Light receiving element, distance measuring module

Abstract

This ranging module is provided with: a light receiving element provided with a plurality of transfer gates which distribute and transfer, to a plurality of floating diffusions, signal charge accumulated by a photodiode for photoelectrically converting incident light, wherein at least two of the plurality of transfer gates are disposed with point symmetry about the optical center, as seen from the direction of incidence of the light; a light emitting portion which radiates radiated light having a periodically varying brightness; and a light-emission control unit for controlling the radiation timing of the radiated light.

Description

[Technical field]

[0001] The technology according to the present disclosure (the present technology) relates to, for example, a light receiving element that forms a gate-type indirect ToF (Time of Flight) and a distance measuring module including the light receiving element. [Background technology]

[0002] An example of a light receiving element forming a gate-type indirect ToF sensor (hereinafter, this may be referred to as a "gate-type indirect ToF sensor") is the configuration disclosed in Patent Document 1. In the gate-type indirect ToF sensor disclosed in Patent Document 1, in a pixel having a plurality of floating diffusions within a unit pixel, each floating diffusion is sandwiched between transfer gates of different transfer transistors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-001494 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the technique disclosed in Patent Document 1, a plurality of transfer gates sandwiching the floating diffusion are arranged line-symmetrically with respect to the optical center, which causes a problem that parasitic photosensitivity is not uniformly alleviated.

[0005] In view of the above problems, an object of the present technology is to provide a light receiving element and a distance measuring module that can uniformly reduce parasitic light sensitivity. [Means for solving the problem]

[0006] A light receiving element according to an aspect of the present technology includes a plurality of transfer gates that distribute and transfer signal charges accumulated in a photodiode that photoelectrically converts incident light to a plurality of floating diffusions, and at least two of the plurality of transfer gates are arranged point-symmetrically with respect to an optical center as viewed from the direction in which light is incident.

[0007] A distance measuring module according to an aspect of the present technology includes a light receiving element having a plurality of transfer gates, a light emitting unit that irradiates irradiation light whose brightness varies periodically, and a light emission control unit that controls the irradiation timing of the irradiation light. The plurality of transfer gates distribute and transfer signal charges accumulated in a photodiode that photoelectrically converts incident light to a plurality of floating diffusions. Furthermore, at least two of the plurality of transfer gates are arranged point-symmetrically with respect to the optical center as viewed from the direction of incidence of light. [Brief description of the drawings]

[0008] [Figure 1] 1 is a block diagram showing an example of the configuration of a distance measuring module according to a first embodiment; [Diagram 2] 1 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a first embodiment. [Diagram 3] FIG. 2 is a plan view showing a configuration of a first semiconductor layer. [Figure 4] 4 is a plan view showing a configuration of a second semiconductor layer. FIG. [Diagram 5] FIG. 2 is a diagram showing a circuit configuration of a light receiving element. [Figure 6] 1 is a timing chart showing the operation of a transfer gate and an overflow gate. [Figure 7] FIG. 1 is a diagram for explaining an overview of distance measurement processing using a ToF method. [Figure 8] FIG. 1 is a diagram for explaining an overview of distance measurement processing using a ToF method. [Figure 9] FIG. 1 is a diagram for explaining an overview of distance measurement processing using a ToF method. [Figure 10] FIG. 1 is a diagram for explaining an overview of distance measurement processing using a ToF method. [Figure 11] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 12] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 13] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 14] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 15] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 16] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 17] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 18] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 19] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 20] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 21] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 22] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 23] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 24] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 25] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 26] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 27] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 28]FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 29] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 30] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 31] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 32] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 33] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 34] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 35] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 36] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 37] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 38] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 39] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 40] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 41] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 42] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 43] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 44] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Diagram 45] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 46] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 47] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 48] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 49] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 50] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 51] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 52] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 53A] FIG. 13 is a diagram showing a state in which a transfer gate is open in the modified example of the first embodiment. [Figure 53B] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 54A] FIG. 13 is a diagram showing a state in which a transfer gate is closed in a modified example of the first embodiment. [Figure 54B] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 55] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 56] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 57] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 58] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 59] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 60] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 61A]FIG. 13 is a diagram showing a state in which a transfer gate is open in the modified example of the first embodiment. [Figure 61B] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 62A] FIG. 13 is a diagram showing a state in which a transfer gate is closed in a modified example of the first embodiment. [Figure 62B] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 63] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 64] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 65] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 66] FIG. 11 is a cross-sectional view showing the movement of charges in a modified example of the first embodiment. [Figure 67] FIG. 13 is a diagram showing a circuit configuration of a light receiving element in a modified example of the first embodiment. [Figure 68] 13 is a timing chart showing the operation of a transfer gate and an overflow gate in a modification of the first embodiment. [Figure 69] FIG. 13 is a diagram showing a circuit configuration of a light receiving element in a modified example of the first embodiment. [Figure 70] FIG. 13 is a diagram showing a circuit configuration of a light receiving element in a modified example of the first embodiment. [Figure 71] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 72] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 73] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 74] FIG. 11 is a cross-sectional view showing a configuration of a capacitor in a modified example of the first embodiment. [Figure 75] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 76]FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 77] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 78] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 79] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 80] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 81] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 82] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 83] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 84] FIG. 4 is a cross-sectional view showing a schematic configuration of a light-receiving element according to a modified example of the first embodiment. [Figure 85] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 86] FIG. 4 is a plan view showing a configuration of a light receiving element according to a modified example of the first embodiment. [Figure 87] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system as a first application example of the present technology. [Figure 88] 1 is an explanatory diagram showing an example of installation positions of an outside-vehicle information detection unit and an imaging unit as a first application example of the present technology; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present technology will be described with reference to the drawings. In the description of the drawings, the same or similar parts are given the same or similar symbols, and duplicate descriptions are omitted. Each drawing is schematic and may differ from the actual one. The embodiments shown below are examples of devices and methods for embodying the technical idea of ​​the present technology, and the technical idea of ​​the present technology is not limited to the devices and methods exemplified in the following embodiments. The technical idea of ​​the present technology can be modified in various ways within the technical scope described in the claims.

[0010] (First embodiment) <Range measurement module> As shown in FIG. 1, the distance measuring module 1 according to the first embodiment includes a light emitting unit 2, a light emission control unit 4, and a light receiving element . The distance measurement module 1 is a device that irradiates light emitted from the light emitting unit 2 onto an object to which the distance is to be measured, and measures the distance to the object using the light that is reflected from the object and enters the light receiving element 10.

[0011] <Light emitting part> The light emitting unit 2 has a light source that emits light set to a predetermined wavelength, and emits irradiation light whose brightness periodically changes and irradiates the object. The light source has, for example, a light emitting diode that emits infrared light whose wavelength is set in the range of 780 nm to 1000 nm. The light emitting unit 2 also generates the irradiation light in synchronization with a rectangular wave light emission control signal CKp supplied from the light emission control unit 4.

[0012] <Light Emission Control Unit> The light emission control unit 4 controls the timing of irradiating the irradiated light by supplying a light emission control signal CLKp to the light emitter 2 and the light receiving element 10. The frequency of the light emission control signal CLKp is, for example, 20 [MHz]. The frequency of the light emission control signal CLKp is not limited to 20 [MHz], and may be 5 [MHz] or the like. Furthermore, the light emission control signal CLKp is not limited to a square wave as long as it is a periodic signal. For example, the light emission control signal CLKp may be a sine wave.

[0013] <Photodetector> The light receiving element 10 receives light reflected from an object, calculates distance information for each pixel according to the light receiving result, and generates and outputs a depth image in which the distance to the object is represented by a gradation value for each pixel. The light receiving element 10 is formed, for example, using a back-illuminated gate-type indirect ToF sensor. Furthermore, the light receiving element 10 calculates distance information for each pixel from the signal intensity detected in one pixel formed by arranging a plurality of unit pixels, based on the light emission control signal CLKp, for example. 2 to 4, the light receiving element 10 includes a first semiconductor layer 10A, a second semiconductor layer 10B, and a light shielding film 20. Note that, in the light receiving element 10, Figures 2 to 4 show a configuration corresponding to one pixel formed by arranging a plurality of (four) unit pixels.

[0014] <First semiconductor layer> The first semiconductor layer 10A is a substrate on which a pixel circuit including a photodiode PD and a plurality of floating diffusions FD is arranged. The first semiconductor layer 10A also has a plurality of transfer gates TG and a plurality of overflow gates OFG.

[0015] <Second semiconductor layer> The second semiconductor layer 10B is a substrate laminated on the surface (the lower surface in FIG. 2) opposite to the surface on which the photodiode PD of the first semiconductor layer 10A is arranged. The second semiconductor layer 10B also has a plurality of reset transistors RST, a plurality of amplification transistors AMP, and a plurality of selection transistors SEL. In FIG. 2, the direction in which the first semiconductor layer 10A and the second semiconductor layer 10B are laminated is indicated as the "stacking direction."

[0016] <Light-shielding film> The light-shielding film 20 is disposed at a position closer to the position where the light of the light-receiving element 10 is incident than the photodiode PD. The light-shielding film 20 is a film that blocks the range of light incident on the photodiode PD to a preset range. The light incident on the light-receiving element 10 passes through the on-chip lens 30 and the anti-reflection layer 40 and is incident on the light-shielding film 20.

[0017] <On-chip lens> The on-chip lens 30 is a lens that has a function of collecting light toward the photodiode PD. The on-chip lens 30 is disposed on the side of the light receiving element 10 on which the light from the photodiode PD is incident. The on-chip lens 30 can be made of, for example, an organic material or a silicon oxide film (SiO 2 ) etc. can be used.

[0018] <Photodiode> The photodiode PD photoelectrically converts the incident light that has passed through the range set by the light-shielding film 20, and generates and accumulates electric charges according to the amount of light resulting from the photoelectric conversion. In addition, the photodiode PD is connected to a transfer gate TG and an overflow gate OFG, as shown in FIG. The photodiode PD is formed using Si, Ge, etc. in an isolation region formed using P-type ions, etc. An active region (depletion layer) is formed in the photodiode PD by applying a gate potential.

[0019] <Floating diffusion> As shown in FIG. 5, the floating diffusion FD is formed at a point (connection point) where the transfer gate TG, the selection transistor SEL, and the amplification transistor AMP are connected. In the first embodiment, a case will be described in which two floating diffusions FD (a first floating diffusion FDA and a second floating diffusion FDB) are formed. The floating diffusion FD accumulates the charge transferred from the photodiode PD via the transfer gate TG and converts it into a voltage. That is, the signal charge accumulated in the photodiode PD is transferred to the floating diffusion FD.

[0020] <Transfer gate> The multiple transfer gates TG are each connected to a photodiode PD and a floating diffusion FD as shown in Fig. 5. The transfer gates TG are formed using, for example, polysilicon. In the first embodiment, as an example, a case in which the number of transfer gates TG is four as shown in FIG. 4 will be described.

[0021] Furthermore, each transfer gate TG distributes and transfers the signal charge accumulated in the photodiode PD to a plurality of floating diffusions FD in accordance with a drive signal supplied from a timing control unit (not shown). In the first embodiment, a case will be described in which the transfer gate TG that transfers the signal charge to the first floating diffusion FDA is provided with two transfer gates TG (transfer gate TGA, transfer gate TGB) as shown in Fig. 4. Similarly, a case will be described in which the transfer gate TG that transfers the signal charge to the second floating diffusion FDB is provided with two transfer gates TG (transfer gate TGC, transfer gate TGD).

[0022] That is, in the first embodiment, at least two of the multiple transfer gates TG transfer the signal charge accumulated in the photodiode PD to one floating diffusion FD. Further, the multiple transfer gates TG are arranged point-symmetrically with respect to the optical center OPC as shown in FIG. 4 when viewed from the incident direction of light incident on the light receiving element 10.

[0023] In the first embodiment, a case will be described in which the optical center OPC is set to one pixel formed by arranging a plurality of unit pixels. The optical center OPC is, for example, the center of the photodiode PD when viewed from the direction of incidence of light. However, this is not limited to this, and the optical center OPC may be, for example, the center of the on-chip lens 30 when viewed from the direction of incidence of light. 4, the four transfer gates TG are arranged at positions that form the vertices of a quadrangle with the optical center OPC as a reference, when viewed from the incident direction of light incident on the light receiving element 10. In other words, the four transfer gates TG are arranged on two imaginary straight lines that intersect at right angles with the optical center OPC as the intersection point.

[0024] <Overflow gate> Each of the multiple overflow gates OFG discharges electric charges overflowing from the floating diffusion FD in response to a drive signal supplied from a timing control unit (not shown). The overflow gates OFG are formed of, for example, polysilicon. In the first embodiment, as an example, a case in which the number of overflow gates OFG is four as shown in FIG. 4 will be described.

[0025] Therefore, in the first embodiment, the total number of the transfer gates TG and the overflow gates OFG is an even number. Also, in the first embodiment, the total number of the transfer gates TG and the total number of the overflow gates OFG are the same number. Further, as shown in FIG. 4, the multiple overflow gates OFG are arranged in point symmetry with respect to the optical center OPC at positions different from the transfer gates TG when viewed from the incident direction of light incident on the light receiving element 10. In the first embodiment, as shown in FIG. 4, a case will be described in which transfer gates TG and overflow gates OFG are alternately arranged along a circle centered on the optical center OPC when viewed from the incident direction of light incident on the light receiving element 10.

[0026] <Reset transistor> As shown in FIG. 5, the multiple reset transistors RST are each connected to a transfer gate TG and a power supply line VDD. In the first embodiment, as an example, a case in which the number of reset transistors RST is four as shown in FIG. 4 will be described.

[0027] Furthermore, each reset transistor RST turns on or off the discharge of the charge accumulated in the floating diffusion FD in accordance with a drive signal supplied from the timing control section. Further, the multiple reset transistors RST are arranged point-symmetrically with respect to the optical center OPC as shown in FIG. 4 when viewed from the incident direction of light incident on the light receiving element 10.

[0028] <Amplification transistor> As shown in FIG. 5, each of the amplification transistors AMP is connected to a floating diffusion FD, a power supply line VDD, and a selection transistor SEL. In the first embodiment, as an example, a case in which the number of amplifying transistors AMP is four as shown in FIG. 4 will be described.

[0029] Each amplification transistor AMP reads out the potential of the floating diffusion FD reset by the reset transistor RST as a reset level. Furthermore, each amplification transistor AMP amplifies a voltage corresponding to the signal charge accumulated in the floating diffusion FD to which the signal charge has been transferred by the transfer gate TG. That is, each amplification transistor AMP reads out the signal charge transferred to the floating diffusion FD as an electrical signal, and further amplifies the read electrical signal. The voltage (voltage signal) amplified by the amplifier transistor AMP is output to a vertical signal line VSL via a selection transistor SEL. The vertical signal line VSL is a wiring that outputs the electrical signal amplified by the amplifier transistor AMP. The selection transistor SEL and an A / D converter (not shown) are also connected to the vertical signal line VSL. Further, the multiple amplification transistors AMP are arranged point-symmetrically with respect to the optical center OPC as shown in FIG. 4 when viewed from the incident direction of light incident on the light receiving element 10.

[0030] <Selection transistor> As shown in FIG. 5, each of the selection transistors SEL is connected to an amplification transistor AMP and a vertical signal line VSL. In the first embodiment, as an example, a case in which the number of selection transistors SEL is four as shown in FIG. 4 will be described.

[0031] Furthermore, each selection transistor SEL turns on or off the output of a voltage signal from the amplification transistor AMP to the vertical signal line VSL in accordance with a drive signal supplied from the timing control section. Thereby, each selection transistor SEL becomes conductive when a selection control signal is given, and selects a unit pixel in synchronization with vertical scanning by a vertical scanning circuit (not shown). 4, the multiple selection transistors SEL are arranged point-symmetrically with respect to the optical center OPC as a reference when viewed from the incident direction of light incident on the light receiving element 10. 4, the components of one pixel are arranged at least one of left-right symmetry and top-bottom symmetry with respect to one pixel, which is the smallest unit. In the example shown in FIG. 4, the components of one pixel are a reset transistor RST, an amplification transistor AMP, and a selection transistor SEL.

[0032] <Transfer gate and overflow gate operation timing> The timing at which each transfer gate TG and overflow gate OFG operates in accordance with the drive signals supplied from the timing control section is controlled to, for example, the timing shown in FIG. Specifically, the transfer gates TGA and TGB that transfer the signal charges to the first floating diffusion FDA operate at the same timing. Similarly, the transfer gates TGC and TGD that transfer the signal charges to the second floating diffusion FDB operate at the same timing.

[0033] At the same timing, the operations performed by the transfer gates TGA and TGB are reverse to those performed by the transfer gates TGC and TGD, that is, at the timing when the transfer gates TGA and TGB transfer signal charges to the first floating diffusion FDA, the transfer gates TGC and TGD do not transfer signal charges to the second floating diffusion FDB. Furthermore, the timing at which the overflow gate OFG discharges the charge overflowing from the floating diffusion FD differs from the timing at which each transfer gate TG transfers the signal charge to the floating diffusion FD.

[0034] <Distance measurement processing> An overview of distance measurement processing using the ToF method will be described. The ToF method is a method for measuring the distance to an object and the three-dimensional shape of the object. The ToF method also measures the distance to the object (depth) and the shape of the object by irradiating the object with light and analyzing the reflected light. Below, an overview of distance (depth) measurement processing using the ToF method will be described with reference to Fig. 7. Note that in the following description, no particular reference is made to measurement processing of a three-dimensional shape, but by measuring the distance of an object surface over the entire object surface, it is possible to measure the three-dimensional shape of the object.

[0035] 7 shows a light-emitting unit 2, a light-receiving element 10 (camera), and an object OBJ. Light output from the light-emitting unit 2 is reflected by the object OBJ and enters the light-receiving element 10. In this configuration, by measuring the time Δt from when the light output from the light-emitting unit 2 is reflected by the object OBJ to when it enters the light-receiving element 10, it is possible to measure the distance (depth) d from the light-receiving element 10 to the object OBJ.

[0036] The distance d is calculated using the following formula 1. In formula 1, "c" is the speed of light. d=(1 / 2)×c×Δt (Formula 1)

[0037] In FIG. 7, the light-emitting unit 2 and the light-receiving element 10 are shown at positions slightly apart for ease of understanding. However, in a conventional general device, the light-emitting timing of the light-emitting unit 2 and the imaging timing of the light-receiving element 10 are controlled by a single clock, so the light-emitting unit 2 and the light-receiving element 10 are configured at approximately the same position in the same device, etc. Therefore, the time Δt from when the output light from the light-emitting unit 2 is reflected by the object OBJ to when it is incident on the light-receiving element 10 is the time it takes for the light to travel a distance twice the distance (depth) d from the light-receiving element 10 to the object OBJ. This is the reason why (1 / 2) is multiplied in the calculation formula for the distance d in (Formula 1).

[0038] 7, the time Δt is very short, and it is difficult to accurately measure this time Δt. Therefore, in practice, pulsed light is emitted from the light-emitting unit 2, and the time difference between the pulsed light received by the light-receiving element 10 is converted into a phase difference to find the distance. This process will be described with reference to FIG.

[0039] 8, like Fig. 7, also shows a light source (light emitter) 1, a camera (light receiver) 2, and an object OBJ. Pulsed light is emitted from the light emitter 2, and the pulsed light reflected by the object OBJ and returned is received by a light receiver 10. In this configuration, the time difference between the output pulse light from the light emitting section 2 and the input pulse light to the light receiving element 10 is converted into a phase difference and observed.

[0040] The light emitting unit 2 blinks at a high speed at a known frequency fHz. That is, one period of the light emitting pattern of the light emitting unit 2 is 1 / f seconds. The light receiving element 10 measures the phase of the blinking pattern of light for each pixel. A specific example of a configuration for pixel-by-pixel phase measurement will be described later.

[0041] For example, if the difference in phase between the pulsed light output by the light-emitting unit 2 and the pulsed light received by the light-receiving element 10 is φ, then the time Δt it takes for the output light from the light-emitting unit 2 to be reflected by the object OBJ and enter the light-receiving element 10 can be calculated using the following (Equation 2). Δt=(1 / f)×(φ / 2π) (Formula 2)

[0042] By substituting the time Δt calculated by (Equation 2) into (Equation 1), the distance d from the light receiving element 10 (or the light emitting unit 2) to the object OBJ can be calculated using the following (Equation 3). Note that in (Equation 3), "c" is the speed of light, "φ" is the difference between the phase of the output pulse light from the light emitting unit 2 and the phase of the received pulse light at the light receiving element 10, and "f" is the frequency of the pulse light. d = (cφ) / 4πf (Eq. 3)

[0043] A configuration for calculating the phase of pulsed light for each pixel in the light receiving element 10 will be described with reference to FIG. The light receiving element 10 described with reference to FIGS. 7 and 8 is a ToF camera that is different from a normal camera, in which each pixel repeatedly turns ON / OFF at high speed and accumulates charge only during the ON period. When measuring the distance to an object using a ToF camera, the ON / OFF execution timing is switched sequentially and the accumulated charge at each timing is analyzed. The ON / OFF execution timing switching patterns are, for example, the following four types shown in the left diagram in Figure 9. (c1) Phase 0 degrees (c2) Phase 90 degrees (c3) Phase 180 degrees (c4) Phase 270 degrees

[0044] (c1) Phase 0 degrees is a setting in which the ON timing (light receiving timing) is the same phase as the phase of the pulsed light output by the light emitting unit 2, that is, the light emission pattern (a) shown in the left diagram of FIG. (c2) Phase 90 degrees is a setting in which the ON timing (light receiving timing) is delayed by 90 degrees in phase from the pulsed light ((a) light emitting pattern) output by the light emitting unit 2. (c3) Phase 180 degrees is a setting in which the ON timing (light receiving timing) is delayed by 180 degrees in phase with respect to the pulsed light ((a) light emitting pattern) output by the light emitting unit 2. (c4) Phase 270 degrees is a setting in which the ON timing (light receiving timing) is delayed by a phase of 270 degrees from the pulsed light ((a) light emitting pattern) output by the light emitting unit 2.

[0045] In the light receiving element 10, these four types of switching are executed in sequence to obtain the amount of received light with different light receiving timings. That is, four types of received light amounts with different accumulation phases and electric charges corresponding to the received light amounts are obtained. For example, the charge accumulated when the phase difference of the light receiving pixel with respect to the light emission pattern is 0, 90, 180, and 270 degrees is Q 0 ,Q 90 ,Q 180 , Q 270 Let us assume that.

[0046] Here, the phase difference φ required for calculating the distance d to the object by applying (Equation 3) is the difference between the phase of the output pulse light from the light-emitting unit 2 and the phase of the received pulse light from the light-receiving element 10. This phase difference φ can be calculated based on the following (Equation 4). φ=Arctan((Q 90 -Q 270 ) / (Q 180 -Q 0 )) ... (Formula 4)

[0047] By substituting the phase difference φ calculated by (Equation 4), i.e., the difference φ between the phase of the output pulse light from the light-emitting unit 2 and the phase of the received pulse light from the light-receiving element 10, into (Equation 3), it is possible to calculate the distance d from the light-receiving element 10 (or the light-emitting unit 2) to the object OBJ.

[0048] In this disclosure, as shown in FIG. 10, the image frames captured by the ToF camera, i.e., the captured images at each phase setting with respect to the phase shift amount (0 degrees, 90 degrees, 180 degrees, 270 degrees) from the light emission pattern (pulse) and the accumulated charge of each captured image are referred to as components. FIG. 10 is a diagram showing image data captured by a camera (ToF camera) along a time axis shown from left to right. Images are captured in sequence and repeatedly for each phase setting of the phase shift from the light emission pattern (pulse) (0, 90 degrees, 180 degrees, 270 degrees).

[0049] A set of component combinations with phase settings of 0 degrees, 90 degrees, 180 degrees, and 270 degrees is called a frame. That is, one frame is the accumulated charge information Q of the captured image set at each phase of 0 degrees, 90 degrees, 180 degrees, and 270 degrees of phase shift from the light emission pattern (pulse). 0 ,Q 90 ,Q 180 , Q 270 Have. Generally, the time between components is set to be shorter than the time between frames.

[0050] Next, an overview of the processing executed by the distance measurement device of the present disclosure will be described. As described with reference to FIGS. 7 to 9, in measuring the distance to an object using the ToF method, it is necessary to detect the phase difference between the light emission pulse of the light source and the light reception pulse of the camera.

[0051] In order to accurately detect this phase difference, it is necessary to know the ON / OFF timing of the light emission pulse of the light source and the ON / OFF timing of the pixels executed in the camera. To achieve this, for example, the ON / OFF timing of the light emission pulse of the light source and the ON / OFF timing of the pixels in the camera can be controlled based on one clock, that is, in synchronization.

[0052] <Photoelectric conversion rate> It has been demonstrated that the light receiving element 10 of the first embodiment has a high photoelectric conversion rate, especially for light of a short wavelength, even if the thickness of the silicon oxide film is increased.

[0053] <Actions and Effects of the First Embodiment> The light receiving element 10 of the first embodiment can provide the following functions and effects. (1) The device is equipped with multiple transfer gates TG that distribute and transfer the signal charge accumulated in the photodiode PD, which photoelectrically converts incident light, to multiple floating diffusions FD. In addition, at least two of the multiple transfer gates TG are arranged point-symmetrically with respect to the optical center OPC when viewed from the direction of incident light. This makes it possible to provide a light receiving element 10 capable of uniformly reducing parasitic photosensitivity.

[0054] (2) The number of transfer gates TG is four, and the four transfer gates TG are arranged at positions that form the vertices of a rectangle with the optical center OPC as the reference when viewed from the direction in which light is incident. This makes it easy to ensure the distance from the optical center OPC to the floating diffusion FD, making it possible to suppress an increase in parasitic photosensitivity.

[0055] (3) The device further includes a plurality of overflow gates OFG that discharge charges overflowing from the floating diffusion FD. In addition, at least two of the plurality of overflow gates OFG are arranged point-symmetrically with respect to the optical center OPC as viewed from the direction of incidence of light. This makes it possible to provide a light receiving element 10 that can improve robustness against transfer failures when distributing charges to each transfer gate TG at high speed, even if a mask misalignment occurs. That is, the gate-type indirect ToF sensor obtains multiple phase signals by distributing the charge generated in the photodiode PD to multiple floating diffusions FD by multiple transfer gates TG. Furthermore, since distance measurement is performed using multiple phase signals, it is necessary to distribute the charge to each transfer gate TG at high speed, and high robustness against transfer failure is required. Therefore, there is a problem that robustness against transfer failure decreases when a mask misalignment occurs. In contrast, in the light receiving element 10 of the first embodiment, at least two of the multiple overflow gates OFG are arranged point-symmetrically with respect to the optical center OPC as viewed from the light incident direction, so that the above problem can be solved.

[0056] Furthermore, by arranging at least two of the multiple overflow gates OFG in a point-symmetric manner with respect to the optical center OPC, it is possible to maintain uniformity within the surface even when light is reflected by multiple transistors. Furthermore, compared to a configuration in which the overflow gate OFG is disposed at the optical center OPC, it is possible to achieve a configuration in which it is possible to avoid interruption of the transfer path that transfers the signal charge to the floating diffusion FD.

[0057] (4) The total number of transfer gates TG and overflow gates OFG is an even number. This makes it possible to suppress a decrease in the charge separation efficiency (Cmod) caused by process deviations. Also, it becomes easier to maintain point symmetry with respect to the optical center OPC for multiple transfer gates TG and overflow gates OFG.

[0058] (5) The total number of transfer gates TG and the total number of overflow gates OFG are the same. This makes it possible to prevent the manufacturing process from becoming too complicated.

[0059] (6) The optical center OPC is set to one pixel formed by arranging a plurality of unit pixels. This makes it possible to apply a structure in which the transfer gates TG, etc. are arranged point-symmetrically with respect to the optical center OPC when viewed from the direction of light incidence for one photodetector 10, thereby making it possible to uniformly reduce parasitic photosensitivity.

[0060] (7) The device further includes a plurality of amplification transistors AMP that read out the signal charge transferred to the floating diffusion FD as an electric signal and amplify it. In addition, at least two of the plurality of amplification transistors AMP are arranged point-symmetrically with respect to the optical center OPC as viewed from the direction of incidence of light. This allows the light receiving element 10 to have a highly symmetrical configuration, making it possible to achieve uniform quality.

[0061] (8) The semiconductor laser device further includes a plurality of selection transistors SEL that turn on or off the output of a voltage signal from the amplification transistor AMP. In addition, at least two of the selection transistors SEL are arranged point-symmetrically with respect to the optical center OPC when viewed from the direction in which light is incident. This allows the light receiving element 10 to have a highly symmetrical configuration, making it possible to achieve uniform quality.

[0062] (9) The semiconductor device further includes a plurality of reset transistors RST that turn on and off the discharge of the electric charge accumulated in the floating diffusion FD. In addition, at least two of the plurality of reset transistors RST are arranged point-symmetrically with respect to the optical center OPC when viewed from the direction of incidence of light. This allows the light receiving element 10 to have a highly symmetrical configuration, making it possible to achieve uniform quality.

[0063] (10) The photodiode PD further includes a light-shielding film 20 that blocks light incident on the photodiode PD within a preset range. This allows light that has been reflected by an object and entered the light receiving element 10 to be efficiently incident on the photodiode PD.

[0064] (11) The first semiconductor layer 10A has a plurality of transfer gates TG and a plurality of overflow gates OFG. In addition, the second semiconductor layer 10B stacked on the first semiconductor layer 10A along the incident direction of light has a plurality of amplification transistors AMP, a plurality of reset transistors RST, and a plurality of selection transistors SEL. This allows the light receiving element 10 having a stacked structure to uniformly reduce parasitic light sensitivity, and also allows the structure of the light receiving element 10 to be diversified.

[0065] (12) At least two of the multiple transfer gates TG transfer the signal charge accumulated in the photodiode PD to one floating diffusion FD. As a result, even if a transfer failure occurs in one transfer gate TG, if the remaining transfer gates TG do not have a transfer failure, it is possible to prevent a transfer failure to one floating diffusion FD. Therefore, even if a difference (transfer difference) occurs in the transfer capability (transfer capacity, transfer speed, etc.) of a plurality of transfer gates TG to one floating diffusion FD, it is possible to cancel the generated transfer difference. Furthermore, the light receiving element 10 can be configured to have an increased number of HADs (Hole-Accumulation Diodes (registered trademark)), and the variations in which HADs can be applied can be expanded.

[0066] (13) An on-chip lens 30 is provided on the side where light from the photodiode PD is incident. This makes it possible to suppress variations in sensitivity of each color and color mixture that occur depending on the F-number of the on-chip lens 30. This is because, in the back-illuminated light receiving element 10, the distance between the on-chip lens 30 and the light receiving surface of the photodiode PD is short.

[0067] The distance measuring module 1 of the first embodiment can provide the following functions and effects. (14) The device includes a light receiving element 10, a light emitting unit 2 that irradiates irradiation light whose brightness varies periodically, and a light emission control unit 4 that controls the irradiation timing of the irradiation light. This makes it possible to provide a distance measuring module 1 capable of uniformly reducing parasitic light sensitivity.

[0068] (Modification of the first embodiment) (1) In the first embodiment, the light receiving element 10 is configured to include a plurality of overflow gates OFG arranged point-symmetrically with respect to the optical center OPC. However, this is not limited to this, and for example, as shown in FIG. 11, the overflow gate OFG may be arranged at the optical center OPC when viewed from the light incidence direction. With this configuration, it is possible to improve the resistance of the light receiving element 10 to process variations.

[0069] (2) In the first embodiment, the total number of transfer gates TG and the total number of overflow gates OFG are the same number, but this is not limited to this. For example, as shown in FIG. 12, the total number of transfer gates TG and the total number of overflow gates OFG may be different numbers.

[0070] (3) In the first embodiment, at least two of the multiple transfer gates TG are configured to transfer the signal charge accumulated in the photodiode PD to one floating diffusion FD. However, this is not limited to this, and for example, as shown in Figures 13 to 15, a configuration may be used in which a signal charge accumulated in the photodiode PD is transferred to one floating diffusion FD by one transfer gate TG. That is, a configuration may be used in which one of the multiple transfer gates TG transfers the signal charge accumulated in the photodiode PD to one floating diffusion FD. Note that in Figures 13 to 15, they are respectively indicated as "transfer gate TGE, transfer gate TGF, transfer gate TGG, and transfer gate TGH." This configuration makes it possible to accommodate a configuration in which the number of floating diffusions FD is increased.

[0071] (4) In the first embodiment, the first semiconductor layer 10A has a transfer gate TG and an overflow gate OFG, and the second semiconductor layer 10B has an amplification transistor AMP, a reset transistor RST, and a selection transistor SEL. However, this is not limited to this. That is, for example, as shown in Figures 16 to 18, one semiconductor layer may have a transfer gate TG, an overflow gate OFG, an amplification transistor AMP, a reset transistor RST, and a selection transistor SEL.

[0072] (5) In the first embodiment, the light receiving element 10 is configured without a memory for storing signal charges, but the present invention is not limited to this. That is, for example, as shown in Fig. 19, the light receiving element 10 may be configured to further include a plurality of memories MC for storing signal charges, and at least two of the plurality of memories MC may be arranged point-symmetrically with respect to the optical center OPC as viewed from the light incidence direction.

[0073] (6) In the first embodiment, the second semiconductor layer 10B is configured without a memory for storing signal charges, but is not limited to this. That is, for example, as shown in Fig. 20, the second semiconductor layer 10B may further include a plurality of memories MC for storing signal charges, and at least two of the plurality of memories MC may be arranged point-symmetrically with respect to the optical center OPC as viewed from the light incidence direction.

[0074] (7) In the first embodiment, the light receiving element 10 is configured to include the first semiconductor layer 10A and the second semiconductor layer 10B. However, this is not limited to this, and the light receiving element 10 may be configured as an embedded gate type indirect ToF sensor including only one semiconductor layer.

[0075] (8) In the first embodiment, the light receiving element 10 includes the first semiconductor layer 10A and the second semiconductor layer 10B. However, the present invention is not limited to this. For example, as shown in FIG. 21, the light receiving element 10 may further include a third semiconductor layer 10C. The third semiconductor layer 10C is a layer stacked with the first semiconductor layer 10A and the second semiconductor layer 10B along the light incidence direction at a position farther from the first semiconductor layer 10A than the second semiconductor layer 10B. In this case, the third semiconductor layer 10C includes a plurality of amplification transistors AMP and a plurality of reset transistors RST. Furthermore, at least two of the plurality of amplification transistors AMP included in the third semiconductor layer 10C are arranged point-symmetrically with respect to the optical center OPC as viewed from the light incidence direction. In addition, at least two of the plurality of reset transistors RST included in the third semiconductor layer 10C are arranged point-symmetrically with respect to the optical center OPC as viewed from the light incidence direction.

[0076] (9) In the first embodiment, the number of the amplification transistors AMP and the amplification transistors AMP is four. However, this is not limited to this. For example, as shown in FIG. 22, the number of the amplification transistors AMP and the amplification transistors AMP may be two.

[0077] (10) In the first embodiment, the transfer gates TG and the overflow gates OFG are alternately arranged along a circle centered on the optical center OPC when viewed from the incident direction of light incident on the light receiving element 10, but this is not limited to the above. That is, for example, as shown in Figures 23 and 24, the transfer gates TG and the overflow gates OFG may be arranged continuously along a circle centered on the optical center OPC when viewed from the incident direction of light incident on the light receiving element 10. Note that, for the sake of explanation, the transfer gates TG and the overflow gates OFG are simplified in Figures 23 and 24. Here, in the configuration shown in Figure 23, the transfer gate TG and the overflow gate OFG are arranged to form an octagon when viewed from the direction of incidence of light entering the light receiving element 10, so that the configuration of the light receiving element 10 can be made highly symmetrical. Furthermore, with the configuration shown in FIG. 24, by changing the arrangement of the transfer gate TG in accordance with the floating diffusion FD that transfers the signal charge, it is possible to improve the stability of the transfer of signal charge in a specific direction.

[0078] (11) In the first embodiment, the optical center OPC is set to one pixel formed by arranging a plurality of unit pixels, but this is not limited to this, and the optical center OPC may be set to a pixel group formed by arranging a plurality of pixels. That is, for example, as shown in Figures 25 to 27, consider a case where the transfer gate TG and the overflow gate OFG are not arranged point-symmetrically with respect to the center of the pixel PX in one pixel PX. Even in this case, the optical center OPC is set to the center of a quadrangle in the pixel group PXG, so that the transfer gate TG and the overflow gate OFG are arranged point-symmetrically with respect to the optical center OPC in the pixel group PXG. Note that, for the sake of explanation, the transfer gate TG and the overflow gate OFG are illustrated simply in Figures 25 to 27. Also, the pixel group PXG is a group of pixels in which four pixels PX are arranged in an array to form a quadrangle. With this configuration, it is possible to increase the variety of configurations of the light receiving element 10.

[0079] (12) In the first embodiment, the light receiving element 10 is configured such that the first semiconductor layer 10A includes a photodiode PD, a floating diffusion FD, a transfer gate TG, and an overflow gate OFG, as shown in Fig. 2 to Fig. 4. In addition, the second semiconductor layer 10B includes a reset transistor RST, an amplifying transistor AMP, and a selection transistor SEL. However, the configuration of the first semiconductor layer 10A and the second semiconductor layer 10B is not limited to this. That is, for example, as shown in Figures 28 to 31, a ground GND may be arranged in the first semiconductor layer 10A, and the ground GND and the power supply wiring VDD may be arranged in the second semiconductor layer 10B. Figures 28 to 30 show a configuration corresponding to one pixel formed by arranging a plurality (four) of unit pixels in the light receiving element 10.

[0080] As shown in Fig. 29, four grounds GND are arranged on the first semiconductor layer 10A. The four grounds GND are arranged at the four corners of the first semiconductor layer 10A, respectively. 30, four grounds GND and four power supply wirings VDD are arranged in the second semiconductor layer 10B. The four grounds GND are arranged in the centers of the four edges of the second semiconductor layer 10B. The four power supply wirings VDD are arranged in the four corners of the second semiconductor layer 10B and are connected to the reset transistors RST.

[0081] 31, in a pixel group PXG formed by arranging a plurality of pixels PX (four pixels PX in FIG. 31) in an array, a ground GND arranged in the first semiconductor layer 10A is shared (not shown) between two adjacent pixels. In addition, a ground GND and a power supply line VDD arranged in the second semiconductor layer 10B are shared. Note that, in FIG. 31, for ease of viewing, reference numerals are omitted for configurations other than the pixels PX, pixel group PXG, ground GND, and power supply line VDD. With this configuration, the ground GND arranged in the first semiconductor layer 10A is shared between two adjacent pixels PX, which makes it easier to achieve miniaturization. Furthermore, the ground GND and the power supply wiring VDD arranged in the second semiconductor layer 10B are shared, which makes it easier to achieve miniaturization.

[0082] 32 and 33, for example, a ground GND and a power supply wiring VDD may be arranged in the first semiconductor layer 10A. Note that Fig. 32 shows a configuration corresponding to one pixel formed by arranging a plurality of (four) unit pixels in the light receiving element 10. 32, four grounds GND and four power supply wirings VDD are arranged on the first semiconductor layer 10A. The four grounds GND are arranged at positions closer to the photodiode PD than the four edges of the first semiconductor layer 10A. The four power supply wirings VDD are arranged at the four corners of the first semiconductor layer 10A and are connected to the reset transistor RST.

[0083] 33, in a pixel group PXG formed by arranging a plurality of pixels PX (four pixels PX in FIG. 33) in an array, two adjacent pixels PX share a power supply wiring VDD arranged in the first semiconductor layer 10A. Note that, in FIG. 33, for ease of viewing, reference symbols are omitted for configurations other than the pixels PX, pixel group PXG, ground GND, and power supply wiring VDD. In this configuration, by arranging the ground GND closer to the photodiode PD than the edge of the first semiconductor layer 10A, it is possible to strengthen the degree of fixation of the ground GND to the first semiconductor layer 10A, and it is possible to suppress the variation in electron transfer. This makes it possible to improve the AC contrast (Cmod) and suppress the variation in AC contrast for each pixel. Note that "AC contrast" is an index that ratios the accuracy of distributing the charge generated by photoelectric conversion to a predetermined floating diffusion FD when distributing the charge to multiple floating diffusions FD by modulation drive such as gate voltage. Also, the higher the "AC contrast", the better the index. Note that the faster the "Modulation Frequency" corresponding to the modulation frequency of AC contrast, the more accurate distance measurement becomes possible. Furthermore, with this configuration, the power supply wiring VDD arranged in the first semiconductor layer 10A is shared between two adjacent pixels PX, which makes it easier to achieve miniaturization.

[0084] 34 and 35, for example, a ground GND and a power supply wiring VDD may be arranged in the first semiconductor layer 10A. Note that Fig. 34 shows a configuration corresponding to one pixel formed by arranging a plurality of (four) unit pixels in the light receiving element 10. 34, four grounds GND and four power supply wirings VDD are arranged in the first semiconductor layer 10A. The four grounds GND are arranged in the centers of the four edges of the second semiconductor layer 10B. The four power supply wirings VDD are arranged in the four corners of the first semiconductor layer 10A and are connected to the reset transistors RST. 35, in a pixel group PXG formed by arranging a plurality of pixels PX (four pixels PX in FIG. 35) in an array, the ground GND and power supply wiring VDD arranged in the first semiconductor layer 10A are shared between two adjacent pixels PX. Note that, in FIG. 35, for ease of viewing, reference symbols are omitted for configurations other than the pixels PX, pixel group PXG, ground GND, and power supply wiring VDD. With this configuration, the ground GND and the power supply wiring VDD arranged in the first semiconductor layer 10A are shared between two adjacent pixels PX, which makes it easy to achieve miniaturization.

[0085] (13) In the first embodiment, as shown in FIG. 2, the light collected by the on-chip lens 30 is transmitted through the antireflection layer 40, enters the light-shielding film 20, and enters the photodiode PD. However, the present invention is not limited to this. That is, for example, as shown in Fig. 36 to Fig. 38, light collected by the on-chip lens 30 may be scattered by the scattering structure SF and made to enter the photodiode PD. Fig. 36 shows a configuration corresponding to one pixel formed by arranging a plurality of (four) unit pixels in the light receiving element 10. In Fig. 37, for ease of viewing, reference numerals are omitted for configurations other than the pixel PX, pixel group PXG, ground GND, and power supply wiring VDD.

[0086] The scattering structure SF is made of, for example, a metal material (Metal) or a silicon oxide film (SiO 2 ) or the like, and is disposed inside the antireflection layer 40. The scattering structures SF are formed in the shape of a plate having a uniform thickness when viewed from the direction in which a plurality of unit pixels are arranged, as shown in Fig. 36. The scattering structures SF are disposed in a grid pattern when viewed from the direction in which light enters the light receiving element 10, as shown in Fig. 38. With this configuration, the scattering structures SF are arranged point-symmetrically with respect to the optical center so that the light scattered by the scattering structures SF is not biased toward a specific transfer gate TG inside the pixel, making it possible to suppress bias in sensitivity and improve AC contrast. This makes it possible to improve the sensitivity to infrared light sources, which is the sensitivity that is emphasized in indirect ToF. Meanwhile, on the high image height side, which is the side of the pixel farther away from the optical axis on the surface of the on-chip lens 30, light is incident obliquely due to the greater distance from the optical axis. For this reason, it is not necessary to arrange the scattering structures SF point-symmetrically with respect to the optical center. Moreover, the "high image height side" refers to the side where the image height increases as it approaches the end of the on-chip lens 30 from the pixel center, which is the portion where the diagonal lines of the on-chip lens 30 intersect. Furthermore, the "high image height" refers to the side closer to the end of the on-chip lens 30 (including any of the upper, lower, left, and right sides).

[0087] The configuration of the scattering structures SF is not limited to the configuration shown in Figure 38, i.e., a configuration in which they are arranged in a grid pattern when viewed from the direction of incidence of light entering the light receiving element 10, and may be, for example, the configurations shown in Figures 39 to 48. Further, the shape of the scattering structures SF is not limited to the configuration shown in FIG. 36, that is, a plate shape having a uniform thickness when viewed from the direction in which a plurality of unit pixels are arranged.

[0088] That is, the scattering structure SF may have a shape of a quadrangular pyramid with its apex facing downward (toward the photodiode PD) and its cross-sectional area decreasing as it approaches the photodiode PD, as shown in Fig. 49. The scattering structure SF may have a shape of a quadrangular pyramid with its apex facing upward (the side where light is incident) and its cross-sectional area decreasing as it moves away from the photodiode PD, as shown in Fig. 50. In addition, when the shape of the scattering structure SF is as shown in Figures 49 and 50, the configuration of the scattering structure SF viewed from the direction of incidence of light entering the light receiving element 10 will be, for example, as shown in Figures 49, 41, and 48.

[0089] (14) In the first embodiment, the overflow gate OFG is connected to the transfer gate TG, but the present invention is not limited to this. That is, for example, as shown in Figures 51 and 52, the overflow gate OFG may be disposed at the optical center OPC, and further, the overflow gate OFG may be connected to the ground GND instead of being connected to the transfer gate TG. Note that in Figure 52, for ease of viewing, reference symbols are omitted for components other than the pixel PX, pixel group PXG, ground GND, and overflow gate OFG. In the configuration shown in FIGS. 51 and 52, the light receiving element 10 is configured to include a conversion efficiency variable gate FDG. The conversion efficiency variable gate FDG (polysilicon) is arranged at a position according to the optical symmetry and the capacitance symmetry, and is connected to the reset transistor RST. The conversion efficiency variable gate FDG also functions as a switch that loads an additional capacitance. Although not shown in the drawings, a dummy element may be disposed in place of the conversion efficiency variable gate FDG.

[0090] In the configuration shown in Figures 51 and 52, even if a drive signal is not supplied from a timing control unit (not shown), the potential barrier formed by the transfer gate TG realizes a function equivalent to that of the overflow gate OFG that receives a drive signal supplied from the timing control unit. Therefore, in the configuration shown in Figures 51 and 52, when the transfer gate TG is open (ON state) as shown in Figure 53A, the charge EC is accumulated in the floating diffusion FD as shown in Figure 53B. On the other hand, when the transfer gate TG is closed (OFF state) as shown in Figure 54A, the charge EC is discharged to the overflow gate OFG as shown in Figure 54B. In other words, by designing the electric field so that the transfer gate TG is in the OFF state and the charge EC is discharged to the overflow gate OFG, it is possible to achieve functionality equivalent to that of the overflow gate OFG, which requires a timing control unit, without requiring a timing control unit. With this configuration, the overflow gate OFG, which is a necessary component for indirect ToF, can be easily miniaturized by reducing its area occupancy within the pixel while maintaining symmetry with respect to the optical center OPC.

[0091] Also, for example, as shown in FIGS. 55 and 56, an overflow gate OFG may be disposed at the optical center OPC and connected to ground GND, and further, a transfer electrode VG (Vertical Gate) may be disposed on the transfer gate TG. Here, the transfer electrode VG is formed using a vertical transistor, has a structure in which a gate electrode (polysilicon) is extended inside a silicon substrate, and connects the transfer gate TG and the photodiode PD. The transfer electrode VG is also an electrode created by embedding polysilicon in an excavated portion of the silicon substrate, and for example, two portions, a portion formed in the excavated portion of the silicon substrate and a portion on the silicon substrate, are integrally formed. In other words, the transfer electrode VG forms a buried gate.

[0092] 55 and 56, when the transfer gate TG is open (ON state), the charge EC is stored in the floating diffusion FD via the transfer electrode VG as shown in Fig. 57. On the other hand, when the transfer gate TG is closed (OFF state), the charge EC is discharged to the overflow gate OFG via the transfer electrode VG as shown in Fig. 58. With this configuration, it is possible to improve the transfer efficiency of the charge EC.

[0093] (15) In the first embodiment, the overflow gate OFG is connected to the transfer gate TG, but the present invention is not limited to this. That is, for example, as shown in Figures 59 and 60, the overflow gate OFG may be disposed at the optical center OPC, and further, the overflow gate OFG may be connected to the photogate PG instead of being connected to the transfer gate TG. Note that in Figure 60, for ease of viewing, reference symbols are omitted for configurations other than the pixel PX, pixel group PXG, ground GND, overflow gate OFG, and photogate PG.

[0094] The photogate PG is connected to the photodiode PD, and is turned on or off in response to a control signal supplied from a drive circuit (not shown). In the configurations shown in Fig. 59 and Fig. 60, when the transfer gate TG is open (ON state) as shown in Fig. 61A, the charge EC moves to the photogate PG as shown in Fig. 61B. On the other hand, when the transfer gate TG is closed (OFF state) as shown in Fig. 62A, the charge EC is discharged to the overflow gate OFG as shown in Fig. 62B. In other words, by designing the electric field so that the transfer gate TG is in the OFF state and the charge EC is discharged to the overflow gate OFG, it is possible to achieve functionality equivalent to that of the overflow gate OFG, which requires a timing control unit, without requiring a timing control unit. With this configuration, the overflow gate OFG, which is a necessary component for indirect ToF, can be easily miniaturized by reducing its area occupancy within the pixel while maintaining symmetry with respect to the optical center OPC.

[0095] Also, for example, as shown in Figures 63 and 64, an overflow gate OFG may be disposed at the optical center OPC and connected to the photogate PG, and a transfer electrode VG may be disposed on the photogate PG. Note that, in Figure 64, for ease of viewing, reference numerals are omitted for components other than the pixel PX, pixel group PXG, ground GND, overflow gate OFG, photogate PG, and transfer electrode VG. The transfer electrode VG connects the photogate PG and the photodiode PD.

[0096] In the configurations shown in Fig. 63 and Fig. 64, when the transfer gate TG is open (ON state), the electric charge EC moves to the photogate PG via the transfer electrode VG as shown in Fig. 65. On the other hand, when the transfer gate TG is closed (OFF state), the electric charge EC is discharged to the overflow gate OFG via the transfer electrode VG as shown in Fig. 66. With this configuration, it is possible to improve the transfer efficiency of the charge EC.

[0097] (16) In the first embodiment, as shown in FIG. 5, two transfer gates TG are connected to one photodiode PD to form a two-phase circuit, but the present invention is not limited to this. That is, for example, as shown in FIG. 67, a four-phase circuit may be formed in which four transfer gates TG are connected to one photodiode PD and one overflow gate OFG.

[0098] In the configuration shown in FIG. 67, the timing at which each transfer gate TG and overflow gate OFG operates in accordance with the drive signal supplied from the timing control section is controlled to, for example, the timing shown in FIG. Specifically, the same operation is performed in the order of transfer gate TGA, transfer gate TGC, transfer gate TGB, and transfer gate TGD, but at different timings. Also, the timing at which the overflow gate OFG discharges the charge overflowing from the floating diffusion FD is different from the timing at which each transfer gate TG transfers the signal charge to the floating diffusion FD.

[0099] Also, for example, in the configuration shown in FIG. 52, the four-phase circuit has a configuration shown in FIG. In the configuration shown in FIG. 69, adjacent pixels share the photodiode PD and the overflow gate OFG.

[0100] Also, for example, in the configuration shown in FIG. 60, the four-phase circuit has a configuration shown in FIG. In the configuration shown in FIG. 70, adjacent pixels share the photodiode PD and the overflow gate OFG.

[0101] (17) In the first embodiment, the first semiconductor layer 10A has a configuration including the photodiode PD, the floating diffusion FD, the transfer gate TG, and the overflow gate OFG, but the present invention is not limited to this. 71 to 73, the first semiconductor layer 10A may have a plurality of (four) photogates PG and a plurality of (four) transfer electrodes VG. In addition, the first semiconductor layer 10A may have a capacitor MIM that is partly disposed in the first semiconductor layer 10A and the remaining part is disposed in the second semiconductor layer 10B.

[0102] The photogate PG is connected to the transfer gate TG. Moreover, the four photogates PG are arranged symmetrically on the left and right and on the top and bottom with respect to one transfer gate TG (for example, transfer gate TGA). The transfer electrode VG connects the transfer gate TG and the photodiode PD.

[0103] As shown in FIG. 74, the capacitor MIM includes an upper electrode UE, a lower electrode DE, and a high dielectric constant film PM. The upper electrode UE is made of a metal material and is formed into a shape having multiple recesses and protrusions by folding a flat plate at an angle of about 90° multiple times when viewed from the direction in which the multiple unit pixels are arranged. An upper terminal UT formed in a linear shape using copper is connected to the upper electrode UE. The lower electrode DE is formed of a metal material similar to the upper electrode UE and has the same shape as the upper electrode UE. A lower terminal DT formed in a plate shape using copper is connected to the lower electrode DE. The high dielectric constant film PM is made of an insulator and is disposed between the upper electrode UE and the lower electrode DE.

[0104] In the configuration shown in Figures 71 to 74, four photogates PG are arranged symmetrically with respect to one transfer gate TG. This makes the capacitance of the four photogates PG uniform, making it possible to suppress the variation in AC contrast for each pixel. In addition, the transfer electrode VG that connects the transfer gate TG and the photodiode PD makes it possible to improve the efficiency of collecting electrons deep inside, thereby improving the AC contrast. 71 to 74, the capacitor MIM, which has a metal-insulator-metal (MIM) structure in which a high dielectric constant film PM is sandwiched between an upper electrode UE and a lower electrode DE, has a 3D structure in which a flat plate is folded three-dimensionally. This makes it possible to increase the effective area of ​​the capacitor MIM and to hold a large amount of electrons, thereby enabling a significant increase in capacitance.

[0105] As shown in FIG. 75, a configuration having eight transfer electrodes VG may be used, and one transfer gate TG and one photodiode PD may be connected by two transfer electrodes VG. Furthermore, for example, as shown in FIGS. 76 and 77, the light receiving element 10 may have a configuration including a plurality of memories MC, a plurality of photogates PG, a plurality of transfer electrodes VG, and a capacitor MIM.

[0106] Instead of the configuration shown in Figures 76 and 77, a configuration having eight transfer electrodes VG as shown in Figure 78 may be used, in which two transfer electrodes VG connect one transfer gate TG and one photodiode PD. In the configurations shown in FIGS. 76 to 78, it is also possible to suppress the variation in AC contrast between pixels, improve the AC contrast, and greatly increase the capacitance.

[0107] Moreover, the configuration of the photogate PG is not limited to the configuration in which it is completely disposed inside the first semiconductor layer 10A as shown in FIG. 71 and FIG. That is, for example, as shown in FIGS. 79 and 80, the light receiving element 10 may be configured to include a vertical photogate VPG.

[0108] The vertical photogate VPG is formed in a shape that extends vertically from the first semiconductor layer 10A and is embedded inside the photodiode PD. 79 and 80, a part of the vertical photogate VPG is embedded inside the photodiode PD, so that it is possible to change the direction of movement of electrons to an intended one of the multiple transfer gates TG at a position close to the first semiconductor layer 10A, thereby improving the AC contrast.

[0109] (18) In the first embodiment, the light receiving element 10 is configured to include one on-chip lens 30 as shown in FIG. 2 and other figures, but the present invention is not limited to this. In a configuration including one on-chip lens 30, as shown in Fig. 81 to Fig. 83, incident light is collected toward an overflow gate OFG disposed in the center of the unit pixel. In Fig. 81 to Fig. 83, a light collection region where incident light is collected is indicated by the symbol CR. In Fig. 83, for ease of viewing, symbols are omitted from components other than the pixel PX, pixel group PXG, overflow gate OFG, photogate PG, and light collection region CR.

[0110] On the other hand, instead of a configuration having one on-chip lens 30, a configuration may be adopted in which the same number (four) of on-chip lenses 30 as the number of transfer gates TG are provided, as shown in, for example, Figs. 84 to 86. That is, the on-chip lens 30 is divided according to the number of transfer gates TG arranged in a pixel. Note that, in Fig. 86, for ease of viewing, reference numerals are omitted for configurations other than the pixel PX, pixel group PXG, overflow gate OFG, photogate PG, and light-collecting region CR. 84 to 86, the incident light is dispersed into four regions, the same number as the on-chip lenses 30. This makes it possible to reduce the components of the light that escape beyond the overflow gate OFG, thereby improving the quantum efficiency.

[0111] Furthermore, by making the on-chip lens 30 smaller than in a configuration including one on-chip lens 30, it is possible to increase the curvature of the on-chip lens 30, and it is possible to focus the light on the shallow side of the surface on which the light is incident. This makes it possible to reduce the component of light that escapes beyond the overflow gate OFG. Although not shown, it is also possible to apply the scattering structures SF as shown in FIG. 36 etc. to a configuration including the same number of on-chip lenses 30 as the transfer gates TG.

[0112] (First application example) The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving object among automobiles, electric vehicles, hybrid electric vehicles, motorcycles, bicycles, personal mobility, airplanes, drones, ships, robots, etc.

[0113] FIG. 87 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology of the present disclosure can be applied.

[0114] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 87, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (Interface) 12053 are illustrated.

[0115] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0116] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0117] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0118] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of the received light. The imaging unit 12031 can output the electrical signal as an image, and can also output it as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0119] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, and may determine whether the driver is dozing.

[0120] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, steering mechanism, or braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.

[0121] In addition, the microcomputer 12051 is capable of performing cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc., based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0122] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12030 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can perform cooperative control for the purpose of preventing glare, such as controlling headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030 and switching high beams to low beams.

[0123] The audio / video output unit 12052 transmits at least one of audio and image output signals to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. In Fig. 87, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as output devices. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0124] FIG. 88 is a diagram showing an example of the installation position of the imaging unit 12031. In FIG. 88, the imaging unit 12031 includes imaging units 12101, 12102, 12103, 12104, and 12105.

[0125] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield in the vehicle interior of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield in the vehicle interior mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The imaging unit 12105 provided at the upper part of the windshield in the vehicle interior is mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0126] 88 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0127] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0128] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 [km / h] or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the image capture ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the image capture units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, it is possible to perform cooperative control aimed at automatic driving, which runs autonomously without relying on the driver's operation.

[0129] For example, the microcomputer 12051 can classify and extract three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and use the data to automatically avoid obstacles. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and there is a possibility of a collision, it can output an alarm to the driver via the audio speaker 12061 or the display unit 12062, or perform forced deceleration or avoidance steering via the drive system control unit 12010, thereby providing driving assistance for collision avoidance.

[0130] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras and a procedure of performing a pattern matching process on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.

[0131] (Other embodiments) As described above, the embodiment of the present technology has been described, but the description and drawings forming a part of this disclosure should not be understood as limiting the present technology. Various alternative embodiments, examples, and operating techniques will be apparent to those skilled in the art from this disclosure. In addition, the present technology naturally includes various embodiments not described here, such as configurations in which the configurations described in the above embodiments are arbitrarily applied, etc. Therefore, the technical scope of the present technology is determined only by the invention-specifying matters related to the scope of the claims appropriate from the above description.

[0132] Furthermore, the semiconductor device of the present disclosure does not need to include all of the components described in the above embodiments, and conversely, may include other components. The effects described in this specification are merely examples and are not limiting, and other effects may also be obtained.

[0133] The present technology can be configured as follows. (1) The photodiode converts incident light into an electric signal. The photodiode converts the incident light into an electric signal. The photodiode converts the electric signal ... At least two of the plurality of transfer gates are arranged in point symmetry with respect to an optical center of the light receiving element when viewed from the incident direction of the light. (2) The number of the transfer gates is four, The light receiving element according to (1) above, wherein the four transfer gates are arranged at positions that form vertices of a rectangle with the optical center as a reference when viewed from the incident direction of the light. (3) Further comprising an overflow gate for discharging charges overflowing from the floating diffusion, The light receiving element according to (1) or (2), wherein the overflow gate is disposed at the optical center when viewed from the incident direction of the light. (4) Further comprising a plurality of overflow gates for discharging charges overflowing from the floating diffusion; A photodetector according to (1) or (2), wherein at least two of the plurality of overflow gates are arranged point-symmetrically with respect to the optical center when viewed from the incident direction of the light. (5) The light receiving element according to (4), wherein the total number of the transfer gates and the overflow gates is an even number. (6) The light receiving element according to (4) or (5) above, wherein the total number of the transfer gates and the total number of the overflow gates are the same. (7) The light receiving element according to any one of (1) to (6), wherein the optical center is set in one pixel formed by arranging a plurality of unit pixels. (8) The light receiving element according to any one of (1) to (6), wherein the optical center is set in a pixel group formed by arranging a plurality of pixels. (9) The device further includes a plurality of amplification transistors that read out and amplify the signal charge transferred to the floating diffusion as an electric signal, The photodetector according to any one of (1) to (8), wherein at least two of the plurality of amplifying transistors are arranged point-symmetrically with respect to the optical center when viewed from the incident direction of the light. (10) a plurality of amplification transistors that read out the signal charges transferred to the floating diffusion as electrical signals and amplify the electrical signals; a plurality of selection transistors for turning on or off the output of a voltage signal from the amplification transistor; The light receiving element according to any one of (1) to (9), wherein at least two of the plurality of selection transistors are arranged point symmetrically with respect to the optical center when viewed from the incident direction of the light. (11) Further comprising a plurality of reset transistors that turn on or off the discharge of the charge stored in the floating diffusion; The light receiving element according to any one of (1) to (10), wherein at least two of the plurality of reset transistors are arranged in point symmetry with respect to the optical center when viewed from the incident direction of the light. (12) a plurality of memories for storing the signal charges; The light receiving element according to any one of (1) to (11), wherein at least two of the plurality of memories are arranged in point symmetry with respect to the optical center as viewed from the incident direction of the light. (13) The light-receiving element according to any one of (1) to (12) above, further comprising a light-shielding film for blocking light incident on the photodiode within a preset range. (14) a first semiconductor layer including a plurality of transfer gates that distribute and transfer signal charges accumulated in a photodiode that photoelectrically converts incident light to a plurality of floating diffusions, and a plurality of overflow gates that discharge charges overflowing from the floating diffusions; a second semiconductor layer having a plurality of amplifying transistors that read out and amplify the signal charge transferred to the floating diffusion as an electric signal, a plurality of reset transistors that turn on or off the discharge of the charge accumulated in the floating diffusion, and a plurality of selection transistors that turn on or off the output of a voltage signal from the amplifying transistor; the first semiconductor layer and the second semiconductor layer are stacked along the incident direction of the light, At least two of the plurality of transfer gates are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, At least two of the plurality of overflow gates are arranged point-symmetrically with respect to the optical center as viewed from the incident direction of the light, At least two of the plurality of amplification transistors are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, At least two of the plurality of reset transistors are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, At least two of the plurality of selection transistors are arranged in point symmetry with respect to an optical center of the light receiving element when viewed from the incident direction of the light. (15) the second semiconductor layer further includes a plurality of memories for storing the signal charges; The light receiving element according to (14) above, wherein at least two of the plurality of memories are arranged point symmetrically with respect to the optical center as viewed from the incident direction of the light. (16) a third semiconductor layer stacked on the first semiconductor layer and the second semiconductor layer along the incident direction of the light at a position farther from the first semiconductor layer than the second semiconductor layer; the third semiconductor layer includes a plurality of amplification transistors that read out and amplify the signal charge transferred to the floating diffusion as an electric signal, and a plurality of reset transistors that turn on or off the discharge of the charge accumulated in the floating diffusion; At least two of the plurality of amplification transistors included in the third semiconductor layer are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, A photodetector according to (14) or (15), wherein at least two of the plurality of reset transistors in the third semiconductor layer are arranged point-symmetrically with respect to the optical center as viewed from the incident direction of the light. (17) The light receiving element according to any one of (1) to (16), wherein at least two of the plurality of transfer gates transfer the accumulated signal charges to one of the floating diffusions. (18) The light-receiving element according to any one of (1) to (17), wherein one of the plurality of transfer gates transfers the accumulated signal charge to one of the floating diffusions. (19) The light-receiving element according to any one of (1) to (18) above, further comprising an on-chip lens disposed on the side of the photodiode on which the light is incident. (20) an on-chip lens disposed on a side of the photodiode on which the light is incident, and a scattering structure that scatters the light collected by the on-chip lens; The light receiving element according to any one of (1) to (19), wherein the light scattered by the scattering structure is incident on the photodiode. (twenty one) The light-receiving element according to (20), wherein the scattering structure has a shape such that a cross-sectional area decreases toward the photodiode. (twenty two) The light-receiving element according to (20), wherein the scattering structure has a shape such that a cross-sectional area decreases with increasing distance from the photodiode. (twenty three) The light receiving element according to any one of (1) to (22) above, wherein the configuration of one pixel is such that the light receiving element is arranged at least one of left-right symmetry and top-bottom symmetry with respect to one pixel, which is a minimum unit. (twenty four) With multiple grounds, The light-receiving element according to any one of (1) to (23), wherein at least two of the plurality of grounds are arranged in point symmetry with respect to the optical center when viewed from the incident direction of the light. (twenty five) Equipped with multiple power wiring, The light receiving element according to any one of (1) to (24), wherein at least two of the plurality of power supply wirings are arranged in point symmetry with respect to the optical center when viewed from the incident direction of the light. (26) Equipped with multiple power wiring, The light receiving element according to any one of (1) to (25), wherein at least two of the plurality of power supply wirings are arranged in point symmetry with respect to the optical center when viewed from the incident direction of the light. (27) An overflow gate that drains charges overflowing from the floating diffusion, and a ground, The light receiving element according to any one of (1) to (26), wherein the overflow gate is connected to the ground GND. (28) The light-receiving element according to any one of (1) to (27) above, further comprising a transfer electrode connecting the transfer gate and the photodiode. (29) An overflow gate that drains charge overflowing from the floating diffusion, and a photogate connected to the photodiode, The light receiving element according to any one of (1) to (28), wherein the overflow gate is connected to the photogate PG. (30) The light-receiving element according to (29) above, further comprising a transfer electrode connecting the photogate and the photodiode. (31) The light-receiving element according to any one of (1) to (30), wherein a plurality of the transfer gates are connected to one of the photodiodes. (32) a plurality of photogates coupled to the photodiodes; The light receiving element according to any one of (1) to (30), wherein a plurality of the photogates are connected to one of the photodiodes. (33) a plurality of photogates coupled to the photodiodes; The light receiving element according to any one of (1) to (32), wherein the plurality of photogates are arranged symmetrically on the left and right and above and below the one transfer gate as a reference when viewed from the incident direction of the light. (34) a first semiconductor layer including a plurality of transfer gates that distribute and transfer signal charges accumulated in a photodiode that photoelectrically converts incident light to a plurality of floating diffusions, and a plurality of overflow gates that discharge charges overflowing from the floating diffusions; a second semiconductor layer including a plurality of amplifying transistors that read out the signal charge transferred to the floating diffusion as an electric signal and amplify it, a plurality of reset transistors that turn on or off the discharge of the electric charge accumulated in the floating diffusion, and a plurality of selecting transistors that turn on or off the output of a voltage signal from the amplifying transistor; a capacitor having a portion disposed in the first semiconductor layer and a remaining portion disposed in the second semiconductor layer; the first semiconductor layer and the second semiconductor layer are stacked along the incident direction of the light, The light-receiving element according to any one of (1) to (33), wherein the capacitor is formed by sandwiching a high dielectric constant film between two electrodes and has a structure in which a flat plate is folded three-dimensionally. (35) a plurality of on-chip lenses disposed on a side of the photodiode where the light is incident; The light-receiving element according to any one of (1) to (34), wherein the number of the on-chip lenses is the same as the number of the transfer gates. (36) A distance measuring module comprising: a light receiving element as described in any one of (1) to (35); a light emitting unit that emits illumination light whose brightness varies periodically; and a light emission control unit that controls the illumination timing of the illumination light. [Explanation of symbols]

[0134] 1...distance measuring module, 2...light emitting unit, 4...light emitting control unit, 10...light receiving element, 10A...first semiconductor layer, 10B...second semiconductor layer, 10C...third semiconductor layer, 20...light shielding film, 30...on-chip lens, 40...anti-reflection layer, 12000...vehicle control system, 12001...communication network, 12010 drive control unit..., 12020...body control unit, 12030...exterior information detection unit, 12031 (12101 to 12105)...imaging unit, 12040...interior information detection unit, 12041...driver state detection unit, 12050...integrated control unit, 12051...microcomputer, 12052...audio / image output unit, 12053...vehicle network I / F, 12061...audio speaker, 12062. ..display unit, 12063...instrument panel, 12100...vehicle, 12111~12114...imaging range, PD...photodiode, FD...floating diffusion, TG...transfer gate, OFG...overflow gate, RST...reset transistor, AMP...amplification transistor, SEL...selection transistor, OPC...optical center, VDD...power supply wiring, VSL...vertical signal line, OBJ...object, MC...memory, PX...pixel, PXG...pixel group, GND...ground, SF...scattering structure, EC...charge, VG...transfer electrode, PG...photogate, MIM...capacitor, UE...upper electrode, DE...lower electrode, PM...high dielectric constant film, UT...upper terminal, DT...lower terminal, CR...light collection area

Claims

1. a first semiconductor layer including a plurality of transfer gates that distribute and transfer signal charges accumulated in a photodiode that photoelectrically converts incident light to a plurality of floating diffusions, and a plurality of overflow gates that discharge charges overflowing from the floating diffusions; a second semiconductor layer including a plurality of amplifying transistors that read out and amplify the signal charge transferred to the floating diffusion as an electric signal, a plurality of reset transistors that turn on or off the discharge of the charge accumulated in the floating diffusion, and a plurality of selecting transistors that turn on or off the output of a voltage signal from the amplifying transistor; the first semiconductor layer and the second semiconductor layer are stacked along the incident direction of the light, At least two of the plurality of transfer gates are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, At least two of the plurality of overflow gates are arranged point-symmetrically with respect to the optical center as viewed from the incident direction of the light, At least two of the plurality of amplification transistors are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, At least two of the plurality of reset transistors are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, At least two of the plurality of selection transistors are arranged in point symmetry with respect to an optical center of the light receiving element when viewed from the incident direction of the light.

2. the second semiconductor layer further includes a plurality of memories for storing the signal charges; 2. The light receiving element according to claim 1, wherein at least two of the plurality of memories are arranged point-symmetrically with respect to the optical center when viewed from the incident direction of the light.

3. a third semiconductor layer stacked on the first semiconductor layer and the second semiconductor layer along the incident direction of the light at a position farther from the first semiconductor layer than the second semiconductor layer; the third semiconductor layer includes a plurality of amplification transistors that read out and amplify the signal charge transferred to the floating diffusion as an electric signal, and a plurality of reset transistors that turn on or off the discharge of the charge accumulated in the floating diffusion; At least two of the plurality of amplification transistors included in the third semiconductor layer are arranged point-symmetrically with respect to an optical center as viewed from the incident direction of the light, 3. The light receiving element according to claim 2, wherein at least two of the plurality of reset transistors included in the third semiconductor layer are arranged point symmetrically with respect to an optical center as viewed from the incident direction of the light.

4. 2. The light receiving element according to claim 1, wherein the configuration of one pixel is arranged at least one of left-right symmetry and top-bottom symmetry with respect to one pixel which is a minimum unit.

5. The light receiving element according to claim 1 , further comprising a transfer electrode connecting the transfer gate and the photodiode.

6. 2. The light receiving element according to claim 1, wherein a plurality of the transfer gates are connected to one of the photodiodes.

7. a plurality of photogates coupled to the photodiodes; 2. The light receiving element according to claim 1, wherein a plurality of said photogates are connected to one of said photodiodes.

8. a plurality of photogates coupled to the photodiodes; 2. The light receiving element according to claim 1, wherein the photogates are arranged symmetrically in the left-right direction and the top-bottom direction with respect to one of the transfer gates when viewed from the direction in which the light is incident.

9. 2. The light-receiving element according to claim 1, wherein at least two of the plurality of transfer gates transfer the accumulated signal charges to one of the floating diffusions.

10. 2. The light-receiving element according to claim 1, wherein one of the plurality of transfer gates transfers the accumulated signal charge to one of the floating diffusions.

11. The light-receiving element according to claim 1 , further comprising an on-chip lens disposed on a side of the photodiode where the light is incident.

12. 13. A distance measuring module comprising: the light receiving element according to claim 1; a light emitting section for emitting irradiation light whose brightness varies periodically; and a light emission control section for controlling the irradiation timing of the irradiation light.

Images