Vacuum deposition source and vacuum deposition apparatus for vacuum deposition apparatus

Abstract

The deposition source DS has a deposition boat 1 having a deposition material Em housing 11 and electrode mounting sections 12 on both sides thereof, and an electrode unit 2 that holds both electrode mounting sections, allowing the deposition boat to be attached to and detached from the electrode unit in a short time, thereby improving the workability of replacing the deposition boat 1. [Solution] The electrode unit comprises a fixed electrode 22 fixed inside the vacuum chamber, a movable electrode 21 that can move back and forth in one direction, and boat receiving parts 211 and 221 that receive the deposition boat. With the deposition boat supported by the boat receiving parts, the deposition boat is held between the fixed electrode and the movable electrode simply by moving the movable electrode forward in one direction.

Description

【Technical Field】 【0001】 The present invention relates to an evaporation source for a vacuum evaporation apparatus for evaporating an evaporation material in a vacuum chamber and depositing it on a deposition target, and a vacuum evaporation apparatus including this evaporation source in the vacuum chamber. 【Background Art】 【0002】 This type of vacuum evaporation apparatus is used, for example, to form a thin film such as an aluminum film or a copper film on the surface of a substrate or a sheet-like base material as a deposition target. As an evaporation source for a vacuum evaporation apparatus, a type using an evaporation boat is generally known (see, for example, Patent Document 1). Taking two horizontal orthogonal directions as the X-axis direction and the Y-axis direction, the evaporation boat has a storage portion for the evaporation material and electrode attachment portions that protrude forward and backward in the X-axis direction, which is one direction, from this storage portion, and is held by an electrode unit in the vacuum chamber via both electrode attachment portions. As the electrode unit, a type having a pair of upper and lower electrode plates is known, and the evaporation boat is held by fastening with bolts in a state where both electrode attachment portions are respectively sandwiched by the electrode plates from above and below (see, for example, Patent Document 2). 【0003】 When depositing on a deposition target in a vacuum chamber in a vacuum atmosphere, the evaporation boat is heated by Joule heat by energizing between both electrode attachment portions. In this state, when a wire-shaped evaporation material is supplied to the storage portion of the evaporation boat from above, the evaporation material dissolves and wets and spreads in the storage portion, and the wetted and spread material evaporates and is deposited on the deposition target. Here, when the deposition target is a relatively wide sheet-like base material, in order to form a film with good productivity, it is conceivable to arrange a plurality of evaporation boats in the Y-axis direction in the vacuum chamber. On the other hand, the evaporation boat is a so-called consumable item and needs to be replaced regularly. And when a plurality of evaporation boats are arranged in parallel in the vacuum chamber, each evaporation boat will be replaced simultaneously. At this time, if the evaporation boat is held by bolt fastening as in the above conventional example, it takes a lot of time to attach and remove the evaporation boat to and from the electrode unit, and there is a problem that the replacement workability is poor. 【Prior Art Documents】 [Patent Documents] 【0004】 [Patent Document 1] Japanese Patent Publication No. 2007-46106 [Patent Document 1] Patent No. 7404582 [Overview of the Initiative] [Problems that the invention aims to solve] 【0005】 In view of the above, the object of the present invention is to provide a vapor deposition source for a vacuum processing apparatus and a vacuum deposition apparatus equipped therewith, which allows for the attachment and removal of the vapor deposition boat to the electrode unit in a short time and improves the workability of replacing the vapor deposition boat. [Means for solving the problem] 【0006】 To solve the above problems, the present invention provides a deposition source for a vacuum deposition apparatus for evaporating a deposition material in a vacuum chamber and depositing it onto a substrate, comprising a deposition boat having a deposition material storage section and electrode mounting sections extending forward and backward in one direction from the storage section, and an electrode unit that holds both electrode mounting sections, wherein the deposition boat is heated by passing current between the two electrode mounting sections to evaporate the deposition material in the storage section, and the electrode unit comprises a fixed electrode fixed in the vacuum chamber, a movable electrode that can move forward and backward in one direction, and a boat support section that receives the deposition boat, wherein the deposition boat is held between the fixed electrode and the movable electrode simply by moving the movable electrode forward in one direction while the deposition boat is supported by the boat support section. 【0007】 According to the present invention, when replacing the deposition boat in a vacuum chamber under an atmospheric atmosphere after deposition on the material to be deposited, moving the movable electrode to the rear in one direction releases the pressing force acting on the deposition boat toward the fixed electrode in one direction (hereinafter, the position of the movable electrode in one direction forward during deposition on the material to be deposited is also referred to as the "mounting position," and the position of the movable electrode in one direction rear when replacing the deposition boat is also referred to as the "removal position"). At this time, the amount of movement of the movable electrode in one direction rear from the mounting position to the removal position is set to a range that always maintains the state in which the deposition boat is held by the boat receiving part. Then, the used deposition boat is removed and the next deposition boat is installed. After that, it is returned to the mounting position simply by moving the movable electrode forward in one direction, and in this state the deposition boat is held again between the fixed electrode and the movable electrode. Thus, in this invention, instead of holding the deposition boat with bolts as in the conventional example described above, a configuration is adopted in which the deposition boat is held between the fixed electrode and the movable electrode by a pressing force acting in one direction toward the fixed electrode. As a result, the deposition boat can be attached to and removed from the electrode unit in a short time, and the workability of replacing the deposition boat can be significantly improved compared to the conventional example described above. 【0008】 In the present invention, it is preferable to interpose a conductive sheet between the rear end surface of the deposition boat and the front end surface of the movable electrode prior to moving the movable electrode forward in one direction. This ensures that the deposition boat and the movable electrode make reliable contact at the mounting position, allowing current to flow without power loss. At this time, since only the movable electrode is moved forward in one direction, problems such as the conductive sheet shifting position when sandwiching it between the rear end surface of the deposition boat and the front end surface of the movable electrode are unlikely to occur. Therefore, only one conductive sheet is needed, further improving the ease of replacement. 【0009】 In the present invention, a configuration can be adopted that includes a support to which the movable electrode is movably mounted, an operating member for operating the movable electrode in one direction (forward and backward), and a guide member for guiding the movement of the movable electrode in one direction (forward and backward) when the drive shaft is moved in one direction (forward and backward) by the operation of the operating member. This makes it possible to realize a configuration in which the movable electrode can be moved in one direction (forward and backward) by the operation of the operating member by an operator. Furthermore, it is preferable to provide a restricting member for restricting the amount of movement of the movable electrode in one direction (backward). This is advantageous because it is possible to constantly maintain a state in which the deposition boat does not fall off when the deposition boat is moved to the removal position. [Brief explanation of the drawing] 【0010】 [Figure 1] A schematic cross-sectional view showing a vacuum deposition apparatus equipped with a deposition source according to an embodiment of the present invention. [Figure 2] A magnified view of the vapor deposition source shown in Figure 1. [Figure 3] A plan view along line III-III in Figure 1. [Figure 4] An enlarged view corresponding to Figure 2, showing the movable electrode in the detached position. [Figure 5] (a) and (b) are side views of the cover body. [Figure 6] A front view illustrating the attachment and detachment of the cover body in the position where the movable electrode is removed. [Modes for carrying out the invention] 【0011】 Hereinafter, with reference to the drawings, embodiments of the vacuum deposition apparatus DS for the present invention and the vacuum deposition apparatus DM equipped with the vapor deposition source DS in a vacuum chamber will be described, using as an example a case in which the material to be deposited is a sheet-shaped substrate Sw, and a wire-shaped deposition material Em is continuously supplied and evaporated in a vacuum chamber under a vacuum atmosphere to deposit a predetermined thin film on one side of the sheet-shaped substrate Sw.In the following, the two horizontal orthogonal directions will be defined as the X-axis direction and the Y-axis direction, and the can roller described later will be housed in the vacuum chamber with its axis direction aligned with the Y-axis direction.Directions such as up and down will be based on Figure 1, which shows the installation position of the vacuum deposition apparatus. 【0012】 Referring to Figure 1, the vacuum deposition apparatus DM of this embodiment comprises a central deposition chamber Vc1 as a vacuum chamber, and first and second transport chambers Vc2 and Vc3, respectively, connected to the front and rear of the deposition chamber Vc1 in the X-axis direction. Although not specifically illustrated and described, exhaust pipes from a vacuum pump unit, such as a cryopump or rotary pump, are connected to the deposition chamber Vc1 and each of the transport chambers Vc2 and Vc3, respectively, to form a vacuum atmosphere. Through holes h1 to h4 are provided in the side walls of the deposition chamber Vc1 and each of the transport chambers Vc2 and Vc3 that face each other in the X-axis direction, respectively, to allow the passage of a sheet-like substrate Sw. A load lock valve Lv is provided in the gap between the side walls of the deposition chamber Vc1 and each of the transport chambers Vc2 and Vc3 so as to cover the portion of the sheet-like substrate Sw that passes through this gap. This allows for consistent transport of the sheet-like substrate Sw in a vacuum atmosphere, and also isolates the deposition chamber Vc1 from the transport chambers Vc2 and Vc3. Since known load lock valves Lv can be used in this type of vacuum deposition apparatus DM, a detailed explanation is omitted here. 【0013】 The first transport chamber Vc2, located on the front side in the X-axis direction (left side in Figure 1), is equipped with a feed roller Wr around which the sheet-like substrate Sw before film deposition is wound, and is rotationally driven by a motor M1 located outside the first transport chamber Vc2. The second transport chamber Vc3, located on the rear side in the X-axis direction (right side in Figure 1), is equipped with a winding roller Ur for winding the sheet-like substrate Sw after film deposition, and is rotationally driven by a motor M2 located outside the second transport chamber Vc3. The first and second transport chambers Vc2 and Vc3 are appropriately equipped with guide rollers Gr to guide the sheet-like substrate Sw fed from the feed roller Wr to the film deposition chamber Vc1, and to guide the sheet-like substrate Sw transported from the film deposition chamber Vc1 to the winding roller Ur. The film deposition chamber Vc1 is equipped with a can roller Cr, which is rotationally driven by a motor M3 located outside the film deposition chamber Vc1. The can roller Cr cools the sheet-like substrate Sw as it is wrapped around it and rotates; this is a well-known concept, so no further explanation is needed. The deposition chamber Vc1 is also appropriately provided with guide rollers Gr to guide the sheet-like substrate Sw. In order to deposit a film on the portion of the substrate Sw wrapped around the can roller Cr, the deposition source DS of this embodiment is provided in the deposition chamber Vc1, positioned directly below the can roller Cr. 【0014】 Referring also to Figures 2 to 4, the deposition source DS comprises a deposition boat 1 having a containment section 11 for the deposition material Em and electrode mounting sections 12a and 12b that protrude from the containment section 11 in the front and rear directions along the X-axis, respectively, with multiple deposition boats 1 arranged side by side at equal intervals along the Y-axis. In this embodiment, the deposition boat 1 has a containment section 11 with a flat inner bottom surface recessed in the central region of a plate-like member of a predetermined thickness, and the front and rear portions of the containment section 11 along the X-axis are the electrode mounting sections 12a and 12b. As the deposition boat 1, for example, a material sintered from a raw material mainly composed of boron nitride (BN) and titanium boride (TiB2) which imparts conductivity, containing these in a predetermined weight ratio, can be used. A tray 13 for the deposition material Em is placed in the space below each deposition boat 1. Each deposition boat 1 is held by an electrode unit 2 via both electrode mounting sections 12a and 12b. 【0015】 The electrode unit 2 has a first electrode and a second electrode that are spaced apart in the X-axis direction and is mounted on a support base 3 located on the inner bottom surface of the deposition chamber Vc1. In this embodiment, the first electrode that holds the electrode mounting portion 12a on the rear side (right side in Figure 2) of the deposition boat 1 in the X-axis direction is a movable electrode 21 that can move back and forth in the X-axis direction, and the second electrode that holds the other electrode mounting portion 12b is a fixed electrode 22 fixed to the deposition chamber Vc1. Each deposition boat 1 is held between the fixed electrode 22 and the movable electrode 21 by a pressing force acting in the X-axis direction toward the fixed electrode 22. The fixed electrode 22 is integrally formed and consists of a rectangular prismatic member that is elongated in the Y-axis direction and made of a conductive material such as copper. The fixed electrode 22, which is grounded, is supported at a predetermined height position from the inner bottom surface of the deposition chamber Vc1 via a support column 31 erected on the support base 3. A boat support portion 221 is formed on the inner surface of the fixed electrode 22, projecting backward in the X-axis direction. This portion supports the deposition boat 1 by being supported by the lower surface of the electrode mounting portion 12b when the deposition boat 1 is installed from above. 【0016】 Multiple movable electrodes 21 are arranged in parallel in the Y-axis direction so as to independently hold one electrode mounting portion 12a of each deposition boat 1. Each movable electrode 21, like the fixed electrode 22, is made of a conductive material such as copper and consists of a long holding plate portion 21a in the X-axis direction and a drive plate portion 21b that is perpendicular to the holding plate portion 21a. On the inner surface of the holding plate portion 21a, another boat receiving portion 211 is formed, facing the boat receiving portion 221 of the fixed electrode 22 in the X-axis direction, and supports the lower surface of the electrode mounting portion 12a as described above. A terminal plate portion 21c is provided at the lower end of the drive plate portion 21b that extends downward through the support base 3, and an electrode cable Pk from a known DC power supply (not shown) is connected to it. The movable electrode 21 is the input side of the current and is energized between it and the earth-grounded fixed electrode 22 via the deposition boat 1. 【0017】 On the support base 3, a plurality of L-shaped supports 4 are arranged side by side in the Y-axis direction when viewed from the front, and each movable electrode 21 is respectively attached to each support 4 so as to be movable back and forth in the X-axis direction. On the drive plate portion 21b of each movable electrode 21, a drive shaft 212 protruding rearward in the X-axis direction and guide pins 213 as guide members are respectively provided above and below the drive shaft 212. In the portion of the support 4 facing the drive plate portion 21b, a first insertion hole 41 for receiving the drive shaft 212 and a second insertion hole 42 for receiving each guide pin 213 are formed, and the movable electrode 21 is supported by the support 4 via the guide pin 213 slidably inserted into the second insertion hole 42. A coil spring 43 as biasing means is also provided in the first insertion hole 41 to bias the drive shaft 212 toward the front side in the X-axis direction. A nut member 214 having a larger diameter than the drive shaft 212 is externally inserted into the portion of the drive shaft 212 protruding in the X-axis direction from the first insertion hole 41. 【0018】 A support frame 51 is erected on the support base 3, and an operation lever 5 as an operation member for operating the forward and backward movement of the movable electrode in one direction is provided at the upper end of the support frame 51 so as to be swingable. When the operation lever 5 is swung clockwise, a hook-shaped portion 52 provided on the operation lever 5 engages with the nut member 214. Normally, each movable electrode 21 is moved forward in the X-axis direction by the biasing force of the coil spring 43. When the hook-shaped portion 52 engages with the nut member 214 by the operation of the operation lever 5, and the operation lever 5 is further swung clockwise from this engagement position, the movable electrode 21 moves backward in the X-axis direction against the biasing force of the coil spring 43. Thereby, the movable electrode 21 moves horizontally between an attachment position (see FIGS. 2 and 3) for holding the vapor deposition boat 1 between the fixed electrode 22 and the movable electrode 21 with a pressing force (biasing force of the coil spring 43) acting in one direction toward the fixed electrode 22, and a removal position (see FIG. 4) where the pressing force is released by the backward movement in the X-axis direction and the vapor deposition boat 1 can be exchanged. 【0019】 A restricting member 6 is provided to restrict the amount of movement of the movable electrode 21 so that the state in which both electrode mounting portions 12a and 12b of the deposition boat 1 are supported by the respective boat receiving portions 211 and 221 is maintained while the movable electrode 21 moves back and forth in the X-axis direction between the mounting position and the removal position. The restricting member 6 has a restricting plate 61 whose front end is pinned to the drive plate portion 21b. An elongated hole 62 is formed on the rear end side of the restricting plate 61 in the X-axis direction, and the tip of a pin member 63 is fixed to the support 4 through the elongated hole 62. Note that the restricting member 6 is not limited to this as long as it can restrict the amount of movement of the movable electrode 21. A cover body 7 that covers the outer surface portion of the holding plate portion 21a of each movable electrode 21 is detachably attached. 【0020】 Referring also to Figure 5, the cover body 7 has a substrate portion 71 that covers the upper surface portion of the retaining plate portion 21a, and side plate portions 72 that extend downward from both ends of the substrate portion 71 in the Y-axis direction and cover the sides of the retaining plate portion 21a, respectively. The cover body 7 is also provided with a frame-shaped flange portion 73 that protrudes outward. In this embodiment, the rows of flange portions 73 arranged at a predetermined pitch in the Y-axis direction are called flange rows, and the cover body comprises a first flange row 71 and a second flange row 72 whose distance in the X-axis direction from the fixed electrode 22 is longer than that of the first flange row 71, with the first flange row 71 and the second flange row 72 being arranged alternately in two rows in the Y-axis direction (see Figure 3). The flange portion 73 of the first flange portion row 71 is designated as the first flange portion 73a, and the flange portion 73 of the second flange portion row 72 is designated as the second flange portion 73b. The height h2 of the second flange portion 73b that protrudes upward from the upper surface of the cover body 7 is higher than the height h1 of the first flange portion 73a that protrudes upward from the upper surface of the cover body 7 (i.e., the second flange portion row 72 is higher than the first flange portion row 71). 【0021】 At the upper end portion of the first flange portion 73a, a chamfer portion 731 that tapers upward is formed. The heights h1 and h2 are appropriately set in consideration of the intrusion of the evaporation material into the rear space of the movable electrode 21 in the X-axis direction. When the flange portions 73a and 73b are provided on the cover body 7 as described above, it is possible to make it difficult for a deposit made of the evaporation material Em to be formed on the outer surface portion of the cover body 7 located on the rear side in the X-axis direction from the flange portions 73a and 73b. Therefore, it is only necessary to cover a predetermined range from the vicinity of the end face on the front side in the X-axis direction of the upper surface of the holding plate portion 21a toward the rear side in the X-axis direction with the substrate portion 71, and the length of the side plate portion 72 in the X-axis direction can be shorter than that of the substrate portion 71. The attachment and detachment of the cover body 7 to and from the movable electrode 21 is carried out in a state where the evaporation boat 1 is removed at the removal position of the movable electrode 21 as shown in FIG. 6. That is, the cover body 7 is attached to the movable electrode 21 by inserting it into the movable electrode 21 from the front in the X-axis direction. At this time, a positioning pin 74 is provided so as to project downward at a position on the front side in the X-axis direction of the flange portion 73 of the cover body 7. In addition, an engagement hole (not shown) for engaging the positioning pin 74 is formed at a predetermined position on the upper surface of the movable electrode 21, and when the positioning pin 74 engages with the engagement hole, the cover body 7 is positioned in the front and rear in the X-axis direction. 【0022】 The deposition chamber Vc1 is provided with a material supply means 8 for continuously supplying wire-shaped deposition material Em to the housing section 11 of each deposition boat 1. The material supply means 8 includes a motor-driven feed roller 81 installed on the side of the protective plate Sp located inside the deposition chamber Vc1 that is away from the deposition source DS, and a pair of upper and lower guide rollers 82. A guide tube 83 of a predetermined length with a downwardly curved tip is attached to the inner surface of the protective plate Sp located on the deposition source DS side, and guides the wire-shaped deposition material Em toward the housing section 11. The deposition material Em is selected according to the thin film to be deposited, and for example, aluminum or copper of a predetermined purity formed to an outer diameter of Φ1 mm to 5 mm is used. The wire-shaped deposition material Em is pre-wound onto the feed roller 81, and the tip of the wire-shaped deposition material Em is pulled out and inserted through the gap between the upper and lower guide rollers 82 and the opening (not shown) of the protective plate Sp, and then through the guide tube 83. A wire-shaped deposition material Em is prepared by bringing the tip of the deposition material Em protruding from the guide tube 83 into contact with the inner bottom surface of the housing 11 from above. 【0023】 When depositing a predetermined thin film onto one side of a sheet-like substrate Sw in a vacuum deposition chamber Vc1, a DC power supply (not shown) installed outside the deposition chamber Vc1 energizes the movable electrode 21 and the fixed electrode 22 via the electrode mounting parts 12a and 12b. This heats the deposition boat 1 by Joule heating. The power supplied at this time is set according to the deposition rate. When the deposition boat 1 reaches a predetermined temperature, the feed roller 81 feeds out a wire-shaped deposition material Em. Simultaneously, the sheet-like substrate Sw is fed out from the feed roller Wr and wound up by the winding roller Ur. As a result, the deposition material Em melts in the recess 11, and this melted deposition material Em evaporates, depositing a predetermined thin film on the portion of the sheet-like substrate Sw wound around the can roller Cr. The supply speed of the wire-shaped deposition material Em is set according to the deposition rate. 【0024】 When replacing each deposition boat 1, the deposition chamber Vc1 and each transport chamber Vc2, Vc3 are returned to an atmospheric environment. First, the deposits made of deposition material Em attached to and accumulated on the movable electrode 21 are removed to make the movable electrode 21 movable. At this time, the outer surface portion of the movable electrode 21 is covered by the cover body 7, and only the area near the front end surface in the X-axis direction of the holding plate portion 21a is exposed, so the area from which deposits need to be removed from the movable electrode 21 when replacing the deposition boat 1 is small. Then, the operating lever 5 is swung clockwise, and when the operating lever 5 is swung further clockwise from the state in which the hook-shaped portion 52 is engaged with the nut member 214, the movable electrode 21 moves backward in the X-axis direction against the biasing force of the coil spring 43 and reaches the removal position. In this state, the electrode mounting portions 12a and 12b are supported by the boat receiving portion 211 of the movable electrode 21 and the boat receiving portion 221 of the fixed electrode 22. At this time, a known locking mechanism may be provided on the operating lever 5 to hold the movable electrode 21 in the removed position. This releases the pressing force when the electrode moves backward in the X-axis direction, allowing the deposition boat 1 to be replaced (i.e., removed upward from the electrode unit 2). Subsequently, with the movable electrode 21 in the removed position, the cover body 7 is pulled out from the movable electrode 21 backward in the X-axis direction. This operation is performed for each deposition boat 1. 【0025】 After the entire deposition boat 1 is removed, the surfaces of the movable electrodes 21 and fixed electrodes 22 are cleaned, and the cover body 7 is repositioned and attached to each movable electrode 21 by extrapolating it from the front in the X-axis direction. Then, the deposition boat 1 is installed from above so that the electrode mounting portions 12a and 12b are supported by the boat receiving portion 211 of the movable electrode and the boat receiving portion 221 of the fixed electrode 22. At this time, the electrode mounting portion 12b is in contact with the side surface of the fixed electrode 22. Meanwhile, a conductive sheet Cs is interposed between the rear end surface of the electrode mounting portion 12a of the deposition boat 1 and the front end surface of the movable electrode 21. For example, an indium conductive sheet Cs can be used. A conductive sheet may also be interposed between the front end surface of the electrode mounting portion 12b and the rear end surface of the fixed electrode 22. 【0026】 After the deposition boat 1 and conductive sheet Cs are installed, swinging the operating lever 5 counterclockwise releases the engagement between the hook-shaped portion 52 and the nut member 214. As a result, the movable electrode 21 moves forward in the X-axis direction due to the biasing force of the coil spring 43 and reaches the mounting position. The deposition boat 1 is then held between the fixed electrode 22 and the movable electrode 21 by the pressing force from the movable electrode 21 (biasing force of the coil spring 43) acting forward in the X-axis direction toward the fixed electrode 22. This makes it easier to install the deposition boat 1 while maintaining its horizontal position, which is advantageous. In addition, during the replacement of the deposition boat 1, other operations such as replacing the feed roller 81 around which the wire-shaped deposition material Em is wound, replacing the feed roller Wr around which the sheet-like substrate Sw is wound before deposition, and recovering the winding roller Ur from which the sheet-like substrate Sw has been wound are also performed in the deposition chamber Vc1 and each transport chamber Vc2, Vc3 in an atmospheric atmosphere. 【0027】 As described above, instead of holding the deposition boat with bolts as in the conventional example, a configuration is adopted in which the deposition boat 1 is held between the fixed electrode 22 and the movable electrode 21 by a pressing force acting in one direction toward the fixed electrode 22. Therefore, the deposition boat 1 can be attached to and removed from the electrode unit 2 in a short time, significantly improving the workability of replacing the deposition boat 1 compared to the conventional example. At this time, since the deposition boat 1 is held between the fixed electrode 22 and the movable electrode 21 by a pressing force from the movable electrode 21 (biasing force of the coil spring 43), the configuration is advantageous as it can easily follow the thermal expansion and contraction of the deposition boat during deposition. Moreover, since a conductive sheet Cs is interposed between the rear end surface of the deposition boat 1 and the front end surface of the movable electrode 21, the deposition boat 1 and the movable electrode 21 can reliably contact each other at the mounting position and conduct electricity without power loss. At this time, since the movable electrode 21 is only moved forward in one direction, problems such as the conductive sheet Cs shifting position when sandwiching the conductive sheet Cs between the rear end surface of the deposition boat 1 and the front end surface of the movable electrode are unlikely to occur. Therefore, since only one conductive sheet Cs is needed, the ease of replacement can be further improved. In addition, because a regulating member 6 is provided, the state in which the vapor deposition boat 1 does not fall off when the vapor deposition boat 1 is moved to the removal position can be maintained at all times. 【0028】 Although embodiments of the present invention have been described above, various modifications are possible as long as they do not deviate from the technical concept of the present invention. In the above embodiments, an example was given in which the fixed electrode 22 is integrally formed, but the invention is not limited to this, and although not specifically illustrated and described, multiple individual fixed electrodes may be arranged in parallel in the Y-axis direction, similar to the movable electrode 21, and each electrode mounting portion 12b on the X-axis front side of each deposition boat 1 may be individually held. Also, although an example was given in which the boat receiving portions 211 and 221 are integrally formed with the movable electrode 21 and the fixed electrode 22, respectively, the form is not limited as long as it can be held in place so as not to fall off while the operating lever 5 is operated and the movable electrode 21 is moved between the mounting position and the removal position. 【0029】 In the above embodiment, an example was described using a device with an operating lever 5, but the form is not limited as long as the movable electrode 21 can move forward and backward in the X-axis direction. Also, in the example, an example was described in which the movable electrode 21 is supported by the support 4 via guide pins 213, 213, which serve both to provide movable support for the movable electrode and to guide the movable electrode 21 when it moves forward and backward in one direction, but the present invention is not limited to this, and the form is not limited, for example, a separate guide member can be provided. Furthermore, although the example was described using a sheet-like substrate Sw as the material to be deposited, the present invention can also be applied to deposition on a glass substrate or silicon wafer of a predetermined area. 【0030】 DS... Evaporation source for vacuum deposition apparatus, DM... Vacuum deposition apparatus, Vc1~Vc3... Vacuum chamber, Sw... Sheet-shaped substrate (object to be deposited), Em... Evaporation material (wire-shaped copper), 1... Evaporation boat, 11... Housing section, 12a, 12b... Electrode mounting section, 2... Electrode unit, 21... First electrode of electrode unit (movable electrode), 22... Second electrode of electrode unit (fixed electrode), 21a... Holding plate section (component of movable electrode), 21b... Drive plate section (component of movable electrode), 212... Drive shaft, 213... Guide pin (component of guide member), 4... Support, 41... First insertion hole, 42... Second insertion hole (component of guide member), 5... Operating lever (operating member), 6... Regulating member, Cs... Conductive sheet.

Claims

[Claim 1] A deposition source for a vacuum deposition apparatus that evaporates a deposition material in a vacuum chamber and deposits it onto an object to be deposited, A deposition boat having a deposition material receiving section and electrode mounting sections extending forward and backward in one direction from the receiving section, and an electrode unit holding both electrode mounting sections, wherein the deposition boat is heated by passing an electric current between the two electrode mounting sections to evaporate the deposition material in the receiving section, The electrode unit comprises a fixed electrode fixed inside a vacuum chamber and a movable electrode that can move back and forth in one direction, and is characterized in that the deposition boat is held between the fixed electrode and the movable electrode simply by moving the movable electrode forward in one direction while the deposition boat is supported by the boat support part. [Claim 2] The deposition source for a vacuum deposition apparatus according to claim 1, characterized in that a conductive sheet is interposed between the rear end surface of the deposition boat and the front end surface of the movable electrode prior to moving the movable electrode forward in one direction. [Claim 3] The deposition source for a vacuum deposition apparatus according to claim 1, further comprising a support on which the movable electrode is movably mounted, an operating member for operating the movable electrode in one direction forward and backward, and a guide member for guiding the movement of the movable electrode in one direction forward and backward when the drive shaft is moved forward and backward in one direction by the operation of the operating member. [Claim 4] The deposition source for a vacuum deposition apparatus according to claim 3, characterized in that a restricting member is provided for restricting the amount of movement of a movable electrode toward the rear in one direction. [Claim 5] A vacuum deposition apparatus comprising a deposition source for a vacuum deposition apparatus according to claim 1 or claim 2, located within a vacuum chamber.

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