Valve and fluid control device

Abstract

A valve (11) comprises a housing, a hole (400), a hole (700), a valve diaphragm (80), a seat (43), and a projecting part (90). The housing has a housing member (70) and a flat plate (41) that face each other, and a side wall (42) that connects to the housing member (70) and the flat plate (41), and can define a valve chamber (410) together with the housing member (70) and the flat plate (41). The hole (400) is made in the flat plate (41), and communicates the valve chamber (410) with outside of the valve (11). The hole (700) is made in the housing member (70), and communicates the valve chamber (410) with outside of the valve (11). The valve diaphragm (80) has a through-hole (800) that divides the valve chamber (410) into a first space on the flat plate (41) side and a second space on the housing member (70) side, and allows communication between the first space and the second space. The seat (43) projects from the flat plate (41) into the valve chamber (410), and is disposed at a position overlapping with the through-hole (800) in a planar view of the valve (11) in a first direction in which the flat plate (41) is viewed from the housing member (70). The projecting part (90) is disposed between the hole (400) and the seat (43) in a cross-sectional view of the valve (11) in a second direction orthogonal to the first direction, and is provided on the valve diaphragm (80) or the flat plate (41) in the first space.

Description

[Technical Field]

[0001] The present invention relates to a valve that uses a valve membrane to rectify the flow of a fluid, and a fluid control device that includes this valve. [Background technology]

[0002] Patent Documents 1 and 2 describe a fluid control device including a piezoelectric pump and a check valve (valve). The housing of the valve has a first wall and a second wall facing each other. A first hole is formed in the first wall. A second hole and a third hole are formed in the second wall. The first hole communicates with the piezoelectric pump. The second hole communicates with a cuff outside the fluid control device. The third hole is for discharge and communicates with the outside of the housing of the valve.

[0003] A diaphragm (membrane) is installed in the housing, and the diaphragm separates the interior space of the housing into a first wall-side space and a second wall-side space.

[0004] This diaphragm is deformed by the flow of fluid, thereby switching between the flow of fluid (for example, gas) from the vent hole to the communication hole (first flow) and the flow of fluid from the communication hole to the exhaust hole (second flow).

[0005] More specifically, a through hole is formed in the diaphragm, and a pedestal is formed in the first wall, and the through hole of the diaphragm and the pedestal overlap when the valve is viewed from above.

[0006] In the first flow, the diaphragm moves away from the base. This causes the fluid that flows in from the first hole to pass through the through-hole in the diaphragm and be discharged from the second hole. In the second flow, the diaphragm abuts against the surface of the base. This causes the fluid that flows in from the second hole to be discharged from the third hole. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] International Publication No. 2017 / 195475 [Patent Document 2] International Publication No. 2018 / 021099 Summary of the Invention [Problem to be solved by the invention]

[0008] However, in the fluid control devices described in Patent Documents 1 and 2, there is a possibility that a problem will occur in which foreign matter inside the housing or foreign matter that has entered the housing during the first flow will become caught between the diaphragm and the base.

[0009] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a valve structure that prevents foreign matter from becoming caught between the diaphragm and the seat. [Means for solving the problem]

[0010] The valve of this invention comprises a housing, a first hole, a second hole, a valve membrane, a base, and a protrusion. The housing has a first wall and a second wall facing each other, and a side wall connected to the first wall and capable of defining a valve chamber together with the first wall and the second wall. The first hole is formed in the first wall and connects the valve chamber to the outside. The second hole is formed in the second wall and connects the valve chamber to the outside. The valve membrane divides the valve chamber into a first space on the first wall side and a second space on the second wall side, and has a through hole that connects the first space to the second space. The base protrudes from the first wall into the valve chamber and is positioned so as to overlap the through hole when the valve is viewed in a plan view in a first direction from the first wall to the second wall. The protrusion is disposed between the first hole and the seat when the valve is viewed in cross section in a second direction that is a direction perpendicular to the first direction, and is provided on the valve membrane or the first wall in the first space.

[0011] In this configuration, the protrusions are present in the flow path from the first hole to the base and the membrane through-holes. Therefore, foreign matter (solid matter, etc.) flowing in from the first hole and foreign matter present on the first hole side of the protrusions hit the protrusions when the fluid flows from the first hole to the membrane through-holes. This makes it difficult for the foreign matter to reach the base and the membrane through-holes. [Effects of the Invention]

[0012] According to this invention, it is possible to prevent foreign matter from becoming caught between the diaphragm and the base. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a first embodiment. [Figure 2] FIG. 2 is a diagram showing a state in which a cuff is attached to the fluid control device according to the first embodiment. [Figure 3] 3(A) and 3(B) are enlarged plan views of a portion of the valve including the seat and valve membrane, and FIG. 3(C) is a side cross-sectional view thereof. [Figure 4] 4(A) and 4(B) are side cross-sectional views each showing the state of fluid flow. [Figure 5] FIG. 5 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a second embodiment. [Figure 6] FIG. 6 is an enlarged plan view of a portion including a seat and a valve membrane in a valve of a fluid control device according to a third embodiment. [Figure 7] FIG. 7 is an enlarged plan view of a portion including a seat and a valve membrane in a valve of a fluid control device according to a fourth embodiment. [Figure 8] FIG. 8(A) is a schematic side cross-sectional view showing the configuration of a fluid control device according to the fifth embodiment, and FIG. 8(B) is an enlarged plan view of a portion including a base and a valve membrane in a valve of the fluid control device according to the fifth embodiment. [Figure 9] FIG. 9 is an enlarged plan view of a portion including a seat and a valve membrane in a valve of a fluid control device according to a sixth embodiment. [Figure 10] FIG. 10 is an enlarged plan view of a portion including a seat and a valve membrane in a valve of a fluid control device according to a seventh embodiment. [Figure 11]FIG. 11 is an enlarged plan view of a portion including a seat and a valve membrane in a valve of a fluid control device according to an eighth embodiment. [Figure 12] FIG. 12 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a ninth embodiment. [Figure 13] Figure 13(A) is a schematic side cross-sectional view showing the configuration of a fluid control device according to the tenth embodiment, and Figure 13(B) is an enlarged plan view of a portion of a valve of the fluid control device according to the tenth embodiment, including a base and a valve membrane. DETAILED DESCRIPTION OF THE INVENTION

[0014] [First embodiment] A valve and a fluid control device according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic side cross-sectional view showing the configuration of a fluid control device according to the first embodiment. FIG. 2 is a view showing a state in which a cuff is attached to the fluid control device according to the first embodiment. FIGS. 3(A) and 3(B) are enlarged plan views of a portion of the valve including the base and valve membrane, and FIG. 3(C) is a side cross-sectional view thereof. FIG. 3(B) shows a state in which the valve membrane in FIG. 3(A) has been removed.

[0015] In each embodiment including this embodiment, the shapes of the components are partially or entirely exaggerated in each drawing to make the configuration of the valve and fluid control device easier to understand. Also, although the following describes an embodiment in which a gas (e.g., air) is used as the fluid, the configuration of the present invention can be applied to other fluids, even gases other than air.

[0016] As shown in Figures 1 and 2, the fluid control device 10 includes a valve 11 and a pump 12. The valve 11 and the pump 12 share common components and are integrally formed. As shown in Figure 2, a cuff 2 is connected to the valve 11. The cuff 2 corresponds to the "part that is the target of fluid discharge" in the fluid control device 10.

[0017] (Valve 11) The valve 11 includes a housing member 40, a housing member 70, a holding plate 71, a valve membrane 80, and a protrusion 90.

[0018] The housing member 40 includes a flat plate 41, a side wall 42, and a base 43, and is made of metal, resin, or the like.

[0019] The flat plate 41 has a hole 400. The hole 400 penetrates the flat plate 41 in the thickness direction, and has an opening on one main surface side and an opening on the other main surface side of the flat plate 41. The flat plate 41 corresponds to the "first wall" of the present invention.

[0020] The side wall 42 is connected to the outer edge of the flat plate 41. The side wall 42 has a shape that protrudes from one main surface of the flat plate 41. The flat plate 41 and the side wall 42 may be integrally formed, or may be formed as separate bodies and joined or adhered together.

[0021] The pedestal 43 protrudes from one main surface of the flat plate 41. The pedestal 43 is disposed at a position different from the hole 400. The pedestal 43 is, for example, cylindrical.

[0022] The housing member 70 is plate-shaped and made of metal, resin, etc. The shape of the housing member 70 in plan view is substantially the same as that of the housing member 40. The housing member 70 corresponds to the "second wall" of the present invention.

[0023] The housing member 70 has holes 700 and 790. The hole 700 penetrates the housing member 70 in the thickness direction, and has an opening on one main surface side and an opening on the other main surface side of the housing member 70. One end of the hole 790 opens to the other main surface of the housing member 70. The openings of the holes 700 and 790 on the other main surface of the housing member 70 are spaced apart. The other end of the hole 790 opens to the other main surface side, near the outer surface of the housing member 70. The other end of the hole 790 may open to the side surface of the housing member 70. 。

[0024] The holding plate 71 is made of metal, resin, etc. The holding plate 71 is a frame. The holding plate 71 may be formed integrally with the housing member 70.

[0025] The housing member 40 and the housing member 70 are assembled with the holding plate 71 sandwiched therebetween, and are adhered or joined to each other. More specifically, one main surface of the housing member 40 and the other main surface of the housing member 70 face each other. In other words, the housing member 40 is arranged so that the side wall 42 faces the housing member 70 relative to the flat plate 41. The holding plate 71 abuts against the tip of the side wall 42 of the housing member 40 and abuts against the other main surface of the housing member 70. In other words, the holding plate 71 functions as part of the side wall or first wall of the housing in the present invention. In this case, the holding plate 71 protrudes inward from the inner wall surface of the side wall 42 in a plan view.

[0026] With this configuration, the valve 11 has a valve chamber 410 surrounded by the housing member 40, the housing member 70, and the retaining plate 71. The valve chamber 410 communicates with the outside of the valve 11 from one end face of the housing of the valve 11 in the height direction through the hole 400. The hole 400 corresponds to the "first hole" of the present invention. The valve chamber 410 also communicates with the outside of the valve 11 from the other end face of the housing of the valve 11 in the height direction through the hole 700. The hole 700 corresponds to the "second hole" of the present invention. The valve chamber 410 also communicates with the outside of the housing of the valve 11 through the hole 790.

[0027] In this configuration, when the valve 11 is viewed from above, the opening of the hole 700 on the other main surface side of the housing member 70 overlaps with the base 43. In this case, the area of ​​the opening on the other main surface side of the housing member 70 is larger than the area of ​​the base 43 in plan view.

[0028] It is preferable that the opening of the hole 790 on the other main surface side of the housing member 70 and the hole 400 overlap, but this is not limitative.

[0029] The valve membrane 80 is made of a deformable material, such as a rubber sheet. A through-hole 800 is formed in the valve membrane 80 near the outer edge. The through-hole 800 penetrates the valve membrane 80 in the thickness direction. This through-hole 800 corresponds to the "through-hole" for the membrane of the present invention.

[0030] The valve membrane 80 is disposed between the flat plate 41 of the housing member 40 and the housing member 70. The outer peripheral edge of the valve membrane 80 is fixed to the holding plate 71. In other words, the valve membrane 80 is fixed to the housing of the valve 11 so that the region inside the fixed outer peripheral edge is deformable.

[0031] By arranging the valve membrane 80 in this manner, the valve chamber 410 is divided into a first space between the flat plate 41 of the housing member 40 and the valve membrane 80, and a second space between the housing member 70 and the valve membrane 80. The first space and the second space communicate with each other via the through-hole 800.

[0032] When the bulb 11 is viewed from above, the through-hole 800 overlaps with the pedestal 43. The opening area (planar area) of the through-hole 800 is smaller than the planar area of ​​the pedestal 43.

[0033] The protrusion 90 is made of metal, resin, or the like. The protrusion 90 is annular in plan view and has a height D90. The height D90 of the protrusion 90 is smaller than the thickness (height) D43 of the base 43. In other words, the protrusion 90 is thinner than the base 43.

[0034] The protrusion 90 abuts against and is adhered to the surface of the valve membrane 80 facing the flat plate 41. In this case, the protrusion 90 is positioned so that the through-hole 800 overlaps (communicates with) the central opening of the protrusion 90 in a plan view of the valve 11 (valve membrane 80). The protrusion 90 is also positioned so that the pedestal 43 overlaps with the central opening of the protrusion 90 in a plan view of the valve 11. In other words, the pedestal 43 is positioned within the central opening of the protrusion 90. The protrusion 90 may be formed integrally with the valve membrane 80.

[0035] (Valve 11 operation) 4(A) and 4(B) are cross-sectional side views showing the flow of fluid. In FIGS. 4(A) and 4(B), the thick dotted lines indicate the flow of fluid. Arrow shows the general flow of fluid.

[0036] (First operation) The first operation is, for example, an operation of supplying gas to the cuff 2.

[0037] In this case, the pump 12, which will be described later, is driven. When the pump 12 is driven, gas flows from the pump 12 into the first space of the valve chamber 410 through the hole 400, as shown in FIG. 4(A). The gas that flows in through the hole 400 presses the valve membrane 80. This causes the valve membrane 80 to deform and move away from the seat 43. Therefore, the first space and the second space communicate with each other through the through-hole 800.

[0038] The gas that has flowed into the first space flows along the first space side of the valve membrane 80 in the valve chamber 410, enters the second space through the through-hole 800, and is discharged from the second space to the outside of the valve 11 through the hole 700. The hole 700 is in communication with the cuff 2, and the gas that has been discharged from the hole 700 to the outside of the valve 11 is supplied to the cuff 2.

[0039] At this time, protrusions 90 are arranged midway along the gas flow path from holes 400 to through-holes 800. As a result, the height of the flow path becomes narrower at the positions where protrusions 90 are arranged. Therefore, even if foreign matter (e.g., solid matter) arrives from the hole 400 side of the gas flow path rather than the protrusions 90, the protrusions 90 make it difficult for the foreign matter to reach through-holes 800. In other words, the foreign matter is easily trapped by the protrusions 90.

[0040] More specifically, if the foreign object is larger than the height of the flow path at the position where protrusion 90 is arranged, the foreign object will collide with protrusion 90 and will not reach through-hole 800. Also, even if the foreign object is smaller than the height of the flow path at the position where protrusion 90 is arranged, the foreign object will collide with protrusion 90 and will not easily reach through-hole 800. Therefore, with this configuration, valve 11 can prevent foreign objects from blocking through-hole 800.

[0041] In this case, it is advisable to make the height (gap) of the flow path at the position where protrusion 90 is arranged smaller than the maximum diameter (maximum dimension) of through-hole 800. This prevents foreign matter of a size that could block through-hole 800 from passing through the position where protrusion 90 is arranged. Therefore, with this configuration, valve 11 can more reliably prevent foreign matter from blocking through-hole 800.

[0042] As described above, during the first operation, valve 11 traps foreign matter using protrusion 90, and can prevent problems caused by foreign matter blocking through-hole 800.

[0043] At this time, the valve membrane 80 deforms and closes the hole 790. As a result, the gas that has flowed into the second space from the through-hole 800 is discharged from the hole 700 without leaking into the hole 790. Therefore, the gas can be efficiently supplied to the cuff 2.

[0044] As will be shown in the embodiments described later, the protrusion 90 does not have to be annular over the entire circumference. The protrusion 90 only needs to have a portion located in the region between the hole 400 and the through-hole 800 (the region indicated by region AB in FIGS. 3(A) and 3(B)) when the valve 11 is viewed from above. In this case, the height D90 of the protrusion 90 can be set to the same height D43 as the base 43 to prevent the movement of foreign matter. However, having the protrusion 90 have a shape that extends over the entire circumference can more reliably prevent foreign matter from reaching the through-hole 800.

[0045] 1, 2, etc., the valve 11 preferably has a configuration in which the retaining plate 71 and the protrusion 90 sandwich the valve membrane 80. This prevents the valve membrane 80 from peeling off.

[0046] (Second action) The second operation is, for example, an operation of discharging gas from the cuff 2.

[0047] In this case, the pump 12, which will be described later, is stopped. Stopping the pump 12 eliminates the pressure caused by the gas flowing into the cuff 2. Therefore, the pressure in the cuff 2 becomes higher than the valve chamber 410. As a result, the gas in the cuff 2 flows into the second space of the valve chamber through the hole 700. The gas flowing in from the hole 700 presses the valve membrane 80. This causes the valve membrane 80 to deform and come into contact with the base 43. Therefore, the through-hole 800 in the valve membrane 80 is blocked by the surface of the base 43, and the first space and the second space are spatially separated.

[0048] Furthermore, the gas flowing in from the hole 700 presses against the valve membrane 80. This causes the valve membrane 80 to deform, and the second space side of the hole 790 is opened.

[0049] By the above-described operation of the valve membrane 80, the gas that has flowed in through the hole 700 is discharged to the outside of the valve 11 through the hole 790.

[0050] The above-described configuration prevents foreign matter from becoming caught between the valve membrane 80 and the seat 43 during the first operation. Therefore, the valve 11 can prevent problems such as gas leakage into the first space caused by foreign matter becoming caught between the valve membrane 80 and the seat 43 during the second operation.

[0051] At this time, because the height D90 of the protrusion 90 is smaller than the height D43 of the seat 43, the valve membrane 80 more reliably abuts against the surface of the seat 43. This more reliably blocks the through-hole 800 of the valve membrane 80 by the surface of the seat 43. Therefore, the valve 11 can more reliably discharge the gas that has flowed in from the cuff 2, i.e., the gas that has flowed in through the hole 700, through the hole 790.

[0052] (Pump 12) 1 and 2, the pump 12 includes a main flat plate 21, a frame 22, a connecting member 23, a piezoelectric element 30, a flat plate 41 of a housing member 40, a sidewall member 50, and a cover member 60. The flat plate 41 of the housing member 40 is shared by the valve 11 and the pump 12.

[0053] The main plate 21 is circular in plan view. The frame body 22 is disposed so as to surround the main plate 21. The plurality of connecting members 23 are beam-shaped and disposed between the main plate 21 and the frame body 22. The plurality of connecting members 23 support the main plate 21 relative to the frame body 22 so as to be able to vibrate.

[0054] The piezoelectric element 30 has a circular shape in a plan view. The piezoelectric element 30 includes a piezoelectric body and a driving conductor. The piezoelectric element 30 is disposed on one main surface of the main plate 21. In this case, the center of the piezoelectric element 30 and the center of the main plate 21 coincide with each other. Note that "coincidence" here also includes a range in which the respective center positions are misaligned within the range of manufacturing error. The piezoelectric element 30 is distorted when a driving voltage is applied. The main plate 21 vibrates due to stress caused by the distortion of the piezoelectric element 30.

[0055] The sidewall member 50 is annular and has a hollow 500, and is disposed between the frame body 22 and the housing member 40. The sidewall member 50 connects the frame body 22 and the housing member 40.

[0056] The space (hollow 500) surrounded by the structure made up of the main flat plate 21, the frame body 22, and the connecting member 23, the housing member 40, and the side wall member 50 becomes the pump chamber of the pump 12.

[0057] The cover member 60 is composed of a flat plate portion and a frame portion, and the frame portion protrudes from one main surface of the flat plate portion. A hole 600 is formed in the flat plate portion, penetrating the flat plate portion. The cover member 60 is disposed so as to cover the main plate 21, and the frame portion of the cover member 60 is connected to the frame body 22.

[0058] In this configuration, when the main plate 21 vibrates as described above, gas is sucked into the pump 12 through the hole 600 and discharged into the valve chamber 410 of the valve 11 through the hole 400 .

[0059] (Configuration of fluid control device 10) With the valve 11 and pump 12 configured as described above, the fluid control device 10 shares the flat plate 41 and the hole 400 of the housing member 40, and the valve 11 and the pump 12 are realized in a single housing. This allows the fluid control device 10 to be made thinner and more compact.

[0060] By including the above-described valve 11, the fluid control device 10 can prevent foreign matter on the pump 12 side of the protrusion 90 of the valve 11 in the gas flow path from reaching the through-hole 800. Therefore, the fluid control device 10 can prevent problems caused by the above-described foreign matter from occurring during the first operation and the second operation.

[0061] [Second embodiment] A valve and a fluid control device according to a second embodiment of the present invention will be described with reference to the drawings. Figure 5 is a schematic side cross-sectional view showing the configuration of the fluid control device according to the second embodiment.

[0062] 5, the fluid control device 10A according to the second embodiment differs from the fluid control device 10 according to the first embodiment in the configuration of a valve 11A. The other configuration of the fluid control device 10A is the same as that of the fluid control device 10, and a description of similar parts will be omitted.

[0063] The fluid control device 10A includes a valve 11A. The valve 11A differs from the valve 11 according to the first embodiment in the arrangement of the protrusions 90. Other configurations of the valve 11A are the same as those of the valve 11, and a description of similar parts will be omitted.

[0064] The protrusion 90 is fixed to one main surface of the flat plate 41 of the housing member 40. The protrusion 90 may be formed integrally with the flat plate 41.

[0065] With this configuration, the fluid control device 10A, like the fluid control device 10, can suppress problems caused by foreign matter during the first operation and the second operation.

[0066] [Third embodiment] A valve and a fluid control device according to a third embodiment of the present invention will be described with reference to the drawings. Fig. 6 is an enlarged plan view of a portion including a base and a valve membrane in a valve of a fluid control device according to the third embodiment. of Shown removed.

[0067] 6, the valve of the fluid control device 10B according to the third embodiment differs from the valve of the fluid control device 10 according to the first embodiment in that it includes a protrusion 90B. Other configurations of the valve of the fluid control device 10B are similar to those of the valve of the fluid control device 10, and a description of similar parts will be omitted.

[0068] The valve of the fluid control device 10B includes a protrusion 90B. The protrusion 90B is annular (C-shaped) with a portion cut out in the circumferential direction. In other words, the protrusion 90B includes a notch 900 midway in the circumferential direction. By including the notch 900, the protrusion 90B has a structure in which the space on the outer circumferential side and the space on the inner circumferential side communicate with each other through the notch 900.

[0069] The protrusion 90B is arranged so that the notch 900 does not overlap the area AB between the hole 400 and the through-hole 800. Notch 900 is disposed on the opposite side of hole 400 with respect to pedestal 43 in the direction in which hole 400, through-hole 800, and pedestal 43 are aligned (the X-axis direction in FIG. 6).

[0070] With this configuration, the valve of the fluid control device 10B can suppress a decrease in the flow rate of gas from the hole 400 to the through hole 800 while obtaining the effect of suppressing foreign matter from reaching the through hole 800 by the protrusion portion 90B (the effect of trapping foreign matter).

[0071] The circumferential length of the notch 900 (the width of the opening formed by the notch 900) can be set appropriately based on the required flow rate and the like.

[0072] [Fourth embodiment] A valve and a fluid control device according to a fourth embodiment of the present invention will be described with reference to the drawings. Fig. 7 is an enlarged plan view of a portion including a base and a valve membrane in a valve of a fluid control device according to the fourth embodiment. of Shown removed.

[0073] 7, the valve of the fluid control device 10C according to the fourth embodiment differs from the valve of the fluid control device 10B according to the third embodiment in that it includes a protrusion 90C. Other configurations of the valve of the fluid control device 10C are similar to those of the valve of the fluid control device 10B, and a description of similar parts will be omitted.

[0074] The valve of the fluid control device 10C includes a protrusion 90C. The protrusion 90C differs from the protrusion 90B in that it includes a thin portion 99. Other configurations of the protrusion 90C are the same as those of the protrusion 90B, and a description of similar parts will be omitted.

[0075] The protrusion 90C includes a thin portion 99. The thin portion 99 is a portion where the distance between the inner surface and the outer surface is shorter in the circumferential direction of the protrusion 90C compared to other portions.

[0076] The protrusion 90C is disposed in the valve chamber 410 so that the thin portion 99 is between the hole 400 and the through-hole 800. With this configuration, the valve of the fluid control device 10C can suppress a decrease in the flow rate of gas from the hole 400 to the through-hole 800 while obtaining the effect of suppressing foreign matter from reaching the through-hole 800 due to the protrusion 90C.

[0077] In addition, in the protrusion 90C, the outer surface 990 of the thin portion 99 is flat. The protrusion 90C is disposed so that the outer surface 990 faces the hole 400. In other words, the outer surface 990 is disposed so as to be perpendicular to the direction in which the hole 400 and the through-hole 800 are aligned.

[0078] This increases the likelihood that foreign matter from the hole 400 will collide with the outer surface 990 and remain on the outer surface 990. Therefore, the valve of the fluid control device 10C can further enhance the effect of trapping foreign matter.

[0079] [Fifth embodiment] A valve and a fluid control device according to a fifth embodiment of the present invention will be described with reference to the drawings. Fig. 8(A) is a schematic side cross-sectional view showing the configuration of a fluid control device according to the fifth embodiment. Fig. 8(B) is an enlarged plan view of a portion including a seat and a valve membrane in a valve of the fluid control device according to the fifth embodiment. Fig. 8(B) shows the valve membrane. of Shown removed.

[0080] 8(A) and 8(B), a fluid control device 10D according to the fifth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11D. The other configuration of the fluid control device 10D is the same as that of the fluid control device 10, and a description of similar parts will be omitted.

[0081] The fluid control device 10D includes a valve 11D. The valve 11D differs from the valve 11 according to the first embodiment in that the valve 11D includes a protrusion 90D1 and a protrusion 90D2. Other configurations of the valve 11D are the same as those of the valve 11, and a description of similar parts will be omitted.

[0082] The bulb 11D includes a protrusion 90D1 and a protrusion 90D2, which are annular in plan view.

[0083] The protrusion 90D2 is disposed so that the seat 43 overlaps the central opening of the protrusion 90D2 in a plan view of the valve 11D. In other words, the seat 43 is disposed within the central opening of the protrusion 90D2.

[0084] The protrusion 90D1 is disposed so that the base 43 and the protrusion 90D2 overlap with the central opening of the protrusion 90D1 in a plan view of the valve 11D. In other words, the base 43 and the protrusion 90D2 are disposed within the central opening of the protrusion 90D1.

[0085] The protrusion 90D1 is fixed to the valve membrane 80, and is not fixed to the flat plate 41 of the housing member 40. The protrusion 90D2 is fixed to the flat plate 41 of the housing member 40, and is not fixed to the valve membrane 80.

[0086] This configuration provides two protrusions in the gas flow path, improving the foreign matter trapping effect of valve 11D. In particular, protrusion 90D1 and protrusion 90D2 are fixed to different targets in valve 11D, and the positions of the gaps formed by protrusion 90D1 and protrusion 90D2 in the thickness direction of valve 11D are different. Therefore, valve 11D can further improve the foreign matter trapping effect.

[0087] [Sixth embodiment] A valve and a fluid control device according to a sixth embodiment of the present invention will be described with reference to the drawings. Fig. 9 is an enlarged plan view of a portion including a base and a valve membrane in a valve of a fluid control device according to the sixth embodiment. of Shown removed.

[0088] 9, the valve of the fluid control device 10E according to the sixth embodiment differs from the valve of the fluid control device 10D according to the fifth embodiment in that it includes protrusions 90E1 and 90E2. The other configuration of the valve of the fluid control device 10E is the same as that of the valve of the fluid control device 10D, and a description of similar parts will be omitted.

[0089] The valve of the fluid control device 10E has a protrusion 90E1 and protrusion The protrusion 90E2 is similar to the protrusion 90D2.

[0090] The protrusion 90E1 is annular (C-shaped) with a portion cut out in the circumferential direction. In other words, the protrusion 90E1 has a notch 900E1 in the middle in the circumferential direction. That is, the protrusion 90E1 has a configuration similar to that of the protrusion 90B applied to the protrusion 90D1.

[0091] With this configuration, the valve of the fluid control device 10E can suppress a decrease in the flow rate of gas from the hole 400 to the through-hole 800 while improving the effect of trapping foreign matter.

[0092] [Seventh embodiment] A valve and a fluid control device according to a seventh embodiment of the present invention will be described with reference to the drawings. Fig. 10 is an enlarged plan view of a portion including a base and a valve membrane in a valve of a fluid control device according to the seventh embodiment. of Shown removed.

[0093] 10, the valve of the fluid control device 10F according to the seventh embodiment differs from the valve of the fluid control device 10E according to the sixth embodiment in that it includes protrusions 90F1 and 90F2. The other configuration of the valve of the fluid control device 10F is the same as that of the valve of the fluid control device 10E, and a description of similar parts will be omitted.

[0094] The valve of the fluid control device 10F has a protrusion 90F1 and protrusion The protrusion 90F1 has a similar configuration to the protrusion 90E1. The protrusion 90F1 has a notch 900F1.

[0095] Like the protrusion 90F1, the protrusion 90F2 has a ring shape (C ring) with a portion cut out in the circumferential direction. In other words, the protrusion 90F2 has a cutout portion 900F2 in the middle in the circumferential direction. The protrusion 90F2 is a ring shape (C ring) that is smaller than the protrusion 90F1, and is disposed between the protrusion 90F1 and the base 43 in a plan view.

[0096] The notch 900F1 and the notch 900F2 do not overlap. That is, the direction in which the notch 900F1 is located and the direction in which the notch 900F2 is located are different when the base 43 is used as the reference. In this case, it is preferable that the direction in which the notch 900F1 is located when the base 43 is used as the reference and the direction in which the notch 900F2 is located when the base 43 is used as the reference are as far apart as possible when the base 43 is used as the reference. For example, it is preferable that the direction in which the notch 900F1 is located when the base 43 is used as the reference and the direction in which the notch 900F2 is located when the base 43 is used as the reference are as opposite as possible.

[0097] With this configuration, the fluid control device 10 FThis valve can further suppress the decrease in the flow rate of gas from the hole 400 to the through-hole 800 while improving the effect of trapping foreign matter.

[0098] [Eighth embodiment] A valve and a fluid control device according to an eighth embodiment of the present invention will be described with reference to the drawings. Fig. 11 is an enlarged plan view of a portion including a base and a valve membrane in a valve of a fluid control device according to the eighth embodiment. of Shown removed.

[0099] 11, the valve of the fluid control device 10G according to the eighth embodiment differs from the valve 11 of the fluid control device 10 according to the first embodiment in that it includes a protrusion 90G. Other configurations of the valve of the fluid control device 10G are similar to those of the valve 11 of the fluid control device 10, and a description of similar parts will be omitted.

[0100] The valve of the fluid control device 10G includes a protrusion 90G. The protrusion 90G has a flat spiral shape with a predetermined thickness. The base 43 is disposed within the central opening of the spiral formed by the protrusion 90G.

[0101] In this configuration, gas from hole 400 flows in from the opening at the outer end of protrusion 90G, flows spirally according to the spiral shape of protrusion 90G, and flows into through-hole 800 from the opening at the inner end of protrusion 90G.

[0102] With this configuration, the valve of the fluid control device 10G can ensure a predetermined flow rate of gas from the hole 400 to the through-hole 800 while obtaining the effect of trapping foreign matter.

[0103] [Ninth embodiment] A valve and a fluid control device according to a ninth embodiment of the present invention will be described with reference to the drawings. Fig. 12 is a schematic side cross-sectional view showing the configuration of the fluid control device according to the ninth embodiment.

[0104] As shown in Fig. 12, the fluid control device 10H according to the ninth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11H. The other configuration of the fluid control device 10H is similar to that of the fluid control device 10, and a description of similar parts will be omitted. The valve 11H differs from the valve 11 according to the first embodiment in that it includes a protrusion 90H. The other configuration of the valve 11H is similar to that of the valve 11, and a description of similar parts will be omitted.

[0105] The valve 11H includes a protrusion 90H. The protrusion 90H is made of a different material than the protrusion 90. The protrusion 90H is made of a mesh material. In this case, it is preferable that the maximum opening of the mesh material is equal to or smaller than the maximum opening of the through-hole 800.

[0106] With this configuration, the valve of the fluid control device 10H can further suppress a decrease in the flow rate of gas from the hole 400 to the through-hole 800 while improving the effect of trapping foreign matter.

[0107] In the valve 11H, the protrusion 90H does not cover the through-hole 800. However, the protrusion 90H may cover the through-hole 800. In this case, at least the portion overlapping the through-hole 800 is made up of only a mesh that is continuous in the thickness direction. This makes it possible to suppress the inflow of gas through the through-hole 800 even when gas is discharged from the cuff 2.

[0108] [Tenth embodiment] A valve and a fluid control device according to a tenth embodiment of the present invention will be described with reference to the drawings. Fig. 13(A) is a schematic side cross-sectional view showing the configuration of a fluid control device according to the tenth embodiment. Fig. 13(B) is an enlarged plan view of a portion including a seat and a valve membrane in a valve of the fluid control device according to the tenth embodiment. Fig. 13(B) shows the valve membrane. of Shown removed.

[0109] As shown in Figures 13(A) and 13(B), a fluid control device 10I according to the tenth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11I. The other configuration of the fluid control device 10I is similar to that of the fluid control device 10, and a description of similar parts will be omitted. The valve 11I differs from the valve 11 according to the first embodiment in that it includes an adhesive layer 98. The other configuration of the valve 11I is similar to that of the valve 11, and a description of similar parts will be omitted.

[0110] The adhesive layer 98 is disposed on the outer surface of the protrusion 90. More specifically, the adhesive layer 98 is disposed in a region on the outer surface of the protrusion 90 closer to the hole 400 than the base 43 and the through-hole 800.

[0111] With this configuration, foreign matter coming from the hole 400 side is adsorbed by the adhesive layer 98. Therefore, the valve of the fluid control device 10I can improve the effect of trapping foreign matter.

[0112] The adhesive layer 98 is not limited to the above example, and may be disposed on, for example, the entire outer surface of the protrusion 90, the surface opposite to the surface that contacts the valve membrane 80, the inner main surface, or multiple surfaces that are a combination of these.

[0113] Furthermore, the configurations of the above-described embodiments can be combined as appropriate, and effects corresponding to each combination can be achieved.

[0114] <1> a housing having a first wall and a second wall facing each other, and a side wall connected to the first wall and the second wall and capable of defining a valve chamber together with the first wall and the second wall; a first hole formed in the first wall and connecting the valve chamber to the outside; a second hole formed in the second wall and connecting the valve chamber to the outside; a valve membrane that divides the valve chamber into a first space on the first wall side and a second space on the second wall side, and has a through hole that allows communication between the first space and the second space; a seat that protrudes from the first wall into the valve chamber and is positioned to overlap the through hole when the valve is viewed from the first wall toward the second wall in a plan view; A valve comprising: a protrusion disposed between the first hole and the base when the valve is viewed cross-sectionally in a second direction that is perpendicular to the first direction, the protrusion being provided on the valve membrane or the first wall in the first space.

[0115] <2> The protrusion is arranged in a ring shape surrounding the base when viewed in a plan view in the first direction. <1> Valve.

[0116] <3> The protrusion has a shape that is continuous all around. <2> Valve.

[0117] <4> The protrusion has a shape in which a part of the entire circumference is missing. <2> Valve.

[0118] <5> The missing portion is located at a position different from between the first hole and the base when the valve is viewed cross-sectionally from a side in the second direction. <4> Valve.

[0119] <6> The protrusion is a first protrusion provided on the valve membrane; a second protrusion provided on the first wall; Equipped with <1> or <5> One of the valves.

[0120] <7> The protrusion is a first protrusion provided on the valve membrane; a second protrusion provided on the first wall; Equipped with the missing portion of the first protrusion and the missing portion of the second protrusion are located at different positions in a plan view in the first direction; <5> Valve.

[0121] <8> The protrusion has a planar spiral shape. <1> Valve.

[0122] <9> The surface of the protrusion has adhesiveness. <1> ~ <8> One of the valves.

[0123] <10> The protrusion has a mesh shape. <1> ~ <9> One of the valves.

[0124] <11> the distance between the protrusion formed on the first wall and the valve membrane is smaller than the maximum dimension of the protrusion and the through-hole; <1> ~ <10> One of the valves.

[0125] <12> the distance between the protrusion formed on the valve leaflet and the first wall is smaller than the maximum dimension of the through hole; <1> ~ <10> One of the valves.

[0126] <13> The length of the protrusion in the first direction is smaller than the length of the base in the first direction. <1> ~ <12> One of the valves.

[0127] <14> <1> ~ <13> and one of the valves a pump having a pump chamber communicating with the first hole; A fluid control device comprising: [Explanation of symbols]

[0128] 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H, 10I: Fluid control device 11, 11A, 11D, 11H, 11I: Valves 12: Pump 21: Main plate 22: Frame 23: Connecting member 30: Piezoelectric element 40: Housing materials 41: Flat plate 42: Side wall 43: Pedestal 50: Side wall member 60: Lid member 70: Housing materials 71: Holding plate 80: Valve 90, 90B, 90C, 90D1, 90D2, 90E1, 90E2, 90F1, 90F2, 90G, 90H: Projection 98: Adhesive layer 99: Thin part 400, 600, 700, 790: hole 410: Valve chamber 500:Hollow 800:Through hole 990: External surface

Claims

1. a housing including a first wall and a second wall facing each other, and a side wall connected to the first wall and the second wall and capable of defining a valve chamber together with the first wall and the second wall; a first hole formed in the first wall and connecting the valve chamber to the outside; a second hole formed in the second wall and connecting the valve chamber to the outside; a valve membrane that divides the valve chamber into a first space on the first wall side and a second space on the second wall side, and has a through hole that allows communication between the first space and the second space; a seat that protrudes from the first wall into the valve chamber and is positioned to overlap the through hole when the valve is viewed from the first wall toward the second wall in a plan view; a protrusion disposed between the first hole and the seat when the valve is viewed cross-sectionally in a second direction perpendicular to the first direction, the protrusion being provided on the valve membrane or the first wall in the first space; Equipped with valve.

2. The protrusion is disposed in a ring shape surrounding the base when viewed in a plan view in the first direction. The valve of claim 1.

3. The protrusion has a shape that is continuous all around.

3. The valve of claim 2.

4. The protrusion has a shape in which a part of the entire circumference is missing.

3. The valve of claim 2.

5. the missing portion is located at a position different from between the first hole and the base when the valve is viewed cross-sectionally from a side in the second direction.

5. The valve of claim 4.

6. The protrusion is a first protrusion provided on the valve membrane; a second protrusion provided on the first wall; Equipped with A valve according to claim 1 or claim 5.

7. The protrusion is a first protrusion provided on the valve membrane; a second protrusion provided on the first wall; Equipped with the missing portion of the first protrusion and the missing portion of the second protrusion are located at different positions in a plan view in the first direction.

6. The valve of claim 5.

8. The protrusion has a planar spiral shape. The valve of claim 1.

9. The surface of the protrusion has adhesiveness. The valve of claim 1.

10. The protrusion has a mesh shape. The valve of claim 1.

11. a distance between the protrusion formed on the first wall and the valve membrane is smaller than a maximum dimension of the protrusion and the through-hole; The valve of claim 1.

12. a distance between the protrusion formed on the valve leaflet and the first wall is smaller than a maximum dimension of the through hole; The valve of claim 1.

13. a length of the protrusion in the first direction being shorter than a length of the base in the first direction; The valve of claim 1.

14. A valve according to claim 1; a pump having a pump chamber communicating with the first hole; A fluid control device comprising:

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