Improved process and hardware architecture for detecting and correcting production boards in real time

JP7630614B2Active Publication Date: 2025-02-17APPLIED MATERIALS INC
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Patent Information

Application Number
JP2023523626
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2020-10-20
Filing Date
2021-09-29
Publication Date
2025-02-17
Estimated Expiration
2041-09-29

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Abstract

Embodiments disclosed herein include a processing tool for semiconductor processing. In one embodiment, the processing tool comprises a chamber and a plurality of witness sensors integrated with the chamber. In one embodiment, the processing tool further comprises a drift detection module. In one embodiment, data from the plurality of witness sensors is provided as input data to the drift detection module. In one embodiment, the processing tool further comprises a dashboard for displaying output data from the drift detection module.
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Citation Information

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