Rear door opening and closing device for semiconductor containers

Abstract

This invention provides a rear door opening and closing device for semiconductor containers that prevents sudden (runaway) movement and falls due to air leaks by stably controlling the operation of the horizontal movement and lifting sections during the transfer of semiconductor containers. [Solution] The rear door opening and closing device includes a mounting base 1, a horizontal movement unit, multiple nozzles 3, a door opening and closing device 4, multiple forward and reverse passages, multiple 5-port multi-way valves, a second multi-way valve, a control module, an air supply unit, an air shut-off unit, and a holding unit. When a semiconductor container is placed on the mounting base, it is airtightly connected to the ventilation unit, and the first multi-way valve switches between exhaust and supply. The air supply unit, air shut-off unit, and holding unit of the control module are used to control the switching between the 5-port multi-way valve and the second multi-way valve, and adjust the timing of air supply to the forward and reverse passages. This makes it possible to avoid problems such as runaway operation, air leakage due to prolonged stoppage, and inability to maintain the upward opening position when operating the horizontal movement unit of the mounting base or the lifting unit 42 of the door opening and closing device.

Description

Technical Field

[0001] The present invention provides a rear door opening and closing device for a semiconductor container. The rear door opening and closing device for the semiconductor container is easy to replace the semiconductor container, has excellent shock resistance and airtightness, replaces the mounting table and the drive source of the door opening and closing device with a cylinder in a limited space, and improves the controllability and stability of the solenoid valve. [Prior Art]

[0002] Conventional automated wafer transfer equipment generally uses a mounting table and an opening and closing structure to perform bonding, opening, and taking out of a wafer cassette. There is also equipment that uses a cylinder as the drive source for the mounting table and the door opening and closing device in order to reduce costs and simplify. The pneumatic configuration has advantages such as low cost, high output, and easy maintenance, but problems are also emerging as the requirements for accuracy, cleanliness, and equipment reliability increase in the semiconductor manufacturing process.

[0003] Many conventional mounting tables have air nozzles at the front end of the mounting table in order to be airtightly connected to the wafer cassette and suck the inside of the cassette or replace the cleaning gas. However, compared with the positioning pins, the shock resistance of the air nozzle body is low, and it is easily damaged due to operation errors or cumulative tolerances of the wafer cassette, so the frequency of maintenance and replacement increases. In addition, the air nozzle requires excellent durability and sealing performance, and the adhesion with the wafer cassette is restricted by the accuracy in the height direction, so it is difficult to achieve both reliability and maintainability.

[0004] Regarding the door opening and closing device, when performing horizontal movement and lifting movement by a cylinder, there is a problem that the front-end space is insufficient. The generally available depth that can be arranged in front of a conventional wafer cassette port is about 100 mm, and it is necessary to arrange a lock structure, an adsorption surface for the door plate, and a retraction structure in this space. Under such conditions, if a cylinder with a longer stroke is added, there is a problem that the size of the main body becomes too large to be arranged. In addition, the joining position is also restricted, which also affects the design freedom.

[0005] During the door opening and closing process, complex actions such as unlocking, pulling, and retraction are often performed, requiring the maintenance of intermediate states such as "opening upwards" or "stopping midway." Controlling the cylinder solely with the ON / OFF control of a solenoid valve makes it impossible to ensure a stable intermediate position. Furthermore, prolonged stopping can cause air leaks, potentially leading to the door opening and closing structure unexpectedly falling or moving. This affects the safety of the equipment and the repeatability of positioning.

[0006] Furthermore, when a cylinder is used as the drive source to move the mounting table and wafer cassette laterally, prolonged cessation of the cylinder can cause depressurization, potentially leading to instantaneous acceleration or "runaway" at the end of the stroke. This can not only impact the wafer cassette's positioning structure but also cause wear on components such as air nozzles, positioning pins, and guide rails, potentially resulting in damage to the wafer inside. This unstable velocity curve negatively impacts the safety of wafer transport and the lifespan of the equipment.

[0007] The applicant of this invention has conducted diligent research to solve the above-mentioned conventional problems. [Overview of the project] [Problems that the invention aims to solve]

[0008] This invention provides a rear door opening and closing device for a semiconductor container that allows for easy replacement of the semiconductor container and features an air nozzle with excellent impact resistance and airtightness. The rear door opening and closing device for the semiconductor container improves the controllability and stability of the solenoid valve by replacing the mounting base and the drive source of the door opening and closing device with a cylinder in a limited space.

[0009] The purpose of this invention is to stably control the operation of the horizontal movement section and the lifting section by utilizing the air supply section, air shut-off section, and holding section of the control module, thereby avoiding problems such as sudden movement (runaway) and falling due to air leakage.

[0010] Another objective of this invention is to change the operating direction of the push rod by utilizing the slide rail, driven part, and pivot part. This allows the cylinder body to be used as the drive source in a limited space, thereby making better use of the advantages of the pneumatic drive system.

[0011] Other objectives of this invention include improving nozzle life by utilizing a metal tube and elastic pad, and providing advantages such as easy installation and removal, a simple structure, low cost, and high airtightness. [Means for solving the problem]

[0012] To achieve the above objective, the structure of the present invention comprises a mounting base, a horizontal movement section, a plurality of nozzles, a metal tube, a ventilation section, a first multi-way valve, an elastic pad, a door opening and closing device, a door coupling section, a lifting section, a cylinder body, two push rod sections, two slide rails, two driven sections, two pivot sections, a plurality of forward passages, a plurality of reverse passages, a plurality of 5-port multi-way valves, a second multi-way valve, a control module, an air supply section, an air shut-off section, and a holding section. The mounting base is used to mount semiconductor containers. The horizontal movement section is provided on one side of the mounting base. Each nozzle is coupled to the mounting base and each comprises a metal tube, a ventilation section coupled to one side of the metal tube, a first multi-way valve communicating with the ventilation section, and an elastic pad provided at one end of the metal tube. The door opening and closing device is provided on one side of the mounting base and comprises the door coupling section, the lifting section, the cylinder body, the two slide rails, the two driven sections, and the two pivot sections. The door coupling is used to connect the door panel of the semiconductor container. The lifting mechanism is provided on one side of the door coupling. The cylinder body is provided on one side of the lifting mechanism and has two parallel push rod sections. The slide rail is located on one side of the door coupling. The driven section is fixed to the door coupling and is movably mounted on the slide rail. The pivot section has one end provided on one side of the driven section and the other end connected to the push rod section. The forward passage communicates with the horizontal movement section and the lifting mechanism. The reverse passage communicates with the horizontal movement section and the lifting mechanism. Each of the five-port multi-way valves communicates with the forward passage and the reverse passage, respectively. The second multi-way valve communicates with the forward passage of the lifting mechanism. The control module is electrically connected to the five-port multi-way valve and the second multi-way valve and has the air supply section, the air shut-off section, and the holding section.

[0013] When installing a semiconductor container on a mounting platform, a metal tube and elastic pads are used to easily and airtightly connect it to the ventilation section, and the first multi-way valve is used to switch between exhaust and supply. Using a metal tube provides higher structural strength. Using elastic pads makes installation and removal easy and provides excellent airtightness. The first multi-way valve allows switching between exhaust and supply of air to the ventilation section. Regarding the operation of the mounting platform and door opening / closing device, before supplying air to the forward passage using the air supply section of the control module, the corresponding 5-port multi-way valve is controlled first to supply air to the reverse passage first. By supplying air to the reverse passage first, runaway movement of the horizontal movement section can be prevented. After supplying air to the forward passage using the holding section of the control module, the corresponding 5-port multi-way valve and the second multi-way valve are controlled to continue supplying air to the forward passage, thereby stably maintaining the upward opening of the door coupling section without using continuous excitation of the solenoid valve. After the air supply unit has completed its operation, the air shut-off unit of the control module is used to simultaneously shut off the forward and reverse passages from the air supply source, balancing the pressure at both ends and extending the stopping time at intermediate positions. This prevents falls due to air leakage. The control module controls the switching of the 5-port multi-way valve and the second multi-way valve, adjusting the timing of air supply to the forward and reverse passages to improve the controllability and stability of the horizontal movement or lifting unit. By utilizing slide rails, driven units, and pivots, the vertical force acting on the push rod section of the cylinder body is changed to the front-rear direction, allowing the door coupling to be controlled by pneumatic means within a limited space. Furthermore, the overall structure and control configuration are simplified, resulting in excellent lifespan and response speed. [Effects of the Invention]

[0014] According to the above technology, the problems of conventional cylinder-type semiconductor mounting platforms and door opening / closing devices, namely insufficient impact resistance of the air nozzle, difficulty in positioning the cylinder due to insufficient space at the front end, and unstable operation caused by airflow leakage due to prolonged shutdown, can be solved. [Brief explanation of the drawing]

[0015] [Figure 1]It is a perspective view of an embodiment of the present invention. [Figure 2] It is a schematic structural diagram 1 of a mounting table of an embodiment of the present invention. [Figure 3] It is a schematic structural diagram 2 of a mounting table of an embodiment of the present invention. [Figure 4] It is a schematic structural diagram of a door opening and closing device of an embodiment of the present invention. [Figure 5] It is a structural block diagram of a control module of an embodiment of the present invention. [Figure 6] It is a schematic diagram showing a state in which an air nozzle of an embodiment of the present invention is combined. [Figure 7] It is a schematic diagram showing a runaway prevention function of an embodiment of the present invention. [Figure 8] It is a schematic diagram showing upward opening retention of an embodiment of the present invention. [Figure 9] It is a schematic diagram showing an intermediate stop of an embodiment of the present invention. [Figure 10] It is a schematic operation diagram 1 of a door opening and closing device of an embodiment of the present invention. [Figure 11] It is a schematic operation diagram 2 of a door opening and closing device of an embodiment of the present invention.

Mode for Carrying Out the Invention

[0016] Hereinafter, the technical means and structure of the present invention for achieving the above objects and effects will be described with reference to the drawings.

[0017] This will be described with reference to FIGS. 1 to 6. The present invention includes a mounting table 1, a horizontal movement unit 2, a plurality of nozzles 3, a door opening and closing device 4, a plurality of forward passages, a plurality of reverse passages, a plurality of 5-port multi-way valves, a second multi-way valve 54, a control module 6, an air supply unit, an air cutoff unit, and a holding unit.

[0018] The mounting table 1 is used for mounting a semiconductor container 8. The semiconductor container 8 includes, for example, a wafer cassette.

[0019] The horizontal moving part 2 is provided on one side of the mounting table 1. In this embodiment, the horizontal moving part 2 has a structure driven by a cylinder and has a push rod 21 that can move inside it.

[0020] The plurality of nozzles 3 are coupled to the mounting table 1 and each have a metal pipe body 31, a ventilation part 32 coupled to one side of the metal pipe body 31, a first multi-way valve 33 communicating with the ventilation part 32, and an elastic pad 34 provided at one end of the metal pipe body 31.

[0021] The door opening and closing device 4 is provided on one side of the mounting table 1 and has a door coupling part 41, a lifting part 42, a cylinder body 43, two slide rails 44, two driven parts 45, and two pivot parts 46.

[0022] The door coupling part 41 is used to couple the door plate of the semiconductor container 8.

[0023] The lifting part 42 is provided on one side of the door coupling part 41.

[0024] The cylinder body 43 is provided on one side of the lifting part 42 and has two push rod parts 431 provided in parallel. The telescopic direction of each push rod part 431 is the same vertical direction as the lifting and lowering direction of the door coupling part 41.

[0025] The two slide rails 44 are located on one side of the door coupling part 41, and their extending direction is the same front-rear direction as the opening and closing direction of the door coupling part 41.

[0026] The two driven parts 45 are fixed to the door coupling part 41 and are each movably provided on each slide rail 44.

[0027] The two pivot parts 46, one end of each is provided on one side of each driven part 45, and the other end is connected to each push rod part 431.

[0028] The multiple forward passages include a forward passage 51a that communicates with the horizontal movement section 2, and a forward passage 51b that communicates with the lifting section 42.

[0029] The multiple reverse-direction passages include a reverse-direction passage 52a that communicates with the horizontal movement section 2, and a reverse-direction passage 52b that communicates with the lifting section 42.

[0030] Regarding the multiple 5-port multi-way valves, the 5-port multi-way valve 53a communicating with the horizontal movement section 2 is, for example, a 5-port 2-way solenoid valve. The 5-port multi-way valve 53b communicating with the lifting section 42 is, for example, a 5-port 3-way solenoid valve.

[0031] The second multi-way valve 54 communicates with the forward passage 51b of the lifting section 42.

[0032] The control module 6 is electrically connected to each of the five-port multi-way valves 53a, 53b and the second multi-way valve 54, and has an air supply unit 61, an air shut-off unit 62, and a holding unit 63.

[0033] Before supplying air to the forward passages 51a and 51b, the air supply unit 61 first controls the corresponding 5-port multi-way valves 53a and 53b to supply air to the reverse passages 52a and 52b.

[0034] After the operation of the air supply unit 61 is completed, the air shut-off unit 62 simultaneously shuts off the forward passage 51b and the reverse passage 52b from the air supply source.

[0035] After the air supply through the forward passage 51b is completed, the holding unit 63 controls the corresponding 5-port multi-way valve 53b and the second multi-way valve 54 to continuously supply air to the forward passage 51b.

[0036] In one embodiment, each driven portion 45 has a reinforcing coupling portion 451 on one side. The reinforcing coupling portion 451 is a positioning rod that extends above the driven portion 45, and by bringing the connection point between the driven portion 45 and the door coupling portion 41 closer to the center of the door coupling portion 41, it effectively and uniformly transmits the external force necessary for the opening and closing operation of the door coupling portion 41.

[0037] In one embodiment, there is a synchronization unit 432 whose ends are provided on the two push rod units 431. Each pivot unit 46 is coupled to each push rod unit 431 via the synchronization unit 432. The synchronization unit 432 is block-shaped, with the two push rod units 431 coupled to its lower surface and the pivot units 46 coupled to its left and right sides. The synchronization unit 432 moves the push rod units 431 up and down synchronously, matching the swing range and swing speed of the two pivot units 46. This avoids force loss or structural damage caused by improper force transmission.

[0038] In one embodiment, the metal pipe 31 has a locking groove 311 at one end. The elastic pad 34 has a joint 341 on its outer edge. The joint 341 is connected to the locking groove 311. By utilizing the elasticity of the elastic pad 34 and pulling the joint 341 to attach it to the locking groove 311, effects such as fixing, protection, and airtightness are achieved, and ease of installation and removal is improved.

[0039] In one embodiment, each of the slide rails 44, each of the driven parts 45, and each of the pivot parts 46 are housed within a case 7. The case 7 has a movable space 71 inside which each of the push rod parts 431 can move. By using the case 7, the slide rails 44, driven parts 45, and pivot parts 46 are protected from dust, preventing defects caused by dust and reduced lifespan due to wear, while also ensuring sufficient movable space 71.

[0040] The following describes an air nozzle with excellent impact resistance and airtightness corresponding to the structure of this technology. With this air nozzle, the semiconductor container 8 can be easily replaced, and the drive source of the mounting base 1 and the door opening / closing device 4 can be replaced with a cylinder in a limited space, improving the controllability and stability of the solenoid valve.

[0041] The explanation will be given with reference to Figures 1 to 11. Since the metal tube 31 of the nozzle 3 body is made of a hard material, it has the strength to withstand high-pressure gas. Since the elastic pad 34 is made of a non-metallic material such as engineering plastic or silicone, it is easy to attach, replace, and remove, and has a sufficient cushioning effect. Therefore, when the semiconductor container 8 is installed on the mounting base 1, damage due to accidental collisions during joining is reduced, and the semiconductor container 8 and the ventilation section 32 are airtightly connected, providing sufficient airtightness. When in use, the exhaust and supply of air from the nozzle 3 are switched by switching between exhaust and supply using the first multi-way valve 33. Examples of the first multi-way valve 33 include a 3-port 2-position solenoid valve, a 5-port 2-way solenoid valve, a 5-port 3-way solenoid valve, etc. In this embodiment, a 3-port 2-position solenoid valve will be explained as an example.

[0042] The following describes the operation of the mounting base 1 and the door opening / closing device 4 performed by solenoid valves, using common notation. In this embodiment, the forward passage 51a and the reverse passage 52a communicate with a single 5-port multi-way valve 53a. When air is supplied to the forward passage 51a of the horizontal moving part 2 of the mounting base 1, the push rod 21 protrudes. Conversely, when air is supplied to the reverse passage 52a, the push rod 21 retracts. In other words, to protrude the push rod 21, the 5-port multi-way valve 53a of the forward passage 51a is opened and the 5-port multi-way valve 53a of the reverse passage 52a is closed. Conversely, to retract the push rod 21, the 5-port multi-way valve 53a of the forward passage 51a is closed and the 5-port multi-way valve 53a of the reverse passage 52a is opened. If the forward passage 51a or the reverse passage 52a is kept in the same state for a long period of time, air leakage is likely to occur, and if a switch is performed in that state, the air pressure in the other passage may be too low, potentially causing a runaway operation. For example, if the push rod 21 is to be extended with the reverse passage 52a open for a certain period of time, causing air leakage, the air pressure in the reverse passage 52a will be too low to counteract the air pressure in the forward passage 51a. If air is supplied to the forward passage 51a in that state, the instantaneous displacement will be too large, causing a runaway operation. According to the present invention, before supplying air to the forward passage 51a using the air supply unit 61 of the control module 6, the corresponding 5-port multi-way valve 53a is controlled first to supply air to the reverse passage 52a, that is, reverse air is supplied to the horizontal movement unit 2 first, thereby preventing the runaway operation. After the air pressure returns to normal, air is supplied to the forward passage 51a. The 5-port multi-way valve 53a of the horizontal movement unit 2 is not limited to a 5-port 2-way solenoid valve, but may also be a 5-port 3-way solenoid valve.

[0043] Regarding the lifting section 42 of the door opening / closing device 4, the forward passage 51b is a passage for raising the door coupling section 41, and the reverse passage 52b is a passage for lowering the door coupling section 41. In some cases, it is necessary to hold the door coupling section 41 in the upward position (fix it in the highest position), but if the upward position of the door coupling section 41 is held by the excitation of the solenoid valve, it is difficult to keep the solenoid valve excited for a long time, which may lead to a reduction in its lifespan. There is also the problem of the door falling due to airflow leakage caused by prolonged shutdown. According to the present invention, after supplying air to the forward passage 51b using the holding section 63 of the control module 6, the corresponding 5-port multi-way valve 53b and the second multi-way valve 54 are controlled to continuously supply air to the forward passage 51b, thereby stably holding the door coupling section 41 in the upward position without using continuous excitation of the solenoid valve. Specifically, the forward passage 51b and the reverse passage 52b are connected to the 5-port multi-way valve 53b, and a normally open 5-port 2-way solenoid valve is connected to the forward passage 51b as the second multi-way valve 54. When raising or lowering, the control module 6 controls the 5-port multi-way valve 53b to switch it to the left (up) or right (down), and maintains the second multi-way valve 54 to the right (air shut-off state). When trying to maintain the upward opening of the door coupling 41, the holding part 63 is used to switch the 5-port multi-way valve 53b to the middle (air shut-off state), switch the second multi-way valve 54 to the left (air supply state), and use the normal air supply of the second multi-way valve 54 to maintain the upward opening of the door coupling 41. This eliminates the need to energize the 5-port multi-way valve 53b or the second multi-way valve 54 for a long time.

[0044] Regarding the lifting section 42 of the door opening / closing device 4, it is sometimes necessary to stop the door coupling section 41 midway through its movement. In such cases, the air shut-off section 62 of the control module 6 is used to simultaneously shut off the air supply source from the forward passage 51b and the reverse passage 52b after the operation of the air supply section 61 is complete, thereby balancing the pressure at both ends and extending the stopping time at intermediate positions. This prevents the door from falling due to air leakage. In this case, the reverse passage 52b is the passage for raising the door coupling section 41, and the forward passage 51b is the passage for lowering the door coupling section 41. Specifically, the 5-port multi-way valve 53b supplies air to the forward passage 51b to lower the door coupling section 41, and along the way, the air supply section 61 is driven to supply air to the reverse passage 52b. This provides a braking effect and replenishes the gas in the reverse passage 52b, balancing the pressure in the forward passage 51b and the pressure in the reverse passage 52b. In that case, the stability of stopping midway is improved by using the air shut-off section 62 to switch the 5-port multi-way valve 53b to the middle position (air shut-off state).

[0045] As described above, the control module 6 controls the switching of the 5-port multi-way valves 53a, 53b and the second multi-way valve 54, and adjusts the timing of air supply to the forward passages 51a, 51b and the reverse passages 52a, 52b, thereby improving the controllability and stability of the horizontal movement section 2 or the lifting section 42. As can be seen from the above, the extension and retraction state of the push rod section 431 of the cylinder body 43 is not limited by the forward passages 51a, 51b and the reverse passages 52a, 52b.

[0046] The opening and closing operation of the door coupling portion 41 of the door opening / closing device 4 utilizes a slide rail 44, a driven portion 45, and a pivot portion 46 to convert the vertical force acting on the push rod portion 431 of the cylinder body 43 into a forward-backward direction. Specifically, in order to meet SEMI (Semiconductor Equipment and Materials International, SEMI) standards, the door opening / closing device 4 is generally placed in a space with an effective depth of 100 mm to 120 mm. Therefore, in the door opening / closing device 4, the push rod portion 431 of the cylinder body 43 is arranged vertically, the two push rod portions 431 are each connected to a pivot portion 46, and one end of the pivot portion 46 is connected to the driven portion 45. Since the driven portion 45 can only move on the slide rail 44 which is provided in the forward-backward direction, the vertical movement of the push rod portion 431 is inevitably converted into forward-backward movement. This minimizes the lateral usable space and allows the door coupling portion 41 to be controlled by a pneumatic system in a limited space. Since there are two of each of the slide rail 44, driven part 45, and pivot part 46, the entire system operates via two connecting rods and two linear slide rails, thereby improving the strength and stability of the door opening and closing device 4.

[0047] According to this invention, since a pneumatic actuator is used as the drive source and can be controlled by a solenoid valve, there is no need to use multiple servo drivers, encoder wiring, and motor wiring, thus avoiding motor overheating problems. Therefore, space for installing heat sinks, fans, and control panel coolers can be saved. Compared to motors, using a pneumatic actuator as the drive source has advantages such as high and stable output, simple structure, easy maintenance, stable operation, long lifespan, fast operating speed, and short response time.

[0048] The above description is merely an embodiment of the present invention. Any modifications or changes made based on the specification and drawings of the present invention are included in the present invention. [Explanation of symbols]

[0049] 1. Mounting platform 2 Horizontal moving part 21 Pushrod 3 nozzles 31 Metal Tube 311 Locking groove 32 Ventilation section 33 First Multidirectional Dialect 34 Elastic pads 341 Joint 4 Door opening and closing device 41 Door joint 42 Lifting section 43 Cylinder body 431 Push rod section 432 Classmates 44 slide rails 45 Driven part 451 Reinforced joint 46 Pivot section 51a, 51b Forward passage 52a, 52b Reverse passage 53a, 53b 5-port multi-way valve 54. Second Multi-directional Dialect 6. Control Module 61 Air supply unit 62 Air-blocking section 63 Holding part 7 cases 71 Mobility space 8 Semiconductor containers

Claims

1. It has a mounting base, a horizontal movement section, multiple nozzles, a door opening / closing device, multiple forward passages, multiple reverse passages, multiple 5-port multi-way valves, a second multi-way valve, and a control module. The aforementioned mounting platform is used to mount semiconductor containers. The horizontal movement unit is provided on one side of the base described above. The plurality of nozzles are connected to the base described above and each has a metal tube, a vent connected to one side of the metal tube, a first multi-way valve communicating with the vent, and an elastic pad provided at one end of the metal tube. The door opening and closing device is provided on one side of the aforementioned base and has a door coupling part, a lifting part, a cylinder body, two slide rails, two driven parts, and two pivot parts. The aforementioned door coupling portion is used to connect the door plate of the semiconductor container, The lifting mechanism is provided on one side of the door coupling, The cylinder body is provided on one side of the lifting section and has two parallel push rod sections, the extension and retraction direction of each push rod section is the same vertical direction as the lifting and retraction direction of the door coupling section. The two slide rails are located on one side of the door joint, and their extension direction is the same front-to-back direction as the opening and closing direction of the door joint. The two driven parts are fixed to the door coupling and are movably mounted on each of the slide rails. The two pivot portions are each provided with one end on one side of the driven portion and the other end connected to the push rod portion. The plurality of forward passages each communicate with the horizontal movement section and the lifting section, The plurality of reverse-direction passages each communicate with the horizontal movement section and the lifting section, Each of the aforementioned five-port multi-way valves communicates with its respective forward passage and its respective reverse passage. The second multi-way valve communicates with the forward passage of the lifting section, The control module is electrically connected to each of the five-port multiway valves and the second multiway valve, and has an air supply unit, an air shut-off unit, and a holding unit. Before supplying air to the forward passage, the air supply unit first controls each of the corresponding five-port multi-way valves to supply air to the reverse passage. The air shut-off unit, after the operation of the air supply unit is completed, simultaneously shuts off the forward passage and the reverse passage from the air supply source. The holding unit, after the air supply through the forward passage is complete, controls the corresponding five-port multi-way valve and the second multi-way valve to continuously supply air through the forward passage. Rear door opening and closing mechanism for semiconductor containers.

2. Each of the driven parts has a reinforcing joint on one side. A rear door opening and closing device for a semiconductor container according to claim 1.

3. It has a synchronization section provided at both ends of the two aforementioned push rod sections, Each of the pivot portions is connected to each of the push rod portions via the synchronization portion. A rear door opening and closing device for a semiconductor container according to claim 1.

4. The metal tube has a locking groove at one end, The elastic pad has a joint at its outer edge, The aforementioned joint is connected in accordance with the locking groove. A rear door opening and closing device for a semiconductor container according to claim 1.

5. Each of the slide rails, each of the driven parts, and each of the pivot parts are housed within the case. A rear door opening and closing device for a semiconductor container according to claim 1.

6. The case has a movable space within which each of the push rod portions can move. The rear door opening and closing device for a semiconductor container according to claim 5.

7. The aforementioned 5-port multi-way valve is either a 5-port 2-way solenoid valve or a 5-port 3-way solenoid valve. A rear door opening and closing device for a semiconductor container according to claim 1.

8. The semiconductor container is a wafer cassette. A rear door opening and closing device for a semiconductor container according to claim 1.

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