Light reflecting device, sensor device, and lighting device

Abstract

A light-reflecting member (11) has a mirror surface (111) that reflects light. A deflection mechanism causes the light-reflecting member (11) to pivot about a pivot axis (A) extending in a direction along the mirror surface (111). A first restricting member (131) faces a portion, that includes the pivot axis, of the light-reflecting member (11) with a gap therebetween in a direction intersecting the mirror surface (111), and restricts displacement of the pivot axis (A) in the direction intersecting the mirror surface (111).

Description

[Technical Field]

[0001] The present disclosure relates to a light reflecting device that reflects light emitted from a light source in a desired direction, and also to a sensor device and a lighting device that include the light reflecting device. [Background technology]

[0002] Patent Document 1 discloses a LiDAR system mounted on a vehicle. The LiDAR system includes a light reflecting device that periodically changes the direction of light emitted from a light source in order to detect objects outside the vehicle. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-519891 Summary of the Invention [Problem to be solved by the invention]

[0004] It is desired to suppress a decrease in the accuracy of the light reflection direction by the light reflecting device. [Means for solving the problem]

[0005] One example of an aspect that can be provided by the present disclosure is a light reflecting device, comprising: a light reflecting member having a mirror surface that reflects light; a deflection mechanism that swings the light reflecting member around a swing axis that extends in a direction along the mirror surface; a restricting member that faces a portion of the light reflecting member that includes the oscillation shaft via a gap in a direction intersecting the mirror surface, and restricts displacement of the oscillation shaft in the direction intersecting the mirror surface; It is equipped with:

[0006] One example of an aspect that can be provided by the present disclosure is a light reflecting device, comprising: a light reflecting member having a mirror surface that reflects light; a deflection mechanism that swings the light reflecting member around a swing axis that extends in a direction along the mirror surface; a pair of regulating members that are arranged axially symmetrically with respect to the oscillation axis, that face the light reflecting member across a gap in a direction intersecting the mirror surface, and that regulate displacement of the light reflecting member in the direction intersecting the mirror surface; It is equipped with:

[0007] The present inventors noticed that the light reflection direction of a light reflecting device may deviate from a predetermined direction as the light reflecting member oscillates. Through research and analysis, the inventors discovered that the position of the oscillation axis may displace in a direction intersecting the mirror surface as the light reflecting member oscillates, and that there is a correlation between the change in the amount of deviation of the light reflection direction from the predetermined direction and the displacement of the oscillation axis. As a result, the inventors came up with the idea that by regulating the displacement of the oscillation axis as the light reflecting member oscillates, it is possible to suppress the deviation of the light reflection direction from the predetermined direction.

[0008] According to the configuration of each of the above aspects, when the oscillation axis of the light reflecting member is displaced in a direction intersecting with the mirror surface as the light reflecting member oscillates, the regulating member abuts against a part of the light reflecting member. This restricts the displacement of the oscillation axis of the light reflecting member in a direction intersecting with the mirror surface as the light reflecting member oscillates. Therefore, it is possible to suppress a decrease in the accuracy of the light reflection direction by the light reflecting device.

[0009] One example of an aspect that can be provided by the present disclosure is a sensor device, A light reflecting device according to any one of the above aspects; a light-emitting element that emits invisible light; a light receiving element that outputs a signal corresponding to the intensity of incident invisible light; It is equipped with The mirror surface of the light reflecting device reflects invisible light emitted from the light-emitting element toward the detection area, and also reflects invisible light reflected by an object located within the detection area toward the light-receiving element.

[0010] With this configuration, the decrease in accuracy of the light reflection direction caused by displacement of the oscillating axis of the light reflecting member in a direction intersecting the mirror surface is suppressed, and therefore the decrease in accuracy of object detection by a sensor device that uses the mirror surface can also be suppressed.

[0011] One example of an aspect that can be provided by the present disclosure is a lighting device, comprising: A light reflecting device according to any one of the above aspects; a light source that emits visible light; It is equipped with The mirror surface of the light reflecting device reflects the visible light towards an illumination area.

[0012] With this configuration, the decrease in accuracy of the light reflection direction caused by the displacement of the oscillating axis of the light reflecting member in a direction intersecting the mirror surface is suppressed, and therefore the decrease in accuracy of the arrangement and shape of the light distribution pattern formed by the lighting device using the mirror surface can also be suppressed. [Brief explanation of the drawings]

[0013] [Figure 1] 1 illustrates a partial configuration of a light reflecting device according to an embodiment. [Figure 2] 2 shows the configuration of the light reflecting device of FIG. 1 as viewed from the normal direction of the mirror surface. [Figure 3] 2 illustrates the configuration of the light reflecting device of FIG. 1 as viewed from the direction along the oscillation axis. [Figure 4] 4A and 4B are diagrams for explaining the function of the first stop member in FIG. 3. [Figure 5] 2 illustrates the operation of the light reflecting device of FIG. 1; [Figure 6] 1. FIG. 3 shows another example of the configuration of the light reflecting device of FIG. [Figure 7] 1. FIG. 3 shows another example of the configuration of the light reflecting device of FIG. [Figure 8] 1. FIG. 3 shows another example of the configuration of the light reflecting device of FIG. [Figure 9] 9 illustrates the configuration of the light reflecting device of FIG. 8 as viewed from the direction along the oscillation axis. [Figure 10]9 illustrates the operation of the light reflecting device of FIG. 8; [Figure 11] 2 illustrates an example of the configuration of a sensor device in which the light reflecting device of FIG. 1 can be mounted. [Figure 12] 2 illustrates an example of the configuration of an illumination device in which the light reflecting device of FIG. 1 can be mounted. [Figure 13] 1 illustrates an example of a vehicle in which the above-described sensor device and lighting device can be installed. [Figure 14] 1. FIG. 3 shows another example of the configuration of the light reflecting device of FIG. [Figure 15] The example shows a case where the above-mentioned sensor device and lighting device are mounted on a transportation infrastructure facility. DETAILED DESCRIPTION OF THE INVENTION

[0014]

[0023] The following description will discuss in detail exemplary embodiments with reference to the accompanying drawings, in which the scale of each element is appropriately changed so that it can be clearly seen.

[0015] 1 to 3 illustrate the configuration of a light reflecting device 10 according to one embodiment. The light reflecting device 10 includes a light reflecting member 11 and a deflection mechanism 12.

[0016] The light reflecting member 11 has a mirror surface 111 that reflects light L. The deflection mechanism 12 is configured to swing the light reflecting member 11 around a swing axis A that extends in a direction along the mirror surface 111.

[0017] The deflection mechanism 12 includes a frame 121, a torsion bar 122, and a coil 123. The light reflecting member 11 is supported by the frame 121 via the torsion bar 122. By placing the coil 123 in a magnetic field generated by a magnet (not shown) and passing a current through it, a force is generated that causes the light reflecting member 11 to oscillate around the torsion bar 122. In other words, the oscillation axis A extends along the torsion bar 122. As the light reflecting member 11 oscillates, the reflection direction of the light L changes periodically.

[0018] 2 and 3, the light reflecting device 10 includes a first stop member 131. The first stop member 131 faces a portion of the light reflecting member 11 including the oscillation axis A via a gap in a direction intersecting the mirror surface 111.

[0019] The present inventors have noticed that the reflection direction of light L may deviate from a predetermined direction as the light reflecting member 11 oscillates, as illustrated in Fig. 4. Through study and analysis, the present inventors have found that the position of the oscillation axis A may be displaced in a direction intersecting with the mirror surface 111 as the light reflecting member 11 oscillates, and that there is a correlation between the change in the amount of deviation of the reflection direction of light L from the predetermined direction and the displacement of the oscillation axis A. As a result, the present inventors have come up with the idea that by regulating the displacement of the oscillation axis A as the light reflecting member 11 oscillates, it is possible to suppress the deviation of the reflection direction of light L from the predetermined direction.

[0020] 5, according to the configuration of this embodiment, when the oscillation axis A is displaced in a direction intersecting with the mirror surface 111 as the light reflecting member 11 oscillates, the first regulating member 131 comes into contact with a part of the light reflecting member 11. This regulates the displacement of the oscillation axis A in a direction intersecting with the mirror surface 111 as the light reflecting member 11 oscillates. Therefore, it is possible to suppress a decrease in the accuracy of the light reflection direction by the light reflecting device 10.

[0021] On the other hand, when the oscillation axis A is in a predetermined position, a gap is formed between the light reflecting member 11 and the first stop member 131, and therefore the oscillation of the light reflecting member 11 is not hindered by the first stop member 131. In other words, the size of the gap is determined so that the amount of displacement of the oscillation axis A in the direction intersecting with the mirror surface 111 does not exceed the allowable range while allowing the light reflecting member 11 to oscillate in a predetermined manner.

[0022] In this example, the hardness of the material forming first stop member 131 is set to be lower than the hardness of the material forming the portion of light reflecting member 11 that faces first stop member 131. First stop member 131 may be formed of, for example, silicon. In this case, the portion of light reflecting member 11 that faces first stop member 131 is formed of a material that has a higher hardness than silicon.

[0023] According to this configuration, damage to the light reflecting member 11 caused by the first stop member 131 coming into contact with the light reflecting member 11 can be suppressed.

[0024] 6 and 7, the shape of the tip of the first stop member 131 can be changed as appropriate. In any example, the shape is determined so that when the first stop member 131 comes into contact with the light reflecting member 11, they make line contact or point contact.

[0025] 6, the tip of the first stop member 131 has a semi-cylindrical shape having an axis extending in a direction along the oscillation axis A, or a shape having a plurality of hemispherical protrusions arranged in a direction along the oscillation axis A. In the example shown in Fig. 7, the tip of the first stop member 131 has a triangular prism shape having an axis extending in a direction along the oscillation axis A, or a shape having a plurality of triangular pyramidal protrusions arranged in a direction along the oscillation axis A.

[0026] According to this configuration, the contact area between the light reflecting member 11 and the first regulating member 131 can be reduced, thereby suppressing electrostatic adhesion between the light reflecting member 11 and the first regulating member 131 during regulation. This makes it possible to suppress the first regulating member 131 from interfering with the swing of the light reflecting member 11.

[0027] As illustrated in FIG. 3, a geometric and fine uneven pattern may be formed on the surface of the first stop member 131. In the case of uneven pattern P1, a plurality of linear grooves are arranged. The width and depth of each groove may be on the order of several micrometers. In the case of uneven pattern P2, a plurality of triangular pyramidal protrusions are arranged two-dimensionally. The width and height of each protrusion may be on the order of several micrometers.

[0028] Even with this configuration, the contact area between the light reflecting member 11 and the first regulating member 131 can be reduced, and therefore, electrostatic attraction between the light reflecting member 11 and the first regulating member 131 during regulation can be suppressed.

[0029] The concave-convex pattern P1 and the concave-convex pattern P2 can each be formed by an etching technique such as reactive ion etching or photoetching. In this case, a geometric and fine concave-convex pattern can be accurately formed by a relatively simple method. The material for forming the first stop member 131 and the shape of the concave-convex pattern on the surface are determined appropriately depending on the etching technique to be used.

[0030] 3, the light reflecting device 10 may include a vibration device 14. The vibration device 14 is configured to apply ultrasonic vibrations to at least one of the light reflecting member 11 and the first stop member 131 when electrostatic adhesion occurs between the light reflecting member 11 and the first stop member 131. The frequency and application time of the ultrasonic vibrations are appropriately determined to an extent that can eliminate electrostatic adhesion that may occur between the light reflecting member 11 and the first stop member 131.

[0031] With this configuration, even if electrostatic adsorption unexpectedly occurs between the light reflecting member 11 and the first regulating member 131, the two can be restored to a state in which they face each other across a gap without applying excessive stress to the light reflecting member 11.

[0032] 8 and 9, the light reflecting device 10 may include a pair of second stop members 132. The pair of second stop members 132 are arranged symmetrically with respect to the oscillation axis A. Each second stop member 132 faces the light reflecting member 11 with a gap therebetween in a direction intersecting the mirror surface 111.

[0033] 10 , when the oscillation axis A is displaced in a direction intersecting the mirror surface 111 as the light reflecting member 11 oscillates, at least one of the pair of second regulating members 132 comes into contact with a part of the light reflecting member 11. This makes it easy to regulate the displacement of the light reflecting member 11 in the direction intersecting the mirror surface 111, which follows the displacement of the oscillation axis A in the same direction.

[0034] On the other hand, when the oscillation axis A is in a predetermined position, a gap is formed between the light reflecting member 11 and each second regulating member 132, and therefore the oscillation of the light reflecting member 11 is not hindered by the second regulating members 132. In other words, the size of the gap is determined so that the amount of displacement of the light reflecting member 11 in the direction intersecting with the mirror surface 111 does not exceed the allowable range while allowing the light reflecting member 11 to oscillate a predetermined amount.

[0035] In this example, the hardness of the material forming each second stop member 132 is set to be lower than the hardness of the material forming the portion of the light reflecting member 11 that faces each second stop member 132. Each second stop member 132 may be formed from, for example, silicon. In this case, the portion of the light reflecting member 11 that faces each second stop member 132 is formed from a material that has a higher hardness than silicon.

[0036] According to this configuration, damage to the light reflecting member 11 caused by the second stop members 132 coming into contact with the light reflecting member 11 can be suppressed.

[0037] The shape of the tip of each second stop member 132 can be changed as appropriate, similar to the shape of the tip of the first stop member 131 described with reference to Figures 6 and 7. Furthermore, a geometric and fine uneven pattern can be formed on the surface of each second stop member 132, similar to the surface of the first stop member 131 described with reference to Figure 3.

[0038] In these cases, the contact area between the light reflecting member 11 and each second regulating member 132 can be reduced, thereby suppressing electrostatic adhesion between the light reflecting member 11 and each second regulating member 132 during regulation. This makes it possible to suppress the occurrence of a situation in which the second regulating members 132 obstruct the swinging of the light reflecting member 11.

[0039] The above-described uneven pattern can be formed by an etching technique such as reactive ion etching or photoetching. In this case, a geometric and fine uneven pattern can be accurately formed using a relatively simple method. The material for forming each second stop member 132 and the shape of the uneven pattern on the surface are determined appropriately depending on the etching technique to be used.

[0040] 9 , the vibration device 14 can be configured to apply ultrasonic vibrations to at least one of the light reflecting member 11 and the second regulating member 132 when electrostatic adhesion occurs between the light reflecting member 11 and any of the second regulating members 132. The frequency and application time of the ultrasonic vibrations are appropriately determined to an extent that can eliminate electrostatic adhesion that may occur between the light reflecting member 11 and the second regulating member 132.

[0041] With this configuration, even if electrostatic adsorption unexpectedly occurs between the light reflecting member 11 and any of the second regulating members 132, the two can be restored to a state in which they face each other across a gap without applying excessive stress to the light reflecting member 11.

[0042] As long as the first stop members 131 are disposed so as to face the portion of the light reflecting member 11 that includes the oscillation axis A, the number and positions of the first stop members 131 can be determined appropriately.

[0043] As long as they are arranged symmetrically with respect to the oscillation axis A, the number and positions of the second stop members 132 can be determined appropriately.

[0044] The first regulating member 131 may be omitted if the displacement of the light reflecting member 11 in the direction intersecting the mirror surface 111 of the oscillation axis A is regulated by a pair of second regulating members 132, thereby preventing a decrease in the accuracy of the light reflection direction of the light reflecting device 10.

[0045] The light reflecting device 10 described above can be mounted on a sensor device 20 exemplified in Fig. 11. The sensor device 20 is a device for detecting an object OB located within a predetermined detection area SA.

[0046] The sensor device 20 includes a light-emitting element 21. The light-emitting element 21 is configured to emit invisible light IV. The light-emitting element 21 can be realized by a light-emitting diode, a laser diode, or the like.

[0047] The sensor device 20 includes a light receiving element 22. The light receiving element 22 is sensitive to the wavelength of the invisible light IV emitted by the light emitting element 21, and is configured to output a light detection signal LS corresponding to the intensity of the incident light. The light receiving element 22 can be realized by a photodiode, a phototransistor, a photoresistor, or the like.

[0048] The sensor device 20 includes a control unit 23. The control unit 23 is configured to output an emission control signal C1 that causes the light-emitting element 21 to emit invisible light IV, and a reflection control signal C2 that causes the light reflecting device 10 to adjust the attitude of the light reflecting member 11. The control unit 23 is configured to receive a light detection signal LS output from the light-receiving element 22.

[0049] The control unit 23 outputs an emission control signal C1 to cause the light emitting element 21 to emit pulsed invisible light IV. The invisible light IV emitted from the light emitting element 21 is incident on the light reflecting member 11. An appropriate optical system may be disposed between the light emitting element 21 and the light reflecting member 11. The invisible light IV reflected by the mirror surface 111 of the light reflecting member 11 travels toward the detection area SA.

[0050] If an object OB is located on the path of the invisible light IV, the invisible light IV is reflected by the object OB and returns toward the light reflecting member 11. The control unit 23 outputs a reflection control signal C2 to cause the deflection mechanism 12 of the light reflecting device 10 to swing the light reflecting member 11. This changes the angle of reflection by the mirror surface 111. Specifically, the attitude of the light reflecting member 11 is adjusted so that the returning light from the object OB is reflected toward the light receiving element 22. An appropriate optical system can be arranged between the light reflecting member 11 and the light receiving element 22.

[0051] The return light from the object OB reflected by the mirror surface 111 is incident on the light receiving element 22. The light receiving element 22 detects a pulse-like change in the intensity of the received light. The light receiving element 22 outputs a light detection signal LS corresponding to the change. By receiving the light detection signal LS corresponding to the pulse-like change in the intensity of the received light, the control unit 23 can detect that the object OB is located on the path of the invisible light IV emitted from the light emitting element 21 and reflected by the light reflecting member 11. The control unit 23 can also detect the distance to the object OB based on the time between when the invisible light IV is emitted by the light emitting element 21 and when the return light is detected by the light receiving element 22.

[0052] The control unit 23 repeats the above-described process while changing the attitude of the light reflecting member 11 using the reflection control signal C2 at the time when the light emitting element 21 is caused to emit the invisible light IV. This changes the traveling direction of the invisible light IV within the range indicated by the dashed-dotted line in Fig. 11. This range corresponds to the detection area SA. Therefore, a configuration can be realized in which the object OB is detected by scanning the detection area SA with the invisible light IV emitted from a single light emitting element 21.

[0053] The control unit 23 having the above-described functions can be realized by an output interface that outputs the emission control signal C1 and the reflection control signal C2, an input interface that receives the light detection signal LS, and a processor that executes processing related to the emission control signal C1, the reflection control signal C2, and the light detection signal LS. The processor can be realized by a dedicated integrated circuit such as a microcontroller, an ASIC, or an FPGA. The processor may also be realized by a general-purpose microprocessor that operates in cooperation with a general-purpose memory.

[0054] The light reflecting device 10 described above can be mounted on an illumination device 30 exemplified in Fig. 12. The illumination device 30 is a device that illuminates a predetermined illumination area LA with visible light V.

[0055] The lighting device 30 includes a light source 31. The light source 31 is configured to emit visible light V. The light source 31 can be realized by a semiconductor light-emitting element such as a light-emitting diode, a laser diode, or an EL element.

[0056] The lighting device 30 includes a control unit 32. The control unit 32 is configured to output an emission control signal C3 that causes the light source 31 to emit visible light V, and a reflection control signal C4 that causes the light reflecting device 10 to adjust the attitude of the light reflecting member 11.

[0057] The control unit 32 outputs an emission control signal C3 to cause the light source 31 to emit visible light V. The visible light V emitted from the light source 31 is incident on the light reflecting member 11. An appropriate optical system may be disposed between the light source 31 and the light reflecting member 11. The visible light V reflected by the mirror surface 111 of the light reflecting member 11 travels toward the illumination area LA. The visible light V forms a part of a predetermined light distribution pattern P in the illumination area LA.

[0058] The control unit 32 repeats the above-described process while using the reflection control signal C4 to change the attitude of the light reflecting member 11 at the time when the light source 31 is caused to emit the visible light V. As a result, the traveling direction of the visible light V is changed within the range indicated by the dashed-dotted line in Fig. 12. This range corresponds to the illumination area LA. By repeatedly scanning the illumination area LA with the visible light V emitted from the single light source 31 at a frequency that is undetectable to the human eye, it appears as if a light distribution pattern P having an area larger than the area that can be illuminated by the visible light V emitted from the single light source 31 is continuously formed.

[0059] The control unit 32 can change the combination of the emission control signal C3 and the reflection control signal C4 so as to stop the light source 31 from emitting visible light V when the light reflecting member 11 is in a position that allows it to reflect visible light V in a specific direction within the illumination area LA. In this case, as illustrated in Fig. 12, a light distribution pattern P including a partial non-illuminated area UA can be formed within the illumination area LA.

[0060] The control unit 32 having the above-described functions can be realized by an output interface that outputs the emission control signal C3 and the reflection control signal C4, and a processor that executes processing related to the emission control signal C3 and the reflection control signal C4. The processor can be realized by a dedicated integrated circuit such as a microcontroller, ASIC, or FPGA. The processor may also be realized by a general-purpose microprocessor that operates in cooperation with a general-purpose memory.

[0061] As illustrated in FIG. 13 , at least one of the sensor device 20 and the lighting device 30 can be mounted on a vehicle 40. The vehicle 40 is an example of a moving body. In this example, at least one of the sensor device 20 and the lighting device 30 is mounted on the left front part of the vehicle 40. The left front part of the vehicle 40 is a part located to the left of the center of the vehicle 40 in the left-right direction and forward of the center of the vehicle 40 in the front-rear direction. The detection area SA of the sensor device 20 and the illumination area LA of the illumination device 30 are set outside the vehicle 40. The non-illumination area UA described above is formed to suppress glare that may be caused to occupants of other vehicles or pedestrians located within the illumination area LA.

[0062] When both the sensor device 20 and the lighting device 30 are mounted on the vehicle 40, the light-reflecting member 11 of a single light-reflecting device 10 may be shared by the light-emitting element 21 and the light-receiving element 22 of the sensor device 20 and the light source 31 of the lighting device 30.

[0063] In a moving body such as vehicle 40, acceleration / deceleration and vibrations tend to cause displacement of oscillation axis A of light reflecting member 11 in a direction intersecting mirror surface 111. Therefore, the various effects described above become more pronounced.

[0064] The above-described embodiments are merely examples for facilitating understanding of the present disclosure. The configurations according to the above-described embodiments may be appropriately modified or combined without departing from the spirit of the present disclosure.

[0065] The configuration of the deflection mechanism 12 can be determined appropriately as long as it is possible to swing the light reflecting member 11 about a swing axis A extending in a direction along the mirror surface 111 of the light reflecting member 11. For example, as illustrated in FIG. 14 , the deflection mechanism 12 can include a first arm member 124, a second arm member 125, a first actuator 126, and a second actuator 127.

[0066] Each of the first arm member 124 and the second arm member 125 extends such that the longitudinal direction is a direction that intersects with the mirror surface 111 of the light reflecting member 11. One end of the first arm member 124 in the longitudinal direction and one end of the second arm member 125 in the longitudinal direction are each coupled to the light reflecting member 11.

[0067] The first actuator 126 supports the first arm member 124. The first actuator 126 displaces the first arm member 124 in a direction intersecting the mirror surface 111 of the light reflecting member 11. The second actuator 127 supports the second arm member 125. The second actuator 127 displaces the second arm member 125 in a direction intersecting the mirror surface 111 of the light reflecting member 11. For example, each of the first actuator 126 and the second actuator 127 can be configured to include a piezoelectric element that expands and contracts along the direction in response to an applied voltage.

[0068] By appropriately setting the amount of displacement of the first arm member 124 by the first actuator 126 and the amount of displacement of the second arm member 125 by the second actuator 127, the traveling direction of the light L reflected by the light reflecting member 11 can be adjusted.

[0069] The position at which at least one of the sensor device 20 and the lighting device 30 is placed in the vehicle 40 can be determined appropriately according to at least one of the predetermined detection area SA and lighting area LA, in addition to or instead of the example shown in Figure 13.

[0070] The moving body on which at least one of the sensor device 20 and the lighting device 30 is mounted is not limited to the vehicle 40. Other examples of moving bodies include trains, flying bodies, aircraft, ships, etc. The moving body on which at least one of the sensor device 20 and the lighting device 30 is mounted may not require a driver.

[0071] At least one of the sensor device 20 and the lighting device 30 does not need to be mounted on a mobile object. For example, the sensor device 20 can be installed in a house or facility and applied to a security system that detects objects that enter a detection area. The lighting device 30 can also be applied to a device that temporarily displays predetermined figures, letters, signs, etc. on a specific road surface or wall surface.

[0072] For example, as shown in FIG. 15, at least one of the sensor device 20 and the lighting device 30 may be mounted on a traffic infrastructure facility such as a street light 50 or a traffic signal 60.

[0073] When the sensor device 20 is mounted on a street light 50 or a traffic signal 60, it can detect a pedestrian 70, a vehicle, or the like located within the area A1. That is, a detection area SA illustrated in FIG. 11 is set within the area A1. For example, when it is detected that a pedestrian 70 or a vehicle is entering an intersection, that information can be communicated to a vehicle 40 entering the intersection from another direction via communication. Alternatively, the lighting device 30 can render information (such as text, a sign, or a flashing warning color) in the area A2 to alert a vehicle 40 entering the intersection from another direction. That is, an illumination area LA illustrated in FIG. 12 is set within the area A2.

[0074] The contents of Japanese Patent Application No. 2021-043885 filed on March 17, 2021 are incorporated by reference as part of this disclosure.

Claims

1. a light reflecting member having a mirror surface that reflects light; a deflection mechanism that swings the light reflecting member around a swing axis that extends in a direction along the mirror surface; a first restriction member that faces a portion of the light reflecting member that includes the oscillation shaft via a gap in a direction intersecting the mirror surface and restricts displacement of the oscillation shaft in the direction intersecting the mirror surface; It is equipped with the hardness of the material forming the first stop member is lower than the hardness of the material forming the portion of the light reflecting member facing the first stop member; Light reflecting device.

2. The first stop member has a geometric concave-convex pattern formed thereon. The light reflecting device according to claim 1 .

3. The concave-convex pattern is formed by an etching technique. The light reflecting device according to claim 2 .

4. A light reflecting member having a mirror surface that reflects light; a deflection mechanism that swings the light reflecting member around a swing axis that extends in a direction along the mirror surface; a first restriction member that faces a portion of the light reflecting member that includes the oscillation shaft via a gap in a direction intersecting the mirror surface and restricts displacement of the oscillation shaft in the direction intersecting the mirror surface; a vibration applying device that applies ultrasonic vibration to at least one of the light reflecting member and the first stop member; Equipped with Light reflecting device.

5. A light-reflecting member having a mirror surface that reflects light; a deflection mechanism that swings the light reflecting member around a swing axis that extends in a direction along the mirror surface; a first restriction member that faces a portion of the light reflecting member that includes the oscillation shaft via a gap in a direction intersecting the mirror surface and restricts displacement of the oscillation shaft in the direction intersecting the mirror surface; a pair of second regulating members that are arranged axially symmetrically with respect to the oscillation axis, that face the light reflecting member across a gap in a direction intersecting the mirror surface, and that regulate displacement of the light reflecting member in the direction intersecting the mirror surface; Equipped with Light reflecting device.

6. the hardness of the material forming the pair of second regulating members is lower than the hardness of the material forming the portions of the light reflecting member facing the pair of second regulating members; The light reflecting device according to claim 5 .

7. Each of the pair of second stop members has a geometric concave-convex pattern formed thereon.

7. The light reflecting device according to claim 5 or 6.

8. The concave-convex pattern is formed by an etching technique. The light reflecting device according to claim 7 .

9. a vibration applying device that applies ultrasonic vibration to at least one of the light reflecting member and the pair of second restricting members, The light reflecting device according to any one of claims 5 to 8.

10. A light reflecting device according to any one of claims 1 to 9; a light-emitting element that emits invisible light; a light receiving element that outputs a light detection signal corresponding to the intensity of the incident invisible light; It is equipped with the mirror surface of the light reflecting device reflects the invisible light emitted from the light emitting element toward the detection area, and reflects the invisible light reflected by an object located within the detection area toward the light receiving element; Sensor device.

11. configured to be mounted on a moving object, The sensor device according to claim 10.

12. A light reflecting device according to any one of claims 1 to 9; a light source that emits visible light; It is equipped with the mirror surface of the light reflecting device reflects the visible light toward an illumination area; Lighting equipment.

13. a light-emitting element that emits invisible light; a light receiving element that outputs a light detection signal corresponding to the intensity of the incident invisible light; It is equipped with the mirror surface reflects the invisible light emitted from the light-emitting element toward the detection area, and reflects the invisible light reflected by an object located within the detection area toward the light-receiving element; 13. The lighting device according to claim 12.

14. configured to be mounted on a moving object, 14. The lighting device according to claim 12 or 13.

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