Gas generator

Abstract

This invention provides a gas generator that can improve cooling efficiency and gas generation efficiency by increasing the degree of freedom in arranging the refrigerant flow path. [Solution] The gas generator 1 comprises a first electrode 7, a second electrode 9, a discharge space 12 formed between the first electrode 7 and the second electrode 9 where a generated gas is produced from a material gas when a voltage is applied, a base member 3 that holds the second electrode 9, a cable insertion passage 13 through which a cable C for supplying power to the second electrode 9 is inserted, and a refrigerant flow path 14 through which a cooling medium is supplied to cool the second electrode 9 held by the base member 3. The refrigerant flow path 14 is arranged inside the base member 3 so as to sandwich the cable insertion passage 13 from both sides in the thickness direction of the base member 3.

Description

Technical Field

[0001] The present invention relates to a gas generation device that generates a generated gas (for example, ozone gas) from a material gas by generating a discharge between electrodes, and particularly relates to a technique for improving gas generation efficiency.

Background Art

[0002] Conventionally, devices that generate a generated gas (for example, ozone gas) from a material gas by generating a discharge between electrodes have been proposed. For example, in a conventional ozone generation device, a structure of a discharge body that can generate ozone with high efficiency and generate high-concentration ozone has been proposed. In a conventional gas generation device, in order to improve the generation efficiency of ozone gas, a refrigerant flow path is provided inside a holding plate of a high-voltage electrode and inside a low-voltage electrode (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in a conventional device, a flow path for a material gas of ozone gas and a flow path for the generated ozone gas are arranged inside a low-voltage electrode. When arranging a refrigerant flow path inside the low-voltage electrode, it is necessary to arrange it at a position avoiding those flow paths. In addition, a cable for supplying power to the high-voltage electrode is arranged inside the holding plate of the high-voltage electrode. When arranging a refrigerant flow path inside the high-voltage electrode, it is necessary to arrange it at a position avoiding the cable. That is, the degree of freedom in arranging the refrigerant flow path is low, and there is a limit to improving the cooling efficiency. Therefore, there has been a demand for the development of a technique for improving the cooling efficiency and gas generation efficiency as compared with the prior art.

[0005] The present invention has been made in view of the above problems, and aims to provide a gas generator that can improve cooling efficiency and gas generation efficiency by increasing the degree of freedom in arranging the refrigerant flow path. [Means for solving the problem]

[0006] The gas generator of the present invention comprises: a first electrode having a first electrode surface; a second electrode having a second electrode surface facing the first electrode surface; a discharge space formed between the first electrode surface and the second electrode surface, through which a generated gas is produced from a material gas when a voltage is applied; a base member positioned on the opposite side from the first electrode with respect to the second electrode and holding the second electrode; a cable insertion passage provided inside the base member through which a cable for supplying power to the second electrode is inserted; and a refrigerant flow path provided inside the base member for supplying a cooling medium to cool the second electrode held by the base member, wherein the refrigerant flow path is positioned to sandwich the cable insertion passage from both sides in the thickness direction of the base member.

[0007] In this configuration, the refrigerant flow path is arranged so as to sandwich the cable insertion passage from both sides in the thickness direction of the base member. That is, in the thickness direction of the base member, the refrigerant flow path is not positioned on the same plane as the cable insertion passage. Therefore, the refrigerant flow path can be freely positioned inside the base member without being obstructed by the cable insertion passage (increasing the degree of freedom in the arrangement of the refrigerant flow path inside the base member). In this way, it becomes possible to position the refrigerant flow path in a location with high cooling efficiency inside the base member, thereby improving the cooling efficiency of the base member (and the second electrode held in the base member). As a result, the gas generation efficiency of the gas generator is improved.

[0008] Furthermore, in the gas generator of the present invention, the refrigerant flow path may be configured to branch into a plurality of branched flow paths inside the base member.

[0009] With this configuration, the base member can be cooled by multiple branched channels created by splitting the refrigerant flow path. In this case, if the pressure loss in each branched channel is configured to be equal, the cooling medium can be supplied evenly to each branched channel, making it possible to uniformly cool the base member (and the second electrode held in the base member). This improves the gas generation efficiency of the gas generator.

[0010] Furthermore, in the gas generator of the present invention, the refrigerant flow path is arranged so as to sandwich the cable insertion passage from both sides in the thickness direction of the base member, and the base member may be manufactured by manufacturing the base member with a metal 3D printer, or by laminating the metal member provided with the refrigerant flow path and the metal member provided with the cable insertion passage by diffusion bonding.

[0011] With this configuration, a base member with a complex internal structure (a base member in which refrigerant flow paths are arranged so as to sandwich the cable insertion passage from both sides in the thickness direction of the base member) can be easily manufactured using a metal 3D printer or diffusion bonding.

[0012] The gas generator of the present invention comprises a first electrode having a first electrode surface, a second electrode having a second electrode surface facing the first electrode surface, a discharge space formed between the first electrode surface and the second electrode surface, a material gas supply passage provided inside the first electrode for supplying a material gas to the discharge space, a generated gas discharge passage provided inside the first electrode for discharging a generated gas produced from the material gas when a voltage is applied between the first electrode surface and the second electrode surface and a discharge occurs in the discharge space, and a refrigerant flow path provided inside the first electrode for supplying a cooling medium to cool the first electrode, wherein the refrigerant flow path is arranged to sandwich the material gas supply passage and the generated gas discharge passage from both sides in the thickness direction of the first electrode.

[0013] In this configuration, the refrigerant flow path is arranged so as to sandwich the material gas supply path and the generated gas discharge path from both sides in the thickness direction of the first electrode. That is, in the thickness direction of the first electrode, the refrigerant flow path is not located on the same plane as the material gas supply path and the generated gas discharge path. Therefore, the refrigerant flow path can be freely arranged inside the first electrode without being obstructed by the material gas supply path and the generated gas discharge path (increasing the degree of freedom in the arrangement of the refrigerant flow path inside the first electrode). In this way, it becomes possible to place the refrigerant flow path in a position with high cooling efficiency inside the first electrode, thereby improving the cooling efficiency of the first electrode. As a result, the gas generation efficiency of the gas generator is improved.

[0014] Furthermore, in the gas generator of the present invention, the refrigerant flow path may be configured to branch into a plurality of branched flow paths inside the first electrode.

[0015] With this configuration, the first electrode can be cooled by multiple branched channels created by splitting the refrigerant flow path. In this case, if the pressure loss in each branched channel is configured to be equal, the cooling medium can be supplied evenly to each branched channel, making it possible to cool the first electrode uniformly. This improves the gas generation efficiency of the gas generator.

[0016] Furthermore, in the gas generator of the present invention, the refrigerant flow path is arranged so as to sandwich the material gas supply path and the generated gas delivery path from both sides in the thickness direction of the first electrode. The first electrode may be manufactured by manufacturing the first electrode with a metal 3D printer, or by laminating a metal member provided with the refrigerant flow path and a metal member provided with the material gas supply path and the generated gas delivery path by diffusion bonding.

[0017] With this configuration, a first electrode with a complex internal structure (a first electrode in which refrigerant flow paths are arranged so as to sandwich the material gas supply path and the generated gas discharge path from both sides in the thickness direction of the first electrode) can be easily manufactured by using a metal 3D printer or diffusion bonding. [Effects of the Invention]

[0018] According to the present invention, by increasing the degree of freedom in the arrangement of the refrigerant flow path, the cooling efficiency can be improved, and the gas generation efficiency can be improved.

Brief Description of the Drawings

[0019] [Figure 1] It is a perspective view of a gas generator in an embodiment of the present invention. [Figure 2] It is an explanatory view (side sectional view) showing the internal structure of the gas generator. [Figure 3] It is an explanatory view (side sectional view) of the base member of the gas generator. [Figure 4] It is an explanatory view (side sectional view) showing the laminated structure of the base member of the gas generator. [Figure 5] It is an explanatory view of the refrigerant flow path of the base member of the gas generator. [Figure 6] It is a view showing another example of the refrigerant flow path. [Figure 7] It is an explanatory view (side sectional view) of the first electrode of the gas generator. [Figure 8] It is an explanatory view (side sectional view) showing the laminated structure of the first electrode of the gas generator. [Figure 9] It is an explanatory view of the refrigerant flow path of the first electrode of the gas generator.

Embodiments for Carrying Out the Invention

[0020] Hereinafter, the gas generator according to the embodiment of the present invention will be described with reference to the drawings. In this embodiment, the case of a gas generator (ozone gas generator) used for generating ozone gas will be exemplified.

[0021] The configuration of the gas generator according to an embodiment of the present invention will be described with reference to the drawings. Figure 1 is a perspective view of the gas generator according to this embodiment, and Figure 2 is an explanatory diagram (side cross-sectional view) showing the internal structure of the gas generator. As shown in Figures 1 and 2, the gas generator 1 comprises a disc-shaped central member 2 positioned in the center of the device, and disc-shaped base members 3 positioned outside the central member 2 so as to sandwich the central member 2 from both sides.

[0022] The central member 2 is provided with a material gas supply port 5 for supplying ozone gas material gas (a gas containing oxygen) and a generated gas outlet 6 for discharging ozone gas generated from the material gas. Inside the central member 2, a disc-shaped first electrode 7 is provided (see Figure 2). The first electrode 7 is the low-pressure side electrode and is connected to the ground. The electrode surface (first electrode surface 8) of the first electrode 7 is provided on both the outer surfaces (right and left sides in Figure 2). In addition, multiple trench grooves are formed on the first electrode surface 8, arranged concentrically.

[0023] The base member 3 is configured to hold the disc-shaped second electrode 9 and the disc-shaped insulating plate 10, which is positioned outside the second electrode 9, from the outside. It can also be said that the base member 3 is positioned on the opposite side (outside) from the first electrode 7 when viewed from the second electrode 9. The electrode surface of the second electrode 9 (second electrode surface 11) is positioned to face the first electrode 7, and a discharge space 12 is formed between the first electrode surface 8 and the second electrode surface 11 (see Figure 2). The second electrode 9 is the high-voltage side electrode, and a voltage application cable C is connected to it. The second electrode 9 is made of a dielectric material such as sapphire, and the insulating plate 10 is made of an insulator such as alumina.

[0024] Inside the base member 3, there is a cable insertion passage 13 for inserting the cable C and a refrigerant flow path 14 through which a cooling medium (e.g., cooling water) flows to cool the base member 3 (and the second electrode 9 held by it). The refrigerant flow path 14 of the base member 3 is connected to a supply port 15 and an outlet 16 for the cooling medium (see Figure 1). The refrigerant flow path 14 of the base member 3 is located outside the insulating plate 10 (see Figure 2). In this case, the second electrode 9 and the insulating plate 10 are in contact with each other, and the insulating plate 10 and the base member 3 are in contact with each other. Therefore, the cooling effect of the refrigerant flow path 14 of the base member 3 is transmitted to the second electrode 9 via the insulating plate 10, and the second electrode 9 can be cooled.

[0025] As shown in Figure 3, the refrigerant flow path 14 of the base member 3 is arranged to sandwich the cable insertion passage 13 from both sides in the thickness direction of the base member 3 (left-right direction in Figure 3). As shown in Figures 4 and 5, the base member 3 can be manufactured by laminating metal members 17 and 18 on both sides (left and right sides in Figure 4) with recesses forming the refrigerant flow path 14 on their surfaces, and a central metal member 19 on which the cable insertion passage 13 is provided, by diffusion bonding (in Figure 3, the bonding surface by diffusion bonding is shown by a dashed line). This base member 3 can also be manufactured using a metal 3D printer. Furthermore, as shown in Figure 6, the refrigerant flow path 14 of the base member 3 may branch into a plurality of branched flow paths 140 inside the base member 3. In this case, the plurality of branched flow paths 140 are configured so that their respective pressure losses are equal. Diffusion bonding is a method of obtaining a metallurgically complete bond by heating and pressurizing the base material without melting it, and diffusing atoms at the bonding interface across the bonding surface.

[0026] Inside the first electrode 7, a material gas supply passage 20 for supplying material gas to the discharge space 12 and a generated gas discharge passage 21 for sending the generated gas generated in the discharge space 12 to the outside are formed. The material gas supply passage 20 is connected to a material gas supply port 5 into which material gas is supplied from the outside, and is also connected to a material gas outlet 22 that communicates with the discharge space 12. The generated gas discharge passage 21 is connected to a generated gas inlet 23 that communicates with the discharge space 12, and is also connected to a generated gas outlet 6 into which the generated gas is sent to the outside.

[0027] Furthermore, a refrigerant channel 24 is formed inside the first electrode 7 through which a cooling medium (e.g., cooling water) flows to cool the first electrode 7. The refrigerant channel 24 of the first electrode 7 is connected to a supply port 15 and an outlet 16 for the cooling medium, similar to the refrigerant channel 14 of the base member 3 (see Figure 1).

[0028] As shown in Figure 7, the refrigerant flow path 24 of the first electrode 7 is arranged so as to sandwich the material gas supply path 20 and the generated gas discharge path 21 from both sides in the thickness direction of the first electrode 7 (left and right directions in Figure 7). As shown in Figures 8 and 9, the first electrode 7 can be manufactured by laminating metal members 25 and 26 on both sides (left and right sides in Figure 8) with recesses that form the refrigerant flow path 24 formed on their surfaces, and a central metal member 27 provided with the material gas supply path 20 and the generated gas discharge path 21, by diffusion bonding (in Figure 7, the bonding surface by diffusion bonding is shown by a dashed line). This first electrode 7 can also be manufactured using a metal 3D printer. In this case, as shown in Figure 9, the refrigerant flow path 24 of the first electrode 7 branches into a plurality of branched flow paths 240 inside the first electrode 7. These plurality of branched flow paths 240 are configured so that their respective pressure losses are equal.

[0029] When generating ozone gas using the gas generator 1 of this embodiment, as shown by the arrows in Figure 2, the material gas supplied from the material gas supply port 5 passes through the material gas supply path 20 and is supplied to the interior of the central member 2 from the material gas outlet 22. In this case, the material gas flows across the space (discharge space 12) between the first electrode surface 8 and the second electrode surface 11. When a voltage is applied between the first electrode surface 8 and the second electrode surface 11, a discharge occurs in the discharge space 12, and ozone gas is generated from the material gas. The generated ozone gas is sent out from the generated gas outlet 6 through the generated gas inlet 23 and the generated gas outlet 21.

[0030] In this embodiment of the gas generator 1, as shown in Figure 3, the refrigerant flow path 14 is arranged so as to sandwich the cable insertion passage 13 from both sides in the thickness direction of the base member 3. That is, in the thickness direction of the base member 3, the refrigerant flow path 14 is arranged so as not to be on the same plane as the cable insertion passage 13. Therefore, the refrigerant flow path 14 can be freely arranged inside the base member 3 without being obstructed by the cable insertion passage 13 (the degree of freedom in arranging the refrigerant flow path 14 inside the base member 3 is increased). In this way, it becomes possible to arrange the refrigerant flow path 14 in a position with high cooling efficiency inside the base member 3, and the cooling efficiency of the base member 3 (and the second electrode 9 held in the base member 3) can be improved. As a result, the gas generation efficiency of the gas generator 1 is improved.

[0031] Furthermore, in this embodiment, as shown in Figure 6, the refrigerant flow path 14 of the base member 3 is branched into a plurality of branch flow paths 140, thereby enabling more uniform cooling of the base member 3. In this case, since the pressure loss in each branch flow path 140 is configured to be equal, the cooling medium can be supplied evenly to each branch flow path 140, making it possible to uniformly cool the base member 3 (and the second electrode 9 held in the base member 3). This improves the gas generation efficiency of the gas generator 1.

[0032] Furthermore, in this embodiment, as shown in Figures 3 to 5, a base member 3 having a complex internal structure (a base member 3 in which refrigerant flow paths 14 are arranged so as to sandwich the cable insertion passage 13 from both sides in the thickness direction of the base member 3) can be easily manufactured by using a metal 3D printer or diffusion bonding.

[0033] Furthermore, according to the gas generator 1 of this embodiment, as shown in Figure 7, the refrigerant flow path 24 is arranged so as to sandwich the material gas supply path 20 and the generated gas delivery path 21 from both sides in the thickness direction of the first electrode 7. That is, in the thickness direction of the first electrode 7, the refrigerant flow path 24 is arranged so as not to be on the same plane as the material gas supply path 20 and the generated gas delivery path 21. Therefore, the refrigerant flow path 24 can be freely arranged inside the first electrode 7 without being obstructed by the material gas supply path 20 and the generated gas delivery path 21 (the degree of freedom in arranging the refrigerant flow path 24 inside the first electrode 7 is increased). In this way, it becomes possible to arrange the refrigerant flow path 24 in a position with high cooling efficiency inside the first electrode 7, and the cooling efficiency of the first electrode 7 can be improved. As a result, the gas generation efficiency of the gas generator 1 is improved.

[0034] Furthermore, in this embodiment, as shown in Figure 9, the first electrode 7 can be cooled more uniformly by branching the refrigerant flow path 24 of the first electrode 7 into a plurality of branch flow paths 240. In this case, since the pressure loss in each branch flow path 240 is configured to be equal, the cooling medium can be supplied evenly to each branch flow path 240, making it possible to cool the first electrode 7 uniformly. This improves the gas generation efficiency of the gas generator 1.

[0035] Furthermore, in this embodiment, as shown in Figures 7 to 9, a first electrode 7 having a complex internal structure (a first electrode 7 in which refrigerant flow paths 24 are arranged so as to sandwich the material gas supply path 20 and the generated gas discharge path 21 from both sides in the thickness direction of the first electrode 7) can be easily manufactured by using diffusion bonding (or a metal 3D printer).

[0036] Although embodiments of the present invention have been described above by example, the scope of the present invention is not limited to these, and modifications and alterations can be made within the scope described in the claims depending on the purpose.

[0037] For example, the above explanation described a gas generator for producing ozone gas, but the same method can be used to produce gases other than ozone. [Industrial applicability]

[0038] As described above, the gas generator according to the present invention has the effect of improving cooling efficiency and gas generation efficiency by increasing the degree of freedom in arranging the refrigerant flow path, and is useful for generating ozone gas and the like. [Explanation of Symbols]

[0039] 1. Gas generator 2 Central Member 3 Base member 5. Material gas supply port 6. Gas outlet 7. First electrode (low-pressure electrode) 8 First electrode surface 9. Second electrode (high-voltage electrode) 10 Insulating board 11 Second electrode surface 12 Discharge space 13 Cable entry points 14 Refrigerant flow path 140 branch channels 15 supply ports 16 Outlet 17 Metal components 18 Metal components 19 Metal components 20 Material gas supply channels 21. Gas output path 22 Material gas outlet 23. Inlet for generated gas 24 Refrigerant flow path 240 branch channels 25 Metal components 26 Metal components 27 Metal components

Claims

1. A first electrode having a first electrode surface, A second electrode having a second electrode surface facing the first electrode surface, A discharge space is formed between the first electrode surface and the second electrode surface, and when a voltage is applied, a generated gas is produced from the material gas. A base member is positioned on the opposite side from the first electrode when viewed from the second electrode, and holds the second electrode. A cable insertion passage is provided inside the base member through which a cable for supplying power to the second electrode is inserted, A refrigerant channel is provided inside the base member and supplies a cooling medium to cool the second electrode held by the base member, Equipped with, The refrigerant flow path is arranged in the thickness direction of the base member so as to sandwich the cable insertion passage from both sides in a gas generating device.

2. The gas generating device according to claim 1, wherein the refrigerant flow path is configured to branch into a plurality of branched flow paths inside the base member.

3. The refrigerant flow path is arranged so as to sandwich the cable insertion passage from both sides in the thickness direction of the base member, and the base member is, The gas generator according to claim 1, manufactured by manufacturing the base member with a metal 3D printer, or by laminating the metal member provided with the refrigerant flow path and the metal member provided with the cable insertion passage by diffusion bonding.

4. A first electrode having a first electrode surface, A second electrode having a second electrode surface facing the first electrode surface, A discharge space formed between the first electrode surface and the second electrode surface, A material gas supply path is provided inside the first electrode and supplies material gas to the discharge space, A generated gas discharge path is provided inside the first electrode and discharges the generated gas generated from the material gas to the outside when a voltage is applied between the first electrode surface and the second electrode surface, causing a discharge in the discharge space. A refrigerant channel is provided inside the first electrode and supplied with a cooling medium to cool the first electrode, Equipped with, A gas generator in which the refrigerant flow path is arranged to sandwich the material gas supply path and the generated gas discharge path from both sides in the thickness direction of the first electrode.

5. The gas generator according to claim 4, wherein the refrigerant flow path is configured to branch into a plurality of branched flow paths inside the first electrode.

6. The refrigerant flow path is arranged so as to sandwich the material gas supply path and the generated gas discharge path from both sides in the thickness direction of the first electrode, and the first electrode is The gas generator according to claim 4, manufactured by manufacturing the first electrode with a metal 3D printer, or by laminating a metal member provided with the refrigerant flow path and a metal member provided with the material gas supply path and the generated gas delivery path by diffusion bonding.

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