Liquid-repellent substrate, inkjet head, and method for manufacturing the same.

Abstract

To provide an inkjet head equipped with a liquid-repellent film that offers excellent resistance to sliding and ink. [Solution] An inkjet head comprising an orifice plate 6, wherein the orifice plate has a substrate 11, a liquid-repellent film 13 formed on the outermost surface (orifice surface 6a) of the substrate on the ink ejection side, and a base film 12 formed between the substrate and the liquid-repellent film, the base film containing silicon (Si), carbon (C), and oxygen (O), the liquid-repellent film forming siloxane bonds with the base film, and the maximum peak P of the bond energy of the Si2p orbital on the surface of the base film measured by X-ray photoelectron spectroscopy is 102.9 (eV).

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