Gas Monitoring Devices

Abstract

To provide a gas monitoring device capable of easily maintaining and exchanging each sampling assembly and detecting a plurality of environmental points.SOLUTION: A gas monitoring device includes a main body and a plurality of sampling assemblies. The plurality of sampling assemblies are removably attached to the main body; each sampling assembly includes a plurality of sampling inlets, a solenoid valve assembly and a sampling outlet; the plurality of sampling inlets are used for communicating to a plurality of gas sources to be detected, respectively; the solenoid valve assembly communicates the plurality of sampling inlets with the sampling outlet; and the solenoid valve assembly selectively controls the communication of the plurality of sampling inlets with the sampling outlet.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to gas monitoring devices, and more particularly to improvements in the technical configuration of gas monitoring devices for multi-environment detection. [Background technology]

[0002] In the semiconductor manufacturing process, the air quality in the cleanroom environment has a significant impact on semiconductor yield. However, factory sites are very large, and inspections using multiple machines or moving machines to various locations within the factory requires a great deal of manpower and time. Furthermore, conventional fixed gas monitoring devices have a fixed detection module. If a detection module breaks down and requires repair, the entire device must stop detecting environmental gases, and detection operations cannot continue until maintenance is completed. As a result, detection efficiency decreases.

[0003] Therefore, there is a need to provide a new and innovative gas monitoring device to solve the above problems. Summary of the Invention [Problem to be solved by the invention]

[0004] A primary object of the present invention is to provide a gas monitoring device that facilitates maintenance and replacement of each of the sampling assemblies and allows for detection of multiple environmental points. [Means for solving the problem]

[0005] In order to achieve the above-mentioned object, the present invention provides a gas monitoring device comprising a main body and a plurality of sampling assemblies removably attached to the main body, each of which includes a plurality of sampling inlets, a solenoid valve assembly, and a sampling outlet, wherein the plurality of sampling inlets are used to connect to a plurality of target gas sources, respectively, the solenoid valve assembly connects the plurality of sampling inlets to the sampling outlets, and the solenoid valve assembly selectively controls the connection between the plurality of sampling inlets and the sampling outlets. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a perspective view of one preferred embodiment of the present invention; [Figure 2] FIG. 2 is a three-dimensional enlarged view of FIG. [Figure 3] FIG. 1 is a schematic view of a second limiting unit of one preferred embodiment of the present invention when it is in a locked position. [Figure 4] FIG. 1 is a schematic view of a second limiting unit of one preferred embodiment of the present invention when the second limiting unit is in an unlocked position. [Figure 5] 1 is a schematic view of a sampling assembly according to one preferred embodiment of the present invention when removed from the main body. [Figure 6] FIG. 2 is another perspective view of one preferred embodiment of the present invention. [Figure 7] 1 is a perspective view of one preferred embodiment of the present invention; [Figure 8] FIG. 2 is an exploded view of the sampling assembly and slide rail assembly of one preferred embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0007] The following examples are only used to illustrate possible embodiments of the present invention and are not intended to limit the scope of protection of the present invention. The "one" or "at least one" before the nouns mentioned in this specification does not limit the number, and can be "plural" according to requirements. This number change is also within the scope of protection.

[0008] One preferred embodiment of the present invention is shown in Figures 1 to 8. The gas monitoring device 1 of the present invention includes a main body 10 and a plurality of sampling assemblies 20.

[0009] The multiple sampling assemblies 20 are removably attached to the main body 10, and each sampling assembly 20 includes multiple sampling inlets 21, an electromagnetic valve assembly 22, and a sampling outlet 23, and the multiple sampling inlets 21 are used to connect to multiple sources of the gas to be detected, respectively. In this embodiment, the target gas sources are environmental gases in various working regions, and the solenoid valve assembly 22 connects the multiple sampling inlets 21 to the sampling outlets 23, selectively controlling the connection between the multiple sampling inlets 21 and the sampling outlets 23. This allows the multiple sampling assemblies 20 to be individually maintained or replaced, improving the maintainability and efficiency of the entire device and enabling multi-point environmental detection in multiple regions, resulting in high detection efficiency. Furthermore, the solenoid valve assembly 22 can efficiently switch the target gases in various working regions to the sampling outlets 23 for subsequent detection.

[0010] Each sampling assembly 20 is slidably and removably mounted on the main body 10. Specifically, the gas monitoring device 1 further includes at least one slide rail assembly 30. The at least one slide rail assembly 30 is mounted between the main body 10 and at least one sampling assembly 20, and each slide rail assembly 30 includes a first slide rail 31 and a second slide rail 32. The main body 10 is provided with the first slide rail 31, and at least one sampling assembly 20 is provided with the second slide rail 32 and is slidably mounted on the first slide rail 31 by means of the second slide rail 32. In this embodiment, the main body 10 is provided with a plurality of slide rail assemblies 30, and each slide rail assembly 30 is provided between each sampling assembly 20 and the main body 10. This facilitates installation and removal of the plurality of sampling assemblies 20, shortens installation time, and allows smooth sliding relative to the main body 10. Furthermore, a ball structure may be provided between the first slide rail and the second slide rail to ensure smooth relative sliding.

[0011] A first limiting unit 33 is provided on the first slide rail 31, and a second limiting unit 34 is provided on the second slide rail 32, and each sampling assembly 20 is movable in a first direction L1 relative to the main body 10 from a storage position to a deployed position outside the main body 10 (see Figure 2), and when at least one sampling assembly 20 is in the deployed position, the second limiting unit 34 can abut against the first limiting unit 33 in the first direction L1. When each sampling assembly 20 is in the storage position, it is stored within the main body 10. Specifically, the second limiting units 34 are movable between a locked position and an unlocked position, and when these second limiting units 34 are in the locked position, they can abut against the first limiting units 33 in the first direction L1, and when these second limiting units 34 are in the unlocked position, they do not abut against the first limiting units 33 in the first direction L1. In this embodiment, the second limiting unit 34 is an elastic member. Therefore, when each sampling assembly 20 is pulled out relative to the main body 10, it is restricted by the first limiting unit 33 and the second limiting unit 34, preventing it from coming out. The sampling assemblies 20 may be removed when the second limiting unit 34 is adjusted to the unlocked position. In this way, attachment, detachment, and retention are efficiently achieved.

[0012] The plurality of sampling inlets 21 are exposed to the body 10, and the sampling outlet 23 is built into the body 10. In this way, the sampling outlet 23 is protected from damage and contamination while facilitating connection to the plurality of target gas sources.

[0013] Each sampling assembly 20 further includes a removal inlet 24, which is connected to the solenoid valve assembly 22 and connected to a removal gas source (e.g., clean air or an inert gas such as nitrogen). Specifically, each sampling assembly 20 further includes a diversion unit 25, which is provided between the multiple sampling inlets 21 and the diversion unit 25. The diversion unit 25 is provided with multiple diversion inlets 26, the sampling outlet 23, and the removal inlet 24. The multiple diversion inlets 26 connect the solenoid valve assembly 22 to the sampling outlet 23 and the solenoid valve assembly 22 to the removal inlet 24, and the removal inlet 24 is connected to the removal gas source. This makes it possible to avoid detection errors caused by mixing different detection gases when cleaning the multiple sampling assemblies 20, and also makes the structure simple and easy to install.

[0014] Each of the sampling assemblies 20 is movable in the first direction L1 relative to the main body 10. Each of the sampling assemblies 20 further includes a plurality of communication outlets 28, which communicate the plurality of sampling inlets 21 with the solenoid valve assembly 22 and the plurality of communication outlets 28. The solenoid valve assembly 22 and the flow dividing unit 25 are respectively arranged at intervals in the first direction L1. This makes it easy to connect a plurality of pipes between the plurality of communication outlets 28 and the solenoid valve assembly 22, and between the solenoid valve assembly 22 and the plurality of sampling outlets 23, and the plurality of pipes are arranged in an orderly manner without interfering with each other, allowing gas to flow smoothly therethrough.

[0015] Each sampling assembly 20 further includes a base 27, and the solenoid valve assembly 22 and the sampling outlet 23 are provided on a first side surface 271 of the base 27. When each sampling assembly 20 is in the deployed position and the first side surface 271 is outside the main body 10, the solenoid valve assembly 22 and the diverter unit 25 of each sampling assembly 20 are exposed. Here, when each sampling assembly 20 is in the deployed position, each sampling assembly 20 is outside the main body 10. Furthermore, when the first side surface 271 of each sampling assembly 20 is inside the main body 10, the solenoid valve assembly 22 and the diverter unit 25 of each sampling assembly 20 are built into the main body 10. Therefore, when each sampling assembly 20 is pulled out without being removed from the main body 10, the status of the solenoid valve assembly 22 and the diverter unit 25 can be directly observed and the piping therebetween can be directly attached and detached, facilitating maintenance.

[0016] The gas monitoring device 1 includes a detection unit 40, a processing unit 50, and an alarm device 60, the detection unit 40 and the processing unit 50 being respectively provided in the main body 10, the alarm device 60 being provided outside the main body 10 and communicatively connected to the processing unit 50, the detection unit 40 communicating with the sampling outlet 23 to detect gas of each of the target gas sources, the processing unit 50 transmitting the values ​​detected by the detection unit 40 to the processing unit 50 for calculation and analysis, and when an abnormal value appears, the alarm device 60 issuing an alarm to remind the user. Each of the sampling assemblies 20 is movable in the first direction L1 relative to the processing unit 50 and the detection unit 40. In this embodiment, the alarm device 60 is a light-emitting device to achieve a noticeable reminder effect.

[0017] In use, after removing the sampling assembly 20 (for maintenance or replacement), another sampling assembly 20 can be efficiently installed immediately, thereby reducing downtime of gas detection, improving detection efficiency, and facilitating maintenance and replacement. [Explanation of symbols]

[0018] 1. Gas monitoring devices 10 Main Unit 20 Sampling Assembly 21 Sampling inlet 22 Solenoid valve assembly 23 Sampling outlet 24 Removal inlet 25 Diversion Unit 26 minute inlet 27 Base 271 First aspect 28 Communication exit 30 Slide Rail Assembly 31 First slide rail 32 Second slide rail 33 First Restriction Unit 34 Second Restriction Unit 40 Detection Unit 50 processing units 60 Alarm device L1 1st direction

Claims

1. 1. A gas monitoring device comprising: The main body and a plurality of sampling assemblies removably attached to the main body, each including a plurality of sampling inlets, a solenoid valve assembly, and a sampling outlet, wherein the plurality of sampling inlets are used to communicate with a plurality of target gas sources, respectively, the solenoid valve assembly communicates the plurality of sampling inlets with the sampling outlets, and the solenoid valve assembly selectively controls communication between the plurality of sampling inlets and the sampling outlets; Gas monitoring devices.

2. The gas monitoring device of claim 1 , wherein the plurality of sampling inlets are exposed to the body and the sampling outlet is built into the body.

3. 2. The gas monitoring device of claim 1, wherein each said sampling assembly further comprises an abatement inlet, said abatement inlet communicating with said solenoid valve assembly, said abatement inlet communicating with a source of abatement gas.

4. The gas monitoring device of claim 1 , wherein each sampling assembly is removably and slidably mounted to the body.

5. 2. The gas monitoring device of claim 1, wherein each of the sampling assemblies further includes a diversion unit, the solenoid valve assembly is provided between the plurality of sampling inlets and the diversion unit, the diversion unit is provided with a plurality of diversion inlets, the sampling outlet, and a removal inlet, the plurality of diversion inlets connect the solenoid valve assembly to the sampling outlet and the solenoid valve assembly to the removal inlet, and the removal inlet connects to a removal gas source.

6. Each of the sampling assemblies further includes a base, the solenoid valve assembly and the flow diverter unit are respectively provided on a first side surface of the base, and when each of the sampling assemblies is in an expanded position and the first side surface is outside the body, the solenoid valve assembly and the flow diverter unit of each of the sampling assemblies are in an exposed state; The gas monitoring device of claim 5 , wherein each sampling assembly is external to the body when in the deployed position.

7. A gas monitoring device described in any one of claims 1 to 6, further comprising at least one slide rail assembly, wherein the at least one slide rail assembly is provided between the main body and at least one of the sampling assemblies, each slide rail assembly comprising a first slide rail and a second slide rail, wherein the main body is provided with the first slide rail, and at least one of the sampling assemblies is provided with the second slide rail and is slidably provided on the first slide rail using the second slide rail.

8. a first limiting unit is provided on the first slide rail, a second limiting unit is provided on the second slide rail, and each sampling assembly is movable in a first direction relative to the main body from a stored position to a deployed position outside the main body; The gas monitoring device of claim 7 , wherein the second limiting unit is abuttable against the first limiting unit in the first direction when at least one of the sampling assemblies is in the deployed position.

9. the second limiting unit is movable between a locked position and an unlocked position; 9. The gas monitoring device of claim 8, wherein when these second limiting units are in the locked position, the second limiting units can abut against the first limiting units in the first direction, and when these second limiting units are in the unlocked position, the second limiting units do not abut against the first limiting units in the first direction.

10. Each of the sampling assemblies is movable in a first direction relative to the body; Each of the sampling assemblies further includes a plurality of communication outlets, the plurality of communication outlets communicating the plurality of sampling inlets with the solenoid valve assembly and the plurality of communication outlets, the solenoid valve assembly and the flow dividing unit being spaced apart from each other in the first direction; the plurality of sampling inlets are exposed to the body and the sampling outlet is embedded in the body; Each of the sampling assemblies is removably and slidably mounted on the body; When the first side of each of the sampling assemblies is within the body, the solenoid valve assembly and the flow dividing unit of each of the sampling assemblies are contained within the body; the gas monitoring device further includes at least one slide rail assembly, the at least one slide rail assembly being disposed between the main body and the at least one sampling assembly, each slide rail assembly including a first slide rail and a second slide rail, the main body being provided with the first slide rail, and the at least one sampling assembly being provided with the second slide rail and being slidably mounted on the first slide rail by means of the second slide rail; a first limiting unit is provided on the first slide rail, a second limiting unit is provided on the second slide rail, and each of the sampling assemblies is movable in the first direction relative to the main body from a stored position to the deployed position outside the main body; When the at least one sampling assembly is in the deployed position, the second limiting unit is capable of abutting against the first limiting unit in the first direction; the second limiting unit is movable between a locked position and an unlocked position; When these second limiting units are in the locking position, the second limiting units can abut against the first limiting units in the first direction, and when these second limiting units are in the unlocking position, the second limiting units do not abut against the first limiting units in the first direction; The apparatus further includes a detection unit, a processing unit, and an alarm device, wherein the detection unit and the processing unit are respectively provided in the main body, and the alarm device is provided outside the main body and communicatively connected to the processing unit, the detection unit communicates with the sampling outlet to detect gas of each of the target gas sources, the processing unit transmits the values ​​detected by the detection unit to the processing unit for calculation and analysis, and when an abnormal value appears, the alarm device issues an alarm to remind the user, The gas monitoring device of claim 6 , wherein each of the sampling assemblies is movable in the first direction relative to the processing unit and the detection unit.

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