Light source device, exposure device, and method for manufacturing articles

Abstract

This technology offers advantages in maintaining uniform illumination even if a light-emitting element fails. [Solution] The light source device has an element array section in which a plurality of light-emitting elements are arranged, and the plurality of light-emitting elements form a plurality of light-emitting element groups, each of the plurality of light-emitting element groups includes a plurality of light-emitting element subgroups in which the light-emitting elements are connected in series, and the plurality of light-emitting element subgroups are distributed so that light-emitting element subgroups of other light-emitting element groups are interposed between them.

Description

Technical Field

[0001] The present invention relates to a light source device, an exposure device, and an article manufacturing method.

Background Art

[0002] An exposure device is a device that transfers a pattern of a master (reticle, mask) onto a photosensitive substrate (a wafer, a glass plate, etc. having a resist layer formed on its surface) through a projection optical system in a lithography process, which is a manufacturing process for semiconductor devices, liquid crystal display devices, etc. For example, in an exposure device for transferring a pattern onto a liquid crystal display device, in recent years, there has been a demand for collectively exposing a larger area pattern on the master onto the substrate. To meet this demand, a scanning exposure device that adopts a step-and-scan method capable of obtaining high resolution and exposing a large screen has been proposed. This scanning exposure device transfers a pattern illuminated by a slit light beam onto the substrate through a scanning operation via a projection optical system.

[0003] Conventionally, a mercury lamp has been used as a light source for an exposure device, but in recent years, it has been gradually replaced by a light emitting diode (LED), which is a solid light emitting element. Since the time from when a current is passed through a substrate circuit for controlling light emission until the light output becomes stable is short for an LED, and it is not necessary to always emit light like a mercury lamp, it has the advantages of energy saving and long life.

[0004] In order to use an LED as a light source for an exposure device, for example, it is necessary to arrange several thousand LED elements on a substrate and superimpose the light from each LED element. However, in a circuit in which a plurality of LED elements are connected in series, if even one LED element fails, all the LED elements will not light up.

[0005] Patent Document 1 discloses a light source device configured such that multiple LED elements are divided into multiple groups, the LED elements within each group are connected in series, and each group receives current from a current source arranged separately for each group. As a result, even if one LED element fails, the failure to light is limited to the group containing that element and does not affect the other groups. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 7-262810 [Overview of the project] [Problems that the invention aims to solve]

[0007] However, in the configuration disclosed in Patent Document 1, a group of LED elements are concentrated in the same area. Therefore, if any of the LED elements within that group fail, the entire area will become unlit, which can affect the uniformity of illumination.

[0008] This invention provides a technology that is advantageous for maintaining illumination uniformity even if a light-emitting element fails. [Means for solving the problem]

[0009] According to one aspect of the present invention, a light source device is provided having an element array portion in which a plurality of light-emitting elements are arranged, wherein the plurality of light-emitting elements form a plurality of light-emitting element groups, each of the plurality of light-emitting element groups includes a plurality of light-emitting element subgroups in which the light-emitting elements are connected in series, and the plurality of light-emitting element subgroups are distributed such that light-emitting element subgroups of other light-emitting element groups are interposed between them. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a technology that is advantageous in maintaining illuminance uniformity even if a light-emitting element fails. [Brief explanation of the drawing]

[0011] [Figure 1] A diagram showing the configuration of an exposure apparatus. [Figure 2] A diagram showing the configuration of a conventional light source device. [Figure 3] A diagram showing the configuration of the light source device in the embodiment. [Figure 4] A diagram illustrating the mechanism that satisfies the requirement of uniform illumination. [Figure 5] A diagram illustrating the effects of the embodiment. [Figure 6] A diagram illustrating the effects of the embodiment. [Figure 7] A diagram illustrating the process of compensating for the decrease in illuminance. [Figure 8] A diagram showing the configuration of the light source device in the embodiment. [Modes for carrying out the invention]

[0012] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, identical or similar configurations are given the same reference numerals, and redundant descriptions are omitted.

[0013] <First Embodiment> Figure 1 shows the configuration of an exposure apparatus in an embodiment. The exposure apparatus may include a light source device 101 and an illumination optical system 150 that illuminates the master plate with light from the light source device 101. The illumination optical system 150 may include a shaping unit 102, an optical integrator 103, a condenser lens 104, an aperture 105, and a condenser lens 106. Light emitted from the light source device 101 is incident on the optical integrator 103 via the shaping unit 102. The shaping unit 102 can change the shape and size of the light incident on the optical integrator 103. The optical integrator 103 has the function of making the illuminance distribution of the illuminated surface uniform. The optical integrator 103 is composed of, for example, a fly-eye lens. The fly-eye lens consists of a collection of multiple microlenses, and multiple secondary light sources are formed near its light emission surface. Light emitted from the optical integrator 103 illuminates the aperture 105 (illumination field aperture) via the condenser lens 104. The aperture 105 has an opening that defines the illumination range of the illuminated surface of the reticle 107 (master plate) or wafer 109 (substrate).

[0014] The condenser lens 106 is an imaging optical system that images the aperture of the diaphragm 105 onto the illuminated surface. The diaphragm 105 and the reticle 107 are in an imaging relationship through the condenser lens 106. In the example in Figure 1, the condenser lens 106 may include lens 106a, a folded mirror 106b, and lens 106c. However, the configuration of the condenser lens 106 is not limited to this. Light that has passed through the diaphragm 105 illuminates the reticle 107 through the condenser lens 106.

[0015] A pattern (e.g., a circuit pattern) is formed on the reticle 107. The pattern on the reticle 107 is imaged onto the wafer 109 mounted on the wafer stage 110 (substrate stage) by the projection optical system 108. The wafer stage 110 is equipped with an illuminance sensor 111 (measurement unit) for measuring the illuminance on the wafer surface.

[0016] The control unit C controls the operations of each part of the exposure apparatus. The control unit C can be constituted by, for example, a PLD (abbreviation for Programmable Logic Device) such as an FPGA (abbreviation for Field Programmable Gate Array), or an ASIC (abbreviation for Application Specific Integrated Circuit), or a general-purpose computer in which a program is incorporated, or a combination of all or part of these. In an embodiment, the control unit C may include a processor 112 and a memory 113. The driving unit 114 can drive the blades of the aperture 105 in response to a command from the control unit C.

[0017] FIG. 2 is a diagram showing the configuration of a conventional light source device. The light source device has an element array unit 50 in which a plurality of LED elements (a plurality of light-emitting elements) are arranged. The element array unit 50 has a plurality of LED substrates 10 (a plurality of light-emitting element substrates) on which a plurality of LEDs are mounted and are arranged in a matrix. In the example of FIG. 2, the plurality of LED substrates 10 are composed of 14 LED substrates arranged in 2 rows × 7 columns. The plurality of LED elements on each LED substrate form a plurality of LED groups (a plurality of light-emitting element groups). As shown in the enlarged view of the LED substrate 10 in FIG. 2, the plurality of LED groups may include an LED group 1, an LED group 2, an LED group 3, and an LED group 4. In each LED group, the plurality of LED elements are connected in series.

[0018] When the outer periphery of the LED substrate 10 is regarded as a quadrilateral shape, the connector 30 is arranged along a direction along a predetermined side among the four sides. A plurality of constant current source circuits 20 for supplying a constant current to each of the plurality of LED groups are connected to the connector 30. The number of the plurality of constant current source circuits 20 is the same as the number of the plurality of LED groups (in the example of FIG. 2, 4). Each of the plurality of constant current source circuits 20 is connected to the corresponding LED group so as to supply a constant current via the connector 30.

[0019] Each LED group may include a plurality of LED sub - groups (a plurality of light - emitting element sub - groups) in which the light - emitting elements are connected in series. However, in the prior art shown in FIG. 2, it is not necessary for the LED group to be divided into a plurality of LED sub - groups. For the sake of easy comparison with the configuration of the present embodiment described later by referring to FIG. 3, a plurality of LED sub - groups are defined for convenience.

[0020] LED group 1 includes a first LED sub - group 11 and a second LED sub - group 12 adjacent to each other. LED group 2 includes a first LED sub - group 21 and a second LED sub - group 22 adjacent to each other. LED group 3 includes a first LED sub - group 31 and a second LED sub - group 32 adjacent to each other. LED group 4 includes a first LED sub - group 41 and a second LED sub - group 42 adjacent to each other.

[0021] In the conventional arrangement shown in FIG. 2, the LED sub - groups within each LED group are adjacent to each other, and the LED elements are concentratedly arranged in each LED group. In this case, a simple layout in which the LED sub - groups within one LED group are connected at the shortest distance is realized.

[0022] Figure 3 shows the configuration of the light source device 101 in the first embodiment. The same or similar configurations as in Figure 2 are given the same reference numerals. The light source device 101 has an element array section 50 in which a plurality of LED elements (a plurality of light-emitting elements) are arranged. The element array section 50 has a plurality of LED substrates 10 (a plurality of light-emitting element substrates) on which a plurality of LEDs are mounted, arranged in a matrix. In the example of Figure 3, the plurality of LED substrates 10 consists of 14 LED substrates arranged in 2 rows x 7 columns. The plurality of LED elements on each LED substrate form a plurality of LED groups (a plurality of light-emitting element groups). As shown in the enlarged view of the LED substrate 10 in Figure 3, the plurality of LED groups may include a first light-emitting element group (hereinafter referred to as "LED group 1"), a second light-emitting element group (hereinafter referred to as "LED group 2"), a third light-emitting element group (hereinafter referred to as "LED group 3"), and a fourth light-emitting element group (hereinafter referred to as "LED group 4"). However, the number of LED substrates 10 configured in the element array section 50 and the number of LED groups within each substrate are merely examples and are not limited to these.

[0023] When the outer perimeter of the LED substrate 10 is viewed as a quadrilateral shape, connectors 30 are arranged along predetermined sides of the quadrilateral. Multiple constant current source circuits 20 are connected to the connectors 30, supplying a constant current to each of the multiple LED groups. The number of multiple constant current source circuits 20 is the same as the number of multiple LED groups (four in the example in Figure 3). Each of the multiple constant current source circuits 20 is connected to the corresponding LED group via the connectors 30 to supply a constant current.

[0024] Each LED group may contain multiple LED subgroups (multiple light-emitting element subgroups) in which light-emitting elements are connected in series. These multiple LED subgroups are distributed so that LED subgroups from other LED groups are interposed between them. A specific example is as follows:

[0025] LED group 1 includes a first LED subgroup 11 and a second LED subgroup 12, which are positioned at a distance from each other. LED group 2 includes a first LED subgroup 21 and a second LED subgroup 22, which are positioned at a distance from each other. LED group 3 includes a first LED subgroup 31 and a second LED subgroup 32, which are positioned at a distance from each other. LED group 4 includes a first LED subgroup 41 and a second LED subgroup 42, which are positioned at a distance from each other.

[0026] Between the first LED subgroup 11 and the second LED subgroup 12 of LED group 1, the following LED subgroups are arranged adjacent to each other. • LED Group 2, 1st LED Subgroup 21, • LED group 3, 1st LED subgroup 31, • LED Group 4, 1st LED Subgroup 41.

[0027] Between the first LED subgroup 21 and the second LED subgroup 22 of LED group 2, the following LED subgroups are arranged adjacent to each other. • LED group 3, 1st LED subgroup 31, • LED group 4, first LED subgroup 41, • LED group 1, second LED subgroup 12.

[0028] Between the first LED subgroup 31 and the second LED subgroup 32 of LED group 3, the following LED subgroups are arranged adjacent to each other. • LED group 4, first LED subgroup 41, • LED group 1, first LED subgroup 11, • LED Group 2, Second LED Subgroup 22.

[0029] Between the first LED subgroup 41 and the second LED subgroup 42 of LED group 4, the following LED subgroups are arranged adjacent to each other. • LED group 1, second LED subgroup 12, • LED Group 2, Second LED Subgroup 22, • LED group 3, second LED subgroup 32.

[0030] Thus, in this embodiment, multiple LED subgroups are interposed between multiple LED subgroups that belong to other LED groups that are different from each other.

[0031] The first LED subgroup 11 and the second LED subgroup 12 of LED group 1 are connected via signal line 13. The first LED subgroup 21 and the second LED subgroup 22 of LED group 2 are connected via signal line 23. The first LED subgroup 31 and the second LED subgroup 32 of LED group 3 are connected via signal line 33. The first LED subgroup 41 and the second LED subgroup 42 of LED group 4 are connected via signal line 43. The connection between these LED subgroups using signal lines is made by connecting the cathode of the LED element of one LED subgroup to the anode of the LED element of the other LED subgroup with the signal line. Note that the connection between these LED subgroups may also be made using a separate layer on the board or using a cable outside the connector.

[0032] Referring to Figure 4, the mechanism for satisfying illumination uniformity will be explained. As shown in Figure 4(a), the multiple LED substrates 10 in the element array section 50 are arranged in a 2x7 grid. Here, the area of ​​the center of the first row and the three substrates on either side of it is defined as region C. The area of ​​the substrate to the left of region C is defined as region L1, the area of ​​the substrate to the left of region L1 (i.e., the leftmost substrate) is defined as region L2, the area of ​​the substrate to the right of region C is defined as region R1, and the area of ​​the substrate to the left of region R1 (i.e., the rightmost substrate) is defined as region R2. The division of the second row is the same as the first row, so it will be omitted here.

[0033] Figure 4(b) shows graph 80, which illustrates the illuminance distribution for each LED group in region L2. The horizontal axis represents the position of the irradiated area, and the vertical axis represents the illuminance. The illuminance distribution can be obtained, for example, by reading the energy of the light incident on the illuminance sensor 111 (measurement unit) while scanning the wafer stage 110. Alternatively, the illuminance distribution may be obtained by simulation. Graph 80 includes the illuminance curves 80-1 for LED group 1, 80-2 for LED group 2, 80-3 for LED group 3, and 80-4 for LED group 4. Figure 4(c) shows graph 81 (illuminance ratio curve) obtained by superimposing these illuminance curves. In graph 81, the horizontal axis represents the position of the irradiated area, and the vertical axis represents the illuminance ratio. The explanation so far has been for region L2, but as shown in Figure 4(c), illuminance ratio curves can be obtained similarly for the other regions L1, C, R1, and R2. Furthermore, in regions L2 and R2, because light is incident on the optical integrator 103 at an oblique angle, some of the light from the side away from region C is not incident on the irradiated surface, resulting in a lower illuminance ratio in regions L2 and R2.

[0034] Then, by superimposing the illuminance ratio curves for regions L2, L1, C, R1, and R2, an illuminance ratio graph 83 of the entire light source is obtained, as shown in Figure 4(d). When all LEDs in regions L2, L1, C, R1, and R2 are lit, the illuminance ratio curve obtained by superimposing the illuminance of each LED group has no slope with respect to the range between irradiated regions (-X to +X). This indicates that the illuminance distribution is uniform (no unevenness in illuminance). On the other hand, in the conventional configuration shown in Figure 2, if a light emission abnormality (deterioration of light emission or failure to light) occurs in any of the LED groups, the illuminance ratio curve obtained by superimposing the illuminance of each LED group will have a slope and irregularities with respect to the range between irradiated regions (-X to +X). This indicates that the uniformity of the illuminance distribution is not maintained (unevenness in illuminance occurs).

[0035] Figure 5 shows graphs 50 of the illuminance of each LED group when all LED groups in region L2 of the element array section 50 are lit, for both the conventional configuration (Figure 2) and this embodiment (Figure 3). In graph 50, graph 51 includes the illuminance curves 51-1 for LED group 1, 51-2 for LED group 2, 51-3 for LED group 3, and 51-4 for LED group 4 in the case of the conventional configuration (Figure 2). Graph 52 includes the illuminance curves 52-1 for LED group 1, 52-2 for LED group 2, 52-3 for LED group 3, and 52-4 for LED group 4 in the configuration of this embodiment (Figure 3). Comparing graphs 51 and 52, graph 52 in this embodiment shows smaller differences between LED groups, a smaller slope, and is closer to parallel.

[0036] Figure 6 shows graphs 60 of the illuminance of each LED group in region L2 of the element array 50 when a non-illumination occurs in one LED group in region L2, for both the conventional configuration (Figure 2) and this embodiment (Figure 3). Figure 6 also shows graph 65 of the illuminance ratio in region L2, obtained by superimposing the illuminances of each LED group. In graph 60, graph 61 includes the illuminance curves 61-1 for LED group 1, 61-2 for LED group 2, 61-3 for LED group 3, and 61-4 for LED group 4 in the case of the conventional configuration (Figure 2). Graph 62 includes the illuminance curves 62-1 for LED group 1, 62-2 for LED group 2, 62-3 for LED group 3, and 62-4 for LED group 4 in the case of the configuration of this embodiment (Figure 3). In Graph 65, Graph 63 includes the illuminance ratio curve (dashed line) for the case of all LEDs being lit in the conventional configuration (Figure 2) and the illuminance ratio curve (solid line) for the case where LED group 1 does not light up. Graph 64 also includes the illuminance ratio curve (dashed line) for the case of all LEDs being lit in the configuration of this embodiment (Figure 3) and the illuminance ratio curve (solid line) for the case where LED group 1's first LED subgroup 11 does not light up. Comparing Graph 63 and Graph 64, it can be seen that the difference between the dashed line and the solid line is smaller in Graph 64, and the difference in the slope between the dashed line and the solid line is also smaller.

[0037] In other words, in this embodiment, the change in illumination unevenness when a non-illumination occurs is small. This makes it possible to continue operation without replacing the circuit board in the element array section 50 even when an LED group fails. In the example above, a non-illumination occurred in LED group 1, but the same effect can be obtained when a non-illumination occurs in another LED group, or when multiple LED groups fail.

[0038] Thus, in this embodiment, by connecting the first LED subgroup of an LED group to the second LED subgroup across one or more subgroups of other LED groups, uneven illumination when the LEDs are not lit can be effectively reduced.

[0039] <Second Embodiment> In the second embodiment, if a failure to light up occurs in one group of LEDs, the illumination unevenness is reduced by adjusting the current of other LED groups. For example, the control unit C uses an illumination sensor 111 (measurement unit) to measure the illumination distribution in the exposure area of ​​the wafer and identifies the light-emitting element group with the lighting abnormality based on the illumination distribution obtained from the measurement. The control unit C then controls multiple constant current source circuits 20 (multiple constant current sources) to compensate for the decrease in illumination caused by the lighting abnormality.

[0040] Here, we assume a case where a failure occurs in LED group 2 on the LED substrate 10 in region L2 of the element array section 50. Figure 7 shows a graph 70 showing the illuminance of each LED group in region L2 when a failure occurs in LED group 2. In graph 70, graph 71 includes the illuminance curve 71-1 for LED group 1, the illuminance curve 71-2 for LED group 2, the illuminance curve 71-3 for LED group 3, and the illuminance curve 71-4 for LED group 4. Here, the illuminance curve 71-2 for LED group 2 is represented by a dashed line to indicate that a failure has occurred in LED group 2. The failure in LED group 2 causes a decrease in the overall illuminance of region L2. Therefore, in this embodiment, the current flowing through the groups other than LED group 2 (i.e., LED group 1, LED group 3, and LED group 4) is increased by controlling the corresponding constant current source circuit 20. This results in a graph of the illuminance distribution (f) for each LED group. Graph 72 shows the illuminance curves for LED group 1, LED group 3, and LED group 4 as the current for each LED group is increased. Specifically, the illuminance curves for each LED group are 72-1 for LED group 1, 72-2 for LED group 2, 72-3 for LED group 3, and 72-4 for LED group 4. The illuminance curve 72-2 (dashed line) for LED group 2 is the same as the illuminance curve 71-2 for LED group 2 in Graph 71.

[0041] Thus, according to this embodiment, the decrease in illuminance in region L2 can be compensated for by increasing the illuminance of the LED groups other than LED group 2, where the failure to light occurred.

[0042] <Third Embodiment> Figure 8 shows an example of the arrangement of each LED group, different from that shown in Figure 3.

[0043] The first LED subgroup 11 and the second LED subgroup 12 of LED group 1 are positioned at the left and right ends of the LED substrate 10-2.

[0044] LED group 2 is arranged so that it is nested within LED group 1. Specifically, the first LED subgroup 21 of LED group 2 is placed to the right of the first LED subgroup 11 of LED group 1, and the second LED subgroup 22 of LED group 2 is placed to the left of the second LED subgroup 12 of LED group 1.

[0045] LED group 3 and LED group 4 are arranged inside LED group 2. In this arrangement, the first LED subgroup 41 of LED group 4 is positioned between the first LED subgroup 31 and the second LED subgroup 32 of LED group 3. Similarly, the first LED subgroup 41 of LED group 4 is positioned between the first LED subgroup 31 and the second LED subgroup 32 of LED group 3.

[0046] The first LED subgroup 11 and the second LED subgroup 12 of LED group 1 are connected via signal line 13. The first LED subgroup 21 and the second LED subgroup 22 of LED group 2 are connected via signal line 23. The first LED subgroup 31 and the second LED subgroup 32 of LED group 3 are connected via signal line 33. The first LED subgroup 41 and the second LED subgroup 42 of LED group 4 are connected via signal line 43. The connection between these subgroups using signal lines is made by connecting the cathode of the LED element in one subgroup to the anode of the LED element in the other subgroup with the signal line. Note that the connection between these subgroups may also be made using a separate layer on the board or by using a cable outside the connector.

[0047] Thus, in the third embodiment, the first LED subgroup 11 and the second LED subgroup 12 (referred to as the "first plurality of light-emitting element subgroups") belonging to LED group 1 are distributed to, for example, both the left and right ends of the LED substrate 10-2. Between them, the first LED subgroup 21 and the second LED subgroup 22 (referred to as the "second plurality of light-emitting element subgroups") belonging to LED group 2 are distributed. Furthermore, between the distributed second plurality of light-emitting element subgroups, the first LED subgroup 31 and the second LED subgroup 32 (referred to as the "third plurality of light-emitting element subgroups") belonging to LED group 3 and the first LED subgroup 41 and the second LED subgroup 42 (referred to as the "fourth plurality of light-emitting element subgroups") belonging to LED group 4 are distributed.

[0048] In one example, the arrangement shown in the first embodiment (Figure 3) and the arrangement shown in the third embodiment (Figure 7) can be changed by changing the connection of the signal lines to the connector 30. Therefore, the user can change between the arrangement shown in the first embodiment (Figure 3) and the arrangement shown in the third embodiment (Figure 7) by changing the connection of the signal lines according to the actual illuminance unevenness. With such a configuration, the illuminance distribution of each LED group can be adjusted without replacing the circuit board, maintaining uniformity of the illuminance distribution or reducing illuminance unevenness.

[0049] According to the embodiment described above, each LED group is divided into multiple LED subgroups, so that the locations of non-illuminated LEDs are dispersed in the event of a failure. By compensating for the non-illuminated LED group with diffused light from adjacent LED groups, overall illuminance unevenness is suppressed. Since the impact on illuminance unevenness when a non-illuminated LED occurs can be reduced, the device can be operated without replacing the substrate, and an exposure apparatus that reduces illuminance unevenness due to the deterioration of the light source can be provided.

[0050] <Embodiment of Article Manufacturing Method> The article manufacturing method according to an embodiment of the present invention is suitable for manufacturing articles such as microdevices, semiconductor devices, and elements having a microstructure. The article manufacturing method of this embodiment includes the steps of forming a latent image pattern on a photosensitive agent coated on a substrate using the above-described exposure apparatus (a step of exposing the substrate) and developing the substrate on which the latent image pattern was formed in the above step. Furthermore, this manufacturing method includes other well-known steps (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The article manufacturing method of this embodiment is advantageous over conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0051] The disclosures herein include at least the following technologies: (Item 1) It has an element array section in which multiple light-emitting elements are arranged, The plurality of light-emitting elements form a plurality of light-emitting element groups, Each of the plurality of light-emitting element groups includes a plurality of light-emitting element subgroups in which the light-emitting elements are connected in series, The plurality of light-emitting element subgroups are distributed so that light-emitting element subgroups of other light-emitting element groups are interposed between them. A light source device characterized by the following features. (Item 2) The light source device according to item 1, characterized in that multiple light-emitting subgroups belonging to other light-emitting subgroups that are different from each other are interposed between the multiple light-emitting subgroups. (Item 3) The plurality of light-emitting element groups include a first light-emitting element group, a second light-emitting element group, a third light-emitting element group, and a fourth light-emitting element group. A second group of light-emitting elements belonging to the second group of light-emitting elements is distributed among a first group of light-emitting elements belonging to the first group of light-emitting elements. Between the second plurality of dispersed light-emitting element subgroups, a third plurality of light-emitting element subgroups belonging to the third light-emitting element group and a fourth plurality of light-emitting element subgroups belonging to the fourth light-emitting element group are dispersed. The light source device according to item 2, characterized by the features described above. (Item 4) The light source device according to any one of items 1 to 3, further comprising a plurality of constant current sources that supply a constant current to each of the plurality of light-emitting groups. (Item 5) The element array section has a plurality of light-emitting substrates on which a plurality of light-emitting elements are mounted, arranged in a matrix. Each of the plurality of light-emitting substrates has the plurality of light-emitting groups formed on it. The light source device described in item 4, characterized by the features described herein. (Item 6) Each of the plurality of light-emitting substrates has a connector, Connections are made between the dispersed subgroups of light-emitting elements via the connector. A light source device as described in item 5, characterized by the features described herein. (Item 7) A light source device described in any one of items 4 to 6, An illumination optical system for illuminating the original plate with light from the aforementioned light source device, A projection optical system that projects the pattern of the original plate illuminated by the illumination optical system onto a substrate, An exposure apparatus characterized by having the following features. (Item 8) A measurement unit that measures the illuminance distribution in the exposure region of the substrate, A control unit that controls the plurality of constant current sources based on the illuminance distribution obtained by the above measurement, The exposure apparatus according to item 7, further comprising the following: (Item 9) The exposure apparatus according to item 8, characterized in that the control unit identifies a group of light-emitting elements with a lighting abnormality based on the illuminance distribution obtained by the measurement, and controls the plurality of constant current sources to compensate for the decrease in illuminance caused by the lighting abnormality. (Item 10) A step of exposing a substrate using an exposure apparatus described in any one of items 7 to 9, The process of developing the exposed substrate, A method for manufacturing an article, characterized by including a developed substrate and manufacturing an article from the developed substrate.

[0052] The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of Symbols]

[0053] 1: LED group 1, 2: LED group 2, 3: LED group 3, 4: LED group 4, 10: LED board, 20: Constant current source circuit

Claims

1. It has an element array section in which multiple light-emitting elements are arranged, The plurality of light-emitting elements form a plurality of light-emitting element groups, Each of the plurality of light-emitting element groups includes a plurality of light-emitting element subgroups in which the light-emitting elements are connected in series, The plurality of light-emitting element subgroups are distributed so that light-emitting element subgroups of other light-emitting element groups are interposed between them. A light source device characterized by the following features.

2. The light source device according to claim 1, characterized in that a plurality of light-emitting subgroups belonging to other light-emitting subgroups that are different from each other are interposed between the plurality of light-emitting subgroups.

3. The plurality of light-emitting element groups include a first light-emitting element group, a second light-emitting element group, a third light-emitting element group, and a fourth light-emitting element group. A second group of light-emitting elements belonging to the second group of light-emitting elements is distributed among a first group of light-emitting elements belonging to the first group of light-emitting elements. Between the second plurality of dispersed light-emitting element subgroups, a third plurality of light-emitting element subgroups belonging to the third light-emitting element group and a fourth plurality of light-emitting element subgroups belonging to the fourth light-emitting element group are dispersed. The light source device according to claim 2.

4. The light source device according to claim 1, further comprising a plurality of constant current sources that supply a constant current to each of the plurality of light-emitting groups.

5. The element array section has a plurality of light-emitting substrates on which a plurality of light-emitting elements are mounted, arranged in a matrix. Each of the plurality of light-emitting substrates has the plurality of light-emitting groups formed on it. The light source device according to feature 4.

6. Each of the plurality of light-emitting substrates has a connector, Connections are made between the dispersed subgroups of light-emitting elements via the connector. The light source device according to claim 5.

7. The light source device according to claim 4, An illumination optical system for illuminating the original plate with light from the aforementioned light source device, A projection optical system that projects the pattern of the original plate illuminated by the illumination optical system onto a substrate, An exposure apparatus characterized by having the following features.

8. A measurement unit that measures the illuminance distribution in the exposure region of the substrate, A control unit that controls the plurality of constant current sources based on the illuminance distribution obtained by the above measurement, The exposure apparatus according to claim 7, further comprising the following:

9. The exposure apparatus according to claim 8, characterized in that the control unit identifies a group of light-emitting elements with a lighting abnormality based on the illuminance distribution obtained by the measurement, and controls the plurality of constant current sources to compensate for the decrease in illuminance caused by the lighting abnormality.

10. A step of exposing a substrate using an exposure apparatus according to any one of claims 7 to 9, The process of developing the exposed substrate, A method for manufacturing an article, characterized by including a developed substrate and manufacturing an article from the developed substrate.

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