Sound wave inspection device

The sonic inspection device improves detection accuracy and responsiveness by using a transducer, sheet member, and elastic member configuration, enabling stable contact with inspection objects without a liquid couplant.

JP2026106547APending Publication Date: 2026-06-30KK TOSHIBA

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
KK TOSHIBA
Filing Date
2024-12-18
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Existing sonic inspection devices using sound waves, such as ultrasonic waves, require improvements in characteristics.

Method used

A sonic inspection device comprising a transducer, a first member, a second member, a sheet member with multiple openings, and an elastic member, where the sheet member has a fixed partial region between the first and second members, and the elastic member is positioned to intersect the first plane, allowing stable contact with the inspection object without a liquid couplant.

Benefits of technology

Enables stable and high-accuracy detection of inspection targets with improved responsiveness and reliability, eliminating the need for a liquid couplant.

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Abstract

To provide an acoustic inspection device capable of improving characteristics. [Solution] According to the embodiment, the sound wave inspection device includes a transducer, a first member, a second member, a sheet member, and an elastic member. The first member is provided around the transducer in a first plane. The second member is provided between the transducer and the first member in the first plane. The sheet member includes a plurality of openings. The sheet member includes a first partial region and a second partial region. The second partial region is located between the first member and the second member in the first plane. The second partial region is fixed to at least one of the first member and the second member. The elastic member is provided between the first partial region and the transducer in a first direction intersecting the first plane.
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Description

Technical Field

[0001] Embodiments of the present invention relate to a sonic inspection device.

Background Art

[0002] In a sonic inspection device that uses sound waves such as ultrasonic waves, improvement in characteristics is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments of the present invention provide a sonic inspection device capable of improving characteristics.

Means for Solving the Problems

[0005] According to an embodiment of the present invention, a sonic inspection device includes a transducer, a first member, a second member, a sheet member, and an elastic member. The first member is provided around the transducer in a first plane. The second member is provided between the transducer and the first member in the first plane. The sheet member includes a plurality of openings. The sheet member includes a first partial region and a second partial region. The second partial region is between the first member and the second member in the first plane. The second partial region is fixed to at least one of the first member and the second member. The elastic member is provided between the first partial region and the transducer in a first direction intersecting the first plane.

Brief Description of the Drawings

[0006] [Figure 1]Figures 1(a) to 1(c) are schematic diagrams illustrating an ultrasound inspection apparatus according to the first embodiment. [Figure 2] Figures 2(a) to 2(c) are schematic diagrams illustrating an ultrasound examination apparatus according to the second embodiment. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figures 1(a) to 1(c) are schematic diagrams illustrating an ultrasound inspection apparatus according to the first embodiment. Figure 1(a) is a cross-sectional view. Figure 1(b) is a bottom view. Figure 1(c) is a top view.

[0009] As shown in Figures 1(a) to 1(c), the acoustic inspection apparatus 110 according to this embodiment includes a transducer 10, a first member 21, a second member 22, a sheet member 30, and an elastic member 40.

[0010] The first member 21 is provided around the transducer 10 in the first plane PL1. The second member 22 is provided between the transducer 10 and the first member 21 in the first plane PL1. The first member 21 is, for example, an outer member. The second member 22 is, for example, an inner member.

[0011] As shown in Figure 1(b), the sheet member 30 includes a plurality of openings 31. In Figure 1(a), the plurality of openings 31 are omitted. As shown in Figure 1(a), the sheet member 30 includes a first partial region 30a and a second partial region 30b. The second partial region 30b is located between the first member 21 and the second member 22 in the first plane PL1. The second partial region 30b is fixed to at least one of the first member 21 and the second member 22. The sheet member 30 is, for example, a mesh member. The sheet member 30 includes non-openings 32 between the plurality of openings 31.

[0012] The elastic member 40 is provided between the first partial region 30a and the transducer 10 in a first direction D1 intersecting the first plane PL1. The elastic member 40 is, for example, an elastomer. The elastic member 40 may contain, for example, a polymer.

[0013] Let the first direction D1 be the Z-axis direction. Let one direction perpendicular to the Z-axis direction be the X-axis direction. Let the direction perpendicular to both the Z-axis direction and the X-axis direction be the Y-axis direction. The first plane PL1 is, for example, along the XY plane. The first sub-region 30a may be along the second direction D2 and the third direction D3. The second direction D2 intersects the first direction D1. The third direction D3 intersects the plane containing the first direction D1 and the second direction D2. The second direction D2 may be, for example, the X-axis direction. The third direction D3 may be, for example, the Y-axis direction.

[0014] For example, sound waves are emitted from the transducer 10. The sound waves are reflected by the object being inspected and enter the transducer 10. By detecting the state of the sound waves that enter the transducer 10, the state of the object being inspected (e.g., scratches) can be detected. In this way, the transducer 10 is configured to perform at least one of the following: emission of sound waves and detection of sound waves. The transducer 10 may include, for example, a piezoelectric element.

[0015] The frequency of the sound wave may be, for example, 0.5 MHz or higher and 15 MHz or lower. The sound wave may be, for example, ultrasound. The sound wave inspection device 110 may be, for example, an ultrasound inspection device. Pulsed sound waves may be used.

[0016] In this embodiment, a first partial region 30a of the sheet member 30 (e.g., a mesh member) is pressed against the object to be inspected. Due to the resulting stress, a portion of the elastic member 40 comes into contact with the object to be inspected through a plurality of openings 31. Air and other particles present between the object to be inspected are removed. Sound is transmitted to the object to be inspected. By moving the transducer 10 in a direction along the first direction D1, it is possible to inspect the state of the object to be inspected. For example, inspection can be performed without the use of a liquid couplant (coupling medium). In Figure 1, the shape of the opening is circular. In this embodiment, the shape of the opening may be rectangular, square, rhombus, or hexagonal, etc.

[0017] In one example, sound waves (e.g., ultrasound) emitted from the transducer 10 are incident on the object to be inspected via the elastic member 40. The sound waves reflected from the object to be inspected are incident on the transducer 10 via the elastic member 40. The transducer 10 is configured to output a signal based on the received sound waves. The signal depends on the state of the object to be inspected. In another example, the transducer 10 may also detect sound waves emitted from the object to be inspected.

[0018] The first partial region 30a is pressed against the object to be inspected, and a force along the first direction D1 is applied to the first partial region 30a. In this embodiment, the second partial region 30b is provided between the first member 21 and the second member 22 in a direction intersecting the first direction D1 (a direction along the first plane PL1). The second partial region 30b is fixed to at least one of the first member 21 and the second member 22. The direction of fixing is a direction intersecting the first direction D1 (a direction along the first plane PL1). As a result, the sheet member 30 is stably fixed to at least one of the first member 21 and the second member 22.

[0019] For example, when a force along the first direction D1 is applied to the first partial region 30a, displacement of the position of the sheet member 30 is suppressed. For example, the state where the first partial region 30a is pressed against the inspection target becomes stable. Thereby, the state of the inspection target can be detected stably with high accuracy. For example, the state of the inspection target can be detected stably with high responsiveness. According to the embodiment, an acoustic wave inspection apparatus capable of improving characteristics can be provided.

[0020] In the embodiment, the tension of the first partial region 30a may be, for example, 1 hPa or more. For example, the contact state between the elastic member 40 and the inspection target is likely to be stable.

[0021] In the embodiment, the Young's modulus of the sheet member 30 may be higher than the Young's modulus of the elastic member 40. For example, the contact state between the elastic member 40 and the inspection target is likely to be stable.

[0022] The Young's modulus of the elastic member 40 may be, for example, 0.1 MPa or more and 100 MPa or less. The thickness t40 of the elastic member 40 along the first direction D1 (see FIG. 1) may be, for example, 0.5 mm or more and 2 mm or less.

[0023] The thickness t30 of the first partial region 30a along the first direction D1 may be, for example, 50 μm or more and 500 μm or less. Through the plurality of openings 31, the elastic member 40 can stably contact the inspection target.

[0024] The width w1 of the plurality of openings 31 along the first plane PL1 (see FIG. 1(b)) may be, for example, 10 μm or more and 1200 μm or less. Through the plurality of openings 31, the elastic member 40 can stably contact the inspection target.

[0025] The sheet member 30 includes one of the plurality of openings 31 and another of the plurality of openings 31. The other of the plurality of openings 31 is adjacent to one of the plurality of openings 31. The distance w2 between the other of the plurality of openings 31 and one of the plurality of openings 31 may be, for example, 10 μm or more and 500 μm or less. The elastic member 40 can stably contact the object to be inspected through the plurality of openings 31. The distance w2 may be the minimum distance between the other of the plurality of openings 31 and one of the plurality of openings 31.

[0026] In this embodiment, the Young's modulus of the sheet member 30 may be, for example, 100 MPa or more and 700 GPa or less. The tension in the first partial region 30a makes it easier to stabilize the contact state between the elastic member 40 and the object to be inspected through the multiple openings 31.

[0027] In this embodiment, the sheet member 30 is configured to come into contact with the object to be inspected. The distance between the object to be inspected and the transducer 10 along the first direction D1 may be configured to change reversibly. The tension of the first partial region 30a and the appropriate elastic member 40 make it easier to stabilize the contact state between the elastic member 40 and the object to be inspected through the multiple openings 31.

[0028] As shown in Figures 1(a) and 1(c), the first member 21 includes a first opposing portion 21f that faces the second member 22. The first opposing portion 21f is, for example, an inner side surface. As shown in Figures 1(a) and 1(c), the first opposing portion 21f may be cylindrical. For example, the first opposing portion 21f may be cylindrical or polygonal.

[0029] The second member 22 includes a second opposing portion 22f that faces the first member 21. The direction from the first opposing portion 21f to the second opposing portion 22f is along the first plane PL1. The second opposing portion 22f is the outer side surface. The second opposing portion 22f is along the first opposing portion 21f.

[0030] The second partial region 30b is located between the first opposing portion 21f and the second opposing portion 22f. The second partial region 30b may be fixed by the first opposing portion 21f and the second opposing portion 22f.

[0031] As shown in Figure 1(a), at least one of the first opposing portion 21f and the second opposing portion 22f may include a recess 20d. In this example, the second opposing portion 22f includes a recess 20d. At least a portion of the second partial region 30b is located within the recess 20d. The second partial region 30b is stably fixed. At least one of the first opposing portion 21f and the second opposing portion 22f may include a recess 20d and a protrusion. For example, the protrusion of the second opposing portion 22f may be provided within the recess 20d of the first opposing portion 21f. For example, the protrusion of the first opposing portion 21f may be provided within the recess 20d of the second opposing portion 22f.

[0032] In the example shown in Figure 1(a), the second partial region 30b may be fixed by another member (for example, a first fixing member 41). The first fixing member 41 may be, for example, an elastic part. The first fixing member 41 may be, for example, a packing. The first fixing member 41 is located between the first opposing portion 21f and the second opposing portion 22f. In this example, the second partial region 30b is located between the recess 20d of the second opposing portion 22f and the first fixing member 41. The second partial region 30b is stably fixed.

[0033] Thus, the sound wave inspection device 110 may further include a first fixing member 41. The first fixing member 41 may be located at at least one of the following positions: a first position between the first member 21 and the second partial region 30b, and a second position between the second member 22 and the second partial region 30b.

[0034] In this embodiment, the first Young's modulus of the first fixing member 41 may be lower than the second Young's modulus of the second partial region 30b. The first fixing member 41 may be easily deformable. The second partial region 30b is stably fixed.

[0035] In this embodiment, the first fixing member 41 may fix the second partial region 30b to at least one of the first member 21 and the second member 22. For example, the first fixing member 41 may fix the second partial region 30b to at least one of the first opposing portion 21f and the second opposing portion 22f. In this case, the first fixing member 41 may include screws or the like. The first fixing member 41 may include, for example, adhesive or the like.

[0036] As shown in Figure 1(a), the transducer 10 may be fixed to the second member 22 by a fixing part 55. The fixing part 55 may be, for example, a screw. The fixing part 55 may include, for example, a plunger.

[0037] In embodiments, the sheet member 30 may include, for example, at least one selected from the group consisting of polyolefins and fluororesins. The sheet member 30 may include, for example, at least one selected from the group consisting of polyester, polyethylene, polypropyne, polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinylidene fluoride, polyvinyl fluoride, polyphenylene sulfide, and polyvinylidene chloride.

[0038] In embodiments, the elastic member 40 may include, for example, at least one selected from the group consisting of thermoplastic resins and thermosetting resins. The elastic member 40 may include, for example, at least one selected from the group consisting of polystyrene-based thermoplastic elastomers, polyolefin-based thermoplastic elastomers, vinyl chloride-based thermoplastic elastomers, polyurethane-based thermoplastic elastomers, polyester-based thermoplastic elastomers, polyamide-based thermoplastic elastomers, styrene-butadiene rubber, isoprene rubber, butadiene rubber, chloroprene rubber, acrylonitrile-butadiene rubber, isobutylene-isoprene rubber, ethylene-propylene rubber, ethylene-propylene-diene rubber, urethane rubber, silicone rubber, fluororubber, chlorosulfonated polyethylene, chlorinated polyethylene, acrylic rubber, polysulfide rubber, and epichlorohydrin rubber.

[0039] In this embodiment, the transducer 10 may be connected to the controller via the connector 56.

[0040] In this embodiment, the transducer 10 may be a vertical transducer, an angled transducer, or a dual-element vertical transducer.

[0041] (Second Embodiment) Figures 2(a) to 2(c) are schematic diagrams illustrating an ultrasound examination apparatus according to the second embodiment. Figure 2(a) is a cross-sectional view. Figure 2(b) is a bottom view. Figure 2(c) is a top view.

[0042] As shown in Figures 2(a) to 2(c), the acoustic wave inspection device 111 according to this embodiment is provided with a second fixing member 42. The configuration of the acoustic wave inspection device 111, excluding this member, may be the same as that of the acoustic wave inspection device 110.

[0043] The sound wave inspection device 111 further includes a second fixing member 42 in addition to the transducer 10, the first member 21, the second member 22, the sheet member 30, and the elastic member 40. The second fixing member 42 is configured to fix the distance between the first member 21 and the second member 22. The second fixing member 42 may be, for example, a screw.

[0044] For example, at least a portion of the second partial region 30b is provided between the first opposing portion 21f and the second opposing portion 22f. The second fixing member 42 fixes the distance between the first opposing portion 21f and the second opposing portion 22f, thereby stably fixing the second partial region 30b.

[0045] The sound wave inspection device 111 can also reliably and accurately detect the condition of the object being inspected. This allows for the provision of a sound wave inspection device with improved characteristics.

[0046] The following describes examples of sample characteristics. The first sample has the structure illustrated in Figure 1. The transducer 10 is cylindrical. The diameter of the transducer 10 is 20 mm. The frequency of the transducer is 2.25 MHz. The material of the elastic member 40 is styrene-butadiene elastomer. The hardness of the elastic member 40, according to JIS Type E, is 4. The thickness of the elastic member 40 is 1 mm. The material of the sheet member 30 is polyester mesh. The thread diameter of the polyester mesh is 50 μm. The width of the opening is approximately 300 μm. The opening ratio is 74%.

[0047] In the first sample, the time required for the amplitude of the echo waveform to reach 80% of the saturation value was approximately 10 ms.

[0048] In the second sample, in the first direction D1, the elastic member 40 is fixed between the sheet member 30 and the transducer 10. In the second sample, the time required for the amplitude of the echo waveform to reach 80% of the saturation value is approximately 100 ms. The saturation value in the second sample is approximately 60% of the saturation value in the first sample. Thus, a fast response is obtained in the first sample. A high-intensity signal is obtained in the first sample.

[0049] The embodiments may include the following technical proposals. (Technical proposal 1) Transducer and, A first member provided around the transducer in the first plane, A second member provided between the transducer and the first member in the first plane, A sheet member comprising a plurality of openings, wherein the sheet member comprises a first partial region and a second partial region, the second partial region being located between the first member and the second member in the first plane, and the second partial region being fixed to at least one of the first member and the second member, An elastic member provided between the first partial region and the transducer in a first direction intersecting the first plane, A sound wave inspection device equipped with [specific features / equipment].

[0050] (Technical proposal 2) The sound wave inspection apparatus according to Technical Proposal 1, wherein the transducer is configured to perform at least one of the following: emission of sound waves and detection of sound waves.

[0051] (Technical proposal 3) The first member includes a first opposing portion, The second member includes a second opposing portion, The direction from the first opposing portion to the second opposing portion is along the first plane, The aforementioned second sub-region is located between the aforementioned first opposing portion and the aforementioned second opposing portion. The acoustic inspection apparatus according to Technical Proposal 1 or 2, wherein at least one of the first opposing portion and the second opposing portion includes a recess.

[0052] (Technical proposal 4) Further comprising a first fixing member, The acoustic inspection apparatus according to Technical Proposal 1 or 2, wherein the first fixing member is located at at least one of a first position between the first member and the second partial region, and a second position between the second member and the second partial region.

[0053] (Technical proposal 5) The sound wave inspection apparatus according to Technical Proposal 4, wherein the first Young's modulus of the first fixing member is lower than the second Young's modulus of the second partial region.

[0054] (Technical proposal 6) Further comprising a first fixing member, The sound wave inspection apparatus according to Technical Proposal 1 or 2, wherein the first fixing member fixes the second partial region to at least one of the first member and the second member.

[0055] (Technical proposal 7) Further comprising a second fixing member, The acoustic inspection apparatus according to Technical Proposal 1 or 2, wherein the second fixing member is configured to fix the distance between the first member and the second member.

[0056] (Technical proposal 8) The sound wave inspection apparatus according to Technical Proposal 7, wherein the second fixing member includes a screw.

[0057] (Technical proposal 9) The sound wave inspection apparatus according to any one of Technical Proposals 1 to 8, wherein the Young's modulus of the sheet member is higher than that of the elastic member.

[0058] (Technical proposal 10) The sound wave inspection device according to any one of Technical Proposals 1 to 8, wherein the Young's modulus of the sheet member is 100 MPa or more and 700 GPa or less.

[0059] (Technical proposal 11) The Young's modulus of the elastic member is 0.1 MPa or more and 100 MPa or less. The sound wave inspection apparatus according to any one of Technical Proposals 1 to 8, wherein the thickness of the elastic member along the first direction of the elastic member is 0.5 mm or more and 2 mm or less.

[0060] (Technical proposal 12) The sound wave inspection apparatus according to any one of Technical Proposals 1 to 11, wherein the width of the plurality of openings along the first plane is 10 μm or more and 1200 μm or less.

[0061] (Technical proposal 13) The sheet member includes one of the plurality of openings and another of the plurality of openings, The other of the plurality of openings is adjacent to the one of the plurality of openings, The sound wave inspection apparatus according to any one of Technical Proposals 1 to 12, wherein the distance between one of the plurality of apertures and the one of the plurality of apertures is 10 μm or more and 500 μm or less.

[0062] (Technical proposal 14) The acoustic inspection apparatus according to any one of the technical proposals 1 to 13, wherein the tension in the first partial region is 1 hPa or more.

[0063] (Technical proposal 15) The first member includes a first opposing portion that faces the second member, The sound wave inspection apparatus according to Technical Proposal 1 or 2, wherein the first opposing portion is cylindrical.

[0064] (Technical proposal 16) The sound wave inspection apparatus according to Technical Proposal 15, wherein the first opposing portion is cylindrical or polygonal.

[0065] (Technical proposal 17) The sound wave inspection device according to Technical Proposal 2, wherein the frequency of the sound wave is 0.5 MHz or higher and 15 MHz or lower.

[0066] (Technical proposal 18) The aforementioned sheet member is configured to come into contact with the object to be inspected. The sound wave inspection apparatus according to any one of the technical proposals 1 to 17, wherein the distance along the first direction between the object to be inspected and the transducer is configured to change reversibly.

[0067] (Technical proposal 19) The sound wave inspection apparatus according to any one of Technical Proposals 1 to 18, wherein the sheet member comprises at least one selected from the group consisting of polyester, polyethylene, polypropyne, polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinylidene fluoride, polyvinyl fluoride, polyphenylene sulfide, and polyvinylidene chloride.

[0068] (Technical proposal 20) The sound wave inspection apparatus according to any one of Technical Proposals 1 to 19, wherein the elastic member comprises at least one selected from the group consisting of polystyrene-based thermoplastic elastomer, polyolefin-based thermoplastic elastomer, vinyl chloride-based thermoplastic elastomer, polyurethane-based thermoplastic elastomer, polyester-based thermoplastic elastomer, polyamide-based thermoplastic elastomer, styrene-butadiene rubber, isoprene rubber, butadiene rubber, chloroprene rubber, acrylonitrile-butadiene rubber, isobutylene-isoprene rubber, ethylene-propylene rubber, ethylene-propylene-diene rubber, urethane rubber, silicone rubber, fluororubber, chlorosulfonated polyethylene, chlorinated polyethylene, acrylic rubber, polysulfurized rubber, and epichlorohydrin rubber.

[0069] (Technical proposal 21) The sound wave inspection apparatus according to any one of claims 1 to 20, wherein the transducer is fixed to the second member by a fixing part.

[0070] (Technical proposal 22) A sound wave inspection method using a sound wave inspection device described in any one of Technical Proposals 1 to 21.

[0071] According to one embodiment, a sound wave inspection device capable of improving characteristics is provided.

[0072] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element, such as transducers, members, sheet members, and elastic members, included in an acoustic inspection apparatus, is included within the scope of the present invention as long as it can be implemented in the same way and similar effects can be obtained by appropriately selecting from the range known to those skilled in the art.

[0073] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0074] Furthermore, all sound wave inspection devices that can be implemented by those skilled in the art by appropriately modifying the design based on the sound wave inspection device described above as an embodiment of the present invention also fall within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0075] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and these modifications and alterations are also understood to fall within the scope of the present invention.

[0076] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0077] 10: Transducer, 20d: Recess, 21, 22: First, second members, 21f, 22f: First, second opposing parts, 30: Sheet member, 30a, 30b: First, second partial regions, 31: Opening, 32: Non-opening, 40: Elastic member, 41, 42: First, second fixing members, 55: Fixing part, 56: Connector, 110, 111: Sound wave inspection device, D1~D3: First~Third directions, PL1: First plane, t30: Thickness, t40: Elastic member thickness, w1: Width, w2: Distance

Claims

1. Transducer and, A first member provided around the transducer in the first plane, A second member provided between the transducer and the first member in the first plane, A sheet member comprising a plurality of openings, wherein the sheet member comprises a first partial region and a second partial region, the second partial region being located between the first member and the second member in the first plane, and the second partial region being fixed to at least one of the first member and the second member, An elastic member provided between the first partial region and the transducer in a first direction intersecting the first plane, A sound wave inspection device equipped with [specific features / equipment].

2. The sound wave inspection apparatus according to claim 1, wherein the transducer is configured to perform at least one of emitting sound waves and detecting sound waves.

3. The first member includes a first opposing portion, The second member includes a second opposing portion, The direction from the first opposing portion to the second opposing portion is along the first plane, The aforementioned second partial region is located between the aforementioned first opposing portion and the aforementioned second opposing portion. The sound wave inspection apparatus according to claim 1 or 2, wherein at least one of the first opposing portion and the second opposing portion includes a recess.

4. Further comprising a first fixing member, The sound wave inspection apparatus according to claim 1 or 2, wherein the first fixing member is located at at least one of a first position between the first member and the second partial region, and a second position between the second member and the second partial region.

5. The sound wave inspection apparatus according to claim 4, wherein the first Young's modulus of the first fixing member is lower than the second Young's modulus of the second partial region.

6. Further comprising a first fixing member, The sound wave inspection apparatus according to claim 1 or 2, wherein the first fixing member fixes the second partial region to at least one of the first member and the second member.

7. Further comprising a second fixing member, The sound wave inspection apparatus according to claim 1 or 2, wherein the second fixing member is configured to fix the distance between the first member and the second member.

8. The sound wave inspection apparatus according to claim 7, wherein the second fixing member includes a screw.

9. The sound wave inspection apparatus according to claim 1 or 2, wherein the Young's modulus of the sheet member is higher than the Young's modulus of the elastic member.