Ingot puller including automated feeding assembly for filling semiconductor materials
JP2026520498APending Publication Date: 2026-06-23GLOBALWAFERS CO LTD
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- GLOBALWAFERS CO LTD
- Filing Date
- 2024-05-24
- Publication Date
- 2026-06-23
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Figure 2026520498000001_ABST
Abstract
An ingot puller for manufacturing single-crystal semiconductor ingots comprises a housing defining a growth chamber, a crucible positioned within the growth chamber, an ingot receiving container defining an ingot receiving chamber connected to the growth chamber, and a supply assembly for filling the crucible with semiconductor material. The supply assembly includes a damper that accommodates the semiconductor material and is movable between an elevated and a lowered position within the ingot receiving chamber. The damper includes a bottom and side walls that are releasable from the bottom to allow the semiconductor material to flow out of the damper. The supply assembly also optionally includes an opening pin that is extendable into the ingot receiving chamber and retractable from the ingot receiving chamber. The opening pin engages with the damper when extended into the ingot receiving chamber and releases the damper side walls from the damper bottom when the damper moves toward the lowered position.
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