Driving device, projection device, mobile device, head-mounted display, head-up display, laser headlamp, object recognition device, pupil or corneal position detection device, driving method, and program

Abstract

To improve control accuracy when controlling a drive unit using a drive signal containing multiple frequency components. [Solution] The drive device 13 comprises a movable part 101, drive units 112a to 112d that drive the movable part 101, detection units 160a to 160d that detect the displacement of the movable part 101, and a drive control unit 30 that outputs a drive signal containing multiple frequency components to control the drive units. The drive control unit 30 corrects the frequency components corresponding to specific frequency components based on specific frequency components decomposed from the detection signal output from the detection units.

Claims

1. Movable parts and A drive unit for driving the aforementioned movable part, A detection unit for detecting the displacement of the movable part, The system includes a drive control unit that outputs a drive signal containing multiple frequency components to control the drive unit, The drive control unit, A drive device that corrects the frequency component corresponding to the specific frequency component based on the specific frequency component decomposed from the detection signal output from the detection unit.

2. The drive control unit, The drive device according to claim 1, which corrects the amplitude of the frequency component corresponding to the specific frequency component based on the amplitude of the specific frequency component.

3. The drive control unit, The drive device according to claim 1 or 2, which corrects the phase of the frequency component corresponding to the specific frequency component based on the phase of the specific frequency component.

4. The drive control unit, When the amplitude value of the specific frequency component is c1 times the first target amplitude value (c1 ≥ 0), The amplitude value of the frequency component corresponding to the specific frequency component is multiplied by (1 / c²) (|1 - (1 / c²)| ≤ (|1 - (1 / c¹)|, C² ≥ 0) The drive device according to claim 2, which is corrected.

5. The drive control unit, When the phase value of the aforementioned specific frequency component is Φ + ΔΦ1 with respect to the first target phase value Φ, The phase value of the frequency component corresponding to the aforementioned specific frequency component is corrected to Φ2 - ΔΦ2. The drive device according to claim 3, wherein 2π ≥ ΔΦ1 ≥ ΔΦ2 ≥ 0.

6. The drive control unit, When the amplitude value of the specified frequency component is the first amplitude value A1, the phase value of the specified frequency component is the first phase value Φ1, and the first target amplitude value is 0, The amplitude value of the frequency component corresponding to the specific frequency component is defined as the first amplitude value A1. The drive device according to claim 2, wherein the phase value of the frequency component corresponding to the specific frequency component is corrected to -Φ1.

7. The drive control unit outputs the drive signal that satisfies the following formula (1): f(t)×cos(ω×t+Φ)…(1) The drive device according to claim 1, wherein in equation (1) above, "t" is time, "ω" and "Φ" are constants, and "f(t)" is a periodic function expressed as a superposition of a finite number of Fourier components.

8. A projection apparatus having an optical scanning system comprising the drive device described in claim 1 or 2.

9. A mobile body comprising the projection device described in claim 8.

10. A head-mounted display comprising the drive device according to claim 1 or 2.

11. A head-up display comprising the drive device according to claim 1 or 2.

12. A laser headlamp comprising the drive device according to claim 1 or 2.

13. An object recognition device comprising the drive device described in claim 1 or 2.

14. A pupil or corneal position detection device comprising the drive device described in claim 1 or 2.

15. A driving method for driving a drive unit that drives a movable part, wherein the drive unit is driven by outputting a drive signal containing multiple frequency components to the drive unit, A step of detecting the displacement of the movable part using a detection unit and outputting a detection signal related to the displacement of the movable part, A driving method comprising the step of correcting the frequency component corresponding to the specific frequency component based on the specific frequency component decomposed from the detection signal.

16. A program that causes a computer to execute a control process to drive a drive unit that drives a movable part by outputting a drive signal containing multiple frequency components to the drive unit, A program that receives a detection signal relating to the displacement of the movable part and causes a computer to perform a process to correct the frequency component corresponding to the specific frequency component based on the specific frequency component decomposed from the detection signal.

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