Method for controlling an abrasive tool holder, an abrasive tool holder, and an abrasive tool

Abstract

A grinder holder (4) of an grinding tool (1) comprises: a shank (6); a mounting part (21) whereon a grinder (3) is mounted; a movement mechanism (22) that is equipped with a motor (35) and causes the mounting part (21) to move in the axial direction (X) of the shank (6); a load detector (23) that detects a load acting on the grinder (3) mounted on the mounting part (21); and a control unit (52) that drives and controls the motor (35). The control unit (52) monitors the output from the load detector (23) and successively calculates the amount of change in the load, and drives the motor (35) on the basis of the load and the amount of change, thereby performing a projection control operation in which the grinder (3) mounted on the mounting part (21) is made to advance or retreat.

Description

[Technical field]

[0001] The present invention relates to a grinding tool holder that adjusts the amount of cutting by an abrasive material by moving the grinding tool having an abrasive material back and forth in the axial direction of a machine mounting part, a grinding tool holder control method, and a grinding tool comprising such a grinding tool holder and a grinding tool. [Background technology]

[0002] A grinding tool holder to which a grinding tool having an abrasive material is removably attached is described in Patent Document 1. The grinding tool holder in this document includes a shank that is a mechanical attachment part, a mounting part, and a support mechanism that supports the mounting part so that the mounting part can move in the axial direction of the shank. The grinding tool holder also includes a movement mechanism that includes a drive source and moves the mounting part in the axial direction, a load detector that detects the load applied to the grinding tool attached to the mounting part, and a control unit that drives the drive source based on the output from the load detector to move the mounting part in the axial direction.

[0003] When machining a workpiece using the abrasive tool holder, the abrasive tool is attached to the attachment part to form a polishing tool consisting of the abrasive tool and the abrasive tool holder. Next, the shank of the polishing tool is connected to the spindle of a machine tool and the machine tool is operated. Then, the machine tool moves the polishing tool along a predetermined machining path while bringing the abrasive material into contact with the surface of the workpiece. The machining path is determined so that the distance between the spindle of the machine tool and the surface to be machined is maintained constant when the abrasive tool is directly facing the surface to be machined of the workpiece.

[0004] When the abrasive wears during a processing operation, the tip of the abrasive retreats in a direction away from the surface of the workpiece. This reduces the load on the grinding tool from the workpiece side, and the output (load) from the load detector decreases. Here, when the output from the load detector becomes smaller than a predetermined load threshold range, the control unit drives the drive source to perform a protrusion control operation to advance the mounting part toward the workpiece side. This causes the grinding tool to advance, and the abrasive is protruded toward the workpiece. Therefore, even if the abrasive wears during a processing operation, the amount of cutting into the workpiece by the abrasive can be ensured.

[0005] Furthermore, if the polishing tool gets too close to the surface of the workpiece to be machined during the machining operation due to dimensional errors in the workpiece or the like, the load on the polishing tool from the workpiece side increases, and the output (load) from the load detector increases. Here, when the output from the load detector becomes larger than a predetermined load threshold range, the control unit drives the drive source to perform a protrusion control operation to retract the mounting part in a direction away from the workpiece. As a result, the polishing tool retracts, and the abrasive material retracts in a direction away from the workpiece. Therefore, even if the polishing tool gets too close to the workpiece during the machining operation, the amount of cutting into the workpiece by the abrasive material can be kept constant. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] International Publication No. 2018 / 123456 Summary of the Invention [Problem to be solved by the invention]

[0007] The machining path along which the machine tool moves the polishing tool may be set so that the polishing tool starts from in front of the workpiece, passes through the workpiece, and reaches a position deeper than the workpiece. In this case, the abrasive polishes the surface of the workpiece to be machined while the polishing tool passes through the workpiece, causing wear on the abrasive. Therefore, when the output (load) from the load detector decreases, it is necessary to perform a protrusion control operation to ensure the amount of cutting into the workpiece by the abrasive. However, while the polishing tool is located in front of the workpiece, and after the polishing tool has reached a position deeper than the workpiece, the abrasive does not come into contact with the surface of the workpiece to be machined. Therefore, even when the output from the load detector decreases, it is not necessary to perform a protrusion control operation.

[0008] Here, the machine tool that moves the polishing tool along the machining path can grasp the position of the polishing tool relative to the workpiece. However, the polishing tool holder connected to the machine tool cannot grasp the position of the polishing tool relative to the workpiece. Therefore, even if the polishing tool is in front of or behind the workpiece, there is a problem that the drive source is driven to move the polishing tool in the axial direction when the load output from the load detector decreases.

[0009] In view of the above problems, the object of the present invention is to provide a grinding tool holder and a grinding tool that perform a protruding control operation to move the grinding tool only when the grinding tool is in contact with the surface of the workpiece to be machined, and also to propose a control method for such a grinding tool holder. [Means for solving the problem]

[0010] In order to solve the above problems, the present invention provides a control method for a grinding tool holder having a machine mounting part, a mounting part to which a grinding tool is mounted, a moving mechanism having a drive source and moving the mounting part in the axial direction of the machine mounting part, and a load detector for detecting the load on the grinding tool mounted on the mounting part, the control method comprising the steps of: mounting a grinding tool having an abrasive to the mounting part and connecting the machine mounting part to a spindle of a machine tool to operate the machine tool; monitoring an output from the load detector while the machine tool moves the grinding tool holder along a predetermined machining path, calculating an amount of change in the load per unit time, and performing a protrusion control operation based on the load and the amount of change by driving the drive source to move the mounting part and advance or retreat the grinding tool.

[0011] The polishing tool holder of the present invention is used in a state where a polishing tool having an abrasive is attached to the attachment part, and the polishing tool is constituted by the polishing tool and the polishing tool holder. The machine attachment part of the polishing tool is connected to the spindle of the machine tool when used. According to the present invention, while the machine tool moves the polishing tool along a predetermined machining path, the output from the load detector is monitored, and the change in load per unit time is calculated sequentially, and a protrusion control operation is performed to drive the drive source and move the polishing tool forward and backward based on the load and the change. Here, the change in load that changes while the polishing tool polishes the workpiece surface during the polishing operation of the workpiece can be grasped in advance by experiments, etc. Therefore, the polishing tool holder can determine whether the polishing tool is in contact with the workpiece surface based on the change in load. Therefore, if the protrusion control operation is performed based on the load and the change in load, the polishing tool holder can perform the protrusion control operation of protruding the polishing tool toward the workpiece only when the polishing tool is in contact with the workpiece surface.

[0012] The present invention also provides a method for producing a semiconductor device comprising the steps of: The load is outside a preset load threshold range, and the change amount When the change amount is smaller than a preset threshold value, the protrusion control operation can be performed. It is characterized by: That is, the amount of change in the load that changes while the grinding tool grinds the workpiece surface during the grinding operation of the workpiece can be grasped in advance by an experiment or the like. Therefore, if the change amount threshold is set based on the change amount obtained by an experiment or the like, the grinding tool holder can determine that the load change is not caused by the wear of the abrasive when the change amount is equal to or greater than the change amount threshold. In other words, if the change amount is smaller than the change amount threshold, the grinding tool holder can determine that the grinding tool is grinding the workpiece surface and that the load is changing due to the wear of the abrasive due to grinding. Therefore, if the protrusion control operation is performed when the change amount is smaller than the preset change amount threshold and the load is outside the preset load threshold range, the protrusion control operation can be performed when the grinding tool is in contact with the workpiece surface and the load changes due to the wear of the abrasive.

[0013] In the present invention, the protrusion control operation can be stopped when the load is zero, and the state in which the protrusion control operation is not performed can be maintained until the change amount falls below a preset change amount. The state in which the load is zero is a state in which the load detector does not detect the load on the grinding tool. Therefore, the state in which the load is zero is a state in which the grinding tool is not in contact with the workpiece. Therefore, when the load becomes zero, the grinding tool holder can determine that the grinding tool is located outside the workpiece surface to be machined. Here, when the grinding tool is located outside the workpiece surface to be machined, no wear occurs in the abrasive material. Therefore, the grinding tool holder is in a state in which the protrusion control operation is not performed. This makes it possible to stop unnecessary protrusion control operations. Here, when the grinding tool runs over the workpiece surface to be machined from outside the workpiece, the change amount of the load increases rapidly when the grinding tool comes into contact with the workpiece. Then, the change amount of the load exceeds a peak at the time when the running over of the workpiece is completed, and then becomes smaller. Therefore, the change amount becomes a value close to zero at the time when the running over of the workpiece is completed. Therefore, by setting the set change amount to a value close to zero, stopping the protrusion control operation when the load is zero, maintaining a state in which the protrusion control operation is not performed until the change amount falls below the preset set change amount, and then starting the protrusion control operation, the protrusion control operation will not be performed until the polishing tool rides up on the workpiece, and the protrusion control operation will be performed after the polishing tool rides up on the workpiece.

[0014] In the present invention, when the load is outside the load threshold range and the change amount is within a predetermined change amount threshold range, the protrusion control operation is not performed, and when the load is outside the load threshold range and the change amount is outside the change amount threshold range, the protrusion control operation is performed. When the polishing tool descends from the surface to be machined of the workpiece, the load applied to the polishing tool from the workpiece side decreases rapidly while the polishing tool is moving away from the workpiece. Therefore, the change amount of the load increases rapidly. Here, the change amount of the load that decreases rapidly when the polishing tool descends from the workpiece can be grasped in advance by experiments, etc. Therefore, if a predetermined range including the change amount of the load grasped by tests, etc. is set as the change amount threshold range, when the change amount of the load is within the change amount threshold range, the polishing tool holder can determine that the polishing tool is in the middle of descending from the surface to be machined of the workpiece. Therefore, even if the load is outside the load threshold range, if the protrusion control operation is not performed when the change amount is within the change amount threshold range, unnecessary protrusion control operation can be stopped while the polishing tool is descending from the surface to be machined of the workpiece. On the other hand, if the change amount is outside the change amount threshold range when the load falls outside the load threshold range, a protrusion control operation is performed. This state occurs when the machine tool performs movement control to reduce the moving speed of the polishing tool when the machine tool lowers the polishing tool from the workpiece in order to polish the edge of the workpiece. If a protrusion control operation is performed in this case, the polishing tool can be advanced to ensure that the abrasive material comes into contact with the edge of the workpiece. Here, when the polishing tool is completely lowered from the workpiece, the load becomes zero. Therefore, the protrusion control operation stops at the point when the load becomes zero.

[0015] In the present invention, when the load falls outside the load threshold range and the amount of change is equal to or greater than the amount of change threshold, the protrusion control operation is not performed, the duration during which the load is outside the load threshold range and the amount of change is equal to or greater than the amount of change threshold is counted, the protrusion control operation is not performed until the duration reaches a predetermined set time, and the protrusion control operation is resumed when the duration exceeds the set time. In this way, when a notch or a depression is provided on the machining path, it is possible to prevent the protrusion control operation from being performed when the polishing tool passes through the notch or the depression.

[0016] In the present invention, a plurality of load threshold ranges corresponding to the length dimension of the abrasive in the axial direction are held in advance as the load threshold range, and before the grinding tool holder is moved by the machine tool, the mounting part to which the grinding tool is attached is placed at an initial position where it can be advanced and retreated in the axial direction, and each time the mounting part is moved in the protrusion control operation, the movement amount of the mounting part that moves from the initial position to the opposite side of the machine mounting part is calculated based on the drive amount of the drive source and the movement direction of the mounting part, and one of the load threshold ranges is selected based on the movement amount. In this way, the movement amount of the mounting part that moves from the initial position to the opposite side of the machine mounting part corresponds to the wear amount of the abrasive. Therefore, if one load threshold range is selected from a plurality of load threshold ranges based on the movement amount (wear amount of the abrasive), it is easy to maintain the cutting ability of the abrasive constant.

[0017] In the present invention, a first load threshold range and a second load threshold range different from the first load threshold range can be held in advance as the load threshold range, the first load threshold range can be set as the load threshold range, the number of times when the load becomes zero can be counted, and when the number of times reaches a predetermined set number, the load threshold range can be set as the second load threshold range. In this way, when the polishing tool moving along the processing path repeatedly gets on and off the workpiece surface to be processed, the load threshold range can be set as the first load threshold range until the number of times the polishing tool gets off the workpiece surface reaches the set number, and thereafter, the load threshold range can be set as the second load threshold range. This makes it possible to adjust the amount of cutting of the workpiece by the abrasive in the middle of the processing path.

[0018] In the present invention, a memory unit may be provided, the grinding tool holder is moved along a predetermined learning path by the machine tool, the output from the load detector is monitored, and the amount of change in the load per unit time is successively calculated, the load threshold range is set based on the load, and the change amount threshold is set based on the amount of change, which are stored and retained in the memory unit, and when the machine tool moves the grinding tool holder along the machining path, the load threshold range and the change amount threshold are acquired by referring to the memory unit. In this way, it becomes easy to set the load threshold range and the change amount threshold.

[0019] In the present invention, the polishing tool can have an abrasive material whose length is oriented in the axial direction, and an abrasive material holder that holds one end of the abrasive material in the axial direction, and the abrasive material holder can be attached to the mounting portion.

[0020] Next, the polishing tool holder of the present invention is characterized in having a machine mounting part, a mounting part to which a polishing tool having an abrasive is mounted, a moving mechanism equipped with a drive source and moving the mounting part in the axial direction of the machine mounting part, a load detector which detects the load on the polishing tool mounted on the mounting part, and a control part which monitors the output from the load detector and successively calculates the amount of change in the load per unit time, and performs a protrusion control operation based on the load and the amount of change by driving the drive source to move the mounting part and advance and retreat the polishing tool.

[0021] The grinding tool holder of the present invention is used in a state where a grinding tool having an abrasive is attached to the attachment part, and the grinding tool and the grinding tool holder constitute a grinding tool. According to the present invention, while the machine tool moves the grinding tool along a machining path determined in advance, the output from the load detector is monitored, and the amount of change in load per unit time is calculated sequentially, and a protrusion control operation is performed to drive the drive source to advance and retract the grinding tool based on the load and the amount of change. Here, the grinding tool holder can determine whether the grinding tool is in contact with the surface to be machined of the workpiece based on the amount of change in load. Therefore, if the protrusion control operation is performed based on the load and the amount of change in load, the grinding tool holder can perform a protrusion control operation to protrude the grinding tool toward the workpiece only when the grinding tool is in contact with the surface to be machined of the workpiece.

[0022] The present invention also provides a method for producing a semiconductor device comprising the steps of: The control unit performs the protrusion control operation when the load is outside a preset load threshold range and the change amount is smaller than a preset change amount threshold. It is characterized by: In this manner, the grinding tool holder can perform a protrusion control operation when the grinding tool is grinding the surface to be machined of the workpiece and when the load is changing due to wear of the abrasive material caused by grinding.

[0023] In the present invention, the control unit can stop the protrusion control operation when the load is zero, and maintain the state in which the protrusion control operation is not performed until the amount of change falls below a preset amount of change. In this way, the grinding tool holder can be in a state in which the protrusion control operation is not performed while the grinding tool is located outside the machining surface of the workpiece and until the grinding tool runs onto the workpiece from outside the workpiece.

[0024] In the present invention, the control unit can be configured to not perform the protrusion control operation when the load is outside the load threshold range and the change amount is within a predetermined change amount threshold range, and to perform the protrusion control operation when the load is outside the load threshold range and the change amount is outside the change amount threshold range. In this way, the grinding tool holder can be configured to not perform the protrusion control operation when the grinding tool descends from the workpiece surface to be machined. Also, when the machine tool reduces the moving speed of the grinding tool holder when the grinding tool descends from the workpiece surface to be machined, the grinding tool holder can perform the protrusion control operation to ensure that the edge of the workpiece is polished by the abrasive.

[0025] In the present invention, a timer is provided, and the control unit, when the load falls outside the load threshold range and the amount of change is equal to or greater than the amount of change threshold, puts the protrusion control operation into a state in which it is not performed, drives the timer to count the duration during which the load is outside the load threshold range and the amount of change is equal to or greater than the amount of change threshold, maintains the state in which the protrusion control operation is not performed until the duration reaches a predetermined set time, and resumes the protrusion control operation when the duration exceeds the set time. In this way, when a plurality of small notches or a plurality of small depressions are provided on the machining path through which the polishing tool passes in the workpiece, it is possible to prevent the protrusion control operation from being performed in the section passing through these notches or depressions.

[0026] In the present invention, the load threshold storage unit stores and holds a plurality of load threshold ranges associated with the length dimension of the abrasive in the axial direction as the load threshold range, and the control unit includes an initial operation control unit that places the mounting unit at an initial position where it can advance and retreat in the axial direction, and a load threshold range resetting unit that calculates the amount of movement of the mounting unit, which moves from the initial position to the opposite side of the machine mounting unit based on the drive amount of the drive source and the movement direction of the mounting unit, each time the mounting unit is moved in the protrusion control operation, and selects one of the plurality of load threshold ranges by referring to the load threshold storage unit based on the amount of movement. In this way, it is easy to maintain the cutting ability of the abrasive constant.

[0027] In the present invention, the load threshold storage unit stores and holds a first load threshold range and a second load threshold range different from the first load threshold range as the load threshold range, and the control unit includes a counting unit that counts the number of times when the load becomes zero, and a load threshold range resetting unit that sets the first load threshold range to the load threshold range until the number of times reaches a predetermined set number, and sets the load threshold range to the second load threshold range when the number of times reaches the set number. In this way, when the polishing tool moving along the processing path repeatedly gets on and off the workpiece surface to be processed, the load threshold range can be the first load threshold range until the number of times the polishing tool gets off the workpiece surface to the set number, and thereafter, the load threshold range can be the second load threshold range. This makes it possible to adjust the amount of cutting of the workpiece by the abrasive in the middle of the processing path.

[0028] In the present invention, the control unit may have an operation mode switching unit that switches the operation mode of the control unit between a normal operation mode and a learning operation mode, and a learning data setting unit that monitors an output from the load detector in the learning operation mode, sequentially calculates the amount of change in the load per unit time, sets the load threshold range based on the load, and sets the change amount threshold based on the amount of change, and stores and holds them in the storage unit, and in the normal operation mode, the control unit may refer to the storage unit to obtain the load threshold range and the change amount threshold from the storage unit. In this way, it is easy to set the load threshold range and the change amount threshold.

[0029] Next, the polishing tool of the present invention comprises the above-mentioned polishing tool holder and a polishing tool removably attached to the mounting portion of the polishing tool holder, the polishing tool having an abrasive material whose length direction is oriented in the axial direction, and an abrasive material holder which holds one end of the abrasive material in the axial direction, and the abrasive material holder is attached to the mounting portion. Effect of the Invention

[0030] The grinding tool holder of the present invention performs a protrusion control operation based on the load and the change in the load, so that the grinding tool can perform a protrusion control operation to move the grinding tool only when the grinding tool is in contact with the surface of the workpiece to be polished. [Brief description of the drawings]

[0031] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] FIG. 2 is an explanatory diagram of a schematic structure of a polishing tool. [Figure 4] FIG. 1 is an illustration of the load on the polishing tool while it moves through a processing path. [Diagram 5] FIG. 2 is a schematic block diagram showing a control system of the grinding tool holder. [Figure 6]11 is a flowchart of a protrusion control operation when a polishing tool passes through a workpiece. [Figure 7] 11 is a graph showing the load and the amount of change when the polishing tool performs a protrusion control operation. [Figure 8] 11 is a flowchart of a protrusion control operation when the polishing tool climbs onto a workpiece. [Figure 9] 11 is a flowchart of a protrusion control operation when the polishing tool descends from the workpiece. [Figure 10] 13 is a flowchart of a protrusion control operation when a cutout portion is present in a machining path. [Figure 11] FIG. 1 is an explanatory diagram of the load and the amount of change when a notch is present in the machining path. [Figure 12] 13 is a flowchart of a modification of the protrusion control operation of a polishing tool. [Figure 13] FIG. 13 is an explanatory diagram of a load threshold range when the load threshold range is changed based on the length dimension of an abrasive bundle. [Figure 14] 11 is an explanatory diagram of a case where the load threshold range is changed when the polishing tool gets on and off the workpiece. FIG. [Figure 15] 11 is a flowchart of a protrusion control operation when the polishing tool gets on and off the workpiece. [Figure 16] FIG. 2 is a perspective view of a grinding tool equipped with an elastic grindstone as a grinding material. [Figure 17] FIG. 1 is a perspective view of a grinding tool equipped with a rigid grinding stone as an abrasive material. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0032] An abrasive tool holder according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an external perspective view of an abrasive tool to which the present invention is applied. FIG. 2 is a perspective view of the abrasive tool. FIG. 3 is an explanatory diagram showing a schematic structure of the abrasive tool of FIG. 1. In FIG. 3, the abrasive tool is shown cut along the axis of the machine mounting part. FIG. 4 is an explanatory diagram of the load applied to the abrasive tool while the abrasive tool is moved along the machining path. The upper part of FIG. 4 shows the positional relationship between the abrasive tool and the workpiece. The lower part of FIG. 4 is a graph of the load applied to the abrasive tool from the workpiece side.

[0033] (polishing tools) As shown in FIG. 1, the polishing tool 1 includes a polishing tool 3 and a polishing tool holder 4 that holds the polishing tool 3. The polishing tool holder 4 includes a shank 6 (machine mounting part) and a sleeve 7 that is coaxial with the shank 6. Between the shank 6 and the sleeve 7, a large diameter part 8 that is larger in diameter than the shank 6 and the sleeve 7 is provided. The polishing tool 3 is held by the polishing tool holder 4 with the end of the linear abrasive 2 (abrasive) protruding from the sleeve 7. In the following description, the direction along the axis L of the shank 6 is referred to as the axial direction X. In addition, in the axial direction X, the side of the shank 6 is referred to as the rear X1 of the polishing tool holder 4, and the side opposite to the shank 6 is referred to as the front X2 of the polishing tool holder 4.

[0034] (polishing tool) As shown in Fig. 2, the grinding tool 3 has a plurality of linear abrasives 2 arranged in parallel, and an abrasive holder 11 that holds one end of the plurality of linear abrasives 2. Each linear abrasive 2 comprises an aggregated yarn of inorganic long fibers such as alumina long fibers, and a resin that has been impregnated into the aggregated yarn and hardened. The linear abrasives 2 have elasticity that allows them to bend in a direction intersecting with the axis L. A plurality of linear abrasives 2 are bundled together.

[0035] The abrasive holder 11 is an annular member having a holder through hole 12 extending in the axial direction X at its center. The abrasive holder 11 also has a plurality of abrasive holding holes 13 in its front end surface. Each abrasive holding hole 13 is circular. The plurality of abrasive holding holes 13 are provided at equal angular intervals around the axis L and surround the holder through hole 12. The abrasive holder 11 also has a recess in its rear end surface surrounding the holder through hole 12, as shown in FIG. 3. The recess is a grinding tool side connecting portion 15 for detachably mounting the grinding tool 3 to the grinding tool holder 4.

[0036] When the multiple linear abrasives 2 are held in the abrasive holding holes 13, they are bundled together to form an abrasive bundle 14. The rear end of the abrasive bundle 14 is inserted into the abrasive holding hole 13. Each abrasive bundle 14 is fixed to the abrasive holder 11 by an adhesive filled in the abrasive holding hole 13.

[0037] (Abrasive tool holder) 3, the grinding tool holder 4 has a shank 6, a mounting part 21 to which the grinding tool 3 is detachably mounted, a moving mechanism 22 that moves the mounting part 21 in the axial direction X, and a load detector 23 that detects the load applied to the grinding tool 3 mounted on the mounting part 21. The shank 6 protrudes rearward X1 from the large diameter part 8.

[0038] The mounting part 21 is an annular member. The mounting part 21 is disposed in the sleeve 7 in a state in which it can move in the axial direction X. The mounting part 21 includes a disk part 25 having an annular opposing surface 25a that faces the inner peripheral surface 7b of the sleeve 7 with a small gap therebetween, and a protrusion 26 that protrudes forward X2 from the center of the disk part 25. The protrusion 26 has a shape that fits into the grinding tool side connecting part 15 of the grinding tool 3. The grinding tool 3 is detachably attached to the grinding tool holder 4 by fitting the grinding tool side connecting part 15 into the protrusion 26 of the mounting part 21. When the grinding tool 3 is connected to the mounting part 21, the grinding tool 3 and the mounting part 21 are integrated in a state in which they cannot rotate relatively around the axis L. A female screw 29 is provided on the inner peripheral surface of the center hole 28 of the mounting part 21.

[0039] The movement mechanism 22 includes a shaft member 36 extending in the axial direction X, a support member 37 that supports the shaft member 36 so as to be movable in the axial direction X and rotatable about the axis L, a motor 35 as a drive source, and a drive force transmission mechanism 38 that transmits the rotation of the motor 35 to the shaft member 36. The movement mechanism 22 also includes a rotation restriction mechanism 40 that restricts the mounting portion 21 and the shaft member 36 from rotating together.

[0040] The shaft member 36 is disposed on the axis L. The shaft member 36 has a male screw 39 on its outer circumferential surface that screws into the female screw 29 of the mounting portion 21. The support member 37 is an annular member that extends in a direction perpendicular to the axis L, and has a through hole 41 extending in the direction of the axis L at its center. A flange 7a that extends from the rear end portion of the sleeve 7 to the outer circumferential side is fixed to the front surface of the support member 37. The support member 37 and the flange of the sleeve 7 form an end wall of the front X2 of the large diameter portion 8. The shaft member 36 passes through the through hole 41 of the support member 37. The rear end portion of the shaft member 36 that passes through the through hole 41 protrudes inside the large diameter portion 8. The front portion of the shaft member 36 that passes through the through hole 41 extends inside the sleeve 7 coaxially with the sleeve 7.

[0041] The motor 35 and the driving force transmission mechanism 38 are disposed inside the large diameter portion 8, at the rear X1 of the support member 37. The motor 35 is a stepping motor. The driving force transmission mechanism 38 includes a final gear 45 to which the driving force of the motor 35 is transmitted, an output gear 46 fixed coaxially to the shaft member 36 and meshing with the final gear 45, and a biasing member 47 that biases the output gear 46 toward the support member 37. The final gear 45 is rotatably supported by a support shaft 48 extending from the support member 37 toward the rear X1. The support shaft 48 is parallel to the shaft member 36. Therefore, the final gear 45 and the output gear 46 fixed to the shaft member 36 rotate around a parallel rotation axis. The output gear 46 abuts against the support member 37 from the rear X1 due to the biasing force of the biasing member 47.

[0042] When the shaft member 36 moves toward the rear X1, the output gear 46 fixed to the shaft member 36 moves toward the rear X1 against the biasing force of the biasing member 47. Therefore, when the shaft member 36 moves toward the rear X1, the shaft member 36 moves against the biasing force of the biasing member 47. When the shaft member 36 moves toward the rear X1, the output gear 46 moves away from the support member 37 toward the rear X1.

[0043] Here, the rotation axis of the shaft member 36 to which the output gear 46 is fixed and the rotation axis of the final gear 45 are parallel. Therefore, even if the output gear 46 moves in the axial direction X, the meshing state between the output gear 46 and the final gear 45 is maintained. As a result, the rotation of the motor 35 is always transmitted to the output gear 46 via the driving force transmission mechanism 38. When the driving force of the motor 35 is transmitted to the output gear 46, the shaft member 36 rotates around the axis L.

[0044] The rotation restriction mechanism 40 includes a groove 31 provided on the inner circumferential surface 7b of the sleeve 7, and a protrusion 32 provided on a circumferential portion of the opposing surface 25a of the mounting part 21. The groove 31 extends in the axial direction X on the inner circumferential surface 7b of the sleeve 7. The protrusion 32 extends in the axial direction X with a constant width. Here, the mounting part 21 is disposed in the sleeve 7 with the protrusion 32 inserted in the groove 31 of the sleeve 7. Therefore, when the shaft member 36 rotates, the mounting part 21 is prevented from rotating.

[0045] The load detector 23 is a pressure sensor. The load detector 23 is disposed on the rear side X1 of the support member 37 inside the large diameter portion 8. The load detector 23 comes into contact with the shaft member 36 from the rear side X1 to detect the pressure in the axial direction X applied to the shaft member 36.

[0046] When machining a workpiece W, the shank 6 of the polishing tool 1 is connected to the spindle N of the machine tool M, and the machine tool M is operated. This causes the machine tool M to move the polishing tool 1 along a machining path that has been programmed in advance.

[0047] 4, the machining path E along which the machine tool M moves the polishing tool 1 is set so as to start in front of the workpiece W, pass through the workpiece W, and reach a position deeper than the workpiece W. The machining path E is also set so that the distance D between the spindle N and the surface S of the workpiece W to be machined is maintained constant as the polishing tool 1 passes through the workpiece W. As the polishing tool 1 passes through the workpiece W, the tip portion of the abrasive bundle 14 comes into contact with the surface S to be machined.

[0048] (Control System) FIG. 5 is a schematic block diagram showing the control system of the grinding tool holder 4. FIG. 6 is a flowchart of the protrusion control operation when the grinding tool 1 passes over the workpiece W. FIG. 7 is a graph showing the load and the amount of change when the protrusion control operation is performed. FIG. 8 is a flowchart of the protrusion control operation when the grinding tool 1 climbs onto the workpiece W. FIG. 9 is a flowchart of the protrusion control operation when the grinding tool 1 descends from the workpiece W. FIG. 10 is a flowchart of the protrusion control operation when a notch is provided in the machining path. FIG. 11 is an explanatory diagram of the load when a notch is provided in the machining path. The upper part of FIG. 11 shows the positional relationship between the grinding tool and the workpiece when viewed from the direction of the axis L. The lower part of FIG. 11 is a graph of the load applied to the grinding tool from the workpiece side.

[0049] As shown in Fig. 5, the control system of the grinding tool holder 4 includes a control unit 51 having a CPU, a storage unit 52 connected to the control unit 51, and a timer 53. The load detector 23 is connected to the input side of the control unit 51. The motor 35 is connected to the output side of the control unit 51. As shown in Fig. 3, the grinding tool holder 4 includes a motor battery 57 that supplies power to the motor 35, and a control battery 58 that supplies power to the control unit 51 and the timer 53. The motor battery 57 and the control battery 58 can be charged by connecting cables from the outside.

[0050] Here, while the polishing tool 1 moves along the machining path E, the control unit 51 monitors the output (load) from the load detector 23, and successively calculates the amount of change in the load per predetermined unit time.

[0051] More specifically, the control unit 51 acquires the load output from the load detector 23 at regular intervals, and acquires the load change amount per unit time from the three loads acquired in chronological order. Here, the load can be acquired at intervals of 0.001 to 1 second. The unit time for calculating the load change amount is three times the interval for acquiring the load. The load change amount is calculated at the same interval as the interval for acquiring the load. The change amount is the absolute value of the width by which the load (P) increases or decreases per unit time, and can be expressed by the following formula, where dt is the unit time and dP is the width by which the load increases or decreases. |dP / dt|

[0052] In addition, the control unit 51 performs a protrusion control operation to adjust the amount of cutting into the workpiece W by the abrasive bundle 14, based on the load and the amount of change that are successively acquired.

[0053] More specifically, as shown in FIG. 6, the control unit 51 monitors the load and calculates the change amount successively (step ST1). If the change amount is smaller than a preset change amount threshold Q (step ST2: Yes) and the load is outside a preset load threshold range R (step ST3: Yes), the control unit 51 drives and controls the motor 35 to move the mounting unit 21 and performs a protrusion control operation to advance and retract the grinding tool 3 (step ST4). On the other hand, if the change amount is equal to or larger than the change amount threshold Q (step ST2: NO), the control unit 51 does not perform the protrusion control operation (step ST5). Even if the change amount is smaller than the change amount threshold Q (step ST2: Yes), but the load is within the load threshold range R (step ST3: NO), the control unit 51 does not perform the protrusion control operation (step ST5). Such control is performed in a section K1 (see FIG. 4) where the grinding tool 1 passes through the processing target surface S of the workpiece W.

[0054] Here, the standard change amount of the load that changes while the grinding tool 3 grinds the workpiece W surface S during the grinding operation of the workpiece W can be grasped in advance by an experiment or the like. Therefore, if the change amount threshold Q is set in advance based on the change amount obtained by an experiment or the like and stored in the memory unit 52, the control unit 51 can refer to the memory unit 52 and determine that the load fluctuation is not due to wear of the abrasive bundle 14 but due to other factors when the change amount is equal to or greater than the change amount threshold Q. In other words, if the change amount threshold Q is set in advance based on an experiment or the like, the control unit 51 can determine that the grinding tool 3 is grinding the workpiece W surface S and that the load has changed due to wear of the abrasive bundle 14 caused by grinding when the change amount is smaller than the change amount threshold Q.

[0055] In addition, in a state where the grinding tool 3 is grinding the workpiece surface S of the workpiece W, the load range when the grinding tool 3 grinds the workpiece surface S of the workpiece W with a desired cutting depth can be grasped in advance by an experiment or the like. Therefore, if a first threshold value R1, which is the lower limit of the load suitable for grinding the workpiece W, and a second threshold value R2, which is the upper limit of the load suitable for grinding, are grasped based on the experimental results, and the range between the first threshold value R1 and the second threshold value R2 is set as the load threshold range R and stored in the memory unit 52, the control unit 51 can refer to the memory unit 52 and determine that the cutting depth of the workpiece W by the abrasive bundle 14 is below the appropriate range when the load falls outside the load threshold range R due to wear of the abrasive bundle 14, etc. In addition, when the load falls outside the load threshold range R, the control unit 51 can determine that the cutting depth of the workpiece W by the abrasive bundle 14 is above the appropriate range. Note that both the first threshold value R1 and the second threshold value R2 are values ​​greater than zero.

[0056] Here, the protrusion control operation will be described with reference to FIG. 7. FIG. 7 is a graph showing the relationship between the output from the load detector 23 and the protrusion control operation. Time point G in the graph of FIG. 7 is the time point when the output from the motor 35 falls below a predetermined first threshold value R1 when the amount of change (|dP / dt|) is smaller than the amount of change threshold value Q (|dP' / dt|). At time point G, the control unit 51 drives the motor 35 in a predetermined rotation direction to move the mounting unit 21 forward X2. Furthermore, the control unit 51 monitors the output from the motor 35 while driving the motor 35 to move the mounting unit 21, and when the output reaches a second threshold value R2, stops driving the motor 35 based on the monitored output to stop the movement of the mounting unit 21.

[0057] Next, time point H in the graph of FIG. 7 is a time point when the output from the motor 35 rises above a predetermined second threshold value R2 when the change amount (|dP / dt|) is smaller than the change amount threshold value Q. At time point H, the control unit 51 drives the motor 35 in the direction opposite to the predetermined rotation direction to move the mounting part 21 backward X1. Furthermore, the control unit 51 monitors the output from the motor 35 while driving the motor 35 to move the mounting part 21, and when this output falls below the second threshold value R2, stops driving the motor 35 based on the monitored output to stop the movement of the mounting part 21. As a result, when the polishing tool 3 is polishing the processing target surface S of the workpiece W and the load is changing due to wear of the abrasive bundle 14 due to polishing, the polishing tool 1 performs a protrusion control operation to maintain the cutting amount of the workpiece W by the abrasive bundle 14 within an appropriate range.

[0058] 8, the control unit 51 monitors the load and sequentially calculates the amount of change (step ST11), stops the protrusion control operation when the load is zero (step ST12, step ST13), and maintains a state in which the protrusion control operation is not performed until the amount of change falls below a preset change amount U (step ST14: No, step ST13). Such control is performed in a section K2 until the polishing tool 1, which has been positioned outside the workpiece W, gets on top of the processing target surface S of the workpiece W, as shown in FIG.

[0059] That is, when the polishing tool 1 is located outside the processing surface S of the workpiece W, the polishing tool 3 is not in contact with the workpiece W, as shown in FIG. 4. Therefore, the load on the polishing tool 3 is zero. Therefore, when the load becomes zero, the control unit 51 can determine that the polishing tool 1 is located outside the processing surface S of the workpiece W. Here, when the polishing tool 1 is located outside the processing surface S of the workpiece W, no wear occurs in the abrasive bundle 14. Therefore, the control unit 51 does not perform the protrusion control operation.

[0060] Thereafter, when the polishing tool 1 climbs up from outside the workpiece W onto the processing surface S of the workpiece W, as shown in FIG. 4, the load change amount increases abruptly when the polishing tool 1 (abrasive bundle 14) comes into contact with the workpiece W. Then, the load change amount peaks at the time J when the polishing tool 1 finishes climbing up onto the workpiece W, and then decreases. Therefore, when the polishing tool 1 finishes climbing up onto the workpiece W, the load change amount becomes a value close to zero. Therefore, if the set change amount U is set to a value close to zero, and the control unit 51 stops the protrusion control operation when the load is zero, and maintains a state in which the protrusion control operation is not performed until the change amount falls below the preset set change amount U, the protrusion control operation is not performed until the polishing tool 1 climbs up onto the workpiece W, and the protrusion control operation can be performed after the polishing tool 1 climbs up onto the workpiece W.

[0061] 9, the control unit 51 monitors the load and sequentially calculates the amount of change (step ST21), and when the load is outside the load threshold range R (step ST22) and the amount of change is within a predetermined amount of change threshold range V (step ST23: Yes), the control unit 51 does not perform a protrusion control operation (step ST23). On the other hand, when the load is outside the load threshold range R (step ST22: No) and the amount of change is outside the amount of change threshold range V, the control unit 51 performs a protrusion control operation (step ST24). Such control is performed when the polishing tool 1 moves from a state in which it is in contact with the processing target surface S of the workpiece W to a state where it is out of the workpiece W, as shown in FIG.

[0062] That is, when the polishing tool 1 descends from the workpiece surface S of the workpiece W, as shown in FIG. 4, the load applied to the polishing tool 3 from the workpiece W side is abruptly reduced when the abrasive bundle 14 passes the edge of the workpiece W. Therefore, when the abrasive bundle 14 passes the edge of the workpiece W, the change amount of the load is abruptly increased. Here, the change amount of the load that is abruptly reduced when the polishing tool 1 descends from the workpiece W can be grasped in advance by an experiment or the like. Therefore, if a predetermined range including the change amount grasped by an experiment or the like is set as the change amount threshold range V and stored and held in the memory unit 52, the control unit 51 can determine that the polishing tool 1 is in the middle of descending from the workpiece surface S of the workpiece W when the change amount of the load is within the change amount threshold range V. Therefore, even if the load falls outside the load threshold range R, if the control unit 51 is configured not to perform the protrusion control operation when the change amount is within the change amount threshold range V (step ST22, step ST23: Yes), it is possible to prevent the polishing tool 1 from performing an unnecessary protrusion control operation when the polishing tool 1 descends from the workpiece surface S of the workpiece W.

[0063] On the other hand, when the load is outside the load threshold range R and the change amount is outside the change amount threshold range V (step ST22, step ST23: No), the control unit 51 performs a protrusion control operation. When the load is outside the load threshold range R and the change amount is outside the change amount threshold range V, for example, when the machine tool M lowers the polishing tool 1 from the workpiece W, the machine tool M performs a movement control to reduce the movement speed of the polishing tool 1. In such a case, if the protrusion control operation is performed, the polishing tool 3 can be advanced to ensure that the abrasive bundle 14 contacts the edge of the workpiece W. In addition, when the load is outside the load threshold range R and the change amount is outside the change amount threshold range V, for example, when the machine tool M lowers the polishing tool 1 from the workpiece W, the machine tool M performs a movement control to gently move the polishing tool 1 in a direction away from the surface S to be processed. In such a case, if the protrusion control operation is performed, the polishing tool 3 can be advanced to ensure that the abrasive bundle 14 contacts the edge of the workpiece W. In either case, the load becomes zero when the polishing tool 1 is removed from the workpiece W. Therefore, at the point in time when the load becomes zero, the protrusion control operation stops.

[0064] 10, the control unit 51 monitors the load and sequentially calculates the amount of change (step ST31). When the load falls outside the load threshold range R and the amount of change is equal to or greater than the amount of change threshold Q (step ST32), the control unit 51 sets the state in which the protrusion control operation is not performed and counts the duration during which the load falls outside the threshold range and the amount of change is equal to or greater than the amount of change threshold Q by using the timer 53 (step ST33). The control unit 51 maintains the state in which the protrusion control operation is not performed until the duration from the point in time when the load falls outside the load threshold range R and the amount of change is equal to or greater than the amount of change threshold Q reaches a predetermined set time, and resumes the protrusion control operation when the duration exceeds the set time (step ST34: Yes, step ST35). On the other hand, when the duration does not exceed the set time, the control unit 51 does not perform the protrusion control operation (step ST34: No, step ST36). This control is intended to prevent unnecessary protrusion control operations from being performed while passing through a notch L or a depression when there is a section K4 on the machining path E where the polishing tool 1 passes through the workpiece W, as shown in the upper part of Figure 11.

[0065] That is, when a notch L or a depression is present on the processing target surface S of the workpiece W, the contact area of ​​the grinding tool 3 (abrasive bundle 14) with the workpiece W is abruptly reduced when the grinding tool 1 passes through the notch L or the depression. As a result, as shown in the lower part of FIG. 11, the load applied from the workpiece W side to the grinding tool 3 side is abruptly reduced and falls outside the load threshold range R. In addition, with the abrupt reduction in the load, the change in the load becomes abruptly larger than the change in the load caused by the wear of the abrasive bundle 14. Therefore, the control unit 51 can determine that a notch L or a depression is present on the processing target surface S of the workpiece W when the load falls outside the load threshold range R and the change is equal to or greater than the change threshold Q (|dP' / dt|). In other words, when the load falls outside the load threshold range R and the amount of change is equal to or greater than the change threshold Q, the control unit 51 can determine that the load is not outside the load threshold range R due to wear of the abrasive bundle 14, but is outside the load threshold range R due to the shape of the surface S to be machined. Therefore, when the load falls outside the load threshold range R and the amount of change is equal to or greater than the change threshold Q, the control unit 51 does not perform the protrusion control operation. This prevents the abrasive bundle 14 from protruding when the polishing tool 1 faces the notch L or the depression.

[0066] Furthermore, after stopping the protrusion control operation, the control unit 51 counts the duration during which the load is outside the threshold range and the change amount is equal to or greater than the change amount threshold Q using the timer 53, and maintains the state in which the protrusion control operation is not performed until the duration reaches a predetermined set duration. Therefore, by presetting the set time to an appropriate value, it is possible to prevent the protrusion control operation from being performed while the polishing tool 1 passes through the notch L or the depression. This prevents the abrasive bundle 14 from protruding while the polishing tool 1 passes through the notch L or the depression.

[0067] (Protrusion control action performed while the polishing tool moves along the machining path) 4, the machining path E along which the machine tool M moves the polishing tool 1 is set to start in front of the workpiece W, pass through the workpiece W, and reach the back of the workpiece W. While the polishing tool 1 moves along the machining path E, the polishing tool holder 4 monitors the output from the load detector 23 and successively calculates the amount of change in the load, and performs a protrusion control operation of driving and controlling the drive source (motor 35) based on the load and the amount of change to move the polishing tool 3 forward and backward.

[0068] As shown in Fig. 4, in section K2 where the polishing tool 1 is located in front of the workpiece W, the output from the load detector 23 is zero until the polishing tool 3 comes into contact with the workpiece W. Therefore, the control unit 51 stops the protrusion control operation. Furthermore, after stopping the protrusion control operation, the control unit 51 maintains a state in which the protrusion control operation is not performed until the amount of change falls below the set amount of change U, and after the amount of change falls below the set amount of change U, the control unit 51 enters a state in which the protrusion control operation is not performed. As a result, when the polishing tool 1 climbs up onto the workpiece W, the polishing tool 1 enters a state in which the protrusion control operation is not performed until the workpiece W is climbed up, and enters a state in which the protrusion control operation is performed after the workpiece W is climbed up.

[0069] Next, in section K1 where the polishing tool 1 passes over the polishing target surface S of the workpiece W, as shown in Fig. 7, the polishing tool 1 performs a protrusion control operation when the load is outside the load threshold range R and the amount of change is smaller than the amount of change threshold Q. In other words, the polishing tool 1 performs a protrusion control operation when it can be determined that the polishing tool 3 is polishing the processing target surface S of the workpiece W and the load is changing due to wear of the abrasive bundle 14 caused by polishing.

[0070] In the protrusion control operation, when the output from the load detector 23 falls below a first threshold value R1, the polishing tool 1 drives the motor 35 to move the mounting part 21 forward X2. In addition, the polishing tool 1 monitors the output (load) from the motor 35 while driving the motor 35 to move the mounting part 21, and when the load reaches a second threshold value R2, stops driving the motor 35 to stop the movement of the mounting part 21. As a result, the polishing tool 3 moves forward when the abrasive bundle 14 is worn and the amount of cut-in decreases, so that the amount of cut-in can be ensured.

[0071] In the protrusion control operation, when the output from the load detector 23 exceeds a second threshold value R2, the control unit 51 drives the motor 35 to move the mounting unit 21 backward X1. Furthermore, the control unit 51 monitors the output (load) from the motor 35 while driving the motor 35 to move the mounting unit 21, and when the load returns to the second threshold value R2, stops driving the motor 35 to stop the movement of the mounting unit 21. Here, the case where the output from the load detector 23 exceeds the second threshold value R2 is a case where the distance between the spindle N of the machine tool M and the processing target surface S of the workpiece W becomes shorter than the expected distance due to a dimensional error of the workpiece W or the like, and the cutting amount of the workpiece W by the abrasive bundle 142 increases beyond an appropriate range. In such a case, if the control unit 51 drives the motor 35 to move the mounting unit 21 backward X1, the polishing tool 3 moves in a direction away from the workpiece W. Therefore, the cutting amount by the abrasive bundle 14 can be reduced to maintain the processing accuracy of the polishing tool 1 with respect to the workpiece W.

[0072] Furthermore, as shown in Fig. 4, in the section K4 where the polishing tool 1 passes through the polishing target surface S of the workpiece W, the control unit 51 does not perform the protrusion control operation when the load is outside the load threshold range R and the change amount is equal to or greater than the change amount threshold Q, and counts the duration during which the load is outside the load threshold range R and the change amount is equal to or greater than the change amount threshold Q, and maintains the state in which the protrusion control operation is not performed until the duration reaches a predetermined set duration. Then, the control unit 51 performs the protrusion control operation when the duration exceeds the set duration. Therefore, when notches L are provided on the processing path E as shown in Fig. 11, unnecessary protrusion control operations are not performed while passing through these notches L.

[0073] 4, in section K3 where the polishing tool 1 descends from the processing surface S of the workpiece W and reaches the back of the workpiece W, if the load is outside the load threshold range R and the amount of change is within a predetermined amount of change threshold range V, the polishing tool 1 does not perform a protrusion control operation. In other words, if the amount of change is within the preset amount of change threshold range V, the polishing tool 1 determines that the reduction in load is not due to wear of the abrasive bundle 14 but due to the polishing tool 1 descending from the workpiece W, and does not perform a protrusion control operation. This makes it possible to avoid unnecessary protrusion control operations being performed when the polishing tool 1 descends from the workpiece W.

[0074] Furthermore, in section K3 where the polishing tool 1 descends from the machining surface S of the workpiece W and reaches the back of the workpiece W, if the amount of change is outside the amount of change threshold range V when the load falls outside the load threshold range R, a protrusion control operation is performed. In such a state, the machine tool M may be performing special movement control on the polishing tool 1. In such a case, if the control unit 51 performs a protrusion control operation, the polishing tool 3 can be advanced to reliably bring the abrasive bundle 14 into contact with the edge of the workpiece W.

[0075] Here, the load becomes zero when the polishing tool 1 is completely removed from the workpiece W. Therefore, at the point in time when the load becomes zero, the protrusion control operation stops.

[0076] (Action and effect) According to this example, the grinding tool holder 4 can determine whether or not the grinding tool 3 is in contact with the processing surface S of the workpiece W, based on the change in load. Therefore, by performing a protrusion control operation based on the load and the change in load, the grinding tool 1 can perform a protrusion control operation to protrude the grinding tool 3 toward the workpiece W only when the grinding tool 3 is in contact with the processing surface S of the workpiece W.

[0077] (Variation 1) 12 is a flowchart of the protrusion control operation of the polishing tool 1 of Modification 1. The polishing tool 1 may have, as operation modes of the control unit 51, a normal operation mode in which the above-mentioned machining operation is performed, and a learning operation mode for setting the load threshold range R and the change amount threshold Q.

[0078] In this case, the control unit 51 includes an operation mode switching unit 60 that switches the operation mode of the control unit 51 between a normal operation mode and a learning operation mode, as shown by the dotted line in Fig. 5. In this case, the control unit 51 also includes a learning data setting unit 61 that sets the load threshold range R, the change amount threshold Q, and the change amount threshold range V from learned data in the learning operation mode, and stores and holds them in the storage unit 52.

[0079] In this example, as shown in FIG. 12, in order to set the load threshold range R and the change amount threshold Q, first, the operation mode of the control unit 51 is set to the operation mode for learning (step ST41). Next, the shaft of the polishing tool 1 is connected to the spindle N of the machine tool M to operate the machine tool M, and the polishing tool 1 is moved along a predetermined learning path. The learning path includes a processing path portion (section K1 in FIG. 4) in which the polishing tool 1 polishes the flat processing target surface S of the workpiece W, and a processing exit path portion (section K3 in FIG. 4) in which the polishing tool 1 is lowered from the processing target surface S and separated from the workpiece W. In the processing path portion (section K1), when the polishing tool 3 faces the processing target surface S of the workpiece W, the distance between the spindle N of the machine tool M and the processing target surface S is maintained constant. Also, in the processing path portion (section K1), the abrasive bundle 14 is maintained in contact with the surface of the workpiece W.

[0080] Here, when the polishing tool 1 passes through the machining path portion (section K1), the learning data setting unit 61 monitors the output from the load detector 23 and sequentially calculates the change in load per predetermined unit time, sets a load threshold range R based on the load, and sets a change threshold Q based on the change, and stores and retains them in the memory unit 52 (step ST42).

[0081] That is, the learning data setting unit 61 obtains a first threshold value R1, which is the lower limit of the load that can secure a cutting depth suitable for polishing the workpiece W, and a second threshold value R2, which is the upper limit of the load, based on the load output from the load detector 23 when the polishing tool 3 polishes the flat work surface S, and sets the range between them as the load threshold value R. When setting the load threshold value range R based on the load detected in the learning operation mode, the memory unit 52 stores and holds in advance tabular data that associates the load with the change amount threshold value range V, a formula that shows the relationship between the load and the change amount threshold value range V, and the like. The learning data setting unit 61 automatically calculates the load threshold value range R from the load using these data and formulas. The learning data setting unit 61 also stores and holds the calculated load threshold value range R in the memory unit 52.

[0082] Furthermore, the learning data setting unit 61 sets the lower limit of the change amount at which it can be estimated that the load fluctuation is caused by the wear of the abrasive bundle 14 as the change amount threshold Q based on the change amount of the load output from the load detector 23 when the grinding tool 3 grinds the flat work surface S. When setting the change amount threshold Q based on the change amount calculated in the learning operation mode, the memory unit 52 stores in advance tabular data in which the change amount and the change amount threshold Q correspond to each other, and a formula showing the relationship between the change amount and the change amount threshold Q, and the learning data setting unit 61 automatically calculates the change amount threshold Q from the change amount using these data and formulas. Furthermore, the learning data setting unit 61 stores and holds the calculated change amount threshold Q in the memory unit 52 (step ST42).

[0083] Furthermore, when the polishing tool 1 passes through the processing exit path portion, the control unit 51 monitors the output from the load detector 23 and sequentially calculates the load change amount per unit time determined in advance, and sets the change amount threshold range V based on the load. That is, the learning data setting unit 61 acquires the load change amount when the polishing tool 3 descends from the flat processing target surface S, and sets a range including this change amount as the change amount threshold range V. When setting the change amount threshold range V based on the acquired change amount, the storage unit 52 stores and holds in advance tabular data in which the change amount and the change amount threshold range V correspond to each other, and a formula for the relationship between the change amount and the change amount threshold range V. The learning data setting unit 61 automatically calculates the change amount threshold range V from the change amount using these data and formulas. The learning data setting unit 61 also stores and holds the calculated change amount threshold range V in the storage unit 52 (step ST42).

[0084] Then, when the polishing tool 1 is moved along the machining path E by the machine tool M, the operation mode of the control unit 51 is switched from the learning operation mode to the normal operation mode (step ST43). In the normal operation mode, the control unit 51 refers to the memory unit 52 and acquires the load threshold range R, the change amount threshold Q, and the change amount threshold range V (step ST44).

[0085] In this example, by machining the workpiece W with the polishing tool 1 with the operating mode of the control unit 51 set as the learning operating mode, it is possible to set the load threshold range R, change threshold Q, and change range required for the protrusion control operation of the control unit 51.

[0086] (Variation 2) Next, the grinding tool holder 4 may change the load threshold range R for performing the protrusion control operation during the processing operation. In the second modification, the load threshold range R is changed based on the length dimension of the abrasive bundle 14. Fig. 13 is an explanatory diagram of the load threshold range R when the load threshold range R is changed based on the length dimension of the abrasive bundle 14.

[0087] In this case, the polishing tool 1 holds in advance in the memory unit 52 (load threshold memory unit) a plurality of load threshold ranges R associated with the length dimension of the abrasive bundle 14 in the axial direction L as the load threshold ranges R. In this example, as shown in FIG. 13, a first formula capable of calculating a first threshold R1, which is the lower limit of the load threshold range R, based on the length dimension of the abrasive bundle 14, and a second formula capable of calculating a second threshold R2, which is the upper limit of the load threshold range R, based on the length dimension of the abrasive bundle 14, are stored in the memory unit 52 as the plurality of load threshold ranges R. In the first formula F1, the first threshold R1 increases as the length dimension of the abrasive bundle 14 decreases. In the second formula F2, the second threshold R2 increases as the length dimension of the abrasive bundle 14 decreases.

[0088] 5, the control unit 51 includes an initial operation control unit 63 that places the mounting unit 21 at an initial position where the mounting unit 21 can advance and retreat in the direction of the axis L. The control unit 51 also includes a load threshold range resetting unit 64 that calculates the amount of movement of the mounting unit 21 from the initial position to the opposite side to the shank 6 based on the drive amount of the motor 35 and the movement direction of the mounting unit 21 each time the mounting unit 21 is moved in the protrusion control operation, and selects one load threshold range R from a plurality of load threshold ranges R by referring to the load threshold storage unit 52 based on the amount of movement.

[0089] In this example, before the grinding tool holder 4 is moved along the machining path E by the machine tool M, the mounting part 21 to which the grinding tool 3 is attached is placed at an initial position where it can be advanced and retreated in the direction of the axis L. Furthermore, while the grinding tool holder 4 is moved along the machining path E by the machine tool M, the control part 51 calculates the amount of movement of the mounting part 21 from the initial position, and selects one load threshold range R from a plurality of load threshold ranges R based on the amount of movement. That is, the calculated amount of movement is substituted into the first formula F1 and the second formula F2, respectively, to calculate the first threshold R1 and the second threshold R2 corresponding to the length dimension of the abrasive bundle 14.

[0090] Here, the elastic bundle of abrasive bundles 14 has a lower cutting ability because the longer the dimension in the axial line L, the more flexible it is. However, when the wear amount increases and the length dimension in the axial line L direction decreases, the stiffness of the bundle of abrasive bundles 14 increases, and the cutting ability improves. Also, the amount of movement of the mounting part 21 from the initial position to the opposite side of the shank 6 corresponds to the amount of wear of the bundle of abrasive bundles 14. Therefore, the length dimension of the bundle of abrasive bundles 14 can be easily grasped based on the amount of movement. Therefore, if the load threshold range R is obtained by substituting the amount of movement (the amount of wear of the bundle of abrasive bundles 14) into the first formula F1 and the second formula F2, when the bundle of abrasive bundles 14 becomes shorter, the load threshold range R can be rounded up to a higher value, and the cutting ability of the bundle of abrasive bundles 14 can be maintained constant. Therefore, according to this example, it is possible to maintain the cutting ability of the bundle of abrasive bundles 14 constant regardless of the length dimension of the bundle of abrasive bundles 14.

[0091] (Variation 3) As another example of changing the load threshold range R for performing the protrusion control operation during the machining operation, the grinding tool holder 4 may change the load threshold range R for performing the protrusion control operation before and after the load output from the load detector 23 becomes zero. Here, the point in time when the load becomes zero is the point in time when the grinding tool 1 descends from the workpiece W in the middle of the machining path E.

[0092] Fig. 14 is an explanatory diagram of a case where the load threshold range R is changed when the polishing tool 1 gets on and off the workpiece W. The upper part of Fig. 14 shows the positional relationship between the polishing tool 1 and the workpiece W. The lower part of Fig. 14 is a graph of the load applied to the polishing tool 3 from the workpiece W side and the load threshold range. Fig. 15 is a flowchart of the protrusion control operation when the polishing tool gets on and off the workpiece.

[0093] 14, in this example, the polishing tool 1 processes the workpiece W with 80% of the abrasive bundle 4 in contact with the processing target surface S from the time it climbs up on the workpiece W until it first descends from the workpiece W. Then, the polishing tool 1 processes the workpiece W with 20% of the abrasive bundle 4 in contact with the processing target surface S from the time it next climbs up on the workpiece W until it descends.

[0094] In this case, the storage unit 52 holds a first load threshold range R(1) and a second load threshold range R(2) different from the first load threshold range R(1) as the load threshold range R. In this example, the range of the second load threshold range R(2) is a smaller value than the first load threshold range R(1). In addition, as shown by the dotted line in FIG. 5, the control unit 51 includes a counting unit 65 that counts the number of times the load becomes zero, and a load threshold range resetting unit 64 that sets the first load threshold range R to the load threshold range R until the number of times reaches a predetermined set number, and sets the load threshold range R to the second load threshold range R when the number of times reaches the set number.

[0095] As a result, in the protrusion control operation performed at the start of processing, the control unit 51 controls the motor 35 based on whether the load is within the first load threshold range R(1) (step ST51). Then, the number of times the load becomes zero is counted (step ST52), and after the number of times the load becomes zero reaches a set number (one time in this example) (step ST53), the control unit 51 controls the motor 35 based on whether the load is within the second load threshold range R (step ST54). Therefore, when the polishing tool 1 moving along the processing path E repeatedly gets on and off the processing target surface S of the workpiece W, the amount of cutting into the workpiece W by the abrasive bundle 14 can be adjusted at the point of time when the polishing tool 1 gets on and off the workpiece W after the set number of times of getting on and off.

[0096] (Other embodiments) The grinding tool 3 included in the grinding tool 1 may include an elastic grindstone as an abrasive material. Fig. 16 is a perspective view of another grinding tool included in the grinding tool. The grinding tool 3A shown in Fig. 16 includes a cylindrical elastic grindstone 2A extending in the axial direction X as an abrasive material. The grinding tool 3A also includes an abrasive material holder that holds the elastic grindstone 2A. The shape of the elastic grindstone 2A may be a prismatic shape.

[0097] The elastic grindstone 2A includes an elastic foam, a polymer, and abrasive grains. The elastic foam is, for example, a melamine resin foam. The elastic foam can be an anisotropic elastic foam in which anisotropy is imparted to the elastic force by being compressed in one direction. The polymer is any one of epoxy resin, urethane resin, polyester resin, or polyrotaxane. The abrasive grains are appropriately selected depending on the type of workpiece W. As the abrasive grains, diamond, alumina, silica, silicon carbide, silicon nitride, boron carbide, titania, cerium oxide, or zirconia can be used. The base material of such an elastic grindstone is obtained by impregnating an anisotropic elastic foam with a dispersion liquid containing a polymer and abrasive grains, and firing the same. The direction in which the elastic force is strongest in the anisotropic elastic foam is the compression direction.

[0098] The abrasive holder 11 is an annular member and has a holder through hole 12 extending in the axial direction X at its center. The abrasive holder 11 also has a circular abrasive holding hole 13A in its front end surface. The abrasive holder 11 holds one end of the elastic grindstone 2A in the axial direction X. The abrasive holder 11 also has a recess surrounding the holder through hole 12 in its rear end surface. The recess is a grinding tool side connecting part 15 for detachably mounting the grinding tool 3 to the grinding tool holder 4. The grinding tool 3A is held by the grinding tool holder 4 to constitute the grinding tool 1.

[0099] Here, when the grinding material is an elastic grindstone 2A, the longer the dimension in the axial direction X, the more flexible it is, so the cutting ability is low. However, when the amount of wear increases and the length dimension in the axial direction of the grinding material becomes shorter, the rigidity increases and the cutting ability improves. Also, when the grinding material is an elastic grindstone 2A, the load output from the load detector 23 is a reaction force that the front end face of the elastic grindstone 2A is pressed vertically from the processing target surface S of the workpiece W during polishing. Such a reaction force is proportional to the contact area where the front end face of the elastic grindstone 2A contacts the processing target surface S of the workpiece W. Therefore, if the contact area is small, the load is small, and if the contact area is large, the load is large. Therefore, even when the grinding material is an elastic grindstone 2A, the present invention can be applied in the same way as when the grinding material is a bundle of linear grinding materials 2.

[0100] Next, the grinding tool 3 included in the grinding tool 1 may include a rigid grindstone as an abrasive. FIG. 17 is a perspective view of another grinding tool included in the grinding tool. The grinding tool 3B shown in FIG. 17 includes a rigid grindstone 2B extending in the axial direction X as an abrasive. The grinding tool 3B also includes an abrasive holder 11 that holds the grindstone 2B. The abrasive holder 11 is the same as the abrasive holder 11 of the grinding tool 3A shown in FIG. 16.

[0101] Here, since the rigid grinding wheel 2B has a large Young's modulus, it is considered that the grinding wheel 2B itself does not bend. Also, when the grinding material is the grinding wheel 2B, it is considered that there is no change in cutting ability due to the dimension in the axial direction X. However, in the polishing tool 1, it is necessary to bring the front end face of the grinding wheel 2B into contact with the processing target surface S of the workpiece W. Therefore, the grinding wheel 2B is held in a cantilever state by the grinding material holder 11. Similarly, the grinding wheel 2B is held in a cantilever state by the polishing tool holder 4 via the grinding material holder 11. Therefore, the grinding wheel 2B is deflected by the concentrated load at the tip of the cantilever.

[0102] The amount of deflection caused by the concentrated load at the tip of the cantilever is proportional to the cube of the length dimension in the axial direction X. Therefore, the longer the dimension in the axial direction X, the greater the amount of deflection, and the easier it is for the cutting ability to decrease. On the other hand, when the amount of wear increases and the length dimension in the axial direction of the abrasive material becomes shorter, the amount of deflection decreases, so the rigidity increases and the cutting ability improves. In addition, when the abrasive material is a grinding wheel 2B, the load output from the load detector 23 is a reaction force that the front end face of the grinding wheel 2B is pressed vertically from the processing target surface S of the workpiece W during polishing. Such a reaction force is proportional to the contact area where the front end face of the grinding wheel 2B contacts the processing target surface S of the workpiece W. Therefore, if the contact area is small, the load is small, and if the contact area is large, the load is large. Therefore, even when the abrasive material is a rigid grinding wheel 2B, the present invention can be applied in the same way as when the abrasive material is a bundle of linear grinding materials 2.

[0103] In addition, compared to an elastic grinding material, the rigid grinding wheel 2B has a problem that the longer the dimension in the axial direction X, the more likely it is to crack. To address this problem, if the load threshold range is changed based on the length dimension of the grinding wheel 2B in the axial direction X, it is possible to prevent cracks from occurring in the grinding wheel 2B.

Claims

1. A method for controlling a grinding tool holder having a machine mounting part, a mounting part to which a grinding tool is mounted, a moving mechanism having a drive source and configured to move the mounting part in an axial direction of the machine mounting part, and a load detector configured to detect a load applied to the grinding tool mounted on the mounting part, comprising: a grinding tool having an abrasive is mounted on the mounting part, and the machine mounting part is connected to a spindle of a machine tool to operate the machine tool; while the machine tool moves the grinding tool holder along a predetermined machining path, an output from the load detector is monitored and an amount of change in the load per unit time is calculated; and a protrusion control operation is performed to drive the drive source based on the load and the amount of change, thereby moving the mounting part and advancing and retracting the grinding tool; A method for controlling a grinding tool holder, characterized in that the protrusion control operation is performed when the load is outside a predetermined load threshold range and the change amount is smaller than a predetermined change amount threshold.

2. 2. The method for controlling a grinding tool holder according to claim 1, wherein the protrusion control operation is stopped when the load is zero, and the state in which the protrusion control operation is not performed is maintained until the amount of change falls below a preset amount of change.

3. 2. The method for controlling a grinding tool holder according to claim 1, characterized in that when the load is outside the load threshold range and the amount of change is within a predetermined change amount threshold range, the protrusion control operation is not performed, and when the load is outside the load threshold range and the amount of change is outside the change amount threshold range, the protrusion control operation is performed.

4. 4. A method for controlling a grinding tool holder as claimed in claim 1 or 3, characterized in that, when the load falls outside the load threshold range and the amount of change becomes equal to or greater than the change amount threshold, the protrusion control operation is not performed, and a duration during which the load is outside the load threshold range and the amount of change becomes equal to or greater than the change amount threshold is counted, the state during which the protrusion control operation is not performed is maintained until the duration reaches a predetermined set time, and the protrusion control operation is resumed when the duration exceeds the set time.

5. A plurality of load threshold ranges corresponding to the length dimensions of the abrasive in the axial direction are held in advance as the load threshold ranges; Before the grinding tool holder is moved by the machine tool, the mounting portion to which the grinding tool is attached is disposed at an initial position capable of being advanced and retreated in the axial direction; 5. A method for controlling a grinding tool holder as described in claim 1, 3, or 4, characterized in that each time the mounting part is moved in the protrusion control operation, a movement amount of the mounting part that moves from the initial position to the opposite side of the machine mounting part is calculated based on the drive amount of the drive source and the movement direction of the mounting part, and one of the plurality of load threshold ranges is selected based on the movement amount.

6. A first load threshold range and a second load threshold range different from the first load threshold range are stored in advance as the load threshold range; 6. A method for controlling a grinding tool holder as claimed in claim 1, 3, 4 or 5, further comprising the steps of: setting the first load threshold range to the load threshold range; counting the number of times the load becomes zero; and setting the load threshold range to the second load threshold range when the number of times reaches a predetermined set number.

7. a memory unit is provided, the grinding tool holder is moved along a predetermined learning path by the machine tool, an output from the load detector is monitored, and a change amount of the load per unit time is successively calculated, the load threshold range is set based on the load, and the change amount threshold is set based on the change amount, and stored and retained in the memory unit; A method for controlling a grinding tool holder as described in claim 1, 3, 4, 5, or 6, characterized in that when the machine tool moves the grinding tool holder along the machining path, the load threshold range and the change amount threshold are obtained by referring to the memory unit.

8. The grinding tool has an abrasive material whose length direction is oriented in the axial direction, and an abrasive material holder that holds one end of the abrasive material in the axial direction, 8. The method for controlling a grinding tool holder according to claim 1, wherein the grinding tool holder is attached to the attachment part.

9. A machine mounting part, a mounting portion on which a polishing tool having an abrasive is mounted; a moving mechanism including a drive source and configured to move the mounting portion in an axial direction of the machine mounting portion; a load detector for detecting a load applied to the grinding tool attached to the attachment portion; a control unit that monitors an output from the load detector, calculates a change in the load per unit time, and performs a protrusion control operation of driving the drive source based on the load and the change in the load to move the mounting unit and advance and retreat the grinding tool; having The control unit is capable of performing the protrusion control operation when the load is outside a preset load threshold range and the amount of change is smaller than a preset amount of change threshold, characterized by the above-mentioned.

10. The grinding tool holder according to claim 9, characterized in that the control unit stops the protrusion control operation when the load is zero, and maintains a state in which the protrusion control operation is not performed until the amount of change falls below a preset change amount.

11. The control unit sets the protrusion control operation to a state in which the protrusion control operation is not performed when the load is outside the load threshold range and the change amount is within a predetermined change amount threshold range, and sets the protrusion control operation to a state in which the protrusion control operation is not performed when the load is outside the load threshold range and the change amount is outside the change amount threshold range.

10. The abrasive tool holder according to claim 9, further comprising a control mechanism for controlling the abrasive tool holder.

12. A timer is provided. The grinding tool holder according to claim 9 or 11, characterized in that when the load falls outside the load threshold range and the amount of change becomes equal to or greater than the change amount threshold, the control unit puts the control unit into a state in which the protrusion control operation is not performed, and drives the timer to count the duration during which the load is outside the load threshold range and the amount of change is equal to or greater than the change amount threshold, maintains the state in which the protrusion control operation is not performed until the duration reaches a predetermined set time, and resumes the protrusion control operation when the duration exceeds the set time.

13. a load threshold storage unit that stores and holds a plurality of load threshold ranges associated with a length dimension of the abrasive in the axial direction as the load threshold range; 13. The grinding tool holder according to claim 9, 11, or 12, characterized in that the control unit includes an initial operation control unit that positions the mounting unit at an initial position where it can advance and retreat in the axial direction, and a load threshold range resetting unit that calculates an amount of movement of the mounting unit, which moves from the initial position to the opposite side of the machine mounting unit, based on the drive amount of the drive source and the movement direction of the mounting unit, each time the mounting unit is moved in the protrusion control operation, and selects one of the multiple load threshold ranges by referring to the load threshold memory unit based on the amount of movement.

14. a load threshold storage unit that stores and holds a first load threshold range and a second load threshold range different from the first load threshold range as the load threshold range, 14. The grinding tool holder according to claim 9, 11, 12, or 13, characterized in that the control unit includes a counting unit that counts the number of times the load becomes zero, and a load threshold range resetting unit that sets the first load threshold range to the load threshold range until the number of times reaches a predetermined set number, and sets the load threshold range to the second load threshold range when the number of times reaches the set number.

15. A storage unit; 15. The grinding tool holder according to claim 9, 11, 12, 13, or 14, characterized in that the control unit has an operation mode switching unit which switches the operation mode of the control unit between a normal operation mode and a learning operation mode, and a learning data setting unit which monitors an output from the load detector in the learning operation mode, sequentially calculates an amount of change in the load per unit time, sets the load threshold range based on the load, and sets the change amount threshold based on the amount of change, and stores and retains them in the memory unit, and in the normal operation mode, the control unit refers to the memory unit to obtain the load threshold range and the change amount threshold from the memory unit.

16. A grinding tool holder according to any one of claims 9 to 15, A grinding tool removably attached to the attachment portion of the grinding tool holder, The grinding tool has an abrasive material whose length direction is oriented in the axial direction, and an abrasive material holder that holds one end of the abrasive material in the axial direction, A polishing tool, characterized in that the abrasive holder is attached to the attachment part.

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