Information processing device and information processing method

Abstract

To create inspection data for inspection equipment. [Solution] The information processing device comprises: an image data acquisition unit that acquires image data of an object to be inspected captured by an imaging device of an inspection device; a candidate generation unit that generates candidate inspection conditions for the inspection device based on the image data; a display control unit that generates a display screen for specifying candidate inspection conditions and displays it on a display device; an input data acquisition unit that acquires input data specifying candidate inspection conditions generated by the operation of an input device; and an inspection data creation unit that creates inspection data defining the inspection plan of the inspection device based on the input data.

Description

Technical Field

[0001] The technology disclosed in this specification relates to an information processing apparatus and an information processing method.

Background Art

[0002] In the technical field related to inspection apparatuses, an inspection apparatus as disclosed in Patent Document 1 is known.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Inspection data that defines an inspection plan for an inspection apparatus is created before the inspection apparatus inspects an inspection target. The inspection apparatus inspects the inspection target by operating according to the inspection data. Creating inspection data requires skill. There is a demand for a technology that can easily create inspection data.

[0005] The technology disclosed in this specification aims to create inspection data for an inspection apparatus.

Means for Solving the Problems

[0006] This specification discloses an information processing apparatus. The information processing apparatus includes an image data acquisition unit that acquires image data of an inspection target imaged by an imaging apparatus of an inspection apparatus, a candidate generation unit that generates candidates for inspection conditions of the inspection apparatus based on the image data, a display control unit that generates a display screen for designating candidates for inspection conditions and causes the display apparatus to display the display screen, an input data acquisition unit that acquires input data for designating a candidate for inspection conditions generated by operating an input apparatus, and an inspection data creation unit that creates inspection data that defines an inspection plan for the inspection apparatus based on the input data. [Effects of the Invention]

[0007] According to the technology disclosed herein, inspection data for an inspection device can be created. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a schematic diagram showing an inspection apparatus according to an embodiment. [Figure 2] Figure 2 is a hardware configuration diagram showing an information processing device according to an embodiment. [Figure 3] Figure 3 is a functional block diagram showing an information processing device according to an embodiment. [Figure 4] Figure 4 is a screen transition diagram of the display screen according to the embodiment. [Figure 5] Figure 5 shows the main menu screen according to this embodiment. [Figure 6] Figure 6 shows a guidance screen according to the present invention. [Figure 7] Figure 7 shows the new data creation screen according to the embodiment. [Figure 8] Figure 8 shows the alignment mark setting screen according to the embodiment. [Figure 9] Figure 9 shows an existing data editing screen according to the embodiment. [Figure 10] Figure 10 shows the dimension inspection editing screen according to an embodiment. [Figure 11] Figure 11 shows the visual inspection editing screen according to an embodiment. [Figure 12] Figure 12 is a flowchart showing the information processing method according to the embodiment. [Modes for carrying out the invention]

[0009] The embodiments will be described below with reference to the drawings. In the embodiments, a local coordinate system, which is an XYZ Cartesian coordinate system, is defined for the inspection device 1, and the positional relationships of each part will be described with reference to the local coordinate system. The direction parallel to the X-axis in the horizontal plane is defined as the X-axis direction. The direction parallel to the Y-axis in the horizontal plane perpendicular to the X-axis is defined as the Y-axis direction. The direction parallel to the Z-axis perpendicular to the horizontal plane is defined as the Z-axis direction. The plane containing the X-axis and Y-axis will be appropriately referred to as the XY plane. The XY plane is parallel to the horizontal plane. The Z-axis is parallel to the vertical line. The Z-axis direction is the up and down direction. The +Z direction is the up direction, and the -Z direction is the down direction.

[0010] [Inspection equipment] Figure 1 is a schematic diagram showing an inspection device 1 according to an embodiment. The inspection device 1 is an appearance inspection device that inspects the appearance of an object W to be inspected. As shown in Figure 1, the inspection device 1 comprises a table 2, a head unit 3, and a controller 4.

[0011] Table 2 supports the object to be inspected W. The object to be inspected W includes industrial products. Industrial products include metal products. Industrial products may be parts, work in progress, or finished products. Examples of industrial products include engine cylinder blocks, LM guides, side mirrors, and gears. Table 2 is movable in the X-axis and Y-axis directions by table actuator 5.

[0012] The head unit 3 includes an imaging device 6 and an illumination device 7. The imaging device 6 images the object to be examined W, which is supported on the table 2. The imaging device 6 images the object to be examined W from above. The illumination device 7 illuminates the object to be examined W, which is supported on the table 2, with illumination light. The imaging device 6 images the object to be examined W, which is illuminated by the illumination device 7.

[0013] The imaging device 6 includes an imaging optical system 8, an image sensor 9, and a body 10. Each of the imaging optical system 8 and the image sensor 9 is held by the body 10. The imaging optical system 8 has optical elements. The optical axis AX of the imaging optical system 8 is parallel to the Z axis. The image sensor 9 acquires an image of the inspection target W through the imaging optical system 8. Examples of the image sensor 9 include a CCD (Charge-Coupled Device) image sensor and a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

[0014] In the embodiment, the illumination device 7 includes a coaxial illumination unit 11 and a side-inclined illumination unit 12. The coaxial illumination unit 11 coaxial-illuminates the inspection target W. Coaxial illumination refers to an illumination method in which illumination light is irradiated onto the inspection target W from a direction parallel to the optical axis AX. The side-inclined illumination unit 12 side-inclined-illuminates the inspection target W. Side-inclined illumination refers to an illumination method in which illumination light is irradiated onto the inspection target W from the outside of the optical axis AX.

[0015] The coaxial illumination unit 11 includes a light source 13 and a half mirror 14. The coaxial illumination unit 11 is held by the body 10. The light source 13 emits illumination light. Examples of the light source 13 include a light emitting diode (LED). The light source 13 emits white light as the illumination light. At least a part of the half mirror 14 is disposed on the optical axis AX. In the embodiment, the half mirror 14 is disposed inside the imaging optical system 8. The illumination light emitted from the light source 13 is reflected by the half mirror 14 and irradiated onto the inspection target W. The illumination light reflected by the inspection target W passes through the imaging optical system 8 and the half mirror 14 and then enters the image sensor 9.

[0016] The oblique illumination unit 12 has a light source 15 and a support member 16. The light source 15 emits illumination light. As the light source 15, a light emitting diode (LED) is exemplified. The light source 15 emits white light as the illumination light. The light source 15 is ring-shaped and arranged so as to surround the optical axis AX. In the embodiment, the oblique illumination unit 12 performs ring illumination, which is a kind of oblique illumination. Ring illumination refers to an illumination method in which illumination light is irradiated from a ring-shaped light source 15 arranged so as to surround the optical axis AX to the inspection object W. The optical axis AX of the imaging optical system 8 is arranged inside the ring-shaped light source 15. The support member 16 supports the light source 15. The support member 16 is arranged around the light source 15. The upper end portion of the support member 16 is fixed to the body 10 of the imaging device 6. The lower end portion of the support member 16 is arranged below the light source 15.

[0017] The oblique illumination unit 12 has a plurality of light sources 15. The light sources 15 include a first light source 15A having a first inner diameter, a second light source 15B having a second inner diameter larger than the first inner diameter, and a third light source 15C having a third inner diameter larger than the second inner diameter. Among the plurality of light sources 15, the first light source 15A is arranged at the position farthest from the table 2, the second light source 15B is arranged at the position farther from the table 2 next to the first light source 15A, and the third light source 15C is arranged at the position closest to the table 2.

[0018] The illumination device 7 illuminates the inspection object W under each of a plurality of different illumination conditions. The illumination conditions include the incident angle θ of the illumination light incident on the inspection object W. The incident angle θ0 at which the illumination light emitted from the light source 13 of the coaxial illumination unit 11 is incident on the inspection object W, the incident angle θ1 at which the illumination light emitted from the first light source 15A is incident on the inspection object W, the incident angle θ2 at which the illumination light emitted from the second light source 15B is incident on the inspection object W, and the incident angle θ3 at which the illumination light emitted from the third light source 15C is incident on the inspection object W are different.

[0019] The illumination device 7 irradiates the object to be inspected W with illumination light at each of the multiple incidence angles θ. When illumination light is emitted from the light source 13 of the coaxial illumination unit 11, illumination light is not emitted from the first light source 15A, the second light source 15B, and the third light source 15C. When illumination light is emitted from the first light source 15A, illumination light is not emitted from the second light source 15B, the third light source 15C, and the light source 13. When illumination light is emitted from the second light source 15B, illumination light is not emitted from the third light source 15C, the light source 13, and the first light source 15A. When illumination light is emitted from the third light source 15C, illumination light is not emitted from the light source 13, the first light source 15A, and the second light source 15B.

[0020] In this embodiment, there are four patterns of illumination conditions. The illumination conditions include a first illumination condition in which the object to be inspected W is illuminated by illumination light emitted from a light source 13, a second illumination condition in which the object to be inspected W is illuminated by illumination light emitted from a first light source 15A, a third illumination condition in which the object to be inspected W is illuminated by illumination light emitted from a second light source 15B, and a fourth illumination condition in which the object to be inspected W is illuminated by illumination light emitted from a third light source 15C.

[0021] The head unit 3 is movable in the Z-axis direction by the head actuator 17. The imaging optical system 8 is a fixed-focus optical system. In this embodiment, the imaging device 6 does not have an autofocus function. When focusing the imaging device 6 on the surface of the object to be inspected W, the imaging device 6 is focused by moving the head unit 3, which includes the imaging device 6, in the Z-axis direction.

[0022] Controller 4 outputs control commands to operate the inspection device 1. Controller 4 outputs control commands to control the imaging device 6. Controller 4 outputs control commands to control the lighting device 7. Controller 4 outputs control commands to control the table actuator 5. Controller 4 outputs control commands to control the head actuator 17. Controller 4 acquires image data showing the image of the inspection target W captured by the imaging device 6.

[0023] The information processing device 18 is connected to the controller 4. The information processing device 18 creates inspection data that defines the inspection plan for the inspection device 1. The inspection data created in the information processing device 18 is transmitted from the information processing device 18 to the controller 4. The controller 4 stores the inspection data transmitted from the information processing device 18. The controller 4 outputs control commands to cause the inspection device 1 to operate according to the inspection data. The inspection device 1 inspects the object to be inspected W by operating according to the inspection data.

[0024] A display device 19 and an input device 20 are connected to the information processing device 18. The display device 19 provides display data to the user of the information processing device 18. The display device 19 includes a panel display such as a liquid crystal display or an organic EL display. The input device 20 generates input data when operated by the user. The input device 20 includes a touch panel (touch sensor) placed on the display device 19. The input device 20 may be a computer keyboard, a mouse, or a voice input device.

[0025] The information processing device 18 creates inspection data through interactive processing with the user. Interactive processing refers to a processing method in which the user and the information processing device 18 mutually provide guidance and input via the display device 19 and the input device 20 while the creation of inspection data progresses.

[0026] The inspection data defines the inspection plan for inspection device 1. The inspection plan includes the inspection conditions for inspection device 1. The inspection conditions include at least one of the inspection items, inspection methods, inspection sequence, location of the inspection target part or area on the inspection target W, size of the inspection target part or area, tolerance values ​​for the measured value which is one of the inspection results of inspection device 1, and lighting conditions for the inspection target W by the lighting device 7. The inspection data may also be referred to as an inspection program.

[0027] Inspection data is created in association with the type of inspection target W. The number of inspection data is equal to the number of inspection target W types. For example, if there are 50 types of inspection target W, 50 inspection data will be created. Different types of inspection target W mean that at least one of the dimensions, shape, color, and material of the inspection target W is different.

[0028] [Information Processing Device] Figure 2 is a hardware configuration diagram showing an information processing device 18 according to an embodiment. The information processing device 18 includes a computer. The information processing device 18 has a processor 21 such as a CPU (Central Processing Unit), a main memory 22 including non-volatile memory such as ROM (Read Only Memory) and volatile memory such as RAM (Random Access Memory), a storage 23 including a recording medium such as semiconductor memory or a hard disk, an input / output interface 24 including input / output circuits, and a communication interface 25 including communication circuits. The functions of the information processing device 18 are stored in the storage 23 as a computer program 26. The processor 21 reads the computer program 26 from the storage 23, loads it into the main memory 22, and executes processing according to the computer program 26. The computer program 26 may be distributed to the information processing device 18 via a network.

[0029] Similar to the information processing device 18, the controller 4 also includes a computer. The controller 4 also has a processor, main memory, storage for storing computer programs, an input / output interface, and a communication interface.

[0030] Figure 3 is a functional block diagram showing an information processing device 18 according to an embodiment. The information processing device 18 has a plurality of functional units. The functional units of the information processing device 18 are performed by a processor 21 and a storage 23. The functional units of the information processing device 18 include an operation command unit 31, an image data acquisition unit 32, an image processing unit 33, a candidate generation unit 34, a display control unit 35, an input data acquisition unit 36, an inspection data creation unit 37, and a storage unit 38. The processor 21 includes the operation command unit 31, the image data acquisition unit 32, the image processing unit 33, the candidate generation unit 34, the display control unit 35, the input data acquisition unit 36, and the inspection data creation unit 37. The storage 23 includes the storage unit 38.

[0031] The operation command unit 31 outputs an operation command to operate the inspection device 1 when creating inspection data. When creating inspection data, the controller 4 outputs a control command to operate the inspection device 1 based on the operation command from the operation command unit 31. When creating inspection data, the inspection target W supported on the table 2 is imaged by the imaging device 6 under specified imaging conditions. The imaging conditions include the imaging range of the inspection target W by the imaging device 6 and the illumination conditions of the inspection target W by the illumination device 7. When creating inspection data, the inspection target W supported on the table 2 is imaged by the imaging device 6 while illuminated by the illumination device 7. When creating inspection data, the operation command unit 31 outputs an operation command so that the inspection target W illuminated by the illumination device 7 is imaged by the imaging device 6. The field of view of the imaging optical system 8 of the imaging device 6 may be smaller than the outer shape of the inspection target W. That is, the imaging device 6 may not be able to image the entire inspection target W at once. The operation command unit 31 can output an operation command to the table actuator 5 so that, for example, the imaging range of the inspection target W by the imaging device 6 is changed. In other words, the operation command unit 31 can output an operation command to move the table 2 in a step-and-repeat manner so that multiple parts of the inspection target W are sequentially placed within the field of view of the imaging device 6. The operation command unit 31 can also output an operation command to the lighting device 7 so that the lighting conditions of the inspection target W are changed by the lighting device 7.

[0032] The image data acquisition unit 32 acquires image data of the inspection target W captured by the imaging device 6. The image data of the inspection target W captured by the imaging device 6 is transmitted from the imaging device 6 to the controller 4. The image data acquisition unit 32 acquires the image data of the inspection target W captured by the imaging device 6 from the controller 4.

[0033] The image processing unit 33 extracts characteristic parts of the object to be inspected W from the image data of the object to be inspected W. Examples of characteristic parts of the object to be inspected W include holes provided in the object to be inspected W and protrusions that protrude from the surface of the object to be inspected W.

[0034] The candidate generation unit 34 generates candidate inspection conditions for the inspection device 1 based on the image data of the object to be inspected W. In this embodiment, the candidate generation unit 34 generates candidate inspection conditions for the inspection device 1 based on the feature portions of the object to be inspected W extracted by the image processing unit 33.

[0035] The display control unit 35 generates display data and displays it on the display device 19. In this embodiment, the display data includes a display screen 40 for the user to specify candidate inspection conditions. The display control unit 35 generates a display screen 40 for the user to specify candidate inspection conditions and displays it on the display device 19.

[0036] The input data acquisition unit 36 ​​acquires input data generated when the input device 20 is operated. The user checks the display screen 40 displayed on the display device 19 and operates the input device 20 to specify candidate inspection conditions. The input data acquisition unit 36 ​​acquires input data specifying the candidate inspection conditions generated when the input device 20 is operated.

[0037] The inspection data creation unit 37 creates inspection data that defines the inspection plan for the inspection device 1 based on the input data acquired by the input data acquisition unit 36. The inspection data created by the inspection data creation unit 37 is transmitted to the controller 4. The controller 4 outputs control commands so that the inspection device 1 operates according to the inspection data.

[0038] The storage unit 38 stores data used to create inspection data. In this embodiment, the storage unit 38 stores correlation data showing the relationship between the inspection target W and the inspection conditions of the inspection device 1 suitable for the inspection target W. The correlation data is created in advance by preliminary experiments or simulations and stored in the storage unit 38. The candidate generation unit 34 generates candidate inspection conditions based on the image data of the inspection target W acquired by the image data acquisition unit 32 and the correlation data stored in the storage unit 38. The candidate generation unit 34 generates candidate inspection conditions based on the feature portion of the inspection target W extracted by the image processing unit 33 and the correlation data stored in the storage unit 38.

[0039] Multiple inspection conditions exist for the inspection device 1. The inspection conditions for the inspection device 1 include at least a first inspection condition and a second inspection condition. Candidate inspection conditions include at least a candidate for the first inspection condition and a candidate for the second inspection condition. The display control unit 35 generates a display screen 40 (first display screen) for specifying a candidate for the first inspection condition and a display screen 40 (second display screen) for specifying a candidate for the second inspection condition. The display control unit 35 sequentially displays the display screen 40 (first display screen) for specifying a candidate for the first inspection condition and the display screen 40 (second display screen) for specifying a candidate for the second inspection condition on the display device 19.

[0040] The input data acquisition unit 36 ​​acquires first input data specifying candidates for first inspection conditions and second input data specifying candidates for second inspection conditions, which are generated when the input device 20 is operated. The inspection data creation unit 37 creates inspection data based on at least the first input data and the second input data acquired by the input data acquisition unit 36.

[0041] The inspection conditions for the inspection device 1 may be three or more of any multiple. The display control unit 35 sequentially displays multiple display screens 40 on the display device 19 for specifying each of the multiple candidate inspection conditions for the inspection device 1. The input data acquisition unit 36 ​​acquires input data that specifies the multiple candidate inspection conditions generated by the operation of the input device 20. The display screens 40 displayed on the display device 19 sequentially transition through interactive processing. The inspection data creation unit 37 creates inspection data based on the input data that specifies the multiple candidate inspection conditions acquired by the input data acquisition unit 36.

[0042] Examples of inspection conditions for the inspection device 1 include alignment mark conditions related to alignment marks used for positioning the object to be inspected W, dimensional inspection conditions for inspecting the dimensions of the object to be inspected W, appearance inspection conditions for inspecting the appearance of the object to be inspected W, and illumination conditions when the illumination device 7 illuminates the object to be inspected W in order to acquire image data of the object to be inspected W.

[0043] If the inspection condition is an alignment mark condition, the candidate generation unit 34 generates candidate alignment mark conditions based on the image data of the inspection target W. The display control unit 35 generates a display screen 40 for the user to specify a candidate alignment mark condition and displays it on the display device 19. The user checks the display screen 40 displayed on the display device 19 and operates the input device 20 to specify a candidate alignment mark condition. The input data acquisition unit 36 ​​acquires input data specifying the candidate alignment mark condition generated by the operation of the input device 20. The inspection data creation unit 37 creates inspection data based on the input data so that the alignment mark condition specified by the user is used in the inspection. The alignment mark condition specified by the user is reflected in the inspection data.

[0044] If the inspection condition is a dimensional inspection condition, the candidate generation unit 34 generates candidate dimensional inspection conditions based on image data of the object to be inspected W. The display control unit 35 generates a display screen 40 for the user to specify a candidate dimensional inspection condition and displays it on the display device 19. The user checks the display screen 40 displayed on the display device 19 and operates the input device 20 to specify a candidate dimensional inspection condition. The input data acquisition unit 36 ​​acquires input data specifying the candidate dimensional inspection condition generated by the operation of the input device 20. The inspection data creation unit 37 creates inspection data based on the input data so that the dimensional inspection condition specified by the user is used in the inspection. The dimensional inspection condition specified by the user is reflected in the inspection data.

[0045] If the inspection condition is a visual inspection condition, the candidate generation unit 34 generates candidate visual inspection conditions based on image data of the inspection target W. The display control unit 35 generates a display screen 40 for the user to specify a candidate visual inspection condition and displays it on the display device 19. The user checks the display screen 40 displayed on the display device 19 and operates the input device 20 to specify a candidate visual inspection condition. The input data acquisition unit 36 ​​acquires input data specifying the candidate visual inspection condition generated by the operation of the input device 20. The inspection data creation unit 37 creates inspection data based on the input data so that the visual inspection condition specified by the user is used in the inspection. The visual inspection condition specified by the user is reflected in the inspection data.

[0046] If the inspection condition is an illumination condition, the candidate generation unit 34 generates candidate illumination conditions based on image data of the inspection target W. The display control unit 35 generates a display screen 40 for the user to specify a candidate illumination condition and displays it on the display device 19. The user checks the display screen 40 displayed on the display device 19 and operates the input device 20 to specify a candidate illumination condition. The input data acquisition unit 36 ​​acquires input data specifying the candidate illumination condition generated by the operation of the input device 20. The inspection data creation unit 37 creates inspection data based on the input data so that the illumination conditions specified by the user are used in the inspection. The illumination conditions specified by the user are reflected in the inspection data.

[0047] [Screen transitions] Figure 4 is a screen transition diagram of the display screen 40 according to the embodiment. In interactive processing, the display screen 40 displayed on the display device 19 transitions sequentially. As shown in Figure 4, in the embodiment, the display screen 40 displayed on the display device 19 includes a main menu screen 41, a guidance screen 42, a new data creation screen 43, an alignment mark setting screen 44, an existing data editing screen 45, a dimension inspection editing screen 46, and an appearance inspection editing screen 47. The display control unit 35 transitions the display screen 40 based on the input data acquired by the input data acquisition unit 36.

[0048] Figure 5 shows the main menu screen 41 according to the embodiment. When the information processing device 18 is started, the main menu screen 41 shown in Figure 5 is displayed on the display device 19. The main menu screen 41 is a display screen 40 for selecting the inspection data creation mode. In this embodiment, the information processing device 18 can create inspection data in either a complex editing mode, in which the user can create complex inspection data by operating the input device 20, or an ultra-simple editing mode, in which inspection data can be easily created through interactive processing involving transitions on the display screen 40. The user can select between the complex editing mode and the ultra-simple editing mode by operating the input device 20.

[0049] The main menu screen 41 includes a complex editing mode button 41A for selecting the complex editing mode and a super-easy editing mode button 41B for selecting the super-easy editing mode. Each of the complex editing mode button 41A and the super-easy editing mode button 41B is an example of an input device 20. When selecting the complex editing mode, the user operates the complex editing mode button 41A. When selecting the super-easy editing mode, the user operates the super-easy editing mode button 41B. Input data is generated when at least one of the complex editing mode button 41A and the super-easy editing mode button 41B is operated. The input data acquisition unit 36 ​​acquires the input data generated when at least one of the complex editing mode button 41A and the super-easy editing mode button 41B is operated.

[0050] Figure 6 shows a guidance screen 42 according to the embodiment. When the ultra-easy editing mode button 41B is operated on the main menu screen 41, the display control unit 35 transitions the display screen 40 displayed on the display device 19 from the main menu screen 41 to the guidance screen 42 based on the input data generated by the operation of the ultra-easy editing mode button 41B.

[0051] The guidance screen 42 is a display screen 40 that prompts the user to place the object to be inspected W on table 2. The guidance screen 42 includes a guidance image 42A that prompts the user to place the object to be inspected W on table 2. The guidance screen 42 also includes a set completion button 42B, which is operated after the object to be inspected W is placed on table 2, and an open button 42C, which is operated to display existing inspection data stored in the storage unit 38. The set completion button 42B and the open button 42C are examples of input devices 20. Input data is generated when at least one of the set completion button 42B and the open button 42C is operated. The input data acquisition unit 36 ​​acquires the input data generated when at least one of the set completion button 42B and the open button 42C is operated.

[0052] Figure 7 shows a new data creation screen 43 according to the embodiment. When the set completion button 42B is operated on the guidance screen 42, the display control unit 35 transitions the display screen 40 displayed on the display device 19 from the guidance screen 42 to the new data creation screen 43 based on the input data generated by the operation of the set completion button 42B.

[0053] The new data creation screen 43 is a display screen 40 for setting the basic items necessary for creating new inspection data. The basic items include the material of the inspection target W, the presence or absence of alignment marks on the inspection target W, and the inspection items. The new data creation screen 43 includes multiple material selection buttons 43A for selecting the material of the inspection target W, two alignment mark selection buttons 43B for selecting the presence or absence of alignment marks on the inspection target W, multiple inspection item selection buttons 43C for selecting inspection items, and an imaging button 43D for starting imaging of the inspection target W by the imaging device 6. The material selection buttons 43A, alignment mark selection buttons 43B, inspection item selection buttons 43C, and imaging button 43D are each examples of input devices 20.

[0054] The user operates one of several material selection buttons 43A according to the material of the object W to be inspected. In the example shown in Figure 8, the material selection buttons 43A include a SUS button 43A1 which is operated when the material of the object W to be inspected is stainless steel, an iron button 43A2 which is operated when the material of the object W to be inspected is iron, a copper button 43A3 which is operated when the material of the object W to be inspected is copper, and an other button 43A4 which is operated when the material of the object W to be inspected is a material other than stainless steel, iron, or copper. Input data is generated when at least one of the material selection buttons 43A is operated. The input data acquisition unit 36 ​​acquires the input data generated when at least one of the material selection buttons 43A is operated.

[0055] The user operates one of the two alignment mark selection buttons 43B depending on whether or not alignment marks are present on the object W being inspected. Alignment marks may or may not be present on the object W being inspected. The alignment mark selection buttons 43B include a "Yes" button 43B1, which is operated when alignment marks are present on the object W being inspected, and a "No" button 43B2, which is operated when alignment marks are not present on the object W being inspected. Input data is generated when either of the alignment mark selection buttons 43B is operated. The input data acquisition unit 36 ​​acquires the input data generated when either of the alignment mark selection buttons 43B is operated.

[0056] Dimensional inspection refers to an inspection that measures the dimensions of at least a portion of the object W being inspected and determines whether the measured dimensions are within the tolerance range. If an object W being inspected has a designated inspection area, the dimensional inspection will determine whether the measured dimensions of that area are within the tolerance range.

[0057] Visual inspection refers to an inspection to determine the presence or absence of defects on a portion of the surface of the object W being inspected. If defects are found, the visual inspection also includes determining whether the measured dimensions of the defects are within acceptable limits. If an inspection area is defined on the surface of the object W, the presence or absence of defects within that area is measured during the visual inspection. Examples of defects include scratches, dents, and dirt present on the surface of the object W.

[0058] The user operates one of several inspection item selection buttons 43C according to the desired inspection item. In the example shown in Figure 8, the inspection item selection buttons 43C include a dimensional inspection selection button 43C1, which is operated when the user wishes to perform a dimensional inspection of the object to be inspected W, and a visual inspection selection button 43C2, which is operated when the user wishes to perform a visual inspection of the object to be inspected W. Input data is generated when at least one of the inspection item selection buttons 43C is operated. The input data acquisition unit 36 ​​acquires the input data generated when at least one of the inspection item selection buttons 43C is operated.

[0059] When creating new test data, the user can assign a file name to the test data. The new data creation screen 43 has an input area 43J where the file name of the test data can be entered. The user can operate the input device 20 to enter the file name of the test data into the input area 43J.

[0060] The input data generated by operating the material selection button 43A, the alignment mark selection button 43B, and the inspection item selection button 43C indicates the basic items necessary for creating new inspection data. The basic item data indicating the basic items is stored in the storage unit 38 along with the file name.

[0061] The user operates the material selection button 43A, the alignment mark selection button 43B, and the inspection item selection button 43C, and then operates the imaging button 43D. Input data is generated when the imaging button 43D is operated. The input data acquisition unit 36 ​​acquires the input data generated when the imaging button 43D is operated. The operation command unit 31 starts imaging the inspection target W with the imaging device 6 based on the input data generated when the imaging button 43D is operated. The imaging device 6 starts imaging the inspection target W placed on the table 2.

[0062] Figure 8 shows the alignment mark setting screen 44 according to the embodiment. When the imaging button 43D is operated on the new data creation screen 43, the display control unit 35 transitions the display screen 40 displayed on the display device 19 from the new data creation screen 43 to the alignment mark setting screen 44 based on the input data generated by the operation of the imaging button 43D.

[0063] The alignment mark setting screen 44 is a display screen 40 for setting alignment mark conditions related to alignment marks used for positioning the object to be inspected W. Setting alignment mark conditions includes specifying candidates for alignment mark conditions. The candidate generation unit 34 generates candidates for alignment mark conditions. The display control unit 35 generates the alignment mark setting screen 44 as a display screen 40 for specifying candidates for alignment mark conditions and displays it on the display device 19. The user specifies candidates for alignment mark conditions by operating the input device 20 while checking the alignment mark setting screen 44.

[0064] In this embodiment, generating candidate alignment mark conditions includes generating candidate alignment marks to be used in inspection. Specifying candidate alignment mark conditions includes specifying candidate alignment marks to be used in inspection. The candidate generation unit 34 generates candidate alignment marks that can be used in inspection. The display control unit 35 causes the display device 19 to display an alignment mark setting screen 44, which includes candidate alignment marks that can be used in inspection.

[0065] When the imaging device 6 starts imaging the object to be inspected W, the image processing unit 33 extracts characteristic parts of the object to be inspected W from the image data of the object to be inspected W. The candidate generation unit 34 generates candidate alignment marks that can be used in the inspection based on the characteristic parts of the object to be inspected W. The display control unit 35 displays the alignment mark setting screen 44, which includes the candidate alignment marks generated based on the characteristic parts of the object to be inspected W, on the display device 19.

[0066] As shown in Figure 8, the alignment mark setting screen 44 includes a display area 441 and a navigation area 442. The navigation area 442 is displayed to the left of the display area 441.

[0067] The display area 441 displays image data 44A showing at least a portion of the image of the inspection target W captured by the imaging device 6, text data 44B prompting the user to set alignment mark conditions, and text data 44J indicating the file name.

[0068] In the example shown in Figure 8, the image processing unit 33 extracts multiple holes H provided in the object to be inspected W as characteristic parts of the object to be inspected W. The candidate generation unit 34 determines the holes H that can be used as alignment marks in the inspection based on the holes H of the object to be inspected W. The display control unit 35 displays the image data 44A, which includes the holes H that are candidates for alignment marks, on the alignment mark setting screen 44.

[0069] The user operates the input device 20 while checking the alignment mark setting screen 44 to specify a candidate hole H to be used as an alignment mark in the inspection from among multiple hole H. If the input device 20 includes a touch panel provided on the display device 19, the user specifies a hole H to be used as an alignment mark from among multiple hole H by tracing the alignment mark setting screen 44 with their finger. In the example shown in Figure 8, when, for example, hole Hm is specified by the user from among the multiple hole H, the display control unit 35 displays a symbol 44C on the alignment mark setting screen 44 indicating that hole Hm has been specified. In the example shown in Figure 8, the symbol 44C includes a circular image surrounding hole Hm.

[0070] The user specifies hole Hm as the alignment mark and then operates the save button 44E. The save button 44E is an example of an input device 20. When the save button 44E is operated, input data is generated. The input data acquisition unit 36 ​​acquires the input data generated when the save button 44E is operated. Based on the input data generated when the save button 44E is operated, the input data acquisition unit 36 ​​recognizes that hole Hm has been designated as the alignment mark. The hole Hm designated as the alignment mark is registered in the storage unit 38.

[0071] The candidate generation unit 34 may also specify a hole H to be used as an alignment mark from among a plurality of hole H.

[0072] Navigation area 442 displays inspection conditions that can be set through interactive processing. In this embodiment, the inspection conditions that can be set through interactive processing include alignment mark conditions, dimensional inspection conditions, and visual inspection conditions. Navigation area 442 displays an alignment mark symbol 44X indicating that the inspection condition that can be set through interactive processing is an alignment mark condition, a dimensional inspection symbol 44Y indicating that the inspection condition that can be set through interactive processing is a dimensional inspection condition, and a visual inspection symbol 44Z indicating that the inspection condition that can be set through interactive processing is a visual inspection condition. Each of the alignment mark symbol 44X, the dimensional inspection symbol 44Y, and the visual inspection symbol 44Z is an example of an input device 20. Alignment mark setting screen 44 is a display screen 40 for setting alignment mark conditions through interactive processing. Therefore, on the alignment mark setting screen 44, the alignment mark symbol 44X is highlighted.

[0073] Figure 9 shows the existing data editing screen 45 according to the embodiment. When both the set completion button 42B and the open button 42C are operated simultaneously on the guidance screen 42, the display control unit 35 transitions the display screen 40 displayed on the display device 19 from the guidance screen 42 to the existing data editing screen 45 based on the input data generated by the simultaneous operation of both the set completion button 42B and the open button 42C.

[0074] The existing data editing screen 45 is a display screen 40 for modifying at least a portion of the already created inspection data. As shown in Figure 9, the existing data editing screen 45 includes a display area 451, a navigation area 452, and an operation area 453. The navigation area 452 is displayed to the left of the display area 451. The operation area 453 is displayed to the right of the display area 451.

[0075] The display area 451 displays image data 45A showing at least a portion of the image of the inspection target W captured by the imaging device 6, text data 45B prompting the user to change the tolerance values ​​related to the inspection conditions, and text data 45J showing the file name of the existing inspection data.

[0076] When inspection data specifies inspection plans for dimensional inspection and visual inspection, the operation area 453 displays a dimensional inspection tolerance input area 45C for changing tolerances related to dimensional inspection conditions and a visual inspection tolerance input area 45D for changing tolerances related to visual inspection conditions. Each of the dimensional inspection tolerance input area 45C and the visual inspection tolerance input area 45D is an example of an input device 20.

[0077] In dimensional inspection, tolerance values ​​are set for the dimensions of the inspection target area W. The tolerance values ​​include a lower limit and an upper limit. If the measured value when inspecting the dimensions of the inspection target area is greater than or equal to the lower limit and less than or equal to the upper limit, the inspection result of the dimensional inspection is good (OK). If the measured value is less than the lower limit or greater than the upper limit, the inspection result of the dimensional inspection is bad (NG). The user can change the tolerance values ​​to any value. The user can change the tolerance values ​​for the dimensions of the inspection target area by entering any value in the dimensional inspection tolerance value input area 45C. In the example shown in Figure 9, the user can change the lower limit and upper limit for the dimensions of inspection target area A, the lower limit and upper limit for the dimensions of inspection target area B, and the lower limit and upper limit for the dimensions of inspection target area C.

[0078] In visual inspection, tolerance values ​​are set for the dimensions of defects present in the inspection area defined on the surface of the object W being inspected. In the example shown in Figure 9, the defects are scratches or dents. The tolerance values ​​include a lower limit and an upper limit. If the measured value when inspecting the dimensions of the defect is greater than or equal to the lower limit and less than or equal to the upper limit, the visual inspection result is good (OK). If the measured value is less than the lower limit or greater than the upper limit, the visual inspection result is bad (NG). The user can change the tolerance values ​​to any value. The user can change the tolerance values ​​for the dimensions of the defect by entering any value in the visual inspection tolerance value input area 45D. In the example shown in Figure 9, the user can change the lower and upper limits for the length of the defect, the lower and upper limits for the width of the defect, and the lower and upper limits for the depth of the defect.

[0079] The user changes at least one of the tolerance values ​​for dimensional inspection and the tolerance value for visual inspection, and then operates the save button 45E. The save button 45E is an example of an input device 20. When the save button 45E is operated, input data is generated. The input data acquisition unit 36 ​​acquires the input data generated when the save button 45E is operated. The input data acquisition unit 36 ​​updates the inspection data based on the input data generated when the save button 45E is operated. The inspection data with at least one of the tolerance values ​​for dimensional inspection and the tolerance value for visual inspection changed is registered in the storage unit 38.

[0080] Navigation area 452 displays an alignment mark symbol 45X indicating that the inspection condition that can be set via interactive processing is an alignment mark condition, a dimension inspection symbol 45Y indicating that the inspection condition that can be set via interactive processing is a dimension inspection condition, and an appearance inspection symbol 44Z indicating that the inspection condition that can be set via interactive processing is an appearance inspection condition. The alignment mark symbol 45X, the dimension inspection symbol 45Y, and the appearance inspection symbol 45Z are each examples of the input device 20.

[0081] When the alignment mark symbol 45X is operated, the display control unit 35 transitions the display screen 40 shown on the display device 19 from the existing data editing screen 45 to the alignment mark setting screen 44, as described with reference to Figure 8, based on the input data generated by the operation of the alignment mark symbol 45X. When the dimension inspection symbol 45Y is operated, the display control unit 35 transitions the display screen 40 shown on the display device 19 from the existing data editing screen 45 to the dimension inspection editing screen 46, which will be described later, based on the input data generated by the operation of the dimension inspection symbol 45Y. When the appearance inspection symbol 45Z is operated, the display control unit 35 transitions the display screen 40 shown on the display device 19 from the existing data editing screen 45 to the appearance inspection editing screen 47, which will be described later, based on the input data generated by the operation of the appearance inspection symbol 45Z.

[0082] Figure 10 shows the dimension inspection editing screen 46 according to the embodiment. When the dimension inspection symbol 44Y is operated in the alignment mark setting screen 44, the display control unit 35 transitions the display screen 40 displayed on the display device 19 from the alignment mark setting screen 44 to the dimension inspection editing screen 46 based on the input data generated by the operation of the dimension inspection symbol 44Y. The display control unit 35 can also transition the display screen 40 displayed on the display device 19 from the existing data editing screen 45 to the dimension inspection editing screen 46 when the dimension inspection symbol 45Y is operated in the existing data editing screen 45. The display control unit 35 can also transition the display screen 40 displayed on the display device 19 from the appearance inspection editing screen 47 to the dimension inspection editing screen 46 when the dimension inspection symbol 47Y is operated in the appearance inspection editing screen 47, which will be described later.

[0083] The dimensional inspection editing screen 46 is a display screen 40 for setting dimensional inspection conditions, which are inspection conditions when inspecting at least some of the dimensions of the object to be inspected W. Setting dimensional inspection conditions includes specifying candidates for dimensional inspection conditions. The candidate generation unit 34 generates candidates for dimensional inspection conditions. The display control unit 35 generates the dimensional inspection editing screen 46 as a display screen 40 for specifying candidates for dimensional inspection conditions and displays it on the display device 19. The user specifies candidates for dimensional inspection conditions by operating the input device 20 while checking the dimensional inspection editing screen 46.

[0084] In this embodiment, generating candidate dimensional inspection conditions includes generating candidate parts to be inspected for dimensions. Specifying candidate dimensional inspection conditions includes specifying candidate parts to be inspected for dimensions. The candidate generation unit 34 generates candidate parts to be inspected for dimensions. The display control unit 35 causes the display device 19 to display a dimensional inspection editing screen 46 including the candidate parts to be inspected for dimensions.

[0085] The image processing unit 33 extracts characteristic parts of the inspection target W from the image data of the inspection target W captured by the imaging device 6. The candidate generation unit 34 generates candidate parts for dimensional inspection based on the characteristic parts of the inspection target W. The display control unit 35 displays the dimensional inspection editing screen 46, which includes the candidate parts for dimensional inspection generated based on the characteristic parts of the inspection target W, on the display device 19.

[0086] As shown in Figure 10, the dimension inspection editing screen 46 includes a display area 461, a navigation area 462, and an operation area 463. The navigation area 462 is displayed to the left of the display area 461. The operation area 463 is displayed to the right of the display area 461.

[0087] The display area 461 displays image data 46A showing at least a portion of the inspection target W captured by the imaging device 6, text data 46B prompting the user to set tolerance values ​​related to dimensional inspection conditions, and text data 46J indicating the file name.

[0088] In the example shown in Figure 10, the image processing unit 33 extracts multiple holes H provided in the object to be inspected W as characteristic parts of the object to be inspected W. The candidate generation unit 34 generates candidate parts to be inspected for dimensions based on the holes H of the object to be inspected W. The display control unit 35 displays the image data 46A, which includes the candidate parts to be inspected for dimensions, on the dimension inspection editing screen 46.

[0089] In this embodiment, the storage unit 38 stores correlation data showing the relationship between the inspection target W and the inspection conditions of the inspection device 1 suitable for the inspection target W. The storage unit 38 pre-stores first correlation data as correlation data, which shows the relationship between a plurality of holes H and the inspection target area suitable for the plurality of holes H. The candidate generation unit 34 generates candidate inspection target areas based on the holes H of the inspection target W extracted by the image processing unit 33 and the first correlation data stored in the storage unit 38.

[0090] In the example shown in Figure 10, the hole H extracted as a characteristic part of the object to be inspected W includes hole Ha, hole Hb, hole Hc, and hole Hd. The candidate generation unit 34 generates candidate inspection areas based on the multiple hole H(Ha, Hb, Hc, Hd). In the example shown in Figure 10, the candidate generation unit 34 designates the area between the left end of hole Ha and the right end of hole Hb as inspection area A. The candidate generation unit 34 designates the area between the upper end of hole Ha and the lower end of hole Hb as inspection area B. The candidate generation unit 34 designates the area between the center of hole Hc and the center of hole Hd as inspection area C. The candidate generation unit 34 also calculates the dimensions of inspection area A, inspection area B, and inspection area C.

[0091] The display control unit 35 displays dimension data 46F, which indicates the dimensions of the part to be inspected, on the dimension inspection editing screen 46. The display control unit 35 displays the dimension data 46F so as to be superimposed on the image data 46A. The dimension data 46F includes an arrow image indicating the part to be inspected and numerical data of the dimensions. The dimension data 46F includes dimension data 46Fa for part A to be inspected, dimension data 46Fb for part B to be inspected, and dimension data 46Fc for part C to be inspected.

[0092] The user operates the input device 20 while checking the dimension inspection editing screen 46 to specify candidates for the parts to be inspected for dimensions. If the user checks the dimension inspection editing screen 46 and wants to specify all three inspection target parts (A, B, C) as inspection target parts in the dimension inspection, the user operates the input device 20 so that all three inspection target parts (A, B, C) are specified. If the user wants to exclude, for example, inspection target part C from the inspection target parts in the dimension inspection, the user operates the input device 20 so that two inspection target parts (A, B) are specified and inspection target part C is deleted. If the user wants to add an inspection target part other than the three inspection target parts (A, B, C) to the inspection target parts in the dimension inspection, the user operates the input device 20 so that the other inspection target part is added.

[0093] After a candidate for the part to be inspected for dimensions is specified, the operation area 463 displays a dimension inspection tolerance input area 46C for inputting tolerance values ​​for the dimensions of the part to be inspected of the inspection target W, and a lighting button 46H which is operated when setting the lighting conditions when the lighting device 7 illuminates the inspection target W. The dimension inspection tolerance input area 46C and the lighting button 46H are examples of input devices 20.

[0094] The tolerance values ​​for the dimensions of the inspected parts include a lower limit and an upper limit. If the measured value when inspecting the dimensions of the inspected parts is greater than or equal to the lower limit and less than or equal to the upper limit, the inspection result of the dimension inspection is good (OK). If the measured value is less than the lower limit or greater than the upper limit, the inspection result of the dimension inspection is bad (NG). The user can set the tolerance values ​​to any value. The user can set the tolerance values ​​for dimensions by entering any value in the dimension inspection tolerance value input area 46C. As shown in Figure 10, if all three inspected parts (A, B, C) are specified, the user can enter the lower limit and upper limit values ​​for the dimensions of inspected part A, inspected part B, and inspected part C.

[0095] Furthermore, after the inspection target area is specified, the candidate generation unit 34 may calculate the dimensions of the inspection target area and, in accordance with the dimensions of the inspection target area, calculate a default value for the tolerance. The display control unit 35 may display the default value for the tolerance calculated by the candidate generation unit 34 in the dimensional inspection tolerance input area 46C. The user may change the default value for the tolerance displayed in the dimensional inspection tolerance input area 46C by operating the input device 20.

[0096] The user can set the lighting conditions for when the lighting device 7 illuminates the object W under inspection by operating the lighting button 46H. As described above, there are four patterns of lighting conditions for the lighting device 7. The user can select any lighting condition from the four patterns by operating the lighting button 46H. Depending on the lighting conditions, the imaging state of the object W under inspection by the imaging device 6 (how the image of the object W appears) changes, and as a result, the shape or size of the feature portion extracted by the image processing unit 33 changes, which may change the dimensions of the object under inspection calculated by the candidate generation unit 34. The user can operate the lighting button 46H to achieve the optimal lighting conditions.

[0097] The candidate generation unit 34 may generate candidate optimal lighting conditions for dimensional inspection according to the material of the object to be inspected W. The storage unit 38 may pre-store second correlation data as correlation data, which shows the relationship between the material of the object to be inspected W and lighting conditions suitable for the material of the object to be inspected W. The candidate generation unit 34 may generate candidate optimal lighting conditions for dimensional inspection based on the material of the object to be inspected W selected by operating the material selection button 43A and the second correlation data stored in the storage unit 38. The candidate generation unit 34 may set optimal lighting conditions for dimensional inspection according to the material of the object to be inspected W.

[0098] The user specifies the area to be inspected for dimensions, sets tolerances, sets lighting conditions, and then operates the save button 46E. The save button 46E is an example of an input device 20. When the save button 46E is operated, input data is generated. The input data acquisition unit 36 ​​acquires the input data generated when the save button 46E is operated. Based on the input data generated when the save button 46E is operated, the input data acquisition unit 36 ​​recognizes the area to be inspected for the specified dimensions, tolerances, and lighting conditions for the dimensional inspection. The area to be inspected for the specified dimensions, tolerances, and lighting conditions for the dimensional inspection are registered in the storage unit 38.

[0099] Navigation area 462 displays an alignment mark symbol 46X indicating that the inspection condition that can be set interactively is an alignment mark condition, a dimension inspection symbol 46Y indicating that the inspection condition that can be set interactively is a dimension inspection condition, and an appearance inspection symbol 46Z indicating that the inspection condition that can be set interactively is an appearance inspection condition. The alignment mark symbol 46X, the dimension inspection symbol 46Y, and the appearance inspection symbol 46Z are each examples of the input device 20. The dimension inspection editing screen 46 is a display screen 40 for setting dimension inspection conditions through interactive processing. Therefore, the dimension inspection symbol 46Y is highlighted on the dimension inspection editing screen 46.

[0100] Figure 11 shows the visual inspection editing screen 47 according to the embodiment. When the visual inspection symbol 44Z is operated on the alignment mark setting screen 44, the display control unit 35 transitions the display screen 40 displayed on the display device 19 from the alignment mark setting screen 44 to the visual inspection editing screen 47 based on the input data generated by the operation of the visual inspection symbol 44Z. The display control unit 35 can also transition the display screen 40 displayed on the display device 19 from the existing data editing screen 45 to the visual inspection editing screen 47 when the visual inspection symbol 45Z is operated on the existing data editing screen 45. The display control unit 35 can also transition the display screen 40 displayed on the display device 19 from the dimension inspection editing screen 46 to the visual inspection editing screen 47 when the visual inspection symbol 46Z is operated on the dimension inspection editing screen 46.

[0101] The appearance inspection editing screen 47 is a display screen 40 for setting appearance inspection conditions, which are inspection conditions when inspecting the appearance of at least a part of the inspection target W. Setting appearance inspection conditions includes specifying candidates for appearance inspection conditions. The candidate generation unit 34 generates candidates for appearance inspection conditions. The display control unit 35 generates the appearance inspection editing screen 47 as a display screen 40 for specifying candidates for appearance inspection conditions and displays it on the display device 19. The user specifies candidates for appearance inspection conditions by operating the input device 20 while checking the appearance inspection editing screen 47.

[0102] In this embodiment, generating candidate visual inspection conditions includes generating candidate areas for visual inspection. Specifying candidate visual inspection conditions includes specifying candidate areas for visual inspection. The candidate generation unit 34 generates candidate areas for visual inspection. The display control unit 35 displays a visual inspection editing screen 47, including the candidate areas for visual inspection, on the display device 19.

[0103] The image processing unit 33 extracts characteristic parts of the inspection target W from the image data of the inspection target W captured by the imaging device 6. The candidate generation unit 34 generates candidate areas for inspection of the appearance based on the characteristic parts of the inspection target W. The display control unit 35 displays the appearance inspection editing screen 47, which includes the candidate areas for inspection of the appearance generated based on the characteristic parts of the inspection target W, on the display device 19.

[0104] As shown in Figure 11, the visual inspection editing screen 47 includes a display area 471, a navigation area 472, and an operation area 473. The navigation area 472 is displayed to the left of the display area 471. The operation area 473 is displayed to the right of the display area 471.

[0105] The display area 471 displays image data 47A showing at least a portion of the inspection target W captured by the imaging device 6, text data 47B prompting the user to set tolerance values ​​related to the visual inspection conditions, and text data 47J indicating the file name.

[0106] In the example shown in Figure 11, the image processing unit 33 extracts holes H provided on the object to be inspected W as a characteristic part of the object to be inspected W. The image processing unit 33 may also extract protrusions provided on the object to be inspected W as a characteristic part of the object to be inspected W. The candidate generation unit 34 generates candidate inspection areas for the appearance based on the characteristic parts of the object to be inspected W. The display control unit 35 displays the image data 47A, which includes the candidate inspection areas, on the appearance inspection editing screen 47.

[0107] In the example shown in Figure 11, the display control unit 35 displays the appearance inspection target area 47F, which includes multiple holes H, from among the multiple inspection target areas generated by the candidate generation unit 34, on the appearance inspection editing screen 47.

[0108] The user operates the input device 20 while checking the visual inspection editing screen 47 to specify a candidate area for visual inspection. If the user checks the visual inspection editing screen 47 and wants to specify, for example, inspection area 47F from among the multiple inspection areas generated by the candidate generation unit 34 as the inspection area for visual inspection, the user operates the input device 20 so that inspection area 47F is selected.

[0109] After the inspection area 47F is specified, the image processing unit 33 extracts the defect portion D present in the inspection area 47F as a characteristic part of the inspection target W. Examples of defect portion D include scratches, dents, and dirt present on the surface of the inspection target W. The candidate generation unit 34 identifies the location where the defect portion D exists in the inspection area 47F. The display control unit 35 displays a symbol 47C for identifying the defect portion D on the appearance inspection editing screen 47. The symbol 47C is displayed on the appearance inspection editing screen 47 in a manner that emphasizes the defect portion D. In this embodiment, the symbol 47C includes a rectangular graphic image surrounding the defect portion D.

[0110] After a candidate area for visual inspection is specified, the operation area 473 displays a visual inspection tolerance input area 47D for inputting tolerance values ​​for the dimensions of defects D present on the surface of the inspection area 47F, and a lighting button 47H which is operated when setting the lighting conditions for when the lighting device 7 illuminates the inspection target W. The visual inspection tolerance input area 47D and the lighting button 47H are examples of input devices 20.

[0111] The tolerance for the dimensions of defect D includes a lower limit and an upper limit. If the measured value when inspecting the dimensions of defect D is greater than or equal to the lower limit and less than or equal to the upper limit, the visual inspection result is good (OK). If the measured value is less than the lower limit or greater than the upper limit, the visual inspection result is bad (NG). The user can set the tolerance to any value. The user can set the tolerance by entering any value in the visual inspection tolerance input area 47D. As shown in Figure 11, the user can input the lower and upper limits for the length of the scratch or dent that is defect D, the lower and upper limits for the width of the scratch or dent, and the lower and upper limits for the depth of the scratch or dent.

[0112] Furthermore, after the inspection target area is specified, the candidate generation unit 34 may calculate the dimensions of the defective part D and, in accordance with the dimensions of the defective part D, calculate a default value for the tolerance. The display control unit 35 may display the default value for the tolerance calculated by the candidate generation unit 34 in the visual inspection tolerance input area 47D. The user may change the default value for the tolerance displayed in the visual inspection tolerance input area 47D by operating the input device 20.

[0113] The user can change the lighting conditions when the lighting device 7 illuminates the object W for inspection by operating the lighting button 47H. As described above, there are four patterns of lighting conditions for the lighting device 7. The user can select any lighting condition from the four patterns by operating the lighting button 47H. Depending on the lighting conditions, the imaging state of the object W for inspection by the imaging device 6 (how the image of the object W for inspection appears) changes, and as a result, the shape or size of the defect D extracted by the image processing unit 33 changes, and the dimensions of the defect D calculated by the candidate generation unit 34 may change. The user can operate the lighting button 47H to obtain the optimal lighting conditions.

[0114] The candidate generation unit 34 may generate candidate optimal lighting conditions for visual inspection according to the material of the object to be inspected W. The storage unit 38 may pre-store third correlation data as correlation data, which shows the relationship between the material of the object to be inspected W and lighting conditions suitable for the material of the object to be inspected W. The candidate generation unit 34 may generate candidate optimal lighting conditions for visual inspection based on the material of the object to be inspected W selected by operating the material selection button 43A and the third correlation data stored in the storage unit 38. The candidate generation unit 34 may set optimal lighting conditions for visual inspection according to the material of the object to be inspected W.

[0115] When extracting a defect D, the image data of the object to be inspected W may be binarized, and then the defect D may be clarified using the illuminance difference stereo method. The candidate generation unit 34 may generate candidate optimal binarization processing conditions for visual inspection, according to the material of the object to be inspected W. The storage unit 38 may pre-store fourth correlation data as correlation data, which shows the relationship between the material of the object to be inspected W and binarization processing conditions suitable for the material of the object to be inspected W. The candidate generation unit 34 may generate candidate optimal binarization processing conditions for visual inspection based on the material of the object to be inspected W selected by operating the material selection button 43A and the fourth correlation data stored in the storage unit 38. The candidate generation unit 34 may set optimal binarization processing conditions for visual inspection according to the material of the object to be inspected W.

[0116] In addition, a histogram 47K of the visual inspection results is displayed in the operation area 473. The histogram 47K is image data that displays the distribution of measured values ​​for judgment items (length, width, depth) across the entire inspection target W, for example, with the vertical axis representing the number of items (number of steps) and the horizontal axis representing the range of measured values.

[0117] The user specifies the area to be inspected for appearance, sets tolerance values, sets lighting conditions, and then operates the save button 47E. The save button 47E is an example of an input device 20. When the save button 47E is operated, input data is generated. The input data acquisition unit 36 ​​acquires the input data generated when the save button 47E is operated. Based on the input data generated when the save button 47E is operated, the input data acquisition unit 36 ​​recognizes the specified area to be inspected for appearance, tolerance values, and lighting conditions for the appearance inspection. The specified area to be inspected for appearance, tolerance values, and lighting conditions for the appearance inspection are registered in the storage unit 38.

[0118] Navigation area 472 displays an alignment mark symbol 47X indicating that the inspection condition that can be set interactively is an alignment mark condition, a dimension inspection symbol 47Y indicating that the inspection condition that can be set interactively is a dimension inspection condition, and an appearance inspection symbol 47Z indicating that the inspection condition that can be set interactively is an appearance inspection condition. The alignment mark symbol 47X, the dimension inspection symbol 47Y, and the appearance inspection symbol 47Z are each examples of the input device 20. The appearance inspection editing screen 47 is a display screen 40 for setting appearance inspection conditions through interactive processing. Therefore, the appearance inspection symbol 47Z is highlighted on the appearance inspection editing screen 47.

[0119] The inspection data creation unit 37 generates inspection data based on the hole Hm registered as an alignment mark in the storage unit 38 through interactive processing in the alignment mark setting screen 44, the inspection target area, tolerance value, and lighting conditions for dimensional inspection registered in the storage unit 38 through interactive processing in the dimension inspection editing screen 46, and the inspection target area, tolerance value, and lighting conditions for visual inspection registered in the storage unit 38 through interactive processing in the visual inspection editing screen 47.

[0120] [Information Processing Methods] Figure 12 is a flowchart showing the information processing method according to the embodiment. The main menu screen 41 is displayed on the display device 19, and when the ultra-easy editing mode button 41B is operated, the guidance screen 42 is displayed on the display device 19. After the inspection target W is placed on the table 2, the set completion button 42B is operated, and the new data creation screen 43 is displayed on the display device 19.

[0121] On the new data creation screen 43, when the material selection button 43A is operated, the input data acquisition unit 36 ​​acquires input data for selecting the material of the inspection target W (step S1). When the alignment mark selection button 43B is operated, the input data acquisition unit 36 ​​acquires input data for selecting whether or not alignment marks are present on the inspection target W (step S2). When the inspection item selection button 43C is operated, the input data acquisition unit 36 ​​acquires input data for selecting the inspection items of the inspection target W (step S3).

[0122] When the imaging button 43D is operated on the new data creation screen 43, the alignment mark setting screen 44 for specifying alignment mark candidates is displayed on the display device 19 (step S4). The user operates the input device 20 to specify alignment mark condition candidates while checking the alignment mark setting screen 44. The input data acquisition unit 36 ​​acquires input data for specifying alignment mark condition candidates (step S5).

[0123] After candidates for alignment mark conditions are specified, when the save button 44E is operated on the alignment mark setting screen 44, the dimension inspection editing screen 46 for specifying candidates for dimension inspection conditions is displayed on the display device 19 (step S6). The user operates the input device 20 to specify candidates for dimension inspection conditions while checking the dimension inspection editing screen 46. The input data acquisition unit 36 ​​acquires input data for specifying candidates for dimension inspection conditions (step S7).

[0124] After candidates for dimensional inspection conditions are specified, when the save button 46E is operated on the dimensional inspection editing screen 46, the appearance inspection editing screen 47 for specifying candidates for appearance inspection conditions is displayed on the display device 19 (step S8). The user operates the input device 20 to specify candidates for appearance inspection conditions while checking the appearance inspection editing screen 47. The input data acquisition unit 36 ​​acquires input data for specifying candidates for appearance inspection conditions (step S9).

[0125] The inspection data creation unit 37 creates inspection data that defines the inspection plan for the inspection device 1 based on the candidate alignment mark conditions specified in step S5, the candidate dimensional inspection conditions specified in step S7, and the candidate visual inspection conditions specified in step S9 (step S10).

[0126] [effect] As described above, in this embodiment, the information processing device 18 includes an image data acquisition unit 32 that acquires image data of the inspection target W captured by the imaging device 6 of the inspection device 1, a candidate generation unit 34 that generates candidate inspection conditions for the inspection device 1 based on the image data, a display control unit 35 that generates a display screen 40 for specifying candidate inspection conditions and displays it on the display device 19, an input data acquisition unit 36 ​​that acquires input data that specifies candidate inspection conditions generated by the operation of the input device 20, and an inspection data creation unit 37 that creates inspection data that defines the inspection plan for the inspection device 1 based on the input data.

[0127] According to this embodiment, candidate inspection conditions are automatically generated in the candidate generation unit 34, and a display screen 40 for specifying the candidate inspection conditions is displayed on the display device 19. The user can specify the candidate inspection conditions displayed on the display screen 40 by operating the input device 20. Once the user has specified the candidate inspection conditions, the inspection data creation unit 37 automatically creates the inspection data. This makes it easy to create inspection data. The user can create inspection data without requiring any special skills.

[0128] In this embodiment, the information processing device 18 includes a display control unit 35 that sequentially displays on the display device 19 a first display screen (e.g., a dimensional inspection editing screen 46) for specifying candidates for first inspection conditions of the inspection device 1 and a second display screen (e.g., a visual inspection editing screen 47) for specifying candidates for second inspection conditions; an input data acquisition unit 36 ​​that acquires first input data specifying candidates for first inspection conditions and second input data specifying candidates for second inspection conditions generated by the operation of the input device 20; and an inspection data creation unit 37 that creates inspection data defining the inspection plan of the inspection device 1 based on the first input data and the second input data.

[0129] According to this embodiment, inspection data is easily created through interactive processing involving transitions between display screens 40. Users can create inspection data without requiring any special skills.

[0130] [Other embodiments] In the above-described embodiment, as explained with reference to Figure 8, the navigation area 442 is positioned to the left of the display area 451. In the alignment mark setting screen 44, the relative positions of the display area 441 and the navigation area 442 are arbitrary. For example, the navigation area 442 may be positioned to the right of the display area 451. Similarly, in the existing data editing screen 45, the relative positions of the display area 451, the navigation area 452, and the operation area 453 are arbitrary. For example, the navigation area 452 may be positioned to the right of the display area 451, and the operation area 453 may be positioned to the left of the display area 451. The same applies to the dimension inspection editing screen 46 and the appearance inspection editing screen 47, where the relative positions of the display areas 461, 471, the navigation areas 462, 472, and the operation areas 463, 473 can be arbitrarily changed. The information processing device 18 can arbitrarily change the relative positions of the display area, the navigation area, and the operation area according to the user's operability. The information processing device 18 can arbitrarily change the relative positions of the display area, navigation area, and operation area, for example, according to the user's dominant hand. [Explanation of Symbols]

[0131] 1...Inspection device, 2...Table, 3...Head unit, 4...Controller, 5...Table actuator, 6...Imaging device, 7...Illumination device, 8...Imaging optical system, 9...Image sensor, 10...Body, 11...Coaxial illumination unit, 12...Side-angle illumination unit, 13...Light source, 14...Half mirror, 15...Light source, 15A...First light source, 15B...Second light source, 15C...Third light source, 16...Support member, 17...Head actuator, 18...Information processing device, 19...Display device, 20...Input device, 21...Processor, 22...Main memory, 23...Storage, 24...Input / output interface 25...Communication interface, 26...Computer program, 31...Operation command unit, 32...Image data acquisition unit, 33...Image processing unit, 34...Candidate generation unit, 35...Display control unit, 36...Input data acquisition unit, 37...Inspection data creation unit, 38...Storage unit, 40...Display screen, 41...Main menu screen, 41A...Complex editing mode button, 41B...Super easy editing mode button, 42...Guidance screen, 42A...Guidance image, 42B...Set complete button, 42C...Open button, 43...New data creation screen, 43A...Material selection button, 43A1...SUS button, 4 3A2...Iron button, 43A3...Copper button, 43A4...Other button, 43B...Alignment mark selection button, 43B1...Yes button, 43B2...No button, 43C...Inspection item selection button, 43C1...Dimensional inspection selection button, 43C2...Visual inspection selection button, 43D...Imaging button, 43J...Input area, 44...Alignment mark setting screen, 44A...Image data, 44B...Text data, 44C...Symbol, 44E...Save button, 44J...Text data, 44X...Alignment mark symbol, 44Y...Dimensional inspection symbol, 44Z...Visual inspection symbol, 45...Existing data editing screen, 45A...Image data, 45B...Text data, 45C...Dimensional inspection tolerance input area, 45D...Visual inspection tolerance input area, 45E...Save button, 45J...Text data, 45X...Alignment mark symbol, 45Y...Dimensional inspection symbol, 45Z...Visual inspection symbol, 46...Dimensional inspection editing screen, 46A...Image data, 46B...Text data, 46C...Dimensional inspection tolerance input area, 46E...Save button, 46F...Dimensional data, 46Fa...Dimensional data, 46Fb...Dimensional data, 46Fc...Dimensional data, 46H...Lighting button,46J…Text data, 46X…Alignment mark symbol, 46Y…Dimensional inspection symbol, 46Z…Visual inspection symbol, 47…Visual inspection editing screen, 47A…Image data, 47B…Text data, 47C…Symbol, 47D…Visual inspection tolerance input area, 47E…Save button, 47F…Inspection target area, 47H…Lighting button, 47J…Text data, 47K…Histogram, 47X…Alignment mark symbol, 47Y…Dimensional inspection symbol VOL, 47Z...Visual inspection symbol, 441...Display area, 442...Navigation area, 451...Display area, 452...Navigation area, 453...Operation area, 461...Display area, 462...Navigation area, 463...Operation area, 471...Display area, 472...Navigation area, 473...Operation area, AX...Optical axis, D...Defect area, H...Hole, Ha...Hole, Hb...Hole, Hc...Hole, Hd...Hole, Hm...Hole, W...Inspection target.

Claims

1. An image data acquisition unit that acquires image data of the object to be inspected captured by the imaging device of the inspection device, A candidate generation unit generates candidate inspection conditions for the inspection device based on the image data, A display control unit that generates a display screen for specifying the candidate inspection conditions and displays it on a display device, An input data acquisition unit acquires input data that specifies candidate inspection conditions generated by the operation of an input device, The system includes an inspection data creation unit that creates inspection data defining the inspection plan for the inspection device based on the input data. Information processing device.

2. The system includes an image processing unit that extracts characteristic portions of the object to be inspected from the aforementioned image data, The candidate generation unit generates candidate inspection conditions based on the characteristic portion. The information processing apparatus according to claim 1.

3. The system includes a storage unit that stores correlation data showing the relationship between the object to be inspected and the inspection conditions of the inspection device. The candidate generation unit generates candidate inspection conditions based on the correlation data. The information processing apparatus according to claim 1.

4. The candidate for the inspection condition includes a candidate for the first inspection condition and a candidate for the second inspection condition. The display control unit generates a first display screen for specifying candidates for the first inspection condition and a second display screen for specifying candidates for the second inspection condition. The input data acquisition unit acquires, as input data, first input data specifying a candidate for the first inspection condition and second input data specifying a candidate for the second inspection condition. The information processing apparatus according to claim 1.

5. The first inspection condition includes alignment mark conditions used for positioning the object to be inspected, The second inspection condition includes at least one of the dimensional inspection condition and the visual inspection condition of the object being inspected. The information processing apparatus according to claim 4.

6. The inspection conditions include the lighting conditions when the lighting device illuminates the object to be inspected. The information processing apparatus according to claim 1.

7. A display control unit that sequentially displays a first display screen for specifying a candidate first inspection condition of the inspection device and a second display screen for specifying a candidate second inspection condition on a display device, An input data acquisition unit that acquires first input data specifying a candidate for the first inspection condition generated by the operation of an input device, and second input data specifying a candidate for the second inspection condition. The system includes an inspection data creation unit that creates inspection data defining the inspection plan of the inspection device based on the first input data and the second input data, Information processing device.

8. The first inspection condition includes alignment mark conditions used for positioning the object to be inspected by the inspection device, The second inspection condition includes at least one of the dimensional inspection condition and the visual inspection condition of the object being inspected. The information processing apparatus according to claim 7.

9. Acquiring image data of the object to be inspected, captured by the imaging device of the inspection equipment, Based on the aforementioned image data, candidate inspection conditions for the inspection device are generated. To generate a display screen for specifying the candidate inspection conditions and display it on a display device, The process involves obtaining input data that specifies the candidate inspection conditions generated by the operation of the input device, This includes creating inspection data that defines the inspection plan for the inspection device based on the input data, Information processing methods.

10. The display device sequentially displays a first display screen for specifying candidates for the first inspection condition of the inspection device and a second display screen for specifying candidates for the second inspection condition. The process involves obtaining first input data specifying a candidate for the first inspection condition generated by operating the input device, and second input data specifying a candidate for the second inspection condition. This includes creating inspection data that defines the inspection plan for the inspection device based on the first input data and the second input data, Information processing methods.

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