Lighting device, lighting device for semiconductor manufacturing equipment, and fan filter unit

Abstract

To provide a technique capable of detecting a decrease in the illuminance of lighting.SOLUTION: An LED lighting device 10 equipped with an LED lighting 11 that emits light includes an LED lighting switch 14 that turns the power of the LED lighting 11 on / off, an ON / OFF detection unit 15 that detects the ON / OFF state of the LED lighting switch 14, an illuminance sensor 12 that detects the illuminance of the LED lighting 11, and a control device 13 that outputs an alarm signal to a higher-level device 20 when it is detected that the LED lighting switch 14 is ON and the illuminance is equal to or lower than a predetermined threshold value.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a lighting device, a lighting device for semiconductor manufacturing equipment, and a fan filter unit. [Background technology]

[0002] In semiconductor manufacturing equipment, a photosensitive material is applied to a silicon wafer, the material used to make semiconductors, and then the circuit pattern is transferred by exposing it to light. To prevent exposure phenomena from occurring before this exposure process, yellow fluorescent lamps with long wavelengths that do not affect the photosensitive material have been used to illuminate semiconductor manufacturing equipment. However, fluorescent lamps have a short lifespan of about one year and must be replaced every year, which requires the semiconductor manufacturing equipment to be shut down every time they are replaced. Furthermore, because fluorescent lamps contain trace amounts of mercury, they may become unusable in the future.

[0003] For this reason, LED (Light Emitting Diode) lighting has been used in semiconductor manufacturing equipment in recent years, but LED lighting requires replacement as its illuminance decreases over its lifespan. Since the lifespan of LED lighting varies depending on usage conditions, it is difficult to predict when to replace it.

[0004] Furthermore, when LED lighting is used in semiconductor manufacturing equipment, people are not always watching it, so a drop in illuminance or a malfunction may go unnoticed.

[0005] Patent document 1 describes an LED lighting device that, when the illuminance of the LED lighting device measured by an illuminance sensor drops below a set value, changes the lighting state of the LED element when the lighting switch is turned on to notify the user that the device has reached the end of its life. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-113986 Summary of the Invention [Problem to be solved by the invention]

[0007] In semiconductor manufacturing equipment, there is a concern that changes in the light intensity of LED lighting may cause the photosensitive agent applied to the silicon wafer to solidify unevenly, resulting in product defects. For this reason, the technology described in Patent Document 1, which changes the lighting state of the LED element to notify the user that the LED has reached the end of its life, cannot be applied to LED lighting used in semiconductor manufacturing equipment.

[0008] An object of the present invention is to provide a technique for detecting a decrease in the illuminance of lighting. [Means for solving the problem]

[0009] In order to solve the above problems, one representative lighting device of the present invention is a lighting device equipped with a light that emits light, and is equipped with a switch that turns the power of the light on and off, a detection unit that detects the on / off status of the switch, an illuminance sensor that detects the illuminance of the light, and a control unit that outputs an alarm signal to a higher-level device when the on status of the switch is detected and the illuminance is below a predetermined threshold. [Effects of the Invention]

[0010] According to the present invention, a decrease in the illuminance of lighting can be detected.

[0011] Problems, configurations, and effects other than those described above will become apparent from the following description of the embodiments. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a diagram illustrating an example of the configuration of an LED lighting device according to a first embodiment. [Figure 2] 1 is a block diagram showing an example of a hardware configuration of a control device for an LED lighting device according to a first embodiment. [Figure 3] 4 is a flowchart showing an example of the operation of the LED lighting device of the first embodiment. [Figure 4]FIG. 10 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to a second embodiment. [Figure 5] FIG. 10 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to a third embodiment. [Figure 6] FIG. 10 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to a fourth embodiment. [Figure 7] FIG. 10 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to a fifth embodiment. [Figure 8] FIG. 13 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to a sixth embodiment. [Figure 9] FIG. 13 is a diagram showing an example of the configuration of an LED lighting device according to a seventh embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, an embodiment will be described with reference to the drawings.

[0014] In the drawings for explaining the embodiments, the same components are denoted by the same reference numerals, and repeated explanations thereof may be omitted. [Example]

[0015] FIG. 1 is a diagram illustrating an example of the configuration of an LED lighting device according to a first embodiment.

[0016] 1, an LED lighting device 10 of the first embodiment includes an LED lighting device 11 that emits light using multiple LED elements, an illuminance sensor 12 that detects the illuminance of the LED lighting device 11, a control device 13 that controls the LED lighting device 10, an LED lighting switch 14 that allows a user to turn the power of the LED lighting device 11 on and off, and an ON / OFF detection unit 15 that detects the ON / OFF of the LED lighting device 11. The control device 13 is connected to the illuminance sensor 12 and the ON / OFF detection unit 15.

[0017] The illuminance sensor 12 is preferably provided on the surface irradiated by the LED light 11 so that it can easily detect the illuminance of the LED light 11, but there are no particular restrictions on where it can be provided as long as it can detect the illuminance. The illuminance detected by the illuminance sensor 12 is output to the control device 13.

[0018] The ON / OFF detection unit 15 is configured by a relay, detects whether the LED lighting 11 is ON or OFF, and outputs an ON / OFF signal to the control device 13 .

[0019] The control device 13 is connected to a host device 20. The host device 20 is provided, for example, in a control room of a facility where the LED lighting 11 is installed, and is used to monitor the status of the devices in the facility.

[0020] FIG. 2 is a block diagram illustrating an example of a hardware configuration of a control device for the LED lighting device according to the first embodiment.

[0021] As shown in FIG. 2, the control device 13 includes an input unit 131, a calculation unit 132, and an output unit 133.

[0022] The input unit 131 receives the illuminance of the LED lighting 11 output from the illuminance sensor 12 and the ON / OFF signal output from the ON / OFF detection unit 15. The calculation unit 132 executes the processing shown in FIG. 3, which will be described later, and outputs an alarm signal from the output unit 133 to the higher-level device 20 when the illuminance of the LED lighting 11 is equal to or lower than a predetermined threshold value.

[0023] When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, making a sound, etc., to notify the user of the decrease in illuminance of the LED lighting device 11. The user who is notified of the decrease in illuminance replaces the LED lighting device 11.

[0024] FIG. 3 is a flowchart illustrating an example of the operation of the LED lighting device according to the first embodiment.

[0025] In FIG. 3, the control device 13 determines whether the LED lighting switch 14 is ON or not (step S101).

[0026] When the user turns on the LED lighting switch 14, the LED lighting 11 lights up, and the ON / OFF detection unit 15 detects that the LED lighting switch 14 is ON. The ON / OFF detection unit 15 detects that the LED lighting switch 14 is ON and outputs an ON signal to the control device 13.

[0027] On the other hand, when the user turns off the LED lighting switch 14, the LED lighting 11 is turned off and the ON / OFF detection unit 15 detects that the LED lighting switch 14 is turned off. The ON / OFF detection unit 15 detects that the LED lighting switch 14 is turned off and outputs an OFF signal to the control device 13.

[0028] Based on the ON / OFF signal output by the ON / OFF detection unit 15, the control device 13 determines whether the LED lighting switch 14 is ON.

[0029] When the LED lighting switch 14 is ON (YES in step S101), the control device 13 determines whether the illuminance of the LED lighting 11 is equal to or less than a predetermined threshold (step S102). The illuminance sensor 12 detects the illuminance of the LED lighting 11 and outputs it to the control device 13, and the control device 13 determines whether the illuminance output by the illuminance sensor 12 is equal to or less than a predetermined threshold.

[0030] If the illuminance of the LED lighting 11 is equal to or lower than the predetermined threshold value (YES in step S102), the control device 13 outputs an alarm signal to the higher-level device 20 and ends the process.

[0031] When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, making a sound, etc., to notify the user of the decrease in illuminance of the LED lighting device 11. The user who is notified of the decrease in illuminance replaces the LED lighting device 11.

[0032] The threshold value is set to a value lower than the illuminance of the LED lighting 11 at the time of manufacturing, but is set to a value higher than the lower limit of illuminance at which the LED lighting 11 can be used depending on the application of the LED lighting 11. This makes it possible to detect a decrease in illuminance before the LED lighting 11 becomes completely unusable, and to replace the LED lighting 11.

[0033] When the LED lighting 11 is used in semiconductor manufacturing equipment, the threshold value is set to a value higher than the lower limit of illuminance in the semiconductor manufacturing equipment at which the LED lighting 11 can be used. For example, it is preferable to set the threshold value to a value higher than the lower limit of illuminance that does not affect the photosensitive agent used in semiconductor manufacturing.

[0034] According to this embodiment, when the illuminance of the LED lighting 11 is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lighting.

[0035] In addition, an alarm is issued by the host device 20 installed in the control room, making it easy to monitor the decrease in illuminance of LED lighting even in facilities with many LED lighting. Furthermore, when used in semiconductor manufacturing equipment, the user can be notified of the decrease in illuminance of LED lighting 11 without affecting semiconductor manufacturing.

[0036] By applying this embodiment, semiconductor manufacturing plants can improve productivity by eliminating the need to stop semiconductor manufacturing equipment for LED lighting inspections. Furthermore, if LED lighting is replaced periodically, applying this embodiment can prevent LED lighting whose illuminance has not decreased from being discarded, thereby reducing the environmental impact. [Example]

[0037] FIG. 4 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to the second embodiment.

[0038] In the second embodiment, an example will be described in which the LED lighting device 10 is provided in a fan filter unit 30 (hereinafter referred to as "FFU" in this specification). The FFU 30 is installed in a semiconductor manufacturing device or the like, and supplies clean air into the device.

[0039] As shown in FIG. 4, the FFU 30 includes a fan 31, a motor 32, a filter 33, and a chamber .

[0040] A fan 31 driven by a motor 32 draws air from a suction surface 36. The drawn air is filtered by a filter 33, passes through a chamber 34, and is blown out from a blowing surface 37 into the device.

[0041] An LED light 11 is provided in the chamber 34 to illuminate the inside of the device in which the FFU 30 is mounted. An illuminance sensor 12 is also provided in the chamber 34 at a position where the illuminance of the LED light 11 can be detected.

[0042] In the LED lighting device of Fig. 4, as in the first embodiment, when the LED lighting switch 14 is ON and the illuminance of the LED lighting 11 is below a predetermined threshold, the control device 13 outputs an alarm signal to the host device 20. When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, emitting a sound, etc., to notify the user of the drop in illuminance of the LED lighting 11. When notified of the drop in illuminance, the user replaces the LED lighting 11.

[0043] In this embodiment, the LED lighting 11 is provided in the chamber 34 provided below the FFU 30, but the chamber 34 may be replaced by a flat plate or the like.

[0044] According to this embodiment, when the illuminance of the LED lighting 11 is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lighting.

[0045] In addition, an alarm is issued by the host device 20 installed in the control room, making it easy to monitor the decrease in illuminance of LED lighting even in facilities with many LED lighting. Furthermore, when used in semiconductor manufacturing equipment, the user can be notified of the decrease in illuminance of LED lighting 11 without affecting semiconductor manufacturing.

[0046] Furthermore, by providing the LED lighting 11 to the FFU 30, it is not necessary to provide an LED lighting to the device in which the FFU 30 is mounted, and space above the device can be secured. [Example]

[0047] FIG. 5 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to the third embodiment.

[0048] The third embodiment differs from the second embodiment in that a light diffusion plate 35 is provided on the entire surface of the blowing surface 37 of the FFU 30.

[0049] 5, a light diffusion plate 35 that diffuses the light of the LED lighting 11 is provided over the entire blowing surface 37 of the FFU 30. The light diffusion plate 35 has openings such as holes or slits, and the air that has passed through the filter 33 passes through these openings and is supplied into the device in which the FFU 30 is installed.

[0050] Since the light diffusion plate 35 diffuses the light of the LED light 11, the illuminance sensor 12 can detect the illuminance even if it is placed at a position away from the surface illuminated by the LED light 11.

[0051] The light diffusion plate 35 may be replaced by a reflecting plate that reflects light.

[0052] 5, as in the first embodiment, when the LED lighting switch 14 is ON and the illuminance of the LED lighting 11 is below a predetermined threshold, the control device 13 outputs an alarm signal to the host device 20. When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, making a sound, etc., to notify the user of the drop in illuminance of the LED lighting 11. When notified of the drop in illuminance, the user replaces the LED lighting 11.

[0053] According to this embodiment, when the illuminance of the LED lighting 11 is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lighting.

[0054] In addition, an alarm is issued by the host device 20 installed in the control room, making it easy to monitor the decrease in illuminance of LED lighting even in facilities with many LED lighting. Furthermore, when used in semiconductor manufacturing equipment, the user can be notified of the decrease in illuminance of LED lighting 11 without affecting semiconductor manufacturing.

[0055] Furthermore, since the light diffusion plate 35 that diffuses the light of the LED light 11 is provided, the illuminance sensor 12 can be placed at a position away from the illumination surface of the LED light 11. Therefore, the illuminance sensor 12 can be placed without interfering with the illumination of the LED light 11.

[0056] Furthermore, since the light diffusion plate 35 is provided on the entire surface of the blowing surface 37, it is possible to diffuse light over a wide range, and the range in which the illuminance sensor 12 can be arranged can be made wider. [Example]

[0057] FIG. 6 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to the fourth embodiment.

[0058] The fourth embodiment differs from the third embodiment in that a light diffusion plate 35 is provided on a part of the blowing surface 37 of the FFU 30.

[0059] 6, a light diffusion plate 35 that diffuses the light of the LED lighting 11 is provided on a part of the blowing surface 37 of the FFU 30. Since the light diffusion plate 35 is provided only on a part of the blowing surface 37, the air that has passed through the filter 33 passes through the part of the blowing surface 37 where the light diffusion plate 35 is not provided, and is supplied into the device in which the FFU 30 is installed.

[0060] Since the light diffusion plate 35 diffuses the light of the LED light 11, the illuminance sensor 12 can detect the illuminance even if it is placed at a position away from the surface illuminated by the LED light 11.

[0061] The light diffusion plate 35 may be replaced by a reflecting plate that reflects light.

[0062] 6, as in the first embodiment, when the LED lighting switch 14 is ON and the illuminance of the LED lighting 11 is below a predetermined threshold, the control device 13 outputs an alarm signal to the host device 20. When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, making a sound, etc., to notify the user of the drop in illuminance of the LED lighting 11. When notified of the drop in illuminance, the user replaces the LED lighting 11.

[0063] According to this embodiment, when the illuminance of the LED lighting 11 is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lighting.

[0064] In addition, an alarm is issued by the host device 20 installed in the control room, making it easy to monitor the decrease in illuminance of LED lighting even in facilities with many LED lighting. Furthermore, when used in semiconductor manufacturing equipment, the user can be notified of the decrease in illuminance of LED lighting 11 without affecting semiconductor manufacturing.

[0065] Furthermore, since the light diffusion plate 35 that diffuses the light of the LED light 11 is provided, the illuminance sensor 12 can be placed at a position away from the illumination surface of the LED light 11. Therefore, the illuminance sensor 12 can be placed without interfering with the illumination of the LED light 11.

[0066] Furthermore, since the light diffusion plate 35 is provided on a part of the blowing surface 37, it is possible to diffuse light without interfering with the flow of air blown out from the FFU 30. [Example]

[0067] FIG. 7 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to a fifth embodiment.

[0068] The fifth embodiment differs from the second embodiment in that an illuminance sensor 12 is provided in the semiconductor manufacturing equipment in which the FFU 30 is mounted.

[0069] 7, the FFU 30 is mounted on top of the semiconductor manufacturing equipment 40. The illuminance sensor 12 is provided inside the semiconductor manufacturing equipment 40. It is desirable to provide the illuminance sensor 12 on the surface irradiated by the LED lighting 11 so that the illuminance of the LED lighting 11 can be easily detected, but there are no particular restrictions on where the illuminance sensor 12 can be provided as long as it can detect the illuminance.

[0070] 7, as in the first embodiment, when the LED lighting switch 14 is ON and the illuminance of the LED lighting 11 is below a predetermined threshold, the control device 13 outputs an alarm signal to the host device 20. When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, emitting a sound, etc., to notify the user of the drop in illuminance of the LED lighting 11. When notified of the drop in illuminance, the user replaces the LED lighting 11.

[0071] According to this embodiment, when the illuminance of the LED lighting 11 is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lighting.

[0072] In addition, an alarm is issued by the host device 20 installed in the control room, making it easy to monitor the decline in illuminance of LED lighting even in facilities with many LED lighting fixtures. Furthermore, it is possible to notify users of the decline in illuminance of the LED lighting fixture 11 without affecting semiconductor manufacturing.

[0073] Furthermore, since the illuminance sensor 12 is disposed inside the semiconductor manufacturing equipment 40, the illuminance sensor 12 can be disposed without interfering with the illumination of the LED lighting 11 or the flow of air blown out from the FFU 30. [Example]

[0074] FIG. 8 is a cross-sectional view showing an example of the configuration of a fan filter unit provided with an LED lighting device according to the sixth embodiment.

[0075] The sixth embodiment differs from the fifth embodiment in that a light diffusion plate 35 is provided inside the semiconductor manufacturing equipment 40.

[0076] As shown in FIG. 8, a light diffusion plate 35 for diffusing the light of the LED lamp 11 is provided inside the semiconductor manufacturing equipment 40.

[0077] Since the light diffusion plate 35 diffuses the light of the LED light 11, the illuminance sensor 12 can detect the illuminance even if it is placed at a position away from the surface illuminated by the LED light 11.

[0078] In FIG. 8, the light diffusion plate 35 is positioned facing the illuminance sensor 12 so that the illuminance of the LED light 11 can be easily detected, but the position and orientation of the light diffusion plate 35 are not limited to this, and it is sufficient if the illuminance sensor 12 can detect the illuminance of the LED light 11.

[0079] The light diffusion plate 35 may be replaced by a reflecting plate that reflects light.

[0080] 8, as in the first embodiment, when the LED lighting switch 14 is ON and the illuminance of the LED lighting 11 is equal to or lower than a predetermined threshold, the control device 13 outputs an alarm signal to the host device 20. When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, making a sound, etc., to notify the user of the drop in illuminance of the LED lighting 11. When the user is notified of the drop in illuminance, they can replace the LED lighting 11.

[0081] According to this embodiment, when the illuminance of the LED lighting 11 is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lighting.

[0082] In addition, an alarm is issued by the host device 20 installed in the control room, making it easy to monitor the decline in illuminance of LED lighting even in facilities with many LED lighting fixtures. Furthermore, it is possible to notify users of the decline in illuminance of the LED lighting fixture 11 without affecting semiconductor manufacturing.

[0083] Furthermore, since the illuminance sensor 12 is disposed inside the semiconductor manufacturing equipment 40, the illuminance sensor 12 can be disposed without interfering with the illumination of the LED lighting 11 or the flow of air blown out from the FFU 30.

[0084] Furthermore, since the light diffusion plate 35 that diffuses the light of the LED light 11 is provided, the illuminance sensor 12 can be placed at a position away from the illumination surface of the LED light 11. Therefore, the illuminance sensor 12 can be placed without interfering with the illumination of the LED light 11. [Example]

[0085] FIG. 9 is a diagram illustrating an example of the configuration of an LED lighting device according to the seventh embodiment.

[0086] In the seventh embodiment, an example in which a plurality of LED lights 11 are provided in a room will be described.

[0087] 9, a plurality of LED lights 11a and 11b are provided in the upper part of the room 50 to illuminate the interior of the room 50. In addition, an illuminance sensor 12 is provided on the wall of the room 50 at a position where the illuminance of the LED lights 11a and 11b can be detected.

[0088] The LED lighting device 10 also includes LED lighting switches 14a and 14b that allow the user to turn on / off the LED lights 11a and 11b, respectively, and ON / OFF detectors 15a and 15b that detect the ON / OFF of the LED lights 11a and 11b, respectively.

[0089] In the LED lighting device of FIG. 9, when at least one of the LED lighting switches 14a and 14b is ON and the illuminance of the LED lights 11a and 11b is equal to or lower than a predetermined threshold, the control device 13 outputs an alarm signal to the host device 20.

[0090] In this embodiment, multiple LED lights 11a and 11b are installed in the room 50, and the illuminance varies depending on the number of LED lights that are turned on. For example, when the LED light 11a is turned on and the LED light 11b is turned off, the illuminance is lower than when both the LED lights 11a and 11b are turned on. Therefore, the threshold is set for each number of LED lights that are detected as ON by the ON / OFF detection units 15a and 15b.

[0091] Based on the ON / OFF signals output by the ON / OFF detection units 15a and 15b, the control device 13 calculates the number of LED lights whose LED lighting switches are turned on, and determines whether the illuminance of the LED lights 11a and 11b is equal to or lower than a threshold value using a threshold value corresponding to the calculated number of LED lights.

[0092] When the host device 20 receives the alarm signal output by the control device 13 of the LED lighting device 10, it issues an alarm by displaying a message on the display unit, lighting a lamp, making a sound, etc., to notify the user of the decrease in illuminance of the LED lighting device 11. The user who is notified of the decrease in illuminance replaces the LED lighting device 11.

[0093] In this embodiment, the host device 20 is installed in a control room of a facility with many rooms, such as a hospital, so that the reduction in illuminance of the LED lighting in each room in the facility can be monitored from the control room.

[0094] In this embodiment, an example in which one illuminance sensor 12 is provided in the room 50 has been described, but a plurality of illuminance sensors may be provided. Also, a light diffusion plate may be provided as in the above embodiment.

[0095] According to this embodiment, when the illuminance of the LED lights 11a and 11b is equal to or lower than the threshold value, the control device 13 outputs an alarm signal to the host device 20, so that it is possible to detect a drop in the illuminance of the LED lights.

[0096] Furthermore, an alarm is issued by the host device 20 installed in the control room, so that even in facilities with many LED lights, it is possible to easily monitor the reduction in illuminance of LED lights.

[0097] In addition, since the threshold value is set for each number of LED lights that are detected as ON by the ON / OFF detection units 15a and 15b, a decrease in the illuminance of the LED lights can be accurately detected even when multiple LED lights are installed in one room.

[0098] The invention made by the inventor has been specifically described above based on the embodiments of the invention, but the present invention is not limited to the above embodiments of the invention and can be modified in various ways without departing from the spirit of the invention. [Explanation of symbols]

[0099] 10 LED lighting device 11 LED lighting 12 Illuminance sensor 13 Control equipment 14 LED light switch 15 ON / OFF detection section 20 Upper equipment 30 FFU 34 Chamber 35 Light diffuser 40 Semiconductor manufacturing equipment

Claims

1. In a lighting device equipped with a light that emits light, a switch for turning the power of the lighting on and off; a detection unit that detects ON / OFF of the switch; an illuminance sensor that detects the illuminance of the lighting; and a control unit that outputs an alarm signal to a higher-level device when the switch is detected to be ON and the illuminance is equal to or lower than a predetermined threshold.

2. 2. The lighting device according to claim 1, The threshold value is set to a value lower than the illuminance of the lighting device at the time of manufacture.

3. 3. The lighting device according to claim 2, The threshold value is set to a value higher than the lower limit of illuminance at which the lighting can be used.

4. In lighting devices for semiconductor manufacturing equipment, A light that emits light; a switch for turning the power of the lighting on and off; a detection unit that detects ON / OFF of the switch; an illuminance sensor that detects the illuminance of the lighting; and a control unit that outputs an alarm signal to a host device when the illuminance is equal to or lower than a predetermined threshold value when the switch is detected to be ON.

5. 5. The lighting device for semiconductor manufacturing equipment according to claim 4, The threshold value is set to a value higher than the lower limit of illuminance at which the lighting can be used in the semiconductor manufacturing equipment.

6. A fan that draws air in from the intake surface and blows it out from the outlet surface, a filter for filtering the air drawn in by the fan, A lighting device for emitting light; a switch for turning the power of the lighting on and off; a detection unit that detects ON / OFF of the switch; an illuminance sensor that detects the illuminance of the lighting; The fan filter unit further includes a control unit that outputs an alarm signal to a higher-level device when the switch is detected to be ON and the illuminance is equal to or lower than a predetermined threshold.

7. The fan filter unit according to claim 6, The fan filter unit further includes a light diffusion plate that diffuses the light emitted by the lighting.

8. The fan filter unit according to claim 7, The light diffusion plate is disposed over the entire surface of the blowing surface, and the fan filter unit has an opening through which air blown out from the blowing surface passes.

9. The fan filter unit according to claim 7, The light diffusion plate is a fan filter unit disposed on a part of the air outlet surface.

10. The fan filter unit according to claim 7, Fan filter units used in semiconductor manufacturing equipment.

11. The fan filter unit according to claim 10, The illuminance sensor is a fan filter unit disposed within the semiconductor manufacturing equipment.

12. The fan filter unit according to claim 11, The light diffusion plate is a fan filter unit disposed in the semiconductor manufacturing equipment.

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