Chemical solution volatilization device

Abstract

To provide a chemical solution volatilizing device which restricts a discharge amount of a chemical solution and can suppress leakage of the chemical solution.SOLUTION: A chemical solution volatilizing device includes a container that stores a chemical solution and has a discharge pipe for discharging the chemical solution formed on a lower end part, a volatilizing body for absorbing and volatilizing the chemical solution discharged from the discharge pipe, and a cover member covering at least the lower end part of the container, wherein a recess for storing the chemical solution discharged from the discharge pipe is formed on the inner surface of the cover member, the discharge pipe is inserted into the recess so that a gap is formed between the lower end of the discharge pipe and the bottom surface of the recess, the volatilizing body is stored between the container and the cover member, and a part of the volatilizing body is arranged between the lower end of the discharge pipe and the bottom part of the recess.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a chemical liquid volatilization device.

Background Art

[0002] There are various types of chemical liquid volatilization devices. For example, there is an inverted chemical liquid volatilization device as described in Patent Document 1. This chemical liquid volatilization device includes a container in which a chemical liquid is stored, a lower container that covers the lower end portion of the container, and a volatilizing body that is stored in the lower container. A liquid absorption core is provided at the lower end portion of the container, and the chemical liquid discharged through this liquid absorption core is absorbed by the volatilizing body and then volatilizes to the outside through a volatilization hole formed in the lower container.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above chemical liquid volatilization device, the chemical liquid that overflows from the volatilizing body accumulates in a liquid reservoir chamber formed in the lower container. However, when a large amount of chemical liquid is discharged, the chemical liquid may be wasted. In addition, when the device is moved, there is also a risk that the chemical liquid in the liquid reservoir chamber leaks from the volatilization hole.

[0005] The present invention has been made to solve the above problems, and an object thereof is to provide a chemical liquid volatilization device that can limit the discharge amount of the chemical liquid and suppress the leakage of the chemical liquid.

Means for Solving the Problems

[0006] The chemical liquid volatilization device according to the present invention includes a container in which a chemical liquid is stored and a discharge pipe through which the chemical liquid is discharged is formed at the lower end, a volatilizer that absorbs and volatilizes the chemical liquid discharged from the discharge pipe, and a cover member that covers at least the lower end of the container. A recess for storing the chemical liquid discharged from the discharge pipe is formed on the inner surface of the cover member, and the discharge pipe is inserted into the recess so that a gap is formed between the lower end of the discharge pipe and the bottom surface of the recess. The volatilizer is accommodated between the container and the cover member, and a part of the volatilizer is disposed between the lower end of the discharge pipe and the bottom of the recess.

[0007] In the above chemical liquid volatilization device, the cover member may include a bottom wall portion in which the recess is formed, and a side wall portion that stands up from the peripheral edge of the bottom wall portion and in which at least one volatilization hole for discharging the chemical liquid volatilized from the volatilizer to the outside is formed.

[0008] In the above chemical liquid volatilization device, at least one circumferential groove extending in the circumferential direction may be formed on the outer surface of the side wall portion below the volatilization hole.

[0009] In the above chemical liquid volatilization device, an up-and-down groove extending downward from each volatilization hole may be formed on the outer surface of the side wall portion.

[0010] In the above chemical liquid volatilization device, the volatilizer may include a liquid absorption portion at least a part of which is disposed in the recess, and a volatilization portion extending upward from the liquid absorption portion.

[0011] In the above chemical liquid volatilization device, a valve member that is normally in a closed state and is opened by pressing to regulate the discharge of the chemical liquid is provided in the discharge pipe, and a protrusion for pressing the valve member is formed inside the recess. When the discharge pipe is inserted into the recess so that a gap is formed between the lower end of the discharge pipe and the bottom surface of the recess, the protrusion of the recess presses the valve member to be in the open state.

[0012] In the above chemical liquid volatilization device, the container has a top wall portion and a side wall portion extending downward from the peripheral edge of the top wall portion, and forms an internal space for accommodating the chemical liquid at least with the top wall portion and the side wall portion. At least one protrusion protruding downward can be formed on the inner wall surface of the top wall portion.

[0013] In the above chemical liquid volatilization device, the chemical liquid can contain 0.25 to 2.5% by mass of a component having a vapor pressure of 0.01 to 20 hPa.

Advantages of the Invention

[0014] According to the chemical liquid volatilization device of the present invention, the discharge amount of the chemical liquid can be restricted, and leakage of the chemical liquid can be suppressed.

Brief Description of the Drawings

[0015]

Figure 1

Figure 2

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Figure 8

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Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Mode for Carrying Out the Invention

[0016] Hereinafter, a chemical solution volatilization device according to an embodiment of the present invention will be described with reference to the drawings.

[0017] <1. Overall Configuration of Chemical Solution Volatilization Device> FIG. 1 is a perspective view of the chemical solution volatilization device according to the present embodiment. As shown in FIG. 1, this chemical solution volatilization device includes a container 10 in which the chemical solution is stored, a cover member 20 that covers the lower end portion of the container 10, and a volatilizer (omitted in FIG. 1) 30 that is accommodated between the container 10 and the cover member 20 and volatilizes the chemical solution discharged from the container 10. Hereinafter, these members will be described in detail.

[0018] <1-1. Container> FIG. 2 is a side view of the container. As shown in FIG. 2, the container 10 includes a container body 1 in which an opening is formed at the lower end portion and the chemical solution is stored, and a lid member 2 that closes the opening at the lower end portion of the container body 1. Hereinafter, these members will be described in detail.

[0019] <1-1-1. Container Body> FIG. 3 is a perspective view of the container body, FIG. 4 is a perspective view of the container body seen from above, and FIG. 5 is a cross-sectional view of the container body. As shown in FIGS. 3 to 5, the container body 1 includes a main body portion 11 formed in a cylindrical shape, a connecting portion 12 connected to the lower end of the main body portion 11, and a cylindrical discharge portion 13 having a smaller diameter than the main body portion 11 and extending downward from the lower end of the connecting portion 12, and these are integrally formed. The main body portion 11 includes a cylindrical side wall portion 110 and a top wall portion 115 that closes the upper end of the side wall portion.

[0020] The side wall portion 110 is composed of a first portion 111 extending in the vertical direction, a second portion 112 having a slightly smaller diameter than the first portion 111 and connected to the lower end of the first portion 111, and a third portion 113 having a slightly smaller diameter than the second portion 112 and connected to the lower end of the second portion 112. Therefore, a step is formed at the boundary between the first portion 111 and the second portion 112, and a step is also formed at the boundary between the second portion 112 and the third portion 113.

[0021] The first portion 111 extends downward from the periphery of the top wall portion 115 and constitutes most of the side wall portion 110. Further, a first groove 114 extending throughout the vertical direction is formed at a predetermined interval in the circumferential direction in the first portion 111. The lower edge of the first portion 111 is formed in a circular shape, but a pair of portions facing each other across the axis protrude downward in an arc shape. Hereinafter, these portions will be referred to as lower protruding portions 117. Also, between the two lower protruding portions 117, a pair of portions protruding upward in a slightly arc shape are formed. Hereinafter, these portions will be referred to as upper protruding portions 118. Thus, the lower edge of the first portion 111 is constituted by a curve in which the pair of lower protruding portions 117 and the pair of upper protruding portions 118 are smoothly connected.

[0022] The lower edge of the second portion 112 extends parallel to the lower edge of the first portion 111. Therefore, the width of the second portion 112 in the vertical direction is substantially constant. Also, a pair of mounting grooves 119 extending in the circumferential direction are formed at a predetermined interval in the second portion 112. These mounting grooves 119 are respectively formed at positions corresponding to the above-described lower protruding portions 117. The lower edge of the third portion 113 extends in the horizontal direction in a side view, and a connecting portion 12 is connected to the lower edge of this third portion 113.

[0023] The connecting portion 12 is formed by an inclined surface extending radially inward as it goes downward, and a cylindrical discharge portion 13 is connected to the lower end of this connecting portion 12. An opening 131 opened downward is formed at the lower end of the discharge portion 13. Also, a male screw 132 is formed near the lower end of the outer peripheral surface of the discharge portion 13.

[0024] As shown in FIGS. 4 and 5, the top wall portion 115 is formed in a circular shape in plan view, and a first protruding portion 116a protruding downward is formed at the center of the inner surface of the top wall portion 115. The first protruding portion 116a is formed in an arc shape in cross section. And centering around this first protruding portion 116a, circular second protruding portions 116b and third protruding portions 116c are formed concentrically on the inner surface of the top wall portion 115, and these second protruding portions 116b and third protruding portions 116c protrude downward in an arc shape in cross section. Further, recesses 116e to 116g are formed on the upper surface of the top wall portion 115 so as to correspond to these protruding portions 116a to 116c.

[0025] The container body 1 has an internal space surrounded by the main body portion 11, the connecting portion 12, and the discharging portion 13 described above, and a chemical solution is stored in this internal space.

[0026] <1-1-2. Lid member> Next, the lid member 2 will be described with reference to FIGS. 6 and 7. FIG. 6 is a perspective view of the lid member, and FIG. 7 is a cross-sectional view of the lid member. As shown in FIGS. 6 and 7, the lid member 2 includes a cylindrical lid body 21 and a small-diameter discharge pipe 22 connected to the lower end of the lid body 21, and these are integrally formed. Further, a valve member 23 is attached to the lower end portion of the discharge pipe 22. The lid body 21 has a cylindrical side wall portion 211 and a lower wall portion 212 closing the lower end of the side wall portion 211. A female screw 213 is formed on the inner surface of the side wall portion 211, and the female screw 213 is adapted to be screwed with the male screw 132 of the discharge portion 13 of the container body 1. Thereby, the lid member 2 is fixed to the container body 1. Further, a through hole is formed at the center of the lower wall portion 212, and the discharge pipe 22 is connected to this through hole.

[0027] The valve member 23 attached to the lower end of the discharge pipe 22 includes a valve seat 231 fixed to the discharge pipe 22 and having a through-hole formed therein, a valve body 232 that opens and closes the through-hole of the valve seat 231, and a spring 133 that presses the valve body 232 against the valve seat 231. The valve body 232 normally closes the through-hole of the valve seat 231 by the spring 233. However, when the valve body 232 is pressed from below, the valve body 232 is pushed upward against the spring 233 to open the through-hole.

[0028] <1-2. Cover member> Next, the cover member 20 will be described with reference to FIGS. 8 to 10. FIG. 8 is a perspective view of the cover member seen from above, FIG. 9 is a plan view of the cover member, and FIG. 10 is a cross-sectional view of the cover member.

[0029] As shown in FIGS. 8 to 10, the cover member 20 includes a disk-shaped bottom wall portion 3 and a cylindrical side wall portion 4 that stands upward from slightly inside the outer edge of the bottom wall portion 3. When the cover member 20 is attached to the container 10, the upper end of the side wall portion 4 contacts the step at the boundary between the first portion 111 and the second portion 112 of the container body 1, and the inner surface of the side wall portion 4 contacts the second portion 112. Therefore, the upper end of the side wall portion 4 is formed in a shape that follows the lower end of the first portion 111. Further, in order to detachably fix the cover member 20 and the container 10, a pair of ridges 41 extending in the circumferential direction are formed on the inner surface near the upper end of the side wall portion 4 so as to extend in the circumferential direction. These ridges 41 are detachably fitted into the attachment grooves 119 formed in the second portion 112 of the container body 1.

[0030] A plurality of elongated hole-shaped volatilization holes 42 extending in the vertical direction are formed in the side wall portion 4, and the internal space of the side wall portion 4 and the outside communicate with each other through these volatilization holes 42. As will be described later, the chemical liquid volatilizes to the outside through these volatilization holes 42.

[0031] The plurality of volatilization holes 42 have substantially the same vertical length and are formed at predetermined intervals along the circumferential direction of the side wall portion 4. And the upper ends of each of the volatilization holes 42 arranged in this way are positioned at an interval of the same length as the upper end of the side wall portion 4. Therefore, the plurality of volatilization holes 42 arranged in the circumferential direction are also arranged so that their vertical positions change in accordance with the upper end of the side wall portion 4.

[0032] A second groove 43 extending in the vertical direction is formed between the upper end of each volatilization hole 42 and the upper end of the side wall portion 4. Similarly, a third groove (vertical groove) 44 extending in the vertical direction is formed between the lower end of each volatilization hole 42 and the lower end of the side wall portion 4. And when the cover member 20 is attached to the container 10, the first groove 114 of the container, the second groove 43 of the cover member 20, the volatilization hole 42, and the third groove 44 are arranged so as to be aligned in the vertical direction. In this way, by arranging the plurality of grooves 114, 43, 44 and the volatilization hole 42 in the vertical direction, a design unity can be obtained.

[0033] The bottom wall portion 3 has an outer diameter larger than the outer diameter of the side wall portion 4. That is, the bottom wall portion 3 protrudes radially outward from the lower end of the side wall portion 4. This bottom wall portion 3 is installed on a predetermined installation surface and supports the entire chemical liquid volatilization device.

[0034] Also, a fourth groove (circumferential groove) 45 extending over the entire circumferential direction is formed near the boundary between the bottom wall portion 3 and the side wall portion 4, that is, at the lower end of the side wall portion 4, and the lower ends of each third groove 44 are connected to this fourth groove 45.

[0035] A recess 31 having a square shape in plan view is formed in the portion of the upper surface of the bottom wall portion 3 surrounded by the side wall portion 4, and it functions as a space for storing the chemical liquid as will be described later. The depth of the recess 31 is substantially constant throughout, and can be, for example, about 0.01 to 3.0 mm. Further, a protrusion 32 is provided near the center of this recess 31 and protrudes upward.

[0036] <1-3. Volatilizer> Next, the volatile body will be described with reference to FIGS. 11 to 13. FIG. 11 is a perspective view of the volatile body seen from above, FIG. 12 is a perspective view of the volatile body seen from below, and FIG. 13 is a side view when the volatile body is attached to the container.

[0037] As shown in FIGS. 11 and 12, this volatile body 30 is adapted to be attached to the lid member 2, and includes a rectangular plate-shaped substrate 51, a pair of volatile plates 52 extending upward from the opposing side edges of the substrate 51, and a pair of liquid absorption plates 53 extending downward from the substrate 51. Both the volatile plate 52 and the liquid absorption plate 53 are formed in a rectangular shape. The outer diameter of the substrate is substantially the same as the outer diameter of the lid member. A rectangular through-hole 511 is formed at the center of the substrate 51, and the discharge pipe 22 of the lid member 2 is inserted into this through-hole 511. The above-described liquid absorption plates 53 are respectively connected to the opposing sides of the through-hole 511. These liquid absorption plates 53 are formed in a rectangular shape and extend downward from the through-hole 511.

[0038] As shown in FIG. 13, when the volatile body 30 is attached to the lid member 2, the discharge pipe 22 is inserted into the through-hole 511, and the lower wall portion 212 of the lid member 2 is in contact with the upper surface of the substrate 51. At this time, the liquid absorption plates 53 are arranged so as to sandwich the discharge pipe 22 and further extend slightly below the discharge pipe 22. That is, when the volatile body 30 is attached to the lid member 2, the lower end of the liquid absorption plate 53 is positioned slightly below the lower end of the discharge pipe 22. Specifically, the lower end of the liquid absorption plate 53 is positioned about 0 to 5 mm below the lower end of the discharge pipe 22.

[0039] Also, when the volatile body 30 is attached to the lid member 2, the volatile plate 52 is arranged so as to cover the discharge portion 13 of the container body 1 from the side, and the upper end of the volatile plate 52 is located near the third portion 113 of the container body 1. Therefore, the volatile plate 52 is arranged at a position substantially opposite to the volatile hole 42 of the cover member 20.

[0040] The volatile body 30 is not particularly limited as long as it can suck up the chemical solution and volatilize the chemical solution to the outside. For example, various materials such as paper and cloth can be used, and preferably, non-woven fabric is desirable. The non-woven fabric can be formed by mixing a binder with pulp, polyester, rayon, etc.

[0041] <1-4.Chemical solution> The chemical solution contained in the container 10 has an aromatic component as a functional component. However, in addition to this, it can contain various components such as deodorizing components, insect-proofing components, antibacterial components, etc. Such functional components can be either oily or water-soluble. Further, components that are easy to volatilize with a vapor pressure of 0.01 to 20 hPa can be incorporated into such functional components. The blending ratio of such components in the chemical solution is preferably 0.25 to 2.5% by mass, and more preferably 0.5 to 0.75% by mass. Specifically, as such components, for example, limonene, linalool, linalyl acetate, α-pinene, etc. can be adopted, and these function as fragrances. Also, components with a low vapor pressure can be contained, and as such components, for example, vanillin, galaxolide, etc. can be adopted. These also function as fragrances.

[0042] Also, such a chemical solution can be produced, for example, by preparing a surfactant, a fragrance, a preservative, a UV absorber, and water. And the above-mentioned volatile functional components can be contained together with a predetermined fragrance or as a fragrance.

[0043] <2.Assembly and usage method of the chemical solution volatilization device> Next, the assembly of the chemical liquid volatilization device will be described with reference to FIGS. 14 to 18. FIG. 14 is a cross-sectional view of the chemical liquid volatilization device, FIG. 15 is an enlarged view of FIG. 14, and FIGS. 16 and 17 are cross-sectional views for explaining the discharge of the chemical liquid. For the sake of convenience of explanation, in FIGS. 16 and 17, the valve member 23 and the protrusion 32 are omitted. First, the chemical liquid is stored in the container body 1, and the lower end of the discharge part 13 is closed by the lid member 2. Next, the volatilizer 30 is attached to the lid member 2 as described above. Subsequently, the cover member 20 is attached to the container 10. At this time, the cover member 20 is attached so as to cover the container 10 to which the volatilizer 30 is attached from below. As shown in FIG. 14, in the state where the attachment of the cover member 20 is completed, the protrusion 41 of the cover member 20 fits into the attachment groove 119 of the container body 1. Also, the lower end of the liquid absorption plate 53 of the volatilizer 30 contacts the bottom surface of the recess 31.

[0044] However, as shown in FIG. 15, since the lower end of the volatilizer 30 is located below the lower end of the discharge pipe 22, the lower end of the discharge pipe 22 does not contact the bottom surface of the recess 31. Therefore, a gap is formed between the lower end of the discharge pipe 22 and the bottom surface of the recess 31. This gap is smaller than the depth of the recess 31. That is, the lower end of the discharge pipe 22 is disposed within the recess 31, for example, at a position about half the depth of the recess 31. Also, the protrusion 32 provided in the recess 31 presses the valve body 232 from the lower end of the discharge pipe 22, moving the valve body 232 upward. As a result, the through hole of the valve seat 231 is in an open state, and the chemical liquid in the container 10 is discharged from the discharge pipe 22 and accumulates in the recess 31.

[0045] Next, the volatilization of the chemical liquid will be described. As shown in FIG. 16, the chemical liquid is discharged from the discharge pipe 22 and accumulates in the recess 31. However, since the liquid absorption plate 53 of the volatilizer 30 contacts the bottom surface of the recess 31, the chemical liquid accumulated in the recess 31 is absorbed by the liquid absorption plate 53. The absorbed chemical liquid moves to the volatilization plate 52 via the liquid absorption plate 53 and the substrate 51, is volatilized from the volatilization plate 52, and is further volatilized to the outside of the chemical liquid volatilization device through the volatilization holes 42. Thereby, the aromatic effect by the functional component can be obtained.

[0046] Incidentally, when the chemical liquid is stored in the recess 31 and the lower end of the discharge pipe 22 is immersed in this chemical liquid, the inside of the discharge pipe 22 is filled with the chemical liquid and air cannot enter, so the discharge of the chemical liquid stops. However, when the chemical liquid stored in the recess 31 is absorbed by the volatilizer 30 and the water level of the chemical liquid in the recess 31 drops, and when the water level of the chemical liquid drops below the lower end of the discharge pipe 22, that is, as shown in FIG. 17, when the water level of the chemical liquid is located in the gap between the lower end of the discharge pipe 22 and the bottom surface of the recess 31, air enters from the lower end of the discharge pipe 22, and the chemical liquid in the container 10 is pushed out by this air, and the chemical liquid is discharged from the discharge pipe 22. After that, when the discharged chemical liquid accumulates in the recess 31 and the water level of the chemical liquid rises above the lower end of the discharge pipe 22 again, air cannot enter the discharge pipe, so the discharge of the chemical liquid stops. In this way, while the discharge and stop of the chemical liquid are repeated, the chemical liquid is volatilized to the outside of the chemical liquid volatilization device by the volatilizer 30.

[0047] When the chemical liquid in the container 10 runs out or decreases, the chemical liquid can be replenished. That is, after removing the cover member 20 from the container 10, the lid member 2 is removed from the container body 1, and the chemical liquid is replenished into the container body 1 through the opening of the discharge portion 13.

[0048] <3. Features> According to the chemical liquid volatilization device configured as described above, the following effects can be obtained. (1) Since the lower end of the discharge pipe 22 is inside the recess 31 and the chemical liquid is discharged from the container 10 only when the water level of the chemical liquid in the recess 31 drops below the lower end of the discharge pipe 22, it is possible to suppress the water level of the chemical liquid from becoming higher than the lower end of the discharge pipe 22. Therefore, the discharge amount of the chemical liquid can be limited, and the discharge of a large amount of the chemical liquid can be suppressed. Further, since the cover member forms the internal space with the bottom wall portion and the side wall portion, leakage of the chemical liquid from this internal space is prevented, but the chemical liquid is further accumulated in the recess 31 within this internal space. Therefore, for example, when the chemical liquid volatilization device is moved, it is possible to further prevent the chemical liquid from flowing out from the cover member 20 to the outside. Thus, it is possible to prevent the periphery of the chemical liquid volatilization device from being contaminated by the chemical liquid.

[0049] (2) A valve member 23 is provided in the discharge pipe 22 of the container 10. Until the cover member 20 is attached to the container 10 and pressed by the protrusion 32, the valve member 23 is in a closed state. Therefore, while it is possible to prevent the chemical solution from leaking from the container 10 during assembly, when the cover member 20 is attached to the container 10, the valve member 23 is pressed by the protrusion 32 and becomes open, so that the chemical solution can be volatilized simultaneously with the attachment of the cover member 20 to the container 10.

[0050] (3) On the outer peripheral surface of the cover member 20, a third groove 44 extending downward from the lower end of each volatilization hole 42 is formed. Therefore, for example, even if the chemical solution leaks from the volatilization hole 42 during the replacement of the container 10, the chemical solution accumulates in the third groove 44 below it, so that it is possible to suppress the leakage of the chemical solution from being conspicuous. Furthermore, since the chemical solution can be held in the third groove 44, it is possible to prevent the periphery of the chemical solution volatilization device from being contaminated by the chemical solution.

[0051] (4) A fourth groove 45 is formed at the lower end of the side wall portion 4 of the cover member 20. Therefore, for example, even if the chemical solution leaks from the volatilization hole 42 during the replacement of the container 10 and flows downward along the side wall portion 4, the chemical solution can be held in the fourth groove 45. Therefore, it is possible to suppress the leakage of the chemical solution from being conspicuous. Furthermore, since the chemical solution can be held in the fourth groove 45, it is possible to prevent the periphery of the chemical solution volatilization device from being contaminated by the chemical solution.

[0052] (5) For example, in a chemical liquid volatilizing device of a type in which a chemical liquid is stored in a container having an opening formed at the upper part, a liquid absorbing core or the like is inserted into the opening of this container, and the chemical liquid is sucked up and volatilized by the liquid absorbing core, components with a high vapor pressure may be sucked up and volatilized first. Therefore, in order to ensure use for a certain period of time, it was necessary to mix a larger amount of components with a low vapor pressure and difficult to volatilize into the chemical liquid. As a result, it was difficult to freely design the fragrance tone. On the contrary, in the chemical liquid volatilizing device according to the present embodiment, after discharging the chemical liquid from below the container 10, the chemical liquid is absorbed and volatilized by the volatilizing body 30, so that components with a high vapor pressure are prevented from being volatilized first. Therefore, since it is not necessary to mix a large amount of components with a low vapor pressure into the chemical liquid, the degree of freedom in designing the fragrance tone can be improved.

[0053] (6) Since the first to third protruding portions 116a to 116c protruding downward are formed on the inner surface of the top wall portion 15 of the container body 1, it is possible to easily gather the chemical liquid adhering to the top wall portion 15 at the tips of the protruding portions 116a to 116c. As a result, it is possible to suppress the chemical liquid gathered at the tips of the protruding portions 116a to 116c from falling and remaining attached to the top wall portion 15. Therefore, it is possible to suppress the problem that the chemical liquid cannot be discharged even though it remains in the container 10.

[0054] In particular, in the present embodiment, since the protruding portions 116a to 116c are adjacent in a concentric circle shape, it is easy to guide the chemical liquid adhering between the protruding portions 116a to 116c to any one of the protruding portions 116a to 116c. Further, since the second and third protruding portions 116b and 116c are formed in a continuous circular shape, the chemical liquid adhering to any position on the top wall portion 15 can be easily guided to any location of the protruding portions 116b and 116c. Therefore, it is possible to further suppress the chemical liquid from remaining attached to the top wall portion 15.

[0055] <4. Modification Example> Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit thereof. For example, the following modifications are possible. Also, the gists of the following modification examples can be combined as appropriate.

[0056] <4-1> The shape of the recess 31 is not particularly limited, and the shape in plan view may be other than rectangular. Also, the depth of the recess 31 does not necessarily have to be constant. However, the lower end of the discharge pipe 22 needs to be within the recess 31 and a gap needs to be formed between the lower end of the discharge pipe 22 and the bottom surface of the recess 31. The position of the lower end of the discharge pipe 22 is not particularly limited as long as it is within the recess 31. However, if the lower end of the discharge pipe 22 is close to the upper end of the recess 31, the chemical solution may overflow. Therefore, for example, it is preferable that the lower end of the discharge pipe 22 is disposed at a position 50 to 80% of the depth of the recess 31 from the bottom surface of the recess 31. Also, on the upper surface of the bottom wall portion 3, the periphery of the recess 31 may be flat, but at least a part thereof can be inclined. That is, at least a part of the surface around the recess 31 can be an inclined surface that inclines toward the recess 31. Thereby, the chemical solution adhering to the periphery of the recess 31 can be collected in the recess 31.

[0057] <4-2> The shape of the volatilizer 30 is not particularly limited and may be other than the plate shape described above. However, in order to suck up the chemical solution, a part of the volatilizer 30 needs to be disposed at a position below the lower end of the discharge pipe 22 and immersed in the chemical solution, but it does not necessarily have to be in contact with the bottom surface of the recess 31. As long as this is the case, the shape of the volatilizer 30 does not have to be the three parts 51 to 53 as described above. However, in order to efficiently volatilize the chemical solution to the outside of the apparatus, it is preferable that a part of the volatilizer 30 extends to a position near the position facing the volatilization hole 42. Also, as long as the chemical solution can be absorbed and volatilized to the outside, the material constituting the volatilizer 30 is not particularly limited. Also, the volatilizer 30 can be constituted by a plurality of materials.

[0058] <4-3> The shape of the container 10 is not particularly limited, as long as an internal space capable of accommodating at least the chemical solution is formed and a discharge pipe 22 to be inserted into the recess 31 is formed at the lower end of the container 10. Therefore, the shape of the container 10, including the shape of the discharge pipe 22, can be appropriately changed. Also, the valve member 23 attached to the discharge pipe 22 is not necessarily required, but it is preferably provided from the viewpoint of preventing the chemical solution from leaking during assembly. However, as long as it is normally in a closed state and becomes open during assembly, the structure and type of the valve member are not particularly limited.

[0059] <4-4> The configuration of the cover member 20 is not particularly limited, as long as it covers at least the lower end of the container 10 and a recess 31 for storing the chemical solution is formed. Therefore, the shape of the cover member 20, including the shape, position of the evaporation holes 42, and the presence or absence of the grooves 43 to 45, can be variously changed. For example, if a gap can be formed between the cover member 20 and the container 10, the evaporation holes 42 are not necessarily required. Also, a structure in which a part of the evaporator 30 is exposed to the outside may be used.

[0060] <4-5> The components of the chemical solution in the above embodiment are an example, and as long as the chemical solution can be sucked up by the evaporator 30 and evaporated, a chemical solution of other components can also be used.

[0061] <4-6> The chemical solution evaporator of the above embodiment is composed of three parts: the container 10, the cover member 20, and the evaporator 30. However, as long as it has a configuration that exhibits these functions in terms of the outer shape, these three parts can also be composed of a plurality of parts. In that case, the parts can be formed of different materials.

[0062] The container 10 and the cover member 20 are preferably formed of a resin material, but metal can also be used in part, and the material is not particularly limited.

Explanation of Reference Numerals

[0063] 10 Container 20 Cover Member 22 Drain pipe 30 Volatile body 31 Concave part

Claims

1. A container that stores a chemical solution and has a discharge pipe formed at its lower end for discharging the chemical solution; A volatilizer that absorbs and volatilizes the chemical solution discharged from the discharge pipe; A cover member that covers at least the lower end portion of the container; Comprising: The cover member includes a bottom wall portion and a side wall portion that stands up from the peripheral edge of the bottom wall portion; A recess for storing the chemical solution discharged from the discharge pipe is formed in a part of the bottom wall portion of the cover member; The discharge pipe is inserted into the recess such that a gap is formed between the lower end of the discharge pipe and the bottom surface of the recess, and the chemical solution discharged from the discharge pipe without passing through the volatilizer is stored in the recess; The volatilizer is housed between the container and the cover member and is configured to absorb and volatilize the chemical solution stored in the recess; The volatilizer includes a liquid absorption portion at least a part of which is disposed between the lower end of the discharge pipe and the bottom of the recess, and a gap is formed between the liquid absorption portion and the side wall of the recess. A chemical solution volatilization device.

2. The chemical solution volatilization device according to claim 1, wherein at least one volatilization hole for discharging the chemical solution volatilized from the volatilizer to the outside is formed in the side wall portion.

3. The chemical solution volatilization device according to claim 2, wherein at least one circumferential groove extending in the circumferential direction is formed on the outer surface of the side wall portion below the volatilization hole.

4. The chemical solution volatilization device according to claim 2 or 3, wherein vertical grooves extending downward from each volatilization hole are formed on the outer surface of the side wall portion.

5. The chemical solution volatilization device according to any one of claims 1 to 4, wherein the volatilizer further includes a volatilization portion extending upward from the liquid absorption portion.

6. A valve member that is normally in a closed state and is opened by pressing to regulate the discharge of the chemical solution is provided in the discharge pipe; A protrusion for pressing the valve member is formed inside the recess; When the discharge pipe is inserted into the recess such that a gap is formed between the lower end of the discharge pipe and the bottom surface of the recess, the protrusion of the recess presses the valve member to be in the open state. The chemical solution volatilization device according to any one of claims 1 to 5.

7. The container has a top wall portion and a side wall portion that extends downward from the peripheral edge of the top wall portion, and forms an internal space for storing the chemical solution with at least the top wall portion and the side wall portion; The chemical liquid volatilization device according to any one of claims 1 to 6, wherein at least one protrusion protruding downward is formed on the inner wall surface of the top wall portion.

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