Microporous film, and method for manufacturing the microporous film using a pillar template
The pillar template approach addresses the challenge of non-uniform etching in porous membrane production by ensuring uniform pore size and shape, enhancing manufacturing efficiency and throughput.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- GLOBAL LIFE SCIENCES SOLUTIONS USA LLC
- Filing Date
- 2026-04-02
- Publication Date
- 2026-07-02
AI Technical Summary
Existing semiconductor manufacturing techniques for producing porous membranes with small pores (less than 3.0 microns) face challenges in achieving uniformity and efficiency due to non-uniform etching through thick polymer layers, leading to inconsistent pore sizes and shapes.
The use of a pillar template in conjunction with photolithography and etching techniques allows for the formation of uniformly sized pores by reducing the etching length and using a reusable template with controlled exit hole shapes, ensuring reproducibility and preventing larger aspect ratios from determining the exit hole shape.
This method enhances manufacturing throughput by reducing etching time and improving control over pore formation, resulting in consistently sized pores with a tapered and perpendicular contour, thus preventing clogging and facilitating easy membrane separation from the template.
Smart Images
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