142.tif2887

[0244] Synthesis Example 3 [Synthesis of Resin A3] As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer ( Using a2-1-3), monomer (a3-4-2) and monomer (a1-4-2), Molar ratio [Monomer (a1-1-3):Monomer (a1-2-6):Monomer (a2-1- 3): Monomer (a3-4-2): Monomer (a1-4-2) is in a ratio of 20:35:3:1 Mix in a ratio of 5:27, and further, add the total amount of all monomers to this monomer mixture. Methyl isobutyl ketone was mixed in an amount 1.5 times its mass relative to the mass. As initiators, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) Add 1.2 mol% and 3.6 mol% of the total monomer amount, respectively, and then It was heated at 73°C for approximately 5 hours. After that, the polymerization reaction solution was mixed with a certain amount of monomer relative to the total mass of the monomers. Add 2.0 times the mass of p-toluenesulfonic acid aqueous solution (2.5% by weight) and stir for 12 hours. Afterward, the mixture was separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and then filtered. By recovering the material, the weight-average molecular weight is approximately 5.3 × 10⁻⁶. 3 The resin A3 was produced with a yield of 63%. It was obtained as follows. This resin A3 has the following structural units. TIFF2026083014000143.tif38154

[0245] Synthesis Example 4 [Synthesis of Resin A4] As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer ( Using monomers a2-1-3), a3-4-2, and a1-4-13, Molar ratio [monomer(a1-1-3):monomer(a1-2-6):monomer(a2-1 -3): Monomer (a3-4-2): Monomer (a1-4-13)] is 20:35:3 Mix them in a ratio of 15:27, and then add all the monomers to this monomer mixture. Methyl isobutyl ketone was mixed in an amount equal to 1.5 times the total mass. The resulting mixture In addition, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) are used as initiators. Tolyl was added at concentrations of 1.2 mol% and 3.6 mol% relative to the total amount of monomer, and The mixture was heated at 73°C for approximately 5 hours. After that, the polymerization reaction solution was mixed with a total amount of monomers relative to the total mass. Then, add 2.0 times the mass of p-toluenesulfonic acid aqueous solution (2.5% by weight) and stir for 12 hours. After mixing, the mixture was separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin. By filtering and recovering the material, the weight-average molecular weight is approximately 5.1 × 10⁻⁶. 3 The resin A4 yielded 6 It was obtained at a concentration of 1%. This resin A4 has the following structural units. TIFF2026083014000144.tif38154

[0246] <Preparation of the resist composition> As shown in Table 2, the following components were mixed, and the resulting mixture contained fluorine with a pore size of 0.2 μm. The resist composition was prepared by filtering through a resin filter. [Table 2]

[0247] <Resin> A1~A4, resin A1~resin A4 <Salt (I)> I-5: Salt represented by formula (I-5) I-13: Salt represented by formula (I-13) I-19: Salt represented by formula (I-19) I-852: Salt represented by formula (I-852) I-1384: Salt represented by formula (I-1384) I-1574: Salt represented by formula (I-1574) <Acid Generator> IX-1 IX-2 TIFF2026083014000146.tif40162<Quencher(C)> C1: Synthesized by the method described in Japanese Patent Publication No. 2011-39502 TIFF2026083014000147.tif4355<solvent> Propylene glycol monomethyl ether acetate, 400 units Propylene glycol monomethyl ether, 100 parts γ-Butyrolactone 5 parts

[0248] (Evaluation of Electron Beam Exposure of Resist Composition) A 6-inch silicon wafer was treated on a direct hot plate with hexamethyldisilazane at 90 °C for 60 seconds. On this silicon wafer, a resist composition was spin-coated so that the film thickness of the composition layer became 0.04 μm. Then, it was prebaked for 60 seconds at the temperature shown in the "PB" column of Table 2 on a direct hot plate to form a composition layer. On the composition layer formed on the wafer, a contact hole pattern (hole pitch 40 nm / hole diameter 17 nm) was directly drawn using an electron beam lithography machine ["ELS-F1 25 125 keV" manufactured by Elionix Co., Ltd.] while changing the exposure dose step by step. After exposure, post-exposure baking was performed for 60 seconds at the temperature shown in the "PEB" column of Table 2 on a hot plate, and further paddle development was performed for 60 seconds with a 2.38 mass% tetramethylammonium hydroxide aqueous solution to obtain a resist pattern. (hole pitch 40 nm / hole diameter 17 nm) was directly drawn using an electron beam lithography machine ["ELS-F1 25 125 keV" manufactured by Elionix Co., Ltd.] while changing the exposure dose step by step. After exposure, post-exposure baking was performed for 60 seconds at the temperature shown in the "PEB" column of Table 2 on a hot plate, and further paddle development was performed for 60 seconds with a 2.38 mass% tetramethylammonium hydroxide aqueous solution to obtain a resist pattern.

[0249] In the resist pattern obtained after development, the exposure dose at which the formed hole diameter became 17 nm was defined as the effective sensitivity.

[0250] (CD Uniformity (CDU) Evaluation) In the effective sensitivity, the hole diameter of the pattern formed with a hole diameter of 17 nm was measured 24 times for each hole, and the average value was defined as the average hole diameter of one hole. The standard deviation was obtained using, as the population, the results of measuring the average hole diameter of the patterns formed with a hole diameter of 17 nm at 400 locations within the same wafer . (CD Uniformity (CDU) Evaluation) In the effective sensitivity, the hole diameter of the pattern formed with a hole diameter of 17 nm was measured 24 times for each hole, and the average value was defined as the average hole diameter of one hole. The standard deviation was obtained using, as the population, the results of measuring the average hole diameter of the patterns formed with a hole diameter of 17 nm at 400 locations within the same wafer . The results are shown in Table 3. The numerical values in the table indicate the standard deviation (nm). [Table 3] ​ Compared with Composition 1 and Composition 2, the standard deviation in Compositions 1 to 7 was small, and the CD uniformity (CD U) evaluation was good.

[0251] (Electron Beam Exposure Evaluation of Resist Composition: Organic Solvent Development) A 6-inch silicon wafer was treated on a direct hot plate with hexamethyldisilazane at 90 °C for 60 seconds. The resist composition was spin-coated on this silicon wafer so that the film thickness of the composition layer became 0.04 μm. Then, it was prebaked for 60 seconds at the temperature shown in the "PB" column of Table 2 on a direct hot plate to form a composition layer. A contact hole pattern (hole pitch 40 nm / hole diameter 17 nm) was directly drawn on the composition layer formed on the wafer using an electron beam lithography machine ["ELS-F1 25 125 keV" manufactured by Elionix Co., Ltd.] while changing the exposure dose step by step. (hole pitch 40 nm / hole diameter 17 nm) was directly drawn. After exposure, post-exposure bake was performed for 60 seconds at the temperature shown in the "PEB" column of Table 2 on a hot plate. Next, the composition layer on this silicon wafer was developed at 23 °C for 20 seconds by the dynamic dispense method using butyl acetate (manufactured by Tokyo Chemical Industry Co., Ltd.) as the developer to obtain a resist pattern. In the resist pattern obtained after development, the exposure dose at which the formed hole diameter became 17 nm was defined as the effective sensitivity.

[0252] <CD Uniformity (CDU) Evaluation> In the effective sensitivity, the hole diameter of the pattern formed with a hole diameter of 17 nm was measured 24 times for each hole, and the average value was defined as the average hole diameter of one hole. Within the same wafer

[0253] <CD Uniformity (CDU) Evaluation> At the effective sensitivity, the hole diameter of the pattern formed with a hole diameter of 17 nm was measured 24 times for each hole, and the average value was taken as the average hole diameter of one hole. Among the same wafers ) for each hole, and the average value was used as the average hole diameter of one hole. Among the same wafers The average hole diameter was measured at 400 locations in a pattern formed with a hole diameter of 17 nm, and the results were collected. The group calculated the standard deviation. The results are shown in Table 4. The values ​​in the table indicate the standard deviation (nm). [Table 4] Compared to comparative compositions 3 and 4, compositions 8-14 have a smaller standard deviation and better CD uniformity (C DU) The evaluation was good. [Industrial applicability]

[0254] The resist composition containing the salt of the present invention is a resist having good CD uniformity (CDU). Because it can produce a pattern, it is suitable for microfabrication of semiconductors and is extremely useful in industry.

Claims

1. A salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents an iodine atom, a fluorine atom, or a fluorinated alkyl group having 1 to 12 carbon atoms. R ４ 、 R ５ 、 R ６ 、 R ７ 、 R ８ and R ９ each independently represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and -CH 2 - in the haloalkyl group and the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO ２ -. X １ , X ２ and X ３ Each of these independently represents either an oxygen atom or a sulfur atom. However, X １ The bonding site to the benzene ring is either at the m-position or the p-position relative to the sulfonium cation. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer between 0 and 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents an integer from 0 to 4, and when m4 is 2 or greater, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 5, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, 0 ≤ m3 + m9 ≤ 4, At least one of m1, m2, and m3 represents an integer greater than or equal to 1. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents an organic anion.

2. A salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents an iodine atom, a fluorine atom, or a fluorinated alkyl group having 1 to 12 carbon atoms. R ４ , R ５ , R ６ , R ７ , R ８ and R ９ Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C18 hydrocarbon group, and the haloalkyl group and the hydrocarbon group contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. X １ , X ２ and X ３ Each of these independently represents either an oxygen atom or a sulfur atom. m1 represents an integer between 0 and 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer from 1 to 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents an integer from 0 to 4, and when m4 is 2 or greater, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 5, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, 0 ≤ m3 + m9 ≤ 4, At least one of m1, m2, and m3 represents an integer greater than or equal to 1. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents an organic anion.

3. A salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents an iodine atom, a fluorine atom, or a fluorinated alkyl group having 1 to 12 carbon atoms. R ４ , R ５ , R ６ , R ７ , R ８ and R ９ Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C18 hydrocarbon group, and the haloalkyl group and the hydrocarbon group contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. X １ , X ２ and X ３ Each of these independently represents either an oxygen atom or a sulfur atom. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer between 0 and 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents 1 or 2, and when m4 is 2 or more, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 5, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, 0 ≤ m3 + m9 ≤ 4, At least one of m1, m2, and m3 represents an integer greater than or equal to 1. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents an organic anion.

4. X １ , X ２ and X ３ The salt according to any one of claims 1 to 3, wherein is an oxygen atom.

5. AI － The salt according to any one of claims 1 to 4, wherein the salt is a sulfonate anion, a sulfonylimide anion, or a sulfonylmethide anion.

6. AI － The salt according to any one of claims 1 to 5, wherein is a sulfonate anion, and the sulfonate anion is an anion represented by formula (I-A). [In formula (IA), Q １ and Q ２ Each of these independently represents either a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. L １ This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxyl group. Y １ This represents a methyl group which may have substituents or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the alicyclic hydrocarbon group contains -CH ２ - is -O-, -SO ２ It may be replaced with - or -CO-.

7. An acid generator containing the salt described in any one of claims 1 to 6.

8. A resist composition comprising the acid generator described in claim 7 and a resin having an acid-unstable group.

9. The resist composition according to claim 8, wherein the resin having an acid-unstable group comprises at least one selected from the group consisting of structural units represented by formula (a1-1) and structural units represented by formula (a1-2). [In formulas (a1-1) and (a1-2), L a1 and L a2 These are, independently, -O- or *-O- (CH ２ ) k1 This represents -CO-O-, where k1 is an integer from 1 to 7, and * represents a combination with -CO-. R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6 and R a7 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

10. The resist composition according to claim 8 or 9, wherein the resin having an acid-unstable group comprises a structural unit represented by formula (a2-A). [In formula (a2-A), R a50 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a51 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 represents a single bond or *-X a51 -(A a52 -X a52 ) nｂ -, where * represents the bonding site with the carbon atom to which -R a50 is bonded. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent, independently, -O-, -CO-O-, or -O-CO-. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, then multiple R a51 They may be identical or different from one another.

11. The resist composition according to any one of claims 8 to 10, further comprising a salt that generates an acid with a lower acidity than the acid generated from the acid generator.

12. (1) A step of applying the resist composition according to any one of claims 8 to 11 onto a substrate, (2) A step of drying the coated composition to form a composition layer, (3) Exposure step of the composition layer, (4) A step of heating the composition layer after exposure, (5) A step of developing the composition layer after heating, A method for manufacturing a resist pattern that includes a resist pattern.

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