Sensor

Abstract

To provide a sensor capable of increasing precision.SOLUTION: A sensor includes a detection part. The detection part includes a first resistance member, a second resistance member, a third resistance member, and a conductive member. The position of the third resistance member in a first direction from the first resistance member to the second resistance member is located between the position of the first resistance member in the first direction and the position of the second resistance member in the first direction. A second direction from the conductive member to the third resistance member crosses the first direction. Third electric resistance of the third resistance member is changeable according to an object substance around the detection part.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to sensors.

Background Art

[0002] For example, there are sensors using MEMS (Micro Electro Mechanical Systems) elements or the like. In sensors, improvement in accuracy is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide a sensor capable of improving accuracy.

Means for Solving the Problems

[0005] According to an embodiment, a sensor includes a detection unit. The detection unit includes a first resistance member, a second resistance member, a third resistance member, and a conductive member. A position of the third resistance member in a first direction from the first resistance member to the second resistance member is between a position of the first resistance member in the first direction and a position of the second resistance member in the first direction. A second direction from the conductive member to the third resistance member intersects the first direction. A third electrical resistance of the third resistance member can change according to a target substance around the detection unit.

Brief Description of the Drawings

[0006]

Figure 1

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BEST MODE FOR CARRYING OUT THE INVENTION

[0007] Hereinafter, each embodiment of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between parts, etc. are not necessarily the same as those in reality. Even when representing the same part, the dimensions and ratios may be represented differently in the drawings. In the present specification and each figure, the same reference numerals are given to the same elements as those described above with respect to the already shown figures, and the detailed description will be omitted as appropriate.

[0008] (First Embodiment) FIGS. 1(a) and 1(b) are schematic cross-sectional views illustrating the sensor according to the first embodiment. FIG. 2 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 1(a) is a cross-sectional view taken along line X1-X2 of FIG. 2. FIG. 1(b) is a cross-sectional view taken along line Y1-Y2 of FIG. 2.

[0009] As shown in FIGS. 1(a), 1(b) and 2, the sensor 110 according to the embodiment includes a detection unit 10D. The detection unit 10D includes a first resistance member 11, a second resistance member 12, a third resistance member 13, and a conductive member 21.

[0010] Let the direction from the first resistance member 11 to the second resistance member 12 be the first direction D1. The position of the third resistance member 13 in the first direction D1 is between the position of the first resistance member 11 in the first direction D1 and the position of the second resistance member 12 in the first direction D1.

[0011] Let the first direction be the X-axis direction. Let one direction perpendicular to the X-axis direction be the Z-axis direction. Let the direction perpendicular to the X-axis direction and the Z-axis direction be the Y-axis direction. For example, the third resistance member 13 is between the first resistance member 11 and the second resistance member 12 in the first direction D1.

[0012] The second direction D2 from the conductive member 21 to the third resistance member 13 intersects the first direction. The second direction D2 is, for example, the Z-axis direction.

[0013] As will be described later, the third electrical resistance of the third resistance member 13 can change according to the target substance (e.g., gas) around the detection unit 10D. The third resistance member 13 functions as, for example, a gas sensor unit. The first resistance member 11 and the second resistance member 12 function as, for example, a gas flow sensor unit.

[0014] In the embodiment, one detection unit 10D includes a gas sensor unit and a flow sensor unit, whereby the target substance can be detected with high accuracy.

[0015] As shown in FIG. 2, the sensor 110 may include a control unit 70. The control unit 70 includes, for example, a circuit unit 70D and a processing unit 70P.

[0016] For example, a current is supplied to the conductive member 21. The supply of the current is performed by, for example, the circuit unit 70D. For example, a voltage is applied to the conductive member 21. The application of the voltage is performed by, for example, the circuit unit 70D. Due to the current (and voltage) supplied to the conductive member 21, the temperature of the conductive member 21 rises. The rise in temperature is due to Joule heat. As a result, the temperature of the third resistance member 13 rises. The amount of heat of the third resistance member 13 changes according to the target substance contained in the space around the third resistance member 13. The degree of change in the amount of heat depends on the thermal conductivity of the detection target contained in the surrounding space. As the temperature of the third resistance member 13 changes, the electrical resistance (third electrical resistance) of the third resistance member 13 changes. The change in the third electrical resistance is detected by, for example, the processing unit 70P. By detecting the change in the third electrical resistance, the detection target contained in the space can be detected.

[0017] When the target substance flows and moves, the accuracy of detecting the detection target by the third resistance member 13 may decrease. For example, the heat conduction characteristics change depending on the presence or absence or flow rate (e.g., flow velocity) of the flow of the target substance. The temperature of the third resistance member 13 is affected by the flow of the target substance. As a result, it may be difficult to detect with high accuracy.

[0018] On the other hand, the temperature of the first resistance member 11 and the temperature of the second resistance member 12 are affected by the flow of the target substance. For example, when the first resistance member 11 is upstream of the flow of the target substance and the second resistance member 12 is downstream of the flow of the target substance, the temperature of the first resistance member 11 is lower than the temperature of the second resistance member 12. Depending on the difference between the temperature of the first resistance member 11 and the temperature of the second resistance member 12, a difference occurs between the first electrical resistance of the first resistance member 11 and the second electrical resistance of the second resistance member 12. The difference in electrical resistance depends on the flow rate of the target substance.

[0019] In the embodiment, the value obtained from the third electrical resistance is corrected according to the change in the difference between the first electrical resistance and the second electrical resistance. That is, correction using the flow rate of the target substance is performed, and thereby the influence of the flow rate of the target substance is suppressed. A sensor capable of improving accuracy can be provided.

[0020] As shown in Fig. 1(a), the detection unit 10D further includes an insulating member 18. A part 18p of the insulating member 18 is provided between the third resistance member 13 and the conductive member 21. Another part 18q of the insulating member 18 is provided between the first resistance member 11 and the third resistance member 13, and between the second resistance member 12 and the third resistance member 13. The detection unit 10D is integral.

[0021] In such a configuration, the characteristics of the first resistance member 11, the second resistance member 12, and the third resistance member 13 are more stable than when these resistance members are provided separately. Detection with higher accuracy is possible.

[0022] As shown in Fig. 1(b), the sensor 110 may include a base body 41 and a support member 30. In this example, the base body 41 includes a substrate 41s and an insulating film 41i. The substrate 41s may be, for example, a semiconductor substrate (such as a silicon substrate). The substrate 41s may include, for example, a semiconductor circuit or the like. The substrate 41s may include connection members such as via electrodes.

[0023] The support member 30 is fixed to the base body 41. The support member 30 supports the detection unit 10D. A first gap g1 is provided between the base body 41 and the detection unit 10D. The first gap g1 can suppress heat conduction from the detection unit 10D toward the base body 41. Detection with higher accuracy becomes possible.

[0024] As shown in Fig. 1(b), in this example, the support member 30 includes a third support portion 33. The third support portion 33 includes a third fixing portion 33f and a third connection portion 33c. The third fixing portion 33f is fixed to the base body 41. The third connection portion 33c is supported by the third fixing portion 33f. The third connection portion 33c supports the detection unit 10D. A gap g1 is also provided between the base body 41 and the third connection portion 33c.

[0025] In this example, the support member 30 includes a third opposing support portion 33A. The third opposing support portion 33A includes a third opposing fixing portion 33Af and a third opposing connection portion 33Ac. The third opposing fixing portion 33Af is fixed to the base body 41. The third opposing connection portion 33Ac is supported by the third opposing fixing portion 33Af. The third opposing connection portion 33Ac supports the detection portion 10D. A gap g1 is also provided between the base body 41 and the third opposing connection portion 33Ac. In a third direction D3 intersecting the plane including the first direction D1 and the second direction D2, the detection portion 10D is between the third fixing portion 33f and the third opposing fixing portion 33Af. The third direction D3 is, for example, the Y-axis direction.

[0026] A conductive member (not shown) electrically connected to the third resistance member 13 may pass through the third fixing portion 33f, the third opposing fixing portion 33Af, the third connection portion 33c, and the third opposing connection portion 33Ac. A conductive member (not shown) electrically connected to the conductive member 21 may pass through the third fixing portion 33f, the third opposing fixing portion 33Af, the third connection portion 33c, and the third opposing connection portion 33Ac.

[0027] As shown in FIG. 2, for example, a conductive member terminal 21P and an opposing conductive member terminal 21Q are provided. The conductive member terminal 21P is electrically connected to one end of the conductive member 21. The opposing conductive member terminal 21Q is electrically connected to the other end of the conductive member 21. Through these terminals, current is supplied from the circuit portion 70D to the conductive member 21. Through these terminals, a voltage is applied to the conductive member 21 by the circuit portion 70D.

[0028] As shown in FIG. 2, for example, a third resistance terminal 13P and a third opposing resistance terminal 13Q are provided. The third resistance terminal 13P is electrically connected to one end of the third resistance member 13. The third opposing resistance terminal 13Q is electrically connected to the other end of the third resistance member 13. Through these terminals, a third value V3 corresponding to the third electrical resistance of the third resistance member 13 is detected by the processing portion 70P.

[0029] As shown in FIG. 2, for example, a first resistance terminal 11P and a first opposing resistance terminal 11Q are provided. The first resistance terminal 11P is electrically connected to one end of the first resistance member 11. The first opposing resistance terminal 11Q is electrically connected to the other end of the first resistance member 11. Through these terminals, a first value V1 corresponding to the first electrical resistance of the first resistance member 11 is detected by the processing unit 70P.

[0030] As shown in FIG. 2, for example, a second resistance terminal 12P and a second opposing resistance terminal 12Q are provided. The second resistance terminal 12P is electrically connected to one end of the second resistance member 12. The second opposing resistance terminal 12Q is electrically connected to the other end of the second resistance member 12. Through these terminals, a second value V2 corresponding to the second electrical resistance of the second resistance member 12 is detected by the processing unit 70P.

[0031] As shown in FIG. 2, in this example, the support member 30 includes a first support portion 31. The first support portion 31 includes a first fixing portion 31f and a first connecting portion 31c. The first fixing portion 31f is fixed to the base body 41. The first connecting portion 31c is supported by the first fixing portion 31f. The first connecting portion 31c supports the detection unit 10D. A gap g1 is also provided between the base body 41 and the first connecting portion 31c.

[0032] The support member 30 includes a first opposing support portion 31A. The first opposing support portion 31A includes a first opposing fixing portion 31Af and a first opposing connecting portion 31Ac. The first opposing fixing portion 31Af is fixed to the base body 41. The first opposing connecting portion 31Ac is supported by the first opposing fixing portion 31Af. The first opposing connecting portion 31Ac supports the detection unit 10D. A gap g1 is also provided between the base body 41 and the first opposing connecting portion 31Ac. In the third direction D3, the detection unit 10D is located between the first fixing portion 31f and the first opposing fixing portion 31Af.

[0033] A conductive member (not shown) electrically connected to the first resistance member 11 may pass through the first fixing portion 31f, the first opposing fixing portion 31Af, the first connecting portion 31c, and the first opposing connecting portion 31Ac.

[0034] As shown in FIG. 2, in this example, the support member 30 includes a second support portion 32. The second support portion 32 includes a second fixing portion 32f and a second connecting portion 32c. The second fixing portion 32f is fixed to the base body 41. The second connecting portion 32c is supported by the second fixing portion 32f. The second connecting portion 32c supports the detection portion 10D. A gap g1 is also provided between the base body 41 and the second connecting portion 32c.

[0035] The support member 30 includes a second opposing support portion 32A. The second opposing support portion 32A includes a second opposing fixing portion 32Af and a second opposing connecting portion 32Ac. The second opposing fixing portion 32Af is fixed to the base body 41. The second opposing connecting portion 32Ac is supported by the second opposing fixing portion 32Af. The second opposing connecting portion 32Ac supports the detection portion 10D. A gap g1 is also provided between the base body 41 and the second opposing connecting portion 32Ac. In the third direction D3, the detection portion 10D is located between the second fixing portion 32f and the second opposing fixing portion 32Af.

[0036] A conductive member (not shown) electrically connected to the second resistance member 12 may pass through the second fixing portion 32f, the second opposing fixing portion 32Af, the second connecting portion 32c, and the second opposing connecting portion 32Ac.

[0037] FIGS. 3(a) and 3(b) are schematic plan views illustrating a part of the sensor according to the first embodiment. FIG. 3(a) illustrates the patterns of the first resistance member 11, the second resistance member 12, and the third resistance member 13 in the sensor 110. FIG. 3(b) illustrates the pattern of the conductive member 21 in the sensor 110. The resistance member may have a meander structure. The conductive member 21 may have a meander structure.

[0038] Hereinafter, examples of the characteristics of the sensor 110 will be described. FIG. 4 is a graph illustrating the characteristics of the sensor. The horizontal axis in FIG. 4 is the concentration C1 of the detection target (substance) in the space around the first detection unit 10D. In this example, the detection target (substance) is carbon dioxide. The vertical axis is the signal (third value V3) obtained from the third resistance member 13. The signal (third value V3) corresponds to, for example, the third electrical resistance of the third resistance member 13. The third value V3 is, for example, a voltage. FIG. 3 illustrates the characteristics when the flow rate of the target substance (gas) is 1 L / min and the characteristics when the flow rate is 5 L / min.

[0039] As shown in FIG. 3, the signal (third value V3) at the same concentration C1 changes when the flow rate is different. By correcting the signal (third value V3) based on the characteristics of this change, a concentration C1 with the influence of the flow rate suppressed can be obtained.

[0040] As described above, the flow rate can be detected by the first resistance member 11 and the second resistance member 12. For example, the difference between the first temperature of the first resistance member 11 and the second temperature of the second resistance member 12 changes according to the flow rate of the target substance in the direction from the first resistance member 11 to the second resistance member 12. For example, the difference between the first electrical resistance of the first resistance member 11 and the second electrical resistance of the second resistance member 12 changes according to the flow rate of the target substance in the direction from the first resistance member 11 to the second resistance member 12.

[0041] The processing unit 70P (see FIG. 2) of the control unit 70 can obtain the first value V1 corresponding to the first electrical resistance of the first resistance member 11, the second value V2 corresponding to the second electrical resistance of the second resistance member 12, and the third value V3 corresponding to the third electrical resistance of the third resistance member 13 (see FIG. 2). As already described, the third value V3 changes according to the target substance. For example, the third value V3 changes according to the type of the target substance, the concentration of the target substance in the space, and the flow rate of the target substance.

[0042] The processing unit 70P can output a fourth value V4 obtained by correcting the third value V3 based on the difference between the first value V1 and the second value V2. By the correction based on the difference between the first value V1 and the second value V2, the influence of the flow rate of the target substance is suppressed. The fourth value V4 obtained by the correction has high accuracy.

[0043] As shown in FIG. 1(a), let the distance along the first direction D1 between the first resistance member 11 and the third resistance member 13 be the first distance L1. Let the distance along the first direction D1 between the second resistance member 12 and the third resistance member 13 be the second distance L2. The first distance L1 is substantially the same as the second distance L2. For example, the first distance L1 is 0.9 times or more and 1.1 times or less of the second distance L2. The first resistance member 11 and the second resistance member 12 are provided at substantially symmetric positions with the third resistance member 13 as the center. Thereby, the characteristics of the first resistance member 11 become substantially the same as those of the second resistance member 12. Higher-precision correction can be performed.

[0044] As shown in FIG. 1(a), the third resistance member 13 is between the first resistance member 11 and the second resistance member 12 in the first direction D1. For example, the third resistance member 13 is in the same layer as the first resistance member 11. For example, the third resistance member 13 is in the same layer as the second resistance member 12.

[0045] FIG. 5 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 5 is a cross-sectional view taken along line X3-X4 of FIG. 6. As shown in FIGS. 5 and 6, in the sensor 111 according to the embodiment, the insulating member 18 includes a hole 18h. The hole 18h extends in the second direction D2. The hole 18h penetrates the insulating member 18 along the second direction D2. By providing the hole 18h, the heat capacity of the detection unit 10D can be reduced. Detection with a faster response becomes possible.

[0046] A plurality of holes 18h may be provided. One of the plurality of holes 18h is between the first resistance member 11 and the third resistance member 13. Another one of the plurality of holes 18h is between the third resistance member 13 and the second resistance member 12. The hole 18h suppresses heat conduction between the first resistance member 11 and the third resistance member 13. The hole 18h suppresses heat conduction between the third resistance member 13 and the second resistance member 12. The flow rate can be detected with higher accuracy.

[0047] FIG. 7 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. As shown in FIG. 7, in the sensor 112 according to the embodiment, the conductive member 21 is between the first resistance member 11 and the second resistance member 12 in the first direction D1. For example, the conductive member 21 is in the same layer as the first resistance member 11. For example, the conductive member 21 is in the same layer as the second resistance member 12.

[0048] In the sensors 110 to 112, at least a part of the conductive member 21 overlaps with the third resistance member 13 in the second direction D2. The first resistance member 11 includes a region that does not overlap with the conductive member 21 in the second direction D2. The second resistance member 12 includes a region that does not overlap with the conductive member 21 in the second direction D2.

[0049] FIG. 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. As shown in FIG. 8, like the sensor 113 according to the embodiment, the first resistance member 11 may include a region that overlaps with the conductive member 21 in the second direction D2. The second resistance member 12 may include a region that overlaps with the conductive member 21 in the second direction D2.

[0050] (Second Embodiment) FIG. 9 is a schematic cross-sectional view illustrating the sensor according to the second embodiment. As shown in FIG. 9, the sensor 120 according to the embodiment includes a first structure 61. Other configurations may be the same as those of the sensor according to the first embodiment.

[0051] There is a detection unit 10D between the base 41 and the first structure 61. A second gap g2 is provided between the detection unit 10D and the first structure 61. The target substance 81 can pass through the second gap g2.

[0052] For example, the target substance 81 passes through the second gap g2 along the first direction D1. The contact state between the target substance 81 and the detection unit 10D is stabilized. High-precision detection can be stably performed.

[0053] The sensor 120 may further include a second structure 62 and a third structure 63. The first structure 61 and the second structure 62 form a first opening 61a. The first structure 61 and the third structure 63 form a second opening 61b. The target substance 81 can flow into the second gap g2 from the first opening 61a. The target substance 81 that has flowed into the second gap g2 can flow out to the outside from the second opening 61b.

[0054] FIG. 10 is a schematic cross-sectional view illustrating a sensor according to the second embodiment. As shown in FIG. 10, in the sensor 121 according to the embodiment, the structure of the structure body is different from the structure of the structure body in the sensor 120. Except for this, the configuration of the sensor 121 may be the same as the configuration of the sensor 120.

[0055] In the sensor 121, the direction from a part of the second structure 62 to a part of the first structure 61 is along the first direction D1. The direction from a part of the first structure 61 to a part of the third structure 63 is along the first direction D1. A third gap g3 is provided between a part of the second structure 62 and a part of the first structure 61. A fourth gap g4 is provided between a part of the first structure 61 and a part of the third structure 63. The target substance 81 can pass through the third gap g3, the second gap g2, and the fourth gap g4.

[0056] In the embodiment, the target substance 81 includes, for example, one selected from the group consisting of carbon dioxide, helium, methane, chlorine, sulfur hexafluoride (SF6), and hydrogen. The second substance includes, for example, another one selected from the group consisting of carbon dioxide, helium, methane, chlorine, sulfur hexafluoride (SF6), and hydrogen.

[0057] The embodiment may include the following configuration (for example, technical solution). (Configuration 1) A first resistance member, A second resistance member, A third resistance member, wherein a position of the third resistance member in the first direction from the first resistance member to the second resistance member is between a position of the first resistance member in the first direction and a position of the second resistance member in the first direction, the third resistance member, A conductive member, wherein a second direction from the conductive member to the third resistance member intersects the first direction, the conductive member, A detection unit including the same, A third electrical resistance of the third resistance member is a sensor that can change according to a target substance around the detection unit.

[0058] (Configuration 2) The detection unit further includes an insulating member, A part of the insulating member is provided between the third resistance member and the conductive member, the sensor according to Configuration 1.

[0059] (Configuration 3) Another part of the insulating member is provided between the first resistance member and the third resistance member and between the second resistance member and the third resistance member, the sensor according to Configuration 2.

[0060] (Configuration 4) The insulating member includes a hole extending in the second direction, the sensor according to Configuration 2 or 3.

[0061] (Configuration 5) The insulating member includes a plurality of holes extending in the second direction, One of the plurality of holes is between the first resistance member and the third resistance member, Another one of the plurality of holes is between the third resistance member and the second resistance member, the sensor according to Configuration 2 or 3.

[0062] (Configuration 6) A distance along the first direction between the first resistance member and the third resistance member is 0.9 times or more and 1.1 times or less of a distance along the first direction between the second resistance member and the third resistance member, the sensor according to any one of Configurations 1 to 5.

[0063] (Configuration 7) A base body, A support member fixed to the base body, Further comprising, The support member supports the detection unit, The sensor according to any one of Configurations 1 to 6, wherein a first gap is provided between the base body and the detection unit.

[0064] (Configuration 8) Further comprising a first structure, The detection unit is between the base body and the first structure, A second gap is provided between the detection unit and the first structure, The sensor according to Configuration 7, wherein the target substance can pass through the second gap.

[0065] (Configuration 9) The sensor according to Configuration 8, wherein the target substance passes through the second gap along the first direction.

[0066] (Configuration 10) Further comprising a second structure and a third structure, The target substance can flow into the second gap from a first opening formed by the second structure and the first structure, The sensor according to Configuration 8 or 9, wherein the target substance that has flowed into the second gap can flow out to the outside from a second opening formed by the third structure and the first structure.

[0067] (Configuration 11) The direction from a part of the second structure to a part of the first structure is along the first direction, The sensor according to Configuration 10, wherein the direction from the part of the first structure to a part of the third structure is along the first direction.

[0068] (Configuration 12) A third gap is provided between the part of the second structure and the part of the first structure, A fourth gap is provided between the part of the first structure and the part of the third structure. The sensor according to Configuration 11, wherein the target substance can pass through the third gap, the second gap, and the fourth gap.

[0069] (Configuration 13) The sensor according to any one of Configurations 1 to 12, wherein at least a part of the conductive member overlaps with the third resistance member in the second direction.

[0070] (Configuration 14) The first resistance member includes a region that does not overlap with the conductive member in the second direction. The sensor according to any one of Configurations 1 to 13, wherein the second resistance member includes a region that does not overlap with the conductive member in the second direction.

[0071] (Configuration 15) The sensor according to any one of Configurations 1 to 14, wherein the third resistance member is between the first resistance member and the second resistance member in the first direction.

[0072] (Configuration 16) The sensor according to any one of Configurations 1 to 14, wherein the conductive member is between the first resistance member and the second resistance member in the first direction.

[0073] (Configuration 17) The sensor according to any one of Configurations 1 to 16, wherein a difference between a first electrical resistance of the first resistance member and a second electrical resistance of the second resistance member changes according to a flow rate of the target substance in a direction from the first resistance member to the second resistance member.

[0074] (Configuration 18) The sensor further includes a control unit including a processing unit. The processing unit can obtain a first value corresponding to the first electrical resistance of the first resistance member, a second value corresponding to the second electrical resistance of the second resistance member, and a third value corresponding to the third electrical resistance. The processing unit can output a fourth value obtained by correcting the third value based on the difference between the first value and the second value, the sensor according to any one of Configurations 1 to 17.

[0075] (Configuration 19) The third value changes according to the target substance, the sensor according to Configuration 18.

[0076] (Configuration 20) The control unit further includes a circuit unit capable of at least either supplying current to the conductive member or applying voltage to the conductive member, the sensor according to Configuration 18 or 19.

[0077] According to the embodiment, a sensor capable of improving characteristics can be provided.

[0078] As described above, the embodiments of the present invention have been described with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific configurations of each element such as the detection unit, resistance member, conductive member, substrate, and control unit included in the sensor, the present invention can be similarly implemented by appropriately selecting from the range known to those skilled in the art, and as long as the same effects can be obtained, it is included in the scope of the present invention.

[0079] Also, combinations of any two or more elements of each specific example within a technically possible range are included in the scope of the present invention as long as they include the gist of the present invention.

[0080] In addition, based on the sensor described above as an embodiment of the present invention, all sensors that can be appropriately designed and modified by those skilled in the art also belong to the scope of the present invention as long as they include the gist of the present invention.

[0081] In addition, within the scope of the idea of the present invention, those skilled in the art can conceive of various modification examples and correction examples, and it is understood that those modification examples and correction examples also belong to the scope of the present invention.

[0082] Although some embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalent scope thereof.

Explanation of Reference Numerals

[0083] 10D... Detection unit, 11 - 13... First - third resistance members, 11P - 13P... First - third resistance terminals, 11Q - 13Q... First - third opposing resistance terminals, 18... Insulating member, 18h... Hole, 18p, 18q... Portions, 21... Conductive member, 21P... Conductive member terminal, 21Q... Opposing conductive member terminal, 30... Support member, 31 - 33... First - third support portions, 31A - 33A... First - third opposing support portions, 31Ac - 33Ac... First - third opposing connection portions, 31Af - 33Af... First - third opposing fixing portions, 31c - 33c... First - third connection portions, 31f - 33f... First - third fixing portions, 41... Substrate, 41i... Insulating film, 41s... Substrate, 61 - 63... First - third structures, 61a, 61b... First, second openings, 70... Control unit, 70D... Circuit portion, 70P... Processing portion, 81... Target substance, 110 - 113, 120, 121... Sensors, C1... Concentration, D1 - D3... First - third directions, L1, L2... First, second distances, V1 - V4... First - fourth values, g1 - g4... First - fourth gaps

Claims

1. a first resistance member, a second resistance member, a third resistance member, wherein a position of the third resistance member in a first direction from the first resistance member to the second resistance member is between a position of the first resistance member in the first direction and a position of the second resistance member in the first direction, the third resistance member; a conductive member, wherein a second direction from the conductive member to the third resistance member intersects the first direction, the conductive member; a detection unit including the above; a substrate, a support member fixed to the substrate, comprising; the support member supports the detection unit, a first gap is provided between the substrate and the detection unit, at least a part of the conductive member is between the first gap and the third resistance member in the second direction, the temperature of the conductive member and the temperature of the third resistance member increase due to the current supplied to the conductive member, a third electrical resistance of the third resistance member can change according to a target substance around the detection unit, and by detecting a change in the electrical resistance of the third resistance member, the target substance can be detected, a sensor that detects a flow rate of the target substance by detecting a difference between a first electrical resistance of the first resistance member and a second electrical resistance of the second resistance member, which changes according to a flow rate of the target substance in a direction from the first resistance member to the second resistance member.

2. the detection unit further includes an insulating member, a part of the insulating member is provided between the third resistance member and the conductive member, the sensor according to claim 1.

3. the insulating member includes a plurality of holes extending in the second direction, one of the plurality of holes is between the first resistance member and the third resistance member, another one of the plurality of holes is between the third resistance member and the second resistance member, the sensor according to claim 2.

4. further comprising a first structure, the detection unit is between the substrate and the first structure, a second gap is provided between the detection unit and the first structure, the target substance can pass through the second gap, the sensor according to any one of claims 1 to 3.

5. further comprising a second structure and a third structure, the target substance can flow into the second gap from a first opening formed by the second structure and the first structure, the target substance flowing into the second gap can flow out to the outside from a second opening formed by the third structure and the first structure, the sensor according to claim 4.

6. The sensor according to claim 5, wherein, in the first direction, a part of the first structure is between a part of the second structure and a part of the third structure.

7. A third gap is provided between the part of the second structure and the part of the first structure, a fourth gap is provided between the part of the first structure and the part of the third structure, and the target substance can pass through the third gap, the second gap, and the fourth gap. The sensor according to claim 6.

8. further comprising a control unit including a processing unit, the processing unit can obtain a first value corresponding to the first electrical resistance, a second value corresponding to the second electrical resistance, and a third value corresponding to the third electrical resistance, and the processing unit can output a fourth value obtained by correcting the third value based on the difference between the first value and the second value. The sensor according to any one of claims 1 to 7.

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