Waste Heat Recovery System

Abstract

To provide a waste heat recovery system that enhances the energy saving effect by recovering waste heat from chiller cooling water and simultaneously links and connects the hot water system for air conditioning and the chiller cooling water system. The hot water system for air conditioning (20) is provided with a hot water supply side temperature sensor (31) that also serves as a temperature setting unit, The equipment cooling water system 23 uses waste heat of the equipment cooling water in the equipment cooling water system 23 to raise the temperature of hot water in the air conditioning hot water system 20 via the first heat exchanger 21, The chiller cooling water system 25 reheats the hot water in the air conditioning hot water system 20 via the second heat exchanger 24, The temperature setting section of the hot water supply side temperature sensor 31 is configured to set the temperature of the hot water in the air conditioning hot water system 20 via the first heat exchanger 21 and the second heat exchanger 24, and to set the temperature of the chiller cooling water in the chiller cooling water system 25.

Description

[Technical field]

[0001] The present invention relates to a waste heat recovery system. [Background technology]

[0002] Industrial clean rooms need to be kept at a positive pressure inside to prevent the intrusion of dust, and also need to supply air from outside to match the amount of exhaust air produced by each piece of equipment in the production process. As such, outside air is taken in from an outdoor air conditioning unit 1 and supplied into the clean room, as shown in Figure 14.

[0003] The outdoor air conditioning unit 1 is equipped with, from the upstream side, a preheating coil 2, a humidifier 3, a reheating coil 4, a blower (not shown), a HEPA filter (not shown), etc., and heats and humidifies the outside air before supplying it to the clean room.

[0004] The preheat coil 2 and reheat coil 4 of the outdoor air-conditioning unit 1 are connected to an air-conditioning hot water system 5, which is a circulation line 7 equipped with a hot water pump 6 for circulating hot water. The circulation line 7 is equipped with a chiller cooling water system 9 arranged via a heat exchanger 8, and recovers waste heat from a chiller 10.

[0005] The chiller cooling water system 9 includes a chiller side circulation line 11 that circulates the cooling water to the chiller 10 via the heat exchanger 8, and a bypass line 12 that is connected to the chiller side circulation line 11 so as not to pass through the heat exchanger 8. The chiller side circulation line 11 includes a cooling tower 13 and a pump 14 on the cooling water supply side to the chiller 10, and also includes a return side line 15 that returns the cooling water from the chiller 10 to the cooling tower 13 instead of the heat exchanger 8.

[0006] The chiller-side circulation line 11 is provided with a supply-side two-way valve 16 on the outlet side of the heat exchanger 8, and the bypass line 12 is provided with a bypass-side two-way valve 17, so that the flow rates of the chiller-side circulation line 11 and the bypass line 12 are controlled according to the temperature of the air-conditioning hot water system 5. In addition, the return line 15 is provided with a return-side two-way valve (flow rate adjustment valve) 18.

[0007] As a result, the air conditioning hot water system 5 recovers waste heat from the chiller cooling water, and at the same time heats the return hot water from the preheating coil 2 and the reheating coil 4 and supplies it again to the preheating coil 2 and the reheating coil 4.

[0008] Prior art documents related to this type of outdoor air-conditioning unit and clean room include Patent Document 1 below, and prior art documents related to heat exchangers include Patent Document 2 below. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] JP 2005-61647 A [Patent Document 2] JP 2009-281642 A Summary of the Invention [Problem to be solved by the invention]

[0010] However, when extracting the hot water temperature required for air conditioning the clean room in the air conditioning hot water system 5, the temperature of the chiller cooling water needs to be fixed at a high set temperature. On the other hand, if the temperature of the chiller cooling water in the chiller cooling water system 9 is high, the chiller 10 cannot be operated in its high efficiency range, which creates a problem in that the energy saving effect of recovering waste heat from the chiller cooling water cannot be utilized.

[0011] In addition, since the air conditioning hot water system 5 and the chiller cooling water system 9 operate independently of each other, it is difficult to link and connect the air conditioning hot water system 5 and the chiller cooling water system 9.

[0012] In view of the above circumstances, the present invention aims to provide a waste heat recovery system which enhances the energy saving effect by recovering waste heat from chiller cooling water and at the same time links and connects the hot water system for air conditioning and the chiller cooling water system. [Means for solving the problem]

[0013] The present invention includes an air conditioning hot water system that supplies hot water to an air conditioner that heats outdoor air, an equipment cooling water system for a production device that is disposed on a return side of the hot water of the air conditioning hot water system via a first heat exchanger, and a refrigerator cooling water system that is disposed on a supply side of the hot water of the air conditioning hot water system via a second heat exchanger, the air conditioning hot water system includes a hot water circulation line that circulates hot water to the air conditioner, and a hot water supply side temperature sensor that is disposed on the hot water circulation line so as to be located between the second heat exchanger and the air conditioner and also serves as a temperature setting unit; The equipment cooling water system includes an equipment circulation line that circulates equipment cooling water to the production equipment via a first heat exchanger, a first bypass line that is connected to the equipment circulation line so as not to pass through the first heat exchanger, and a cooling water supply side temperature sensor that is arranged on the supply side of the equipment circulation line, and controls the flow rate of the equipment cooling water in the equipment circulation line and the first bypass line according to the temperature detected by the cooling water supply side temperature sensor to adjust the temperature of the equipment cooling water to be returned to the production equipment, and uses waste heat of the equipment cooling water in the equipment cooling water system to raise the temperature of hot water in the air conditioning hot water system via the first heat exchanger, the chiller cooling water system includes a chiller circulation line that circulates chiller cooling water to the chiller via a second heat exchanger, and a second bypass line that is connected to the chiller circulation line so as not to pass through the second heat exchanger, and controls the flow rates of the chiller cooling water in the chiller circulation line and the second bypass line in accordance with a temperature detected by a hot water supply side temperature sensor, and reheats the hot water in the air conditioning hot water system via the second heat exchanger; The temperature setting unit of the hot water supply side temperature sensor is configured to set the temperature of hot water in the air conditioning hot water system via the first heat exchanger and the second heat exchanger, and to set the temperature of chiller cooling water in the chiller cooling water system. The present invention relates to a waste heat recovery system.

[0014] In the waste heat recovery system of the present invention, the air conditioning hot water system includes a hot water return side temperature sensor that is disposed in the hot water circulation line so as to be located between the air conditioner and the first heat exchanger, The equipment cooling water system may be configured to flow the entire amount of equipment cooling water through the first bypass line depending on the temperature detected by the hot water return side temperature sensor, thereby preventing the equipment cooling water from rising in temperature due to heat exchange with the hot water in the air conditioning hot water system.

[0015] In the waste heat recovery system of the present invention, the chiller cooling water system includes a chiller outlet side temperature sensor that is disposed in the chiller circulation line so as to be located between the chiller and the second heat exchanger, the temperature setting unit of the hot water supply side temperature sensor sets the chiller outlet temperature of the chiller outlet side temperature sensor in conjunction with the temperature setting of the hot water of the air conditioning hot water system; The chiller cooling water system may be configured to flow the entire amount of chiller cooling water through the second bypass line in response to the temperature detected by the chiller outlet side temperature sensor, thereby dealing with a case in which the chiller cooling water cannot exchange heat with the air-conditioning hot water.

[0016] In the waste heat recovery system of the present invention, the chiller cooling water system includes a cooling tower located on the supply side of the chiller circulation line, a cooling tower bypass line arranged in the chiller circulation line so as not to pass through the cooling tower, and a chiller inlet side temperature sensor arranged in the chiller circulation line so as to be located between the chiller and the cooling tower, the temperature setting unit of the hot water supply side temperature sensor sets the chiller inlet temperature of the chiller inlet side temperature sensor in conjunction with a temperature setting of the hot water of the air-conditioning hot water system; The chiller cooling water system may be configured to control a cooling tower bypass line in response to a temperature detected by a chiller inlet side temperature sensor.

[0017] In the waste heat recovery system of the present invention, the chiller cooling water system includes a cooling tower located on the supply side of the chiller circulation line and equipped with a cooling fan, and a cooling tower outlet side temperature sensor arranged in the chiller circulation line so as to be located between the chiller and the cooling tower, the temperature setting unit of the hot water supply side temperature sensor sets the temperature of the cooling tower outlet side temperature sensor in conjunction with the temperature setting of the hot water of the air conditioning hot water system; The chiller cooling water system may be configured to control a cooling fan of the cooling tower in response to a detected temperature by a temperature sensor on an outlet side of the cooling tower.

[0018] The waste heat recovery system of the present invention includes a steam supply system that is disposed on a hot water supply side of an air-conditioning hot water system via a third heat exchanger so as to be located between the second heat exchanger and the hot water supply side temperature sensor, It is preferable that the steam supply system be operated during at least one of the following periods: a period from when the equipment cooling water system is completed until it becomes operational; a period from when the chiller cooling water system is completed until it becomes operational; in the event of a breakdown in the production equipment or the equipment cooling water system; and in the event of a breakdown in the chiller cooling water system.

[0019] In the waste heat recovery system of the present invention, the air conditioner is configured to heat and humidify outside air, and the heated and humidified outside air is supplied to a clean room, The production equipment for the equipment cooling water system is preferably installed in the clean room. Effect of the Invention

[0020] The waste heat recovery system of the present invention can achieve the excellent effect of increasing the energy saving effect by recovering waste heat from chiller cooling water, and at the same time linking and connecting the hot water system for air conditioning and the chiller cooling water system. Furthermore, the waste heat recovery system of the present invention can be applied even during the period until the equipment cooling water system and the chiller cooling water system are ready for full-scale operation. [Brief description of the drawings]

[0021] [Figure 1] 1 is a schematic diagram showing an example of a waste heat recovery system according to an embodiment of the present invention. [Diagram 2] 1 is a conceptual diagram showing how a first main two-way valve and a first bypass two-way valve are controlled based on the temperature of the device cooling water detected by a cooling water supply-side temperature sensor in an example of the form of a waste heat recovery system according to an embodiment of the present invention. FIG. [Diagram 3]4 is a conceptual diagram showing how the first main two-way valve and the first bypass two-way valve are controlled based on the hot water temperature of the hot water return side temperature sensor in an example of the form of the waste heat recovery system according to an embodiment of the present invention. FIG. [Figure 4] 5 is a conceptual diagram showing control of the second main two-way valve and the second bypass two-way valve based on the set temperature of the hot water supply side temperature sensor in an example of the form of the waste heat recovery system according to an embodiment of the present invention. FIG. [Diagram 5] 1 is a conceptual diagram showing how the second main two-way valve and the second bypass two-way valve are controlled based on the temperature of the chiller cooling water detected by a chiller outlet temperature sensor in an example of the form of the waste heat recovery system according to an embodiment of the present invention. FIG. [Figure 6] FIG. 2 is a conceptual diagram showing control of a cooling tower bypass two-way valve based on a set temperature of a chiller inlet side temperature sensor in an example of a form of a waste heat recovery system according to an embodiment of the present invention. [Figure 7] FIG. 10 is a conceptual diagram showing how a cooling fan is controlled based on the temperature of cooling water detected by a temperature sensor at the outlet side of a cooling tower in an example of the form of a waste heat recovery system according to an embodiment of the present invention. [Figure 8] 11 is a graph showing an example of proportional control of the opening degree of the first main two-way valve and the opening degree of the first bypass two-way valve depending on the temperature of the equipment cooling water in an example of the form of the waste heat recovery system according to an embodiment of the present invention. [Figure 9] 5 is a graph showing an example of ON-OFF control of the first main two-way valve and the first bypass two-way valve depending on the temperature of hot water in an example of the form of the waste heat recovery system according to an embodiment of the present invention. [Figure 10] 11 is a graph showing an example of proportional control of the opening of the second main two-way valve and the opening of the second bypass two-way valve based on the set temperature (control output) of hot water in an example of the form of the waste heat recovery system according to an embodiment of the present invention. [Figure 11] 5 is a graph showing an example of ON-OFF control of the second main two-way valve and the second bypass two-way valve depending on the temperature of the chiller cooling water in an example of the form of the waste heat recovery system according to an embodiment of the present invention. [Figure 12] 4 is a graph showing an example of proportional control of the opening degree of a cooling tower bypass two-way valve depending on the temperature of cooling water in an example of the form of the waste heat recovery system according to an embodiment of the present invention. [Figure 13] 4 is a graph showing an example of ON-OFF control of a cooling fan depending on a temperature of cooling water in an example of a waste heat recovery system according to an embodiment of the present invention. [Figure 14] FIG. 1 is a schematic diagram showing an example of a conventional waste heat recovery system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0023] FIG. 1 shows an example of a waste heat recovery system according to the present invention, and in the figure, the same reference numerals as those in FIG. 14 are used.

[0024] In this embodiment, the system includes an air conditioning hot water system 20 that supplies hot water to the outdoor air conditioning unit 1 (air conditioner that heats outdoor air) of the clean room C, an equipment cooling water system 23 for the production equipment 22 that is arranged on the hot water return side of the air conditioning hot water system 20 via a first heat exchanger 21, a refrigerator cooling water system 25 that is arranged on the hot water supply side of the air conditioning hot water system 20 via a second heat exchanger 24, and a steam supply system 27 that is arranged on the hot water supply side of the air conditioning hot water system 20 via a third heat exchanger 26 so as to be located between the second heat exchanger 24 and the outdoor air conditioning unit 1.

[0025] The clean room C to which the outdoor air-conditioning unit 1 supplies air has a spatial passageway disposed above the target space, and a fan filter unit 28 is provided on the underside of the spatial passageway so that clean air is discharged downward. Also, a humidifier 29 with a motor damper is provided on the side of the spatial passageway.

[0026] (1) Configuration of hot water system 20 for air conditioning The hot water system 20 for air conditioning includes a hot water circulation line 30 that is connected to the preheat coil 2 and reheat coil 4 of the outdoor air conditioning unit 1 (air conditioner) to circulate hot water. The hot water circulation line 30 includes a hot water pump 6 between the third heat exchanger 26 and the outdoor air conditioning unit 1. The hot water circulation line 30 also includes a hot water supply side temperature sensor 31 between the third heat exchanger 26 and the outdoor air conditioning unit 1, and a hot water return side temperature sensor 32 between the outdoor air conditioning unit 1 and the first heat exchanger 21. Here, the hot water supply side temperature sensor 31 is configured to also function as a temperature setting unit that sets the temperature of the hot water. The temperature setting unit of the hot water supply side temperature sensor 31 can arbitrarily set the temperature of the hot water between 19.5°C and 37°C, allowing the temperature and humidity of the outside air from the outdoor air conditioning unit 1 to the clean room C to be adjusted.

[0027] (2) Configuration of equipment cooling water system 23 The equipment cooling water system 23 includes an equipment circulation line 33 that circulates the equipment cooling water to the production equipment 22 via the first heat exchanger 21, and a first bypass line 34 that is connected to the equipment circulation line 33 so as not to pass through the first heat exchanger 21.

[0028] The production equipment 22 is installed inside the clean room C to which the outdoor air-conditioning unit 1 supplies air, and manufactures semiconductor memories and the like. The production equipment 22 discharges equipment cooling water to the equipment circulation line 33, and then supplies the equipment cooling water to the production equipment 22 via the first heat exchanger 21 through the equipment circulation line 33. The equipment cooling water has a high flow rate, but the temperature field that can be recovered by the first heat exchanger 21 (the return water temperature of the equipment cooling water is 22.5°C, and the supply water temperature is 20.0°C) is low, making it unnecessary to use a configuration that dissipates heat outdoors, such as a cooling tower. The values ​​of the temperature field that can be recovered by the first heat exchanger 21 here are just an example, and are not limited to specific values. The first heat exchanger 21 is not particularly limited in configuration as long as it can recover waste heat between the equipment cooling water system 23 and the air-conditioning hot water system 20.

[0029] In the equipment circulation line 33, a first main pipe two-way valve 35 is disposed between the outlet side of the first heat exchanger 21 and the branching position of the first bypass line 34, and a cooling water supply side temperature sensor 36 is disposed between the branching position of the first bypass line 34 and the production equipment 22. In addition, a first bypass two-way valve 37 is disposed in the first bypass line 34. Here, the first main pipe two-way valve 35 and the first bypass two-way valve 37 are connected to an equipment cooling water first control unit 38 as shown in FIG. 2, and their opening degrees are controlled by the temperature of the cooling water supply side temperature sensor 36. In addition, the first main pipe two-way valve 35 and the first bypass two-way valve 37 are connected to an equipment cooling water second control unit 39 as shown in FIG. 3, and the flow path of the equipment circulation line 33 and the first bypass line 34 is switched depending on the set temperature of the hot water return side temperature sensor 32.

[0030] The equipment circulation line 33 is also provided with an adjustment heat exchanger 40 located between the position of the cooling water supply side temperature sensor 36 and the production equipment 22, and an adjustment temperature sensor 41 for the equipment cooling water located between the position of the adjustment heat exchanger 40 and the production equipment 22. The adjustment heat exchanger 40 and the adjustment temperature sensor 41 are capable of adjusting the temperature of the equipment cooling water for the production equipment 22. The adjustment heat exchanger 40 is also capable of exchanging heat with the cooling water from the refrigerator 10. The equipment circulation line 33 is further provided with a tank 42 and a water pump 43 located on the discharge side of the production equipment 22, and is configured to circulate the equipment cooling water from the production equipment 22.

[0031] (3) Configuration of the chiller cooling water system 25 The chiller cooling water system 25 includes a chiller circulation line 44 that circulates the chiller cooling water to the chiller 10 via the second heat exchanger 24, and a second bypass line 45 that is connected to the chiller circulation line 44 so as not to pass through the second heat exchanger 24.

[0032] The chiller 10 is a turbo chiller of medium temperature specification. The chiller 10 discharges chiller cooling water to the chiller circulation line 44, and then the chiller cooling water is supplied to the chiller 10 through the chiller circulation line 44 via the second heat exchanger 24. The chiller cooling water has a high temperature field (the chiller cooling water supply temperature is 37.0°C and the return temperature is 32.0°C) that can be recovered by the second heat exchanger 24. The values ​​of the temperature field that can be recovered by the second heat exchanger 24 are only an example, and are not limited to specific values. The second heat exchanger 24 is not particularly limited in configuration as long as it can recover waste heat between the chiller cooling water system 25 and the air conditioning hot water system 20. The chiller 10 is not necessarily related to the clean room C, and can be applied to various uses.

[0033] The second main two-way valve 46 is disposed in the chiller circulation line 44 between the outlet side of the second heat exchanger 24 and the branching position of the second bypass line 45, and a chiller outlet side temperature sensor 47 is disposed between the outlet side of the chiller 10 and the second heat exchanger 24. The second bypass two-way valve 48 is disposed in the second bypass line 45. The second main two-way valve 46 and the second bypass two-way valve 48 are connected to the chiller side first control unit 49 as shown in FIG. 4, and the opening degree of each is controlled by the set temperature of the hot water supply side temperature sensor 31. The second main two-way valve 46 and the second bypass two-way valve 48 are connected to the chiller side second control unit 50 as shown in FIG. 5, and the flow path of the chiller circulation line 44 and the second bypass line 45 is switched according to the temperature of the chiller outlet side temperature sensor 47. The chiller outlet side temperature sensor 47 is linked to the temperature setting of the temperature setting unit of the hot water supply side temperature sensor 31.

[0034] The chiller circulation line 44 is provided with the cooling tower 13 and the pump 14 between the outlet side of the second heat exchanger 24 and the inlet side of the chiller 10, and is also provided with a cooling tower bypass line 51 that is arranged so as not to pass through the cooling tower 13. The chiller circulation line 44 is provided with a chiller inlet side temperature sensor 52 between the outlet side of the cooling tower 13 and the inlet side of the chiller 10, and the cooling tower bypass line 51 is provided with a cooling tower bypass two-way valve 53. The cooling tower bypass two-way valve 53 is connected to the chiller side third control unit 54 as shown in FIG. 6, and is adapted to switch the flow path between the chiller circulation line 44 and the cooling tower bypass line 51 depending on the set temperature of the chiller inlet side temperature sensor 52. The chiller inlet side temperature sensor 52 is also adapted to be linked to the temperature setting of the temperature setting unit of the hot water supply side temperature sensor 31 via the set temperature of the chiller outlet side temperature sensor 47.

[0035] The chiller circulation line 44 is provided with a cooling tower outlet temperature sensor 55 between the outlet side of the cooling tower 13 and the inlet side of the chiller 10 so as to be located near the outlet of the cooling tower 13. As shown in Fig. 7, the cooling tower 13 is provided with a cooling fan 13a, which is connected to a chiller side fourth control unit 56 and whose rotation speed is controlled by the detected temperature of the cooling tower outlet temperature sensor 55. The cooling tower outlet temperature sensor 55 is linked to the temperature setting of the temperature setting unit of the hot water supply side temperature sensor 31 via the set temperature of the chiller outlet temperature sensor 47.

[0036] Furthermore, the chiller circulation line 44 is provided with a return side line 57 that returns the chiller cooling water from the chiller 10 to the cooling tower 13 instead of the second heat exchanger 24, and is also provided with a return side two-way valve (flow rate control valve) 58 that opens and closes the return side line 57, so that the flow rate of the chiller cooling water required for the second heat exchanger 24 can be secured by adjusting the return side two-way valve 58.

[0037] (4) Configuration of steam supply system 27 The steam supply system 27 is provided with a steam drain discharge line 59 that supplies steam to the third heat exchanger 26 and discharges drain resulting from condensation of the steam after heat exchange to the outside of the heat exchanger. The steam drain discharge line 59 is provided with a steam generator (not shown), a steam two-way valve 60 on the inlet side of the third heat exchanger 26, and a steam temperature sensor 61 on the outlet side of the third heat exchanger 26. The steam two-way valve 60 is adapted to control the flow rate based on the temperature detected by the steam temperature sensor 61. Here, the steam supply system 27 is adapted to operate in any of the following cases: a period from when the equipment cooling water system 23 is completed until it starts operating, a period from when the chiller cooling water system 25 is completed until it starts operating, when the production equipment 22 or the equipment cooling water system 23 breaks down, or when the chiller cooling water system 25 breaks down.

[0038] The operation of the embodiment of the present invention will be described.

[0039] Outdoor air conditioner 1 (air conditioner that warms outdoor air) heats the outdoor air with preheat coil 2 and reheat coil 4, and also humidifies it with humidifier 3. At this time, outdoor air conditioner 1 lowers the temperature of the hot water to a temperature that can maintain the room temperature by using the heat generated inside clean room C. Also, since the amount of humidification of the outdoor air is reduced by lowering the temperature of outdoor air conditioner 1, the humidifier 29 with a motor damper inside clean room C supplements the insufficient humidification.

[0040] (1) In the air conditioning hot water system 20, the hot water returned from the outdoor air-conditioning unit 1 to the hot water circulation line 30 is heated in the first heat exchanger 21, and then reheated in the second heat exchanger 24 before being supplied to the outdoor air-conditioning unit 1. As a specific example, the hot water returned from the outdoor air-conditioning unit 1 to the hot water circulation line 30 is heated from 14.5°C to 16.8°C by the first heat exchanger 21, and then reheated from 28.0°C to 35.0°C by the second heat exchanger 24.

[0041] Furthermore, the hot water returned to the hot water circulation line 30 from the preheat coil 2 and reheat coil 4 of the outdoor air-conditioning unit 1 is heated in the third heat exchanger 26 to replenish the insufficient waste heat during the period from when the equipment cooling water system 23 is completed until it starts operating, when the chiller cooling water system 25 is completed until it starts operating, when the production equipment 22 or the equipment cooling water system 23 breaks down, or when the chiller cooling water system 25 breaks down. Here, after all the production equipment 22 are installed as planned in the factory plan, the air conditioning load fluctuation in the clean room C becomes small and the setting is not changed frequently, so that it becomes easy to manually set the hot water temperature using the temperature setting unit of the hot water supply side temperature sensor 31 while watching the indoor load.

[0042] (2) In the equipment cooling water system 23, the equipment cooling water discharged from the production equipment 22 to the equipment circulation line 33 passes through the first heat exchanger 21, and waste heat is recovered. As a specific example, the equipment cooling water discharged from the production equipment 22 is cooled from 22.5°C to 20.0°C by the first heat exchanger 21.

[0043] The first equipment cooling water control section 38 (see FIG. 2) proportionally controls the aperture of the first main two-way valve 35 and the aperture of the first bypass two-way valve 37 according to the temperature of the equipment cooling water detected by the cooling water supply side temperature sensor 36 (see FIG. 8), and adjusts the flow rate of the equipment cooling water in the equipment circulation line 33 and the first bypass line 34. More specifically, when the temperature of the equipment cooling water is high, the aperture of the first main two-way valve 35 is controlled in the opening direction and the aperture of the first bypass two-way valve 37 is controlled in the closing direction, and when the temperature of the equipment cooling water is low, the aperture of the first main two-way valve 35 is controlled in the closing direction and the aperture of the first bypass two-way valve 37 is controlled in the opening direction. Here, FIG. 8 shows an example in which the temperature of the equipment cooling water is 20° C. In addition, when the temperature of the equipment cooling water becomes 20°C, it becomes unnecessary to cool the equipment cooling water using the adjustment heat exchanger 40 and the adjustment temperature sensor 41 in the equipment circulation line 33, eliminating the heat exchange of the refrigerator cooling water by the adjustment heat exchanger 40 and reducing the load on the refrigerator 10.

[0044] When the temperature of hot water detected by the hot water return side temperature sensor 32 of the air-conditioning hot water system 20 exceeds a set temperature, the second device cooling water control unit 39 (see FIG. 3) performs ON-OFF control to close the first main two-way valve 35 and open the first bypass two-way valve 37 (see FIG. 9), thereby switching the flow of device cooling water from the device circulation line 33 to the first bypass line 34. More specifically, the hot water return side temperature sensor 32 sets the set temperature to 21.5° C., and when the temperature of the hot water in the hot water circulation line 30 exceeds 21.5° C., the device cooling water rises in temperature through the first heat exchanger 21, resulting in increased energy, so the entire amount of device cooling water is passed through the first bypass line 34 to prevent the temperature of the device cooling water from rising. On the other hand, when the temperature of the hot water detected by the hot water return side temperature sensor 32 of the air conditioning hot water system 20 becomes lower than the set temperature by a certain temperature, ON-OFF control is performed to open the first main two-way valve 35 and close the first bypass two-way valve 37 (see Figure 9), switching the flow of the device cooling water from the first bypass line 34 to the device circulation line 33.

[0045] (3) In the chiller cooling water system 25, the chiller cooling water discharged from the chiller 10 to the chiller circulation line 44 passes through the second heat exchanger 24, and waste heat is recovered. As a specific example, the chiller cooling water supplied from the chiller 10 is changed in temperature from 37.0°C to 32.0°C by the second heat exchanger 24.

[0046] The chiller-side first control section 49 (see FIG. 4) proportionally controls the aperture of the second main two-way valve 46 and the aperture of the second bypass two-way valve 48 according to the set temperature of the hot water supply-side temperature sensor 31 of the air-conditioning hot water system 20 (see FIG. 10), and adjusts the flow rate of the chiller cooling water through the chiller circulation line 44 and the second bypass line 45. More specifically, when the set temperature (control output) is high, the aperture of the second main two-way valve 46 is controlled in the opening direction and the aperture of the second bypass two-way valve 48 is controlled in the closing direction, and when the set temperature (control output) is low, the aperture of the second main two-way valve 46 is controlled in the closing direction and the aperture of the second bypass two-way valve 48 is controlled in the opening direction.

[0047] The chiller-side second control unit 50 (see FIG. 5) determines the set temperature of the chiller outlet-side temperature sensor 47 in conjunction with the set temperature of the hot water supply-side temperature sensor 31 of the air-conditioning hot water system 20. As a specific example, the set temperature of the chiller outlet-side temperature sensor 47 is set to a set temperature that is +2°C higher than the set temperature of the hot water supply-side temperature sensor 31, with a lower limit of 25°C. When the temperature of the chiller cooling water detected by the chiller outlet-side temperature sensor 47 becomes lower than the set temperature by a certain temperature (for example, the set temperature -2°C), the chiller-side second control unit 50 (see FIG. 5) performs ON-OFF control to close the second main two-way valve 46 and open the second bypass two-way valve 48 (see FIG. 11), thereby switching the flow of the chiller cooling water from the chiller circulation line 44 to the second bypass line 45. This is because the second heat exchanger 24 cannot recover waste heat when the temperature of the chiller cooling water in the chiller circulation line 44 becomes lower than the set temperature of the chiller outlet-side temperature sensor 47 by a certain temperature. On the other hand, when the temperature of the chiller cooling water detected by the chiller outlet side temperature sensor 47 exceeds a certain temperature higher than the set temperature, ON-OFF control is performed to open the second main two-way valve 46 and close the second bypass two-way valve 48 (see FIG. 11), switching the flow of the chiller cooling water from the second bypass line 45 to the chiller circulation line 44.

[0048] The chiller-side third control unit 54 (see FIG. 6) determines the set temperature of the chiller-inlet-side temperature sensor 52 in response to the set temperature of the chiller-outlet-side temperature sensor 47 so as to be linked to the set temperature of the hot water supply-side temperature sensor 31 of the air-conditioning hot water system 20. As a specific example, the set temperature of the chiller-inlet-side temperature sensor 52 is set to a set temperature of -5°C as the set temperature of the chiller-outlet-side temperature sensor 47, with a lower limit of 20°C. The chiller-side third control unit 54 also performs proportional control using the set temperature of the chiller-inlet-side temperature of the cooling water in the cooling tower 13 as a reference, so as to close the cooling tower bypass two-way valve 53 when the temperature detected by the chiller-inlet-side temperature sensor 52 is high, and open the cooling tower bypass two-way valve 53 when the temperature is low (see FIG. 12).

[0049] The chiller-side fourth control unit 56 (see FIG. 7) determines the set temperature of the cooling tower outlet-side temperature sensor 55 in response to the set temperature of the chiller outlet-side temperature sensor 47 so as to be linked to the set temperature of the hot water supply-side temperature sensor 31 of the air-conditioning hot water system 20. As a specific example, the set temperature of the cooling tower outlet-side temperature sensor 55 is set to a set temperature of -5°C as the set temperature of the chiller outlet-side temperature sensor 47, with a lower limit of 20°C. The chiller-side fourth control unit 56 also performs ON-OFF control using the set temperature of the cooling tower outlet-side temperature of the cooling water of the cooling tower 13 as a reference, turning on the cooling fan 13a of the cooling tower 13 when the temperature detected by the cooling tower outlet-side temperature sensor 55 is high, and turning off the cooling fan 13a when the temperature is low (see FIG. 13).

[0050] (4) In the steam supply system 27, the steam circulating through the steam drain discharge line 59 is used during the period from when the equipment cooling water system 23 is completed until it starts operation, during the period from when the chiller cooling water system 25 is completed until it starts operation, in the event of a breakdown in the production equipment 22 or the equipment cooling water system 23, or in the event of a breakdown in the chiller cooling water system 25. When the production equipment 22, the equipment cooling water system 23, and the chiller cooling water system 25 are operating properly, the steam in the steam drain discharge line 59 does not circulate through the third heat exchanger 26.

[0051] As described above, an example of the waste heat recovery system includes an air conditioning hot water system 20 that supplies hot water to the outdoor air conditioning unit 1 (air conditioner) that heats outdoor air, an equipment cooling water system 23 for a production equipment 22 that is disposed on the hot water return side of the air conditioning hot water system 20 via a first heat exchanger 21, and a refrigerator cooling water system 25 that is disposed on the hot water supply side of the air conditioning hot water system 20 via a second heat exchanger 24. The air conditioning hot water system 20 includes a hot water circulation line 30 that circulates hot water to the air conditioner, and a second heat exchanger 24. and a hot water supply side temperature sensor 31 that is disposed in the hot water circulation line 30 so as to be positioned between the air conditioners and that also serves as a temperature setting unit. The equipment cooling water system 23 includes an equipment circulation line 33 that circulates equipment cooling water to the production equipment 22 via the first heat exchanger 21, a first bypass line 34 that is connected to the equipment circulation line 33 so as not to pass through the first heat exchanger 21, and a cooling water supply side temperature sensor 36 that is disposed on the supply side of the equipment circulation line 33. The flow rate of the equipment cooling water in the equipment circulation line 33 and the first bypass line 34 is controlled according to the temperature, and the temperature of the equipment cooling water returned to the production equipment 22 is adjusted, and the waste heat of the equipment cooling water in the equipment cooling water system 23 is used to raise the temperature of the hot water in the air-conditioning hot water system 20 via the first heat exchanger 21. The chiller cooling water system 25 includes a chiller circulation line 44 that circulates the chiller cooling water to the chiller via the second heat exchanger 24, and a second bypass line 45 that is connected to the chiller circulation line 44 so as not to pass through the second heat exchanger 24. The flow rate of the chiller cooling water in the chiller circulation line 44 and the second bypass line 45 is controlled according to the temperature detected by the hot water supply side temperature sensor 31, and the hot water in the air-conditioning hot water system 20 is reheated via the second heat exchanger 24. The temperature setting unit of the hot water supply side temperature sensor 31 is configured to set the temperature of the hot water in the air-conditioning hot water system 20 via the first heat exchanger 21 and the second heat exchanger 24, and to set the temperature of the chiller cooling water in the chiller cooling water system 25. In this manner, the waste heat of the equipment cooling water in the equipment cooling water system 23 is used to raise the temperature of the hot water in the air conditioning hot water system 20, and further the waste heat of the chiller cooling water in the chiller cooling water system 25 is used to reheat the hot water in the air conditioning hot water system 20 to adjust it, so that the hot water in the air conditioning hot water system 20 can be easily and appropriately heated while at the same time increasing the energy saving effect by recovering the waste heat from the chiller cooling water.Conventionally, the method of operating the refrigerator cooling water by fixing the temperature of the hot water from the air conditioning hot water system 20 required for the air conditioning of the outdoor air-conditioning unit 1 was adopted, but if the temperature of the refrigerator cooling water can be lowered in the refrigerator cooling water system 25, that is, if the heat generation load from the production equipment in the clean room C where the air conditioning of the outdoor air-conditioning unit 1 does not need to be heated becomes large or if the outdoor air temperature becomes higher than planned, it becomes possible to operate the refrigerator 10 in a high efficiency range, and further enhance the effect of energy saving. In addition, when the temperature of the hot water is set using the temperature setting unit of the hot water supply side temperature sensor 31, the temperature of the cooling water in the refrigerator cooling water system 25 is set in conjunction with it, so that the air conditioning hot water system 20 and the refrigerator cooling water system 25 can be linked and connected together. Furthermore, the air conditioning hot water system 20 is arranged in series with the equipment cooling water system 23 and the chiller cooling water system 25, and the waste heat of each is recovered in the first heat exchanger 21 and the second heat exchanger 24, so that the air conditioning hot water system 20, the equipment cooling water system 23 and the chiller cooling water system 25 can be linked and connected together.

[0052] In addition, in the embodiment of the waste heat recovery system, the air conditioning hot water system 20 includes a hot water return side temperature sensor 32 disposed in the hot water circulation line 30 so as to be located between the outdoor air conditioning unit 1 (air conditioner) and the first heat exchanger 21, and the equipment cooling water system 23 is configured to flow the entire amount of equipment cooling water into the first bypass line 34 according to the temperature detected by the hot water return side temperature sensor 32, thereby preventing the temperature of the equipment cooling water from rising due to heat exchange with the hot water of the air conditioning hot water system 20. In this way, it is possible to prevent the equipment cooling water system 23 from increasing energy, to suitably recover waste heat in the first heat exchanger 21, and to suitably link and connect the air conditioning hot water system 20 and the equipment cooling water system 23.

[0053] In the waste heat recovery system, the chiller cooling water system 25 includes a chiller outlet temperature sensor 47 disposed in the chiller circulation line 44 so as to be located between the chiller 10 and the second heat exchanger 24, the temperature setting unit of the hot water supply temperature sensor 31 sets the chiller outlet temperature of the chiller outlet temperature sensor 47 in conjunction with the hot water temperature setting of the air conditioning hot water system 20, and the chiller cooling water system 25 is configured to flow the entire amount of chiller cooling water into the second bypass line 45 according to the temperature detected by the chiller outlet temperature sensor 47, and to handle cases where the chiller cooling water cannot exchange heat with the air conditioning hot water. In this way, the chiller cooling water system 25 is prevented from increasing energy, waste heat is suitably recovered by the second heat exchanger 24, and the air conditioning hot water system 20 and the chiller cooling water system 25 can be suitably linked and connected. Furthermore, when the hot water temperature is set using the temperature setting unit of the hot water supply side temperature sensor 31, the chiller outlet temperature of the chiller outlet side temperature sensor 47 is set in conjunction, thereby making it possible to further link and connect the air conditioning hot water system 20 and the chiller cooling water system 25.

[0054] In the waste heat recovery system, the chiller cooling water system 25 includes the cooling tower 13 located on the supply side of the chiller circulation line 44, the cooling tower bypass line 51 arranged in the chiller circulation line 44 so as not to pass through the cooling tower 13, and the chiller inlet side temperature sensor 52 arranged in the chiller circulation line 44 so as to be located between the chiller 10 and the cooling tower 13, and the temperature setting unit of the hot water supply side temperature sensor 31 sets the chiller inlet temperature of the chiller inlet side temperature sensor 52 in conjunction with the temperature setting of the hot water of the air conditioning hot water system 20, and the chiller cooling water system 25 is configured to control the cooling tower bypass line 51 according to the temperature detected by the chiller inlet side temperature sensor 52. In this way, the chiller cooling water of the chiller circulation line 44 is brought to an appropriate temperature and the hot water of the air conditioning hot water system 20 is reheated via the second heat exchanger 24, so that the hot water of the air conditioning hot water system 20 can be easily and appropriately heated while at the same time, the effect of energy saving by waste heat recovery from the chiller cooling water can be enhanced. Furthermore, when the hot water temperature is set using the temperature setting portion of the hot water supply side temperature sensor 31, the chiller inlet temperature of the chiller inlet side temperature sensor 52 is set in conjunction with the temperature setting of the chiller outlet side temperature sensor 47, thereby enabling the air conditioning hot water system 20 and the chiller cooling water system 25 to be further linked and interconnected.

[0055] In the waste heat recovery system, the chiller cooling water system 25 includes a cooling tower 13 located on the supply side of the chiller circulation line 44 and equipped with a cooling fan 13a, and a cooling tower outlet temperature sensor 55 arranged on the chiller circulation line 44 so as to be located between the chiller 10 and the cooling tower 13, and the temperature setting unit of the hot water supply temperature sensor 31 sets the temperature of the cooling tower outlet temperature sensor 55 in conjunction with the temperature setting of the hot water of the air conditioning hot water system 20, and the chiller cooling water system 25 is configured to control the cooling fan 13a of the cooling tower 13 according to the detected temperature of the cooling tower outlet temperature sensor 55. In this way, the chiller cooling water of the chiller circulation line 44 is brought to an appropriate temperature and the hot water of the air conditioning hot water system 20 is reheated via the second heat exchanger 24, so that the hot water of the air conditioning hot water system 20 can be easily and appropriately heated while at the same time, the effect of energy saving by waste heat recovery from the chiller cooling water can be enhanced. In addition, when the hot water temperature is set using the temperature setting unit of the hot water supply side temperature sensor 31, the temperature of the cooling tower outlet side temperature sensor 55 is set in conjunction with the temperature setting of the chiller outlet side temperature sensor 47, thereby making it possible to further link and connect the air conditioning hot water system 20 and the chiller cooling water system 25.

[0056] In addition, in the embodiment of the waste heat recovery system, a steam supply system 27 is provided on the hot water supply side of the air conditioning hot water system 20 via a third heat exchanger 26 so as to be located between the second heat exchanger 24 and the hot water supply side temperature sensor 31, and the steam supply system 27 is operated in at least one of the following situations: the period from when the equipment cooling water system 23 is completed until it starts operation, the period from when the chiller cooling water system 25 is completed until it starts operation, when the production equipment 22 or the equipment cooling water system 23 breaks down, and when the chiller cooling water system 25 breaks down. In this way, the hot water of the air conditioning hot water system 20 can be easily and appropriately heated according to various situations, and the degree of freedom of interlocking and connecting the air conditioning hot water system 20, the equipment cooling water system 23, and the chiller cooling water system 25 can be improved.

[0057] In addition, in the embodiment of the waste heat recovery system, the outdoor processing unit 1 (air conditioner) has a configuration for heating and humidifying outdoor air, and the destination of the heated and humidified outdoor air is the clean room C, and the production equipment 22 of the equipment cooling water system 23 may be installed in the clean room C. In this way, the air conditioning hot water system 20 and the equipment cooling water system 23 can be easily linked and connected. Here, the equipment that generates the waste heat is not limited to the production equipment 22 in the clean room, and may be an equipment outside the clean room.

[0058] Incidentally, the waste heat recovery system of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0059] 1 Outdoor conditioner (air conditioner) 10. Refrigeration Machine 13 Cooling Tower 13a Cooling fan 20 Air conditioning hot water system 21 First heat exchanger 22 Production Equipment 23 Equipment cooling water system 24 Second heat exchanger 25 Refrigerator cooling water system 26 Third heat exchanger 27 Steam supply system 30 Hot water circulation line 31 Hot water supply temperature sensor 32 Hot water return temperature sensor 33 Equipment circulation line 34 First Bypass Line 35 First main two-way valve 36 Cooling water supply temperature sensor 37 First bypass two-way valve 44 Refrigeration circulation line 45 Second Bypass Line 46 Second main two-way valve 47 Refrigerator outlet temperature sensor 48 Second bypass two-way valve 51 Cooling Tower Bypass Line 52 Refrigerator inlet temperature sensor 53 Cooling tower bypass two-way valve 55 Cooling tower outlet temperature sensor C. Clean Room

Claims

1. an air conditioning hot water system that supplies hot water to an air conditioner that heats outdoor air; an equipment cooling water system for a production device that is disposed on a return side of the hot water of the air conditioning hot water system via a first heat exchanger; and a refrigerator cooling water system that is disposed on a supply side of the hot water of the air conditioning hot water system via a second heat exchanger, the air conditioning hot water system includes a hot water circulation line that circulates hot water to the air conditioner, and a hot water supply side temperature sensor that is disposed on the hot water circulation line so as to be located between the second heat exchanger and the air conditioner and also serves as a temperature setting unit; The equipment cooling water system includes an equipment circulation line that circulates equipment cooling water to the production equipment via a first heat exchanger, a first bypass line that is connected to the equipment circulation line so as not to pass through the first heat exchanger, and a cooling water supply side temperature sensor that is arranged on the supply side of the equipment circulation line, and controls the flow rate of the equipment cooling water in the equipment circulation line and the first bypass line according to the temperature detected by the cooling water supply side temperature sensor to adjust the temperature of the equipment cooling water to be returned to the production equipment, and uses waste heat of the equipment cooling water in the equipment cooling water system to raise the temperature of hot water in the air conditioning hot water system via the first heat exchanger, the chiller cooling water system includes a chiller circulation line that circulates chiller cooling water to the chiller via a second heat exchanger, and a second bypass line that is connected to the chiller circulation line so as not to pass through the second heat exchanger, and controls the flow rates of the chiller cooling water in the chiller circulation line and the second bypass line in accordance with a temperature detected by a hot water supply side temperature sensor, and reheats the hot water in the air conditioning hot water system via the second heat exchanger; The temperature setting unit of the hot water supply side temperature sensor is configured to set the temperature of hot water in the air conditioning hot water system via the first heat exchanger and the second heat exchanger, and to set the temperature of chiller cooling water in the chiller cooling water system. A waste heat recovery system comprising:

2. the air conditioning hot water system includes a hot water return side temperature sensor that is disposed in the hot water circulation line so as to be located between the air conditioner and the first heat exchanger; The waste heat recovery system according to claim 1, characterized in that the equipment cooling water system is configured to flow the entire amount of equipment cooling water into the first bypass line depending on the temperature detected by the hot water return side temperature sensor, thereby preventing the equipment cooling water from rising in temperature due to heat exchange with the hot water of the air conditioning hot water system.

3. the chiller cooling water system includes a chiller outlet side temperature sensor that is disposed in a chiller circulation line so as to be located between the chiller and the second heat exchanger, the temperature setting unit of the hot water supply side temperature sensor sets the chiller outlet temperature of the chiller outlet side temperature sensor in conjunction with the temperature setting of the hot water of the air conditioning hot water system; 2. The waste heat recovery system according to claim 1, wherein the chiller cooling water system is configured to flow the entire amount of chiller cooling water into the second bypass line in response to a temperature detected by a chiller outlet side temperature sensor, thereby responding to a case where the chiller cooling water cannot exchange heat with the hot water for air conditioning.

4. the chiller cooling water system includes a cooling tower located on a supply side of a chiller circulation line, a cooling tower bypass line arranged in the chiller circulation line so as not to pass through the cooling tower, and a chiller inlet side temperature sensor arranged in the chiller circulation line so as to be located between the chiller and the cooling tower, the temperature setting unit of the hot water supply side temperature sensor sets the chiller inlet temperature of the chiller inlet side temperature sensor in conjunction with a temperature setting of the hot water of the air-conditioning hot water system; 2. The waste heat recovery system according to claim 1, wherein the chiller cooling water system is configured to control a cooling tower bypass line in response to a detected temperature by a chiller inlet temperature sensor.

5. the chiller cooling water system includes a cooling tower located on the supply side of the chiller circulation line and equipped with a cooling fan, and a cooling tower outlet side temperature sensor disposed in the chiller circulation line so as to be located between the chiller and the cooling tower; the temperature setting unit of the hot water supply side temperature sensor sets the temperature of the cooling tower outlet side temperature sensor in conjunction with the temperature setting of the hot water of the air conditioning hot water system; 2. The waste heat recovery system according to claim 1, wherein the chiller cooling water system is configured to control a cooling fan of the cooling tower in response to a detected temperature by a temperature sensor on an outlet side of the cooling tower.

6. a steam supply system that is disposed on the hot water supply side of the air conditioning hot water system via a third heat exchanger so as to be located between the second heat exchanger and the hot water supply side temperature sensor; 2. The waste heat recovery system according to claim 1, wherein the steam supply system is operated during at least one of the following periods: a period from when an equipment cooling water system is completed until it is put into operation; a period from when a chiller cooling water system is completed until it is put into operation; in the event of a breakdown in the production equipment or the equipment cooling water system; and in the event of a breakdown in the chiller cooling water system.

7. The air conditioner is configured to heat and humidify outside air, and the heated and humidified outside air is supplied to a clean room; 2. The waste heat recovery system according to claim 1, wherein the production equipment for the equipment cooling water system is installed in the clean room.

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