Rail trolley system

Abstract

In the present invention an overhead traveling vehicle system comprises a track, in which a plurality of first rails extending in an X direction and a plurality of second rails extending in a Y direction are arranged as a grid, and a traveling vehicle, which travels on a pair of the first rails that are adjacent in the Y direction, and travels on a pair of the second rails that are adjacent in the X direction, wherein each of the first rails and second rails has a first surface on which a cell recognition mark is arranged, and a second surface on which a position recognition mark is arranged and which, when seen from the center of a cell in a plan view, is arranged on the outer side of the first surface and is inclined toward the traveling vehicle 2 relative to the first surface.

Description

Technical Field

[0001] One aspect of the present disclosure relates to a rail-mounted trolley system.

Background Art

[0002] As a technology related to a rail-mounted trolley system, Patent Document 1 discloses a ceiling conveyor system. This ceiling conveyor system includes a rail including a first rail (first track) extending in a first direction and a second rail (second track) extending in a second direction orthogonal to the first direction, and a rail-mounted trolley (ceiling conveyor) traveling along the rail. By arranging the first rail and the second rail in a grid pattern, a plurality of cells (compartments) are formed in plan view. The rail-mounted trolley moves in the first direction by traveling on a pair of adjacent first rails, and moves in the second direction by traveling on a pair of adjacent second rails. The rail-mounted trolley can move from one cell to another cell adjacent to the one cell by traveling in the first direction or the second direction.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Marks indicating predetermined information detectable by a sensor provided on the rail-mounted trolley are arranged on the first rail and the second rail constituting the rail. The rail-mounted trolley can be controlled based on the information by detecting the mark with the sensor and acquiring the information. Here, there may be a case where two types of marks indicating different types of information are arranged at the same position in the traveling direction of the rail. However, since there is only one surface for arranging marks on the above conventional rail, two types of marks cannot be arranged.

[0005] In response to such a problem, it is conceivable to form two surfaces on which two types of marks are respectively arranged on the rails. In this case, the rail-mounted carriage is configured such that the sensor faces the surface on which the mark is arranged. However, there is a desire to make the size of the rail-mounted carriage including the configuration for arranging such a sensor compact.

[0006] Therefore, an object of one aspect of the present disclosure is to provide a rail-mounted carriage system that can arrange two different types of marks on the rails while suppressing an increase in the size of the rail-mounted carriage.

Means for Solving the Problem

[0007] A rail-mounted carriage system according to one aspect of the present disclosure includes a rail in which a plurality of first rails extending in a first direction and second rails extending in a second direction orthogonal to the first direction are arranged in a lattice pattern, and a running section runs on a pair of adjacent first rails in the second direction to move in the first direction, and the running section runs on a pair of adjacent second rails in the first direction to move in the second direction. The rail-mounted carriage has a first sensor that acquires first information from a first mark indicating the first information, and a second sensor that acquires second information from a second mark indicating second information that is different from the first information. Each of the first rail and the second rail faces the first sensor and has a first surface on which the first mark is arranged, and faces the second sensor and has a second surface on which the second mark is arranged. When viewed from the center of a cell, which is a space surrounded by a pair of first rails and a pair of second rails in a plan view, the second surface is arranged outside the first surface and is inclined toward the rail-mounted carriage with respect to the first surface.

[0008] In the guided vehicle system with this configuration, since each of the first rail and the second rail forming the rail is provided with a first surface and a second surface different from the first surface, by arranging two different types of marks, one type for each surface, two different types of marks can be arranged at the same position in the running direction of the rail. Further, in the guided vehicle system with this configuration, the second surface arranged outside the first surface when viewed from the center of the cell in plan view is arranged so as to be inclined toward the guided vehicle side with respect to the first surface. Thereby, in order to oppose the second sensor to the second surface, it is not necessary to provide the second sensor so as to protrude from the guided vehicle, and an increase in the size of the guided vehicle can be suppressed.

[0009] The guided vehicle system according to one aspect of the present disclosure further includes a control unit that controls the guided vehicle. Either the first mark or the second mark is a position recognition mark indicating position information on the rail. Either one of the first sensor and the second sensor facing the position recognition mark is arranged to face each of the first surface or the second surface on which the position recognition mark is arranged on each of the pair of first rails when the guided vehicle moves in the first direction, and is arranged to face each of the first surface or the second surface on which the position recognition mark is arranged on each of the pair of second rails when the guided vehicle moves in the second direction. They are four position recognition sensors that acquire the position information from the position recognition mark. The control unit may derive the deviation amount between the predetermined position in the cell and the stop position of the guided vehicle based on the position information acquired by the position recognition sensor. In this case, the position deviation at the time of stopping of the guided vehicle can be detected.

[0010] In the guided vehicle system according to one aspect of the present disclosure, the guided vehicle has a transfer device for transferring an object, and the control unit may control the driving amount of the transfer device when moving the object in the horizontal direction based on the deviation amount. In this case, even when the guided vehicle is not stopped at the predetermined position in the cell, the position where the object is transferred by the transfer device is adjusted, so that the object can be accurately transferred to the predetermined transfer position.

[0011] In the rail-mounted cart system according to one aspect of the present disclosure, the rail-mounted cart has a transfer device for transferring an object and a horizontal turning mechanism for horizontally turning the object around a third direction orthogonal to both the first direction and the second direction, and the control unit may control the driving amount of the horizontal turning mechanism when horizontally turning the object based on the deviation amount. In this case, even when the rail-mounted cart is not stopped at a predetermined position within the cell, the position where the object is transferred by the transfer device is adjusted by the horizontal turning mechanism, so that the object can be transferred to a predetermined transfer position more accurately.

[0012] In the rail-mounted cart system according to one aspect of the present disclosure, the control unit may control the traveling unit so that the rail-mounted cart moves to a predetermined position within the cell based on the deviation amount. In this case, even when the rail-mounted cart is not stopped at a predetermined position within the cell, the position of the rail-mounted cart is adjusted, so that the object can be transferred to a predetermined transfer position more accurately.

Advantages of the Invention

[0013] According to one aspect of the present disclosure, it is possible to provide a rail-mounted cart system that can suppress the enlargement of the rail-mounted cart and arrange two different types of marks on the rail.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

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Figure 8

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Figure 10

Figure 11

Figure 12

Mode for Carrying Out the Invention

[0015] Hereinafter, embodiments of one aspect of the present disclosure will be described with reference to the drawings. In the description of the drawings, the same reference numerals are given to the same elements, and duplicate descriptions are omitted. In the drawings, for convenience of explanation, the respective configurations according to the embodiments are expressed with appropriately changed scales. An XYZ orthogonal coordinate system is shown in some of the drawings. In the following description, this coordinate system is referred to for ease of explanation. Hereinafter, one direction along the horizontal plane is defined as the X direction (first direction), the direction orthogonal to the X direction and along the horizontal plane is defined as the Y direction (second direction), and the vertical direction orthogonal to both the X direction and the Y direction is defined as the Z direction for explanation.

[0016] As shown in FIG. 1, a ceiling traveling vehicle system (rail-mounted vehicle system) 1 according to an embodiment is a grid system (transportation system) for transporting an article (object) M by a ceiling traveling vehicle (rail-mounted vehicle) 2 in, for example, a clean room of a semiconductor manufacturing factory. The ceiling traveling vehicle system 1 includes, for example, a plurality of ceiling traveling vehicles 2 (hereinafter collectively referred to as "traveling vehicles 2"), a system controller 5 that controls the plurality of traveling vehicles 2, and a track R on which the plurality of traveling vehicles 2 travel. The traveling vehicle 2 moves along the track R of the ceiling traveling vehicle system 1. The traveling vehicle 2 travels along the track R and transports an article M such as a FOUP (Front Opening Unified Pod) that houses a semiconductor wafer or a reticle Pod that houses a reticle. The traveling vehicle 2 may be referred to as a carriage, a transport vehicle, a transport carriage, or a traveling carriage. The plurality of traveling vehicles 2 enable high-density transportation of the article M and improve the transportation efficiency of the article M. Note that the ceiling traveling vehicle system 1 may include only one traveling vehicle 2.

[0017] The track R is provided on the ceiling or near the ceiling of a building such as a clean room. The track R is provided adjacent to, for example, a processing apparatus, a stocker (automated warehouse), or the like. The processing apparatus is, for example, an exposure apparatus, a coater developer, a film forming apparatus, an etching apparatus, or the like, and performs various processes on the semiconductor wafers in the article M transported by the traveling vehicle 2. The stocker stores the article M transported by the traveling vehicle 2.

[0018] The track R is arranged in a grid pattern in plan view (see also Fig. 5). The track R extends along the horizontal direction. In the present embodiment, the track R is constructed by arranging a plurality of rail units 100 including a first rail R1, a second rail R2, and an intersection rail R3 side by side in the X direction and the Y direction. The ceiling traveling vehicle system 1 includes a plurality of rail units 100 arranged side by side in the X direction and the Y direction, and a plurality of connecting members 140 that connect the plurality of rail units 100 to each other. The plurality of rail units 100 and the plurality of connecting members 140 form a rail assembly 200. The rail assembly 200 is suspended from a ceiling (not shown) or the like by a plurality of suspension members H at a portion where the rail units 100 are connected to each other by the connecting members 140.

[0019] Fig. 2 is an exploded perspective view showing four rail units 100 constituting the rail assembly 200 in Fig. 1 and the connecting members 140 that connect them. Each rail unit 100 is a rectangular parallelepiped (frame-shaped) member and has the same configuration. Each rail unit 100 includes two first rail members 110 arranged along the X direction, two second rail members 120 arranged along the Y direction, and four intersection rail members 130 arranged such that gaps are formed on the extension lines of the first rail members 110 and the second rail members 120 (i.e., at the positions of the intersections of the grids). When the rail unit 100 is viewed in plan view, two parallel first rail members 110 and two parallel second rail members 120 are arranged in a square shape, and four intersection rail members 130 are arranged at the positions of the vertices of the square.

[0020] Each rail unit 100 is, for example, made of metal and is a unit in which each of the first rail member 110, the second rail member 120, and the intersection rail member 130 is integrated after being formed. Each first rail member 110 includes a first beam portion 111 disposed at the upper end position of the rail unit 100 and extending in the X direction, a first rail R1 disposed at the lower end position of the rail unit 100 and extending in the X direction, and a first support wall 113 disposed between the first beam portion 111 and the first rail R1 and joined to the first beam portion 111 and the first rail R1. Each second rail member 120 includes a second beam portion 121 disposed at the upper end position of the rail unit 100 and extending in the Y direction, a second rail R2 disposed at the lower end position of the rail unit 100 and extending in the Y direction, and a second support wall 123 disposed between the second beam portion 121 and the second rail R2 and joined to the second beam portion 121 and the second rail R2. A lattice-like structure extending along the XY plane is formed at the upper end position of the rail assembly 200 by the plurality of first beam portions 111 and the plurality of second beam portions 121. The first support wall 113 extends along the XZ plane. The second support wall 123 extends along the YZ plane.

[0021] The intersection rail member 130 includes an intersection support column 133 extending along the Z direction (vertical direction) at a position where the first beam portion 111 and the second beam portion 121 are joined at a right angle, and an intersection rail R3 provided at the lower end of the intersection support column 133.

[0022] As shown in FIGS. 1 and 5, a plurality of first rails R1 extend along the X direction respectively. A plurality of second rails R2 extend along the Y direction respectively. In the track R, the plurality of first rails R1 and the plurality of second rails R2 are arranged in a grid pattern in a plan view. The track R is formed with a plurality of meshes by the plurality of first rails R1 and the plurality of second rails R2. That is, the track R forms a cell C which is a space surrounded by a pair of first rails R1 and a pair of second rails R2 in a plan view. The intersection rail R3 is arranged at a portion corresponding to the intersection of the first rail R1 and the second rail R2. The intersection rail R3 is adjacent to the first rail R1 with a space in the X direction and has a portion (first rail) extending in the X direction. The intersection rail R3 is adjacent to the second rail R2 in the Y direction and has a portion (second rail) extending in the Y direction. The intersection rail R3 is used in any of the cases when the traveling vehicle 2 travels along the first rail R1, when the traveling vehicle 2 travels along the second rail R2, and when the traveling vehicle 2 travels from the first rail R1 to the second rail R2 or from the second rail R2 to the first rail R1.

[0023] Each rail unit 100 forms a square (or rectangular) track R corresponding to one grid inside it. By arranging a plurality of rail units 100 in the X direction and the Y direction, a plurality of first rails R1 extend continuously in the X direction, and a plurality of second rails R2 extend continuously in the Y direction. On the X-direction line, two intersecting rails R3 are arranged at intervals between one first rail R1 and another first rail R1. On the Y-direction line, two intersecting rails R3 are arranged at intervals between one second rail R2 and another second rail R2. Another perspective of the track R will be described. When focusing on four grids consisting of two grids arranged in the X direction and two grids arranged in the Y direction, four intersecting rails R3 adjacent in the X and Y directions are arranged at intervals (with respect to the first rail R1) between two first rails R1 adjacent in the Y direction and another two first rails R1 adjacent in the Y direction. Also, the same four intersecting rails R3 are arranged at intervals (with respect to the second rail R2) between two second rails R2 adjacent in the X direction and another two second rails R2 adjacent in the X direction.

[0024] In the rail assembly 200, a plurality of first rails R1, a plurality of second rails R2, and a plurality of crossing rails R3 are arranged at a predetermined interval from each other, thereby constructing a track R. A gap G corresponding to the above interval is formed between each first rail R1 and each crossing rail R3. A gap G corresponding to the above interval is formed between each second rail R2 and each crossing rail R3. The gap G in the track R has a constant size. Each first rail R1 includes a first running surface R1a that is flat and horizontal on the upper surface, and the running wheels 31 of the running vehicle 2 run on the first running surface R1a in the X direction (the first running direction D1). Each second rail R2 includes a second running surface R2a that is flat and horizontal on the upper surface, and the running wheels 31 of the running vehicle 2 run on the second running surface R2a in the Y direction (the second running direction D2). The crossing rail R3 includes a crossing running surface R3a that is flat and horizontal on the upper surface. Over the entire track R, the heights of the first running surface R1a, the second running surface R2a, and the crossing running surface R3a are equal. The first running surface R1a, the second running surface R2a, and the crossing running surface R3a are arranged on the same or substantially the same horizontal plane.

[0025] For example, no gap of the size of the gap G is formed between the four crossing rails R3 described above. When the running vehicle 2 passes through a plurality of rail units 100 linearly, the running wheels 31 of the running vehicle 2 run on the crossing running surface R3a. At that time, the running wheels 31 pass over any two of the four crossing rails R3 described above. Alternatively, when the running vehicle 2 changes its running direction between the rail units 100 (when changing the running direction by 90 degrees, that is, when steering), the running wheels 31 of the running vehicle 2 pass over the crossing running surface R3a (while changing the direction).

[0026] As described above, in the rail assembly 200, a grid-shaped track R is constituted by the first rail member 110, the second rail member 120, and the crossing rail member 130. The layout of the grid-shaped track R in the ceiling running vehicle system 1 can be appropriately adjusted or changed by making a plurality of rail units 100 in an arbitrary arrangement (including addition or deletion of the rail units 100).

[0027] Referring to FIGS. 2 and 6, the connection structure of the rail unit 100 by the connecting member 140 will be described. As shown in FIGS. 2 and 6, each connecting member 140 includes an upper connecting member 141 and a lower connecting member 142. On the horizontally extending plate-shaped or frame-shaped upper connecting member 141, the upper surface of any one of the four corners of a plurality of (typically four) rail units 100 is attached. The upper connecting member 141 abuts near the intersection of the first beam portion 111 and the second beam portion 121 in each rail unit 100. The horizontally extending plate-shaped or frame-shaped lower connecting member 142 supports the lower surface of any one of the four corners of a plurality of (typically four) rail units 100. The lower connecting member 142 abuts against the intersecting rail R3 in each rail unit 100.

[0028] A vertically extending rod-shaped suspension member H passes through the upper connecting member 141 and the lower connecting member 142. The upper connecting member 141 and / or the lower connecting member 142 is fixed to the rail unit 100 by fastening members (not shown) and the like, whereby the rail units 100 are connected to each other. A space 100e extending in the Z direction is formed between the rail units 100, and a space R3e extending in the Z direction is formed between the four intersecting rails R3 adjacent to each other in the X direction and the Y direction (the central portion in plan view). The suspension member H is inserted into the space 100e and the space R3e, and the upper connecting member 141 and / or the lower connecting member 142 is fixed to the suspension member H.

[0029] The ceiling traveling vehicle system 1 includes a communication system (not shown). The communication system is used for communication between the traveling vehicle 2 and the system controller 5. The traveling vehicle 2 and the system controller 5 are communicably connected to each other via the communication system.

[0030] Next, with reference to FIGS. 1, 3, and 4, the configuration of the traveling vehicle 2 will be described. As shown in FIGS. 1 and 3, the traveling vehicle 2 is provided so as to be able to travel along the track R. The traveling vehicle 2 has a traveling bogie 20 that travels on the track R, and a main body portion 10 that is attached to the lower part of the traveling bogie 20 and is rotatable with respect to the traveling bogie 20. The traveling bogie 20 includes, for example, a rectangular bogie unit 50 disposed below the track R, traveling portions 30 provided at the four corners of the bogie unit 50 in plan view and protruding upward from the bogie unit 50, and four wheel turning mechanisms 40 that turn each of the four traveling wheels 31 in the traveling portion 30 with respect to the bogie unit 50. Inside the bogie unit 50, a bogie controller (control unit) 8 is provided.

[0031] The main body portion 10 is disposed below the track R. As shown in FIGS. 3 and 4, the main body portion 10 has a main body frame 12 formed in a cylindrical shape, for example. The main body frame 12 includes a disk-shaped top plate portion 12a and a cylindrical frame 12b hanging from the peripheral edge of the top plate portion 12a, and has a shape with an open bottom surface. The main body portion 10 is formed to have dimensions that fit within one grid in the track R in plan view. The traveling vehicle 2 can pass by other traveling vehicles 2 traveling on the adjacent first rail R1 or second rail R2. The main body portion 10 includes a transfer device 18 disposed inside the main body frame 12. The transfer device 18 is, for example, rectangular in plan view. The cylindrical frame 12b is open in a part of the circumferential direction. The range in which the opening portion (notch) is formed is large enough to allow the passage of the transfer device 18. The transfer device 18 passes through the opening portion of the cylindrical frame 12b when moving horizontally.

[0032] The main body part 10 is attached to the lower part of the carriage unit 50 and is rotatable around the rotation axis L10 in the Z direction with respect to the carriage unit 50. The traveling wheels 31 provided at the four corners of the carriage unit 50 are placed on the track R (on the first traveling surface R1a, the second traveling surface R2a, or the intersection traveling surface R3a). The carriage unit 50 is suspended from the track R via four traveling wheels 31 and four wheel turning mechanisms 40. The four traveling wheels 31 can stably suspend the carriage unit 50 and the main body part 10, and can stably run the main body part 10. That is, the traveling vehicle 2 is suspended and supported by the traveling wheels 31 that travel along the track R and moves below the track R.

[0033] The transfer device 18 moves horizontally with respect to the main body part 10 and transfers the article M to and from the load port (mounting table). The transfer device 18 is provided below the top plate part 12a of the main body frame 12. The main body part 10 including the transfer device 18 is rotatable around the rotation axis L10 by a rotation drive part (horizontal turning mechanism) 12c such as an electric motor provided on the top plate part 12a. The transfer device 18 has an article holding part 13 that holds the article M below the track R, a lifting drive part 14 that moves the article holding part 13 up and down in the vertical direction, and a slide mechanism 11 that slides the lifting drive part 14 in the horizontal direction. The slide mechanism 11 is held on the lower surface of the top plate part 12a. Between the slide mechanism 11 and the lifting drive part 14, a rotation drive part 16 that rotationally drives the lifting drive part 14 around the rotation axis L14 with respect to the slide mechanism 11 is provided. The rotation drive part 16 is provided below the slide mechanism 11, and the lifting drive part 14 is provided below the rotation drive part 16. The article holding part 13 is provided below the lifting drive part 14 via a plurality of suspension members 13b. The load port is a transfer destination or a transfer source of the traveling vehicle 2 and is a point where the article M is transferred to and from the traveling vehicle 2.

[0034] The article holding part 13 suspends and holds the article M by gripping the flange part Ma of the article M. The article holding part 13 is, for example, a chuck having a claw part 13a movable in the horizontal direction. The article holding part 13 holds the article M by causing the claw part 13a to enter below the flange part Ma of the article M and raising the article holding part 13. The article holding part 13 is connected to a suspension member 13b such as a wire or a belt.

[0035] The lifting drive part 14 is, for example, a hoist, which lowers the article holding part 13 by paying out the suspension member 13b and raises the article holding part 13 by winding up the suspension member 13b. The lifting drive part 14 is controlled by the carriage controller 8 to lower or raise the article holding part 13 at a predetermined speed. Further, the lifting drive part 14 is controlled by the carriage controller 8 to hold the article holding part 13 at a target height.

[0036] The slide mechanism 11 has, for example, a plurality of movable plates arranged one above the other in the Z direction. By turning the main body part 10, the slide mechanism 11 moves the rotation drive part 16, the lifting drive part 14, and the article holding part 13 attached to the lowermost movable plate in an arbitrary direction within the horizontal plane. The moving direction of the movable plate in the slide mechanism 11 is determined by the turning angle of the main body part 10 with respect to the carriage unit 50. In the main body part 10, the orientation of the transfer device 18 and the main body frame 12 is set so that the moving direction of the movable plate coincides with the position of the opening part of the cylindrical frame 12b.

[0037] The rotation drive unit 16 includes, for example, an electric motor or the like, and rotates the lifting drive unit 14 (and the article holding unit 13) within a predetermined angular range around the rotation axis L14 extending in the vertical direction. The angle that can be rotated by the rotation drive unit 16 is, for example, any angle of 180 degrees or less, but the upper limit is not limited to 180 degrees. By the rotation drive unit 16, the laterally extended article holding unit 13 (or the article M held by the article holding unit 13) can be oriented in a desired direction. The slide mechanism 11 and the rotation drive unit 16 are controlled by the cart controller 8. Note that even in a state where the movable plate of the slide mechanism 11 is not moved and is stored (the state shown by the solid line in FIG. 3), the rotation drive unit 16 can rotate the lifting drive unit 14. In that case, for example, the rotation axis L14 of the lifting drive unit 14 coincides with the rotation axis L10 of the main body unit 10.

[0038] The cart unit 50 has, at its lower end, a cylindrical support member (cylindrical member) 52. On the lower surface side of the support member 52, the top plate portion 12a of the main body frame 12 is rotatably attached. For example, a rotation drive unit 12c such as an electric motor is provided on the top plate portion 12a. By transmitting the driving force of the rotation drive unit 12c to the support member 52, the main body frame 12 rotates around the rotation axis L10 extending in the vertical direction with respect to the cart unit 50. The angle by which the main body frame 12 can rotate is, for example, any angle of 360 degrees or more and 540 degrees or less, but the upper limit is not limited to 540 degrees and the lower limit is not limited to 360 degrees. The slide mechanism 11 is attached to the lower surface side of the top plate portion 12a, and the top plate portion 12a supports the slide mechanism 11. The main body frame 12 and the transfer device 18 are integrated, and the main body frame 12 and the transfer device 18 rotate together. The traveling vehicle 2 can transfer the article M to and from the load port by using the transfer device 18.

[0039] Note that a cover (not shown) may be attached to the outer surface side of the cylindrical frame 12b. In that case, the cover surrounds the transfer device 18 and the article M held by the transfer device 18. The cover has a cylindrical shape with an open lower end and has a shape in which a portion (the above-mentioned open portion) where the movable plate of the slide mechanism 11 protrudes is cut out.

[0040] The running unit 30 has four running wheels 31. Two auxiliary wheels 32 are provided on each running wheel 31. As shown in FIG. 4, the running wheels 31 are provided so as to protrude upward from the upper surface cover 51 at the four corners of the bogie unit 50. Each running wheel 31 is rotatable about an axis of a horizontal or substantially horizontal axle along the XY plane. A running drive motor 33 is provided on the rotation axis of each running wheel 31. Each running wheel 31 is rotationally driven by the driving force of the running drive motor 33. The running drive motor 33 is configured to be able to switch between forward rotation and reverse rotation, for example. Each of the running wheels 31 rolls on the track R. Each of the running wheels 31 rolls on the running surfaces R1a, R2a, and R3a of the first rail R1, the second rail R2, and the intersection rail R3, and runs the running vehicle 2. Note that not all of the four running wheels 31 are limited to being rotationally driven by the driving force of the running drive motor 33, and a configuration in which a part of the four running wheels 31 is rotationally driven may be used.

[0041] When the running wheels 31 of the running unit 30 run on the first running surfaces R1a of a pair of adjacent first rails R1 in the Y direction, the running vehicle 2 moves in the X direction. Also, when the running wheels 31 of the running unit 30 run on the second running surfaces R2a of a pair of adjacent second rails R2 in the X direction, the running vehicle moves in the Y direction.

[0042] Four wheel turning mechanisms 40 are fixed to a frame (not shown) inside the bogie unit 50, and a pedestal portion 34 is connected to each wheel turning mechanism 40 via a turning axis of the wheel turning mechanism 40. A running wheel 31, two auxiliary wheels 32, and one running drive motor 33 are attached to the pedestal portion 34 via a connecting portion 35 and a support member 36. For example, a square upper surface cover 51 is provided on the upper surface of the housing 53, and the pedestal portion 34 is disposed in notches formed at the four corners of the upper surface cover 51. The connecting portion 35, the running wheel 31, the auxiliary wheel 32, and the running drive motor 33 are disposed above the upper surface cover 51.

[0043] As shown in FIGS. 3 and 4, the connecting portion 35 connects the bogie unit 50 (specifically, the wheel turning mechanism 40 fixed within the bogie unit 50) and the running wheels 31. Due to this connection structure, the bogie unit 50 and the main body portion 10 are disposed below the track R and are in a state of being suspended from the running portion 30. The connecting portion 35 is formed to have a thickness that can pass through the gaps G between the first rail R1 and the intersection rail R3 and between the second rail R2 and the intersection rail R3. The support member 36 is provided above the connecting portion 35 and rotatably supports the rotation axes of the running wheels 31 and the auxiliary wheels 32. The support member 36 holds the relative positions of the running wheels 31 and the auxiliary wheels 32.

[0044] As shown in FIG. 4, the running wheels 31 are provided so as to be rotatable about a turning axis L30 extending in the vertical direction. The four turning axes L30 are arranged at the positions of the vertices of a square in a plan view, and the rotation axis L10 is arranged at the center of the turning axis L30. In other words, the four turning axes L30 are arranged at positions that are rotationally symmetric four times with respect to the rotation axis L10 of the main body portion 10. In a plan view, the positions of the running wheels 31 and the turning axis L30 are different (shifted). The running wheels 31 are turned by the wheel turning mechanism 40, and as a result, the running direction of the running vehicle 2 can be changed.

[0045] The auxiliary wheels 32 are arranged one each in front of and behind the traveling wheel 31 in the traveling direction. Each of the auxiliary wheels 32 is rotatable about an axis of a horizontal or substantially horizontal axle along the XY plane. The lower end of the auxiliary wheel 32 is set, for example, to be higher than the lower end of the traveling wheel 31. Therefore, when the traveling wheel 31 is traveling on the running surfaces R1a, R2a, R3a, the auxiliary wheel 32 does not contact the running surfaces R1a, R2a, R3a. Further, when the traveling wheel 31 passes through the gaps G between the first rail R1 and the intersection rail R3 and between the second rail R2 and the intersection rail R3, the auxiliary wheel 32 contacts auxiliary members (not shown) provided on the first rail R1 and the second rail R2 to suppress the dropping of the traveling wheel 31. Note that the present invention is not limited to providing two auxiliary wheels 32 for one traveling wheel 31. For example, one auxiliary wheel 32 may be provided for one traveling wheel 31, or no auxiliary wheel 32 may be provided.

[0046] The four wheel turning mechanisms 40 are arranged, for example, at the four corners inside the housing 53 of the carriage unit 50. Each wheel turning mechanism 40 includes a steering motor 43 and a driving force transmission unit 42 provided between the steering motor 43 and the traveling wheel 31. The driving force transmission unit 42 is fixed to a frame (not shown) inside the carriage unit 50. The driving force transmission unit 42 and the pedestal portion 34 are connected via a turning axis. Each wheel turning mechanism 40 integrally turns the pedestal portion 34, the connecting portion 35, the support member 36, the traveling wheel 31, the auxiliary wheel 32, and the traveling drive motor 33 around the turning axis line L30. With the traveling vehicle 2 positioned at the center of each rail unit 100, each traveling wheel 31 is turned 90 degrees around each turning axis line L30. As a result, the traveling wheel 31 turns on the intersection rail R3. Thereby, the traveling vehicle 2 can turn. Turning means that the traveling vehicle 2 switches from the first state of traveling in the first traveling direction D1 to the second state of traveling in the second traveling direction D2, or from the second state of traveling in the second traveling direction D2 to the first state of traveling in the first traveling direction D1. The turning of the traveling vehicle 2 is performed, for example, when the traveling vehicle 2 is in a stopped state. The turning of the traveling vehicle 2 may be performed when the traveling vehicle 2 is stopped but the article M is moving (for example, turning). The driving of the wheel turning mechanism 40 is controlled by the carriage controller 8.

[0047] As described above, a gap G is formed in the track R. When the traveling vehicle 2 travels on the first rail R1 and crosses the second rail R2, or when the traveling vehicle 2 travels on the second rail R2 and crosses the first rail R1, a part of the traveling vehicle 2 (specifically, for example, the connecting portion 35) passes through the gap G.

[0048] Note that a guide roller that abuts against the side surface of the intersection rail R3 may be provided between the traveling wheel 31 and the wheel turning mechanism 40 (for example, near the connecting portion 35). The guide roller prevents the displacement of the traveling carriage 20 (traveling vehicle 2) with respect to the track R.

[0049] The traveling vehicle 2 is provided with one cell recognition sensor (first sensor) S1 and four position recognition sensors (second sensors) S2. In the example of FIG. 4, only three of the four position recognition sensors S2 are shown. The cell recognition sensor S1 and the position recognition sensors S2 are housed in the housing 53 of the carriage unit 50. The cell recognition sensor S1 is arranged such that the detection direction faces upward substantially perpendicular to the upper cover 51. The position recognition sensors S2 are arranged such that the detection directions face substantially upward. More specifically, the position recognition sensors S2 are arranged such that the detection directions face a direction inclined outward when viewed from the center of the cell C with respect to the Z direction.

[0050] On the track R, a cell recognition mark (first mark) M1 and a position recognition mark (second mark) M2 are arranged (see FIG. 7). The cell recognition sensor S1 non - contact detects the cell recognition mark M1 arranged on the track R. The position recognition sensors S2 non - contact detect the position recognition marks M2 arranged on the track R. The position recognition sensors S2 detect the position recognition marks M2 through the notch 51a provided in the upper cover 51. Details of the cell recognition mark M1 and the position recognition mark M2 will be described later.

[0051] When the traveling vehicle 2 is located at a predetermined position within the cell C (when stopped or when traveling), the cell recognition sensor S1 faces the cell recognition mark M1. At this time, the cell recognition sensor S1 acquires information (first information) of the cell C from the cell recognition mark M1.

[0052] The position recognition sensor S2 is arranged to face each of the second surfaces 62 (see FIG. 8) on which the position recognition marks M2 are arranged in each of the pair of first rails R1 included in the rail unit 100 when the traveling vehicle 2 moves in the X direction. Further, the position recognition sensor S2 is arranged to face each of the second surfaces 62 on which the position recognition marks M2 are arranged in each of the pair of second rails R2 included in the rail unit 100 when the traveling vehicle 2 moves in the Y direction. The position recognition sensor S2 acquires position information (second information) on the track R from the position recognition mark M2.

[0053] The bogie controller 8 comprehensively controls the traveling vehicle 2. The bogie controller 8 is a computer including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The bogie controller 8 can be configured as software in which, for example, a program stored in the ROM is loaded onto the RAM and executed by the CPU. The bogie controller 8 may be configured as hardware such as an electronic circuit. The bogie controller 8 may be configured by one device or a plurality of devices. When configured by a plurality of devices, these are connected via a communication network such as the Internet or an intranet, thereby logically constructing one bogie controller 8. The bogie controller 8 is provided, for example, in the bogie unit 50.

[0054] The carriage controller 8 controls the travel of the traveling vehicle 2 based on a conveyance command. The carriage controller 8 controls the travel of the traveling vehicle 2 by controlling the travel drive motor 33, the steering motor 43, etc. The carriage controller 8 controls, for example, the travel speed, the operations related to stopping, and the operations related to changing direction. The carriage controller 8 controls the transfer operation of the traveling vehicle 2 based on a conveyance command. The carriage controller 8 controls the transfer direction of the transfer device 18 by controlling the turning (rotation) of the main body 10 (the main body frame 12 and the transfer device 18). The carriage controller 8 controls the transfer operation of the traveling vehicle 2 by controlling the transfer device 18, etc. The carriage controller 8 controls the operation of gripping the article M placed at a predetermined load port and the operation of unloading the held article M to a predetermined load port.

[0055] The system controller 5 is a computer composed of a CPU, a ROM, a RAM, etc. The system controller 5 can be configured as software in which, for example, a program stored in the ROM is loaded onto the RAM and executed by the CPU. The system controller 5 may be configured as hardware by an electronic circuit or the like. The system controller 5 may be composed of one device or may be composed of a plurality of devices. When it is composed of a plurality of devices, these are connected via a communication network such as the Internet or an intranet, whereby a logically single system controller 5 is constructed. At least a part of the various controls of the system controller 5 may be executed by the carriage controller 8.

[0056] The system controller 5 selects any one of a plurality of traveling vehicles 2 capable of conveying the article M and assigns a conveyance command to the selected traveling vehicle 2. The conveyance command includes a travel command for causing the traveling vehicle 2 to travel to the load port, a gripping command for the article M placed at the load port, or an unloading command for the held article M to the load port.

[0057] FIG. 7 is a perspective view showing the rail unit 100 in FIG. 2. FIG. 8 is a schematic cross-sectional view of the first rail R1 when cut along a plane orthogonal to the X direction. In the example of FIG. 7, the state of one rail unit 100 viewed from the negative Z direction is illustrated. Each of the first rail R1 and the second rail R2 included in the rail unit 100 has a first surface 61 and a second surface 62.

[0058] First, the first rail R1 will be described. In the present embodiment, the first surface 61 is orthogonal to the Z direction. The first surface 61 is parallel to the first running surface R1a in the Z direction. The shape of the first surface 61 is rectangular and extends in the X direction in plan view. The first surface 61 is formed so as to face the cell recognition sensor S1 of the traveling vehicle 2. The first surface 61 is formed so that the traveling vehicle 2 can travel in the X direction with the cell recognition sensor S1 of the traveling vehicle 2 facing it.

[0059] A cell recognition mark M1 indicating information of the cell C is arranged on the first surface 61. It can be said that the cell recognition mark M1 indicates information as to which cell among a plurality of cells C constituted by the track R. The information of the cell C may be an ID that uniquely identifies the cell C, or may be information regarding the position of the cell C. In the present embodiment, the cell recognition mark M1 is constituted by one barcode Ba. In the example of FIG. 7, the barcode Ba is arranged at the center of the first rail R1 (the first surface 61) in the X direction. The cell recognition mark M1 faces the cell recognition sensor S1 in a state where the traveling vehicle 2 is located at a predetermined position within the cell C. The cell recognition sensor S1 acquires information of the cell C from the cell recognition mark M1.

[0060] In this embodiment, the predetermined position refers to the cell center. The state where the traveling vehicle 2 is located at the cell center within the cell C means that the bogie unit 50 is not displaced in the horizontal direction with respect to the cell C and is not displaced in the rotational direction with respect to the cell C. "The bogie unit 50 is not displaced in the horizontal direction with respect to the cell C" means that the center of the bogie unit 50 and the center of the cell C coincide in a plan view. "The bogie unit 50 is not displaced in the rotational direction with respect to the cell C" means that, in a plan view, each of the two sides extending in the X direction among the four sides of the rectangular bogie unit 50 is parallel to a pair of first rails R1 constituting the cell C, and each of the two sides extending in the Y direction is parallel to a pair of second rails R2 constituting the cell C. Note that the center of the first rail R1 or the center of the cell C does not necessarily have to be exactly at the center, and may have a certain width.

[0061] The second surface 62 is disposed outside the first surface 61 when viewed from the center of the cell C. The second surface 62 is inclined toward the traveling vehicle 2 side (the lower side in the vertical direction in the example of FIG. 7) with respect to the first surface 61. The shape of the second surface 62 is a rectangular shape extending in the X direction when viewed from a direction orthogonal to the second surface 62. The second surface 62 is formed to face the position recognition sensor S2 of the traveling vehicle 2. The second surface 62 is formed such that the traveling vehicle 2 can travel in the X direction with the position recognition sensor S2 of the traveling vehicle 2 facing it.

[0062] On the second surface 62, a position recognition mark M2 indicating position information on the track R (first rail R1) is arranged. The position information on the first rail R1 may be information regarding the position in the X direction on the first rail R1, or may be information regarding the distance from the center (center of the cell) of the first rail R1 in the X direction. The information indicated by the position recognition mark M2 is different from the information indicated by the cell recognition mark M1. In the present embodiment, the position recognition mark M2 is constituted by a plurality (14 in one example) of barcodes Bb arranged in the X direction. The plurality of barcodes Bb are arranged on the second surface 62 without gaps along the X direction. The position recognition mark M2 faces the position recognition sensor S2 in a state where the traveling vehicle 2 is traveling or stopped along the first rail R1. The position recognition sensor S2 acquires the position information on the first rail R1 from the position recognition mark M2.

[0063] Subsequently, the second rail R2 will be described. In the present embodiment, the configuration of the second rail R2 is the same as the configuration of the first rail R1. Therefore, the description overlapping with that of the first rail R1 described above will be omitted as appropriate.

[0064] In the second rail R2, the first surface 61 is parallel to the second running surface R2a (see FIGS. 1, 2, and 5) in the Z direction. The shape of the first surface 61 is rectangular extending in the Y direction in plan view. The first surface 61 is formed so that the traveling vehicle 2 can travel in the Y direction with the cell recognition sensor S1 facing it. On the first surface 61, a barcode Ba which is the cell recognition mark M1 is arranged. In the example of FIG. 7, the barcode Ba is arranged at the center of the second rail R2 (first surface 61) in the Y direction.

[0065] The shape of the second surface 62 is a rectangular shape extending in the Y direction when viewed from a direction orthogonal to the second surface 62. The second surface 62 is formed so that the traveling vehicle 2 can travel in the Y direction with the position recognition sensor S2 of the traveling vehicle 2 facing it. A position recognition mark M2 is disposed on the second surface 62. The position information in the second rail R2 may be information regarding the position in the Y direction in the second rail R2, or may be information regarding the distance from the center (center of the cell) of the second rail R2 in the Y direction. In the present embodiment, the position recognition mark M2 is constituted by a plurality (14 in one example) of barcodes Bb arranged in the Y direction. The plurality of barcodes Bb are arranged on the second surface 62 along the Y direction without gaps. The position recognition mark M2 faces the position recognition sensor S2 when the traveling vehicle 2 is traveling or stopped along the second rail R2. The position recognition sensor S2 acquires the position information in the second rail R2 from the position recognition mark M2.

[0066] FIG. 9 is a block diagram showing the functional configuration of the traveling vehicle 2 in FIG. 3. The bogie controller 8 acquires the detection result of the cell recognition sensor S1. Specifically, the bogie controller 8 acquires the information of the cell C acquired by the cell recognition sensor S1. Further, the bogie controller 8 specifies the cell C in which the traveling vehicle 2 is located based on the information of the cell C.

[0067] The bogie controller 8 acquires the detection result of the position recognition sensor S2. Specifically, the bogie controller 8 acquires the position information acquired by the position recognition sensor S2. Further, the bogie controller 8 derives the deviation amount between the predetermined position in the cell C and the stop position of the traveling vehicle 2 based on the position information. The deviation amount includes the deviation amount in the horizontal direction (X direction and Y direction) and the deviation amount in the rotational direction around the Z direction.

[0068] The deviation amount in the X direction can be derived by performing a predetermined calculation process using, for example, the position information obtained by at least one of the two position recognition sensors S2 facing the second surface 62 of the first rail R1 and the position information of the center of the cell C stored in advance. Also, for the deviation amount in the X direction, a table in which the relationship between the position information indicated by the position recognition mark M2 and the above deviation amount is stored in advance is stored, and a reading process is performed to read out the deviation amount corresponding to the position information indicated by the position recognition mark M2 obtained by the position recognition sensor S2 from the table, whereby the deviation amount in the X direction can be derived. The deviation amount in the Y direction can also be derived by the above calculation process or reading process, similarly to the deviation amount in the X direction.

[0069] The deviation amount in the rotational direction around the Z axis can be derived by performing a predetermined calculation process using, for example, the four position information obtained from the two position recognition sensors S2 facing the second surface 62 of the first rail R1 and the two position recognition sensors S2 facing the second surface 62 of the second rail R2. Note that the deviation amount in the rotational direction around the Z axis can be derived by performing a predetermined calculation process using at least the above three position information. Also, for the deviation amount in the rotational direction around the Z axis, a table in which the relationship between the position information and the deviation amount of each of the four rails constituting one cell C is stored in advance is stored, and a reading process is performed to read out the deviation amount corresponding to the three position information obtained by the position recognition sensor S2 from the table, whereby the deviation amount in the rotational direction around the Z axis can be derived.

[0070] The carriage controller 8 moves the article M in the horizontal direction by controlling the slide mechanism 11 included in the transfer device 18. Specifically, the carriage controller 8 controls the movement amount of the movable plate of the slide mechanism 11 to control the movement amount of the article M. The carriage controller 8 controls the driving amount of the slide mechanism 11 when moving the article M in the horizontal direction based on the deviation amount in the horizontal direction.

[0071] Using FIG. 10, an example of the operation of the traveling vehicle 2 when placing the article M on the load port LP while controlling the driving amount of the slide mechanism 11 will be described in more detail. In FIG. 10(a), a state is illustrated in which the traveling vehicle 2 that is transporting the article M in the first traveling direction D1 has stopped at a position horizontally displaced with respect to a predetermined position within the cell C. Specifically, the stop position of the traveling vehicle 2 is displaced in the X direction with respect to the predetermined position. As a result, the position of the article M is displaced in the X direction with respect to the load port LP at which the article M is transferred in plan view. In the example of FIG. 10, the load port LP is located directly below the center of the cell C in the vertical direction.

[0072] First, two position recognition sensors S2 facing the second surface 62 of the pair of first rails R1 acquire position information on the first rails R1 from the position recognition marks M2. Next, the carriage controller 8 derives the deviation amount between the predetermined position within the cell C and the stop position of the traveling vehicle 2 based on the position information acquired by the two position recognition sensors S2.

[0073] Subsequently, the carriage controller 8 moves the article M in the horizontal direction (X direction) by driving the slide mechanism 11. At this time, the carriage controller 8 controls the moving amount of the movable plate of the slide mechanism 11 based on the deviation amount in the horizontal direction. As a result, the article M is moved in the X direction based on the deviation amount derived by the carriage controller 8. Therefore, as shown in FIG. 10(b), the position of the article M with respect to the position of the load port LP is adjusted.

[0074] In addition, the carriage controller 8 horizontally rotates the transfer device 18 and the article M held by the transfer device 18 about the Z direction by controlling the rotation drive unit 12c provided on the top plate portion 12a. Specifically, the carriage controller 8 controls the horizontal rotation amount of the transfer device 18 and the article M held by the transfer device 18 by controlling the drive amount of the rotation drive unit 12c. The carriage controller 8 controls the drive amount of the rotation drive unit 12c when horizontally rotating the article M based on the deviation amount in the rotation direction derived as described above.

[0075] Using FIG. 11, another example of the operation of the traveling vehicle 2 when placing the article M on the load port LP while controlling the driving amount of the rotation driving unit 12c will be described in more detail. In FIG. 11(a), a state is illustrated in which the traveling vehicle 2 during conveyance of the article M has stopped at a position shifted in the rotational direction with respect to a predetermined position within the cell C. Specifically, the stop position of the traveling vehicle 2 is shifted in the clockwise direction with respect to the predetermined position. As a result, the position of the article M is shifted in the clockwise direction with respect to the load port LP. In the example of FIG. 11, the load port LP is located directly below the center of the cell C in the vertical direction.

[0076] First, the four position recognition sensors S2 acquire position information from the position recognition mark M2. Next, the carriage controller 8 derives the amount of deviation between the predetermined position within the cell C and the stop position of the traveling vehicle 2 based on the position information acquired by the four position recognition sensors S2.

[0077] Subsequently, the carriage controller 8 drives the rotation driving unit 12c provided on the top plate portion 12a to horizontally swing the article M in the counterclockwise direction about the Z direction. At this time, the carriage controller 8 controls the driving amount of the rotation driving unit 12c based on the amount of deviation in the rotational direction. As a result, the article M is horizontally swung in the counterclockwise direction based on the amount of deviation derived by the carriage controller 8. Therefore, as shown in FIG. 11(b), the position of the article M with respect to the position of the load port LP is adjusted.

[0078] Next, the operation and effect of the ceiling traveling vehicle system 1 according to the present embodiment will be described. In the ceiling traveling vehicle system 1 of the above embodiment, since the first surface 61 and the second surface 62 different from the first surface 61 are provided on each of the first rail R1 and the second rail R2 forming the track R, at least two different types of marks can be arranged at the same position in the traveling direction of the track R by arranging at least two different types of marks, one type on each surface. Further, in the ceiling traveling vehicle system 1 having this configuration, the second surface 62 disposed outside the first surface 61 when viewed from the center of the cell C in plan view is disposed so as to be inclined toward the traveling vehicle 2 side with respect to the first surface 61. Thereby, in order to oppose the position recognition sensor S2 to the second surface 62, it is not necessary to provide the position recognition sensor S2 so as to project from the traveling vehicle 2, and an increase in the size of the traveling vehicle 2 can be suppressed.

[0079] The ceiling traveling vehicle system 1 of the above embodiment further includes a carriage controller 8 that controls the traveling vehicle 2. One of the two different types of marks is a position recognition mark M2 indicating position information on the track R. The position recognition sensor S2 facing the position recognition mark M2 is arranged so as to face each of the position recognition marks M2 arranged on each of the pair of first rails R1 when the traveling vehicle 2 moves in the X direction. Further, the position recognition sensor S2 is arranged so as to face each of the position recognition marks M2 arranged on each of the pair of second rails R2 when the traveling vehicle 2 moves in the Y direction. Further, the position recognition sensor S2 is four position recognition sensors S2 that acquire position information from the position recognition mark M2. The carriage controller 8 derives the deviation amount between the predetermined position in the cell C and the stop position of the traveling vehicle 2 based on the position information acquired by the position recognition sensor S2. In this case, the carriage controller 8 can detect the position deviation when the traveling vehicle 2 stops.

[0080] In the ceiling traveling vehicle system 1 of the above-described embodiment, the traveling vehicle 2 has a transfer device 18 for transferring the article M, and the carriage controller 8 controls the driving amount of the transfer device 18 when moving the article M in the horizontal directions (X direction and Y direction) based on the deviation amount. In this case, even when the traveling vehicle 2 is not stopped at a predetermined position within the cell C, the position where the article M is transferred by the transfer device 18 is adjusted, so that the article M can be accurately transferred to a predetermined transfer position.

[0081] In the ceiling traveling vehicle system 1 of the above-described embodiment, the traveling vehicle 2 has a transfer device 18 for transferring the article M. The traveling vehicle 2 has a top plate portion 12a and a rotation drive portion 16 for horizontally rotating the article M around the Z direction. The carriage controller 8 controls the driving amount of the rotation drive portion 12c provided on the top plate portion 12a when the article M is horizontally rotated, and the driving amount of the rotation drive portion 16 included in the transfer device 18 based on the deviation amount. In this case, even when the traveling vehicle 2 is not stopped at a predetermined position within the cell C, the position where the article M is transferred by the transfer device 18 is adjusted by the top plate portion 12a and the rotation drive portion 16, so that the article M can be transferred more accurately to a predetermined transfer position.

[0082] In the ceiling traveling vehicle system 1 of the above-described embodiment, the carriage controller 8 controls the traveling portion 30 so that the traveling vehicle 2 moves to a predetermined position within the cell C based on the deviation amount. In this case, even when the traveling vehicle 2 is not stopped at a predetermined position within the cell C, the position of the traveling vehicle 2 is adjusted, so that the article M can be transferred more accurately to a predetermined transfer position.

[0083] As described above, the embodiments of one aspect of the present disclosure have been described, but one aspect of the present disclosure is not limited to the above-described embodiments.

[0084] In the above embodiment, in the configuration where the load port LP is provided directly below the center of the cell C in the vertical direction, when the traveling vehicle 2 stops at a position deviated from the center of the cell C, by controlling the moving amount of the movable plate of the slide mechanism 11 and / or the driving amount of the rotational drive units 12c and 16, an example of transferring the article M to a predetermined position of the load port LP has been described, but the present invention is not limited thereto. The carriage controller 8 may control the moving amount of the traveling vehicle 2 along the X direction and the Y direction by controlling the traveling unit 30. Specifically, the carriage controller 8 may control the driving amount of the traveling drive motor 33 that drives the traveling wheels 31 included in the traveling unit 30. The carriage controller 8 controls the traveling unit 30 so that the traveling vehicle 2 moves to the predetermined position based on the deviation amounts in the horizontal direction and the rotational direction.

[0085] Using FIG. 12, an example of the operation of the traveling vehicle 2 when placing the article M on the load port LP while controlling the driving amount of the traveling drive motor 33 will be described in more detail. FIG. 12(a) illustrates a state in which the traveling vehicle 2 transporting the article M in the first traveling direction D1 has stopped at a position horizontally deviated from a predetermined position within the cell C. Specifically, the stop position of the traveling vehicle 2 is deviated in the X direction with respect to the predetermined position. As a result, the position of the article M is deviated in the X direction with respect to the load port LP. In the example of FIG. 12 as well, the load port LP is located directly below the center of the cell C in the vertical direction.

[0086] First, two position recognition sensors S2 facing the second surface 62 of the pair of first rails R1 acquire position information from the position recognition mark M2. Next, the carriage controller 8 derives the deviation amount between the predetermined position in the cell C and the stop position of the traveling vehicle 2 based on the position information acquired by the two position recognition sensors S2.

[0087] Subsequently, the carriage controller 8 moves the traveling vehicle 2 in the horizontal direction (X direction) by driving the traveling unit 30. At this time, the carriage controller 8 controls the driving amount of the traveling unit 30 based on the horizontal deviation amount. As a result, the article M is moved in the X direction based on the deviation amount derived by the carriage controller 8. Therefore, as shown in FIG. 12(b), the position of the article M with respect to the position of the load port LP is adjusted.

[0088] In the above-described embodiment and modification, an example in which the article M is transferred to the load port LP in a configuration where the load port LP is provided directly below the center of the cell C in the vertical direction has been described, but the present invention is not limited thereto. For example, even when the load port LP is provided at a position deviated from the center of the cell C in plan view, as shown in the above-described embodiment and modification, based on the above-described deviation amount, when moving the article M in the horizontal direction (X direction and Y direction), the driving amount of the transfer device 18 is controlled, or the article M can be transferred to a predetermined position of the load port LP by controlling the driving amount of the horizontal turning mechanism when the article M is horizontally turned.

[0089] Further, when the load port LP is provided at a position deviated from the center of the cell C in plan view, the carriage controller 8 may horizontally turn the article M by controlling the rotation drive unit 16 included in the transfer device 18 based on the deviation amount derived as described above after moving the article M in the horizontal direction by controlling the slide mechanism 11 included in the transfer device 18.

[0090] In the above-described embodiment and modification, an example in which the traveling vehicle 2 holds the article M below the track R has been described. However, the traveling vehicle 2 may hold the article M above the track R. In this case, the carriage unit 50 is disposed above the traveling unit 30. The cell recognition sensor S1 is disposed, for example, so as to face downward substantially perpendicular to the lower surface of the carriage unit 50. The position recognition sensor S2 is disposed, for example, so as to face substantially downward. The position recognition sensor S2 is disposed so as to face in a direction inclined outward as viewed from the center of the cell C with respect to the Z direction. Further, the first surface 61 is disposed so as to be orthogonal to the Z direction and face upward, and the second surface 62 is disposed so as to be inclined toward the traveling vehicle 2 side (for example, the upper side in the vertical direction in the example of FIG. 7) with respect to the first surface 61. Thereby, the cell recognition sensor S1 faces the cell recognition mark M1 disposed on the first surface 61, and the position recognition sensor S2 faces the position recognition mark M2 disposed on the second surface 62.

[0091] In the above-described embodiment, the case where the four turning axes L30 in the traveling unit 30 and the wheel turning mechanism 40 are disposed at the positions of the vertices of a square in plan view has been described. However, the arrangement of the turning axes L30 does not have to be square. In plan view, the position of the traveling wheel 31 and the position of the turning axis L30 may coincide.

[0092] In the above-described embodiment, the case where the traveling wheels 31 rotate on the intersection rail R3 has been described. However, when turning by each wheel turning mechanism 40, each traveling wheel 31 may move from the first traveling surface R1a to the second traveling surface R2a, or from the second traveling surface R2a to the first traveling surface R1a.

[0093] In the above-described embodiment and modification, the case where the cell recognition mark M1 is provided at the center of the first rail R1 in the X direction and the center of the second rail R2 in the Y direction has been described. However, the position of the cell recognition mark M1 may be arranged along the extending direction, for example, in the same manner as the position recognition mark M2, and the installation position of the cell recognition mark M1 is not particularly limited as long as it can be detected by the cell recognition sensor S1.

[0094] In the above-described embodiments and modified examples, the case where the cell recognition mark M1 is disposed on the first surface 61 and the position recognition mark M2 is disposed on the second surface 62 has been described. However, the arrangement relationship of these marks may be reversed. That is, the cell recognition mark M1 may be disposed on the second surface 62 and the position recognition mark M2 may be disposed on the first surface 61.

[0095] In the above-described embodiments and modified examples, the case where four position recognition sensors S2 are provided on the traveling vehicle 2 has been described. However, the number of the position recognition sensors S2 can be appropriately changed.

[0096] In the above-described embodiments and modified examples, as an example of the cell recognition mark M1 and the position recognition mark M2, a barcode has been described as an example. However, a two-dimensional code such as a QR code (registered trademark) may be used. In this case, instead of the barcode reader capable of reading the barcode employed as the cell recognition sensor S1 and the position recognition sensor S2, a barcode reader capable of reading a two-dimensional barcode may be employed. Further, instead of or in addition to the above-described codes, as the cell recognition mark M1 and the position recognition mark M2, a display (mark) such as characters, symbols, figures, colors, etc., which can be identified by the cell recognition sensor S1 and the position recognition sensor S2 may be employed. In this case, a camera or the like may be employed as the cell recognition sensor S1 and the position recognition sensor S2.

Explanation of Reference Numerals

[0097] 1... Ceiling traveling vehicle system (rail-mounted trolley system), 2... Ceiling traveling vehicle (rail-mounted trolley), 8... Trolley controller (control unit), 12c, 16... Rotation drive unit (horizontal turning mechanism), 18... Transfer device, 30... Traveling unit, 61... First surface, 62... Second surface, C... Cell, M... Article (object), M1... Cell recognition mark (first mark), M2... Position recognition mark (second mark), R... Track, R1... First rail, R2... Second rail, S1... Cell recognition sensor (first sensor), S2... Position recognition sensor (second sensor).

Claims

1. A track in which a plurality of first rails extending in a first direction and a plurality of second rails extending in a second direction orthogonal to the first direction are arranged in a lattice pattern, A rail-mounted cart that moves in the first direction by having a running part run on a pair of the first rails adjacent to each other in the second direction, and moves in the second direction by having the running part run on a pair of the second rails adjacent to each other in the first direction, The rail-mounted cart, A first sensor that acquires the first information from a first mark indicating the first information, A second sensor that acquires the second information from a second mark indicating the second information, which is information different from the first information, Each of the first rail and the second rail, A first surface that faces the first sensor and on which the first mark is arranged, A second surface that faces the second sensor and on which the second mark is arranged, and when viewed from the center of a cell, which is a space surrounded by the pair of first rails and the pair of second rails in a plan view, the second surface is arranged outside the first surface and is inclined toward the rail-mounted cart with respect to the first surface, A rail-mounted cart system having the second surface.

2. Further comprising a control unit that controls the rail-mounted cart, One of the first mark and the second mark is a position recognition mark indicating position information in the track, One of the first sensor and the second sensor facing the position recognition mark is arranged to face each of the first surface or the second surface on which the position recognition mark is arranged in each of the pair of first rails when the rail-mounted cart moves in the first direction, and when the rail-mounted cart moves in the second direction, it is arranged to face each of the first surface or the second surface on which the position recognition mark is arranged in each of the pair of second rails, and are four position recognition sensors that acquire the position information from the position recognition mark, The control unit derives a deviation amount between a predetermined position in the cell and a stop position of the rail-mounted cart based on the position information acquired by the position recognition sensor. The rail-mounted cart system according to claim 1.

3. The rail-mounted cart has a transfer device for transferring an object, The control unit controls a driving amount of the transfer device when moving the object in a horizontal direction based on the deviation amount. The rail-mounted cart system according to claim 2.

4. The above-mentioned rail-mounted cart has a transfer device for transferring an object and a horizontal turning mechanism for horizontally turning the object around a third direction orthogonal to both the first direction and the second direction. The control unit controls the driving amount of the horizontal turning mechanism when horizontally turning the object based on the deviation amount. The rail-mounted cart system according to claim 2.

5. The control unit controls the traveling unit so that the rail-mounted cart moves to a predetermined position in the cell based on the deviation amount. The rail-mounted cart system according to any one of claims 2 to 4.

Images