Three-dimensional shape measuring device

Abstract

To provide a three-dimensional shape measuring apparatus capable of measuring a shape with high accuracy over a wide range on a surface of a measurement subject.SOLUTION: A measurement subject S is imaged in a state where the measurement subject S is at each of a plurality of set measurement angular positions. Three-dimensional shape data on the measurement subject S corresponding to each measurement angular position is generated on the basis of image data obtained by the imaging. A first marker M1 is imaged in a state where the measurement subject S is at least one measurement angular position. Three-dimensional shape data on the first marker M1 corresponding to the measurement angular position is generated on the basis of the image data obtained by the imaging. A plurality of pieces of three-dimensional shape data on the measurement subject S corresponding to the plurality of measurement angular positions respectively are corrected on the basis of the generated three-dimensional shape data and dimensions of the first marker M1. The plurality of pieces of corrected three-dimensional shape data on the measurement subject S are synthesized.SELECTED DRAWING: Figure 15

Description

[Technical field]

[0001] The present invention relates to a three-dimensional shape measuring device that optically measures the three-dimensional shape of a measurement object. [Background technology]

[0002] A three-dimensional shape measuring device is used to measure the three-dimensional shape of a measurement object. In the shape measuring device of Patent Document 1, as an example of a three-dimensional shape measuring device, a light projecting unit sequentially projects a plurality of measurement lights having a plurality of patterns onto a measurement object placed on a stage from a position obliquely above the measurement object. When each measurement light is projected, an image of the measurement object is captured by a light receiving unit arranged above the stage. This results in the acquisition of a plurality of images onto which the patterns of the measurement light are projected. Based on the acquired plurality of images, data indicating the three-dimensional shape of the measurement object is generated by a triangulation method.

[0003] Here, the stage is configured so that the mounting surface on which the measurement object is placed is movable in the X and Y directions parallel to the mounting surface and rotatable around an axis perpendicular to the mounting surface, allowing the user to measure the shape of a desired part of the measurement object by moving or rotating the mounting surface with the measurement object placed on the stage. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2014-055814 A Summary of the Invention [Problem to be solved by the invention]

[0005] In addition to the above examples, there is a three-dimensional shape measuring device that rotates a measurement object held by a holding unit around a predetermined rotation axis, captures an image of the measurement object, and measures the three-dimensional shape based on multiple image data obtained by capturing the image. In such a three-dimensional shape measuring device, for example, before measuring the shape of the measurement object, calibration is performed to measure the shape of the measurement object with high accuracy.

[0006] Specifically, the shape of a calibration tool having a predetermined shape is measured according to predetermined conditions. Based on the measurement results, parameters for measuring the shape of the measurement object are adjusted. Alternatively, an arithmetic expression for correcting the measurement results of the shape of the measurement object is calculated.

[0007] However, the calibration tool and the measurement object do not necessarily have the same or similar shapes. In addition, the weight of the calibration tool and the weight of the measurement object may differ significantly. Therefore, depending on the relationship between the shapes and weights of the calibration tool and the measurement object, it may not be possible to measure the shape of the measurement object with high accuracy even if the parameters calculated by calibration or the calculation formula for correction are used.

[0008] An object of the present invention is to provide a three-dimensional shape measuring device capable of measuring the shape over a wide range on the surface of a measurement object with high accuracy. [Means for solving the problem]

[0009] (1) A three-dimensional shape measuring device according to the present invention includes a rotation unit including a holder for holding a measurement object and a rotation drive unit for rotating the holder around a rotation axis extending in one direction; a camera having an optical axis intersecting the rotation axis and capturing an image of the measurement object held in the holder to generate image data; a memory unit for storing dimensions of a calibration tool; and a processor, wherein the processor includes a rotation control process for controlling the rotation unit so that the measurement object held in the holder is rotated sequentially through a plurality of different rotation angles around the rotation axis; and a camera control process for controlling the camera so that the measurement object is captured at the plurality of different rotation angles and a plurality of image data of the measurement object is generated. a control process, a three-dimensional shape data generation process for generating a plurality of three-dimensional shape data of the measurement object corresponding to a plurality of different rotation angles based on a plurality of image data of the measurement object generated by imaging the measurement object at a plurality of different rotation angles, and generating three-dimensional shape data of the calibration tool based on image data of the calibration tool generated by imaging the calibration tool rotating together with the holding part at at least one rotation angle, and a data correction process for correcting the three-dimensional shape data of the measurement object corresponding to a plurality of different rotation angles based on the three-dimensional shape data of the calibration tool and the dimensions of the calibration tool stored in the memory unit; Data correction processing and a data synthesis process for further synthesizing a plurality of pieces of three-dimensional shape data of the measurement object corrected by the above-mentioned method.

[0010] In the three-dimensional shape measuring device, the calibration tool and the measurement object are imaged by a camera while the measurement object is held by a holding part, and three-dimensional shape data of the calibration tool and three-dimensional shape data of the measurement object are generated. The three-dimensional shape data of the measurement object is corrected based on the three-dimensional shape data of the calibration tool and the dimensions of the calibration tool.

[0011] In this case, the three-dimensional shape data of the calibration tool is generated with the measurement object held by the holding part, so when the rotational state of the holding part changes as a result of the holding part holding the measurement object, the rotational state of the calibration tool also changes in the same manner as the holding part. Therefore, the three-dimensional shape data of the calibration tool is more suitable for correcting multiple three-dimensional shape data of the measurement object compared to when the three-dimensional shape data of the calibration tool is generated with the measurement object not held by the holding part. As a result, it becomes possible to measure the shape with high accuracy over a wide range on the surface of the measurement object.

[0012] (2) The data correction process may include a process of correcting a plurality of pieces of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles, based on the three-dimensional shape data of the calibration tool and the dimensions of the calibration tool stored in the storage unit, so that a deviation between the plurality of pieces of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles is reduced. This allows the three-dimensional shape data of the measurement object to be appropriately corrected.

[0013] (3) The calibration tool has a cylindrical outer peripheral surface with known dimensions and is provided so that the center of the calibration tool is located on a line including the rotation axis, and the data correction process may include a process of calculating the center of the calibration tool from the shape of a part of the outer peripheral surface of the calibration tool in the three-dimensional shape data of the calibration tool, calculating the rotation axis from the calculated center of the calibration tool, and correcting the multiple three-dimensional shape data corresponding to the multiple different rotation angles based on the calculated rotation axis. In this case, the multiple three-dimensional shape data can be corrected in a simple manner so that the deviation between the multiple three-dimensional shape data before synthesis is reduced.

[0014] (4) The camera control process may include a process of controlling the camera so that the measurement object and the calibration tool are imaged at a plurality of different rotation angles, and the data correction process may include a process of calculating a center of a plurality of three-dimensional shape data of the calibration tool corresponding to the plurality of different rotation angles, and correcting the plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles so that the centers of the calibration tools on the plurality of three-dimensional shape data calculated for each of the plurality of different rotation angles coincide with each other. In this case, the plurality of three-dimensional shape data can be corrected in a simple manner so that the deviation between the plurality of three-dimensional shape data before synthesis is reduced.

[0015] (5) The calibration tool may include a first calibration tool having a cylindrical outer peripheral surface and being attached to the rotation unit so as to be adjacent to the holding portion in the direction of the rotation axis, the center of the first calibration tool being located on a line including the rotation axis, the camera control process may include a process of controlling the camera so that the first calibration tool and the measurement object are imaged at a plurality of different rotation angles, and the three-dimensional shape data generation process may include a process of generating a plurality of three-dimensional shape data of the first calibration tool and three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles based on image data generated by imaging the measurement object at the plurality of different rotation angles.

[0016] In this case, the multiple pieces of three-dimensional shape data of the measurement object can be corrected based on the multiple pieces of three-dimensional shape data of the first calibration tool, thereby making it possible to acquire the three-dimensional shape data of the measurement object with high accuracy.

[0017] (6) The calibration tool further includes a second calibration tool having a cylindrical outer circumferential surface and attached to the measurement object held by the holding portion, the camera control process includes a process of controlling the camera so that the measurement object, the first calibration tool, and the second calibration tool are imaged at a plurality of different rotation angles, and the three-dimensional shape data generation process includes a process of generating a plurality of three-dimensional shape data of the first calibration tool, a plurality of three-dimensional shape data of the second calibration tool, and a plurality of three-dimensional shape data of the measurement object, each corresponding to the plurality of different rotation angles, based on image data generated by imaging the measurement object, the first calibration tool, and the second calibration tool at the plurality of different rotation angles. The data correction process may include a process of calculating a center of the first calibration tool based on each of a plurality of three-dimensional shape data of the first calibration tool corresponding to a plurality of different rotation angles and the dimensions stored in the memory unit, and a process of calculating a rotation center of the second calibration tool based on each of a plurality of three-dimensional shape data of the second calibration tool corresponding to a plurality of different rotation angles and the dimensions stored in the memory unit, and correcting the plurality of three-dimensional shape data of the measured object corresponding to the plurality of different rotation angles based on the calculated center of the first calibration tool and rotation center of the second calibration tool.

[0018] In this case, the multiple pieces of three-dimensional shape data of the measurement object can be corrected based on the multiple pieces of three-dimensional shape data of the first calibration tool located near the holder and the multiple pieces of three-dimensional shape data of the second calibration tool attached to the measurement object, thereby making it possible to obtain the three-dimensional shape data of the measurement object with higher accuracy.

[0019] (7) The three-dimensional shape measuring device further includes an operating unit that is operated to specify a correction mode of the processor, and the processor is configured to be able to execute a data correction process in a correction mode specified by the operating unit out of a first correction mode and a second correction mode, and the first correction mode is a mode in which, in the data correction process, multiple three-dimensional shape data of the measured object corresponding to multiple different rotation angles are corrected based on three-dimensional shape data of the calibration tool corresponding to at least one rotation angle and the dimensions of the calibration tool stored in the memory unit, and the second correction mode is a mode in which, in the data correction process, when multiple three-dimensional shape data of the measured object corresponding to multiple different rotation angles are generated by the three-dimensional shape data generation process, the multiple three-dimensional shape data of the measured object corresponding to multiple different rotation angles respectively, are corrected so that common portions of the surfaces of the measured object coincide with each other.

[0020] In the first correction mode, the three-dimensional shape data of the measurement object is corrected using a calibration tool, so that the three-dimensional shape data of the measurement object can be obtained with high accuracy. However, in order to obtain the three-dimensional shape data of the calibration tool, it is necessary to image the component tool. On the other hand, in the second correction mode, it is not necessary to image the calibration tool, so that shape measurement can be performed in a shorter time than in the first correction mode. However, since a calibration tool is not used, the measurement accuracy is reduced compared to when the three-dimensional shape data of the measurement object is corrected in the first correction mode.

[0021] According to the above configuration, the user can select the first or second correction mode depending on the application, thereby improving the convenience of three-dimensional shape measurement.

[0022] (8) The three-dimensional shape measuring device further includes a drive unit that moves the camera relative to the rotation unit in the direction of the rotation axis, and the processor is further configured to execute an area setting process that sets a measurement area in a direction along the rotation axis to be imaged by the camera at each of a plurality of different rotation angles, and a movement control process that controls the drive unit so that the camera moves relative to the rotation unit at each of the plurality of different rotation angles, and the calibration tool is provided adjacent to the holding unit or the measurement object held by the holding unit in the direction of the rotation axis, and the camera control process includes a process of controlling the camera so that the measurement area set by the area setting process is imaged at each of the plurality of different rotation angles, and the three-dimensional shape data generation process includes a process of generating a plurality of three-dimensional shape data respectively corresponding to a plurality of portions of the measurement object based on a plurality of image data generated by imaging the measurement area set by the area setting process at each of the plurality of different rotation angles, and the data synthesis process 3D shape data generation processing and a process of synthesizing the multiple three-dimensional shape data generated by the data correction process and corrected by the data correction process to generate three-dimensional shape data corresponding to each of the multiple different rotation angles, and the area setting process may include a process of setting a measurement area having a first length in the direction of the rotation axis so as to include an area where the calibration tool and the measurement object are present when a first correction mode is designated as the correction mode of the processor, and setting a measurement area having a second length shorter than the first length in the direction of the rotation axis so as to not include the area where the calibration tool is present and to include an area where the measurement object is present when a second correction mode is designated as the correction mode of the processor.

[0023] In this case, when the first correction mode is specified, the measurement area is set so as to include the area in which the calibration tool and the measurement object are present. As a result, three-dimensional shape data of the calibration tool and the measurement object is obtained, and it becomes possible to correct the three-dimensional shape data of the measurement object based on the three-dimensional shape data of the calibration tool. Therefore, it is possible to obtain the three-dimensional shape data of the measurement object with high accuracy.

[0024] On the other hand, when the second correction mode is specified, the measurement area is set so as not to include the area where the calibration tool is present, thereby reducing the measurement area and shortening the time required for imaging to generate three-dimensional shape data.

[0025] (9) The operation unit may be further operable to specify a measurement area, and the area setting process may include a process of further setting the specified area as the measurement area when the first correction mode is specified as the correction mode of the processor and the measurement area is specified by the operation unit. In this case, the user can appropriately set the range of the measurement area in the direction of the rotation axis according to the position of the calibration tool relative to the holder and the measurement object. Effect of the Invention

[0026] According to the present invention, it is possible to measure the shape of a wide area on the surface of a measurement object with high accuracy. [Brief description of the drawings]

[0027] [Figure 1] 1 is a block diagram showing a configuration of a shape measuring device according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic diagram showing a configuration of a measurement unit of the shape measuring device of FIG. 1. [Diagram 3] FIG. 2 is an external perspective view of a measurement unit of the shape measuring device of FIG. 1. [Figure 4] 4A to 4C are diagrams for explaining the configuration of a rotation unit and the attachment and detachment of the rotation unit to a stage. [Diagram 5] FIG. 4 is an external perspective view for explaining details of the configuration of a holding portion. [Figure 6] FIG. 4 is an external perspective view for explaining details of the configuration of a holding portion. [Figure 7] FIG. 4 is an external perspective view for explaining details of the configuration of a holding portion. [Figure 8] 2 is a diagram for explaining a preferable movable stroke range in the Z direction of the stage in FIG. 1. FIG. [Figure 9] 2 is a diagram for explaining a preferable movable stroke range in the Z direction of the stage in FIG. 1. FIG. [Figure 10] 2 is a diagram for explaining a preferable movable stroke range in the Z direction of the stage in FIG. 1. FIG. [Figure 11] FIG. 1 is a diagram for explaining the principle of a triangulation method. [Figure 12] 11 is a diagram for explaining an example of generating a plurality of pieces of three-dimensional shape data by moving the top surface of the stage in the XY directions. FIG. [Figure 13] 13 is a diagram for explaining an example of generating a plurality of pieces of three-dimensional shape data by moving the top surface of the stage in the Z direction. FIG. [Figure 14] 11 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by rotating a measurement object around a rotation axis using a rotation unit. FIG. [Figure 15] FIG. 11 is a diagram for explaining a first calibration function. [Figure 16] FIG. 11 is a diagram for explaining a second calibration function. [Figure 17] 13 is a diagram for explaining an example of a case where three-dimensional shape data is corrected using only the deviation of the rotation axis at the position of the second marker. FIG. [Figure 18] FIG. 11 is a diagram for explaining a third calibration function. [Figure 19] 4 is a flowchart showing a procedure for measuring the shape of a measurement object using the shape measuring device of FIG. 1. [Figure 20] 4 is a flowchart showing a procedure for measuring the shape of a measurement object using the shape measuring device of FIG. 1. [Figure 21] 10 is a flowchart showing a procedure for setting a measurement area for performing shape measurement of a measurement object involving rotation. [Figure 22] 13 is a diagram showing an example of a basic measurement screen displayed on the display unit when the power supply of the shape measuring device is turned on in a state in which the rotation unit is not attached to the stage; FIG. [Figure 23]23 is a diagram showing an example of a region setting screen displayed on a display unit when the region setting button in FIG. 22 is operated. FIG. [Figure 24] FIG. 13 is a diagram showing an example of a basic measurement screen displayed on the display unit with a rotation unit attached to the stage. [Diagram 25] 25 is a diagram for explaining the operation of the shape measuring device executed in response to the operation of the box portion button in FIG. 24. FIG. [Figure 26] 25 is a diagram showing an example of a region setting screen displayed on the display unit when the box portion button in FIG. 24 is operated. FIG. [Figure 27] 25 is a diagram showing an example of a region setting screen displayed on the display unit when the box entire perimeter button in FIG. 24 is operated. FIG. [Figure 28] FIG. 25 is a diagram showing an example of a region setting screen displayed on the display unit by operating the axis buttons in FIG. 24. [Figure 29] 25 is a diagram showing an example of a sub-display area displayed on the display unit when the rotation detail button in FIG. 24 is operated. FIG. [Diagram 30] FIG. 29 is a diagram showing an example of a sub-display area displayed on the display unit when the edit button in FIGS. 26 to 28 is operated. [Diagram 31] 31 is a diagram showing an example of a region setting screen displayed on the display unit when a first calibration checkbox in FIG. 30 is checked. FIG. [Diagram 32] 31 is a diagram showing an example of a region setting screen that is displayed on the display unit when a check mark is placed in the second calibration checkbox in FIG. 30. FIG. [Diagram 33] 33 is a diagram showing an example of a region setting screen displayed on the display unit when a marker inversion checkbox in FIG. 32 is checked. FIG. [Diagram 34] 13 is a diagram showing an example of a region setting screen displayed on the display unit in a state in which new measurement regions for a first marker and a second marker have been set. FIG. [Diagram 35] FIG. 1 is an external perspective view showing an example of shape measurement of a measurement object using a rotation unit. [Diagram 36]36 is a diagram showing an example of a three-dimensional shape image based on all three-dimensional shape data obtained by the shape measurement of FIG. 35. [Figure 37] 37 is a diagram in which the three-dimensional shape image corresponding to the upper surface of the stage is removed from the three-dimensional shape image in FIG. 36. [Figure 38] FIG. 2 is a block diagram showing a functional configuration of a CPU in FIG. [Figure 39] 11 is a flowchart showing an example of a shape measurement process executed by a CPU. [Diagram 40] 11 is a flowchart showing an example of a shape measurement process executed by a CPU. [Diagram 41] 13 is a flowchart showing an example of a measurement area setting process executed by a CPU. [Diagram 42] 13 is a flowchart showing an example of a measurement area setting process executed by a CPU. [Diagram 43] 13 is a diagram showing an example of a region setting screen capable of receiving a request as to whether or not to set a measurement range of a measurement object in the Z direction. FIG. [Diagram 44] 13 is a diagram showing an example of a region setting screen for setting a measurement range in the Z direction of a measurement object. FIG. [Diagram 45] 11 is a diagram for explaining a function of determining whether or not an object to be measured interferes with a stage. FIG. [Diagram 46] 13A and 13B are diagrams illustrating an example of the configuration of a rotation unit according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] Hereinafter, a three-dimensional shape measuring apparatus according to an embodiment of the present invention will be described with reference to the drawings. In the following description, the three-dimensional shape measuring apparatus will be abbreviated to shape measuring apparatus.

[0029] [1] Configuration of shape measurement device Fig. 1 is a block diagram showing the configuration of a shape measuring device according to an embodiment of the present invention. Fig. 2 is a schematic diagram showing the configuration of a measurement unit of the shape measuring device 500 of Fig. 1. Fig. 3 is a perspective view showing the appearance of the measurement unit of the shape measuring device 500 of Fig. 1.

[0030] As shown in Fig. 1, the shape measuring device 500 includes a measuring unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400. The measuring unit 100 is, for example, a microscope, and includes a plurality of light projecting units 110A and 110B, a light receiving unit 120, an illumination light output unit 130, a stage 140, a control board 150, and a rotation unit 190. As shown in Fig. 2, each of the light projecting units 110A and 110B includes a measurement light source 111, a pattern generating unit 112, a plurality of lenses 113, 114, and 115, an aperture 116, and a plurality of folding mirrors 117 and 118. The light receiving unit 120 includes a plurality of cameras 121A and 121B, a plurality of lenses 122, 123A, and 123B, a half mirror 124, and an aperture 125A and 125B.

[0031] In the measurement unit 100, a measurement space 101 in which the shape of the measurement object S can be measured is determined based on the positional relationship between the light projecting units 110A and 110B and the light receiving unit 120. In Figures 2 and 3, the measurement space 101 is indicated by a dashed line. A part of the upper surface 141s of the stage 140 is located in the measurement space 101. The measurement object S is placed in the measurement space 101 by placing the measurement object S on the upper surface 141s of the stage 140 or by holding the measurement object S by a rotation unit 190 described later.

[0032] 2 and 3, two directions perpendicular to each other on the upper surface 141s of the stage 140 are defined as the X direction and the Y direction, and are indicated by the arrows X and Y, respectively. The X direction is parallel to the front-rear direction of the measurement unit 100, and the Y direction is parallel to the left-right direction of the measurement unit 100. The direction perpendicular to the upper surface 141s of the stage 140 is defined as the Z direction, and is indicated by the arrow Z.

[0033] As shown in FIG. 3, the stage 140 is provided on a pedestal 990. A support 991 is provided so as to extend upward from the pedestal 990. An optical system support 992 is attached to the upper end of the support 991. The optical system support 992 supports the light receiving unit 120 so as to be located above the stage 140. The optical system support 992 supports the two light projecting units 110A and 110B so as to be located diagonally above the stage 140. The two light projecting units 110A and 110B are arranged so as to be aligned in the X direction. More specifically, the two light projecting units 110A and 110B are arranged symmetrically with respect to a plane that includes the optical axis ROA of the light receiving unit 120 and is perpendicular to the X direction. The two light projecting units 110A and 110B and the light receiving unit 120 are accommodated in a head casing 160 (FIGS. 8 to 10) described later while being supported by the optical system support 992.

[0034] The measurement light source 111 of each of the light projectors 110A and 110B is, for example, a halogen lamp that emits white light, but may be another light source such as a white LED (light emitting diode) that emits white light.

[0035] As shown in FIG. 2 and FIG. 3, the light emitted from the measurement light source 111 is appropriately collected by the lens 113, and then reflected by the folding mirror 117 to enter the pattern generating unit 112. The pattern generating unit 112 is, for example, a DMD (digital micromirror device). The pattern generating unit 112 may be a transmissive LCD (liquid crystal display), a reflective LCD, an LCOS (liquid crystal on silicon), or a mask. The pattern generating unit 112 generates a light beam (hereinafter referred to as pattern light) having a preset shape measurement pattern and a preset intensity (brightness) from the incident light, and emits the generated pattern light from a pattern emission surface 112S (FIG. 3).

[0036] The pattern light emitted by the pattern generating unit 112 is magnified by a plurality of lenses 114, 115 and an aperture 116, and then reflected by a bending mirror 118, and is irradiated onto a measurement target S on a stage 140. In this embodiment, the plurality of lenses 114, 115 and an aperture 116 form a double-telecentric optical system TT (FIG. 3).

[0037] In the light receiving unit 120, the pattern light reflected by the measurement target S toward the upper side of the stage 140 is incident on the lens 122 of the light receiving unit 120. A part of the pattern light incident on the lens 122 passes through the half mirror 124, is collected and imaged by the lens 123A and the aperture 125A, and is received by the camera 121A. The rest of the pattern light incident on the lens 122 is reflected by the half mirror 124, is collected and imaged by the multiple lenses 123B and the aperture 125B of the light receiving unit 120, and is received by the camera 121B.

[0038] In light receiving section 120 according to this embodiment, lenses 122 and 123A and aperture 125A form one double-sided telecentric optical system corresponding to camera 121A. Lenses 122 and 123B and aperture 125B form another double-sided telecentric optical system corresponding to camera 121B.

[0039] Each of the cameras 121A and 121B is, for example, a CCD (charge-coupled device) camera including an imaging element 121a and a lens. The imaging element 121a is, for example, a monochrome CCD (charge-coupled device). The imaging element 121a may be another imaging element such as a CMOS (complementary metal-oxide semiconductor) image sensor. An analog electrical signal (hereinafter referred to as a light-receiving signal) corresponding to the amount of received light is output from each pixel of the imaging element 121a to the control board 150 (FIG. 1).

[0040] In this example, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light in a time-division manner to the measurement object S. According to this configuration, a color image of the measurement object S can be captured by the light receiving unit 120 using a monochrome CCD.

[0041] The magnification of lens 123A is lower than that of lens 123B. Alternatively, the magnification of the lens of camera 121A is lower than that of camera 121B. Therefore, camera 121A is used as a low-magnification camera, and camera 121B is used as a high-magnification camera. The user can select either the low-magnification camera or the high-magnification camera as the camera to be used for observing and measuring the shape of the measurement target S, for example, by operating operation unit 250 described later.

[0042] An A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the control board 150. The light reception signals output from the cameras 121A and 121B are sampled at a constant sampling period by the A / D converter of the control board 150 and converted into digital signals based on the control of the control unit 300. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

[0043] 1, the PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a working memory 230, a storage device 240, and an operation unit 250. The operation unit 250 also includes a keyboard and a pointing device. A mouse, a joystick, or the like is used as the pointing device.

[0044] A system program is stored in the ROM 220. The working memory 230 is made up of a RAM (random access memory) and is used for processing various types of data. The storage device 240 is made up of a hard disk or the like. A shape measurement program for measuring the shape of the measurement object S is stored in the storage device 240. The storage device 240 is also used to save various types of data related to the shape measurement of the measurement object S.

[0045] The CPU 210 executes the shape measurement program stored in the storage device 240. As a result, the CPU 210 generates image data based on pixel data provided from the control board 150. The CPU 210 also performs various processes on the generated image data using the work memory 230, and displays an image based on the image data on the display unit 400. Furthermore, the CPU 210 provides drive pulses to a stage drive unit 146 and a rotation drive unit 192, which will be described later. Specific functions achieved by the CPU 210 executing the shape measurement program will be described later. The display unit 400 is configured, for example, with an LCD panel or an organic EL (electroluminescence) panel.

[0046] The stage 140 includes an XY stage 141 and a Z stage 142. The XY stage 141 has an upper surface 141s, and has an X-direction movement mechanism and a Y-direction movement mechanism. The X-direction movement mechanism is a mechanism for moving the upper surface 141s in the X direction. The Y-direction movement mechanism is a mechanism for moving the upper surface 141s in the Y direction. The Z stage 142 has a Z-direction movement mechanism for moving the upper surface 141s in the Z direction. The stage 140 may include a θ stage or a tilt stage. The θ stage is a stage having a mechanism that can rotate around an axis perpendicular to the upper surface 141s, for example. The tilt stage is a stage having a mechanism that can tilt with an axis parallel to the upper surface 141s as a reference.

[0047] Here, a plane located at the focus of the light receiving unit 120 and perpendicular to the optical axis ROA of the light receiving unit 120 is called the focal plane of the light receiving unit 120. As shown in Fig. 2 and Fig. 3, the relative positional relationship among the light projecting units 110A and 110B, the light receiving unit 120, and the stage 140 is set so that the optical axis TOA1 of the light projecting unit 110A directed from the light projecting unit 110A to the upper surface 141s of the stage 140, the optical axis TOA2 of the light projecting unit 110B directed from the light projecting unit 110B to the upper surface 141s of the stage 140, and the optical axis ROA of the light receiving unit 120 directed from the upper surface 141s of the stage 140 to the light receiving unit 120 intersect with each other on the focal plane of the light receiving unit 120.

[0048] In addition, a plane that includes the focal point of light-projecting unit 110A and is parallel to the XY directions is called the focal plane of light-projecting unit 110A, and a plane that includes the focal point of light-projecting unit 110B and is parallel to the XY directions is called the focal plane of light-projecting unit 110B. In this case, light-projecting units 110A and 110B are configured so that the focal plane of light-projecting unit 110A and the focal plane of light-projecting unit 110B intersect at a position that includes the focal point of light-receiving unit 120.

[0049] With the above-mentioned configuration, in the measurement unit 100, a space is formed where the irradiation area of ​​the measurement light by the light projector 110A, the irradiation area of ​​the measurement light by the light projector 110B, and the imaging area (imaging field of view) of the light receiver 120 overlap. The overlapping space of these three areas is the measurement space 101. The size of the measurement space 101 differs depending on the camera magnification (high magnification or low magnification) selected by the user. The size of the measurement space 101 when low magnification is selected is larger than the size of the measurement space 101 when high magnification is selected.

[0050] Stepping motors are used for the X-direction movement mechanism, the Y-direction movement mechanism, and the Z-direction movement mechanism of the stage 140. As shown in Fig. 1, the measurement unit 100 includes a stage operation unit 145 and a stage drive unit 146 as components associated with the stage 140. The X-direction movement mechanism, the Y-direction movement mechanism, and the Z-direction movement mechanism of the stage 140 are driven by the stage operation unit 145 or the stage drive unit 146 in Fig. 1.

[0051] A user can manually operate the stage operation unit 145 to move the upper surface 141s of the stage 140 in the X-direction, Y-direction, or Z-direction relative to the light receiving unit 120. The stage driving unit 146 supplies current to each stepping motor of the stage 140 based on a driving pulse provided by the PC 200, thereby moving the upper surface 141s of the stage 140 in the X-direction, Y-direction, or Z-direction relative to the light receiving unit 120.

[0052] An encoder is attached to each of the stepping motors used in the X-direction movement mechanism, the Y-direction movement mechanism, and the Z-direction movement mechanism of the stage 140. An output signal of each encoder is provided to, for example, the CPU 210. The CPU 210 can calculate the amount of change in the position in the X direction (X position), the position in the Y direction (Y position), or the position in the Z direction (Z position) of the upper surface 141s of the stage 140 based on the signal provided from each encoder of the stage 140.

[0053] In the stage 140, a reference position in the XY directions is determined in advance for the XY stage 141. The reference position is, for example, the position of the XY stage 141 when the center of the upper surface 141s is located on the optical axis ROA of the light receiving unit 120. The reference position may be determined so that the entire measurement space 101 overlaps with the upper surface 141s of the stage 140 in a plan view. Therefore, as long as the measurement space 101 is located on the upper surface 141s of the stage 140, the reference position may be the position of the XY stage 141 when a part of the upper surface 141s other than the center is located on the optical axis ROA of the light receiving unit 120.

[0054] 2 and 3, XY stage 141 according to this embodiment has a rectangular plate shape extending in the X direction. A rotation unit 190 is provided at an end of XY stage 141 in the X direction. Rotation unit 190 is configured to be attachable to and detachable from stage 140.

[0055] Fig. 4 is a diagram for explaining the configuration of the rotation unit 190 and the attachment and detachment of the rotation unit 190 to the stage 140. Fig. 4(a) shows a plan view of the rotation unit 190. Fig. 4(b) shows a plan view of the XY stage 141. Fig. 4(c) shows a plan view of the XY stage 141 to which the rotation unit 190 is attached.

[0056] As shown in FIG. 4(a), the rotation unit 190 includes a holder 191 and a rotation drive unit 192. The rotation drive unit 192 has a configuration in which a stepping motor sm and a power supply unit pp are housed in a casing having a substantially rectangular parallelepiped shape. The stepping motor sm is used to rotate the holder 191. The power supply unit pp supplies power to the stepping motor sm. The casing of the rotation drive unit 192 has two end faces es1, es2 facing each other in the longitudinal direction, and two side faces ss1, ss2 facing each other in the lateral direction.

[0057] The holding unit 191 is a chuck configured to be able to hold the measurement object S by clamping the measurement object S between a pair of holding pieces 92, 93 (FIGS. 5 to 7) described later, and is provided so as to protrude a predetermined distance from the side surface ss1. The holding unit 191 is supported by a stepping motor sm of the rotation drive unit 192 so as to be rotatable around a rotation axis perpendicular to the side surface ss1. The holding unit 191 will be described in detail later. The other side surface ss2 of the rotation drive unit 192 is provided with a holding dial 195 for adjusting the distance between the pair of holding pieces 92, 93 (FIGS. 5 to 7) described later.

[0058] An attachment portion 199 for attaching the rotation unit 190 to the XY stage 141 is provided at the lower ends of both end faces es1 and es2 of the rotation drive portion 192. A through hole into which a screw can be inserted is formed in the attachment portion 199. In addition, a cable 193 is provided in the rotation drive portion 192 so as to extend outward from a power supply unit pp in the casing through one end face es2. A connector 194 is provided at the tip of the cable 193. The cable 193 and the connector 194 are used to supply power to the power supply unit pp from a rotation unit substrate (described later) provided inside the XY stage 141, and to exchange signals between the rotation unit substrate and the power supply unit pp.

[0059] 4(b), the upper surface 141s of the XY stage 141 has a rectangular shape extending in the X direction. Two screw holes 141h corresponding to two mounting portions 199 of the rotation unit 190 are formed at one end of the upper surface 141s in the X direction. In this example, the XY stage 141 is in the reference position. In this case, the outer edge of the measurement space 101 surrounds the center of the upper surface 141s of the XY stage 141 in a plan view.

[0060] A control board (hereinafter referred to as a rotation unit board) is provided inside the XY stage 141 for supplying power to the power supply section pp of the rotation unit 190 and for controlling the operation of the rotation drive section 192. A connector 141c for electrically connecting the rotation unit board and the rotation unit 190 is provided on one side of the XY stage 141 facing the front of the measurement section 100.

[0061] As shown in FIG. 4(c), the rotation unit 190 is attached onto the XY stage 141. During this attachment, two mounting portions 199 of the rotation unit 190 are positioned on two screw holes 141h of the XY stage 141. Furthermore, screws are attached to the screw holes 141h through the through holes of the mounting portions 199. This fixes the rotation unit 190 to a predetermined position on the upper surface 141s of the XY stage 141. With the XY stage 141 in the reference position, the rotation unit 190 is located in a space outside the measurement space 101. In this case, since the rotation unit 190 is not located in the measurement space 101, the measurable range of the measurement target S is prevented from being limited by the rotation unit 190.

[0062] Furthermore, when the rotation unit 190 is attached to the XY stage 141, a connector 194 provided on the cable 193 is connected to a connector 141c of the XY stage 141. This enables power to be supplied from the XY stage 141 to the rotation unit 190. Also, a rotation drive section 192 of the rotation unit 190 is controlled by the CPU 210 via the rotation unit board of the XY stage 141.

[0063] An encoder is attached to the stepping motor sm of the rotation drive unit 192. An output signal of the encoder is provided to the CPU 210 by electrically connecting the rotation unit 190 and the XY stage 141. The CPU 210 can calculate the angular position (rotation angle) of the holding unit 191 in the rotation direction based on the signal provided from the encoder of the rotation unit 190.

[0064] Here, the details of the holding portion 191 will be described. Figures 5 to 7 are external perspective views for explaining the details of the configuration of the holding portion 191. As shown in Figure 5, the holding portion 191 includes a rotation support shaft 91, a pair of holding pieces 92, 93, and an opening and closing mechanism (not shown).

[0065] The rotary support shaft 91 is connected to a stepping motor sm of the rotary drive unit 192 and is supported so as to be rotatable around the central axis of the rotary support shaft 91. The pair of holding pieces 92, 93 each have a semi-cylindrical shape and are provided so as to sandwich the tip portion of the rotary support shaft 91 and form a single cylinder with the pair of holding pieces 92, 93. As shown by the outlined arrows in FIG. 5, the opening and closing mechanism (not shown) changes the distance between the pair of holding pieces 92, 93 in response to the operation of the holding dial 195 (FIG. 4(a)) by the user. As a result, as shown in FIG. 6, the holding unit 191 is configured to be able to hold (grasp) the measurement object S by the pair of holding pieces 92, 93 sandwiching a part of the measurement object S.

[0066] A plurality of holes 92h, 93h are formed in end faces 92e, 93e located at the tip of each holding piece 92, 93. Rod-shaped members 94 can be inserted into these holes 92h, 93h. By selectively inserting a predetermined number of rod-shaped members 94 into the holes 92h, 93h of the holding pieces 92, 93, it is also possible to hold the measurement target S using the plurality of rod-shaped members 94, as shown in FIG.

[0067] By placing the measurement target S held by the holder 191 in the measurement space 101, the three-dimensional shape of the upward-facing portion of the measurement target S located in the measurement space 101 can be measured.

[0068] According to the above-described configuration of the holding unit 191, the measurement object S is held in a cantilever manner, and therefore the portion of the measurement object S held by the holding unit 191 is reduced. Therefore, by rotating the measurement object S within the measurement space 101, the three-dimensional shape of a wider range of the surface of the measurement object S can be measured.

[0069] Incidentally, the range of stage 140 that can be moved up and down by the Z-direction movement mechanism (hereinafter referred to as the movable stroke range) is preferably determined based on, for example, the positional relationship between stage 140 and light receiving unit 120. Figures 8 to 10 are diagrams for explaining a preferable movable stroke range in the Z direction of stage 140 in Figure 1.

[0070] 8 to 10 show schematic front views of the measurement unit 100. In addition, in FIG. 8 to FIG. 10, the head casing 160 that houses the light projectors 110A and 110B and the light receiver 120 is shown by a two-dot chain line, and the focal plane 120F of the light receiver 120 is shown by a thick dotted line. Furthermore, the rotation axis RA that passes through the center of the rotation support shaft 91 (FIGS. 5 to 7) in the rotation unit 190 is shown by a dashed line. In this example, the lens 122 (FIG. 2) of the light receiver 120 is located at the lower end of the head casing 160. In addition, in this example, the rotation axis RA extends parallel to the X direction when the rotation unit 190 is attached to the stage 140.

[0071] 8, the stage 140 is preferably configured to be able to be positioned at a height position p1 where at least the upper surface 141s is located on the focal plane 120F of the light receiving unit 120. In this case, the rotation unit 190 is preferably designed so that the dimension (height) dh in the Z direction is smaller than the working distance WD from the lens 122 of the light receiving unit 120 to the focal plane 120F.

[0072] Next, as shown in Fig. 9, the stage 140 is preferably configured so that, with the rotation unit 190 attached, it can be positioned at a height position p2 where at least the rotation axis RA of the rotation unit 190 is located on the focal plane 120F of the light receiving unit 120. To realize the positions shown in the examples of Fig. 8 and Fig. 9, the movable stroke range RM in the Z direction of the stage 140 in Fig. 1 needs to be determined so that the position of the focal plane 120F of the light receiving unit 120 can be adjusted between the upper surface 141s and the rotation axis RA in the Z direction.

[0073] Here, the distance from the top surface 141s to the rotation axis RA in the Z direction is defined as a reference distance RD. In this case, it is more preferable that the stage 140 is configured so as to be able to be positioned at a height position p3 when the focal plane 120F is positioned at a height position that is twice the reference distance RD above the top surface 141s with the rotation unit 190 attached, as shown in FIG.

[0074] According to this configuration, it is possible to perform shape measurement over a wide range for the measurement target S that does not interfere with the top surface 141s during rotation about the rotation axis RA. Therefore, it is preferable that the movable stroke range RM in the Z direction of the stage 140 in Fig. 1 is determined so that the position of the focal plane 120F of the light receiving unit 120 can be adjusted between the top surface 141s and a height position spaced apart by a distance twice the reference distance RD above the top surface 141s.

[0075] 1, the control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projectors 110A and 110B, the light receiver 120, and the control board 150 based on commands from the CPU 210 of the PC 200.

[0076] The illumination light source 320 includes three LEDs that emit, for example, red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, light of any color can be generated from the illumination light source 320. The light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light guiding member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the measurement unit 100 is not provided with the illumination light output unit 130.

[0077] 2 has a circular ring shape and is disposed above the stage 140 so as to surround the light receiving unit 120. This allows the illumination light to be irradiated from the illumination light output unit 130 onto the measurement target S without generating a shadow.

[0078] [2] Three-dimensional shape data showing the three-dimensional shape of the object to be measured (1) Measuring the shape of the object using triangulation In the measuring unit 100, the shape of the measurement target S is measured by a triangulation method. Fig. 11 is a diagram for explaining the principle of the triangulation method. As shown in Fig. 11, for example, an angle γ between the optical axis of the light beam emitted from the light projecting unit 110A and the optical axis of the reflected light incident on the light receiving unit 120 (the optical axis of the light receiving unit 120) is set in advance. The angle γ is greater than 0 degrees and less than 90 degrees.

[0079] When the measurement object S is not placed on the stage 140, the light beam emitted from the light-projecting unit 110A is reflected by a point O on the upper surface 141s of the stage 140 and enters the light-receiving unit 120. On the other hand, when the measurement object S is placed on the stage 140, the light beam emitted from the light-projecting unit 110A is reflected by a point A on the surface of the measurement object S and enters the light-receiving unit 120.

[0080] If the distance in the X direction between points O and A is d, then the height h of point A of the measurement object S relative to the upper surface 141s of the stage 140 is given by h=d÷tan(γ). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between points O and A in the X direction based on the pixel data of the measurement object S provided by the control board 150. In addition, the CPU 210 calculates the height h of point A on the surface of the measurement object S based on the measured distance d. By calculating the heights of all points on the surface of the measurement object S, the three-dimensional shape of the measurement object S is measured.

[0081] During shape measurement using the triangulation method, in order to irradiate all points on the surface of the measurement target S with light, pattern light having various patterns is sequentially emitted from the light-projecting units 110A and 110B in Fig. 1 toward the stage 140. For example, striped pattern light having a linear cross section parallel to the Y direction and aligned in the X direction is emitted multiple times from each of the light-projecting units 110A and 110B while its spatial phase is changed. Also, code-shaped pattern light having a linear cross section parallel to the Y direction and with bright and dark parts aligned in the X direction is emitted multiple times from each of the light-projecting units 110A and 110B while its bright and dark parts are changed into a gray code shape.

[0082] In the CPU 210 (FIG. 1), three-dimensional shape data representing the three-dimensional shape of the measurement object S is generated based on image data of the measurement object S onto which a predetermined pattern light is projected. The three-dimensional shape data includes position data on the surface of the measurement object S. In the measurement unit 100, a three-dimensional coordinate system (hereinafter referred to as the device coordinate system) having a unique positional relationship with the light receiving unit 120 is defined. The device coordinate system in this example includes an X-axis, a Y-axis, and a Z-axis parallel to the X-direction, the Y-direction, and the Z-direction. The position data represents, for example, coordinates in the device coordinate system. In the following description, an image of the measurement object S displayed based on the three-dimensional shape data is referred to as a three-dimensional shape image.

[0083] (2) Synthesis of multiple 3D shape data in the XY direction When the measurement object S is placed on the upper surface 141s of the stage 140 and does not fit within the measurement space 101 in the XY directions, the pattern light is irradiated onto only a part of the upper surface of the measurement object S. Therefore, it is not possible to obtain three-dimensional shape data over a wide range of the surface of the measurement object S.

[0084] Therefore, when the top surface of the measurement object S does not fit within the measurement space 101 in the XY directions, multiple parts of the measurement object S may be imaged by moving the top surface 141s of the stage 140 in the XY directions relative to the light receiving unit 120. In this case, multiple pieces of three-dimensional shape data respectively corresponding to the multiple parts of the measurement object S can be obtained, and the obtained multiple pieces of three-dimensional shape data can be synthesized.

[0085] FIG. 12 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by moving the upper surface 141s of the stage 140 in the XY direction. For example, as shown in FIG. 12(a), a user places a measurement target S on the stage 140. After the position and orientation of the measurement target S are adjusted on the stage 140, an image is captured using pattern light to generate a first three-dimensional shape data. An example of a three-dimensional shape image thus obtained is shown in FIG. 12(e). Note that in the three-dimensional shape images shown in FIG. 12(e)-(h) and FIG. 13(c), (d) and FIG. 14(d)-(f) described later, the dotted lines virtually represent the overall outer shape of the measurement target S.

[0086] 12(a), in this example, when the first three-dimensional shape data is generated, only a portion of the measurement object S in the XY directions is placed in the measurement space 101. Therefore, in the three-dimensional shape image shown in FIG 12(e), a plurality of portions in the XY directions of the top surface of the measurement object S are missing.

[0087] Therefore, as shown in FIG. 12(b) to (d), the upper surface 141s of the stage 140 is moved in the XY direction so that the multiple portions of the measurement object S that are not represented by the first three-dimensional shape data are sequentially placed in the measurement space 101. In addition, each time each portion of the measurement space 101 is placed in the measurement space 101, imaging is performed using pattern light, and the second to fourth three-dimensional shape data are generated. Three-dimensional shape images corresponding to the second to fourth three-dimensional shape data, respectively, are shown in FIG. 12(f) to (h). In this manner, the movement of the stage 140 in the XY direction and the imaging of the measurement object S are repeated, thereby generating multiple three-dimensional shape data corresponding to multiple portions of the upper surface of the measurement object S, respectively. The multiple generated three-dimensional shape data are synthesized to generate three-dimensional shape data covering a wide range of the surface of the measurement object S. In the following description, the synthesis for expanding the target range of the shape measurement of the measurement object S in the XY direction is called planar direction synthesis.

[0088] (3) Synthesis of multiple 3D shape data in the Z direction When the measurement object S is placed on the upper surface 141s of the stage 140, if the upper surface of the measurement object S does not fall within the measurement space 101 (within the range of the depth of field of the light receiving unit 120) in the Z direction, the light receiving unit 120 will only focus on a part of the upper surface of the measurement object S. Therefore, it is not possible to obtain three-dimensional shape data over a wide range of the surface of the measurement object S.

[0089] Therefore, when the top surface of the measurement object S does not fit within the measurement space 101 in the Z direction, multiple parts of the measurement object S may be imaged by moving the top surface 141s of the stage 140 in the Z direction relative to the light receiving unit 120. In this case, multiple pieces of three-dimensional shape data respectively corresponding to the multiple parts of the measurement object S can be obtained, and the obtained multiple pieces of three-dimensional shape data can be synthesized.

[0090] Fig. 13 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by moving the upper surface 141s of the stage 140 in the Z direction. For example, as shown in Fig. 13(a), a user places a measurement target S on the stage 140, and an image is captured using pattern light to generate a first three-dimensional shape data. An example of a three-dimensional shape image obtained in this way is shown in Fig. 13(c).

[0091] 13(a), in this example, when the first three-dimensional shape data is generated, only a portion of the upper surface of the measurement object S in the Z direction is placed within the measurement space 101. Therefore, the three-dimensional shape image shown in FIG 13(c) is missing the uppermost portion of the measurement object S in the Z direction.

[0092] Therefore, as shown in Fig. 13(b), the upper surface 141s of the stage 140 is moved in the Z direction so that the portion of the measurement target S not represented by the first three-dimensional shape data is placed in the measurement space 101. Furthermore, imaging is performed using pattern light, and second three-dimensional shape data is generated. A three-dimensional shape image corresponding to the second three-dimensional shape data is shown in Fig. 13(d).

[0093] In this manner, the movement of the stage 140 in the Z direction and the imaging of the measurement object S are repeated to generate a plurality of three-dimensional shape data respectively corresponding to a plurality of portions of the measurement object S. The generated plurality of three-dimensional shape data are combined to generate three-dimensional shape data covering a wide range of the surface of the measurement object S. In the following description, the combination for expanding the target range for shape measurement of the measurement object S in the Z direction is referred to as height direction combination.

[0094] (4) Synthesis of multiple 3D shape data in the rotation direction Even when the measurement object S held by the rotation unit 190 is placed in the measurement space 101, the pattern light reflected by a portion of the measurement object S not facing the direction of the light receiving unit 120 does not enter the light receiving unit 120. Therefore, when measuring the shape of the measurement object S held by the rotation unit 190, the measurement object S may be rotated around the rotation axis RA to capture images of multiple portions of the measurement object S. In this case, multiple pieces of three-dimensional shape data corresponding to the multiple portions of the measurement object S can be obtained, and the obtained multiple pieces of three-dimensional shape data can be synthesized.

[0095] 14 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by rotating a measuring object S around a rotation axis RA using a rotation unit 190. For example, as shown in Fig. 14(a), a user attaches the measuring object S to a holder 191 of the rotation unit 190. In Figs. 14(a) to (c), the holder 191 that holds the measuring object S is shown typically by a two-dot chain line.

[0096] With the measurement object S held by the rotation unit 190, the measurement object S is aligned so as to be positioned within the measurement space 101. Furthermore, an image is captured using pattern light to generate a first three-dimensional shape data. An example of a three-dimensional shape image thus obtained is shown in FIG. 14(d).

[0097] The measurement object S used in this example has a generally cylindrical shape extending in one direction, and one end of the measurement object S is held by the holding part 191 so that the axis of the measurement object S coincides with the rotation axis RA. Also, a black dot is added to the end of the measurement object S in this example so that the rotation state of the measurement object S can be easily understood.

[0098] 14(a), when the first three-dimensional shape data is generated, only a portion of the outer circumferential surface of the measurement object S facing the light receiving unit 120 is imaged by the light receiving unit 120. Therefore, the three-dimensional shape image shown in FIG 14(d) is missing a relatively wide area of ​​the outer circumferential surface of the measurement object S.

[0099] 14(b) and (c), the rotation unit 190 rotates the measurement object S at angular intervals (predetermined angular pitch) that are integral multiples of a predetermined angle so that multiple portions of the outer circumferential surface of the measurement object S that are not represented by the first three-dimensional shape data are sequentially directed toward the light receiving unit 120. Furthermore, every time the measurement object S rotates by a predetermined angle, an image is captured using pattern light, and second and third three-dimensional shape data are generated. Three-dimensional shape images corresponding to the second and third three-dimensional shape data, respectively, are shown in FIGS. 14(e) and (f).

[0100] In this manner, by repeatedly rotating the measurement object S through a predetermined angle and capturing an image of the measurement object S, a plurality of three-dimensional shape data corresponding to a plurality of portions of the outer peripheral surface of the measurement object S is generated. By synthesizing the generated plurality of three-dimensional shape data, three-dimensional shape data covering a wide range of the surface of the measurement object S (in this example, the entire outer peripheral surface) is generated. In the following description, the synthesis for expanding the target range for shape measurement of the measurement object S in the rotation direction based on the rotation axis RA is referred to as rotational direction synthesis.

[0101] [3] Calibration function for rotation direction synthesis (1) Overview of calibration function As described above, when performing rotational direction synthesis, the measurement object S rotates at a predetermined angular pitch from a predetermined angular position (hereinafter referred to as the reference angular position) with the rotation axis RA as a reference. Also, three-dimensional shape data of the measurement object S is generated when it is at the reference angular position, and three-dimensional shape data of the measurement object S is generated each time it is rotated at the predetermined angular pitch.

[0102] Here, if the rotation axis RA of the rotation unit 190 deviates from the design position defined in the device coordinate system due to a change in the temperature environment or use of the measurement section 100 over time, accurate three-dimensional shape data cannot be obtained. Therefore, the shape measuring device 500 according to this embodiment has first, second and third calibration functions for offsetting the deviation (amount of deviation and direction of deviation) of the generated three-dimensional shape data from the device coordinate system when measuring the shape of the measurement target S using rotation direction synthesis. The first, second and third calibration functions will be described in order.

[0103] (2) First calibration function FIG. 15 is a diagram for explaining the first calibration function. FIG. 15(a) shows a side view of the holding part 191 of the rotation unit 190 as seen in the Y direction. As shown in FIG. 15(a), in the holding part 191, a part of the rotation support shaft 91 located between the rotation drive part 192 and the holding pieces 92, 93 is used as a first marker M1 for the first calibration function. This first marker M1 has a cylindrical outer peripheral surface and is provided so that its center is located on the rotation axis RA of the rotation unit 190. The dimensions of the outer peripheral surface of the first marker M1 are known and are stored, for example, in the storage device 240 of FIG. 1.

[0104] 15(a), it is assumed that the rotation axis RA of the rotation unit 190 is deviated in parallel from an ideal rotation axis DRA that should exist in terms of design in the device coordinate system (hereinafter referred to as the design rotation axis). In this case, in order to obtain accurate three-dimensional shape data for the measurement target S, it is necessary to calculate the deviation sv between the design rotation axis DRA and the rotation axis RA.

[0105] Therefore, in the first calibration function, when measuring the shape of the rotated measurement object S, the shape of the outer circumferential surface of the first marker M1 is measured together with the measurement object S. For example, when the measurement object S rotates around the rotation axis RA from the reference angular position at a pitch of 120°, three-dimensional shape data indicating the outer circumferential surface of the first marker M1 together with the measurement object S is generated at each of the angular positions of 0°, 120°, and 240°.

[0106] The three-dimensional shape data of the first marker M1 corresponding to each of the above three angles has an arc shape in the QQ line cross section (YZ plane perpendicular to the X direction) passing through the first marker M1 in FIG. 15(a), for example. As described above, the dimensions of the outer peripheral surface of the first marker M1 are known. Therefore, as shown by the thick solid line in FIG. 15(b), the center CM1 of the first marker M1 in the YZ plane can be calculated according to the three-dimensional shape data of the arc shape showing a part of the outer peripheral surface of the first marker M1. Note that the circle shown by the dashed line in FIG. 15(b) represents the three-dimensional shape data of the first marker M1 that should originally be generated based on the designed rotation axis DRA.

[0107] The center of the first marker M1 is located on the rotation axis RA. Therefore, in the first calibration function, the calculation of the center of the first marker M1 in a specific YZ plane is equivalent to calculating the position of the rotation axis RA in the specific YZ plane.

[0108] The center CM1 of the first marker M1 on the three-dimensional shape data should essentially overlap with the design rotation axis DRA on the YZ plane. However, if the actual rotation axis RA is deviated from the design rotation axis DRA as described above, the center CM1 of the first marker M1 on the three-dimensional shape data will not overlap with the design rotation axis DRA. Therefore, the deviation sv between the center CM1 of the first marker M1 on the three-dimensional shape data and the design rotation axis DRA is calculated.

[0109] 15(c), the three-dimensional shape data of the first marker M1 corresponding to each of the multiple angular positions can be corrected to cancel the deviation sv calculated at the angular position, thereby making it possible to obtain accurate three-dimensional shape data. In other words, the three-dimensional shape data of the first marker M1 generated at each angular position can be corrected to make the center CM1 of the first marker M1 on the three-dimensional shape data coincide with the designed rotation axis DRA, thereby making it possible to obtain accurate three-dimensional shape data.

[0110] Therefore, the three-dimensional shape data of the measurement object S generated together with the three-dimensional shape data of the first marker M1 is corrected so that the deviation sv calculated at each angular position is offset. This makes it possible to obtain accurate three-dimensional shape data for the measurement object S. As a result, when three-dimensional shape data generated at multiple angular positions is synthesized, it becomes possible to perform accurate shape measurement of the measurement object S over a wide range.

[0111] (3) Second calibration function FIG. 16 is a diagram for explaining the second calibration function. FIG. 16(a) shows a side view of the holding portion 191 of the rotation unit 190 as viewed in the Y direction. In the example of FIG. 16(a), the rotation axis RA of the rotation unit 190 is inclined and deviated from the design rotation axis DRA. In this case, the deviation sv between the design rotation axis DRA and the rotation axis RA varies depending on the position in the X direction. Therefore, even if the three-dimensional shape data of the first marker M1 and the measurement object S is corrected by the first calibration function, accurate three-dimensional shape data cannot be obtained depending on the part of the measurement object S.

[0112] Therefore, in the second calibration function, a second marker M2 is used so that accurate three-dimensional shape data can be obtained even if the actual rotation axis RA is inclined with respect to the design rotation axis DRA. As shown in the balloon in Fig. 16(b), the second marker M2 is composed of a large diameter portion M2a and a small diameter portion M2b. The large diameter portion M2a and the small diameter portion M2b each have a cylindrical shape and are integrally molded so as to be aligned along the axis.

[0113] A magnet is built into the large diameter portion M2a. An adhesive or adhesive sheet is provided on the end face of the large diameter portion M2a to impart adhesiveness. With this configuration, the second marker M2 can be attached and detached to a desired position on the measurement object S made of a ferromagnetic material by magnetic force, and can also be attached and detached to a desired position on the measurement object S made of a non-magnetic material by adhesive force.

[0114] In the second calibration function, for example, a second marker M2 is attached to a portion of the measurement object S that is farthest from the first marker M1. The dimensions of the outer circumferential surfaces of the large diameter portion M2a and the small diameter portion M2b of the second marker M2 are known and are stored, for example, in the storage device 240 of FIG.

[0115] In this state, when measuring the shape of the rotated measurement object S, the measurement object S is rotated to a plurality of predetermined angular positions. In addition, at each of the plurality of angular positions, the shapes of the outer circumferential surfaces of the first marker M1 and the second marker M2 are measured together with the measurement object S. At this time, the deviation sv between the design rotation axis DRA and the rotation axis RA is obtained, for example, in the cross section of the line Q1-Q1 passing through the first marker M1 in FIG. 16(b) by the method described in the first calibration function.

[0116] The second marker M2 is used to obtain the deviation sv between the design rotation axis DRA and the rotation axis RA in the Q2-Q2 line cross section passing through the second marker M2 in Fig. 16(b), for example. Specifically, for the second marker M2, three-dimensional shape data of a plurality of arc shapes corresponding to a plurality of predetermined angular positions is generated so that the entire circumference of the large diameter portion M2a (or the small diameter portion M2b) is covered in the Q2-Q2 line cross section. After that, the three-dimensional shape data of the plurality of arc shapes is synthesized so as to match the known dimensions of the large diameter portion M2a (or the small diameter portion M2b) at each of the plurality of angular positions.

[0117] In this case, as shown in Fig. 16(c), it is possible to calculate the center CM2 of the second marker M2 when the second marker M2 is located at each of a plurality of angular positions on the Q2-Q2 line cross section. This makes it possible to calculate the rotation center of the second marker M2, i.e., the position of the rotation axis RA on the Q2-Q2 line cross section. Then, the deviation sv between the calculated rotation axis RA and the designed rotation axis DRA is calculated.

[0118] In this manner, the shift sv at the position of the Q1-Q1 line cross section and the shift sv at the position of the Q2-Q2 line cross section separated from each other in the X direction are calculated. This makes it possible to properly calculate the correction amount of the measurement object S located between the first marker M1 and the second marker M2 based on the two calculated shifts sv. Therefore, more accurate three-dimensional shape data can be obtained for the measurement object S. As a result, when three-dimensional shape data generated at multiple angular positions is synthesized, it becomes possible to perform more accurate shape measurement of the measurement object S over a wide range.

[0119] As described above, the second calibration function calculates the deviation sv of the rotation axis at the position of the second marker M2 in the X direction. Therefore, depending on the shape of the measurement target S, the three-dimensional shape data may be corrected using only the deviation sv of the rotation axis at the position of the second marker M2. In this embodiment, the configuration function of correcting the three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2 is included in the second calibration function.

[0120] When correcting the three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2, the second marker M2 may be positioned so as to be located between the measurement object S and the holding part 191 in the X direction.

[0121] FIG. 17 is a diagram for explaining an example of a case where three-dimensional shape data is corrected using only the deviation sv of the rotation axis at the position of the second marker M2. As shown in FIG. 17, in this example, the small diameter portion M2b of the second marker M2 is held by a holding portion 191. In addition, a measurement object S having a disk shape, for example, is attached to the end face of the large diameter portion M2a of the second marker M2. The measurement object S in FIG. 17 does not have a longitudinal shape extending in one direction. Therefore, even when the three-dimensional shape data is corrected based only on the deviation sv calculated at the position of the second marker M2 adjacent to the measurement object S in the X direction, three-dimensional shape data with relatively high accuracy can be obtained.

[0122] (4) The third calibration function In the third calibration function, calibration tools corresponding to the above-mentioned first marker M1 and second marker M2 are not used. In the third calibration function, when measuring the shape of the rotated measurement object S, a deviation sv between the rotation axis RA and the design rotation axis DRA is calculated based on a plurality of three-dimensional shape data generated for the measurement object S at a plurality of predetermined angular positions.

[0123] FIG. 18 is a diagram for explaining the third calibration function. FIG. 18(a) shows a cross section perpendicular to the X direction of the measurement object S held by the rotation unit 190. In the third calibration function, a plurality of angular positions are set so that three-dimensional shape data of overlapping parts in the rotation direction of the measurement object S is generated. Then, as shown by the white arrow in FIG. 18(a), the surface of the measurement object S is imaged at a plurality of angular positions, and a plurality of three-dimensional shape data corresponding to the plurality of angular positions is generated. In FIG. 18(a), some (three) of the plurality of three-dimensional shape data corresponding to the plurality of angular positions are shown in a balloon as data DAa, DAb, and DAc. Data DAa, DAb, and DAc are shown by dotted lines, solid lines, and dashed lines, respectively. Between data DAa and DAb, the portion within the dotted line frame is an overlapping portion indicating a common portion of the measurement object S. Between data DAb and DAc, the portion within the dashed line frame is an overlapping portion. These overlapping portions can be identified by detecting specific shapes (surfaces or irregularities) from the generated three-dimensional shape data.

[0124] Next, assuming that the center of rotation of the measurement target S is on the designed rotation axis DRA, for example, multiple 3D shape data corresponding to multiple angular positions are arranged on a virtual plane perpendicular to the X direction. In this case, if the deviation sv between the rotation axis RA and the designed rotation axis DRA is large, a large deviation will occur between the overlapping portion of one piece of adjacent data and the overlapping portion of the other piece of data, as shown in Fig. 18(b).

[0125] Therefore, a convergence calculation is performed to obtain the true rotation axis RA of the measurement object S based on the multiple three-dimensional shape data corresponding to the multiple angular positions so that the deviation between the overlapping parts of each two adjacent data is minimized. The multiple three-dimensional shape data are corrected based on the deviation between the calculated rotation axis RA and the design rotation axis DRA. As a result, accurate three-dimensional shape data can be obtained for the measurement object S, as shown in FIG. 18(c). As a result, when combining three-dimensional shape data generated at multiple angular positions, it is possible to perform shape measurement of the measurement object S over a wide range while reducing the decrease in measurement accuracy. Note that, in FIGS. 18(b) and (c), only data DAa, DAb, and DAc are shown among the multiple three-dimensional shape data corresponding to the multiple angular positions in FIG. 18(a).

[0126] [4] Procedure for measuring the shape of the measurement object S using the shape measuring device 500 19 and 20 are flowcharts showing a procedure for measuring the shape of a measurement target S using the shape measuring device 500 of FIG. 1. In an initial state, the power supply of the shape measuring device 500 is on. In addition, in the shape measuring device 500, illumination light is irradiated from the illumination light output unit 130 toward the upper surface 141s of the stage 140, except when imaging is performed for shape measurement using pattern light. At this time, an image based on image data acquired in real time by the light receiving unit 120 (hereinafter referred to as a live image) is displayed on the display unit 400 of FIG. 1.

[0127] First, the user determines whether or not the rotation unit 190 is necessary to perform shape measurement of a desired portion of the measurement target S (step S1). If the rotation unit 190 is necessary, the user determines whether or not the rotation unit 190 is attached to the stage 140 (step S2). If the rotation unit 190 is not attached to the stage 140, the user attaches the rotation unit 190 to the stage 140 (step S3).

[0128] With the rotation unit 190 attached to the stage 140 in step S2 or step S3, the user attaches the measurement object S to the holder 191 of the rotation unit 190 so that at least a portion of the measurement object S is located in the measurement space 101 (step S4). This allows the measurement object S to be held rotatably around the rotation axis RA. Next, the user adjusts the position of the focal plane 120F of the light receiving unit 120 relative to the measurement object S (step S5). Specifically, the user adjusts the height of the upper surface 141s of the stage 140 so that the focal plane 120F of the light receiving unit 120 is aligned with the measurement object S by operating the stage operation unit 145 or operation unit 250 in FIG. 1 while visually checking the live image.

[0129] Next, the user sets an area (hereinafter referred to as a measurement area) to be imaged by the light receiving unit 120 within a plane (e.g., a horizontal plane) on the stage 140 perpendicular to the Z direction (step S6). As a result, even if the entire upper surface of the measurement target S does not fit within the measurement space 101, multiple measurement areas are set and three-dimensional shape data of those measurement areas is generated, making it possible to perform planar direction synthesis.

[0130] The measurement area is set by the user operating a region setting screen, which will be described later, displayed on the display unit 400. When the measurement area is set, the imaging range in the Z direction may be determined for performing the height direction synthesis in the Z direction. The setting of the measurement area will be described later in detail.

[0131] Here, in the above step S1, if the rotation unit 190 is not required, the user places the measurement object S on the stage 140 so that at least a portion of the measurement object S is located in the measurement space 101 (step S11). Next, similar to the above steps S5 and S6, the user adjusts the position of the focal plane 120F of the light receiving unit 120 relative to the measurement object S (step S12) and sets the measurement area (step S13).

[0132] Thereafter, the user operates the operation unit 250 to command the start of imaging using the pattern light for the set measurement area (step S7). As a result, the set measurement area is irradiated with the pattern light and an image is taken. In addition, three-dimensional shape data for the measurement area is generated.

[0133] Next, the user checks the three-dimensional shape data generated in step S7 as the shape measurement result of the measurement object S (step S21), and determines whether the three-dimensional shape data has any missing parts (step S22). If the three-dimensional shape data has no missing parts, the user stores the three-dimensional shape data in the working memory 230 or storage device 240 in Fig. 1, and analyzes the shape of the measurement object S based on the three-dimensional shape data (step S23). This completes the series of operations.

[0134] In the above step S22, if there is a missing portion in the three-dimensional shape data, the user additionally sets a measurement area so that a portion of the measurement target S corresponding to the missing portion of the three-dimensional shape data is imaged (step S24). Next, the user operates the operation unit 250 to command the start of imaging using pattern light for the additionally set measurement area (step S25). As a result, three-dimensional shape data indicating the shape of the additionally set measurement area is generated. In addition, the user operates the operation unit 250 to combine the three-dimensional shape data generated by the operation of step S25 with the three-dimensional shape data generated by the operation of step S7 (step S26). This operation of step S26 may be omitted if it is automatically performed by the CPU 210. Thereafter, the user proceeds with the operation of the above step S23.

[0135] 1 is configured to be capable of setting a measurement region in one of three modes during shape measurement of a measurement object S involving rotation by a rotation unit 190. These three modes are called a first box-shaped region setting mode, a second box-shaped region setting mode, and an axis-shaped region setting mode.

[0136] The first box-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while rotating a box-shaped measurement object S 360° around the rotation axis RA. The second box-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while rotating a box-shaped measurement object S within a predetermined angle range (e.g., 180°) around the rotation axis RA. The axial-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while arranging an axial-shaped measurement object S to extend along the rotation axis RA and rotating it 360° around the rotation axis RA.

[0137] Here, the procedure for setting the measurement region in step S6 above will be described in detail. Fig. 21 is a flow chart showing the procedure for setting the measurement region for performing shape measurement of the measurement target S accompanied by rotation. The user performs the following setting work by operating the region setting screen described later using the operation unit 250.

[0138] The user selects one of the first box-shaped region setting mode, the second box-shaped region setting mode, and the axis-shaped region setting mode as the mode of the CPU 210 for setting the measurement region (step S31).

[0139] Specifically, this selection is performed as follows: First, the user subjectively determines whether the shape of the measurement target S belongs to a box shape or an axis shape. If the user determines that the shape of the measurement target S belongs to an axis shape, the user selects the axis shape region setting mode.

[0140] On the other hand, if the user determines that the shape of the measurement object S belongs to a box shape, the user further determines the portion of the measurement object S to be measured. Then, if the user wishes to measure the shape of the measurement object S over the entire circumference (360°) around the rotation axis RA, the user selects the first box-shaped region setting mode. On the other hand, if the user wishes to measure the shape of the measurement object S over a partial range (e.g., 180°) around the rotation axis RA, the user selects the second box-shaped region setting mode.

[0141] Next, the user issues a command to start provisional setting of the measurement area (step S32). In this case, in response to the command to provisionally set the measurement area, the CPU 210 sets a provisional measurement area for the current measurement object S. As a result, an image showing the positional relationship between the measurement object S and the measurement area in a plan view (hereinafter referred to as an area setting map image) is displayed on the display unit 400.

[0142] Therefore, the user checks the provisionally set measurement area while visually checking the area setting map image displayed on the display unit 400 (step S33). The user also determines whether the measurement area shown in the area setting map image is appropriate (step S34). If the measurement area is not appropriate, the user corrects the measurement area (step S35).

[0143] If the measurement area is appropriate in step S34 or if the measurement area is corrected in step S35, the user determines whether or not to use the marker-based calibration function (the above-mentioned first or second calibration function) (step S36). If the marker-based calibration function is not used, the measurement area set at the time of step S36 is set as the normal set area. This completes the setting of the measurement area.

[0144] On the other hand, in step S36, when using the marker-based calibration function, the user selects at least one of the first marker M1 and the second marker M2 as a marker for the calibration function (step S37). Here, when the second marker M2 is selected, the user attaches the second marker M2 to the measurement target S. After that, the user corrects the measurement area so that the marker selected in step S37 is imaged by the light receiving unit 120 (step S38). This completes the setting of the measurement area.

[0145] The procedure for setting the measurement area in step S13 above, i.e., the procedure for setting the measurement area when measuring the shape of the measurement object S without rotation, is the same as the setting procedure of steps S32 to S35 in Figure 21, except that the procedures of steps S31, and S36 to S38 are omitted.

[0146] [5] Various screens displayed on the display unit 400 (1) The initial measurement screen Fig. 22 is a diagram showing an example of a basic measurement screen displayed on the display unit 400 when the power of the shape measuring device 500 is turned on with the rotation unit 190 not attached to the stage 140. As shown in Fig. 22, the basic measurement screen 401 includes a main display area 410 and a sub-display area 420 arranged side by side. In the basic measurement screen 401, a live image is displayed in the main display area 410. As a result, when the measurement object S is placed on the stage 140 so as to be located in the measurement space 101, for example, an object image SI showing the surface state of the measurement object S is displayed in the main display area 410.

[0147] 22, a horizontal movement operation window 411 for moving the upper surface 141s of the stage 140 in the XY directions is displayed superimposed on the live image. In the horizontal movement operation window 411, a plurality of (eight in this example) movement buttons 412 for moving the upper surface 141s of the stage 140 in a plurality of directions different from each other are displayed. Thereby, the user operates a pointer on the basic measurement screen 401 using the operation unit 250 in FIG. 1, and clicks, for example, one of the plurality of movement buttons 412. Thereby, the upper surface 141s of the stage 140 can be moved relatively in the XY directions with respect to the measurement space 101, and the imaging area of ​​the light receiving unit 120 can be moved.

[0148] 22, a plurality of buttons and images related to shape measurement of the measurement target S are displayed in a sub-display area 420. Specifically, a region setting button 421, an edit button 422, a region clear button 423, a field of view confirmation image 424, a measurement start button 425, and an upper surface removal button 429 are displayed in the sub-display area 420 of the basic measurement screen 401.

[0149] The area setting button 421 is a button for the user to instruct the setting of a measurement area. For example, the user operates the area setting button 421 when setting the measurement area in step S13 above. As a result, the display unit 400 displays an area setting screen 402 in Fig. 23 (described later) instead of the basic measurement screen 401 in Fig. 22.

[0150] The edit button 422 is a button for the user to modify the measurement area setting. For example, the user can modify and add to the measurement area setting contents by operating the edit button 422 while setting the measurement area in step S13 above. Even when the edit button 422 is operated by the user, the area setting screen 402 in Fig. 23 described later is displayed on the display unit 400 instead of the basic measurement screen 401 in Fig. 22. The area clear button 423 is a button for the user to reset the measurement area setting.

[0151] The view confirmation image 424 is an image showing where the imaging area (imaging field of view) of the light receiving unit 120 is located on the upper surface 141s of the stage 140, for example. In the view confirmation image 424, a rectangular index showing the current imaging area of ​​the light receiving unit 120 is superimposed on a plan view of the upper surface 141s of the stage 140. After the measurement area is set, the view confirmation image 424 displays an index showing the imaging area of ​​the light receiving unit 120 and an index showing the set measurement area in a manner that is distinguishable from the index of the imaging area. In the view confirmation image 424 of FIG. 22, the index showing the current imaging area of ​​the light receiving unit 120 is shown by a solid line. Also, the index showing the measurement area currently set is shown by a dotted line.

[0152] The measurement start button 425 is a button for the user to command the start of imaging of the measurement object S using pattern light, for example, in step S7 above, in order to obtain three-dimensional shape data of the measurement object S. When the user operates the measurement start button 425 after setting the measurement area, an image of the set measurement area is captured, and three-dimensional shape data of the measurement object S is generated. The top surface removal button 429 is a button for the user to command that the three-dimensional shape data of the top surface 141s of the stage 140 should be removed from the measurement result. Note that the basic measurement screen 401 in FIG. 22 also displays a magnification switching button (not shown). This allows the user to observe the surface state of the measurement object S based on the live image displayed at a desired magnification by operating the magnification switching button.

[0153] (2) Area setting screen for measuring the shape of the target object S without rotation Fig. 23 is a diagram showing an example of a region setting screen displayed on the display unit 400 by operating the region setting button 421 in Fig. 22. As shown in Fig. 23, the region setting screen 402 includes a main display region 410 and a sub-display region 420, similar to the basic measurement screen 401.

[0154] When the area setting button 421 in Fig. 22 is operated, for example, the entire measurement object S placed on the stage 140 is automatically imaged by the light receiving unit 120. At this time, if the entire measurement object S does not fit within the imaging area of ​​the light receiving unit 120, the upper surface 141s of the stage 140 is moved in the XY directions relative to the light receiving unit 120, and imaging is repeated multiple times. Based on the image of the measurement object S obtained by imaging, an area where the measurement object S exists (hereinafter referred to as the existence area) is detected within a surface (e.g., a horizontal plane) on the stage 140 perpendicular to the Z direction. Then, the detected existence area is provisionally set as a tentative measurement area.

[0155] In the region setting screen 402 of Fig. 23, a region setting map image is displayed in the main display region 410. Here, the measurement region is set such that at least a part of the region of the measurement space 101 that the light receiving unit 120 can capture at one time is set as a unit region, and one or more unit regions are arranged on the stage 140. Therefore, in the region setting map image, as shown by dotted lines in Fig. 23, an index indicating the unit region constituting the measurement region is displayed as a unit region frame MM together with the object image SI. In the example of Fig. 23, four unit region frames MM are displayed so as to cover the entire object image SI.

[0156] Furthermore, in the region setting screen 402 of FIG. 23, a message to adjust the position and size of the measurement region on the region setting map image is displayed in the sub-display area 420. Furthermore, an exclude button 426, an OK button 427, and a cancel button 428 are displayed. The user can adjust the position and size of each unit region frame MM on the region setting map image by operating the pointer on the region setting screen 402. The user can also add a unit region frame MM. In this way, the user can easily expand or reduce the measurement region in the X direction and Y direction on the region setting map image.

[0157] The exclusion button 426 is a button for the user to specify an area in the area setting map image where it is determined that shape measurement is unnecessary as an exclusion area. After operating the exclusion button 426, the user can specify one of the multiple unit area frames MM on the area setting map image to exclude the portion of the unit area frame MM from the measurement area.

[0158] The OK button 427 is a button for the user to instruct that setting of the measurement area using the area setting map image is completed. When the user operates the OK button 427, the information of the measurement area set at the time of operating the OK button 427 is stored as regular setting information in the working memory 230 or the storage device 240 in Fig. 1. On the display unit 400, the basic measurement screen 401 in Fig. 22 that was displayed immediately before is redisplayed in place of the area setting screen 402 in Fig. 23.

[0159] The cancel button 428 is a button for allowing the user to reset the information of the measurement area set on the currently displayed area setting screen 402 while displaying the basic measurement screen 401 of FIG. 22 on the display unit 400.

[0160] (3) Basic measurement screen displayed when the rotation unit 190 is connected With the basic measurement screen 401 of Fig. 22 displayed on the display unit 400, the user attaches the rotation unit 190 to the stage 140 by performing the operation of step S3 described above. In this case, the basic measurement screen 401 changes from the display state of Fig. 22. Fig. 24 is a diagram showing an example of the basic measurement screen 401 displayed on the display unit 400 with the rotation unit 190 attached to the stage 140.

[0161] As shown in FIG. 24, when the rotation unit 190 is connected to the stage 140, a rotation operation window 413 is displayed in a superimposed manner on the live image in the main display area 410 in addition to the horizontal movement operation window 411 of FIG.

[0162] An origin button 414, a forward rotation button 415, and a reverse rotation button 416 are displayed in the rotation operation window 413. The origin button 414 is a button for returning the angular position of the holder 191 of the rotation unit 190 to a reference angular position in the rotation direction around the rotation axis RA.

[0163] The forward rotation button 415 is a button for rotating the holder 191 of the rotation unit 190 in one direction around the rotation axis RA, and the reverse rotation button 416 is a button for rotating the holder 191 of the rotation unit 190 in the reverse direction around the rotation axis RA. With the measurement target S held at the tip of the holder 191, the user operates the pointer on the basic measurement screen 401 using the operation unit 250 in Fig. 1 to click, for example, either the forward rotation button 415 or the reverse rotation button 416. This allows the measurement target S to be rotated in a desired direction around the rotation axis RA on the stage 140.

[0164] In addition, the rotation operation window 413 further displays a holder mark 417, a reference attitude mark 418, and a plurality of measurement angle position marks 419. The holder mark 417 is a circular mark that typically represents the outer shape of the holder 191 as viewed in the X direction. The reference attitude mark 418 indicates an angular position (hereinafter referred to as a reference attitude position) facing a specific surface of the measurement target S held by the holder 191, and the reference attitude position is set by the CPU 210 or a user according to a predetermined method. For example, the reference attitude position may be an angular position of the measurement target S when the measurement target S is imaged with the widest area by the light receiving unit 120 as the measurement target S rotates around the rotation axis RA.

[0165] In shape measurement of the measurement target S involving rotation, in order to perform shape measurement of multiple portions of the measurement target S around the rotation axis RA, multiple angular positions to be imaged by the light receiving unit 120 are set as measurement angular positions. The measurement angular position mark 419 indicates the measurement angular position currently set, and is placed on the circle of the holder mark 417. In the example of Fig. 24, the multiple measurement angular position marks 419 are lined up on the circle of the holder mark 417 at angular intervals of 45° with the center of the holder mark 417 as the reference.

[0166] Furthermore, when the rotation unit 190 is connected to the stage 140, in addition to the various buttons (421-425, 429) and the view confirming image 424 shown in Fig. 22, a number of other buttons are displayed in the sub-display area 420. Specifically, the sub-display area 420 further displays a rotation on button 431, a rotation off button 432, a box full circumference button 434, a box portion button 435, an axis button 436, and a rotation details button 437.

[0167] The rotation on button 431 is operated by the user to perform shape measurement of the measurement target S accompanied by rotation, i.e., shape measurement using the rotation function of the rotation unit 190. When the user operates the rotation on button 431, the operation of a box circumference button 434, a box portion button 435, an axis button 436, and a rotation details button 437, which will be described later, becomes valid, and various settings for performing planar direction composition and rotation direction composition become possible. At this time, the operation of the area setting button 421 is invalid.

[0168] The rotation off button 432 is operated by the user to perform shape measurement of the measurement target S without rotation, i.e., shape measurement without using the rotation function of the rotation unit 190. When the user operates the rotation off button 432, the operation of the box circumference button 434, box portion button 435, axis button 436, and rotation details button 437 described below is disabled, and various settings for rotation direction composition are disabled. At this time, the operation of the area setting button 421 is enabled. As a result, various settings for planar direction composition are possible.

[0169] The box circumference button 434 is a button operated when the user selects the first box-shaped area setting mode as the mode of the CPU 210 for setting the measurement area in the operation of step S31 described above. The box portion button 435 is a button operated when the user selects the second box-shaped area setting mode as the mode of the CPU 210 for setting the measurement area. The axis button 436 is a button operated when the user selects the axis-shaped area setting mode as the mode of the CPU 210 for setting the measurement area. The rotation detail button 437 is a button operated when the user wants to set the measurement area in detail regardless of the mode predetermined in the CPU 210.

[0170] In addition, in the field of view confirmation image 424 of Figure 24, an index indicating the measurement area set at the current angular position of the measurement object S is superimposed on a plan view of the upper surface 141s of the stage 140, together with a rectangular index indicating the current imaging area of ​​the light receiving unit 120.

[0171] With rotation on button 431 operated, any one of box circumference button 434, box portion button 435, axis button 436, and rotation details button 437 is operated. This causes a region setting screen corresponding to the operated button to be displayed on display unit 400. Below, a description will be given of the region setting screen that is displayed on display unit 400 when each button (434, 435, 436, 437) for setting the measurement region is operated.

[0172] (4) Area setting screen for measuring the shape of the target object S with rotation In this embodiment, the multiple measurement angle positions are stored in the storage device 240 as default information for each measurement area setting mode. When the box portion button 435 in Fig. 24 is operated, that is, when the user selects the second box-shaped area setting mode as the measurement area setting mode, the multiple measurement angle positions corresponding to that mode are read out from the storage device 240 and set. Note that the multiple measurement angle positions may be set by being specified by the user.

[0173] In this example, 0° (reference angle position), 45°, 90°, 135°, and 180° are set as the multiple measurement angular positions. In this case, the presence area of ​​the measurement target object S at each measurement angular position is detected, and an area consisting of one or more unit areas is provisionally set as a provisional measurement area at the measurement angular position so as to cover the detected presence area.

[0174] Fig. 25 is a diagram for explaining the operation of the shape measuring device 500 executed in response to the operation of the box portion button 435 in Fig. 24. Fig. 25(a) to (e) respectively show external views (end views) of the measurement target S in the X direction when the measurement target S is in the angular positions of 0°, 45°, 90°, 135°, and 180°. In Fig. 25(a) to (e), the part of the surface of the measurement target S that is the subject of shape measurement is shown by a thick solid line.

[0175] For example, as shown in Fig. 25(a), first, the measurement object S is positioned at a measurement angle position of 0°. Then, similar to the example of Fig. 23, the entire measurement object S is automatically imaged by the light receiving unit 120. Fig. 25(f) shows an example of an image of the measurement object S imaged in the state of Fig. 25(a). An existence region is detected based on the image of the measurement object S that has been imaged. Then, an area that includes the detected existence region and is composed of one or more unit regions is provisionally set as a tentative measurement region corresponding to the measurement angle position of 0°.

[0176] Next, as shown in Fig. 25(b), the measurement object S is rotated around the rotation axis RA and positioned at a measurement angle position of 45°. Then, the entire measurement object S is automatically imaged by the light receiving unit 120. Fig. 25(g) shows an example of an image of the measurement object S imaged in the state of Fig. 25(b). An existence region is detected based on the image of the measurement object S that has been imaged. Then, an area that includes the detected existence region and is composed of one or more unit regions is provisionally set as a provisional measurement region corresponding to the measurement angle position of 45°.

[0177] Thereafter, the rotation, positioning and imaging of the measurement object S are repeated to detect the presence area. Images of the measurement object S imaged at measurement angle positions of 90°, 135° and 180° are shown in Fig. 25(h), (i) and (j), respectively. An area including the presence area detected at each measurement angle position and consisting of one or more unit areas is provisionally set as a provisional measurement area corresponding to the measurement angle position. A plurality of provisional measurement areas corresponding to the plurality of measurement angle positions set in this manner are displayed on the display unit 400.

[0178] Fig. 26 is a diagram showing an example of a region setting screen displayed on display unit 400 by operating box portion button 435 in Fig. 24. In region setting screen 403 in Fig. 26, region setting map images corresponding to each of a plurality of measurement angle positions (0°, 45°, 90°, 135°, and 180°) are displayed in main display area 410.

[0179] 26, an angular position list 441 is displayed in a sub-display area 420 together with an edit button 422, an OK button 427, and a cancel button 428. The angular position list 441 shows a plurality of measurement angular positions that are currently set. The user selects a desired measurement angular position from the plurality of measurement angular positions displayed in the angular position list 441, and operates the edit button 422. This allows the user to easily expand or reduce the measurement area in the X and Y directions on the area setting map image corresponding to the selected measurement angular position, similar to the example of FIG. 23.

[0180] When rotating a measurement target S having a box shape, the range of the existence area in the Y direction is likely to change significantly at multiple measurement angle positions. Therefore, the above-described measurement area editing function is very effective for setting the measurement area for a measurement target S having a box shape.

[0181] 26, when the OK button 427 is operated on the area setting screen 403, setting of the measurement area is considered to be completed, and the basic measurement screen 401 of Fig. 24 is redisplayed on the display unit 400. On the other hand, when the cancel button 428 is operated, the information on the measurement area set on the area setting screen 403 is reset, and the basic measurement screen 401 of Fig. 24 is redisplayed on the display unit 400.

[0182] 24 is operated, that is, when the user selects the first box-shaped area setting mode as the measurement area setting mode, a plurality of measurement angle positions corresponding to the mode are read and set from the storage device 240. Note that the plurality of measurement angle positions may be set by being specified by the user.

[0183] In this example, 0° (reference angle position), 45°, 90°, 135°, 180°, 225°, 270°, and 315° are set as the multiple measurement angular positions. In this case, similar to the case where the box portion button 435 in Fig. 24 is operated, the presence area of ​​the measurement target object S at each measurement angular position is detected, and an area including the detected presence area and consisting of one or more unit areas is provisionally set as a provisional measurement area at the measurement angular position. A plurality of provisional measurement areas respectively corresponding to the multiple set measurement angular positions are displayed on the display unit 400.

[0184] Fig. 27 is a diagram showing an example of a region setting screen displayed on the display unit 400 by operating the box circumference button 434 in Fig. 24. In the region setting screen 404 in Fig. 27, a region setting map image corresponding to each of a plurality of measurement angle positions (0°, 45°, 90°, 135°, 180°, 225°, 270°, and 315°) is displayed in the main display area 410.

[0185] 26, an edit button 422, an OK button 427, a cancel button 428, and an angle position list 441 are displayed in a sub-display area 420 on the area setting screen 404 of Fig. 27. This allows the user to modify the measurement area settings, issue a command to complete the settings, or issue a command to reset the settings by operating the various buttons (422, 427, 428) and the angle position list 441. Operating the OK button 427 or the cancel button 428 causes the basic measurement screen 401 of Fig. 24 to be re-displayed on the display unit 400.

[0186] 24 is operated, that is, when the user selects the axis shape area setting mode as the measurement area setting mode, a plurality of measurement angle positions corresponding to the mode are read and set from the storage device 240. Note that the plurality of measurement angle positions may be set by designation by the user.

[0187] In this example, 0° (reference angle position), 45°, 90°, 135°, 180°, 225°, 270°, and 315° are set as the measurement angle positions. Here, when a measurement object S having an axial shape extending in one direction is arranged to extend along a rotation axis RA and rotated around the rotation axis RA, the distance between the outer circumferential surface of the measurement object S and the rotation axis RA is kept substantially constant. Therefore, it is considered that the existence regions corresponding to the measurement angle positions are substantially common.

[0188] 24 is operated, only the presence area of ​​the measurement target object S when it is at one of the multiple measurement angular positions is detected. Then, an area including the detected presence area and consisting of one or more unit areas is provisionally set as a provisional measurement area for all measurement angular positions. The provisional measurement area common to the multiple measurement angular positions is displayed on the display unit 400.

[0189] FIG. 28 is a diagram showing an example of a region setting screen displayed on the display unit 400 by operating the axis button 436 in FIG. 24. In the region setting screen 405 in FIG. 28, a region setting map image corresponding to one measurement angle position (for example, 0°) is displayed in the main display area 410. Also, in the region setting screen 405 in FIG. 28, an edit button 422, an OK button 427, and a cancel button 428 are displayed in the sub-display area 420. This allows the user to modify the measurement region setting, issue a command to complete the setting, or issue a command to reset the setting by operating the various buttons (422, 427, 428) and the angle position list 441. By operating the OK button 427 or the cancel button 428, the basic measurement screen 401 in FIG. 24 is redisplayed on the display unit 400.

[0190] As described above, when the user selects the axis shape region setting mode, the existence region is not detected for all of the multiple measurement angle positions. This reduces the time required to detect the existence region. In addition, in this case, since only one region setting map image corresponding to one measurement angle position is displayed on the display unit 400, the user does not need to check multiple region setting map images. Furthermore, there is no need to adjust the measurement region for each of the multiple measurement angle positions. As a result, the work and time required to set the measurement region can be reduced.

[0191] When the rotation details button 437 in Fig. 24 is operated, the display mode of the sub-display area 420 changes. Fig. 29 is a diagram showing an example of the sub-display area 420 displayed on the display unit 400 by operating the rotation details button 437 in Fig. 24. As shown in Fig. 29, when the rotation details button 437 is operated on the basic measurement screen 401 in Fig. 24, a reference attitude input frame 451, a reference attitude registration button 452, an angle condition setting section 453, an angle pitch setting section 454, a measurement count setting section 455, an excluded angle input frame 456, a synthesis necessity check box 457, and the like are displayed in the sub-display area 420.

[0192] The reference attitude input frame 451 is configured to allow the user to input a desired angular position. The reference attitude registration button 452 is operated by the user to register the angular position inputted into the reference attitude input frame 451 as a reference attitude position. By operating the reference attitude registration button 452, the angular position inputted into the reference attitude input frame 451 is stored in the working memory 230 or the storage device 240 as the reference attitude position.

[0193] The angle condition setting section 453 is configured to be operable by the user to set how to determine a plurality of measurement angle positions. Specifically, the angle condition setting section 453 is configured with a pull-down button that allows a desired method to be selected from a plurality of setting methods.

[0194] The angle pitch setting section 454 is configured to be operable by the user to set at what angle interval a plurality of measurement angle positions are to be set. Specifically, the angle pitch setting section 454 is configured with a pull-down button that allows a desired angle to be selected from a plurality of types of angles. The measurement count setting section 455 is configured to be operable by the user to set how many times three-dimensional shape data should be generated at the angle interval set in the angle pitch setting section 454. The excluded angle input frame 456 is configured to allow the user to input a measurement angle position for which it is not necessary to generate three-dimensional shape data.

[0195] The synthesis necessity checkbox 457 is configured to allow the user to select whether or not to synthesize multiple pieces of three-dimensional shape data after generating multiple pieces of three-dimensional shape data while rotating the measurement object S multiple times at set angle intervals.

[0196] When the user wishes to combine multiple pieces of three-dimensional shape data, the user checks the combination necessity check box 457. This causes multiple pieces of three-dimensional shape data generated at multiple measurement angle positions during shape measurement of the measurement object S to be combined. On the other hand, when the user does not wish to combine multiple pieces of three-dimensional shape data, the user does not check the combination necessity check box 457. This causes multiple pieces of three-dimensional shape data generated at multiple measurement angle positions during shape measurement of the measurement object S to not be combined. As described above, when the user operates the rotation details button 437 in FIG. 24, the user can make detailed settings regarding the shape measurement of the measurement object S by further operating various input frames, buttons and setting sections shown in FIG. 29.

[0197] (5) Modifying and adding settings When the edit button 422 in Figs. 26 to 28 is operated, the display mode of the sub-display area 420 changes. Fig. 30 is a diagram showing an example of the sub-display area 420 displayed on the display unit 400 by operating the edit button 422 in Figs. 26 to 28. As shown in Fig. 30, when the edit button 422 is operated on the area setting screens 402 to 405 in Figs. 26 to 28, a message to adjust the position and size of the measurement area on the area setting map image is displayed in the sub-display area 420, similar to the example in Fig. 23. In addition, an exclude button 426, an OK button 427, and a cancel button 428 are displayed. In addition, a first calibration check box 463 and a second calibration check box 464 are displayed.

[0198] The first calibration checkbox 463 is a checkbox for setting whether or not to use the first configuration function using the first marker M1 in Fig. 15(a). On the other hand, the second calibration checkbox 464 is a checkbox for setting whether or not to use the second configuration function using the second marker M2 in Fig. 16(b).

[0199] If the user wishes to use the first configuration function using the first marker M1 in the operation of step S36 above, the user checks the first calibration checkbox 463 in FIG. 30. In this case, it is necessary to set a measurement area so that shape measurement is also performed on the first marker M1. Here, since the first marker M1 is a part of the rotation support shaft 91, the existence area of ​​the first marker M1 on the stage 140 is known. Therefore, when the first calibration checkbox 463 is checked, a new measurement area is set to cover the existence area of ​​the first marker M1 in addition to the measurement area currently set.

[0200] Fig. 31 is a diagram showing an example of a region setting screen displayed on the display unit 400 by checking the first calibration checkbox 463 in Fig. 30. In the region setting screen 406 in Fig. 31, a region setting map image corresponding to a specific measurement angle position (for example, 0°) is displayed in the main display area 410.

[0201] In the region setting map image, a measurement region for generating three-dimensional shape data of the measurement object S is indicated by a plurality of unit region frames MM. Furthermore, in the region setting map image, a measurement region for generating three-dimensional shape data of the first marker M1 is indicated by a plurality of unit region frames MMa.

[0202] 31, the images of the holder 191 and the first marker M1 are indicated by two-dot chain lines. Also, the image portion of the first marker M1 is hatched so that the position of the first marker M1 can be easily understood.

[0203] Here, the unit area frame MMa added corresponding to the first marker M1 is displayed in a manner different from the unit area frame MM (in this example, a thick dashed line) so as to be distinguishable from the unit area frame MM corresponding to the measurement target S. This allows the user to easily understand that a new measurement area has been set in order to use the first calibration function using the first marker M1.

[0204] When the user wants to use the second configuration function using the second marker M2, the user checks the second calibration checkbox 464 in FIG. 30. In this case, it is necessary to set a measurement area so that shape measurement is also performed on the second marker M2. Here, the second marker M2 is attached to the measurement object S by the user in the above-mentioned operation of step S37. Therefore, the user needs to set a new measurement area to cover the existence area of ​​the second marker M2 according to the position of the second marker M2 attached to the measurement object S.

[0205] Fig. 32 is a diagram showing an example of a region setting screen displayed on the display unit 400 by checking the second calibration checkbox 464 in Fig. 30. In the region setting screen 407 in Fig. 32, a region setting map image corresponding to a specific measurement angle position (for example, 0°) is displayed in the main display area 410, similar to the example of the region setting screen 406 in Fig. 31.

[0206] Furthermore, in the region setting map image, a measurement region for generating three-dimensional shape data of the measurement target S is indicated by a plurality of unit region frames MM, and a marker image M2i for specifying the position of the second marker M2 is displayed. In this state, the user places the marker image M2i at a position on the region setting map image corresponding to the actual position of the second marker M2, for example, by dragging the marker image M2i.

[0207] In the secondary display area 420, a marker inversion checkbox 465, an OK button 427, and a cancel button 428 are displayed. Here, in the shape measuring device 500 according to the present embodiment, a basic orientation of the second marker M2 to be attached to the measurement object S when using the second calibration function is determined in advance. For example, the basic orientation of the second marker M2 to be attached to the measurement object S is an orientation in which the axis of the second marker M2 is parallel or nearly parallel to the rotation axis RA and the large diameter portion M2a and the small diameter portion M2b are disposed so as to move away from the rotation unit 190 in this order. On the other hand, as shown in the example of FIG. 17, the second marker M2 can also be attached to the rotation unit 190 in an inverted orientation obtained by inverting the basic orientation in the X direction.

[0208] The marker inversion checkbox 465 is a checkbox for setting whether or not to invert the orientation of the second marker M2 in the X direction. Fig. 33 is a diagram showing an example of a region setting screen displayed on the display unit 400 by checking the marker inversion checkbox 465 in Fig. 32. As shown in Fig. 33, in the region setting screen 407, by checking the marker inversion checkbox 465, the orientation of the marker image M2i is inverted in the left-right direction with respect to the display example in Fig. 32.

[0209] After the position and orientation of the marker image M2i are adjusted on the region setting map image as described above, the OK button 427 is operated. As a result, a new measurement region is set so as to cover the region corresponding to the marker image M2i.

[0210] FIG. 34 is a diagram showing an example of a region setting screen displayed on the display unit 400 in a state in which new measurement regions for the first marker M1 and the second marker M2 are set. In the region setting screen 408 in FIG. 34, the measurement region for generating three-dimensional shape data of the object image SI is shown by a plurality of unit region frames MM in the region setting map image displayed in the main display area 410. In addition, the measurement region for generating three-dimensional shape data of the first marker M1 is shown by a plurality of unit region frames MMa. Furthermore, the measurement region for generating three-dimensional shape data of the second marker M2 is shown by a plurality of unit region frames MMb. This allows the user to easily understand that a new measurement region has been set in order to use the first and second calibration functions using the first marker M1 and the second marker M2.

[0211] 34, the unit area frame MMa corresponding to the first marker M1, the unit area frame MMb corresponding to the second marker M2, and the unit area frame MM corresponding to the measurement target S are displayed in different manners that are distinguishable from one another. This allows the user to easily understand the purpose set for each portion of the measurement area.

[0212] [6]Top surface removal function 22 and 29 is operated, that is, the user issues a command to remove the three-dimensional shape data of the upper surface 141s of the stage 140 from the measurement results. In this case, in the shape measuring device 500, a three-dimensional shape image of the measurement object S is displayed on the display unit 400 in a state in which the three-dimensional shape data corresponding to the upper surface 141s has been removed from all three-dimensional shape data obtained by imaging the measurement object S (upper surface removal function). A specific example of this will be described.

[0213] Fig. 35 is an external perspective view showing an example of shape measurement of the measurement object S using the rotation unit 190. As shown in Fig. 35, in this example, the shape of the measurement object S held by the holder 191 using two rod-shaped members 94 is measured while being rotated. In this case, when the upper surface 141s of the stage 140 is positioned within the measurement space 101, three-dimensional shape data indicating the shape of the upper surface 141s is generated together with three-dimensional shape data indicating the shape of the measurement object S.

[0214] Fig. 36 is a diagram showing an example of a three-dimensional shape image based on all three-dimensional shape data obtained by the shape measurement of Fig. 35. In the three-dimensional shape images of Fig. 36 and Fig. 37 described later, the position (height) in the Z direction is represented by hatching and dot patterns. In the three-dimensional shape image of Fig. 36, the portion indicated by the outline arrow represents the upper surface 141s of the stage 140. When the three-dimensional shape image of the stage 140 is displayed in addition to the measurement object S in this way, it is difficult for the user to grasp the shape of the measurement object S.

[0215] 36, the three-dimensional shape data corresponding to the top surface 141s of the stage 140 indicates a planar shape having a certain degree of continuous expansion. These three-dimensional shape data can be identified by extracting a data group of a plane having a continuous expansion and based on whether or not the normal direction of the extracted plane at each measurement angle position is upward and the position in the Z direction is at the position of the designed top surface 141s.

[0216] Fig. 37 is a diagram in which the three-dimensional shape image corresponding to the upper surface 141s of the stage 140 has been removed from the three-dimensional shape image of Fig. 36. The three-dimensional shape image of Fig. 37 allows the user to easily and accurately grasp the three-dimensional shape of the measurement target S. Note that the display ranges in the Z direction are different between the three-dimensional shape images of Fig. 36 and Fig. 37.

[0217] [7] Functional configuration of CPU210 in PC200 Fig. 38 is a block diagram showing a functional configuration of the CPU 210 in Fig. 1. As shown in Fig. 38, the CPU 210 includes a movement control unit 21a, a rotation control unit 21b, an imaging control unit 21c, an area setting unit 21d, a setting screen presenting unit 21e, a rotation angle setting unit 21f, a three-dimensional shape data generating unit 21g, a data synthesis unit 21h, a data correction unit 21i, an attachment / detachment determination unit 21j, and a display control unit 21k. These components are realized by the CPU 210 executing a shape measurement program stored in the storage device 240. Note that some or all of the above-mentioned components included in the CPU 210 may be realized by hardware such as electronic circuits.

[0218] The movement control unit 21a controls the stage driving unit 146 so that the position of the upper surface 141s of the stage 140 moves relative to the light receiving unit 120. In other words, the movement control unit 21a adjusts the relative position of the measurement space 101 with respect to the measurement object S by moving the upper surface 141s of the stage 140 in a state in which the measurement object S is placed on the stage 140. The rotation control unit 21b controls the rotation unit 190 so that the measurement object S rotates sequentially to a plurality of predetermined measurement angle positions during shape measurement of the measurement object S involving rotation.

[0219] The imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S placed on the stage 140 is imaged at a low magnification in order to detect the presence area of ​​the measurement object S. The imaging control unit 21c also controls the light projecting units 110A, 110B and the light receiving unit 120 so that the measurement area set by the area setting unit 21d described later is imaged with the measurement object S at each measurement angle position.

[0220] The region setting unit 21d detects the presence region of the measurement object S in a state where the measurement object S is placed on the stage 140 or in a state where the measurement object S held by the rotation unit 190 is at each measurement angle position. The region setting unit 21d also sets the measurement region based on the detection result of the presence region. Furthermore, the region setting unit 21d corrects the set measurement region based on the operation of the operation unit 250 by the user.

[0221] The setting screen presenting unit 21e displays a region setting map image on the display unit 400 when the measurement region is set by the region setting unit 21d. In addition, the setting screen presenting unit 21e displays the unit region frames MM, MMa, MMb in a superimposed manner on the image of the measurement target S in the region setting map image so that the set measurement region can be identified.

[0222] The rotation angle setting unit 21f sets a plurality of measurement angle positions when a shape measurement of the measurement target S involving rotation is performed. Here, the plurality of measurement angle positions corresponding to the first box-shaped region setting mode, the second box-shaped region setting mode, and the axis-shaped region setting mode, respectively, are stored in the storage device 240 as, for example, default information, as described above.

[0223] In this case, during shape measurement of the measurement target S involving rotation, the rotation angle setting unit 21f sets the multiple measurement angle positions by reading the multiple measurement angle positions stored in the storage device 240 according to the selected area setting mode. When a specific angle position is designated by the user using the operation unit 250 to operate, for example, the angle pitch setting unit 454 in Fig. 29, the rotation angle setting unit 21f may set the designated angle position as the measurement angle position.

[0224] The three-dimensional shape data generating unit 21g generates three-dimensional shape data indicating the shape of the measurement target S based on a plurality of image data generated by irradiating the measurement region with pattern light and capturing an image of the measurement region. The three-dimensional shape data generating unit 21g also generates three-dimensional shape data indicating the shape of the first marker M1 based on a plurality of image data generated by capturing an image of the first marker M1 located in the measurement region. The three-dimensional shape data generating unit 21g also generates three-dimensional shape data indicating the shape of the second marker M2 based on a plurality of image data generated by capturing an image of the second marker M2 located in the measurement region.

[0225] The data synthesis unit 21h performs the above-mentioned planar direction synthesis when three-dimensional shape data of multiple parts arranged in the XY direction on the surface of the measurement object S are generated separately. Also, when three-dimensional shape data of multiple parts arranged around the rotation axis RA on the surface of the measurement object S are generated separately, the data synthesis unit 21h performs the above-mentioned rotation direction synthesis in response to a user's instruction for synthesis. Furthermore, the data synthesis unit 21h synthesizes the three-dimensional shape data generated by planar direction synthesis and the three-dimensional shape data generated by rotation direction synthesis. Also, the data synthesis unit 21h can perform the above-mentioned height direction synthesis when multiple three-dimensional shape data are generated separately in a common measurement region by, for example, capturing images of the surface of the measurement object S at multiple positions in the Z direction.

[0226] When shape measurement of the measurement object S involving rotation is performed, the data correction unit 21i performs a correction process of the three-dimensional shape data according to any one of the above-mentioned first to third calibration functions depending on whether the first marker M1 and the second marker M2 are used. Specifically, in the correction process according to the first calibration function, the data correction unit 21i corrects multiple pieces of three-dimensional shape data of the measurement object S corresponding to multiple measurement angle positions, based on the three-dimensional shape data of the first marker M1 and its dimensions.

[0227] Furthermore, in the correction process according to the second calibration function, the data correction unit 21i corrects the multiple pieces of three-dimensional shape data of the measurement object S corresponding to the multiple measurement angular positions, based on the three-dimensional shape data of the first marker M1 and the second marker M2 and their dimensions. Note that, in the correction process according to the second calibration function, if the three-dimensional shape data of the first marker M1 does not exist, the data correction unit 21i corrects the multiple pieces of three-dimensional shape data of the measurement object S corresponding to the multiple measurement angular positions, based on the three-dimensional shape data of the second marker M2 and its dimensions.

[0228] Furthermore, in a correction process according to the third calibration function, the data correction unit 21i corrects multiple three-dimensional shape data of the measurement object S corresponding to multiple measurement angle positions based on the overlapping relationship of the three-dimensional shape data of the measurement object S at multiple measurement angle positions.

[0229] The attachment / detachment determination unit 21j determines whether the rotation unit 190 is attached to the stage 140. Specifically, when the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are connected, the attachment / detachment determination unit 21j determines that the rotation unit 190 is attached to the stage 140. Furthermore, when the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are not connected, the attachment / detachment determination unit 21j determines that the rotation unit 190 is not attached to the stage 140. Note that whether the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are connected can be easily determined based on whether an electrical signal can be exchanged between the attachment / detachment determination unit 21j and the rotation unit 190.

[0230] The display control unit 21k causes the display unit 400 to display a live image of the measurement object S and a three-dimensional shape image of the measurement object S, as well as various setting screens such as a basic measurement screen 401 and area setting screens 402 to 408.

[0231] In particular, when the rotation unit 190 is attached to the stage 140, the display control unit 21k causes the display unit 400 to display a horizontal movement operation window 411 and a rotation operation window 413. Furthermore, in this case, the display control unit 21k causes the display unit 400 to display an image for making various settings related to shape measurement of the measurement target S accompanied by rotation.

[0232] Furthermore, when the rotation unit 190 is not attached to the stage 140, the display control unit 21k causes the display unit 400 to display the horizontal movement operation window 411, but does not cause the display unit 400 to display the rotation operation window 413. Furthermore, in this case, the display control unit 21k causes the display unit 400 to display an image for making various settings related to shape measurement of the measurement target S that does not involve rotation.

[0233] [8] Shape measurement processing Figures 39 and 40 are flowcharts showing an example of a shape measurement process executed by the CPU 210. The shape measurement process of Figures 39 and 40 is repeatedly performed at a predetermined cycle by the CPU 210 of the PC 200 executing a shape measurement program stored in the storage device 240 while the power supply of the shape measuring device 500 is on. Note that in an initial state, it is assumed that the illumination light is irradiated from the illumination light output unit 130 toward the stage 140, and the light receiving unit 120 is capturing an image of the upper surface 141s of the stage 140.

[0234] First, as shown in the example of Fig. 22, the display control unit 21k causes the display unit 400 to display a basic measurement screen 401 including a live image and a measurement start button 425, etc., in a state in which the rotation unit 190 cannot be operated (step S101). Therefore, the basic measurement screen 401 displayed in step S101 includes a horizontal movement operation window 411 (Fig. 22) for operating the stage 140, but does not include a rotation operation window 413 (Fig. 24) for operating the rotation unit 190.

[0235] Next, the attachment / detachment determination unit 21j determines whether or not the rotation unit 190 is attached to the stage 140 (step S102). If the rotation unit 190 is not attached to the stage 140, the attachment / detachment determination unit 21j advances the process to step S105, which will be described later. On the other hand, if the rotation unit 190 is attached to the stage 140, the display control unit 21k causes the display unit 400 to display a measurement basic screen 401 in a state in which the rotation unit 190 can be operated, as shown in the example of FIG. 24 (step S103). Note that, at the time of the determination in step S102, the display control unit 21k may cause the display unit 400 to display a message or an indicator, etc., indicating whether or not the rotation unit 190 is attached to the stage 140, depending on the determination result.

[0236] Next, the attachment / detachment determination unit 21j determines whether the rotation unit 190 is detached or not while the basic measurement screen 401 (FIG. 24) on which the rotation unit 190 can be operated is displayed on the display unit 400 (step S104). If the rotation unit 190 is detached, the attachment / detachment determination unit 21j returns the process to step S101. On the other hand, if the rotation unit 190 is not detached, the movement control unit 21a and the rotation control unit 21b receive an instruction to adjust the position of the stage 140, etc. (step S105). The position adjustment of the stage 140, etc. is instructed, for example, by the user using the operation unit 250 to operate the horizontal movement operation window 411 (FIGS. 22 and 24) or the rotation operation window 413 (FIG. 24). At this time, the movement control unit 21a moves the upper surface 141s of the stage 140 in the X direction, the Y direction, and the Z direction in response to the instruction to adjust the position of the stage 140. Furthermore, in response to a rotation command for the rotation unit 190 from the user, the rotation control unit 21b rotates the holding portion 191 of the rotation unit 190. As a result, for example, the position of the focal point of the light receiving unit 120 is adjusted.

[0237] Thereafter, a measurement area setting process is performed based on the user's operation of the operation unit 250 (step S106). In the measurement area setting process, in shape measurement of the measurement object S involving rotation, a plurality of measurement angle positions are set and one or a plurality of measurement areas are set for each measurement angle position. In addition, in shape measurement of the measurement object S not involving rotation, one or a plurality of measurement areas are set. The measurement area setting process executed by the CPU 210 will be described in detail later.

[0238] Next, the data synthesis unit 21h receives an instruction as to whether or not to synthesize a plurality of three-dimensional shape data acquired at a plurality of measurement angle positions when a measurement region for shape measurement of the measurement target S accompanied by rotation is set (step S107). This reception is performed, for example, based on whether or not the synthesis necessity check box 457 in FIG. 29 is checked by the user. When measuring the shape of the measurement target S without rotation, the process of step S107 is skipped. Note that, for example, the basic measurement screen 401 in FIG. 22 or FIG. 24 may be provided with a synthesis necessity input section for specifying whether or not to perform planar direction synthesis and whether or not to perform rotation direction synthesis. In this case, the data synthesis unit 21h may receive an input from the synthesis necessity input section in step S107.

[0239] Next, the data correction unit 21i receives a command as to whether or not three-dimensional shape data indicating the upper surface 141s of the stage 140 is required from the three-dimensional shape data generated by the shape measurement of the measurement target S (step S108). This reception is performed based on, for example, whether or not the upper surface removal button 429 in FIG. 22 or FIG. 24 has been operated by the user.

[0240] Next, the imaging control unit 21c judges whether or not a command to start imaging the measurement target S using the pattern light has been received (step S109). This acceptance is performed, for example, based on whether the measurement start button 425 in FIG. 22 or FIG. 24 has been operated by the user. If the command to start imaging has not been received, the imaging control unit 21c judges whether or not a command to return to the initial state has been received (step S112). This judgment is performed, for example, based on whether the area clear button 423 in FIG. 22 or FIG. 24 has been operated by the user. If a command to return to the initial state has been received, the imaging control unit 21c returns the process to step S101. If a command to return to the initial state has not been received, the imaging control unit 21c advances the process to step S111, which will be described later.

[0241] On the other hand, when a command to start imaging is received, imaging is performed using pattern light in the set measurement region, and three-dimensional shape data is generated based on a plurality of image data obtained by imaging (step S110).

[0242] Specifically, when a plurality of measurement angle positions are set, the rotation control unit 21b controls the rotation unit 190 so that the measurement target S rotates sequentially to the plurality of measurement angle positions set around the rotation axis RA. In addition, the movement control unit 21a controls the stage driving unit 146 so that the set measurement area is imaged for the measurement target S placed on the stage 140 or the measurement target S held by the rotation unit 190. In addition, the imaging control unit 21c controls the light projecting units 110A, 110B and the light receiving unit 120 so that the set measurement area is imaged. Furthermore, the three-dimensional shape data generating unit 21g generates three-dimensional shape data of the measurement area based on a plurality of image data obtained by imaging. At this time, the display control unit 21k causes the display unit 400 to display a three-dimensional shape image based on the generated three-dimensional shape data.

[0243] When the data synthesis unit 21h is instructed to synthesize multiple pieces of three-dimensional shape data in step S107, the data synthesis unit 21h synthesizes multiple pieces of three-dimensional shape data corresponding to multiple measurement angular positions (rotational direction synthesis). On the other hand, when the data synthesis unit 21h is not instructed to synthesize multiple pieces of three-dimensional shape data in step S107, the data synthesis unit 21h does not synthesize multiple pieces of three-dimensional shape data corresponding to multiple measurement angular positions.

[0244] Furthermore, the data correction unit 21i corrects each of the multiple pieces of three-dimensional shape data before synthesis in accordance with a calibration function enabled in the processes of steps S236 and S237 of the measurement region setting process described below. Furthermore, when a command is given in step S108 that the three-dimensional shape data indicating the upper surface 141s is unnecessary, the data correction unit 21i removes the three-dimensional shape data indicating the upper surface 141s of the stage 140 from all the generated three-dimensional shape data.

[0245] Next, the region setting unit 21d determines whether or not there is a measurement region reset command by the user operating the operation unit 250 (step S111). If there is a reset command, the region setting unit 21d returns the process to step S106. On the other hand, if there is no reset command, the region setting unit 21d ends the series of shape measurement processes. At this time, the three-dimensional shape data generating unit 21g stores the generated three-dimensional shape data in the storage device 240 together with various setting information (e.g., multiple measurement angle positions and multiple measurement regions, etc.).

[0246] The measurement area setting process included in the shape measurement process will be described in detail. Note that the measurement area setting process described below corresponds to the shape measurement of the measurement target S accompanied by rotation by the rotation unit 190. Fig. 41 and Fig. 42 are flowcharts showing an example of the measurement area setting process executed by the CPU 210.

[0247] As shown in Fig. 41, first, the region setting unit 21d judges whether the first or second box-shaped region setting mode has been selected as the mode for setting the measurement region (step S201). This judgment is made based on whether the user has operated, for example, the box circumference button 434 or the box portion button 435 in Fig. 24 in the above-mentioned step S31.

[0248] When the first or second box-shaped area setting mode is selected, the rotation angle setting unit 21f reads a plurality of measurement angle positions corresponding to the selected box-shaped area setting mode from the storage device 240 (step S202). The plurality of measurement angle positions are defined at intervals of an integer multiple of a predetermined angle (e.g., 30°, 45°, or 90°). In other words, the plurality of measurement angle positions are defined at a predetermined angle pitch. This read process corresponds to a setting process of the plurality of measurement angle positions. The rotation angle setting unit 21f may set the plurality of measurement angle positions based on information designated by the user operating the angle condition setting unit 453 and the angle pitch setting unit 454 in FIG. 29, etc.

[0249] Next, the low-magnification camera captures an image of the entire measurement object S at each measurement angle position (step S203). At this time, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S rotates sequentially to the set measurement angle positions. Furthermore, the imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S is imaged by the low-magnification camera while the measurement object S is at each measurement angle position. Furthermore, the movement control unit 21a moves the upper surface 141s of the stage 140 in the XY direction so that the unimaged portion of the measurement object S moves sequentially into the imaging area of ​​the light receiving unit 120 when the measurement object S is not imaged in its entirety at once.

[0250] Thereafter, the region setting unit 21d detects an existence region corresponding to each measurement angle position based on the image data obtained by the imaging in step S203 (step S204). Here, the imaging of the measurement object S in step S203 is performed in order to detect the existence region of the measurement object S in the subsequent step S204. Therefore, basically, the entire measurement object S needs to be imaged.

[0251] As described above, in step S203, the measurement object S is imaged by the low-magnification camera. The imaging area of ​​the camera 121A, which is a low-magnification camera, is larger than the imaging area of ​​the camera 121B, which is a high-magnification camera. Therefore, when the entire measurement object S is imaged by the low-magnification camera, the number of times of imaging can be reduced compared to when the entire measurement object S is imaged by the high-magnification camera. Therefore, the time required to detect the existence area can be shortened.

[0252] After the process of step S204, the region setting unit 21d provisionally sets a region including the existence region of each detected measurement angular position as the measurement region of the measurement angular position (step S205). Then, the setting screen presenting unit 21e generates a region setting map image based on the multiple image data obtained in step S204 and the measurement region of each set measurement angular position, and displays it on the display unit 400 (step S206). At this time, the setting screen presenting unit 21e displays one or more unit region frames MM superimposed on the image of the measurement target S in the region setting map image so that the set measurement region can be identified.

[0253] Next, the area setting unit 21d judges whether or not the setting of the measurement area is completed (step S207). This judgment is made based on, for example, whether or not the measurement start button 425 in FIG. 24 has been operated by the user. When the setting of the measurement area is completed, the measurement area setting process ends. On the other hand, if the setting of the measurement area is not completed, the area setting unit 21d judges whether or not there is an instruction to correct the measurement area (step S231). This judgment is made based on, for example, whether or not there is an instruction from the user to change, add, or delete the measurement area on the area setting screens 403 to 405 in FIGS. 26 to 28.

[0254] If there is no command to modify the measurement area in step S231, the area setting unit 21d advances the process to step S233 described later. On the other hand, if there is a command to modify the measurement area in step S231, the area setting unit 21d accepts the modification and modifies the already-set measurement area in accordance with the accepted content (step S232).

[0255] Next, the data correction unit 21i judges whether or not there is a command to use either the first marker M1 or the second marker M2 for calibrating the three-dimensional shape data (step S233). If there is a command to use a marker, the data correction unit 21i judges the type of marker to be used (step S234). The judgments of steps S233 and S234 by the data correction unit 21i are made based on, for example, which of the first calibration checkbox 463 and the second calibration checkbox 464 in FIG. 30 has been checked by the user.

[0256] Next, the data correction unit 21i adds a new measurement region setting according to the marker to be used (step S235), and enables a calibration function according to the marker to be used (step S236). After that, the data correction unit 21i returns the process to step S207. In step S236, if the marker to be used is the first marker M1, the first calibration function is enabled. On the other hand, if the marker to be used is the second marker M2, the second calibration function is enabled. If there is no command to use a marker in step S233, the data correction unit 21i enables the third calibration function (step S237), and returns the process to step S207.

[0257] In the above step S201, if the first or second box-shaped region setting mode is not selected, the region setting unit 21d judges whether or not the axis-shaped region setting mode is selected as a mode for setting the measurement region (step S211). This judgment is made based on, for example, whether the axis button 436 in FIG. 24 is operated by the user.

[0258] When the shaft-shape region setting mode is selected, the rotation angle setting unit 21f reads a plurality of measurement angle positions corresponding to the shaft-shape region setting mode from the storage device 240 (step S212). This reading process corresponds to the setting process of a plurality of measurement angle positions, similar to the process of step S202. Note that the rotation angle setting unit 21f may set a plurality of measurement angle positions based on conditions designated by the user operating the angle condition setting unit 453 and the angle pitch setting unit 454 in FIG. 29, etc.

[0259] Next, the low-magnification camera captures an image of the entire measurement object S at one of the multiple measurement angle positions (step S213). At this time, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S is held at one of the multiple measurement angle positions. In addition, the imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S is captured by the low-magnification camera while the measurement object S is at one measurement angle position. Furthermore, the movement control unit 21a moves the upper surface 141s of the stage 140 in the XY direction so that the uncaptured portion of the measurement object S moves sequentially into the imaging area of ​​the light receiving unit 120 when the entire measurement object S is not captured at once.

[0260] Thereafter, the region setting unit 21d detects an existence region corresponding to one measurement angle position based on the image data obtained by the imaging in step S213 (step S214), and the process proceeds to step S205. In the above step S213, the measurement target S is imaged by a low-magnification camera, similar to the process in step S203. This makes it possible to shorten the time required to detect the existence region.

[0261] If the axis shape region setting mode is not selected in step S211, the region setting unit 21d judges whether or not a command to set details of the measurement region has been received (step S221). This judgment is made based on whether the user has operated the rotation detail button 437 in FIG. 24, for example.

[0262] When a command to set details of the measurement area is received, the area setting unit 21d accepts the setting of the measurement area (step S222). Here, for example, the conditions specified by the user operating the angle condition setting unit 453 and the angle pitch setting unit 454 in Fig. 29 are accepted. After that, the area setting unit 21d advances the process to step S207.

[0263] In the measurement region setting process corresponding to the shape measurement of the measurement object S not involving rotation, after the existence region of the measurement object S is detected, the same processes as the above steps S205 to S207, S231, and S232 are performed.

[0264] [9] Effects (1) In the shape measuring device 500 according to the present embodiment, in order to perform shape measurement of the measurement object S accompanied by rotation, for example, a first configuration function using the first marker M1 is set to be used. In this case, the first marker M1 and the measurement object S are imaged. Based on the image data obtained by the imaging, three-dimensional shape data of the first marker M1 and three-dimensional shape data of the measurement object S are generated. Based on the three-dimensional shape data of the first marker M1 and the dimensions of the first marker M1, a correction process of the three-dimensional shape data according to the first calibration function is performed.

[0265] In this case, the three-dimensional shape data of the first marker M1 is generated with the measurement object S held by the holding unit 191, so that when the rotational state of the holding unit 191 changes as a result of the holding unit 191 holding the measurement object S, the rotational state of the first marker M1 also changes in the same manner as the holding unit 191. Therefore, the three-dimensional shape data of the first marker M1 is more suitable for correcting the three-dimensional shape data of the measurement object S compared to when the three-dimensional shape data is generated with the measurement object S not held by the holding unit 191. As a result, it becomes possible to measure the shape with high accuracy over a wide range on the surface of the measurement object S.

[0266] The first marker M1 constitutes a part of the holding unit 191. Therefore, in order to calibrate the shape measuring device 500, it is not necessary to attach a calibration tool to the holding unit 191 and to replace the calibration tool attached to the holding unit 191 with the measurement target S. Therefore, the time required for the calibration work of the shape measuring device 500 is shortened.

[0267] (2) In addition, in the shape measuring device 500, the use of a second configuration function using the second marker M2 is set to perform shape measurement of the measurement object S involving rotation. In this case, the second marker M2 and the measurement object S are imaged, and three-dimensional shape data of the second marker M2 and three-dimensional shape data of the measurement object S obtained by the image capturing are generated. Based on the three-dimensional shape data of the second marker M2 and the dimensions of the second marker M2, a correction process of the three-dimensional shape data according to the second calibration function is performed. According to the second calibration function, the three-dimensional shape data of the first marker M1 and the second marker M2 are used, thereby improving the measurement accuracy of the measurement object S.

[0268] Furthermore, in the shape measuring device 500, in order to perform shape measurement of the measurement object S involving rotation, a third configuration function that does not use the first marker M1 and the second marker M2 is set to be used. In this case, correction processing of the three-dimensional shape data according to the third calibration function is performed based on the three-dimensional shape data of the measurement object S. According to the third calibration function, since it is not necessary to capture the first marker M1 and the second marker M2, it is possible to shorten the time required to measure the measurement object S.

[0269] (3) The user can select one of the first to third calibration functions by checking or not checking, for example, the first calibration checkbox 463 or the second calibration checkbox 464 in Fig. 31. Therefore, a desired calibration function can be easily selected depending on the purpose of the shape measurement, improving the convenience of measuring the shape of the measurement target S.

[0270] (4) In the shape measuring device 500 according to this embodiment, the measurement object S is placed on the upper surface 141s of the stage 140, and the measurement object S is irradiated with a pattern light. Alternatively, the measurement object S is held by the rotation unit 190, and the measurement object S rotating around the rotation axis RA intersecting the optical axis ROA of the light receiving unit 120 is irradiated with the pattern light. The measurement object S irradiated with the pattern light is imaged by the light receiving unit 120. Three-dimensional shape data of the measurement object S is generated based on a plurality of image data obtained by imaging.

[0271] In this case, the user can place the measurement object S on the upper surface of the stage or rotate the measurement object S by the rotation unit so that the pattern light is incident on the shape of a desired portion of the measurement object S. As a result, it becomes possible to measure the shape over a wide range on the surface of the measurement object S.

[0272] (5) In the shape measuring device 500 of this embodiment, when a measurement area is set for performing shape measurement of the measurement object S involving rotation, the presence area of ​​the measurement object S corresponding to each of the set multiple measurement angle positions is detected.

[0273] Furthermore, the measurement area to be imaged by the light receiving unit 120 for each measurement angle position is set based on the detection result of the existence area at that measurement angle position. In this case, the user does not need to perform a cumbersome setting operation according to the shape of the measurement target S for each measurement angle position. After that, with the measurement target S at each measurement angle position, the image of the set measurement area is captured, and multiple three-dimensional shape data are generated. As a result, it becomes possible to measure the shape over a wide range on the surface of the measurement target S without the need for a cumbersome setting operation.

[0274]

[10] Other embodiments (1) In the shape measurement process according to the above embodiment, the area setting unit 21d may set a measurement range of the measurement object S in the Z direction when setting a measurement area of ​​the measurement object S. In addition, when the set imaging range in the Z direction exceeds the range of the measurement space 101 in the Z direction (the range of the depth of field of the light receiving unit 120), height direction synthesis may be performed.

[0275] In this case, the region setting screen is displayed on the display unit 400 so as to be able to accept, for example, whether or not it is necessary to set a measurement range of the measurement object S in the Z direction. Fig. 43 is a diagram showing an example of a region setting screen which is able to accept, for example, whether or not it is necessary to set a measurement range of the measurement object S in the Z direction. In the region setting screen 404 of Fig. 43, with a region setting map image being displayed in the main display region 410, a height range button 471 is displayed in the sub-display region 420.

[0276] When the user wishes to set a measurement range in the Z direction, the user operates height range button 471. This causes a region setting screen for setting the measurement range in the Z direction of the measurement object S to be displayed on display unit 400. Fig. 44 is a diagram showing an example of the region setting screen for setting the measurement range in the Z direction of the measurement object S.

[0277] The area setting screen 409 in Figure 44 displays various images and operation windows for setting the measurement range of the specified measurement angular position (0° in this example) by operating the angular position list 441 in the sub-display area 420.

[0278] Specifically, the main display area 410 displays an area setting map image IMa of a measurement angular position specified by the angular position list 441, and an area setting map image IMb of a measurement angular position shifted by 90° from the specified measurement angular position. Also, an upper limit mark 472 and a lower limit mark 473 indicating the upper limit position and the lower limit position of the measurement range in the Z direction, respectively, are superimposed and displayed so as to be vertically slidable on the area setting map image IMb. This allows the user to set the measurement range in the Z direction at the specified measurement angular position by sliding the upper limit mark 472 and the lower limit mark 473 vertically while visually checking the image of the measurement target S displayed on the area setting map image IMb.

[0279] Furthermore, in the main display area 410, a range setting window 481 is displayed for specifying the measurement range in the Z direction numerically or for issuing a command to perform automatic setting. In the range setting window 481, an upper limit input section 482 and a lower limit input section 483 are displayed for the user to numerically input the upper limit position and the lower limit position of the measurement range in the Z direction, respectively. In addition, in the range setting window 481, a width input section 484 and a center input section 485 are displayed for the user to numerically input the size (vertical width) of the measurement range in the Z direction and its center position, respectively. In addition, in the range setting window 481, an automatic setting button 486 is displayed for issuing a command to automatically set the measurement range in the Z direction for each of all measurement angle positions.

[0280] This allows the user to set the measurement range by inputting numerical values ​​into upper limit input section 482 and lower limit input section 483, instead of operating upper limit mark 472 and lower limit mark 473. Alternatively, the user can set the measurement range by inputting numerical values ​​into width input section 484 and center input section 485. Alternatively, the user can set the measurement range in the Z direction for all measurement angle positions by operating automatic setting button 486.

[0281] When the automatic setting button 486 is operated, the region setting unit 21d may set the measurement range for each measurement angular position as follows. For example, when setting a measurement range in the Z direction for one measurement angular position, the region setting unit 21d reads in a region setting map image for a measurement angular position shifted by 90° from the one measurement angular position. The region setting unit 21d also detects the Z direction range in which the measurement target S exists from the read region setting map image, and sets the detected range as the Z direction range for the one measurement angular position.

[0282] Alternatively, the region setting unit 21d can set the measurement range for each measurement angle position as follows. For example, the rotation control unit 21b moves the rotation unit 190 to a plurality of measurement angle positions in sequence. Then, the imaging control unit 21c causes the light receiving unit 120 to capture images of a plurality of parts of the measurement object S in a state where the measurement object S is at each measurement angle position, and moves the stage 140 in the Z direction so that the focal plane 120F of the light receiving unit 120 is aligned with each of the plurality of parts of the measurement object S facing upward. Then, the region setting unit 21d sets the measurement range based on the movement range of the stage 140 in the Z direction.

[0283] In this case, when the measurement range exceeds the range of the measurement space 101 (the range of the depth of field of the light receiving unit 120), the imaging control unit 21c may determine multiple positions of the upper surface 141s in the Z direction so that multiple parts of the measurement object S are included within the range of the measurement space 101.

[0284] Alternatively, the region setting unit 21d can set the measurement range for each measurement angle position as follows. For example, the rotation control unit 21b moves the rotation unit 190 to a plurality of measurement angle positions in sequence. Then, the imaging control unit 21c detects the position of the upper end of the measurement object S in the Z direction by imaging the measurement object S using pattern light while the measurement object S is at each measurement angle position and generating three-dimensional shape data. Then, the region setting unit 21d sets the measurement range based on the generated three-dimensional shape data of the measurement object S. Note that, when imaging the measurement object S for setting the measurement range in the Z direction, it is preferable to use pattern light with low resolution as a so-called rough measurement, thereby reducing the number of times the pattern light is irradiated.

[0285] As described above, the measurement range in the Z direction of the measurement target S is set. As a result, when the measurement range set at an arbitrary measurement angle position exceeds the measurement space 101, the CPU 210 can generate three-dimensional shape data multiple times while changing the position of the stage 140 in the Z direction at the measurement angle position. In addition, by performing height direction synthesis using the multiple generated three-dimensional shape data, it becomes possible to measure the shape over a wider range on the surface of the measurement target.

[0286] (2) In the shape measurement process of the above embodiment, in order to detect the presence area of ​​the measurement object S corresponding to each measurement angle position when measuring the shape of the measurement object S involving rotation, the measurement object S at each measurement angle position is imaged using illumination light, but the present invention is not limited to this.

[0287] In order to detect the existence area of ​​the measurement object S corresponding to each measurement angle position, the CPU 210 may perform the following process. For example, in step S204, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S is held at a representative angle position that is a part (e.g., 0° and 180°) of the multiple measurement angle positions. In addition, the imaging control unit 21c controls the light projecting units 110A and 110B and the light receiving unit 120 so that multiple image data are generated by imaging the measurement object S while irradiating it with pattern light in a state where the measurement object S is at each representative angle position. The three-dimensional shape data generating unit 21g generates three-dimensional shape data corresponding to each representative angle position based on the multiple image data generated in a state where the measurement object S is at each representative angle position.

[0288] In this case, by combining the three-dimensional shape data corresponding to one representative angular position of 0° with the three-dimensional shape data corresponding to another representative angular position of 180°, it is possible to grasp almost the entire shape of the measurement object S. Therefore, the region setting unit 21d detects the existence regions of the measurement object S corresponding to the multiple measurement angular positions based on the generated three-dimensional shape data. According to the above process, it is not necessary to capture an image of the measurement object at each of the multiple angular positions in order to detect the existence regions for the multiple measurement angular positions.

[0289] The three-dimensional shape data generated to detect the existence region does not require high measurement accuracy. Therefore, when generating the three-dimensional shape data to detect the existence region, it is preferable to use a pattern light having a lower resolution than when generating the three-dimensional shape data to obtain the shape of the measurement target S, and to reduce the number of times that the pattern light is irradiated.

[0290] (3) In the shape measurement process according to the above embodiment, data synthesis unit 21h receives an instruction as to whether or not to synthesize three-dimensional shape data for a plurality of measurement angular positions in the process of step S107, but the present invention is not limited to this.

[0291] In step S107, the data synthesis unit 21h may accept that only a part of the multiple pieces of three-dimensional shape data at the multiple measurement angular positions is to be synthesized. In this case, for example, in the secondary display area 420 in Fig. 29, instead of the synthesis necessity check box 457, an input unit or the like may be provided for selecting the measurement angular positions at which the three-dimensional shape data should be synthesized from among the multiple measurement angular positions.

[0292] When it is accepted that only multiple pieces of three-dimensional shape data acquired at some of the multiple measurement angle positions are to be combined, the data combination unit 21h may combine only some of the multiple pieces of three-dimensional shape data in accordance with the accepted information.

[0293] A data synthesis command section for commanding whether or not at least a part of the three-dimensional shape data arranged in the rotational direction is to be rotationally synthesized may be displayed on the display section 400. Specifically, check boxes or the like for individually designating the three-dimensional shape data to be synthesized may be displayed as the data synthesis command section in the sub-display area 420 of the area setting screens 403 to 405 in Figs. 26 to 28. This allows the user to obtain three-dimensional shape data for the shape of the measurement target S in a desired manner.

[0294] (4) In the above embodiment, the rotation angle setting unit 21f reads from the storage device 240 a plurality of measurement angular positions predetermined for each mode in the processing of step S212, and sets the plurality of measurement angular positions, but the present invention is not limited to this.

[0295] Instead of reading a plurality of predetermined measurement angular positions in the process of step S212, the rotation angle setting unit 21f may set a plurality of measurement angular positions by the following method.

[0296] For example, when the axis-shaped region setting mode is selected in step S211, the rotation angle setting unit 21f first adjusts the position of the stage 140 in the Z direction so that the focal plane 120F of the light receiving unit 120 coincides with the highest part of the measurement object S. Next, the rotation angle setting unit 21f calculates the radial size (actual dimension) of the measurement object S based on the rotation axis RA, based on the position of the stage 140 in the Z direction when the focal plane 120F of the light receiving unit 120 is located on the surface of the measurement object S and the working distance WD (FIG. 8) of the light receiving unit 120.

[0297] In this case, it becomes possible to grasp the size of the measurement area set on the outer circumferential surface of the measurement target S based on the calculated size. As a result, when the measurement target S is imaged by the light receiving unit 120 while being rotated around the rotation axis RA, the rotation angle setting unit 21f may set a plurality of measurement angle positions so that two consecutive measurement areas in the rotation direction partially overlap each other.

[0298] According to the above-described method for setting the measurement angular position, the measurement region is appropriately set in the rotation direction of the measurement object S held by the rotation unit 190 so as to cover the entire surface of the measurement object S.

[0299] (5) The shape measuring device 500 according to the above embodiment may have a so-called autofocus function. For example, when the light receiving unit 120 captures the measurement object S, the position of the upper surface 141s in the Z direction may be adjusted so that the focal plane 120F of the light receiving unit 120 is located on at least a part of the measurement object S. Alternatively, the position of the lens 122 in the light receiving unit 120 may be adjusted.

[0300] (6) In the shape measurement process according to the above embodiment, the user sets the measurement area by checking the area setting map image, but the present invention is not limited to this. In the shape measurement process, for example, the shape of the measurement target S may be measured without generating an area setting map image in response to a command from the user.

[0301] Specifically, with the rotation unit 190 attached to the stage 140, the user operates the operation unit 250 to issue a command to measure the shape of the measurement target S without checking the region setting map image. In this case, the CPU 210 performs imaging using pattern light at each of a plurality of predetermined measurement angle positions, and generates three-dimensional shape data.

[0302] Therefore, the CPU 210 sets one measurement area corresponding to each measurement angle position, generates three-dimensional shape data for the one measurement area, estimates (detects) the area where the measurement target S exists from the generated three-dimensional shape data, and sets a new measurement area as necessary. At this time, the new measurement area is set so that a part of it overlaps with the one measurement area. After that, the CPU 210 generates three-dimensional shape data for the new measurement area, estimates (detects) the area where the measurement target S exists, and further sets the new measurement area.

[0303] In this way, the CPU 210 may alternately generate three-dimensional shape data, estimate the area in which the measurement object S exists, and set the measurement area for each measurement angle position, thereby performing shape measurement of the entire circumference of the measurement object S.

[0304] (7) In the shape measuring device 500 according to the above embodiment, information on the measurement angle position and measurement area set during shape measurement of the measurement object S may be stored in the storage device 240 as setting information together with the three-dimensional shape data of the measurement object S. In this case, for example, by reading out the setting information stored in the storage device 240 according to the measurement object S, the measurement angle position and measurement area may be set based on the read setting information.

[0305] In this way, because the shape measuring device 500 has the function of saving and reading out setting information, when sequentially measuring the shapes of multiple measurement objects S having the same shape, the user does not need to repeatedly set the measurement angle position and measurement area.

[0306] (8) In the process of step S203 of the shape measurement process according to the above embodiment, the measurement object S is imaged by a low-magnification camera at a plurality of measurement angle positions. At this time, based on the image data of the measurement object S imaged at each measurement angle position, it may be determined whether or not the measurement object S and the stage 140 will interfere with each other at other measurement angle positions. Furthermore, for other measurement angle positions where it is determined that the measurement object S and the stage 140 will interfere with each other, imaging of the measurement object S may be skipped, and a message or indicator indicating that the measurement object S and the stage 140 will interfere with each other may be displayed on the display unit 400.

[0307] Fig. 45 is a diagram for explaining the interference determination function between the measurement object S and the stage 140. For example, the region setting map image of Fig. 45(a) is generated by capturing an image of the measurement object S at one measurement angle position. In this case, as shown by the dashed line RAi in Fig. 45(a), the position of the rotation axis RA on the region setting map image is known. Therefore, by determining the distance di1 between one end of the object image SI and the dashed line RAi in the direction perpendicular to the rotation axis RA on the region setting map image, it is possible to determine the radius at which one end of the measurement object S rotates.

[0308] Fig. 45(b) shows a side view of rotation unit 190 seen in the X direction corresponding to the area setting map image in Fig. 45(a). If it is possible to determine the radius at which one end of measurement object S rotates as described above, it is possible to determine the angle range rθ in which one end of measurement object S interferes with stage 140 based on the determined radius d1 and the actual dimensions of rotation unit 190 and stage 140, as shown in Fig. 45(b).

[0309] (9) In the shape measuring device 500 according to the above embodiment, the rotation unit 190 has a configuration in which the holding portion 191 protrudes from the side surface ss1 of the casing of the rotation drive portion 192, but the present invention is not limited to this.

[0310] FIG. 46 is a diagram showing a configuration example of a rotation unit 190 according to another embodiment. As shown in FIG. 46(a), the rotation unit 190 of this example includes a fixed holding member 810 and a rotary holding member 820 in addition to a holding section 191 and a rotary drive section 192. The fixed holding member 810 is composed of two support columns 811 and a connecting section 812. The connecting section 812 is provided so as to extend in the horizontal direction. The two support columns 811 are provided so as to extend upward from both ends of the connecting section 812. The connecting section 812 connects the lower ends of the two support columns 811 and is configured so as to be installable on the upper surface 141s of the stage 140.

[0311] The rotating holding member 820 is provided between two support pillars 811 of the fixed holding member 810. The rotating holding member 820 is composed of two support pillars 821 and a connecting portion 822. One end of each of the support pillars 821 on one side is supported rotatably around a predetermined rotation axis 830 with respect to one support pillar 811 of the fixed holding member 810. One end of each of the support pillars 821 on the other side is supported rotatably around a predetermined rotation axis 830 with respect to the other support pillar 811 of the fixed holding member 810. The other ends of the two support pillars 821 are connected by a connecting portion 822. A rotation drive unit 192 is attached to the connecting portion 822.

[0312] 46(b), with the fixed holding member 810 fixed on the stage 140, the rotatable holding member 820 can be rotated relative to the fixed holding member 810. This can improve the degree of freedom of the adjustable attitude of the measurement target S held by the holding unit 191.

[0313] (10) In the measurement unit 100 according to the above embodiment, in order to adjust the positional relationship between the upper surface 141s of the stage 140 and the light receiving unit 120, the stage driving unit 146 moves the upper surface 141s of the stage 140 relative to the light receiving unit 120. The present invention is not limited to this.

[0314] For example, the measurement unit 100 may have a configuration for movably supporting an optical system support 992 with respect to the upper surface 141s of the stage 140 in order to adjust the positional relationship between the upper surface 141s of the stage 140 and the light receiving unit 120. In addition, the measurement unit 100 may have a drive unit for moving the optical system support 992.

[0315] (11) In the shape measuring device 500 of the above embodiment, the first marker M1 and the second marker M2 used in the first and second calibration functions each have a cylindrical outer surface, but the present invention is not limited to this.

[0316] A shaft member having a regular polygonal cross section may be used as the first marker M1 and the second marker M2. In this case, it is preferable that the number of vertices of the regular polygon representing the cross section of the shaft member is greater than four.

[0317] (12) In the shape measuring device 500 according to the above embodiment, the measurement object S is irradiated with a pattern light multiple times, and the measurement object S is imaged. Three-dimensional shape data is generated based on the multiple image data obtained by imaging. However, the present invention is not limited to the above example.

[0318] The three-dimensional shape data may be generated based on image data obtained by other imaging methods instead of imaging involving irradiation with pattern light. For example, the three-dimensional shape data may be generated by a stereo method by imaging the measurement object S with multiple light receiving units 120 or by imaging the measurement object S from multiple positions.

[0319] (13) In the shape measuring apparatus 500 according to the above embodiment, the stage 140 is provided for placing the measurement object S and for supporting the rotation unit 190, but the present invention is not limited to this. If it is possible to perform shape measurement on the measurement object S held by the rotation unit 190, the stage 140 does not have to be provided. In this case, the rotation unit 190 is attached to, for example, the base 990 in FIG. 3.

[0320] (14) In the shape measuring device 500 of the above embodiment, the dimensions of the first marker M1 and the second marker M2 are stored in the memory device 240, but these dimensions may also be stored in the ROM 220 or in the working memory 230.

[0321] (15) According to the first calibration function of the above embodiment, the first marker M1 is imaged together with the measurement object S at each of a plurality of measurement angular positions during shape measurement of the measurement object S involving rotation, but the present invention is not limited to this. The first marker M1 only needs to be imaged at at least one of the plurality of measurement angular positions during shape measurement of the measurement object S involving rotation. In this case, even if the first marker M1 is imaged at only one measurement angular position, for example, the three-dimensional shape data of the measurement object S generated corresponding to all measurement angular positions can be appropriately corrected based on the three-dimensional shape data obtained by the image capture.

[0322] (16) According to the second calibration function of the above embodiment, the second marker M2 is imaged together with the measurement object S at each of a plurality of measurement angle positions during shape measurement of the measurement object S involving rotation, but the present invention is not limited thereto. The second marker M2 may be imaged only at some of the measurement angle positions as long as the entire circumference of the second marker M2 is imaged during shape measurement of the measurement object S involving rotation. In this case, even if the second marker M2 is imaged only at some measurement angle positions, for example, the three-dimensional shape data of the measurement object S generated corresponding to all measurement angle positions can be appropriately corrected based on the three-dimensional shape data obtained by the imaging.

[0323] (17) In the shape measurement process of the above embodiment, when performing shape measurement of the measurement object S involving rotation by the rotation unit 190, multiple measurement angle positions are set by the measurement area setting process, but the present invention is not limited to this.

[0324] When performing shape measurement of the measurement target S involving rotation by the rotation unit 190, in the measurement region setting process, for example, one measurement angular position designated by the user may be set.

[0325] In this case, the user operates the operation unit 250 to specify, for example, one measurement angular position and to provide a command for shape measurement corresponding to the one measurement angular position to the CPU 210. Then, in response to the command for shape measurement corresponding to the one measurement angular position, the CPU 210 controls each component of the shape measuring device 500 so that three-dimensional shape data corresponding to the specified one angular position is generated. This allows the user to obtain three-dimensional shape data for the shape of the measurement target S in a desired manner.

[0326]

[11] Correspondence between each element of the claims and each element of the embodiment An example of the correspondence between each component of the claims and each element of the embodiment will be described below. In the above embodiment, the holding part 191 is an example of the holding part, the rotation axis RA is an example of the rotation axis, the rotation drive part 192 is an example of the rotation drive part, and the rotation unit 190 is an example of the rotation unit.

[0327] In addition, the first marker M1 and the second marker M2 are examples of calibration tools, the light receiving unit 120 and the CPU 210 are examples of a camera, any of the ROM 220, the working memory 230 and the storage device 240 is an example of a memory unit, the CPU 210 is an example of a processor, the shape measuring device 500 is an example of a three-dimensional shape measuring device, the first marker M1 or the second marker M2 is an example of a first calibration tool, the second marker M2 is an example of a second calibration tool, and the operation unit 250 is an example of an operation unit.

[0328] In addition, the operating mode of the data correction unit 21i when correcting three-dimensional shape data according to the first calibration function and the second calibration function is an example of the first correction mode, the operating mode of the data correction unit 21i when correcting three-dimensional shape data according to the third calibration function is an example of the second correction mode, and the XY stage 141 and the stage driving unit 146 are examples of driving units.

[0329] As each component of a claim, various other elements having the configuration or function described in the claim may be used. [Explanation of symbols]

[0330] 21a...movement control unit, 21b...rotation control unit, 21c...imaging control unit, 21d...area setting unit, 21e...setting screen presentation unit, 21f...rotation angle setting unit, 21g...three-dimensional shape data generation unit, 21h...data synthesis unit, 21i...data correction unit, 21j...attachment / detachment determination unit, 21k...display control unit, 91...rotation support shaft, 92, 93...holding piece, 92e, 93e, es1, es2...end surface, 92h, 93h...hole, 94...rod-shaped member, 100...measurement unit, 101...measurement space, 110A, 110B...light projecting unit, 111...measurement light source, 112...pattern generation unit, 112S...pattern emission surface, 113, 11 4, 115, 122, 123A, 123B...lenses, 116, 125A, 125B...diaphragms, 117, 118...mirrors, 120...light receiving unit, 120F...focal plane, 121a...image sensor, 121A, 121B...camera, 124...half mirror, 130...illumination light output unit, 140...stage, 141...XY stage, 141c, 194...connector, 141h...screw hole, 141s...upper surface, 142...Z stage, 145...stage operation unit, 146...stage drive unit, 150, 310...control board, 160...head casing, 190...rotation unit, 191...holding unit, 192 ...Rotation drive unit, 193...cable, 195...holding dial, 199...mounting unit, 200...PC, 210...CPU, 220...ROM, 230...working memory, 240...storage device, 250...operation unit, 300...control unit, 320...illumination light source, 400...display unit, 401...basic measurement screen, 402-409...area setting screen, 410...main display area, 411...horizontal movement operation window, 412...movement button, 413...rotation operation window, 414...origin button, 415...forward rotation button, 416...reverse rotation button, 417...holding unit mark, 418...reference position mark, 419...measurement angle degree position mark, 420...secondary display area, 421...area setting button, 422...edit button, 423...area clear button, 424...view confirmation image, 425...measurement start button, 426...exclusion button, 427...OK button, 428...cancel button, 429...remove top surface button, 431...rotation on button, 432...rotation off button, 434...box circumference button, 435...box part button, 436...axis button, 437...rotation details button, 441...angle position list, 451...reference position input frame, 452...reference position registration button, 453...angle condition setting section, 454...angle pitch setting section,455...measurement count setting section, 456...exclusion angle input frame, 457...combination required checkbox, 463...first calibration checkbox, 464...second calibration checkbox, 465...marker inversion checkbox, 471...range button, 472...upper limit mark, 473...lower limit mark, 481...range setting window, 482...upper limit input section, 483...lower limit input section, 484...width input section, 485...center input section, 486...automatic setting button, 500...shape measuring device, 810...fixed holding member, 811, 821...support section, 812, 822...connecting section, 820...times Rolling support member, 830, RA...rotating axis, 990...base, 991...support, 992...optical system support, DRA...designed rotating axis, IMa, IMb...area setting map image, M1...first marker, M2...second marker, M2a...large diameter part, M2b...small diameter part, M2i...marker image, MM, MMa, MMb...unit area frame, pp...power supply part, rθ...angle range, RD...reference distance, RM...movable stroke range, ROA, TOA1, TOA2...optical axis, S...measurement object, SI...object image, sm...stepping motor, ss1, ss2...side, sv...deviation, WD...operating distance,

Claims

1. A rotation unit including a holder that holds a measurement object and a rotation drive unit that rotates the holder around a rotation axis that extends in one direction; a camera having an optical axis intersecting the rotation axis, capturing an image of the measurement object held by the holding unit to generate image data; A storage unit that stores the dimensions of the calibration tool; a processor; The processor, a rotation control process for controlling the rotation unit so that the measurement object held by the holding unit is rotated sequentially through a plurality of different rotation angles around the rotation axis; a camera control process for controlling the camera so that the measurement object is imaged at the plurality of different rotation angles and a plurality of image data of the measurement object is generated; a three-dimensional shape data generation process for generating a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles based on the plurality of image data of the measurement object generated by capturing images of the measurement object at the plurality of different rotation angles, and generating three-dimensional shape data of the calibration tool based on image data of the calibration tool generated by capturing images of the calibration tool rotating together with the holding part at at least one rotation angle; a data correction process for correcting a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles, based on the three-dimensional shape data of the calibration tool and the dimensions of the calibration tool stored in the storage unit; and a data synthesis process for further synthesizing a plurality of pieces of three-dimensional shape data of the measurement object corrected by the data correction process.

2. 2. The three-dimensional shape measuring device of claim 1, wherein the data correction process includes a process of correcting a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles, based on the three-dimensional shape data of the calibration tool and the dimensions of the calibration tool stored in the memory unit, so that a deviation between a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles is reduced.

3. the calibration tool has a cylindrical outer circumferential surface with known dimensions, and is provided so that the center of the calibration tool is located on a line including the rotation axis; 3. The three-dimensional shape measuring device according to claim 1, wherein the data correction process includes a process of calculating a center of the calibration tool from a shape of a portion of the outer peripheral surface of the calibration tool in the three-dimensional shape data of the calibration tool, calculating the rotation axis using the calculated center of the calibration tool, and correcting a plurality of three-dimensional shape data corresponding to the plurality of different rotation angles based on the calculated rotation axis.

4. the camera control process includes a process of controlling the camera so that images of the measurement object and the calibration tool are captured at the plurality of different rotation angles; 4. The three-dimensional shape measuring device according to claim 3, wherein the data correction process includes a process of calculating a center of a calibration tool for each of a plurality of three-dimensional shape data of the calibration tool corresponding to the plurality of different rotation angles, and correcting a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles so that centers of the calibration tool on the plurality of three-dimensional shape data calculated for each of the plurality of different rotation angles coincide with each other.

5. the calibration tool includes a first calibration tool having a cylindrical outer circumferential surface and provided on the rotation unit so as to be adjacent to the holding portion in a direction of the rotation axis, the center of the first calibration tool is located on a line including the rotation axis; the camera control process includes a process of controlling the camera such that the first calibration tool and the measurement object are imaged at a plurality of different rotation angles of the measurement object, 3. The three-dimensional shape measuring device of claim 1, wherein the three-dimensional shape data generation process includes a process of generating a plurality of three-dimensional shape data of the first calibration tool and a three-dimensional shape data of the measurement object corresponding to each of the plurality of different rotation angles based on image data generated by imaging the measurement object at the plurality of different rotation angles.

6. The calibration tool further includes a second calibration tool having a cylindrical outer circumferential surface and attached to the measurement object held by the holding portion, the camera control process includes a process of controlling the camera so that the measurement object, the first calibration tool, and the second calibration tool are imaged at the plurality of different rotation angles; the three-dimensional shape data generation process includes a process of generating a plurality of three-dimensional shape data of the first calibration tool, a plurality of three-dimensional shape data of the second calibration tool, and a plurality of three-dimensional shape data of the measurement object, each of which corresponds to a plurality of different rotation angles, based on image data generated by capturing images of the measurement object, the first calibration tool, and the second calibration tool at the plurality of different rotation angles; 6. The three-dimensional shape measuring apparatus according to claim 5, wherein the data correction process includes a process of calculating a center of the first calibration tool based on each of a plurality of three-dimensional shape data of the first calibration tool corresponding to the plurality of different rotation angles respectively and the dimensions stored in the memory unit, calculating a rotation center of the second calibration tool based on each of a plurality of three-dimensional shape data of the second calibration tool corresponding to the plurality of different rotation angles respectively and the dimensions stored in the memory unit, and correcting a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles respectively based on the calculated center of the first calibration tool and the calculated rotation center of the second calibration tool.

7. An operation unit that is operated to specify a correction mode of the processor, the processor is configured to be able to execute the data correction process in a correction mode designated by the operation unit out of a first correction mode and a second correction mode; the first correction mode is a mode in which, in the data correction process, a plurality of three-dimensional shape data of the measurement object corresponding to the plurality of different rotation angles is corrected based on the three-dimensional shape data of the calibration tool corresponding to the at least one rotation angle and the dimensions of the calibration tool stored in the storage unit; The three-dimensional shape measuring device of any one of claims 1 to 6, wherein the second correction mode is a mode in which, when multiple three-dimensional shape data of the measured object corresponding to the multiple different rotation angles are generated by the three-dimensional shape data generation process in the data correction process, the multiple three-dimensional shape data of the measured object corresponding to the multiple different rotation angles are corrected so that common portions of the surface of the measured object coincide with each other.

8. a drive unit that moves the camera relative to the rotation unit in the direction of the rotation axis, The processor, a region setting process for setting a measurement region in a direction along the rotation axis to be imaged by the camera at each of the plurality of different rotation angles; a movement control process for controlling the driving unit so that the camera moves relative to the rotation unit at each of the plurality of different rotation angles, the calibration tool is provided adjacent to the holding part or the measurement object held by the holding part in the direction of the rotation axis, the camera control process includes a process of controlling the camera so that the measurement area set by the area setting process is imaged at each of the plurality of different rotation angles, the three-dimensional shape data generation process includes a process of generating a plurality of three-dimensional shape data corresponding to a plurality of portions of the measurement object based on a plurality of image data generated by capturing an image of the measurement area set by the area setting process at each of the plurality of different rotation angles, the data synthesis process includes a process of synthesizing a plurality of pieces of three-dimensional shape data generated by the three-dimensional shape data generation process and corrected by the data correction process to generate three-dimensional shape data corresponding to each of the plurality of different rotation angles, The three-dimensional shape measuring device of claim 7, wherein the area setting process includes a process of setting a measurement area having a first length in the direction of the rotation axis so as to include an area in which the calibration tool and the measurement object are present when the first correction mode is specified as the correction mode of the processor, and a process of setting a measurement area having a second length shorter than the first length in the direction of the rotation axis so as not to include an area in which the calibration tool is present and to include an area in which the measurement object is present when the second correction mode is specified as the correction mode of the processor.

9. The operation unit is further configured to be operable to specify the measurement area, The three-dimensional shape measuring device according to claim 8, wherein the area setting process includes a process for further setting a specified area as the measurement area when the first correction mode is specified as the correction mode of the processor and the measurement area is specified by the operation unit.

Images