System for removing harmful exhaust gases, and bubble generator.

Abstract

The present invention provides a system for removing harmful exhaust gases and a bubble generator. [Solution] The system for removing harmful exhaust gases includes a bubble generator 1 and a reaction device 2. The bubble generator includes a first device body 11, a stirring module 13, and a drive module 14. The first device body of the bubble generator has a storage chamber 110 for receiving a medium liquid and a plurality of first openings 1311. The bubble generator is used to receive harmful exhaust gases. The stirring module is suspended in the storage chamber and, through the plurality of first openings, converts the harmful exhaust gases into a plurality of microbubbles, which are then supplied into the storage chamber, mixing the plurality of microbubbles with the medium liquid to form a microbubble liquid. The reaction device is used to react the microbubble liquid with an auxiliary liquid to produce an acidic liquid.

Description

Technical Field

[0001] The present invention relates to a system for removing harmful exhaust gas and a bubble generator, and particularly to a system structure design and a bubble generator that effectively remove harmful gas by utilizing bubble generation technology and chemical reaction technology.

Background Art

[0002] Reaction gases generated in the semiconductor production process generally contain harmful gases that are flammable, corrosive or highly toxic, and none of them can be discharged unless they are converted into harmless or treatable substances.

[0003] Conventional treatment methods for harmful gases (e.g., nitrogen oxides (NOx)) include catalytic reduction method, non-catalytic reduction method or electron beam method, etc. However, these treatment methods are still restricted by certain conditions. For example, the catalytic reduction method needs to react at an operating temperature of 250 - 400°C, and problems such as catalyst deterioration and contamination, reduction of the removal rate per unit time, and increase in energy loss may occur during long-term treatment.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technical problem to be solved by the present invention is to provide a system for removing harmful exhaust gas and a bubble generator to solve the problem of NOx generation caused by high-temperature combustion in view of the deficiencies of the prior art.

Means for Solving the Problems

[0005] To solve the above problems, one of the technical solutions adopted in the present invention provides a system for removing harmful exhaust gases, including a bubble generator and a reaction device. The bubble generator includes a first device body, a stirring module, and a drive module. The first device body is arranged to be connected to a first external liquid source and has a storage chamber, the storage chamber is arranged to receive a medium liquid provided by the first external liquid source. The stirring module is suspended in the storage chamber and has a plurality of first openings penetrating the body, the main transport channel is arranged to receive a first harmful exhaust gas provided by the first external gas supply source and supply the first harmful exhaust gas to the storage chamber, converting the first harmful exhaust gas into a plurality of first microbubbles through the plurality of first openings, thereby mixing the plurality of first microbubbles with the medium liquid to form a microbubble liquid. The drive module is connected to the body member so as to be movable and is arranged to move and rotate the body member. The reaction apparatus is connected to the first apparatus body and has a reaction chamber, the reaction chamber is arranged to store an auxiliary liquid, and the reaction apparatus is arranged to receive the microbubble liquid and react the microbubble liquid with the auxiliary liquid to produce an acidic liquid.

[0006] To solve the above problems, another technical solution employed in the present invention provides a system for removing harmful exhaust gases, including a bubble generator. The bubble generator includes a first device body, a stirring module, a drive module, and an irradiation module. The first device body is arranged to be connected to a first external liquid source and has a storage chamber, the storage chamber is arranged to receive a medium liquid provided by the first external liquid source. The stirring module is suspended in the storage chamber and has a plurality of first openings penetrating the body, and is arranged to receive a first harmful exhaust gas provided by the first external gas supply source, and to supply the first harmful exhaust gas into the storage chamber, converting the first harmful exhaust gas into a plurality of first microbubbles through the plurality of first openings, thereby mixing the plurality of first microbubbles with the medium liquid to form a microbubble liquid. The drive module is connected to the body member so as to be movable and is arranged to move and rotate the body member. The irradiation module is located close to the first device body and is arranged to project a special beam toward the first device body.

[0007] To solve the above problems, another technical solution employed by the present invention provides a bubble generator comprising a first apparatus body, a stirring module, and a drive module. The first apparatus body is arranged to be connected to a first external liquid source and has a storage chamber, the storage chamber is arranged to receive a medium liquid provided by the first external liquid source. The stirring module is suspended in the storage chamber and has a plurality of first openings penetrating the body, and is arranged to receive a first harmful exhaust gas provided by the first external gas supply source, and to supply the first harmful exhaust gas to the storage chamber, converting the first harmful exhaust gas into a plurality of first microbubbles through the plurality of first openings, thereby mixing the plurality of first microbubbles with the medium liquid to form a microbubble liquid. The drive module is connected to the body member so as to be movable and is arranged to move and rotate the body member. [Effects of the Invention]

[0008] One of the beneficial effects of this invention is that the system and bubble generator provided by this invention for removing harmful exhaust gases can effectively remove harmful gases from reaction gases generated by industrial processes by increasing the reaction surface area with microbubbles through the above-described technical solution. Furthermore, since the reaction takes place in the liquid phase and does not require high-temperature reactions of catalysts, energy consumption can be saved. [Brief explanation of the drawing]

[0009] [Figure 1] A schematic diagram showing a first configuration of a system for removing harmful exhaust gases according to a first embodiment of the present invention. [Figure 2] A partial cross-sectional view of a bubble generating device according to the first embodiment of the present invention. [Figure 3] A schematic diagram showing the structure of a stirring member according to the first embodiment of the present invention. [Figure 4] A schematic diagram showing the structure of a reaction apparatus according to the first embodiment of the present invention. [Figure 5] A schematic diagram showing a second configuration of a system for removing harmful exhaust gases according to the first embodiment of the present invention. [Figure 6] A schematic diagram showing a third configuration of a system for removing harmful exhaust gases according to the first embodiment of the present invention. [Figure 7] A schematic diagram showing the structure of a reaction apparatus according to a second embodiment of the present invention. [Figure 8] A schematic diagram showing the structure of a system for removing harmful exhaust gases according to a third embodiment of the present invention. [Modes for carrying out the invention]

[0010] To further understand the features and technical details of this invention, please refer to the following detailed description and drawings. However, the provided drawings are for reference and explanatory purposes only and do not limit this invention.

[0011] The following describes the implementation of the "system for removing harmful exhaust gases and bubble generator" according to the present invention by specific embodiments, and those skilled in the art will be able to understand the advantages and effects of the present invention based on the contents disclosed herein. The present invention can be implemented or applied by other different specific embodiments, and various modifications and changes can be made to each detail herein, based on different viewpoints and uses, as long as they do not deviate from the concept of the present invention. It should also be noted in advance that the accompanying drawings of the present invention are merely for simple schematic explanation and are not drawn to actual size. The technical content of the present invention will be described in more detail below based on the following embodiments, but the scope of protection of the present invention is not limited by the contents disclosed.

[0012] It should be understood that while this specification may use terms such as “first,” “second,” and “third” to describe various elements, these elements are not limited by these terms; rather, these terms are primarily used to distinguish one element from another. Furthermore, the term “or” as used herein may, depending on the context, include any one or more combinations of the items listed in relation to the actual situation.

[0013] First embodiment Referring to Figures 1 to 5, a first embodiment of the present invention provides a system Z for removing harmful exhaust gases, which includes a bubble generator 1 and a reaction device 2.

[0014] As shown in Figures 1 to 3, the bubble generator 1 may include a first device body 11, a stirring module 13, and a drive module 14. For example, the first device body 11 may be hollow and may be arranged to be connected to a first external liquid source E1. The first device body 11 may have a storage chamber 110, which may be arranged to receive the medium liquid E10 provided by the first external liquid source E1. Here, the storage chamber 110 is preferably a sealed chamber, but is not limited to that. Here, the first external liquid source E1 may be a general liquid supply device, and the liquid may be water, but is not limited to that.

[0015] The stirring module 13 may be suspended or installed in the storage chamber 110 and may include a main body member 130 and a plurality of stirring members 131. The main body member 130 may be hollow and have a main transport channel 1300, one end of the main body member 130 being detachably connected to a first external gas supply source E2, and the main body member 130 may be arranged to receive a first hazardous exhaust gas E20 provided by the first external gas supply source E2. Here, the first external gas supply source E2 may be a semiconductor manufacturing facility, other industrial manufacturing facility, gas combustion facility, or gas supply facility, and the first hazardous exhaust gas E20 may be, but not limited to, a hazardous gas containing nitrogen oxides (NOx), nitric oxide (NO), or both. Multiple stirring members 131 can be installed on the main body member 130, and each stirring member 131 may have a sub-transport channel 1310 and multiple first openings 1311 that penetrate the main body, and each sub-transport channel 1310 can communicate with a main transport channel 1300 and a plurality of first openings 1311 that correspond to it. Here, the main transport channel 1300 can be arranged to supply the first harmful exhaust gas E20 to each sub-transport channel 1310, and each sub-transport channel 1310 can be arranged to convert the first harmful exhaust gas E20 into multiple first microbubbles E21 by the plurality of first openings 1311 and supply them into the storage chamber 110, and to mix the plurality of first microbubbles E21 with the medium liquid E10 to form a microbubble liquid M. Here, the multiple stirring members 131 may have a shape that is not parallel to the main body member 130, and preferably, each stirring member 131 may be perpendicular to the main body member 130. Also, the cross-section of each first opening 1311 may have a bent shape or an N-shaped shape. Furthermore, each stirring member 131 may include a first annular element 1312, a second annular element 1313, and a plurality of fixing elements 1314. The first annular element 1312 and the second annular element 1313 may be annular plate structures and have a plurality of first openings 1311 that penetrate the main body.A first concave groove portion 1312a is formed on one surface of the first annular element 1312 so as to be recessed inward, and a second concave groove portion 1313a is formed on one surface of the second annular element 1313 so as to be recessed inward. The first concave groove portion 1312a and the corresponding second concave groove portion 1313a form a subtransport channel 1310. Multiple fixing elements 1314 can be connected to the first annular element 1312 and the second annular element 1313, thereby coupling them together. Here, the fixing elements 1314 may be locking elements, such as screws, but are not limited to these.

[0016] The drive module 14 can be installed in the first device body 11 and connected to the main body member 130 so that it can move. The drive module 14 can be positioned to move and rotate the main body member 130. Here, the drive module 14 may be a drive motor or other drive element.

[0017] Next, as shown in accordance with Figures 1 and 4, the reaction apparatus 2 may be connected to the first apparatus body 11 and may have a reaction chamber 200, which may be arranged to store the auxiliary liquid E40, and the reaction apparatus 2 may be arranged to receive the microbubble liquid M and react the microbubble liquid M with the auxiliary liquid E40 to produce the acidic liquid 22. For example, the reaction apparatus 2 may include a second apparatus body 20 and an auxiliary module 21. The second apparatus body 20 has a hollow structure, can be connected to the first apparatus body 11, and may have a reaction chamber 200. The second apparatus body 20 may be connected to a second external liquid source E4 and arranged to receive the auxiliary liquid E40 provided by the second external liquid source E4. Here, the second apparatus body 20 and the first apparatus body 11 may be connected to each other by a transport pipe (not shown in the figures). The auxiliary module 21 can be installed on the second device body 20, and the auxiliary module 21 may be a lamp element or a heating element. Here, the second external liquid source E4 may be a special liquid supply device, and the auxiliary liquid E40 may be a liquid containing ozone (O3), but is not limited to this.

[0018] Therefore, as shown in Figures 1 to 4, when the harmful exhaust gas removal system Z of the present invention is in operation, the bubble generator 1 can receive the first harmful exhaust gas E20 supplied by the first external gas supply source E2 and the medium liquid E10 provided by the first external liquid source E1.

[0019] Subsequently, the drive module 14 is controlled to move the main body member 130, rotate it about its own center as the rotation axis, move the plurality of stirring members 131, and stir the medium liquid E10 in the storage chamber 110. Incidentally, the first harmful exhaust gas E20 provided by the first external gas supply source E2 can be introduced into the main transport channel 1300 of the main body member 130. Here, when the main transport channel 1300 receives the first harmful exhaust gas E20 provided by the first external gas supply source E2, the first harmful exhaust gas E20 is supplied to each sub-transport channel 1310, and a plurality of first openings 1311 can convert the first harmful exhaust gas E20 into a plurality of first microbubbles E21 and supply them into the storage chamber 110.

[0020] Therefore, the system Z for removing harmful exhaust gas of the present invention uses the stirring module 13 to convert the first harmful exhaust gas E20 into a plurality of first microbubbles E21 (microbubbles containing nitrogen oxides (NOx) or nitric oxide (NO), the size of which can be within the range of 1 to 500 μm, nanobubbles (the size of which can be within the range of 10 to 1000 nm), or ultrafine bubbles), so that the first harmful exhaust gas E20 can be easily taken into the medium liquid E10, forming a liquid composition (i.e., microbubble liquid M), that is, a liquid containing microbubbles and nanobubbles. Furthermore, while further utilizing the shear force generated by the continuous stirring of the microbubble liquid M in the storage chamber 110 by the plurality of stirring members 131, a plurality of first harmful exhaust gases E20 are released by the centrifugal force and the design of the first openings 1311, and the first microbubbles E21 in the microbubble liquid M are homogenized and purified, so that the bubble size of the first microbubbles E21 can be made uniform and fine.

[0021] Subsequently, the bubble generator 1 can transport the medium liquid E10 (i.e., microbubble liquid M) incorporating the first microbubbles E21 to the reactor 2 through a transport pipe (not shown in the drawing).

[0022] After the microbubble liquid M is introduced into the reaction chamber 200 in quick succession, the microbubble liquid M reacts with the auxiliary liquid E40 in the reaction chamber 200 and, together with the special beam (e.g., ultraviolet (UV)) projected by the auxiliary module 21, oxidizes the first microbubble E21 and the auxiliary liquid E40 (e.g., water containing O3, but not limited to this) to form nitrogen dioxide (NO2). When the NO2 dissolves in the liquid in the reaction chamber 200, an acidic solution 22 (e.g., nitric acid (HNO3)) is formed.

[0023] In other optional implementations, the microbubble liquid M is introduced into the reaction chamber 200, where it reacts with the auxiliary liquid E40 in the reaction chamber 200, and together with the heating of the inside of the reaction chamber 200 by the auxiliary module 21, oxidizes the first microbubbles E21 and the auxiliary liquid E40 (for example, water containing H2O2, but not limited to this) to form NO2. When the NO2 dissolves in the liquid in the reaction chamber 200, an acidic solution 22 (for example, nitric acid (HNO3)) can be formed.

[0024] Furthermore, as shown in Figures 1 to 4, the system Z of the present invention, which generates an acidic liquid 22 and then removes harmful exhaust gases, can also introduce the acidic liquid 22 into a secondary reaction module 23 (e.g., a tank) via a transport pipe (not shown in the drawings). Inside the secondary reaction module 23, a special liquid (e.g., an alkaline solution such as sodium hydroxide (NaOH)) can be stored and neutralized with the acidic liquid 22 to convert the acidic liquid 22 into a harmless substance.

[0025] Thus, the harmful exhaust gas removal system Z of the present invention, by installing the bubble generator 1 and combining it with the reaction device 2 according to the above technical plan, can effectively convert harmful gases (nitrogen oxides (NOx)) in the reaction gas generated in the manufacturing process into water-soluble substances (nitric acid (HNO3)), which can be used to improve convenience in subsequent filtration work. Furthermore, the harmful exhaust gas removal system Z of the present invention can convert water-soluble substances (nitric acid (HNO3)) and alkaline solutions (for example, sodium hydroxide (NaOH), but not limited to these) into harmless substances through a neutralization reaction.

[0026] Furthermore, the bubble generator 1 of the present invention may further include a bubble supply module 12 that can be installed in the storage chamber 110, and the bubble supply module 12 can be connected to a second external gas supply source E3 and receive a second harmful exhaust gas E30 provided by the second external gas supply source E3, and convert the second harmful exhaust gas E30 into a plurality of second microbubbles E31 and provide them to the microbubble liquid M, thereby allowing the microbubble liquid M to take in a plurality of second microbubbles E31. For example, as shown in conjunction with Figures 1 and 5, the bubble supply module 12 has a hollow structure and can be installed in the storage chamber 110 (for example, located in the medium liquid E10 or the microbubble liquid M). Here, the second external gas supply source E3 may be semiconductor manufacturing equipment, other industrial manufacturing equipment, or gaseous combustion equipment, and the second harmful exhaust gas E30 may be a harmful gas containing nitrogen oxides (NOx) or nitric oxide (NO), but is not limited to these. The bubble supply module 12 may have a gas transport channel 120 and a plurality of second openings 121, each second opening 121 passing through the body of the bubble supply module 12 and connected to the gas transport channel 120. Therefore, after the second harmful exhaust gas E30 is transported to the bubble supply module 12, the bubble supply module 12 can receive the second harmful exhaust gas E30 through the gas transport channel 120 and convert the second harmful exhaust gas E30 into a plurality of second microbubbles E31 through the plurality of second openings 121 and supply them into the microbubble liquid M. Subsequently, the shear force generated by the continuous agitation of the medium liquid E10 in the storage chamber 110 by the multiple agitators 131 homogenizes and purifies the second microbubbles E31 in the microbubble liquid M, thereby making the size of the second microbubbles E31 uniform and fine.

[0027] Furthermore, as shown in conjunction with Figures 1 to 6, the harmful exhaust gas removal system Z of the present invention may further include a circulation device 3 and a bubble inspection device 4. The circulation device 3 may be a circulation motor and can be connected to the first device body 11. The circulation device 3 can be configured to receive the microbubble liquid M provided by the first device body 11, increase the flow velocity of the microbubble liquid M, and introduce the increased-velocity microbubble liquid M into the first device body 11 to increase the number of microbubbles (e.g., first microbubbles E21, second microbubbles E31, or both) in the microbubble liquid M. Here, the flow velocity provided by the circulation device 3 is Re > 25000, preferably 28000, and the circulation device 3 can be connected to the first device body 11 by a plurality of transport pipes (not shown in the drawings), each transport pipe may have a Venturi pipe structure. The bubble inspection device 4 may also be a bubble inspection facility and can be connected to the first device body 11. The bubble inspection device 4 can be configured to receive and inspect microbubble-related data in the medium liquid E10, and measures the size and concentration of bubbles by methods such as optical scattering, transmission, and bubble migration velocity, but is not limited to these methods.

[0028] Furthermore, as shown in Figures 1 to 5, the present invention further provides a bubble generating device 1 which may include a first device body 11, a stirring module 13, and a drive module 14. The first device body 11 can be configured to be connected to a first external liquid source E1 and may have a storage chamber 110, which can be configured to receive a medium liquid E10 provided by the first external liquid source E1. The stirring module 13 may be suspended in the storage chamber 110 and may include a main body member 130 and a plurality of stirring members 131. Multiple stirring members 131 are connected to a main body member 130, the main body member 130 may have a main transport channel 1300, one end of the main body member 130 may be detachably connected to a first external gas supply source E2, each stirring member 131 may have a sub-transport channel 1310 and a plurality of first openings 1311 penetrating the main body, each sub-transport channel 1310 communicating with the main transport channel 1300 and the corresponding plurality of first openings 1311 Here, the main transport channel 1300 can be configured to receive the first harmful exhaust gas E20 provided by the first external gas supply source E2 and supply it to each sub-transport channel 1310, each sub-transport channel 1310 can be configured to convert the first harmful exhaust gas E20 into a plurality of first microbubbles E21 through a plurality of first openings 1311 and supply them into the storage chamber 110 to mix the plurality of first microbubbles E21 with the medium liquid E10 to form a microbubble liquid M. The drive module 14 is connected to the main body member 130 so as to be movable, and the drive module 14 can be configured to move and rotate the main body member 130.

[0029] Second example Refer to Figure 7, and also to Figures 1 to 6. As shown in the drawings above, the system Z for removing harmful exhaust gases according to this embodiment and the system Z for removing harmful exhaust gases according to the above embodiment are generally similar, so the installation or operation of the same components will not be described again here. The difference between this embodiment and the first embodiment is that in this embodiment, the reaction apparatus 2 may include a second apparatus body 20 and an auxiliary module 21. The second apparatus body 20 can be connected to the first apparatus body 11 and may have a reaction chamber 200, and the reaction chamber 200 may be arranged to store an auxiliary liquid. The auxiliary module 21 may be installed in the reaction chamber 200. Here, while the reaction chamber 200 stores the microbubble liquid M and the auxiliary liquid, when the auxiliary module 21 reacts in the auxiliary liquid to generate multiple hydroxyl radicals, the medium liquid E10 and the hydroxyl radicals react to generate an acidic liquid 22.

[0030] For example, as shown in Figures 1 to 7, the difference between this embodiment and the first embodiment described above is that the auxiliary module 21 may be equipment used for underwater discharge (for example, a discharge device having a needle-shaped body), and the auxiliary liquid can be electrolyzed water 201. Therefore, after the microbubble liquid M containing the first microbubble E21 and the second microbubble E31 is transported into the reaction chamber 200 of the reactor 2, the auxiliary module 21 performs underwater tip discharge in the auxiliary liquid, generating a plurality of hydroxyl radicals. At this time, the plurality of hydroxyl radicals are oxidized together with the first microbubble E21 and the second microbubble E31 to form NO2, and after the NO2 dissolves in the liquid in the reaction chamber 200, an acidic liquid 22 (for example, nitric acid (HNO3)) is formed.

[0031] Furthermore, after generating the acidic solution 22, it is also possible to introduce the acidic solution 22 into the secondary reaction module 23 via a transport pipe (not shown in the diagram). Inside the secondary reaction module 23, a special liquid (for example, an alkaline solution such as sodium hydroxide (NaOH)) can be stored and converted into a harmless substance through a neutralization reaction with the acidic solution 22.

[0032] Third embodiment Refer to Figure 8, and also to Figures 1 to 7. As shown in the drawings above, the system Z for removing harmful exhaust gases according to this embodiment may include a bubble generator 1. The bubble generator 1 may include a first device body 11, a stirring module 13, a drive module 14, and an irradiation module 15. Here, the system Z for removing harmful exhaust gases according to this embodiment and the system Z for removing harmful exhaust gases according to the first embodiment described above are generally similar, and the installation or operation of the same components will not be described again here. The difference between this embodiment and the first embodiment described above is that in this embodiment, the bubble generator 1 may include an irradiation module 15. The irradiation module 15 can be positioned close to the first device body 11 and can be arranged to project a special beam toward the first device body 11.

[0033] For example, as shown in Figure 8, the first apparatus body 11 according to this embodiment may be a hollow structure in which the whole or part is made of a transparent material. The irradiation module 15 may be a lamp element. Therefore, when the harmful exhaust gas removal system Z of the present invention is in operation, the bubble generator 1 can receive the first harmful exhaust gas E20 supplied by the first external gas supply source E2 and the medium liquid E10 provided by the first external liquid source E1. Here, the first external gas supply source E2 may include a manufacturing facility that emits harmful gases containing nitrogen oxides (NOx), nitric oxide (NO), or both, and a gas supply facility that supplies ozone (O3) gas, and the first harmful exhaust gas E20 may contain NOx, NO, or both, and O3. That is, the bubble generator 1 can receive fluids provided separately by the two facilities (one facility provides NOx, NO, or both, and the other facility provides O3) and make them the first harmful exhaust gas E20.

[0034] Next, the drive module 14 moves multiple stirring members 131 to stir the media liquid E10 in the storage chamber 110. The main transport channel 1300 of the main body member 130 can be used to introduce the first harmful exhaust gas E20. Here, the main transport channel 1300 supplies the first harmful exhaust gas E20 to each sub-transport channel 1310, and the multiple first openings 1311 convert the first harmful exhaust gas E20 into multiple first microbubbles E21, which are then supplied into the media liquid E10 in the storage chamber 110, allowing the media liquid E10 to incorporate the multiple first microbubbles E21 and form a microbubble liquid M. Furthermore, the shear force and centrifugal force generated by the continuous stirring of the microbubble liquid M in the storage chamber 110 by the multiple stirring members 131, along with the design of the first opening 1311, release multiple first microbubbles E21, homogenizing and purifying the first microbubbles E21 in the microbubble liquid M, thereby making the size of the first microbubbles E21 uniform and fine.

[0035] At this time, the irradiation module 15 is driven to irradiate the first apparatus body 11 with a special beam (e.g., ultraviolet (UV)) to react with the first microbubbles E21 containing O3 so that they become an oxidizing agent (e.g., an OH group). The oxidizing agent can also be oxidized together with the first microbubbles E21 containing NOx, NO, or both to form NO2. Subsequently, the NO2 dissolves in the microbubble liquid M to form an acidic solution 22 (e.g., nitric acid (HNO3) water).

[0036] Thus, the system Z for removing harmful exhaust gases according to this embodiment, while installing the irradiation module 15, introduces the first harmful exhaust gas E20 (i.e., NOx, NO or both, and O3) simultaneously or separately by the stirring module 13, thereby giving the bubble generator 1 the function of converting the first harmful exhaust gas E20 into a water-soluble substance (nitric acid (HNO3)) in addition to the function of forming bubbles from the first harmful exhaust gas E20 (i.e., the bubble generator 1 simultaneously has the function of forming bubbles and the function of reacting gases), thereby improving the processing efficiency.

[0037] Furthermore, as shown in Figure 8, after generating the acidic solution 22, the system Z for removing harmful exhaust gases according to this embodiment can also introduce the acidic solution 22 into a secondary reaction module 23 (for example, a tank) via a transport pipe (as shown in Figure 4). Inside the secondary reaction module 23, a special liquid (for example, an alkaline solution such as sodium hydroxide (NaOH), but not limited to this) can be stored and neutralized with the acidic solution 22 to convert the acidic solution 22 into a harmless substance.

[0038] Furthermore, some of the first microbubbles E21 in the microbubble liquid M release the first harmful exhaust gas E20 into the storage chamber 110. Here, the system Z for removing harmful exhaust gases further includes a monitoring device 5 which includes a decomposition module 50 and a detection module 51. The decomposition module 50 can be connected to the first device body 11 and is configured to receive the first harmful exhaust gas E20 and reduce its O3 content. The detection module 51 can be connected to the decomposition module 50 and the first device body 11 and is configured to receive the first harmful exhaust gas E20, and when it detects that the NO concentration is greater than a predetermined concentration, it can transport the first harmful exhaust gas E20 to the stirring module 13.

[0039] For example, as shown in Figure 8, the decomposition module 50 may be a catalytic end gas decomposer, an ozone dissociator, or other ozone treatment equipment, but is not limited to these. The detection module 51 may be detection equipment for detecting the NOx and NO content in the fluid. Therefore, when the system Z for removing harmful exhaust gases is in operation, some of the first microbubbles E21 in the microbubble liquid M may float to the surface of the microbubble liquid M without reacting and burst, so that the first harmful exhaust gas E20 is released into the storage chamber 110. Subsequently, the first apparatus body 11 can transport the first harmful exhaust gas E20 to the decomposition module 50 by transport pipe (not shown in the drawing). At this time, the decomposition module 50 can capture and remove O3 in the first harmful exhaust gas E20 in advance, thereby reducing the O3 content of the first harmful exhaust gas E20, or completely filter out the O3. Next, the decomposition module 50 can transport the treated first hazardous exhaust gas E20 to the detection module 51 via a transport pipe (not shown in the drawing). At this time, the detection module 51 detects whether the concentration of NOx, NO, or both in the treated first hazardous exhaust gas E20 exceeds a predetermined concentration (which can be adjusted according to the operator's needs). If the concentration does not exceed the predetermined concentration, the detection module 51 can release the first hazardous exhaust gas E20 into the atmosphere. If the concentration is above the predetermined concentration, the detection module 51 transports the first hazardous exhaust gas E20 to the stirring module 13, where the stirring module 13 can convert the first hazardous exhaust gas E20 back into the first microbubbles E21 and allow it to react again.

[0040] Furthermore, the bubble generator 1 further includes a bubble supply module 12 that can be installed in the bubble storage chamber 110, the bubble supply module 12 being connected to a second external gas supply source E3 and receiving a second harmful exhaust gas E30 provided by the second external gas supply source E3, converting the second harmful exhaust gas E30 into a plurality of second microbubbles E31 and supplying them to the microbubble liquid M, and can be arranged to allow the plurality of second microbubbles E31 to be incorporated into the microbubble liquid M. For example, as shown in Figure 8, the bubble supply module 12 in this embodiment and the bubble supply module 12 in the previously described embodiment are generally similar. The difference is that in this embodiment, the second external gas supply source E3 may be a manufacturing facility that emits harmful gases containing nitrogen oxides (NOx), nitric oxide (NO), or both, and the second harmful exhaust gas E30 may contain NOx, NO, or both. The first external gas supply source E2 may be a gas supply facility that supplies ozone (O3) gas, and the first harmful exhaust gas E20 may contain O3. Therefore, when the system Z for removing harmful exhaust gases is in operation, the bubble supply module 12 can convert the second harmful exhaust gas E30 into a plurality of second microbubbles E31 and provide them into the microbubble liquid M, and the stirring module 13 converts the first harmful exhaust gas E20 into a plurality of first microbubbles E21 and provide them into the microbubble liquid M.

[0041] It should be noted that, in the above embodiment, the second external gas supply source E3 may be a gas supply facility that supplies ozone (O3) gas, and the first external gas supply source E2 may be a manufacturing facility that emits harmful gases containing nitrogen oxides (NOx), nitric oxide (NO), or both. Alternatively, both the second external gas supply source E3 and the first external gas supply source E2 may each include multiple types of facilities, such as a manufacturing facility that emits harmful gases containing nitrogen oxides, nitric oxide, or both, and a gas supply facility that supplies ozone gas. Furthermore, the decomposition module 50 can reduce the O3 content of at least one of the first harmful exhaust gas E20 and the second harmful exhaust gas E30, and the detection module 51 can detect whether the NO concentration of at least one of the first harmful exhaust gas E20 and the second harmful exhaust gas E30 is greater than a predetermined concentration.

[0042] However, the examples given above are merely feasible embodiments and do not limit the present invention.

[0043] Beneficial effects of the examples One of the beneficial effects of this invention is that the harmful exhaust gas removal system Z and bubble generator 1 provided by this invention can effectively remove harmful gases from reaction gases generated in industrial processes by the above-described technical solution.

[0044] Furthermore, the harmful exhaust gas removal system Z of this invention, by installing a bubble generator 1 to generate microbubbles and increase the reaction area, thereby reducing the reaction time, and by combining it with the reaction device 2, can react with harmful gases to effectively convert harmful gases (nitrogen oxides) in the reaction gas generated in the semiconductor production process into water-soluble substances (nitric acid), thereby improving the convenience of subsequent filtration work. In addition, the harmful exhaust gas removal system Z of this invention can further convert the water-soluble substance (nitric acid) into a harmless substance through a neutralization reaction. Therefore, the harmful exhaust gas removal system Z of this invention can be applied in various semiconductor manufacturing facilities and can effectively remove harmful gases (nitrogen oxides) while converting them into harmless or treatable substances.

[0045] The information disclosed above represents only preferred and implementable embodiments of the present invention, and the claims of the present invention are not limited thereto. Therefore, any equivalent technical modifications made using the description and drawings of the present invention are all included within the scope of the claims of the present invention. [Explanation of symbols]

[0046] Z...System for removing harmful exhaust gases 1...Bubble generator 11...Main body of the first device 110...Storage Chamber 12...Bubble supply module 120...Gas transport channel 121...Second opening 13... Stirring module 130...Main body components 1300...Main transport channel 131... Stirring component 1310... Subtransportation channel 1311...First opening 1312...First ring element 1312a...First concave groove portion 1313...Second ring element 1313a...Second concave groove portion 1314... Fixing elements 14...Drive module 15... Irradiation module 2... Reactor 20...Second device body 200... Reaction Chamber 201...electrolyzed water 21... Auxiliary module 22...Acidic liquid 23...Secondary reaction module 3...Circulation device 4...Bubble inspection device 5...Monitoring device 50...Disassembly Module 51...Detection module E1...First external liquid source E10...medium liquid E2...First external gas supply source E20... Primary harmful emission gas E21...First microbubble E3...Second external gas supply source E30... Second harmful emission E31...Second microbubble E4...Second external liquid source E40...Auxiliary fluid M...Microbubble liquid

Claims

1. Including a bubble generator and a reaction apparatus, The bubble generating device is The first apparatus includes a main body, a stirring module, and a drive module. The first apparatus body is arranged to be connected to a first external liquid source and has a storage chamber, the storage chamber is arranged to receive the medium liquid provided by the first external liquid source, The stirring module is suspended in the storage chamber and has a plurality of first openings that penetrate its body, and is configured to receive a first harmful exhaust gas provided by the first external gas supply source, and to supply the first harmful exhaust gas into the storage chamber while converting it into a plurality of first microbubbles through the plurality of first openings, thereby mixing the plurality of first microbubbles with the medium liquid to form a microbubble liquid. The drive module is connected to the main body member so as to be movable and is arranged to move and rotate the main body member. The reaction apparatus is connected to the first apparatus body and has a reaction chamber, the reaction chamber is arranged to store an auxiliary liquid, and the reaction apparatus is arranged to receive the microbubble liquid and react the microbubble liquid with the auxiliary liquid to produce an acidic liquid. A system that removes harmful exhaust gases.

2. The stirring module includes a main body member and a plurality of stirring members, the plurality of stirring members connected to the main body member, the main body member having a main transport channel, one end of the main body member being detachably connected to the first external gas supply source, each stirring member having a sub-transport channel and a plurality of first openings penetrating the main body, each sub-transport channel communicating with the plurality of first openings corresponding to the main transport channel, the main transport channel being arranged to receive the first harmful exhaust gas and supply it to each sub-transport channel, each sub-transport channel being arranged to supply the first harmful exhaust gas into the storage chamber while converting it into a plurality of first microbubbles through the plurality of first openings, the plurality of stirring members and the main body member having a non-parallel shape, and the cross-section of each first opening having a bent shape. The bubble generating device further includes a bubble supply module installed in the storage chamber, the bubble supply module being connected to a second external gas supply source to receive a second harmful exhaust gas provided by the second external gas supply source, and converting the second harmful exhaust gas into a plurality of second microbubbles and supplying them to the microbubble liquid, thereby causing the plurality of second microbubbles to be incorporated into the microbubble liquid. A system for removing harmful exhaust gases as described in claim 1.

3. The bubble supply module has a gas transport channel and a plurality of second openings, each of which penetrates the body of the bubble supply module and is connected to the gas transport channel, and the bubble supply module receives the second harmful exhaust gas through the gas transport channel and uses the plurality of second openings to convert the second harmful exhaust gas into the plurality of second microbubbles. A system for removing harmful exhaust gases as described in claim 2.

4. Each stirring member includes a first annular element, a second annular element, and a plurality of fixed elements, the first annular element and the second annular element each having a first opening that penetrates the main body, a first concave groove portion formed on one surface of the first annular element so as to be recessed inward, a second concave groove portion formed on one surface of the second annular element so as to be recessed inward, the second concave groove portion corresponding to the first concave groove portion forms a subtransport channel, and the plurality of fixed elements connect the first annular element and the second annular element to each other by connecting them. A system for removing harmful exhaust gases as described in claim 2.

5. The reaction apparatus is A second device body connected to the first device body, The second device body includes an auxiliary module, The second apparatus body has the reaction chamber and is connected to a second external liquid source and is arranged to receive the auxiliary liquid provided by the second external liquid source. While the reaction chamber stores the microbubble liquid and the auxiliary liquid, the auxiliary module projects a special beam toward the reaction chamber or provides thermal energy to the reaction chamber, causing the microbubble liquid and the auxiliary liquid to react and produce the acidic liquid. A system for removing harmful exhaust gases as described in claim 1.

6. Including a bubble generator, The bubble generating device is The first apparatus includes a main body, a stirring module, a drive module, and an irradiation module. The first apparatus body is arranged to be connected to a first external liquid source and has a storage chamber, the storage chamber is arranged to receive the medium liquid provided by the first external liquid source, The stirring module is suspended in the storage chamber and has a plurality of first openings that penetrate its body, and is configured to receive a first harmful exhaust gas provided by the first external gas supply source, and to supply the first harmful exhaust gas into the storage chamber while converting it into a plurality of first microbubbles through the plurality of first openings, thereby mixing the plurality of first microbubbles with the medium liquid to form a microbubble liquid. The drive module is connected to the main body member so as to be movable and is arranged to move and rotate the main body member. The irradiation module is located close to the first device body and is positioned to project a special beam toward the first device body. A system that removes harmful exhaust gases.

7. The stirring module includes a main body member and a plurality of stirring members, the plurality of stirring members connected to the main body member, the main body member having a main transport channel, one end of the main body member being detachably connected to the first external gas supply source, each stirring member having a sub-transport channel and a plurality of first openings penetrating the main body, each sub-transport channel communicating with the plurality of first openings corresponding to the main transport channel, the main transport channel being arranged to receive the first harmful exhaust gas and supply it to each sub-transport channel, each sub-transport channel being arranged to supply the first harmful exhaust gas into the storage chamber while converting it into a plurality of first microbubbles through the plurality of first openings, the plurality of stirring members and the main body member having a non-parallel shape, and the cross-section of each first opening having a bent shape. When the special beam is projected onto the microbubble liquid, the microbubble liquid generates an acidic liquid. A system for removing harmful exhaust gases as described in claim 6.

8. Each stirring member includes a first annular element, a second annular element, and a plurality of fixed elements, the first annular element and the second annular element each having a first opening that penetrates the main body, a first concave groove portion formed on one surface of the first annular element so as to be recessed inward, a second concave groove portion formed on one surface of the second annular element so as to be recessed inward, the second concave groove portion corresponding to the first concave groove portion forms a subtransport channel, and the plurality of fixed elements connect the first annular element and the second annular element to each other by connecting them. A system for removing harmful exhaust gases as described in claim 7.

9. Some of the first microbubbles in the microbubble liquid release the first harmful exhaust gas into the storage chamber, and the system for removing the harmful exhaust gas further includes a monitoring device, the monitoring device is A disassembly module connected to the first device body, The disassembly module and the stirring module are connected to a detection module, The decomposition module is arranged to receive the first harmful exhaust gas and reduce the ozone content, The detection module is configured to receive the first harmful exhaust gas and, upon detecting that the concentration of nitric oxide is greater than a predetermined concentration, to transport the first harmful exhaust gas to the first device body. A system for removing harmful exhaust gases as described in claim 7.

10. The bubble generating device further includes a bubble supply module installed in the storage chamber, the bubble supply module being connected to a second external gas supply source to receive a second harmful exhaust gas provided by the second external gas supply source, and converting the second harmful exhaust gas into a plurality of second microbubbles and supplying them to the microbubble liquid, thereby causing the plurality of second microbubbles to be incorporated into the microbubble liquid. A system for removing harmful exhaust gases as described in claim 6.

11. The bubble supply module has a gas transport channel and a plurality of second openings, each of which penetrates the body of the bubble supply module and is connected to the gas transport channel, and the bubble supply module receives the second harmful exhaust gas through the gas transport channel and uses the plurality of second openings to convert the second harmful exhaust gas into the plurality of second microbubbles, the first harmful exhaust gas includes nitric oxide, ozone or a combination thereof, and the second harmful exhaust gas is nitric oxide, ozone or a combination thereof. A system for removing harmful exhaust gases as described in claim 10.

12. The first apparatus includes a main body, a stirring module, and a drive module. The first apparatus body is arranged to be connected to a first external liquid source and has a storage chamber, the storage chamber is arranged to receive the medium liquid provided by the first external liquid source, The stirring module is suspended in the storage chamber and has a plurality of first openings that penetrate its body, and is configured to receive a first harmful exhaust gas provided by the first external gas supply source, and to supply the first harmful exhaust gas into the storage chamber while converting it into a plurality of first microbubbles through the plurality of first openings, thereby mixing the plurality of first microbubbles with the medium liquid to form a microbubble liquid. The drive module is connected to the main body member so as to be movable and is arranged to move and rotate the main body member. Bubble generator.

13. The stirring module includes a main body member and a plurality of stirring members, the plurality of stirring members being connected to the main body member, the main body member having a main transport channel, one end of the main body member being detachably connected to the first external gas supply source, each stirring member having a sub-transport channel and a plurality of first openings penetrating the main body, each sub-transport channel communicating with the plurality of first openings corresponding to the main transport channel, the main transport channel being arranged to receive the first harmful exhaust gas and supply it to each sub-transport channel, each sub-transport channel being arranged to supply the first harmful exhaust gas into the storage chamber while converting it into a plurality of first microbubbles through the plurality of first openings, the cross-section of each first opening having a bent shape. The bubble generating device further includes a bubble supply module installed in the storage chamber, the bubble supply module being connected to a second external gas supply source to receive a second harmful exhaust gas provided by the second external gas supply source, and converting the second harmful exhaust gas into a plurality of second microbubbles and supplying them to the microbubble liquid, thereby causing the plurality of second microbubbles to be incorporated into the microbubble liquid. The bubble generating device according to claim 12.

14. The bubble supply module has a gas transport channel and a plurality of second openings, each of which penetrates the body of the bubble supply module and is connected to the gas transport channel, and the bubble supply module receives the second harmful exhaust gas through the gas transport channel and uses the plurality of second openings to convert the second harmful exhaust gas into the plurality of second microbubbles, the first harmful exhaust gas includes nitric oxide, ozone or a combination thereof, and the second harmful exhaust gas is nitric oxide, ozone or a combination thereof. The bubble generating device according to claim 13.

15. Each stirring member includes a first annular element, a second annular element, and a plurality of fixed elements, the first annular element and the second annular element each having a first opening that penetrates the main body, a first concave groove portion formed on one surface of the first annular element so as to be recessed inward, a second concave groove portion formed on one surface of the second annular element so as to be recessed inward, the second concave groove portion corresponding to the first concave groove portion forms a sub-transport channel, the plurality of fixed elements connect the first annular element and the second annular element to each other by connecting them, and the first harmful exhaust gas includes nitric oxide or both nitric oxide and ozone. The bubble generating device according to claim 13.

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