Temperature control unit, temperature control device

Abstract

The present invention provides a temperature control unit that can efficiently control the temperature of an object while reducing the risk of electronic component failure due to leakage of a temperature control medium. The temperature control unit (1) of the present invention controls the temperature of an object, and includes a temperature control medium and a metal fiber sheet (50) in which a space serving as a flow path for the temperature control medium is formed, and the temperature control medium has a latent heat of vaporization of 70 to 200 kJ / kg when changing state from a liquid state to a gas state, and a volume expansion coefficient of 250 times or less when changing state from a liquid state to a gas state under atmospheric pressure.

Description

[Technical Field]

[0001] The present invention relates to a temperature control unit and a temperature control device. This application claims priority based on Japanese Patent Application No. 2018-242667, filed on December 26, 2018, the contents of which are incorporated herein by reference. [Background technology]

[0002] Techniques for managing and adjusting the temperature of circuits, etc., in electrical equipment, electronic equipment, semiconductor equipment, etc. are known. For example, Patent Document 1 describes a cooling device for semiconductor devices such as ICs and LSIs. The cooling device described in Patent Document 1 has a support base and multiple protruding heat dissipation parts, and a cotton-like body impregnated with a volatile liquid is provided in hollow parts formed inside each of the support base and the protruding heat dissipation parts. The cooling device described in Patent Document 1 cools the semiconductor device using the heat of vaporization of the volatile liquid, which is a temperature adjustment medium. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 7-335797 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the examples described in Patent Document 1, alcohol is used as the volatile liquid. Alcohol has a relatively large volume expansion rate when it evaporates from a liquid to a gas. Therefore, in the cooling device described in Patent Document 1, when the alcohol evaporates, it expands rapidly inside the hollow portion, causing the gaseous alcohol to escape from the inside to the outside of the hollow portion, and the alcohol may condense outside the hollow portion and become liquid again, resulting in leakage. For these reasons, when the cooling device described in Patent Document 1 is used, liquid alcohol leaking to the outside of the hollow portion may cause malfunctions in surrounding electronic devices. In addition, when adjusting the temperature of a semiconductor device or the like, it is required to efficiently adjust the temperature of the object.

[0005] The present invention provides a temperature adjustment unit that can efficiently adjust the temperature of an object while reducing the risk of electronic component failure due to leakage of a temperature adjustment medium. [Means for solving the problem]

[0006] The present invention has the following aspects. [1] A temperature control unit for adjusting the temperature of an object, comprising a temperature control medium and a metal body in which a space serving as a flow path for the temperature control medium is formed, wherein the latent heat of vaporization of the temperature control medium when the temperature control medium changes state from a liquid state to a gaseous state is 70 to 200 kJ / kg, and the volume expansion coefficient of the temperature control medium when the temperature control medium changes state from a liquid state to a gaseous state under atmospheric pressure is 250 times or less. [2] The temperature control unit according to [1], wherein the temperature control medium is at least one selected from the group consisting of hydrofluorocarbons and hydrofluoroethers. [3] The temperature control unit according to [1], wherein the temperature control medium is 1,1,2,2,3,3,4-heptafluorocyclopentane. [4] The temperature control unit according to any one of [1] to [3], wherein the metal body is a porous metal body. [5] The temperature control unit according to any one of [1] to [3], wherein the metal body is a metal fiber body. [6] The temperature control unit according to [5], wherein the metal fiber body is a metal fiber sheet containing copper fibers. [7] The temperature control unit according to any one of [1] to [6], further comprising a housing that houses the metal body. [8] The temperature control unit according to [7], wherein the container is made of at least one material selected from the group consisting of a copper plate, an aluminum plate, copper foil, and aluminum foil. [9] A temperature control unit according to any one of [1] to [6], further comprising a support for supporting the metal body, wherein a hollow portion serving as an external flow path for introducing the temperature control medium into the flow path is formed in the support.

[10] The temperature control unit according to [9], wherein a through hole through which the temperature control medium is guided from the hollow portion toward the metal body is formed in the support body.

[11] The temperature control unit according to [9] or

[10] , further comprising a lid for covering the metal body.

[12] The temperature control unit of [6], further comprising a first metal layer provided on the upper side of the metal fiber sheet and a second metal layer provided on the lower side of the metal fiber sheet.

[13] The temperature control unit according to any one of [1] to

[12] , wherein at least a part of the temperature adjustment medium exists in the space in a solid state.

[14] The temperature control unit according to any one of [1] to

[13] , further comprising a pressure reducing section that reduces the pressure in the space.

[15] A temperature control device comprising: a temperature control unit according to any one of [1] to

[14] ; a storage unit for storing the temperature control medium; a supply unit for supplying the temperature control medium from the storage unit to the flow path; and a recovery unit for recovering the temperature control medium from the flow path to the storage unit.

[16] The temperature control device according to

[15] , further comprising a bypass path connecting the supply unit and the recovery unit. [Effects of the Invention]

[0007] According to the present invention, a temperature adjustment unit is provided that can reduce the risk of failure of electronic components due to leakage of a temperature adjustment medium and can efficiently adjust the temperature of an object. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view showing a temperature control unit according to the first embodiment. [Figure 2] 2 is a cross-sectional view of the temperature control unit of FIG. 1 taken along line II-II. [Figure 3]FIG. 10 is a perspective view showing a temperature control unit according to a second embodiment. [Figure 4] 4 is a cross-sectional view of the temperature control unit of FIG. 3 taken along line IV-IV. [Figure 5] FIG. 10 is a perspective view showing a temperature control unit according to a third embodiment. [Figure 6] 6 is a cross-sectional view of the temperature control unit of FIG. 5 taken along the line VI-VI. [Figure 7] FIG. 10 is a perspective view showing a temperature control unit according to a fourth embodiment. [Figure 8] 8 is a cross-sectional view of the temperature control unit shown in FIG. 7 taken along line VIII-VIII. [Figure 9] FIG. 8 is a top view of the temperature control unit of FIG. 7. [Figure 10] FIG. 8 is a top view showing the support of the temperature control unit of FIG. 7. [Figure 11] 10 is a cross-sectional view taken along the line XI-XI in FIG. 9. [Figure 12] FIG. 10 is a top view showing a temperature control unit according to a fifth embodiment. [Figure 13] 13 is a cross-sectional view of the temperature control unit of FIG. 12 taken along line XIII-XIII. [Figure 14] FIG. 13 is a side view of the temperature control unit of FIG. 12. [Figure 15] FIG. 10 is a top view showing a temperature control unit according to a sixth embodiment. [Figure 16] 16 is a cross-sectional view of the temperature control unit of FIG. 15 taken along line XVI-XVI. [Figure 17] FIG. 16 is a side view of the temperature control unit of FIG. [Figure 18] FIG. 13 is a top view showing a temperature control unit according to a seventh embodiment. [Figure 19] 19 is a cross-sectional view of the temperature control unit of FIG. 18 taken along the line XIX-XIX. [Figure 20] FIG. 19 is a side view of the temperature control unit of FIG. 18. [Figure 21] FIG. 13 is a top view showing a temperature control unit according to an eighth embodiment. [Figure 22] 22-XXII cross-sectional view of the temperature control unit of FIG. 21. [Figure 23] FIG. 22 is a side view of the temperature control unit of FIG. 21. [Figure 24] FIG. 13 is a top view showing a temperature control unit according to a ninth embodiment. [Figure 25] FIG. 25 is a side view of the temperature control unit of FIG. 24. [Figure 26] 26 is a cross-sectional view of the temperature control unit of FIG. 24 taken along line XXVI-XXVI. [Figure 27] 27 is a cross-sectional view of the temperature control unit of FIG. 24 taken along line XXVII-XXVII. [Figure 28] FIG. 22 is a schematic diagram showing a temperature control unit according to a tenth embodiment. [Figure 29] 1 is a schematic diagram illustrating a configuration of a temperature control device according to an embodiment. [Figure 30] FIG. 10 is a schematic diagram showing the configuration of a temperature control device according to another embodiment. [Figure 31] FIG. 10 is a schematic diagram showing the configuration of a temperature control device according to another embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] The following definitions of terms apply throughout the specification and claims. "Latent heat of vaporization" is the endothermic energy generated when a temperature control medium changes state from a liquid state to a gas state. The latent heat of vaporization can be measured, for example, by the endothermic peak when measuring the temperature control medium with a differential scanning calorimeter (DSC). "Volumetric expansion coefficient" is the rate of change in volume of a temperature control medium when it changes state from a liquid state to a gas state under atmospheric pressure. The volumetric expansion coefficient can be calculated from the ratio of the volume of the temperature control medium in its liquid state to the volume of the temperature control medium when it vaporizes. The volume of the temperature control medium when it vaporizes can be calculated using the equation of state for an ideal gas (PV=nRT). The symbol "to" indicating a range of values ​​means that the values ​​before and after it are included as the lower and upper limits.

[0010] <Temperature control unit> The temperature control unit of the present invention adjusts the temperature of an object. For example, the temperature of the object can be adjusted by directly or indirectly contacting the object with a metal body. Hereinafter, in this specification, the object to be temperature-controlled may be referred to as a heating element.

[0011] The temperature control unit of the present invention comprises a temperature adjustment medium and a metal body. The temperature control medium is used to change the temperature of the metal body. Specifically, the temperature control medium is present in a space formed in the metal body that serves as a flow path for the temperature control medium. The temperature control unit of the present invention adjusts the temperature of the object by the temperature control medium acting on the metal body from the space and changing the temperature of the metal body.

[0012] The temperature of the temperature adjustment medium may be higher or lower than the temperature of the object. When the temperature of the temperature adjustment medium is higher than the temperature of the object, the temperature control unit of the present invention utilizes the heat exchange between the temperature adjustment medium and the metal body to adjust the temperature so as to increase the temperature of the object. When the temperature of the temperature adjustment medium is lower than the temperature of the object, the temperature control unit of the present invention utilizes the heat exchange between the temperature adjustment medium and the metal body to adjust the temperature so as to lower the temperature of the object.

[0013] In the temperature control unit of the present invention, at least a portion of the temperature adjustment medium exists in a liquid state. For example, when the temperature of the temperature adjustment medium is lower than the temperature of the object, at least a part of the temperature adjustment medium in the liquid state absorbs heat from the object through the metal body, the temperature of the temperature adjustment medium in the liquid state increases, and the temperature of the object decreases. While the temperature of the temperature adjustment medium in the liquid state increases, the heat transferred from the object to the temperature control unit is utilized as sensible heat. Next, when the temperature of the liquid temperature control medium rises to near its boiling point, the heat transferred from the object to the temperature control unit is used as latent heat of vaporization when the temperature control medium changes state from liquid to gas. In this way, when the temperature of the temperature control medium is lower than the temperature of the object, the temperature control unit of the present invention can use the endothermic heat generated when the temperature control medium changes state from liquid to gas to control the temperature of the object. In the temperature control unit of the present invention, the temperature control medium may exist entirely in a liquid state, depending on the type and boiling point of the temperature control medium and the temperature of the temperature control unit.

[0014] In the temperature control unit of the present invention, at least a portion of the temperature adjustment medium may be in a solid state. For example, when the temperature of the temperature adjustment medium is lower than the temperature of the object, if at least a part of the temperature adjustment medium is in a solid state, the temperature adjustment medium absorbs heat from the object through the metal body, the temperature of the solid-state temperature adjustment medium increases, and the temperature of the object decreases. While the temperature of the solid-state temperature adjustment medium increases, the heat transferred from the object to the temperature control unit is utilized as sensible heat. Next, when the temperature of the temperature control medium rises to near its melting point, the heat transferred from the object to the temperature control unit is used as latent heat of fusion when the temperature control medium changes state from solid to liquid. In this way, when the temperature control medium is in a solid state and exists in the space that becomes the flow path, the temperature control unit of the present invention can use the endothermic heat generated when the temperature control medium changes from solid to liquid to control the temperature of the object.

[0015] Furthermore, the temperature of the temperature control medium that has changed from a solid state to a liquid state rises to near its boiling point by absorbing heat from the object as sensible heat. When the temperature of the temperature control medium reaches near its boiling point, the heat transferred from the object to the temperature control unit is used as latent heat of vaporization when the temperature control medium changes state from liquid to gas. In this way, in the temperature control unit of the present invention, when at least a portion of the temperature control medium exists in a solid state, both the latent heat of vaporization and the latent heat of fusion can be used to control the temperature of the object when absorbing heat from the object. Typically, the latent heat of vaporization and the latent heat of fusion are greater than the sensible heat. Therefore, it is possible to expect the effect of effectively absorbing heat from the object without excessively increasing the amount of temperature control medium used, and to more efficiently control the temperature of the object.

[0016] In the present invention, the latent heat of vaporization of the temperature control medium is 70 to 200 kJ / kg, preferably 100 to 150 kJ / kg, more preferably 120 to 150 kJ / kg, and even more preferably 120 to 145 kJ / kg. When the latent heat of vaporization is equal to or greater than the lower limit of the above-mentioned range, the effect of sufficiently lowering the temperature of the metal body can be expected, and the temperature of the object can be efficiently adjusted. By setting the latent heat of vaporization at or below the upper limit of the range, it is possible to prevent the temperature of the metal body from being excessively lowered and to prevent unintended temperature drops. Therefore, when the latent heat of vaporization is at or below the upper limit of the range, it is possible to efficiently adjust the temperature of the object.

[0017] In the present invention, the volume expansion coefficient of the temperature control medium is 250 times or less, and preferably 240 times or less. The lower limit of the volume expansion rate is not particularly limited, and may be, for example, 200 times or more, 150 times or more, or 50 times or more. By keeping the volumetric expansion coefficient below the upper limit of the above-mentioned range, sudden expansion of the temperature control medium can be prevented. Therefore, the temperature control medium in a gaseous state is less likely to escape from the space inside the metal body that serves as the temperature control medium flow path due to sudden expansion. As a result, the risk of malfunction due to leakage of the temperature control medium in electronic devices around the temperature control unit is reduced. Furthermore, since the volume required to prepare for evaporation of the temperature control medium can be reduced, there is the advantage that the temperature control unit, etc. can be designed relatively compactly.

[0018] The temperature control medium is preferably a fluorine-based compound, and is preferably at least one selected from the group consisting of hydrofluorocarbons and hydrofluoroethers, and may be a fluorocarbon. Furthermore, when the temperature control unit is used to control the temperature of electronic components, the temperature control medium is preferably an insulating, non-flammable compound with a low environmental impact, as it is less likely to affect surrounding electronic components.

[0019] The hydrofluorocarbon may be linear or cyclic. Examples of the chain hydrofluorocarbon include 1,1,1,2,4,4,4-heptafluoro-n-butane, 1,1,1,2,2,3,5,5,5-nonafluoro-n-pentane, 1,1,1,2,2,4,5,5,5-nonafluoro-n-pentane, 1,1,1,2,2,3,3,4,6,6,6-undecafluoro-n-hexane, 1,1,1,2,2,3,3,5,6,6,6-undecafluoro-n-hexane, and 1,1,1,2,2,4,5,5,6,6,6-undecafluoro-n-hexane. Examples of cyclic hydrofluorocarbons include 1,1,2,2,3-pentafluorocyclobutane, 1,1,2,2,3,3,4-heptafluorocyclopentane, and 1,1,2,2,3,3,4,4,5-nonafluorocyclohexane. Among these, cyclic hydrofluorocarbons are preferred, and 1,1,2,2,3,3,4-heptafluorocyclopentane is particularly preferred as the hydrofluorocarbon. Zeorora H is an example of commercially available 1,1,2,2,3,3,4-heptafluorocyclopentane.

[0020] For example, the latent heat of vaporization of Zeorora H is 144 kJ / kg, and the volume expansion rate is 235 times. In contrast, the latent heat of vaporization of water (H2O) is 2257 kJ / kg, and the volume expansion rate is 1699 times. Also, the latent heat of vaporization of ethanol (C2H5OH) is 838 kJ / kg, and the volume expansion rate is 494 times.

[0021] Hydrofluoroethers include C3F7OCH3, C3F7OC2H5, C4F9OCH3, C4F9OCH2Cl, C4F9OC2H5, and c-C7F 13 OCH3, c-C7F 13 OC2H5, C7F 15 OCH3, C7F 15 OC3H5, C 10 F 21 OCH3, C 10 F 21 OC2H5 is an example.

[0022] The boiling point of the temperature control medium may be, for example, 25 to 150° C. or 50 to 100° C. The boiling point of the temperature control medium may be set appropriately according to the temperature of the object, that is, according to the temperature range of the object. The melting point of the temperature control medium may be, for example, −140 to 30° C. or −130 to 25° C. The boiling point of the temperature control medium may be set appropriately according to the temperature of the object, that is, according to the temperature range of the object.

[0023] The metal body has a space formed therein that serves as a flow path for the temperature control medium. The metal body is not particularly limited as long as it has a portion that can come into contact with the object to be temperature-controlled and has a space formed therein that serves as a flow path for the temperature control medium. Examples of the metal body include a porous metal body and a metal fiber body. Examples of the porous metal body include porous metals such as stainless steel, nickel, chromium, titanium, titanium alloys, copper, copper alloys, aluminum, and aluminum alloys. The metal fiber body is not particularly limited as long as it is a metal body made of metal fibers.

[0024] The metal fiber sheet will now be described. The metal fiber sheet may be made of metal fibers alone or may be made of fibers other than metal fibers in combination. The metal component constituting the metal fiber is not particularly limited. Specific examples include copper, stainless steel, iron, aluminum, nickel, and chromium. The metal component may be a noble metal such as gold, platinum, silver, palladium, rhodium, iridium, ruthenium, or osmium. Among these, copper, stainless steel, and aluminum are preferred as the metal component constituting the metal fiber. Copper fibers are particularly preferred because they have an excellent balance between rigidity and plastic deformability and are also preferred in terms of the balance between thermal conductivity and economy. Therefore, the metal fiber sheet is preferably a metal fiber sheet containing copper fibers.

[0025] Examples of components other than metals include polyethylene terephthalate (PET) resin, polyvinyl alcohol (PVA), polyolefins such as polyethylene and polypropylene, polyvinyl chloride resin, aramid resin, nylon, acrylic resin, and organic substances with binding and supporting properties such as fibrous materials of these. These organic substances can be used, for example, to assist and improve the shape retention and functionality when producing a metal fiber sheet.

[0026] The structure of the metal fiber sheet is not particularly limited as long as it is in a sheet form, and any sheet structure can be used. For example, the sheet structure of the metal fiber sheet may be a nonwoven fabric in which metal fibers are randomly entangled, a woven fabric having regularity, or a mesh material. The surface of the metal fiber sheet may be flat or may be corrugated or otherwise processed to have irregularities, and is not particularly limited.

[0027] The metal fiber sheet preferably has metal fibers bonded together. Bonded metal fibers means that the metal fibers are physically fixed together to form bonded parts. In the metal fiber sheet, the metal fibers may be directly fixed together at the bonded parts, or some of the metal fibers may be indirectly fixed together via a component other than the metal component. By bonding the metal fibers, voids are formed between the metal fibers constituting the metal fiber sheet. These voids may be formed, for example, by entangling the metal fibers. In the metal fiber sheet, the voids are spaces that serve as flow paths for the temperature control medium. A part of the temperature control medium enters the voids formed in the metal fiber sheet, and the heat conducted from the object to the metal fiber sheet is efficiently conducted to the temperature control medium, further improving the efficiency of temperature control of the metal fiber sheet. The porosity of the metal fiber sheet is preferably 30 to 99%, more preferably 70 to 99%.

[0028] In the prior art cooling device described in Patent Document 1, it is possible to enlarge the space that serves as the flow path for the temperature control medium as a countermeasure against leakage caused by the sudden expansion of the temperature control medium. However, if the space is enlarged, there is a problem that it becomes difficult to apply to electronic devices that are required to be small and thin. In contrast, in the present invention, when the temperature control unit has a metal fiber sheet as the metal body, the temperature control unit can be easily made smaller and thinner, and is easily applied to electronic devices that require smaller size and thinner design. This is because the metal fiber sheet is made by processing metal fibers into a sheet shape, so it is easy to make the sheet thin, and the gaps between the metal fibers can ensure space that serves as a flow path for the temperature control medium.

[0029] The vertical thickness of the metal fiber sheet is preferably 0.1 to 20 mm, more preferably 0.5 to 10 mm. When the thickness of the metal fiber sheet is 0.1 mm or more, the temperature change of the metal fiber sheet due to the action of the temperature control medium is sufficient, and the temperature control efficiency of the temperature control unit is further improved. When the thickness of the metal fiber sheet is 20 mm or less, it is easy to make the temperature control unit thinner. The thickness of the metal fiber sheet can be adjusted in the pressing process described below.

[0030] The metal fiber sheet preferably has metal fibers sintered at the bonded portions, which makes it easier to stabilize the thermal conductivity and homogeneity of the metal fiber sheet. The thermal conductivity of the metal fiber sheet is preferably 1 W / m·K or more. If the thermal conductivity of the metal fiber sheet is 1 W / m·K or more, the temperature control unit can regulate the temperature more efficiently.

[0031] The basis weight of the metal fiber sheet is 30 to 5000 g / m 2 is preferable, and 50 to 1800 g / m 2 The metal fiber sheet has a basis weight of 30 g / m 2 When the basis weight of the metal fiber sheet is 5000 g / m or more, the temperature change of the metal fiber sheet due to the action of the temperature control medium is sufficient, and the efficiency of the temperature control by the temperature control unit is further improved. 2 If it is less than this, it becomes easier to reduce the weight of the metal fiber sheet and the temperature control unit.

[0032] 1cm of metal fiber sheet 2 The coefficient of variation (CV value) of basis weight per unit volume, as defined in JIS Z8101, is preferably 10% or less. Because basis weight is an index indicating weight per unit volume, a coefficient of variation of basis weight of a certain value or less can be said to provide stable values ​​for the thermal conductivity and space factor of the metal fiber sheet. That is, when the coefficient of variation of the basis weight of a metal fiber sheet is 10% or less, the metal fiber sheet is less likely to have extremely large lumps and voids, the metal fiber sheet has excellent homogeneity, and the thermal conductivity value of the temperature control unit is stable. As a result, the efficiency of heat exchange between the temperature control medium and the metal fiber sheet is stabilized, and the temperature of the object can be adjusted by changing the temperature of the metal fiber sheet with more stable heat exchange efficiency, further improving the efficiency of temperature control of the object by the temperature control unit.

[0033] The lower limit of the space factor of the metal fiber sheet is preferably 1% or more, more preferably 2% or more, and even more preferably 4% or more. The upper limit of the space factor of the metal fiber sheet is preferably 70% or less, more preferably 60% or less. If the space factor is less than 1%, pressure loss when introducing the temperature control medium is suppressed, but there is a risk of reduced temperature control (heat exchange) efficiency due to an insufficient amount of fiber. Furthermore, if the space factor exceeds 70%, there is a risk of increased pressure loss when introducing the temperature control medium.

[0034] The average fiber length of the metal fibers is not particularly limited. However, the average fiber length of the metal fibers is, for example, preferably 1 to 10 mm, more preferably 3 to 5 mm. When the average fiber length of the metal fibers is in the range of 1 to 10 mm, the thermal conductivity and uniformity of the temperature control unit tend to be stable. The average fiber diameter of the metal fibers is not particularly limited. However, the average fiber diameter of the metal fibers is preferably 1 to 70 μm, more preferably 2 to 50 μm, and even more preferably 2 to 30 μm. If the average fiber diameter of the metal fibers is less than 1 μm, the rigidity of the metal fibers decreases, and so-called lumps are likely to occur when producing a metal fiber sheet. The formation of lumps makes it difficult to stabilize the thermal conductivity and homogeneity of the metal fiber sheet. If the average fiber diameter of the metal fibers exceeds 70 μm, the rigidity of the metal fibers may hinder fiber entanglement. The cross section of the metal fiber perpendicular to the longitudinal direction may have any shape, such as a circle, an ellipse, a substantially square, or an irregular shape. The average fiber diameter of metal fibers is calculated as the circle-equivalent diameter of the projected area of ​​a cross section perpendicular to the longitudinal direction of the fiber. Approximately 10 to 20 fibers are selected, and the calculated fiber diameter is taken as the average fiber diameter. In the case of pyramidal fibers, the average fiber diameter can be determined from a cross section in the normal direction at a length half the fiber length. The aspect ratio of the metal fibers is preferably 33 to 10,000. If the aspect ratio is less than 33, the metal fibers are less likely to be entangled, which may reduce the strength of the temperature control unit. If the aspect ratio exceeds 10,000, the homogeneity of the metal fiber sheet may decrease, which may make it difficult to stabilize the thermal conductivity of the temperature control unit.

[0035] Methods for producing metal fiber sheets include a dry method in which metal fibers are compression molded; and a method in which a slurry containing metal fibers is made into paper by a wet papermaking method. When a metal fiber sheet is obtained by a dry method, a web mainly composed of metal fibers obtained by a carding method, an airlaid method, or the like can be compression molded. During compression molding, the metal fibers may be impregnated with a binder to impart bonding between the metal fibers. Examples of binders that can be used include organic binders such as acrylic adhesives and inorganic binders such as colloidal silica.

[0036] When producing a metal fiber sheet by a wet papermaking method, wet papermaking can be carried out in a papermaking machine using a slurry in which metal fibers and the like are dispersed in an aqueous medium. Additives such as fillers, dispersants, thickeners, antifoaming agents, paper strength agents, sizing agents, flocculants, colorants, and fixing agents may be added to the slurry. The wet sheet obtained by wet papermaking may be subjected to a fiber entanglement process in which metal fibers and the like are entangled with each other. The fiber entanglement process may involve spraying a high-pressure water jet onto the surface of the wet sheet, which entangles the metal fibers or fibers mainly composed of metal fibers throughout the entire sheet. After this process, the wet sheet is passed through a dryer process and then wound up.

[0037] The sheet obtained through the fiber entanglement process and the drying process can be subjected to a pressing process before bonding metal fibers, etc. By performing the pressing process, extremely large voids formed between the metal fibers can be reduced and uniformity can be improved. Furthermore, the thickness of the metal fiber sheet can be adjusted by appropriately adjusting the pressure during the pressing process.

[0038] As a method for bonding metal fibers and the like, a sintering process is preferably carried out in which the metal fiber sheet is sintered. By sintering and bonding the metal fiber sheet, the metal fibers and the like can be reliably bonded and the metal fibers can be fixed together. As a result, the coefficient of variation (CV value) of the basis weight of the metal fiber sheet becomes even more stable and smaller. By carrying out the sintering process, the contact points between the metal fibers are bonded, reliably forming bonded portions, and the homogeneity and thermal conductivity of the metal fiber sheet tend to be stable. The metal fiber sheet that has undergone the sintering process is preferably further subjected to a pressing process. By performing a pressing process after the sintering process, the homogeneity of the metal fiber sheet is further improved and the metal fiber sheet can be made thinner. The pressing process after sintering causes the metal fibers and the like to shift not only in the thickness direction but also in the planar direction. This allows the metal fibers and the like to be arranged in areas that were voids during sintering, improving homogeneity, and this state is maintained by the plastic deformation characteristics of the metal fibers. The pressure of the pressing process performed after the sintering process can be appropriately set taking into account the thickness of the metal fiber sheet.

[0039] In the following, a number of embodiments to which the present invention is applied will be described. In the drawings used in the following description, the dimensional ratios of the components and the like are not necessarily the same as in reality. In the following embodiments, the same components will be described using the same reference numerals, and redundant description will be omitted.

[0040] [First embodiment] Fig. 1 is a perspective view showing a temperature control unit of the first embodiment. Fig. 2 is a cross-sectional view of the temperature control unit taken along line II-II in Fig. 1. In Fig. 2, "D1" indicates the thickness of the metal fiber sheet 50 in the temperature control unit 1 of the first embodiment. The temperature control unit 1 further includes a container 30 in addition to the metal fiber sheet 50 and a temperature control medium (not shown).

[0041] The housing 30 houses a metal fiber sheet 50, which is one embodiment of the metal body of the present invention. The structure of the housing 30 is not particularly limited as long as it is a structure that allows a temperature control medium to be introduced into the housing 30. In the temperature control unit 1, the housing 30 has a first open end 11 and a second open end 12. In this way, both ends of the housing 30 are open ends. The temperature control medium introduced into the housing 30 from the first open end 11 controls its temperature inside the metal fiber sheet 50, etc., and is then discharged from the second open end 12. By providing the first open end 11 and the second open end 12, the temperature control medium can be introduced into the housing 30 from the first end and discharged from the second open end 12.

[0042] There are no particular limitations on the shape of the container 30, and any structure or shape can be adopted. The container 30 can be made of a metal material, a ceramic material, a resin material, or the like. Examples of metal materials include stainless steel, copper, aluminum, alumina, etc. Examples of ceramic materials include zirconia, barium titanate, silicon carbide, silicon nitride, aluminum nitride, etc. Examples of resin materials include polyacrylic acid resins such as polymethacrylic acid and polycyanoacrylic acid (polycyanoacrylate); polyvinylpyrrolidone resin; polyester resins such as polyethylene terephthalate; polypropylene resin; fluororesins such as polytetrafluoroethylene; polyimide resin; polyamide resins including aramid; polyparaphenylene benzobisoxazole resin, etc. Among these, from the viewpoint of temperature regulation efficiency, metal materials with high thermal conductivity such as stainless steel, copper, and aluminum are preferable as the material for the container 30. Furthermore, it is preferable that at least one surface of the container 30 that comes into contact with an object such as a heat generating body is made of a thermally conductive material such as metal.

[0043] When the container 30 is made of metal, it is preferable that the metal fiber sheet 50 is bonded to the container 30. When the metal fiber sheet 50 and the container 30 are bonded to each other, the efficiency of heat exchange between the metal fiber sheet 50 and the container 30 is further improved. As a method for bonding the metal fiber sheet 50 and the container 30, for example, there is a method in which the container 30 is placed on the metal fiber sheet 50 in the manner shown in FIG. 1 and then sintered.

[0044] When the housing 30 is made of a metal material, it may be sintered while housing the metal fiber sheet 50. By using this method, a temperature control unit can be obtained in which the housing 30 and the metal fiber sheet 50 are bonded together. In a temperature control unit in which the housing 30 and the metal fiber sheet 50 are bonded together, heat from the heating element is more easily transmitted to the metal fiber sheet 50, further improving the efficiency of temperature control by the temperature control unit. For example, the housing to be sintered may be made of at least one material selected from the group consisting of a copper plate, an aluminum plate, copper foil, and aluminum foil.

[0045] In the temperature control unit 1, the cross-sectional shape and opening surface area of ​​the first opening end 11 and the second opening end 12 can be selected arbitrarily. By appropriately selecting the opening surface areas of the first opening end 11 and the second opening end 12, it is possible to adjust the efficiency of temperature control by the temperature control unit 1. For example, when it is desired to further increase the efficiency of temperature control, the opening surface area of ​​the first opening end 11 can be increased to increase the efficiency of introducing the temperature control medium and increase the temperature change of the metal fiber sheet due to the action of the temperature control medium.

[0046] The temperature control unit 1 may further include a temperature control medium introduction means (not shown) for introducing a temperature control medium into the housing 30. The temperature control medium introduction means can introduce the temperature control medium into the housing 30. The temperature control medium introduction means is not particularly limited. Examples of temperature control medium introduction means include a compressor, a liquid pump, and the like. By introducing the temperature control medium into the container 30, it is possible to change the temperature of the metal fiber sheet 50 contained in the container 30. When the metal fiber sheet 50 is made of copper fibers, aluminum fibers, or the like, the temperature control medium easily changes the temperature of the metal fiber sheet 50, and the temperature of the object is efficiently adjusted. In particular, when the area of ​​the opening surface of the first open end 11 is small and it is difficult to introduce the temperature adjustment medium, the above-mentioned introduction means can be suitably applied to further improve the efficiency of temperature adjustment.

[0047] In the temperature control unit 1, the entire area of ​​the metal fiber sheet 50 is accommodated in the accommodation body 30, but only a portion of the area of ​​the metal fiber sheet 50 may be accommodated in the accommodation body 30. In this case, by introducing a temperature control medium into the accommodation body 30, the temperature of the metal fiber sheet 50 in the portion of the area accommodated in the accommodation body 30 can be locally changed. In the temperature control unit 1, both ends of the housing 30 are open, but the temperature control unit 1 is not limited to this, and only one end may be open, or both ends may be closed. However, when both ends are closed, a temperature control medium inlet for introducing a temperature control medium into the housing 30 may be formed at any location on the housing 30. When an inlet is formed on the housing 30, an outlet for discharging the temperature control medium from the inside of the housing 30 may also be formed at any location on the housing 30.

[0048] (Operation and effect of the first embodiment) In the temperature control unit 1, the metal fiber sheet 50 is accommodated inside the accommodation body 30. Therefore, in the temperature control unit 1, a temperature adjustment medium is introduced into the accommodation body 30, and the temperature adjustment medium is continuously held in the voids of the metal fiber sheet 50. As a result, the temperature of the metal fiber sheet 50 changes efficiently. By changing the temperature of the metal fiber sheet 50, the temperature of the accommodation body 30 in the portion in contact with the metal fiber sheet 50 can be changed integrally with the metal fiber sheet 50. As described above, the temperature control unit 1 can effectively adjust and control the temperature of the object by contacting the container 30 with the part where the temperature change occurs.

[0049] [Second embodiment] Fig. 3 is a perspective view showing a temperature control unit according to the second embodiment, and Fig. 4 is a cross-sectional view of the temperature control unit of Fig. 3 taken along line IV-IV. The temperature control unit 2 of the second embodiment further includes a support 20 in addition to the metal fiber sheet 50 and a temperature control medium (not shown). In Fig. 3, "D2" indicates the thickness of the metal fiber sheet 50 in the temperature control unit 2. The arrow in Fig. 4 indicates an example of the direction of the temperature control medium leading out from the through hole 24.

[0050] The support 20 supports the metal fiber sheet 50. A hollow portion 22 is formed in the support 20. The hollow portion 22 is an external flow path for introducing a temperature control medium into the voids in the metal fiber sheet 50, which serve as flow paths for the temperature control medium. 4, a partition section 23 is provided inside the support body 20. In the temperature control unit 2, by providing the partition section 23 inside the support body 20, a plurality of hollow sections 22 that serve as external flow paths for the temperature control medium are formed inside the support body 20.

[0051] A plurality of through holes 24 are formed in the upper surface of the support body 20. The through holes 24 penetrate from the upper surface of the support body 20 to the hollow portion 22. By forming the through holes 24 on the upper surface of the support 20 , the temperature control medium flowing through the hollow portion 22 can be guided from the through holes 24 toward the metal fiber sheet 50 .

[0052] In the temperature control unit 2, a temperature control medium is introduced from the open end 26 of the support 20 into the hollow portion 22, which is an external flow path. The temperature of the support 20 is adjusted by the temperature control medium flowing inside the hollow portion 22, which is an external flow path. Accordingly, the temperature of the metal fiber sheet 50 in contact with the temperature-adjusted support 20 is adjusted. In other words, the temperature control medium introduced into the hollow portion 22 can change the temperature of the metal fiber sheet 50 via the support 20. Furthermore, in the temperature control unit 2, the through holes 24 are formed on the upper surface of the support 20, and the temperature control medium flowing through the hollow portion 22 is guided from the through holes 24 toward the metal fiber sheet 50. The temperature control medium guided from the through holes 24 is introduced into the gaps between the metal fibers (i.e., the flow paths within the metal fiber sheet 50), and can change the temperature of the metal fiber sheet 50 by acting from inside the metal fiber sheet 50. Because the metal fiber sheet 50 is made of metal fibers, the temperature control medium enters the gaps between the metal fibers, and in the process of passing through the gaps, the temperature of the metal fiber sheet 50 is changed efficiently.

[0053] In this way, by forming the through holes 24 in the support body 20, the temperature adjustment medium can reach the metal fiber sheet 50 directly from the hollow portion 22. Therefore, the temperature of the metal fiber sheet 50 can be changed effectively. Here, the temperature control medium that has changed the temperature of the metal fiber sheet 50 is discharged from the metal fiber sheet 50, but the part from which the temperature control medium is discharged from the metal fiber sheet 50 is not particularly limited. The part may be the top surface of the metal fiber sheet 50 or a side surface of the metal fiber sheet 50.

[0054] The support body 20 can be made of the same material as the above-mentioned container 30. From the viewpoint of temperature regulation efficiency, the material of the support body 20 is preferably a metal material with high thermal conductivity. The temperature control unit 2 can have any three-dimensional shape depending on the purpose of use, etc. The three-dimensional shape of the temperature control unit 2 may be, for example, a cylindrical shape, an elliptical cylindrical shape, a polygonal cylindrical shape, or the like.

[0055] The shape and structure of the support 20 are not particularly limited as long as it is possible to introduce a temperature control medium into the hollow portion 22 inside the support 20. If the area of ​​the opening surface of the open end 26 is small and it is difficult to introduce the temperature control medium, or if it is desired to further improve the efficiency of temperature control, a means for introducing the temperature control medium into the hollow portion 22 can be used. The means for introducing the temperature control medium is not particularly limited. There is no particular limitation on the diameter of the through holes 24 and it can be set arbitrarily. There is no particular limitation on the number of the through holes 24 and it can be set arbitrarily. The intervals between the through holes 24 may be regular or irregular.

[0056] In the temperature control unit 2, the vertical thickness D2 of the metal fiber sheet 50 is preferably 0.1 to 5 mm. When the thickness D2 of the metal fiber sheet 50 is 0.1 mm or more, the temperature control medium can be easily introduced sufficiently, further improving the efficiency of temperature control in the temperature control unit 2. When the thickness D2 of the metal fiber sheet 50 is 5 mm or less, the metal fiber sheet 50 can be easily made thin, and the temperature control unit 2 can be easily made thin as well.

[0057] The temperature control unit 2 may further include other components, such as a mounting portion for mounting the temperature control unit 2 to an object such as a heating element, and an auxiliary member for introducing a temperature control medium from the open end 26. 3 and 4, the lower surface of the metal fiber sheet 50 is covered by the support 20, and the side and upper surfaces of the metal fiber sheet 50 are open. However, the temperature control unit of the second embodiment is not limited to the form in which the side and upper surfaces of the metal fiber sheet 50 are open, and the side and upper surfaces of the metal fiber sheet 50 may not be open. In a configuration in which the side and top surfaces of the metal fiber sheet 50 are not open surfaces, the temperature control medium is not discharged from the closed surface of the metal fiber sheet 50, and is instead efficiently discharged to the open surface of the metal fiber sheet 50.

[0058] (Effects of the second embodiment) In the temperature control unit 2 described above, the temperature of the support body 20 and the metal fiber sheet 50 can be changed efficiently by flowing the temperature adjustment medium through the hollow portion 22. Furthermore, since the temperature control unit 2 is provided with the partition 23, the temperature control medium introduced into the hollow portion 22 is guided to the flow path formed by the partition 23. Therefore, the temperature control medium flowing through the hollow portion 22 is efficiently discharged from the through holes 24, and the temperature of the metal fiber sheet 50 can be efficiently changed. Therefore, the temperature control unit 2 can efficiently adjust the temperature of the object, further improving the efficiency of temperature adjustment. The temperature control unit 2 can control the magnitude of temperature change and the efficiency of temperature control by adjusting the size of the voids formed inside the metal fiber sheet 50. Therefore, it is not necessary to increase the amount of temperature control medium used in order to increase the temperature change of the metal fiber sheet. Therefore, the temperature control unit 2 can efficiently adjust the temperature of the object, further improving the efficiency of temperature control. Furthermore, the temperature control unit 2 can adjust the magnitude of temperature change locally within the surface of the metal fiber sheet 50 by adjusting the hole diameter of the through holes 24. Therefore, the temperature control unit 2 can control the flow rate of the temperature adjustment medium by adjusting the hole diameter of the through holes 24, and can adjust the amount of temperature change at any location. Therefore, the temperature control unit 2 can control the temperature of an object while locally adjusting it.

[0059] [Third embodiment] Fig. 5 is a perspective view showing a temperature control unit of a third embodiment. Fig. 6 is a cross-sectional view taken along line VI-VI of the temperature control unit of Fig. 5. The arrows in Fig. 6 show an example of the direction of the temperature control medium flowing inside the temperature control unit of Fig. 5. The temperature control unit 3 further includes a lid 25 in addition to the metal fiber sheet 50, a temperature control medium (not shown), and the support 20. The lid 25 covers the metal fiber sheet 50, which is a metal body.

[0060] In the temperature control unit 3, through holes 24a and 24b are formed in the upper surface of the support body 20. The through holes 24a and 24b penetrate from the upper surface of the support body 20 to the hollow portions 22a and 22b. Here, the arrows in Figure 6 indicate the direction of the temperature control medium being introduced from the hollow portion 22a through the through hole 24a into the voids of the metal fiber sheet 50, and the direction of the temperature control medium being led out from the voids of the metal fiber sheet 50 through the through hole 24b into the hollow portion 22b. The through holes 24a are formed in the upper surface of the support 20, so that the temperature control medium flowing through the hollow portion 22a is guided from the through holes 24a toward the voids in the metal fiber sheet 50. Because the through holes 24b are formed on the upper surface of the support 20, the temperature control medium that has changed the temperature of the metal fiber sheet 50 is introduced into the hollow portion 22b, flows through the hollow portion 22b, and is discharged from the open end 26. The diameters of the through holes 24a and 24b are not particularly limited and can be set arbitrarily. The number of the through holes 24a and 24b is not particularly limited and can be set arbitrarily. The intervals between the through holes 24a and 24b may be regular or irregular.

[0061] In the temperature control unit 3, the lid 25 covers the upper surface of the metal fiber sheet 50, so that the temperature control medium that has entered the gaps in the metal fiber sheet 50 is less likely to be discharged from the upper surface of the metal fiber sheet 50 to the outside of the temperature control unit 3. Therefore, in the temperature control unit 3, heat exchange occurs more effectively between the temperature control medium and the metal fiber sheet 50, and the temperature control medium can effectively change the temperatures of the metal fiber sheet 50 and the lid 25. As a result, when an object is brought into direct contact with the lid 25, the temperature control unit 3 can more efficiently control the temperature of the object.

[0062] The shape of the lid 25 is not limited to the plate shape shown in Figures 5 and 6, and any structure and shape can be used. The lid 25 can be made of a known thermally conductive material such as a metal. Examples of such thermally conductive materials include stainless steel, copper, and aluminum. Considering the efficiency of temperature control, a metal material with high thermal conductivity is preferable as the material for the lid 25. For example, the lid 25 can be made of a copper plate or copper foil. For example, when the object is brought into direct contact with the lid 25, heat is transmitted from the heating element to the lid 25 and the metal fiber sheet 50. At this time, heat exchange occurs between the transmitted heat and the temperature control medium, which is held inside the metal fiber sheet 50 and passes through it. As a material for the lid body 25, a material that easily causes heat exchange with the object and a material that easily causes heat exchange with the metal fiber sheet 50 are suitable.

[0063] 5 and 6, the side surface of the metal fiber sheet 50 is an open surface. However, in the temperature control unit 3, the side surface of the metal fiber sheet 50 does not have to be an open surface. In a configuration in which the side surface of the metal fiber sheet 50 is not an open surface, the temperature control medium is preferentially discharged from the hollow portion 22b.

[0064] 5 and 6, the temperature control unit 1 may be laminated with the support body 20 instead of the metal fiber sheet 50 and the lid body 25. In this case, by forming through holes in the lower surface of the housing body 30, the temperature adjustment medium introduced from the hollow portion 22a may flow through the through holes 24a and the through holes formed in the lower surface of the housing body 30, thereby changing the temperature of the metal fiber sheet 50 housed inside the housing body 30.

[0065] (Operation and effect of the third embodiment) The temperature control unit 3 described above further includes the cover 25, which further improves the efficiency of heat exchange between the temperature control medium and the metal fiber sheet 50, and also improves the efficiency of heat exchange between the temperature control unit 3 and the object. In this way, the temperature control unit 3 can efficiently exchange heat between the temperature control medium and the object via the metal fiber sheet 50, dramatically improving the efficiency of temperature control. In the temperature control unit 3, the efficiency of temperature adjustment can be adjusted locally within the surface of the metal fiber sheet 50 by adjusting the hole diameter of the through holes 24a, 24b. That is, with the temperature control unit 3, the flow rate of the temperature adjustment medium can be controlled by adjusting the hole diameter of the through holes 24a, 24b, and the efficiency of temperature adjustment at any location can be increased. Therefore, with the temperature control unit 3, the temperature of the object can be adjusted locally by using the metal fiber sheet 50 in the area where a local temperature change occurs. Furthermore, in the temperature control unit 3, the magnitude of the temperature change in the metal fiber sheet 50 and the efficiency of temperature regulation of the object can be adjusted by adjusting the size of the voids formed inside the metal fiber sheet 50. Therefore, it is easy to make the temperature control unit 3 thinner and lighter without compromising the efficiency of temperature regulation.

[0066] [Fourth embodiment] 7 is a perspective view showing a temperature control unit of the fourth embodiment. The temperature control unit 4 includes a metal fiber sheet 50, a temperature control medium (not shown), a support 21, and a lid 25. A hollow portion is formed inside the support 21 to serve as an external flow path for the temperature control medium. A temperature control medium inlet 41 is formed in a first end face 40 of the support 21 for introducing the temperature control medium into the hollow portion. Furthermore, a temperature control medium outlet 43 is formed in a second end face 42 of the support 21 for discharging the temperature control medium from the hollow portion.

[0067] Figure 8 is a cross-sectional view of the temperature control unit 4 taken along line VIII-VIII. The arrows in Figure 8 indicate an example of the direction of the temperature control medium introduced into the temperature control unit 4 and an example of the direction of the temperature control medium discharged from the temperature control unit 4. As shown in Figure 8, hollow sections 27 and 28 that serve as external flow paths for the temperature control medium are formed inside support body 21 of temperature control unit 4. Hollow sections 27 and 28 are each defined by a partition section 29.

[0068] FIG. 9 is a top view of the temperature control unit 4. The hollow portion 27 branches into multiple parts according to the positions of the mounting portions S1 to S6. Each end of the multiple branched hollow portion 27 is located below each of the mounting portions S1 to S6. The hollow portion 28 branches into a plurality of parts according to the positions of the through holes 37. These plurality of branched hollow portions join together near the outlet 43.

[0069] In the temperature control unit 4, a lid 25 covers the upper surface of the metal fiber sheet 50. As shown in Fig. 9, a plurality of mounting portions S1 to S6 are provided on the upper surface of the lid 25. Semiconductor devices (elements) such as IC chips and LEDs are mounted in the mounting portions S1 to S6. Of these mounting portions S1 to S6, heating elements H1 and H3 are disposed in mounting portions S1 and S3, respectively. Here, the dotted lines in Fig. 9 indicate hollow portions 27 and 28 formed inside support body 21.

[0070] Fig. 10 is a top view showing the support body 21 of the temperature control unit of Fig. 7. As shown in Fig. 10, through holes 31 to 36 are formed on the top surface of the support body 21, penetrating from the top surface of the support body 21 to the hollow portion 27. These through holes 31 to 36 are formed on the top surface of the support body 21 in accordance with the positions of the mounting portions S1 to S6. 10, a plurality of through holes 37 are formed on the upper surface of the support body 21, penetrating from the upper surface of the support body 21 to the hollow portion 28. These plurality of through holes 37 are formed on the upper surface of the support body 21 around each of the through holes 31 to 36.

[0071] 9, when a temperature control medium is introduced into the temperature control unit 4, the hollow portion 27 becomes an external flow path for the temperature control medium introduced from the inlet 41, and the hollow portion 28 becomes an external flow path for the temperature control medium discharged from the outlet 43. When the temperature control medium is introduced into the temperature control unit 4, the flow of the temperature control medium is guided according to the positions of the mounting portions S1 to S6 and branches into multiple paths.

[0072] 11 is a cross-sectional view taken along the line XI-XI in FIG. 9. The flow of the temperature control medium that branches into multiple branches within the hollow portion 27 is guided to the positions of the through holes 31-36 and is discharged from each of the through holes 31-36. For example, the temperature control medium that is discharged from the through hole 33 is introduced into the voids in the metal fiber sheet 50. The temperature control medium that has been introduced into the voids in the metal fiber sheet 50 exchanges heat with the heating element H3 via the metal fiber sheet 50 and the lid 25. Here, the through holes 33 are formed in the support body 21 according to the position of the mounting portion S3. Therefore, the mounting portion S3, which is close to a part of the metal fiber sheet 50 whose temperature has changed locally, also experiences a local change in temperature. Therefore, the temperature control unit 4 can locally change the temperature of the mounting portion S3 by the temperature adjustment medium led out from the through holes 33, and locally adjust the temperature of the heating element H3 arranged in the mounting portion S3 among the multiple mounting portions. In this way, the temperature control medium drawn out from each through hole 31 to 36 locally changes the temperature of each mounting portion S1 to S6 via the metal fiber sheet 50 around each through hole 31 to 36, and locally controls the temperature of the heating element mounted in each mounting portion S1 to S6. Here, for example, the temperature adjustment medium that has adjusted the temperature of the heating element H3 is introduced into the hollow portion 28 through the through hole 37 formed around the through hole 33 and is discharged from the outlet 43.

[0073] 11, in the temperature control unit 4, like the temperature control unit 3, a lid 25 covers the top surface of the metal fiber sheet 50. Furthermore, in the temperature control unit 4, a support 21 covers the side surface of the metal fiber sheet 50. Therefore, the temperature control medium that has entered the voids in the metal fiber sheet 50 is not discharged to the outside of the temperature control unit 4 from either the top surface or the side surface of the metal fiber sheet 50. Therefore, the temperature control unit 4 can control the flow of the temperature control medium more reliably than the temperature control unit 3, and can dramatically increase the efficiency of heat exchange between the temperature control medium and the metal fiber sheet 50 at a desired position.

[0074] The area of ​​the flow path surface of hollow portions 27 and 28 is not particularly limited and can be set arbitrarily. For example, if it is desired to relatively increase the efficiency of temperature adjustment by the temperature adjustment medium, the area of ​​the flow path surface can be increased, and if it is desired to relatively decrease the efficiency of temperature adjustment, the area of ​​the flow path surface can be decreased.

[0075] There are no particular limitations on the diameter of the through holes 31 to 37 and they can be set arbitrarily. For example, to achieve more localized temperature control with the temperature control unit 4, the diameter of the through holes 31 to 36 that serve as outlet holes for the temperature control medium can be made smaller, and to achieve higher temperature control efficiency with the temperature control unit 4, the diameter of the through holes 31 to 36 can be made larger.

[0076] (Operation and effect of the fourth embodiment) The temperature control unit 4 described above has a hollow portion 27 that branches into multiple portions according to the positions of the mounting portions S1 to S6. Therefore, the temperature control unit 4 can efficiently guide the temperature control medium introduced from the inlet 41 to the positions of the mounting portions S1 to S6. Furthermore, as described above, the temperature control medium guided to the positions of the mounting portions S1 to S6 can locally change the temperature of the metal fiber sheet 50 around each of the through holes 31 to 36. The local change in temperature of the metal fiber sheet 50 also locally changes the temperature of the lid 25 in the portion where each of the mounting portions S1 to S6 is provided. Therefore, the temperature of the heating elements arranged in each of the mounting portions S1 to S6 can be locally adjusted. Furthermore, the temperature control unit 4 can adjust the magnitude of temperature change and the efficiency of heat exchange, and selectively change the temperature of the heating elements placed in each of the mounting sections S1 to S6, by appropriately selecting the shape of the hollow section 27 and the hole diameter of the through holes 31 to 36. Therefore, the temperature control unit 4 can arbitrarily select a heating element to be the target of temperature adjustment according to the heat generation state of the heating element attached to each mounting section, and locally adjust its temperature. For example, in the case of circuit boards used in electrical equipment, elements of different types and materials mounted on the same board may have different upper limits on their allowable heat resistance temperatures. In this case, it is necessary to prioritize cooling of elements with lower allowable temperatures over other elements. In such cases, it is more efficient to locally adjust the temperature of each element, for example, to a lower value, rather than adjusting the temperature of the entire board to match the element with the lowest allowable temperature. Furthermore, similar to the temperature control units 2 and 3, the temperature control unit 4 can be made thinner and lighter.

[0077] [Fifth embodiment] Fig. 12 is a top view showing a temperature control unit of the fifth embodiment, Fig. 13 is a cross-sectional view of the temperature control unit taken along line XIII-XIII in Fig. 12, and Fig. 14 is a side view of the temperature control unit in Fig. 12. The temperature control unit 5 of the fifth embodiment further includes, in addition to the metal fiber sheet 50 and a temperature control medium (not shown), a first metal layer 51 provided on the upper side of the metal fiber sheet 50, a second metal layer 52 provided on the lower side of the metal fiber sheet 50, and a means for introducing the temperature control medium (not shown).

[0078] As shown in FIG. 13 , the first metal layer 51 is a layer in contact with the first surface A of the metal fiber sheet 50. The first surface A is the upper surface of the metal fiber sheet 50. The second metal layer 52 is a layer in contact with the second surface B of the metal fiber sheet 50. In the temperature control unit 5, the second surface B is the lower surface of the metal fiber sheet 50, and is a surface facing parallel to the first surface A. In this way, the metal fiber sheet 50 is sandwiched between the first metal layer 51 and the second metal layer 52.

[0079] The first metal layer 51 and the second metal layer 52 may be metal plates or metal foils. The type of material for the metal plates or metal foils is not particularly limited. Details and preferred embodiments of the materials for the metal plates or metal foils are the same as those described for the material of the metal fiber sheet 50. The materials of the first metal layer 51 and the second metal layer 52 may be different from each other or may be the same.

[0080] There are no particular limitations on the thickness of the first metal layer 51 and the second metal layer 52. From the viewpoint of flexibility of the temperature control unit 5, the thickness of the first metal layer 51 is preferably 18 to 500 μm, and the thickness of the second metal layer 52 is preferably 100 to 5000 μm. When the thicknesses of the first metal layer 51 and the second metal layer 52 are equal to or greater than the respective lower limit values, the durability of the temperature control unit 5 is improved. When the thicknesses of the first metal layer 51 and the second metal layer 52 are equal to or less than the respective upper limit values, the temperature control unit 5 has excellent flexibility. The thickness of the first metal layer 51 and the thickness of the second metal layer 52 may be different from each other or may be the same.

[0081] In the temperature control unit 5, the first metal layer 51 is a metal foil, and the second metal layer 52 is a metal plate. In this case, the metal foil (first metal layer 51) is preferably a copper foil or an aluminum foil, more preferably a copper foil. The metal plate (second metal layer 52) is preferably a copper plate or an aluminum plate, more preferably a copper plate. In the temperature control unit 5, the thickness of the first metal layer 51 (metal foil) is thinner than the thickness of the second metal layer 52 (metal plate). In this case, taking into consideration the durability, flexibility, and ease of processing of the temperature control unit 5, the thickness of the first metal layer 51 (metal foil) is preferably 18 to 500 μm. The thickness of the second metal layer 52 (metal plate) is preferably 100 to 500 μm. In this way, when the first metal layer 51 is a metal foil and the second metal layer 52 is a metal plate, the temperature control unit 5 has excellent flexibility, and the temperature control unit 5 can be processed even more easily. In the temperature control unit 5, the first metal layer 51 and the second metal layer 52 are parallel to each other, but the present invention is not limited to a form in which the first metal layer 51 and the second metal layer 52 are parallel to each other.

[0082] The means for introducing the temperature control medium is not particularly limited as long as it is capable of introducing the temperature control medium directly into the metal fiber sheet 50 . As described above, the temperature control unit 5 has a first metal layer 51, a second metal layer 52, and a means for introducing a temperature control medium (not shown), and therefore the temperature of the metal fiber sheet 50 can be changed by introducing a temperature control medium into the voids in the metal fiber sheet 50.

[0083] In the temperature control unit 5, the metal fiber sheet 50 is sandwiched between the first metal layer 51 and the second metal layer 52. Therefore, the temperature control unit 5 can also be said to be a laminate having the metal fiber sheet 50, the first metal layer 51, and the second metal layer 52. Because the metal fiber sheet 50 is a flexible sheet-like material, the temperature control unit 5 has excellent processability. Therefore, by preparing a relatively large temperature control unit 5 in advance, the temperature control unit 5 can be used as a precursor (base material) for temperature control units of any shape and any size. In other words, when the temperature control unit 5 is relatively large, it can be used as a base material. The base material may be used by forming a plurality of grooves on the surface of the metal layer by processing, for example, as described in the sixth embodiment below, to arbitrarily deform the surface of the metal layer, or may be used to manufacture relatively small temperature control units by dividing the base material into a plurality of parts. In other words, the base material can be used as a laminate for manufacturing temperature control units of any shape and size.

[0084] (Operation and effect of the fifth embodiment) The temperature control unit 5 further includes the first metal layer 51 and the second metal layer 52 in addition to the metal fiber sheet 50, so that the temperature of the metal fiber sheet 50 can be changed efficiently by the action of the temperature adjustment medium, and the temperature changes of the first metal layer 51 and the second metal layer 52 in contact with the metal fiber sheet 50 occur more efficiently. Therefore, the temperature control unit 5 can efficiently adjust the temperature of the object.

[0085] [Sixth embodiment] Fig. 15 is a top view showing a temperature control unit of the sixth embodiment, Fig. 16 is a cross-sectional view of the temperature control unit of Fig. 15 taken along line XVI-XVI, Fig. 17 is a side view of the temperature control unit of Fig. 15.

[0086] The temperature control unit 6 of the sixth embodiment further comprises a first metal layer 56, a second metal layer 52, and a temperature control medium introduction means (not shown) in addition to the metal fiber sheet 50 and a temperature control medium (not shown). In the temperature control unit 6, a plurality of grooves 57 are formed on the surface of the first metal layer 56. The shape of the grooves 57 is not particularly limited. The number of grooves may be one or more. The positions on the surface of the first metal layer 56 where the grooves 57 are formed are not particularly limited, and they can be formed to match the position of a flow path for a desired temperature control medium, for example.

[0087] 15 and 16, in the temperature control unit 6, the metal fiber sheet 50 is divided into regions C1, C2, and C3 by a plurality of grooves 57. The regions C1, C2, and C3 in the divided metal fiber sheet 50 each serve as a flow path for the temperature control medium. The temperature control unit 6 includes the first metal layer 56, the second metal layer 52, and a means for introducing a temperature control medium (not shown), and thus can efficiently change the temperature of the metal fiber sheet 50 by introducing a temperature control medium into the voids in each of the regions C1, C2, and C3 of the metal fiber sheet 50. Note that each flow path in the regions C1, C2, and C3 may be completely blocked, or may only be narrowed by the groove portion 57.

[0088] The temperature control unit 6 can be manufactured, for example, by applying pressure to the surface of the first metal layer 51 on the upper surface of the temperature control unit 5 (base material) described above to form one or more grooves 57 in any desired shape. When forming the groove portion 57, an external force may be applied to the surface of the first metal layer 51 on the upper surface of the temperature control unit 5, thereby bonding the first metal layer 51, the metal fiber sheet 50, and the second metal layer 52 in this order. The method of applying the external force to the surface of the first metal layer 51 may be pressure, hammering, or any other molding method. A laser may be used for bonding, or resin, vitrified, or the like may also be used. Before forming the grooves 57, the temperature control unit 5 may be cut to a desired size, and the grooves 57 may be formed after the size is adjusted.

[0089] (Operation and effect of the sixth embodiment) Because the metal fiber sheet 50 between the regions C1, C2, and C3 is bonded, the number and size of voids in the bonded portions of the metal fiber sheet 50 are relatively small. Therefore, the temperature control medium introduced into the regions C1, C2, and C3 of the metal fiber sheet 50 is less likely to pass through the metal fiber sheet 50 in the portions fixed or narrowed by the grooves 57. As a result, the temperature control unit 6 makes it easier for the temperature control medium to change the temperature of the regions C1, C2, and C3 of the metal fiber sheet 50 compared to the temperature control unit 5 described above. Furthermore, by introducing the temperature control medium into the voids in the regions C1, C2, and C3 of the metal fiber sheet 50, the temperature of the regions C1, C2, and C3 of the metal fiber sheet 50 can be locally changed. Therefore, the temperature of an object in contact with the first metal layer 56 or the second metal layer 52 in the portions contacting the regions C1, C2, and C3 can be selectively and locally adjusted.

[0090] In this way, the temperature control unit 6 can locally adjust the temperatures of the first metal layer 56 and the second metal layer 52 in the portions in contact with the regions C1, C2, and C3 of the metal fiber sheet 50. For example, a temperature adjustment medium may be introduced into all of the regions C1, C2, and C3 simultaneously, or a temperature adjustment medium may be introduced selectively into at least one of the regions C1, C2, and C3. The position where the grooves 57 are formed can be changed as needed. By changing the position where the grooves 57 are formed, the positions of the metal fiber sheet 50, the first metal layer 56, and the second metal layer 52, where the temperature changes locally, can be changed. In this way, one of the features of the temperature control unit 6 is that it has a high degree of freedom in design and can be easily applied to the surfaces of objects with a variety of shapes.

[0091] [Seventh embodiment] Fig. 18 is a top view showing a temperature control unit of the seventh embodiment, Fig. 19 is a cross-sectional view of the temperature control unit of Fig. 18 taken along line XIX-XIX, and Fig. 20 is a side view of the temperature control unit of Fig. 18. The temperature control unit 7 of the seventh embodiment further comprises a first metal layer 60, a second metal layer 61, and a temperature control medium introduction means (not shown) in addition to the metal fiber sheet 50 and a temperature control medium (not shown). 18 and 19, the temperature control unit 7 has fixing portions 62 at both ends. At the fixing portions 62, the first metal layer 60, the metal fiber sheet 50, and the second metal layer 61 are fixed. In the temperature control unit 7, the first metal layer 60, the metal fiber sheet 50, and the second metal layer 61 are wound and folded in this order to form the fixing part 62. The metal fiber sheet 50 in the portion separated by the fixing parts 62 at both ends functions as a flow path for the temperature control medium. The temperature control unit 7 includes a first metal layer 60, a second metal layer 61, and a means for introducing a temperature control medium (not shown), and therefore the temperature of the metal fiber sheet 50 can be changed efficiently by introducing a temperature control medium into the gap between the fixing portions 62 at both ends of the metal fiber sheet 50.

[0092] The temperature control unit 7 can be manufactured, for example, by forming fixing portions 62 on both ends of the above-mentioned temperature control unit 5 (base material). When forming the fixing portions 62, the first metal layer 56, the metal fiber sheet 50, and the second metal layer 52 on both ends of the temperature control unit 5 may be integrally gathered together, rolled inward from the ends, and then folded to secure the ends. In this way, the fixing portions 62 can be formed by crimping both ends of the temperature control unit 5. Before forming the fixing portion 62, the temperature control unit 5 may be cut to a desired size, and after adjusting the size, the fixing portion 62 may be formed. The method of forming the fixing portion is not limited to the above, and the fixing portion may be formed by adhering the first metal layer 60 and the second metal layer 61 together, or may be formed by fusion bonding using a laser or the like.

[0093] (Effects of the Seventh Embodiment) The temperature control unit 7 has fixing parts 62, and the fixing parts 62 close the sides of the temperature control unit 7, making it difficult for the temperature control medium to escape from the sides of the temperature control unit 7. Therefore, compared to the temperature control unit 5, the temperature of the metal fiber sheet 50 is more likely to change due to the temperature control medium, and the temperature control efficiency of the temperature control unit 7 is further improved.

[0094] [Eighth embodiment] Fig. 21 is a top view showing a temperature control unit of the eighth embodiment, Fig. 22 is a cross-sectional view taken along line XXII-XXII of the temperature control unit of Fig. 21, and Fig. 23 is a side view of the temperature control unit of Fig. 21. The temperature control unit 8 of the eighth embodiment further includes a first metal layer 65, a second metal layer 66, and a temperature control medium introduction means (not shown) in addition to the metal fiber sheet 50 and the temperature control medium (not shown). The temperature control unit 8 has crimping sections 67 on both ends. At the crimping sections 67, the first metal layer 65, the metal fiber sheet 50, and the second metal layer 66 are crimped and fixed together. In the temperature control unit 8, the first metal layer 65, the metal fiber sheet 50, and the second metal layer 66 are wound and folded in this order, and then these are fixed in the folded state to form the crimped portions 67. In the temperature control unit 8, the metal fiber sheet 50 in the portions separated by the crimped portions 67 at both ends becomes a flow path for the temperature control medium. The temperature control unit 8 has a first metal layer 65, a second metal layer 66, and a means for introducing a temperature control medium (not shown), so that the temperature of the metal fiber sheet 50 can be changed efficiently by introducing a temperature control medium into the gap between the portions separated by the crimped portions 67 at both ends of the metal fiber sheet 50.

[0095] The temperature control unit 8 can be manufactured, for example, by forming the crimped portions 67 on both ends of the temperature control unit 5 (base material). When forming the crimped portions 67, first, the first metal layer 51, the metal fiber sheet 50, and the second metal layer 52 on both ends of the temperature control unit 5 are integrally gathered and folded inward from the end. Next, the first metal layer 51, the metal fiber sheet 50, and the second metal layer 52 that have been superimposed by folding are crimped together so as to be crushed. In this way, the crimped portions 67 may be formed by crimping both ends of the temperature control unit 5. Alternatively, heating may be applied during the crimping process to form a bond by fusion. Before forming the crimped portion 67, the temperature control unit 5 may be cut to a desired size, and the crimped portion 67 may be formed after the size has been adjusted.

[0096] (Effects of the eighth embodiment) In the temperature control unit 8, the sides of the temperature control unit 8 are closed by the crimped portions 67 on both ends of the metal fiber sheet 50, making it difficult for the temperature control medium to be drawn out from the sides of the temperature control unit 8. Therefore, compared to the temperature control unit 5, the temperature of the metal fiber sheet 50 is more likely to change due to the temperature control medium, further improving the efficiency of temperature control of the temperature control unit 8.

[0097] [Ninth embodiment] Figure 24 is a top view showing a temperature control unit of the ninth embodiment. Figure 25 is a side view of the temperature control unit of Figure 24. Figure 26 is a cross-sectional view of the temperature control unit of Figure 24 taken along line XXVI-XXVI. Figure 27 is a cross-sectional view of the temperature control unit of Figure 24 taken along line XXVII-XXVII. The dotted lines in Figures 24 and 25 schematically show the metal fiber sheet 50 arranged below the first metal layer 71.

[0098] The temperature control unit 9 of the ninth embodiment further comprises, in addition to the metal fiber sheet 50 and a temperature control medium (not shown), a first metal layer 71, a second metal layer 72, a port portion 73, a stopper 75, and a means for introducing the temperature control medium (not shown). The first metal layer 71 is provided on the upper side of the metal fiber sheet 50 . As shown in Figures 25 to 27, the second metal layer 72 is provided below the metal fiber sheet 50. The side surface of the temperature control unit 9 is covered with the second metal layer 72. That is, the second metal layer 72 has a rectangular dish shape. A port portion 73 is formed on the side surface of the temperature control unit 9 covered with the second metal layer 72. The port portion 73 is an inlet for introducing a temperature control medium into the temperature control unit 9 or an outlet for discharging the temperature control medium from the temperature control unit 9 . The fastener 75 is a member that fixes the first metal layer 71 and the second metal layer 72 with the metal fiber sheet 50 sandwiched between them or without the metal fiber sheet 50 sandwiched between them.

[0099] (Operation and effect of the ninth embodiment) In the temperature control unit 9, the temperature control medium can be introduced into the gaps in the metal fiber sheet 50 by introducing the temperature control medium from the opening surface of the port portion 73. A hose or the like may be provided on the opening surface of the port portion 73 to introduce the temperature control medium. The temperature control unit 9 has a port portion 73, so that the temperature control medium can be introduced into the voids of the metal fiber sheet 50 easily and effectively. When using multiple temperature control units 9, any shape of temperature control unit can be provided by connecting the ports 73 of the multiple temperature control units 9 with hoses or the like, improving design freedom. Therefore, the temperature control unit 9 can be easily applied to the surfaces of objects with various shapes.

[0100] [Tenth embodiment] FIG. 28 is a schematic diagram showing the configuration of a temperature control unit according to the tenth embodiment. The temperature control unit 10 of the tenth embodiment further includes a first metal layer 71, a second metal layer 72, and a pressure reducing section 76 in addition to the metal fiber sheet 50 and the temperature control media M1 and M2. The temperature control unit 10 may further include a means for introducing the temperature control media. The temperature control unit 10 adjusts the temperature of the heating element H5 by coming into contact with the heating element H5.

[0101] The pressure reducing section 76 includes a syringe 77 , a pressure gauge 78 , and an expandable balloon 79 . The syringe 77 is connected to the inside of the temperature control unit 10. As a result, the pressure reducing section 76 reduces the pressure in the voids inside the metal fiber sheet 50. The pressure gauge 78 measures and displays the pressure inside the metal fiber sheet 50. The expandable balloon 79 is not particularly limited as long as its volume changes in response to a change in the pressure inside the temperature control unit 10 caused by the syringe 77.

[0102] In the temperature control unit 10, a liquid temperature control medium M1 exists below the internal space in which the metal fiber sheet 50 is disposed, and a gaseous temperature control medium M2 exists above the internal space in which the metal fiber sheet 50 is disposed. The temperature control medium M2 is vaporized temperature control medium M1. In the temperature control unit 10, the temperature of the temperature control medium M1 increases through heat exchange with the heating element H5, vaporizing and becoming the temperature control medium M2. During this state change of the temperature control medium M1, the temperature control medium M1 moves from the bottom to the top of the voids in the metal fiber sheet 50 in the temperature control unit 10. The temperature control medium M2 that has moved to the top of the temperature control unit 10 is cooled as it comes into contact with the metal fiber sheet 50, first metal layer 71, and second metal layer 72 in the upper part of the temperature control unit 10, which are relatively cooler than the temperature in the lower part of the temperature control unit 10. As a result, the temperature of the temperature control medium M2 decreases and liquefies, returning to the temperature control medium M1 and moving to the bottom of the temperature control unit 10. In this way, in the temperature control unit 10, the temperature control medium can repeatedly rise and fall in the voids in the metal fiber sheet 50 while repeatedly liquefying and vaporizing. In other words, the voids in the metal fiber sheet 50 function as a space that serves as a flow path through which the temperature control medium circulates. Furthermore, since the temperature control unit 10 is equipped with the pressure reducing section 76, it is possible to control the boiling point of the temperature control medium, and therefore the liquefaction and vaporization of the temperature control medium can be controlled. As a result, the latent heat of liquefaction and the latent heat of vaporization can be effectively utilized, making it easy to adjust the temperature of the heating element H5 to any desired temperature.

[0103] In the temperature control unit 10, at least a part of the liquid temperature adjustment medium M1 below the internal space in which the metal fiber sheet 50 is disposed may be in a solid state. When at least a portion of the temperature control medium is in a solid state, the temperature control medium absorbs heat from the heating element H5 through the metal fiber sheet 50, causing the temperature of the solid-state temperature control medium to rise and the temperature of the heating element H5 to fall. While the temperature of the solid-state temperature control medium is rising, the heat transferred from the heating element H5 to the temperature control unit 10 is utilized as sensible heat. Next, when the temperature of the temperature control medium rises to near its melting point, the heat transferred from the heating element H5 to the temperature control unit 10 is used as latent heat of fusion when the temperature control medium changes state from solid to liquid. As described above, when at least a part of the temperature adjustment medium exists in a solid state, the latent heat generated when the temperature adjustment medium changes from a solid state to a liquid state can be effectively utilized, and the temperature of the heating element H5 can be adjusted more efficiently.

[0104] (Operation and effect of the tenth embodiment) When heat is transferred from the heating element H5 to the temperature control medium M1 via the first metal layer 71, the temperature of the temperature control medium M1 rises, eventually reaching its boiling point. When the pressure is reduced by the pressure reducing unit 76, the boiling point of the temperature control medium M1 decreases relatively. This makes it easier for the temperature control medium M1 to change from a liquid state to a gaseous state. As a result, it is possible to adjust the temperature at which the effect of latent heat generated when the temperature control medium M1 changes from a liquid state to a gaseous state can be maximized. Therefore, the temperature control unit 10 has a pressure reducing section 76 that reduces the pressure in the voids inside the metal fiber sheet 50, so the temperature control medium can be vaporized at a lower temperature than usual. This allows for adjustment of the temperature to maximize the effect of latent heat when the temperature control medium changes from liquid to gas, further improving the degree of freedom in temperature adjustment.

[0105] <Temperature control device> FIG. 29 is a schematic diagram showing the configuration of a temperature control device according to one embodiment. As shown in FIG. 29, the temperature control device 90 includes a temperature control unit 9, a storage unit 81, a supply unit 82, and a recovery unit 83.

[0106] A plurality of heating elements H are arranged on the upper surface of the temperature control unit 9. In this way, the temperature control device 90 adjusts the temperatures of the plurality of heating elements H to be low by bringing the plurality of heating elements into contact with the temperature control unit 9.

[0107] In the temperature control device 90, the storage unit 81 has a thermostatic bath 84 and a storage tank 85. The storage tank 85 stores a temperature control medium in a liquid state. The thermostatic bath 84 houses the storage tank 85. This makes it possible to maintain a constant temperature in the storage tank 85 and the temperature control medium. The storage unit 81 having the above-described configuration can keep at least a part of the temperature control medium in a liquid state even when the melting point of the temperature control medium is above room temperature.

[0108] The supply unit 82 includes a supply path L1, a pump 86, and a flow rate adjusting valve 87. A first end of the supply path L1 is connected to a storage tank 85, and a second end is connected to a primary side end of the temperature control unit 9. A pump 86 and a flow rate adjustment valve 87 are provided in this order on the supply path L1. The supply unit 82 supplies the temperature control medium from the storage unit 81 to the temperature control unit 9 via the supply path L1, and supplies the temperature control medium to the voids in the metal fiber sheet inside the temperature control unit 9. The supply unit 82 discharges the temperature control medium in the storage tank 85 toward the temperature control unit 9 using a pump 86, and can supply the temperature control medium to the temperature control unit 9 by adjusting the flow rate of the temperature control medium with a flow rate adjustment valve 87.

[0109] The recovery unit 83 has a recovery path L2. The recovery path L2 recovers the temperature control medium from the gaps in the metal fiber sheet inside the temperature control unit 9 to the storage unit 81. A first end of the recovery path L2 is connected to the secondary side end of the temperature control unit 9, and a second end is connected to the storage tank 85. A part of the recovery path L2 is immersed in the thermostatic bath 84 before the storage tank 85. This makes it easy to lower the temperature of the vaporized temperature control medium recovered from the temperature control unit 9 and maintain the temperature control medium in a liquid state.

[0110] (Action and effect) In the temperature control device 90 described above, the temperature control medium supplied in a liquid state is introduced into the gaps in the metal fiber sheet in the temperature control unit 9. The temperature control medium introduced into the gaps acts on the metal fiber sheet, etc., changing its temperature. At this time, at least a portion of the temperature control medium supplied in a liquid state changes to a gaseous state, and heat is absorbed by vaporization. This heat absorption can be used to effectively lower the temperature of the heating element. Next, the temperature adjustment medium in a gaseous state recovered from the temperature control unit is recovered into the storage unit 81 via the recovery path L2, condensed into a liquid state by the thermostatic bath 84, and stored in the storage bath 85. In this way, the temperature control device 90 can continuously change the temperature of the metal fiber sheet of the temperature control unit while repeatedly evaporating and liquefying the temperature control medium. Therefore, by adjusting the amount of temperature control medium supplied, the amount of temperature change of the metal fiber sheet can be adjusted, and the temperature of the heating element can be controlled.

[0111] (Other embodiments) 30 is a schematic diagram showing the configuration of a temperature control device 91 according to another embodiment. The temperature control device 91 includes a temperature control unit 9, a storage unit 81, a supply unit 89, a recovery unit 83, a bypass path L3, and flow meters 88a and 88b. The flow meter 88a is provided on the supply path L1, and the flow meter 88b is provided on the bypass path L3. The bypass path L3 connects the supply unit 89 and the recovery unit 83. Specifically, a first end of the bypass path L3 is connected to the supply path L1, and a second end of the bypass path L3 is connected to the recovery path L2.

[0112] As described above, the temperature control device 91 has the bypass path L3 in addition to the supply path L1, so that a portion of the total amount of temperature control medium delivered from the storage unit 81 can be supplied to the temperature control unit 9, and the remainder can be returned directly to the storage unit 81. This allows for more precise control of the amount of temperature control medium actually supplied from the storage unit 81 to the temperature control unit 9. As a result, the amount of temperature change of the metal fiber sheet in the temperature control unit 9 can be more precisely adjusted, and therefore the temperature of the heating element can be more precisely controlled.

[0113] 31 is a schematic diagram showing the configuration of a temperature control device 92 according to another embodiment. The temperature control device 92 has a temperature control unit 9, a storage tank 85, a pump 86, a recovery unit 93, and a flow meter 88. The recovery unit 93 has branch lines L4, L5, and L6 branching off from recovery path L2, and a plurality of heat storage materials 94 provided in each of the branch lines. The heat storage material 94 may be, for example, a metal fiber sheet impregnated with paraffin or the like. The heat storage material 94 absorbs heat from the temperature control medium heated by the heating element H, liquefying the temperature control medium. This eliminates the need for a constant temperature bath. Alternatively, the heat storage material 94 serves to supplement the capacity of the constant temperature bath. Therefore, the temperature control device 92 can efficiently control the temperature of the heating element.

[0114] Although several embodiments of the present invention have been described above, these are presented as examples and are not intended to limit the scope of the invention. The temperature control unit of the above-described embodiments can be embodied in various other forms, and various substitutions and modifications can be made without departing from the spirit and scope of the invention. [Industrial Applicability]

[0115] The present invention is widely applicable to devices requiring temperature control, such as devices for controlling the temperature of power semiconductors, power supplies, DC-DC converters, inverter circuits, solar cell substrates, and industrial machinery parts that have heat-generating elements. [Explanation of symbols]

[0116] 1~10 Temperature control unit 11,12 Open end 20,21 Support 22,22a,22b,27,28 Hollow part 23,29 Partition 30 Containment Unit 24,24a,24b, 31~37 through hole 25 Lid 26 Open end 40,42 End face 41 Introduction 43 Outlet 50 Metal fiber sheet 51, 56, 60, 65, 71 First metal layer 52, 61, 66, 72 Second metal layer 57 Groove 62 Fixed part 67 Crimping section 73 Port section 75 Fastener 76 Pressure reducing section 77 Syringe 78 Pressure Gauge 79 Elastic Balloon 81 Storage Unit 82,89 Supply unit 83,93 Recovery Unit 84 Constant temperature bath 85 Reservoir 86 Pump 87 Flow control valve 88 Flow meter 90,91,92 Temperature control device D1, D2 thickness of metal fiber sheet H1~H6 heating elements L1 supply route M1 Liquid temperature control medium M2 Gaseous temperature control medium S1~S6 attachment part

Claims

1. A temperature control unit that adjusts the temperature of an object. A temperature control medium; a metal body having a space formed therein that serves as a flow path for the temperature control medium; the metal body is a metal fiber sheet containing copper fibers, the temperature control unit further includes a first metal layer provided on an upper side of the metal fiber sheet and a second metal layer provided on a lower side of the metal fiber sheet; the first metal layer is a metal foil having a thickness of 18 to 500 μm, and the second metal layer is a metal plate; The temperature control unit has a closed side, The latent heat of vaporization of the temperature control medium when the temperature control medium changes from a liquid state to a gas state is 70 to 200 kJ / kg, A temperature control unit, wherein the temperature control medium has a volume expansion coefficient of 250 times or less when the temperature control medium changes state from a liquid state to a gas state under atmospheric pressure.

2. 2. The temperature control unit according to claim 1, wherein the temperature adjustment medium is at least one selected from the group consisting of hydrofluorocarbons and hydrofluoroethers.

3. 2. The temperature control unit of claim 1, wherein the temperature adjustment medium is 1,1,2,2,3,3,4-heptafluorocyclopentane.

4. 4. The temperature control unit according to claim 1, wherein at least a part of the temperature adjustment medium is present in the space in a solid state.

5. The temperature control unit according to any one of claims 1 to 4, further comprising a pressure reducing section that reduces the pressure in the space.

6. A temperature control unit according to any one of claims 1 to 5; a storage unit for storing the temperature control medium; a supply unit that supplies the temperature control medium from the storage unit to the flow path; a recovery unit that recovers the temperature control medium from the flow path to the storage unit; A temperature control device having:

7. The temperature control device according to claim 6 , further comprising a bypass path connecting the supply unit and the recovery unit.

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