Processing apparatus and processing method

Abstract

This reduces the waste of fluids such as cleaning solution and air that are sprayed and consumed from the nozzle during either cleaning or drying, or both. [Solution] A processing apparatus for performing either or both washing and drying on a plate-shaped, polygonal workpiece, comprising: a holding table having a holding surface; a first motor; a rotational drive mechanism for rotating the holding table; a processing unit having a nozzle for spraying fluid; a nozzle moving mechanism; and a controller for controlling the operation of the rotational drive mechanism and the nozzle moving mechanism, wherein the controller controls the range of movement of the nozzle by the nozzle moving mechanism according to the rotation angle of the holding table, so that fluid is sprayed onto the workpiece, which rotates with the holding table, as the polygonal region of the workpiece held on the holding surface in a top view is set as the workpiece.

Description

Technical Field

[0001] The present invention relates to a processing apparatus for performing one or both of cleaning and drying on a plate-shaped and polygonal workpiece, and a processing method for performing one or both of cleaning and drying on the workpiece.

Background Art

[0002] In the manufacturing process of semiconductor device chips, electronic components, etc., a disk-shaped workpiece having a semiconductor wafer, a ceramic substrate, etc. is thinned to a predetermined thickness using a grinding device, a polishing device, etc., and then divided into individual chips, components, etc. using a cutting device, a laser processing device, etc.

[0003] In processing devices such as grinding devices, polishing devices, cutting devices, laser processing devices, etc., in order to remove machining chips generated during processing, the processed workpiece after processing may be cleaned with a cleaning device (for the cleaning device, see, for example, Patent Document 1).

[0004] By the way, not only disk-shaped workpieces but also rectangular plate-shaped workpieces need to be processed and cleaned. As such a rectangular plate-shaped workpiece, there is a rectangular substrate formed by sealing each of a plurality of semiconductor device chips electrically connected to a semiconductor package substrate with a molding resin.

[0005] In a normal cleaning device that performs spin cleaning on a disk-shaped workpiece, for example, the spinner table is rotated while the workpiece is sucked and held by the spinner table, and a cleaning liquid is sprayed from a nozzle disposed on the spinner table, and the nozzle is reciprocated along an arc-shaped path connecting a point on the outer peripheral edge of the spinner table and the center in the radial direction of the spinner table.

[0006] Thereby, substantially the entire circular region on the upper surface of the disk-shaped workpiece is cleaned. That is, the cleaning liquid sprayed from the nozzle can be made to land on substantially the entire circular region on the upper surface of the workpiece simply by reciprocating the nozzle along the arc-shaped path.

[0007] However, when cleaning a rectangular plate-shaped workpiece, if the cleaning process is the same as for a disc-shaped workpiece, there will be a period of time when the cleaning solution hits areas outside the outer edge of the rectangular plate-shaped workpiece. During this time, unnecessary cleaning occurs, meaning that the cleaning solution is wasted.

[0008] Furthermore, when drying a workpiece by spraying air from a nozzle, air sprayed beyond the outer edge of a rectangular plate-shaped workpiece contributes little to drying the workpiece, resulting in wasted air. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] Japanese Patent Publication No. 2015-109381 [Overview of the project] [Problems that the invention aims to solve]

[0010] This invention has been made in view of the aforementioned problems, and aims to reduce the waste of fluids such as cleaning liquid and air that are sprayed and consumed from a nozzle when performing either cleaning or drying, or both. [Means for solving the problem]

[0011] According to one aspect of the present invention, a processing apparatus for performing either or both washing and drying on a plate-shaped, polygonal workpiece is provided, comprising: a holding table having a holding surface for holding the workpiece; a first motor and a rotating shaft fixed to the bottom of the holding table, wherein the first motor rotates the holding table via the rotating shaft; a processing unit having a nozzle for spraying fluid; a nozzle moving mechanism having a second motor, wherein the second motor moves the nozzle in an arc-shaped path including the center of the holding surface in a top view of the holding table, thereby relatively moving the fluid sprayed from the nozzle; and a controller having a memory and a processor, which controls the operation of the rotating drive mechanism and the nozzle moving mechanism, wherein the controller controls the range of movement of the nozzle by the nozzle moving mechanism according to the rotation angle of the holding table, so that the fluid is sprayed onto the workpiece which rotates with the holding table, as the polygonal region in a top view of the workpiece held by the holding surface is set as the workpiece region.

[0012] Preferably, the controller includes an angle coordinate storage unit that stores the coordinates of each of a plurality of angles of the object to be processed in a stationary state held by the holding surface, and a cleaning area calculation unit that calculates the extent of the area to be processed defined by the plurality of angles and a plurality of sides connecting adjacent angles.

[0013] Preferably, the controller rotates the holding table and, by the nozzle moving mechanism, repeatedly moves the fluid ejected from the nozzle back and forth between one of two points located on the outer edge of the area to be treated in the arc-shaped path.

[0014] Preferably, the controller rotates the holding table and moves the fluid ejected from the nozzle along the outer edge of the area to be treated by the nozzle moving mechanism.

[0015] Preferably, the holding surface is polygonal in top view and has a negative pressure transmission region to which negative pressure is transmitted.

[0016] According to another aspect of the present invention, there is a processing method for washing and / or drying a plate-shaped, polygonal workpiece, comprising: a holding step of holding the workpiece on the holding surface of a holding table; and a processing step after the holding step of washing or drying the workpiece by rotating the holding table around a rotation axis whose extension of the axis is perpendicular to the holding surface, and moving a fluid sprayed from a nozzle relatively along an arc-shaped path including the center of the holding surface, wherein the processing step provides a method for controlling the range of movement of the nozzle according to the rotation angle of the holding table so that the fluid is sprayed onto a workpiece area which is a polygonal region of the workpiece held on the holding surface in a top view, and which rotates with the holding table.

[0017] Preferably, the processing step involves rotating the holding table around the axis of rotation and repeatedly moving the fluid ejected from the nozzle back and forth between one of two points located on the outer edge of the area to be processed in the arc-shaped path.

[0018] Preferably, in the processing step, the holding table is rotated and the fluid ejected from the nozzle is moved along the outer edge of the area to be processed. [Effects of the Invention]

[0019] A controller for a processing apparatus according to one aspect of the present invention defines the polygonal region of the workpiece held on the holding surface as the workpiece area in a top view, and controls the rotation drive mechanism and the movement mechanism to inject fluid into the workpiece area, which rotates together with the holding table. Therefore, it is possible to reduce the waste of fluid that is injected and consumed outside the workpiece area from the nozzle.

[0020] In addition, in the processing method according to another aspect of the present invention, fluid is injected within the range of a processing region, which is a polygonal region in a top view of the workpiece held on the holding surface and rotates together with the holding table, in accordance with the rotation angle of the holding table. Therefore, it is possible to reduce the waste of fluid that is injected from the nozzle outside the range of the processing region and consumed.

Brief Description of the Drawings

[0021] [Figure 1] It is a perspective view of a spinner cleaning device. [Figure 2] FIG. 2(A) is a diagram showing an example of injecting pure water from the nozzle, and FIG. 2(B) is a diagram showing an example of injecting air from the nozzle. [Figure 3] It is a flowchart showing a method for processing a workpiece using a spinner cleaning device. [Figure 4] It is a diagram showing a teach step. [Figure 5] It is a diagram showing a holding step. [Figure 6] FIG. 6(A) is a top view of the spinner table when cleaning the entire processing region, and FIG. 6(B) is a top view after a predetermined time from the timing shown in FIG. 6(A). [Figure 7] It is a partial cross-sectional side view when performing cleaning in the processing step. [Figure 8] It is a partial cross-sectional side view when performing drying in the processing step. [Figure 9] FIG. 9(A) is a top view of the spinner table when cleaning a range of a predetermined width from the outer peripheral edge, FIG. 9(B) is a top view after a predetermined time from the timing shown in FIG. 9(A), FIG. 9(C) is a top view after a predetermined time from the timing shown in FIG. 9(B), and FIG. 9(D) is a top view after a predetermined time from the timing shown in FIG. 9(C). [Figure 10] FIG. 10(A) is a top view of a workpiece unit or the like in the processing step, and FIG. 10(B) is a partial cross-sectional side view of a workpiece unit or the like in the processing step. [Figure 11]This diagram illustrates other problems that arise when applying conventional spin cleaning to a rectangular plate-shaped workpiece. [Modes for carrying out the invention]

[0022] (First Embodiment) An embodiment according to one aspect of the present invention will be described with reference to the attached drawings. Figure 1 is a perspective view of a spinner cleaning device (i.e., a processing device) 2. The spinner cleaning device 2 performs either cleaning or drying of the workpiece 11.

[0023] The spinner cleaning device 2 may be integrated with processing equipment such as a grinding device, polishing device, cutting device, or laser processing device, or it may be an independent cleaning device. The X, Y, and Z axes shown in Figure 1 are mutually orthogonal. In this embodiment, the Z axis is substantially parallel to the vertical direction. In Figure 1, some of the components of the spinner cleaning device 2 are shown as functional blocks.

[0024] The spinner cleaning device 2 has a disc-shaped spinner table (holding table) 4. The spinner table 4 includes a disc-shaped frame 6a made of metal. On the upper surface of the frame 6a, a rectangular recess is formed in the radial center of the frame 6a.

[0025] A rectangular porous plate 6b, made of porous ceramics and having approximately the same shape and size as the recess, is fixed to the recess of the frame 6a. A suction source 8, such as a vacuum pump, is connected to the porous plate 6b via a predetermined flow path having a rotary joint or the like.

[0026] The negative pressure generated at the suction source 8 is transmitted to the upper surface of the porous plate 6b (i.e., the negative pressure transmission region). The upper surfaces of the frame 6a and the porous plate 6b are substantially flush, forming a holding surface 4a that is arranged substantially parallel to the XY plane. The object to be processed 11 is held in place by suction at the holding surface 4a, mainly by the negative pressure transmitted to the upper surface of the porous plate 6b.

[0027] In this embodiment, the workpiece 11 is plate-shaped and, in top view, is square (i.e., quadrilateral). However, the workpiece 11 may be a polygon with five or more sides. As will be described in detail later, even if the shape of the workpiece 11 in top view is a polygon such as a triangle, quadrilateral, or pentagon, the waste of fluid consumed during washing and / or drying can be reduced.

[0028] In this embodiment, the statement that the workpiece 11 is polygonal in a top view means that when the workpiece 11, which is held by suction on the holding surface 4a, is viewed from above the holding surface 4a, the workpiece 11 is polygonal.

[0029] The workpiece 11 in this embodiment is a square resin-encapsulated substrate having four sides, each with a predetermined length of 300 mm to 700 mm, and a predetermined thickness of 2 mm to 3 mm. However, the shape and size of the workpiece 11 are not limited to this example.

[0030] The shape and area of ​​the porous plate 6b exposed on the holding surface 4a are approximately the same as the shape and area of ​​the workpiece 11 in a top view. The workpiece 11 is held by suction on the holding surface 4a with its four corners 11a and four sides 11b (see Figure 5) overlapping with the corresponding corners and sides on the porous plate 6b.

[0031] In this embodiment, the workpiece 11 is in direct contact with the porous plate 6b when it is held by suction on the holding surface 4a. However, the workpiece 11 may be transported to the spinner table 4 in the form of a workpiece unit 17 in which the workpiece 11 is supported by a metal ring frame 15 via a circular resin tape 13, and then held by suction on the holding surface 4a via the tape 13 (see Figures 10(A) and 10(B)).

[0032] Multiple (four in Figure 1) pendulum-type claw portions 4b are provided on the outer circumference of the holding surface 4a. The tips of the claw portions 4b, which are located relatively close to the center 4a1 of the holding surface 4a, are pressed against the holding surface 4a by the centrifugal force generated by the rotation of the spinner table 4. When the workpiece unit 17 is held by suction on the holding surface 4a, the ring frame 15 is pressed against by the tips of the claw portions 4b.

[0033] The spinner table 4 is fixed to the disc-shaped table holder 10 in a manner that allows it to be attached to or removed from the table holder 10. For example, the spinner table 4 is fixed to the table holder 10 in a manner that allows it to be attached to or removed from the table holder 10 by (i) negative pressure transmitted from the table holder 10 to the frame 6a, or (ii) the engagement of recesses and / or protrusions provided on the table holder 10 with corresponding protrusions and / or recesses on the spinner table 4.

[0034] The table holder 10 has a smaller diameter than the spinner table 4 and is positioned concentrically with the spinner table 4. The upper part of the cylindrical rotating shaft 12 is fixed to the center of the bottom surface of the table holder 10. In other words, the rotating shaft 12 is fixed to the bottom of the spinner table 4 via the table holder 10 (see Figure 7).

[0035] The longitudinal direction of the rotation axis 12 is positioned approximately parallel to the Z-axis direction, and the extension line 12a of the axis of the rotation axis 12 is perpendicular to the holding surface 4a. When the rotation axis 12 is viewed in the XY plane, the axis of the rotation axis 12 approximately coincides with the centers of the holding surface 4a and the table holding part 10.

[0036] The rotating shaft 12 is rotationally driven by a motor (first motor) 14, such as a servo motor. In other words, the motor 14 rotates the spinner table 4 via the rotating shaft 12. In this embodiment, the output shaft of the motor 14 is fixed to the rotating shaft 12, or the output shaft of the motor 14 is integrally configured with the rotating shaft 12.

[0037] However, an endless belt may be wrapped around a drive pulley fixed to the output shaft of the motor 14 and a driven pulley fixed to the rotating shaft 12 to transmit power from the motor 14 to the rotating shaft 12. The motor 14 is electrically connected to a controller 52, which will be described later, via a driver circuit 16.

[0038] The controller 52 sends a control signal to the driver circuit 16, thereby controlling the rotational speed of the output shaft (i.e., the rotating shaft 12) of the motor 14. The motor 14 also has a built-in rotary encoder (not shown) capable of detecting the rotational speed and rotational angle of the rotating shaft 12.

[0039] The rotating shaft 12, motor 14, driver circuit 16, etc., constitute a rotational drive mechanism 18 for rotating the spinner table 4. For example, when a control signal is input from the controller 52, the driver circuit 16 supplies power to the motor 14 to achieve a rotational speed corresponding to the control signal.

[0040] At this time, the actual rotational speed of the rotating shaft 12 obtained using the rotary encoder is fed back to the driver circuit 16. The driver circuit 16 adjusts the power to the motor 14 so that the actual rotational speed fed back is the same as the rotational speed specified by the controller 52, if it is different from the specified speed.

[0041] In this way, the rotational speed specified by the controller 52 is achieved. The motor 14 is housed in a cylindrical casing. Multiple air cylinders 20 (three in the example shown in Figure 1) are provided around the casing.

[0042] The controller 52 synchronously controls the movement of the piston rods of each air cylinder 20, causing the spinner table 4 to move up and down in the Z-axis direction. For example, when cleaning or drying the workpiece 11, the spinner table 4 is positioned in a predetermined lower position such that the holding surface 4a is below the upper surface of the cylindrical outer cover 22.

[0043] In contrast, when loading or unloading the workpiece unit 17 to and from the spinner table 4, the spinner table 4 is positioned in a predetermined upper position such that the holding surface 4a is located above the upper surface of the cylindrical outer cover 22.

[0044] An outer cover 22 is provided on the radially outer side of the spinner table 4. The outer periphery of an annular bottom plate 24 is fixed to the bottom of the inner circumferential wall of the outer cover 22. The bottom of a cylindrical inner cover 26 is fixed to the inner circumferential part of the bottom plate 24.

[0045] The outer cover 22, bottom plate 24, and inner cover 26 function as an annular water receiving section, where used liquid is temporarily stored. A drain port 24a is provided in a part of the bottom plate 24. A drain hose 24b is connected to the drain port 24a, and the used liquid stored in the water receiving section is discharged through the drain hose 24b.

[0046] In a top view, a different rotation shaft 28 is provided between the spinner table 4 and the outer cover 22, distinct from the rotation shaft 12 described above. The longitudinal portion of the rotation shaft 28 is positioned approximately parallel to the Z-axis direction.

[0047] The base end of the arm 30 is fixed to the upper end of the rotating shaft 28. The longitudinal portion of the arm 30 is positioned perpendicular to the rotating shaft 28. A nozzle 32 is fixed to the tip of the arm 30 so that its nozzle faces directly downwards. The arm 30 and the nozzle 32 constitute the processing unit 34.

[0048] In this embodiment, the nozzle 32 has its nozzle opening facing directly downwards (i.e., downward along the vertical direction), and the orientation of the nozzle opening is approximately perpendicular to the holding surface 4a. Therefore, the fluid (i.e., pure water or air) ejected from the nozzle 32 is ejected approximately perpendicular to the holding surface 4a.

[0049] However, the direction of the nozzle may be slightly tilted with respect to the Z-axis direction. In this case, the range of the injected fluid in the XY plane is controlled according to the flow rate so that the fluid injected from the nozzle 32 does not significantly extend beyond the outer edge 11e (see Figure 6(A)) of the rotating workpiece 11.

[0050] A nozzle moving mechanism 38 for moving the nozzle 32 is provided at the bottom of the rotating shaft 28. The nozzle moving mechanism 38 has a motor (second motor) 38a such as a servo motor or a stepping motor.

[0051] The nozzle movement mechanism 38 includes a driver circuit (not shown) and can pivot the arm 30 and nozzle 32 together within an angular range specified by the controller 52.

[0052] The nozzle movement mechanism 38 moves the fluid ejected from the nozzle 32 relative to the holding surface 4a by, for example, oscillating the nozzle 32 in an arc-shaped path 4a2 within the holding surface 4a, which includes the center 4a1 of the holding surface 4a in a top view of the spinner table 4.

[0053] Furthermore, when the workpiece unit 17 is loaded or unloaded from the spinner table 4, the nozzle moving mechanism 38 operates the motor 38a so that the arm 30 and nozzle 32 are positioned outside the holding surface 4a in the radial direction of the holding surface 4a (see Figure 5).

[0054] By keeping the arm 30 and nozzle 32 stationary outside the holding surface 4a, interference between the spinner table 4, which moves up and down along the Z-axis direction, and the arm 30 and nozzle 32 can be prevented, as can interference between the workpiece unit 17 being loaded and unloaded and the arm 30 and nozzle 32.

[0055] The arm 30 and nozzle 32 are connected to a cleaning fluid supply device 36 and an air supply device 40. In this embodiment, the nozzle 32 can selectively spray one of the following fluids: a cleaning fluid such as pure water, a gas such as dried air, or a gas-liquid mixed fluid (i.e., two fluids) in which the cleaning fluid and air are mixed.

[0056] The cleaning solution includes pure water, an acidic cleaning solution (for example, a mixture of sulfuric acid, hydrochloric acid, or hydrofluoric acid with hydrogen peroxide), and an alkaline cleaning solution (for example, a mixture of aqueous ammonium hydroxide and hydrogen peroxide). Furthermore, the two fluids include pure water containing microbubbles, nanobubbles, etc., and are used for cleaning purposes, not drying.

[0057] The cleaning fluid supply device 36 and the air supply device 40 are usually provided in sets of one per factory or one per building, but one set may be provided for one spinner cleaning device 2.

[0058] The cleaning solution supply device 36 includes a storage tank (not shown) for storing liquids such as pure water, acidic cleaning solution, and alkaline cleaning solution, and a pump (not shown) for sending the liquid from the storage tank to the nozzle 32. The air supply device 40 includes a compressor (not shown) for taking in and compressing air, a tank (not shown) for storing the compressed air, and a filter for removing dust and other debris.

[0059] Figure 2(A) shows an example in which pure water is sprayed as cleaning fluid 32a from the nozzle 32, and Figure 2(B) shows an example in which air 32b is sprayed from the nozzle 32. As shown in Figures 2(A) and 2(B), a first solenoid valve 44 is provided in the first flow path 42a connecting the nozzle 32 and the cleaning fluid supply device 36.

[0060] Furthermore, a second solenoid valve 46 is provided in the second flow path 42b connecting the nozzle 32 and the air supply device 40. The opening and closing of the first solenoid valve 44 and the second solenoid valve 46 are controlled by the controller 52.

[0061] As shown in Figure 2(A), by opening the first solenoid valve 44 and closing the second solenoid valve 46, cleaning fluid 32a is sprayed from the nozzle 32, and as shown in Figure 2(B), by closing the first solenoid valve 44 and opening the second solenoid valve 46, air 32b is sprayed from the nozzle 32.

[0062] Although not shown in the diagram, by opening both the first solenoid valve 44 and the second solenoid valve 46, a gas-liquid mixed fluid, such as a mixture of pure water and air, is injected from the nozzle 32.

[0063] Now, let's return to Figure 1. In this embodiment, a camera unit 48 is provided above the spinner table 4. The camera unit 48 is movable along the Z-axis direction and a predetermined direction along the XY plane by an actuator (not shown) controlled by a controller 52.

[0064] The camera unit 48 is used, for example, to display the washing and drying process on a display device (not shown). The camera unit 48 may also be used to specify the area 11d (see Figure 5) to be washed or dried on the workpiece 11. Note that the camera unit 48 is not essential in the spinner washing device 2 and may be omitted.

[0065] The spinner cleaning device 2 has an exterior panel (not shown). A touch panel display 50 (see Figure 4) is provided on one side of the exterior panel. The touch panel display 50 functions as a display device that shows images obtained by the camera unit 48, a GUI (Graphical User Interface), processing conditions, etc., and also functions as an input device for the operator to input instructions.

[0066] Before processing the workpiece 11, such as washing and drying, the operator selects a spinner table 4 whose size and shape correspond to (for example, match) the size and shape of the porous plate 6b exposed on the holding surface 4a, and mounts it on the table holding unit 10.

[0067] Subsequently, the operator sets the size and shape of the workpiece 11 and the holding surface 4a, respectively, to the controller 52 via the touch panel display 50. This performs teaching (also called teaching) to set the initial positions of the spinner table 4 and the workpiece 11 to the spinner cleaning device 2.

[0068] This teaching mechanism allows the controller 52 to track the positions of the corners 11a and edges 11b (see Figure 5) of the workpiece 11 in real time, even as the spinner table 4 rotates. The controller 52 can also predict the positions of the corners 11a and edges 11b of the workpiece 11 at any given time, according to the rotation speed.

[0069] When the operator replaces the spinner table 4 in order to change the size and shape of the workpiece 11, the operator resets the size and shape of the workpiece 11 and the spinner table 4 to the controller 52 by performing a teach operation again via the touch panel display 50.

[0070] Alternatively, instead of the touch panel display 50, a display device that does not have input functionality may be provided in the spinner cleaning device 2. However, in this case, an input device (keyboard, mouse, trackball, touchpad, digitizer, etc.) for the operator to input instructions to the spinner cleaning device 2 will be provided separately.

[0071] The operation of the spinner cleaning device 2, which includes the rotation drive mechanism 18 and the nozzle moving mechanism 38, is controlled by a controller 52. The controller 52 is composed of a computer having, for example, a processor 52a, represented by a CPU (Central Processing Unit), and memory 52b.

[0072] Memory 52b includes main memory such as DRAM (Dynamic Random Access Memory) and auxiliary storage such as flash memory, hard disk drive, and solid-state drive. Software, including a predetermined program, is stored in the auxiliary storage.

[0073] The functions of the controller 52 are realized by operating the processor 52a and other components according to this software. The program executed by the processor 52a may be stored on a non-temporary tangible recording medium such as a USB (Universal Serial Bus) memory, optical disk, SD memory card, or HDD (hard disk drive) instead of the auxiliary storage device.

[0074] Next, with reference to Figures 3 to 7, a method for processing the workpiece 11 using the spinner cleaning device 2 will be described. In the example shown in Figures 3 to 7, the workpiece 11 is in direct contact with the holding surface 4a and is held in place by suction from the holding surface 4a.

[0075] Figure 3 is a flowchart showing a method for processing an object 11 using a spinner cleaning device 2. The processing method in this embodiment includes a teach step S10, a holding step S20, a processing step S30, and judgment steps S40 and S50, but may also include a table exchange step S60 in some cases.

[0076] Figure 4 shows the teach process S10. In the teach process S10, the operator sets the size and shape of the workpiece 11 and the spinner table 4 to the controller 52 via the touch panel display 50.

[0077] In this embodiment, the shape of the workpiece 11 held by the holding surface 4a when viewed from above is approximately square, and the shape of the porous plate 6b (i.e., negative pressure transmission region) exposed on the holding surface 4a of the spinner table 4 is also approximately square, with a size approximately the same as the workpiece 11.

[0078] Therefore, by adjusting the orientation and position of the workpiece 11 in the XY plane, the workpiece 11 and the porous plate 6b can be almost completely superimposed. In the example shown in Figure 4, both the workpiece 11 and the negative pressure transmission region are square in top view, with each side measuring 300 mm.

[0079] However, the shape and size of the workpiece 11 and the negative pressure transmission area in a top view are not limited to this example. The shape of the workpiece 11 and the shape of the negative pressure transmission area in a top view may both be rectangles or polygons of the same size.

[0080] After the teaching process S10, the holding process S20 is performed. Figure 5 shows the holding process S20. In the holding process S20, for example, a transport unit (not shown) having a suction pad or the like places the workpiece 11 on the holding surface 4a of a spinner table 4 positioned at a predetermined position above by an air cylinder 20.

[0081] At this time, the transport unit places the object to be processed 11 on the holding surface 4a such that the object to be processed 11 and the negative pressure transmission area overlap almost completely. Specifically, the transport unit places the object to be processed 11 on the holding surface 4a such that the four corners of the object to be processed 11 roughly coincide with the four corners of the negative pressure transmission area in the XY plane, and the center 11c of the object to be processed 11 roughly coincides with the center 4a1 of the holding surface 4a.

[0082] Then, by transmitting negative pressure to the porous plate 6b, the object to be processed 11 is held in place by suction at the holding surface 4a. The controller 52 uses the rotary encoder or the like mentioned above to pre-determine the coordinates of the four corners of the negative pressure transmission area before rotation begins.

[0083] Therefore, if the object to be processed 11 and the negative pressure transmission area overlap almost completely, the controller 52 can determine the coordinates of the four corners (i.e., each of the multiple corners 11a) of the object to be processed 11 in a stationary state held by the holding surface 4a. Part of the memory 52b of the controller 52 functions as a corner coordinate storage unit 52c and stores the coordinates of these four corners.

[0084] Incidentally, in the object to be processed 11, two adjacent angles 11a that are separated by the shortest distance are connected by an edge 11b. The area to be processed 11d is defined by the four (i.e., multiple) angles 11a and the four (i.e., multiple) edges 11b.

[0085] When the program stored in memory 52b is executed by processor 52a, the program functions as a cleaning area calculation unit 52d that calculates the area to be processed 11d in the XY plane. For example, the cleaning area calculation unit 52d calculates the area to be processed 11d, which changes moment by moment as the spinner table 4 rotates.

[0086] When the object to be processed 11 is held by the holding surface 4a with suction while the object to be processed 11 and the negative pressure transmission area are almost completely overlapping, the cleaning area calculation unit 52d treats the square (i.e., polygonal) area that defines the entire object to be processed 11 as seen from above while held by the holding surface 4a as the processing area 11d.

[0087] In this way, the processing area 11d is set. Alternatively, the processing area 11d may be set by using the camera unit 48 to image the object 11 being held by suction on the holding surface 4a, thereby identifying the range of the object 11 in the XY plane.

[0088] In this case, the coordinates of the four corners of the object to be processed 11, which have been identified through imaging, are stored in the corner coordinate storage unit 52c. The coordinates of the area to be processed 11d are, for example, an XY coordinate system with the center 4a1 of the holding surface 4a as the origin, but the origin is not limited to the center 4a1 of the holding surface 4a.

[0089] Since the controller 52 has an angle coordinate storage unit 52c and a cleaning area calculation unit 52d, it can determine the XY coordinates of each angle 11a according to the rotation angle θ of the spinner table 4. For example, the XY coordinates of each angle 11a can be determined in real time according to the rotation speed of the spinner table 4 (i.e., the rotation angle per unit time).

[0090] Furthermore, if the rotational speed of the spinner table 4 is predetermined, the controller 52 may predict and calculate the XY coordinates of each angle 11a at each time point within a predetermined time interval (for example, several tens of milliseconds).

[0091] In any case, the controller 52 can determine the current location of the corners 11a and sides 11b of the processing area 11d on the rotating spinner table 4. Knowing the processing area 11d at any given time is used in the processing step S30 described later to reduce the amount of fluid wasted outside the processing area 11d.

[0092] After the holding step S20, the processing step S30 is started. Figures 6(A) to 7 illustrate the case where the workpiece 11 is washed with the cleaning solution 32a in the processing step S30. However, the movement of the nozzle 32 is substantially the same even when the workpiece 11 is dried with air 32b in the processing step S30 (see Figure 8).

[0093] In processing step S30, the rotation of the spinner table 4 and the injection of fluid from the nozzle 32 are initiated. Figure 6(A) is a top view of the spinner table 4 when cleaning is performed on the entire area to be processed 11d.

[0094] As shown in Figure 6(A), the workpiece 11 is cleaned with cleaning solution 32a while the spinner table 4 is rotated in a predetermined direction around the rotation axis 12. The cleaning is performed by relatively moving the cleaning solution 32a sprayed from the nozzle 32 along an arc-shaped path 4a2.

[0095] In processing step S30, the controller 52 controls the range of movement of the nozzle 32 by the nozzle movement mechanism 38 according to the rotation angle of the spinner table 4, so as the area to be processed 11d is set, the cleaning liquid 32a (i.e., fluid) is sprayed onto the area to be processed 11d which rotates together with the spinner table 4.

[0096] In particular, the controller 52 rotates the spinner table 4 and, using the nozzle moving mechanism 38, repeatedly moves the cleaning liquid 32a (i.e., fluid) sprayed from the nozzle 32 back and forth between one point 11e1 and the other point 11e2 of two points located on the outer edge 11e of the area to be treated 11d in the arc-shaped path 4a2.

[0097] In this embodiment, the positions of point 11e1 and point 11e2 on the path 4a2 change moment by moment as the spinner table 4 rotates, but the position of the nozzle 32 is limited to an arc-shaped range on the path 4a2 from point 11e1 through the center 11c to point 11e2.

[0098] In other words, the nozzle 32 does not move back and forth at high speed within an arc-shaped area from point 11e1 to point 11e2 as shown in Figure 6(A). Instead, the area to which the cleaning liquid 32a sprayed from the nozzle 32 lands is limited to an arc-shaped area within the path 4a2 from point 11e1 through the center 11c to point 11e2, although its length changes moment by moment.

[0099] More specifically, the nozzle 32 moves back and forth within an arc-shaped range from one point 11e1 to another point 11e2, but when it approaches the vicinity of point 11e1 (or point 11e2), the movement of the nozzle 32 is controlled so that the cleaning liquid 32a does not significantly extend beyond point 11e1 (or point 11e2).

[0100] For example, the movement of the nozzle 32 does not completely exceed one point 11e1 (or another point 11e2). Therefore, while cleaning the entire area to be treated 11d, it is possible to reduce the waste of cleaning liquid 32a that is sprayed from the nozzle 32 outside the range of the area to be treated 11d and consumed. An example of cleaning conditions is shown below.

[0101] Washing solution flow rate: 1 L / min to 2 L / min Nozzle movement speed: 20 mm / s Spinner table rotation speed: 100 rpm to 1000 rpm (For example, 800 rpm) Washing time: 30s to 90s (for example, 60s)

[0102] Figure 6(B) is a top view taken a predetermined time after the timing shown in Figure 6(A). As shown in Figure 6(B), the range of movement of the nozzle 32 (i.e., the range in which the fluid sprayed from the nozzle 32 is supplied) is controlled by the controller 52 so that it is between one point 11e1 and another point 11e2 on the arc-shaped 4a2. Figure 7 is a partial cross-sectional side view when cleaning is performed in the processing step S30.

[0103] Furthermore, not all of the cleaning liquid 32a (i.e., fluid) sprayed from the nozzle 32 is necessarily supplied to the area to be treated 11d; a small amount of the cleaning liquid 32a may be supplied to the holding surface 4a outside the area to be treated 11d.

[0104] However, in this embodiment, by controlling the movement of the nozzle 32 as described above, it is possible to reduce the waste of cleaning liquid 32a (i.e., fluid) that is sprayed from the nozzle 32 outside the range of the area to be treated 11d and consumed, compared to the case where the nozzle 32 is moved back and forth between the ends of a circular arc of a fixed length without controlling its movement.

[0105] If, after processing step S30, another workpiece 11 having the same shape and size is to be processed (i.e., YES in S40), the process proceeds to holding step S20. In this holding step S20, the workpiece 11 that was held by the holding surface 4a is removed, and another workpiece 11 having the same shape and size is held by the holding surface 4a. Then, the process proceeds to processing step S30.

[0106] In contrast, if, after processing step S30, another workpiece 11 having the same shape and size is not processed (i.e., NO in S40), the process proceeds to decision step S50. If, in decision step S50, another workpiece 11 with a different shape or size is not processed (i.e., NO in S50), the process ends.

[0107] In contrast, in the decision step S50, if the workpiece 11 of a different shape or size is to be processed (i.e., YES in S50), the spinner table 4 being used is replaced with a spinner table 4 that matches the shape and size of the workpiece 11 (table replacement step S60). Then, the process returns to the teach step S10.

[0108] By the way, in processing step S30, (A) washing with cleaning solution 32a only may be performed, (B) drying with air 32b only may be performed, or (C) washing with cleaning solution 32a followed by drying with air 32b may be performed.

[0109] Figure 8 is a partial cross-sectional side view when drying is performed in processing step S30. For example, in processing step S30, washing and drying are performed sequentially in order to dry with air 32b after washing with washing solution 32a.

[0110] Furthermore, the order is not limited to washing and drying; drying may be performed sequentially on each of the multiple objects to be processed 11. In this case, only drying is performed in processing step S30. In this case as well, the teaching step S10, holding step S20, processing step S30, etc., shown in Figure 1 are performed in order.

[0111] When air 32b is injected from nozzle 32, similar to Figures 6(A) and 6(B), the air 32b injected from nozzle 32 is moved relatively between point 11e1 and point 11e2 in the arc-shaped path 4a2 to dry the workpiece 11.

[0112] In particular, the controller 52 rotates the spinner table 4 in a predetermined direction and, using the nozzle moving mechanism 38, repeatedly moves the air 32b (i.e., fluid) ejected from the nozzle 32 back and forth between one point 11e1 and another point 11e2 in an arc-shaped path 4a2.

[0113] In other words, even when drying is performed in this manner, the operating range of the nozzle 32 is controlled so that the air 32b does not significantly extend beyond point 11e1 and point 11e2. For example, the movement of the nozzle 32 does not completely exceed point 11e1 and point 11e2.

[0114] Therefore, while drying the entire area 11d to be treated, it is possible to reduce the waste of air 32b that is sprayed from the nozzle 32 outside the area 11d to be treated. An example of drying conditions is shown below.

[0115] Air flow rate: 200 mL / min to 300 mL / min Air supply pressure: 0.3 MPa Nozzle movement speed: 20 mm / s Spinner table rotation speed: 1500 rpm to 3000 rpm (For example, 2000 rpm) Washing time: 30s to 90s (for example, 60s)

[0116] In this embodiment, the waste of the cleaning solution 32a and air 32b consumed can be reduced, and consequently, the wasted cleaning time and drying time can also be reduced.

[0117] (Second Embodiment) Next, a second embodiment will be described with reference to Figures 9(A) to 9(D). In processing step S30 of the second embodiment, the nozzle 32 is moved along the outer edge 11e of the area to be processed 11d. This point differs from the first embodiment, but other points are the same as in the first embodiment, so redundant explanations will be omitted.

[0118] The controller 52 rotates the spinner table 4 in a predetermined direction using the rotary drive mechanism 18, and moves the cleaning liquid 32a sprayed from the nozzle 32 along the outer edge 11e of the area to be treated using the nozzle moving mechanism 38.

[0119] In this embodiment as well, since the nozzle 32's nozzle is facing directly downwards, in the processing step S30, the nozzle 32 moves along the outer edge 11e, directly above a predetermined width range from the outer edge 11e to a range closer to the center 11c than the outer edge 11e.

[0120] An example of cleaning conditions when cleaning the workpiece 11 along its outer edge 11e in processing step S30 is shown below. The position of the nozzle 32 is adjusted as appropriate according to the rotation angle of the spinner table 4 and the workpiece 11.

[0121] Washing solution flow rate: 1 L / min to 2 L / min Spinner table rotation speed: 1 rpm to 5 rpm (For example, 2.7 rpm) Washing time: 12 to 60 seconds (for example, approximately 22 seconds)

[0122] Figure 9(A) is a top view of the spinner table 4 when cleaning is performed on a predetermined width range from the outer edge 11e to a range closer to the center 11c than the outer edge 11e, and Figure 9(B) is a top view taken a predetermined time (Δt) after the timing shown in Figure 9(A).

[0123] Figure 9(C) is a top view taken a predetermined time (Δt) after the timing shown in Figure 9(B), and Figure 9(D) is a top view taken a predetermined time (Δt) after the timing shown in Figure 9(C). For the sake of explanation, the movement trajectory of the nozzle 32 is shown with a dashed line in Figures 9(B) to 9(D).

[0124] By the way, when drying the outer edge 11e of the workpiece 11 by moving the air 32b sprayed from the nozzle 32 along the outer edge 11e of the workpiece 11d, it is preferable that the nozzle 32 moves directly above the outer edge 11e and also supplies air 32b to the area outside the outer edge 11e of the workpiece 11.

[0125] Since the opening of the nozzle 32 has a finite size, if the center of the opening of the nozzle 32 is positioned directly above the outer edge 11e of the workpiece 11, a portion of the air 32b ejected from the nozzle 32 will always be supplied to an area outside the outer edge 11e.

[0126] When the object to be processed 11 is relatively thick (for example, the thickness of the object to be processed 11 is 1.0 mm or more), the cleaning liquid 32a tends to remain in the space defined by the side surface of the object to be processed 11 that defines each side 11b and the holding surface 4a.

[0127] Therefore, in processing step S30, after cleaning the entire area 11d to be processed or the outer edge 11e of the object to be processed 11 with cleaning solution 32a, the nozzle 32 is then moved along the outer edge 11e while air 32b is supplied from the nozzle 32 to a point slightly outside the outer edge 11e.

[0128] This effectively removes the cleaning solution 32a remaining in the space defined by the side surface of the workpiece 11 and the holding surface 4a. An example of the drying conditions in the processing step S30 in this case is shown below. The position of the nozzle 32 is adjusted as appropriate according to the rotation angle of the spinner table 4 and the workpiece 11.

[0129] Air flow rate: 200 mL / min to 300 mL / min Air supply pressure: 0.3 MPa Spinner table rotation speed: 1 rpm to 5 rpm (For example, 2.7 rpm) Washing time: 12 to 60 seconds (for example, approximately 22 seconds)

[0130] (Modifications) Next, modifications of the first and second embodiments will be described with reference to Figures 10(A) and 10(B). Figure 10(A) is a top view of the workpiece unit 17 etc. in processing step S30, and Figure 10(B) is a partial cross-sectional side view of the workpiece unit 17 etc. in processing step S30.

[0131] The workpiece unit 17 comprises a workpiece 11, a tape 13, and a ring frame 15, with the workpiece 11 being supported by the ring frame 15 via the tape 13. In the holding process S20, the workpiece 11 is held by suction at the holding surface 4a via the tape 13.

[0132] In the subsequent processing step S30, when the spinner table 4 rotates at a predetermined speed or higher, the tip of the claw portion 4b, which is located relatively close to the center 4a1 of the holding surface 4a, is pressed toward the holding surface 4a by centrifugal force. Except for this point, the process is the same as in the first and second embodiments.

[0133] (Related Technology) Next, referring to Figure 11, we will explain the problem when the object to be processed 11, which is held by suction on the holding surface 4a, is in the shape of a polygonal plate, and the nozzle 32 is simply moved back and forth along an arc-shaped path 4a2 that includes the center 4a1 of the holding surface 4a.

[0134] One problem, as mentioned above, is the waste of cleaning fluid 32a and air 32b that are sprayed from the nozzle 32 outside the range of the area to be treated 11d. Figure 11 illustrates another problem when performing normal spin cleaning on a rectangular plate-shaped object to be treated 11.

[0135] As shown in Figure 11, the nozzle 32 follows, for example, an arc-shaped path 4a with the center 4a1 of the holding surface 4a as the midpoint of the path. 2A , or (B) the center 4a1 of the holding surface 4a and the arc-shaped path 4a 2A A short arc-shaped path 4a connecting to a predetermined position. 2B It oscillates along the line.

[0136] In this case, as the spinner table 4 rotates, the fluid (cleaning liquid 32a, air 32b, etc.) ejected from the nozzle 32 is sprayed within the circular area indicated by the dashed line. In Figure 11, the position where the circle indicated by the dashed line intersects with the object to be processed 11 is marked with an "x".

[0137] At the positions marked with an "x", the fluid is injected so as to intersect with the outer edge 11e of the workpiece 11. As the fluid injected from the nozzle 32 moves from outside to inside or from inside to outside the outer edge 11e, the outer edge 11e may be damaged, potentially causing chipping or other damage to the outer edge 11e.

[0138] In contrast, in the above-described embodiment and modifications, the entire area to be treated 11d can be treated with washing, drying, and other processes, and since the fluid is not sprayed across the outer edge 11e of the object to be treated 11, damage to the outer edge 11e can be reduced.

[0139] Furthermore, the structures, methods, etc., according to the above embodiments can be modified as appropriate without departing from the scope of the object of the present invention. For example, in the holding step S20, instead of a transport unit having a suction pad or the like, an operator may place the workpiece 11 on the holding surface 4a.

[0140] Furthermore, if the negative pressure transmission area on the holding surface 4a is circular, the workpiece 11 can be held by suction on the holding surface 4a in the form of the workpiece unit 17, thereby enabling the cleaning, drying, and other processes described in the first and second embodiments.

[0141] Furthermore, although the above-described embodiment described the case in which air 32b is used as the fluid for drying in the processing step S30, other gases such as nitrogen (N2) may be used instead. [Explanation of Symbols]

[0142] 2: Spinner cleaning device (treatment device) 4: Spinner table (holding table), 4a: Holding surface 4a1:center, 4a2,4a 2A ,4a 2B :pathway, 4b:claw part 6a: Frame, 6b: Porous board 8: Suction source, 10: Table holder 11: Processed object, 11a: Corner, 11b: Side, 11c: Center 11d: Processed area, 11e: Outer edge, 11e1: One point, 11e2: Other points 12: axis of rotation, 12a: extension line 13: Tape, 15: Ring frame, 17: Workpiece unit 14: Motor (first motor), 16: Driver circuit, 18: Rotary drive mechanism 20: Air Cylinder 22: Outer cover, 24: Bottom plate, 24a: Drain port, 24b: Drain hose, 26: Inner cover 28: Rotating axis, 30: Arm, 32: Nozzle 32a: Cleaning solution, 32b: Air, 34: Processing unit 36: Cleaning fluid supply device 38: Nozzle movement mechanism, 38a: Motor (second motor) 40: Air supply device 42a: First channel, 42b: Second channel 44: First solenoid valve, 46: Second solenoid valve 48: Camera unit, 50: Touch panel display 52: Controller, 52a: Processor, 52b: Memory 52c: Corner coordinate storage unit, 52d: Cleaning area calculation unit S10: Teaching process, S20: Holding process, S30: Processing process S40: Decision-making process, S50: Decision-making process, S60: Table exchange process

Claims

1. A processing apparatus for performing either washing and / or drying on a plate-shaped, polygonal workpiece, A holding table having a holding surface for holding the object to be processed, A rotational drive mechanism comprising a first motor and a rotating shaft fixed to the bottom of the holding table, wherein the first motor rotates the holding table via the rotating shaft, A processing unit having a nozzle for injecting fluid, A nozzle moving mechanism having a second motor, which moves the nozzle in an arc-shaped path including the center of the holding surface in a top view of the holding table, thereby allowing the fluid ejected from the nozzle to move relative to it. A controller having memory and a processor, which controls the operation of the rotary drive mechanism and the nozzle moving mechanism, Equipped with, The processing apparatus is characterized in that the controller controls the range of movement of the nozzle by the nozzle movement mechanism according to the rotation angle of the holding table, so that the processing area is sprayed onto the processing area, which rotates together with the holding table, as the polygonal region of the workpiece held on the holding surface in a top view is set as the processing area.

2. The controller is, An angle coordinate storage unit that stores the coordinates of each of the multiple corners of the object to be processed in a stationary state held by the holding surface, The apparatus according to claim 1, comprising a cleaning area calculation unit that calculates the range of the area to be treated, defined by the plurality of corners and the plurality of sides connecting adjacent corners.

3. The controller is, The apparatus according to claim 1 or 2, characterized in that the holding table is rotated and the nozzle moving mechanism repeatedly moves the fluid ejected from the nozzle back and forth between one of two points located on the outer edge of the area to be processed in the arc-shaped path and the other point.

4. The controller is, The apparatus according to claim 1 or 2, characterized in that the holding table is rotated and the nozzle moving mechanism moves the fluid ejected from the nozzle along the outer edge of the area to be processed.

5. The apparatus according to claim 1 or 2, characterized in that the holding surface is polygonal in top view and has a negative pressure transmission region to which negative pressure is transmitted.

6. A processing method for a plate-shaped, polygonal object to be processed, comprising washing and / or drying, A holding step in which the object to be processed is held on the holding surface of the holding table, After the holding step, a processing step is performed to wash or dry the workpiece by rotating the holding table around a rotation axis whose extension line of the axis is perpendicular to the holding surface, while relatively moving the fluid sprayed from the nozzle along an arc-shaped path including the center of the holding surface. Equipped with, The processing step is characterized by controlling the range of movement of the nozzle according to the rotation angle of the holding table so that the fluid is injected into the processing area, which is a polygonal region of the object to be processed when viewed from above and held by the holding surface, and which rotates together with the holding table.

7. The processing method according to claim 6, characterized in that the processing step involves rotating the holding table around the rotation axis and repeatedly moving the fluid ejected from the nozzle back and forth between one of two points located on the outer edge of the area to be processed in the arc-shaped path.

8. The processing method according to claim 6, characterized in that the holding table is rotated during the processing step, and the fluid ejected from the nozzle is moved along the outer edge of the area to be processed.

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