Apparatus with asymmetric dual end effector robotic arm and related methods

Abstract

To provide a robot having an asymmetric dual end effector robot arm.SOLUTION: In a substrate processing system, a robot 10 comprises: a first arm that includes an unequal-link link mechanism 20 having an upper arm 31 and a lower arm 32, and a first end effector 22; a second arm that includes an equal-link link mechanism 24 having an upper arm 33 and a lower arm 34, and a second end effector 26; and a driving unit 16 that moves the first arm and the second arm. The first end effector is asymmetric to the second end effector. The first end effector is angled relative to the second end effector such that a support part of a first substrate 14a on the first end effector is not positioned over or under a support part of a second substrate 14b on the second end effector. A device further comprises a controller configured to control the cooperative operation of the first arm with the second arm.SELECTED DRAWING: Figure 1A

Description

[Technical Field]

[0001] The exemplary, non-limiting embodiments disclosed herein relate generally to robotic arms, and more particularly to robots having two or more arms in which the end effectors on the arms are offset relative to one another.

[0002] Processes for the manufacture of semiconductor, LED, solar, MEMS, or other devices utilize robotics and other forms of automation to transport substrates and carriers associated with substrates to and from storage, processing, or other locations. Such substrate transport may involve moving individual substrates or groups of substrates with a single arm carrying one or more substrates, or with multiple arms, each carrying one or more substrates. For example, much of the manufacturing associated with semiconductor manufacturing occurs in vacuum environments where footprint and volume are at a premium. Furthermore, much of the automated transport occurs to achieve maximum efficiency of substrate movement within workspace volume. Therefore, there is a desire to provide substrate transport automation that utilizes minimal footprint and workspace volume for a given range of transport applications with maximized transfer efficiency. Abstract

[0003] The following summary is intended to be exemplary only and is not intended to limit the scope of the claims.

[0004] According to one aspect, an exemplary apparatus includes a first arm including an unequal-link linkage having a first end effector, a second arm including an equal-link linkage having a second end effector, and a drive unit connected to the first arm and the second arm and configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support on the first end effector is not above or below a second substrate support on the second end effector.

[0005] According to another aspect, an exemplary substrate transport apparatus for transporting at least two substrates includes a lower arm including two links and a lower end effector of unequal lengths, an upper arm including two links and an upper end effector of equal lengths, and a drive unit connected to the lower arm and the upper arm, the drive unit configured to rotate and extend the lower arm and the upper arm, wherein the lower end effector is asymmetric and angled relative to the upper end effector such that a distal end of the lower end effector is not located below a distal end of the upper end effector and such that the distal end of the lower end effector does not move below the distal end of the upper end effector when the lower arm or the upper arm is moved.

[0006] According to another aspect, an exemplary method for transporting a first substrate and a second substrate includes rotating a first arm including a first linkage having a first end effector about a shaft of a drive unit and extending the first linkage relative to a second arm including a second linkage having a second end effector. The first end effector is configured to transport the first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to transport a second substrate. In a rest position, the first substrate is not positioned above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate.

[0007] According to another aspect, an exemplary method of assembling a substrate transport apparatus includes connecting an upper link of a first linkage arm to a rotatable shaft of a drive unit, connecting a lower link of the first linkage arm to the upper link of the first linkage arm at a first elbow joint, connecting a first end effector to the lower link of the first linkage arm at a first wrist joint, connecting an upper link of a second linkage arm to the rotatable shaft of the drive unit, connecting a lower link of the second linkage arm to the upper link of the second linkage arm at a second elbow joint, and connecting a second end effector to the lower link of the second linkage arm at a second wrist joint, wherein at least the upper link of the first linkage arm and the lower link of the first linkage arm are of unequal lengths. The first end effector is angled relative to the second end effector such that a first substrate support at a distal end of the first end effector is not above or below a second substrate support at a distal end of the second end effector.

[0008] According to another aspect, an exemplary apparatus includes at least one processor and at least one non-transitory memory containing computer program code. The at least one memory and the computer program code are configured to, by the at least one processor, cause the apparatus to at least: rotate a first arm comprising a first linkage having a first end effector about a shaft of a drive unit; and extend the first linkage relative to a second arm comprising a second linkage having a second end effector. The first end effector is configured to carry a first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to carry a second substrate. In a rest position, the first substrate is not positioned above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate. [Brief explanation of the drawings]

[0009] The foregoing aspects and other features are explained in the following description taken in conjunction with the accompanying drawings.

[0010] [Figure 1A] FIG. 1 is a perspective view of a robot for moving substrates, the robot having equal-linkage linkage arms and unequal-linkage linkage arms, where the end effectors on the arms are arranged in a stacked configuration.

[0011] [Figure 1B] FIG. 1B is a side view of the robot of FIG. 1A.

[0012] [Figure 1C] 1 illustrates an example of substrate movement in a substrate processing system including features as described herein. [Figure 1D] 1 illustrates an example of substrate movement in a substrate processing system including features as described herein.

[0013] [Figure 2A] FIG. 1C is a perspective view of the robotic substrate transport apparatus of FIGS. 1A and 1B showing the stacked end effectors in a rest position.

[0014] [Figure 2B] 2B is a perspective view of the substrate transport apparatus of the robot of FIG. 2A showing one end effector moving relative to the other end effector. FIG. [Figure 2C] 2B is a perspective view of the substrate transport apparatus of the robot of FIG. 2A showing one end effector moving relative to the other end effector. FIG.

[0015] [Figure 3] FIG. 1 is a perspective view of a substrate transport apparatus without stacked end effectors.

[0016] [Figure 4] FIG. 4 is a top view of the substrate transport apparatus of FIG.

[0017] [Figure 5A] 4 is a perspective view of the substrate transport apparatus of FIG. 3 in a rest position.

[0018] [Figure 5B] 5B is a perspective view of the device of FIG. 5A showing extension of the linkage of the unequal links of the device. FIG. [Figure 5C] 5B is a perspective view of the device of FIG. 5A showing extension of the linkage of the unequal links of the device. FIG.

[0019] [Figure 6A] 4 is a perspective view of the substrate transport apparatus of FIG. 3 in a rest position.

[0020] [Figure 6B] 6B is a perspective view of the device of FIG. 6A showing extension of the linkage of the equal link of the device. FIG. [Figure 6C] 6B is a perspective view of the device of FIG. 6A showing extension of the linkage of the equal link of the device. FIG.

[0021] [Figure 7] 1 is a schematic diagram of a conveying device having asymmetric dual arms and using non-circular pulleys in a retracted position.

[0022] [Figure 8A] 10 is a schematic illustration of the extension of a non-angled end effector of a transport device from a retracted position to an extended position. FIG. [Figure 8B] 10 is a schematic illustration of the extension of a non-angled end effector of a transport device from a retracted position to an extended position. FIG. [Figure 8C] 10 is a schematic illustration of the extension of a non-angled end effector of a transport device from a retracted position to an extended position. FIG.

[0023] [Figure 9A] 8A-8C from a retracted position to an extended position. FIG. [Figure 9B] 8A-8C from a retracted position to an extended position. FIG. [Figure 9C] 8A-8C from a retracted position to an extended position. FIG. Detailed Description of the Embodiments

[0024] 1A and 1B, an apparatus for substrate transfer may include a robot, generally designated by reference numeral 10. The robot 10 includes a substrate transport apparatus 12 (hereinafter, "transport apparatus 12") configured to transport substrates 14a, 14b, for example, between a substrate processing chamber and a load lock. The robot 10 also includes a drive unit 16 (which may include, for example, one or more motors or any other suitable drive means) configured to drive the arm and multiple effectors of the transport apparatus 12, thereby transporting the substrates. By way of example, a robot with multiple end effectors is described in U.S. Patent Application No. 15 / 897,374, filed February 15, 2018, entitled "Material-Handling Robot With Multiple End-Effectors," which is incorporated herein by reference in its entirety.

[0025] The transport device 12 includes multiple arms, each of which is extendable and rotatable via a drive unit 16. In an exemplary embodiment, the multiple arms include at least one unequal-link linkage 20 that can be driven by a non-circular pulley. The unequal-link linkage 20 includes an upper arm 31 and a lower arm 32, with the upper arm 31 connected to the drive unit 16 at the shoulder and the lower arm 32 connected to the upper arm 31 at the elbow. A first end effector 22 is connected to the lower arm 32 at a wrist. The first end effector 22 includes legs and substrate supports at the distal ends of the legs for supporting the lower substrate 14a. The multiple arms also include at least one equal-link linkage 24, with the upper arm 33 and a lower arm 34, with the upper arm 33 connected to the drive unit at the shoulder and the lower arm 34 connected to the upper arm 33 at the elbow. A second end effector 26 is connected to the lower arm 34 at a wrist. The second end effector 26 has legs and substrate supports at the distal ends of the legs for supporting the upper substrate 14b.

[0026] The first end effector 22 and the second end effector 26 are asymmetric. As shown, the legs of the first end effector 22 are bent, otherwise angled, or curved, while the legs of the second end effector 26 are straight. However, in some exemplary embodiments, both the legs of the first end effector 22 and the legs of the second end effector 26 may be bent. The legs of each end effector 22, 26 connect a substrate support to the end effector's wrist joint via a corresponding linkage 20, 24. Here, the legs have a first portion connected to the wrist joint and a second portion connected to the substrate support. In the first end effector 22 with bent legs, the first and second portions are connected to each other at an angle of approximately 90 degrees to approximately 120 degrees. By way of example, a robot having an arm with bent or otherwise angled end effector legs is described in U.S. Pat. No. 9,149,936, issued October 6, 2015, entitled "Robot Having Arm With Unequal Link Lengths," which is incorporated herein by reference in its entirety.

[0027] 1B, the unequal link linkage 20 is positioned at a distance D or greater from the floor 28. The configuration of the transport apparatus 12 provides a maximum radial reach from a given storage diameter. By way of example, a robot having arms with unequal link lengths is described in U.S. Pat. No. 9,149,936, issued October 6, 2015, entitled "Robot Having Arm With Unequal Link Lengths," which is incorporated herein by reference in its entirety.

[0028] 1C and 1D , an exemplary substrate processing system or semiconductor wafer processing system is generally designated 1000 and will hereinafter be referred to as “system 1000.” System 1000 may include, for example, one or more radial stations 1012 and one or more offset stations 1014. A robot 10 may be provided to move one or more substrates S between stations 1012, 1014 or between other modules / stations (not shown) connected to an environmental chamber 1013. The environmental chamber 1013 may provide, for example, a vacuum environment through a bottom wall of which the robot 10 extends at least partially within the environment defined by the chamber 1013. The robot 10 and stations 1012, 1014 are connected to at least one controller 1015 comprising at least one processor 1017 and at least one memory 1019 containing software 1021 for controlling the operation of the system 1000. System 1000 may provide, for example, the following wafer handling operations: (a) picking / placing 1016 a single wafer or substrate S from / to a single radial station 1012, as shown in Figure 1C, and (b) simultaneously picking / placing 1018 a pair of wafers or substrates S from / to a pair of stacked radial stations 1012, as shown in Figure 1D. Other operations involving the offset station 1014 are also possible.

[0029] 2A-2C, the initial position of the transport apparatus 12 is a configuration in which a portion of the second end effector 26 is positioned above a portion of the first end effector 22 (FIG. 2A), such that the upper substrate 14b is positioned above the lower substrate 14a in a stacked configuration. When the first end effector 22 supporting the lower substrate 14a extends (FIG. 2B), the wrist 30 on the unequal-link linkage 20 (lower arm) passes the shoulder 40 on the equal-link linkage 24 (upper arm). A similar movement occurs during retraction of the same end effector. When the first end effector 22 supporting the lower substrate 14a is fully extended (FIG. 2C), without movement of the equal-link linkage 24, the length of movement of the equal-link linkage 24 allows for retraction and maximum travel of the wrist.

[0030] 3, a substrate transport apparatus for substrate processing having at least one end effector that is angled or curved such that substrate supports on the end effectors are offset from or oblique to one another in a rest position is shown generally at 112, hereinafter referred to as "transport apparatus 112." In an exemplary embodiment, the transport apparatus 112 comprises a lower arm comprising an unequal linkage 120 and a first end effector 122, and an upper arm comprising an equal linkage 124 and a second end effector 126. The arms are extendable and rotatable, for example, by a drive unit 116 (one or more motors). The first end effector 122 is asymmetrical relative to the second end effector 126, but the first end effector 122 may also be angled, bent, or curved relative to the second end effector 126 such that the substrate supports are offset from one another or angled (not stacked) relative to one another in a rest position. As described above, the legs of each end effector 122, 126 connect the substrate supports to a wrist joint. Here, the legs have a first portion connected to the wrist joint and a second portion connected to the substrate supports. When the end effectors are angled or curved, the first and second portions of the legs are connected to one another at an angle of about 90 degrees to about 120 degrees. As shown herein, the first end effector 122 is angled relative to the second end effector 126 such that, while in an initial rest position, the upper substrate 114b, supported on the substrate supports of the upper arm's equal-link linkages 124, does not rest on the lower substrate 114a, supported on the substrate supports of the unequal-link linkages 120. Additionally, the upper substrate 114b does not move over the lower substrate 114a during movement of either or both of the lower arm defined by the unequal-link linkages 120 and the upper arm defined by the equal-link linkages 124. The transport apparatus 112 or robot-embedded transport apparatus 112, similar to the robot 10, can be connected to at least one controller comprising at least one processor and at least one memory containing software for controlling the operation of the system.

[0031] Referring to FIG. 4 , the linkages rotate about the shaft of the drive unit 116 to move the wafer (substrate 114b) on the second end effector 126 away from the wafer (substrate 114a) on the first end effector 122. A portion of the equal-link linkages 124 is articulated to move the elbows of the equal-link linkages 124 away from the wrists of the unequal-link linkages 120. The linkages of the unequal-link linkages 120 may be stretched or otherwise moved by one or more pulleys 121 disposed at the joints of the unequal-link linkages 120, such as the connections of the wrists, elbows, and / or shoulders of the unequal-link linkages 120 to the drive unit 116, where the pulleys may be circular or non-circular. In some exemplary embodiments, the linkages of the equal-link linkages 124 may be moved by pulleys 25, which may be circular or non-circular.

[0032] Referring to FIG. 5A, in the rest position, the asymmetrical end effector 122, 126 configuration with offset or angled substrate supports prevents the wafer (substrate 114b) being carried on the second end effector 126 from being above the wafer (substrate 114a) on the first end effector 122.

[0033] Referring to FIG. 5B, when the unequal linkage 120 is rotated by the drive unit 116, the unequal linkage 120 is extended and the first end effector 122 moves away from the second end effector 126.

[0034] Referring to FIG. 5C, as the unequal linkage 120 is further extended, the first end effector 122 moves further away from the second end effector 126.

[0035] Referring to FIG. 6A, in the rest position, the asymmetric end effector configuration with offset or angled substrate supports ensures that the wafer (substrate 114b) being carried on the second end effector 126 is not above the wafer (substrate 114a) on the first end effector 122 (see also FIG. 5A).

[0036] Referring to FIG. 6B, when the equal-link linkage 124 is rotated by the drive unit 116, the equal-link linkage 124 is extended and the second end effector 126 moves away from the first end effector 122.

[0037] Referring to FIG. 6C, as the equal-link linkage 124 is further extended, the second end effector 126 moves farther away from the first end effector 122.

[0038] 7, the unequal linkage 120 and the equal linkage 124 may be actuated by circular or non-circular pulleys, and the end effectors 122, 126 are rotated from a radial orientation to provide additional spacing between each end effector 122, 126 and at least between the elbows of each linkage 120, 124.

[0039] 8A to 8C, in the initial stage of extension of the equal-link linkage 124 (retracted position, FIG. 8A), the substrate 114b is not positioned above the substrate 114a.

[0040] 8B, in the link-on-link position, the orientation of the end effectors 122, 126 changes as the end effector 126 moves along line 127. More specifically, when the wrist of the equal-link linkage 124 is positioned directly over the point where the equal-link linkage 124 connects to the drive unit 116 (shoulder), the orientation of the end effectors 122, 126 changes as the center of the substrate 114b moves along line 127.

[0041] At the end stage, when the end effector 126 (and therefore the substrate 114b) is in the extended position, as shown in FIG. 8C, the orientation of the end effectors 122, 126 remains constant and the center of the substrate 114b continues to move along a line 127.

[0042] 9A-9C, in the initial stage of extension of unequal-link linkage 120 (FIG. 9A, retracted position), substrate 114b is again not positioned above substrate 114a. In the link-over-link position, as shown in FIG. 9B, the orientation of end effectors 122, 126 changes as the center of substrate 114a moves along a straight line. In the final stage, with substrate 114a in the extended position, as shown in FIG. 9C, the orientation of end effectors 122, 126 remains constant, and the center of substrate 114a continues to move along a straight line.

[0043] In any embodiment, the upper arms (e.g., upper arms 31 and 33) of the robotic arms described herein may be directly attached to a first shaft of the drive unit. The lower arms (e.g., lower arms 32 and 34) may be connected to corresponding upper arms via rotating elbow joints and driven by a second shaft of the drive unit, positioned coaxially with the first shaft, using a belt mechanism. This belt mechanism may include a shoulder pulley, which may be attached to a third shaft of the drive unit, an elbow pulley, which may be attached to the upper arm, and a band, belt, or cable (or any other suitable means) that may transmit motion between the two pulleys. The belt mechanism may feature a fixed or variable transmission ratio. As an example, a variable transmission ratio may be selected so that the orientation of the upper arm with the end effector changes in a predetermined manner depending on the relative positions of the upper arm and the drive shaft of the drive unit. However, any other suitable mechanism may be used.

[0044] In an exemplary embodiment, an apparatus includes a first arm including an unequal-link linkage having a first end effector, a second arm including an equal-link linkage having a second end effector, and a drive unit connected to the first arm and the second arm and configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support on the first end effector is not above or below a second substrate support on the second end effector.

[0045] When moving the first arm or the second arm, one of the first substrate support on the first end effector or the second substrate support on the second end effector may not move above or below the other of the first substrate support on the first end effector or the second substrate support on the second end effector. One or both of the equal-link linkage and the unequal-link linkage may be moved by at least one non-circular pulley. The first arm and the second arm may be configured such that, upon extension of the first arm, the first end effector moves away from the second end effector. The first arm and the second arm may be configured such that, upon extension of the second arm, the second end effector moves away from the first end effector. In a link-on-link position of the equal-link linkage, the orientation of the first end effector and the second end effector can change as the second end effector moves along a straight line. When the second end effector is in an extended position, the orientation of the first end effector and the second end effector can be constant, and the second end effector can continue to move along the straight line. In a link-on-link position of the unequal-link linkage, the orientation of the first end effector and the second end effector can change as the first end effector moves along a straight line. When the first end effector is in an extended position, the orientation of the first end effector and the second end effector can be constant, and the first end effector can continue to move along the straight line.

[0046] In another exemplary embodiment, a substrate transport apparatus for transporting at least two substrates comprises: a lower arm having two links and a lower end effector of unequal lengths, an upper arm having two links and an upper end effector of equal lengths, and a drive unit connected to the lower arm and the upper arm, the drive unit configured to rotate and extend the lower arm and the upper arm, wherein the lower end effector is asymmetric and angled relative to the upper end effector such that a distal end of the lower end effector is not located below a distal end of the upper end effector and such that the distal end of the lower end effector does not move below the distal end of the upper end effector when the lower arm or the upper arm is moved.

[0047] The substrate transport apparatus may further include pulleys disposed at joints of the links of the lower arm and the upper arm, the pulleys of each arm being operatively connected to the drive unit and other pulleys of the same arm such that operation of the drive unit results in movement of the lower arm and / or the upper arm. At least one of the pulleys may be a non-circular pulley. The lower arm and the upper arm may each be configured such that, upon extension of the lower arm, the lower end effector moves away from the upper end effector, and, upon extension of the upper arm, the upper end effector moves away from the lower end effector. When a link is located on the link of the upper arm, the orientation of the upper end effector and the lower end effector may change as the lower end effector moves along a straight line, and when a link is located on the link of the lower arm, the orientation of the lower end effector and the upper end effector may change as the upper end effector moves along a straight line.

[0048] In another exemplary embodiment, a method for transporting a first substrate and a second substrate includes rotating a first arm including a first linkage having a first end effector about a shaft of a drive unit and extending the first linkage relative to a second arm including a second linkage having a second end effector. The first end effector is configured to support and transport the first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to support and transport a second substrate. In a rest position, the first substrate is not positioned above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate.

[0049] The first linkage may be extended using at least one non-circular pulley. The first arm and the second arm may be configured such that the first end effector moves away from the second end effector when the first linkage is extended. In a link-on-link position of the first linkage, the orientation of the first end effector and the second end effector may change as the first end effector moves along a straight line. When the first end effector is moving to an extended position, the orientation of the first end effector and the second end effector may be constant, and the first end effector may continue to move along the straight line.

[0050] In another exemplary embodiment, a method of assembling a substrate transport apparatus includes connecting an upper link of a first linkage arm to a rotatable shaft of a drive unit, connecting a lower link of the first linkage arm to the upper link of the first linkage arm at a first elbow joint, connecting a first end effector to the lower link of the first linkage arm at a first wrist joint, connecting an upper link of a second linkage arm to the rotatable shaft of the drive unit, connecting a lower link of the second linkage arm to the upper link of the second linkage arm at a second elbow joint, and connecting a second end effector to the lower link of the second linkage arm at a second wrist joint, wherein at least the upper link of the first linkage arm and the lower link of the first linkage arm are of unequal lengths. The first end effector is angled relative to the second end effector such that a first substrate support at a distal end of the first end effector is not above or below a second substrate support at a distal end of the second end effector.

[0051] In another exemplary embodiment, an apparatus includes at least one processor and at least one non-transitory memory containing computer program code. The at least one memory and the computer program code are configured to cause the at least one processor to perform the following actions: rotate a first arm including a first linkage having a first end effector about a shaft of a drive unit; and extend the first linkage relative to a second arm including a second linkage having a second end effector. The first end effector is configured to support and transport a first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to support and transport a second substrate. In a rest position, the first substrate is not positioned above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate.

[0052] It should be understood that the foregoing description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, features recited in the various dependent claims may be combined with each other in any suitable combination(s). In addition, features from different embodiments described above may be selectively combined into new embodiments. Accordingly, the foregoing description is intended to embrace all such alternatives, modifications, and variations.

[0053] This paragraph describes the invention described in the claims originally attached to the application for the original application of this application (Patent Application No. 2021-554561). [1] a first arm including an unequal link mechanism having a first end effector; a second arm including an equal-link linkage having a second end effector; a drive unit connected to the first arm and the second arm, the drive unit configured to move the first arm and the second arm; An apparatus comprising: the first end effector is asymmetric with respect to the second end effector; the first end effector is angled relative to the second end effector such that a first substrate support on the first end effector is not above or below a second substrate support on the second end effector; Device. [2] [1] The apparatus of [1], wherein when the first arm or the second arm is moved, one of the first substrate support on the first end effector or the second substrate support on the second end effector does not move above or below the other of the first substrate support on the first end effector or the second substrate support on the second end effector. [3] [1] The apparatus according to [1], wherein one or both of the equal-link linkages and the unequal-link linkages are driven by at least one non-circular pulley. [4] [1] The device described in [1], wherein the first arm and the second arm are configured such that, upon extension of the first arm, the first end effector moves away from the second end effector. [5] [1] The device described in [1], wherein the first arm and the second arm are configured such that, upon extension of the second arm, the second end effector moves away from the first end effector. [6] [1] The apparatus described in [1], wherein at a link-on-link position of the equal-link linkage, the orientation of the first end effector and the second end effector changes as the second end effector moves along a straight line. [7] [6] The apparatus described in [6], wherein when the second end effector is in the extended position, the orientation of the first end effector and the second end effector is constant and the second end effector continues to move along the straight line. [8] [1] The apparatus described in [1], wherein at a link-on-link position of the unequal link linkage, the orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line. [9] [8] The apparatus described in [8], wherein when the first end effector is in an extended position, the orientation of the first end effector and the second end effector is constant and the first end effector continues to move along the straight line.

[10] 1. A substrate transport apparatus for transporting at least two substrates, comprising: a lower arm having two links of unequal length and a lower end effector; an upper arm having two links of equal length and an upper end effector; a drive unit connected to the lower arm and the upper arm, the drive unit configured to rotate and extend the lower arm and the upper arm; Equipped with the lower end effector is asymmetrical and angled relative to the upper end effector so that the distal end of the lower end effector does not lie below the distal end of the upper end effector and does not move below the distal end of the upper end effector when the lower arm or the upper arm is moved; Substrate transport device.

[11]

[10] A substrate transport device as described in

[10] , further comprising pulleys arranged at the joints of the links of the lower arm and the joints of the links of the upper arm, wherein the pulleys of each arm are operably connected to the drive unit and to other pulleys of the same arm so that operation of the drive unit results in movement of the lower arm and / or the upper arm.

[12]

[11] The substrate transport apparatus according to

[11] , wherein at least one of the pulleys is a non-circular pulley.

[13]

[10] The substrate transport device described in

[10] , wherein the lower arm and the upper arm are each configured such that when the lower arm extends, the lower end effector moves away from the upper end effector, and when the upper arm extends, the upper end effector moves away from the lower end effector.

[14] at a link-on-link position of the upper arm, the orientation of the upper end effector and the lower end effector changes as the lower end effector moves along a straight line;

[10] The substrate transport device described in

[10] , wherein at a position where there is a link on the link of the lower arm, the orientation of the lower end effector and the upper end effector changes as the upper end effector moves along a straight line.

[15] 1. A method of transporting a first substrate and a second substrate, comprising: rotating a first arm comprising a first linkage having a first end effector about a shaft of the drive unit; extending the first linkage relative to a second arm including a second linkage having a second end effector; Including, the first end effector is configured to transport the first substrate; the second end effector is asymmetric and angled relative to the first end effector; the second end effector is configured to transport the second substrate; In a rest position, the first substrate is not positioned above or below the second substrate; When the first link mechanism is extended, the first substrate does not move above or below the second substrate. method.

[16]

[15] The method according to

[15] , wherein the first link mechanism is extended using at least one non-circular pulley.

[17]

[15] The method according to

[15] , wherein the first arm and the second arm are configured such that the first end effector moves away from the second end effector when the first link mechanism is extended.

[18]

[15] The method according to

[15] , wherein at a link-on-link position of the first link mechanism, the orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line.

[19]

[18] The method according to

[18] , wherein when the first end effector is moving to an extended position, the orientation of the first end effector and the second end effector is constant and the first end effector continues to move along the straight line.

[20] 1. A method of assembling a substrate transport apparatus, comprising: connecting an upper link of a first linkage arm to a rotatable shaft of a drive unit; connecting a lower link of the first link mechanism arm to the upper link of the first link mechanism arm at a first elbow joint; connecting a first end effector to the lower link of the first linkage arm at a first wrist joint; connecting an upper link of a second linkage arm to the rotatable shaft of the drive unit; connecting a lower link of the second linkage arm to the upper link of the second linkage arm at a second elbow joint; connecting a second end effector to the lower link of the second linkage arm at a second wrist joint; Including, at least the upper link of the first link mechanism arm and the lower link of the first link mechanism arm are of unequal lengths; the first end effector is angled relative to the second end effector such that a first substrate support at a distal end of the first end effector is not above or below a second substrate support at a distal end of the second end effector; method. [twenty one] at least one processor; at least one non-transitory memory containing computer program code; An apparatus comprising: The at least one memory and the computer program code are transmitted by the at least one processor to the device, which at least: rotating a first arm comprising a first linkage having a first end effector about a shaft of the drive unit; extending the first linkage relative to a second arm including a second linkage having a second end effector; configured to cause the first end effector is configured to transport a first substrate; the second end effector is asymmetric and angled relative to the first end effector; the second end effector is configured to carry a second substrate; In a rest position, the first substrate is not positioned above or below the second substrate; When the first link mechanism is extended, the first substrate does not move above or below the second substrate. Device.

Claims

1. 1. An apparatus comprising: at least one wall defining a chamber; at least two substrate processing stations disposed within the chamber within the at least one wall; a robot extending at least partially through the at least one wall of the chamber; The robot comprises: a first arm including a linkage having two links of unequal length and a first end effector; a second arm including a linkage having two links of equal length and a second end effector; a drive unit coupled to the first arm and the second arm and configured to move the first arm and the second arm; Equipped with the first end effector is asymmetric with respect to the second end effector; the first end effector is angled relative to the second end effector such that a first substrate support portion of the first end effector is not above or below a second substrate support portion of the second end effector; The apparatus further comprises at least one controller coupled to the robot and the at least two substrate processing stations, the at least one controller having at least one processor and at least one memory including software configured to control coordinated movement of at least the first arm relative to the second arm.

2. The apparatus of claim 1 , wherein the chamber defines a vacuum environment.

3. 2. The apparatus of claim 1, wherein an entrance to a first of the at least two substrate processing stations is oriented orthogonally to an entrance to a second of the at least two substrate processing stations.

4. 2. The apparatus of claim 1, wherein when the first arm or the second arm moves, one of the first substrate support or the second substrate support does not move above or below the other of the first substrate support or the second substrate support.

5. 2. The apparatus of claim 1, wherein one or both of the linkage having two equal length links and the linkage having two unequal length links is driven by at least one non-circular pulley.

6. The device of claim 1 , wherein the first arm and the second arm are configured such that upon extension of the first arm, the first end effector moves away from the second end effector.

7. The device of claim 1 , wherein the first arm and the second arm are configured such that upon extension of the second arm, the second end effector moves away from the first end effector.

8. 2. The apparatus of claim 1, wherein when the linkage has two equal-length links, one above the other, the orientation of the first end effector and the second end effector changes as the second end effector moves along a straight line.

9. 2. The apparatus of claim 1, wherein when the linkage has two unequal length links, one above the other, the orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line.

10. 1. A method for transferring at least one substrate between a first station and a second station, comprising: providing a chamber defined by at least one wall, an interior of the chamber defining the first station and the second station; The method further includes providing a robot extending at least partially within the chamber, the robot comprising: a first arm including a linkage having two links of unequal length and a first end effector; a second arm including a linkage having two links of equal length and a second end effector; a drive unit coupled to the first arm and the second arm and configured to move the first arm and the second arm; Equipped with the first end effector is asymmetric with respect to the second end effector; the first end effector is angled relative to the second end effector such that a first substrate support portion of the first end effector is not above or below a second substrate support portion of the second end effector; The method further includes rotating one or more of the first arm and the second arm about the shaft of the drive unit in a coordinated motion to cause the first end effector or the second end effector to pick the at least one substrate from the first station and place it at the second station.

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