Processing tools and substrate transport equipment

Abstract

The system provides a connectable system via a vacuum tunnel, allowing connection to any other suitable module. [Solution] The processing apparatus includes vacuum tunnels 2800', 3600 having ends 2800E1, 2800E2 with ports, at least one module connected to the vacuum tunnels so as to be able to communicate with them via at least one port, and at least one transport cart 3670 levitating within the vacuum tunnels so as to be movable within the vacuum tunnels. Each of the transport carts includes a double-ended substrate holder 3030S2 connected to a base so as to be fixed in orientation relative to the base. The processing apparatus also includes, with at least one transport cart positioned in the vacuum tunnels adjacent to an end, the double-ended substrate holders extending beyond the ends to transport substrates between at least one transport cart and at least one module.

Claims

1. It is a processing tool, A transport tunnel having an end with a port, At least one module connected to the transport tunnel via at least one port, At least one transport cart levitated within the transport tunnel so as to be movable within the transport tunnel, each of the at least one transport carts including a base and a substrate holder connected to the base such that its orientation relative to the base is fixed, Equipped with, With the at least one transport cart positioned adjacent to the end within the transport tunnel, the substrate holder is configured to extend beyond the end in order to transport a substrate between the at least one transport cart and the at least one module. Processing tool.

2. The processing tool according to claim 1, wherein the transport tunnel is provided with a vacuum atmosphere inside the transport tunnel.

3. The processing tool according to claim 1, wherein the transport tunnel forms a tunnel extending in the longitudinal direction, and the at least one port is provided at each longitudinal end of the tunnel extending in the longitudinal direction.

4. The processing tool according to claim 1, wherein the at least one transport cart includes two transport carts, and the substrate holder of one of the two transport carts extends in the same direction as the substrate holder of the other of the two transport carts, and the substrate holders face a common direction.

5. The processing tool according to claim 1, wherein the at least one transport cart comprises two transport carts, the substrate holder of one of the two transport carts extends in opposite directions to the substrate holder of the other of the two transport carts, and the substrate holders face in opposite directions to each other.

6. The processing tool according to claim 1, wherein the at least one transport cart comprises two transport carts, and the transport tunnel is configured such that the substrate holder of one of the two transport carts passes above the substrate holder of the other of the two transport carts.

7. The processing tool according to claim 1, wherein the transport tunnel forms a tunnel that extends in the longitudinal direction, and the substrate holder extends along the longitudinal axis of the transport tunnel.

8. The processing tool according to claim 1, wherein the at least one transport cart comprises two transport carts, and the transport tunnel includes an interface module configured to bring about the transfer of substrates between the respective substrate holders of the two transport carts.

9. The processing tool according to claim 1, wherein the transport tunnel comprises an orientation module configured to change the orientation of the at least one transport cart such that the orientation of each substrate holder of the at least one transport cart is changed from stretching in a first direction to stretching in a second direction, the first direction and the second direction being opposite to each other and aligned along the longitudinal axis of the transport tunnel.

10. A substrate transport device, A transport tunnel extending in the longitudinal direction, wherein each longitudinal end of the transport tunnel extending in the longitudinal direction has at least one port, A transport cart levitated within a transport tunnel extending in the longitudinal direction, wherein each of the at least one transport cart includes a base and a substrate holder connected to the base such that its orientation relative to the base is fixed. Equipped with, With the at least one transport cart positioned within the transport tunnel extending in the longitudinal direction, adjacent to the at least one port at the longitudinal end of the transport tunnel extending in the longitudinal direction, the substrate holder extends through the at least one port and passes through the longitudinal end of the transport tunnel extending in the longitudinal direction. PCB transport device.

11. The substrate transport apparatus according to claim 10, wherein the transport tunnel extending in the longitudinal direction is equipped with a vacuum.

12. The substrate transport apparatus according to claim 10, wherein the at least one transport cart includes two transport carts, and the substrate holder of one of the two transport carts extends in the same direction as the substrate holder of the other of the two transport carts, and the substrate holders face in a common direction.

13. The substrate transport apparatus according to claim 10, wherein the at least one transport cart includes two transport carts, and the substrate holder of one of the two transport carts extends in the opposite direction to the substrate holder of the other of the two transport carts, and the substrate holders face in opposite directions to each other.

14. The substrate transport apparatus according to claim 10, wherein the at least one transport cart includes two transport carts, and the transport tunnel extending in the longitudinal direction is configured such that the substrate holder of one of the two transport carts passes above the substrate holder of the other of the two transport carts.

15. The substrate transport apparatus according to claim 10, wherein the transport tunnel extending in the longitudinal direction forms a tunnel extending in the longitudinal direction, and the substrate holder extends along the longitudinal axis of the transport tunnel extending in the longitudinal direction.

16. The substrate transport apparatus according to claim 10, wherein the at least one transport cart comprises two transport carts, and the transport tunnel extending in the longitudinal direction comprises an interface module configured to bring about the transfer of substrates between the respective substrate holders of the two transport carts.

17. The substrate transport apparatus according to claim 10, wherein the transport tunnel extending in the longitudinal direction comprises an orientation module configured to change the orientation of the at least one transport cart such that the orientation of each substrate holder of the at least one transport cart is changed from extension in a first direction to extension in a second direction, the first direction and the second direction being opposite to each other and aligned along the longitudinal axis of the transport tunnel extending in the longitudinal direction.

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