Filter assemblies, related systems, and related methods

Abstract

A filter assembly is provided. The filter assembly includes a retaining membrane. The retaining membrane has a bubble point of at least 40 psi, as measured in hydrofluoroether using an airflow porosimometer at 22°C. The filter assembly also includes an ion exchange membrane. The ion exchange membrane has a bubble point of less than 50 psi, as measured in isopropyl alcohol using an airflow porosimometer at 22°C; and / or B) 2 μg / cm³, as measured according to the methylene blue dye binding test method. 2 ~100 μg / cm³ 2 It has a dye binding capacity. It is provided including related systems and methods, and other related matters.

Claims

1. A filter assembly comprising a retaining membrane and an ion exchange membrane, The retaining film has a bubble point of at least 40 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C. The ion exchange membrane, A) Bubble point less than 50 psi measured in isopropyl alcohol using an airflow porosimeter at 22°C; and B) Measured according to the methylene blue dye binding test method, 2 μg / cm³ ２ ~100 μg / cm³ ２ dye binding capacity A filter assembly having the following features.

2. The filter assembly according to claim 1, wherein when a fluid containing defect-causing particles is flowed through the filter assembly and subsequently discharged onto a substrate, the amount of defect-causing particles discharged from the filter assembly onto the substrate is at least 10% less than the amount of defect-causing particles discharged onto the substrate from a control filter assembly comprising an ion exchange membrane having a bubble point greater than 40 psi as measured in isopropyl alcohol using an airflow porosimeter at 22°C.

3. The filter assembly according to claim 2, wherein the amount of defect-causing particles discharged from the filter assembly onto the substrate is 10% to 90% less than the amount of defect-causing particles discharged from a control filter assembly onto the substrate.

4. The filter assembly according to claim 1, wherein the ion exchange membrane has a bubble point of 10 psi to 30 psi when measured in isopropyl alcohol using an airflow porosimeter at 22°C.

5. The filter assembly according to claim 1, wherein the ion exchange membrane has a bubble point of 10 psi to 20 psi when measured in isopropyl alcohol using an airflow porosimeter at 22°C.

6. The ion exchange membrane is measured according to the methylene blue dye binding test method, at 2 μg / cm³. ２ ~80 μg / cm³ ２ The filter assembly according to claim 1, having a dye binding capacity.

7. The ion exchange membrane is measured according to the methylene blue dye binding test method, at 2 μg / cm³. ２ ~50 μg / cm³ ２ The filter assembly according to claim 1, having a dye binding capacity.

8. The filter assembly according to claim 1, wherein the ion exchange membrane has a surface energy of 25 mN / m to 60 mN / m.

9. The filter assembly according to claim 1, wherein the retaining film has bubble points of 40 psi to 200 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C.

10. The filter assembly according to claim 1, wherein the retaining film has bubble points of 40 psi to 150 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C.

11. The filter assembly according to claim 1, wherein the retaining film has bubble points of 40 psi to 125 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C.

12. The filter assembly according to claim 1, wherein the retaining membrane is located upstream of the ion exchange membrane.

13. To obtain a filter assembly comprising a retaining membrane and an ion exchange membrane, The retaining film has a bubble point of at least 40 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C. The ion exchange membrane, A) A bubble point of less than 50 psi, measured in isopropyl alcohol using an airflow porosimeter at 22°C, and B) Measured according to the methylene blue dye binding test method, 2 μg / cm³ ２ ~100 μg / cm³ ２ dye binding capacity To obtain a filter assembly having, To obtain a fluid containing defect-causing particles, The process involves passing a fluid through a filter assembly, thereby removing at least some of the defect-causing particles from the fluid. A filtration method that includes this.

14. The method according to claim 13, wherein the filter assembly removes at least 10% of defect-causing particles from the fluid.

15. The method according to claim 13, wherein the filter assembly removes 10% to 90% of defect-causing particles from the fluid.

16. The method according to claim 13, wherein flowing includes flowing a fluid through a filter assembly at a flow rate of 0.1 L / min to 50 L / min.

17. The method according to claim 16, wherein flowing includes flowing a fluid through a filter assembly at a temperature of 20°C to 100°C.

18. The method according to claim 13, wherein the ion exchange membrane has a bubble point of 10 psi to 30 psi when measured in isopropyl alcohol using an airflow porosimeter at 22°C.

19. The method according to claim 13, wherein the retaining film has bubble points of 40 psi to 200 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C.

20. A filter assembly comprising a retaining membrane and an ion exchange membrane, The retaining film has a bubble point of at least 40 psi, as measured in hydrofluoroether using an airflow porosimeter at 22°C. The ion exchange membrane, This is sufficient to ensure that the flow rate through the filter assembly is between 0.1 L / min and 50 L / min. A) Bubble point measured in isopropyl alcohol using an airflow porosimeter at 22°C, and B) Dye binding capacity measured according to the methylene blue dye binding test method A filter assembly having the following features.

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