Robot and alignment device for processing flat substrates - Patents.com

Abstract

The invention relates to a robot for processing flat substrates (101), comprising one or more substrate holders (5), a carrier block (4) and a robot arm (2), each substrate holder (5) being set for holding a respective one of the substrates (101) horizontally, the carrier block (4) holding the substrate holders (5) or, if several substrate holders are provided, the carrier block (4) holding the substrate holders (5) at a distance from each other, in which case it is envisaged that the carrier block (4) is fixed to the robot arm (2) by an alignment device (3), the alignment device (3) being set for aligning the carrier block (4).

Description

[Technical field]

[0001] The present invention relates to a robot for processing flat substrates. The present invention further relates to an alignment device suitable for example for such a robot. [Background technology]

[0002] In the semiconductor industry, robots are used for processing substrates, such as wafers. The robots in particular allow the transport of one or more flat substrates, including the accommodation of the substrate before its transport and its storage after the transport. The robots are equipped with a gripping device, by means of which one or more flat substrates are accommodated, transported and stored. Grippers that allow the simultaneous processing of several flat substrates are also called, in technical terms, multiple grippers.

[0003] Various configurations of dual gripping devices are known from the prior art, including dual gripping devices that allow horizontal substrate processing, in which the flat surface of a flat substrate lies in a horizontal plane.

[0004] Flat substrates are often delicate. They must therefore be gripped individually. Gripping in blocks is often not possible. Therefore, the multi-gripper comprises for each substrate its own gripping element with its positioning elements. Additionally, between these gripping elements, spacing elements, also called spacers, are necessary to create the correct spacing in the substrate tray. The gripping elements, position The elements and spacing members together form a gripper package for the dual gripper. However, the weight of the gripper package is determined by the weight of the gripper elements, position It increases with increasing number of elements and spacing members.

[0005] However, the stiffness of the material is limited. For this reason, in the case of a multiple gripping device which should allow horizontal processing of the substrates, deformations (deflection) occur on the arms to which these gripping elements are fixed, due to gravity. This fact is further complicated by limiting factors such as limited space and the requirement of mass reduction in order to guarantee the highest possible dynamics of the elements to be moved, including the gripping elements of the multiple gripping device. Deformation of the arms means that the gripping elements or gripper packages are no longer aligned horizontally. This is a major problem when receiving and storing substrates, since in the storage area the substrates are arranged horizontally and with small spacings, also called pitch. The arrangement of the substrates is standardized in industry standards, and small spacings between the substrates are advantageous, so increasing these spacings is not an option.

[0006] The deformation of the arms is mainly due to the weight of the gripper package, whereas the deformation due to the accommodation of the substrate is, although certainly present, usually significantly less. Auxiliary solutions such as the addition of spacing elements are not suitable for use. The manufacture of parts with inclined surfaces should not be considered industrially suitable for horizontal processing.

[0007] WO 99 / 62107 describes a robot with a multiple gripping device which should enable horizontal processing of the substrate. The substrate is located on a gripping element, called an end effector, which is fixed in a carrier block fixed directly to the arm of the robot. US 2003 / 0230384 also describes a robot with a multiple gripping device which should enable horizontal processing of the substrate. The substrate is located on a gripping element, called an end effector, which is fixed in a carrier block fixed directly to the arm of the robot.

[0008] 1A, 1B and 2 illustrate in detail a multiple gripping device 200 according to the prior art. The multiple gripping device 200 comprises a carrier block 202 fixed to a robot arm 201 of a robot by means of a fixing element 205. The carrier block 202 constitutes a holder in which the gripping elements 203 are fixed. The number of gripping elements 203 depends on the application of the multiple gripping device 200. In FIG. 1 the gripping elements 203 are numbered, the numbers being written in square brackets. On top of the gripping elements 203 a flat substrate 101 is placed in a horizontal orientation. Listed The gripping elements 203 are spaced apart from each other by a spacing member 204 that is part of the carrier block. The vertical distance between two adjacent gripping elements is the pitch. The carrier block 202 including the gripping elements 203 and the spacing member 204 is a component of the dual gripping device. In FIG. 1B, a flat substrate 101a with a circular flat surface and a flat substrate 101b with a square flat surface are shown placed on the gripping element 203. This should illustrate that the gripping element is suitable for accommodating the circular and square substrates 101a, 101b, but in reality only one substrate 101 is held by the gripping element 203. In FIG. 2, a deformation 206 of the arm 201 can be seen, which is mainly caused by the weight of the dual gripping device.

[0009] Shortcomings of previously known robots with dual gripping systems have heretofore prevented their industrial application. It would therefore be desirable to provide a robot with a dual gripping system that allows for horizontal processing of substrates without overloading the robot arm. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] International Publication No. 99 / 62107 Brochure [Patent Document 2] US Patent Application Publication No. 2003 / 0230384 Summary of the Invention [Problem to be solved by the invention]

[0011] The object of the present invention is to eliminate the drawbacks of the prior art. In particular, a robot should be provided which allows horizontal processing of a substrate without overloading the robot arm. Furthermore, an alignment device should be provided which ensures, for example, a horizontal position of the substrate. [Means for solving the problem]

[0012] This problem is solved by the features of claims 1 and 11. Expedient configurations of the invention result from the features of the dependent claims.

[0013] According to the invention, a robot for processing flat substrates is provided, comprising one or more substrate holders, a carrier block and a robot arm, each substrate holder being configured to hold a respective one of the substrates horizontally, the carrier block holding the substrate holders or, if multiple substrate holders are provided, the carrier block holding the substrate holders spaced apart from one another, the carrier block being fixed to the robot arm by an alignment device, the alignment device being configured to align the carrier block.

[0014] By means of the alignment device, the carrier block can be aligned so that the substrate holder allows holding the substrate in a horizontal position. The alignment device allows alignment of the carrier block. The alignment device is additionally used for the connection between the carrier block and the robot arm. The carrier block together with the substrate holder or holders constitutes an active machine element. The carrier block together with the substrate holder or holders is also called a gripper block.

[0015] The substrate holder is technology In connection with corresponds to the gripping elements described, for example, in WO 99 / 62107. Similarly, the carrier block may correspond to a carrier block known from the prior art, for example from WO 99 / 62107, except that the carrier block is not fixed directly to the arm of the robot, but to the alignment device contemplated according to the invention. The robot and the robot arm may correspond to a robot or a robot arm known from the prior art, for example from WO 99 / 62107, except that the carrier block is not fixed to the robot arm, but to the alignment device contemplated according to the invention. The term "handling" is understood to mean the receiving, transport and storage of flat substrates.

[0016] If the robot according to the invention comprises several substrate holders, the robot may comprise one or several spacing members, as known per se from the prior art. By means of the spacing members adjacent substrate holders can be held at a predefined distance, i.e. pitch, from each other. The number of spacing members corresponds to the number of substrate holders minus one. It may also be provided that the spacing members are comprised in a carrier block. It may also be provided that the substrate holders and the spacing members are comprised in a carrier block.

[0017] The robot according to the invention is used to process flat substrates. The number of flat substrates that can be processed by the robot corresponds to the number of its substrate holders. The flat substrates can be wafers, such as silicon wafers. The term "flat substrate" is understood to mean a body that has a larger, typically much larger, extent in two directions of the Cartesian coordinate system than in the third direction of the Cartesian coordinate system. In other words, the width and length of the flat substrate are larger, typically much larger, than its height. In the case of a flat substrate with a substantially circular cross section, its radius is larger than its height. The flat substrate can comprise a first flat surface and a second flat surface. Preferably, the first flat surface and the second flat surface extend parallel and aligned to each other. With the robot according to the invention, the one or more flat substrates can be held such that at least one of the flat surfaces of the respective substrate lies in a horizontal plane. Preferably, both flat surfaces of the respective substrate lies in a horizontal plane.

[0018] The alignment device may comprise a coupling element. In this case, the carrier block is fixed to the robot arm via the coupling element. The coupling element may comprise a first leg and a second leg spaced apart from each other forming a gap. The alignment device may further comprise at least one setting element for setting a distance between the first and second legs. The setting element allows the distance between the legs in the vertical direction to be changed. It may be provided that the alignment device comprises a first setting element and a second setting element. Preferably, the first setting element is a pull screw and the second setting element is a press screw. The pull screw allows the distance between the legs to be changed. Similarly, the press screw allows the distance between the legs to be changed. The pull screw and the press screw may be arranged adjacent to each other. Preferably, the pull screw and the press screw have parallel or at least approximately parallel rotation axes. The pull screw and the press screw in this case have parallel or at least approximately parallel rotation axes. The setting element may be arranged concealed to prevent unintentional operation.

[0019] The draw screw may form a draw screw joint between the first and second legs. In this case, it may be provided that an angle compensation part is used to compensate for the tilt of the draw screw. When the robot arm is not provided with a deformation, the rotation axis is in its initial position, e.g. the rotation axis extends vertically. Upon deformation of the robot arm, the rotation axis of the draw screw may tilt with respect to its initial position. This tilt is preferably compensated for, e.g., by one or more angle compensation parts.

[0020] The gap intentionally weakens the connecting element such that relative movement between the legs can be achieved by the introduction of limited force by the setting element.

[0021] It may be envisaged that the coupling element comprises a first segment to which the carrier block is fixed and a second segment fixed to the robot arm, with a gap being formed in the second segment such that the second leg is located above the first leg. The coupling element may comprise a rod-shaped base, with the gap being introduced in one end face of the base. The first leg faces in the direction of the bottom, and the second leg faces in the direction opposite to the bottom.

[0022] It may be contemplated that the robot arm abuts against the second leg. Preferably, the first segment is adjacent to the second segment. It may be contemplated that the set screw is farther away from the end face introducing the gap than the pull screw. In other words, the pull screw is farther away from the first segment than the set screw.

[0023] Setting elements can be used to correct the relative position in the positive and negative directions. The screw joints can be formed by simple mechanical elements. For example, one or more set screws, one or more pull screws or a combination of one or more set screws and one or more pull screws can be envisaged. In that case, depending on the direction of the compensation to be made to hold the flat substrate in a horizontal position, the appropriate screw joint can be used for adjustment, while the other can be used as a setting securement.

[0024] A first through hole for passing the draw screw may be formed in the first leg. In addition, a second through hole for forming a screw joint with the set screw may be formed in the first leg. Both holes in the first leg are through holes. In this case, the set screw can abut against the second leg with the end face of its shaft, and preferably against a flat face of the second leg facing in the direction of the gap between the legs. A hole for forming a screw joint with the draw screw may be formed in the second leg. This hole is not a through hole. The hole can be formed in the flat face of the second leg facing in the direction of the gap between the legs. By rotating the draw screw guided through the first hole in the first leg and screwed into the hole in the first leg, the spacing between the first leg and the second leg can be changed. By rotating the set screw guided through the second hole in the second leg and abutting against the first leg with its end face of its shaft, the spacing between the first leg and the second leg can be changed. The spacing may be decreased or increased. References to "leg spacing" may refer to that spacing at the end face of the second segment.

[0025] The connecting element is preferably made of a metallic material, for example steel. The connecting element is used to connect the robot arm and the carrier block. The connecting element is preferably one piece.

[0026] The setting element is preferably manufactured from a metallic material, for example steel, and is used to align the carrier block and thereby the substrate holder, thereby ensuring a horizontal position of a flat substrate placed on the substrate holder.

[0027] The alignment device envisaged by the invention allows the compensation of deformations of the robot arm, it can be manufactured relatively simply without affecting its robustness and service life, it is very flexible in terms of design of the shape and it can be made as a lightweight element, all this without affecting its robustness and service life.

[0028] The alignment device envisaged by the invention allows for compensation of tilts of the carrier block and thus of the substrate holder. The alignment device is particularly suitable for gripping devices with one or more substrate holders. However, the alignment device envisaged by the invention can also be used to compensate other machine elements.

[0029] Besides the already described deformations of the robot arm, in a handling system for receiving, transporting and storing flat substrates, there may be other sources of deflection and deformation, such as, for example, guide elements, couplings, adapters, other arms, housings and frame parts. The deformation occurring at the point of application, i.e. at the robot arm, is in such a case the sum of all these individual quantities. Such deformations are naturally unique for each installation, even if the configuration is otherwise identical, this being due to manufacturing and assembly tolerances. It is therefore advantageous if the alignment device is arranged as close as possible to the point of application. In this way, further deformations between the alignment device and the point of application can be prevented. For the same reason, it is preferred that the alignment device is designed as compact and lightweight as possible. The alignment device is preferably maintenance-free, durable and consists of as few individual parts as possible. The alignment device according to the invention is preferably robust. The alignment device can be simply and easily adjusted by means of a setting device. The adjustment, for example by turning a draw screw and / or a set screw, can be carried out by the operator of the robot.

[0030] A person skilled in the art can design the alignment device envisaged by the invention so that its arrangement takes place as space-saving and interference-free as possible. The method of operation of the alignment device described here offers many possibilities for variation. A person skilled in the art can also arrange the setting elements in a hidden manner in order to avoid unintentional misalignments. All common and known solutions for positioning and coupling machine elements in combination with this alignment device can be used.

[0031] The robot according to the invention can be used to process one or several flat substrates. If the robot according to the invention is only used to process one flat substrate, the robot only comprises one substrate holder. In that case, the robot is a single gripper. If the robot according to the invention is only used to process more than one flat substrate, the robot comprises a corresponding number of substrate holders. In that case, the robot is a dual or multi-gripper. Both the single gripper and the dual gripper are also called substrate grippers.

[0032] The alignment device envisaged by the invention can be used to prevent tilting of substrate grippers, in particular single or belly grippers, by providing an adjustable connection between the gripping element and the robot arm. Robots, for example in the form of single or belly grippers, which allow horizontal processing of flat substrates, have so far not had adjustable elements connecting the gripping device with the respective processing system, in particular with the robot arm of the robot.

[0033] Further according to the invention, an alignment device is provided for aligning a carrier block, which holds one or more substrate holders spaced apart from one another, each substrate holder being configured to hold a flat substrate horizontally, the alignment device comprising a coupling element having a first leg and a second leg spaced apart from one another forming a gap, the alignment device further comprising at least one setting element for setting a distance between the first and second legs.

[0034] Details of the alignment device according to the invention have already been described in connection with the robot according to the invention, reference is made to these descriptions.

[0035] The alignment device according to the invention is suitable for all kinds of machine elements and assemblies which are subject to shape and position tolerances due to their geometry and whose spatial position must be adjusted for proper functioning.

[0036] The invention will now be explained in more detail by way of non-limiting examples with reference to the drawings, in which: [Brief description of the drawings]

[0037] FIG. 1 Schematic diagram of a dual gripping device according to the prior art (FIG. 1A: side view; FIG. 1B: top view) FIG. 2 is a schematic side view of the prior art dual gripper shown in FIG. 1 with the arms deformed. FIG. 3 Schematic diagram of one embodiment of a robot according to the invention (FIG. 3A: partial cross-sectional side view, with the alignment device shown in cross-section; FIG. 3B: plan view). FIG. 4 Schematic diagram of the alignment device (FIG. 4A: plan view; FIG. 4B: side view; FIG. 4C: view from below; FIG. 4D: cross-section along section line BB in FIG. 4C; FIG. 4E: view looking at first end face; FIG. 4F: view looking at second end face; FIG. 4G: cross-section along section line BB in FIG. 4C without screws shown) FIG. 5: Schematic diagram of the embodiment shown in FIG. 3 of the robot according to the invention with a modified robot arm. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0038] The embodiment of the robot 1 according to the invention shown in FIG. 3 comprises a robot arm 2 to which an alignment device 3 is fixed. To the alignment device 3, in addition, a carrier block 4 is fixed, which supports a number of substrate holders 5 for holding the wafers 102 horizontally. The substrate holders 5 are gripping elements. Adjacent substrate holders 5 can be held at a predefined distance from one another, i.e. at a pitch P, by means of spacing elements 6. The number n of substrates 5 depends on the application of the robot 1 according to the invention. For this reason, in FIGS. 3A and 5, the carrier block 4 is partially shown in dashed lines. In addition, the substrate holders 5 are numbered, the numbers being written in square brackets. The robot arm 2 is mounted in a known manner on a base 7 and can be moved via a control device 8, for example as described in WO 99 / 62107. The robot 1 shown in FIG. 3 corresponds, with the exception of the alignment device 3, to industrial robots known per se for processing flat substrates, for example wafers 102.

[0039] The alignment device 3 comprises a coupling element 31, a draw screw 32 and a set screw 33. The coupling element 31 comprises a rod-shaped base having a first segment 311 and a second segment 312. A longitudinal axis A of the rod-shaped base extends from the robot arm 2 to the carrier block 4. The first segment 311 and the second segment 312 are adjacent to each other. The carrier block 4 is fixed to the first segment 311 by one or more fixing elements 10. The second segment 312 is fixed to the robot arm 2 by a fixing element 9. The fixing elements 9, 10 are only indicated by dashed lines in Figs. 3A and 5 to simplify the illustration.

[0040] The joining element 31 has a first end face 31a formed on the first segment 311 and a second end face 31b formed on the second segment 312. The joining element 31 further has a lower face 31c and an upper face 31d joined to each other via longitudinal sides 31e, 31f. The lower face 31c faces towards the bottom and the upper face 31d faces away from the bottom. The upper face 31d has an offset at the face where the first segment 311 adjoins the second segment 312.

[0041] A gap 34 is formed in the second end face 31b of the coupling element 31, which extends in the direction of the first end face 31a and over the entire extent of the coupling element 31 between the longitudinal sides 31e, 31f. The gap 34 is therefore open at the second end face 31b and at the longitudinal sides 31e, 31f of the second segment 312. The gap 34 is defined by a first leg 313 and a second leg 314, which are included in the second segment 312 and are joined via a base 315, which is also included in the second segment 312. The second segment 312 therefore has a U-shaped cross section. The gap 34 extends substantially horizontally, and the flat surfaces defining the gap between the legs 313, 314 lie in an approximately horizontal plane, ignoring adjustments made by the pull screw 32 and the set screw 33, which may change the alignment of the legs 313, 314. The second segment 312 abuts against the robot arm 2 with its upper surface which is part of the upper surface 31d.

[0042] In the first leg 313, a first through hole 316 for the drawing screw 32 and a second through hole 317 are formed (see FIG. 4G). In the second leg 314, a hole 318 is formed, into which the drawing screw 32 is screwed. The hole 318 is thus provided with an internal thread, into which an external thread formed on the shaft 321 of the drawing screw 32 engages. The first through hole 316 does not have an internal thread. However, the drawing screw 32 abuts with its screw head 322 against the lower surface 31c of the coupling element 31. By rotating the drawing screw, the extent of the gap 34 between the legs 313, 314 can be changed. The second through hole 317 is provided with an internal thread, into which an external thread formed on the shaft of the set screw 33 engages. The set screw 33 extends into the gap 34 and abuts with the end face of its shaft against the second leg 314. By rotating the set screw, the width of the gap 34 between the legs 313, 314 can be changed. compensation It can be seen that the wafer 102 is in a horizontal position despite the deformation 11. In this case, the length of the gap 34 defines a compensation area that extends from the base 315 of the second segment 312 to the point of application of the deformation 11 on the robot arm 2. It can also be seen in Fig. 5 that an alignment device is arranged in the vicinity of the point of application of the deformation 11.

[0043] The draw screw 32 and the set screw 33 are preferably formed centrally with respect to the extent of the coupling element 31 between its longitudinal sides 31e, 31f. The spacing of the set screw 33 from the end face 31b of the coupling element 31 is preferably equal to the draw screw 32 from this end face. screw The distance between the pull screw 32 and the push screw 33 is larger than the distance between the pull screw 32 and the push screw 33. The rotation axes of the pull screw 32 and the push screw 33 extend substantially vertically. In addition, the present application relates to the invention described in the claims, but may also include the following as other aspects. 1. A robot for processing flat substrates (101) comprising one or more substrate holders (5), a carrier block (4) and a robot arm (2), each substrate holder (5) being configured to hold a respective one of the substrates (101) horizontally, the carrier block (4) holding the substrate holder (5) or, if several substrate holders are provided, the carrier block (4) holding the substrate holders (5) at a distance from each other, A robot, characterized in that a carrier block (4) is fixed to a robot arm (2) by an alignment device (3), and the alignment device (3) is set to align the carrier block (4). 2. The robot described in claim 1, characterized in that the alignment device (3) comprises a coupling element (31) having a first leg (313) and a second leg (314) spaced apart from each other while forming a gap (34), and the alignment device (3) further comprises at least one setting element for setting the spacing between the first and second legs (313, 314). 3. The robot described in claim 2, characterized in that the alignment device (3) comprises a first setting element and a second setting element, the first setting element being a pull screw (32) and the second setting element being a push screw (33). 4. The robot described in claim 3, characterized in that the pull screw (32) and the push screw (33) are arranged adjacent to each other. 5. The robot according to claim 3 or 4, characterized in that the pull screw (32) and the push screw (33) have parallel or at least approximately parallel rotation axes. 6. A robot described in any one of claims 2 to 5 above, characterized in that the coupling element (31) comprises a first segment (311) to which the carrier block (4) is fixed and a second segment (312) fixed to the robot arm (2), and a gap (34) is formed in the second segment so that the second leg (314) is positioned above the first leg (313). 7. The robot described in claim 6, wherein the robot arm (2) abuts against the second leg (314). 8. The robot described in 6 or 7 above, characterized in that the first segment (311) is adjacent to the second segment (312), and the pull screw (32) is farther away from the first segment (311) than the push screw (33). 9. The robot according to any one of items 3 to 8 above, wherein a first through hole (316) for passing the pull screw (32) and a second through hole (317) for forming a screw joint with the push screw (33) are formed in the first leg (313), and the push screw (33) abuts against the second leg (314) with an end face of its shaft. 10. The robot according to claim 9, wherein a hole (318) is formed in the second leg (314) for forming a screw joint with the draw screw (32). 11. An alignment device for aligning a carrier block (4), in which the carrier block (4) holds one or more substrate holders (5) spaced apart from one another, each substrate holder (5) being configured to horizontally hold a flat substrate (101), An alignment device (3) comprising a coupling element (31) having a first leg (313) and a second leg (314) spaced apart from each other while forming a gap (34), the alignment device (3) further comprising at least one setting element for setting the spacing between the first and second legs (313, 314). 12. The alignment device as described in claim 11, characterized in that the alignment device comprises a first setting element and a second setting element, the first setting element being a pull screw (32) and the second setting element being a push screw (33). 13. The alignment device according to claim 12, wherein the pull screw (32) and the push screw (33) are arranged adjacent to each other. 14. An alignment device as described in claim 12 or 13, characterized in that the pull screw (32) and the push screw (33) have parallel or at least approximately parallel rotation axes. 15. An alignment device described in any one of claims 11 to 14 above, characterized in that the coupling element (31) comprises a first segment (311) to which the carrier block (4) is fixed and a second segment (312) fixed to the robot arm (2), and a gap (34) is formed in the second segment (312) so that the second leg (314) is positioned above the first leg (313). [Explanation of symbols]

[0044] 1. Robot 2. Robot Arm 3. Alignment device 4. Carrier Block 5 Substrate Holder 6 Spacing members 7. Bass 8 Control device 9 Fixed elements 10 Fixed elements 11. Transformation 31 Bonding Elements 31a first end face 31b Second end face 31c Bottom side 31d top surface 31e Vertical side 31f Vertical side 311 First Segment 312 Second Segment 313 First Leg 314 Second Leg 315 Base 316 First Through Hole 317 Second Through Hole 318 holes 32 Pull screw 321 Shaft 322 Screw head 33 Push screw 34 Gap 101 Flat Substrate 101a A flat substrate having a circular flat surface 101b Flat substrate having a square flat surface 102 Wafer 200 Dual gripping device 201 Arm 202 Carrier Block 203 Gripping element 204 Spacing member 205 Fixed elements 206 Transformation

Claims

1. A robot for processing flat substrates (101) comprising one or more substrate holders (5), a carrier block (4) and a robot arm (2), each substrate holder (5) being set for holding a respective one of the substrates (101) horizontally, the carrier block (4) holding the substrate holders (5) or, if a plurality of substrate holders are provided, the carrier block (4) holding the substrate holders (5) spaced apart from one another, the carrier block (4) being fixed to the robot arm (2) by an alignment device (3), the alignment device (3) being set for aligning the carrier block (4), The alignment device (3) comprises an integrally formed coupling element (31) having a first leg (313) and a second leg (314) spaced apart from each other forming a gap (34) to enable compensation for tilt of the carrier block (4), and at least one setting element for setting the distance between the first and second legs (313, 314).

2. 2. The robot according to claim 1, characterized in that the alignment device (3) comprises a first setting element and a second setting element, the first setting element being a pull screw (32) and the second setting element being a set screw (33).

3. 3. The robot according to claim 2, wherein the pull screw (32) and the push screw (33) are arranged adjacent to each other.

4. 4. The robot according to claim 3, characterized in that the pull screw (32) and the push screw (33) have parallel or at least approximately parallel axes of rotation.

5. 5. The robot according to claim 1, wherein the coupling element (31) comprises a first segment (311) to which the carrier block (4) is fixed and a second segment (312) fixed to the robot arm (2), a gap (34) being formed in the second segment such that the second leg (314) is located above the first leg (313).

6. 6. The robot according to claim 5, characterized in that the robot arm (2) abuts against the second leg (314).

7. 7. The robot of claim 6, wherein the first segment (311) is adjacent to the second segment (312) and the pull screw (32) is farther away from the first segment (311) than the set screw (33).

8. 5. The robot according to claim 4, wherein the first leg (313) has a first through hole (316) for passing the pull screw (32) therethrough and a second through hole (317) for forming a screw joint with the push screw (33), and the push screw (33) abuts against the second leg (314) with an end face of the shaft of the push screw.

9. 9. The robot according to claim 8, characterized in that in the second leg (314) a hole (318) is formed for forming a threaded joint with the draw screw (32).

10. 1. An alignment device for aligning a carrier block (4), the carrier block (4) holding one or more substrate holders (5) spaced apart from one another, each substrate holder (5) configured to horizontally hold a respective flat substrate (101), comprising: The alignment device (3) comprises an integrally formed joining element (31) having a first leg (313) and a second leg (314) spaced apart from each other while forming a gap (34), and at least one setting element for setting the distance between the first and second legs (313, 314).

11. 11. The alignment device according to claim 10, characterized in that the alignment device comprises a first setting element and a second setting element, the first setting element being a pull screw (32) and the second setting element being a set screw (33).

12. 12. The alignment device according to claim 11, characterized in that the pull screw (32) and the press screw (33) are arranged adjacent to each other.

13. 12. Alignment device according to claim 11, characterised in that the pull screw (32) and the set screw (33) have parallel or at least approximately parallel axes of rotation.

14. 13. Alignment device according to claim 12, characterised in that the pull screw (32) and the set screw (33) have parallel or at least approximately parallel axes of rotation.

15. 15. The alignment device according to claim 10, wherein the coupling element (31) comprises a first segment (311) to which the carrier block (4) is fixed and a second segment (312) fixed to the robot arm (2), a gap (34) being formed in the second segment (312) such that the second leg (314) is located above the first leg (313).

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