Liquid dispensing head and device for dispensing liquid

Abstract

The present invention provides a liquid dispensing head and a liquid dispensing device that can reduce the manufacturing cost of long liquid dispensing heads. [Solution] The liquid discharge head has a plurality of nozzles 3a arranged in the longitudinal direction (X direction) of the head, a plurality of pressure chambers 22 communicating with each of the plurality of nozzles 3a, a diaphragm 6 that constitutes the wall portion of the plurality of pressure chambers, and a piezoelectric member 5 which is an actuator element that drives the diaphragm 6, and the diaphragm 6 is arranged in a plurality in the longitudinal direction of the head.

Description

Technical Field

[0001] The present invention relates to a liquid ejection head and an apparatus for ejecting liquid.

Background Art

[0002] Conventionally, there is known a liquid ejection head having a plurality of nozzles arranged in the longitudinal direction of the head, a plurality of pressure chambers respectively communicating with the plurality of nozzles, a diaphragm constituting the wall portions of the plurality of pressure chambers, and an actuator element for driving the diaphragm, wherein a plurality of the actuator elements are arranged side by side in the longitudinal direction of the head.

[0003] Patent Document 1 describes a liquid ejection head in which a plurality of piezoelectric element units as actuator elements are arranged side by side in the longitudinal direction of the head. It is described that with such a configuration, a long liquid ejection head can be obtained at low cost.

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, with the increase in the length of the liquid ejection head, the diaphragm also becomes longer, and there is a problem that the manufacturing cost increases due to the increase in the length of the diaphragm.

Means for Solving the Problems

[0005] In order to solve the above-described problems, the present invention provides a liquid ejection head having a plurality of nozzles arranged in the longitudinal direction of the head, a plurality of pressure chambers respectively communicating with the plurality of nozzles, a diaphragm constituting the wall portions of the plurality of pressure chambers, and an actuator element for driving the diaphragm, wherein the diaphragm is arranged in a plurality side by side in the longitudinal direction of the head.

Effects of the Invention

[0006] According to the present invention, it is possible to reduce the manufacturing cost of a long liquid ejection head. [Brief explanation of the drawing]

[0007] [Figure 1] A cross-sectional view of the liquid dispensing head, perpendicular to the short-side direction (Y direction) of the head. [Figure 2] A cross-sectional view of the liquid dispensing head, perpendicular to the head height direction (Z direction). [Figure 3] A cross-sectional view of the liquid dispensing head, perpendicular to the length direction (X direction). [Figure 4] An enlarged view of the area enclosed by the dashed line X in Figure 1. [Figure 5] An enlarged view of the area enclosed by the dashed line Y in Figure 2. [Figure 6] A schematic diagram illustrating a liquid dispensing head in which two piezoelectric elements are arranged side by side along the longitudinal direction of the head. [Figure 7] A diagram illustrating the manufacturing process of long diaphragms. [Figure 8] A diagram illustrating the manufacturing process of short diaphragms. [Figure 9] This diagram illustrates the challenges of a configuration in which the diaphragms are arranged in a line along the longitudinal direction of the head. [Figure 10] A cross-sectional view of the liquid discharge head of this embodiment, perpendicular to the short-side direction (Y direction) of the head. [Figure 11] A cross-sectional view of the liquid dispensing head, perpendicular to the head height direction (Z direction). [Figure 12] An enlarged view of the area enclosed by the dashed line X in Figure 10. [Figure 13] An enlarged view of the area enclosed by the dashed line Y2 in Figure 11. [Figure 14] A diagram showing a modified example of a connecting pipe. [Figure 15] A perspective view showing the ink flow path from the pressure chamber to the nozzle in a modified example. [Figure 16] A plan view illustrating the main components of an example of a liquid dispensing device. [Figure 17] Side view diagram of the main part of the device. [Figure 18] A plan view illustrating the main components of another example of a liquid dispensing unit. [Figure 19]Front explanatory view of yet another example of the liquid ejection unit. [Figure 20] Schematic diagram showing an example of an electrode manufacturing apparatus according to an embodiment of the present invention.

Mode for Carrying Out the Invention

[0008] Hereinafter, the liquid ejection head according to the present invention will be described. First, the basic configuration of the liquid ejection head will be described using FIGS. 1 to 5. FIG. 1 is a cross-sectional view taken along the line A1 - A1 shown in FIGS. 2 and 3, FIG. 2 is a cross-sectional view taken along the line B1 - B1 shown in FIGS. 1 and 3, and FIG. 3 is a cross-sectional view taken along the line C1 - C1 shown in FIGS. 1 and 5. FIG. 4 is an enlarged view of the portion surrounded by the broken line X in FIG. 1, and FIG. 5 is an enlarged view of the portion surrounded by the broken line Y in FIG. 2.

[0009] The liquid ejection head 100 includes a nozzle plate 3, a flow path plate 2, and a diaphragm 6 made of a thin film member, and they are laminated and joined. The liquid ejection head 100 also includes a piezoelectric actuator 8 and a frame member 1. The piezoelectric actuator 8 displaces the diaphragm 6.

[0010] The nozzle plate 3 is formed of a metal material, for example, a SUS material. The nozzle plate 3 has a plurality of nozzles 3a for ejecting liquid. The nozzle plate 3 has nozzle rows in which a plurality of nozzles 3a are arranged side by side in the head longitudinal direction (X direction), and four nozzle rows are provided at predetermined intervals in the head lateral direction (Y direction).

[0011] As shown in FIGS. 3 and 4, the flow path plate 2 is composed of a plurality of (here, three) plate-like members 2A, 2B, 2C stacked in the thickness direction. The plate-like members 2A, 2B, 2C are formed of a metal material, for example, a SUS material.

[0012] As shown in FIGS. 3 and 5, the flow path plate 2 has a pressure chamber 22, a fluid resistance portion 21, and a guide flow path portion 23, and the same number of these as the number of nozzles 3a is provided. Each pressure chamber 22 communicates with the corresponding nozzle 3a, and each fluid resistance portion 21 communicates with the corresponding pressure chamber 22. Further, each guide flow path portion 23 communicates with the corresponding fluid resistance portion 21.

[0013] A plurality of through holes corresponding to the pressure chamber 22, the fluid resistance portion 21, and the guide flow path portion 23 are formed in each of the plate-like members 2A, 2B, and 2C by etching or pressing, so that a plurality of pressure chambers 22, fluid resistance portions 21, and guide flow path portions 23 are formed in the flow path plate 2. However, the fluid resistance portions 21 are formed in plurality by the through holes provided only in the plate-like member 2B. In the height direction (Z direction), the portion where no hole processing is performed together serves as a partition wall that partitions the pressure chamber 22 and the guide flow path portion 23.

[0014] The frame member 1 is made of, for example, a SUS material. By cutting this SUS material, a common liquid chamber 1a and a communication hole 1b communicating with the common liquid chamber 1a are formed. The common liquid chamber 1a communicates with a plurality of guide flow path portions 23.

[0015] The diaphragm 6 constitutes a part of the wall surface of the pressure chamber 22 of the flow path plate 2 and the bottom surface of the common liquid chamber 1a. The diaphragm 6 has a two-layer structure. Note that the diaphragm 6 may have a single-layer structure or a three-layer or more structure. A portion that constitutes a part of the wall surface of the pressure chamber 22 on the side of the flow path plate 2 of the first layer 6A constitutes a deformable diaphragm portion 6a. Further, an opening 6d for communicating the common liquid chamber 1a and the guide flow path portion 23 is formed in the first layer 6A.

[0016] Liquid ink is introduced from the common liquid chamber 1a into the guide flow path portion 23 through the opening 6d, and the ink is supplied from the guide flow path portion 23 to the pressure chamber 22 through the fluid resistance portion 21. Note that a filter may be provided in the opening �.

[0017] A piezoelectric actuator 8 is positioned on the side of the diaphragm 6 opposite to the pressure chamber 22. This piezoelectric actuator 8 is constructed by bonding a piezoelectric member 5, which serves as an actuator element, to a base member 4 using adhesive. The piezoelectric member 5 has a comb-like structure in which a required number of columnar piezoelectric elements 5A and 5B are arranged at predetermined intervals in the longitudinal direction (X direction) of the head. This comb-like piezoelectric member 5 is formed by grooving a piezoelectric member bonded to the base member 4 using half-cut dicing.

[0018] The piezoelectric elements 5A and 5B use the same components. However, piezoelectric element 5A (driving part) is driven by a driving waveform, while piezoelectric element 5B (non-driving part) is not driven by a waveform and is used simply as a support. Piezoelectric element 5A is joined to the protrusion 6b. The protrusion 6b is an island-shaped thickened portion formed on the diaphragm portion 6a. Piezoelectric element 5B is joined to the protrusion 6b, which is a thickened portion of the diaphragm 6.

[0019] The piezoelectric component 5 is constructed by alternately laminating piezoelectric layers and internal electrodes. The piezoelectric layer is made of lead zirconate titanate (PZT) with a thickness of 10 to 50 μm per layer. The internal electrodes are made of silver-palladium (AgPd) with a thickness of several μm per layer. The internal electrodes are drawn out to both ends of the pressure chamber of the piezoelectric component in the longitudinal direction and connected to individual electrodes and a common electrode, which are end-face electrodes (external electrodes).

[0020] The individual electrodes are multiple individual electrodes that have been divided by a half-cut dicing process on the outer end face of the piezoelectric member 5. The length of the electrodes on the outer end face of the piezoelectric member 5 is predetermined by processing such as notches. The common electrode, on the other hand, is not divided by dicing and conducts electricity in this form.

[0021] Individual electrodes are connected to FPC7, which acts as a flexible wiring component, by soldering. The common electrode is connected to the Gnd electrode of FPC7 via an electrode layer provided on the piezoelectric component 5 (which wraps around the end of the piezoelectric component 5). A driver IC is mounted on FPC7. This driver IC controls the voltage applied to the piezoelectric element 5A.

[0022] In the liquid ejection head 100 configured in this way, a drive waveform (pulse voltage of 10 to 50V) is applied to the piezoelectric element 5A in response to the recording signal, causing displacement in the stacking direction of the piezoelectric element 5A. This displacement of the piezoelectric element 5A pressurizes the ink in the pressure chamber 22 via the diaphragm 6. As a result, the ink pressure in the pressure chamber 22 increases, and ink droplets are ejected from the nozzle 3a.

[0023] As ink droplet ejection ends, the ink pressure in the pressure chamber 22 decreases. Then, due to the inertia of the ink flow and the displacement of the piezoelectric element 5A during the discharge process of the drive pulse, negative pressure is generated in the ink in the pressure chamber 22, and the process transitions to the ink refilling stage. At this time, ink supplied from an external ink tank flows into the common liquid chamber 1a, and from the common liquid chamber 1a, through the opening 6d, the guide channel section 23, and the fluid resistance section 21, the ink is supplied into the pressure chamber 22.

[0024] In inkjet recording devices equipped with a liquid ejection head 100, there is a demand for longer liquid ejection heads and higher density nozzles 3a to meet requirements for higher speed and resolution. However, achieving a longer liquid ejection head requires the preparation of longer components for the liquid ejection head, but the manufacture of high-precision long components is difficult, resulting in a significant increase in costs. As shown in Figure 6, it has been known to shorten the piezoelectric members 5 by arranging multiple piezoelectric members 5 in the longitudinal direction (X direction) of the head, but shortening the piezoelectric members 5 alone was insufficient to suppress the cost increase caused by lengthening the liquid ejection head.

[0025] The diaphragm 6 is manufactured by etching an opening 6d, a protrusion 6b, and a diaphragm portion 6a onto a wafer. As shown in Figure 7, increasing the length of the diaphragm 6 reduces the number of diaphragms that can be obtained from a single wafer. Also, as shown in Figure 7, if there is a defective area G on the wafer, two out of three diaphragms will be defective, resulting in a poor yield rate. On the other hand, as shown in Figure 8, if the diaphragm 6 is half the length of the one in Figure 7, eight diaphragms 6 can be obtained from a single wafer. Furthermore, even if there is a defective area G in the same location as in Figure 7, six good diaphragms 6 can be obtained, reducing the yield rate. Therefore, shortening the length of the diaphragm 6 can reduce manufacturing costs.

[0026] However, if multiple shortened diaphragms 6 are arranged in a row along the longitudinal direction (X direction) of the head to achieve a longer liquid ejection head, the following problems may occur. As mentioned above, the diaphragm 6 constitutes the bottom surface of the common liquid chamber 1a. Therefore, even if multiple shortened diaphragms 6 are arranged without gaps along the longitudinal direction (X direction) of the head, there is a risk that ink from the common liquid chamber 1a may leak from the joints of the diaphragms 6.

[0027] Therefore, when arranging multiple shortened diaphragms 6 in the longitudinal direction (X direction) of the head, as shown in Figure 9(a), the common liquid chamber 1a is divided at the division points of diaphragms 6-1 and 6-2, and the common liquid chamber 1a is also arranged in multiples in the longitudinal direction (X direction) of the head. In such a configuration, it is necessary to form partition walls between the common liquid chambers 1a in the frame member 1, but due to processing accuracy and strength, the partition walls between the common liquid chambers 1a have a certain thickness.

[0028] If the ease with which ink flows from the common liquid chamber 1a to the nozzle 3a differs between nozzles, the liquid ejection performance will vary. Therefore, it is necessary to make the flow path shape from the common liquid chamber 1a to the nozzle 3a the same (the shape of each opening 6d provided in the diaphragm 6, each pressure chamber 22 provided in the flow path plate 2, each fluid resistance section 21, and each guide flow path section 23). When using the flow path shape from the common liquid chamber 1a to the nozzle 3a of the liquid ejection head with the basic configuration explained using Figures 1 to 5, as shown in Figure 9(a), the spacing of the guide flow path sections 23 formed in the flow path plate 2 where the common liquid chamber 1a is divided widens. As a result, the spacing of the pressure chambers where the common liquid chamber 1a is divided also widens, and the nozzle pitch P2 where the common liquid chamber 1a is divided widens. Therefore, it is not possible to make all nozzle pitches a narrow nozzle pitch P1, which is a problem as it prevents high-resolution image processing. Furthermore, if high resolution is not required, a long liquid dispensing head can be obtained at low cost by setting the nozzle pitch to P2 as shown in Figure 9(a).

[0029] Therefore, in this embodiment, the following configuration is adopted to achieve high density of nozzle 3a and enable high resolution of images.

[0030] Figures 10 to 12 are schematic diagrams of the liquid discharge head 100 of this embodiment. Figure 10 is a cross-sectional view of Figure 11 between A2 and A2, and Figure 11 is a cross-sectional view of Figure 10 between B2 and B2. Figure 12 is an enlarged view of the area enclosed by the dashed line X2 in Figure 10, and Figure 13 is an enlarged view of the area enclosed by the dashed line Y2 in Figure 11. In this embodiment, the liquid ejection head 100 has two diaphragms 6-1, 6-2 and two piezoelectric members 5-1, 5-2 arranged side by side in the longitudinal direction of the head. The common liquid chamber 1a is also divided into two at the center of the head in the longitudinal direction, which is the position where the diaphragms 6 are divided. By arranging the diaphragms 6 side by side in the longitudinal direction in this way, the length of the diaphragms 6 can be shortened, and as mentioned above, the number of diaphragms 6 that can be obtained from a single wafer can be increased. In addition, the yield of the diaphragms 6 can be suppressed, and the manufacturing cost of the liquid ejection head can be reduced. Furthermore, by arranging the piezoelectric members 5 side by side in the longitudinal direction in addition to the diaphragms 6, the length of the piezoelectric members 5 can be shortened, the difficulty of processing the liquid ejection head with high precision can be reduced, and long liquid ejection heads can be manufactured at low cost. In addition, by dividing the common liquid chamber 1a into two at the center of the head in the longitudinal direction, which is the position where the diaphragms 6 are divided, ink leakage from the common liquid chamber 1a can be prevented.

[0031] Furthermore, in the liquid discharge head 100 of this embodiment, as shown in Figures 12 and 13, a connecting pipe 25 is provided that connects the pressure chamber 22 and the nozzle 3a corresponding to the pressure chamber 22. Each connecting pipe 25 is inclined in the longitudinal direction of the head (X direction) such that, when viewed from the short direction of the head (Y direction), the nozzle side is located more centrally in the longitudinal direction of the head (X direction) than the pressure chamber side. This configuration prevents the nozzle pitch from widening where the common liquid chamber 1a is divided. Also, as shown in Figures 12 and 13, the shape of the ink flow path from the common liquid chamber 1a to the nozzle 3a (each opening 6d provided in the diaphragm 6, each pressure chamber 22 provided in the flow path plate 2, each fluid resistance section 21, and each guide flow path section 23) can be made identical.

[0032] This allows the nozzles 3a to be positioned with a narrow nozzle pitch P1, enabling high-resolution images. Furthermore, the shape of the ink flow paths from the common liquid chamber 1a to each nozzle 3a (each opening 6d in the diaphragm 6, each pressure chamber 22 in the flow path plate 2, each fluid resistance section 21, and each guide flow path section 23) can be made identical, ensuring identical liquid ejection performance for each nozzle 3a. This makes it possible to lengthen the liquid ejection head at a low cost while ensuring high resolution and good ejection performance.

[0033] In the liquid discharge head of this embodiment, as shown in Figure 12, a communication pipe 25 that is inclined in the longitudinal direction (X direction) of the head when viewed from the short direction (Y direction) of the head is formed by stacking a plurality of plate-shaped members 2D1 to 2D5. Specifically, the position of the through holes that constitute a part of the communication pipe 25 of each plate-shaped member 2D1 to 2D5 is shifted slightly in the longitudinal direction (X direction) of the head, thereby forming a communication pipe 25 that is inclined in the longitudinal direction (X direction) of the head. With this configuration, a communication pipe 25 that extends in the head height direction (Z direction), which is the liquid discharge direction, and is inclined in the longitudinal direction (X direction) of the head when viewed from the short direction (Y direction) of the head can be formed simply by stacking a plurality of plate-shaped members 2D1 to 2D5. This makes it possible to easily form the communication pipe 25.

[0034] Figure 14 shows a modified example of the connecting pipe 25, and Figure 15 is a perspective view showing the ink flow path from the pressure chamber 22 to the nozzle 3a in the modified example. As shown in Figures 14(a) and 15, in this modified example, the connecting pipe 25 extends in the short direction of the head (Y direction) and is inclined in the longitudinal direction of the head (X direction) when viewed from the height direction of the head (Z direction). In this modified example, each connecting pipe 25 is also inclined in the longitudinal direction of the head (X direction) such that the nozzle side is located more centrally in the longitudinal direction of the head (X direction) than the pressure chamber side.

[0035] In this modified example, the nozzle pitch widening at the point where the common liquid chamber 1a is divided is prevented, and the flow path shape from the common liquid chamber 1a to the nozzle 3a (each opening 6d provided in the diaphragm 6, each pressure chamber 22 provided in the flow path plate 2, each fluid resistance section 21, and each guide flow path section 23) can be made identical. Therefore, even in this modified configuration, the nozzles 3a can be arranged with a narrow nozzle pitch P1, achieving high resolution. Furthermore, the shape of the ink flow path from the common liquid chamber 1a to each nozzle 3a (each opening 6d provided in the diaphragm 6, each pressure chamber 22 provided in the flow path plate 2, each fluid resistance section 21, and each guide flow path section 23) can be made identical, and the liquid ejection performance of each nozzle 3a can be made identical. As a result, even in the configuration of Modified Example 1, it is possible to lengthen the liquid ejection head at low cost while ensuring high resolution and good ejection performance.

[0036] In a modified example, as shown in Figures 14(b) and 14(c), the flow path from the pressure chamber 22 to the nozzle 3a can be formed using two plate-shaped members: a plate-shaped member 2D2 on which the connecting pipe 25 is formed, and a plate-shaped member 2D1 on which a connecting hole 25a connecting the pressure chamber 22 and the connecting pipe 25 is formed. This allows the flow path from the pressure chamber 22 to the nozzle 3a to be formed with fewer plate-shaped members compared to the connecting pipe 25 in the embodiment, which extends in the head height direction (Z direction) and is inclined in the head longitudinal direction (X direction) when viewed from the head short side direction (Y direction). Therefore, the number of parts can be reduced, and the cost increase of the liquid discharge head can be suppressed. In addition, the height of the liquid discharge head can be reduced.

[0037] Furthermore, the connecting pipe 25 may be a combination of the connecting pipe of the embodiment and the connecting pipe of the modified example. Specifically, it is a connecting pipe that is inclined in the longitudinal direction of the head (X direction) when viewed from either the short direction of the head (Y direction) or the height direction of the head (Z direction).

[0038] Next, an example of a liquid dispensing device equipped with the liquid dispensing heads 100 described above will be explained with reference to Figures 16 and 17. Figure 16 is a plan view illustrating the main parts of the device, and Figure 17 is a side view illustrating the main parts of the device. This device is a serial type device, and the carriage 403 reciprocates in the main scanning direction by the main scanning movement mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, etc. The guide member 401 is stretched across the left and right side plates 491A and 491B and holds the carriage 403 in a movable position. The carriage 403 is then reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 stretched between the drive pulley 406 and the driven pulley 407.

[0039] The carriage 403 is equipped with a liquid ejection unit 440 that integrates a liquid ejection head device 404 and a head tank 441. The liquid ejection head device 404 of the liquid ejection unit 440 includes a recording section that ejects liquids of various colors, such as yellow (Y), cyan (C), magenta (M), and black (K). The liquid ejection head device 404 also has recording heads arranged in a staggered pattern, each with a nozzle row similar to that of the liquid ejection head 100 in the above-described embodiment. The direction of the nozzle row is aligned with the sub-scanning direction (head longitudinal direction) perpendicular to the main scanning direction, and the ejection direction is mounted downwards.

[0040] A supply mechanism 494 supplies liquid stored outside the liquid discharge head device 404 to the liquid discharge head device 404, thereby supplying the head tank 441 with the liquid stored in the liquid cartridge 450.

[0041] The supply mechanism 494 consists of a cartridge holder 451, which is a filling section for mounting the liquid cartridge 450, a tube 456, a liquid delivery unit 452 including a liquid delivery pump, and the like. The liquid cartridge 450 is detachably mounted in the cartridge holder 451. Liquid is delivered from the liquid cartridge 450 to the head tank 441 via the tube 456 by the liquid delivery unit 452.

[0042] This device includes a transport mechanism 495 for transporting paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

[0043] The conveyor belt 412 picks up the paper 410 and transports it to a position opposite the liquid discharge head device 404. This conveyor belt 412 is an endless belt and is stretched between the conveyor roller 413 and the tension roller 414. Pickup can be performed by electrostatic attraction or air suction.

[0044] Then, the conveyor belt 412 moves in a circular motion in the sub-scanning direction as the conveyor rollers 413 are rotationally driven by the sub-scanning motor 416 via the timing belt 417 and timing pulley 418.

[0045] Furthermore, a maintenance and recovery mechanism 420 for maintaining and recovering the liquid discharge head device 404 is positioned on one side of the carriage 403 in the main scanning direction, next to the conveyor belt 412.

[0046] The maintenance and recovery mechanism 420 consists of, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzle is formed) of the liquid discharge head device 404, and a wiper member 422 that wipes the nozzle surface.

[0047] The main scanning movement mechanism 493, the supply mechanism 494, the maintenance and recovery mechanism 420, and the transport mechanism 495 are mounted on a housing that includes side plates 491A, 491B, and a back plate 491C.

[0048] In this configured device, the paper 410 is fed onto the transport belt 412 and picked up, and the paper 410 is transported in the sub-scanning direction by the circumferential movement of the transport belt 412.

[0049] Therefore, by moving the carriage 403 in the main scanning direction and driving the liquid ejection head device 404 in accordance with the image signal, liquid is ejected onto the stationary paper 410 to form an image.

[0050] Thus, since this device is equipped with the liquid discharge head 100 according to the present invention, high-resolution images can be stably formed.

[0051] Next, another example of the liquid dispensing unit according to the present invention will be described with reference to Figure 18. Figure 18 is a plan view illustrating the main components of the unit.

[0052] This liquid discharge unit consists of a housing portion comprising side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and a liquid discharge head device 404, which are components of the liquid discharge device.

[0053] Furthermore, a liquid dispensing unit can also be configured by further attaching, for example, the side plate 491B of this liquid dispensing unit to at least one of the aforementioned maintenance and recovery mechanism 420 and supply mechanism 494.

[0054] Next, another example of a liquid dispensing unit will be described with reference to Figure 19. Figure 19 is a front view diagram of the unit.

[0055] This liquid discharge unit consists of a liquid discharge head device 404 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

[0056] The flow path component 444 is located inside the cover 442. A head tank 441 can be included instead of the flow path component 444. Furthermore, a connector 443 for electrical connection to the liquid discharge head device 404 is provided on the upper part of the flow path component 444.

[0057] In this application, "liquid dispensing device" refers to a device that includes a liquid dispensing head, a liquid dispensing head device, or a liquid dispensing unit, and drives the liquid dispensing head to dispense liquid. A liquid dispensing device includes not only devices that can dispense liquid onto objects to which liquid can adhere, but also devices that dispense liquid into air or into liquid.

[0058] This "liquid dispensing device" may also include means for feeding, transporting, and dispensing paper onto materials to which liquid can adhere, as well as pre-treatment devices, post-treatment devices, etc.

[0059] For example, "devices that dispense liquids" include image forming machines, which dispense ink to form images on paper, and three-dimensional molding machines, which dispense molding liquid into a powder layer formed in layers to create three-dimensional objects.

[0060] Furthermore, "devices that dispense liquid" are not limited to those that visualize meaningful images such as letters or figures through the dispensed liquid. For example, devices that form patterns that do not have meaning in themselves, or devices that create three-dimensional images, are also included.

[0061] The term "materials to which liquid can adhere" refers to materials to which liquid can adhere, at least temporarily, including materials to which liquid adheres and solidifies, or adheres and penetrates. Specific examples include recording materials such as paper, recording paper, film, and cloth; electronic components such as electronic circuit boards and piezoelectric elements; powder layers; organ models; and inspection cells. Unless otherwise specified, it includes all materials to which liquid can adhere.

[0062] The materials referred to as "materials to which liquid can adhere" include paper, thread, fibers, fabrics, leather, metal, plastic, glass, wood, ceramics, building materials such as wallpaper and flooring, and textiles for clothing, as long as liquid can adhere to them, even temporarily.

[0063] Furthermore, "liquid" also includes inks, processing solutions, DNA samples, resists, patterning materials, binders, molding fluids, or solutions and dispersions containing amino acids, proteins, calcium, etc.

[0064] Furthermore, "liquid dispensing devices" include devices in which the liquid dispensing head and the surface to which the liquid can adhere move relative to each other, but are not limited to these. Specific examples include serial-type devices in which the liquid dispensing head moves, and line-type devices in which the liquid dispensing head does not move.

[0065] Other examples of "devices that dispense liquids" include processing liquid coating devices that dispense processing liquid onto the surface of paper for purposes such as modifying the surface of the paper, and injection granulation devices that granulate fine particles of raw materials by spraying a composition liquid, in which raw materials are dispersed in a solution, through a nozzle.

[0066] Furthermore, the "liquid dispensing apparatus" according to the present invention also includes apparatus for manufacturing electrodes and electrochemical elements. The electrode manufacturing apparatus will be described below.

[0067] Figure 20 is a schematic diagram showing an example of an electrode manufacturing apparatus according to an embodiment of the present invention. The electrode manufacturing apparatus is a device that manufactures electrodes containing a layer having electrode material by discharging a liquid composition using a head module that includes a liquid discharging head.

[0068] The discharge means provided in the electrode manufacturing apparatus shown in Figure 20 is a head module including the liquid discharge head 100 according to the embodiment described above. A liquid composition is discharged from the liquid discharge head 100 of the head module, thereby applying the liquid composition to the target object and forming a liquid composition layer. The target object (hereinafter sometimes referred to as the "discharge target object") is not particularly limited as long as it is an object on which a layer containing electrode material is formed, and can be appropriately selected according to the purpose. For example, the target object may be an electrode substrate (current collector), an active material layer, or a layer containing solid electrode material. The target object may also be an electrode composite layer containing active material on an electrode substrate (current collector). Furthermore, the discharge means and discharge process may be means and processes for forming a layer containing electrode material by directly discharging the liquid composition, as long as it is possible to form a layer containing electrode material on the discharge target object. Alternatively, the discharge means and discharge process may be means and processes for forming a layer containing electrode material by indirectly discharging the liquid composition.

[0069] Other components included in the electrode composite layer manufacturing apparatus are not particularly limited and can be appropriately selected according to the purpose. Similarly, other processes included in the electrode composite layer manufacturing method are not particularly limited and can be appropriately selected according to the purpose. For example, components and processes included in the electrode composite layer manufacturing apparatus and manufacturing method include heating means and heating processes.

[0070] The heating means included in the electrode composite layer manufacturing apparatus is a means for heating the liquid composition discharged by the discharge means. Furthermore, the heating step included in the electrode composite layer manufacturing method is a step for heating the liquid composition discharged in the discharge step. By heating the liquid composition, the liquid composition layer can be dried.

[0071] Here, as an example of an electrode manufacturing apparatus, we will describe an electrode manufacturing apparatus that forms an electrode composite layer containing an active material on an electrode substrate (current collector). As shown in Figure 20, the electrode manufacturing apparatus includes an ejection process section 110 which includes a step of applying a liquid composition onto a printing substrate 704 having an object to be ejected to form a liquid composition layer, and a heating process section 130 which includes a heating step of heating the liquid composition layer to obtain an electrode composite layer.

[0072] The electrode manufacturing apparatus includes a transport unit 705 for transporting the printing substrate 704. The transport unit 705 transports the printing substrate 704 at a preset speed in the order of the discharge process unit 110 and the heating process unit 130. There are no particular restrictions on the method for manufacturing the printing substrate 704 having an object to be discharged, such as an active material layer, and known methods can be appropriately selected. The discharge process unit 110 includes a liquid discharge head 100 that performs a dispensing process for applying a liquid composition onto the printing substrate 704, a container 111 that contains the liquid composition 707, and a supply tube 112 that supplies the liquid composition 707 contained in the container 111 to the liquid discharge head 100.

[0073] In the discharge process section 110, the liquid composition 707 is discharged from the liquid discharge head 100 and applied to the printing substrate 704, forming a thin film layer of the liquid composition. The containment container 111 may be integrated with the electrode composite layer manufacturing apparatus, or it may be detachable from the electrode composite layer manufacturing apparatus. Alternatively, the containment container 111 may be a container used for adding to a containment container integrated with the electrode composite layer manufacturing apparatus, or a containment container detachable from the electrode composite layer manufacturing apparatus.

[0074] The containment container 111 and the supply tube 112 can be arbitrarily selected as long as they are capable of stably containing and supplying the liquid composition 707.

[0075] In the heating section 130, a solvent removal step is performed in which the solvent remaining in the liquid composition layer is heated and removed. Specifically, the solvent remaining in the liquid composition layer is heated and dried by the heating device 703 of the heating section 130, thereby removing the solvent from the liquid composition layer. This forms the electrode composite layer. Furthermore, the solvent removal step in the heating section 130 may be performed under reduced pressure.

[0076] There are no particular restrictions on the heating device 703, and it can be appropriately selected according to the purpose. For example, the heating device 703 can be a substrate heater, an IR heater, or a hot air heater. Alternatively, the heating device 703 may be a combination of at least two of the substrate heater, IR heater, and hot air heater. Furthermore, the heating temperature and heating time can be appropriately selected according to the boiling point of the solvent contained in the liquid composition 707 or the film thickness to be formed.

[0077] By using the electrode manufacturing apparatus according to the embodiment of the present invention, a liquid composition can be discharged to a target location. The electrode mixture layer can be suitably used, for example, as part of the configuration of an electrochemical element. There are no particular restrictions on components other than the electrode mixture layer in the electrochemical element, and known components can be appropriately selected. For example, components other than the electrode mixture layer include a positive electrode, a negative electrode, a separator, etc.

[0078] A "liquid dispensing unit" is a collection of components related to liquid dispensing, in which functional parts and mechanisms are integrated with a liquid dispensing head. For example, a "liquid dispensing unit" may include a combination of a liquid dispensing head with at least one of the following components: a head tank, carriage, supply mechanism, maintenance and recovery mechanism, and main scanning and moving mechanism.

[0079] Here, integration includes, for example, cases where the liquid dispensing head and functional components or mechanisms are fixed to each other by fastening, bonding, engaging, etc., or where one is held movably relative to the other. Furthermore, the liquid dispensing head and functional components or mechanisms may be configured to be detachable from each other.

[0080] For example, some liquid dispensing units, such as the liquid dispensing unit 440 shown in Figure 18, have a liquid dispensing head and head tank integrated into one unit. Others have a liquid dispensing head and head tank integrated into one unit, connected to each other by tubes or similar means. It is also possible to add a unit containing a filter between the head tank and the liquid dispensing head of these liquid dispensing units.

[0081] Additionally, some liquid dispensing units have an integrated liquid dispensing head and carriage.

[0082] Furthermore, some liquid dispensing units integrate the liquid dispensing head and the scanning mechanism by movably holding the liquid dispensing head in a guide member that constitutes part of the scanning mechanism. Additionally, as shown in Figure 17, some liquid dispensing units integrate the liquid dispensing head, carriage, and main scanning mechanism.

[0083] Furthermore, some liquid dispensing units integrate the liquid dispensing head, carriage, and maintenance / recovery mechanism by fixing a cap component, which is part of the maintenance / recovery mechanism, to a carriage to which the liquid dispensing head is attached.

[0084] Furthermore, as shown in Figure 19, some liquid discharge units have a head tank or a liquid discharge head to which a flow path component is attached, to which a tube is connected, integrating the liquid discharge head and the supply mechanism.

[0085] The main scanning movement mechanism shall include the guide member alone. The supply mechanism shall also include the tube alone and the loading section alone.

[0086] Furthermore, the "liquid discharge head" is not limited to any specific actuator. For example, in addition to the piezoelectric element described in the above embodiment (which may be a multilayer piezoelectric element), a thermal actuator using an electrothermal conversion element such as a heating resistor, or an electrostatic actuator consisting of a diaphragm and a counter electrode may also be used.

[0087] Furthermore, in the terminology used in this application, image formation, recording, printing, copying, printing, and shaping are all considered synonymous.

[0088] Finally, the embodiments described above are presented as examples and are not intended to limit the scope of the present invention. Each of these novel embodiments can be carried out in various other forms, and various omissions, substitutions, and modifications are possible without departing from the spirit of the invention. Such embodiments and variations thereof are included in the scope and spirit of the invention, as well as in the claims and their equivalents.

[0089] The above is just one example; each of the following embodiments produces its own unique effects. (Aspect 1) A liquid discharge head having a plurality of nozzles 3a arranged in the longitudinal direction (X direction) of the head, a plurality of pressure chambers 22 communicating with each of the plurality of nozzles 3a, a diaphragm 6 forming the wall portion of the plurality of pressure chambers 22, and an actuator element such as a piezoelectric member 5 that drives the diaphragm 6, wherein a plurality of diaphragms 6 are arranged side by side in the longitudinal direction of the head. As shown in Figure 7, the diaphragm 6 is obtained by cutting a rectangular shape from the wafer. However, as the length of the liquid discharge head increases, the length of the diaphragm also increases, resulting in a decrease in the number of diaphragms that can be obtained from a single wafer. Furthermore, the increased length of the diaphragm leads to a greater number of defective diaphragms, worsening the yield rate. As a result, there was a problem of increased manufacturing costs. In contrast, in Embodiment 1, by arranging multiple diaphragms in a row along the longitudinal direction, the length of the liquid discharge head can be increased while suppressing the lengthening of the diaphragms. By suppressing the lengthening of the diaphragms, the number of diaphragms 6 obtained from a single wafer can be increased, as shown in Figure 8. In addition, the number of defective diaphragms 6 can be reduced, improving the yield rate. As a result, the manufacturing cost of the diaphragms 6 can be reduced, and the manufacturing cost of the long liquid discharge head can be reduced.

[0090] (Aspect 2) In embodiment 1, two diaphragms 6 are arranged side by side in the longitudinal direction (X direction) of the head, and each pressure chamber 22 is connected to the corresponding nozzle 3a by a connecting pipe 25, and each connecting pipe 25 is inclined in the longitudinal direction of the head. As described in the embodiment, the diaphragm 6 generally extends in the longitudinal direction of the head and constitutes part of the wall or bottom surface of the common liquid chamber 1a that supplies liquid such as ink to each pressure chamber 22. In addition, the nozzle 3a is generally formed directly below the pressure chamber 22. Even if multiple diaphragms 6 are arranged side by side in the longitudinal direction (X direction) of the head without any gaps, liquid such as ink in the common liquid chamber will leak out at the joints between the diaphragms. For this reason, the common liquid chamber 1a is divided at the division points of the diaphragm 6, and multiple common liquid chambers 1a are arranged side by side in the longitudinal direction (X direction) of the head, just like the diaphragms 6. To ensure machining accuracy and strength, the partition walls separating the common liquid chambers 1a will have a certain thickness. If a pressure chamber is located at the same position as these partition walls in the longitudinal direction of the head (X direction), the ease with which liquid flows from the common liquid chambers 1a to these pressure chambers 22 will differ from that of pressure chambers 22 (hereinafter referred to as "other pressure chambers") located at the same position as the common liquid chambers 1a in the longitudinal direction of the head. As a result, the discharge performance of the liquid discharged from a nozzle 3a communicating with the pressure chamber located at the position of the partition walls separating the common liquid chambers 1a in the longitudinal direction of the head may differ from that of a nozzle communicating with the other pressure chambers. Consequently, in the longitudinal direction of the head, the pressure chamber 22 cannot be positioned at the location of the partition wall separating the common liquid chamber 1a, and the distance between the pressure chambers on either side of this partition wall becomes greater than the thickness of the partition wall. As a result, in the longitudinal direction of the head, the distance between the nozzles communicating with the pressure chambers located closest to the partition wall becomes large. If the nozzle pitch is set to match this distance between nozzles, the distance between droplets that land on the medium such as recording paper becomes large, resulting in the problem of not being able to form high-resolution images. In contrast, in embodiment 2, a connecting pipe 25 is provided that connects the pressure chamber and the nozzle, and this connecting pipe 25 is inclined in the longitudinal direction of the head. By inclining the connecting pipe in the longitudinal direction of the head, it becomes possible to position each nozzle at a position offset in the longitudinal direction of the head relative to the corresponding pressure chamber. As a result, as explained using Figure 12, the pressure chamber closest to the partition wall separating the common liquid chambers 1a is positioned in the longitudinal direction of the head where the common liquid chambers 1a are located, and the nozzle 3a corresponding to that pressure chamber is positioned where the partition wall is located. As a result, the nozzle pitch can be made narrower than the thickness of the partition wall, the distance between droplets that land on the medium such as recording paper can be shortened, and high-resolution images can be formed. Furthermore, each pressure chamber 22 can be positioned in the longitudinal direction of the head where the common liquid chamber 1a is located, making the flow path from the common liquid chamber 1a to each pressure chamber 22 identical, and thus the ease of liquid flow from the common liquid chamber 1a to each pressure chamber 22 identical. In addition, by making each connecting pipe 25 the same shape, the liquid flow from the pressure chamber 22 to the nozzle 3a can be made identical. As a result, the liquid discharge performance of each nozzle 3a can be made identical.

[0091] (Aspect 3) In embodiment 2, the diaphragm 6 is divided into two parts in the center of the longitudinal direction of the head, and the connecting pipe 25 is inclined such that the nozzle side is located closer to the center in the longitudinal direction of the head than the pressure chamber side. According to this, as described in the embodiment, the nozzle pitch can be narrowed, and high resolution can be achieved.

[0092] (Aspect 4) In embodiment 2 or 3, the connecting pipe 25 has a predetermined length in the liquid discharge direction (Z direction), such as the head height direction, and is inclined in the head longitudinal direction (X direction) when viewed from the head short side direction (Y direction). According to this, as described in the embodiment, a connecting pipe 25 inclined in the longitudinal direction (X direction) of the head can be formed by stacking multiple plate-like members.

[0093] (Appendix 5) In embodiment 4, the connecting pipe 25 is formed by stacking a plurality of plate-shaped members 2D1 to 2D5, and by shifting the through holes that constitute a part of the connecting pipe in each plate-shaped member 2D1 to 2D5 in the longitudinal direction of the head (X direction), a connecting pipe 25 is formed that is inclined in the longitudinal direction of the head (X direction) when viewed from the short direction of the head (Y direction). According to this, as described in the embodiment, a connecting pipe 25 that is inclined in the longitudinal direction (X direction) of the head when viewed from the short direction (Y direction) of the head can be easily formed.

[0094] (Aspect 6) In any of embodiments 2 to 5, the connecting pipe 25 has a portion that extends in the short-side exit direction of the head (Y direction), and the portion of the connecting pipe 25 that extends in the short-side exit direction of the head is inclined in the longitudinal direction of the head (X direction) when viewed from the liquid discharge direction (Z direction), which is the head height direction. According to this, as explained using Figures 14 and 15, the number of plate-shaped members used to form the connecting pipe can be reduced, the number of parts can be reduced, and the cost of the liquid discharge head can be reduced. In addition, the head height of the liquid discharge head can be reduced.

[0095] (Aspect 7) In any of embodiments 1 to 6, there is a common liquid chamber 1a leading to a plurality of pressure chambers 22, the diaphragm 6 constitutes at least a part of the wall or bottom surface of the common liquid chamber 1a, and the common liquid chamber 1a is divided at the division point of the two diaphragms in the longitudinal direction of the head. According to this, as described in the embodiment, it is possible to prevent the liquid in the common liquid chamber 1a from leaking out to the outside.

[0096] (Pattern 8) In any of embodiments 1 to 7, the actuator elements, such as the piezoelectric member 5, are arranged in a plurality in the longitudinal direction of the head. According to this, the liquid discharge head can be lengthened without lengthening actuator elements such as the piezoelectric member 5. This reduces the difficulty of machining the liquid discharge head and lowers manufacturing costs.

[0097] (Aspect 9) In a liquid dispensing device equipped with a liquid dispensing head 100, one of the liquid dispensing heads of embodiment 1 to 8 was used as the liquid dispensing head 100. This makes it possible to reduce the cost of devices that dispense liquids. [Explanation of symbols]

[0098] 1: Frame member 1a: Common liquid chamber 1b:Communication hole 2: Flow channel plate 3: Nozzle plate 3a: Nozzle 4: Base component 5: Piezoelectric component 5A: Piezoelectric element (drive unit) 5B: Piezoelectric element (non-driving part) 6: Vibration plate 6A: 1st layer 6a: Diaphragm section 6b: Convex part 6d: opening 7: FPC 8: Piezoelectric Actuator 21: Fluid resistance section 22: Pressure chamber 23: Guide channel section 25:Communication pipe 25a: Communication hole 100: Liquid dispensing head 404: Liquid dispensing head device 440: Liquid Dispensing Unit [Preliminary Technology Documents] [License]

[0099] [License 1] Patent No. 5168934

Claims

1. Multiple nozzles arranged in the longitudinal direction of the head, Multiple pressure chambers communicating with each of the multiple nozzles, A diaphragm constituting the wall portion of multiple pressure chambers, A liquid discharge head having an actuator element that drives the diaphragm, The liquid discharge head is characterized in that the diaphragms are arranged in a plurality in the longitudinal direction of the head.

2. In the liquid discharge head according to claim 1, The diaphragms are arranged in pairs in the longitudinal direction of the head. Each pressure chamber is connected to the corresponding nozzle by a connecting pipe. A liquid dispensing head characterized in that each connecting pipe is inclined in the longitudinal direction of the head.

3. In the liquid dispensing head according to claim 2, The diaphragm is divided into two parts in the center of the longitudinal direction of the head. The liquid discharge head is characterized in that the connecting pipe is inclined such that the nozzle side is located closer to the center in the longitudinal direction of the head than the pressure chamber side.

4. In the liquid dispensing head according to claim 2, The aforementioned connecting pipe extends from the pressure chamber in the direction of liquid discharge and is connected to the nozzle. A liquid discharge head characterized in that the connecting pipe is inclined in the longitudinal direction of the head when viewed from the short side of the head.

5. In the liquid discharge head according to claim 4, The aforementioned connecting pipe is formed by stacking multiple plate-shaped members, A liquid discharge head characterized in that, by shifting the through holes that constitute a part of the connecting pipe of each plate-shaped member in the longitudinal direction of the head, the connecting pipe is formed inclined in the longitudinal direction of the head when viewed from the short direction of the head.

6. In the liquid dispensing head according to claim 2, The aforementioned connecting pipe has a portion that extends in the direction of the short end of the head, A liquid discharge head characterized in that the portion of the connecting pipe extending in the short-side discharge direction of the head is inclined in the longitudinal direction of the head when viewed from the liquid discharge direction.

7. In the liquid discharge head according to claim 1, It has a common liquid chamber that leads to multiple pressure chambers, The diaphragm constitutes at least a part of the wall or bottom surface of the common liquid chamber. The liquid discharge head is characterized in that the common liquid chamber is divided at the division points of the diaphragm in the longitudinal direction of the head.

8. In the liquid discharge head according to claim 1, The liquid dispensing head is characterized in that the actuator elements are arranged in a plurality in the longitudinal direction of the head.

9. In a device for dispensing liquid equipped with a liquid dispensing head, A liquid dispensing device characterized by using the liquid dispensing head described in claim 1 as the liquid dispensing head.

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