Processing apparatus, method for reading information, and method for manufacturing chips

Abstract

This prevents a decrease in reading sensitivity when reading information from tags on processing tools. [Solution] The processing apparatus (10, 40) comprises a holding section (11, 41) for holding workpieces (1, 2), a tool holding section (17, 53) for holding processing tools (18, 52) having tags (22, 71, 92) that can read information without contact, an information acquisition section (23, 72, 94) for acquiring information from the tags of the processing tools held in the tool holding section, and a removal section (30, 80, 100) for removing obstacles that hinder the acquisition of information by the information acquisition section from the tags of the processing tools held in the tool holding section.

Description

Technical Field

[0001] The present invention relates to a processing apparatus for processing a workpiece, a method for reading information, and a method for manufacturing a chip.

Background Art

[0002] It has been proposed to install a tag capable of reading information on a processing tool such as a grinding wheel or a cutting blade attached to a processing apparatus, read information from the tag in the processing apparatus after the processing tool is attached, and use the read result for management of the processing tool (for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When the processing tool has a tag for information reading, the reading sensitivity of the tag may decrease due to adhesion of processing debris or water droplets during processing. Therefore, a technique that does not reduce the reading sensitivity when reading the tag is required.

Means for Solving the Problems

[0005] A processing apparatus according to an aspect of the present disclosure includes a holding unit that holds a workpiece, a tool holding unit that holds a processing tool having a tag capable of non-contact information reading, an information acquisition unit that acquires the information from the tag of the processing tool held by the tool holding unit, and a removal unit that removes an inhibitor that inhibits acquisition of the information by the information acquisition unit from the tag of the processing tool held by the tool holding unit. [[ID=4۳]]

[0006] It is preferable that the removal unit supplies compressed air to the information acquisition unit.

[0007] Preferably, the removal unit supplies a fluid containing at least one of compressed air and pure water to the processing tool held in the tool holding unit.

[0008] Preferably, the removal unit further comprises a rotating unit that rotates the tool holding unit, and the removal unit supplies the fluid to the downstream side of the rotational direction of the rotating unit with respect to the information acquisition unit.

[0009] Preferably, the device further includes a rotating part that rotates the tool holding part, and the removal part supplies the fluid at a position spaced upstream of the rotating part in the direction of rotation, relative to the information acquisition part.

[0010] The information acquisition unit has an acquisition unit whose detection surface faces the tag and acquires the information from the tag, and a casing unit which exposes the detection surface of the acquisition unit and holds the acquisition unit, and the removal unit has a fluid supply source and a supply port which communicates with the casing unit and the fluid supply source, and it is preferable to supply the fluid from the supply port.

[0011] As an example, the tag in question is an IC tag that allows information to be read and written via wireless communication.

[0012] An information reading method according to one aspect of the present disclosure comprises: a sensitivity measurement step of measuring the reading sensitivity of an information acquisition unit when acquiring information from a non-contactable tag on a machining tool held in a tool holder, said by the information acquisition unit; a removal step of supplying at least one of pure water and compressed air to at least one of the information acquisition unit and the machining tool, if the sensitivity measured in the sensitivity measurement step is less than a predetermined value, to remove any obstructions that hinder the acquisition of information by the information acquisition unit; and a reading step of reading the information from the tag on the machining tool held in the tool holder by the information acquisition unit after the removal step.

[0013] One aspect of the present disclosure is a method for manufacturing a chip by dividing a plate-shaped workpiece, which has division lines set to define a chip area, along the division lines, comprising: a sensitivity measurement step of measuring the sensitivity of an information acquisition unit when acquiring information from a tag on a machining tool held in a tool holder, which is capable of reading information without contact; a removal step of supplying at least one of pure water and compressed air to at least one of the information acquisition unit and the machining tool, if the sensitivity measured in the sensitivity measurement step is less than a predetermined value, to remove an obstruction that hinders the acquisition of information by the information acquisition unit; a reading step of reading the information from the tag on the machining tool held in the tool holder by the information acquisition unit after the removal step; a determination step of determining whether or not to perform machining with the machining tool held in the tool holder based on the information on the tag read in the reading step; and a removal machining step of removing the workpiece with a rotating machining tool held in the tool holder, which is performed when it is determined in the determination step to perform the machining, and further comprising a division step of manufacturing a chip by dividing the workpiece along the division lines. [Effects of the Invention]

[0014] According to each of the above embodiments, by providing a removal unit or performing a removal process, it is possible to remove obstacles that hinder the acquisition of information by the information acquisition unit and prevent a decrease in reading sensitivity when reading information from the tag on the processing tool. [Brief explanation of the drawing]

[0015] [Figure 1] This is a perspective view of a grinding machine. [Figure 2] This is a cross-sectional view showing the configuration of the reading section, information acquisition section, and removal section of a grinding wheel. [Figure 3] This is a cross-sectional view along line AA in Figure 2. [Figure 4] This diagram shows the variations in the supply ports provided by the removal unit. [Figure 5] This is a perspective view of a cutting machine. [Figure 6] It is a perspective view showing an attachment structure of a cutting blade provided with a read section. [Figure 7] It is a cross-sectional view showing the configurations of the read section, information acquisition section, and removal section provided in the cutting blade. [Figure 8] It is a cross-sectional view showing a modified example of the read section, information acquisition section, and removal section provided in the cutting blade. [Figure 9] It is a cross-sectional view taken along the line B - B of FIG. 8.

Mode for Carrying Out the Invention

[0016] FIGS. 1 to 4 show an embodiment in which the processing apparatus and information reading method of the present disclosure are applied to a grinding apparatus 10. The Z - axis direction in FIGS. 1 and 3 is the vertical direction of the grinding apparatus 10. The grinding apparatus 10 has a chuck table 11 which is a holding section for holding the workpiece 1, and a grinding mechanism 12 for performing grinding on the workpiece 1 on the chuck table 11.

[0017] The workpiece means an object to be processed by a processing apparatus, and may be read as a processing target object, a work, or the like. The workpiece 1 processed by the grinding apparatus 10 of the present embodiment is, for example, a disk - shaped semiconductor wafer. Note that the type and shape of the workpiece 1 are not limited to this.

[0018] The chuck table 11 has an upward holding surface 13 on which the workpiece 1 is placed. The holding surface 13 is formed by a porous member connected to a suction source (not shown), and the suction source can be operated to apply a suction force to the holding surface 13. The chuck table 11 is rotated about an axis in the Z - axis direction by a table rotation mechanism (not shown).

[0019] The grinding mechanism 12 rotatably supports a spindle 15 within a spindle housing 14. The spindle 15 is a shaft member extending in the Z-axis direction and rotates by the driving force of a spindle motor 16. A disk-shaped mount 17 is connected to the lower end of the spindle 15, and a grinding wheel 18 is mounted on the lower surface of the mount 17. The grinding wheel 18 is composed of a ring-shaped wheel base 19 attached to the lower surface side of the mount 17 and a plurality of grinding wheels 20 attached to the lower surface of the wheel base 19 at predetermined intervals in the circumferential direction. The spindle 15 and the spindle motor 16 correspond to the rotating part of the present disclosure, the mount 17 corresponds to the tool holding part of the present disclosure, and the grinding wheel 18 corresponds to the processing tool of the present disclosure. The grinding wheel 20 is formed by, for example, solidifying abrasive grains such as diamond or CBN (Cubic Boron Nitride) with a binder such as a vitrified bond. Instead of the plurality of grinding wheels 20 provided at intervals in the circumferential direction of the wheel base 19, a ring-shaped grinding wheel continuous in the circumferential direction of the wheel base 19 may be applied. The grinding mechanism 12 can be moved up and down in the Z-axis direction by a lifting mechanism (not shown).

[0020] The processing steps performed by the grinding device 10 are executed by the control unit 39 controlling each part according to a control program. The control unit 39 includes a processor that performs arithmetic processing, a memory that stores a control program, an interface that communicates with each part of the grinding device 10, and the like.

[0021] In the processing step, as shown in FIG. 1, the workpiece 1 is held on the holding surface 13 of the chuck table 11. The control unit 39 operates a suction source communicating with the holding surface 13. In this way, the workpiece 1 is suction-held on the holding surface 13 of the chuck table 11. Subsequently, the upper surface of the workpiece 1 suction-held on the chuck table 11 (the surface opposite to the surface held on the holding surface 13) is grind-processed by the grinding wheel 20 of the grinding mechanism 12.

[0022] During grinding, the spindle motor 16 is driven to rotate the grinding wheel 18 via the spindle 15 and mount 17, the chuck table 11 is rotated by the table rotation mechanism, and the grinding mechanism 12 is lowered by the lifting mechanism to bring the grinding wheel 20 into contact with the upper surface of the workpiece 1. In this way, the grinding wheel 20 is pressed against the upper surface of the workpiece 1 while the workpiece 1 and the grinding wheel 20 are rotated relative to each other to perform grinding. During grinding, the spindle 15 and grinding wheel 18 rotate in the direction of arrow Ra in Figures 1 and 2, and the chuck table 11 rotates in the direction of arrow Rb in Figure 1.

[0023] The grinding device 10 is equipped with a processing fluid supply unit (not shown) that supplies a processing fluid, such as pure water, to the point where the grinding wheel 20 comes into contact with the workpiece 1. The control unit 39 performs the grinding process while supplying processing fluid from the processing fluid supply unit. This washes away the processing debris generated during the grinding process and cools the grinding mechanism 12 and the workpiece 1. When it is detected that the workpiece 1 has been ground to a preset finish thickness, the control unit 39 raises the grinding mechanism 12 by operating the lifting mechanism, separating the grinding wheel 20 from the workpiece 1 on the chuck table 11, and ends the grinding process.

[0024] The grinding wheel 18 is equipped with a readable section 21 for reading information. As shown in Figures 2 and 3, the readable section 21 is provided with a tag 22 on which information is recorded. The information recorded on the tag 22 may include, for example, the dimensions of the grinding wheel 18, the composition of the abrasive grains and binders that make up the grinding wheel 20, the usage history of the grinding wheel 18, the rotational speed of the grinding wheel 18 during use, and the serial number and lot number of the grinding wheel 18. However, the information recorded on the tag 22 is not limited to these and may include other information.

[0025] Tag 22 records information in a way that allows for contactless reading. Specifically, Tag 22 in this embodiment is an IC tag capable of reading and writing information via wireless communication, and together with the information acquisition unit 23, it constitutes an RFID (Radio Frequency Identification) system that reads and writes information on Tag 22 contactlessly using radio waves. The type of IC tag Tag 22 may be a passive tag that operates using radio waves received from the information acquisition unit 23 without a power supply, an active tag that operates using power from a built-in power supply, or a semi-active tag that normally operates as a passive tag and operates using a built-in power supply when it receives radio waves from the information acquisition unit 23. The radio wave frequencies used between Tag 22 and the information acquisition unit 23 may include, for example, microwave (SHF: Super High Frequency), ultra-high frequency (UHF: Ultra High Frequency), short wave (HF: High Frequency), and long wave (LF: Low Frequency).

[0026] As shown in Figures 2 and 3, a recessed housing 24 is formed on a part of the outer peripheral surface of the ring-shaped wheel base 19, and the tag 22 is placed inside the recessed housing 24, which is recessed toward the radial center of the wheel base 19. The tag 22 is attached to the bottom of the recessed housing 24, and a sealing material 25 that covers the tag 22 is filled inside the recessed housing 24. Therefore, in the readable section 21, the tag 22 is covered by the sealing material 25 and is not exposed to the outside of the grinding wheel 18. The sealing material 25 serves to fix the tag 22 inside the recessed housing 24 and to protect the tag 22. The sealing material 25 is made of a material that does not block radio waves transmitted and received between the tag 22 and the information acquisition section 23.

[0027] The information acquisition unit 23 is positioned facing the outer peripheral side surface of the wheel base 19 on the grinding wheel 18, and a transmitting / receiving unit 27 that transmits and receives radio waves with the tag 22 is mounted inside a box-shaped casing 26. The transmitting / receiving unit 27 constitutes the acquisition unit in the information acquisition unit of this disclosure and has a detection surface 28 that faces the tag 22 and acquires information from the tag 22. In other words, the detection surface 28 is the surface that transmits and receives radio waves with the tag 22. The casing 26 has an opening 29 that opens toward the outer peripheral side surface of the wheel base 19, and the transmitting / receiving unit 27 is positioned so that the detection surface 28 faces the outer peripheral side surface of the wheel base 19 through the opening 29. In other words, the casing 26 holds the transmitting / receiving unit 27 with the detection surface 28 exposed to the opening 29.

[0028] The transmitting / receiving unit 27 is connected to the control unit 39 for communication, and the information of the tag 22 read using the transmitting / receiving unit 27 is transmitted to the control unit 39. When the grinding wheel 18 is replaced and mounted on the mount 17, or at other predetermined timings, the control unit 39 drives the spindle motor 16 to rotate the grinding wheel 18, positioning it so that the read-only part 21 faces the information acquisition unit 23, as shown in Figures 2 and 3. In this state, the information acquisition unit 23 reads the information of the tag 22. The control unit 39 stores the information of the read tag 22 in memory and uses it to set processing conditions when processing the workpiece 1 with the grinding device 10, and to manage information related to the grinding wheel 18. For example, based on the information read from the tag 22, the control unit 39 can display the specifications of the grinding wheel 18 on the display monitor of the grinding device 10, or notify whether or not an appropriate grinding wheel 18 corresponding to the processing conditions is installed.

[0029] When processing the workpiece 1 with the grinding device 10, processing debris and processing wastewater containing processing debris may adhere to the readable portion 21 and information acquisition portion 23 of the grinding wheel 18, becoming an obstruction that interferes with wireless communication by being interposed between the tag 22 and the transmitting / receiving unit 27. In particular, the outer peripheral side surface of the wheel base 19 equipped with the readable portion 21 is located close to the processing point where the grinding wheel 20 contacts the workpiece 1, and is in an environment where processing debris and processing wastewater scattered during grinding are likely to adhere. If such obstructions are interposed between the tag 22 and the transmitting / receiving unit 27, it may affect the transmission and reception of radio waves and may hinder the information acquisition portion 23 from acquiring information from the tag 22. Furthermore, in the case of a structure where the distance between the reading unit 21 and the information acquisition unit 23 is narrow (close), if obstructions such as processing debris accumulate between the reading unit 21 and the information acquisition unit 23, physical contact may occur through the obstructions, potentially causing damage to the reading unit 21 or the information acquisition unit 23 when the grinding wheel 18 rotates. The grinding device 10 is equipped with a removal unit 30 to remove obstructions that can cause such problems.

[0030] As shown in Figure 2, the removal unit 30 includes a liquid supply source 31 and an air supply source 32. The liquid supply source 31 and the air supply source 32 correspond to the fluid supply sources in the removal unit of this disclosure. The liquid supply source 31 includes a tank for storing liquid and a pump for dispensing liquid from the tank. The liquid dispensed from the liquid supply source 31 is pure water. The air supply source 32 includes a compressor for compressing air and dispenses compressed air. The removal unit 30 can remove obstructions by supplying pure water dispensed from the liquid supply source 31 and compressed air dispensed from the air supply source 32, that is, a fluid which is a concept that includes both liquid and gas, to the readable section 21 and the information acquisition section 23 of the grinding wheel 18.

[0031] The casing portion 26 of the information acquisition unit 23 has a first supply port 33 and a second supply port 34. The first supply port 33 opens toward the tip side of the casing portion 26, that is, toward the outer peripheral side of the wheel base 19, and is capable of supplying fluid toward the outer peripheral side of the wheel base 19. The second supply port 34 opens toward the inner surface of the opening 29 of the casing portion 26, and is capable of supplying fluid toward the detection surface 28 of the transmitting and receiving unit 27 inside the opening 29. The first supply port 33 communicates with a liquid supply source 31 via a flow path 35 and with an air supply source 32 via a flow path 36. The second supply port 34 communicates with a liquid supply source 31 via a flow path 37 and with an air supply source 32 via a flow path 38.

[0032] In Figure 2, for convenience, the liquid supply source 31 and air supply source 32 communicating with the first supply port 33 are shown separately from the liquid supply source 31 and air supply source 32 communicating with the second supply port 34. However, the liquid supply source 31 may be the same or independently provided, and the air supply source 32 may be the same or independently provided. Furthermore, the liquid supply source 31 may be a shared liquid supply source with the processing fluid supply unit that supplies processing fluid (pure water) to the point where the grinding wheel 20 contacts the workpiece 1.

[0033] The control unit 39 controls the operation of the on-off valve 351 in the flow path 35 and the on-off valve 361 in the flow path 36, thereby individually switching the supply and cessation of pure water from the liquid supply source 31 to the first supply port 33, and the supply and cessation of compressed air from the air supply source 32 to the first supply port 33. By opening the on-off valve 351 and closing the on-off valve 361, pure water is supplied to the first supply port 33, and by closing the on-off valve 351 and opening the on-off valve 361, compressed air is supplied to the first supply port 33. By opening both the on-off valve 351 and the on-off valve 361, a mixture of pure water and compressed air is supplied to the first supply port 33.

[0034] With the first supply port 33 facing the readable portion 21 of the grinding wheel 18, obstructions adhering to the surface of the readable portion 21 (the sealing material 25 covering the tag 22) can be removed by supplying a fluid (pure water, two-fluid, or compressed air) from the first supply port 33. The fluid supplied from the first supply port 33 has a predetermined pressure, and obstructions are removed by supplying the fluid while applying pressure. For example, pure water or two-fluid can be supplied from the first supply port 33 toward the grinding wheel 18 to wash away obstructions from the readable portion 21, or compressed air can be blown from the first supply port 33 toward the readable portion 21 to blow away obstructions. In addition, compressed air can be supplied from the first supply port 33 toward the grinding wheel 18 to remove moisture adhering to the readable portion 21 and dry it.

[0035] The control unit 39 controls the operation of the on-off valve 371 in the flow path 37 and the on-off valve 381 in the flow path 38, thereby individually switching the supply and cessation of pure water from the liquid supply source 31 to the second supply port 34, and the supply and cessation of compressed air from the air supply source 32 to the second supply port 34. By opening the on-off valve 371 and closing the on-off valve 381, pure water is supplied to the second supply port 34, and by closing the on-off valve 371 and opening the on-off valve 381, compressed air is supplied to the second supply port 34. By opening both the on-off valve 371 and the on-off valve 381, a mixture of pure water and compressed air is supplied to the second supply port 34.

[0036] By supplying fluid (pure water, two-fluid system, or compressed air) from the second supply port 34, obstructions adhering to the detection surface 28 of the transmitting / receiving unit 27 can be removed. The fluid supplied from the second supply port 34 has a predetermined pressure, and by supplying the fluid under pressure, the obstructions are removed. For example, pure water or two-fluid system can be supplied from the second supply port 34 toward the detection surface 28 to wash away the obstructions, or compressed air can be blown from the second supply port 34 toward the detection surface 28 to blow away the obstructions. In addition, compressed air can be supplied from the second supply port 34 toward the detection surface 28 to remove moisture adhering to the detection surface 28 and dry it. The fluid used to remove obstructions from the detection surface 28 is discharged to the outside of the casing portion 26 through the opening 29.

[0037] Note that the orientation and arrangement of the first supply port 33 shown in Figure 2 are examples only and are not limited to the illustrated configuration. The first supply port 33 shown in Figure 2 extends in a direction parallel to the opening direction of the opening 29 (the radial direction of the grinding wheel 18), but the first supply port 33 may extend in any direction as long as it can supply fluid to the reading section 21. For example, in a plan view as shown in Figure 2, the direction in which the first supply port 33 extends may have an inclination component toward the direction of arrow Ra (downstream in the direction of rotation) or an inclination component toward the opposite direction of arrow Ra (upstream in the direction of rotation). In other words, the first supply port 33 may deliver fluid diagonally toward the downstream or upstream side in the direction of rotation of the grinding wheel 18. Figure 4(A) shows a variation in which the orientation of the first supply port 33 is changed, and the first supply port 33 delivers fluid diagonally toward the downstream side in the direction of rotation of the grinding wheel 18 (arrow Ra). Since the first supply port 33 is positioned adjacent to the downstream side of the opening 29 in the rotational direction of the grinding wheel 18, the configuration shown in Figure 4(A) reduces the possibility that the fluid (especially pure water) supplied from the first supply port 33 will bounce back from the grinding wheel 18, pass through the opening 29, and adhere to the detection surface 28 of the transmitting / receiving unit 27. As a further alternative configuration, as shown in Figure 3, the first supply port 33 may be positioned above or below the opening 29 when viewed from the side perpendicular to the rotational axis of the grinding wheel 18, and the fluid may be sent from the first supply port 33 diagonally downward or diagonally upward to reach the reading section 21.

[0038] Furthermore, the orientation and arrangement of the second supply port 34 shown in Figure 2 are examples only and are not limited to the illustrated configuration. For example, the second supply port 34 shown in Figure 2 extends in a direction parallel to the detection surface 28 of the transmitting / receiving unit 27 (a direction perpendicular to the opening direction of the opening 29), but the second supply port 34 may extend in any direction as long as it is possible to supply fluid to the detection surface 28. Specifically, as shown in the variations in Figure 4(B) and (C), the second supply port 34 may deliver fluid in an oblique direction relative to the detection surface 28. Note that in Figure 4(C), the first supply port 33 is provided at a position not shown. In the configuration of Figure 4(B), the second supply port 34 delivers fluid to the transmitting / receiving unit 27 in an oblique direction that proceeds downstream in the rotation direction (arrow Ra) of the grinding wheel 18 while passing in front of the detection surface 28. This reduces the possibility that the fluid (especially pure water) supplied from the first supply port 33 will bounce back from the grinding wheel 18 and adhere to the detection surface 28. In the configuration of Figure 4(C), the second supply port 34 delivers the fluid to the transmitting / receiving unit 27 in an oblique direction, moving upstream in the direction of rotation of the grinding wheel 18 (arrow Ra), while passing in front of the detection surface 28. This reduces the possibility that any obstruction remaining on the grinding wheel 18 will reach the detection surface 28 as the grinding wheel 18 rotates. In other words, in the configurations of Figure 4(B) and (C), the fluid delivered from the second supply port 34 not only removes obstruction from the detection surface 28, but also provides a protective effect by preventing splashback fluid from the grinding wheel 18 and any obstruction remaining on the grinding wheel 18 from reaching the detection surface 28. As a further variation, as shown in Figure 3, the second supply port 34 may be positioned above or below the opening 29 when viewed from the side perpendicular to the rotational axis of the grinding wheel 18.

[0039] Furthermore, the number of first supply ports 33 and second supply ports 34 is not limited to one as shown in Figure 2, and there may be multiple first supply ports 33 and multiple second supply ports 34. For example, fluid may be supplied in a shower-like manner from multiple supply ports toward the readable section 21 and the detection surface 28.

[0040] The removal unit 30 of this embodiment is equipped with a first supply port 33 facing the reading unit 21 and a second supply port 34 facing the detection surface 28, but it is also possible to supply fluid to the reading unit 21 and the detection surface 28 from a common supply port. For example, by arranging a branching channel or a flow straightening plate near the outlet of the second supply port 34 to guide the fluid toward the reading unit 21, the fluid supplied from the second supply port 34 can be distributed to the reading unit 21 side and the detection surface 28 side. In this case, it is also possible to select a configuration without the first supply port 33. Alternatively, by arranging a branching channel or a flow straightening plate in the middle of the first supply port 33 to guide the fluid toward the detection surface 28, the fluid supplied from the first supply port 33 can be distributed to the reading unit 21 side and the detection surface 28 side. In this case, it is also possible to select a configuration without the second supply port 34.

[0041] The grinding apparatus 10 equipped with the removal unit 30 performs the information reading method as follows, for example. Each of the following steps is performed based on the control of the control unit 39, and unless the controlling entity is explicitly stated, it is assumed that the control unit 39 is performing the control.

[0042] [Sensitivity measurement process] In the sensitivity measurement process, as shown in Figures 2 and 3, the rotational position of the grinding wheel 18 is set so that the read-only section 21 faces the information acquisition section 23, and the reading sensitivity of the information acquisition section 23 is measured when the information acquisition section 23 acquires information from the tag 22. The measurement of reading sensitivity here is, for example, the measurement of the radio wave strength from the tag 22 received by the transmitting / receiving unit 27, and the control unit 39 determines that the removal of an obstruction is necessary if the radio wave strength is less than a predetermined value.

[0043] Alternatively, the sensitivity of the read operation may be measured based on the degree of communication failure between the tag 22 and the transmitting / receiving unit 27. Specifically, predetermined thresholds are set for the length of time the communication failure to the tag 22 persists and the number of communication attempts. The control unit 39 monitors the reception status of the transmitting / receiving unit 27, and if communication with the tag 22 is not established even after exceeding the above thresholds for time and number of attempts, the control unit 39 determines that the sensitivity is less than a predetermined value and that the obstruction needs to be removed.

[0044] [Removal process] If the sensitivity measured in the sensitivity measurement step is less than a predetermined value, that is, if communication is established between the tag 22 and the information acquisition unit 23 but the receiving sensitivity is not sufficient for information acquisition, or if communication cannot be established even after attempting to communicate between the tag 22 and the information acquisition unit 23, the control unit 39 will perform a removal step. In the removal step, the removal unit 30 is operated to supply at least one of pure water and compressed air to at least one of the grinding wheel 18 and the information acquisition unit 23, thereby removing obstacles that hinder information acquisition by the information acquisition unit 23.

[0045] [Reading process] After the removal process, the control unit 39 performs a reading process in which the information acquisition unit 23 reads information from the tag 22 of the grinding wheel 18. In the reading process, the transmission / reception unit 27 reads the information from the tag 22 when the rotation of the grinding wheel 18 is stopped at a position where the part to be read 21 faces the information acquisition unit 23 (Figures 2 and 3), or when the grinding wheel 18 is rotating at a low speed (a rotation speed lower than the rotation speed during processing). If the information from the tag 22 can be read, the control unit 39 determines that no further removal of obstructions is necessary and terminates the series of processes. By reading the information from the tag 22 not when the rotation of the grinding wheel 18 is stopped, but when the grinding wheel 18 is accelerating and rotating at a low speed (before reaching the high rotation speed during processing), the time required for the reading process can be saved, thereby shortening the process time. In other words, the operational efficiency of the grinding device 10 can be improved.

[0046] If information cannot be read from the tag 22 during the reading process (including cases where communication with the tag 22 is established, but the radio wave reception sensitivity is lower than a predetermined value), the control unit 39 performs error processing. As an example of error processing, the control unit 39 may have the removal process be repeated. Alternatively, the control unit 39 may determine that there is an obstruction that cannot be removed in the removal process, or that there is a cause of communication failure other than the attachment of an obstruction (for example, the tag 22 or the transmitting / receiving unit 27 is damaged or malfunctioning), and notify the operator of the communication error status via the notification unit provided in the grinding device 10. Error notification by the notification unit can be done by displaying an error on the display monitor, lighting or flashing a lamp, or sounding an audible message from a speaker. Upon receiving the notification, the operator performs necessary maintenance work, such as replacing the grinding wheel 18 or checking the operation of the information acquisition unit 23.

[0047] As described above, by supplying fluid from the removal unit 30 according to the communication status between the tag 22 and the information acquisition unit 23, obstructions adhering to the readable part 21 of the grinding wheel 18 and obstructions adhering to the information acquisition unit 23 for reading information from the tag 22 on the readable part 21 are removed, thereby enabling the transmitting and receiving unit 27 of the information acquisition unit 23 to reliably acquire the information from the tag 22.

[0048] The removal unit 30 achieves a simple structure with fewer parts by providing a first supply port 33 and a second supply port 34 in the casing 26 that holds the transmitting and receiving unit 27, and has the advantage of not requiring a separate nozzle with a unique structure to supply cleaning and drying fluids around the grinding wheel 18. In addition, since the first supply port 33 and the second supply port 34 can be positioned close to the readable part 21 and the detection surface 28 of the transmitting and receiving unit 27, which are the targets of cleaning and drying, it is possible to efficiently clean and dry the readable part 21 and the detection surface 28 with a small amount of fluid compared to a configuration in which fluid is sprayed from a position far away from the readable part 21 and the detection surface 28.

[0049] Furthermore, it is possible to appropriately select, depending on the situation, whether the fluid supplied from the removal unit 30 is both liquid (pure water) and gas (compressed air), or just one of them.

[0050] The readable area 21, located on the outer peripheral side of the grinding wheel 18 (wheel base 19), is close to the processing point where the grinding wheel 20 contacts the workpiece 1, making it prone to adhesion of processing debris and waste liquid scattered during grinding. Therefore, it is preferable to supply liquid or a two-fluid system when compressed air alone is insufficient to remove obstructions from the grinding wheel 18, or when it is desirable to improve the efficiency of removing obstructions from the grinding wheel 18. However, depending on the frequency of the radio waves used for communication between the tag 22 and the information acquisition unit 23, water droplets remaining after washing away obstructions with liquid or a two-fluid system can cause communication problems. Therefore, by supplying compressed air in addition to liquid or a two-fluid system from the first supply port 33 and the second supply port 34 toward the readable area 21 and detection surface 28 to remove water droplets and dry them, a good communication state can be obtained after cleaning.

[0051] Since the positions of the first supply port 33 and the transmitting / receiving unit 27 are different in the rotation direction of the grinding wheel 18, the grinding wheel 18 needs to be rotated before the removal process, in which fluid is supplied from the first supply port 33 to remove obstructions from the part to be read 21, can be performed, and then the detection surface 28 of the transmitting / receiving unit 27 can be brought facing the part to be read 21 to read information from the tag 22. The first supply port 33 is positioned relative to the opening 29 of the casing portion 26 (the position where the detection surface 28 is located) in the direction of rotation of the spindle 15 and grinding wheel 18 during grinding (the direction of the arrow Ra in Figures 1 and 2). In other words, the removal unit 30 supplies fluid from the first supply port 33 to the downstream side (the side advanced in the direction of the arrow Ra) of the rotation direction of the spindle 15 and grinding wheel 18, with reference to the information acquisition unit 23 (more specifically, the transmitting / receiving unit 27). With this configuration, when liquid or two fluids are supplied to the reading section 21 from the first supply port 33, a predetermined amount of time is required for the grinding wheel 18 to rotate and for the reading section 21 to return to the position where it faces the information acquisition unit 23. This time can be used to dry (naturally dry) any water droplets adhering to the reading section 21. Therefore, by supplying fluid to the downstream side of the rotation direction of the spindle 15 and grinding wheel 18 with the information acquisition unit 23 as the reference, the removal unit 30 can efficiently clean and dry the reading section 21, allowing the next reading process to be carried out without hindrance. In this operating configuration, only pure water may be supplied from the first supply port 33 without supplying compressed air. In other words, it is also possible to adopt a configuration in which the first supply port 33 is not in communication with the air supply source 32.

[0052] In this embodiment, a first supply port 33 is formed in the casing portion 26 constituting the information acquisition unit 23 at a position adjacent to the downstream side of the rotation direction of the spindle 15 and grinding wheel 18, relative to the transmitting / receiving unit 27. Therefore, the grinding wheel 18 rotates almost a full rotation between the time the part to be read 21, which receives liquid or two fluids supplied from the first supply port 33, and the time the information of the tag 22 is read by the transmitting / receiving unit 27 of the information acquisition unit 23. Consequently, a longer time can be secured for the water droplets adhering to the part to be read 21 to dry.

[0053] Furthermore, the placement of the supply port for supplying fluid to remove obstructions from the read-only section 21 is not limited to a position very close to the transmitting / receiving unit 27 on the downstream side in the rotational direction, as in the first supply port 33 of this embodiment, but may be at a position a certain distance away from the information acquisition unit 23 in the rotational direction of the grinding wheel 18. At a minimum, it is preferable that the removal unit is equipped with a supply port for supplying fluid to the read-only section 21 at a position a certain distance upstream (the side opposite to the direction of arrow Ra) in the rotational direction of the spindle 15 and the grinding wheel 18, relative to the information acquisition unit 23. Specifically, it is preferable that the supply port for supplying fluid to the read-only section 21 is positioned at a distance of at least 1 / 2 rotation (180-degree rotation angle) of the grinding wheel 18 on the upstream side in the rotational direction relative to the information acquisition unit 23. By satisfying these conditions, sufficient time can be secured for any water droplets adhering to the read-only section 21 to dry before the tag 22 is read by the transmitting / receiving unit 27 of the information acquisition unit 23 after the read-only section 21 has received liquid or two fluids from the supply port.

[0054] The information acquisition unit 23, equipped with a transmitting / receiving unit 27, is located further from the machining point than the grinding wheel 18, which is a machining tool. Therefore, if obstructions such as machining debris and machining waste liquid are less likely to adhere to the detection surface 28 of the transmitting / receiving unit 27 compared to the reading unit 21, compressed air may be supplied instead of liquid from the second supply port 34. In other words, it is possible to adopt a configuration in which the second supply port 34 is not in communication with the liquid supply source 31.

[0055] Thus, the fluid supply source communicating with each supply port 33, 34 of the removal unit 30 may supply both liquid (pure water) and gas (air), or it may supply only one of either liquid (pure water) or gas (air). Depending on the expected adhesion of the obstruction, the type of fluid to be supplied can be appropriately selected, and accordingly, a fluid supply configuration different from the illustrated embodiment can be applied.

[0056] In the sensitivity measurement process described above, the decision to perform the removal process is made based on the radio wave communication status between the tag 22 and the information acquisition unit 23. However, the decision to perform the removal of obstructions using the removal unit 30 may be made based on other criteria. For example, an imaging unit capable of imaging the outer periphery of the grinding wheel 18 (wheel base 19) and the detection surface 28 of the transmitting / receiving unit 27 may be provided, and the system may be controlled to perform the removal process when the adhesion of obstructions to the readable part 21 or the detection surface 28 is detected by analysis of the image captured by the imaging unit. Alternatively, the adhesion of obstructions to the readable part 21 or the detection surface 28 can be confirmed by the operator's visual inspection, and the removal process can be performed by the operator's operation. Alternatively, the system may be set to automatically perform the removal process as periodic maintenance when the usage time of the grinding device 10 or the grinding wheel 18 has elapsed for a predetermined period, without performing the sensitivity measurement process.

[0057] Furthermore, if it is possible to distinguish whether the obstruction is attached to the grinding wheel 18 or the information acquisition unit 23, the removal process may be performed on only the reading unit 21 or the detection surface 28 that has the obstruction attached. If only the reading unit 21 is targeted for obstruction removal, only the fluid supply from the first supply port 33 is performed. If only the detection surface 28 is targeted for obstruction removal, only the fluid supply from the second supply port 34 is performed. This has the effect of reducing the amount of fluid used. In particular, reducing the amount of pure water supplied from each supply port 33 and 34 has the effect of suppressing costs and environmental impact.

[0058] In this embodiment, information regarding the grinding wheel 18, which is a processing tool, is acquired by applying an RFID system that reads and writes information from the tag 22 using the information acquisition unit 23 as a reader. However, the method of acquiring information without contact is not limited to this. For example, near-field communication (NFC), which enables bidirectional communication, is known as a similar wireless communication system, and the tag 22 and the information acquisition unit 23 may be bidirectional communication devices that meet the standards for near-field communication. In the case of near-field communication, interference with wireless communication may occur due to obstacles interposed between the tag 22 and the information acquisition unit 23, so the removal of obstacles by the removal unit 30 is useful.

[0059] In addition to radio wave communication, optical information reading may also be applied as a contactless method for acquiring information. For example, symbolic representations such as barcodes (one-dimensional codes) or two-dimensional codes can be used as the format of information recorded on the tag 22. As for two-dimensional codes, stacked two-dimensional codes, which consist of multiple barcodes stacked on top of each other, and matrix two-dimensional codes, which consist of cells that hold information in both the horizontal and vertical directions, can be applied.

[0060] When such a symbolic display is provided on the tag 22, the readable portion 21 either exposes the tag 22 on the outer peripheral side surface of the wheel base 19 without providing a sealing material 25, or the sealing material 25 is made of a translucent material (a material that transmits visible light), so that the symbolic display of the tag 22 can be optically identified from the side of the grinding wheel 18. The information acquisition unit 23, as an acquisition unit replacing the transmitting / receiving unit 27, includes an imaging unit capable of capturing the symbolic display of the tag 22 and acquiring it as image information. The image signal of the symbolic display of the tag 22 captured by the imaging unit is transmitted to the control unit 39, where the control unit 39 performs a decoding process to acquire information related to the grinding wheel 18. Even when performing such optical information reading, if there is an obstruction between the tag 22 and the information acquisition unit 23, the reading of the information will be hindered, so the removal of the obstruction by the removal unit 30 is useful.

[0061] In the illustrated embodiment, the readable portion 21 has a structure in which a tag 22 housed in a housing recess 24 is covered with a sealing material 25. However, it is also possible to mount the tag on the outer peripheral side surface of the wheel base 19 without forming a recess in the grinding wheel 18. In particular, tags that record information using symbolic displays such as barcodes or two-dimensional codes are easy to make thin, and the effort and cost of replacing tags due to soiling etc. are reduced, making it easy to apply a structure in which the tag is exposed on the outer peripheral side surface of the wheel base 19 without protection with sealing material.

[0062] It is preferable to remove obstructions from the reading section 21 and the information acquisition section 23 using the pressure of the supplied fluid, as shown in the removal section 30 of the illustrated embodiment. Cleaning and drying using fluid pressure carries a low risk of damaging the grinding wheel 18 and the information acquisition section 23. However, the removal section of this disclosure is not limited to a type that sprays fluid from a nozzle-shaped part and removes obstructions with the pressure of the fluid, and other means can also be applied. For example, it may be a type of removal section that brings a contact member such as a brush or cleaning pad into contact with the reading section 21 and the information acquisition section 23, and wipes away obstructions by the frictional force acting between the contact member and the information acquisition section. In this case, it is preferable to support the contact member so that it can move between a contact position in contact with the outer peripheral side surface of the wheel base 19 and a separated position away from the outer peripheral side surface of the wheel base 19, and move the contact member to the contact position during the removal process, and to position the contact member in the separated position in other states. Alternatively, it is also possible to apply a type of removal section that removes obstructions using chemical absorption or physical absorption, such as a scrubber.

[0063] Figures 5 to 9 show embodiments in which the processing apparatus and information reading method of this disclosure are applied to a cutting apparatus 40. The X-axis, Y-axis, and Z-axis directions shown in each drawing are perpendicular to each other, and the Z-axis direction is the vertical direction of the cutting apparatus 40. The cutting apparatus 40 has a chuck table 41 which is a holding part that holds the workpiece 2, and a cutting mechanism 42 which performs cutting on the workpiece 2 on the chuck table 41. As shown in Figure 5, the workpiece 2 is held inside a ring-shaped ring frame 4 via a flexible tape 3.

[0064] The chuck table 41 has an upward-facing holding surface 43 on which the workpiece 2 is placed. The holding surface 43 is formed of a porous member connected to a suction source (not shown), and a suction force can be applied to the holding surface 43 by operating the suction source. The chuck table 41 is rotated about an axis in the Z-axis direction by a table rotation mechanism 44.

[0065] A machining feed mechanism 46 for moving the chuck table 41 in the X-axis direction is provided on the base 45 of the cutting device 40. The machining feed mechanism 46 comprises a pair of guide rails and a ball screw attached to the base 45 and extending in the X-axis direction, a motor for rotationally driving the ball screw, and an X-axis moving table that supports the chuck table 41 via a table rotation mechanism 44. When the motor rotates the ball screw, the X-axis moving table moves along the pair of guide rails, changing the position of the chuck table 41 in the X-axis direction.

[0066] A column 47 erected on the upper surface of the base 45 is provided with an indexing feed mechanism 48 for moving the cutting mechanism 42 in the Y-axis direction (indexing feed) and a lifting mechanism 49 for moving the cutting mechanism 42 in the Z-axis direction. The indexing feed mechanism 48 comprises a pair of guide rails and a ball screw attached to the column 47 and extending in the Y-axis direction, a motor for rotationally driving the ball screw, and a Y-axis moving table that supports the cutting mechanism 42 via the lifting mechanism 49. When the motor rotates the ball screw, the Y-axis moving table moves along the pair of guide rails, changing the position of the cutting mechanism 42 in the Y-axis direction. The lifting mechanism 49 comprises a pair of guide rails and a ball screw attached to the Y-axis moving table and extending in the Z-axis direction, a motor for rotationally driving the ball screw, and a Z-axis moving table that supports the cutting mechanism 42. When the motor rotates the ball screw, the Z-axis moving table moves along the pair of guide rails, changing the position of the cutting mechanism 42 in the Z-axis direction.

[0067] A cutting mechanism 42 is supported at the lower end of the Z-axis moving table that constitutes the lifting mechanism 49. As shown in Figure 6, the cutting mechanism 42 includes a spindle 50, which is an axial member extending in the Y-axis direction, and a spindle housing 51 that houses the spindle 50. A cutting blade 52 can be attached to and detached from the tip of the spindle 50 that protrudes from the spindle housing 51. The cutting blade 52 can be rotated around the spindle 50 by the driving force of a spindle motor (not shown) inside the spindle housing 51. The spindle 50 and the spindle motor correspond to the rotating parts of this disclosure, and the cutting blade 52 corresponds to the machining tool of this disclosure.

[0068] As shown in Figure 6, an annular mount 53 is provided near the tip of the spindle 50, which is coaxial with the spindle 50 and has a larger diameter than the spindle 50. The mount 53 corresponds to the tool holder portion of this disclosure. The cutting blade 52 has an annular blade base 54 facing the mount 53 and an annular cutting edge 55 located on the outer edge of the blade base 54. The cutting edge 55 protrudes radially outward from the outer edge of the blade base 54. The tip of the spindle 50 is inserted through a circular mounting hole 56 in the center of the blade base 54, and the cutting blade 52 is inserted until the cutting edge 55 is clamped between the mount 53 and the blade base 54. In this state, the cutting blade 52 is fixed to the spindle 50 and the mount 53 by screwing a nut 57 onto the male thread at the tip of the spindle 50 protruding from the mounting hole 56 and tightening it.

[0069] A blade cover 60 that partially covers the cutting blade 52 attached to the spindle 50 is attached to the spindle housing 51. The blade cover 60 has a fixed cover portion 61 fixed to the spindle housing 51 and a movable cover portion 62 that is supported so as to be slidable in the X-axis direction relative to the fixed cover portion 61 via a sliding portion 63. By sliding the movable cover portion 62 to the open position shown in Figure 6, the cutting blade 52 can be attached to and detached from the spindle 50. By sliding the movable cover portion 62 from the open position in the direction of arrow Q in Figure 6, the movable cover portion 62 is closed as shown in Figure 5, and the blade cover 60 covers the cutting blade 52.

[0070] The fixed cover section 61 is provided with a processing fluid nozzle 64 that supplies processing fluid (pure water) towards the lower end of the cutting blade 52. The movable cover section 62 is provided with a pair of processing fluid nozzles 65 that supply processing fluid (pure water) to the sides of the cutting blade 52. The processing fluid nozzles 64 and 65 are each connected to a processing fluid supply source 67 via a flow path 66, and processing fluid (pure water) sent from the processing fluid supply source 67 can be sprayed from the processing fluid nozzles 64 and 65.

[0071] The machining process performed by the cutting device 40 is executed by the control unit 68 controlling each part according to the control program. In this embodiment, the case in which the workpiece 2 is machined along a grid of planned machining lines extending in the X-axis direction and the Y-axis direction is described. By cutting along the planned machining lines, machining grooves such as full-cut grooves that penetrate the thickness direction of the workpiece 2, or half-cut grooves (bottomed grooves) that are only partially deep in the thickness direction of the workpiece 2 are formed. Note that this is just one example, and the cutting device 40 may perform machining on the workpiece 2 other than the formation of grid-like machining grooves. For example, the outer circumference of a disc-shaped workpiece 2 may be machined to remove the chamfered shape on the outer circumference of the workpiece 2, such as edge trimming.

[0072] When the cutting device 40 cuts the workpiece 2, the control unit 68 adjusts the relative positions of the chuck table 41 and the cutting mechanism 42 in the X-axis and Y-axis directions using the machining feed mechanism 46 and the indexing feed mechanism 48 to position the cutting blade 52 above the extension of the planned machining line that is to be cut. Next, the control unit 68 drives the spindle motor to rotate the spindle 50 and the cutting blade 52, and moves the cutting mechanism 49 downward in the Z-axis direction until it reaches a predetermined cutting depth. Then, by moving the chuck table 41 in the X-axis direction using the machining feed mechanism 46, the cutting edge 55 of the cutting blade 52 cuts into the workpiece 2, and cutting is performed along the planned machining line extending in the X-axis direction.

[0073] Once cutting along one planned machining line is completed, the control unit 68 moves the cutting mechanism 42 upward in the Z-axis direction using the lifting mechanism 49, separating the cutting blade 52 from the workpiece 2. Next, the control unit 68 moves the cutting mechanism 42 in the Y-axis direction (indexing feed) using the indexing feed mechanism 48, positioning the cutting blade 52 above the extension of the next uncut planned machining line. Then, similarly to the above, the lifting mechanism 49 moves the cutting blade 52 downward in the Z-axis direction, and the machining feed mechanism 46 moves the chuck table 41 in the X-axis direction, performing cutting along the planned machining line.

[0074] Once cutting along all the planned machining lines aligned in the Y-axis direction is complete, the control unit 68 rotates the chuck table 41 by 90 degrees using the table rotation mechanism 44. As a result, the workpiece 2 on the chuck table 41 is positioned so that multiple uncut planned machining lines are aligned in the Y-axis direction (extending toward the X-axis direction). Then, cutting is performed sequentially along all the uncut planned machining lines in the same manner as described above.

[0075] During cutting, the control unit 68 sprays the cutting fluid supplied from the cutting fluid source 67 through the cutting fluid nozzles 64 and 65. This washes away the cutting debris generated during cutting and cools the cutting mechanism 42 (especially the cutting blade 52 and spindle 50) and the workpiece 2.

[0076] The cutting blade 52 is equipped with a readable section 70 for reading information. The readable section 70 is provided on the blade base 54. As shown in Figure 7, the readable section 70 is equipped with a tag 71 on which information is recorded. The information recorded on the tag 71 may include, for example, the dimensions of the cutting blade 52, the composition of the abrasive grains and binders that make up the cutting edge 55 of the cutting blade 52, the usage history of the cutting blade 52, the rotational speed when the cutting blade 52 is used, and the serial number and lot number of the cutting blade 52. However, the information recorded on the tag 71 is not limited to these and may include other information.

[0077] Tag 71 records information in a way that allows for contactless reading. Specifically, Tag 71 is an IC tag that can read and write information wirelessly, similar to Tag 22 in the grinding apparatus 10 of the above embodiment. Together with the information acquisition unit 72, it constitutes an RFID system that reads and writes information from Tag 71 contactlessly using radio waves.

[0078] As shown in Figure 7, a recessed area 73 is formed on a part of the side of the blade base 54 facing the mount 53 in the Y-axis direction, and the recess is recessed in the thickness direction of the cutting blade 52. The tag 71 is placed inside the recessed area 73. The tag 71 is attached to the bottom of the recessed area 73, and a sealing material 74 covering the tag 71 is filled inside the recessed area 73. The sealing material 74 is made of a material that does not block radio waves transmitted and received between the tag 71 and the information acquisition unit 72.

[0079] The information acquisition unit 72 is positioned in the mount 53 facing the blade base 54, and a transmitting / receiving unit 75 that transmits and receives radio waves with the tag 71 is mounted inside the mount 53. The transmitting / receiving unit 75 constitutes the acquisition unit in the information acquisition unit of this disclosure and has a detection surface 76 that transmits and receives radio waves with the tag 71 to acquire information from the tag 71. The information acquisition unit 72 is positioned so that the detection surface 76 is exposed facing the blade base 54 side.

[0080] The transmitting / receiving unit 75 is connected to the control unit 68 in a communicative manner, and the information of the tag 71 read using the transmitting / receiving unit 75 is transmitted to the control unit 68. Part of the signal wiring connecting the transmitting / receiving unit 75 and the control unit 68 passes through the spindle 50, and the wiring inside the spindle 50 and the wiring outside the spindle 50 are connected by a predetermined connection structure (such as a brush structure that is always in contact regardless of the rotation angle of the spindle 50) so that the conductivity between them is not interrupted even when the spindle 50 rotates.

[0081] When replacing the cutting blade 52 and attaching it to the mount 53, the relative positions of the cutting blade 52 and the spindle 50 (mount 53) (position in the rotational direction and position in the Y-axis direction) are aligned so that the readable part 70 and the information acquisition unit 72 face each other in the Y-axis direction, as shown in Figure 7, so that the readable part 70 and the detection surface 76 face each other. In this state, the information acquisition unit 72 reads the information of the tag 71. The control unit 68 stores the information of the read tag 71 in memory and uses it to set processing conditions when processing the workpiece 2 with the cutting device 40 and to manage information related to the cutting blade 52. For example, it can display the specifications of the cutting blade 52 on the display monitor of the cutting device 40, or notify whether or not an appropriate cutting blade 52 corresponding to the processing conditions is attached.

[0082] If an obstruction is present between the tag 71 of the readable section 70 and the transmitting / receiving unit 75 of the information acquisition section 72, it may affect the transmission and reception of radio waves, potentially hindering the information acquisition section 72 from acquiring information from the tag 71. The cutting device 40 is equipped with a removal section 80 (see Figure 7) to remove such obstructions that may cause such problems.

[0083] The removal unit 80 includes a liquid supply source 81 and an air supply source 82. The liquid supply source 81 and the air supply source 82 correspond to the fluid supply sources in the removal unit of this disclosure. The liquid supply source 81 includes a tank for storing liquid and a pump for dispensing liquid from the tank. The liquid dispensed from the liquid supply source 81 is pure water. The air supply source 82 includes a compressor for compressing air and dispenses compressed air. The removal unit 80 can supply the pure water dispensed from the liquid supply source 81 and the compressed air dispensed from the air supply source 82, i.e., the fluid, to the readable section 70 of the cutting blade 52 and the information acquisition section 72 of the mount 53 to remove obstructions. Alternatively, the removal unit 80 may use liquid (pure water) dispensed from the processing fluid supply source 67 instead of having an independent liquid supply source 81.

[0084] A supply port 83 is formed in the movable cover portion 62 of the blade cover 60. The supply port 83 opens toward the vicinity of the boundary between the mount 53 and the blade base 54. The supply port 83 communicates with a liquid supply source 81 via a flow path 84 and with an air supply source 82 via a flow path 85.

[0085] The control unit 68 controls the operation of the on-off valve 841 in the flow path 84 and the on-off valve 851 in the flow path 85, thereby individually switching the supply and cessation of pure water from the liquid supply source 81 to the supply port 83, and the supply and cessation of compressed air from the air supply source 82 to the supply port 83. By opening the on-off valve 841 and closing the on-off valve 851, pure water is supplied to the supply port 83, and by closing the on-off valve 841 and opening the on-off valve 851, compressed air is supplied to the supply port 83. By opening both the on-off valve 841 and the on-off valve 851, a mixture of pure water and compressed air is supplied to the supply port 83.

[0086] The method for reading information in the cutting device 40 involves measuring the sensitivity of the information acquisition unit 72 to read the information from the tag 71 in a sensitivity measurement step. If the sensitivity is less than a predetermined value, the removal step involves removing obstacles that hinder information acquisition using the removal unit 80. After the removal step, the information acquisition unit 72 performs a reading step to read information from the tag 71 of the cutting blade 52 held in the mount 53. The basic flow of each of these steps is the same as the information reading method described for the grinding device 10. A structural difference from the grinding device 10 is that in the cutting device 40, the information acquisition unit 72 is provided on the mount 53, which is the tool holding part, and the information acquisition unit 72 rotates together with the rotation of the cutting blade 52. Therefore, the operation procedure in the removal step differs from that of the grinding device 10.

[0087] When the cutting blade 52 is mounted (fixed) to the mount 53 using the nut 57, the reading unit 70 and the information acquisition unit 72 maintain a relationship where they face each other in the Y-axis direction, as shown in Figure 7, without changing their relative positions in the rotational direction of the spindle 50. The opposing surfaces of the mount 53 and the blade base 54 are in close contact, and there is almost no gap between the reading unit 70 and the information acquisition unit 72. Therefore, while the cutting mechanism 42 is operating to process the workpiece 2, it is difficult for obstructions to enter between the reading unit 70 and the information acquisition unit 72, and the fluid supplied from the supply port 83 does not easily reach the reading unit 70 or the information acquisition unit 72. Consequently, when the cutting blade 52 is fixed to the mount 53, the effect of removing obstructions by the removal unit 80 is limited. When removing obstructions in earnest using the removal unit 80, the fixing of the cutting blade 52 by the nut 57 is released, as shown in Figure 6, and the mount 53 and the blade base 54 are separated in the Y-axis direction. Furthermore, by positioning the information acquisition unit 72 below the supply port 83 and supplying fluid from the supply port 83, any obstructions adhering to the information acquisition unit 72 can be removed. In addition, by supplying fluid from the supply port 83 without completely separating the cutting blade 52 from the mount 53, and with the blade base 54 in a position close to the mount 53 in the Y-axis direction (with the nut 57 slightly loosened), any obstructions adhering to the reading unit 70 can be removed.

[0088] The fluid supplied from the supply port 83 has a predetermined pressure, and by supplying the fluid under pressure, obstructions are removed. For example, pure water or a difluid can be supplied from the supply port 83 to wash away obstructions from the readable section 70 and the information acquisition section 72, or compressed air can be blown from the supply port 83 towards the readable section 70 and the information acquisition section 72 to blow away obstructions. In addition, compressed air can be supplied from the supply port 83 towards the readable section 70 and the information acquisition section 72 to remove moisture adhering to them and dry them out.

[0089] Although the inclination of the supply port 83 with respect to the rotation direction of the cutting blade 52 is not shown in Figure 7, the supply port 83 may deliver fluid at an angle toward the downstream or upstream side in the rotation direction of the cutting blade 52.

[0090] In this embodiment, the removal unit 80 supplies fluid to the readable unit 70 and the information acquisition unit 72 from a position different from both the cutting blade 52 and the mount 53 (the movable cover portion 62 of the blade cover 60). However, similar to the information acquisition unit 23 in the grinding apparatus 10 described above, the removal unit may be provided with a supply port around the information acquisition unit 72 to supply fluid toward the readable unit 70 and the detection surface 76. In other words, the supply port of the removal unit may be formed inside the mount 53 or the spindle 50.

[0091] Furthermore, the fixed cover portion 61 of the blade cover 60 may be provided with a supply port for the removal section. The fixed cover portion 61 is equipped with a processing fluid nozzle 64, and it is also possible to branch the flow path 66 that supplies processing fluid from the processing fluid supply source 67 to the processing fluid nozzle 64, and supply liquid (pure water) from the processing fluid supply source 67 to the supply port for the removal section provided in the fixed cover portion 61.

[0092] The information acquisition unit 72 shown in Figures 6 and 7 is located on a mount 53 provided on the spindle 50 which rotates with the cutting blade 52. However, it is also possible to provide the information acquisition unit in a part that does not rotate with the cutting blade 52, such as the blade cover 60 or the spindle housing 51. A modified example in which the information acquisition unit is provided in a part that does not rotate with the cutting blade 52 will be described with reference to Figures 8 and 9. Parts common to the configuration shown in Figures 6 and 7 are indicated by the same reference numerals in Figures 8 and 9. In this modified example, it is assumed that the movable cover 62 is in a closed state that covers the top of the cutting blade 52 (see Figure 5).

[0093] The readable portion 90 on the cutting blade 52 is located on the blade base 54 in a position that does not face the mount 53 of the spindle 50. More specifically, the blade base 54 has a housing recess 91 that opens toward the outer circumference of the cutting blade 52, and a tag 92 containing information about the cutting blade 52 is attached to the bottom of the housing recess 91. The tag 92 is an IC tag that can be read and written to via wireless communication. A sealing material 93 covering the tag 92 is filled inside the housing recess 91.

[0094] An information acquisition unit 94 is provided in the movable cover portion 62 of the blade cover 60. The movable cover portion 62 has a housing recess 95 that opens downward. A transceiver unit 96 that transmits and receives radio waves with the tag 92 is mounted inside the housing recess 95, and the detection surface 97 of the transceiver unit 96 is positioned to be exposed facing the blade base 54. As shown in Figure 8, with the blade base 54 of the cutting blade 52 attached to the mount 53, the tag 92 located in the housing recess 91 and the transceiver unit 96 located in the housing recess 95 are positioned at the same position in the Y-axis direction. Therefore, at the rotation angle of the cutting blade 52 when the blade base 54 is facing upward as shown in Figure 9, the readable portion 90 and the detection surface 76 face each other, and the information acquisition unit 94 can read the information of the tag 92 by wireless communication between the tag 92 and the transceiver unit 96. The information of the tag 92 read by the information acquisition unit 94 is transmitted to the control unit 68. It is also possible to install the information acquisition unit 94 in the fixed cover portion 61 (Figure 6) instead of the movable cover portion 62.

[0095] A removal unit 100 is provided to remove obstructions interposed between the tag 92 of the readable unit 90 and the transmitting / receiving unit 96 of the information acquisition unit 94. As shown in Figure 9, the removal unit 100 is equipped with a liquid supply source 101 and an air supply source 102 as fluid supply sources. The liquid supply source 101 supplies pure water, which is a liquid, and the air supply source 102 supplies compressed air. The movable cover 62 has a first supply port 103 and a second supply port 104. The first supply port 103 communicates with the liquid supply source 101 via a flow path 105 and with the air supply source 102 via a flow path 106. The second supply port 104 communicates with the liquid supply source 101 via a flow path 107 and with the air supply source 102 via a flow path 108. In Figure 9, for convenience, the liquid supply source 101 and air supply source 102 communicating with the first supply port 103 and the liquid supply source 101 and air supply source 102 communicating with the second supply port 104 are shown separately. However, the liquid supply source 101 may be the same or independently provided, and the air supply source 102 may be the same or independently provided. Furthermore, the liquid supply source 101 may be a liquid supply source shared with the processing fluid supply source 67 (Figure 6). It is also possible to provide the first supply port 103 and the second supply port 104 of the removal unit 100 on the fixed cover portion 61 (Figure 6) instead of the movable cover portion 62.

[0096] The control unit 68 controls the operation of the on-off valve 109 in the flow path 105 and the on-off valve 110 in the flow path 106, thereby individually switching the supply and cessation of pure water from the liquid supply source 101 to the first supply port 103, and the supply and cessation of compressed air from the air supply source 102 to the first supply port 103. By opening the on-off valve 109 and closing the on-off valve 110, pure water is supplied to the first supply port 103, and by closing the on-off valve 109 and opening the on-off valve 110, compressed air is supplied to the first supply port 103. By opening both the on-off valve 109 and the on-off valve 110, a mixture of pure water and compressed air is supplied to the first supply port 103.

[0097] The control unit 68 controls the operation of the on-off valve 111 in the flow path 107 and the on-off valve 112 in the flow path 108, thereby individually switching the supply and cessation of pure water from the liquid supply source 101 to the second supply port 104, and the supply and cessation of compressed air from the air supply source 102 to the second supply port 104. By opening the on-off valve 111 and closing the on-off valve 112, pure water is supplied to the second supply port 104, and by closing the on-off valve 111 and opening the on-off valve 112, compressed air is supplied to the second supply port 104. By opening both the on-off valve 111 and the on-off valve 112, a mixture of pure water and compressed air is supplied to the second supply port 104.

[0098] The first supply port 103 opens on the lower side of the movable cover portion 62 and is located in the same position as the information acquisition portion 94 (receiving recess 95) in the Y-axis direction, and adjacent to the information acquisition portion 94 (receiving recess 95) in the X-axis direction. Therefore, it is possible to supply fluid (pure water, two fluids, compressed air) from the first supply port 103 toward the outer circumference of the blade base 54 on which the read portion 90 is provided. By supplying fluid from the first supply port 103 at an angular position in the rotational direction of the cutting blade 52 where the read portion 90 faces the first supply port 103, obstructions adhering to the read portion 90 can be removed.

[0099] During cutting, the spindle 50 and cutting blade 52 rotate in the direction of arrow Rc shown in Figure 9. The removal unit 100 supplies fluid from the first supply port 103 to the downstream side (the side advanced in the direction of arrow Rc) of the rotation of the spindle 50 and cutting blade 52, with the information acquisition unit 94 (transmitting / receiving unit 96) as the reference. With this configuration, when liquid or two fluids are supplied to the readable unit 90 from the first supply port 103, a longer time is secured for the cutting blade 52 to rotate and return to the position where the readable unit 90 next faces the information acquisition unit 94, allowing water droplets adhering to the readable unit 90 to dry (naturally dry). In particular, since the first supply port 103 is positioned adjacent to the information acquisition unit 94 on the downstream side in the rotational direction of the cutting blade 52, the cutting blade 52 rotates almost a full rotation between the reading unit 90, which receives the liquid or two fluids supplied from the first supply port 103, and the information of the tag 92, which is then read by the transmitting / receiving unit 96 of the information acquisition unit 94. This allows for a longer time for any water droplets adhering to the reading unit 90 to dry.

[0100] The second supply port 104 opens to the inner surface of the housing recess 95, and a fluid (pure water, two-fluid, or compressed air) can be supplied to the detection surface 97 of the transmitting / receiving unit 96 inside the housing recess 95 to remove any obstructions adhering to the detection surface 97. The fluid used to remove obstructions from the detection surface 97 is discharged to the outside of the movable cover portion 62 through the opening in the housing recess 95.

[0101] Note that the orientation and arrangement of the first supply port 103 shown in Figure 9 are examples only and are not limited to the illustrated configuration. The first supply port 103 may extend in any direction as long as it can supply fluid to the reading section 90. For example, the direction in which the first supply port 103 extends may have an inclination component toward the direction of arrow Rc in which the cutting blade 52 rotates (downstream in the direction of rotation) or an inclination component toward the opposite direction of arrow Rc (upstream in the direction of rotation). In other words, the first supply port 103 may deliver fluid at an angle toward the downstream or upstream side in the direction of rotation of the cutting blade 52. For example, the first supply port 103 may deliver fluid at an angle toward the downstream side in the direction of rotation of the cutting blade 52 (arrow Rc). This reduces the possibility that the fluid (especially pure water) supplied from the first supply port 103 will bounce back from the cutting blade 52 and adhere to the detection surface 97 of the transmitting / receiving unit 96 through the opening of the housing recess 95, similar to the configuration of the first supply port 33 shown in Figure 4(A).

[0102] Furthermore, the orientation and arrangement of the second supply port 104 shown in Figure 9 are merely examples and are not limited to the illustrated configuration. The second supply port 104 may extend in any direction as long as it can supply fluid to the detection surface 97 of the transmitting / receiving unit 96. Specifically, the second supply port 104 may deliver fluid obliquely to the detection surface 97. For example, the second supply port 104 can deliver fluid to the transmitting / receiving unit 96 in an oblique direction, passing in front of the detection surface 97 and moving downstream in the rotation direction (arrow Rc) of the cutting blade 52. This reduces the possibility that the fluid (especially pure water) supplied from the first supply port 103 will bounce off the cutting blade 52 and adhere to the detection surface 97, similar to the configuration of the second supply port 34 shown in Figure 4(B). Alternatively, the second supply port 104 can deliver fluid to the transmitting / receiving unit 96 in an oblique direction, passing in front of the detection surface 97 and moving upstream in the rotation direction (arrow Rc) of the cutting blade 52. This reduces the possibility that obstructions remaining on the cutting blade 52 may reach the detection surface 97 as the cutting blade 52 rotates, similar to the configuration of the second supply port 34 shown in Figure 4(C).

[0103] Furthermore, the number of first supply ports 103 and second supply ports 104 is not limited to one as shown in Figure 9, and there may be multiple first supply ports 103 and multiple second supply ports 104.

[0104] The rotation direction of the cutting blade 52 during machining in the cutting device 40 may be in the opposite direction to the arrow Rc shown in Figure 9. In this case, it is preferable that the arrangement of the supply ports 103 and 104 of the removal unit 100 be in the opposite positional relationship to the above arrangement, with the information acquisition unit 94 in between. This makes it possible to obtain the same effects as those described earlier regarding the arrangement of the supply ports 103 and 104.

[0105] The removal unit 100 of this embodiment is equipped with a first supply port 103 facing the reading unit 90 and a second supply port 104 facing the detection surface 97, but it is also possible to supply fluid to the reading unit 90 and the detection surface 97 from a common supply port. For example, by arranging a branching channel or a flow straightening plate near the outlet of the second supply port 104 to guide the fluid toward the reading unit 90, the fluid supplied from the second supply port 104 can be distributed to the reading unit 90 side and the detection surface 97 side. In this case, it is also possible to select a configuration without the first supply port 103. Alternatively, by arranging a branching channel or a flow straightening plate in the middle of the first supply port 103 to guide the fluid toward the detection surface 97, the fluid supplied from the first supply port 103 can be distributed to the reading unit 90 side and the detection surface 97 side. In this case, it is also possible to select a configuration without the second supply port 104.

[0106] If the cutting device 40 is equipped with the cutting mechanism 42 shown in Figures 8 and 9, then, similar to the grinding device 10 described above, the removal of obstructions from the read-only part 90 using the removal unit 100 can be performed while the cutting blade 52 remains attached to the mount 53. In other words, the same processing procedures as those described for the grinding device 10—the sensitivity measurement process, the removal process, and the reading process—can be applied. In the reading process, the transmission / reception unit 96 reads the information from the tag 92 either when the cutting blade 52 is stopped rotating at a position where the read-only part 90 faces the information acquisition unit 94 (Figures 8 and 9), or when the cutting blade 52 is rotating at a low speed (a lower rotation speed than the rotation speed used for processing). By reading the information from the tag 92 during low-speed rotation while the cutting blade 52 is accelerating (before reaching the high-speed rotation speed used for processing), rather than when the cutting blade 52 is stopped, the time required for the reading process can be saved, thereby shortening the process time. In other words, the operational efficiency of the cutting device 40 can be improved.

[0107] In the cutting device 40, in addition to radio wave communication, optical information reading may be applied as a method for non-contact acquisition of information from tags 71 and 92. In this case, a symbolic display such as a barcode or two-dimensional code, which is a one-dimensional code, is provided on tags 71 and 92, and the information acquisition unit includes an imaging unit capable of capturing images of the symbolic displays on tags 71 and 92, as an acquisition unit that replaces the transmitting / receiving unit 75 and the transmitting / receiving unit 96.

[0108] The above describes embodiments in which the technology is applied to a grinding device 10 in which the grinding wheel 18 is the processing tool, with reference to Figures 1 to 4, and embodiments in which the technology is applied to a cutting device 40 in which the cutting blade 52 is the processing tool, with reference to Figures 5 to 9. However, the types of processing tools and processing devices to which the technology of this disclosure can be applied are not limited to these embodiments. For example, it can be applied to polishing devices in which the processing tool is an abrasive pad. In polishing devices as well, there is a need to acquire and manage information about the attached abrasive pad, and there is a challenge in acquiring information from tags without being hindered by obstacles, so the processing device and information reading method of this disclosure are useful.

[0109] The processing apparatus of this disclosure, such as the grinding apparatus 10 and the cutting apparatus 40, can be applied when manufacturing chips by dividing a plate-shaped workpiece, which has division lines set to demarcate the chip area, along the division lines. Examples of this type of plate-shaped workpiece include disc-shaped wafers, such as workpiece 1 shown in Figure 1 and workpiece 2 shown in Figure 5, and package substrates. When applied to chip manufacturing (division of workpieces), in addition to the sensitivity measurement step, removal step, and reading step in the information reading method described above, a judgment step and a division step are also performed. As will be described later, the division step may be performed not only with the grinding apparatus 10 and the cutting apparatus 40, but also in combination with other processing apparatuses.

[0110] In the decision-making process, the control unit (control unit 39, control unit 68) of the machining equipment determines whether or not to perform machining using the machining tool held in the tool holder (mount 17, mount 53), based on the information from the tags (tags 22, 71, 92) of the machining tool (grinding wheel 18, cutting blade 52) read in the reading process. For example, if the control unit determines from the tag information that the machining tool attached to the tool holder is unsuitable for the machining conditions, it issues an error notification and does not perform machining. If the machining tool attached to the tool holder is suitable for the machining conditions, the control unit decides to perform machining.

[0111] The splitting process includes a removal process step performed by processing equipment (such as a grinding machine 10 and a cutting machine 40). In the removal process step, the workpiece is removed by processing tools (grinding wheel 18, cutting blade 52) held in rotating tool holders (mounts 17 and 53). For example, in the grinding machine 10, the upper surface of the workpiece 1 is ground down by the grinding wheel 20 of the rotating grinding wheel 18 to reduce the thickness of the workpiece 1 (partially removing the upper surface of the workpiece 1). In the cutting machine 40, the cutting edge 55 of the rotating cutting blade 52 is used to cut the workpiece 2 to form a processing groove (removing the workpiece 2 at the location of the processing groove). These removal processes are used to split the workpiece 1 and workpiece 2. The splitting process can be carried out in various forms, and the workpiece may be split by using processing by multiple processing machines in combination, or the workpiece may be split using only one processing machine.

[0112] For example, when forming a full-cut groove that penetrates the workpiece in the thickness direction using the cutting device 40, the workpiece can be divided along the planned division line by the cutting process (an example of removal process) using the cutting device 40 to produce multiple chips. Note that before forming the full-cut groove in the workpiece with the cutting device 40, the workpiece may be thinned by grinding using the grinding device 10.

[0113] When the cutting device 40 is combined with other processing devices to perform the splitting process, for example, the cutting device 40 cuts the workpiece partway in the thickness direction to form a half-cut groove along the planned splitting line. An expander (not shown) is used to expand the tape 3 (see Figure 5) to which the workpiece with the half-cut groove is attached, thereby splitting the workpiece starting from the half-cut groove and manufacturing a chip. Alternatively, the workpiece with the half-cut groove along the planned splitting line is transported to the grinding device 10 for grinding, and the grinding pressure applied by the grinding wheel 18 and the thinning of the workpiece due to grinding are used to split the workpiece starting from the half-cut groove and manufacture a chip. Alternatively, a plasma etching device (not shown) is used to perform plasma etching on the workpiece with the half-cut groove, thereby splitting the workpiece starting from the half-cut groove and manufacturing a chip.

[0114] When the splitting process is performed by combining the grinding device 10 with other processing devices, for example, as described above, the workpiece, which has half-cut grooves formed along the planned splitting lines in the cutting device 40, is transported to the grinding device 10 for grinding, and the workpiece is split starting from the half-cut grooves to produce chips. Alternatively, a laser processing device (not shown in the figure) is used to form a modified layer inside the workpiece along the planned splitting lines, the workpiece with the modified layer formed is transported to the grinding device 10 for grinding, and the workpiece is split starting from the modified layer due to the external force applied during grinding to produce chips.

[0115] By applying the contents of this disclosure to the manufacturing of the chip described above, it is possible to efficiently manufacture the chip without reducing the reading sensitivity of the tag attached to the processing tool.

[0116] Furthermore, the embodiments of the present invention are not limited to the embodiments and modifications described above, and may be modified, substituted, or altered in various ways without departing from the spirit of the technical idea of ​​the present invention. Moreover, if the technical idea of ​​the present invention can be realized in a different way by advances in the art or by other derived arts, it may be implemented by that method. Accordingly, the claims cover all embodiments that may fall within the scope of the technical idea of ​​the present invention. [Industrial applicability]

[0117] According to the present invention, by removing obstacles that hinder the acquisition of information by the information acquisition unit, it is possible to prevent a decrease in reading sensitivity when reading information from tags on processing tools, and to effectively manage information on processing tools using tags. [Explanation of symbols]

[0118] 1: Workpiece 2: Workpiece 10: Grinding equipment (processing equipment) 11: Chuck table (holding part) 12: Grinding mechanism 14: Spindle Housing 15: Spindle (rotating part) 16: Spindle motor (rotating part) 17: Mount (tool holder) 18: Grinding Wheel (Processing Tool) 19: Wheel base 20: Grinding wheel 21: Readable section 22: Tags 23: Information acquisition department 24: Receiving recess 25: Sealing material 26: Casing section 27: Transmit / Receive Unit (Acquisition Section) 28: Detection surface 29: Opening 30:Removal section 31:Liquid supply source (fluid supply source) 32: Air supply source (fluid supply source) 33: First supply port (supply port) 34: Second supply port (supply port) 39: Control Unit 40: Cutting equipment (processing equipment) 41: Chuck table (holding part) 42: Cutting mechanism 44: Table rotation mechanism 46: Machining feed mechanism 48: Indexing feed mechanism 49: Lifting mechanism 50: Spindle (rotating part) 51: Spindle Housing 52: Cutting blade (machining tool) 53: Mount (tool holder) 54: Blade base 55: Cutting edge 60: Blade cover 61: Fixed cover section 62: Movable cover part 64: Processing fluid nozzle 65: Processing fluid nozzle 67: Machining fluid supply source 68: Control Unit 70: Readable section 71: Tags 72: Information acquisition department 73: Receiving recess 74: Sealing material 75: Transmit / receive unit (acquisition unit) 76: Detection surface 80:Removal section 81:Liquid supply source (fluid supply source) 82: Air supply source (fluid supply source) 83: Supply port 90: Readable section 91: Recessed recess 92: Tags 93: Sealing material 94: Information acquisition department 95: Recessed compartment 96: Transmit / receive unit (acquisition unit) 97: Detection surface 100:Removal section 101:Liquid supply source (fluid supply source) 102: Air supply source (fluid supply source) 103: First supply port (supply port) 104: Second supply port (supply port)

Claims

1. A holding part for holding the workpiece, A tool holder that holds a processing tool having a tag that allows information to be read without contact, An information acquisition unit that acquires information from the tag of the processing tool held in the tool holder, The tool holder includes a removal unit that removes obstacles that hinder the acquisition of information by the information acquisition unit from the tag of the processing tool held in the tool holder. A processing apparatus characterized by the following features.

2. The removal portion is, Compressed air is supplied to the information acquisition unit. The processing apparatus according to feature 1.

3. The removal portion is, A fluid containing at least one of compressed air and pure water is supplied to the machining tool held in the tool holder. The processing apparatus according to feature 1.

4. The tool holder is further equipped with a rotating part that rotates the tool holder, The removal portion is, The fluid is supplied to the downstream side of the rotational direction of the rotating part, with reference to the information acquisition unit. The processing apparatus according to feature 3.

5. The tool holder is further equipped with a rotating part that rotates the tool holder, The removal portion is, The fluid is supplied to a position separated from the rotating part in the direction of rotation, with reference to the information acquisition unit. The processing apparatus according to feature 3.

6. The information acquisition unit is, An acquisition unit whose detection surface faces the tag and acquires the information from the tag, It has a casing portion that exposes the detection surface of the acquisition portion and holds the acquisition portion, The removal portion is, A fluid supply source, It has a supply port that communicates with the casing portion and the fluid supply source, The fluid is supplied from the supply port. The processing apparatus according to any one of claims 1 to 5.

7. The tag is, This is an IC tag that allows for the reading and writing of information via wireless communication. The processing apparatus according to any one of claims 1 to 5.

8. A sensitivity measurement step for measuring the reading sensitivity of the information acquisition unit when acquiring information from a tag on a machining tool held in a tool holder, which is capable of reading information without contact, and the information acquisition unit acquires the information from the tag. If the sensitivity measured in the sensitivity measurement step is less than a predetermined value, a removal step is performed in which at least one of pure water and compressed air is supplied to at least one of the information acquisition unit and the processing tool, and an obstruction is removed that hinders the acquisition of the information by the information acquisition unit. The system includes a reading step, after the removal step, in which the information acquisition unit reads the information from the tag of the processing tool held in the tool holder. A method for reading information characterized by the following features.

9. A method for manufacturing chips by dividing a plate-shaped workpiece, which has division lines set to demarcate the chip area, along the division lines, A sensitivity measurement step for measuring the reading sensitivity of the information acquisition unit when acquiring information from a tag on a machining tool held in a tool holder, which is capable of reading information without contact, and the information acquisition unit acquires the information from the tag. If the sensitivity measured in the sensitivity measurement step is less than a predetermined value, a removal step is performed in which at least one of pure water and compressed air is supplied to at least one of the information acquisition unit and the processing tool, and an obstruction is removed that hinders the acquisition of the information by the information acquisition unit. After the removal step, the information acquisition unit reads the information from the tag of the processing tool held in the tool holder, A determination step in which, based on the information of the tag read in the reading step, a determination step is made to determine whether or not to perform machining using the machining tool held in the tool holder, The determination step includes a removal step in which the workpiece is removed by a machining tool held in a rotating tool holder, which is executed when it is determined in the determination step to perform the machining, and a division step in which the workpiece is divided along the planned division line to produce chips, A method for manufacturing a chip having [the specified characteristic].

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