Actuators, haptic devices, and haptic systems

Abstract

To achieve a change of an extension part from a projection state to an initial state without depending on a tensile force (resilience) of the extension part itself.SOLUTION: An actuator includes: a first electrode; a second electrode; a first separator having conductivity and capable of partitioning a region between the first electrode and the second electrode and changing a relative position with respect to the first electrode and the second electrode; and an extension part that switches between an initial state and a projection state due to movement of first fluid capable of moving in a first space between the first separator and the first electrode, according to displacement of the first separator.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to actuators and the like that provide a tactile sensation to a user. [Background technology]

[0002] As disclosed in Patent Document 1, an actuator is known that generates a fluid flow by changing the distance between electrodes using electrostatic force, and then causes an expandable part to protrude using the pressure of the fluid, thereby giving the user a tactile sensation. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent Publication No. 2021 / 0316446 Summary of the Invention [Problem to be solved by the invention]

[0004] There is a demand for an actuator that can realize the change of the expansion / contraction section from the protruding state to the initial state without relying on the tension (restoring force) of the expansion / contraction section itself. [Means for solving the problem]

[0005] An actuator according to one embodiment of the present disclosure includes a first electrode, a second electrode, a conductive first separator that separates an area between the first electrode and the second electrode and is capable of changing its relative position with respect to the first electrode and the second electrode, and an expandable portion that switches between an initial state and a protruding state due to the movement of a first fluid that is capable of moving through a first space between the first separator and the first electrode as the first separator is displaced. [Effects of the Invention]

[0006] According to one aspect of the present disclosure, the change from the protruding state to the initial state of the stretchable portion can be achieved without relying on the tension of the stretchable portion itself. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a block diagram showing a configuration of a main part of a haptic system according to a first embodiment of the present disclosure. [Figure 2] FIG. 1 is a top view of an actuator according to a first embodiment of the present disclosure. [Figure 3] FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 2. [Figure 4] FIG. 4 is an enlarged view of the area surrounded by the dotted line in FIG. 3. [Figure 5] FIG. 3 is an enlarged cross-sectional view of the vicinity of an opening in the first electrode. [Figure 6] FIG. 2 is a top view of the actuator, with the second electrode and the first separator omitted. [Figure 7] FIG. 4 is a cross-sectional view of the actuator showing a state in which the first separator is attracted to the first electrode. [Figure 8] FIG. 4 is a cross-sectional view of the actuator showing a state in which the first separator is attracted to the second electrode. [Figure 9] FIG. 10 is a block diagram showing a configuration of a main part of a haptic system according to a second embodiment of the present disclosure. [Figure 10] FIG. 10 is a top view of an actuator according to a second embodiment of the present disclosure. [Figure 11] FIG. 10 is a top view of a first electrode according to a second embodiment of the present disclosure. [Figure 12] FIG. 10 is a block diagram showing the configuration of a main part of a haptic system according to a third embodiment of the present disclosure. [Figure 13] FIG. 10 is a top view of an actuator according to a third embodiment of the present disclosure. [Figure 14] FIG. 14 is a cross-sectional view taken along the line XIV-XIV in FIG. 13. [Figure 15] FIG. 10 is a cross-sectional view of the actuator showing a state in which the first separator and the second separator are attracted to the first electrode of the unit to which they belong. [Figure 16]FIG. 10 is a cross-sectional view of the actuator showing a state in which the first separator and the second separator are attracted to the second electrode of the unit to which they belong. [Figure 17] FIG. 10 is a block diagram showing the configuration of a main part of a haptic system according to a third embodiment of the present disclosure. [Figure 18] FIG. 10 is a top view of an actuator according to a fourth embodiment of the present disclosure. [Figure 19] 19 is a cross-sectional view taken along the line XIX-XIX in FIG. 18. [Figure 20] 10 is an enlarged cross-sectional view showing the configuration of a second separator according to Embodiment 4 of the present disclosure. FIG. 11 is an enlarged cross-sectional view showing the configuration of a second separator 50. FIG. [Figure 21] FIG. 4 is a cross-sectional view of the actuator showing a state in which the first separator and the second separator are attracted to the first electrode. [Figure 22] FIG. 4 is a cross-sectional view of the actuator showing the first separator attracted to the second electrode and the second separator attracted to the third electrode. DETAILED DESCRIPTION OF THE INVENTION

[0008] [Embodiment 1] An embodiment of the present disclosure will be described in detail below. FIG. 1 is a block diagram showing the configuration of a main part of a haptic system 300A according to this embodiment. As shown in FIG. 1, the haptic system 300A includes a wearable haptic device 100A and an image display device 200. The haptic system 300A is a system that provides a pseudo-tactile sensation corresponding to an image displayed by the image display device 200 using an actuator 1A included in the wearable haptic device 100A. The wearable haptic device 100A is an example of a haptic device. The image display device 200 may be a VR (Virtual Reality) device or another image display device.

[0009] The wearable haptic device 100A may be used, for example, to present a pseudo-tactile sensation to a user in a virtual space such as VR. The wearable haptic device 100A is equipped with an actuator 1A for presenting a tactile sensation to a user. The wearable haptic device 100A may be a haptic glove, a haptic wear, or the like. The wearable haptic device 100A may be equipped with one or more actuators 1A. For example, the wearable haptic device 100A may be equipped with multiple actuators 1A in a matrix.

[0010] <Configuration of Actuator 1A> FIG. 2 is a top view of actuator 1A in this embodiment. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2. FIG. 3 shows the initial state of actuator 1A. In the following explanation, for convenience of explanation, the X-axis direction in FIG. 2 will be referred to as the left-right direction of actuator 1A, the Y-axis direction as the front-rear direction of actuator 1A, and the Z-axis direction as the up-down direction of actuator 1A. Also, in FIG. 2, the +X-axis direction will be referred to as the right direction, the −X-axis direction as the left direction, the +Z-axis direction as the up direction, and the −Z-axis direction as the down direction. In the up-down direction, the side where second electrode 12 is located will be referred to as the upper side, and the side where first electrode 11 is located will be referred to as the down side. The upper surface means the upper surface of the component of interest, and the lower surface means the lower surface of the component of interest.

[0011] As shown in FIGS. 1 to 3, the actuator 1A includes a first electrode 11, a second electrode 12, a first separator 20, a first spacer 31, a second spacer 32, a sealing portion 33, and a control portion 40A.

[0012] The first electrode 11 is a plate-shaped electrode to which a voltage can be applied. The first electrode 11 forms the lower surface of the actuator 1A. The first electrode 11 has greater rigidity than the first separator 20, which will be described later. FIG. 4 is an enlarged view of an area D surrounded by a dotted line in FIG. 3. As shown in FIG. 4, the first electrode 11 includes, for example, an insulating layer 111 and a conductive layer 112 disposed on the insulating layer 111. The insulating layer 111 may be made by a conventional method using, for example, a resin material or a ceramic material. The resin material may be, for example, polyethylene phthalate, epoxy resin, or the like. The ceramic material may be, for example, silica, alumina, or the like. The thickness of the insulating layer 111 may be set to, for example, 10 μm to 1000 μm.

[0013] The conductive layer 112 may be formed by depositing a conductive material on one surface of the insulating layer 111. The conductive layer 112 may be made of, for example, aluminum or copper. As a method for depositing a film using a conductive material, a general film deposition method such as vapor deposition or sputtering can be used. The conductive layer 112 may be deposited to a thickness of 10 nm to 1000 nm.

[0014] The actuator 1A is configured so that there is no electrical continuity between the first electrode 11 and the first separator 20 described later. In other words, the actuator 1A has an insulating structure between the conductive layer 112 and the first separator 20 described later, at least in the region where the conductive layer 112 and the first separator 20 contact each other. As the insulating structure, the first electrode 11 may have an insulating layer at least in the region where the first electrode 11 contacts the first separator 20. The insulating layer may be formed on the entire surface of the first electrode 11 facing the first separator 20. The insulating layer may be, for example, an insulating resin film having a thickness of 10 μm to 100 μm that is laminated on the conductive layer 112. The resin used for the insulating resin film may be, for example, PET (polyethylene terephthalate). An electrode pattern is formed on the separator side of the first electrode 11 to form wiring for connection to an external circuit. The electrode pattern may be formed by a photolithography process.

[0015] When insulating layer 111 is made of a resin material or a ceramic material, the Young's modulus of insulating layer 111 may be set to, for example, 1 GPa or more and 1000 GPa or less. In this case, by forming conductive layer 112 on the surface of insulating layer 111, which has a relatively high rigidity, the rigidity of first electrode 11 can be increased.

[0016] The first electrode 11 is not limited to the above configuration, and may be made of a metal plate.

[0017] The shape of the first electrode 11 is not particularly limited. For example, the first electrode 11 may have a rectangular or circular shape when the actuator 1A is viewed from above. In this embodiment, the first electrode 11 has a rectangular shape when the actuator 1A is viewed from above.

[0018] As shown in Fig. 3, the first electrode 11 may have an opening 11a in the center that opens in the vertical direction. The opening 11a may be formed by a perforation process such as drilling, punching, or laser. The periphery of the opening 11a may have a region of about 100 µm to 900 µm where no electrode pattern is formed in order to avoid discharge at the edge. The first electrode 11 does not have to have an opening 11a.

[0019] The shape of the opening 11a when the actuator 1A is viewed from above is not particularly limited, and may be circular or rectangular. In this embodiment, the opening 11a is circular. If the opening 11a is circular, the size of the opening 11a may be 1 mm to 9 mm in diameter.

[0020] The size of the upper opening of the opening 11a may be the same as or different from the size of the lower opening of the opening 11a. FIG. 5 is an enlarged cross-sectional view of the vicinity of the opening 11a of the first electrode 11 in this embodiment. In this embodiment, the size of the upper opening of the opening 11a is smaller than the size of the lower opening. As shown in FIG. 5, the opening 11a may be tapered. The shape of the opening 11a may be different from the shape of the opening 12a of the second electrode 12, which will be described later. In other words, the shape of the opening of each electrode constituting the actuator of the present disclosure may be different for each opening. The shape of the opening can be adjusted by appropriately setting the processing method and / or processing time.

[0021] The second electrode 12 is a plate-shaped electrode disposed opposite the first electrode 11. The second electrode 12 constitutes the upper surface of the actuator 1A. A voltage can be applied to the second electrode 12. The second electrode 12 has greater rigidity than the first separator 20 described later. The second electrode 12 may have the same material and configuration as the first electrode 11. As shown in FIG. 4, the second electrode 12 may have an insulating layer 121 and a conductive layer 122 disposed on the insulating layer 121. The actuator 1A has an insulating structure between the conductive layer 122 and the first separator 20 described later, at least in the region where the conductive layer 122 contacts the first separator 20 described later. For example, the second electrode 12 may have an insulating layer at least in the region where it contacts the first separator 20. The insulating layer may be formed on the entire surface of the second electrode 12 facing the first separator 20. The second electrode 12 may have the same shape as the first electrode 11 when the actuator 1A is viewed from above.

[0022] The second electrode 12 has an opening 12a in the center that is open in the vertical direction. The shape of the opening 12a is not particularly limited and may be circular or rectangular. The opening 12a in this embodiment is circular. If the opening 12a is circular, the size of the opening 12a may be 1 mm to 9 mm in diameter. The opening 12a may be formed by the same process as the opening 11a of the first electrode. The periphery of the opening 12a may have a region of about 100 μm to 900 μm where no electrode pattern is formed in order to avoid discharge at the edge.

[0023] In actuator 1A according to one aspect of the present disclosure, the upper and lower openings of opening 11a in first electrode 11 may be set to have approximately the same size, and the upper opening of opening 12a in second electrode 12 may be set to be smaller than the lower opening. In other words, the difference in size between the upper and lower openings of opening 11a in first electrode 11 may be set to be smaller than the difference in size between the upper and lower openings of opening 12a in second electrode 12. The size of opening 12a in second electrode 12 may be smaller than the size of opening 11a in first electrode 11. As a result, the outflow pressure of first fluid F1 (described later) can be increased when it flows out of opening 12a in second electrode 12.

[0024] The first separator 20 can separate the area between the first electrode 11 and the second electrode 12. In other words, the first separator 20 can form a partition between the first electrode 11 and the second electrode 12 to prevent a first fluid F1 and a second fluid (described later) from mixing with each other. The first separator 20 is a member whose relative position with respect to the first electrode 11 and the second electrode 12 can change in response to a change in voltage applied to the first electrode 11 and / or the second electrode 12. In other words, the first separator 20 is a deformable member. The first separator 20 is, for example, a film-like member. The first separator 20 is arranged so as to overlap the first electrode 11 and the second electrode 12 when the actuator 1A is seen through from above in the vertical direction. In other words, the first separator 20 is positioned so as to be sandwiched between the first electrode 11 and the second electrode 12 in the vertical direction. The first separator 20 may be configured to have approximately the same size as the first electrode 11 when the actuator 1A is viewed from above.

[0025] As shown in FIG. 4, the first separator 20 may have a flexible member 21 and two electrode layers 22. The thickness of the flexible member 21 may be smaller than the thickness of the electrode layers 22. The thickness of the flexible member 21 may be set to, for example, about 10 μm to 100 μm. The thickness of the electrode layers 22 may be set to, for example, about 10 nm to 1000 nm. The electrode layer 22 included in the first separator 20 may be a single layer. As described above, the actuator 1A has an insulating structure at least in the region where the first electrode 11 and the first separator 20 contact each other and in the region where the second electrode 12 and the first separator 20 contact each other. As an example of the insulating structure, the first separator 20 may have insulating layers at least in the region where the first electrode 11 and the first separator 20 contact each other and in the region where the second electrode 12 and the first separator 20 contact each other. The insulating layer may be formed on the entire surface of the first separator 20 facing the first electrode 11 and the entire surface facing the second electrode 12. Alternatively, the first separator 20 may have a configuration in which an electrode layer is sandwiched between two flexible insulating members. The insulating layer may be provided on either the first electrode 11 and the second electrode 12 or the first separator 20, or may be provided on both the first electrode 11 and the second electrode 12 and the first separator 20.

[0026] The flexible member 21 has flexibility. The flexible member 21 may contain an elastomer material such as silicone, urethane, acrylic, etc. The flexible member 21 may have stretchability.

[0027] The electrode layers 22 are located on the upper and lower surfaces of the flexible member 21 so as to sandwich the flexible member 21 from above and below. The electrode layers 22 may be formed by printing a conductive ink containing silver, copper, or the like on the surface of the flexible member 21. The electrode layers 22 are conductive and allow a voltage to be applied to them from an external circuit. The electrode layers 22 may be provided only in the region of the first separator 20 between the first electrode 11 and the second electrode 12. In other words, the electrode layer 22 may not be provided in the region of the first separator 20 that corresponds to the opening 12a of the second electrode 12 when the actuator 1A is viewed in plan.

[0028] 3 and 4, the first separator 20 is disposed opposite the first electrode 11 and the second electrode 12. In other words, the electrode layer 22 of the first separator 20 faces the conductive layer 112 of the first electrode 11 and the conductive layer 122 of the second electrode 12 via the insulating layers formed on the surfaces of the first electrode 11 and the second electrode 12. This allows the first separator 20 to be displaced relative to the first electrode 11 or the second electrode 12 when a potential difference occurs between the conductive layer 112 of the first electrode 11 or the conductive layer 122 of the second electrode 12 and the electrode layer 22 of the first separator 20 due to the electric field generated by the potential difference.

[0029] The electrode layer 22 may be provided so as to cover the entire surface of the flexible member 21, or may be provided so as to cover only a portion of the surface of the flexible member 21. For example, when the actuator 1A is viewed in plan, the area of ​​the electrode layer 22 that covers the surface of the flexible member 21 may increase toward the outside of the actuator 1A; in other words, the density of the electrode layer 22 may increase. In this case, the first electrode 11 and the second electrode 12 may have the conductive layer 112 only in an area of ​​the first separator 20 that faces an area where the electrode layer 22 is provided, when the actuator 1A is viewed in plan.

[0030] In the actuator 1A of this embodiment, the first separator 20 has the electrode layer 22 formed on both the upper and lower surfaces of the flexible member 21, but the actuator of the present disclosure is not limited to this. In an actuator of one aspect of the present disclosure, the electrode layer 22 may be formed on either the upper or lower surface of the flexible member 21.

[0031] The actuator 1A has a stretchable portion 20a that covers the opening 12a of the second electrode 12. In this embodiment, as described above, the first separator 20 has a region that corresponds to the opening 12a of the second electrode 12 when the actuator 1A is viewed in plan, which is a stretchable flexible member 21. That is, the stretchable portion 20a is a region of the stretchable flexible member 21 provided in the first separator 20 that corresponds to the opening 12a of the second electrode 12 when the actuator 1A is viewed in plan. The flexible member 21 may be configured by combining the stretchable stretchable portion 20a with a portion that is less stretchable or has almost no stretchability.

[0032] The first separator 20 in this embodiment has the electrode layer 22 in the entire area of ​​the surface of the flexible member 21 on the first electrode 11 side or the entire area of ​​the surface of the flexible member 21 on the second electrode 12 side, but the actuator of the present disclosure is not limited to this. In an actuator in one aspect of the present disclosure, the electrode layer 22 may be provided in a partial area of ​​the surface of the flexible member 21 on the first electrode 11 side or the second electrode 12 side. The first separator 20 in this embodiment has the electrode layer 22 disposed on the surface of the flexible member 21. However, in one aspect of the present disclosure, the first separator 20 may have a flexible member 21 containing a conductive material therein, or may have only the electrode layer 22 without the flexible member 21. When the first separator 20 has a flexible member 21 containing a conductive material therein, the first separator 20 may be, for example, a conductive polymer film.

[0033] In this embodiment, the actuator 1A has at least one first spacer 31 and at least one second spacer 32. The at least one second spacer 32 is located farther from the expandable portion 20a than the at least one first spacer 31. In other words, the at least one first spacer 31 is located closer to the expandable portion 20a than the at least one second spacer 32.

[0034] As shown in FIG. 3 , at least one first spacer 31 and at least one second spacer 32 are disposed between the first electrode 11 and the second electrode 12, and maintain a substantially constant distance between the first electrode 11 and the second electrode 12. The first electrode 11 and the second electrode 12 do not need to be disposed parallel to each other, as long as a space is maintained that allows the first separator 20 to be displaced. The first spacer 31 and the second spacer 32 have rigidity. This allows the substantially constant distance between the first electrode 11 and the second electrode 12 to be maintained.

[0035] The first spacer 31 and the second spacer 32 can be formed of an insulating resin material such as silicone, acrylic, etc. Alternatively, for example, the insulating layer 111 of the first electrode 11 or the insulating layer 121 of the second electrode 12 may have a protruding portion that protrudes upward or downward, and the protruding portion may be the first spacer 31 or the second spacer 32.

[0036] The actuator 1A may have one spacer as long as the distance between the first electrode 11 and the second electrode 12 can be maintained. On the other hand, the actuator 1A may have three or more spacers. In other words, it is sufficient for the actuator 1A to have at least one spacer.

[0037] FIG. 6 is a top view of the actuator 1A, with the second electrode 12 and the first separator 20 omitted. For ease of understanding, the area where the opening 12a of the second electrode 12 is formed is indicated by a dotted line in FIG. 6. As shown in FIG. 6, in the actuator 1A of this embodiment, four first spacers 31 are provided around the opening 12a of the second electrode 12 and along two diagonals of the rectangular first electrode 11. In other words, the first spacers 31 are arranged at the edge of the opening 12a. The first spacers 31 may be arranged along four or more imaginary radial lines starting from the center of the opening 12a. In this case, each of the first spacers 31 may extend along the imaginary line. The first spacers 31 may also be arranged periodically around the circumferential direction of the opening 12a. The first spacers 31 may also be arranged point-symmetrically around the center of the opening 12a. In the actuator 1A, when viewed from above, the area around the opening 12a where the first spacers 31 are not provided may be larger than the area where the first spacers 31 are provided. This makes it easier for the first fluid F1 to flow in and out of the first space S1 described below. The locations where the first spacers 31 are provided and the number of first spacers 31 are not limited to this.

[0038] 3, at least a portion of the upper end 31a of the first spacer 31 abuts against the second electrode 12 via the first separator 20. In other words, a portion of the area of ​​the first separator 20 surrounding the opening 12a of the second electrode 12 is sandwiched between the second electrode 12 and the upper end 31a of the first spacer 31. The lower end 31b of the first spacer 31 abuts against the first electrode 11. With the above configuration, the first spacer 31 functions as a spacer that maintains the distance between the first electrode 11 and the second electrode 12, and also plays a role in defining part of the outer edge shape of the stretchable portion 20a.

[0039] At least a portion of an upper end 32a of the second spacer 32 abuts against the second electrode 12. A lower end 32b of the second spacer 32 abuts against the first electrode 11 via the first separator 20. In other words, the end of the first separator 20 (in other words, the outer edge of the first separator 20) is sandwiched between the first electrode 11 and the lower end 32b of the second spacer 32. With the above configuration, the second spacer 32 functions as a spacer that maintains the distance between the first electrode 11 and the second electrode 12, and also has the role of fixing the end of the first separator 20 to the first electrode 11. The end of the first separator 20 only needs to be fixed to the first electrode 11, and does not necessarily have to be fixed by the second spacer 32.

[0040] In one embodiment of the actuator 1A of the present disclosure, a portion of the first separator 20 surrounding the opening 12a of the second electrode 12 may be sandwiched between the first electrode 11 and the lower end 31b of the first spacer 31, and the outer edge of the first separator 20 may be sandwiched between the second electrode 12 and the upper end 32a of the second spacer 32.

[0041] The second spacer 32 is provided along the outer periphery of the actuator 1A. In other words, the second spacer 32 is located at the outer edge of the second electrode 12. The second spacer 32 has a communication passage 32c that connects the space between the second electrode 12 and the first separator 20 with the outside space. As shown in FIG. 6 , in the actuator 1A of this embodiment, when viewed from above, the second spacer 32 has an encircling shape that defines the first space S1 and the second space S2. The encircling shape may be, for example, a rectangle, a circle, or an ellipse, but is not particularly limited thereto. In the example shown in FIG. 6 , the second spacer 32 has a rectangular encircling shape. The communication passages 32c are provided at the center of each side of the rectangle. The communication passages 32c may be provided so as to divide the encircling shape as shown in FIG. 6 , or may be provided as openings that penetrate the side surface of the second spacer 32 in the left-right direction. In this embodiment, the communication paths 32c are provided at the center of each side of the rectangle formed by the second spacer 32. In this case, when the actuator 1A is seen through from above, the first spacer 31 does not exist on the line connecting the communication path 32c and the center of the opening 12a. The location where the communication path 32c is provided is not limited to the location shown in FIG. 6, and the communication path 32c may be provided at any location on the second spacer 32 as long as it can communicate the space between the second electrode 12 and the first spacer 31 with the outside space. For example, the second spacer 32 may be provided at a corner of the rectangle formed by the second spacer 32. Furthermore, the number of second spacers 32 is not limited to four, and may be one to three, or may be five or more.

[0042] Furthermore, due to the above configuration, when the second electrode 12 is on the upper side and the first electrode 11 is on the lower side, the fixing position of the first separator 20 relative to the second electrode 12 is higher than the fixing position of the first separator 20 relative to the first electrode 11.

[0043] The first separator 20 is pressed against the second electrode 12 by the upper end 31a of the first spacer 31 around the opening 12a of the second electrode 12, and the outer edge is pressed against the first electrode 11 by the lower end 32b of the second spacer 32. As a result, the first separator 20 separates the area between the first electrode 11 and the second electrode 12. In the following description, as shown in FIG. 3 , the space between the first separator 20 and the first electrode 11 will be referred to as a first space S1, and the space between the first separator 20 and the second electrode 12 will be referred to as a second space S2. Furthermore, the area where the opening 12a of the second electrode 12 is formed when the actuator 1A is viewed from above, that is, the space between the expansion / contraction portion 20a of the first separator 20 and a sealing portion 33 described later, will be referred to as a fifth space S5. The first space S1 has a vertical width that increases from the second spacer 32, which is the outer edge of the actuator 1A, toward the opening 12a of the second electrode 12. On the other hand, the second space S2 has a vertical width that decreases toward the opening 12a of the second electrode 12.

[0044] As shown in FIG. 6, when the actuator 1A is viewed from above, the actuator 1A has a region around the opening 12a of the second electrode 12 where the first spacer 31 is not provided. That is, when the actuator 1A is viewed from above, a flow path connecting the first space S1 and the fifth space S5 is formed around the opening 12a of the second electrode 12. Therefore, the first space S1 and the fifth space S5 are connected to each other. The space formed by the first space S1 and the fifth space S5 is filled with a first fluid F1 that can move through the space. The first fluid F1 is not particularly limited as long as it is a fluid that can move through the space formed by the first space S1 and the fifth space S5, but it may be, for example, a dielectric fluid such as insulating oil.

[0045] The sealing portion 33 is a member for closing the opening 11a of the first electrode 11. The sealing portion 33 may be made of a resin material with a thickness of 10 μm to 1000 μm. The sealing portion 33 has greater rigidity than the stretchable portion 20a. This makes the sealing portion 33 less likely to deform than the stretchable portion 20a. The opening 11a is an opening for injecting the first fluid F1 into the first space S1 and the fifth space S5, and is closed by the sealing portion 33 after the injection of the first fluid F1 is completed. If the first electrode 11 does not have the opening 11a, the sealing portion 33 may not be provided.

[0046] 1 controls the potentials of the first electrode 11, the second electrode 12, and the electrode layer 22 of the first separator 20. In the following description of this embodiment, the potential of the first electrode will be referred to as a first potential, the potential of the second electrode 12 as a second potential, and the potential of the electrode layer 22 of the first separator 20, in other words, the potential of the first separator 20 as a third potential.

[0047] 1, the control unit 40A is capable of wireless or wired communication with the image display device 200 and receives instructions from the image display device 200. The control unit 40A may control the first potential, the second potential, and the third potential based on instructions from the image display device 200. The image display device 200 may be, for example, a VR device or other image display control device. The image display device 200 may transmit a control signal corresponding to an image to be displayed to the control unit 40A.

[0048] <Assembly method of actuator 1A> Next, a method for assembling the actuator 1A will be described. First, each first spacer 31 is bonded to the first electrode 11 at a predetermined interval around the periphery of the opening 11a of the first electrode 11. Bonding can be performed using a bonding process such as adhesive, heat sealing, or plasma bonding.

[0049] Next, the first separator 20 is placed on the upper surface of the first electrode 11, which is the surface to which the first spacer 31 is bonded. At this time, the outer periphery of the first separator 20 is bonded to the first electrode 11 using a bonding process such as adhesive, heat sealing, or plasma bonding. In addition, the upper end 31a of the first spacer 31 is bonded to the first separator 20 using a bonding process such as adhesive, heat sealing, or plasma bonding.

[0050] Next, the lower end portion 32b of the second spacer 32 is bonded to the outer periphery of the first separator 20. For the bonding, a bonding process such as adhesive, heat sealing, or plasma bonding can be used.

[0051] Next, the second electrode 12 is laminated on the side where the second spacer 32 is bonded to the first separator 20. At this time, the upper end portion 32a of the second spacer 32 is bonded to the second electrode 12. For the bonding, a bonding process such as adhesive, heat sealing, or plasma bonding can be used.

[0052] Next, the first fluid F1 is filled into the actuator 1A through the opening 11a formed in the first electrode 11. The filling of the first fluid F1 may be performed by dripping the first fluid F1 with the first electrode 11 facing upward. Alternatively, the filling of the first fluid F1 may be performed by immersing the opening 11a in the first fluid F1 while the inside of the actuator 1A is in a vacuum state and then opening it to the atmosphere. When filling the first fluid F1, a voltage of 100 V to 1000 V may be applied between the second electrode 12 and the electrode layer 22 of the first separator 20, thereby attracting the first separator 20 to the second electrode 12 by electrostatic force.

[0053] After filling the first fluid F1, the sealing portion 33 is joined to the first electrode 11, thereby sealing the opening 11a of the first electrode 11 with the sealing portion 33. For the joining, a joining process such as adhesive, heat sealing, or plasma bonding can be used. As a result, the space formed by the first space S1 and the fifth space S5 is filled with the first fluid F1.

[0054] <Operation example of actuator 1A> Next, an example of the operation of the actuator 1A will be described. In the initial state, the first potential of the first electrode 11, the second potential of the second electrode 12, and the third potential of the first separator 20 are all assumed to be the same potential. Here, as an example, the description will be given assuming that the first potential, the second potential, and the third potential in the initial state are 0V.

[0055] When the control unit 40A receives an instruction from the image display device 200 to present a tactile sensation to the user, it generates a potential difference between the first electrode 11 and the second electrode 12 so that the first separator 20 is attracted to the first electrode 11. Specifically, the control unit 40A controls the first potential, the second potential, and the third potential so that the first potential is greater than the second potential and the third potential. As an example, the control unit 40A may control the second potential and the third potential to remain at 0 V, and the first potential to become a positive potential (e.g., 300 to 500 V). As another example, the control unit 40A may control the second potential and the third potential to become negative potentials (e.g., −500 to −300 V), and the first potential to remain at 0 V.

[0056] As described above, by controlling the first potential, the second potential, and the third potential, an electric field is formed between the first electrode 11 and the first separator 20, directing from the first electrode 11 toward the first separator 20. Here, as described above, the first separator 20 includes the flexible member 21 sandwiched between the two electrode layers 22. Therefore, the electric field formed between the first electrode 11 and the first separator 20 causes the first separator 20 to be displaced so as to be attracted to the first electrode 11 in the region sandwiched between the first electrode 11 and the second electrode 12.

[0057] FIG. 7 is a cross-sectional view of the actuator 1A showing the first separator 20 being attracted to the first electrode 11. As shown in FIG. 7, when the first separator 20 is attracted to the first electrode 11, the volume of the first space S1, which is the space between the first separator 20 and the first electrode 11, decreases. As a result, the first fluid F1 filling the first space S1 is pushed into the fifth space S5, and the fifth space S5 is filled with a larger volume of the first fluid F1 than the volume in the initial state shown in FIG. 3, and the pressure inside the fifth space S5 increases. As a result, the stretchable portion 20a of the stretchable first separator 20 expands toward the outside space from the opening 12a of the second electrode 12, and a portion of the actuator 1A protrudes from the opening 12a. The stretchable portion 20a protruding from the opening 12a contacts the skin of a user wearing the wearable haptic device 100A, providing the user with a tactile sensation.

[0058] In an aspect of the actuator 1A of the present embodiment, in order to smoothly push the first fluid F1 filling the first space S1 into the fifth space S5 when a potential difference is generated between the first electrode 11 and the first separator 20, the first separator 20 may be configured to be attracted to the first electrode 11 sequentially from the outside to the inside of the first separator 20. For example, the actuator 1A may have a first wiring for applying a voltage to the first electrode 11 and a second wiring for applying a voltage to the second electrode 12 that are separated from each other, and the first wiring may be connected to the outer edge of the first electrode 11. This allows a voltage to be applied between the first electrode 11 and the first separator 20 so that a potential difference is generated sequentially from the outside to the inside, and therefore the first separator 20 can be attracted to the first electrode 11 sequentially from the outside to the inside. In the actuator 1A according to one aspect of the present embodiment, the first electrode 11 may be configured so that the electrode density is high around the outer edge portion in order to smoothly push the first fluid F1 into the fifth space S5.

[0059] Furthermore, when the first separator 20 is attracted to the first electrode 11, the volume of the second space S2, which is the space between the first separator 20 and the second electrode 12, increases. As described above, the second spacer 32 has the communication passage 32c that connects the second space S2 with the outside space. Therefore, when the volume of the second space S2 increases, air as the second fluid is drawn into the second space S2 through the communication passage 32c.

[0060] Next, the operation of the actuator 1A for changing the extending / contracting portion 20a from the protruding state shown in FIG. 7 to a state where the extending / contracting portion 20a does not protrude will be described.

[0061] When the control unit 40A receives an instruction from the image display device 200 to stop presenting the tactile sensation to the user, the control unit 40A controls the first potential, the second potential, and the third potential so that the first separator 20 is attracted to the second electrode 12. Specifically, the control unit 40A controls the first potential, the second potential, and the third potential so that the second potential is greater than the first potential and the third potential. As an example, the control unit 40A may control the first potential and the third potential to be 0 V and the second potential to be a positive potential (e.g., 300 to 500 V). As another example, the control unit 40A may control the first potential and the third potential to be a negative potential (e.g., −300 to −500 V) and the second potential to be 0 V.

[0062] As described above, by controlling the first potential, the second potential, and the third potential, an electric field is formed between the second electrode 12 and the first separator 20, from the second electrode 12 toward the first separator 20. As a result, the first separator 20 is displaced in the region sandwiched between the first electrode 11 and the second electrode 12, as if being attracted to the second electrode 12.

[0063] FIG. 8 is a cross-sectional view of the actuator 1A showing a state in which the first separator 20 is attracted to the second electrode 12. As shown in FIG. 8, when the first separator 20 is attracted to the second electrode 12, the volume of the first space S1, which is the space between the first separator 20 and the first electrode 12, increases. As a result, the first fluid F1 that filled the fifth space S5 is drawn into the first space S1. This reduces the pressure in the fifth space S5. As a result, the expandable portion 20a contracts and returns to a non-protruding state (initial state) in which it does not protrude from the opening 12a.

[0064] In an actuator 1A according to one aspect of the present embodiment, in order to smoothly draw the first fluid F1 filling the fifth space S5 into the first space S1 when a potential difference is generated between the second electrode 12 and the first separator 20, the first separator 20 may be configured to be attracted to the second electrode 12 in sequence from the inside to the outside of the first separator 20. For example, the actuator 1A may have a first wiring for applying a voltage to the first electrode 11 and a second wiring for applying a voltage to the second electrode 12, which are spaced apart from each other, and the second wiring may be connected to a central portion of the second electrode 12. This allows the first separator 20 to be attracted to the second electrode 12 in sequence from the inside to the outside when a voltage is applied so as to generate a potential difference between the second electrode 12 and the first separator 20. In the actuator 1A according to one aspect of the present embodiment, the second electrode 12 may be configured so that the electrode density is high around the opening 12a in order to smoothly draw the first fluid F1 into the first space S1.

[0065] Furthermore, when the first separator 20 is attracted to the second electrode 12, the volume of the second space S2, which is the space between the first separator 20 and the second electrode 12, decreases. At this time, some of the air that had filled the second space S2 is pushed out into the external space through the communicating passage 32c.

[0066] As described above, the actuator 1A of this embodiment includes the first electrode 11, the second electrode 12, and the first separator 20 that separates the region between the first electrode 11 and the second electrode 12 and whose position relative to the first electrode 11 and the second electrode 12 changes. In the actuator 1A, the first separator 20 is displaced, and the first fluid F1 that is capable of moving in the first space S1 moves, causing the expansion / contraction portion 20a of the first separator 20 to switch between its initial state and its protruding state.

[0067] In the conventional technology described in Patent Document 1, switching the expandable part from the protruding state to the initial state relies on the tension (restoring force) of the expandable part. Therefore, if it is desired to switch from the protruding state to the initial state quickly, it is necessary to apply a high voltage to the electrode to increase the tension of the expandable part. Therefore, it cannot be said that the safety of wearing it on the human body is sufficient.

[0068] In contrast, the actuator 1A of this embodiment has the above-described configuration, and thus can switch the initial state and the protruding state of the expandable portion 20a by changing the voltage between the first electrode 11 and the second electrode 12 to displace the first separator 20. This allows the expandable portion 20a to change from the protruding state to the initial state without relying on the tension of the expandable portion 20a itself. Therefore, even when it is desired to switch from the protruding state to the initial state quickly, there is no need to apply a large voltage to the first electrode 11 and the second electrode 12, and a tactile sensation can be safely imparted to the user. Furthermore, the high degree of freedom in controlling the tactile sensation imparted to the user allows a more realistic tactile sensation to be imparted to the user.

[0069] In the actuator 1A of this embodiment, the first electrode 11 and the second electrode 12 have greater rigidity than the first separator 20. Therefore, the distance between the first electrode 11 and the second electrode 12 can be easily controlled by the first spacer 31 and the second spacer 32.

[0070] If the second spacer 32 does not have a communicating passage 32c, the second space S2 becomes a sealed space. In this case, in order to displace the first separator 20, the volume of the second space S2 needs to be changed; in other words, the air filled in the second space S2 needs to be compressed or expanded, making it difficult for the first separator 20 to displace. In contrast, in the actuator 1A of this embodiment, the second spacer 32 has a communicating passage 32c, which connects the second space S2 to the outside space. This reduces the change in pressure within the second space when the first separator 20 displaces. As a result, the first separator 20 is more likely to displace.

[0071] In the actuator 1A of this embodiment, the stretchable portion 20a of the first separator 20 protrudes from the actuator 1A, but the actuator of the present disclosure is not limited to this. An actuator according to one aspect of the present disclosure may be configured to include a stretchable portion protruding from the actuator, separate from the first separator 20. In this case, the first separator 20 may be disposed in a region other than the region where the opening 12a of the second electrode 12 is formed, when the actuator 1A is viewed from above. In this case, the stretchable portion may be disposed on the lower surface or the upper surface of the second electrode 12. However, as in the actuator 1A of this embodiment, the configuration of the actuator 1A can be simplified by including the stretchable portion 20a in the first separator 20, i.e., by forming the first separator 20 and the stretchable portion 20a as a single member.

[0072] [Embodiment 2] Other embodiments of the present disclosure will be described below. For convenience of explanation, the same reference numerals will be used to designate components having the same functions as those described in the above embodiment, and the description thereof will not be repeated.

[0073] Fig. 9 is a block diagram showing the main configuration of a haptics system 300B in this embodiment. Fig. 10 is a top view of an actuator 1B in this embodiment, showing the top surface of a second electrode 12A. Fig. 11 is a top view of a first electrode 11A.

[0074] 9, the haptic system 300B includes a wearable haptic device 100B and an image display device 200. The wearable haptic device 100B may have the same configuration as the wearable haptic device 100A in the first embodiment, except that it includes an actuator 1B instead of the actuator 1A.

[0075] As shown in FIGS. 9 to 11, actuator 1B includes first electrode 11A, second electrode 12A and control unit 40B instead of first electrode 11, second electrode 12 and control unit 40A of actuator 1A in the first embodiment.

[0076] As shown in FIG. 11, the first electrode 11A is divided into four divided regions A1 to A4. The divided regions A1 to A4 are regions formed by dividing the rectangular first electrode 11A by two diagonal lines. However, the method of dividing the first electrode 11A is not limited to this. Furthermore, in the actuator 1B of this embodiment, the first electrode 11A is divided into four divided regions A1 to A4, but it may be divided into any other number of regions. The four divided regions A1 to A4 are electrically independent from one another, and different voltages can be applied to them.

[0077] The first electrode 11A has the same structure as the first electrode 11 in the first embodiment, except that it is divided into four divided regions A1 to A4.

[0078] 10, the second electrode 12A is divided into four divided regions B1 to B4. The divided regions B1 to B4 are divided to correspond to the divided regions A1 to A4 of the first electrode 11A, respectively. For example, the divided region B1 is divided to overlap the divided region A1 when the actuator 1B is viewed from above. The four divided regions B1 to B4 are electrically independent from one another, and different voltages can be applied to them.

[0079] The control unit 40B controls the potentials of the divided regions A1 to A4 of the first electrode 11, the divided regions B1 to B4 of the second electrode 12, and the electrode layer 22 of the first separator 20 based on instructions from the image display device 200.

[0080] <Operation example of actuator 1B> Next, an example of the operation of actuator 1B will be described. In the initial state, it is assumed that the divided regions A1 to A4 of first electrode 11, the divided regions B1 to B4 of second electrode 12, and the electrode layer 22 of first separator 20 all have the same potential. Here, as an example, it is assumed that the divided regions A1 to A4 of first electrode 11, the divided regions B1 to B4 of second electrode 12, and the electrode layer 22 of first separator 20 have a potential of 0 V in the initial state.

[0081] In this operation example, the controller 40B receives an instruction from the image display device 200 to move the top portion P of the expandable portion 20a in the protruding state from left to right as shown in FIG. 10 . In this case, the controller 40B first controls the potential of the first electrode 11A, the potential of the second electrode 12A, and the potential of the first separator 20 so that the first separator 20 is attracted to the divided regions B2 to B4 of the first electrode 11. Specifically, the controller 40B controls the potentials between the divided regions A2 and B2, between the divided regions A3 and B3, and between the divided regions A4 and B4 so that the potential of the first electrode 11A is greater than the potential of the second electrode 12A and the potential of the first separator 20 is the same as the potential of the second electrode 12A. As a result, an electric field is formed from the first electrode 11 toward the first separator 20 between the divided regions A2 to A4 and the divided regions B2 to B4, respectively. As a result, the first separator 20 is displaced between each of the divided regions A2 to A4 and the divided regions B2 to B4 so as to be attracted to the first electrode 11. As a result, the volume of the first space S1 between the first separator 20 and the first electrode 11A between each of the divided regions A2 to A4 and the divided regions B2 to B4 decreases. As a result, the first fluid F1 is pushed out from the first space S1, whose volume has decreased, into the fifth space S5. As a result, the pressure inside the fifth space S5 increases, and the expandable portion 20a of the first separator 20 expands from the opening 12a of the second electrode 12 toward the outside space, causing a part of the actuator 1B to protrude from the opening 12a. In this case, the first fluid F1 in the first space S1 between the divided regions A1 and B1 is not pushed out into the fifth space S5, and the first fluid F1 in the first space S1 between the divided regions A2 to A4 and the divided regions B2 to B4 is pushed out into the fifth space S5. Therefore, when the actuator 1B is viewed from above, the position of the apex P of the expandable portion 20a protruding from the opening 12a is shifted toward the divided region B1 side (the left side in FIG. 10) from the center point of the opening 12a.

[0082] Next, the control unit 40B controls the potential of the first electrode 11A, the potential of the second electrode 12A, and the potential of the first separator 20 so that the first separator 20 is attracted to the divided regions B1, B2, and B4 of the first electrode 11. Specifically, the control unit 40B controls the potentials between the divided regions A1 and B1, between the divided regions A2 and B2, and between the divided regions A4 and B4 so that the potential of the first electrode 11A is greater than the potential of the second electrode 12A and the potential of the first separator 20 is the same as the potential of the second electrode 12A. The control unit 40B also controls the potentials of the first electrode 11A, the second electrode 12A, and the first separator 20 so that they are the same between the divided regions A3 and B3. As a result, an electric field is formed between the first electrode 11A and the first separator 20 between the divided regions A1, A2, and A4 and the divided regions B1, B2, and B4. Therefore, the first separator 20 is displaced so as to be attracted to the first electrode 11 between the divided regions A1, A2, and A4 and the divided regions B1, B2, and B4. This reduces the volume of the first space S1 between the first separator 20 and the first electrode 11A between the divided regions A1, A2, and A4 and the divided regions B1, B2, and B4. As a result, the first fluid F1 is forced out of the first space S1, whose volume has been reduced, into the fifth space S5. This increases the pressure inside the fifth space S5, causing the expansion / contraction portion 20a of the first separator 20 to expand from the opening 12a of the second electrode 12 toward the outside space, resulting in a protruding state in which a portion of the actuator 1B protrudes from the opening 12a. In this case, the first fluid F1 in the first space S1 between the divided regions A3 and B3 is not pushed out into the fifth space S5, and the first fluid F1 in the first space S1 between the divided regions A1, A2, and A4 and the divided regions B1, B2, and B4 is pushed out into the fifth space S5. Therefore, when the actuator 1B is viewed from above, the position of the apex P of the expandable portion 20a protruding from the opening 12a is shifted from the center point of the opening 12a toward the divided region B3 (the right side in FIG. 10).As described above, by the control unit 40B controlling the potential of the divided areas A1 to A4 of the first electrode 11 and the potential of the divided areas B1 to B4 of the second electrode 12, a tactile sensation can be presented to the user from the left to the right as shown in Figure 10.

[0083] In this operation example, an example has been described in which a tactile sensation is presented to the user from the left side to the right side as shown in Figure 10, but by changing the area in which the first separator 20 is attracted to the first electrode 11, the position of the apex P of the stretchable portion 20a protruding from the opening 12a can be changed as appropriate.

[0084] As described above, in the actuator 1B of this embodiment, the first electrode 11A and the second electrode 12A are divided into a plurality of divided regions, and the control unit 40B controls the potential for each divided region, thereby providing the user with a tactile sensation that indicates a two-dimensional direction.

[0085] [Embodiment 3] Other embodiments of the present disclosure will be described below. For convenience of explanation, the same reference numerals will be used to designate components having the same functions as those described in the above embodiment, and the description thereof will not be repeated.

[0086] Fig. 12 is a block diagram showing the main configuration of a haptics system 300C in this embodiment. Fig. 13 is a top view of an actuator 1C in this embodiment. Fig. 14 is a cross-sectional view taken along line XIV-XIV in Fig. 13. Fig. 14 shows the initial state of the actuator 1C.

[0087] 12, a haptic system 300C includes a wearable haptic device 100C and an image display device 200. The wearable haptic device 100C may have the same configuration as the wearable haptic device 100A in the first embodiment, except that it includes an actuator 1C instead of the actuator 1A.

[0088] <Configuration of Actuator 1C> Actuator 1C has a basic structure in which two actuators 1A of embodiment 1 are stacked. As shown in Figures 12 and 14, actuator 1C includes a first unit U1, a second unit U2, and a control unit 40C, with the first unit U1 stacked on top of the second unit U2.

[0089] The first unit U1 in this embodiment has the same structure as the actuator 1A in embodiment 1. The actuator 1C is configured so that the second electrode 12 of the first unit U1 abuts against the upper surface of the first electrode 71 of the second unit U2.

[0090] The second unit U2 includes a first electrode 71, a second electrode 72, a second separator 80, a first spacer 91, a second spacer 92, and a sealing portion 93.

[0091] The first electrode 71 and the second electrode 72 may have the same configuration as the first electrode 11 in embodiment 1. The first electrode 71 forms the lower surface of the second unit U2. The first electrode 71 may have an opening 71a in the center that is open in the vertical direction.

[0092] The second electrode 72 forms the lower surface of the second unit U2. The second electrode 72 may have an opening 72a in the center that is open in the vertical direction.

[0093] The second separator 80 can separate the region between the first electrode 71 and the second electrode 72. The second separator 80 may have the same material and configuration as the first separator 20 in embodiment 1, except that it does not have the stretchable portion 20a. The second separator 80 in this embodiment has a flexible member 21 and two electrode layers 22 that sandwich the flexible member 21.

[0094] The second unit U2 in this embodiment has at least one first spacer 91 and at least one second spacer 92. As shown in FIG. 14, the at least one first spacer 91 and at least one second spacer 92 are disposed between the first electrode 71 and the second electrode 72, and maintain a substantially constant distance between the first electrode 71 and the second electrode 72. The first spacer 91 and the second spacer 92 may have the same material and configuration as the first spacer 31. The positions at which the first spacer 91 and the second spacer 92 are disposed in the second unit U2 may be the same as or different from the positions at which the first spacer 31 and the second spacer 32 are disposed in the first unit U1. In the actuator 1C in this embodiment, the first spacer 91 and the second spacer 92 are disposed in the second unit U2 at the same positions at which the first spacer 31 and the second spacer 32 are disposed in the first unit U1.

[0095] The second separator 80 is pressed against the second electrode 72 by the first spacer 91 around the opening 72a of the second electrode 72, and the outer edge is pressed against the first electrode 71 by the second spacer 92. As a result, the second separator 80 separates the area between the first electrode 71 and the second electrode 72. In the following description of this embodiment, as shown in FIG. 14 , the space between the second separator 80 and the first electrode 71 will be referred to as a third space S3, and the space between the second separator 80 and the second electrode 72 will be referred to as a fourth space S4. Furthermore, the space between the expansion / contraction portion 20a of the first separator 20 and a sealing portion 93 (described later) will be referred to as a fifth space S5, which is the area where the opening 12a of the second electrode 12 is formed when the actuator 1C is viewed from above.

[0096] As described above with reference to FIG. 6, when the actuator 1A is viewed from above, there is a region around the opening 12a of the second electrode 12 where the first spacer 31 is not provided. Similarly to this configuration, when the actuator 1C is viewed from above, the second unit U2 also has a region around the opening 12a of the second electrode 12 where the first spacer 91 is not provided. Therefore, the third space S3 and the fifth space S5 are in communication with each other. Furthermore, because there is a region around the opening 12a of the second electrode 12 where the first spacer 31 is not provided, the first space S1 and the fifth space S5 are in communication with each other. Therefore, the first space S1, the third space S3, and the fifth space S5 are in communication with each other. The space defined by the first space S1, the third space S3, and the fifth space S5 is filled with a first fluid F1 that can move through the space.

[0097] As shown in FIG. 12, the control unit 40C controls the potentials of the first electrode 11, the second electrode 12, and the electrode layer 22 of the first unit U1, and the potentials of the first electrode 71, the second electrode 72, and the electrode layer 22 of the second unit U2 based on instructions from the image display device 200.

[0098] The sealing portion 93 is a member for closing the opening 71a of the first electrode 71 of the second unit U2. The sealing portion 93 may be made of a resin material and have a thickness of 10 μm to 1000 μm. The sealing portion 93 has greater rigidity than the stretchable portion 20a. This makes the sealing portion 93 less likely to deform than the stretchable portion 20a. The opening 71a is an opening for injecting the first fluid F1 into the first space S1, the third space S3, and the fifth space S5, and is closed by the sealing portion 93 after the injection of the first fluid F1 is completed. If the first electrode 71 does not have the opening 71a, the sealing portion 93 may not be provided.

[0099] <Operation example of actuator 1C> Next, an example of the operation of the actuator 1C will be described. In the initial state, the potentials of the first electrode 11, the second electrode 12, and the electrode layer 22 of the first unit U1, and the potentials of the first electrode 71, the second electrode 72, and the electrode layer 22 of the second unit U2 are assumed to be 0V.

[0100] When the control unit 40C receives an instruction from the image display device 200 to present a tactile sensation to the user, the control unit 40C controls the potentials so that the first separator 20 is attracted to the first electrode 11 and the second separator 80 is attracted to the first electrode 71. For example, the control unit 40C may control the potentials so that the potential of the first electrode 11 is greater than the potential of the second electrode 12 and the potential of the electrode layer 22 of the first separator 20, and the potential of the first electrode 71 is greater than the potential of the second electrode 72 and the potential of the electrode layer 22 of the second separator 80. As a result, an electric field is formed between the first electrode 11 and the first separator 20, from the first electrode 11 to the first separator 20, and an electric field is formed between the first electrode 71 and the second separator 80, from the first electrode 71 to the second separator 80. As a result, the first separator 20 is attracted to the first electrode 11 and the second separator 80 is attracted to the first electrode 71 .

[0101] FIG. 15 is a cross-sectional view of actuator 1C showing the state in which first separator 20 and second separator 80 are attracted to first electrode 11 and first electrode 71, respectively. As shown in FIG. 15, when first separator 20 and second separator 80 are attracted to first electrode 11 and first electrode 71, respectively, the volumes of first space S1 and third space S3 decrease. As a result, the first fluid F1 that filled first space S1 and third space S3 is pushed into fifth space S5. As a result, fifth space S5 is filled with a larger volume of first fluid F1 than the volume in the initial state shown in FIG. 14, and the pressure inside fifth space S5 increases. As a result, expandable portion 20a expands from opening 12a of second electrode 12 toward the outside space, and a portion of actuator 1C protrudes from opening 12a. The stretchable portion 20a protruding from the opening 12a comes into contact with the skin of a user wearing a wearable device equipped with the actuator 1C, thereby providing the user with a tactile sensation.

[0102] Next, the operation of the actuator 1C for changing the extending / contracting portion 20a from the protruding state shown in FIG. 15 to a state where the extending / contracting portion 20a does not protrude will be described.

[0103] When the control unit 40C receives an instruction from the image display device 200 to stop presenting the tactile sensation to the user, the control unit 40C controls the potentials so that the first separator 20 is attracted to the second electrode 12 and the second separator 80 is attracted to the second electrode 72. For example, the control unit 40C may control the potentials so that the potential of the second electrode 12 is greater than the potential of the first electrode 11 and the potential of the electrode layer 22 of the first separator 20, and the potential of the second electrode 72 is greater than the potential of the first electrode 71 and the potential of the electrode layer 22 of the second separator 80. As a result, an electric field is formed between the second electrode 12 and the first separator 20, from the second electrode 12 to the first separator 20, and an electric field is formed between the second electrode 72 and the second separator 80, from the second electrode 72 to the second separator 80. As a result, the first separator 20 is attracted to the second electrode 12 and the second separator 80 is attracted to the second electrode 72 .

[0104] FIG. 16 is a cross-sectional view of actuator 1C showing the state in which first separator 20 and second separator 80 are attracted to second electrode 12 and second electrode 72, respectively. As shown in FIG. 16, when first separator 20 and second separator 80 are attracted to second electrode 12 and second electrode 72, respectively, the volumes of first space S1 and third space S3 increase. As a result, first fluid F1 that filled fifth space S5 is drawn into first space S1 and third space S3. This reduces the pressure in fifth space S5. As a result, expandable portion 20a contracts, returning to its initial state in which expandable portion 20a does not protrude from opening 12a.

[0105] As described above, the actuator 1C in this embodiment has a multilayer structure including a first unit U1 including a first electrode 11, a first separator 20, and a second electrode 12, and a second unit U2 including a first electrode 71, a second separator 80, and a second electrode 72. In other words, the actuator 1C has a multilayer structure including multiple units each including two electrodes and a separator disposed between the two electrodes. In the layer including the first electrode 11 and the second electrode 12, the distance between the first electrode 11 and the second electrode 12 is maintained by the first spacer 31 and the second spacer 32. In the layer including the first electrode 71 and the second electrode 72, the distance between the first electrode 71 and the second electrode 72 is maintained by the first spacer 91 and the second spacer 92. This facilitates maintaining the distance between the layers. As a result, the distance between the layers can be reduced, thereby reducing the voltage required to displace the first separator 20 and the second separator 80. This allows the user to have a safe tactile sensation.

[0106] The actuator 1C has a multi-layer structure, and when the expandable portion 20a is brought into the protruding state, the first fluid F1 is supplied from the first space S1 and the third space S3 to the fifth space S5. This makes it easier to increase the pressure in the fifth space S5 required to bring the expandable portion 20a into the protruding state. This allows the voltage applied to displace the first separator 20 and the second separator 80 to be reduced.

[0107] In actuator 1C, first electrode 11 and second electrode 12 have greater rigidity than first separator 20, and first electrode 71 and second electrode 72 have greater rigidity than second separator 80. This makes it easier to maintain the distance between each layer, and therefore makes it easier to form a multilayer structure.

[0108] [Embodiment 4] Other embodiments of the present disclosure will be described below. For convenience of explanation, the same reference numerals will be used to designate components having the same functions as those described in the above embodiment, and the description thereof will not be repeated.

[0109] Fig. 17 is a block diagram showing the main configuration of a haptics system 300D in this embodiment. Fig. 18 is a top view of an actuator 1D in this embodiment. Fig. 19 is a cross-sectional view taken along line XIX-XIX in Fig. 18. Fig. 19 shows the initial state of the actuator 1D.

[0110] 17, a haptic system 300D includes a wearable haptic device 100D and an image display device 200. The wearable haptic device 100D may have the same configuration as the wearable haptic device 100A in the first embodiment, except that it includes an actuator 1D instead of the actuator 1A.

[0111] The actuator 1D has a basic structure in which two actuators 1A of embodiment 1 are stacked with their bottom surfaces facing each other. Specifically, as shown in FIGS. 17 to 19, the actuator 1D includes a third electrode 13, a second separator 50, a first spacer 61, and a second spacer 62 in addition to the components of the actuator 1A. The actuator 1D includes a sealing unit 63 and a control unit 40D instead of the sealing unit 33 and the control unit 40A of the actuator 1A of embodiment 1. A description of the components common to the actuator 1A will be omitted.

[0112] The third electrode 13 is a plate-like electrode to which a voltage can be applied. The third electrode 13 is located on the opposite side of the first electrode 11 from the side on which the second electrode 12 is located, and is disposed opposite the first electrode 11. The third electrode 13 forms the lower surface of the actuator 1D. The third electrode 13 has greater rigidity than the second separator 50 described below. The third electrode 13 may be made of the same material and have the same configuration as the first electrode 11. The third electrode 13 may have the same shape as the first electrode 11 when the actuator 1D is viewed from above.

[0113] The third electrode 13 has an opening 13a in the center that is open in the vertical direction. The shape of the opening 13a is not particularly limited and may be circular or rectangular. The opening 13a in this embodiment is circular. If the opening 13a is circular, the size of the opening 13a may be 1 mm to 9 mm in diameter. The opening 13a may be formed by the same process as the opening 11a of the first electrode. The periphery of the opening 13a may have a region of about 100 μm to 900 μm where no electrode pattern is formed in order to avoid discharge at the edge.

[0114] The second separator 50 is disposed in a region between the first electrode 11 and the third electrode 13. When the actuator 1D is viewed from above, the second separator 50 may be configured to have substantially the same size as the first electrode 11. When the actuator 1D is viewed from above, the second separator 50 may be disposed in a region other than the region where the opening 12a of the second electrode 12 is formed.

[0115] 20 is an enlarged cross-sectional view showing the configuration of the second separator 50. As shown in FIG.

[0116] The flexible member 51 has flexibility and conductivity and may have the same structure as the flexible member 21 described in the first embodiment.

[0117] The electrode layers 52 are located on the upper and lower surfaces of the flexible member 51 so as to sandwich the flexible member 51 from above and below. The electrode layers 52 may have the same structure as the electrode layer 22 described in the first embodiment.

[0118] As shown in FIG. 19 , the first spacer 61 and the second spacer 62 are disposed between the first electrode 11 and the third electrode 13, and maintain a substantially constant distance between the first electrode 11 and the third electrode 13. The first electrode 11 and the third electrode 13 do not need to be disposed parallel to each other, but only need to maintain a space that allows the second separator 50 to be displaced. The first spacer 61 and the second spacer 62 have rigidity. The first spacer 61 and the second spacer 62 may be made of an insulating resin material such as silicone or acrylic. The first spacer 61 and the second spacer 62 may be disposed in the same positions as the first spacer 31 and the second spacer 32, respectively, when the actuator 1D is viewed from above.

[0119] 19 , an upper end 61a of the first spacer 61 abuts against the first electrode 11. A lower end 61b of the first spacer 61 abuts against the third electrode 13 via the second separator 50. That is, a portion of the second separator 50 surrounding the opening 13a of the third electrode 13 is sandwiched between the third electrode 13 and the first spacer 61. The first spacer 61 functions as a spacer that maintains the distance between the first electrode 11 and the third electrode 13.

[0120] An upper end 62a of the second spacer 62 abuts against the first electrode 11 via the second separator 50. That is, the end of the second separator 50, i.e., the outer edge of the second separator 50, is sandwiched between the first electrode 11 and the second spacer 62. A lower end 62b of the second spacer 62 abuts against the third electrode 13. With the above configuration, the second spacer 62 functions as a spacer that maintains the distance between the first electrode 11 and the third electrode 13. The second spacer 62 forms a surrounding shape when the actuator 1D is seen through a plan view. The surrounding-shaped second spacer 62 is provided with at least one communicating path (not shown) based on the same technical idea as the communicating path 32c.

[0121] With the above configuration, the second separator 50 separates the area between the first electrode 11 and the third electrode 13. In the following description of this embodiment, as shown in FIG. 19 , the space between the second separator 50 and the first electrode 11 will be described as a third space S3. Furthermore, when the actuator 1D is viewed from above, the area where the opening 12a of the second electrode 12 is formed will be described as a fourth space S4, which will be described as a space between the expandable portion 20a of the first separator 20 and a sealing portion 63 described later. The volume of the fourth space S4 is defined by the expandable portion 20a.

[0122] As described above with reference to FIG. 6, when the actuator 1A is viewed from above, there is a region around the opening 12a of the second electrode 12 where the first spacer 31 is not provided. Similarly to this configuration, when the actuator 1D is viewed from above, there is also a region around the opening 12a of the second electrode 12 where the first spacer 61 is not provided. Therefore, the third space S3 and the fourth space S4 are in communication with each other. Furthermore, because there is a region around the opening 12a of the second electrode 12 where the first spacer 31 is not provided, the first space S1 and the fourth space S4 are in communication with each other. Therefore, the first space S1, the third space S3, and the fourth space S4 are in communication with each other. The space defined by the first space S1, the third space S3, and the fourth space S4 is filled with a third fluid F3 that can move through the space. The third fluid F3 is not particularly limited as long as it is a fluid that can move through the space formed by the first space S1, the third space S3, and the fourth space S4, but may be, for example, a dielectric fluid such as insulating oil.

[0123] The sealing portion 63 is a member for sealing the opening 13a of the third electrode 13. The sealing portion 63 may be made of a resin material and have a thickness of 10 μm to 1000 μm.

[0124] The control unit 40D controls the potentials of the first electrode 11, the second electrode 12, the third electrode 13, the electrode layer 22 of the first separator 20, and the electrode layer 52 of the second separator 50 independently.

[0125] 17, the control unit 40D is capable of communicating with the image display device 200 and receives instructions from the image display device 200. The control unit 40D may independently control the potentials of the first electrode 11, the second electrode 12, the third electrode 13, the electrode layer 22, and the electrode layer 52 based on the instructions from the image display device 200.

[0126] <Assembly method for actuator 1D> Next, a method for assembling the actuator 1D will be described. First, the lower end portion 62b of the second spacer 62 is joined to the outer periphery of the third electrode 13.

[0127] Next, the second separator 50 is placed on the surface of the third electrode 13 on the side to which the second spacer 62 is bonded. At this time, the outer periphery of the second separator 50 is bonded to the upper end portion 62a of the second spacer 62, and the second separator 50 is bonded to the third electrode 13 around the opening 13a of the third electrode 13.

[0128] Next, the lower end 61b of each first spacer 61 is joined to the second separator 50 at a predetermined interval around the opening 13a of the third electrode 13. Next, the first electrode 11 is stacked on the side where the first spacers 61 are joined. At this time, the upper end 61a of the first spacer 61 and the first electrode 11 are joined.

[0129] Next, on the side of the first electrode opposite to the side where the third electrode 13 is located, the first spacers 31 are joined to the first electrode 11 at predetermined intervals around the opening 11a of the first electrode 11.

[0130] Next, the first separator 20 is placed on the surface of the first electrode 11 on the side to which the first spacer 31 is bonded. At this time, the outer periphery of the first separator 20 is bonded to the first electrode 11. In addition, the upper end 31a of the first spacer 31 is bonded to the first separator 20. Next, the lower end 32b of the second spacer 32 is bonded to the outer periphery of the first separator 20.

[0131] Next, the second electrode 12 is laminated on the side where the second spacer 32 is bonded to the first separator 20. At this time, the upper end 32a of the second spacer 32 and the second electrode 12 are bonded.

[0132] Next, the third fluid F3 is filled into the actuator 1D through the opening 13a formed in the third electrode 13. After filling with the third fluid F3, the sealing portion 63 is joined to the third electrode 13, thereby sealing the opening 13a of the third electrode 13 with the sealing portion 63. As a result, the space formed by the first space S1, the third space S3, and the fourth space S4 is filled with the third fluid F3.

[0133] <Operation example of Actuator 1D> Next, an example of the operation of actuator 1D will be described. In the initial state, first electrode 11, second electrode 12, third electrode 13, electrode layer 22, and electrode layer 52 are all at the same potential. Here, as an example, the description will be given assuming that in the initial state, the potentials of first electrode 11, second electrode 12, third electrode 13, electrode layer 22, and electrode layer 52 are 0V.

[0134] When the control unit 40D receives an instruction from the image display device 200 to present a tactile sensation to the user, the control unit 40D generates a potential difference between the first electrode 11 and the second electrode 12 and between the first electrode 11 and the third electrode 13 so that the first separator 20 and the second separator 50 are attracted to the first electrode 11. Specifically, the control unit 40D controls the potential of the first electrode 11 to be greater than the potentials of the second electrode 12, the third electrode 13, the electrode layer 22, and the electrode layer 52. For example, the control unit 40D may keep the potentials of the second electrode 12, the third electrode 13, the electrode layer 22, and the electrode layer 52 at 0 V, and control the second potential to be a positive potential.

[0135] As described above, by controlling the potentials, an electric field is formed between the first electrode 11 and the first separator 20, directed from the first electrode 11 to the first separator 20, and an electric field is formed between the first electrode 11 and the second separator 50, directed from the first electrode 11 to the second separator 50. As a result, the first separator 20 is displaced as if attracted to the first electrode 11 by the electric field formed between the first electrode 11 and the first separator 20. Furthermore, the second separator 50 is displaced as if attracted to the first electrode 11 by the electric field formed between the first electrode 11 and the second separator 50.

[0136] FIG. 21 is a cross-sectional view of the actuator 1D, showing the first separator 20 and the second separator 50 being attracted to the first electrode 11. As shown in FIG. 21, when the first separator 20 and the second separator 50 are attracted to the first electrode 11, the volumes of the first space S1 and the third space S3 decrease. As a result, the third fluid F3 that filled the first space S1 and the third space S3 is pushed into the fourth space S4, and a volume of the third fluid F3 that is larger than the volume in the initial state shown in FIG. 19 is filled in the fourth space S4, increasing the pressure inside the fourth space S4. As a result, the stretchable portion 20a of the stretchable first separator 20 expands toward the outside space from the opening 12a of the second electrode 12, causing a portion of the actuator 1D to protrude from the opening 12a. The stretchable portion 20a protruding from the opening 12a comes into contact with the user, providing the user with a tactile sensation.

[0137] Next, the operation of the actuator 1D for changing the extending / contracting portion 20a from the protruding state shown in FIG. 21 to a state where the extending / contracting portion 20a does not protrude will be described.

[0138] When the control unit 40D receives an instruction from the image display device 200 to stop presenting the tactile sensation to the user, the control unit 40D controls the potentials of the first electrode 11, the second electrode 12, the third electrode 13, the electrode layer 22, and the electrode layer 52 so that the first separator 20 is attracted to the second electrode 12 and the second separator 50 is attracted to the third electrode 13. Specifically, the control unit 40D controls the potentials of the second electrode 12 and the third electrode 13 to be higher than the potentials of the first electrode 11, the electrode layer 22, and the electrode layer 52. For example, the control unit 40D may control the potentials of the first electrode 11, the electrode layer 22, and the electrode layer 52 to be 0 V, and the potentials of the second electrode 12 and the third electrode 13 to be positive.

[0139] By controlling as described above, an electric field is formed between the second electrode 12 and the first separator 20, in a direction from the second electrode 12 to the first separator 20, and an electric field is formed between the third electrode 13 and the second separator 50, in a direction from the third electrode 13 to the second separator 50. As a result, the first separator 20 is displaced so as to be attracted to the second electrode 12, and the second separator 50 is displaced so as to be attracted to the third electrode 13.

[0140] FIG. 22 is a cross-sectional view of actuator 1D showing the state in which first separator 20 is attracted to second electrode 12 and second separator 50 is attracted to third electrode 13. As shown in FIG. 22, when first separator 20 is attracted to second electrode 12, the volume of first space S1, which is the space between first separator 20 and first electrode 11, increases. At the same time, when second separator 50 is attracted to third electrode 13, the volume of third space S3, which is the space between second separator 50 and first electrode 11, increases. As a result, third fluid F3, which had filled fourth space S4, is drawn into first space S1 and third space S3. This reduces the pressure in fourth space S4. As a result, expandable portion 20a contracts, returning to its initial state in which expandable portion 20a does not protrude from opening 12a.

[0141] In this way, in the actuator 1D, the control unit 40D may control the potential of the first separator 20 and the second separator 50 so that the displacement direction of the first separator 20 and the displacement direction of the second separator 50 are different when the expansion / contraction portion 20a is set to the initial state or the protruding state.

[0142] As described above, the actuator 1D of this embodiment has a multilayer structure including a unit including the first electrode 11, the first separator 20, and the second electrode 12, and a unit including the first electrode 11, the second separator 50, and the third electrode 13. In other words, the actuator 1D has a multilayer structure including multiple units including two electrodes and a separator disposed between the two electrodes. In the layer including the first electrode 11 and the second electrode 12, the distance between the first electrode 11 and the second electrode 12 is maintained by the first spacer 31 and the second spacer 32. In the layer including the first electrode 11 and the third electrode 13, the distance between the first electrode 11 and the third electrode 13 is maintained by the first spacer 61 and the second spacer 62. This makes it easy to maintain the distance between each layer. As a result, the distance between each layer can be reduced, and the voltage required to displace the first separator 20 and the second separator 50 can be reduced. This allows the user to safely experience a tactile sensation.

[0143] Because the actuator 1D has a multi-layer structure, when the expandable portion 20a is brought into the protruding state, the third fluid F3 is supplied from the first space S1 and the third space S3 to the fourth space S4. This makes it easier to increase the pressure in the fourth space S4 required to bring the expandable portion 20a into the protruding state. This allows the voltage required to displace the first separator 20 and the second separator 50 to be reduced.

[0144] In the actuator 1D, the first electrode 11, the second electrode 12, and the third electrode 13 have greater rigidity than the first separator 20 and the second separator 50. This makes it easier to maintain the distance between the layers, and therefore makes it easier to form a multilayer structure.

[0145] Furthermore, even in a configuration having a multi-layer structure such as actuator 1D in this embodiment, as described in embodiment 2, first electrode 11, second electrode 12, and third electrode 13 may be divided into multiple divided regions, and control unit 40D may control the potential of each electrode for each divided region.

[0146] In actuator 1D according to one aspect of the present disclosure, the opening area of ​​opening 12a of second electrode 12 may be smaller than the opening area of ​​opening 11a of first electrode 11. This allows for a larger amount of outward protrusion of stretchable portion 20a, and also makes it easier to contract stretchable portion 20a when changing from a protruding state to a non-protruding state.

[0147] In the actuator 1D according to one aspect of the present disclosure, the opening area of ​​the opening 13a of the third electrode 13 may be smaller than the opening area of ​​the opening 11a of the first electrode 11. This reduces the load on the sealing portion 63 and allows the first fluid F1 to move upward smoothly.

[0148] In the actuator 1D according to one aspect of the present disclosure, the opening area of ​​the opening 13a of the third electrode 13 may be smaller than the opening area of ​​the opening 12a of the second electrode 12. This reduces the load on the sealing portion 63 and allows the first fluid F1 to move upward smoothly.

[0149] The invention according to the present disclosure has been described above based on the drawings and examples. However, the invention according to the present disclosure is not limited to the above-described embodiments. In other words, the invention according to the present disclosure can be modified in various ways within the scope of the present disclosure, and embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the invention according to the present disclosure. In other words, it should be noted that a person skilled in the art can easily make various modifications or corrections based on the present disclosure. It should also be noted that these modifications or corrections are included in the scope of the present disclosure.

[0150] 〔summary〕 The actuator according to aspect 1 of the present disclosure comprises a first electrode, a second electrode, a conductive first separator that separates an area between the first electrode and the second electrode and is capable of changing its relative position with respect to the first electrode and the second electrode, and an expandable portion that switches between an initial state and a protruding state due to the movement of a first fluid that is capable of moving through a first space between the first separator and the first electrode as the first separator is displaced.

[0151] The actuator according to aspect 2 of the present disclosure may be configured in the above aspect 1 such that, as the first separator moves closer to the first electrode, a second fluid is drawn into a second space between the second electrode and the first separator.

[0152] In the actuator according to Aspect 3 of the present disclosure, in Aspect 2 above, the second space may be in communication with an external space.

[0153] In the actuator according to Aspect 4 of the present disclosure, in any one of Aspects 1 to 3 above, the second electrode may have an opening through which the expandable portion protrudes.

[0154] In the actuator according to aspect 5 of the present disclosure, in the above-mentioned aspect 4, when the second electrode is on the upper side and the first electrode is on the lower side, the fixed position of the first separator relative to the second electrode may be higher than the fixed position of the first separator relative to the first electrode.

[0155] In the actuator according to a sixth aspect of the present disclosure, in any one of the first to fifth aspects, the first electrode and the second electrode may have greater rigidity than the first separator.

[0156] In the actuator according to a seventh aspect of the present disclosure, in any one of the first to sixth aspects, the first separator may include a flexible member and an electrode layer located on a surface of the flexible member.

[0157] An actuator according to aspect 8 of the present disclosure may be any of aspects 1 to 7 above, further comprising a control unit that controls the potential of the first electrode, the second electrode, and the first separator, wherein the first electrode or the second electrode is divided into a plurality of divided regions, and the control unit is configured to control the potential for each of the divided regions.

[0158] In the actuator according to a ninth aspect of the present disclosure, in any one of the first to eighth aspects, the first separator and the stretchable portion may be a continuous member.

[0159] The actuator according to a tenth aspect of the present disclosure may be any of the first to ninth aspects, further comprising a spacer that maintains a distance between the first electrode and the second electrode.

[0160] An actuator according to aspect 11 of the present disclosure may be such that, in aspect 10 above, the second electrode has an opening through which the first fluid can flow in and out, and the spacer is a first spacer arranged on the edge of the opening.

[0161] The actuator according to Aspect 12 of the present disclosure may be the actuator of Aspects 10 or 11 above, further comprising, as the spacer, a second spacer positioned on the outer edge of the second electrode.

[0162] An actuator according to a thirteenth aspect of the present disclosure is the actuator of the twelfth aspect above, wherein the second spacer may have a communication passage between the second electrode and the first separator that connects the second space to an external space.

[0163] In the actuator according to Aspect 14 of the present disclosure, in Aspect 10 above, an end of the first separator may be sandwiched between the spacer and the first electrode or the second electrode.

[0164] The actuator according to a fifteenth aspect of the present disclosure may be any one of the first to fourteenth aspects, and may include a plurality of units, each including the first electrode, the first separator, and the second electrode, in a multi-layer structure.

[0165] An actuator according to aspect 16 of the present disclosure may be any of aspects 1 to 15 above, further comprising: a third electrode located on the side of the first electrode opposite the side on which the second electrode is located; and a second separator that separates the area between the first electrode and the third electrode and whose relative position with respect to the first electrode and the third electrode changes depending on the electric field formed between the first electrode and the third electrode; the third space between the second separator and the first electrode may be connected to a fourth space whose volume is defined by the expansion / contraction portion; and a third fluid capable of moving through the third space may flow into the fourth space as the second separator is displaced.

[0166] The actuator according to a seventeenth aspect of the present disclosure may be the same as the sixteenth aspect, further including a control unit that independently controls the potentials of the first separator and the second separator.

[0167] An actuator according to aspect 18 of the present disclosure may be configured in the above-mentioned aspect 17 such that the control unit controls the potential of the first separator and the second separator so that the displacement direction of the first separator and the displacement direction of the second separator are different when the expansion / contraction portion is set to the initial state or the protruding state.

[0168] A haptic device according to a nineteenth aspect of the present disclosure is equipped with at least one actuator according to any one of the first to eighteenth aspects described above.

[0169] A haptic system according to aspect 20 of the present disclosure includes the haptic device of aspect 19 above, and an image display device communicatively connected to the haptic device. [Explanation of symbols]

[0170] 1A, 1B, 1C, 1D Actuators 11, 11A, 71 1st electrode 12, 12A, 72 2nd electrode 12a opening 13 Third electrode 20 First separator 20a stretchable section 21, 51 Flexible member 22, 52 electrode layer 31, 61, 91 First spacer 32, 62, 92 Second spacer 32c communication path 40A, 40B, 40C, 40D Control section 50, 80 Second separator A1, A2, A3, A4, B1, B2, B3, B4 divided area S1 1st space S2 2nd space S3 3rd space S4 4th space 100A, 100B, 100C, 100D Wearable haptic devices (haptic devices) 200 Image display device 300A, 300B, 300C, 300D Haptic Systems

Claims

1. A first electrode; A second electrode; a first separator that partitions a region between the first electrode and the second electrode and has conductivity such that its position relative to the first electrode and the second electrode can be changed; an actuator having an expansion / contraction section that switches between an initial state and a protruding state due to the movement of a first fluid that can move through a first space between the first separator and the first electrode in response to displacement of the first separator.

2. 2. The actuator according to claim 1, wherein a second fluid is drawn into a second space between the second electrode and the first separator as the first separator moves toward the first electrode.

3. The actuator according to claim 2 , wherein the second space is in communication with an external space.

4. The actuator according to claim 1 , wherein the second electrode has an opening through which the expandable portion protrudes.

5. 5. The actuator according to claim 4, wherein, when the second electrode is on the upper side and the first electrode is on the lower side, a fixed position of the first separator relative to the second electrode is higher than a fixed position of the first separator relative to the first electrode.

6. The actuator according to claim 1 , wherein the first electrode and the second electrode have greater rigidity than the first separator.

7. The actuator according to claim 1 , wherein the first separator comprises a flexible member and an electrode layer located on a surface of the flexible member.

8. a control unit that controls the potentials of the first electrode, the second electrode, and the first separator; the first electrode or the second electrode is divided into a plurality of divided regions, The actuator according to claim 1 , wherein the control unit controls the potential for each of the divided regions.

9. The actuator according to claim 1 , wherein the first separator and the elastic portion are a continuous member.

10. The actuator of claim 1 , further comprising a spacer that maintains a distance between the first electrode and the second electrode.

11. the second electrode has an opening through which the first fluid can flow in and out; The actuator according to claim 10 , wherein the spacer comprises a first spacer disposed on an edge of the opening.

12. 11. The actuator according to claim 10, wherein the spacer comprises a second spacer positioned on an outer edge of the second electrode.

13. The actuator according to claim 12 , wherein the second spacer has a communication path between the second electrode and the first separator that connects the second space to an external space.

14. The actuator according to claim 10 , wherein an end of the first separator is sandwiched between the spacer and the first electrode or the second electrode.

15. The actuator according to claim 1 , comprising a plurality of units each including the first electrode, the first separator, and the second electrode, in a multi-layer structure.

16. a third electrode located on the opposite side of the first electrode from the side on which the second electrode is located; a second separator that partitions a region between the first electrode and the third electrode and whose relative position with respect to the first electrode and the third electrode changes depending on an electric field formed between the first electrode and the third electrode, a third space between the second separator and the first electrode communicates with a fourth space whose volume is defined by the expandable portion; The actuator according to claim 1 , wherein a third fluid capable of moving through the third space flows into the fourth space in response to displacement of the second separator.

17. The actuator according to claim 16 , further comprising a control unit that independently controls the potentials of the first separator and the second separator.

18. 18. The actuator according to claim 17, wherein the control unit controls the potentials of the first separator and the second separator so that the displacement direction of the first separator and the displacement direction of the second separator differ when the expansion / contraction portion is in the initial state or the protruding state.

19. A haptic device having at least one actuator according to any one of claims 1 to 18 mounted thereon.

20. 20. The haptic device of claim 19; a haptic system comprising: an image display device communicatively connected to the haptic device;

Images