Component coupling device

Abstract

To provide a component coupling device that improves the movement control between integrated circuit components and optical fiber array components. [Solution] A component coupling device 2 suitable for coupling an optical fiber array component W1 to an integrated circuit component, comprising: a first drive mechanism A; a second drive mechanism B provided on the first drive mechanism A and driven by the first drive mechanism A to enable multi-axis linear movement; and a holding mechanism C provided on the second drive mechanism B and driven by the second drive mechanism B to enable multi-axis rotational movement, wherein the holding mechanism C is provided with holding means capable of holding the optical fiber array component W1.

Description

Technical Field

[0001] The present invention relates to a component coupling device, and particularly to a component coupling device for coupling a fiber optic array component to an integrated circuit component.

Background Art

[0002] In the semiconductor manufacturing process, in order to manufacture wafers with higher performance and lower power consumption, silicon photonics (SiPh) technology has become the focus of industrial development. In silicon photonics technology, regardless of whether it is a pluggable optical transceiver structure (PTO), an on-board optoelectronic integration structure (OBO), a co-packaged optics structure (CPO), or an optical I / O structure (Optical I / O), it is necessary to couple a fiber optic array component (FAU) onto an integrated circuit element (IC). Currently, the semiconductor manufacturing process is evolving towards 2.5D or 3D packaging, and the structures of integrated circuit components and fiber optic array components are also changing with the evolution of the process. For example, the integrated circuit component has a photonic integrated circuit, and the fiber optic array component has an optical coupling part, a receptacle part, and an optical fiber part connected between the optical coupling part and the receptacle part. The photonic integrated circuit of the integrated circuit component is coupled to the optical coupling part of the fiber optic array component, and communicates optically with the outside through the optical fiber part, the receptacle part, and optical communication. The optical communication with the outside is carried out through the optical fiber part and the receptacle part of the fiber optic array component.

[0003] When coupling optical fiber array components and integrated circuit components, the optical fiber array components are typically held in a gantry mechanism that is movable in the X, Y, and Z axes, and the integrated circuit components are mounted on a carrier mechanism that is movable in the θx and θy axes. The optical fiber array components and integrated circuit components are then moved to predetermined positions where they can be coupled by the gantry and carrier mechanisms (these predetermined positions are those that optimize the transmission efficiency of the optical signals transmitted between the optical fiber array components and the integrated circuit components). Although the gantry and carrier mechanisms operate independently of each other, they influence one another. The gantry mechanism needs to adjust the position of the optical fiber array components in accordance with the movement of the carrier mechanism, and the carrier mechanism needs to adjust the position of the integrated circuit components in accordance with the movement of the gantry mechanism. Therefore, in practice, controlling the coordinated movement of the gantry and carrier mechanisms is not easy, and moving the optical fiber array components and integrated circuit components to their predetermined positions is not easy, requiring further improvement.

[0004] In addition, for information on conventional component coupling devices, one can refer to, for example, Patent Document 1. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Chinese Patent Application Publication No. 116967082A Specification [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] In view of the above problems, the present invention aims to provide a component coupling device that can improve upon at least one drawback of the prior art. [Means for solving the problem]

[0007] To achieve the above objective, the present invention provides a component coupling device suitable for coupling optical fiber array components to integrated circuit components, The first drive mechanism and A second drive mechanism provided in the first drive mechanism and driven by the first drive mechanism to enable multi-axis linear movement, The device comprises a holding mechanism provided on the second drive mechanism and driven by the second drive mechanism to enable multi-axis rotational movement, The present invention provides a component coupling device in which the holding mechanism is provided with holding means capable of holding the optical fiber array component. [Effects of the Invention]

[0008] The component coupling device according to the embodiment of the present invention has a holding mechanism that can hold optical fiber array components, and the first and second drive mechanisms can drive multi-axis linear or rotational movement of the optical fiber array components. This improves upon the drawback of the prior art, which requires extra components to drive the movement of integrated circuit components corresponding to the optical fiber array components. [Brief explanation of the drawing]

[0009] [Figure 1] This is a partially exploded perspective view showing some of the optical fiber array components and integrated circuit components in an embodiment of the present invention. [Figure 2] This is a partial cross-sectional view showing how optical fiber array components are coupled to integrated circuit components. [Figure 3] This is a perspective view showing an optical fiber array component. [Figure 4] This is a perspective view of the optical fiber array component, shown from a different angle than Figure 3. [Figure 5] This is a partial cross-sectional diagram illustrating how optical signals are transferred between an optical fiber array component and an integrated circuit component. [Figure 6] This is a perspective view showing how a component coupling device in an embodiment of the present invention is installed in a housing. [Figure 7] It is an exploded perspective view explaining the third linear member, the second drive mechanism, the holding mechanism, and the inspection mechanism of the component coupling device. [Figure 8] It is an exploded perspective view explaining the first rotating member, the second rotating member, and the third rotating member of the second drive mechanism. [Figure 9] It is a perspective view explaining that the first moving table of the first rotating member swings along the left and right curved paths along the first pedestal around the first axis. [Figure 10] It is a perspective view explaining that the second moving table of the second rotating member swings along the upper and lower curved paths along the second pedestal around the second axis. [Figure 11] It is a perspective view explaining that the third moving table of the third rotating member swings along the front and back curved paths along the third pedestal around the third axis. [Figure 12] It is a partial side view explaining each connection surface of the second drive mechanism. [Figure 13] It is a partial perspective view explaining that the first axis, the second axis, and the third axis intersect with each other. [Figure 14] It is an exploded perspective view explaining the holding mechanism and its curing means. [Figure 15] It is a partial side view explaining the holding mechanism and its air passage. [Figure 16] It is a partial side view explaining the holding means of the holding mechanism. [Figure 17] It is a partial side view explaining the holding means at the reverse angle. [Figure 18] It is a perspective view explaining the drive member of the holding mechanism. [Figure 19] It is a perspective view explaining the corresponding connecting member of the holding mechanism. [Figure 20] It is an explanatory diagram showing that the corresponding connecting member is driven and selectively inserted into the optical fiber array component. [Figure 21] It is an explanatory diagram showing that ultraviolet rays are irradiated toward the optical fiber array component.

Embodiments for Carrying Out the Invention

[0010] To more clearly explain the objectives, technical means, and advantages of the embodiments of the present invention, hereinafter, in combination with the accompanying drawings of the embodiments of the present invention, the technical means in the embodiments of the present invention will be clearly and detailedly described. It will be clear that the embodiments to be described are some of the embodiments of the present invention, not all of the embodiments. Usually, the components of the embodiments of the present invention depicted and shown in the accompanying drawings can be arranged and designed in various different arrangements. Therefore, hereinafter, the detailed description of the embodiments of the present invention provided in the accompanying drawings does not constitute any limitation to the protection scope of the present invention, but only shows the selected embodiments of the present invention.

[0011] Before explaining the present invention in detail, it should be noted that in the following description, elements that perform the same role or function may be represented by the same number even if they do not have exactly the same configuration.

[0012] Also, in this specification, for the convenience of explanation, terms indicating the relative positional relationship of each component, such as "upper", "lower", "left", "right", etc., are used for explanation while referring to the examples in the drawings, and it should be noted that they are not absolute terms limiting the configuration of the present invention.

[0013] As shown in FIG. 1, the embodiment of the present invention is applied to the process of coupling the optical fiber array component W1 to the integrated circuit component W2.

[0014] As shown in Figures 2 to 4, the optical fiber array component W1 is provided with an optical coupling section W11, a receptacle section W12, and an optical fiber section W13 connected to the optical coupling section W11 and the receptacle section W12. The optical coupling section W11 is made of a material through which light can pass, and a prism W111 is provided on a first side surface W112 of the optical coupling section W11 that is away from the receptacle section W12. The optical fiber section W13 passes through the receptacle section W12 and is exposed on a second side surface W121 of the receptacle section W12 that is away from the optical coupling section W11. The receptacle section W12 is provided with a relatively wide first base section W122, a relatively narrow second base section W123, and two guide holes W124 that pass through the first and second base sections W122 and W123, and the second side surface W121 is inclined outward from top to bottom. The optical fiber section W13 is composed of multiple optical fibers W131 and is flexible.

[0015] As shown in Figures 1 and 2, the integrated circuit component W2 is provided with a retaining plate W21, a lid member W22 provided on the retaining plate W21, and a photon integrated circuit W23 provided on the retaining plate W21 (in this embodiment of the present invention, multiple photon integrated circuits W23 are arranged on the retaining plate W21).

[0016] The retaining plate W21 is roughly rectangular, and the photon integrated circuit W23 can be arranged around the periphery of the retaining plate W21.

[0017] The lid member W22 is provided with a first lid portion W221, a second lid portion W222 which is slightly lower in height than the first lid portion W221, and a cutout space W223 located between the first lid portion W221 and the second lid portion W222, which exposes the photon integrated circuit W23. Depending on the design of the photon integrated circuit W23, the cutout space W223 can be provided, for example, near each of the four sides of the rectangular retaining plate W21.

[0018] Each photon integrated circuit W23 is provided with a lens array W231. The lens array W231 is composed of multiple lenses W2311 arranged in an array.

[0019] As shown in Figures 2 and 5, when the optical fiber array component W1 is coupled to the integrated circuit component W2, the optical coupling portion W11 of the optical fiber array component W1 is directed to the photon integrated circuit W23, and the receptacle portion W12 is directed to the second cover portion W222 of the cover member W22. The optical fiber array component W1 corresponds to the lens array W231 with a prism W111, so that the optical signal W3 can be transferred between the prism W111 of the optical fiber array component W1 and the lens array W231 of the photon integrated circuit W23. The optical signal W3 is supplied from the measurement unit 1 (see Figure 14) to the optical fiber array component W1, and the optical signal W3 is sent from the optical fiber array component W1 to the photon integrated circuit W23 of the integrated circuit component W2, and then sent back from the photon integrated circuit W23 of the integrated circuit component W2 to the optical fiber array component W1, and the measurement unit 1 (see Figure 14) can measure the numerical value of the intensity of the optical signal W3 sent back to the optical fiber array component W1. Specifically, after the optical signal W3 is reflected by the prism W111, it can be sent diagonally forward and downward to the lens W2311 of the lens array W231. The optical coupling part W11 and the photon integrated circuit W23 can be bonded and fixed together with a first adhesive F1, and the receptacle part W12 and the second cover part W222 can be bonded and fixed together with a second adhesive F2. In the embodiment of the present invention, the first adhesive F1 is an ultraviolet curing adhesive, and in the embodiment of the present invention, the second adhesive F2 is a thermosetting adhesive.

[0020] In another embodiment of the present invention, the lid member W22 may be provided with only the first lid portion W221, in which case the receptacle portion W12 is placed against the retaining plate W21.

[0021] As shown in Figure 6, an embodiment of the present invention will be described as a component coupling device 2 used for holding and moving an optical fiber array component W1, and applied to coupling the optical fiber array component W1 to an integrated circuit component W2. The component coupling device 2 is provided with a first drive mechanism A provided in a housing T, a second drive mechanism B provided on the first drive mechanism A and driven by the first drive mechanism A to enable multi-axis linear movement, a holding mechanism C provided on the second drive mechanism B and driven by the second drive mechanism B to enable multi-axis rotational movement, and an inspection mechanism D. The holding mechanism C holds the optical fiber array component W1 and, by driving the first drive mechanism A and the second drive mechanism B, can move the held optical fiber array component W1 to perform multi-axis linear movement or multi-axis rotational movement.

[0022] The inspection mechanism D is provided on the first drive mechanism A and can perform multi-axis linear movement by driving the first drive mechanism A, and can perform inspection on the integrated circuit component W2 (see Figure 1).

[0023] As shown in Figure 6, in the following description of embodiments of the present invention, a first direction d1 in the lateral (horizontal) direction is defined, a second direction d2 is defined as the direction perpendicular to the first direction d1 in the lateral direction, and a third direction d3 is defined as the direction perpendicular to both the first direction d1 and the second direction d2 in the vertical direction. The housing T is further provided with a first holding base 3, a second holding base 4 spaced apart from the first holding base 3 in the second direction d2, an adhesive application device 5 provided on one side of the first holding base 3, an inspection device 6 provided between the first holding base 3 and the second holding base 4, and a control unit 7.

[0024] As shown in Figures 6 and 7, the first drive mechanism A includes a first linear motion member A1 provided on the housing T, a second linear motion member A2 provided on the first linear motion member A1, and a third linear motion member A3 provided on the second linear motion member A2.

[0025] The first linear motion member A1 is provided with two first rail bases A11 that are spaced apart from each other and mounted on the housing T, and two first slides A12 that are mounted on each of the two first rail bases A11. The first rail bases A11 extend along a first direction d1, and the first slides A12 can move along the first direction d1 on the first rail bases A11.

[0026] The second linear motion member A2 is provided with a second rail base A21 that straddles the two first slides A12, and a second slide A22 provided on the second rail base A21. The second rail base A21 extends along a second direction d2, and the second slide A22 can move along the second direction d2 on the second rail base A21.

[0027] The third linear motion member A3 is provided with a third rail base A31, which is provided on the second slide A22, and a third slide A32, which is provided on the third rail base A31.

[0028] The third rail base A31 extends along the third direction d3, and the third slide A32 can move along the third direction d3 on the third rail base A31.

[0029] The first drive mechanism A drives the second drive mechanism B using the first linear motion member A1, the second linear motion member A2, and the third linear motion member A3, respectively, and the holding mechanism C moves the optical fiber array component W1 in conjunction with the second drive mechanism B, thereby enabling linear movement of the optical fiber array component W1 in three degrees of freedom in the first direction d1, the second direction d2, and the third direction d3.

[0030] In the embodiment of the present invention, the first rail base A11 and the second rail base A21 are configured to drive the first slide A12 and the second slide A22 with a linear motor, but the present invention is not limited to this, and for example, a combination of a rotary motor and a screw rod can also be used. In the embodiment of the present invention, the third rail base A31 is configured to drive the third slide A32 with a combination of a rotary motor and a screw rod, but the present invention is not limited to this, and for example, a linear motor can also be used.

[0031] As shown in Figure 7, the inspection mechanism D is provided on the second slide A22. The inspection mechanism D is equipped with a first image capture member D1 and a distance sensor D2. The first image capture member D1 is equipped with an image capture D11, a camera head D12, and a light source D13. As shown in Figure 1, the first image capture member D1 can acquire the orientation of the photon integrated circuit W23 and / or lens array W231 by capturing images of the photon integrated circuit W23 and / or lens array W231 from above the integrated circuit component W2. By using, for example, an optical reflection sensor as the distance sensor D2 and sensing the distance to different positions on the upper surface of the photon integrated circuit W23, the inclination angle of the upper surface of the photon integrated circuit W23 can be acquired.

[0032] As shown in Figures 7 and 8, the second drive mechanism B is provided with a first rotating member B1 on the third slide A32, a second rotating member B2 on the first rotating member B1, and a third rotating member B3 on the second rotating member B2.

[0033] As shown in Figures 8 and 9, the first rotating member B1 is provided with a first base B11 on the third slide A32 (see Figure 7), a first movable platform B12 on the first base B11, a first drive unit B13 capable of driving the movement of the first movable platform B12, and a first connecting means B14 on the first movable platform B12. The first base B11 has a spherical recessed surface facing the first movable platform B12, and the first movable platform B12 has a spherical projection surface facing the first base B11. The first movable platform B12 is driven by the first driver B13 to move in a curve along the first base B11, and can also swing along a curved path in the left-right direction by linking with the first connecting means B14. The first trajectory R1 formed by the swinging of the first movable platform B12 along the curved path has a first axis L1 parallel to the third direction d3 as the axis of swing (in Figure 9, the radius from the first trajectory R1 to the first axis L1 is represented by the first radius r1). In this embodiment of the present invention, the first base B11 and the first movable platform B12 are moved relative to each other by cross bearings.

[0034] As shown in Figures 8 and 10, the second rotating member B2 is provided with a second base B21 on the first connecting means B14 (Figure 9), a second movable platform B22 on the second base B21, a second driver B23 capable of driving the movement of the second movable platform B22, and a second connecting means B24 on the second movable platform B22. The second base B21 is provided with a spherical recessed surface facing the second movable platform B22, and the second movable platform B22 is provided with a spherical protruding surface facing the second base B21. As a result, the second movable platform B22 is driven by the second driver B23 to move in a curve along the second base B21, and the second connecting means B24 is linked to swing along the curved path in the vertical direction. The second trajectory R2 formed by the swinging of the second movable platform B22 along the curved path has a second axis L2 parallel to the first direction d1 as its axis of swing (in Figure 10, the radius from the second trajectory R2 to the second axis L2 is represented by the second radius r2). In this embodiment of the present invention, the second base B21 and the second movable platform B22 are moved relative to each other by cross bearings.

[0035] As shown in Figures 8 and 11, the third rotating member B3 is provided with a third base B31 attached to the second connecting means B24 (Figure 10), a third movable platform B32 attached to the third base B31, a third driver B33 capable of driving the movement of the third movable platform B32, and a third connecting means B34 attached to the third movable platform B32. The third base B31 is provided with a spherical recessed surface facing the third movable platform B32, and the third movable platform B32 is provided with a spherical projection surface facing the third base B31. The third movable platform B32 moves in a curved manner along the third base B31 by the drive of the third driver B33, and can also swing along a curved path in the front-rear direction by linking with the third connecting means B34. The third trajectory R3 formed by the swinging of the third movable platform B32 along the curved path has a third axis L3 parallel to the second direction d2 as its axis of swing (in Figure 11, the radius from the third trajectory R3 to the third axis L3 is represented by the third radius r3). ​​In this embodiment of the present invention, the third base B31 and the third movable platform B32 are moved relative to each other by cross bearings.

[0036] As shown in Figures 8 and 12, the first connecting means B14 is provided with an upright first connecting surface B141 and a horizontal second connecting surface B142. The second connecting means B24 is provided with a horizontal third connecting surface B241 and an inclined fourth connecting surface B242. The third connecting means B34 is provided with an inclined fifth connecting surface B341 and an upright sixth connecting surface B342. The first connecting surface B141 is substantially parallel to the sixth connecting surface B342, and the fourth connecting surface B242 is substantially parallel to the fifth connecting surface B341. The first connecting means B14 is provided on the first movable base B12 of the first rotating member B1 by the first connecting surface B141. The second rotating member B2 is provided below the first connecting means B14, and the second base B21 is provided on the second connecting surface B142 of the first connecting means B14. The second connecting means B24 is attached to the second movable base B22 by a third connecting surface B241. The third rotating member B3 is attached to the inclined fourth connecting surface B242 of the second connecting means B24 by a third base B31. The third connecting means B34 is attached to the third movable base B32 by an inclined fifth connecting surface B341. The holding mechanism C (see Figure 7) is attached to the sixth connecting surface B342.

[0037] As shown in Figure 13, the first axis L1, the second axis L2, and the third axis L3 are orthogonal to each other at axis point Lp. The second drive mechanism B drives the drive-holding mechanism C to link the optical fiber array component W1, allowing it to rotate around axis point Lp as the center of rotation, performing rotational movement in the three degrees of freedom of the first axis L1, the second axis L2, and the third axis L3. The default position of axis point Lp corresponds in advance to below the optical coupling section W11 and in front of the prism W111 when the optical fiber array component W1 is held by the holding mechanism C. As shown in Figure 5, when the optical fiber array component W1 is coupled to the integrated circuit component W2, the positions below the optical coupling section W11 and in front of the prism W111 also roughly correspond to the lens array W231 on the upper surface of the photon integrated circuit W23. In this embodiment, the first axis L1, the second axis L2, and the third axis L3 are orthogonal to each other, but in other embodiments of the present invention, the first axis L1, the second axis L2, and the third axis L3 may simply intersect each other at axis point Lp.

[0038] As shown in Figures 14 and 15, the holding mechanism C includes a support frame C1, a holding means C2 provided on the support frame C1 and capable of holding the optical fiber array component W1, a corresponding connecting member C3 provided on the support frame C1 and connected to the measurement unit 1, a driving member C4 provided on the support frame C1 and driving the movement of the corresponding connecting member C3 along a first direction d1, and a curing means C5 provided on the support frame C1 and capable of curing the adhesive. An air passage C12 communicating with a nozzle C11 is formed in the support frame C1, and the nozzle C11 communicates with a negative pressure source (not shown). The holding means C2 and the corresponding connecting member C3 are both provided on the support frame C1 and can move together. Furthermore, by moving relative to the holding means C2, the corresponding connecting member C3 can be selectively connected to or not connected to the optical fiber array component W1. Thus, the holding mechanism C can hold the optical fiber array component W1 and also contribute to the measurement of the optical fiber array component W1 by the measurement unit 1.

[0039] As shown in Figures 15 to 17, the holding means C2 is provided with a first holding part C21 and a second holding part C22 located at a distance from the first holding part C21 in a first direction d1. The first holding part C21 can hold the optical coupling part W11 of the optical fiber array component W1, and the second holding part C22 can hold the receptacle part W12 of the optical fiber array component W1. By the holding means C2 simultaneously holding both ends of the optical fiber array component W1, the optical fiber array component W1 can be stably held by the holding means C2, and the situation in which the optical fiber array component W1 falls from the holding mechanism C can be reduced.

[0040] The first holding portion C21 is provided with a first holding surface C211 and a first negative pressure hole C212 communicating with the first holding surface C211, and the optical coupling portion W11 of the optical fiber array component W1 can be attracted and held to the first holding surface C211 by the first negative pressure hole C212. The second holding portion C22 is provided with a second holding surface C221 and a second negative pressure hole C222 communicating with the second holding surface C221, and the receptacle portion W12 of the optical fiber array component W1 can be attracted and held to the second holding surface C221 by the second negative pressure hole C222. The first negative pressure hole C212 and the second negative pressure hole C222 communicate with the air passage C12.

[0041] The holding means C2 is provided with a first position limiting portion C23 and a second position limiting portion C24. The first position limiting portion C23 is provided on the side of the second holding portion C22 adjacent to the first holding portion C21, and the second position limiting portion C24 is provided on the side of the second holding portion C22 away from the first holding portion C21. The first position limiting portion C23 is provided with a first play area C231 through which the optical fiber portion W13 of the optical fiber array component W1 passes, and the second position limiting portion C24 is provided with a second play area C241 through which the second base portion W123 of the receptacle portion W12 of the optical fiber array component W1 passes.

[0042] When the optical fiber array component W1 is held by the holding means C2, the relatively wide first base portion W122 of the receptacle portion W12 is positioned and restricted between the first position limiting portion C23 and the second position limiting portion C24, thereby restricting the movement of the optical fiber array component W1 in the first direction d1 within the holding means C2.

[0043] As shown in Figures 18 to 20, the corresponding connecting member C3 is indirectly provided on the support frame C1 via a drive member C4 (see Figure 15). The drive member C4 is provided with a drive means C41, a moving means C42 driven by the drive means C41, and a mounting base C43 provided on the moving means C42. The corresponding connecting member C3 is provided on the mounting base C43 and is driven by the drive means C41 to reciprocate along a first direction d1 relative to the holding means C2, thereby selectively connecting to or not connecting to the optical fiber array component W1.

[0044] The corresponding connecting member C3 is provided with an optical passage section C31, an optical transfer section C32 connected between the optical passage section C31 and the measurement unit 1, and a guide section C33 that can be selectively inserted into the optical fiber array component W1. The optical passage section C31 and the guide section C33 are provided on the corresponding connecting surface C34 of the corresponding connecting member C3 facing the holding means C2. The corresponding connecting surface C34 is inclined from bottom to top toward the holding means C2, and the degree of inclination of the corresponding connecting surface C34 corresponds to the second side surface W121 of the optical fiber array component W1. Specifically, the corresponding connecting surface C34 and the second side surface W121 are parallel to each other. The guide section C33 is provided with two spaced-apart guide pins C331 on both sides of the optical passage section C31, and the guide pins C331 can be inserted into the guide holes W124 (see Figure 3) of the optical fiber array component W1. When the corresponding connecting member C3 is connected to the optical fiber array component W1, the guide pin C331 is inserted into the guide hole W124 and the corresponding connecting surface C34 is brought into contact with the second side surface W121, so that the light-transmitting portion C31 is exposed in relation to the optical fiber portion W13 of the receptacle portion W12, and the measurement unit 1 (see Figure 15) can supply the optical signal W3 (see Figure 2) to the optical fiber array component W1.

[0045] As shown in Figures 14, 16, and 21, the curing means C5 is provided with two first light sources C51, which are spaced apart from each other in the second direction d2 and are provided on both sides of the holding means C2, and the first light sources C51 can irradiate ultraviolet light C511 in a direction tilted toward the first holding portion C21 of the holding means C2.

[0046] In another embodiment of the present invention, the curing means C5 is further provided with a second light source (not shown), and the second light source can irradiate the second holding portion C22 of the holding means C2 with a laser in an inclined direction.

[0047] In implementing the component coupling device 2, the optical fiber array component W1 is placed on the first holding base 3, and the integrated circuit component W2 is placed on the second holding base 4. The inspection mechanism D is moved laterally to above the second holding base 4 by the drive of the first drive mechanism A. The inspection mechanism D then acquires the orientation of the photon integrated circuit W23 and / or the lens array W231 and the inclination angle of the upper surface of the photon integrated circuit W23 by, for example, photography, multipoint distance measurement, or other methods, and then records this information in the control unit 7.

[0048] After obtaining the orientation of the photon integrated circuit W23 and / or the lens array W231 and the inclination angle of the upper surface of the photon integrated circuit W23, the first drive mechanism A drives the second drive mechanism B to move the holding mechanism C laterally above the first holding base 3, and the first drive mechanism A drives the second drive mechanism B to move the holding mechanism C downward, thereby bringing the holding means C2 into contact with the optical fiber array component W1 on the first holding base 3. At the same time, by activating the provision of negative pressure by the negative pressure source, the first holding part C21 and the second holding part C22 of the holding means C2 cause the optical coupling part W11 and the receptacle part W12 of the optical fiber array component W1 to be attracted and held by the air passage C12 (see Figure 15). Then, by driving the drive member C4 to bring the corresponding connecting member C3 closer to the optical fiber array component W1 and connect it to the optical fiber array component W1, the measurement unit 1 can supply the optical signal W3 to the optical fiber array component W1.

[0049] After the corresponding connecting member C3 is connected to the optical fiber array component W1, the holding mechanism C is moved upward by the second drive mechanism B through the drive of the first drive mechanism A, thereby removing the optical fiber array component W1, which is held by attraction in the holding means C2, from the first holding base 3. At the same time, the holding mechanism C, which is linked to the second drive mechanism B by the drive of the first drive mechanism A, moves the optical fiber array component W1 laterally to the inspection device 6 to perform the inspection. In the inspection device 6, the direction of the optical coupling section W11 and / or the prism W111 and the inclination angle of the lower surface of the optical coupling section W11 are obtained by, for example, photography, multipoint distance measurement, or other methods, and then recorded in the control unit 7. Here, as shown in Figures 6, 8, and 13, the control unit 7 compares the direction of the optical coupling section W11 and / or prism W111 with the direction of the photon integrated circuit W23 and / or lens array W231 to obtain the difference between them. Based on this difference, the control unit 7 controls the oscillation of the first rotating member B1 of the second drive mechanism B along a curved path in the left-right direction with the first axis L1 as the axis, thereby adjusting the attitude of the optical fiber array component W1 held by the holding mechanism C to make the direction of the optical coupling section W11 and / or prism W111 correspond to the direction of the photon integrated circuit W23 and / or lens array W231. The control unit 7 also compares the inclination angle of the lower surface of the optical coupling section W11 with the inclination angle of the upper surface of the photon integrated circuit W23 and obtains the difference between them. Based on this difference, the control unit 7 controls the oscillation of the second rotating member B2 of the second drive mechanism B along a curved path in the vertical direction with the second axis L2 as its axis, and controls the oscillation of the third rotating member B3 along a curved path in the front-rear direction with the third axis L3 as its axis, thereby adjusting the posture of the optical fiber array component W1 held by the holding mechanism C so that the lower surface of the optical coupling section W11 is parallel to the upper surface of the photon integrated circuit W23.

[0050] The second drive mechanism B drives the holding mechanism C to adjust the direction and tilt angle of the optical fiber array component W1. Then, the first drive mechanism A drives the second drive mechanism B to move the holding mechanism C laterally to the adhesive application device 5, thereby applying the adhesive. The adhesive application device 5 houses two types of adhesive valves, one for the first adhesive F1 and the other for the second adhesive F2, respectively, so that the first adhesive F1 and the second adhesive F2 can be applied to the lower surfaces of the optical coupling section W11 and the receptacle section W12, respectively.

[0051] After applying adhesive to the optical fiber array component W1, the first drive mechanism A drives the second drive mechanism B to move the holding mechanism C laterally above the second holding base 4. Prior to this, the second drive mechanism B has already driven the holding mechanism C to adjust the direction of the optical coupling section W11 and / or prism W111 to correspond to the direction of the photon integrated circuit W23 and / or lens array W231, and the lower surface of the optical coupling section W11 has already been adjusted to be parallel to the upper surface of the photon integrated circuit W23. Therefore, after moving the holding mechanism C above the second holding base 4, the first drive mechanism A drives the second drive mechanism B to move the holding mechanism C downward, thereby bonding the lower surface of the optical coupling section W11 and the lower surface of the receptacle section W12 to the upper surface of the photon integrated circuit W23 and the upper surface of the second lid W222 of the lid member W22, respectively, with the first adhesive F1 and the second adhesive F2. As a result, the optical signal W3 is transferred between the optical fiber array component W1 and the integrated circuit component W2 via the prism W111 and the lens array W231. During this process, the holding mechanism C constantly holds the optical fiber array component W1 with the holding means C2.

[0052] Immediately after bonding the optical fiber array component W1 to the integrated circuit component W2, the first adhesive F1 and the second adhesive F2 have not yet hardened, and there is a certain height between the first adhesive F1 and the second adhesive F2. Therefore, the optical fiber array component W1 is placed so as to float on the first adhesive F1 and the second adhesive F2, and in this state, it is held by the holding mechanism C and its orientation can be adjusted. At this time, the measurement unit 1 can measure whether the numerical value of the intensity of the optical signal W3 transferred to the optical fiber array component W1 is within a predetermined range. If the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 is outside the predetermined range, the control unit 7 drives the optical fiber array component W1 to the holding mechanism C by driving the second drive mechanism B as needed, driving rotational movement of three degrees of freedom with the axis point Lp as the center of rotation and the first axis L1, the second axis L2, and the third axis L3 as axes. In other words, with the optical fiber array component W1 attached to the integrated circuit component W2, the control unit 7 can fine-tune the orientation of the optical fiber array component W1 until the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 falls within a predetermined range. Once the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 falls within the predetermined range, the control unit 7 stops the operation of the second drive mechanism B. When the numerical value of the intensity of the optical signal W3 falls within the predetermined range, it means that the transfer efficiency of the optical signal W3 between the optical fiber array component W1 and the integrated circuit component W2 is relatively good. Here, the order in which the first rotating member B1, the second rotating member B2, and the third rotating member B3 of the second drive mechanism B operate is such that the third rotating member B3 has the highest priority, followed by the second rotating member B2, and finally the first rotating member B1. If, after the third rotating member B3 drives the holding mechanism C to rotate the optical fiber array component W1 around the third axis L3, the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 is already within a predetermined range, then the first rotating member B1 and the second rotating member B2 do not need to operate.After the second drive mechanism B drives the holding mechanism C to fine-tune the orientation of the optical fiber array component W1, if the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 is still outside the predetermined range, the control unit 7, as necessary, controls the first drive mechanism A to drive the second drive mechanism B to cause the holding mechanism C to perform linear movement of the optical fiber array component W1 in the three degrees of freedom: the first direction d1, the second direction d2, and the third direction d3, and then drives the second drive mechanism B to cause the holding mechanism C to move the optical fiber array By causing rotational movement of the optical fiber array component W1 in three degrees of freedom with the first axis L1, second axis L2, and third axis L3 as axes, the orientation of the optical fiber array component W1 is adjusted relatively significantly until the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 falls within a predetermined range while the optical fiber array component W1 is attached to the integrated circuit component W2. Once the numerical value of the intensity of the optical signal W3 measured by the measurement unit 1 falls within the predetermined range, the operation of the first drive mechanism A and the second drive mechanism B is stopped.

[0053] As shown in Figures 2, 14, and 21, when the measured intensity of the optical signal W3 is within a predetermined range, the curing means C5 cures the first adhesive F1 and the second adhesive F2 with ultraviolet light C511 and a laser, respectively. Since the optical coupling part W11 is made of a material that allows light to pass through, the ultraviolet light C511 passes through the optical coupling part W11 and can cure the first adhesive F1 between the optical coupling part W11 and the photon integrated circuit W23. The laser generates heat, so the second adhesive F2 between the receptacle part W12 and the second lid part W222 of the lid member W22 is cured by the heat.

[0054] After the first adhesive F1 and the second adhesive F2 have hardened, the drive member C4 drives the corresponding connecting member C3 away from the optical fiber array component W1, thereby disengaging the corresponding connection with the optical fiber array component W1.

[0055] After the corresponding connecting member C3 releases its corresponding connection with the optical fiber array component W1, the negative pressure source releases the negative pressure and the holding means C2 moves away from the optical fiber array component W1, thereby completing the process of coupling the optical fiber array component W1 to the integrated circuit component W2.

[0056] The first drive mechanism A and the second drive mechanism B of the component coupling device 2 drive the holding mechanism C and repeat the above movements, thereby coupling a predetermined number of optical fiber array components W1 to integrated circuit components W2.

[0057] In the component coupling device of the embodiment of the present invention, the holding mechanism C can hold the optical fiber array component W1 while the first drive mechanism A and the second drive mechanism B drive the multi-axis linear or rotational movement of the optical fiber array component W1. This solves the drawback in the prior art that the movement of the integrated circuit component W2 in accordance with the optical fiber array component W1 must be driven separately.

[0058] Although embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications are possible without departing from its essence. [Explanation of symbols]

[0059] 1 Measurement Unit 2-part coupling device 3. First holding base 4. Second holding base 5. Adhesive application device 6. Inspection equipment 7 Control Unit A First drive mechanism A1 First linear motion member A11 First rail base A12 First slide A2 Second linear motion member A21 Second rail base A22 Second slide A3 Third linear motion member A31 Third rail base A32 Third slide B. Second drive mechanism B1 First rotating member B11 First Pedestal B12 First mobile platform B13 First drive unit B14 First connection means B141 First connection surface B142 Second connection surface B2 Second rotating member B21 Second Pedestal B22 Second mobile platform B23 Second drive unit B24 Second connection means B241 Third connection surface B242 Fourth connection surface B3 Third rotating member B31 Third Pedestal B32 Third mobile platform B33 Third drive unit B34 Third connection means B341 Fifth connection surface B342 Sixth connection surface C Retention mechanism C1 Support Frame C11 Nozzle C12 Air passage C2 Holding means C21 First retaining part C211 First retaining surface C212 First negative pressure hole C22 Second retaining part C221 Second retaining surface C222 Second negative pressure hole C23 First position restriction section C231 First Play Area C24 Second position restriction section C241 Second Play Area C3 Compatible Connecting Components C31 Light passage section C32 Optical Transfer Unit C33 Information Department C331 Guide Pin C34 compatible connection side C4 Drive Member C41 Drive mechanism C42 Means of transportation C43 mounting base C5 Curing means C51 First light source C511 Ultraviolet D Inspection Agency D1 First image capture member D11 Image Capture D12 Camera Head D13 light source D2 distance sensor F1 First Adhesive F2 Second Adhesive T cabinet L1 First axis L2 Second axis L3 Third axis Lp axis point R1 First Trajectory R2: The Second Journey R3 The Third Trajectory W1 Fiber Optic Array Component W11 Optical coupling section W111 Prism W112 First side W12 Receptacle W121 Second side W122 First base W123 Second base W124 Guide hole W13 Optical Fiber Section W131 Fiber Optic W2 Integrated Circuit Components W21 Holding plate W22 Lid component W221 First lid W222 Second lid W223 Cutout space W23 Photon Integrated Circuit W231 Lens Array W2311 Lens W3 optical signal d1 First direction d2 Second direction d3 Third direction r1 First radius r2 Second radius r3 Third radius

Claims

1. A component coupling device suitable for coupling optical fiber array components to integrated circuit components, The first drive mechanism and A second drive mechanism provided in the first drive mechanism and driven by the first drive mechanism to enable multi-axis linear movement, The device comprises a holding mechanism provided on the second drive mechanism and driven by the second drive mechanism to enable multi-axis rotational movement, A component coupling device wherein the holding mechanism is provided with holding means capable of holding the optical fiber array component.

2. The first drive mechanism includes a first linear motion member provided in the housing, a second linear motion member provided on the first linear motion member, and a third linear motion member provided on the second linear motion member. The first drive mechanism drives the second drive mechanism to interlock the holding mechanism and move the optical fiber array component, thereby enabling linear movement of the optical fiber array component in the first, second, and third directions. The component coupling device according to claim 1, wherein the first direction, the second direction, and the third direction are orthogonal to each other.

3. The component coupling device according to claim 2, wherein the first and second directions are transverse directions, and the third direction is a vertical direction.

4. The second drive mechanism is provided with a first rotating member provided on the first drive mechanism, a second rotating member provided on the first rotating member, and a third rotating member provided on the second rotating member. The component coupling device according to claim 1, wherein the second drive mechanism drives rotational movement of the optical fiber array component about the first axis, second axis, and third axis through interlocking with the holding mechanism, the first axis is parallel to the third direction, the second axis is parallel to the first direction, the third axis is parallel to the second direction, and the first direction, the second direction, and the third direction are orthogonal to each other.

5. The component coupling device according to claim 4, wherein the first and second directions are transverse directions, and the third direction is a vertical direction.

6. The component coupling device according to claim 4, wherein the first axis, the second axis, and the third axis intersect each other at the axis point, and the second drive mechanism drives the holding mechanism and drives rotational movement of the optical fiber array component with the axis point as the center of rotation.

7. The component coupling device according to claim 6, wherein the default position of the axis point corresponds in advance to a position below the optical coupling portion of the optical fiber array component and in front of the prism of the optical fiber array component when the optical fiber array component is held by the holding mechanism.

8. The component coupling device according to claim 1, wherein the component coupling device further includes an inspection mechanism for performing inspections on the integrated circuit components, and the inspection mechanism is driven by the first drive mechanism to perform multi-axis linear movement.

9. The component coupling device according to claim 1, wherein the holding mechanism is provided with a corresponding connecting member connected to a measurement unit, and the corresponding connecting member can selectively connect to or not connect to the optical fiber array component by relative movement with respect to the holding means.

10. The holding means is provided with a first holding portion and a second holding portion located at a distance from the first holding portion. The component coupling device according to claim 1, wherein the first holding portion can hold the optical coupling portion of the optical fiber array component, and the second holding portion can hold the receptacle portion of the optical fiber array component.

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