Method for fabricating a display device having a patterned lithium-based transition metal oxide

Abstract

The present disclosure relates generally to display systems, and more particularly to augmented reality display systems and methods for fabricating the same. A method for fabricating a display device includes providing a substrate including a lithium (Li)-based oxide and forming an etch mask pattern to expose regions of the substrate. The method also includes plasma etching the exposed regions of the substrate using a gas mixture including CHF to form diffractive optical elements, the diffractive optical elements comprising Li-based oxide features configured to diffract visible light incident thereon.

Description

[Technical Field]

[0001] (Related Applications) This application claims the benefit of priority to U.S. Provisional Patent Application No. 62 / 817,393, filed March 12, 2019, and entitled "METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED TRANSITION METAL OXIDE," the contents of which are incorporated herein by reference in their entirety.

[0002] (Incorporated by reference) This application is incorporated by reference into the following patent applications: U.S. Patent Application No. 14 / 555,585, filed November 27, 2014, published on July 23, 2015 as U.S. Patent Publication No. 2015 / 0205126; U.S. Patent Application No. 14 / 555,585, filed April 18, 2015, published on October 22, 2015 as U.S. Patent Publication No. 2015 / 0302652; / 690,401, filed March 14, 2014, now U.S. Patent No. 9,417,452; U.S. Patent Application No. 14 / 212,961, filed August 16, 2016, now U.S. Patent No. 9,417,452; and U.S. Patent Application No. 14 / 331,218, filed July 14, 2014, published October 29, 2015 as U.S. Patent Publication No. 2015 / 0309263, each of which is incorporated in its entirety.

[0003] (Field) The present disclosure relates to display systems, and more particularly to augmented and virtual reality display systems. [Background technology]

[0004] Description of Related Art Modern computing and display technologies have facilitated the development of systems for so-called "virtual reality" or "augmented reality" experiences, in which digitally reproduced images or portions thereof are presented to a user in a manner that appears or can be perceived as real. Virtual reality, or "VR," scenarios typically involve the presentation of digital or virtual image information without transparency to other actual real-world visual input, while augmented reality, or "AR," scenarios typically involve the presentation of digital or virtual image information as an augmentation to the user's visualization of the real world around them. Mixed reality, or "MR," scenarios are a type of AR scenario that typically involve virtual objects integrated into and responsive to the natural world. For example, in MR scenarios, AR image content is perceived as appearing occluded by or otherwise interacting with objects in the real world.

[0005] Referring to Figure 1, an augmented reality scene 10 is depicted in which a user of the AR technology sees a real-world park-like setting 20 featuring people, trees, a building in the background, and a concrete platform 30. In addition to these items, the user of the AR technology also perceives that they "see" "virtual content," such as a robotic figure 40 standing on the real-world platform 30 and a flying, cartoon-like avatar character 50 that appears to be an anthropomorphic bumblebee, even though these elements 40, 50 do not exist in the real world. The human visual perception system is complex, making it difficult to create AR technology that facilitates a comfortable, natural-feeling, and rich presentation of virtual image elements among other virtual or real-world image elements.

[0006] The systems and methods disclosed herein address various challenges associated with AR or VR technology. Summary of the Invention [Problem to be solved by the invention]

[0007] Accordingly, numerous devices, systems, structures, and methods disclosed herein are directed generally to display systems, and more particularly to augmented reality display systems and methods of fabricating the same. [Means for solving the problem]

[0008] For example, a method of fabricating an exemplary display device includes providing a substrate comprising a lithium (Li)-based oxide and forming an etch mask pattern to expose regions of the substrate. The method additionally includes plasma etching the exposed regions of the substrate using a gas mixture including CHF to form diffractive optical elements, the diffractive optical elements comprising Li-based oxide features configured to diffract visible light incident thereon.

[0009] Another exemplary method for fabricating a display device includes providing a substrate including a lithium (Li)-based oxide and forming an etch mask pattern comprising exposed regions of the substrate. The method additionally includes plasma etching the exposed regions of the substrate using a gas mixture including CHF3 and H2 to form a patterned Li-based oxide structure. The present specification also provides, for example, the following items: (Item 1) 1. A method of fabricating a display device, the method comprising: providing a substrate including a lithium (Li)-based oxide; forming an etch mask pattern to expose areas of the substrate; CHF 3 plasma etching the exposed areas of the substrate using a gas mixture including Including, The method, wherein the diffractive optical element comprises a Li-based oxide feature configured to diffract visible light incident thereon. (Item 2) Item 10. The method of claim 1, wherein the diffractive optical element comprises a diffraction grating. (Item 3) Item 10. The method of claim 1, wherein the etching mask pattern periodically exposes the substrate such that the Li-based oxide features are periodically repeated in the lateral direction. (Item 4) The gas mixture further comprises H 2 and an inert gas. (Item 5) CHF in the gas mixture 3 vs. H 2 The method according to item 4, wherein the volume ratio of (Item 6) 5. The method according to item 4, wherein the inert gas in the gas mixture is in the range of 10% to 90% based on the total volume of the gas mixture. (Item 7) The gas mixture comprises H 2 , CHF 3 and Ar. (Item 8) 2. The method of claim 1, wherein the plasma etching comprises etching at a rate of 1 nm / min to 30 nm / min. (Item 9) 2. The method of claim 1, wherein the plasma etching comprises etching using a plasma generated by dual RF frequencies. (Item 10) 2. The method according to claim 1, wherein the plasma etching comprises etching using plasma generated by RF power in the range of 50 W to 500 W. (Item 11) 2. The method of claim 1, wherein the plasma etching comprises etching in a reaction chamber at a pressure of 10 mTorr to 50 mTorr. (Item 12) 2. The method according to claim 1, wherein the plasma etching comprises selectively etching the substrate with respect to the etching mask pattern at an etching rate selectivity ratio of 1:0.1 to 1:5. (Item 13) Item 13. The method of any one of items 1-12, wherein forming the etching mask pattern comprises forming using a lithography technique. (Item 14) 13. The method according to any one of items 1 to 12, wherein forming the etching mask pattern comprises forming using a nanoimprint technique. (Item 15) 13. The method according to any one of items 1-12, wherein the etching mask pattern is formed from a photoresist, a dielectric material, a metal, or a synthetic material. (Item 16) 13. The method according to any one of items 1-12, wherein the etching mask pattern is formed from a metal or a metal alloy. (Item 17) 13. The method of any one of items 1-12, further comprising wet cleaning the substrate following plasma etching in a solution comprising ammonium hydroxide, hydrogen peroxide, and water. (Item 18) 13. The method of any one of items 1-12, wherein the Li-based oxide features have a refractive index greater than 2.0. (Item 19) 13. The method of any one of items 1-12, wherein the Li-based oxide feature comprises lithium niobate or lithium tantalate. (Item 20) Item 13. The method of any one of items 1-12, wherein the Li-based oxide features have a height of 10 nm to 200 nm. (Item 21) 13. The method of any one of items 1-12, wherein the Li-based oxide features are periodically repeated with a pitch in the range of 200 nm to 1 μm. (Item 22) 13. The method according to any one of items 1-12, wherein the Li-based oxide features a duty cycle of 0.1 to 0.9. (Item 23) Item 13. The method of any one of items 1-12, wherein forming the diffractive optical element comprises forming it on a waveguide configured to guide visible light in a lateral direction intersecting the direction of the visible light. (Item 24) Item 13. The method of any one of items 1-12, wherein forming the diffractive optical element comprises forming it on a waveguide comprising the Li-based oxide. (Item 25) Item 13. The method of any one of items 1-12, wherein the diffractive optical element is formed on the substrate comprising a waveguide, the waveguide being integrated with the diffractive optical element as a monolithically integrated structure. (Item 26) Item 13. The method of any one of items 1-12, wherein the diffractive optical element is formed on a waveguide, the waveguide comprising a material different from the Li-based oxide. (Item 27) 13. The method of any one of items 1-12, wherein the diffractive optical element serves as an internal coupling optical element formed on the substrate that serves as a waveguide for coupling light into a waveguide. (Item 28) 13. The method of any one of items 1-12, wherein the diffractive optical element serves as an out-coupling optical element formed on the substrate that serves as a waveguide for coupling light out of the waveguide. (Item 29) Item 13. The method of any one of items 1-12, wherein the diffractive optical element is formed on the substrate with a waveguide configured to guide visible light having any wavelength within the visible spectrum to be incoupled or outcoupled by the diffractive optical element. (Item 30) Item 13. The method of any one of items 1-12, wherein the diffractive optical element is formed on the substrate comprising a waveguide configured to guide visible light incoupled by or outcoupled through the diffractive optical element via total internal reflection. (Item 31) 1. A method of fabricating a display device, the method comprising: providing a substrate including a lithium (Li)-based oxide; forming an etch mask pattern comprising exposed areas of the substrate; CHF 3 and H 2 plasma etching the exposed areas of the substrate using a gas mixture comprising: A method comprising: (Item 32) CHF in the gas mixture 3 vs. H 2 Item 32. The method according to Item 31, wherein the ratio of is in the range of 10:1 to 1:10. (Item 33) Item 32. The method according to item 31, further comprising adding an inert gas to the gas mixture in an amount ranging from 10% to 90% of the total volume of the gas mixture. (Item 34) Item 32. The method of item 31, wherein the plasma etching comprises etching at a rate of 1 nm / min to 30 nm / min. (Item 35) 32. The method of claim 31, wherein the plasma etching comprises etching in an inductively coupled plasma reactor. (Item 36) 32. The method of claim 31, wherein the plasma etching comprises applying a plasma generated by inductive RF power in the range of 50 W to 500 W. (Item 37) Item 32. The method of item 31, wherein the plasma etching further comprises applying RF power in a range of 50 W to 500 W to the substrate. (Item 38) Item 32. The method of claim 31, wherein the plasma etching comprises etching in a reaction chamber at a pressure in the range of 10 mTorr to 50 mTorr. (Item 39) Item 32. The method of claim 31, wherein the plasma etching comprises selectively etching the substrate with respect to the etching mask pattern at an etching rate selectivity ratio in the range of 1:0.1 to 0.1:1. (Item 40) Item 32. The method of item 31, wherein the etch mask pattern periodically exposes regions of the substrate such that the plasma etching forms a diffraction grating comprising laterally repeated periodic Li-based oxide features. (Item 41) Item 41. The method of item 40, wherein the diffraction grating is formed on the substrate comprising a waveguide, the waveguide being integrated with the diffraction grating as a monolithic structure. (Item 42) 43. The method of any one of items 40-42, wherein the diffraction grating is formed on a waveguide, and the waveguide comprises a material different from the Li-based oxide. (Item 43) 43. The method of any one of items 40-42, wherein the diffraction grating comprises an in-coupling optical element or an out-coupling optical element formed on the substrate comprising a waveguide. (Item 44) 43. The method of any one of items 40-42, wherein the diffraction grating is formed on the substrate comprising a waveguide configured to guide visible light having a wavelength within the visible spectrum that is incoupled or outcoupled by the diffraction grating. (Item 45) 43. The method of any one of items 40-42, wherein the diffraction grating is formed on the substrate comprising a waveguide configured to guide visible light in-coupled by or out-coupled through the diffraction grating via total internal reflection. (Item 46) Item 32. The method of item 31, wherein the patterned Li-based oxide structure comprises one or more of fiducial markers, edge features, an adhesion coating, and spacers. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 illustrates a user's view of an augmented reality (AR) device.

[0011] [Figure 2] FIG. 2 illustrates a conventional display system for simulating a three-dimensional image for a user.

[0012] [Figure 3] 3A-3C illustrate the relationship between the radius of curvature and the radius of focus.

[0013] [Figure 4A] Figure 4A illustrates a representation of the accommodation-vergence response of the human visual system.

[0014] [Figure 4B] FIG. 4B illustrates an example of different accommodation and convergence states of a pair of a user's eyes.

[0015] [Figure 4C] FIG. 4C illustrates an example of a top-down view representation of a user viewing content through a display system.

[0016] [Figure 4D] FIG. 4D illustrates another example of a top-down view representation of a user viewing content through a display system.

[0017] [Figure 5] FIG. 5 illustrates aspects of an approach for simulating three-dimensional images by correcting for wavefront divergence.

[0018] [Figure 6] FIG. 6 illustrates an embodiment of a waveguide stack for outputting image information to a user.

[0019] [Figure 7] FIG. 7 illustrates an example of an output beam output by a waveguide.

[0020] [Figure 8] FIG. 8 illustrates an example of a stacked waveguide assembly where each depth plane contains an image formed using multiple different primary colors.

[0021] [Figure 9A] FIG. 9A illustrates a cross-sectional side view of an example of a set of stacked waveguides, each including an internal coupling optical element.

[0022] [Figure 9B] FIG. 9B illustrates a perspective view of the multiple stacked waveguide embodiment of FIG. 9A.

[0023] [Figure 9C] FIG. 9C illustrates a top-down plan view of the multiple stacked waveguide embodiment of FIGS. 9A and 9B.

[0024] [Figure 9D] FIG. 9D illustrates an example of a wearable display system.

[0025] [Figure 10A] FIG. 10A illustrates a cross-sectional view of a waveguide having a diffraction grating disposed thereon, showing the field of view (FOV) Δα of the waveguide.

[0026] [Figure 10B] FIG. 10B schematically illustrates a cross-sectional view of a portion of a waveguide having a diffraction grating disposed thereon that includes a Li-based oxide.

[0027] [Figure 10C] FIG. 10C schematically illustrates a cross-sectional view of a portion of a waveguide having a diffraction grating disposed thereon that includes a Li-based oxide.

[0028] [Figure 11] FIG. 11 illustrates a schematic of a method for fabricating a periodically repeating Li-based oxide structure.

[0029] [Figure 12] 12A-12C are cross-sectional views of intermediate structures at various stages of forming an etch mask pattern using a photolithography process to fabricate a periodically repeating Li-based oxide structure.

[0030] [Figure 13] 13A-13C are cross-sectional views of intermediate structures at various stages of forming an etch mask pattern using a nanoimprint process to fabricate a periodically repeating Li-based oxide structure.

[0031] [Figure 14] FIG. 14 illustrates a schematic of a plasma reactor configured for fabricating periodically repeating Li-based oxide structures.

[0032] [Figure 15] FIG. 15 is a cross-sectional view of an intermediate structure after etching a Li-based oxide substrate to form Li-based oxide features using an etch mask formed according to the methods illustrated in FIGS. 12A-12C or 13A-13C.

[0033] [Figure 16] 16A-16D are cross-sectional scanning electron micrographs of intermediate structures after forming an etch mask pattern and etching a Li-based oxide substrate using a plasma containing CHF3.

[0034] [Figure 17] FIG. 17 is a cross-sectional scanning electron micrograph of the intermediate structure after forming an etch mask pattern and etching a Li-based oxide substrate using a plasma containing H 2 and CHF 3 .

[0035] [Figure 18] FIG. 18 is a cross-sectional scanning electron micrograph of the intermediate structure after forming an etch mask pattern and etching a Li-based oxide substrate using a plasma containing H 2 and CHF 3 .

[0036] [Figure 19A] FIG. 19A is a cross-sectional scanning electron micrograph of the intermediate structure after forming an etch mask pattern and etching a Li-based oxide substrate using a plasma containing H 2 and CHF 3 .

[0037] [Figure 19B] FIG. 19B is a planar scanning electron micrograph of the intermediate structure shown in FIG. 19A in the as-dry-etched state.

[0038] [Figure 19C] FIG. 19C is a planar scanning electron micrograph of the intermediate structure shown in FIG. 19B after wet cleaning. DETAILED DESCRIPTION OF THE INVENTION

[0039] Throughout the drawings, reference numbers may be reused to indicate correspondence between referenced elements. The drawings are provided to illustrate example embodiments described herein and are not intended to limit the scope of the present disclosure.

[0040] The AR system may display virtual content to a user or viewer while still allowing the user to see the world around them. Preferably, this content is displayed on a head-mounted display, for example, as part of eyewear, that projects image information into the user's eyes. In addition, the display may also transmit light from the surrounding environment to the user's eyes, allowing a view of that surrounding environment. As used herein, it should be understood that a "head-mounted" or "head-mountable" display is a display that can be mounted on the viewer's or user's head.

[0041] In some AR systems, virtual / augmented / composite displays with a relatively wide field of view (FOV) can enhance the viewing experience. The FOV of a display depends on the angle of light output by the eyepiece waveguide through which the viewer sees the projected image into their eye. A waveguide with a relatively high refractive index, e.g., 2.0 or greater, can provide a relatively high FOV. However, to efficiently couple light into a high-index waveguide, the diffractive optical coupling element should also have a correspondingly high refractive index. To achieve this goal, among other advantages, some displays for AR systems according to embodiments described herein include a waveguide comprising a material with a relatively high refractive index (e.g., greater than or equal to 2.0), the waveguide having a diffraction grating formed thereon with a correspondingly high refractive index, e.g., the diffraction grating is formed from a Li-based oxide. For example, the diffraction grating may be formed directly on a Li-based oxide waveguide by patterning a surface portion of the waveguide formed from the Li-based oxide.

[0042] Advantageously, to fabricate such a diffraction grating, a method for fabricating a diffraction grating comprising Li-based oxide includes periodically exposing an underlying substrate comprising Li-based oxide using an etch mask pattern and plasma etching in a gas mixture including CHF3 under plasma etching conditions such that the exposed regions of the substrate are etched to form a patterned Li-based oxide structure having Li-based oxide features formed on the surface. According to various embodiments, the patterned Li-based oxide features include lines separated by spaces and repeated periodically in the lateral direction such that the resulting structure can be configured as a diffraction grating that can incouple or outcouple light by diffracting light incident thereon over a relatively wide FOV.

[0043] Reference will now be made to the drawings, in which like reference numerals refer to like parts throughout. Unless otherwise indicated, the drawings are schematic and are not necessarily drawn to scale.

[0044] FIG. 2 illustrates a conventional display system for simulating a three-dimensional image for a user. It should be understood that when a user's eyes are spaced apart and viewing a real object in space, each eye may have a slightly different view of the object, forming an image of the object at a different location on each eye's retina. This may be referred to as binocular disparity and may be utilized by the human visual system to provide the perception of depth. Conventional display systems simulate binocular disparity by presenting two distinct images 190, 200, one for each eye 210, 220, with slightly different views of the same virtual object, corresponding to the view of the virtual object as it would appear by each eye as if the virtual object were a real object at a desired depth. These images provide binocular cues that the user's visual system may interpret to derive the perception of depth.

[0045] Continuing with reference to FIG. 2 , images 190 and 200 are spaced apart from eyes 210 and 220 by a distance 230 on the z-axis. The z-axis is parallel to the optical axis of the viewer when the eye is fixating on an object at optical infinity directly in front of the viewer. Images 190 and 200 are flat and at a fixed distance from eyes 210 and 220. Based on slightly different views of the virtual object in the images presented to eyes 210 and 220, respectively, the eyes may necessarily rotate so that the image of the object falls on a corresponding point on each eye's retina, maintaining single binocular vision. This rotation may cause the gaze of each eye 210 and 220 to converge on a point in space where the virtual object is perceived to reside. As a result, providing three-dimensional images traditionally involves manipulating the convergence and divergence of the user's eyes 210 and 220 and providing binocular cues that the human visual system interprets to provide the perception of depth.

[0046] However, creating a realistic and comfortable perception of depth is challenging. It should be understood that light from an object at different distances from the eye has a wavefront with different amounts of divergence. Figures 3A-3C illustrate the relationship between distance and light ray divergence. The distance between the object and the eye 210 is represented in order of decreasing distances R1, R2, and R3. As shown in Figures 3A-3C, light rays become more divergent as the distance to the object decreases. Conversely, as the distance increases, the light rays become more collimated. In other words, the light field generated by a point (an object or portion of an object) can be said to have a spherical wavefront curvature that is a function of the distance the point is from the user's eye. As the curvature increases, the distance between the object and the eye 210 decreases. While only a single eye 210 is illustrated in Figures 3A-3C and various other figures herein for clarity of illustration, the discussion regarding the eye 210 may apply to both eyes 210 and 220 of the viewer.

[0047] Continuing with reference to Figures 3A-3C, light from an object that a viewer's eye is fixating may have different wavefront divergences. Due to the different wavefront divergences, the light may be focused differently by the eye's lens, which in turn may require the lens to assume a different shape to form a focused image on the eye's retina. If a focused image is not formed on the retina, the resulting retinal blur acts as an accommodative cue, causing the shape of the eye's lens to change until a focused image is formed on the retina. For example, the accommodative cue may induce relaxation or contraction of the ciliary muscles surrounding the eye's lens, thereby modulating the force applied to the suspensory ligaments that hold the lens, thus changing the shape of the eye's lens and thereby forming a focused image of the fixated object on the eye's retina (e.g., the fovea) until retinal blur of the fixated object is eliminated or minimized. The process by which the eye's lens changes shape can be referred to as accommodation, and the shape of the eye's lens required to form a focused image of a fixated object on the eye's retina (e.g., the fovea) can be referred to as the state of accommodation.

[0048] Referring now to Figure 4A, a representation of the accommodation-vergence response of the human visual system is illustrated. Eye movement to fixate an object causes the eye to receive light from the object, which forms an image on each of the eye's retinas. The presence of retinal blur in the image formed on the retina can provide a cue for accommodation, and the relative location of the image on the retina can provide a cue for vergence. Accommodative cues cause accommodation, resulting in the eye's lens adopting a specific accommodation state in which a focused image of the object is formed on the eye's retina (e.g., the fovea). Conversely, vergence cues cause vergence movements (eye rotations) so that the images formed on each retina of each eye are at corresponding retinal points, maintaining single binocular vision. In these positions, the eyes can be said to adopt a specific vergence state. Continuing with reference to FIG. 4A , accommodation can be understood as the process by which the eyes achieve a particular accommodation state, and convergence can be understood as the process by which the eyes achieve a particular convergence state. As shown in FIG. 4A , the accommodation and convergence states of the eyes can change when the user fixates on a different object. For example, the accommodated state can change when the user fixates on a new object at a different depth on the z-axis.

[0049] Without being limited by theory, it is believed that a viewer of an object may perceive the object as "three-dimensional" due to a combination of convergence and accommodation. As described above, vergence and divergence movements of the two eyes relative to one another (e.g., eye rotation such that the pupils move toward or away from one another, converging the eyes' lines of sight, and fixating on an object) are closely linked to accommodation of the eye's lenses. Under normal conditions, changing the shape of the eye's lenses and shifting focus from one object to another at a different distance will automatically produce a corresponding change in vergence and divergence to the same distance, a relationship known as the "accommodation-vergence and divergence reflex." Similarly, changes in vergence and divergence will induce a corresponding change in lens shape under normal conditions.

[0050] 4B, an example of different accommodation and convergence states of the eyes is illustrated. Paired eye 222a fixates an object at optical infinity, while paired eye 222b fixates an object 221 at less than optical infinity. Notably, the convergence states of each pair of eyes are different: paired eye 222a points straight ahead, while paired eye 222 converges on object 221. The accommodation states of the eyes forming each pair of eyes 222a and 222b are also different, as represented by the different shapes of lenses 210a, 220a.

[0051] Unfortunately, many users of conventional "3-D" display systems may find such systems uncomfortable or may not perceive any depth perception due to a mismatch between accommodation and convergence states in these displays. As described above, many stereoscopic or "3-D" display systems display a scene by providing a slightly different image to each eye. Such systems are uncomfortable for many viewers because, among other things, they simply provide different presentations of a scene, causing changes in the eyes' convergence states without corresponding changes in the eyes' accommodation states. Rather, images are presented by the display at a fixed distance from the eyes so that the eyes view all image information in a single accommodation state. Such an arrangement counters the "accommodation-vergence-divergence reflex" by causing changes in the convergence states without a corresponding change in the accommodation state. This mismatch is believed to cause viewer discomfort. Display systems that provide a better match between accommodation and convergence-divergence movements may produce a more realistic and comfortable simulation of three-dimensional images.

[0052] Without being limited by theory, it is believed that the human eye is typically capable of interpreting a finite number of depth planes to provide depth perception. As a result, a highly realistic simulation of perceived depth may be achieved by providing the eye with different presentations of images corresponding to each of these limited number of depth planes. In some embodiments, the different presentations may provide both vergence cues and matching cues for accommodation, thereby providing physiologically correct accommodation-vergence divergence matching.

[0053] 4B , two depth planes 240 are illustrated, corresponding to different distances in space from the eyes 210, 220. For a given depth plane 240, vergence-divergence cues may be provided by displaying appropriately different perspective images for each eye 210, 220. Additionally, for a given depth plane 240, the light forming the image provided to each eye 210, 220 may have a wavefront divergence corresponding to the light field generated by a point at the distance of that depth plane 240.

[0054] In the illustrated embodiment, the distance along the z-axis of depth plane 240 containing point 221 is 1 meter. As used herein, distance or depth along the z-axis may be measured with a zero point located at the exit pupil of the user's eye. Thus, depth plane 240 located at a depth of 1 meter corresponds to a distance of 1 meter away from the exit pupil of the user's eye on the optical axis of the eye with the eye pointed toward optical infinity. As an approximation, the depth or distance along the z-axis may be measured from a display (e.g., the surface of a waveguide) in front of the user's eye, and a value for the distance between the device and the exit pupil of the user's eye may be added. That value may be referred to as pupil distance and may correspond to the distance between the exit pupil of the user's eye and a display worn by the user in front of the eye. In practice, the value for pupil distance may be a normalized value generally used for all viewers. For example, pupil distance may be assumed to be 20 mm, and the depth plane at a depth of 1 meter may be at a distance of 980 mm in front of the display.

[0055] 4C and 4D, examples of matched accommodation-vergence-divergence distances and mismatched accommodation-vergence-divergence distances are illustrated, respectively. As illustrated in FIG. 4C, the display system may provide an image of a virtual object to each eye 210, 220. The image may cause the eyes 210, 220 to assume a convergence-divergence state in which the eyes converge on point 15 on the depth plane 240. In addition, the image may be formed by light having a wavefront curvature corresponding to the real object on that depth plane 240. As a result, the eyes 210, 220 assume an accommodation state in which the image is focused on the retinas of those eyes. Thus, the user may perceive the virtual object as being at point 15 on the depth plane 240.

[0056] It should be understood that the accommodation and convergence states of the eyes 210, 220 are each associated with a particular distance on the z-axis. For example, an object at a particular distance from the eyes 210, 220 will cause those eyes to assume a particular accommodation state based on the distance of the object. The distance associated with a particular accommodation state is referred to as the accommodation distance A. d Similarly, a particular convergence-divergence distance V associated with the eyes in a particular convergence-divergence state can be d Or, there exists a position relative to each other. When the accommodation distance and the convergence distance are matched, the relationship between accommodation and convergence is said to be physiologically correct. This is considered to be the most comfortable scenario for the viewer.

[0057] However, in a stereoscopic display, the accommodation distance and the convergence distance may not always be aligned. For example, as illustrated in FIG. 4D , images displayed to the eyes 210, 220 may be displayed with a wavefront divergence corresponding to the depth plane 240, and the eyes 210, 220 may be in a particular accommodation state in which points 15a, 15b on that depth plane are in focus. However, the images displayed to the eyes 210, 220 may provide convergence cues that cause the eyes 210, 220 to converge on a point 15 that is not located on the depth plane 240. As a result, in some embodiments, the accommodation distance corresponds to the distance from the exit pupils of the eyes 210, 220 to the depth plane 240, while the convergence distance corresponds to the greater distance from the exit pupils of the eyes 210, 220 to point 15. The accommodation distance is different from the convergence distance. As a result, there is an accommodation-vergence-divergence mismatch. Such a mismatch is considered undesirable and can cause discomfort to the user. The mismatch can be caused by distance (e.g., V d -A d ) and can be characterized in terms of diopters.

[0058] It should be understood that in some embodiments, a reference point other than the exit pupil of the eye 210, 220 may be used to determine the distance for determining accommodation-vergence mismatch, so long as the same reference point is used for accommodation distance and vergence distance. For example, the distance may be measured from the cornea to the depth plane, from the retina to the depth plane, from the eyepiece (e.g., a waveguide in a display device) to the depth plane, etc.

[0059] Without being limited by theory, it is believed that a user may still perceive an accommodation-vergence-divergence mismatch of up to about 0.25 diopters, up to about 0.33 diopters, and up to about 0.5 diopters as physiologically correct without the mismatch itself causing significant discomfort. In some embodiments, a display system disclosed herein (e.g., display system 250, FIG. 6 ) presents images to a viewer with an accommodation-vergence-divergence mismatch of about 0.5 diopters or less. In some other embodiments, the accommodation-vergence-divergence mismatch of images provided by the display system is about 0.33 diopters or less. In still other embodiments, the accommodation-vergence-divergence mismatch of images provided by the display system is about 0.25 diopters or less, including about 0.1 diopters or less.

[0060] FIG. 5 illustrates aspects of an approach for simulating a three-dimensional image by modifying wavefront divergence. The display system includes a waveguide 270 configured to receive light 770 encoded with image information and output the light to a user's eye 210. The waveguide 270 may output light 650 with a defined amount of wavefront divergence corresponding to the wavefront divergence of a light field generated by a point on a desired depth plane 240. In some embodiments, the same amount of wavefront divergence is provided for all objects presented on that depth plane. In addition, the user's other eye will be illustrated as being provided with image information from a similar waveguide.

[0061] In some embodiments, a single waveguide may be configured to output light with a set wavefront divergence corresponding to a single or limited number of depth planes, and / or the waveguide may be configured to output light of a limited range of wavelengths. As a result, in some embodiments, multiple or stacked waveguides may be utilized to provide different wavefront divergences for different depth planes and / or to output light of different ranges of wavelengths. It should be understood that, as used herein, a depth plane may be a plane or may follow the contour of a curved surface.

[0062] 6 illustrates an example of a waveguide stack for outputting image information to a user. Display system 250 includes a stack of waveguides or stacked waveguide assembly 260 that can be utilized to provide a three-dimensional perception to the eye / brain using multiple waveguides 270, 280, 290, 300, 310. It should be understood that display system 250 may be considered a light field display in some embodiments. Additionally, waveguide assembly 260 may also be referred to as an eyepiece.

[0063] In some embodiments, display system 250 may be configured to provide a substantially continuous cue for convergence and multiple discrete cues for accommodation. The cues for convergence may be provided by displaying different images to each of the user's eyes, and the cues for accommodation may be provided by outputting light that forms images with selectable discrete amounts of wavefront divergence. In other words, display system 250 may be configured to output light with variable levels of wavefront divergence. In some embodiments, each discrete level of wavefront divergence corresponds to a particular depth plane and may be provided by a particular one of waveguides 270, 280, 290, 300, and 310.

[0064] Continuing with reference to FIG. 6 , the waveguide assembly 260 may also include multiple features 320, 330, 340, 350 between the waveguides. In some embodiments, the features 320, 330, 340, 350 may be one or more lenses. The waveguides 270, 280, 290, 300, 310 and / or multiple lenses 320, 330, 340, 350 may be configured to transmit image information to the eye using various levels of wavefront curvature or ray divergence. Each waveguide level may be associated with a particular depth plane and configured to output image information corresponding to that depth plane. The image injection devices 360, 370, 380, 390, 400 may act as light sources for the waveguides and may be utilized to inject image information into the waveguides 270, 280, 290, 300, 310, each configured to distribute incident light across each individual waveguide for output toward the eye 210, as described herein. Light exits output surfaces 410, 420, 430, 440, 450 of the image injection devices 360, 370, 380, 390, 400 and is injected into corresponding input surfaces 460, 470, 480, 490, 500 of the waveguides 270, 280, 290, 300, 310. In some embodiments, each input surface 460, 470, 480, 490, 500 may be an edge of the corresponding waveguide or a portion of a major surface of the corresponding waveguide (i.e., one of the waveguide surfaces that directly faces the world 510 or the viewer's eye 210). In some embodiments, a single beam of light (e.g., a collimated beam) may be launched into each waveguide, outputting a cloned total field of collimated beams that are directed toward the eye 210 at a particular angle (and divergence) corresponding to the depth plane associated with the particular waveguide. In some embodiments, a single one of the image launch devices 360, 370, 380, 390, 400 may be associated with and launch light into multiple (e.g., three) waveguides 270, 280, 290, 300, 310.

[0065] In some embodiments, each of the image input devices 360, 370, 380, 390, 400 is a discrete display that generates image information for input into a corresponding waveguide 270, 280, 290, 300, 310. In some other embodiments, the image input devices 360, 370, 380, 390, 400 are the output of a single multiplexed display that may send image information to each of the image input devices 360, 370, 380, 390, 400 via, for example, one or more optical conduits (such as fiber optic cables). It should be understood that the image information provided by the image input devices 360, 370, 380, 390, 400 may include light of different wavelengths or colors (e.g., different primary colors, as discussed herein).

[0066] In some embodiments, light injected into the waveguides 270, 280, 290, 300, 310 is provided by a light projector system 520, which includes a light module 530, which may include a light emitter such as a light emitting diode (LED). Light from the light module 530 may be directed and modified by a light modulator 540, e.g., a spatial light modulator, via a beam splitter 550. The light modulator 540 may be configured to vary the perceived intensity of the light injected into the waveguides 270, 280, 290, 300, 310 and encode the light with image information. Examples of spatial light modulators include liquid crystal displays (LCDs), including liquid crystal on silicon (LCOS) displays. It should be understood that image injection devices 360, 370, 380, 390, 400 are illustrated diagrammatically, and in some embodiments, these image injection devices may represent light paths and locations within a common projection system configured to output light into associated ones of waveguides 270, 280, 290, 300, 310. In some embodiments, the waveguides of waveguide assembly 260 may function as ideal lenses, relaying light injected into the waveguides to the user's eye. In this concept, the object may be a spatial light modulator 540, and the image may be an image on a depth plane.

[0067] In some embodiments, the display system 250 may be a scanning fiber display comprising one or more scanning fibers configured to project light in various patterns (e.g., raster scan, spiral scan, Lissajous pattern, etc.) into one or more waveguides 270, 280, 290, 300, 310 and ultimately to the viewer's eye 210. In some embodiments, the illustrated image injection devices 360, 370, 380, 390, 400 may diagrammatically represent a single scanning fiber or a bundle of scanning fibers configured to inject light into one or more waveguides 270, 280, 290, 300, 310. In some other embodiments, the illustrated image injection devices 360, 370, 380, 390, 400 may diagrammatically represent multiple scanning fibers or multiple bundles of scanning fibers, each configured to inject light into an associated one of the waveguides 270, 280, 290, 300, 310. It should be understood that one or more optical fibers may be configured to transmit light from the optical module 530 to one or more waveguides 270, 280, 290, 300, 310. It should be understood that one or more intervening optical structures may be provided between the scanning fiber or fibers and one or more waveguides 270, 280, 290, 300, 310, for example, to redirect light exiting the scanning fiber into one or more waveguides 270, 280, 290, 300, 310.

[0068] Controller 560 controls the operation of one or more of stacked waveguide assemblies 260, including the operation of image input devices 360, 370, 380, 390, 400, light source 530, and light modulator 540. In some embodiments, controller 560 is part of local data processing module 140. Controller 560 contains programming (e.g., instructions in a non-transitory medium) that coordinates the timing and provisioning of image information to waveguides 270, 280, 290, 300, 310, for example, according to any of the various schemes disclosed herein. In some embodiments, the controller may be a single integrated device or a distributed system connected by wired or wireless communication channels. Controller 560 may, in some embodiments, be part of processing module 140 or 150 (FIG. 9D).

[0069] Continuing with reference to FIG. 6 , the waveguides 270, 280, 290, 300, and 310 may be configured to propagate light within each individual waveguide by total internal reflection (TIR). Each of the waveguides 270, 280, 290, 300, and 310 may be planar or have another shape (e.g., curved) with major top and bottom surfaces and edges extending between the major top and bottom surfaces. In the illustrated configuration, the waveguides 270, 280, 290, 300, and 310 may each include outcoupling optical elements 570, 580, 590, 600, and 610 configured to extract light from the waveguide by redirecting light propagating within each individual waveguide out of the waveguide and outputting image information to the eye 210. The extracted light may also be referred to as outcoupling light, and the outcoupling optical element light may also be referred to as a light extraction optical element. The extracted beam of light may be output by the waveguide at a location where light propagating within the waveguide strikes the light extraction optical element. The outcoupling optical element 570, 580, 590, 600, 610 may be a grating, for example, including diffractive optical features as discussed further herein. While shown disposed on the bottom major surface of the waveguides 270, 280, 290, 300, 310 for ease of explanation and clarity of the drawings, in some embodiments the outcoupling optical element 570, 580, 590, 600, 610 may be disposed on the top and / or bottom major surfaces and / or directly within the volume of the waveguides 270, 280, 290, 300, 310, as discussed further herein. In some embodiments, the outcoupling optical elements 570, 580, 590, 600, 610 may be formed within a layer of material that is attached to a transparent substrate and forms the waveguides 270, 280, 290, 300, 310. In some other embodiments, the waveguides 270, 280, 290, 300, 310 may be a monolithic piece of material, and the outcoupling optical elements 570, 580, 590, 600, 610 may be formed on and / or within that piece of material.

[0070] Continuing with reference to FIG. 6 , as discussed herein, each waveguide 270, 280, 290, 300, 310 is configured to output light and form an image corresponding to a particular depth plane. For example, the waveguide 270 closest to the eye may be configured to deliver collimated light (injected into such waveguide 270) to the eye 210. The collimated light may represent an optical infinity focal plane. The next upper waveguide 280 may be configured to send collimated light that passes through a first lens 350 (e.g., a negative lens) before reaching the eye 210. Such first lens 350 may be configured to generate a slight convex wavefront curvature so that the eye / brain interprets light emerging from the next upper waveguide 280 as emerging from a first focal plane closer inward from optical infinity toward the eye 210. Similarly, the third upper waveguide 290 passes its output light through both the first lens 350 and the second lens 340 before reaching the eye 210. The combined refractive power of the first lens 350 and the second lens 340 may be configured to produce another, increasing amount of wavefront curvature such that the eye / brain interprets the light emerging from the third waveguide 290 as originating from a second focal plane closer inward toward the person from optical infinity, which was the light from the next upper waveguide 280.

[0071] The other waveguide layers 300, 310 and lenses 330, 320 are similarly configured, with the highest waveguide 310 in the stack sending its output through all of the lenses between it and the eye for a collective focal power representing the focal plane closest to the person. To compensate for the stack of lenses 320, 330, 340, 350 when viewing / interpreting light originating from the world 510 on the other side of the stacked waveguide assembly 260, a compensating lens layer 620 may be placed on top of the stack to compensate for the collective power of the lower lens stacks 320, 330, 340, 350. Such a configuration provides as many perceived focal planes as there are available waveguide / lens pairs. Both the waveguide outcoupling optical elements and the focusing sides of the lenses may be static (i.e., not dynamic or electro-active). In some alternative embodiments, one or both may be dynamic using electro-active features.

[0072] In some embodiments, two or more of the waveguides 270, 280, 290, 300, 310 may have the same associated depth plane. For example, multiple waveguides 270, 280, 290, 300, 310 may be configured to output images set at the same depth plane, or multiple subsets of waveguides 270, 280, 290, 300, 310 may be configured to output images set at the same depth planes, with one set per depth plane. This may provide the advantage of forming tiled images to provide an extended field of view at those depth planes.

[0073] Continuing with reference to FIG. 6 , the outcoupling optical elements 570, 580, 590, 600, 610 may be configured to redirect light from their respective waveguides and output the light with an appropriate amount of divergence or collimation for the particular depth plane associated with the waveguide. As a result, waveguides with different associated depth planes may have differently configured outcoupling optical elements 570, 580, 590, 600, 610 that output light with different amounts of divergence depending on the associated depth plane. In some embodiments, the light-extracting optical elements 570, 580, 590, 600, 610 may be volume or surface features that may be configured to output light at specific angles. For example, the light-extracting optical elements 570, 580, 590, 600, 610 may be volume holograms, surface holograms, and / or diffraction gratings. In some embodiments, the features 320, 330, 340, 350 may not be lenses. Rather, they may simply be spacers (eg, cladding layers and / or structures to form an air gap).

[0074] In some embodiments, the outcoupling optical elements 570, 580, 590, 600, 610 are diffractive features or "diffractive optical elements" (also referred to herein as "DOEs") that form a diffraction pattern. Preferably, the DOEs have a sufficiently low diffraction efficiency so that only a portion of the light in the beam is deflected toward the eye 210 at each intersection of the DOE, while the remainder continues traveling through the waveguide via TIR. The light carrying the image information is thus split into several related output beams that exit the waveguide at various locations, resulting in a fairly uniform pattern of output emission toward the eye 210 for this particular collimated beam bouncing within the waveguide.

[0075] In some embodiments, one or more DOEs may be switchable between an "on" state in which they actively diffract and an "off" state in which they do not significantly diffract. For example, a switchable DOE may comprise a layer of polymer-dispersed liquid crystal in which microdroplets comprise a diffractive pattern in a host medium, and the refractive index of the microdroplets may be switched to substantially match the refractive index of the host material (in which case the pattern does not significantly diffract incident light), or the microdroplets may be switched to a refractive index that does not match that of the host medium (in which case the pattern actively diffracts incident light).

[0076] In some embodiments, a camera assembly 630 (e.g., a digital camera, including visible and infrared light cameras) may be provided to capture images of the eye 210 and / or tissue surrounding the eye 210, for example, to detect user input and / or monitor the physiological state of the user. As used herein, a camera may be any image capture device. In some embodiments, the camera assembly 630 may include an image capture device and a light source that projects light (e.g., infrared light) onto the eye, which may then be reflected by the eye and detected by the image capture device. In some embodiments, the camera assembly 630 may be mounted on the frame 80 (FIG. 9D) and may be in electrical communication with processing modules 140 and / or 150, which may process image information from the camera assembly 630. In some embodiments, one camera assembly 630 may be utilized per eye, monitoring each eye separately.

[0077] 7, an example of an output beam output by a waveguide is shown. While one waveguide is illustrated, it should be understood that other waveguides in waveguide assembly 260 (FIG. 6) may function similarly, and that waveguide assembly 260 includes multiple waveguides. Light 640 is launched into waveguide 270 at input surface 460 of waveguide 270 and propagates within waveguide 270 by TIR. At the point where light 640 impinges on DOE 570, a portion of the light exits the waveguide as output beam 650. Output beam 650 is illustrated as being approximately parallel, but may be redirected to propagate to eye 210 at an angle (e.g., forming a diverging output beam), as discussed herein and depending on the depth plane associated with waveguide 270. It should be understood that a nearly collimated exit beam may refer to a waveguide with outcoupling optics that outcouples light to form an image that appears to be set at a depth plane at a long distance (e.g., optical infinity) from the eye 210. Other waveguides or other sets of outcoupling optics may output a more divergent exit beam pattern, which would require the eye 210 to accommodate to a closer distance to focus on the retina and would be interpreted by the brain as light from a distance closer to the eye 210 than optical infinity.

[0078] In some embodiments, a full-color image may be formed at each depth plane by overlaying an image in each of the primary colors, for example, three or more primary colors. FIG. 8 illustrates an example of a stacked waveguide assembly, with each depth plane including an image formed using multiple different primary colors. The illustrated embodiment shows depth planes 240a-240f, but more or fewer depths are also contemplated. Each depth plane may have three or more primary color images associated with it, including a first image in a first color G, a second image in a second color R, and a third image in a third color B. Different depth planes are indicated in the diagram by different numbers for diopters (dpt) following the letters G, R, and B. By way of example only, the number following each of these letters indicates the diopter (1 / m), i.e., the inverse distance of the depth plane from the viewer, and each box in the diagram represents an individual primary color image. In some embodiments, the exact locations of the depth planes for different primary colors may be varied to account for differences in the eye's focusing of light of different wavelengths. For example, different primary color images for a given depth plane may be placed on depth planes corresponding to different distances from the user. Such an arrangement may increase visual acuity and user comfort and / or reduce chromatic aberrations.

[0079] In some embodiments, light for each primary color may be output by a single dedicated waveguide, such that each depth plane may have multiple waveguides associated with it. In such embodiments, each box in the diagram containing the letter G, R, or B may be understood to represent an individual waveguide, and three waveguides may be provided per depth plane, resulting in three primary color images per depth plane. While the waveguides associated with each depth plane are shown adjacent to each other in this drawing for ease of illustration, it should be understood that in a physical device, the waveguides may all be arranged in a stack with one waveguide per level. In some other embodiments, multiple primary colors may be output by the same waveguide, such that, for example, only a single waveguide may be provided per depth plane.

[0080] 8, in some embodiments, G is green, R is red, and B is blue. In some other embodiments, other colors associated with other wavelengths of light, including magenta and cyan, may be used in addition to or replace one or more of red, green, or blue.

[0081] It should be understood that references to a given color of light throughout this disclosure will be understood to encompass light of one or more wavelengths within the range of wavelengths of light that are perceived by a viewer to be of that given color. For example, red light may include one or more wavelengths of light within a range of about 620-780 nm, green light may include one or more wavelengths of light within a range of about 492-577 nm, and blue light may include one or more wavelengths of light within a range of about 435-493 nm.

[0082] In some embodiments, light source 530 (FIG. 6) may be configured to emit light at one or more wavelengths outside the range of a viewer's visual perception, e.g., infrared and / or ultraviolet wavelengths. Additionally, the waveguide incoupling, outcoupling, and other light redirecting structures of display 250 may be configured to direct and emit this light from the display toward the user's eye 210, e.g., for imaging and / or user stimulation applications.

[0083] Referring now to FIG. 9A , in some embodiments, light impinging on a waveguide may need to be redirected to incoupling the light into the waveguide. An incoupling optical element may be used to redirect and incoupling the light into its corresponding waveguide. FIG. 9A illustrates a cross-sectional side view of an example of a plurality or set 660 of stacked waveguides, each including an incoupling optical element. The waveguides may each be configured to output light of one or more different wavelengths or one or more different wavelength ranges. Stack 660 may correspond to stack 260 ( FIG. 6 ), and the illustrated waveguides of stack 660 may correspond to a portion of the plurality of waveguides 270, 280, 290, 300, 310, although it should be understood that light from one or more of image injection devices 360, 370, 380, 390, 400 is injected into the waveguide from a location requiring the light to be redirected for incoupling.

[0084] The illustrated set 660 of stacked waveguides includes waveguides 670, 680, and 690. Each waveguide includes an associated internal coupling optical element (which may also be referred to as the light input area on the waveguide), for example, internal coupling optical element 700 is disposed on a major surface (e.g., the top major surface) of waveguide 670, internal coupling optical element 710 is disposed on a major surface (e.g., the top major surface) of waveguide 680, and internal coupling optical element 720 is disposed on a major surface (e.g., the top major surface) of waveguide 690. In some embodiments, one or more of internal coupling optical elements 700, 710, 720 may be disposed on the bottom major surface of an individual waveguide 670, 680, 690 (particularly, one or more internal coupling optical elements are reflective polarizing optical elements). As shown, the internal coupling optical elements 700, 710, 720 may be disposed on the upper major surface of the respective waveguide 670, 680, 690 (or on top of the next lower waveguide), and in particular, the internal coupling optical elements are transmissive turning optical elements. In some embodiments, the internal coupling optical elements 700, 710, 720 may be disposed within the body of the respective waveguide 670, 680, 690. In some embodiments, as discussed herein, the internal coupling optical elements 700, 710, 720 are wavelength selective, such that they selectively redirect one or more wavelengths of light while transmitting other wavelengths of light. While illustrated on one side or corner of the respective waveguide 670, 680, 690, it should be understood that the internal coupling optical elements 700, 710, 720 may be disposed within other areas of the respective waveguide 670, 680, 690 in some embodiments.

[0085] As shown, the in-coupling optical elements 700, 710, 720 may be laterally offset from one another. In some embodiments, each in-coupling optical element may be offset to receive light without that light passing through another in-coupling optical element. For example, each in-coupling optical element 700, 710, 720 may be configured to receive light from a different image input device 360, 370, 380, 390, and 400, as shown in FIG. 6 , and may be separated (e.g., laterally spaced) from the other in-coupling optical elements 700, 710, 720 so as to receive substantially no light from others of the in-coupling optical elements 700, 710, 720.

[0086] Each waveguide also includes an associated optically dispersive element, for example, optically dispersive element 730 is disposed on a major surface (e.g., the top major surface) of waveguide 670, optically dispersive element 740 is disposed on a major surface (e.g., the top major surface) of waveguide 680, and optically dispersive element 750 is disposed on a major surface (e.g., the top major surface) of waveguide 690. In some other embodiments, optically dispersive elements 730, 740, 750 may be disposed on the bottom major surfaces of associated waveguides 670, 680, 690, respectively. In some other embodiments, optically dispersive elements 730, 740, 750 may be disposed on both the top and bottom major surfaces of associated waveguides 670, 680, 690, respectively, or optically dispersive elements 730, 740, 750 may be disposed on different ones of the top and bottom major surfaces in different associated waveguides 670, 680, 690, respectively.

[0087] Waveguides 670, 680, 690 may be spaced apart and separated, for example, by gas, liquid, and / or solid layers of material. For example, as shown, layer 760a may separate waveguides 670 and 680, and layer 760b may separate waveguides 680 and 690. In some embodiments, layers 760a and 760b are formed from a low refractive index material (i.e., a material having a lower refractive index than the material forming the immediately adjacent waveguides 670, 680, 690). Preferably, the refractive index of the material forming layers 760a, 760b is 0.05 or more or 0.10 or less than the refractive index of the material forming waveguides 670, 680, 690. Advantageously, the lower refractive index layers 760a, 760b may function as cladding layers that promote total internal reflection (TIR) ​​of light through the waveguides 670, 680, 690 (e.g., TIR between the top and bottom major surfaces of each waveguide). In some embodiments, the layers 760a, 760b are formed from air. Although not shown, it should be understood that the top and bottom of the illustrated set of waveguides 660 may include immediate cladding layers.

[0088] Preferably, for ease of manufacturing and other considerations, the materials forming waveguides 670, 680, 690 are similar or the same, and the materials forming layers 760a, 760b are similar or the same. In some embodiments, the materials forming waveguides 670, 680, 690 may differ between one or more waveguides, and / or the materials forming layers 760a, 760b may differ while still maintaining the various refractive index relationships discussed above.

[0089] 9A, light rays 770, 780, 790 enter the set of waveguides 660. It should be understood that light rays 770, 780, 790 may be injected into the waveguides 670, 680, 690 by one or more image injection devices 360, 370, 380, 390, 400 (FIG. 6).

[0090] In some embodiments, light rays 770, 780, 790 have different properties, e.g., different wavelengths or different wavelength ranges, which may correspond to different colors. Each of the incoupling optical elements 700, 710, 720 deflects incident light such that the light propagates through a respective one of the waveguides 670, 680, 690 by TIR. In some embodiments, each of the incoupling optical elements 700, 710, 720 selectively deflects one or more particular wavelengths of light while transmitting other wavelengths to the underlying waveguide and associated incoupling optical element.

[0091] For example, in-coupling optical element 700 may be configured to deflect light ray 770 having a first wavelength or wavelength range while transmitting light rays 780 and 790 having different second and third wavelengths or wavelength ranges, respectively. Transmitted light ray 780 impinges on and is deflected by in-coupling optical element 710, which is configured to deflect light of the second wavelength or wavelength range. Light ray 790 is deflected by in-coupling optical element 720, which is configured to selectively deflect light of the third wavelength or wavelength range.

[0092] 9A , the deflected light rays 770, 780, 790 are deflected to propagate through the corresponding waveguides 670, 680, 690. That is, the in-coupling optical element 700, 710, 720 of each waveguide deflects the light into its corresponding waveguide 670, 680, 690, in-coupling the light into the corresponding waveguide. The light rays 770, 780, 790 are deflected at an angle that causes the light to propagate through the respective waveguides 670, 680, 690 by TIR. The light rays 770, 780, 790 propagate through the respective waveguides 670, 680, 690 by TIR until they impinge on the waveguide's corresponding optical dispersive element 730, 740, 750.

[0093] 9B, a perspective view of the multiple stacked waveguide embodiment of FIG. 9A is illustrated. As described above, in-coupled light rays 770, 780, 790 are deflected by in-coupling optical elements 700, 710, 720, respectively, and then propagate by TIR within waveguides 670, 680, 690, respectively. Light rays 770, 780, 790 then impinge on optically dispersive elements 730, 740, 750, respectively. Optically dispersive elements 730, 740, 750 deflect light rays 770, 780, 790 to propagate toward out-coupling optical elements 800, 810, 820, respectively.

[0094] In some embodiments, the optically dispersive elements 730, 740, 750 are orthogonal pupil expanders (OPEs). In some embodiments, the OPEs deflect or disperse light into the out-coupling optical elements 800, 810, 820, and in some embodiments, may also increase the beam or spot size of this light as it propagates into the out-coupling optical elements. In some embodiments, the optically dispersive elements 730, 740, 750 may be omitted, and the in-coupling optical elements 700, 710, 720 may be configured to deflect light directly into the out-coupling optical elements 800, 810, 820. For example, with reference to FIG. 9A , the optically dispersive elements 730, 740, 750 may be replaced with the out-coupling optical elements 800, 810, 820, respectively. In some embodiments, the outcoupling optical elements 800, 810, 820 are exit pupils (EPs) or exit pupil expanders (EPEs) that direct light toward the viewer's eye 210 ( FIG. 7 ). It should be understood that an OPE may be configured to increase the size of the eyebox in at least one axis, and that the EPE may increase the eyebox in an axis that intersects the axis of the OPE, e.g., orthogonal to the axis of the OPE. For example, each OPE may be configured to redirect a portion of the light striking the OPE to an EPE of the same waveguide, while allowing the remaining portion of the light to continue propagating down the waveguide. Upon striking the OPE, again, another portion of the remaining light is redirected to the EPE, and the remainder of that portion continues to propagate further down the waveguide, etc. Similarly, upon striking the EPE, a portion of the impinging light is directed out of the waveguide toward the user, and the remaining portion of that light continues to propagate through the waveguide until it again strikes an EP, at which point another portion of the impinging light is directed out of the waveguide, etc. As a result, a single beam of internally coupled light may be "replicated" each time a portion of that light is redirected by an OPE or EPE, thereby forming a cloned beam field of light, as shown in Figure 6. In some embodiments, the OPE and / or EPE may be configured to modify the size of the beam of light.

[0095] 9A and 9B, in some embodiments, a waveguide set 660 includes, for each primary color, waveguides 670, 680, 690, in-coupling optical elements 700, 710, 720, optically dispersive elements (e.g., OPEs) 730, 740, 750, and out-coupling optical elements (e.g., EPs) 800, 810, 820. The waveguides 670, 680, 690 may be stacked with an air gap / cladding layer between each one. The in-coupling optical elements 700, 710, 720 redirect or deflect incident light into that waveguide (with different in-coupling optical elements receiving light of different wavelengths). The light then propagates at an angle that will result in TIR within the individual waveguides 670, 680, 690. In the example shown, light ray 770 (e.g., blue light) is deflected by the first in-coupling optical element 700 in the manner described above, then continues bouncing down the waveguide, interacting with the optically dispersive element (e.g., OPE) 730 and then the out-coupling optical element (e.g., EP) 800. Light rays 780 and 790 (e.g., green and red light, respectively) pass through the waveguide 670, with light ray 780 impinging on and being deflected by the in-coupling optical element 710. Light ray 780 will then, via TIR, bounce down the waveguide 680, to its optically dispersive element (e.g., OPE) 740 and then the out-coupling optical element (e.g., EP) 810. Finally, light ray 790 (e.g., red light) passes through the waveguide 690 and impinges on the optically in-coupling optical element 720 of the waveguide 690. The light in-coupling optical element 720 deflects the light ray 790 so that it propagates by TIR to the light dispersive element (e.g., OPE) 750 and then by TIR to the out-coupling optical element (e.g., EP) 820. The out-coupling optical element 820 then finally out-couples the light ray 790 to a viewer, who also receives out-coupled light from the other waveguides 670, 680.

[0096] FIG. 9C illustrates a top-down plan view of an example of the multiple stacked waveguides of FIGS. 9A and 9B. As shown, waveguides 670, 680, 690 may be vertically aligned, along with each waveguide's associated optically dispersive elements 730, 740, 750 and associated out-coupling optical elements 800, 810, 820. However, as discussed herein, the in-coupling optical elements 700, 710, 720 are not vertically aligned. Rather, the in-coupling optical elements are preferably non-overlapping (e.g., laterally spaced apart, as seen in the top-down view). As discussed further herein, this non-overlapping spatial arrangement facilitates the injection of light from different sources into different waveguides on a one-to-one basis, thereby allowing a specific light source to be uniquely coupled to a specific waveguide. In some embodiments, arrays including non-overlapping, spatially separated in-coupling optical elements may be referred to as shifted-pupil systems, and the in-coupling optical elements in these arrays may correspond to sub-pupils.

[0097] 9D illustrates an example of a wearable display system 60 into which the various waveguide and associated systems disclosed herein may be integrated. In some embodiments, the display system 60 is the system 250 of FIG. 6, which diagrammatically illustrates some portions of the system 60 in greater detail. For example, the waveguide assembly 260 of FIG. 6 may be part of the display 70.

[0098] Continuing with reference to FIG. 9D , display system 60 includes a display 70 and various mechanical and electronic modules and systems to support the functionality of the display 70. The display 70 may be coupled to a frame 80, which is wearable by a display system user or viewer 90 and configured to position the display 70 directly in front of the user's 90's eye. The display 70, in some embodiments, may be considered an eyepiece. In some embodiments, a speaker 100 is coupled to frame 80 and configured to be positioned adjacent to the user's 90 ear canal (in some embodiments, another speaker, not shown, may optionally be positioned adjacent the user's other ear canal to provide stereo / shapeable sound control). Display system 60 may also include one or more microphones 110 or other devices to detect sound. In some embodiments, the microphones are configured to allow a user to provide input or commands to system 60 (e.g., voice menu command selections, natural language queries, etc.) and / or enable audio communication with other persons (e.g., other users of similar display systems). The microphone may further be configured as an ambient sensor to collect audio data (e.g., sounds from the user and / or the environment). In some embodiments, the display system may also include an ambient sensor 120a, which may be separate from the frame 80 and mounted on the body of the user 90 (e.g., the head, torso, limbs, etc. of the user 90). The ambient sensor 120a, in some embodiments, may be configured to obtain data characterizing a physiological state of the user 90. For example, the sensor 120a may be an electrode.

[0099] 9D , display 70 is operably coupled to local data processing module 140 by a communication link 130, such as wired or wireless connectivity, which may be mounted in a variety of configurations, such as fixedly attached to frame 80, fixedly attached to a helmet or hat worn by the user, integrated into headphones, or otherwise removably attached to user 90 (e.g., in a backpack-style configuration, in a belt-linked configuration). Similarly, sensor 120a may be operably coupled to local processor and data module 140 by a communication link 120b, such as wired or wireless connectivity. Local processing and data module 140 may comprise a hardware processor and digital memory, such as non-volatile memory (e.g., flash memory or a hard disk drive), both of which may be utilized to aid in processing, caching, and storing data. Optionally, local processing and data module 140 may include one or more central processing units (CPUs), graphics processing units (GPUs), dedicated processing hardware, etc. The data may include a) data captured from sensors (such as image capture devices (cameras, etc.), microphones, inertial measurement units, accelerometers, compasses, GPS units, wireless devices, gyroscopes, and / or other sensors disclosed herein (e.g., which may be operatively coupled to frame 80 or otherwise attached to user 90)) and / or b) data obtained and / or processed using remote processing module 150 and / or remote data repository 160 (including data related to virtual content), possibly for processing or retrieval and then passing to display 70. Local processing and data module 140 may be operatively coupled to remote processing module 150 and remote data repository 160 by communication links 170, 180, such as via wired or wireless communication links, such that these remote modules 150, 160 are operatively coupled to each other and available as resources to local processing and data module 140.In some embodiments, local processing and data module 140 may include one or more of an image capture device, a microphone, an inertial measurement unit, an accelerometer, a compass, a GPS unit, a wireless device, and / or a gyroscope. In some other embodiments, one or more of these sensors may be mounted to frame 80 or may be a freestanding structure that communicates with local processing and data module 140 by a wired or wireless communication path.

[0100] 9D , in some embodiments, remote processing module 150 may comprise one or more processors configured to analyze and process data and / or image information, and may include, for example, one or more central processing units (CPUs), graphics processing units (GPUs), dedicated processing hardware, etc. In some embodiments, remote data repository 160 may comprise a digital data storage facility, which may be available through the Internet or other networking configuration in a “cloud” resource configuration. In some embodiments, remote data repository 160 may include one or more remote servers, which provide information, for example, information for generating augmented reality content, to local processing and data module 140 and / or remote processing module 150. In some embodiments, all data is stored and all computations are performed in the local processing and data module, allowing for fully autonomous use from the remote module. Optionally, an external system (e.g., one or more processors, one or more computer systems), including a CPU, GPU, etc., may perform at least a portion of the processing (e.g., generating image information, processing data) and provide information to and receive information from modules 140, 150, 160, e.g., via a wireless or wired connection. High-index waveguides and optical elements for displays adapted for wide field of view

[0101] Providing an immersive experience to users of waveguide-based display systems, such as the various translucent or transparent display systems configured for the virtual / augmented / composite display applications described above, relies, among other things, on various characteristics of the light coupling into the waveguides of the display systems described herein. For example, virtual / augmented / composite displays with relatively wide fields of view (FOV) can enhance the viewing experience. The FOV of a display depends on the angle of light output by the waveguide in the eyepiece, through which the viewer sees the projected image in their eye. The angle of light output from the waveguide may, in turn, depend, at least in part, on the range of angles that can be supported by the waveguide. As discussed above, an internal coupling optical element, such as an internal coupling grating, may be employed to couple light into the waveguide by altering the direction the light travels so that the light can propagate within the waveguide by total internal reflection. Generally, light within a finite range of angles can be coupled into the waveguide through an internal coupling optical element, such as a grating. The limited range of angles can be defined by a critical angle, which can depend, among other things, on the refractive index of the substrate material. Generally, a higher refractive index can result in a larger FOV. A smaller acceptance angle of light by the waveguide can also limit the range of angles output by the waveguide into the wearer's eye, thus potentially reducing the FOV for the wearer. A waveguide with a relatively high refractive index, for example, a refractive index of 2.0 or higher, can provide a relatively high FOV.

[0102] The diffraction grating can determine the efficiency of coupling light into a waveguide. However, a low-index diffraction grating may have low efficiency at grazing incidence angles, thereby reducing the effective FOV. Therefore, to efficiently couple light into a high-index waveguide, the diffractive optical coupling element should also have a correspondingly high refractive index. Below, diffraction gratings with relatively high refractive indices (e.g., >2.0), such as Li-based oxide-based diffraction gratings, and methods for fabricating the same are described, which can enable a relatively wide field of view (FOV).

[0103] For example, as described above with reference to Figures 6 and 7, display systems according to various embodiments described herein may include optical elements, such as an in-coupling optical element, an out-coupling optical element, and a light-dispersing element, which may include a diffraction grating. For example, as described above with reference to Figure 7, light 640 launched into waveguide 270 at input surface 460 of waveguide 270 propagates within waveguide 270 by total internal reflection (TIR). At the point where light 640 impinges on out-coupling optical element 570, a portion of the light exits the waveguide as beamlet 650. In some implementations, any of optical elements 570, 580, 590, 600, 610 can be configured as a diffraction grating.

[0104] To achieve desired properties for incoupling light into (or outcoupling light from) the waveguides 270, 280, 290, 300, 310, the optical elements 570, 580, 590, 600, 610 configured as diffraction gratings can be formed from suitable materials, such as photoresist or grating patterns integrated with a substrate, and have suitable structures to control various optical properties, including diffractive properties. Desirable diffractive properties include spectral selectivity, angular selectivity, polarization selectivity, high spectral bandwidth and high or graded diffraction efficiency, and wide field of view (FOV), among other properties.

[0105] To achieve one or more of these and other advantages, including a relatively large FOV, various embodiments described herein include a waveguide that includes a relatively high refractive index (e.g., greater than or equal to 2.0) material, such as a Li-based oxide, and has a separate diffraction grating formed thereon with a high refractive index corresponding to the Li-based oxide. For example, a diffraction grating may be formed directly on a Li-based oxide waveguide by patterning a surface portion on the waveguide formed from the Li-based oxide.

[0106] The diffraction grating is configured to diffract visible and / or infrared light incident thereon into the respective waveguides such that the light diffracted into the waveguides propagates within each of the waveguides, e.g., by total internal reflection (TIR). The diffraction grating is configured to diffract light into the respective waveguides when the light is incident thereon within a respective range of angles.

[0107] 10A illustrates a cross-sectional view of a portion of a display device 1000 comprising a high-index waveguide 1004 comprising a Li-based oxide and a high-index diffraction grating 1008 formed on the waveguide 1004, according to some embodiments. The diffraction grating 1008 is configured to diffract light such that the light is guided within the waveguide 1004 by TIR. The waveguide 1004 may correspond, for example, to one of the waveguides 670, 680, 690 described above with respect to FIGS. 9A-9C. The diffraction grating 1008 may correspond, for example, to an internal coupling optical element (700, 710, 720, FIGS. 9A-9C). Display device 1000 additionally includes optical elements such as, for example, light dispersive elements 730, 740, 750 (see FIGS. 9A-9C) or, for example, one of the outcoupling optical elements (800, 810, 820, see FIGS. 9A-9C).

[0108] In operation, when an incident light beam 1016, e.g., visible light, is incident on the Li-based oxide-comprising diffraction grating 1008 at an incident angle α measured with respect to a plane normal 1002 that is normal or orthogonal to the surface 1008S extending in the yx-plane, the Li-based oxide-comprising diffraction grating 1008 at least partially diffracts the incident light beam 1016 as a diffracted light beam 1024 at a diffraction angle θ measured with respect to the plane normal 1002, while at least partially transmitting the incident light as a transmitted light beam 1020. As described herein, as in the illustrated embodiment, a light beam incident at an angle in a clockwise direction with respect to the plane normal 1002 (i.e., to the right of the plane normal 1002) is said to have a negative α (α<0), while a light beam incident at an angle in a counterclockwise direction with respect to the plane normal 1002 (i.e., to the left of the plane normal) is said to have a positive α (α>0). The diffracted light beam 1024 passes through a critical angle θ due to the occurrence of total internal reflection within the waveguide 1004. TIR Upon diffracting at a diffraction angle θ greater than θ, the diffracted light beam 1024 propagates within the waveguide 1004 along the x-axis via total internal reflection (TIR) ​​until the diffracted light beam 1024 reaches, for example, one of the optical dispersive elements 730, 740, 750 or, for example, one of the outcoupling optical elements (800, 810, 820, FIGS. 9A-9C).

[0109] As described further elsewhere herein, a suitable combination of high refractive index material and grating 1008 structure may be selected to obtain a certain range of incident angles α (Δα), referred to herein as the range of acceptance angles or field of view (FOV). According to various embodiments, the Li-based oxide-containing grating 1008 and waveguide 1004 are arranged such that Δα is greater than 40 degrees (e.g., + / - 20 degrees), 60 degrees (e.g., + / - 30 degrees), 80 degrees (e.g., + / - 40 degrees), or 100 degrees (e.g., + / - 50 degrees), or within an angular range defined by any of these values, including symmetric and asymmetric ranges about the plane normal 1002, e.g., at 0 degrees. As described herein, the desired range Δα may be described by a range of angles spanning negative and / or positive values ​​of α, outside of which the diffraction efficiency drops by more than 10%, more than 25%, more than 50%, or more than 75% relative to the diffraction efficiency at α=0. Having Δα within a range in which the diffraction efficiency is relatively high and constant may be desirable, for example, if a uniform intensity of diffracted light is desired within Δα. Thus, Δα is the angle at which the incident light beam 1016 within Δα is oriented relative to the surface normal 1002 (e.g., in the yz plane) at an angle θ TIR is related to the angular bandwidth of the diffraction grating 1008 such that a diffraction angle θ greater than θ is efficiently diffracted by the diffraction grating 1008 and the diffracted light propagates within the waveguide 1004 under total internal reflection (TIR). It should be understood that Δα as described herein translates to the angle of reflection within the waveguide 1004 under total internal reflection, and ultimately the angle of coupling out of the waveguide, and therefore the field of view (FOV) experienced by the user.

[0110] In the following, in various embodiments, the diffraction grating 1008 is formed from a Li-based oxide with a relatively high refractive index (n), which may be, for example, greater than 2.0, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, or within any range defined by any of these values. According to various embodiments, n may be greater than, equal to, or less than the refractive index n of the waveguide 1004, which may be, for example, 1.5, 1.6, 1.7, 1.8, 1.9, 2.0, 2.1, 2.2, 2.3, 2.4, 2.5, or within a range defined by any of these values, e.g., n≧n. In some embodiments, the waveguide 1004 may correspond to, for example, waveguides 310, 300, 290, 280, and 270 (FIG. 6) and / or, for example, waveguides 670, 680, and 690 (FIGS. 9A-9C).

[0111] 10B and 10C schematically illustrate cross-sectional views of patterned Li-based oxide structures 1000A and 1000B, respectively, which may represent portions of a waveguide, having a diffraction grating 1008 (FIG. 10A) disposed thereon, comprising Li-based oxide.

[0112] 10B, in some embodiments, patterned Li-based oxide structure 1000A includes Li-based oxide features 1008A, such as lines, formed on substrate 1004A, which is formed from a material different from Li-based oxide features 1008A. For example, substrate 1004A can include silica glass (e.g., doped silica glass), silicon oxynitride, transition metal oxide (e.g., hafnium oxide, tantalum oxide, zirconium oxide, niobium oxide, lithium niobate, aluminum oxide (e.g., sapphire)), plastic, polymer-based, or other substantially optically transparent to visible light material having a suitable refractive index, e.g., as described above, different from the material of Li-based oxide features 1008A.

[0113] 10C , in some other embodiments, patterned Li-based oxide structure 1000B includes Li-based oxide feature 1008B and substrate 1004B, both of which include a Li-based oxide. In some embodiments, Li-based oxide structure 1000B includes Li-based oxide feature 1008B that is patterned directly into substrate 1004B, such that Li-based oxide feature 1008B and substrate 1004B form an article comprising a single component or a monolithically integrated structure. In these embodiments, Li-based oxide structure 1000B may be configured such that bulk Li-based oxide material is patterned in the surface region to form a grating, while Li-based oxide material below the grating may form a waveguide. In yet other embodiments, the bulk or substrate region and the surface region patterned to form Li-based oxide feature 1008B include different Li-based oxides. For example, the bulk Li-based oxide material patterned on the surface region to form Li-based oxide feature 1008B may be formed from a first Li-based oxide material, while the Li-based oxide material below Li-based oxide feature 1008B forming substrate 1004B or substrate region may be formed from a second Li-based oxide material that is different from the first Li-based oxide material.

[0114] 10B and 10C, according to various embodiments, the Li-based oxide features 1008A and 1008B have various dimensions when configured as a diffraction grating. For example, the Li-based oxide features 1008A, 1008B may have heights (H) of 5 nm to 10 nm, 10 nm to 50 nm, 50 nm to 100 nm, 100 nm to 150 nm, 150 nm to 200 nm, or 200 nm to 250 nm, according to embodiments. l), or a height within a range defined by any of these values. The Li-based oxide features 1008A, 1008B, according to various embodiments, are periodically repeated at a pitch of 100 nm to 200 nm, 200 nm to 300 nm, 300 nm to 400 nm, 400 nm to 500 nm, 500 nm to 600 nm, 600 nm to 700 nm, 700 nm to 800 nm, 800 nm to 900 nm, 900 nm to 1 μm, or any range defined by any of these values. The Li-based oxide features 1008A, 1008B, according to embodiments, are periodically repeated at a pitch of 100 nm to 200 nm, 200 nm to 300 nm, 300 nm to 400 nm, 400 nm to 500 nm, 500 nm to 600 nm, 600 nm to 700 nm, 700 nm to 800 nm, 800 nm to 900 nm, 900 nm to 1 μm, or any range defined by any of these values. l ) separated by intervals 1012 such that they periodically repeat with a duty cycle of 0.1-0.2, 0.2-0.3, 0.3-0.4, 0.4-0.5, 0.5-0.6, 0.6-0.7, 0.7-0.8, 0.8-0.9, or any value within the range defined by any of these values. The Li-based oxide features 1008A, 10008B have sidewall angles of approximately 70°, 75°, 80°, 85°, 89°, or any value within the range defined by these values. Values ​​outside these ranges are also possible.

[0115] According to various embodiments, when configured as an in-coupling optical element or an in-coupling diffraction grating, the Li-based oxide features 1008A, 1008B can diffractively couple incident light into the substrates 1004A, 1004B, which may be waveguides as described above, while when configured as out-coupling optical elements, the Li-based oxide features 1008A, 1008B can diffractively couple light out of the substrate 1004A, 1004B, which may be waveguides as described above, and can provide an increased field of view for a user.

[0116] It should be understood that the Li-based oxide features 1008A, 1008B can be configured as one of a variety of other structures, including fiducial markers, edge features, adhesive coatings, and spacers, to name a few. (Method for patterning lithium-based oxides)

[0117] As discussed above, a diffraction grating 1008 and a waveguide 1004 with a high refractive index can enable a display device with a wide field of view (FOV). A particularly suitable material is Li-based oxide, such as LiNbO. However, patterning Li-based oxides and fabricating periodic structures is challenging because some Li-based oxides, such as LiNbO, are relatively inert and difficult to pattern using conventional etching, such as plasma etching. As a result, techniques for patterning Li-based oxides often involve complex processes that can be slow and expensive to implement. While several etching processes for Li-based oxides using fluorine-containing plasmas to form volatile niobium fluoride species have been developed, the formation and redeposition of lithium fluoride (LiF) during etching can lead to various problems, including reduced etching rates, non-vertical sidewall profiles, and high sidewall roughness of the etched structures. Additionally, previous patterning techniques have been limited to forming relatively large feature sizes and / or structures with low feature densities. Furthermore, problems associated with LiF redeposition become even more pronounced when fabricating structures with relatively small feature sizes (e.g., less than 1 μm) and / or relatively high feature densities, such as patterned periodically repeating Li-based oxide structures that may be configured as diffraction gratings. This is because, as the spacing between adjacent features decreases and / or the aspect ratio of the space increases, the negative effects of LiF redeposition become more pronounced, particularly due to a decrease in the line-of-sight for LiF molecules to enter and escape. As a result, the resulting profile of the etched structure, e.g., a line, becomes increasingly irregular at small dimensions and / or higher feature densities. Recognizing these and other problems associated with patterning small and / or high-density Li-based oxide features, the inventors have developed methods according to various embodiments that are particularly suitable for forming periodically repeating patterned lithium (Li)-based oxide structures, e.g., diffraction grating structures, with relatively small feature sizes and periodicity.

[0118] FIG. 11 illustrates an overview of a method 1100 for fabricating patterned Li-based oxide structures 1000A, 1000B. Referring to FIG. 11, the method 1100 for fabricating patterned Li-based oxide structures 1000A, 1000B includes step 1104 of providing a substrate comprising a lithium-based oxide. The method additionally includes step 1108 of forming an etch mask pattern on the substrate, exposing regions of the substrate. When the etch mask pattern is used to form optical elements such as diffraction gratings, the etch mask pattern can periodically expose the underlying substrate. The method further includes step 1112 of plasma etching the exposed regions of the substrate, e.g., the periodically exposed regions of the substrate, to one or more etchants. The step of exposing the substrate to one or more etchants is performed in a plasma generated using a gas mixture including CHF under plasma etching conditions, such that the exposed regions of the substrate are etched, forming the patterned Li-based oxide structures. Thus, the patterned Li-based oxide structure can comprise Li-based oxide lines that are periodically repeated in the lateral direction. According to various embodiments, the patterned Li-based oxide features can include lines 1008A (FIG. 10B), 1008B (FIG. 10C) separated by spaces 1012 (FIGS. 10B, 10C) and periodically repeated in the lateral direction (e.g., x-direction), such that the resulting structure can be configured as a diffraction grating that can in-couple or out-couple light into or out of a waveguide by diffracting light incident thereon. In some embodiments, the Li-based oxide features can include patterns that are periodic in two directions (e.g., x-direction and y-direction). Further embodiments can include patterns with features with gradually increasing or decreasing spacing, height, line width, and shape to tailor the diffraction efficiency at various locations on the waveguide.

[0119] Below, aspects of a method 1100 (FIG. 11) for fabricating Li-based oxide structures 1000A (FIG. 10B), 1000B (FIG. 10C) are described in detail. According to some embodiments, the Li-based oxide of Li-based oxide features 1008A, 1008B and / or substrates 1004A, 1004B can be a lithium niobate (LiNbO)-based oxide. As described herein, it should be understood that LiNbO-based oxides can have stoichiometries that deviate from the exact stoichiometric value, so long as the resulting structure can function as a diffraction grating and / or waveguide, as disclosed herein. For example, as described herein, LiNbO-based oxides can have Li / (Li + Nb) ratios of 45%-55%, 47%-53%, 49%-51%, 49.5%-50.5%, or any range defined by any of these values. Values ​​outside these ranges are also possible. For example, because LiNbO, which has a stoichiometric composition, melts incongruently, while LiNbO melts congruently with respect to the non-stoichiometric composition Li / (Li+Nb) of about 48.6%, as grown, a single crystal of lithium niobate grown using a melt growth method such as the Czochralski (Cz) technique may have a lithium-deficient non-stoichiometric composition within the Li / (Li+Nb) ratio described above.

[0120] Additionally, as described herein, LiNbO3-based oxides can have intentional or unintentional defects associated with Li, Nb, or O, which can be impurities such as vacancies or dopants. For example, LiNbO3-based oxides can be doped with MgO, which can increase their resistance to optical damage. Other impurities with which LiNbO3-based oxides can be doped include Fe, Zn, Hf, Cu, Gd, Er, Y, Mn, and B, to name a few.

[0121] According to some other embodiments, the Li-based oxide of Li-based oxide features 1008A, 1008B and / or substrates 1004A, 1004B can be a lithium tantalate (LiTaO)-based oxide. It should be understood that, as described herein, LiTaO-based oxides can have stoichiometries that deviate from the exact stoichiometric value, as long as the resulting structure can function as a diffraction grating and / or waveguide, as disclosed herein. For example, as described herein, LiTaO-based oxides can have Li / (Li + Ta) ratios of 45%-55%, 47%-53%, 49%-51%, 49.5%-50.5%, or ratios within ranges defined by any of these values. Values ​​outside these ranges are also possible. Additionally, according to embodiments, LiTaO-based oxides can be doped with elements similar to those described above for LiNbO.

[0122] 12A-12C and 13A-13C illustrate forming an etch mask pattern 1220 for etching and forming the Li-based oxide structure described above. The etch mask pattern 1220, which may include lines 1220a, 1220b and exposed substrate areas therebetween, can be formed using suitable processes, including lithography processes (FIGS. 12A-12C) and nanoimprint processes (FIGS. 13A-13C), as described below. In some embodiments, as described with respect to FIGS. 12A-12C, forming the etch mask pattern 1220 may be performed by depositing a suitable blanket etch mask layer material, followed by patterning the etch mask layer using lithography and etching processes. In some other embodiments, as described with respect to FIGS. 13A-13C, forming the etch mask pattern 1220 may be performed by depositing a suitable blanket imprint mask layer, followed by patterning the imprint mask layer using nanoimprint techniques.

[0123] 12A-12C illustrate cross-sectional views of intermediate structures 1200A-1200C, respectively, at various stages of forming an etch mask pattern 1220 using a lithography process, according to an embodiment. Referring to intermediate structure 1200A of FIG. 12A, the method includes providing a substrate 1004, as described above. The method additionally includes forming a blanket etch mask layer 1208 over substrate 1004. The blanket etch mask layer 1208, once patterned, is adapted to serve as an etch mask that can be used to pattern a Li-based oxide structure, as described above with reference to FIGS. 10B and 10C.

[0124] In some embodiments, the blanket etch mask layer 1208 may be formed from a suitable material that serves as an etch mask for forming the Li-based oxide features 1008A, 1008B ( FIGS. 10B and 10C ). While many factors can determine the suitability of the material for the etch mask layer 1208, one such factor is the etch selectivity of the material of the blanket etch mask layer 1208 relative to the substrate 1004. The etch selectivity of the blanket etch mask layer 1208 relative to the substrate 1004 may be such that, due to a suitable thickness of the blanket etch mask layer 1208, at least a portion of the etch mask layer 1208 remains above the substrate 1004 in the masked areas after patterning. When the etch selectivity is suitably high and / or the etch depth is relatively small, the blanket etch mask layer 1208 may be formed from a polymer-based photoresist. When the blanket etch mask layer 1208 is formed from a photoresist layer, it may be deposited by spin coating, followed by a post-bake. However, embodiments are not so limited. Under some circumstances, a blanket etch mask layer 1208 formed from photoresist alone may not provide sufficient selectivity to the substrate 1004. For example, when the depth of the feature to be patterned is relatively thick, the etch mask layer 1208 may be subsequently removed until the desired depth of the etched feature is achieved. In these circumstances, a combination of photoresist and a hard mask layer may be used as the blanket etch mask layer 1208. Thus, in some embodiments, instead of a single layer of photoresist being used directly as the etch mask pattern 1220, the blanket etch mask layer 1208 may be formed as a stack of layers including a hard mask layer formed on the substrate 1004 and a photoresist layer formed on the hard mask layer. A suitable hard mask layer may have a lower etch rate compared to photoresist, thereby providing a higher etch selectivity of the substrate 1004 to the hard mask.In some embodiments, a suitable hard mask layer is SiO, to name a few. x , TiO x SiN x , and AlO x In some other embodiments, suitable hard mask layers include inorganic dielectric materials such as, for example, those of the formula [RSiO 3 / 2 ] n (R includes organic or inorganic groups such as hydrogen, alkyl, halide, or alkoxide, to name a few.) In yet some other embodiments, suitable hard mask layers include metals or alloys, including chromium, nickel, and copper, to name a few.

[0125] 12B , after deposition and post-deposition baking of blanket etch mask layer 1208, which may comprise a single layer or a stack of layers as described above, the method proceeds to selectively exposing portions of blanket etch mask layer 1208 to a pattern of light produced by photomask 1216. As shown, photomask 1216 can be a positive photomask adapted for positive photoresist and can be configured to pass light in areas where base polymer layer 1208 is to remain. When photomask 1216 is a negative photomask adapted for negative photoresist, the photomask can conversely be configured to pass light in areas where base polymer layer 1208 is to be removed.

[0126] Exposure to light 1212, e.g., coherent UV light, or an electron beam, causes chemical changes, e.g., polymer cross-linking, in blanket etch mask layer 1208, e.g., the photoresist of blanket etch mask layer 1208. The chemical changes, in turn, allow the exposed portions of blanket etch mask layer 1208 to be selectively removed using a developer solution for blanket etch mask layer 1208 that includes or acts as a positive photoresist, or allow the unexposed portions of etch mask layer 1208 to be selectively removed using a developer solution for blanket etch mask layer 1208 that includes or acts as a negative photoresist.

[0127] 12C , upon selectively removing portions of the blanket etch mask layer 1208, a resulting etch mask pattern 1220 remains on the substrate 1004, thereby serving as a template for subsequent patterning of surface regions of the substrate 1004. The etch mask pattern 1220 may include a set of etch mask lines 1220a, which may be periodically repeated in a first lateral direction, e.g., the x-direction, and elongated in a second lateral direction, e.g., the y-direction. Alternatively, or in addition, the etch mask pattern 1220 may include a set of etch mask lines 1220b, which may be periodically repeated in a second lateral direction, e.g., the y-direction, and elongated in the second direction, e.g., the x-direction. Etch mask lines elongated in other directions are also possible.

[0128] 13A-13C illustrate cross-sectional views of intermediate structures 1300A-1300C, respectively, at various stages of forming an etch mask pattern 1220 using a nanoimprint process. In the illustrated embodiment, the method of forming intermediate structure 1300A is similar to the method of forming intermediate structure 1200A of FIG. 12A. However, the methods of forming intermediate structures 1300B and 1300C of FIG. 13B and 13C, respectively, differ from the methods of forming intermediate structures 1200B and 1200C of FIG. 12B and 12C, respectively, and the differences are explained below.

[0129] 12B , instead of patterning the blanket etch mask layer 1208 by selectively exposing and removing portions thereof using light or an electron beam and a developer solution, in the illustrated embodiment, a nanoimprint template 1316 or nanoimprint mold having a predetermined topological pattern is brought into contact with the blanket etch mask layer 1208, according to which an etch mask pattern 1220 is formed. The template 1316 is then pressed into the blanket etch mask layer 1208, which may comprise, for example, a polymer that is thermoplastic at a temperature above the glass transition temperature of the blanket etch mask layer 1208, thereby transferring the pattern of the template 1316 into the softened blanket etch mask layer 1208, thereby forming the etch mask pattern 1220. After cooling, the template 1316 is separated from the etch mask pattern 1220, leaving etch mask features, such as lines 1220 a, 1220 b, on the substrate 1004. In one other approach, after being pressed into the base polymer layer 1208, the etch mask pattern 1208 is hardened by cross-linking under UV light.

[0130] After forming the etching mask pattern 1220, the intermediate structures 1200C (FIG. 12C), 1300C (FIG. 13C), according to an embodiment, are placed in a plasma reactor 1400 configured for gas-phase plasma processing. The plasma reactor 1400 comprises at least one electrode that can be excited to impart energy to gas-phase atoms or molecules above the surface of the intermediate structures 1200C, 1300C, generating a plasma.

[0131] The illustrated plasma reactor 1400 can be an inductively coupled plasma (ICP) reactive ion etching (RIE) reactor configured to generate a high-density plasma by inductively coupling plasma-generating ICP power from an RF antenna 1404 or coil to a volume of gas inside the reactor 1400. The RF antenna 1404, located adjacent to the plasma generation region, creates an alternating RF magnetic field and induces an RF electric field, which excites electrons, which are involved in the ionization of gas molecules and atoms at low pressure. A separate ion bias RF power supply 1408 can also be connected to the cathode or substrate to generate a DC bias and attract ions to the substrate. As configured, the ion current and ion energy applied to the substrate can be decoupled. Thus, the surface regions of the intermediate structures 1200C, 1300C can potentially be etched using a chemically reactive plasma under low-pressure conditions combined with ion-induced etching.

[0132] The reactor 1400 is configured to receive at least one gas species through one or more of the gas inlets 1412 connected to the reactor 1400 to generate a gas-phase plasma. The reactor is also connected to a vacuum pump to control the pressure inside the reactor. In particular, the reactor is configured to control the pressure inside the reactor and maintain a suitable partial pressure for all gas species. For example, the reactor may be configured to generate and maintain a plasma under subatmospheric and atmospheric conditions, for example, by controlling and maintaining a suitable pressure. After receiving at least one gas species through at least one of the gas inlets 1412, ICP power is applied by an RF antenna to the volume of gas above the surface of the substrate, thereby generating a plasma 1416.

[0133] Although the illustrated reactor 1400 is configured as an ICP RIE reactor, embodiments are not so limited, and other types of plasma generation can be employed. In some embodiments, the plasma reactor 1400 can be a capacitively coupled plasma (CCP) reactor, which can be a DC or AC plasma reactor in which DC or AC power, respectively, is applied between two electrodes to form a capacitively coupled plasma discharge. In embodiments in which the plasma reactor is a DC plasma reactor, the plasma reactor can be configured as a pulsed DC plasma reactor in which DC power can be applied in a pulsed manner. The pulsed DC voltage can be bipolar or unipolar. When bipolar, the DC voltage can be symmetrical or asymmetrical in amplitude at opposite polarities. DC or AC power can be applied through one or both of the two electrodes, which can be driven by the same or different power supplies. In some embodiments, the electrodes are each connected to a power supply, while in some other embodiments, only one of the two electrodes can be "active" while the other is electrically grounded or floating. In some other embodiments, when one of the two electrodes is "on" and receives pulsed DC or AC power, the other electrode can be placed under a bias, e.g., a DC bias, so that charged species can be accelerated toward the substrate. In still other embodiments, the electrodes can be driven using dual frequencies, with one of the electrodes driven at a higher RF frequency to provide power to the electrons and control the plasma density, while the other electrode is driven at a lower RF frequency to control ion bombardment of the substrate.

[0134] However, other types of plasma reactors are also possible, such as electron cyclotron resonance (ECR) plasma reactors, in which energy is supplied by an electric current produced by a time-varying magnetic field, which can, under some circumstances, increase the density of the plasma.

[0135] The exposed substrate regions of intermediate structures 1200C, 1300C are then etched in any one of the plasma reactor configurations described above, or using other configurations. Details of the etching parameters are described below with respect to FIG. 15, which illustrates intermediate structure 1500 during etching. Below, various etching conditions, according to embodiments, are described.

[0136] In some embodiments, prior to striking or generating the plasma 1416, the composition of the gas within the plasma reactor 1400 is adjusted by introducing one or more gases into the plasma reactor 1400 through one or more gas inlets 1412. In various embodiments, the mixture of gases within the generated plasma 1416 includes a fluorocarbon gas containing CHF and molecular hydrogen (H). In some embodiments, the volume of gas can additionally include an inert gas, such as He, Ar, Ne, and Xe, or a mixture thereof. In some embodiments, the mixture of gases consists essentially of H, CHF, and Ar. In various embodiments, the ratio of CHF to H in the gas mixture is within a range defined by any two of 10:1, 10:3, 10:5, 10:7, 10:10, 7:10, 5:10, 3:10, and 1:10, inclusive. In various embodiments, the inert gas in the gas mixture is within a range defined by any two of 10%, 30%, 50%, 70%, and 90% (inclusive). Values ​​outside these ranges are also possible. Without being bound by any theory, the gas mixture may be effective in reducing non-volatile LiF generation or redeposition, or both, on exposed surfaces, including the bottom and sidewall surfaces of the grooves, such that the resulting patterned Li-based oxide features, including lines 1008 separated by spaces 1012, are suitable as diffraction gratings that can in- or out-couple light incident thereon by diffracting it.

[0137] In some embodiments, the reactor 1400 can be maintained at a constant pressure during etching. Without being bound by any theory, a relatively low pressure can provide relatively high directionality of ions by increasing the mean free path, which can lead to a steeper sidewall profile. On the other hand, a relatively high pressure can increase the partial pressure and concentration of reactants, which can lead to an increased etch rate. The inventors have determined that a suitable balance can be achieved between the mean free path of ions and the availability of reactants to obtain a desired etch rate and profile. Depending on the specific process, according to various embodiments, the reactor 1400 can be maintained at a constant pressure within a range defined by any two of 1 mTorr, 10 mTorr, 20 mTorr, 30 mTorr, 40 mTorr, 50 mTorr, 60 mTorr, 70 mTorr, 80 mTorr, 90 mTorr, and 100 mTorr (inclusive). Values ​​outside these ranges are also possible.

[0138] Sufficient RF power is applied within the reactor 1400 to, among other things, provide a suitable plasma density. According to various embodiments, the plasma-generating ICP RF power delivered to the volume of gas above the substrate, for example, by the ICP RF antenna 1404 or coil 1404 illustrated in FIG. 14 , is within a range defined by any two of 50 W, 100 W, 200 W, 300 W, 400 W, 500 W, 600 W, 700 W, 800 W, 900 W, and 1000 W (inclusive). Values ​​outside these ranges are also possible. As discussed above, the plasma-generating ICP RF power can, among other things, control the plasma density. According to various embodiments, in addition to the plasma-generating ICP RF power, an ion bias RF power within a range defined by any two of 50 W, 100 W, 200 W, 300 W, 400 W, 500 W, 600 W, 700 W, 800 W, 900 W, and 1000 W (inclusive) may also be delivered to the cathode, for example, by the cathode RF power supply 1408 ( FIG. 14 ). Values ​​outside these ranges are also possible. As discussed above, the ion bias RF power can, among other things, control the energy of ions impinging on the substrate. The frequencies of the ICP RF power and the cathode RF power can be, for example, a tuned RF frequency of 13.56 MHz, or a tuned microwave frequency of 2.45 GHz, or other frequencies. The plasma-generating RF power and the ion bias RF power can vary the etch rate, individually or in combination. It should be understood that under some circumstances, a higher etch rate may lead to a lower etch selectivity to the etch mask layer.

[0139] The inventors have found that by controlling various reactor parameters, such as pressure, RF power, and gas flow rates / ratios, various etching parameters for controlling the LiF generation and / or redeposition rate and the resulting etching profile can be controlled. For example, as discussed above, various process parameters can affect the etching rate. By controlling one or more of these parameters, the etching rate can be controlled to a rate within a range defined by any two of 1 nm / min, 5 nm / min, 10 nm / min, 15 nm / min, 20 nm / min, 25 nm / min, and 30 nm / min (inclusive), according to embodiments. Values ​​outside these ranges are also possible. In addition, the etch selectivity, defined by the removal rate of the Li-based oxide to the removal rate of the etching mask layer, can be controlled to a ratio within a range defined by any two of 10:1, 5:1, 2:1, 1:1, 1:2, 1:5, and 1:10 (inclusive), according to embodiments. Values ​​outside these ranges are also possible.

[0140] The resulting intermediate structure 1500 is illustrated in FIG. 15. The intermediate structure 1500 includes Li-based oxide features 1008A, 1008B that are patterned using the etch mask feature 1220. The fabricated Li-based oxide features 1008a, 1008b therefore have various dimensions, as described above with respect to FIGS. 10B and 10C. The etch mask feature 1220 may then be removed using a suitable dry and / or wet process. For example, when the etch mask feature 1220 is formed from photoresist, the etch mask feature 1220 may be removed by a resist stripping or ashing process in which reactive oxygen or fluorine species, e.g., oxygen or fluorine free radicals, are used to form volatile gases and are pumped away. In some embodiments, the ashing or stripping process is performed at a relatively high temperature to remove the bulk of the photoresist, followed by a descum process used to remove residual photoresist within the trenches.

[0141] In some embodiments, the etch mask features 1220 are removed in-situ by a plasma generated in the reactor 1400 (FIG. 14). In some other embodiments, the etch mask features 1220 are removed in a separate tool in which, for example, oxidizing species such as reactive oxygen or fluorine species can be formed using a remote or downstream plasma generator.

[0142] In embodiments where etch mask feature 1220 comprises a hard mask under photoresist, after the photoresist is removed, the remaining hard mask layer may be removed using a suitable dry or wet removal process, depending on the hard mask material.

[0143] After removing the etch mask features 1220, the intermediate structure 1500 may be cleaned in a suitable wet cleaning solution. For example, the intermediate structure 1500 may be wet cleaned by immersion in a base piranha solution comprising a mixture of ammonium hydroxide, hydrogen peroxide, and water in a 2:2:1 ratio at room temperature for 15 minutes to 240 minutes or longer. (Example Process Conditions)

[0144] An experimental etch matrix, summarized in Table 1 below, was performed to illustrate the effect of various process parameters. [Table 1]

[0145] 16A-16D are cross-sectional scanning electron micrographs illustrating etch profiles obtained by etching a LiNbO substrate using a process recipe according to Examples 4-7 in Table 1, in which CFH and Ar, but not H, were flowed into the chamber during the etching process. In contrast, FIGS. 17, 18, and 19A illustrate cross-sectional etch profiles obtained by etching a LiNbO substrate using a process recipe according to Examples 1-3 in Table 1, in which CFH, Ar, and H were flowed into the chamber during the etching process. As illustrated by the cross-sectional etch profiles, the coexistence of CFH and H results in improved etch rate and selectivity.

[0146] 19B and 19C are top-down scanning electron micrographs illustrating the effect of wet cleaning an as-etched sample in base piranha solution. Figure 19B is a top-down scanning electron micrograph of the sample shown in Figure 19A before cleaning, and 19C is a top-down scanning electron micrograph of the sample shown in Figure 19B after cleaning. The removal of the white residue visible in Figure 19B demonstrates the effectiveness of the wet cleaning process using base piranha solution. Additional Examples Example 1 1. A method of fabricating a display device, comprising: providing a substrate including a lithium (Li)-based oxide; forming an etch mask pattern to expose areas of the substrate; plasma etching the exposed areas of the substrate using a gas mixture including CHF3 to form a diffractive optical element; Including, The method, wherein the diffractive optical element comprises Li-based oxide features configured to diffract visible light incident thereon. Example 2 10. The method of claim 1, wherein the diffractive optical element comprises a diffraction grating. Example 3 The method of any one of Examples 1 to 2, wherein the etching mask pattern periodically exposes the substrate such that the Li-based oxide features are periodically repeated in the lateral direction. Example 4 The method of any one of the preceding Examples, wherein the gas mixture further comprises H2 and an inert gas. Example 5 The method of any one of the preceding Examples, wherein the ratio of CHF3 to H2 in the gas mixture is in the range of 10:1 to 1:10. Example 6 The method of any one of the preceding Examples, wherein the inert gas in the gas mixture is in the range of 10% to 90% by volume, based on the total volume of the gas mixture. Example 7 The method of any one of the preceding Examples, wherein the gas mixture consists essentially of H2, CHF3, and Ar. Example 8 The method of any one of the preceding Examples, wherein plasma etching comprises etching at a rate in the range of 1 nm / min to 30 nm / min. Example 9 The method of any one of the preceding examples, wherein plasma etching comprises etching using a plasma generated by dual RF frequencies. Example 10 The method of any one of the preceding examples, wherein plasma etching comprises etching using a plasma generated by RF power in the range of 50 W to 500 W. Example 11 The method of any one of the preceding Examples, wherein plasma etching comprises etching in a reaction chamber at a pressure in the range of 10 mTorr to 50 mTorr. Example 12 The method of any one of the preceding Examples, wherein plasma etching comprises selectively etching the substrate relative to the etching mask pattern at an etch rate selectivity ratio in the range of 1:0.1 to 1:5. Example 13 10. The method of any one of the preceding examples, wherein forming the etching mask pattern comprises forming using lithographic techniques. Example 14 10. The method of any one of the preceding examples, wherein forming the etching mask pattern comprises forming using a nanoimprinting technique. Example 15 The method of any one of the preceding examples, wherein the etching mask pattern is formed from a photoresist, a dielectric material, a metal, or a synthetic material. Example 16 3. The method of any one of the preceding examples, wherein the etching mask pattern is formed from a metal or metal alloy. Example 17 The method of any one of the preceding examples, further comprising wet cleaning the substrate following plasma etching in a solution comprising ammonium hydroxide, hydrogen peroxide, and water. Example 18 The method of any one of the preceding Examples, wherein the Li-based oxide features have a refractive index greater than 2.0. Example 19 10. The method of any one of the preceding Examples, wherein the Li-based oxide feature comprises lithium niobate or lithium tantalate. Example 20 The method of any one of the preceding Examples, wherein the Li-based oxide features have a height in the range of 10 nm to 200 nm. Example 21 The method of any one of the preceding Examples, wherein the Li-based oxide features are periodically repeated with a pitch in the range of 200 nm to 1 μm. Example 22 10. The method of any one of the preceding Examples, wherein the Li-based oxide features a duty cycle in the range of 0.1 to 0.9. Example 23 The method of any one of the preceding examples, wherein forming a diffractive optical element comprises forming on a waveguide configured to guide visible light laterally. Example 24 The method of any one of the preceding examples, wherein forming a diffractive optical element comprises forming on a waveguide comprising a Li-based oxide. Example 25 10. The method of any one of the previous examples, wherein the diffractive optical element is formed on a substrate comprising a waveguide, the waveguide being integrated with the diffractive optical element as a monolithically integrated structure. Example 26 10. The method of any one of the preceding examples, wherein the diffractive optical element is formed on a waveguide, the waveguide comprising a material different from Li-based oxide. Example 27 The method of any one of the previous examples, wherein the diffractive optical element acts as an internal coupling element formed on a substrate that acts as a waveguide to couple light into the waveguide. Example 28 The method of any one of the previous examples, wherein the diffractive optical element acts as an out-coupling element formed on a substrate that acts as a waveguide for coupling light out of the waveguide. Example 29 10. The method of any one of the preceding examples, wherein the diffractive optical element is formed on a substrate comprising a waveguide configured to guide visible light, having any wavelength within the visible spectrum, that is in-coupled or out-coupled by the diffractive optical element. Example 30 10. The method of any one of the preceding examples, wherein the diffractive optical element is formed on a substrate comprising a waveguide configured to guide visible light inwardly coupled by or outwardly coupled through the diffractive optical element via total internal reflection. Example 31 1. A method of fabricating a display device, comprising: providing a substrate including a lithium (Li)-based oxide; forming an etch mask pattern comprising exposed areas of the substrate; plasma etching the exposed areas of the substrate using a gas mixture including CHF3 and H2 to form a patterned Li-based oxide structure; A method comprising: Example 32 The method of Example 31, wherein the ratio of CHF3 to H2 in the gas mixture is in the range of 10:1 to 1:10. Example 33 33. The method of claim 31 or 32, further comprising an inert gas in the gas mixture in the range of 10% to 90% of the total volume of the gas mixture. Example 34 The method of any one of Examples 31-33, wherein the plasma etching comprises etching at a rate of 1 nm / min to 30 nm / min. Example 35 The method of any one of Examples 31-34, wherein plasma etching comprises etching in an inductively coupled plasma reactor. Example 36 36. The method of any one of Examples 31-35, wherein the plasma etching comprises applying a plasma generated by inductive RF power in a range of 50 W to 500 W. Example 37 The method of any one of Examples 31-36, wherein the plasma etching further comprises applying RF power in a range of 50 W to 500 W to the substrate. Example 38 The method of any one of Examples 31-37, wherein plasma etching comprises etching in a reaction chamber at a pressure in the range of 10 mTorr to 50 mTorr. Example 39 The method of any one of Examples 31-38, wherein the plasma etching comprises selectively etching the substrate relative to the etching mask pattern at an etch rate selectivity ratio in the range of 1:0.1 to 0.1:1. Example 40 The method of any one of Examples 31-39, wherein the etching mask pattern periodically exposes regions of the substrate such that plasma etching forms a diffraction grating comprising Li-based oxide features that are periodically repeated in the lateral direction. Example 41 41. The method of embodiment 40, wherein the diffraction grating is formed on a substrate comprising a waveguide, the waveguide being integrated with the diffraction grating as a monolithic structure. Example 42 43. The method of any one of Examples 40-42, wherein the diffraction grating is formed on a waveguide, and the waveguide comprises a material different from a Li-based oxide. Example 43 43. The method of any one of Examples 40-42, wherein the diffraction grating comprises an internal coupling element or an external coupling element formed on a substrate comprising a waveguide. Example 44 The method of any one of Examples 40-43, wherein the diffraction grating is formed on a substrate comprising a waveguide configured to guide visible light, having a wavelength within the visible spectrum, that is in-coupled or out-coupled by the diffraction grating. Example 45 45. The method of any one of Examples 40-44, wherein the diffraction grating is formed on a substrate comprising a waveguide configured to guide visible light either in-coupled by the diffraction grating or out-coupled through it via total internal reflection. Example 46 The method of any one of Examples 31-39, wherein the patterned Li-based oxide structure comprises one or more of fiducial markers, edge features, an adhesion coating, and spacers. (Additional Considerations)

[0147] In the foregoing specification, the invention has been described with reference to specific embodiments thereof. It will, however, be apparent that various modifications and changes can be made therein without departing from the broader spirit and scope of the invention. The specification and drawings are, therefore, to be regarded in an illustrative rather than a restrictive sense.

[0148] Indeed, it should be understood that the systems and methods of the present disclosure each have several innovative aspects, no single one of which is solely responsible for or required for the desirable attributes disclosed herein. The various features and processes described above may be used independently of one another or may be combined in various ways. All possible combinations and subcombinations are intended to fall within the scope of the present disclosure.

[0149] Certain features described herein in the context of separate embodiments may also be implemented in combination in a single embodiment. Conversely, various features described in the context of a single embodiment may also be implemented in multiple embodiments separately or in any suitable subcombination. Furthermore, while features may be described above as operative in a combination and may even be initially claimed as such, one or more features from the claimed combination may, in some cases, be deleted from the combination, and the claimed combination may be directed to a subcombination or a variation of the subcombination. No single feature or group of features is required or essential to every embodiment.

[0150] It should be understood that conditional statements used herein, such as "can," "could," "might," "may," "eg," and the like, in particular, are generally intended to convey that certain embodiments include certain features, elements, and / or steps, while other embodiments do not, unless specifically stated otherwise or understood otherwise within the context as used. Thus, such conditional statements are generally not intended to agree that features, elements, and / or steps are in any way required for one or more embodiments, or that one or more embodiments necessarily include logic for determining whether those features, elements, and / or steps should be included or performed in any particular embodiment, with or without authorial input or prompting. The terms "comprising," "including," "having," and the like, are synonymous and used inclusively in a non-limiting manner and do not exclude additional elements, features, acts, operations, etc. Also, the term "or" is used in its inclusive sense (and not its exclusive sense); thus, for example, when used to connect a list of elements, the term "or" means one, some, or all of the elements in the list. Additionally, the articles "a," "an," and "the," as used in this application and the appended claims, should be interpreted to mean "one or more" or "at least one," unless otherwise specified. Similarly, while operations may be depicted in the figures in a particular order, it should be recognized that such operations need not be performed in the particular order shown, or in sequential order, or that all of the depicted operations need not be performed to achieve desirable results. Furthermore, the figures may diagrammatically depict one or more exemplary processes in the form of a flowchart. However, other operations not depicted may also be incorporated within the diagrammatically depicted exemplary methods and processes. For example, one or more additional operations may be performed before, after, concurrently with, or during any of the depicted operations.Additionally, operations may be rearranged or reordered in other embodiments. In some situations, multitasking and parallel processing may be advantageous. Furthermore, the separation of various system components in the above-described embodiments should not be understood as requiring such separation in all embodiments, and it should be understood that the described program components and systems may generally be integrated together in a single software product or packaged into multiple software products. Additionally, other implementations are within the scope of the following claims. In some cases, the actions recited in the claims can be performed in a different order and still achieve desirable results.

[0151] Thus, the claims are not intended to be limited to the embodiments shown herein but are to be accorded the widest scope consistent with the present disclosure, the principles and novel features disclosed herein.

Claims

1. 1. A method of fabricating a display device, the method comprising: providing a waveguide comprising a substrate including a lithium (Li)-based oxide; forming an etch mask pattern to expose areas of the substrate; CHF ３ and H ２ plasma etching the exposed areas of the substrate using a gas mixture consisting of an inert gas and an argon gas to form a diffractive optical element; Including, the diffractive optical element comprises Li-based oxide features configured to diffract visible light incident thereon; CHF in the gas mixture ３ Against H ２ The volume ratio of is in the range of 10:1 to 1:10, the inert gas in the gas mixture is in the range of 10% to 90% based on the total volume of the gas mixture; The method wherein the inert gas is Ar.

2. The method of claim 1 , wherein the diffractive optical element comprises a diffraction grating.

3. The method of claim 1 , wherein the etch mask pattern periodically exposes the substrate such that the Li-based oxide features are periodically repeated in a lateral direction.

4. The method of claim 1, wherein said plasma etching comprises etching at a rate between 1 nm / min and 30 nm / min.

5. The method of claim 1 , wherein the plasma etching comprises etching using a plasma generated by dual RF frequencies.

6. The method of claim 1 , wherein the plasma etching comprises etching using a plasma generated by RF power in the range of 50 W to 500 W.

7. 10. The method of claim 1, wherein said plasma etching comprises etching in a reaction chamber at a pressure between 10 mTorr and 50 mTorr.

8. 10. The method of claim 1, wherein said plasma etching comprises selectively etching said substrate with respect to said etch mask pattern at an etch rate selectivity ratio of 1:0.1 to 1:

5.

9. The method of any one of claims 1 to 8, wherein forming the etching mask pattern comprises forming using lithographic techniques.

10. The method of any one of claims 1 to 8, wherein forming the etching mask pattern comprises forming using a nanoimprint technique.

11. The method according to any one of claims 1 to 8, wherein the etching mask pattern is formed from a photoresist, a dielectric material, a metal, or a synthetic material.

12. The method according to any one of claims 1 to 8, wherein the etching mask pattern is formed from a metal or a metal alloy.

13. The method of any one of claims 1-8, further comprising wet cleaning the substrate following plasma etching in a solution comprising ammonium hydroxide, hydrogen peroxide, and water.

14. The method of any one of claims 1-8, wherein the Li-based oxide features have a refractive index greater than 2.

0.

15. The method of any one of claims 1-8, wherein the Li-based oxide feature comprises lithium niobate or lithium tantalate.

16. The method of any one of claims 1 to 8, wherein the Li-based oxide features have a height of between 10 nm and 200 nm.

17. The method of any one of claims 1 to 8, wherein the Li-based oxide features are periodically repeated with a pitch in the range of 200 nm to 1 μm.

18. The method of any one of claims 1 to 8, wherein the Li-based oxide feature has a duty cycle of 0.1 to 0.

9.

19. The method of any one of claims 1 to 8, wherein the waveguide is configured to guide visible light in a lateral direction transverse to the direction of the visible light.

20. The method of any one of claims 1-8, wherein the waveguide is integrated with the diffractive optical element as a monolithically integrated structure.

21. A method according to any one of claims 1 to 8, wherein the diffractive optical element serves as an internal coupling optical element formed on the substrate for coupling light into the waveguide.

22. The method of any one of claims 1 to 8, wherein the diffractive optical element serves as an outcoupling optical element formed on the substrate for coupling light out of the waveguide.

23. 9. The method of claim 1, wherein the diffractive optical element is formed on the substrate, and the waveguide is configured to guide visible light having any wavelength within the visible spectrum that is incoupled or outcoupled by the diffractive optical element.

24. 9. The method of claim 1, wherein the diffractive optical element is formed on the substrate, and the waveguide is configured to guide visible light in-coupled by or out-coupled through the diffractive optical element via total internal reflection.

25. 1. A method of fabricating a display device, the method comprising: providing a waveguide comprising a substrate including a lithium (Li)-based oxide; forming an etch mask pattern comprising exposed areas of the substrate; Inert gas and CHF ３ and H ２ plasma etching the exposed areas of the substrate using a gas mixture consisting of: Including, CHF in the gas mixture ３ Against H ２ The volume ratio of is in the range of 10:1 to 1:10, the inert gas in the gas mixture is in the range of 10% to 90% based on the total volume of the gas mixture; The method wherein the inert gas is Ar.

26. 26. The method of claim 25, wherein the plasma etching comprises etching at a rate between 1 nm / min and 30 nm / min.

27. 26. The method of claim 25, wherein the plasma etching comprises etching in an inductively coupled plasma reactor.

28. 26. The method of claim 25, wherein the plasma etching comprises applying a plasma generated by inductive RF power in the range of 50W to 500W.

29. 26. The method of claim 25, wherein the plasma etching further comprises applying RF power in the range of 50 W to 500 W to the substrate.

30. 26. The method of claim 25, wherein the plasma etching comprises etching in a reaction chamber at a pressure in the range of 10 mTorr to 50 mTorr.

31. 26. The method of claim 25, wherein said plasma etching comprises selectively etching said substrate relative to said etch mask pattern at an etch rate selectivity ratio in a range of 1:0.1 to 0.1:

1.

32. 26. The method of claim 25, wherein the etch mask pattern periodically exposes regions of the substrate such that the plasma etching forms a diffraction grating comprising laterally periodic Li-based oxide features.

33. 33. The method of claim 32, wherein the grating is formed on the substrate and the waveguide is integrated with the grating as a monolithic structure.

34. The method of any one of claims 32-33, wherein the diffraction grating comprises an in-coupling or out-coupling optical element formed on the substrate.

35. 34. The method of any one of claims 32-33, wherein the diffraction grating is formed on the substrate, and the waveguide is configured to guide visible light having wavelengths within the visible spectrum that are incoupled or outcoupled by the diffraction grating.

36. 34. The method of any one of claims 32-33, wherein the diffraction grating is formed on the substrate, and the waveguide is configured to guide visible light incoupled by or outcoupled through the diffraction grating via total internal reflection.

37. 26. The method of claim 25, wherein the patterned Li-based oxide structure comprises one or more of fiducial markers, edge features, an adhesion coating, and spacers.

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