Base Linkage System and Platform

Abstract

The purpose of the present invention is to provide a technology which enables data acquisition of only the necessary data, of disclosable data of a device group including semiconductor manufacturing devices other than those in the own base, by accessing another base from the own base.　This base cooperation system accesses, from a first base, a second base which is different from the first base where a first computer and a second computer are arranged, and acquires disclosed data in the second base. In the base cooperation system, an arrival route to the disclosed data is set by the first computer, communication to the disclosed data is permitted for an apparatus on the arrival route, the disclosed data is accessed by the second computer, a server in the first base has an area in which the disclosed data is stored, the disclosed data is copied to the area or is referred to by the second computer, and communication between the area and the bases other than the first base is prohibited by the first computer.

Description

Technical Field

[0001] The present invention relates to a base cooperation system and a platform.

Background Art

[0002] In the evaluation and manufacturing of a semiconductor manufacturing process, it is generally carried out by cooperation and division of labor among multiple bases. The progress management data or production data of a certain process of semiconductor manufacturing at a certain base is also confirmed at other bases and utilized to improve the operation rate and production rate. In order to carry out business cooperation among multiple bases in this way, it is necessary to share data among the bases. However, since these data are highly confidential data, they cannot be publicly disclosed on an external network. Mutual confirmation of data among bases requires security measures.

[0003] As a technology for viewing data from a remote location, Patent Document 1 discloses a system that monitors products deployed on a movable platform and distributes data related to the deployed products. The server and products deployed on the movable platform can communicate bidirectionally, and can be accessed from a remote location to remotely diagnose the above products or upload information to the server so that relevant personnel can view it.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Since Patent Document 1 centralizes data in a central server, it is not possible to share data whose disclosure is restricted at each site. In addition, it is necessary to select data that can be made public at each site, and if the selection is not carried out sufficiently, there is a risk of security exposure when uploading to the central server. Also, if all the data that can be made public as well as the data required by other sites are uploaded, a huge processing capacity is required of the central server to be able to handle the processing of a large amount of data.

[0006] As described above, in the prior art, there were problems such that data related to semiconductor manufacturing took time for data upload and download, and the server capacities were not uniform, and it was common to have a server managed at each site.

[0007] An object of the present invention is to provide a technology that enables access from its own site to only the necessary data of other sites and acquisition of data, for publicly available data of a group of devices including semiconductor manufacturing devices other than its own site.

Means for Solving the Problem

[0008] In order to solve the above problems, one of the representative site cooperation systems of the present invention is a site cooperation system for accessing from a first site where a first computer and a second computer are arranged to a second site different from the first site and acquiring the publicly available data of the second site, wherein the access path to the publicly available data is set by the first computer, communication to the publicly available data is permitted to the devices on the access path, the publicly available data is accessed by the second computer, the server within the first site has an area where the publicly available data is stored, the publicly available data is copied to the area or the publicly available data is referred to by the second computer, and communication between a site other than the first site and the area is prohibited by the first computer.

Effect of the Invention

[0009] According to the present invention, it is possible to access only necessary data from a home base to other bases and acquire data of public data of a group of devices including semiconductor manufacturing devices other than the home base. Problems, configurations, and effects other than those described above will be clarified by the description in the following embodiments for implementation.

Brief Description of the Drawings

[0010]

Figure 1

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Embodiments for Carrying Out the Invention

[0011] In the present disclosure, "base" refers to a location where predetermined activities are performed. For example, in the case of a "production base", it means a location where facilities such as production equipment are available and production and related activities can be performed. Specific examples of bases include business offices, research institutes, production factories, etc. of a company. In addition, "access" refers to reaching the information possessed by an object and acquiring the information.

[0012] The base cooperation system according to the present invention has a platform including a communication network among a gateway computer 102 having a data collection program, a data path setting computer 103, and various databases (a server 104, a mirror server 105 of base B, and a database provided in a mirror server 109 of base C).

[0013] [Example 1] Hereinafter, Example 1 of the present invention will be described with reference to FIG. 1. FIG. 1 is a diagram showing the configuration of a base cooperation system 1 using a group of devices including a semiconductor manufacturing apparatus and a platform. In the base cooperation system 1, a first computer (hereinafter, also referred to as a "data path setting computer") and a second computer (hereinafter, also referred to as a "gateway computer") access a second base different from the first base from a first base and acquire publicly available data (hereinafter, also referred to as "public data") of the second base. The gateway computer functions as an access computer that enables access to bases other than the base having the communication network including the gateway computer. Further, the platform includes a first computer in the first base, a second computer in the first base, and a server in the first base, and accesses a second base different from the first base to acquire publicly available data of the second base. Hereinafter, the configuration of the system will be described.

[0014] (Configuration of the system) System 1 includes base A to base C. Base A has a communication network 10. Base B has a communication network 11. Base C has a communication network 12. The communication networks 10 to 12 are independent communication networks limited within the range of each base, and in principle, communication is limited within the communication network at each base. Also, the first base is connected to the second base and the third base via a network. In the following description, the first base is base A, and the second base is BaseIt is B, and the third base is described as base C, but the present disclosure is not limited thereto. It is also possible that the first base is base A, the second base is base C, and the third base is base B. Specifically, the Internet 107 and 117 are provided between base A and base B. The Internet 117 and 127 are provided between base B and base C. The Internet 107 and Internet 127 are provided between base A and base C. The Internet is shown as an example of a network, and the present disclosure is not limited to the Internet. It is possible to appropriately select from among communication means and apply it as the network of the present disclosure.

[0015] In the communication network 10 at base A, the user computer 100 within base A, the semiconductor manufacturing line computer group 101, the gateway computer 102, the data path setting computer 103, the server 104, the mirror server 105 of base B, and the mirror server 109 of base C are connected so that communication is possible among them. Among these, the communication network formed by the gateway computer 102, the data path setting computer 103, the server 104, the mirror server 105 of base B, and the mirror server 109 of base C is called the platform 108. Also, in the communication network 11 at base B, the user computer 110 within base B, the semiconductor manufacturing line computer group 111, the gateway computer 112, the data path setting computer 113, the server 114, the mirror server 115 of base A, and the mirror server 119 of base C are connected so that communication is possible among them. Among these, the communication network formed by the gateway computer 112, the data path setting computer 113, the server 114, the mirror server 115 of base A, and the mirror server 119 of base C is called the platform 118. In the communication network 12 at the base C, the in-base C user computer 120, the gateway computer 122, the data path setting computer 123, the server 124, the mirror server 125 of the base A, and the mirror server 129 of the base B are connected so that communication is possible among them. Among these, the communication network formed by the gateway computer 122, the data path setting computer 123, the server 124, the mirror server 125 of the base A, and the mirror server 129 of the base B is called the platform 128. In the following description, the description of common configurations may be omitted.

[0016] The in-base A user computer 100 is connected to devices within the communication network 10 of the base A. Users at the base A can use the in-base A user computer 100 to access semiconductor manufacturing devices and servers within the base A.

[0017] The first base or the second base has a group of devices including semiconductor manufacturing devices, semiconductor inspection devices, or semiconductor measurement devices. Specifically, the semiconductor manufacturing line computer group 101 controls, for example, semiconductor manufacturing devices and the like that constitute the manufacturing line within a semiconductor manufacturing factory when there is a semiconductor manufacturing factory at the base A. The semiconductor manufacturing line computer group 101 controls the semiconductor manufacturing devices based on process sequences and processing recipes regarding control parameters, and acquires data indicating the results of the processing performed by the semiconductor manufacturing devices. The acquired data is sent to the server 104 via the gateway computer 102. Details will be described later. In Example 1, a manufacturing line including an etching device in particular will be described as the semiconductor manufacturing line. Also, the semiconductor manufacturing line computer group 10 1 is not limited to the case of being composed of a plurality of computers. The semiconductor manufacturing line computer group 10 1 can also be composed of a single computer.

[0018] In addition, the server within the base stores the device ID and the file extension of the output data as a device master. Specifically, the semiconductor manufacturing line computer group 101 assigns a device ID to each semiconductor manufacturing device, associates the file extension of the output data output from the semiconductor manufacturing device with each device ID for management, and stores it in the server 104 as a device master. Examples of the file extension include ".txt" indicating text data, ".gif" indicating image data, ".csv" indicating a csv file, and the like.

[0019] Note that the semiconductor manufacturing line includes at least one device among a semiconductor manufacturing device, a semiconductor inspection device, and a semiconductor measurement device. In at least one of the plurality of bases, a device group including at least one device among a semiconductor manufacturing device, a semiconductor inspection device, and a semiconductor measurement device is set. In addition to the etching device, the semiconductor manufacturing device may include a plasma CVD device, an ashing device, a surface modification device, and the like. Note that the base A is assumed to be a semiconductor manufacturing factory, but the present disclosure is not limited thereto. It may be a development line or a trial production line.

[0020] The gateway computer 102 has a function of relaying data exchange between the user computer 100 within the base A and the semiconductor manufacturing line computer group 101 and the server group (server 104, mirror server 105 of base B, mirror server 109 of base C). The gateway computer 102 has a data collection program that refers to the device master and collects only the data in which the device ID and the data extension associated with the device ID shown in the device master match from the semiconductor manufacturing line computer group 101. When there is a request to access the semiconductor manufacturing line computer group 101 from the user computer 100 within the base A, the gateway computer 102 acquires data from the semiconductor manufacturing line computer group 101 based on the data collection program.

[0021] Also, when accessing the server group (server 104, mirror server 105 at site B, mirror server 109 at site C), the gateway computer 102 permits access to the server group based on the user ID etc. specified by the user computer 100 within site A.

[0022] When the route setting computer 103 connects to the communication network 11 at site B or the communication network 12 at site C to acquire data, the gateway computer sets the reachable route, which is the route to the public data in the servers within each site. Also, communication to the public data is permitted for the devices on the reachable route, and the route setting computer 103 adds the gateway computer 102 to the public range of the public data. As a result, the public data is accessed by the gateway computer 102. In the site cooperation system 1, data acquisition may be permitted between the communication network 10 and the communication network 12. The route setting computer 103 manages data acquisition between communication networks. Details of the functions of the route setting computer 103 will be described later.

[0023] The server 104 presents data in response to the request from the user computer 100 within site A. Also, the server 104 stores the data sent from the device master and the semiconductor manufacturing line computer group 101. Although an example where the server 104 is constituted by one device is shown, the present disclosure is not limited to this. The server may be separated into a database server, an application server, a WEB server, etc. for each function.

[0024] The mirror server 105 at site B is basically a server having the same functions and data as the functions and data of the server 114 at site B. Also, the mirror server 109 at site C is basically a server having the same functions and data as the functions and data of the server 124 at site C.

[0025] In this way, the mirror server within base A has an area where public data of bases other than base A is stored within base A. Note that although the mirror server 105 of base B and the mirror server 109 of base C are described as separate servers, the present disclosure is not limited to this. The mirror server may be a single server. Also, the server 104, the mirror server 105 of base B, and the mirror server 109 of base C may be configured by a single server. It is also possible to adopt a configuration in which an area for storing data as the server 104, an area for storing data as the mirror server 105 of base B, and an area for storing data as the mirror server 109 of base C are respectively provided within a single server. Further, the data stored in the servers (server 104, mirror server 105 of base B, mirror server 109 of base C) within the first base includes data collected from the device group or data obtained by processing the data collected from the device group.

[0026] The communication network 11 in base B has the same configuration as the communication network 10 in base A.

[0027] Also, the communication network 12 in base C has the same configuration as the communication network 10 in base A, except that it does not have a configuration corresponding to the semiconductor manufacturing line computer group 101. Base C is assumed to be, for example, a research institute without a manufacturing line or a design center for performing designs.

[0028] The communication network 10 in base A, the communication network 11 in base B, and the communication network 12 in base C are each independent communication networks. On the other hand, the remote monitor 106 and the off-site user computer 121 can communicate with the communication network 10 via the Internet 107. Also, the remote monitor 106 and the off-site user computer 121 can communicate with the communication network 1 1 and can communicate with it. Also, the remote monitor 106 and the off-site user computer 121 can communicate with the communication network 12 via the Internet 127.

[0029] (When acquiring data at the home base) At site A, the processing recipe for performing the etching process is input to and executed by the semiconductor manufacturing line computer group 101. After execution, the command values according to the content of the recipe are transmitted to each device within the etching apparatus, and the etching process is performed. The processing recipe for which the etching process has been implemented is stored in the semiconductor manufacturing line computer group 101.

[0030] The etched wafer is transported to a semiconductor inspection apparatus, a semiconductor analysis apparatus, or a semiconductor analysis device, and each measurement recipe is input to the semiconductor manufacturing line computer group 101 to perform predetermined measurements. The data indicating the measured results is stored in the semiconductor manufacturing line computer group 101.

[0031] The data path setting computer 103 determines the accessibility of data including the processing recipe and measurement results stored in the semiconductor manufacturing line computer group 101, and defines the data flow (routing). For example, the data path setting computer 103 selects public data and non-public data from the data stored in the server 104. Public data is data that is to be made public when there is a request from a device outside site A. Devices outside site A are, for example, the user computer 110 within site B and the user computer 120 within site C. Note that it is also possible to say that public data is data that can be accessed by a request from a device other than the gateway computer. Also, non-public data is data for which public disclosure is prohibited when there is a request from a device outside site A.

[0032] Note that the method of setting public data or non-public data is not limited to this. For example, it is also possible to set non-public data to be made public only upon request from the gateway computer 112 of site A and the gateway computer 122 of site B.

[0033] In addition, the data path setting computer 103 performs routing to define the data path. For public data, it defines the path through which data is transmitted when there is a request from the communication network 11 and the communication network 12. For example, the data path setting computer 103 can permit the gateway computers 112 and 122 to access the communication network 10. For non-public data, the data path may be selected by the user, or the data path setting computer 103 can dynamically select the path.

[0034] The gateway computer 102 executes a data collection program, accesses the device master, and acquires data permitted by the device master from the device group. The permitted data is stored in the server 104 within the base A. The gateway computer 102 executes the built-in data collection program and accesses the semiconductor manufacturing line computer group 101 according to the defined data path to collect data of the semiconductor manufacturing equipment. The collected data is stored in the server 104.

[0035] The server 104 manages the data collected by the gateway computer 102 by separating it into public data and non-public data. The management method is not limited to public data and non-public data. The management method may be separated by category or level within the database owned by the server 104. For example, as categories, it is assumed to be for each device such as semiconductor manufacturing equipment, semiconductor inspection equipment, semiconductor analysis equipment, semiconductor analysis apparatus, for each lot of the production line, etc. Also, as levels, it is assumed to separately provide an information management level such as limiting users who can access even non-public data within the base A for etching.

[0036] In addition, the server 104 registers authentication information to log in to the platform 108. The server 104 receives the user's input via the user computer 100 within the base A, registers the user ID and password, and performs authentication at the time of login.

[0037] The user logs in from the user computer 100 within base A to the platform 108 based on authentication information, and selects a device ID or file extension registered in the device master within the platform. The server 104 presents the data specified by the designated device ID or file extension to the user.

[0038] As described above, within base A, the user can acquire data (public data and non-public data) within base A via the user computer 100 within base A. When acquiring data in base B via the user computer 110 within base B, or when acquiring data in base C via the user computer 120 within base C, it is also possible to perform in the same manner as in the case of base A.

[0039] (When acquiring public data of other bases) The server 104 registers the user IDs and passwords of the gateway computers 112 and 122 as authentication information for logging in to the platform 108. Also, the server 114 registers the user IDs and passwords of the gateway computers 102 and 122 as authentication information for logging in to the platform 118. Also, the server 124 registers the user IDs and passwords of the gateway computers 102 and 112 as authentication information for logging in to the platform 128.

[0040] For example, when the gateway computer 102 at site A accesses the platform 118 at site B, even when obtaining data classified as public data at site B, the user ID and password of the gateway computer 102 at site A need to be registered on the platform 118 at site B. In other words, when the gateway computer 102 accesses the server 114 within site B, the authentication information of the platform 118 having the server within site B is required. For example, when there is a request for the gateway computer 112 at site B to access the public data within site B, if the authentication information at the time of the request matches the registered authentication information, the public data is allowed to be accessed from site B to site A based on the request. By using the authentication information of the gateway computer of another site for login on the platform of a certain site in this way, since the accessible path from outside the communication network is limited to passing through the gateway computer, it becomes possible to prevent unauthorized access to the data within the platform from the external network.

[0041] Specifically, the case of enabling data to be acquired by an external user will be described. For example, when acquiring the public data of site B from site A, the data path setting computer 113 of site B sets the gateway computer 102 of site A in the public range of the public data in the server 114 of site B.

[0042] The gateway computer 102 has a file copy program by which the gateway computer 102 copies to the area where the public data is stored or references the public data. The gateway computer 102 at site A passes the authentication of the platform 118 via the Internet 107 and accesses the server 114 at site B. The gateway computer 102 executes the program to copy or reference and acquire the public data of site B.

[0043] The publicly available data of the obtained Site B passes the authentication of the platform 108 of Site A and is stored in the mirror server 105 of Site B. In addition, communication between a site other than the first site and the area where the publicly available data of the servers within the first site is stored is prohibited by the data path setting computer within the first site. Specifically, the mirror server 105 of Site B is prohibited from communicating outside Site A by the data path setting computer 103. By doing so, the obtained publicly available data is handled only within Site A, and it becomes possible to view and edit the publicly available data of Site B stored in the mirror server 105 of Site B at Site A.

[0044] In other sites including Site B and Site C where there is no device, a system similar to that of Site A is introduced, and the publicly available data of other sites can be obtained without security risks and can be viewed and edited.

[0045] Note that the scope of disclosure of the publicly available data can be set to the gateway computers of multiple sites, or can be set to only the gateway computer at a specific site.

[0046] (Modification Example of Example 1) Even when there is a request from a device not included in the communication network of the site, it is also possible to permit access to the platform. For example, the server 104 registers the user ID and password of the remote monitor 10 6 and and the off-site user computer 121 as authentication information for logging in to the platform 108. The gateway computer 102 can also cause the various servers within the platform 108 to acquire data when there is a request from the remote monitor 106 and the off-site user computer 121.

[0047] (Function and Effect) In Example 1, the path setting computer selects public data and non-public data, and the data uploaded from a certain base to the mirror server of another base is limited. Since the amount of data to be uploaded is suppressed, it is possible to utilize the data obtained at another base at another base while suppressing the processing capacity of the mirror server. Also, when there is a request for data acquisition from outside the own base, only access through the gateway computer is permitted. Since access to data is prohibited for requests from devices without registered authentication information, it is possible to suppress security risks.

[0048] [Example 2] Example 2 of the present invention will be described with reference to FIG. 2. FIG. 2 is a diagram showing the flow of a user performing work in the base cooperation system 1 of FIG. 1. It is an example when the administrator A of base A gives an instruction to the administrator B of base B.

[0049] First, in base B, the administrator B gives an instruction for semiconductor processing to the operator (step S21). The operator inputs the operating conditions of the semiconductor manufacturing apparatus into the semiconductor manufacturing line computer group 111 based on the instruction and performs semiconductor processing (step S22), and acquires raw data (data before editing, original data) indicating the result of the processing (step S23). The raw data is acquired by the semiconductor manufacturing line computer group 111 and set as public data or non-public data by the path setting computer 113.

[0050] The raw data is, for example, secondarily processed by the server 114 and processed into a form that can be read by a BI (Business Intelligence) tool. The processed data may include text data such as a weekly report indicating the operator's impressions. The processed data is read into a BI tool provided by, for example, the server 114 in response to a user request obtained via the in-base B user computer 110 and converted into visualized data such as a graph (step S25).

[0051] Subsequently, business progress management indicators are extracted from the visualized data. For example, the business progress management indicators are extracted from the visualized data by Administrator B who has received the presentation of the visualized data, or the progress management indicators are derived by an analysis application including AI provided by Server 114 (step S26).

[0052] The route setting computer 113 selects the data including the progress management indicators as public data and sets the gateway computer 102 of Site A in the public range. The data including the progress management indicators is acquired by the gateway computer 102 and recorded in the mirror server 105 of Site B. Administrator A browses the progress management indicators using the user computer 100 within Site A to grasp the progress of the business (step S27). If there is a problem with the progress of the business, Administrator A issues an instruction to Administrator B again based on the progress management indicators (step S28).

[0053] (Function and Effect) Among the data acquired at Site B, the data including the progress management indicators is selected as public data. The data including the progress management indicators has a compressed data size compared to the raw data. Since the amount of data uploaded to the mirror server 105 of Site B can be suppressed, it is possible to utilize the data obtained at other sites at another site while suppressing the processing capacity of the mirror server. In addition, since the progress management indicators can be confirmed at other sites, it is possible for the administrator of a certain site to manage the progress of other sites.

[0054] [Example 3] FIG. 3 is a diagram showing an example when an etching demonstration to a customer is performed using the site cooperation system within the flowchart of FIG. 2. It shows the types of progress management indicators derived from public data and examples of utilization of the progress management indicators.

[0055] In addition to raw data obtained from semiconductor manufacturing equipment, various types of data are utilized, such as data obtained by processing raw data, visualized data, and statistical data obtained by statistically processing raw data and processed data to show the characteristics of semiconductor manufacturing lines at sites. Examples of these uses are explained below.

[0056] As public data, the number of customer demonstrations of etching ("Number of Demonstrations" in the figure) and the types of demonstrations ("Type of Demonstration" in the figure) are counted based on login information using applications (hereinafter also referred to as "apps"). This derives the number of times an app is used by each user as a progress management indicator. By viewing this number of times an app is used, it is possible to check whether work is concentrated on a particular user, and if so, to review the allocation of work. Note that a customer demonstration refers to semiconductor manufacturing carried out at the request of a customer such as a device manufacturer. Note that the number of demonstrations and the types of demonstrations can be extracted based on, for example, the operation history of the semiconductor manufacturing line computers. For example, a user who operates the semiconductor manufacturing line computers 101 may have accessed the user computer 10 in base A. 0 and acquires data output from the semiconductor manufacturing line computer group 101. Therefore, by associating the number of demonstrations and the type of demonstration with the login information, it becomes possible to grasp the workload of each user.

[0057] In addition, the published data includes the specification values ​​desired by the customer, the current specification values ​​after the demonstration ("current value" in the figure), and the demonstration history, and the progress level is calculated, which indicates the progress ratio of the current specification values ​​to the specification values ​​desired by the customer. This progress level makes it possible to analyze unachieved parts and extract problems that are preventing the demonstration. The specification values ​​desired by the customer are stored in server 104 by user computer 100 in site A, for example. In addition, the current specification values ​​after the demonstration can be values ​​based on data indicating the results output from a semiconductor analysis device or semiconductor analysis equipment, for example.

[0058] Also, identify the state of the demonstration machine as public data, and link the state of the demonstration machine when abnormal data occurs in chronological order from the state of the demonstration machine. As a result, the state of the demonstration machine when abnormal data occurs can be identified, and the cause of the abnormality can be identified. The demonstration machine is connected to a semiconductor manufacturing line computer group, and data monitoring the operating status of the demonstration machine is obtained by the semiconductor manufacturing line computer Group .

[0059] Also, count the people who are work resources and the items that are demonstration resources as public data, and calculate the resource ratio for the business. As a result, resource adjustment becomes possible. Regarding human resources, for example, it can be calculated from the operation history of the semiconductor manufacturing line computer group and the login history of the user computer 100 within base A. Also, regarding material resources, for example, it is possible to calculate the consumption amount of materials by grasping the operation of the semiconductor manufacturing apparatus from the data output from the semiconductor manufacturing line computer group.

[0060] Also, analyze information (customers, other companies) as public data and count the number of weekly report keywords. As a result, it can be determined that a demonstration regarding specific frequently occurring keywords is important. Information regarding customers and other companies is attached to, for example, the processing recipe when conducting a customer demonstration. Collect information regarding customers and other companies in the server 104, and count the number of times this information regarding customers and other companies appears in the weekly report.

[0061] Also, adopt common data such as the etching rate of a single-layer film wafer ("solid wafer rate" in the figure) as public data. Here, collect and analyze the solid wafer rate regarding the components commonly included in the customer's wafers. As a progress management index, for example, the uniformity of the etching rate is calculated. As a result, it becomes possible to identify the cause of the yield deterioration. The common data can be extracted, for example, in the semiconductor manufacturing line computer group using specific manufacturing conditions as a key.

[0062] Also, analyze the schedule as public data to identify the current position of the customer's device release (e.g., scheduled release). This enables the detection of demos that are likely to be delayed. For example, the schedule allows the user to store a schedule including deadlines in server 104. Server 104 calculates the scheduled end time of the demonstration based on the remaining number of processing recipes and the scheduled execution time of the processing recipes in the semiconductor manufacturing line computer group 101, and presents a comparison with the schedule.

[0063] (Function and effect) By extracting progress management indicators from public data in the customer demonstration, it becomes possible to address problems that may occur during the customer demonstration.

[0064] [Example 4] FIG. 4 shows a flowchart when using a BI tool to derive the progress management indicator of FIG. 3 from public data.

[0065] First, the server at each site collects data on semiconductor devices. The server periodically outputs and saves a tsv file containing various device information from the semiconductor manufacturing line computer group via the gateway computer (step S41).

[0066] After that, the server edits the above tsv file (step S42). The server processes the information including changes over time by merging the periodically acquired files vertically. The server causes the BI tool to read the processed information (step S43). When there are multiple types of files, a relationship is constructed and the respective data are linked by linking columns common to each file to create a relation (step S44). Since it may be difficult to link depending on the type of graph, a new table is created on the BI tool as necessary (step S45). The linked data or the new table is read, and a graph is created (step S46). When a new tsv file is generated, the server adds it to the existing file, causes the BI tool to read it, and the graph data is updated (step S47). By editing and importing the updated data, a progress management index is derived (step S48). By repeating this operation (from step S46 to step S4 8 is repeated), the graph is updated, and a progress management index is extracted from the updated graph.

[0067] (Function and Effect) By causing the server to provide a BI tool, when there is progress in the semiconductor manufacturing line, it becomes possible to update the progress management index and present it to the user. Since the user can grasp the change in the progress management index, it becomes possible to allocate tasks within the base and between bases in real time (immediately).

[0068] [Example 5] FIG. 5 is a diagram showing details of data processing until a progress management index is extracted. Communication network 10 from 12 are each an independent communication network, and basically are so-called closed networks that cannot be directly accessed from outside the communication network. Here, communication network 10 from 12It is shown as a closed network 130 and the details of data processing are described. From server A to server C in FIG. 5, for example, server 104 at site A, mirror server 105 at site B, and mirror server 109 at site C are assumed.

[0069] In FIG. 5, in the closed network 130, it is shown that a server on the closed network is connected to a semiconductor manufacturing apparatus and can collect information such as the state and settings of the apparatus and output it to the user.

[0070] Server A outputs data 1 and data 2, server B outputs data 3 and data 4, and server C outputs data 5. The collection of data from data 1 to data 5 is called output data file 131. After the data of the output data file 131 from the server is read into the BI tool, statistical processing, data processing, processing methods by AI, and data processing of data set 137 such as the results after processing are executed on the data table recognized on the BI tool, and visualization and data analysis are performed.

[0071] Note that although data tables A132 to E136 are given as examples of data processing, various processes can be realized by creating a program script.

[0072] The data table A132 created from the output data file 131 read onto the BI tool represents a case where each of the data 1 to data 5 is used individually. Also, the new data table B133 created by combining a part of data 2 with data 1 shows a case where, for data 1, a part that does not exist in data 1 but exists in data 2 is added to create new data 1'.

[0073] Also, the new data table C134 created by partially combining existing data files shows the creation of new data 6.

[0074] In addition, the program script on the BI tool and the data table D135, which is the result of statistically processing or processing data thereby, show how to process each data with the program script of statistical processing and data processing set in advance in the BI tool. As a result, it becomes possible to generate and analyze new data.

[0075] In addition, as a method of performing AI processing, discriminating the tendency of the above-described data, and extracting abnormal points, a data table E136 is shown.

[0076] The BI tool 138 receives the above data tables and visualizes them, and for example, graphs and tables on the progress management screen 140 presented by the server can be obtained.

[0077] (Function and Effect) Since the BI tool is software that operates on a server or a personal computer, the device on which the BI tool operates exists on the Internet 139, and is in a state where it is possible to access the data file output by the server on the closed network 130. Therefore, information within the closed network can be analyzed by utilizing external information via the Internet. In addition, by interposing AI, various information analyses such as information merging and tendency extraction become possible. For example, in-site user computers, remote monitors, and out-of-site user computers can use the BI tool.

[0078] [Example 6] Example 6 is different from the base cooperation system 1 of Example 1 (FIG. 1) in that the configurations of the server and the mirror server are changed. In the following description, the points different from Example 1 will be described, and the same or equivalent components as those in Example 1 described above will be given the same reference numerals, and the description thereof will be simplified or omitted.

[0079] FIG. 6 is a diagram showing differences in the configurations of the server and the mirror server with respect to the base cooperation system of FIG. 1. The non - sharable server 150 and the sharable server 152 in the base cooperation system 1a of FIG. 6 correspond to the server 104 in the base cooperation system of FIG. 1. The non - sharable server 160 and the sharable server 162 in the base cooperation system 1a of FIG. 6 correspond to the server 114 in the base cooperation system of FIG. 1. The non - sharable server 170 and the sharable server 172 in the base cooperation system 1a of FIG. 6 correspond to the server 124 in the base cooperation system of FIG. 1.

[0080] The network within the platform at the second base is divided into a first network (hereinafter, also referred to as the "intra - base Public environment") that can communicate with entities outside the second base and a second network (hereinafter, also referred to as the "intra - base Private environment") that cannot communicate with entities outside the second base. Specifically, in Base A, within the platform 108, an environment divided into an intra - base private environment 155 and an intra - base public environment 156 is set. The intra - base private environment 155 is an environment that cannot communicate with entities outside Base A, and the intra - base public environment 156 is an environment that can communicate with entities outside Base A. Similarly, in Base B, within the platform 118, it is divided into an intra - base private environment 165 and an intra - base public environment 166. In Base C, within the platform 128, it is divided into an intra - base private environment 175 and an intra - base public environment 176.

[0081] In the intra - base private environment 155, a non - sharable server 150, which is a server for storing data that is not sharable with the outside of Base A, and a non - sharable mirror server 151, which is a mirror server for storing data that is not sharable with the outside of Base A among the data acquired from Base B and Base C, are arranged. The non - sharable server 150 and the non - sharable mirror server 151 are prohibited from external access by the data path setting computer 103, ensuring the confidentiality and security of the stored data.

[0082] The disclosed data is stored in a database connected to the first network, and the disclosed data stored in the database connected to the first network is stored in a database connected to the cloud network. Specifically, in the on-site public environment 156, a shareable server 152, which is a server for storing data (e.g., public data) that can be shared with the outside of Site A, and a shareable mirror server 153, which is a mirror server for storing data that can be shared with the outside of Site A among the data obtained from Site B and Site C, are arranged. The shareable server 152 and the shareable mirror server 153 are permitted to communicate with the outside of Site A by the data path setting computer 103, and the gateway computer 102 can upload data that can be supplied to the inter-site common cloud environment 184 that connects between multiple sites via the Internet 154.

[0083] The non-shareable server 160, non-shareable mirror server 161, shareable server 162, and shareable mirror server 163 in Site B, and the non-shareable server 170, non-shareable mirror server 171, shareable server 172, and shareable mirror server 173 in Site C have the same system configuration as the non-shareable server 150, non-shareable mirror server 151, shareable server 152, and shareable mirror server 153 in Site A, respectively. The shareable data stored in the shareable server 162 and shareable mirror server 163 in Site B can be uploaded to the inter-site common cloud environment 184 via the Internet 164. The shareable data stored in the shareable server 172 and shareable mirror server 173 in Site C can be uploaded to the inter-site common cloud environment 184 via the Internet 174.

[0084] In addition, the gateway computer 102 has a file copy program that stores sharable data in a database in the inter-site common cloud environment 184. By executing this program, in the inter-site common cloud environment 184, the sharable data uploaded from each site is stored in the database within the cloud server 180, and the remote monitor 182 can access the data stored in the cloud server 180.

[0085] Also, it is possible to place a visualization tool or data analysis application 183 in the inter-site common cloud environment 184 and utilize it for the progress management of the site cooperation system 1a. The visualization tool or data analysis application 183 inputs public data, and based on the public data, the progress of semiconductor device manufacturing is visualized or analyzed.

[0086] (Function and Effect) By storing highly confidential data in a non-sharable area outside the site as described above, a private network environment (non-public) can be constructed. Also, since the private environment cannot communicate with the outside of the site, for example, it is possible to prevent highly confidential customer data and the like from leaking outside the site.

[0087] In addition, in the in-site private environment, there is no unnecessary access from the outside and the access volume can be managed, so it is possible to keep the communication speed and stability constant. To ensure the security of highly confidential data, separating the environment that can be accessed from the outside and the environment that cannot be accessed from the outside is expected to have various applications. For example, if a manufacturing site of a semiconductor manufacturer is one of the components of the site cooperation system 1a, when providing public data to be sharable to customer sides such as trading companies and industrial equipment manufacturers, by using the big data held by the customer side and the public data as input conditions for Examples 1 to 5, it becomes possible to provide feedback to the manufacturing progress management on the manufacturing manufacturer side.

[0088] In addition, by using the visualization tool or data analysis application 183, it is possible to compare the data between the bases. As a result, the administrator can manage the progress between the bases via the remote monitor 182 and issue instructions to each base. Also, people outside the base can manage the progress.

[0089] In the above embodiments, a computer was used for the description, but a virtual area, server, or mobile terminal may be used instead of a computer terminal. Also, regarding the communication method in the communication network within the base, communication methods such as SMB communication, FTP communication, and NFS communication can also be adopted. In addition, a computer can also be applied to the remote monitor.

[0090] In the above embodiments, an etching apparatus was described as an example of the semiconductor manufacturing apparatus, but the same operational effects are also present for other manufacturing apparatuses, such as a plasma CVD apparatus, an ashing apparatus, a surface modification apparatus, etc.

[0091] As described above, the embodiments of the present invention have been described, but the present invention is not limited to the above-described embodiments, and various modifications are possible without departing from the gist of the present invention.

[0092] [Other aspects] Aspects that can be the content of the present invention are described below, but are not limited thereto. (Aspect 1) In a base cooperation system that accesses a second base different from the first base where a first computer and a second computer are arranged to obtain the publicly available data of the second base, The access route to the publicly available data is set by the first computer, Communication to the publicly available data is permitted to the devices on the access route, The publicly available data is accessed by the second computer, The server within the first base has an area where the publicly available data is stored, The second computer copies the published data to the area or references the published data. A base cooperation system, characterized in that communication between a base other than the first base and the area is prohibited by the first computer. (Aspect 2) In the base cooperation system according to Aspect 1, The first base is connected to the second base and the third base via a network. A base cooperation system characterized by this. (Aspect 3) In the base cooperation system according to Aspect 1 or 2, The first base is Base A, The second base is Base B, The third base is Base C. A base cooperation system characterized by this. (Aspect 4) In the base cooperation system according to any one of Aspects 1 to 3, The first base is Base A, The second base is Base C, The third base is Base B. A base cooperation system characterized by this. (Aspect 5) In the base cooperation system according to any one of Aspects 1 to 4, The network within the platform at the second base is divided into a first network that can communicate with entities other than the second base and a second network that cannot communicate with entities other than the second base. The published data is stored in a database connected to the first network. The published data stored in the database connected to the first network isク A base cooperation system, characterized in that it is stored in a database connected to the network of Loud. (Aspect 6) In the base cooperation system according to any one of Aspects 1 to 5, The first base or the second base is a base cooperation system characterized in that a group of devices including a semiconductor manufacturing apparatus, a semiconductor inspection apparatus, or a semiconductor measurement apparatus is arranged therein. (Aspect 7) In the base cooperation system according to any one of Aspects 1 to 6, The data stored in the server in the first base includes data collected from the group of devices or data obtained by processing the data collected from the group of devices. The base cooperation system is characterized by this. (Aspect 8) In the base cooperation system according to any one of Aspects 1 to 7, When the second computer accesses the server in the second base, authentication information of the platform including the server in the second base is required. The base cooperation system is characterized by this. (Aspect 9) In the base cooperation system according to any one of Aspects 1 to 8, In the server in the second base, the device ID and the file extension of the output data are stored as a device master, The second computer acquires data permitted by the device master from the group of devices, The base cooperation system is characterized in that the permitted data is stored in the server in the first base. (Aspect 10) In the base cooperation system according to any one of Aspects 1 to 9, The base cooperation system is characterized in that the progress of semiconductor device manufacturing is visualized or analyzed based on the published data. (Aspect 11) In a platform including a first computer in a first base, a second computer in the first base, and a server in the first base, accessing a second base different from the first base from the first base to acquire published data of the second base, The access route to the published data is set by the first computer, Communication to the publicly disclosed data is permitted to the devices on the reach path, the publicly disclosed data is accessed by the second computer, the server has an area where the publicly disclosed data is stored, the publicly disclosed data is copied to the area or the publicly disclosed data is referenced by the second computer, A platform characterized in that communication between bases other than the first base and the area is prohibited by the first computer. (Aspect 12) In the platform according to Aspect 11, A platform characterized in that the first base is connected to the second base and the third base via a network. (Aspect 13) In the platform according to Aspect 11 or 12, the first base is Base A, the second base is Base B, A platform characterized in that the third base is Base C. (Aspect 14) In the platform according to any one of Aspects 11 to 13, the first base is Base A, the second base is Base C, A platform characterized in that the third base is Base B.

Explanation of Signs

[0093] 1. 1a: Base Linkage System, 10 - 12: Communication Network, 100: User Computer within Base A, 101: Group of Semiconductor Manufacturing Line Computers, 102: Gateway Computer, 103: Data Route Setting Computer, 104: Server, 105: Mirror Server of Base B, 106: Remote Monitor, 107: Internet, 108: Platform, 109: Mirror Server of Base C, 110: User Computer within Base B, 111: Group of Semiconductor Manufacturing Line Computers, 112: Gateway Computer, 113: Data Route Setting Computer, 114: Server, 115: Mirror Server of Base A, 117: Internet, 118: Platform, 119: Mirror Server of Base C, 120: User Computer within Base C, 121: External User Computer, 122: Gateway Computer, 123: Data Route Setting Computer, 124: Server, 125: Mirror Server of Base A, 127: Internet, 128: Platform, 129: Mirror Server of Base B, 130: Closed Network, 131: Output Data File, 132: Data Table A, 133: Data Table B, 134: Data Table C, 135: Data Table D, 136: Data Table E, 137: Data Set, 138: BI Tool, 139: Internet, 140: Progress Management Screen, 150: Non - Shareable Server, 151: Non - Shareable Mirror Server, 152: Shareable Server, 153: Shareable Mirror Server, 154: Internet, 155: Private Environment within the Base, 156: Public Environment within the Base, 160: Non - Shareable Server, 161: Non - Shareable Mirror Server, 162: Shareable Server, 163: Shareable Mirror Server, 164: Internet, 165: Private Environment of Base B, 166: Public Environment of Base B, 170: Non - Shareable Server, 171: Non - Shareable Mirror Server, 172: Shareable Server, 173: Shareable Mirror Server, 174: Internet, 175: Private Environment of Base C, 176: Public Environment of Base C, 180: Cloud Server, 182: Remote Monitor, 183: Visualization Tool or Data Analysis Application, 184: Common Cloud Environment between Bases

Claims

1. In a site cooperation system that accesses a second site different from the first site where a first computer and a second computer are arranged and obtains publicly available data of the second site, a reach path to the publicly available data is set by a first computer arranged at the second site, communication to the publicly available data is permitted to devices on the reach path, the publicly available data is accessed by the second computer, a server within the first site has an area where the publicly available data is stored, the publicly available data is copied to the area or the publicly available data is referenced by the second computer, communication between a site other than the first site and the area is prohibited by a first computer arranged at the first site. A site cooperation system characterized by this.

2. In the site cooperation system according to Claim 1, the first site is connected to the second site and a third site via a network. A site cooperation system characterized by this.

3. In the site cooperation system according to Claim 2, the first site is Site A, the second site is Site B, the third site is Site C. A site cooperation system characterized by this.

4. In the site cooperation system according to Claim 2, the first site is Site A, the second site is Site C, the third site is Site B. A site cooperation system characterized by this.

5. In the site cooperation system according to Claim 1, a network within a platform at the second site is divided into a first network that can communicate with sites other than the second site and a second network that cannot communicate with sites other than the second site, the publicly available data is stored in a database connected to the first network, the publicly available data stored in the database connected to the first network is stored in a database connected to a cloud network. A site cooperation system characterized by this.

6. In the site cooperation system according to Claim 1, the first site or the second site is characterized in that a group of devices including a semiconductor manufacturing apparatus, a semiconductor inspection apparatus, or a semiconductor measurement apparatus is arranged. A site cooperation system.

7. In the base cooperation system according to claim 6, The data stored in the server within the first base includes data collected from the device group or data obtained by processing the data collected from the device group. A base cooperation system characterized by this.

8. In the base cooperation system according to claim 7, When the second computer accesses the server within the second base, authentication information of the platform including the server within the second base is required. A base cooperation system characterized by this.

9. In the base cooperation system according to claim 8, In the server within the second base, the device ID and the file extension of the output data are stored as a device master, The second computer acquires data permitted by the device master from the device group, The permitted data is stored in the server within the first base. A base cooperation system characterized by this.

10. In the base cooperation system according to claim 9, Based on the published data, the progress of semiconductor device manufacturing is visualized or analyzed. A base cooperation system characterized by this.

11. A platform including a first computer within a first base, a second computer within the first base, and a server within the first base, accessing a second base different from the first base from the first base to acquire published data of the second base, The access path to the published data is set by a first computer within the second base, Communication to the published data is permitted to devices on the access path, The published data is accessed by the second computer, The server has an area where the published data is stored, By the second computer, the published data is copied to the area or the published data is referenced, Communication between bases other than the first base and the area is prohibited by a first computer within the first base. A platform characterized by this.

12. In the platform according to claim 11, The first base is connected to the second base and the third base via a network. A platform characterized by this.

13. In the platform according to claim 12, The first base is Base A, The second base is base B, The third base is base C, and the platform is characterized in that.

14. In the platform according to claim 12, The first base is base A, The second base is base C, The third base is base B, and the platform is characterized in that.

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