Horizontal articulated robot

Abstract

To provide a horizontally articulated robot capable of suppressing infiltration of liquid into the horizontally articulated robot from joint parts in the horizontally articulated robot whose arms operate in a horizontal direction.SOLUTION: A horizontally articulated robot includes: a first arm part 7; and a second arm part 8 which is arranged above the first arm part 7 and rotatably connected to the first arm part 7. The first arm part 7 is provided with an annular bearing pressing member 26 which composes a part of an outer peripheral side part of the first arm part 7 in a joint part 11 that is a joint part between the first arm part 7 and the second arm part 8. The second arm part 8 is provided with an arm part body 29 composing the outer peripheral side part of the second arm part 8 in the joint part 11. The arm part body 29 is provided with a cylindrical cover 29a covering an upper part of the bearing pressing member 26 from outside in a radial direction of the joint part 11 across a whole circumference. A lower end of the cylindrical cover 29a is arranged below an upper end of the bearing pressing member 26.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a horizontal articulated robot whose arm moves in the horizontal direction. [Background technology]

[0002] Conventionally, horizontal articulated robots for transporting objects such as glass substrates and semiconductor wafers are known (see, for example, Patent Document 1). The horizontal articulated robot described in Patent Document 1 includes a hand on which the object is placed, an arm to which the hand is rotatably connected at its tip end, and a main body to which the base end of the arm is rotatably connected. The arm is composed of a first arm section and a second arm section rotatably connected to each other.

[0003] In the horizontal articulated robot described in Patent Document 1, the base end side of the first arm section is rotatably connected to the main body section. The base end side of the second arm section is rotatably connected to the tip side of the first arm section. The hand is rotatably connected to the tip side of the second arm section. The first arm section is disposed above the main body section, the second arm section is disposed above the first arm section, and the hand is disposed above the second arm section. The connecting portion between the main body section and the first arm section, the connecting portion between the first arm section and the second arm section, and the connecting portion between the second arm section and the hand are joints. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2019-118962 Summary of the Invention [Problem to be solved by the invention]

[0005] For example, when the horizontal articulated robot described in Patent Document 1 transports a semiconductor wafer after a predetermined process using a liquid has been performed, the liquid remaining on the semiconductor wafer may fall from the semiconductor wafer and enter the interior of the horizontal articulated robot through the joints. Furthermore, if the liquid enters the interior of the horizontal articulated robot through the joints, corrosion may occur inside the horizontal articulated robot.

[0006] Therefore, the object of the present invention is to provide a horizontal articulated robot whose arms move horizontally, which is capable of preventing liquid from entering the interior of the horizontal articulated robot through the joints. [Means for solving the problem]

[0007] In order to solve the above problems, the horizontal articulated robot of the present invention is a horizontal articulated robot in which an arm moves in a horizontal direction, and comprises a supporting part and a supported part that is arranged above the supporting part and is rotatably connected to the supporting part, the supporting part comprises an annular supporting member that constitutes at least a part of the outer circumferential part of the supporting part at a joint that is the connecting part between the supporting part and the supported part, the supported part comprises a supported part that constitutes at least a part of the outer circumferential part of the supported part at the joint, the supported part comprises a cylindrical covering part that is cylindrical and covers at least an upper part of the supporting part from the outside in the radial direction of the joint over the entire circumference, and the lower end of the cylindrical covering part is arranged below the upper end of the supporting part The radially outer end of the first gap, which is a gap formed between the cylindrical cover and the support side member, of the joint portion is an open opening, and the entire first gap is formed above the lower end of the opening, and when a space connected to the upper end of the first gap is formed inside the joint portion, the entire space is formed above the opening. It is characterized by:

[0008] In the horizontal articulated robot of the present invention, the supporting unit includes an annular supporting member that forms at least a portion of the outer periphery of the supporting unit at a joint that connects the supporting unit and the supported unit, and the supported unit, which is disposed above the supporting unit, includes a supported member that forms at least a portion of the outer periphery of the supported unit at the joint. Furthermore, in the present invention, the supported member includes a cylindrical covering member that covers at least an upper portion of the supporting unit from the radial outside of the joint unit around the entire circumference, and the lower end of the cylindrical covering member is disposed below the upper end of the supporting unit. Therefore, in the present invention, if liquid that passes below the cylindrical covering member at the joint unit does not pass above the supporting unit, the liquid will not penetrate into the horizontal articulated robot through the joint unit. Therefore, in the present invention, for example, it is possible to prevent liquid that has fallen from an object to be transported from penetrating into the horizontal articulated robot through the joint unit.

[0009] In the present invention, for example, the horizontal articulated robot has a hand as a supported part on which an object to be transported is placed, and the arm has a tip arm part as a support part to which the hand is rotatably connected at the tip side.

[0010] In the present invention, for example, a horizontal articulated robot has a hand on which an object to be transported is placed, and the arm has a tip-side arm portion as a supported portion to which the hand is rotatably connected at the tip end, and a base-side arm portion as a supporting portion to which the base end side of the tip-side arm portion is rotatably connected at the tip end.

[0011] In the present invention, for example, a horizontal articulated robot has a main body portion as a support portion to which the base end side of an arm is rotatably connected, and the arm has a base end arm portion as a supported portion to which the base end side is rotatably connected to the main body portion.

[0012] In the present invention, the horizontal articulated robot includes a hand on which an object to be transported is mounted and which is rotatably connected to the distal end of the arm. The hand includes an end surface abutment member disposed at the distal end of the hand and having an abutment surface against which the end surface of the object to be transported abuts; a pressing member for pressing the object to be transported against the abutment surface; a movement mechanism disposed inside the proximal end of the hand and for moving the pressing member; and a cover covering the movement mechanism from above. Preferably, the proximal end of the pressing member is connected to the movement mechanism, and the cover covers the proximal end portion of the pressing member from above. With this configuration, for example, the cover can prevent liquid that has fallen from the object to be transported from adhering to the proximal end portion of the pressing member. Therefore, for example, the cover can prevent liquid that has fallen from the object to be transported from seeping into the proximal end portion of the hand.

[0013] In the present invention, the horizontal articulated robot includes a hand on which an object to be transported is mounted and which is rotatably connected to the distal end of an arm, the hand including an end surface abutment member disposed at the distal end of the hand and having an abutment surface against which an end surface of the object to be transported abuts, a pressing member for pressing the object to be transported against the abutment surface, a movement mechanism disposed inside the proximal end of the hand and for moving the pressing member, and a cover for covering the movement mechanism from above, the movement mechanism including a slide shaft to which the proximal end of the pressing member is fixed at its distal end, and a shaft holding member for slidably holding the slide shaft, the shaft holding member preferably having a through hole through which the slide shaft is inserted, the slide shaft being slidable linearly relative to the shaft holding member, and a flange formed at the distal end of the slide shaft that extends radially outward from the slide shaft. With this configuration, for example, the flange can prevent liquid dropping from the object to pass through the through hole in the shaft holding member and enter the proximal end of the hand. [Effects of the Invention]

[0014] As described above, in the horizontal articulated robot of the present invention, it is possible to prevent liquid from entering the interior of the horizontal articulated robot through the joints. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a plan view of a horizontal articulated robot according to an embodiment of the present invention; [Figure 2] FIG. 2 is a side view of the horizontal articulated robot shown in FIG. [Figure 3] FIG. 2 is a plan view of the hand and arm shown in FIG. 1 in a state where the arm is extended. [Figure 4] FIG. 4 is a cross-sectional view taken along the E-E cross section of FIG. 3. [Figure 5] FIG. 5 is an enlarged view of part F in FIG. 4. [Figure 6] FIG. 5 is an enlarged view of part G in FIG. [Figure 7] FIG. 5 is an enlarged view of part H in FIG. 4. [Figure 8] FIG. 4 is a cross-sectional view taken along the line JJ in FIG. 3. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0017] (Schematic configuration of horizontal articulated robot) Fig. 1 is a plan view of a horizontal articulated robot 1 according to an embodiment of the present invention, and Fig. 2 is a side view of the horizontal articulated robot 1 shown in Fig. 1.

[0018] A horizontal articulated robot 1 (hereinafter referred to as "robot 1") in this embodiment is an industrial robot for transporting a semiconductor wafer 2 (hereinafter referred to as "wafer 2"), which is an object to be transported. The wafer 2 is formed in a disk shape. In this embodiment, a predetermined process using a liquid is performed on the wafer 2, and the robot 1 transports the wafer 2 after the process.

[0019] The robot 1 includes a hand 3 on which a wafer 2 is placed, an arm 4 to which the tip end of the hand 3 is rotatably connected, and a main body 5 to which the base end of the arm 4 is rotatably connected. The robot 1 also includes a horizontal movement mechanism (not shown) that moves the main body 5 linearly in the horizontal direction. The robot 1 of this embodiment includes two hands 3 and two arms 4, and one hand 3 is rotatably connected to each of the two arms 4. The base ends of the two arms 4 are rotatably connected to the main body 5.

[0020] The arm 4 is composed of two arm sections, a first arm section 7 and a second arm section 8, which are connected to be rotatable relative to each other. The arm 4 operates in the horizontal direction. Specifically, the arm 4 operates to extend and retract in the horizontal direction. The first arm section 7 and the second arm section 8 are formed hollow. The base end side of the first arm section 7 is rotatably connected to the main body section 5. The base end side of the second arm section 8 is rotatably connected to the tip end side of the first arm section 7. The hand 3 is rotatably connected to the tip end side of the second arm section 8. In this embodiment, the second arm section 8 is the tip end side arm section, and the first arm section 7 is the base end side arm section.

[0021] The first arm unit 7 rotates relative to the main body unit 5 with the vertical direction as its axis of rotation. The second arm unit 8 rotates relative to the first arm unit 7 with the vertical direction as its axis of rotation. The hand 3 rotates relative to the second arm unit 8 with the vertical direction as its axis of rotation. The first arm unit 7 is disposed above the main body unit 5, and the second arm unit 8 is disposed above the first arm unit 7. The hand 3 is disposed above the second arm unit 8. The connecting portion between the first arm unit 7 and the main body unit 5 is a joint unit 10. The connecting portion between the first arm unit 7 and the second arm unit 8 is a joint unit 11. The connecting portion between the second arm unit 8 and the hand 3 is a joint unit 12.

[0022] In this embodiment, in the relationship between the hand 3 and the second arm unit 8, the second arm unit 8 serves as a supporting unit, and the hand 3 serves as a supported unit that is disposed above the second arm unit 8, which serves as a supporting unit, and is rotatably connected to the second arm unit 8. In addition, in the relationship between the first arm unit 7 and the second arm unit 8, the first arm unit 7 serves as a supporting unit, and the second arm unit 8 serves as a supported unit that is disposed above the first arm unit 7, which serves as a supporting unit, and is rotatably connected to the first arm unit 7. In addition, in the relationship between the main body unit 5 and the first arm unit 7, the main body unit 5 serves as a supporting unit, and the first arm unit 7 serves as a supporting unit that is disposed above the main body unit 5, which serves as a supporting unit, and is rotatably supported by the main body unit 5.

[0023] (Main body, arm and hand configuration) Fig. 3 is a plan view of the hand 3 and the arm 4 in a state in which the arm 4 shown in Fig. 1 is extended. Fig. 4 is a cross-sectional view of the E-E cross section of Fig. 3. Fig. 5 is an enlarged view of a portion F of Fig. 4. Fig. 6 is an enlarged view of a portion G of Fig. 4. Fig. 7 is an enlarged view of a portion H of Fig. 4.

[0024] The main body 5 includes a hollow case body 14. A hollow rotation shaft 15 is disposed inside the case body 14 and is rotatable relative to the case body 14 with the vertical direction as the rotation axis. The main body 5 also includes a disk-shaped cover 16 fixed to the upper end of the case body 14 so as to close an opening formed at the upper end of the case body 14, and a cylindrical fixing member 17 fixed to the case body 14 or the cover 16. The outer shape of the cover 16 is larger than the outer shape of the case body 14. A pulley 18 is fixed to the fixing member 17.

[0025] The rotating shaft 15 is formed in a substantially cylindrical shape with its axial direction extending in the vertical direction. The fixed member 17 is also formed in a substantially cylindrical shape with its axial direction extending in the vertical direction. The rotating shaft 15 is disposed on the inner circumferential side of the fixed member 17. A through-hole is formed in the center of the cover 16, into which a part of the fixed member 17 is disposed, and the fixed member 17 is fixed to the center of the cover 16. The upper end of the fixed member 17 is disposed above the upper surface of the cover 16, and the lower end of the fixed member 17 is disposed below the upper surface of the cover 16.

[0026] The upper end of the rotating shaft 15 is located above the upper surface of the cover 16. The base end side of the first arm portion 7 is fixed to the upper end of the rotating shaft 15. A motor (not shown) for rotating the rotating shaft 15 relative to the case body 14 is located inside the case body 14. The rotating shaft 15 is connected to this motor via, for example, a pulley, a belt, and a reducer.

[0027] The first arm section 7 includes an arm section main body 21 formed in the shape of a long, hollow box, and two flat plate-shaped covers 22 and 23 (see FIG. 4). The upper surface of the arm section main body 21 is open except for the tip end of the arm section main body 21. The lower surface of the arm section main body 21 is open except for the base end of the arm section main body 21. The cover 22 is fixed to the upper surface side of the arm section main body 21 so as to close the opening formed in the upper surface of the arm section main body 21. The cover 23 is fixed to the lower surface side of the arm section main body 21 so as to close the opening formed in the lower surface of the arm section main body 21.

[0028] A through-hole penetrating in the vertical direction is formed in the lower surface of the base end side of the arm main body 21. A through-hole penetrating in the vertical direction is formed in the upper surface of the tip end side of the arm main body 21. The first arm 7 includes a fixed member 24 fixed to the base end of the arm main body 21, and a hollow fixed shaft 25 and a bearing presser member 26 fixed to the tip end of the arm main body 21. A pulley 27 is fixed to the fixed shaft 25.

[0029] The second arm section 8 comprises an arm section main body 29 formed in the shape of a long, hollow box, and two flat plate-shaped covers 30 and 31 (see FIG. 4). The upper surface of the arm section main body 29 is open except for the tip end of the arm section main body 29. The lower surface of the arm section main body 29 is open except for the base end of the arm section main body 29. The cover 30 is fixed to the upper surface side of the arm section main body 29 so as to close the opening formed in the upper surface of the arm section main body 29. The cover 31 is fixed to the lower surface side of the arm section main body 29 so as to close the opening formed in the lower surface of the arm section main body 29.

[0030] A through-hole that penetrates in the vertical direction is formed in the lower surface of the base end side of the arm main body 29. A through-hole that penetrates in the vertical direction is formed in the upper surface of the tip end side of the arm main body 29. The second arm 8 includes a cylindrical fixing member 32 that is fixed to the base end of the arm main body 29, and a cylindrical fixing member 34 that is fixed to the tip end of the arm main body 29. A pulley 33 is fixed to the fixing member 32.

[0031] The hand 3 includes a wafer mounting section 36 on which the wafer 2 is mounted, a hand base 37 constituting the base end of the hand 3, and a fixed member 38 fixed to the hand base 37. A pulley 39 is fixed to the fixed member 38. The wafer mounting section 36 is formed in the shape of a substantially Y-shaped flat plate. The wafer mounting section 36 is fixed to the tip end of the hand base 37. The hand base 37 is formed in a hollow shape. A more specific configuration of the hand 3 will be described later.

[0032] (Joint structure) As shown in FIG. 5, upper end 17a of fixing member 17, which is the portion disposed above the upper surface of cover 16, is composed of large diameter portion 17b, medium diameter portion 17c having a smaller outer diameter than large diameter portion 17b, and small diameter portion 17d having a smaller outer diameter than medium diameter portion 17c. Large diameter portion 17b, medium diameter portion 17c, and small diameter portion 17d are disposed in this order from the bottom up. The lower surface of large diameter portion 17b is in contact with the upper surface of cover 16. A sealing member such as an O-ring is disposed between the lower surface of large diameter portion 17b and the upper surface of cover 16 to prevent liquid from entering the inner periphery of large diameter portion 17b.

[0033] As described above, in the joint portion 10, the rotating shaft 15 is disposed on the inner peripheral side of the fixed member 17. The upper end portion 17a of the fixed member 17 forms part of the outer peripheral surface of the main body portion 5 in the joint portion 10. Specifically, the upper end portion 17a forms the upper end of the outer peripheral surface of the main body portion 5 in the joint portion 10. The fixed member 17 in this embodiment is an annular support side member that forms part of the outer peripheral portion of the main body portion 5 in the joint portion 10.

[0034] The rotating shaft 15 is rotatably supported by the fixed member 17 via a bearing 42. The pulley 18 is fixed to the upper end of the small diameter portion 17d of the fixed member 17. The upper end of the rotating shaft 15 and the upper end 17a of the fixed member 17 are inserted into a through-hole formed in the underside of the base end side of the arm main body 21. The upper end and small diameter portion 17d of the rotating shaft 15 are arranged inside the base end side of the arm main body 21. The pulley 18 and the bearing 42 are also arranged inside the base end side of the arm main body 21.

[0035] The fixed member 24 is fixed to the base end of the arm main body 21 inside the base end side of the arm main body 21. The fixed member 24 is also fixed to the upper end of the rotation shaft 15, and is rotatably supported by the fixed member 17 via a bearing 42. Therefore, the arm main body 21 is rotatable relative to the fixed member 17. In other words, the first arm portion 7 is rotatable relative to the fixed member 17 and the case body 14.

[0036] The base end portion of the arm main body 21 constitutes the outer circumferential portion of the first arm section 7 at the joint section 10. The lower surface of the arm main body 21 is located lower than the upper end of the medium diameter section 17c of the fixing member 17. A cylindrical covering portion 21a is formed at the base end of the arm main body 21, covering (surrounding) the upper end of the medium diameter section 17c and the small diameter section 17d from the radial outside of the joint section 10 over the entire circumference. In other words, the arm main body 21 is provided with a cylindrical covering portion 21a that covers the upper part of the fixing member 17 from the radial outside of the joint section 10 over the entire circumference. The arm main body 21 in this embodiment is a supported member that constitutes the outer circumferential portion of the first arm section 7 at the joint section 10.

[0037] The lower surface of cylindrical covering portion 21a constitutes a part of the lower surface of arm portion main body 21. The lower surface of cylindrical covering portion 21a is located lower than the upper end of medium diameter portion 17c. In other words, the lower surface of cylindrical covering portion 21a is located lower than the upper surface of small diameter portion 17d, and the lower end of cylindrical covering portion 21a is located lower than the upper end of fixing member 17.

[0038] In the joint portion 11, the fixed shaft 25 is disposed inside the tip side of the arm portion main body 21. The fixed shaft 25 is formed in the shape of an elongated cylinder with its axial direction extending in the vertical direction. The lower end of the fixed shaft 25 is fixed to the arm portion main body 21. The pulley 27 is fixed to the upper end of the fixed shaft 25. The pulley 27 is disposed inside the base end side of the arm portion main body 29. The bearing presser member 26 is formed in an annular shape. Furthermore, the bearing presser member 26 is formed in the shape of a flat cylinder with a short length in the vertical direction.

[0039] The bearing presser member 26 is fixed to the upper surface of the tip of the arm main body 21. The upper end of the bearing presser member 26 is located higher than the upper surface of the arm main body 21 and the upper surface of the cover 22. The bearing presser member 26 forms part of the outer circumferential surface of the first arm section 7 at the joint section 11. Specifically, the bearing presser member 26 forms the upper end of the outer circumferential surface of the first arm section 7 at the joint section 11. The bearing presser member 26 functions to press a bearing 45, which will be described later, from above. The bearing presser member 26 in this embodiment is an annular support member that forms part of the outer circumferential portion of the first arm section 7 at the joint section 11.

[0040] The fixed member 32 is fixed to the underside of the base end of the arm main body 29. The outer peripheral surface of the upper end of the fixed member 32 contacts the inner peripheral surface of a through hole formed in the underside of the base end of the arm main body 29. The pulley 33 is fixed to the lower end of the fixed member 32. The fixed member 32 is inserted into the inner peripheral side of the bearing presser member 26, and the lower end of the fixed member 32 and the pulley 33 are disposed inside the tip end side of the arm main body 21. A belt (not shown) is stretched between the pulley 33 and the pulley 18.

[0041] Fixed shaft 25 is disposed on the inner peripheral side of fixed member 32 and pulley 33. Fixed member 32 and pulley 33 are rotatably supported on fixed shaft 25 via bearing 44. Fixed member 32 and pulley 33 are rotatably supported on the tip end of arm main body 21 and bearing presser member 26 via bearing 45. Therefore, fixed member 32 is rotatable relative to arm main body 21 and fixed shaft 25. In other words, second arm unit 8 is rotatable relative to first arm unit 7.

[0042] The base end portion of the arm main body 29 constitutes the outer circumferential portion of the second arm section 8 at the joint section 11. A recess 29b is formed on the underside of the base end of the arm main body 29, in which the upper end of the bearing presser member 26 is disposed. The recess 29b is formed in an annular shape that is recessed upward. The underside of the arm main body 29 is disposed below the upper end of the bearing presser member 26. The arm main body 29 in this embodiment is a supported member that constitutes the outer circumferential portion of the second arm section 8 at the joint section 11.

[0043] The outer portion of the recess 29b in the radial direction of the joint portion 11 is a cylindrical covering portion 29a that covers the entire circumference of the upper end portion of the bearing presser member 26 from the radial outside of the joint portion 11. That is, the base end of the arm main body 29 is formed with a cylindrical covering portion 29a that covers the entire circumference of the upper end portion of the bearing presser member 26 from the radial outside of the joint portion 11, and the arm main body 29 is provided with a cylindrical covering portion 29a that covers the entire circumference of the upper part of the bearing presser member 26 from the radial outside of the joint portion 11. As described above, the lower surface of the arm main body 29 is located lower than the upper end of the bearing presser member 26, and the lower end of the cylindrical covering portion 29a is located lower than the upper end of the bearing presser member 26.

[0044] In the joint portion 12, a cylindrical hollow shaft portion 29c is formed inside the arm portion main body 29, protruding upward from the lower end side of the arm portion main body 29. The fixing member 34 is formed in an annular shape. The fixing member 34 is also formed in a flat cylindrical shape with a short length in the up-down direction. The fixing member 34 is fixed to the upper surface side of the tip end of the arm portion main body 29. The upper end of the fixing member 34 is located higher than the upper surface of the arm portion main body 29 and the upper surface of the cover 30. The fixing member 34 forms part of the outer circumferential surface of the second arm portion 8 in the joint portion 12. Specifically, the fixing member 34 forms the upper end of the outer circumferential surface of the second arm portion 8 in the joint portion 12. In this embodiment, the fixing member 34 is an annular support side member that forms part of the outer circumferential portion of the second arm portion 8 in the joint portion 12.

[0045] The fixed member 38 is formed in a cylindrical shape with a flange having a flange portion 38b. The fixed member 38 is fixed to the underside of the hand base portion 37. The pulley 39 is fixed to the lower end of the fixed member 38. The upper end of the pulley 39 and the lower end of the fixed member 38 are inserted into the inner periphery of the fixed member 34. The lower end of the pulley 39 is disposed inside the distal end of the arm main body 29. A belt (not shown) is stretched between the pulley 39 and the pulley 27. The hollow shaft portion 29c is disposed on the inner periphery of the pulley 39. The fixed member 38 and the pulley 39 are rotatably supported by the hollow shaft portion 29c via a bearing 47. Therefore, the fixed member 38 and the pulley 39 are rotatable relative to the arm main body 29. In other words, the hand 3 is rotatable relative to the second arm portion 8.

[0046] The flange 38b of the fixing member 38 is formed in an annular shape that extends radially outward from the joint portion 12. The flange 38b is formed on a lower portion of the fixing member 38. The fixing member 38 constitutes part of the outer circumferential surface of the hand 3 at the joint portion 12. Specifically, the fixing member 38 constitutes the lower end portion of the outer circumferential surface of the hand 3 at the joint portion 12. A recess 38c is formed on the lower surface of the flange 38b, in which the upper end portion of the fixing member 34 is disposed. The recess 38c is formed in an annular shape that is recessed upward. The lower surface of the flange 38b is disposed below the upper end of the fixing member 34. The fixing member 38 in this embodiment is a supported member that constitutes part of the outer circumferential portion of the hand 3 at the joint portion 12.

[0047] The outer portion of the recess 38c in the radial direction of the joint portion 12 is a cylindrical covering portion 38a that covers the entire circumference of the upper end portion of the fixing member 34 from the radial outside of the joint portion 12. That is, the fixing member 38 is formed with a cylindrical covering portion 38a that covers the entire circumference of the upper end portion of the fixing member 34 from the radial outside of the joint portion 12, and the fixing member 38 is provided with a cylindrical covering portion 38a that covers the entire circumference of the upper part of the fixing member 34 from the radial outside of the joint portion 12. As described above, the lower surface of the flange portion 38b is located lower than the upper end of the fixing member 34, and the lower end of the cylindrical covering portion 38a is located lower than the upper end of the fixing member 34.

[0048] (Hand Composition) FIG. 8 is a cross-sectional view taken along the line JJ in FIG.

[0049] In addition to the wafer mounting portion 36, hand base 37, and fixed member 38, the hand 3 is equipped with two edge surface contact members 48 having contact surfaces against which the edge surfaces of the wafer 2 come into contact, two wafer mounting members 49 on which the wafer 2 is placed, a pressing member 50 that presses the wafer 2 against the contact surfaces of the edge surface contact members 48, and a movement mechanism 51 that moves the pressing member 50. The hand base 37 is equipped with a hand base main body 53 and a cover 54 fixed to the upper surface of the hand base main body 53.

[0050] The end surface abutment members 48 are arranged at two locations on the tip of the generally Y-shaped wafer mounting portion 36. That is, the end surface abutment members 48 are arranged on the tip side of the hand 3. The wafer mounting members 49 are arranged on the base end side of the wafer mounting portion 36. The wafer 2 is mounted on the two end surface abutment members 48 and the two wafer mounting members 49.

[0051] The pressing member 50 includes two rollers 56 that contact the edge surface of the wafer 2, a roller holding member 57 that rotatably holds the two rollers 56, and a base material 58 to which the roller holding member 57 is fixed. The rollers 56 are attached at two locations on the tip of the roller holding member 57, which is generally Y-shaped. The base material 58 is formed in the shape of a long, narrow rectangular plate with its thickness extending vertically. The base material 58 constitutes the base end portion of the pressing member 50. The roller holding member 57 is fixed to the tip, which is one end of the base material 58 in the longitudinal direction.

[0052] The movement mechanism 51 is disposed inside the hand base 37. That is, the movement mechanism 51 is disposed inside the base end side of the hand 3. Specifically, a recess that is recessed downward from the upper surface of the hand base main body 53 is formed in the hand base main body 53, and the movement mechanism 51 is disposed in this recess. The movement mechanism 51 includes an air cylinder 60 as a drive source, a slide shaft 61 that slides horizontally with the power of the air cylinder 60, and a shaft holding member 62 that slidably holds the slide shaft 61.

[0053] The air cylinder 60 is fixed to the hand base main body 53. The slide shaft 61 is formed in a long, thin cylindrical shape. A base end of the slide shaft 61, which is one end of the slide shaft 61 in the axial direction of the slide shaft 61, is attached to the rod of the air cylinder 60. A base end of the base material 58 is fixed to a tip end of the slide shaft 61, which is the other end of the slide shaft 61 in the axial direction of the slide shaft 61. In other words, a base end of the pressing member 50 is fixed to the tip end of the slide shaft 61. In addition, the base end of the pressing member 50 is connected to the movement mechanism 51.

[0054] A flange 61a that extends radially outward from the slide shaft 61 is formed on the tip end side of the slide shaft 61. In this embodiment, the tip end of the slide shaft 61 forms the flange 61a. The flange 61a is formed in an annular shape. When viewed from the axial direction of the slide shaft 61, the outer shape of the flange 61a is larger than the outer shape of the base material 58.

[0055] The shaft holding member 62 is formed in the shape of a rectangular parallelepiped block. The shaft holding member 62 is fixed to the hand base body 53. A through hole 62a is formed in the shaft holding member 62, through which the slide shaft 61 is inserted. The slide shaft 61 is capable of sliding linearly relative to the shaft holding member 62. The air cylinder 60 moves the slide shaft 61 and the pressing member 50 between a wafer holding position (see FIGS. 1 and 3) where the two rollers 56 contact the edge surface of the wafer 2, and a retracted position where the two rollers 56 are retracted so as to move away from the edge surface of the wafer 2.

[0056] A cover 54 fixed to the upper surface of the hand base body 53 covers the moving mechanism 51 from above. The cover 54 also covers the base end portion of the pressing member 50 from above. Specifically, the cover 54 covers most of the base material 58 from above when the pressing member 50 is positioned at the retracted position, and covers the base end portion of the base material 58 from above when the pressing member 50 is positioned at the wafer holding position. Even when the pressing member 50 is positioned at the wafer holding position, the tip of the slide shaft 61 is positioned below the cover 54, and the flange portion 61a is covered from above by the cover 54.

[0057] (Main effect of this form) As described above, in this embodiment, the main body 5 includes the annular fixing member 17 that forms part of the outer circumferential portion of the main body 5 at the joint 10, and the first arm 7 disposed above the main body 5 includes the arm main body 21 that forms the outer circumferential portion of the first arm 7 at the joint 10. In addition, in this embodiment, the arm main body 21 includes a cylindrical covering portion 21a that covers the entire periphery of the upper portion of the fixing member 17 from the radial outside of the joint 10, and the lower end of the cylindrical covering portion 21a is disposed below the upper end of the fixing member 17. Therefore, in this embodiment, unless liquid that has passed below the cylindrical covering portion 21a at the joint 10 passes above the fixing member 17, the liquid will not penetrate from the joint 10 into the main body 5. Therefore, in this embodiment, it is possible to prevent liquid that has dropped from the wafer 2 from penetrating from the joint 10 into the main body 5.

[0058] In this embodiment, the first arm portion 7 includes an annular bearing holder member 26 that forms part of the outer circumferential portion of the first arm portion 7 at the joint portion 11, and the second arm portion 8, which is disposed above the first arm portion 7, includes an arm portion main body 29 that forms the outer circumferential portion of the second arm portion 8 at the joint portion 11. In addition, in this embodiment, the arm portion main body 29 includes a cylindrical covering portion 29a that covers the entire upper periphery of the bearing holder member 26 from the radial outside of the joint portion 11, and the lower end of the cylindrical covering portion 29a is disposed below the upper end of the bearing holder member 26. Therefore, in this embodiment, unless liquid that has passed below the cylindrical covering portion 29a at the joint portion 11 passes above the bearing holder member 26, the liquid will not infiltrate from the joint portion 11 into the interior of the first arm portion 7. Therefore, in this embodiment, it is possible to prevent liquid that has fallen from the wafer 2 from infiltrating from the joint portion 11 into the interior of the first arm portion 7.

[0059] In this embodiment, the second arm unit 8 includes an annular fixing member 34 that forms part of the outer circumferential portion of the second arm unit 8 at the joint unit 12, and the hand 3 disposed above the second arm unit 8 includes a fixing member 38 that forms part of the outer circumferential portion of the hand 3 at the joint unit 12. In addition, in this embodiment, the fixing member 38 includes a cylindrical covering portion 38a that covers the entire periphery of the upper portion of the fixing member 34 from the radial outside of the joint unit 12, and the lower end of the cylindrical covering portion 38a is disposed below the upper end of the fixing member 34. Therefore, in this embodiment, if liquid that has passed below the cylindrical covering portion 38a at the joint unit 12 does not pass above the fixing member 38, the liquid will not penetrate from the joint unit 12 into the interior of the second arm unit 8. Therefore, in this embodiment, it is possible to prevent liquid that has dropped from the wafer 2 from penetrating from the joint unit 12 into the interior of the second arm unit 8.

[0060] In this embodiment, the base end side portion of the pressing member 50, the base end of which is connected to the moving mechanism 51, is covered from above by a cover 54 that covers the moving mechanism 51 arranged inside the hand base 37 from above. Specifically, at least the base end side portion of the base material 58 is covered from above by the cover 54. Therefore, in this embodiment, for example, liquid that has dropped from the wafer 2 is less likely to adhere to at least the base end side portion of the base material 58. Therefore, in this embodiment, for example, the cover 54 can prevent liquid that has dropped from the wafer 2 from penetrating into the inside of the hand base 37.

[0061] In this embodiment, the slide shaft 61, to the tip of which the base end of the pressing member 50 is fixed, is slidably held by a shaft holding member 62 having a through hole 62a formed therein through which the slide shaft 61 is inserted, and a flange 61a that extends radially outward from the slide shaft 61 is formed on the tip side of the slide shaft 61. Therefore, in this embodiment, for example, the flange 61a can prevent liquid that has dropped from the wafer 2 from passing through the through hole 62a of the shaft holding member 62 and entering the inside of the hand base 37.

[0062] (Other embodiments) The above-described embodiment is one example of a preferred embodiment of the present invention, but the present invention is not limited to this embodiment and various modifications can be made without departing from the spirit of the present invention.

[0063] In the above-described embodiment, the flange 61a formed on the tip side of the slide shaft 61 does not have to be the tip of the slide shaft 61. That is, the flange 61a only needs to be formed between the base end of the base material 58 and the shaft holding member 62 in the axial direction of the slide shaft 61. Also, in the above-described embodiment, the arm 4 may be composed of three or more arm portions rotatably connected to each other. Furthermore, in the above-described embodiment, the number of hands 3 and arms 4 possessed by the robot 1 may be one. Also, in the above-described embodiment, the robot 1 may transport objects other than the wafer 2. Also, in the above-described embodiment, the robot 1 is a robot for transporting objects, but the robot to which the present invention is applied may be a robot used for other purposes. [Explanation of symbols]

[0064] 1. Robot (horizontal articulated robot) 2. Wafers (semiconductor wafers, transported objects) 3 Hand (supported part) 4 Arm 5 Main body (support part) 7 First arm portion (supporting portion, supported portion, base end arm portion) 8 Second arm portion (supporting portion, supported portion, tip arm portion) 10~12 Joints 17 Fixed member (supporting member) 21 Arm body (supported member) 21a Cylindrical covering part 26 Bearing retainer member (support side member) 29 Arm body (supported member) 29a Cylindrical covering 34 Fixed member (supporting member) 38 Fixed member (supported member) 38a Cylindrical covering 48 End face abutment member 50 Pressing member 51 Moving mechanism 54 Cover 61 Slide shaft 61a Tsuba 62 Shaft holding member 62a through hole

Claims

1. In a horizontal articulated robot whose arm moves horizontally, a support portion and a supported portion disposed above the support portion and rotatably connected to the support portion, the support portion includes an annular support side member that forms at least a part of an outer peripheral portion of the support portion at a joint portion that is a connecting portion between the support portion and the supported portion, the supported portion includes a supported-side member that forms at least a part of an outer peripheral portion of the supported portion at the joint portion, the supported member includes a cylindrical covering portion that covers at least an upper portion of the supporting member from the radial outside of the joint portion over the entire circumference, a lower end of the cylindrical covering portion is disposed below an upper end of the support member, a first gap, which is a gap formed between the cylindrical cover portion and the support-side member, at an outer end in a radial direction of the joint portion, which is an open opening; A horizontal articulated robot characterized in that the entire first gap is formed above the lower end of the opening, and when a space connected to the upper end of the first gap is formed inside the joint portion, the entire space is formed above the opening.

2. a hand as the supported part on which the transport object is placed, 2. The horizontal articulated robot according to claim 1, wherein the arm includes a distal arm portion as the support portion to which the hand is rotatably connected at a distal end thereof.

3. A hand is provided on which an object to be conveyed is placed, 2. The horizontal articulated robot according to claim 1, wherein the arm comprises a tip-side arm portion as the supported portion to which the hand is rotatably connected at its tip end, and a base-side arm portion as the supporting portion to which the base end side of the tip-side arm portion is rotatably connected at its tip end.

4. a main body portion as the support portion to which a base end side of the arm is rotatably connected, 2. The horizontal articulated robot according to claim 1, wherein the arm includes a base-end arm portion as the supported portion, the base end of which is rotatably connected to the main body portion.

5. a hand on which an object to be conveyed is placed and which is rotatably connected to the tip end of the arm; the hand includes an end surface abutting member that is disposed on the tip side of the hand and has an abutting surface with which an end surface of the transported object abuts, a pressing member that presses the transported object toward the abutting surface, a moving mechanism that is disposed inside the base end side of the hand and moves the pressing member, and a cover that covers the moving mechanism from above, a base end of the pressing member is connected to the moving mechanism, 2. The horizontal articulated robot according to claim 1, wherein the cover covers the base end portion of the pressing member from above.

6. a hand on which an object to be conveyed is placed and which is rotatably connected to the tip end of the arm; the hand includes an end surface abutting member that is disposed on the tip side of the hand and has an abutting surface with which an end surface of the transported object abuts, a pressing member that presses the transported object toward the abutting surface, a moving mechanism that is disposed inside the base end side of the hand and moves the pressing member, and a cover that covers the moving mechanism from above, the moving mechanism includes a slide shaft to the tip of which the base end of the pressing member is fixed, and a shaft holding member that slidably holds the slide shaft, The shaft holding member has a through hole through which the slide shaft is inserted, The slide shaft is slidable linearly relative to the shaft holding member, 2. The horizontal articulated robot according to claim 1, wherein a flange portion extending radially outward from the tip end of the slide shaft is formed.

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