Electrical inspection jig
The electrical inspection jig effectively addresses the challenge of miniaturization and short-circuit prevention in fine-pitch inspection objects by employing a first and second plate portion with through holes and a shared common hole to separate probes, ensuring accurate resistance measurements.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- SAMSUNG ELECTRO MECHANICS CO LTD
- Filing Date
- 2025-12-25
- Publication Date
- 2026-07-09
AI Technical Summary
Existing electrical inspection jigs face challenges in accurately measuring the resistance of fine-pitch inspection objects due to the risk of short-circuit failures between probes, necessitating miniaturization and gap minimization that can lead to contact resistance issues.
An electrical inspection jig design featuring a first and second plate portion with through holes and a common hole connected to both, allowing probes to be separated in the press state to prevent short circuits while accommodating fine-pitch pads.
The design effectively prevents short-circuit failures between probes, enabling accurate and reliable measurements by accommodating inspection objects with fine-pitch pads.
Smart Images
Figure 2026116250000001_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an electrical inspection jig.
Background Art
[0002] In order to accurately measure the resistance of the pattern of the inspection object, a technique for eliminating contact resistance is essential. For this purpose, a four-wire (4W) measurement method in which inspections are performed while two probes are each in contact with each pad and bump is common.
[0003] With the miniaturization of the pitch of the inspection object and the pads, in order to cope with this, in a 4W jig, designs such as probe miniaturization, micro-hole processing technology, and minimization of the separation distance between holes are required.
[0004] In particular, it is necessary to minimize the gap between the holes that accommodate the probes. However, when the holes have a gap below a certain level, short-circuit failures between the probes may occur, which may affect product inspection.
Summary of the Invention
Problems to be Solved by the Invention
[0005] One object of the present invention is to provide an electrical inspection jig that can cope with an inspection object having pads with a fine pitch.
Means for Solving the Problems
[0006] One embodiment of the present invention provides an electrical inspection jig including a first plate portion, a second plate portion disposed on one surface of the first plate portion, first and second through holes that penetrate the second plate portion and approach each other as they approach one surface of the first plate portion, a common hole that penetrates the first plate portion and is connected to the first and second through holes, and first and second probes disposed in the first through hole and the second through hole, respectively.
[0007] Another embodiment of the present invention provides an electrical inspection jig comprising a first plate portion, a second plate portion disposed on one surface of the first plate portion, first and second through holes penetrating the second plate portion, a common hole penetrating the first plate portion and connected to the first and second through holes, and a first probe and a second probe disposed in the first and second through holes, respectively, wherein the area of the common hole is smaller than the sum of the areas of the first and second through holes. [Effects of the Invention]
[0008] One effect of the present invention is to provide an electrical inspection jig that can accommodate inspection objects having fine pitch pads. [Brief explanation of the drawing]
[0009] [Figure 1] This figure shows an electrical inspection jig according to the present invention. [Figure 2] This figure schematically shows a cross-section of the electrical inspection jig according to the present invention. [Figure 3] This figure shows the first plate portion of the electrical inspection jig according to the present invention. [Figure 4] This figure shows the "away" state of the electrical inspection jig according to the present invention. [Figure 5] This figure shows the pressed state of the electrical inspection jig according to the present invention. [Modes for carrying out the invention]
[0010] The terminology used in this application is used solely to describe specific embodiments and is not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates a different meaning. In this application, terms such as “includes” or “having” are intended to specify the existence of features, figures, stages, actions, components, parts, or combinations thereof described in the specification, and should be understood not to preemptively exclude the possibility of the existence or addition of one or more other features, figures, stages, actions, components, parts, or combinations thereof. Throughout the specification, “above” means located above or below the part in question, and does not necessarily mean located above the direction of gravity.
[0011] The dimensions and thicknesses of each component shown in the drawings are arbitrary for illustrative purposes, and therefore the present invention is not necessarily limited to those shown.
[0012] The following is a detailed description of an electrical inspection jig according to an embodiment of the present invention, with reference to the attached drawings.
[0013] Figure 1 shows an electrical inspection jig according to the present invention, Figure 2 shows a schematic cross-section of the electrical inspection jig according to the present invention, Figure 3 shows the first plate portion of the electrical inspection jig according to the present invention, Figure 4 shows the away state of the electrical inspection jig according to the present invention, and Figure 5 shows the pressed state of the electrical inspection jig according to the present invention.
[0014] In Figure 2, for the sake of clarity, the labels for probes P1 and P2 have been omitted.
[0015] Referring to Figure 1, the electrical inspection jig 100 according to an embodiment of the present invention includes a first plate portion 10A, a second plate portion 10B, and a probe P.
[0016] An electrical inspection jig 100 according to an embodiment of the present invention has a structure in which a plurality of plates are stacked. Specifically, the electrical inspection jig 100 may consist of a first plate portion 10A and a second plate portion 10B disposed on the first plate portion.
[0017] The first plate portion 10A may include a single first plate layer 11. The first plate layer 11 may refer to the bottommost plate among a plurality of plates of the electrical inspection fixture. The first plate portion 10A may include one surface and another surface, with the one surface referring to the top surface with reference to Figure 2. The second plate portion 10B may be placed on one surface (top surface) of the first plate portion 10A, and the other surface (bottom surface) of the first plate portion 10A may not have a plate layer. The first plate layer 11 may be exposed to the outside of the electrical inspection fixture, and the first plate layer 11 may be in substantial contact with the object being inspected when pressed.
[0018] The second plate portion 10B may be located on one side (top surface) of the first plate portion 10A. The second plate portion 10B can include multiple second plate layers 12. Referring to Figure 2, two second plate layers 12 are shown, but this is merely illustrative, and the second plate layers 12 may be formed from three or more layers.
[0019] Referring to Figure 2, the electrical inspection jig 100 according to an embodiment of the present invention may have through-holes H1 and H2 penetrating the second plate portion 10B. The through-holes H1 and H2 can accommodate probes P1 and P2, which will be described later, and can be formed in a circular or elliptical shape. The first and second through-holes H1 and H2 may not be in contact with each other in the second plate portion 10B, forming separate holes. That is, the second plate portion 10B may have individual holes H1 and H2 formed so that probes P1 and P2 can be accommodated, respectively.
[0020] The first through-hole H1 can penetrate multiple second plate layers 12, and the second through-hole H2 can penetrate multiple second plate layers 12.
[0021] The first through hole H1 and the second through hole H2 can be closer to each other as they approach one surface of the first plate portion 10A. In the press state, the first through hole H1 and the second through hole H2 can be separated from each other as they go upward so that the probe can slide outward.
[0022] The inner wall of the first through hole H1 can have a step at the boundary surface of the plurality of second plate layers 12. Similarly, the inner wall of the second through hole H2 can have a step at the boundary surface of the plurality of second plate layers 12. Referring to FIG. 2, the inner walls of the first through hole H1 and the second through hole H2 can have steps so that they are closer to each other as they go toward the lower plate.
[0023] Referring to FIG. 4, the probe P is accommodated in the through holes H1 and H2 and can serve as an inspection terminal of the electrical inspection jig according to the present embodiment. Specifically, the first probe P1 and the second probe P2 can be respectively accommodated in the first through hole H1 and the second through hole H2. The electrical inspection jig according to the present embodiment may be a four-terminal electrical inspection jig. When the first probe P1 and the second probe P2 are pressed, they can contact one pad (or one bump) described later.
[0024] At least a part of the first probe P1 and the second probe P2 may be respectively arranged in the common hole S. Also, in the away state, the first probe P1 and the second probe P2 can contact each other under the first plate portion 10A. However, as shown in FIG. 5, in the press state, the first and second probes P1 and P2 can be separated, and there is a possibility that a short does not occur. That is, in the away state, a short may occur between the probes P1 and P2, but in the press state, a short does not occur, and there is a possibility that it does not affect the execution of the inspection during product inspection.
[0025] Referring to Figure 2, the electrical inspection jig 100 according to an embodiment of the present invention may have a common hole S that penetrates the first plate portion 10A. The common hole S penetrates the first plate portion 10A and can be connected to the first and second through holes H1 and H2. The through hole S can be formed in the first plate 11, which is the lowest layer plate. The first probe P1 and the second probe P2 are positioned in the first through hole H1 and the second through hole H2, respectively, but can share the common hole S with each other.
[0026] In a typical 4-terminal jig, two probes (four in total) are required to inspect one pad and one bump. Two probes are housed in their respective holes to inspect one pad (or one bump). As pad pitches become finer, it becomes necessary to minimize the gap between the holes housing the probes. However, if the gap between the holes is below a certain level, short circuits between the probes can occur, potentially affecting product inspection.
[0027] In contrast, the electrical inspection jig according to the embodiment of the present invention can form a common hole S in the bottommost plate, the first plate 11, which can be shared by probes P1 and P2. That is, at least a portion of each of the first probe P1 and the second probe P2 may be placed in the common hole S. This makes it possible to reduce the distance between probes P1 and P2, and to accommodate inspection objects having fine-pitch pads.
[0028] Referring to Figure 3, when viewed from below, the common hole S is in the form of two circles (or two ellipses) touching, or it may be in the form of a snowman. In other words, the distance between the two conventional through holes can be made zero. This ensures a margin (pass margin) for the contact area between the pad and the probe, and can accommodate inspection objects with fine-pitch pads.
[0029] The area of the common hole S may be larger than the area of the first through-hole H1, and may also be larger than the area of the second through-hole H2. That is, since the common hole S is connected to both the first through-hole H1 and the second through-hole H2, it can have a larger area than the area of each of them.
[0030] The area of the common hole S may be smaller than the sum of the areas of the first through hole H1 and the second through hole H2. As described above, the common hole S can take the form of two circles touching each other, and in this case, the circles can share a portion of their area, so the common hole S can have an area smaller than the areas of the first and second through holes H1 and H2.
[0031] The areas of the first through-hole H1 and the second through-hole H2 can be measured relative to the lowest second plate layer 12. More specifically, the area can be measured relative to the bottom surface of the lowest second plate layer 12, that is, the surface in contact with the first plate layer 11.
[0032] The area of the common hole S can be measured with reference to the upper surface of the first plate layer 11, but is not limited to this; it can also be measured with reference to the lower surface of the first plate layer 11.
[0033] Figure 4 shows the Away state of the electrical inspection jig according to the present invention, and Figure 5 shows the Press state of the electrical inspection jig according to the present invention. Figure 4 shows the standby state of the electrical inspection jig according to the present invention, and Figure 5 shows the operating state of the electrical inspection jig according to the present invention.
[0034] Referring to Figure 4, in this embodiment, the electrical inspection jig may experience a short circuit between the first and second probes P1 and P2 in the away state. As shown in Figure 5, in the pressed state, the first and second probes P1 and P2 are in contact with the pads 210 of the inspection body 200, and the probes P1 and P2 can slide inside the plate portions 10A and 10B along the through holes H1 and H2. At this time, the first and second probes P1 and P2 can be separated from each other, and a short circuit between the first and second probes P1 and P2 may not occur.
[0035] Thus, in the Away state, a short circuit may occur between probes P1 and P2, but in the Press state, a short circuit between probes P1 and P2 does not occur, and therefore, this may not affect the execution of the inspection during product inspection.
[0036] Although one embodiment of the present invention has been described above, any person with ordinary skill in the art can modify and change the present invention in various ways, such as by adding, changing, or deleting components, without departing from the spirit of the invention as described in the claims, and this can also be said to be within the scope of the rights of the present invention. [Explanation of Symbols]
[0037] 100: Electrical inspection jig 10A: First plate section 11: Plate Layer I 10B: Second plate section 12: Plate Layer 2 H1, H2: First and second through-holes S: Shared Hall P1, P2: First and second probes 200: Test specimen 210: Pad
Claims
1. The first plate section and A second plate portion is arranged on one surface of the first plate portion, The first and second through-holes penetrate the second plate portion, and become closer to each other as they approach one surface of the first plate portion, A common hole that penetrates the first plate portion and connects to the first through hole and the second through hole, A first probe and a second probe are positioned in the first through-hole and the second through-hole, respectively. Electrical testing fixtures, including those mentioned above.
2. The electrical inspection jig according to claim 1, wherein the first through-hole and the second through-hole do not come into contact with the second plate portion.
3. The first plate portion includes one first plate layer, The electrical inspection jig according to claim 1, wherein the common hole penetrates the first plate layer.
4. The electrical inspection jig according to claim 3, wherein no steps are formed on the inner wall of the common hall.
5. The second plate portion includes a plurality of second plate layers, The first through-hole penetrates the plurality of second plate layers, The electrical inspection jig according to claim 1, wherein the second through-hole penetrates the plurality of second plate layers.
6. The inner wall of the first through-hole has a step at the interface of the plurality of second plate layers. The electrical inspection jig according to claim 5, wherein the inner wall of the second through-hole has a step at the interface of the plurality of second plate layers.
7. The area of the aforementioned common hole is larger than the area of the aforementioned first through hole. The electrical inspection jig according to claim 1, wherein the area of the common hole is larger than the area of the second through-hole.
8. The electrical inspection jig according to claim 1, wherein the area of the common hole is smaller than the sum of the area of the first through-hole and the area of the second through-hole.
9. The electrical inspection jig according to claim 1, wherein at least a portion of the first probe and the second probe are each positioned in the common hole.
10. The electrical inspection jig according to claim 1, wherein the first probe and the second probe are in contact with each other below the first plate portion.
11. The first plate section and A second plate portion is arranged on one surface of the first plate portion, The first through-hole and the second through-hole penetrate the second plate portion, A common hole that penetrates the first plate portion and connects to the first through hole and the second through hole, A first probe and a second probe are positioned in the first through-hole and the second through-hole, respectively. Includes, An electrical inspection jig in which the area of the common hole is smaller than the sum of the areas of the first through-hole and the second through-hole.
12. The electrical inspection jig according to claim 11, wherein the first through-hole and the second through-hole do not come into contact with the second plate portion.
13. The electrical inspection jig according to claim 11, wherein at least a portion of the first probe and the second probe are each disposed in the common hole.
14. The electrical inspection jig according to claim 1, wherein the first probe and the second probe are in contact with each other below the first plate portion.