Optical sensor and manufacturing method

Abstract

To provide an optical sensor that secures the accuracy of adjustment of an optical axis.SOLUTION: An optical sensor comprises: a light projection light source module 22 that has a light projection position face 222 and projects a light projection bream Bp from a light-emitting face 226; a light projection lens module 26 that has a light projection bonded face 264 bonded to the light projection light source module 22 and guides the light projection beam Bp from the light projection light source module 22 to the outside along a light projection optical axis Op; and a sensor base 14 that determines the position of the light projection position face 222 along a Y-axis and has a light projection base face 142. When a light projection adjustment direction Dp orthogonal to an X-axis is assumed to run along the light projection adhesive face 264, an optical center Cp of the light-emitting face 226 in the light projection light source module 22 deviates in the light projection adjustment direction Dp with respect to a main point Pp of the light projection lens module 26, and thereby the light projection optical axis Op on an XY plane orthogonal to the light projection base face 142 is adjusted.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present disclosure relates to optical sensors and methods for manufacturing the same. [Background technology]

[0002] Conventionally, optical sensors that detect the outside world by projecting a light projection beam toward the outside world and receiving a beam reflected from the outside world have been widely known. In a technology disclosed in Patent Document 1 as an optical sensor of this type, the attitude of an optical axis of a lens module that guides the light projection beam from a light source module to the outside world is adjusted relative to a light source module that generates the light projection beam. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2017-3938 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the technology disclosed in Patent Document 1, the lens module is aligned with the light source module in only three axial directions. With this type of alignment technology, it is difficult to accommodate manufacturing tolerances such as tilt within each module and between modules, which limits the accuracy of optical axis adjustment.

[0005] In view of the above, an object of the present disclosure is to provide an optical sensor that ensures high accuracy in adjusting the optical axis, and a method for manufacturing the same. [Means for solving the problem]

[0006] The technical means of the present disclosure for solving the problems will be described below. Note that the claims and the reference characters in parentheses in this section indicate the correspondence with the specific means described in the embodiments described later in detail, and do not limit the technical scope of the present disclosure.

[0007] A first aspect of the present disclosure is An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) that is reflected from the outside world in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting a light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding a light projection beam from the light projection light source module to the outside along a light projection optical axis (Op); a sensor base (14) having a light projection base surface (142) that positions the light projection positioning surface along the Y axis; If the projection adjustment direction (Dp) perpendicular to the X axis is assumed to be along the projection adhesive surface, By displacing the optical center (Cp) of the light-emitting surface of the light projecting light source module in the direction of light projection adjustment relative to the principal point (Pp) of the light projecting lens module, the light projection optical axis is adjusted to the XZ plane perpendicular to the light projection base surface in the three-dimensional coordinate system.

[0008] A second aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the first aspect, comprising: Measuring the attitude angle deviation (ωp) around the X axis of the projection positioning surface relative to the projection bonding surface in a focused state of the projection beam; bonding the light-projection bonding surface of the light projection lens module to the light projection light source module in a state in which the optical center (Cp) of the light-emitting surface is displaced in the light-projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the attitude angle deviation; and fixing the light projection positioning surface of the light projection light source module bonded to the light projection lens module to the sensor base by positioning the light projection base surface.

[0009] As described above, in the first and second aspects, the light projection positioning surface of the light projection light source module adhered to the light projection adhesive surface of the light projector lens module is positioned along the Y axis by the light projection base surface of the sensor base. Therefore, according to the first and second aspects, the optical center of the light-emitting surface of the light projection light source module is displaced along the light projection adhesive surface in the light projection adjustment direction perpendicular to the X axis relative to the principal point of the light projector lens module, thereby adjusting the light projection optical axis to the XZ plane perpendicular to the light projection base surface. This displacement configuration allows the light projection optical axis to be adjusted to match the XZ plane while accommodating manufacturing tolerances, including tilt within each module and between modules. This makes it possible to ensure the adjustment precision of the light projection optical axis.

[0010] Furthermore, in a second aspect, in the light projector light source module to which the light projector adhesive surface of the light projector lens module is adhered, the light projector positioning surface is positioned by the light projector base surface and fixed to the sensor base. Therefore, according to the second aspect, the modules are adhered to each other before being fixed to the sensor base in a state in which the optical center of the light-emitting surface is displaced in the light projection adjustment direction relative to the principal point of the light projector lens module by an amount of displacement that correlates with a measurement value that measures the attitude angle deviation around the X-axis of the light projector positioning surface relative to the light projector adhesive surface. In other words, the attitude angle deviation of the light projector positioning surface relative to the light projector adhesive surface can be an appropriate angle that corresponds to the amount of displacement for forming a light projector optical axis aligned with the XZ plane. Therefore, it is possible to adjust the light projector optical axis with high precision.

[0011] A third aspect of the present disclosure is the optical sensor of the first aspect, a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving a reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding a reflected beam from the outside world side to the light-receiving detection module side along a light-receiving optical axis (Or); the sensor base has a light-receiving base surface (144) that positions the light-receiving positioning surface along the Y-axis; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, By displacing the optical center (Cr) of the detection surface of the light receiving detection module in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, the light receiving optical axis is adjusted to the XZ plane perpendicular to the light receiving base surface in the three-dimensional coordinate system.

[0012] A fourth aspect of the present disclosure is An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) that is reflected from the outside world in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving a reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding a reflected beam from the outside to the light-receiving detection module along a light-receiving optical axis (Or); a sensor base (14) having a light-receiving base surface (144) that positions the light-receiving positioning surface along the Y-axis; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, By displacing the optical center (Cr) of the detection surface of the light receiving detection module in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, the light receiving optical axis is adjusted to the XZ plane perpendicular to the light receiving base surface in the three-dimensional coordinate system.

[0013] A fifth aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the third or fourth aspect, comprising: Measuring the attitude angle deviation (ωr) around the X axis of the light receiving positioning surface relative to the light receiving adhesive surface in a focused state of the reflected beam; Adhering the light-receiving adhesive surface of the light-receiving lens module to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the attitude angle deviation; and fixing the light-receiving lens module to the sensor base by positioning the light-receiving positioning surface of the bonded light-receiving detection module with the light-receiving base surface.

[0014] In these third to fifth aspects, the light-receiving positioning surface of the light-receiving detection module adhered to the light-receiving adhesive surface of the light-receiving lens module is positioned along the Y-axis by the light-receiving base surface of the sensor base. Therefore, according to the third to fifth aspects, the optical center of the detection surface of the light-receiving detection module is displaced along the light-receiving adhesive surface in the light-receiving adjustment direction perpendicular to the X-axis relative to the principal point of the light-receiving lens module, thereby adjusting the light-receiving optical axis to the XZ plane perpendicular to the light-receiving base surface. This displacement configuration allows the light-receiving optical axis to be adjusted to match the XZ plane while accommodating manufacturing tolerances, including tilt within each module and between modules. This makes it possible to ensure the adjustment precision of the light-receiving optical axis.

[0015] Furthermore, in a fifth aspect, in a light receiving detection module to which the light receiving adhesive surface of the light receiving lens module is adhered, the light receiving positioning surface is positioned by the light receiving base surface and fixed to the sensor base. Therefore, according to the fifth aspect, the modules are adhered to each other before being fixed to the sensor base in a state in which the optical center of the detection surface is displaced in the light receiving adjustment direction relative to the principal point of the light receiving lens module by an amount of displacement correlated to a measured value of the attitude angle deviation about the X-axis of the light receiving positioning surface relative to the light receiving adhesive surface. In other words, the attitude angle deviation of the light receiving positioning surface relative to the light receiving adhesive surface can be an appropriate angle corresponding to the amount of displacement for forming a light receiving optical axis aligned with the XZ plane. Therefore, it is possible to adjust the light receiving optical axis with high precision.

[0016] A sixth aspect of the present disclosure is An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) that is reflected from the outside world in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting a light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding a light projection beam from the light projection light source module to the outside along a light projection optical axis (Op); a sensor base (14) having a light projection base surface (142) along the Y axis for positioning the light projection positioning surface; If the projection adjustment direction (Dp) perpendicular to the X axis is assumed to be along the projection adhesive surface, By displacing the optical center (Cp) of the light-emitting surface of the light projecting light source module in the direction of light projection adjustment relative to the principal point (Pp) of the light projecting lens module, the light projection optical axis is adjusted to be on the light projection reference plane (Lp) that is perpendicular to the YZ plane in the three-dimensional coordinate system.

[0017] In the sixth aspect, the projection positioning surface of the light projection light source module bonded to the light projection adhesive surface of the light projector lens module is positioned by the light projection base surface of the sensor base along the Y axis. Therefore, according to the sixth aspect, the optical center of the light-emitting surface of the light projection light source module is displaced along the light projection adhesive surface in the light projection adjustment direction perpendicular to the X axis relative to the principal point of the light projector lens module, thereby adjusting the light projection optical axis to a light projection reference plane perpendicular to the YZ plane. This displacement configuration allows the light projection optical axis to be adjusted to match the light projection reference plane while accommodating manufacturing tolerances, including tilt within each module and between modules. This makes it possible to ensure the adjustment precision of the light projection optical axis.

[0018] A seventh aspect of the present disclosure is the optical sensor of the sixth aspect, a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving a reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding a reflected beam from the outside world side to the light-receiving detection module side along a light-receiving optical axis (Or); The sensor base has a light receiving base surface (144) that positions the light receiving positioning surface along the Y axis; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, By displacing the optical center (Cr) of the detection surface of the light receiving detection module in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, the light receiving optical axis is adjusted to the light receiving reference plane (Lr) that is perpendicular to the YZ plane in the three-dimensional coordinate system.

[0019] An eighth aspect of the present disclosure is An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) that is reflected from the outside world in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving a reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding a reflected beam from the outside to the light-receiving detection module along a light-receiving optical axis (Or); a sensor base (14) having a light receiving base surface (144) along the Y axis that positions the light receiving positioning surface; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, By displacing the optical center (Cr) of the detection surface of the light receiving detection module in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, the light receiving optical axis is adjusted to the light receiving reference plane (Lr) that is perpendicular to the YZ plane in the three-dimensional coordinate system.

[0020] In the seventh and eighth aspects, the light-receiving positioning surface of the light-receiving detection module adhered to the light-receiving adhesive surface of the light-receiving lens module is positioned by the light-receiving base surface of the sensor base along the Y axis. Therefore, according to the seventh and eighth aspects, the optical center of the detection surface of the light-receiving detection module is displaced along the light-receiving adhesive surface in the light-receiving adjustment direction perpendicular to the X axis relative to the principal point of the light-receiving lens module, thereby adjusting the light-receiving optical axis to a light-receiving reference plane perpendicular to the YZ plane. This displacement configuration allows the light-receiving optical axis to be adjusted to match the light-receiving reference plane while accommodating manufacturing tolerances, including tilt within each module and between modules. This makes it possible to ensure the adjustment accuracy of the light-receiving optical axis.

[0021] A ninth aspect of the present disclosure is the optical sensor of the seventh aspect, A positioning shim (3411, 4211) is provided which is interposed in at least one of the light projection positioning location between the light projection positioning surface and the light projection base surface and the light reception positioning location between the light reception positioning surface and the light reception base surface so that the light projection optical axis and the light reception optical axis are aligned with each other in a three-dimensional coordinate system.

[0022] In this way, in the ninth aspect, a positioning shim is interposed in at least one of the light-projecting positioning location between the light-projecting positioning surface and the light-projecting base surface and the light-receiving positioning location between the light-receiving positioning surface and the light-receiving base surface. This allows the directions of the optical axes to be aligned with each other, absorbing the manufacturing tolerances, even if an error angle occurs in the light-projecting optical axis and / or the light-receiving optical axis due to manufacturing tolerances of the offset configuration caused by cure shrinkage during bonding. Therefore, it is possible to ensure the adjustment precision of the light-projecting optical axis and the light-receiving optical axis relative to each other.

[0023] A tenth aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the ninth aspect, Measuring the projection attitude angle deviation (ωp) around the X axis of the projection positioning surface relative to the projection bonding surface in a focused state of the projection beam; bonding, via a light projection adhesive (210), a light projection adhesive surface of the light projection lens module to a light projection light source module in a state in which the optical center (Cp) of the light emitting surface is displaced in the light projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light projection attitude angle deviation; measuring a projection error angle (δψp) occurring in a three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by hardening of the projection adhesive; Measuring the light receiving attitude angle deviation (ωr) around the X axis of the light receiving positioning surface relative to the light receiving adhesive surface in a focused state of the reflected beam; Adhering the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to a light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measured value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) occurring in a three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; Adjusting the wedge angle (ρr) of the light-receiving positioning shim (3411), which is a positioning shim interposed at the light-receiving positioning location so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other, in accordance with the correlation between the light-projecting error angle and the light-receiving error angle; and fixing the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded to the sensor base by directly positioning the light projection positioning surface by the light projection base surface. and fixing the light-receiving lens module to the sensor base by positioning the light-receiving positioning surface of the bonded light-receiving detection module with the light-receiving base surface via a light-receiving positioning shim.

[0024] In the tenth aspect, the modules are bonded together in a state of a deviation configuration in which the optical center of the light-emitting surface is displaced in the light-projection adjustment direction relative to the principal point of the light-projecting lens module by an amount of deviation correlated to a measurement value obtained by measuring the light-projection attitude angle deviation according to the second aspect. At the same time, in the tenth aspect, the modules are bonded together in a state of a deviation configuration in which the optical center of the detection surface is displaced in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an amount of deviation correlated to a measurement value obtained by measuring the light-receiving attitude angle deviation according to the fifth aspect.

[0025] However, in the tenth aspect, even if a light-projection error angle corresponding to a manufacturing tolerance due to cure shrinkage of the light-projection adhesive occurs in the light-projection optical axis of the light-projection lens module bonded to the light-projection light source module by the hardening of the light-projection adhesive, it can be measured. At the same time, even if a light-receiving error angle corresponding to a manufacturing tolerance due to cure shrinkage of the light-receiving adhesive occurs in the light-receiving optical axis of the light-receiving lens module bonded to the light-receiving detection module by the hardening of the light-receiving adhesive, it can be measured. From these facts, in order to align the directions of the light-projection optical axis and the light-receiving optical axis with each other, the wedge angle of the light-receiving positioning shim can be accurately adjusted according to the correlation between the light-projection error angle and the light-receiving error angle.

[0026] According to the tenth aspect, the light-projecting positioning surface is directly positioned and fixed by the light-projecting base surface, while the light-receiving positioning surface is positioned and fixed by the light-receiving base surface via a light-receiving positioning shim. This makes it possible to ensure the adjustment accuracy of the light-projecting optical axis and the light-receiving optical axis by aligning the optical axes.

[0027] An eleventh aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the ninth aspect, Measuring the projection attitude angle deviation (ωp) around the X axis of the projection positioning surface relative to the projection bonding surface in a focused state of the projection beam; bonding, via a light projection adhesive (210), a light projection adhesive surface of the light projection lens module to a light projection light source module in a state in which the optical center (Cp) of the light emitting surface is displaced in the light projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light projection attitude angle deviation; measuring a projection error angle (δψp) occurring in a three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by hardening of the projection adhesive; Measuring the light receiving attitude angle deviation (ωr) around the X axis of the light receiving positioning surface relative to the light receiving adhesive surface in a focused state of the reflected beam; Adhering the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to a light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measured value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) occurring in a three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; Adjusting the wedge angle (ρp) of the light-projection positioning shim (4211), which is a positioning shim interposed at the light-projection positioning location so that the light-projection optical axis and the light-reception optical axis are aligned with each other, in accordance with the correlation between the light-projection error angle and the light-reception error angle; a projection positioning surface of the projection light source module to which the projection lens module is bonded is positioned by a projection base surface via a projection positioning shim, and the projection lens module is fixed to the sensor base; and fixing the light-receiving positioning surface of the bonded light-receiving detection module of the light-receiving lens module to the sensor base by directly positioning it with the light-receiving base surface.

[0028] In the eleventh aspect, the modules are bonded together in a state of a displacement configuration in which the optical center of the light-emitting surface is displaced in the light-projection adjustment direction relative to the principal point of the projector lens module by an amount of displacement that correlates with the measurement value obtained by measuring the attitude angle deviation according to the second aspect. At the same time, in the eleventh aspect, the modules are bonded together in a state of a displacement configuration in which the optical center of the detection surface is displaced in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an amount of displacement that correlates with the measurement value obtained by measuring the attitude angle deviation according to the fifth aspect.

[0029] However, in the eleventh aspect, the light-projection error angle can be measured even if it occurs in the light-projecting optical axis of the light-projecting lens module bonded to the light-projecting light source module due to the hardening shrinkage of the light-projecting adhesive. At the same time, the light-receiving error angle can be measured even if it occurs in the light-receiving optical axis of the light-receiving lens module bonded to the light-receiving detection module due to the hardening shrinkage of the light-receiving adhesive. From these facts, in order to align the directions of the light-projecting optical axis and the light-receiving optical axis with each other, the wedge angle of the light-projection positioning shim can be accurately adjusted according to the correlation between the light-projection error angle and the light-receiving error angle.

[0030] According to the eleventh aspect, the light-receiving positioning surface is directly positioned and fixed by the light-receiving base surface, while the light-projecting positioning surface is positioned and fixed by the light-projecting base surface via a light-projecting positioning shim, thereby ensuring the adjustment accuracy of the light-projecting optical axis and the light-receiving optical axis by matching the optical axis directions with each other.

[0031] A twelfth aspect of the present disclosure is a manufacturing method for manufacturing the optical sensor of the ninth aspect, comprising: Measuring the projection attitude angle deviation (ωp) around the X axis of the projection positioning surface relative to the projection bonding surface in a focused state of the projection beam; bonding, via a light projection adhesive (210), a light projection adhesive surface of the light projection lens module to a light projection light source module in a state in which the optical center (Cp) of the light emitting surface is displaced in the light projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light projection attitude angle deviation; measuring a projection error angle (δψp) occurring in a three-dimensional coordinate system on the projection optical axis of the projection lens module bonded to the projection light source module by hardening of the projection adhesive; Measuring the light receiving attitude angle deviation (ωr) around the X axis of the light receiving positioning surface relative to the light receiving adhesive surface in a focused state of the reflected beam; Adhering the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to a light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction relative to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measured value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) occurring in a three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; Adjusting the wedge angle (ρp) of the light projection positioning shim (4211), which is a positioning shim interposed at the light projection positioning location so that the light projection optical axis and the light reception optical axis are aligned with each other, according to the light projection error angle; Adjusting the wedge angle (ρr) of the light-receiving positioning shim (3411), which is a positioning shim interposed at the light-receiving positioning location so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other, according to the light-receiving error angle; a projection positioning surface of the projection light source module to which the projection lens module is bonded is positioned by a projection base surface via a projection positioning shim, and the projection lens module is fixed to the sensor base; and fixing the light-receiving lens module to the sensor base by positioning the light-receiving positioning surface of the bonded light-receiving detection module with the light-receiving base surface via a light-receiving positioning shim.

[0032] In the twelfth aspect, the modules are bonded together in a state of a deviation configuration in which the optical center of the light-emitting surface is displaced in the light-projection adjustment direction relative to the principal point of the projector lens module by an amount of deviation correlated to the measurement value obtained by measuring the attitude angle deviation according to the second aspect. At the same time, in the twelfth aspect, the modules are bonded together in a state of a deviation configuration in which the optical center of the detection surface is displaced in the light-receiving adjustment direction relative to the principal point of the light-receiving lens module by an amount of deviation correlated to the measurement value obtained by measuring the attitude angle deviation according to the fifth aspect.

[0033] However, in the twelfth aspect, the light-projection error angle can be measured even if it occurs in the light-projecting optical axis of the light-projecting lens module bonded to the light-projecting light source module due to the hardening shrinkage of the light-projecting adhesive. At the same time, the light-receiving error angle can be measured even if it occurs in the light-receiving optical axis of the light-receiving lens module bonded to the light-receiving detection module due to the hardening shrinkage of the light-receiving adhesive. As a result, in order to align the directions of the light-projecting optical axis and the light-receiving optical axis with each other, the wedge angles of the light-projecting positioning shim and the light-receiving positioning shim can be accurately adjusted according to the light-projection error angle and the light-receiving error angle, respectively.

[0034] According to the twelfth aspect, the light-projecting positioning surface is positioned and fixed by the light-projecting base surface via a light-projecting positioning shim, and the light-receiving positioning surface is positioned and fixed by the light-receiving base surface via a light-receiving positioning shim, so that the adjustment accuracy of the light-projecting optical axis and the light-receiving optical axis can be ensured by aligning the optical axes. [Brief explanation of the drawings]

[0035] [Figure 1] 1 is a schematic diagram showing, in partial cross section, the overall configuration of an optical sensor according to a first embodiment; [Figure 2] FIG. 2 is a perspective view showing a light projection unit according to the first embodiment. [Figure 3] 2 is an XY plan view schematically showing the light projection unit according to the first embodiment. FIG. [Figure 4] FIG. 2 is a perspective view showing a light receiving unit according to the first embodiment. [Figure 5] 1 is an XY plan view schematically showing a light receiving unit according to a first embodiment. [Figure 6] 2 is a YZ plan view showing a partial cross section of the detailed configuration of the optical sensor according to the first embodiment. FIG. [Figure 7] 2 is a YZ plan view schematically showing the configuration of the light projection unit according to the first embodiment. FIG. [Figure 8] 5 is a flowchart showing a method for manufacturing the light projection unit according to the first embodiment. [Figure 9] 5A to 5C are schematic views for explaining a method for manufacturing the light projection unit according to the first embodiment. [Figure 10] 5A to 5C are schematic views for explaining a method for manufacturing the light projection unit according to the first embodiment. [Figure 11] 5A to 5C are schematic views for explaining a method for manufacturing the light projection unit according to the first embodiment. [Figure 12] 2 is a YZ plan view schematically showing the configuration of the light receiving unit according to the first embodiment. FIG. [Figure 13] 4 is a flowchart showing a method for manufacturing the light receiving unit according to the first embodiment. [Figure 14] 5A to 5C are schematic views for explaining a method for manufacturing the light receiving unit according to the first embodiment. [Figure 15] 5A to 5C are schematic views for explaining a method for manufacturing the light receiving unit according to the first embodiment. [Figure 16] 5A to 5C are schematic views for explaining a method for manufacturing the light receiving unit according to the first embodiment. [Figure 17] 10 is a YZ plan view showing, in partial cross section, the detailed configuration of an optical sensor according to a second embodiment. FIG. [Figure 18] FIG. 11 is a YZ plan view showing a partial cross section of a detailed configuration of an optical sensor according to a third embodiment. [Figure 19] FIG. 10 is a YZ plan view schematically showing the configuration of a light projection unit according to a third embodiment. [Figure 20] FIG. 10 is a YZ plan view schematically showing the configuration of a light receiving unit according to a third embodiment. [Figure 21] 10 is a flowchart showing a method for manufacturing an optical sensor according to a third embodiment. [Figure 22] 10A to 10C are schematic diagrams for explaining a light projection sequence in the method for manufacturing an optical sensor according to the third embodiment. [Figure 23] 10A to 10C are schematic diagrams for explaining a light projection sequence in the method for manufacturing an optical sensor according to the third embodiment. [Figure 24] 10A to 10C are schematic diagrams for explaining a light receiving sequence in the method for manufacturing an optical sensor according to a third embodiment. [Figure 25] 10A to 10C are schematic diagrams for explaining a light receiving sequence in the method for manufacturing an optical sensor according to a third embodiment. [Figure 26] FIG. 10 is a YZ plan view showing, in partial cross section, the detailed configuration of the optical sensor according to the fourth embodiment. [Figure 27] FIG. 10 is a YZ plan view schematically showing the configuration of a light projection unit according to a fourth embodiment. [Figure 28] FIG. 10 is a YZ plan view schematically showing the configuration of a light receiving unit according to a fourth embodiment. [Figure 29] 10 is a flowchart illustrating a method for manufacturing an optical sensor according to a fourth embodiment. [Figure 30] FIG. 13 is a YZ plan view showing, in partial cross section, the detailed configuration of the optical sensor according to the fifth embodiment. [Figure 31] FIG. 13 is a YZ plan view schematically showing the configuration of a light projection unit according to a fifth embodiment. [Figure 32] FIG. 13 is a YZ plan view schematically showing the configuration of a light receiving unit according to a fifth embodiment. [Figure 33] 10 is a flowchart illustrating a method for manufacturing an optical sensor according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0036] (First embodiment) As shown in FIG. 1 , an optical sensor 10 according to a first embodiment of the present disclosure is a LiDAR (Light Detection and Ranging / Laser Imaging Detection and Ranging) device that is installed on a moving body and optically detects the external environment. The moving body on which the optical sensor 10 is installed is a vehicle such as an automobile that can be operated in at least one of manual, automatic, and remote modes. In the following description, unless otherwise specified, the directions indicated by front, rear, up, down, left, and right are defined with respect to the vehicle on a horizontal plane. In the following description, the horizontal direction and vertical direction refer to the directions parallel to and perpendicular to the horizontal plane of the vehicle, respectively.

[0037] The optical sensor 10 is disposed in at least one location on the vehicle, such as the front, left and right side portions, rear portion, or upper roof. The optical sensor 10 projects a projected beam Bp toward a detection area Ad in the outside world that corresponds to the location on the vehicle where the optical sensor 10 is disposed. The optical sensor 10 detects, as a reflected beam Br, the returned light that is returned when the projected beam Bp is reflected by a target in the detection area Ad in the outside world. The projected beam Bp that becomes the reflected beam Br is selected to be light in the near-infrared range that is difficult for humans to see.

[0038] The optical sensor 10 detects a target object present in a detection area Ad of the external world by receiving a reflected beam Br that is reflected from the projected beam Bp. The detection of such an external target may involve one or more types of detection, including at least distance, of the distance from the optical sensor 10 to the target, the direction in which the target is located, and the reflection intensity of the reflected beam Br from the target. A typical target object to be detected by the optical sensor 10 applied to a vehicle may be at least one of moving objects such as pedestrians, cyclists, non-human animals, and other vehicles. A typical target object to be detected by the optical sensor 10 applied to a vehicle may be at least one of stationary objects such as guardrails, road signs, roadside structures, and fallen objects on the road.

[0039] A three-dimensional coordinate system is defined for the optical sensor 10 by three mutually orthogonal axes: an X-axis, a Y-axis, and a Z-axis. In particular, in the three-dimensional coordinate system of the optical sensor 10, the Y-axis direction is defined along the vertical direction of the vehicle, and the X-axis direction and the Z-axis direction are defined along different horizontal directions of the vehicle. Therefore, for a vehicle on a horizontal plane, the XY plane and the YZ plane of the three-dimensional coordinate system are aligned along a vertical plane perpendicular to the horizontal plane, and the XZ plane is aligned along the horizontal plane. Note that in FIG. 1 , the left side of the dashed-dotted line along the Y-axis direction (the optical window 13 side, described later) actually illustrates a cross section perpendicular to the right side of the dashed-dotted line (the units 21 and 41 side, described later).

[0040] The optical sensor 10 includes a housing 11, a light-emitting unit 21, a scanning unit 31, a light-receiving unit 41, and a control unit 51. The housing 11, which separates the inside from the outside, includes an outer shell main body 12 and an optical window 13. The light-blocking outer shell main body 12 is formed in a box shape from, for example, metal or resin. The outer shell main body 12 houses the light-emitting unit 21, the scanning unit 31, the light-receiving unit 41, and the control unit 51 inside. The housing 11 has an opening that is closed by the optical window 13. The light-transmitting optical window 13 is formed in a plate shape from, for example, resin or glass.

[0041] 1 and 2, the light-projecting unit 21 includes a light-projecting light source module 22 and a light-projecting lens module 26. As shown in FIG. 3, the light-projecting light source module 22 is constructed by mounting a plurality of light-projecting light sources 24 in an array on a substrate 220. In particular, the light-projecting light sources 24 in this embodiment are laser diodes arranged in a single row along the Y-axis direction. Each light-projecting light source 24 generates pulsed laser light that becomes part of the respective light projection beam Bp in accordance with a control signal from the control unit 51. Each light-projecting light source 24 may be an edge-emitter laser or a vertical-cavity surface-emitting laser (VCSEL).

[0042] 1 and 3, the light projecting light source module 22 has a light emitting surface 226 formed on one side of the substrate 220, which projects a light projecting beam Bp by light emission from each light projecting light source 24. The light emitting surface 226 is defined by a collection of laser oscillators in each light projecting light source 24 into a quasi-rectangular outline that is long in the Y-axis direction and short in the X-axis direction. The laser light projected from the laser oscillators of each light projecting light source 24 is projected from the light emitting surface 226 into the detection area Ad as a light projecting beam Bp that is shaped into a vertically long line.

[0043] 1 and 2, the light projecting lens module 26 is constructed in a structure in which at least one light projecting lens 260 is held by a light projecting barrel 261. The light-transmitting light projecting lens 260 is formed mainly from a base material such as resin or glass into a lens shape according to the optical function to be exerted. The light projecting lens 260 exerts at least one optical function out of, for example, focusing, collimating, and shaping on the light projecting beam Bp from the light projecting light source module 22. The light projecting lens 260 is positioned inside the light-blocking light projecting barrel 261, which is formed into a cylindrical shape from, for example, metal, resin, or the like.

[0044] The projector lens module 26 configured as described above is aligned with the projector light source module 22 so as to form a projector optical axis Op. The projector beam Bp projected from the projector light source module 22 is guided to the outside of the vehicle along the projector optical axis Op on the XZ plane by the optical action of the projector lens module 26.

[0045] As shown in FIG. 1 , the scanning unit 31 includes a scanning mirror 32 and a scanning motor 35. The scanning mirror 32 is formed in a plate shape with a reflective film deposited on a reflective surface 33, which is one side of a substrate. The scanning mirror 32 is supported by the housing 11 so as to be rotatable about a rotation centerline in the Y-axis direction. The scanning mirror 32 oscillates within a limited driving range defined by a mechanical or electrical stopper. The scanning motor 35 is, for example, a voice coil motor, a brushed DC motor, or a stepping motor. The output shaft of the scanning motor 35 is coupled to the scanning mirror 32 directly or indirectly via a drive mechanism such as a reducer. The scanning motor 35 is held by the housing 11 so as to be able to rotate the scanning mirror 32 together with the output shaft. The scanning motor 35 rotates (i.e., oscillates) the scanning mirror 32 within a limited driving range in accordance with a control signal from the control unit 51.

[0046] The scanning mirror 32 reflects the projected beam Bp incident from the light projecting unit 21 by the reflecting surface 33 and irradiates the detection area Ad through the optical window 13, thereby scanning the area Ad in accordance with the rotation angle of the scanning motor 35. At this time, scanning of the detection area Ad by the projected beam Bp is substantially limited to scanning in the horizontal direction in this embodiment, in accordance with the rotational drive of the scanning mirror 32.

[0047] The scanning mirror 32 reflects the reflected beam Br, which is incident from a target in the detection area Ad through the optical window 13, toward the light-receiving unit 41 by the reflecting surface 33 in accordance with the rotation angle of the scanning motor 35. At this time, the speeds of the projected beam Bp and the reflected beam Br are sufficiently greater than the rotational speed of the scanning mirror 32. As a result, the reflected beam Br is reflected by the scanning mirror 32, whose rotation angle with respect to the projected beam Bp can be assumed to be substantially the same, and is guided toward the light-receiving unit 41 in the opposite direction to the projected beam Bp.

[0048] 1 and 4, the light receiving unit 41 includes a light receiving lens module 42 and a light receiving and detecting module 45. The light receiving lens module 42 is constructed so that at least one light receiving lens 420 is held by a light receiving barrel 421. The light transmissive light receiving lens 420 is formed mainly from a base material such as resin or glass into a lens shape according to the optical function to be exerted. The light receiving lens 420 exerts an optical function so as to form an image of the reflected beam Br from the scanning mirror 32 on the light receiving and detecting module 45. The light receiving lens 420 is positioned within the light blocking light receiving barrel 421, which is formed into a cylindrical shape from, for example, metal or resin.

[0049] The light-receiving lens module 42 configured as described above is aligned with the light-receiving detection module 45 so as to form a light-receiving optical axis Or. Here, the light-receiving optical axis Or of the light-receiving lens module 42 is shifted in the Y-axis direction with respect to the light-projecting optical axis Op of the light-projecting lens module 26. As a result, the reflected beam Br reflected from the reflecting surface 33 of the scanning mirror 32 while being shifted in the Y-axis direction is guided toward the light-receiving detection module 45 along the light-receiving optical axis Or on the XZ plane by the optical action of the light-receiving lens module 42.

[0050] 5, the light receiving and detecting module 45 is constructed by mounting a plurality of light receiving pixels 46 in an array on a substrate 450. The light receiving pixels 46 are arranged at least in the Y-axis direction. Each of the light receiving pixels 46 is further formed of a plurality of light receiving elements 460, such as single photon avalanche diodes.

[0051] 1 and 5, the light receiving and detecting module 45 has a detection surface 456 formed on one side of the substrate 450. The detection surface 456 is configured as a rectangular outline that is long in the Y-axis direction and short in the X-axis direction by a collection of the incident surfaces of the light receiving pixels 46. Each light receiving pixel 46 receives a linear reflected beam Br that has entered the detection surface 456 from the light receiving lens module 42 along a light receiving optical axis Or.

[0052] 1, the light receiving and detecting module 45 has an output circuit 47. The output circuit 47 performs sampling processing for each control period in accordance with a control signal from the control unit 51 in a detection frame for each scanning line that is synchronized with the projection period of the light projecting beam Bp from the light projecting light source module 22 and corresponds to the rotation angle of the scanning mirror 32. At this time, the output circuit 47 generates a detection signal by combining response outputs from the light receiving elements 460 of each light receiving pixel 46 for each control period. The detection signals generated in this manner are output from the output circuit 47 to the control unit 51 for each scanning line.

[0053] The control unit 51 controls target detection in the external detection area Ad. The control unit 51 is mainly constructed using at least one computer including a processor and a memory. The control unit 51 is connected to the light projecting light source module 22, the scanning motor 35, and the light receiving and detecting module 45. The control unit 51 controls the light projecting light source module 22 to generate a light projecting beam Bp for each light projecting period. At the same time, the control unit 51 controls the scanning motor 35 to control scanning and reflection by the scanning mirror 32 synchronized with the light projecting period of the light projecting light source module 22. Furthermore, the control unit 51 processes the detection signal output from the light receiving and detecting module 45 in accordance with the light projecting period of the light projecting light source module 22 and the scanning and reflection by the scanning mirror 32, thereby generating detection data of targets in the detection area Ad.

[0054] (Detailed configuration) Next, we will explain the detailed configuration of the housing 11. The housing 11 is configured to further include a sensor base 14 shown in FIG.

[0055] The light-shielding sensor base 14 is mainly made of a base material such as resin or metal, and is formed in the shape of a partition that divides the interior of the outer shell body 12 in two. The sensor base 14 is surrounded and held from the outer periphery by the outer shell body 12, and is positioned with one side facing the inner surface of the optical window 13. In this positioned state, the sensor base 14 is assumed to be in the three-dimensional coordinate system defined above.

[0056] The sensor base 14 has a light-projecting base surface 142 for positioning the light-projecting unit 21. The light-projecting base surface 142 is formed on the side of a convex portion that protrudes in a block shape in the X-axis direction from one surface of the sensor base 14 facing the optical window 13. The light-projecting base surface 142 is defined as a flat surface that extends along the XY plane. In other words, the light-projecting base surface 142 extends along the X-axis and the Y-axis.

[0057] The sensor base 14 has a light receiving base surface 144 for positioning the light receiving unit 41. The light receiving base surface 144 is formed on the side of a convex portion that protrudes in a block shape in the X-axis direction from one side of the sensor base 14 facing the optical window 13. The light receiving base surface 144 is defined as a planar surface extending along the XY plane. In other words, the light receiving base surface 144 extends along the X-axis and the Y-axis. The light receiving base surface 144 may be constructed as a separate surface that is separate from the light projecting base surface 142. The light receiving base surface 144 may be constructed as a continuous surface that is continuous with the light projecting base surface 142. Note that FIG. 6 shows an example of base surfaces 142, 144 constructed as separate surfaces.

[0058] Next, a detailed description will be given of the configuration of the light projection unit 21. As shown in Figures 6 and 7, in the light projection unit 21, the light projection lens module 26 is bonded to the light projection light source module 22 in the Z-axis direction.

[0059] Specifically, the light projector barrel 261 in the light projector lens module 26 forms a light projecting adhesive surface 264 at an end face facing the light projecting light source module 22 in the Z-axis direction. The light projector holder 221 in the light projecting light source module 22 holds a substrate 220 on which a plurality of light projecting light sources 24 (see FIG. 2) are mounted, and forms a light projecting adhesive surface 224 at an end face facing the light projecting lens module 26 in the Z-axis direction. The light-shielding light projector holder 221 is formed in a cylindrical shape mainly made of a base material such as resin or metal, and holds the substrate 220.

[0060] A light-projecting adhesive 210 is interposed continuously around the entire circumference of the light-projecting optical axis Op between the light-projecting adhesive surface 264 of the light-projecting barrel 261 and the light-projecting adhesive surface 224 of the light-projecting holder 221. The light-projecting adhesive 210 is an ultraviolet-heat combination adhesive, such as an epoxy resin, that can be cured by at least ultraviolet irradiation or heat. The modules 26, 22 are bonded to each other at their respective light-projecting adhesive surfaces 264, 224 via the cured light-projecting adhesive 210.

[0061] The light-emitter holder 221 has a light-emitter positioning surface 222 as a structure for positioning with respect to the sensor base 14. The light-emitter positioning surface 222 is positioned along the Y-axis and X-axis by the light-emitter base surface 142. The light-emitter positioning surface 222 is directly positioned and supported by the sensor base 14 through surface contact with the light-emitter base surface 142, and is thereby defined as a plane extending along the Y-axis and X-axis (i.e., extending on the XY plane).

[0062] The light projector holder 221 is screwed to a plurality of locations on the sensor base 14 so as to adjust the light projector optical axis Op on the XZ plane that is perpendicular to the light projector base surface 142. As a result, the housing 11 including the sensor base 14 directly holds the light projecting light source module 22 and also indirectly holds the light projecting lens module 26 via the light projecting light source module 22.

[0063] In the projector barrel 261 of the light projection unit 21, as shown in FIG. 7, a light projection adjustment direction Dp orthogonal to the X-axis is geometrically assumed along the light-projection adhesive surface 264. Therefore, in the light projection unit 21, the optical center Cp of the light-emitting surface 226 of the light projection light source module 22 is configured to be offset in the light projection adjustment direction Dp with respect to the principal point Pp of the light projection lens 260 of the light projection lens module 26. With this offset configuration, the light projection light source module 22 and the light projection lens module 26 jointly form a light projection optical axis Op on the XZ plane that is orthogonal to the light projection base surface 142 and the light projection positioning surface 222 that are along the Y-axis direction. In other words, the offset configuration configured in the light projection unit 21 can be said to adjust the light projection optical axis Op on the XZ plane in the first embodiment, which is on the light projection reference plane Lp (see FIG. 6) that is orthogonal to the YZ plane in a three-dimensional coordinate system.

[0064] The amount of deviation Δp of the optical center Cp of the light-emitting surface 226 in the light projection adjustment direction Dp from the principal point Pp of the projector lens module 26 preferably satisfies the following equations 1 to 3, in which the focal length of the projector lens module 26 is defined as a coefficient value fp. Here, the principal point Pp is defined for a single projector lens 260, or for at least one representative projector lens 260 among the multiple projector lenses 260. The coefficient value fp representing the focal length is defined as a single value for the single projector lens 260, or a composite value (i.e., composite focal length) for the multiple projector lenses 260.

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[0065] Specifically, Equation 1 represents the deviation amount Δp that correlates with the inclination angle θp of the light-projector adhesive surface 264 relative to the light-projector base surface 142 around the X axis. Meanwhile, Equation 2 represents the deviation amount Δp that correlates with the angle ψp formed with respect to the light-projector optical axis Op of the normal direction Np on the light-projector adhesive surface 264 around the X axis. Furthermore, Equation 3 represents the deviation amount Δp that correlates with the attitude angle deviation ωp of the light-projector positioning surface 222 relative to the light-projector adhesive surface 264 around the X axis.

[0066] Here, the tilt angle θp, formation angle ψp, and attitude angle deviation ωp are all defined as signed angles with clockwise being positive and counterclockwise being negative in the YZ plane view of FIG. 7, and thus have a correlation that satisfies the following equation 4. Therefore, for positive θp, ψp, and negative ωp, the deviation amount Δp takes a positive value, which represents a state in which the optical center Cp is deviated to the right from the principal point Pp in the light projection adjustment direction Dp in the YZ plane view of FIG. 7. On the other hand, for negative θp, ψp, and positive ωp, the deviation amount Δp takes a negative value, which represents a state in which the optical center Cp is deviated to the left from the principal point Pp in the light projection adjustment direction Dp in the YZ plane view. Note that the positive and negative signs may be defined in a manner opposite to that described above with respect to at least one of these definitions.

number

[0067] Among the methods for manufacturing the optical sensor 10 according to the first embodiment, a method for manufacturing the light-projecting unit 21 will be described below in accordance with the manufacturing flow shown in Fig. 8. Note that in the manufacturing flow of Fig. 8, "S" denotes a "manufacturing step" for manufacturing the light-projecting unit 21.

[0068] In the light projection setting step of S101, the light projection barrel 261 that holds the light projection lens 260 in the light projection lens module 26 is fixed in position by the fixing jig 2 of the manufacturing apparatus 1 shown in Fig. 9. At the same time, in the light projection setting step, the light projection positioning surface 222 of the light projection holder 221 that holds the substrate 220 in the light projection light source module 22 is attached to the movable base surface 3a of the movable stage 3 of the manufacturing apparatus 1 shown in Fig. 9 so that the surface 222 can be moved integrally. Furthermore, in the light projection setting step, the light projection adhesive 210 that is in an uncured state, for example, in a gel state, is sandwiched between the light projection adhesive surfaces 264, 224 of the modules 26, 22.

[0069] At this time, while the light projection adhesive 210 is sandwiched, the optical center Cp of the light-emitting surface 226 of the light projection light source module 22 is aligned with the principal point Pp of the light projection lens module 26 by driving the movable stage 3 in a light projection adjustment direction Dp that is perpendicular to the X-axis along the light projection adhesive surface 264. Therefore, the optical center Cp in the initial state in the light projection setting step shown in FIG. 9 is set to an initial center Cp0 that is aligned with the principal point Pp in the normal direction Np of the light projection adhesive surface 264.

[0070] Next, in the light projection measurement step S102 shown in Fig. 8, the attitude angle deviation ωp of the light projection positioning surface 222 of the light projection light source module 22 with respect to the light projection adhesive surface 264 of the light projection lens module 26 is measured around the X axis in the focused state of the light projection beam Bp shown in Fig. 10. To this end, in the light projection measurement step, the focused state at the position of the screen is searched for by defocusing, which evaluates the degree of convergence, such as the image size, of the light projection beam Bp on a screen at a set distance from the principal point Pp of the light projection lens module 26. Here, the focused state may denote a state in which the line-shaped light projection beam Bp is focused overall in the longitudinal direction within the range of the permissible circle of confusion.

[0071] In the light projection measurement process, the relative attitude of the light projection light source module 22 with respect to the light projection lens module 26 is finely adjusted by the movable stage 3 around the X axis assumed on the initial center Cp0 along the light projection adhesive surface 264, thereby making it possible to search for a focusing state that gives the optimal attitude. Therefore, in the light projection measurement process, an attitude angle deviation ωp of the light projection positioning surface 222 with respect to the light projection adhesive surface 264 is measured as a physical quantity that represents the relative attitude around the X axis of each of the modules 26, 22 in the searched focusing state. At this time, the measured value of the attitude angle deviation ωp may be corrected by the attitude angle error of the movable base surface 3a of the movable stage 3 around the X axis.

[0072] Next, in the light projection bonding step of S103 shown in FIG. 8, the optical center Cp of the light-emitting surface 226 of the light projection light source module 22 is displaced from the initial center Cp0 in the light projection adjustment direction Dp with respect to the principal point Pp of the light projection lens module 26 by an amount of displacement Δp that correlates with the measurement value of the attitude angle deviation ωp in S102, as shown in FIG. 11 . Furthermore, in the light projection bonding step, the light projection adhesive 210 sandwiched between the light projection adhesive surfaces 264, 224 is cured, thereby bonding the light projection adhesive surface 264 of the light projection lens module 26 to the light projection light source module 22 in such a displaced state via the light projection adhesive 210. At this time, the light projection adhesive 210 is cured by irradiation with ultraviolet light from at least the outer periphery side around the light projection optical axis Op. In addition to being cured by ultraviolet light, the light projection adhesive 210 may also be cured by heating.

[0073] Next, in the light projection positioning step of S104 shown in Fig. 8, the light projection positioning surface 222 of the light projection light source module 22 to which the light projection lens module 26 was bonded in S103 is positioned by the light projection base surface 142 as shown in Fig. 7 and fixed to the sensor base 14. At this time, the modules 26, 22 integrated as the light projection unit 21 by the previous bonding can jointly form, on the XZ plane orthogonal to the light projection base surface 142, a light projection optical axis Op that is adjusted around the X axis by a deviation configuration in accordance with the deviation amount Δp in S103 that corresponds to the attitude angle deviation ωp measured in S102.

[0074] Next, a detailed description will be given of the configuration of the light receiving unit 41. As shown in Figures 6 and 12, in the light receiving unit 41, the light receiving lens module 42 is bonded to the light receiving and detecting module 45 in the Z axis direction.

[0075] Specifically, light receiving barrel 421 in light receiving lens module 42 forms a light receiving adhesive surface 424 at an end face facing light receiving detection module 45 in the Z axis direction. Light receiving holder 451 in light receiving detection module 45 holds substrate 450 on which a plurality of light receiving pixels 46 (see FIG. 5) are arranged, and forms light receiving adhesive surface 454 at an end face facing light receiving lens module 42 in the Z axis direction. Light blocking light receiving holder 451 is formed in a cylindrical shape mainly from a base material such as resin or metal, and holds substrate 450.

[0076] A light-receiving adhesive 410 is interposed continuously around the entire circumference of the light-receiving optical axis Or between the light-receiving adhesive surface 424 of the light-receiving lens barrel 421 and the light-receiving adhesive surface 454 of the light-receiving holder 451. The light-receiving adhesive 410 is also a UV-heat combined adhesive such as epoxy resin that can be cured by at least UV irradiation or heat. The modules 42, 45 are bonded to each other at their respective adhesive surfaces 424, 454 via the cured light-receiving adhesive 410.

[0077] The light-receiving holder 451 has a light-receiving positioning surface 452 as a structure for positioning with respect to the sensor base 14. The light-receiving positioning surface 452 is positioned by the light-receiving base surface 144 along at least the Y axis of the Y axis and the X axis. The light-receiving positioning surface 452 is positioned and supported by the sensor base 14 via multiple shims 411 between the light-receiving base surface 144, and is defined as a plane extending along at least the Y axis of the Y axis and the X axis. Here, each shim 411 is formed of, for example, metal or resin, and has a flat plate shape with a different thickness aligned in the X axis direction. Note that FIGS. 6 and 12 representatively illustrate only the shim 411 located nearest to the sensor base 14 when viewed in the YZ plane (i.e., when viewed in the X axis direction).

[0078] The light-receiving holder 451 is screwed to multiple locations on the sensor base 14 so as to adjust the light-receiving optical axis Or on the XZ plane perpendicular to the light-receiving base surface 144. As a result, the housing 11 including the sensor base 14 directly holds the light-receiving detection module 45, and also indirectly holds the light-receiving lens module 42 via the light-receiving detection module 45.

[0079] In the light receiving barrel 421 of the light receiving unit 41, as shown in FIG. 12, a light receiving adjustment direction Dr that is orthogonal to the X-axis is geometrically assumed along the light receiving adhesive surface 424. Therefore, in the light receiving unit 41, the optical center Cr of the detection surface 456 of the light receiving detection module 45 is configured to be offset in the light receiving adjustment direction Dr with respect to the principal point Pr of the light receiving lens 420 of the light receiving lens module 42. With this offset configuration, the light receiving detection module 45 and the light receiving lens module 42 jointly form a light receiving optical axis Or on the XZ plane that is orthogonal to the light receiving base surface 144 and the light receiving positioning surface 452 that are along the Y-axis direction. In other words, the offset configuration configured in the light receiving unit 41 can be said to adjust the light receiving optical axis Or on the XZ plane in the first embodiment, using a light receiving reference plane Lr (see FIG. 6) that is orthogonal to the YZ plane in a three-dimensional coordinate system.

[0080] The amount of deviation Δr of the optical center Cr of the detection surface 456 in the light-receiving adjustment direction Dr relative to the principal point Pr of the light receiving lens module 42 should satisfy the following equations 5 to 7, where the focal length of the light receiving lens module 42 is defined as a coefficient value fr. Here, the principal point Pr is defined for a single light receiving lens 420, or for at least one representative light receiving lens 420 among the plurality of light receiving lenses 420. The coefficient value fr representing the focal length is defined as a single value for the single light receiving lens 420, or a composite value (i.e., composite focal length) for the plurality of light receiving lenses 420.

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[0081] Specifically, Equation 5 represents the deviation amount Δr that correlates with the inclination angle θr of the light-receiving adhesive surface 424 relative to the light-receiving base surface 144 around the X axis. Meanwhile, Equation 6 represents the deviation amount Δr that correlates with the angle ψr formed with respect to the light-receiving optical axis Or of the normal direction Nr on the light-receiving adhesive surface 424 around the X axis. Furthermore, Equation 7 represents the deviation amount Δr that correlates with the attitude angle deviation ωr of the light-receiving positioning surface 452 relative to the light-receiving adhesive surface 424 around the X axis.

[0082] Here, the tilt angle θr, formation angle ψr, and attitude angle deviation ωr are all defined as signed angles with clockwise being positive and counterclockwise being negative in the YZ plane view of FIG. 12, and thus have a correlation that satisfies the following equation (8). Therefore, for negative θr, ψr, and positive ωr, the deviation amount Δr takes a negative value, which represents a state in which the optical center Cr is deviated to the left from the principal point Pr in the light reception adjustment direction Dr in the YZ plane view of FIG. 12. On the other hand, for positive θr, ψr, and negative ωr, the deviation amount Δr takes a positive value, which represents a state in which the optical center Cr is deviated to the right from the principal point Pr in the light reception adjustment direction Dr in the YZ plane view. Note that the positive and negative signs may be defined in a manner opposite to that described above with respect to at least one of these definitions.

number

[0083] Among the methods for manufacturing the optical sensor 10 according to the first embodiment, a method for manufacturing the light receiving unit 41 will be described below in accordance with the manufacturing flow shown in Fig. 13. Note that in the manufacturing flow of Fig. 13, "S" denotes a "manufacturing step" for manufacturing the light receiving unit 41.

[0084] In the light-receiving setting step of S201, the light-receiving barrel 421 that holds the light-receiving lens 420 in the light-receiving lens module 42 is fixed in position by the fixing jig 2 of the manufacturing apparatus 1 shown in Fig. 14. At the same time, in the light-receiving setting step, the light-receiving positioning surface 452 of the light-receiving holder 451 that holds the substrate 450 in the light-receiving detection module 45 is attached to the movable base surface 3a of the movable stage 3 of the manufacturing apparatus 1 shown in Fig. 14 so that it can be moved integrally. Furthermore, in the light-receiving setting step, a light-receiving adhesive 410 that is in an uncured state, for example, in a gel state, is sandwiched between the light-receiving adhesive surfaces 424, 454 of the modules 42, 45.

[0085] At this time, while being held by the light-receiving adhesive 410, the optical center Cr of the detection surface 456 of the light-receiving detection module 45 is aligned with the principal point Pr of the light-receiving lens module 42 by driving the movable stage 3 in the light-receiving adjustment direction Dr orthogonal to the X-axis along the light-receiving adhesive surface 424. Therefore, the optical center Cr in the initial state in the light-receiving setting step as shown in Figure 14 is set to an initial center Cr0 aligned with the principal point Pr in the normal direction Nr of the light-receiving adhesive surface 424.

[0086] Next, in the light-receiving measurement step S202 shown in Fig. 13, the attitude angle deviation ωr of the light-receiving positioning surface 452 of the light-receiving detection module 45 with respect to the light-receiving adhesive surface 424 of the light-receiving lens module 42 is measured around the X axis in the focused state of the reflected beam Br shown in Fig. 15. To this end, in the light-receiving measurement step, the focused state at the position of the detection surface 456 of the light-receiving detection module 45 is searched for by defocusing, which evaluates the degree of focusing of the reflected beam Br, such as the image size or energy, on the detection surface 456 of the light-receiving detection module 45. Here, the focused state may mean a state in which the linear reflected beam Br is focused overall in the longitudinal direction within the range of the permissible circle of confusion.

[0087] In the light-receiving measurement process, the relative attitude of the light-receiving detection module 45 with respect to the light-receiving lens module 42 is fine-tuned by the movable stage 3 around the X-axis assumed on the initial center Cr0 along the light-receiving adhesive surface 424, thereby making it possible to search for a focusing state that gives the optimal attitude. Therefore, in the light-receiving measurement process, an attitude angle deviation ωr of the light-receiving positioning surface 452 with respect to the light-receiving adhesive surface 424 is measured as a physical quantity that represents the relative attitude around the X-axis of each module 45, 42 in the searched focusing state. At this time, the measured value of the attitude angle deviation ωr may be corrected by the attitude angle error of the movable base surface 3a of the movable stage 3 around the X-axis.

[0088] Next, in the light-receiving bonding step S203 shown in FIG. 13, the optical center Cr of the detection surface 456 of the light-receiving detection module 45 is displaced from the initial center Cr0 in the light-receiving adjustment direction Dr along the light-receiving bonding surface 424 with respect to the principal point Pr of the light-receiving lens module 42 by an amount of displacement Δr that correlates with the measured attitude angle deviation ωr in S202. The light-receiving bonding step then further hardens the light-receiving adhesive 410 sandwiched between the light-receiving bonding surfaces 424, 454, thereby bonding the light-receiving bonding surface 424 of the light-receiving lens module 42 to the light-receiving detection module 45 in the displaced state via the light-receiving adhesive 410. At this time, the light-receiving adhesive 410 is hardened by ultraviolet irradiation from at least the outer periphery around the light-receiving optical axis Or. In addition to being hardened by ultraviolet light, the light-receiving adhesive 410 may also be hardened by heat.

[0089] 13, the light-receiving positioning step of S204 positions the light-receiving positioning surface 452 of the light-receiving detection module 45 to which the light-receiving lens module 42 was bonded in S203 by the light-receiving base surface 144 as shown in FIG. 12, and fixes it to the sensor base 14. At this time, the modules 42, 45 integrated as the light-receiving unit 41 by previous bonding can jointly form the light-receiving optical axis Or on the XZ plane orthogonal to the light-receiving base surface 144, which is adjusted around the X axis by the deviation configuration according to the deviation amount Δr in S203 corresponding to the attitude angle deviation ωr measured in S202.

[0090] In the light-receiving positioning step, the orientation of the light-receiving optical axis Or of the light-receiving unit 41 around the Y axis and the Z axis is matched with the orientation of the light-projecting optical axis Op of the previously manufactured light-projecting unit 21 around the Y axis and the Z axis. In particular, multiple shims 411 of different thicknesses corresponding to the orientation of the light-receiving optical axis Or around the Y axis are sandwiched between the light-receiving positioning surface 452 of the light-receiving detection module 45 and the light-receiving base surface 144, as shown in FIG.

[0091] (Action and effect) The effects of the first embodiment described above will be explained below.

[0092] In the first embodiment, the light projection positioning surface 222 of the light projection light source module 22, which is bonded to the light projection adhesive surface 264 of the light projector lens module 26, is positioned along the Y axis by the light projection base surface 142 of the sensor base 14. Therefore, the optical center Cp of the light-emitting surface 226 of the light projection light source module 22 is displaced along the light projection adhesive surface 264 in the light projection adjustment direction Dp perpendicular to the X axis with respect to the principal point Pp of the light projector lens module 26, thereby adjusting the light projection optical axis Op to be on the XZ plane perpendicular to the light projection base surface 142. This displacement configuration allows the light projection optical axis Op to be adjusted to match the XZ plane while accommodating manufacturing tolerances, including tilt within each module 26, 22 and between the modules 26, 22. This makes it possible to ensure the adjustment precision of the light projection optical axis Op.

[0093] According to the first embodiment, the deviation amount Δp of the optical center Cp of the light-emitting surface 226 in the light projection adjustment direction Dp relative to the principal point Pp of the light projector lens module 26 correlates with the inclination angle θp of the light projector adhesive surface 264 relative to the light projector base surface 142 around the X axis. In other words, the inclination angle θp of the light projector adhesive surface 264 relative to the light projector base surface 142 can be an appropriate angle corresponding to the deviation amount Δp for forming the light projector optical axis Op aligned with the XZ plane. Therefore, it is possible to adjust the light projector optical axis Op with high precision.

[0094] According to the first embodiment, the deviation amount Δp of the optical center Cp of the light-emitting surface 226 in the light projection adjustment direction Dp relative to the principal point Pp of the light projector lens module 26 correlates with the angle ψp formed with respect to the light projection optical axis Op of the normal direction Np at the light projector adhesive surface 264 around the X axis. In other words, the angle ψp formed with respect to the light projection optical axis Op of the normal direction Np at the light projector adhesive surface 264 can be an appropriate angle corresponding to the deviation amount Δp for forming the light projection optical axis Op aligned with the XZ plane. Therefore, it is possible to adjust the light projection optical axis Op with high precision.

[0095] According to the first embodiment, the deviation amount Δp of the optical center Cp of the light-emitting surface 226 in the light projection adjustment direction Dp relative to the principal point Pp of the light projector lens module 26 correlates with the attitude angle deviation ωp of the light projector positioning surface 222 relative to the light projector adhesive surface 264 around the X axis. In other words, the attitude angle deviation ωp of the light projector positioning surface 222 relative to the light projector adhesive surface 264 can be an appropriate angle corresponding to the deviation amount Δp for forming the light projector optical axis Op aligned with the XZ plane. Therefore, it is possible to adjust the light projector optical axis Op with high precision.

[0096] In the manufacturing method of the first embodiment, in the light projector light source module 22 to which the light projector adhesive surface 264 of the light projector lens module 26 is adhered, the light projector positioning surface 222 is positioned by the light projector base surface 142 and fixed to the sensor base 14. The modules 26, 22 are adhered to each other before being fixed to the sensor base 14 in a state in which the optical center Cp of the light-emitting surface 226 is displaced in the light projection adjustment direction Dp from the principal point Pp of the light projector lens module 26 by an amount of deviation Δp that correlates with a measured value of the attitude angle deviation ωp about the X-axis of the light projector positioning surface 222 relative to the light projector adhesive surface 264. In other words, the attitude angle deviation ωp of the light projector positioning surface 222 relative to the light projector adhesive surface 264 can be an appropriate angle corresponding to the amount of deviation Δp for forming the light projector optical axis Op aligned with the XZ plane. This makes it possible to adjust the light projector optical axis Op with high precision.

[0097] In the first embodiment, the light-receiving positioning surface 452 of the light-receiving detection module 45, which is bonded to the light-receiving adhesive surface 424 of the light-receiving lens module 42, is positioned along the Y-axis by the light-receiving base surface 144 of the sensor base 14. Therefore, the optical center Cr of the detection surface 456 of the light-receiving detection module 45 is displaced along the light-receiving adhesive surface 424 in the light-receiving adjustment direction Dr, which is perpendicular to the X-axis, relative to the principal point Pr of the light-receiving lens module 42, thereby adjusting the light-receiving optical axis Or to the X-Z plane, which is perpendicular to the light-receiving base surface 144. This displacement configuration allows the light-receiving optical axis Or to be adjusted to match the X-Z plane while accommodating manufacturing tolerances, including tilt, within each module 42, 45 and between the modules 42, 45. This makes it possible to ensure the adjustment precision of the light-receiving optical axis Or.

[0098] According to the first embodiment, the amount of deviation Δr by which the optical center Cr of the detection surface 456 deviates in the light receiving adjustment direction Dr relative to the principal point Pr of the light receiving lens module 42 correlates with the tilt angle θr of the light receiving adhesive surface 424 relative to the light receiving base surface 144 around the X axis. In other words, the tilt angle θr of the light receiving adhesive surface 424 relative to the light receiving base surface 144 can be an appropriate angle corresponding to the amount of deviation Δr for forming the light receiving optical axis Or aligned with the XZ plane. Therefore, it is possible to adjust the light receiving optical axis Or with high precision.

[0099] According to the first embodiment, the amount of deviation Δr by which the optical center Cr of the detection surface 456 deviates in the light-receiving adjustment direction Dr relative to the principal point Pr of the light-receiving lens module 42 correlates with the angle ψr formed with respect to the light-receiving optical axis Or of the normal direction Nr at the light-receiving adhesive surface 424 around the X axis. In other words, the angle ψr formed with respect to the light-receiving optical axis Or of the normal direction Nr at the light-receiving adhesive surface 424 can be an appropriate angle corresponding to the amount of deviation Δr for forming the light-receiving optical axis Or aligned with the XZ plane. Therefore, it is possible to adjust the light-receiving optical axis Or with high precision.

[0100] According to the first embodiment, the amount of deviation Δr by which the optical center Cr of the detection surface 456 deviates in the light receiving adjustment direction Dr relative to the principal point Pr of the light receiving lens module 42 correlates with the attitude angle deviation ωr of the light receiving positioning surface 452 relative to the light receiving adhesive surface 424 around the X axis. In other words, the attitude angle deviation ωr of the light receiving positioning surface 452 relative to the light receiving adhesive surface 424 can be an appropriate angle corresponding to the amount of deviation Δr for forming the light receiving optical axis Or aligned with the XZ plane. Therefore, it is possible to adjust the light receiving optical axis Or with high precision.

[0101] Furthermore, in the manufacturing method of the first embodiment, in the light receiving detection module 45 to which the light receiving adhesive surface 424 of the light receiving lens module 42 is adhered, the light receiving positioning surface 452 is positioned by the light receiving base surface 144 and fixed to the sensor base 14. The modules 42 and 45 are adhered to each other before being fixed to the sensor base 14 in a state in which the optical center Cr of the detection surface 456 is displaced in the light receiving adjustment direction Dr relative to the principal point Pr of the light receiving lens module 42 by an amount of deviation Δr that correlates with a measured value of the attitude angle deviation ωr about the X axis of the light receiving positioning surface 452 relative to the light receiving adhesive surface 424. In other words, this means that the attitude angle deviation ωr of the light receiving positioning surface 452 relative to the light receiving adhesive surface 424 can be an appropriate angle corresponding to the amount of deviation Δr for forming the light receiving optical axis Or aligned with the XZ plane. This makes it possible to adjust the light receiving optical axis Or with high precision.

[0102] Second Embodiment The second embodiment is a modification of the first embodiment.

[0103] 17, the housing 2011 of the second embodiment has a heat dissipation section 2016 for dissipating heat conducted from the internal sensor base 14 to the outside. The heat dissipation section 2016 is composed of a plurality of heat dissipation fins that protrude in a flat plate shape toward the outside from the outer shell main body 12 of the housing 2011.

[0104] According to the second embodiment, the heat dissipation section 2016 of the housing 2011 configured to include the sensor base 14 radiates heat conducted from the sensor base 14, which holds the projector lens module 26, via the projector light source module 22 to the outside. This allows the heat of the projector light source module 22 to be efficiently radiated, thereby suppressing deviation of the projector optical axis Op due to thermal deformation of the projector lens module 26. Furthermore, holding the relatively light projector lens module 26 via the relatively heavy projector light source module 22 also suppresses deviation of the projector optical axis Op due to changes in the relative posture of the modules 22, 26 depending on the load balance between these modules. This makes it possible to continuously ensure the adjustment accuracy of the projector optical axis Op.

[0105] Similarly, according to the second embodiment, the heat dissipation section 2016 of the housing 2011 radiates heat conducted from the sensor base 14, which holds the light receiving lens module 42, to the outside via the light receiving detection module 45. This allows the heat of the light receiving detection module 45 to be efficiently radiated, thereby suppressing deviation of the light receiving optical axis Or due to thermal deformation of the light receiving lens module 42. Furthermore, holding the relatively light light receiving lens module 42 via the relatively heavy light receiving detection module 45 also suppresses deviation of the light receiving optical axis Or due to changes in the relative position of the modules 45, 42 depending on the load balance between these modules. Therefore, it is possible to continuously ensure the adjustment accuracy of the light receiving optical axis Or.

[0106] (Third embodiment) The third embodiment is a modification of the first embodiment.

[0107] 18 and 19 , the light-projection optical axis Op in the third embodiment is adjusted on a light-projection reference plane Lp that is inclined with respect to the XZ plane in accordance with the light-projection error angle δψp generated in the light-projecting unit 21 in a three-dimensional coordinate system. Such a light-projection error angle δψp is assumed to be a manufacturing tolerance resulting from cure shrinkage of the light-projection adhesive 210. Therefore, the deviation configuration in the light-receiving unit 41 in the third embodiment in which the light-projection error angle δψp has occurred in the light-projection optical axis Op may satisfy the following equations 9 to 12, instead of equations 1 to 4 in the first embodiment.

number

number

number

number

[0108] Here, Δpa in Equations 9 to 11 means the deviation amount Δpa after curing shrinkage, relative to the deviation amount Δp (see FIG. 22 described later) before curing shrinkage according to the first embodiment, when curing shrinkage of the light projection adhesive 210 is assumed. At the same time, Δψpa in Equations 9 to 11 means the formed angle ψpa after curing shrinkage, relative to the formed angle ψp of the normal direction Np with respect to the light projection optical axis Op before curing shrinkage according to the first embodiment, when curing shrinkage of the light projection adhesive 210 is assumed. In the following description, the attitude angle deviation ωp constituting Equation 12 will be referred to specifically as the light projection attitude angle deviation ωp.

[0109] 18 and 20, the light-receiving optical axis Or in the third embodiment is adjusted on a light-receiving reference plane Lr that is inclined with respect to the XZ plane, in accordance with the correlation between the light-receiving error angle δψr generated in the light-receiving unit 41 in a three-dimensional coordinate system and the above-mentioned light-projection error angle δψp. Such a light-receiving error angle δψr is assumed to be a manufacturing tolerance resulting from cure shrinkage of the light-receiving adhesive 410. Therefore, the deviation configuration in the light-receiving unit 41 of the third embodiment in which the light-receiving error angle δψr is generated in the light-receiving optical axis Or preferably satisfies the following equations 13 to 16, instead of equations 5 to 8 of the first embodiment.

number

number

number

number

[0110] Here, Δra in Equations 13 to 15 means the deviation Δra after curing shrinkage relative to the deviation Δr before curing shrinkage according to the first embodiment (see FIG. 24 described later), when curing shrinkage of the light-receiving adhesive 410 is assumed. Similarly, Δψra in Equations 13 to 15 means the angle ψra after curing shrinkage relative to the angle ψr of the normal direction Nr with respect to the light-receiving optical axis Or before curing shrinkage according to the first embodiment, when curing shrinkage of the light-receiving adhesive 410 is assumed. In the following description, the attitude angle deviation ωr constituting Equation 15 is specifically referred to as the light-receiving attitude angle deviation ωr.

[0111] 18 to 20 , in the third embodiment, adjustment of the light-projection optical axis Op is achieved by a direct positioning structure constructed at a light-projection positioning location between the light-projection positioning surface 222 and the light-projection base surface 142 under an offset configuration that satisfies equations 9 to 12. On the other hand, in the third embodiment, adjustment of the light-receiving optical axis Or is achieved by an indirect positioning structure in which a light-receiving positioning shim 3411 is interposed at a light-receiving positioning location between the light-receiving positioning surface 452 and the light-receiving base surface 144 under an offset configuration that satisfies equations 13 to 16. The light-receiving positioning shim 3411 that provides this indirect positioning structure forms a wedge angle ρr between the light-receiving positioning surface 452 and the light-receiving base surface 144 in accordance with the correlation between the light-projection error angle δψp and the light-receiving error angle δψr in the three-dimensional coordinate system. By virtue of these composite positioning structures, the light projection optical axis Op and the light reception optical axis Or are adjusted to run in substantially the same direction along the light projection reference plane Lp and the light reception reference plane Lr, which are substantially parallel to each other.

[0112] 21, the manufacturing method for the optical sensor 10 according to the third embodiment executes a light-projecting sequence for manufacturing the light-projecting unit 21 and a light-receiving sequence for manufacturing the light-receiving unit 41 in association with each other. Note that in the manufacturing flow of FIG. 21, "S" represents the "manufacturing step" of the light-projecting sequence and the "manufacturing step" of the light-receiving sequence, respectively.

[0113] In the light projection sequence, S101 to S103 are executed in the same manner as in the first embodiment. Next, a light projection measurement step of S3104 added to the light projection sequence measures a light projection error angle δψp that has occurred on the light projection optical axis Op of the light projection lens module 26 bonded to the light projection light source module 22 by the hardening of the light projection adhesive 210, from the measurement state in S102 shown in Fig. 22, as shown in Fig. 23. Therefore, in the additional light projection measurement step, the focus state of the light projection beam Bp is three-dimensionally searched on a screen at a set distance from the principal point Pp of the light projection lens module 26 in accordance with S102 of the first embodiment, and the light projection error angle δψp of the light projection optical axis Op corresponding to the deviation of the focus state is three-dimensionally measured.

[0114] At this time, the measured value of the projection error angle δψp may be corrected by the three-dimensional attitude angle error of the movable base surface 3a of the movable stage 3. However, if the attitude of the movable base surface 3a in S102 is reproduced in S3104 by a movable stage 3 different from that in S102, the measurement value may be corrected by the attitude angle error of the movable base surface 3a in each of S102 and S3104.

[0115] Next, in the light-projection sequence shown in Fig. 21, the light-projection positioning step of S3105 is similar to S104 in the first embodiment. That is, in the light-projection positioning step of S3105, the light-projection positioning surface 222 of the light-projection light source module 22 to which the light-projection lens module 26 is bonded in S103 is directly positioned by the light-projection base surface 142 as shown in Fig. 19, and fixed to the sensor base 14. However, at this time, the integrated modules 26, 22 can jointly form the light-projection optical axis Op on the light-projection reference plane Lp under an offset configuration in which the offset amount Δpa satisfies the above-mentioned equations 9 to 12 in accordance with the light-projection attitude angle deviation ωp measured in S102 and the light-projection error angle δψp measured in S3104.

[0116] Meanwhile, steps S201 to S203 in the light receiving sequence are executed in the same manner as in the first embodiment. Next, the light receiving measurement step of S3204 added to the light receiving sequence measures the light receiving error angle δψr that has occurred, as shown in Fig. 25, from the measurement state in S202 shown in Fig. 24 at the light receiving optical axis Or of the light receiving lens module 42 that has been bonded to the light receiving detection module 45 by hardening of the light receiving adhesive 410. Therefore, in the additional light receiving measurement step, the focusing state of the reflected beam Br on the detection surface 456 of the light receiving detection module 45 is three-dimensionally searched in accordance with S202 of the first embodiment, and the light receiving error angle δψr of the light receiving optical axis Or that corresponds to the deviation of the focusing state is three-dimensionally measured.

[0117] At this time, the measured value of the light-receiving error angle δψr may be corrected by the three-dimensional attitude angle error of the movable base surface 3a of the movable stage 3. However, if the attitude of the movable base surface 3a in S202 is reproduced in S3204 by a movable stage 3 different from that in S202, the measurement value may be corrected by the attitude angle error of the movable base surface 3a in each of S202 and S3204.

[0118] Next, in the light receiving sequence shown in Figure 21, the light receiving shim adjustment process S3205 adjusts the wedge angle ρr of the light receiving positioning shim 3411, which is interposed at the light receiving positioning location between the light receiving positioning surface 452 and the light receiving base surface 144, so that the light projection optical axis Op and the light receiving optical axis Or are aligned with each other.

[0119] At this time, the light-projection error angle δψp measured in S3104 of the light-projection sequence and the light-reception error angle δψr measured in S3204 of the light-reception sequence are passed on from each of the steps S3104 and S3204. Therefore, the light-reception shim adjustment step adjusts the wedge angle ρr (see FIG. 20) of the light-reception positioning shim 3411 to a relative error angle that is the difference between the light-projection error angle δψp and the light-reception error angle δψr, based on the correlation between the light-projection error angle δψp and the light-reception error angle δψr, based on the following equation (17):

number

[0120] Next, in the light receiving sequence shown in Fig. 21, the light receiving positioning step of S3206 differs from S204 in the first embodiment. That is, in the light receiving positioning step of S3206, the light receiving positioning surface 452 of the light receiving detection module 45 to which the light receiving lens module 42 was bonded in S203 is positioned by the light receiving base surface 144 via the light receiving positioning shim 3411 as shown in Fig. 20, and fixed to the sensor base 14. At this time, the integrated modules 42, 45 can jointly form the light receiving optical axis Or on the light receiving reference plane Lr under an offset configuration in which the offset amount Δra satisfies the above-mentioned equations 13 to 16 in accordance with the light receiving attitude angle deviation ωr measured in S202 and the light receiving error angle δψr measured in S3204.

[0121] As described above, in the third embodiment, the light-receiving positioning shim 3411 is interposed at the light-receiving positioning location between the light-receiving positioning surface 452 and the light-receiving base surface 144. With this, even if a light-projection error angle δψp and / or a light-receiving error angle δψr occurs in the light-projecting optical axis Op and / or the light-receiving optical axis Or due to manufacturing tolerances of the deviation configuration caused by cure shrinkage during bonding, the manufacturing tolerances can be absorbed by aligning the directions of those optical axes Op and Or with each other. Therefore, it is possible to ensure the adjustment precision of the light-projecting optical axis Op and the light-receiving optical axis Or relative to each other.

[0122] Furthermore, in the manufacturing method of the third embodiment, modules 26 and 22 are bonded together in a state in which the optical center Cp of light-emitting surface 226 is displaced in the light-projection adjustment direction Dp with respect to principal point Pp of light-projector lens module 26 by an amount of displacement Δp that correlates with the measured value obtained by measuring the light-projection attitude angle deviation ωp. At the same time, in the manufacturing method of the third embodiment, modules 42 and 45 are bonded together in a state in which the optical center Cr of detection surface 456 is displaced in the light-reception adjustment direction Dr with respect to principal point Pr of light-receiving lens module 42 by an amount of displacement Δr that correlates with the measured value obtained by measuring the light-receiving attitude angle deviation ωr.

[0123] However, in the manufacturing method of the third embodiment, even if a light-projection error angle δψp occurs in the light-projection optical axis Op of the light-projector lens module 26 bonded to the light-projection light source module 22 due to the hardening of the light-projection adhesive 210, the angle can be measured in accordance with a manufacturing tolerance caused by the hardening shrinkage of the light-projection adhesive 210. At the same time, even if a light-receiving error angle δψr occurs in the light-receiving optical axis Or of the light-receiving lens module 42 bonded to the light-receiving detection module 45 due to the hardening of the light-receiving adhesive 410, the angle can be measured in accordance with a manufacturing tolerance caused by the hardening shrinkage of the light-receiving adhesive 410. From these facts, in order to align the directions of the light-projection optical axis Op and the light-receiving optical axis Or with each other, the wedge angle ρr of the light-receiving positioning shim 3411 can be accurately adjusted in accordance with the correlation between the light-projection error angle δψp and the light-receiving error angle δψr.

[0124] Therefore, according to the manufacturing method of the third embodiment, the light-projecting positioning surface 222 is positioned and fixed directly by the light-projecting base surface 142, while the light-receiving positioning surface 452 is positioned and fixed by the light-receiving base surface 144 via the light-receiving positioning shim 3411. Therefore, it is possible to ensure the adjustment accuracy of the light-projecting optical axis Op and the light-receiving optical axis Or by matching the directions of these optical axes Op, Or.

[0125] (Fourth embodiment) The fourth embodiment is a modification of the first embodiment.

[0126] 26 to 28 , in the fourth embodiment, adjustment of the light-receiving optical axis Or is achieved by a direct positioning structure constructed at the light-receiving positioning location between the light-receiving positioning surface 452 and the light-receiving base surface 144 under an offset configuration that satisfies equations 13 to 16 similar to the third embodiment. On the other hand, in the fourth embodiment, adjustment of the light-projecting optical axis Op is achieved by an indirect positioning structure in which a light-projecting positioning shim 4211 is interposed at the light-projecting positioning location between the light-projecting positioning surface 222 and the light-projecting base surface 142 under an offset configuration that satisfies equations 9 to 12 similar to the third embodiment. The light-projecting positioning shim 4211 that provides this indirect positioning structure forms a wedge angle ρp between the light-projecting positioning surface 222 and the light-projecting base surface 142 in accordance with the correlation between the light-projection error angle δψp and the light-receiving error angle δψr in the three-dimensional coordinate system. By virtue of these composite positioning structures, the light projection optical axis Op and the light reception optical axis Or are adjusted to run in substantially the same direction along the light projection reference plane Lp and the light reception reference plane Lr, which are substantially parallel to each other.

[0127] 29, in the manufacturing method of the optical sensor 10 according to the fourth embodiment, S3205 is omitted from the light receiving sequence of the third embodiment, and S3206 is replaced with a light receiving positioning step of S4205. Specifically, in the light receiving positioning step of S4205, the light receiving positioning surface 452 of the light receiving detection module 45 to which the light receiving lens module 42 is bonded in S203 is directly positioned by the light receiving base surface 144 as shown in FIG. 28, and the integrated modules 42, 45 can jointly form the light receiving optical axis Or on the light receiving reference plane Lr under an offset configuration in which the offset amount Δra satisfies equations 13 to 16 in accordance with the light receiving attitude angle deviation ωr measured in S202 and the light receiving error angle δψr measured in S3204.

[0128] 29 , in the manufacturing method for optical sensor 10 according to the fourth embodiment, in the light projection sequence, S3105 from the third embodiment is changed to a light projection positioning step of S4106, and further a light projection shim adjustment step of S4105 is added between S3104 and S4106. Specifically, the light projection shim adjustment step of S4105 adjusts the wedge angle ρp of the light projection positioning shim 4211 interposed at the light projection positioning location between the light projection positioning surface 222 and the light projection base surface 142 so that the light projection optical axis Op and the light reception optical axis Or are aligned with each other.

[0129] At this time, the light-projection error angle δψp measured in S3104 of the light-projection sequence and the light-reception error angle δψr measured in S3204 of the light-reception sequence are passed on from each of these steps S3104 and S3204. Therefore, the light-projection shim adjustment step adjusts the wedge angle ρp (see FIG. 27) of the light-projection positioning shim 4211 to a relative error angle that is the difference between the light-projection error angle δψp and the light-reception error angle δψr, based on the correlation between the light-projection error angle δψp and the light-reception error angle δψr, based on the following equation (18):

number

[0130] Furthermore, in the light projection positioning step of S4106, the light projection positioning surface 222 of the light projection light source module 22 to which the light projection lens module 26 was bonded in S103 is positioned by the light projection base surface 142 via the light projection positioning shim 4211 as shown in Fig. 27, and fixed to the sensor base 14. At this time, the integrated modules 26, 22 can jointly form the light projection optical axis Op on the light projection reference plane Lp under an offset configuration in which the offset amount Δpa satisfies equations 9 to 12 in accordance with the light projection attitude angle deviation ωp measured in S102 and the light projection error angle δψp measured in S3104.

[0131] As described above, in the fourth embodiment, the light-projection positioning shim 4211 is interposed at the light-projection positioning location between the light-projection positioning surface 222 and the light-projection base surface 142. With this, even if the light-projection error angle δψp and / or the light-reception error angle δψr occurs in the light-projection optical axis Op and / or the light-reception optical axis Or according to the manufacturing tolerance of the deviation configuration caused by cure shrinkage during bonding, the manufacturing tolerance can be absorbed by aligning the directions of those optical axes Op and Or with each other. Therefore, it is possible to ensure the adjustment precision between the light-projection optical axis Op and the light-reception optical axis Or.

[0132] Furthermore, in the manufacturing method of the fourth embodiment, modules 26 and 22 are bonded together in a state in which the optical center Cp of light-emitting surface 226 is displaced in the light-projection adjustment direction Dp relative to principal point Pp of light-projector lens module 26 by an amount of displacement Δp that correlates with the measured value obtained by measuring the light-projection attitude angle deviation ωp. At the same time, in the manufacturing method of the fourth embodiment, modules 42 and 45 are bonded together in a state in which the optical center Cr of detection surface 456 is displaced in the light-reception adjustment direction Dr relative to principal point Pr of light-receiving lens module 42 by an amount of displacement Δr that correlates with the measured value obtained by measuring the light-receiving attitude angle deviation ωr.

[0133] However, in the manufacturing method of the fourth embodiment, even if a light-projection error angle δψp occurs in the light-projection optical axis Op of the light-projector lens module 26 bonded to the light-projection light source module 22 due to the hardening of the light-projection adhesive 210, the angle can be measured in accordance with a manufacturing tolerance caused by the hardening shrinkage of the light-projection adhesive 210. At the same time, even if a light-receiving error angle δψr occurs in the light-receiving optical axis Or of the light-receiving lens module 42 bonded to the light-receiving detection module 45 due to the hardening of the light-receiving adhesive 410, the angle can be measured in accordance with a manufacturing tolerance caused by the hardening shrinkage of the light-receiving adhesive 410. From these facts, in order to align the directions of the light-projection optical axis Op and the light-receiving optical axis Or with each other, the wedge angle ρp of the light-projection positioning shim 4211 can be accurately adjusted in accordance with the correlation between the light-projection error angle δψp and the light-receiving error angle δψr.

[0134] Therefore, according to the manufacturing method of the fourth embodiment, the light-receiving positioning surface 452 is positioned and fixed directly by the light-receiving base surface 144, while the light-emitter positioning surface 222 is positioned and fixed by the light-emitter base surface 142 via the light-emitter positioning shim 4211. Therefore, it is possible to ensure the adjustment accuracy of the light-emitter optical axis Op and the light-receiving optical axis Or by matching the directions of these optical axes Op, Or.

[0135] Fifth Embodiment The fifth embodiment is a modified example in which the third embodiment and the fourth embodiment are combined and further modified.

[0136] 30 to 32, in the fifth embodiment, adjustment of the light-projection optical axis Op is realized by an indirect positioning structure in which, under a deviation configuration that satisfies equations 9 to 12 in accordance with the third embodiment, a light-projection positioning shim 4211 is interposed at a light-projection positioning location between the light-projection positioning surface 222 and the light-projection base surface 142. However, the light-projection positioning shim 4211 that provides this indirect positioning structure forms a wedge angle ρp between the light-projection positioning surface 222 and the light-projection base surface 142 that corresponds only to the light-projection error angle δψp in the three-dimensional coordinate system.

[0137] On the other hand, in the fifth embodiment, adjustment of the light-receiving optical axis Or is realized by an indirect positioning structure in which, under a displacement configuration that satisfies equations 13 to 16 in accordance with the third embodiment, a light-receiving positioning shim 3411 is interposed at a light-receiving positioning location between the light-receiving positioning surface 452 and the light-receiving base surface 144. However, the light-receiving positioning shim 3411 that provides this indirect positioning structure forms a wedge angle ρr between the light-receiving positioning surface 452 and the light-receiving base surface 144 that corresponds only to the light-receiving error angle δψr in the three-dimensional coordinate system.

[0138] Even with this composite positioning structure of the fifth embodiment, the light projection optical axis Op and the light reception optical axis Or are adjusted to be aligned in substantially the same direction on the light projection reference plane Lp and the light reception reference plane Lr, which are substantially parallel to each other. Here, both the light projection reference plane Lp and the light reception reference plane Lr are defined along the XZ plane. As a result, the light projection optical axis Op and the light reception optical axis Or are adjusted on the XZ plane, which are offset from each other in the Y-axis direction, achieving a relationship in which they are aligned with each other.

[0139] As shown in Fig. 33 , in the manufacturing method for optical sensor 10 according to the fifth embodiment, S4105 in the light projection sequence is changed from that of the fourth embodiment to a light projection shim adjustment step of S5105. Specifically, the light projection shim adjustment step of S5105 is passed on the light projection error angle δψp measured in S3104 of the light projection sequence. Therefore, the light projection shim adjustment step adjusts the wedge angle ρp (see Fig. 31 ) of the light projection positioning shim 4211 to an angle that correlates only with the light projection error angle δψp based on the following equation (19). Note that the light projection positioning step of S4106 after this adjustment conforms to that of the fourth embodiment.

number

[0140] 33, in the manufacturing method for optical sensor 10 according to the fifth embodiment, S3205 in the light reception sequence is changed from that of the third embodiment to a light reception shim adjustment step of S5205. Specifically, the light reception shim adjustment step of S5205 is handed over the light reception error angle δψr measured in S3204 of the light reception sequence. Therefore, the light reception shim adjustment step adjusts the wedge angle ρr (see FIG. 32) of the light reception positioning shim 3411 to an angle that correlates only with the light reception error angle δψr based on the following equation (20). Note that the light reception positioning step of S3206 after this adjustment conforms to that of the third embodiment.

number

[0141] As described above, in the fifth embodiment, the light-projecting positioning shim 4211 and the light-receiving positioning shim 3411 are interposed at the light-projecting positioning location between the light-projecting positioning surface 222 and the light-projecting base surface 142, and at the light-receiving positioning location between the light-receiving positioning surface 452 and the light-receiving base surface 144, respectively. This allows the directions of the optical axes Op and Or to be aligned with each other, absorbing the manufacturing tolerances, even if the light-projecting error angle δψp and / or the light-receiving error angle δψr occur in the light-projecting optical axis Op and / or the light-receiving optical axis Or due to manufacturing tolerances of the deviation configuration caused by cure shrinkage during bonding. Therefore, it is possible to ensure the adjustment precision of the light-projecting optical axis Op and the light-receiving optical axis Or relative to each other.

[0142] Furthermore, in the manufacturing method of the fifth embodiment, modules 26 and 22 are bonded together in a state in which the optical center Cp of light-emitting surface 226 is displaced in the light-projection adjustment direction Dp with respect to principal point Pp of light-projector lens module 26 by an amount of displacement Δp that correlates with the measured value obtained by measuring the light-projection attitude angle deviation ωp. At the same time, in the manufacturing method of the fourth embodiment, modules 42 and 45 are bonded together in a state in which the optical center Cr of detection surface 456 is displaced in the light-reception adjustment direction Dr with respect to principal point Pr of light-receiving lens module 42 by an amount of displacement Δr that correlates with the measured value obtained by measuring the light-receiving attitude angle deviation ωr.

[0143] However, in the manufacturing method of the fifth embodiment, even if a light-projection error angle δψp occurs in the light-projection optical axis Op of the light-projector lens module 26 bonded to the light-projection light source module 22 due to the hardening of the light-projection adhesive 210, the angle can be measured in accordance with a manufacturing tolerance caused by the hardening shrinkage of the light-projection adhesive 210. At the same time, even if a light-receiving error angle δψr occurs in the light-receiving optical axis Or of the light-receiving lens module 42 bonded to the light-receiving detection module 45 due to the hardening of the light-receiving adhesive 410, the angle can be measured in accordance with the light-projection error angle δψp and the light-receiving error angle δψr, respectively, in order to align the directions of the light-projection optical axis Op and the light-receiving optical axis Or with each other.

[0144] Therefore, according to the manufacturing method of the fifth embodiment, the light-projecting positioning surface 222 is positioned and fixed by the light-projecting base surface 142 via the light-projecting positioning shim 4211, and the light-receiving positioning surface 452 is positioned and fixed by the light-receiving base surface 144 via the light-receiving positioning shim 3411. Therefore, it is possible to ensure the adjustment accuracy of the light-projecting optical axis Op and the light-receiving optical axis Or by matching the directions of these optical axes Op, Or.

[0145] (Other embodiments) Although multiple embodiments have been described above, the present disclosure should not be construed as being limited to those embodiments, and can be applied to various embodiments and combinations within the scope that does not deviate from the gist of the present disclosure.

[0146] In the modified examples of the first and second embodiments, since equation 4 does not hold, any one of equations 1 to 3 does not have to hold. In the modified examples of the first and second embodiments, since equation 8 does not hold, any one of equations 5 to 7 does not have to hold. In the modified examples of the first and second embodiments, either one of units 21, 41 does not have to have the above-mentioned displacement configuration.

[0147] In the modified examples of the third to fifth embodiments, since the explained number 12 does not hold in the first embodiment, any of the numbers 9 to 11 does not have to hold. In the modified examples of the third to fifth embodiments, since the explained number 16 does not hold in the first embodiment, any of the numbers 13 to 15 does not have to hold. In the modified examples of the third to fifth embodiments, the second embodiment may be applied.

[0148] In modified examples of the first to fifth embodiments, a Y-axis direction along the horizontal direction and an X-axis direction along the vertical direction may be defined. In modified examples of the first to fifth embodiments, the moving body to which the optical sensor 10 is applied may be, for example, a traveling robot whose traveling can be remotely controlled. In modified examples, the moving body to which the optical sensor 10 is applied may be, for example, a stationary structure other than a moving body.

[0149] (Additional remarks) This specification discloses the following technical ideas and combinations thereof.

[0150] (Technical thought 1) An optical sensor that detects an external environment by projecting a projected beam (Bp) toward the external environment and receiving a reflected beam (Br) that is reflected from the external environment in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting the light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding the light projection beam from the light projection light source module to the outside world along a light projection optical axis (Op); a sensor base (14) having a light projecting base surface (142) that positions the light projecting positioning surface along the Y axis; If the light projection adjustment direction (Dp) perpendicular to the X axis is assumed to be along the light projection adhesive surface, An optical sensor in which the optical center (Cp) of the light-emitting surface of the light projecting light source module is displaced in the light projection adjustment direction relative to the principal point (Pp) of the light projecting lens module, thereby adjusting the light projection optical axis on an XZ plane perpendicular to the light projection base surface in the three-dimensional coordinate system.

[0151] (Technical thought 2) An optical sensor that detects an external environment by projecting a projected beam (Bp) toward the external environment and receiving a reflected beam (Br) that is reflected from the external environment in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting the light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding the light projection beam from the light projection light source module to the outside world along a light projection optical axis (Op); a sensor base (14) having a light projection base surface (142) along the Y axis that positions the light projection positioning surface; If the light projection adjustment direction (Dp) perpendicular to the X axis is assumed to be along the light projection adhesive surface, An optical sensor in which the optical center (Cp) of the light-emitting surface of the light projection light source module is displaced in the light projection adjustment direction relative to the principal point (Pp) of the light projection lens module, thereby adjusting the light projection optical axis onto a light projection reference plane (Lp) that is perpendicular to the YZ plane in the three-dimensional coordinate system.

[0152] (Technical Thought 3) The optical sensor according to Technical Idea 1 or 2, wherein the amount of deviation (Δp, Δpa) of the optical center (Cp) of the light-emitting surface in the light-projection adjustment direction relative to the principal point (Pp) of the light-projection lens module correlates to the inclination angle (θp) of the light-projection adhesive surface relative to the light-projection base surface around the X-axis.

[0153] (Technical Thought 4) An optical sensor described in any one of Technical Ideas 1 to 3, wherein the amount of deviation (Δp, Δpa) of the optical center (Cp) of the light-emitting surface in the light projection adjustment direction relative to the principal point (Pp) of the light-projecting lens module correlates to the angle (ψp, ψpa) formed with the light-projecting optical axis of the normal direction (Np) at the light-projecting adhesive surface around the X-axis.

[0154] (Technical Thought 5) An optical sensor described in any one of Technical Ideas 1 to 4, wherein the amount of deviation (Δp, Δpa) of the optical center (Cp) of the light-emitting surface in the light-projection adjustment direction relative to the principal point (Pp) of the light-projection lens module correlates to the attitude angle deviation (ωp) of the light-projection positioning surface relative to the light-projection adhesive surface around the X-axis.

[0155] (Technical Thought 6) A housing (2011) configured to include the sensor base, An optical sensor described in any one of technical ideas 1 to 5, wherein the housing has a heat dissipation section (2016) that radiates heat conducted from the sensor base that holds the projecting lens module via the projecting light source module to the outside world.

[0156] (Technical Thought 7) a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side to the light-receiving detection module side along a light-receiving optical axis (Or); the sensor base has a light-receiving base surface (144) that positions the light-receiving positioning surface along the Y-axis; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, An optical sensor described in Technical Idea 1, and any one of Technical Ideas 3 to 6 subordinate to Technical Idea 1, in which the optical center (Cr) of the detection surface in the light receiving detection module is displaced in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, thereby adjusting the light receiving optical axis on an XZ plane perpendicular to the light receiving base surface in the three-dimensional coordinate system.

[0157] (Technical Thought 8) An optical sensor that detects an external environment by projecting a projected beam (Bp) toward the external environment and receiving a reflected beam (Br) that is reflected from the external environment in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side toward the light-receiving detection module side along a light-receiving optical axis (Or); a sensor base (14) having a light-receiving base surface (144) that positions the light-receiving positioning surface along the Y-axis; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, An optical sensor in which the optical center (Cr) of the detection surface in the light receiving detection module is displaced in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, thereby adjusting the light receiving optical axis on the XZ plane perpendicular to the light receiving base surface in the three-dimensional coordinate system.

[0158] (Technical Thought 9) a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side to the light-receiving detection module side along a light-receiving optical axis (Or); the sensor base has a light receiving base surface (144) that positions the light receiving positioning surface along the Y axis; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, An optical sensor described in Technical Idea 2, and any one of Technical Ideas 3 to 6 subordinate to Technical Idea 2, in which the optical center (Cr) of the detection surface in the light receiving detection module is displaced in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, thereby adjusting the light receiving optical axis on a light receiving reference plane (Lr) perpendicular to the YZ plane in the three-dimensional coordinate system.

[0159] (Technical Thought 10) An optical sensor described in technical idea 9, which is provided with a positioning shim (3411, 4211) interposed in at least one of the light-projecting positioning location between the light-projecting positioning surface and the light-projecting base surface and the light-receiving positioning location between the light-receiving positioning surface and the light-receiving base surface so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other in the three-dimensional coordinate system.

[0160] (Technical Thought 11) An optical sensor that detects an external environment by projecting a projected beam (Bp) toward the external environment and receiving a reflected beam (Br) that is reflected from the external environment in response to the projected beam, wherein a three-dimensional coordinate system is defined by an X-axis, a Y-axis, and a Z-axis; a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side toward the light-receiving detection module side along a light-receiving optical axis (Or); a sensor base (14) having a light receiving base surface (144) along the Y axis that positions the light receiving positioning surface; If the light receiving adjustment direction (Dr) perpendicular to the X axis is assumed to be along the light receiving adhesive surface, An optical sensor in which the optical center (Cr) of the detection surface in the light receiving detection module is displaced in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module, thereby adjusting the light receiving optical axis onto a light receiving reference plane (Lr) perpendicular to the YZ plane in the three-dimensional coordinate system.

[0161] (Technical Thought 12) An optical sensor described in any one of Technical Ideas 7 to 11, wherein the amount of deviation (Δr, Δra) of the optical center (Cr) of the detection surface in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module correlates to the inclination angle (θr) of the light receiving adhesive surface relative to the light receiving base surface around the X axis.

[0162] (Technical Thought 13) An optical sensor described in any one of Technical Ideas 7 to 12, wherein the amount of deviation (Δr, Δra) of the optical center (Cr) of the detection surface in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module correlates to the angle (ψr, ψra) formed with the light receiving optical axis of the normal direction (Nr) at the light receiving adhesive surface around the X axis.

[0163] (Technical Thought 14) An optical sensor described in any one of Technical Ideas 7 to 13, wherein the amount of deviation (Δr, Δra) of the optical center (Cr) of the detection surface in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module correlates to the attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis.

[0164] (Technical Thought 15) A housing (2011) configured to include the sensor base, An optical sensor described in any one of technical ideas 7 to 14, wherein the housing has a heat dissipation section (2016) that radiates heat conducted from the sensor base that holds the light receiving lens module via the light receiving detection module to the outside world.

[0165] (Technical Thought 16) A manufacturing method for manufacturing the optical sensor according to any one of Technical Ideas 1 to 7, Measuring an attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light-projection adhesive surface of the light projection lens module to the light projection light source module in a state in which the optical center (Cp) of the light-emitting surface is displaced in the light-projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the attitude angle deviation; and fixing the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded to the sensor base by positioning the light projection positioning surface with the light projection base surface.

[0166] (Technical Thought 17) A manufacturing method for manufacturing the optical sensor according to any one of Technical Ideas 7 to 15, Measuring an attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface about the X axis in a focused state of the reflected beam; bonding the light receiving adhesive surface of the light receiving lens module to the light receiving and detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light receiving adjustment direction with respect to the principal point (Pr) of the light receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the attitude angle deviation; and fixing the light receiving positioning surface of the light receiving detection module to which the light receiving lens module is bonded to the sensor base by positioning the light receiving positioning surface using the light receiving base surface.

[0167] (Technical Thought 18) A manufacturing method for manufacturing an optical sensor according to Technical Idea 10 and any one of Technical Ideas 12 to 15 according to Technical Idea 10, Measuring a light projection attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light projection adhesive surface of the light projection lens module via a light projection adhesive (210) to the light projection light source module in a state in which the optical center (Cp) of the light emitting surface is displaced in the light projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light projection attitude angle deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module adhered to the projection light source module by hardening the light projection adhesive; Measuring a light receiving attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam; bonding the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) generated in the three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; Adjusting the wedge angle (ρr) of the light-receiving positioning shim (3411), which is the positioning shim interposed at the light-receiving positioning location so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other, according to the correlation between the light-projecting error angle and the light-receiving error angle; the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded is directly positioned by the light projection base surface, and the light projection lens module is fixed to the sensor base; and positioning the light receiving positioning surface of the bonded light receiving detection module of the light receiving lens module by the light receiving base surface via the light receiving positioning shim and fixing it to the sensor base.

[0168] (Technical Thought 19) A manufacturing method for manufacturing an optical sensor according to Technical Idea 10 and any one of Technical Ideas 12 to 15 according to Technical Idea 10, Measuring a light projection attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light projection adhesive surface of the light projection lens module via a light projection adhesive (210) to the light projection light source module in a state in which the optical center (Cp) of the light emitting surface is displaced in the light projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light projection attitude angle deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module adhered to the projection light source module by hardening the light projection adhesive; Measuring a light receiving attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam; bonding the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) generated in the three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; Adjusting the wedge angle (ρp) of the light-projection positioning shim (4211), which is the positioning shim interposed at the light-projection positioning location so that the light-projection optical axis and the light-reception optical axis are aligned with each other, according to the correlation between the light-projection error angle and the light-reception error angle; the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded is positioned by the light projection base surface via the light projection positioning shim, and the light projection lens module is fixed to the sensor base; and fixing the light-receiving positioning surface of the light-receiving detection module to which the light-receiving lens module is bonded directly to the light-receiving base surface by positioning the light-receiving positioning surface using the light-receiving base surface.

[0169] (Technical Thought 20) A manufacturing method for manufacturing an optical sensor according to Technical Idea 10 and any one of Technical Ideas 12 to 15 according to Technical Idea 10, Measuring a light projection attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light projection adhesive surface of the light projection lens module via a light projection adhesive (210) to the light projection light source module in a state in which the optical center (Cp) of the light emitting surface is displaced in the light projection adjustment direction with respect to the principal point (Pp) of the light projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light projection attitude angle deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module adhered to the projection light source module by hardening the light projection adhesive; Measuring a light receiving attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis in a focused state of the reflected beam; bonding the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) generated in the three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; Adjusting the wedge angle (ρp) of the light-projection positioning shim (4211), which is the positioning shim interposed at the light-projection positioning location so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other, according to the light-projection error angle; Adjusting the wedge angle (ρr) of the light-receiving positioning shim (3411), which is the positioning shim interposed at the light-receiving positioning location so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other, according to the light-receiving error angle; the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded is positioned by the light projection base surface via the light projection positioning shim, and the light projection lens module is fixed to the sensor base; and positioning the light receiving positioning surface of the bonded light receiving detection module of the light receiving lens module by the light receiving base surface via the light receiving positioning shim and fixing it to the sensor base. [Explanation of symbols]

[0170] 10: Optical sensor, 14: Sensor base, 22: Light emitter module, 26: Light emitter lens module, 42: Light receiver lens module, 45: Light receiver detection module, 142: Light emitter base surface, 144: Light receiver base surface, 210: Light emitter adhesive, 222: Light emitter positioning surface, 226: Light emitting surface, 264: Light emitter adhesive surface, 410: Light receiver adhesive, 424: Light receiver adhesive surface, 452: Light receiver positioning surface, 456: Detection surface, 2011: Housing, 2016: Heat dissipation section, 341 1: Receiver positioning shim, 4211: Emitter positioning shim, Bp: Emitter beam, Br: Reflected beam, Cp, Cr: Optical center, Dp: Emitter adjustment direction, Dr: Receiver adjustment direction, Np, Nr: Normal direction, Lp: Emitter reference plane, Lr: Receiver reference plane, Op: Emitter optical axis, Or: Receiver optical axis, Pp, Pr: Principal point, Δp, Δr: Deviation amount, δψp: Emitter error angle, δψr: Receiver error angle, θp, θr: Inclination angle, ψp, ψr: Formation angle, ρp, ρr: Wedge angle, ωp, ωr: Attitude angle deviation

Claims

1. An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world in response to the projected beam, The X-axis, Y-axis, and Z-axis define a three-dimensional coordinate system; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting the light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding the light projection beam from the light projection light source module to the outside world along a light projection optical axis (Op); a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side to the light-receiving detection module side along a light-receiving optical axis (Or); a sensor base (14) having a light projecting base surface (142) along the Y axis for positioning the light projecting positioning surface, and a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface; The optical sensor includes a light-receiving positioning shim (3411) interposed at a light-receiving positioning location between the light-receiving positioning surface and the light-receiving base surface so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other in the three-dimensional coordinate system, Assuming that a light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection adhesive surface, the optical center (Cp) of the light emitting surface of the light projection light source module is displaced in the light projection adjustment direction relative to the principal point (Pp) of the light projection lens module, whereby the light projection optical axis is adjusted onto a light projection reference plane (Lp) perpendicular to the YZ plane in the three-dimensional coordinate system, A method for manufacturing the optical sensor, wherein, assuming that a light-receiving adjustment direction (Dr) perpendicular to the X-axis is assumed along the light-receiving adhesive surface, an optical center (Cr) of the detection surface of the light-receiving detection module is displaced in the light-receiving adjustment direction with respect to a principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis onto a light-receiving reference plane (Lr) perpendicular to a YZ plane in the three-dimensional coordinate system, Measuring a light projection attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light-projection adhesive surface of the light-projection lens module, via a light-projection adhesive (210), to the light-projection light source module in a state in which the optical center (Cp) of the light-emitting surface is displaced in the light-projection adjustment direction with respect to the principal point (Pp) of the light-projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light-projection attitude angle deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module adhered to the projection light source module by hardening the light projection adhesive; Measuring a light receiving attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis when the reflected beam is in a focused state; Adhering the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) occurring in the three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; adjusting a wedge angle (ρr) of the light-receiving positioning shim in accordance with the correlation between the light-projection error angle and the light-receiving error angle; the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded is directly positioned by the light projection base surface, and the light projection lens module is fixed to the sensor base; and positioning the light receiving positioning surface of the bonded light receiving detection module of the light receiving lens module by the light receiving base surface via the light receiving positioning shim and fixing it to the sensor base.

2. An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world in response to the projected beam, The X-axis, Y-axis, and Z-axis define a three-dimensional coordinate system; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting the light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding the light projection beam from the light projection light source module to the outside world along a light projection optical axis (Op); a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side to the light-receiving detection module side along a light-receiving optical axis (Or); a sensor base (14) having a light projecting base surface (142) along the Y axis for positioning the light projecting positioning surface, and a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface; The optical sensor includes a light-projection positioning shim (4211) interposed at a light-projection positioning location between the light-projection positioning surface and the light-projection base surface so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other in the three-dimensional coordinate system, Assuming that a light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection adhesive surface, the optical center (Cp) of the light emitting surface of the light projection light source module is displaced in the light projection adjustment direction relative to the principal point (Pp) of the light projection lens module, whereby the light projection optical axis is adjusted onto a light projection reference plane (Lp) perpendicular to the YZ plane in the three-dimensional coordinate system, A method for manufacturing the optical sensor, wherein, assuming that a light-receiving adjustment direction (Dr) perpendicular to the X-axis is assumed along the light-receiving adhesive surface, an optical center (Cr) of the detection surface of the light-receiving detection module is displaced in the light-receiving adjustment direction with respect to a principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis onto a light-receiving reference plane (Lr) perpendicular to a YZ plane in the three-dimensional coordinate system, Measuring a light projection attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light-projection adhesive surface of the light-projection lens module, via a light-projection adhesive (210), to the light-projection light source module in a state in which the optical center (Cp) of the light-emitting surface is displaced in the light-projection adjustment direction with respect to the principal point (Pp) of the light-projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light-projection attitude angle deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module adhered to the projection light source module by hardening the light projection adhesive; Measuring a light receiving attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis when the reflected beam is in a focused state; Adhering the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) occurring in the three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; adjusting a wedge angle (ρp) of the light projection positioning shim in accordance with a correlation between the light projection error angle and the light reception error angle; the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded is positioned by the light projection base surface via the light projection positioning shim, and the light projection lens module is fixed to the sensor base; and fixing the light-receiving positioning surface of the light-receiving detection module to which the light-receiving lens module is bonded directly to the light-receiving base surface by positioning the light-receiving positioning surface using the light-receiving base surface.

3. An optical sensor that detects the outside world by projecting a projected beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world in response to the projected beam, The X-axis, Y-axis, and Z-axis define a three-dimensional coordinate system; a light projecting light source module (22) having a light projecting positioning surface (222) and projecting the light projecting beam from a light emitting surface (226); a light projection lens module (26) having a light projection bonding surface (264) to be bonded to the light projection light source module, and guiding the light projection beam from the light projection light source module to the outside world along a light projection optical axis (Op); a light receiving and detecting module (45) having a light receiving positioning surface (452) and detecting the external environment by receiving the reflected beam on a detection surface (456); a light-receiving lens module (42) having a light-receiving adhesive surface (424) to be adhered to the light-receiving detection module, and guiding the reflected beam from the external environment side to the light-receiving detection module side along a light-receiving optical axis (Or); a sensor base (14) having a light projecting base surface (142) along the Y axis for positioning the light projecting positioning surface, and a light receiving base surface (144) along the Y axis for positioning the light receiving positioning surface; a light-projection positioning shim (4211) interposed at a light-projection positioning location between the light-projection positioning surface and the light-projection base surface so that the light-projection optical axis and the light-receiving optical axis are aligned with each other in the three-dimensional coordinate system; The optical sensor includes a light-receiving positioning shim (3411) interposed at a light-receiving positioning location between the light-receiving positioning surface and the light-receiving base surface so that the light-projecting optical axis and the light-receiving optical axis are aligned with each other in the three-dimensional coordinate system, Assuming that a light projection adjustment direction (Dp) perpendicular to the X-axis is along the light projection adhesive surface, the optical center (Cp) of the light emitting surface of the light projection light source module is displaced in the light projection adjustment direction relative to the principal point (Pp) of the light projection lens module, whereby the light projection optical axis is adjusted onto a light projection reference plane (Lp) perpendicular to the YZ plane in the three-dimensional coordinate system, A method for manufacturing the optical sensor, wherein, assuming that a light-receiving adjustment direction (Dr) perpendicular to the X-axis is assumed along the light-receiving adhesive surface, an optical center (Cr) of the detection surface of the light-receiving detection module is displaced in the light-receiving adjustment direction with respect to a principal point (Pr) of the light-receiving lens module, thereby adjusting the light-receiving optical axis onto a light-receiving reference plane (Lr) perpendicular to a YZ plane in the three-dimensional coordinate system, Measuring a light projection attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection bonding surface around the X axis in a focused state of the light projection beam; bonding the light-projection adhesive surface of the light-projection lens module, via a light-projection adhesive (210), to the light-projection light source module in a state in which the optical center (Cp) of the light-emitting surface is displaced in the light-projection adjustment direction with respect to the principal point (Pp) of the light-projection lens module by an amount of displacement (Δp) correlated to the measurement value of the light-projection attitude angle deviation; measuring a projection error angle (δψp) generated in the three-dimensional coordinate system on the projection optical axis of the projection lens module adhered to the projection light source module by hardening the light projection adhesive; Measuring a light receiving attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis when the reflected beam is in a focused state; Adhering the light-receiving adhesive surface of the light-receiving lens module via a light-receiving adhesive (410) to the light-receiving detection module in a state in which the optical center (Cr) of the detection surface is displaced in the light-receiving adjustment direction with respect to the principal point (Pr) of the light-receiving lens module by an amount of displacement (Δr) correlated to the measurement value of the light-receiving attitude angle deviation; measuring a light-receiving error angle (δψr) occurring in the three-dimensional coordinate system on the light-receiving optical axis of the light-receiving lens module adhered to the light-receiving detection module by hardening the light-receiving adhesive; adjusting the wedge angle (ρp) of the light projection positioning shim according to the light projection error angle; adjusting a wedge angle (ρr) of the light-receiving positioning shim according to the light-receiving error angle; the light projection positioning surface of the light projection light source module to which the light projection lens module is bonded is positioned by the light projection base surface via the light projection positioning shim, and the light projection lens module is fixed to the sensor base; and positioning the light receiving positioning surface of the bonded light receiving detection module of the light receiving lens module by the light receiving base surface via the light receiving positioning shim and fixing it to the sensor base.

4. A manufacturing method described in any one of claims 1 to 3, wherein by fixing the light-projecting positioning surface to the sensor base, the amount of deviation (Δp, Δpa) by which the optical center (Cp) of the light-emitting surface deviates in the light-projection adjustment direction relative to the principal point (Pp) of the light-projecting lens module correlates to the inclination angle (θp) of the light-projecting adhesive surface relative to the light-projecting base surface around the X-axis.

5. A manufacturing method described in any one of claims 1 to 3, wherein by fixing the light projection positioning surface to the sensor base, the amount of deviation (Δp, Δpa) by which the optical center (Cp) of the light emitting surface deviates in the light projection adjustment direction relative to the principal point (Pp) of the light projection lens module correlates to the angle (ψp, ψpa) formed with respect to the light projection optical axis in the normal direction (Np) at the light projection adhesive surface around the X axis.

6. A manufacturing method described in any one of claims 1 to 3, wherein by fixing the light projection positioning surface to the sensor base, the amount of deviation (Δp, Δpa) by which the optical center (Cp) of the light emitting surface deviates in the light projection adjustment direction relative to the principal point (Pp) of the light projection lens module correlates to the attitude angle deviation (ωp) of the light projection positioning surface relative to the light projection adhesive surface around the X axis.

7. A manufacturing method described in any one of claims 1 to 3, wherein by fixing the light receiving positioning surface to the sensor base, the amount of deviation (Δr, Δra) by which the optical center (Cr) of the detection surface deviates in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module correlates to the inclination angle (θr) of the light receiving adhesive surface relative to the light receiving base surface around the X axis.

8. A manufacturing method described in any one of claims 1 to 3, wherein by fixing the light receiving positioning surface to the sensor base, the amount of deviation (Δr, Δra) by which the optical center (Cr) of the detection surface deviates in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module correlates to the angle (ψr, ψra) formed with respect to the light receiving optical axis in the normal direction (Nr) at the light receiving adhesive surface around the X axis.

9. A manufacturing method described in any one of claims 1 to 3, wherein by fixing the light receiving positioning surface to the sensor base, the amount of deviation (Δr, Δra) by which the optical center (Cr) of the detection surface deviates in the light receiving adjustment direction relative to the principal point (Pr) of the light receiving lens module correlates to the attitude angle deviation (ωr) of the light receiving positioning surface relative to the light receiving adhesive surface around the X axis.

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