X-ray CT measurement method

The sample mounting part for the X-ray CT measurement device addresses CT value inconsistency and sample positioning issues by using a metal platform with a matching convex or pierced portion, ensuring precise alignment and reducing operation time.

JP7622489B2Active Publication Date: 2025-01-28SUMITOMO METAL MINING CO LTD
View PDF 4 Cites 0 Cited by

Patent Information

Application Number
JP2021045519
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-03-19
Publication Date
2025-01-28
Estimated Expiration
2041-03-19

AI Technical Summary

Technical Problem

The X-ray CT measurement device faces challenges in maintaining consistent CT values due to X-ray tube degradation over time, requiring frequent recalibration with standard samples, and issues with accurate sample positioning, especially for powder samples, leading to reduced measurement accuracy and increased operation time.

Method used

The use of a sample mounting part for the X-ray CT measurement device, comprising a metal platform with a column-shaped axis and a matching convex or pierced portion on a plastic sample container, allowing for precise alignment and simultaneous measurement without replacing the sample container, using polyethylene or polypropylene materials.

Benefits of technology

Enables consistent CT value measurement across varying conditions without recalibration and reduces operation time by ensuring accurate sample positioning, enhancing measurement efficiency and accuracy.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007622489000001
    Figure 0007622489000001
  • Figure 0007622489000002
    Figure 0007622489000002
  • Figure 0007622489000003
    Figure 0007622489000003
Patent Text Reader

Abstract

To provide a sample mount component of an X-ray CT measurement device that can implement a CT value calibration operation, and a measurement of a sample serving as a measurement object at a time, and can unnecessiate a positioning operation each time when using the same sample container, and to provide an X-ray CT measurement method that uses the sample mount component of the X-ray CT measurement device.SOLUTION: In an X-ray CT (Computed Tomography) measurement device, a sample mount component is composed of a metal sample table 10 having a loading surface 13 in which a lower part is a columnar axis part 11, and an upper end part is a plane vertical to an axis core of the axis part, and a plastic-made sample container 50 having a bottomed cylindrical shape and allowing for checking existence of a content, in which the sample mount component has a metal protrusion part 21 on the loading surface 13, and has a recessed part 53 on a bottom surface rear side of the sample container, the X-ray CT measurement device sample mount component is provided that is adapted so that the axis core of the axis part 11 and a center axis of the sample container 50 match by fitting the protrusion part 21 into the recessed part 53.SELECTED DRAWING: Figure 11
Need to check novelty before this filing date? Find Prior Art

Description

[Technical field]

[0001] The present invention relates to a sample mounting component for a measuring device used in X-ray CT measurement, and an X-ray CT measurement method. [Background technology]

[0002] X-ray CT measuring equipment examines the material and structure of an object by utilizing the differences in the "ease of penetration" and "ease of absorption" of X-rays when they pass through the object. CT is an abbreviation for Computed Tomography, and is also known as a computer tomography method. Since it scans an object, it is sometimes called an X-ray CT scan.

[0003] When X-rays enter a material, they are absorbed due to various reasons as they pass through. X-ray CT measuring devices obtain information on the internal structure of the object by photographing the object with X-rays from various angles and performing reconstruction processing. In this case, not only when the object is made up of different materials, but also when the material is the same, differences in density result in differences in the X-ray absorption coefficient, and it is possible to measure these differences. As a result, this analytical device is capable of non-destructively evaluating information about the inside of the object, without destroying the object.

[0004] In images obtained by X-ray CT measuring equipment, two-dimensional images are made up of small square picture elements called "pixels." Also, three-dimensional images are made up of cubic "voxels." Black and white shading values ​​(image density values) are assigned to pixels and voxels to represent CT images. In X-ray CT measuring equipment, these image density values ​​are called "CT values." Patent Document 1 discloses a detection value calibration method for calibrating detection values ​​detected in X-ray CT imaging, which performs effective calibration and enables the acquisition of an image of a subject with appropriate contrast, as well as an X-ray CT device, a calibration phantom, and a holder used in this detection value calibration method. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2008-119020 A Summary of the Invention [Problem to be solved by the invention]

[0006] As mentioned above, X-ray CT measurement equipment obtains a transmission image using X-rays generated by an X-ray tube. However, the intensity of the X-rays decreases as the X-ray tube is used for a long time. Therefore, even if the same sample is measured, the CT value changes depending on the time the X-ray tube is used.

[0007] Therefore, X-ray CT measurement equipment requires a CT value calibration operation using a standard sample. Generally, water and air are used as standard samples for CT value calibration. Specifically, water is set as the origin, 0, and empty air is set as the minimum value, -1000, to calibrate the relative CT value so that it is always constant. However, when the density of the measurement target sample is greater than that of water, the CT value calibration using water and air does not allow for accurate CT value acquisition of the measurement target sample. In such a case, the CT value calibration is performed by using air and a dense substance such as a metal as standard samples, and setting the air to -1000 and the metal standard sample to 1000. CT value calibration must be performed approximately once a day if the same type of sample is being measured continuously. Furthermore, the CT value calibration operation using a standard sample must be performed each time the measurement conditions of the actual sample being measured change.

[0008] Measurements using an X-ray CT measuring device are performed after the sample to be measured is fixed on a dedicated sample stage. Specifically, the dedicated sample stage on which the sample is fixed is installed in the device, and the sample is irradiated with X-rays to obtain a transmission image. Then, while observing the transmission image of the sample, the center position of the part of the sample to be measured is aligned on a straight line connecting the centers of the X-ray tube and the detector. In particular, in the case of a powder sample, the powder sample is placed in a bottomed cylindrical plastic sample container and measured. In this case, the measurable range (sometimes referred to as the "observation field of view" in the present invention) is determined by the resolution to be set. Therefore, even if the center position of the sample container is aligned on a straight line connecting the centers of the X-ray tube and the detector, if the center position of the sample container is deviated from the rotation axis of the sample stage, the sample container will rotate eccentrically. In this case, the outer periphery of the sample container, particularly the part far from the rotation axis, will be outside the observation field of view, making it impossible to perform normal imaging. On the other hand, a range in which the sample to be measured does not exist will be generated within the observation field of view, narrowing the measurement range. To avoid this situation, the sample to be measured, i.e., the sample container, must be positioned accurately on the sample stage.

[0009] Conventionally, a standard metal sample is first fixed to a dedicated sample stage, and the CT value is calibrated with air and the metal sample. After removing the metal sample, the actual sample to be measured is fixed and CT measurement is performed. In addition, double-sided tape or UV-curable resin is used to fix the actual sample. In that case, the sample needs to be replaced on the sample stage, which leads to a decrease in the accuracy of the sample mounting. The medium for fixing the sample is not limited to the double-sided tape or UV-curable resin mentioned above, but general adhesives can be used. However, it is better to avoid using clay. This is because clay may interfere with the X-ray irradiation and interfere with the measurement.

[0010] The present invention has been made under the above-mentioned circumstances, and the problem to be solved by the present invention is to provide a sample mounting component of an X-ray CT measurement device which, when loading a powder sample into a bottomed cylindrical sample container to perform X-ray CT measurement, can perform a CT value calibration operation and a measurement of the actual sample to be measured at the same time without changing the sample, and which can eliminate the need for a positioning operation each time when the same sample container is used, and an X-ray CT measurement method using the sample mounting component of the X-ray CT measurement device. [Means for solving the problem]

[0011] In order to solve the above-mentioned problems, the present inventors have conducted research and have come up with a sample mounting component for an X-ray CT measurement device having the following configuration, and an X-ray CT measurement method using the sample mounting component for the X-ray CT measurement device, thereby solving the above-mentioned problems.

[0012] That is, the first invention for solving the above-mentioned problems is: In X-ray CT (Computed Tomography) measuring equipment, a metal sample stage having a cylindrical shaft portion at its lower portion and a mounting surface at its upper end portion which is a flat surface perpendicular to the axis of the shaft portion; A sample mounting part comprising a plastic sample container having a bottomed cylindrical shape and capable of confirming the presence of contents, The mounting surface has a metal protrusion, The sample container has a recess on the bottom surface thereof, This is a sample mounting component for an X-ray CT measurement device, characterized in that the convex portion and the concave portion are fitted together so that the axis of the shaft portion coincides with the central axis of the sample container. The second invention is The tip of the protrusion is formed into a pointed shape, This is a sample mounting part of the X-ray CT measurement device described in the first invention, characterized in that the tip of the convex part is inserted into the concave part so that the axis of the shaft part and the central axis of the sample container coincide with each other. The third invention is The mounting surface has a dowel hole with a female thread, This is a sample mounting component for an X-ray CT measurement device described in the first or second invention, characterized in that the convex portion having a desired shape is formed by screwing a metal dowel with a male thread into the dowel hole. The fourth invention is In X-ray CT (Computed Tomography) measuring equipment, a metal sample stage having a cylindrical shaft portion at its lower portion and a mounting surface at its upper end portion which is a flat surface perpendicular to the axis of the shaft portion; A sample mounting part comprising a plastic sample container having a bottomed cylindrical shape and capable of confirming the presence of contents, The mounting surface has a protruding tip portion having a protruding tip shape, a convex surrounding portion is formed on the mounting surface, the convex surrounding portion being fitted with the sample container to make the axis of the shaft portion coincide with the central axis of the sample container; This is a sample mounting component for an X-ray CT measurement device, characterized in that the tip portion is configured so that the axis of the shaft portion coincides with the central axis of the sample container by inserting the tip portion into the back bottom side of the sample container. The fifth invention is The sample mounting component of the X-ray CT measurement apparatus according to any one of the first to fourth inventions is characterized in that the plastic material is polyethylene or polypropylene. The sixth invention is An X-ray CT measurement method, characterized in that a sample mounting component of an X-ray CT measurement apparatus according to any one of the first to fifth aspects of the present invention is installed in the X-ray CT measurement apparatus, and X-ray CT measurement is performed. Effect of the Invention

[0013] According to the present invention, when a powder sample is loaded into a bottomed cylindrical sample container and X-ray CT measurement is performed, the CT value calibration operation and the X-ray CT measurement of the sample to be measured can be performed at the same time without changing the sample, and when the same sample container is used, the positioning operation when fixing the sample container to the sample stage is unnecessary. [Brief description of the drawings]

[0014] [Figure 1] FIG. 2 is a perspective view of a plastic sample container. [Diagram 2] FIG. 2 is a perspective view of the bottom of a plastic sample container. [Diagram 3] 1 is a perspective view of the bottom of a plastic sample container according to a different embodiment; FIG. [Figure 4] FIG. 2 is a schematic perspective view of a sample stage. [Diagram 5] 1A and 1B are schematic perspective views of a sample stage according to a different embodiment. [Figure 6] FIG. 2 is a perspective view of a mounting surface of a sample stage. [Figure 7] 11 is a perspective view of a mounting surface of a sample stage according to a different embodiment. FIG. [Figure 8] 11 is a perspective view of a mounting surface of a sample stage according to a different embodiment. FIG. [Figure 9] 11A and 11B are perspective views of a protrusion according to a different embodiment. [Figure 10] 11A and 11B are perspective views of a protrusion according to a different embodiment. [Figure 11] 2 is a schematic cross-sectional view of a sample container placed on a sample stage of an X-ray CT measurement apparatus. [Figure 12] 5 is a schematic cross-sectional view of a sample container placed on a sample stage of an X-ray CT measurement apparatus according to a different embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] In an X-ray CT measuring device, the sample to be measured (sometimes simply referred to as "sample" in this invention) or the X-ray tube and detector are rotated to obtain multiple X-ray transmission images of the sample. Then, the multiple X-ray transmission images are collected and synthesized by a computer to obtain a three-dimensional image of the sample.

[0016] However, as described above, in an X-ray CT measuring device, a CT value calibration operation using a standard sample must be performed at least once a day, and furthermore, whenever the measurement conditions for the sample are changed. In the CT value calibration operation according to the conventional technology, first, a metal sample such as a cylindrical stainless steel block is fixed to the sample stage as a standard sample with double-sided tape. Then, a calibration operation is performed in which the CT value of the standard sample is set to 1000, and a calibration operation is performed in which nothing is placed on the sample stage and the CT value when air is used as the standard sample is set to -1000. After the calibration operation using the metal sample and air as the standard samples, a sample container filled with the sample is fixed to the sample stage with double-sided tape, ultraviolet curing resin, or the like, and X-ray CT measurement is performed.

[0017] For this reason, when measuring a sample whose measurement conditions are frequently changed, the calibration operation takes time, and the measurement time including the calibration takes a long time.

[0018] Next, the sample is loaded into a sample container, which is a cylindrical container made of plastic, and fixed onto a metal sample stage with double-sided tape, resin, etc. The sample stage is cylindrical or has a cylinder with a disk placed on top, and has a flat top surface.

[0019] In measurements using X-ray CT measuring devices, the size of the observation field of view is determined by the device's capabilities and resolution. Therefore, when a powder sample is placed in a cylindrical sample container with a bottom and X-ray CT measurement is performed, the sample is placed so that it fits within the observation field of view and then measurement is performed. However, when measuring by rotating the sample, if the center position of the sample container is deviated from the rotation axis of the sample stage, the sample container rotates eccentrically, and the sample is likely to protrude from the observation field of view in the width direction. If the sample protrudes, it may not be possible to obtain an X-ray transmission image of the sample in the protruding part, or there may be an area within the observation field where the sample does not exist. This narrows the measurement range and reduces the amount of information obtained.

[0020] To prevent this, the center of the observation field should be aligned with the center of the sample container, after aligning the center of the sample container with the rotation axis of the sample stage as closely as possible so that the entire sample fits within the observation field. Specifically, an X-ray transmission image is acquired from a specified direction, and after confirming that the sample does not protrude from the observation field, the sample is rotated 90° and an X-ray transmission image is acquired again to confirm that the sample does not protrude from the observation field. If the sample protrudes from the observation field at this time, the sample is removed from the X-ray CT measurement device and re-fixed to the center of the sample stage.

[0021] Furthermore, in the conventional sample stage, the sample container was fixed at an arbitrary position on the sample stage, so that the position of the axis of the shaft of the sample stage and the central axis of the sample container were always misaligned. For this reason, even when trying to measure a large number of samples filled in sample containers of the same shape, it was necessary to first obtain an X-ray transmission image from a specified direction each time to confirm that the sample did not protrude from the observation field. Then, the sample was rotated 90 degrees and an X-ray transmission image was obtained again to confirm again that the sample did not protrude from the observation field, which was a problem that required time and effort.

[0022] The configuration of a sample mounting part for implementing the invention that solves the above-mentioned multiple problems and X-ray CT measurement using the same will be described with reference to the drawings in the following order: 1. Sample container, 2. Sample stage, 3. Installing the sample container on the sample stage, 4. X-ray CT measurement, and 5. Summary.

[0023] 1. Sample container FIG. 1 is a schematic perspective view of a plastic sample container 50 according to the present invention. The sample container 50 has an outer diameter r 50 The sample container 50 has a cylindrical shape with a container bottom 52. The sample container 50 is made of a transparent to semi-transparent plastic, and the presence of the contents and the filling state thereof can be confirmed from the outside through the container side surface 51, and the transmission of X-rays is not impeded. From this viewpoint, the plastic material is preferably polyethylene or polypropylene.

[0024] The outer shape of the bottom surface of the sample container 50 may be such that the container bottom 52 is flat, or as shown in FIG. 2, which is a perspective view of the bottom of a plastic sample container 50, a recess 53 is formed in the center of the outer side of the container bottom 52 when the container is manufactured by injection molding, or as shown in FIG. 3, which is a perspective view of the bottom of a plastic sample container 50 of a different shape, the container bottom 52 is recessed toward the inside of the sample container 50, forming a concave mirror-like recess 54. In the present invention, any outer shape of the bottom surface of the sample container 50 can be used, but for reasons described below, it is preferable that the container bottom 52 has a recess 53 formed at the center of the outer side when the container is manufactured by injection molding. Furthermore, the container bottom 52 may be recessed in the shape of a concave mirror toward the inside of the sample container 50.

[0025] As the sample container 50, a commercially available plastic sample container can be selected and used that allows the presence of contents and their filling state to be confirmed from the outside of the container and has an appropriate size and bottom shape. Preferred examples include a small container such as Kartell's Model 730 sample bottle: inner diameter x outer diameter x total height (mm) φ6.5 x φ8 x 30, and a large container such as Nikko Hansen's Push Vial Model PV-10: outer diameter x total height (mm) φ21 x 41.3.

[0026] 2. Sample stage 4 is a schematic perspective view of a sample stage 10 according to the present invention. In the sample stage 10, the lower part is a cylindrical shaft portion 11, and the upper end part is a plane perpendicular to the axis of the shaft portion 11, and the diameter is r 10 The sample stage 10 is a disk-shaped mounting portion 12 having a mounting surface 13 that is a square. The shaft cores of the shaft portion 11 and the mounting portion 12 are aligned. The shaft portion 11 has a shaft diameter that allows it to be installed in an X-ray CT measurement device. The sample stage 10 is made of metal, and is preferably made of a highly corrosion-resistant metal such as stainless steel.

[0027] A perspective view of a modified example of the sample stage is shown in Fig. 5. In the sample stage 20 according to the different embodiment shown in Fig. 5, the lower part is a cylindrical shaft part 11, the upper end part is a plane perpendicular to the axis of the shaft part 11, and the diameter is r 20 The disk-shaped mounting portion 12 has a mounting surface 13 having a diameter r 20 This is an example of an integrated cylindrical structure.

[0028] FIG. 6 shows a perspective view of the sample stage 10 and the mounting surface 13 of a sample stage 20 according to a different embodiment, and FIG. 7 shows a perspective view of a modified example of the mounting surface 13. The mounting surface 13 shown in Fig. 6 is provided with a protrusion 21. The protrusion 21 is made of metal, and is preferably a highly corrosion-resistant metal such as stainless steel. By providing the protrusion 21 at the center of the mounting surface 13, i.e., at a portion coinciding with the axis of the shaft portion 11 and the mounting portion 12, it is possible to easily align the central axis of the plastic sample container 50 according to the present invention described above with the axis of the shaft portion 11 and the mounting portion 12, which is a preferable configuration.

[0029] 7, in addition to the convex portion 21, a convex surrounding portion 31 can be provided on the outer periphery of the mounting surface 13. By providing the surrounding portion 31, it is possible to fit the container bottom portion 52 of the plastic sample container 50 according to the present invention described above, and the central axis of the sample container 50 can be easily aligned with the axial center of the shaft portion 11 and the mounting portion 12. When this configuration is adopted, it is preferable that height 32 of enclosure 31 is lower than the height of protrusion 21. This is because, when an X-ray beam is irradiated onto protrusion 21 to perform CT value calibration, which will be described later, the X-ray beam can be easily irradiated onto protrusion 21 without being obstructed by enclosure 31. Furthermore, when the configuration in which the surrounding portion 31 is provided is adopted, the protrusion 21 does not have to be at the center of the mounting surface 13, as will be described later.

[0030] 8 shows an example in which the height 32 of the above-mentioned surrounding portion 31 is made higher than the height of the protrusion 21. In this case, a part of the surrounding portion 31 may be cut out to provide one cutout portion 33 and the other cutout portion 34. By adopting this configuration, when the X-ray beam passes through the one cutout portion 33 and the other cutout portion 34, it is irradiated onto the protrusion 21, and the CT value calibration described below can be performed.

[0031] 9 and 10 are perspective views of modified examples of the protrusion. In the protrusion 22 according to a different embodiment shown in Fig. 9, the tip portion has a needle-like pointed shape, for example. In this case, the tip portion fits into the container bottom 52 of the plastic sample container 50 according to the present invention described above, and penetrates into the plastic bottom portion of the sample container 50.

[0032] The convex portion 23 according to a different form shown in FIG. 10 is an example in which a dowel having a male thread is used as the convex portion 23 according to a different form. In this case, a hole having a female thread that screws with the dowel is drilled at the installation position of the convex portion 23 according to a different form on the mounting surface 13, and a dowel having a desired length is screwed into the hole, so that the convex portion 23 according to a different form having a desired height can be provided on the mounting surface 13. In addition, the shape of the part of the dowel that protrudes from the hole can be made into a desired shape such as the above-mentioned protruding shape or a hemispherical shape, so that the convex portion 23 according to a different form having a desired shape can be provided. If a hole having a female thread that screws with the dowel is drilled at the installation position of the convex portion 23 according to a different form on the mounting surface 13, the convex portions 21 having various heights and shapes can be formed by simply using one sample stage 10.

[0033] 3. How to place the sample container on the sample stage When the above-mentioned sample container 50 has a recess 53 at the center of the outside of the container bottom 52 as shown in Figure 2, it is possible to adopt a configuration in which the protrusion 21 on the mounting surface 13 shown in Figure 6 or a protrusion 23 of a different shape is engaged with the recess 53, or a configuration in which a protrusion 22 of a different shape having a needle-shaped tip as shown in Figure 9 is engaged with the recess 53 and the tip of the protrusion 22 of a different shape is inserted into the recess 53.

[0034] When the above-mentioned configuration is adopted, the central axis of the plastic sample container 50 can be easily aligned with the axial center of the shaft portion 11 and the mounting portion 12, which is a preferable configuration. In addition, preferably, by adopting the above-mentioned configuration, the metallic convex portion 21 or the convex portions 22 and 23 having different shapes are positioned at the end of the observation field within the range irradiated with the X-ray beam. As a result, the CT value calibration operation in the X-ray CT measurement device can be performed using the metallic convex portion 21 or the convex portions 22 and 23 having different shapes as a standard sample. This makes it possible to perform the CT value calibration operation and the X-ray CT measurement of the measurement target sample at the same time without changing the sample. Note that the convex portion 21 does not necessarily need to be located at the center of the mounting surface 13, and the position of the concave portion 53 or the convex portion 21 may be adjusted so that the central axis of the sample container 50 coincides with the axis of the shaft portion 11 and the mounting portion 12 when the concave portion 53 of the sample container 50 and the convex portion 21 are engaged with each other.

[0035] On the other hand, as described above, when the configuration in which the surrounding part 31 is provided is adopted, the convex part 21 becomes the convex part 22 (tip part) having a different shape with a needle-shaped tip. Also, the concave part 53 and the concave mirror-like concave part 54 of the sample container 50 may not be required. When the surrounding part 31 is provided, the surrounding part 31 can be fitted with the sample container 50 so that the central axis of the sample container 50 coincides with the axis of the shaft part 11 and the mounting part 12, so there is no need to configure the concave part 53 of the sample container 50 to fit with the convex part 21. The convex part 22 (tip part) having a different shape plays a role of fixing the sample container 50 to the sample stage 10 or the sample stage 20 having a different shape, and plays a role of a standard sample in the CT value calibration operation. This allows the sample container 50 to be used with a flat bottom, i.e., a sample container 50 that does not have the concave part 53 or the concave mirror-like concave part 54. Therefore, even if the tip is not at the center of the mounting surface 13, it does not matter as long as the configuration allows the sample container 50 to be fitted into the surrounding part 31. As a result, it is possible to easily align the central axis of the plastic sample container 50 with the axial core of the shaft part 11 and the mounting part 12. Also, the CT value calibration operation in the X-ray CT measurement device can be performed using the metal convex parts 22 (tip parts) of different shapes as standard samples.

[0036] Here, when the configuration with the surrounding portion 31 is adopted, the height of the surrounding portion 31 is adjusted so that the surrounding portion 31 does not interfere with the irradiation of the X-ray beam to the convex portion 21, or the surrounding portion 31 is not provided around the entire circumference of the sample stage 10 but is provided with a missing portion in part. The same applies when the sample stage 20 has a different shape.

[0037] 4.X-ray CT measurement A method for performing X-ray CT measurement on a sample using the sample stage 10 and sample container 50 of the present invention will be described with reference to FIG. 11, which is a schematic cross-sectional view of the sample container 50 placed on the sample stage 10 of an X-ray CT measurement device. The sample may be a powder, a granule, a lump, or the like, and is not particularly limited. For convenience of explanation, a powder sample will be described as an example. First, the size of the sample container 50 is determined according to the amount of powder sample to be prepared and the required resolution. When the amount of powder sample is large or the required resolution is low, a large container with a large diameter is used, and when the amount of powder sample is small or the required resolution is high, a small container with a small diameter is used.

[0038] The diameter r of the mounting surface 13 is appropriately adjusted according to the size of the selected sample container 50. 10 A sample stage 10 having the following structure is selected. The selected sample stage 10 is placed on the X-ray CT measurement device. Then, as shown in Fig. 11, the selected sample container 50 filled with a powder sample 60 is placed on the mounting surface 13 of the sample stage 10, and the recess 53 of the sample container 50 is fitted into the protrusion 21 of the mounting surface 13. If the sample stage 10 has an enclosure 31, the sample container 50 is fitted into the enclosure 31. As a result, the central axis of the plastic sample container 50 coincides with the axial center of the shaft 11 and mounting portion 12 of the sample stage 10 (indicated by a dashed line in Fig. 11).

[0039] The X-ray CT measurement device is set so that all of the powder sample 60 is included, and part or all of the container side surface 51, part or all of the container bottom 52, and part of the metallic protrusion 21 are included in the observation field 70 (shown by the dashed line in FIG. 11). The same applies when the metallic protrusion 21 is a protrusion 22 having a different shape with a needle-like tip, and the X-ray CT measurement device is set so that part of the protrusion 22 having the different shape is included within the range of the observation field 70. At this time, since the absorption of X-rays by the plastic container is small and can be ignored, it is possible to measure the CT value of the metallic protrusion 21 or the protrusion 22 having a different shape with a needle-shaped tip through the plastic container, and also to measure the CT value of the air through the plastic container.

[0040] By adopting this configuration, it is possible to capture three elements, namely, the powder sample 60, the metallic convex portion 21 or the convex portions 22 and 23 having different forms, and the air portion, within the observation field 70. As a result, by scanning the observation field 70 with X-rays, it is possible to simultaneously collect X-ray scan data relating to the powder sample 60 and calibrate the CT value by setting the CT value of the air portion to -1000 and the CT value of the metal (high density) portion to 1000.

[0041] For reference, X-ray CT measurement using a sample stage and a sample container according to different embodiments will be briefly described with reference to Fig. 12, which is a schematic cross-sectional view of a sample container placed on a sample stage of an X-ray CT measurement device according to a different embodiment. Fig. 12 is a schematic cross-sectional view of a case where the sample stage described with reference to Fig. 5 is used, and the sample container described with reference to Fig. 3 is used. In this case, the bottom of the sample container 50 is a concave mirror-like recess 54, and when the protrusion 21 fits into this portion, a part of the metallic protrusion 21 falls within the observation field of view 70 (shown by the dotted line in Figure 12). Other than this, the method is the same as the method of performing X-ray CT measurement described with reference to FIG.

[0042] 5. Summary As explained above, by using the sample mounting component according to the present invention, it is possible to place the plastic sample container 50 filled with the sample on the mounting part 12 so that the central axis of the sample container 50 coincides with the axial center of the shaft part 11 and mounting part 12 of the sample stage 10. Then, by incorporating the powder sample 60, the metal convex part 21 or the convex parts 22 and 23 having different forms, and the air part into the observation field 70, it is possible to simultaneously perform CT value calibration and X-ray CT measurement of the sample. As a result, the number of operations related to the above-mentioned X-ray CT measurement process can be significantly reduced, and the operation time can also be significantly reduced. This effect is particularly noticeable when measuring various types of samples under various measurement conditions. [Explanation of symbols]

[0043] 10. Sample stage 11. Shaft 12.Placement section 13.Placement surface 20. Sample holders with different shapes 21. Convex 22. Convex parts with different shapes 23. Convex parts with different shapes 31. Enclosure 32. Height of enclosure 33. One side cutout 34. The other cutout 50. Sample container 51. Container side 52.Bottom of container 53. Recess 54. Concave mirror recess 60. Powder sample 70. Field of view

Claims

1. An X-ray CT (Computed Tomography) measuring device, a metal sample stage having a cylindrical shaft portion at its lower portion and a mounting surface at its upper end portion which is a flat surface perpendicular to the axis of the shaft portion; A sample mounting part comprising a plastic sample container having a bottomed cylindrical shape and capable of confirming the presence of contents, The mounting surface has a metal protrusion, The sample container has a recess on the bottom surface thereof, The sample mounting component of the X-ray CT measurement device is configured so that the axis of the shaft portion and the central axis of the sample container are aligned by fitting the convex portion and the concave portion together. The sample mounting component of the X-ray CT measurement device is installed in the X-ray CT measurement device, and the metallic convex portion is used as a standard sample. An X-ray CT measurement method, characterized in that a CT value calibration operation in the X-ray CT measurement device and an X-ray CT measurement of a measurement target sample are performed without changing the sample.

2. In the sample mounting component of the X-ray CT measuring device, The tip of the protrusion is formed into a pointed shape, The X-ray CT measurement method according to claim 1, characterized in that the sample mounting component of the X-ray CT measurement device is configured so that the axis of the shaft portion and the central axis of the sample container coincide with each other by inserting the tip of the convex portion into the concave portion.

3. In the sample mounting component of the X-ray CT measuring device, The mounting surface has a dowel hole with a female thread, 3. The X-ray CT measurement method according to claim 1 or 2, characterized in that the sample mounting component of the X-ray CT measurement device forms the convex portion having a desired shape by screwing a metal dowel having a male thread into the dowel hole.

4. An X-ray CT (Computed Tomography) measuring device, a metal sample stage having a cylindrical shaft portion at its lower portion and a mounting surface at its upper end portion which is a flat surface perpendicular to the axis of the shaft portion; A sample mounting part comprising a plastic sample container having a bottomed cylindrical shape and capable of confirming the presence of contents, The mounting surface has a protruding tip portion having a protruding tip shape, a convex surrounding portion is formed on the mounting surface, the convex surrounding portion being fitted with the sample container to make the axis of the shaft portion coincide with the central axis of the sample container; The sample mounting component of the X-ray CT measurement device is configured so that the axis of the shaft portion and the central axis of the sample container are aligned by piercing the tip portion into the bottom back side of the sample container, and the metallic protrusion is used as a standard sample. An X-ray CT measurement method, characterized in that a CT value calibration operation in the X-ray CT measurement device and an X-ray CT measurement of a measurement target sample are performed without changing the sample.

5. In the sample mounting component of the X-ray CT measuring device, 5. The X-ray CT measurement method according to claim 1, wherein the plastic material is polyethylene or polypropylene.

Citation Information

Patent Citations

  • X ray CT measuring object holding device

    JP1992122356U

  • Correcting method for physical dislocation in ic package transfer machine

    JP1995022789A

  • Detected value calibration method, x-ray CT system, phantom for calibration and holder

    JP2008119020A

  • Optical module and positioning method

    JP2020194041A