Motor control device

Abstract

The motor control device (101) includes a first controller (7) that outputs a first drive signal (32) so as to reduce a difference between a first position command (31) that specifies the position of a mover (2 b) of a first motor (2) installed on a gantry (1) and a first position signal (35) that indicates the position of the mover (2 b) of the first motor (2), and a gantry action force calculation circuit (8) that outputs gantry action force information that indicates a gantry action force acting on the gantry (1) based on the first drive signal (32). a gantry position calculator (10a) that outputs gantry position information indicating the position of the gantry (1) based on gantry acting force information; a first position correction signal calculator (11a) that outputs a first position correction signal (33) based on the gantry position information; and a first correction drive signal calculator (12a) that outputs a first correction drive signal (34) that drives a first motor (2) based on the first position correction signal (33) and a first drive signal (32).

Description

[Technical Field]

[0001] The present disclosure relates to a motor control device. [Background technology]

[0002] When an electric motor (motor) installed on a pedestal is driven, the reaction force causes elastic deformation of the pedestal, generating vibrations in the pedestal. In a conventional electric motor control device, when a first electric motor and a second electric motor are installed on the pedestal, the device estimates the absolute position of the pedestal taking into account the vibrations generated by driving the first motor, in order to prevent a decrease in the positioning accuracy of the mover of the second motor due to the influence of vibrations generated in the pedestal by driving the first motor, and corrects the signal that drives the second motor based on the estimated absolute position of the pedestal (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 7183489 (Figure 3) Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the conventional motor control device, the signal that drives the second motor is corrected without taking into consideration the vibrations that occur in the base due to the driving of the second motor itself, which causes a problem that the positioning accuracy of the mover of the second motor is reduced due to the influence of the vibrations that occur in the base due to the driving of the second motor itself. Furthermore, the above-mentioned Patent Document 1 does not disclose a method for correcting the signal that drives the motor when only one motor is installed on the base.

[0005] The present disclosure has been made to solve the above-mentioned problems, and provides a motor control device that can improve the positioning accuracy of a mover of a motor. [Means for solving the problem]

[0006] The motor control device according to the present disclosure includes a first controller that outputs a first drive signal so as to reduce the difference between a first position command that specifies the position of a mover of a first motor installed on a gantry and a first position signal that indicates the position of the mover of the first motor; a gantry action force calculator that outputs gantry action force information that indicates the gantry action force acting on the gantry based on the first drive signal output from the first controller; a gantry position calculator that outputs gantry position information that indicates the position of the gantry based on the gantry action force information output from the gantry action force calculator; a first position correction signal calculator that outputs a first position correction signal based on the gantry position information output from the gantry position calculator; and a first correction drive signal calculator that outputs a first correction drive signal to drive the first motor based on the first position correction signal output from the first position correction signal calculator and the first drive signal. [Effects of the Invention]

[0007] According to the present disclosure, it is possible to improve the positioning accuracy of the mover of the motor. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a perspective view of a mechanical device according to a first embodiment. [Figure 2] 1 is a diagram showing a configuration of a system including a motor control device according to a first embodiment. [Figure 3] FIG. 10 is a diagram showing the configuration of a system including a motor control device according to a second embodiment. [Figure 4] FIG. 11 is a diagram showing the configuration of a system including a motor control device according to a third embodiment. [Figure 5] FIG. 10 is a diagram showing the configuration of a system including a motor control device according to a fourth embodiment. [Figure 6] FIG. 13 is a diagram showing the configuration of a system including a motor control device according to a fifth embodiment. [Figure 7]FIG. 10 is a diagram illustrating a processor in the case where at least some of the functions of the first controller, detector, second controller, gantry action force calculator, gantry position calculator, first position correction signal calculator, second position correction signal calculator, first correction drive signal calculator, and second correction drive signal calculator of the motor control device in embodiment 1 are realized by the processor. [Figure 8] FIG. 10 is a diagram showing a processing circuit in the case where at least some of the functions of the first controller, detector, second controller, gantry action force calculator, gantry position calculator, first position correction signal calculator, second position correction signal calculator, first correction drive signal calculator, and second correction drive signal calculator of the motor control device in embodiment 1 are realized by the processing circuit. DETAILED DESCRIPTION OF THE INVENTION

[0009] Embodiment 1 In the following, for ease of explanation, the X, Y, and Z axes shown in the drawings will be referred to as appropriate. First, the configuration of a mechanical device 100 that is the control target of a motor control device 101 in embodiment 1 will be described. FIG. 1 is a perspective view of the mechanical device 100 in embodiment 1. In FIG. 1, the X, Y, and Z axes are illustrated such that the direction from left to right on the paper corresponds to the +X direction, the direction from the front of the paper to the diagonally right back corresponds to the +Y direction, and the direction from the bottom to the top of the paper corresponds to the +Z direction.

[0010] In FIG. 1, the mechanical device 100 comprises a base 1 supported at its bottom by leveling blocks (not shown), a first motor 2, a second motor 3, a third motor 14, a fourth motor 15, a fifth motor 16 and a sixth motor 17 fixed to the base 1, a first driving body 5 driven by the first motor 2 and a second driving body 6 driven by the second motor 3.

[0011] The gantry 1 has a lower gantry portion 1c, two gantry side portions 1a installed on the lower gantry portion 1c so as to face each other, and an upper gantry portion 1b installed so as to extend from one gantry side portion 1a onto the other gantry side portion 1a. Furthermore, the gantry 1 has two gantry side portions 4a installed on the lower gantry portion 1c so as to face each other, and an upper gantry portion 4b installed so as to extend from one gantry side portion 4a onto the other gantry side portion 4a. The two gantry side portions 1a are installed at a fixed interval from each other and extend in the Y-axis direction. The two gantry side portions 4a are installed at a fixed interval from each other and extend in the Y-axis direction. The gantry side portion 1a installed on the -X-direction side and the gantry side portion 4a installed on the -X-direction side are installed so as to be aligned in a straight line in the Y-axis direction with a fixed interval between them. The gantry side portion 1a installed on the +X direction side and the gantry side portion 4a installed on the +X direction side are installed with a predetermined gap between them and aligned in a straight line in the Y-axis direction. The gantry upper portion 1b and the gantry upper portion 4b are installed so as to extend in the X-axis direction.

[0012] The first motor 2 has a stator 2a fixed to the gantry upper part 1b and a mover 2b that moves in the longitudinal direction of the stator 2a, i.e., the X-axis direction. The second motor 3 has a stator 3a fixed to the gantry upper part 4b and a mover 3b that moves in the longitudinal direction of the stator 3a, i.e., the X-axis direction. The third motor 14 has a stator 14a fixed to the gantry side part 1a installed on the -X direction side and a mover 14b that moves in the longitudinal direction of the stator 14a, i.e., the Y-axis direction. The fourth motor 15 has a stator 15a fixed to the gantry side part 1a installed on the +X direction side and a mover 15b that moves in the longitudinal direction of the stator 15a, i.e., the Y-axis direction. The fifth motor 16 has a stator 16a fixed to the gantry side 4a installed on the -X direction side and a mover 16b that moves in the longitudinal direction of the stator 16a, i.e., the Y-axis direction. The sixth motor 17 has a stator 17a fixed to the gantry side 4a installed on the +X direction side and a mover 17b that moves in the longitudinal direction of the stator 17a, i.e., the Y-axis direction. In the first embodiment, the first motor 2, the second motor 3, the third motor 14, the fourth motor 15, the fifth motor 16, and the sixth motor 17 are linear motors, but they are not limited to linear motors and may be, for example, rotary motors. The gantry upper part 1b is fixed on the movers 14b and 15b. The gantry upper part 4b is fixed on the movers 16b and 17b.

[0013] The first driver 5 has a driver 5a that is installed on the mover 2b and operates integrally with the mover 2b, and a working tool 5b that is fixed to the tip of the driver 5a. The second driver 6 has a driver 6a that is installed on the mover 3b and operates integrally with the mover 3b, and a working tool 6b that is fixed to the tip of the driver 6a. In the first embodiment, the working tools 5b and 6b are tools, but are not limited to tools and may be, for example, robot hands.

[0014] In the first embodiment, a machine 100 equipped with a total of six motors, namely a first motor 2, a second motor 3, a third motor 14, a fourth motor 15, a fifth motor 16, and a sixth motor 17, will be described as the controlled object of motor control device 101. Note that the effects of motor control device 101 in the first embodiment can be obtained for both a machine equipped with one to five motors and a machine equipped with seven or more motors.

[0015] 2 is a diagram showing the configuration of a system including a motor control device 101 in embodiment 1. In embodiment 1, a case where the first motor 2 and the second motor 3 are driven simultaneously will be described in detail. Here, it is assumed that the driving directions of the first motor 2 and the second motor 3 are both the +X direction in FIG.

[0016] The motor control device 101 includes a first controller 7 that outputs a first drive signal 32 so as to reduce the difference between a first position command 31 that specifies the position of the mover 2b of the first motor 2 and a first position signal 35 that indicates the relative position of the mover 2b of the first motor 2 and the stator 2a of the first motor 2. The motor control device 101 also includes a second controller 8 that outputs a second drive signal 42 so as to reduce the difference between a second position command 41 that specifies the position of the mover 3b of the second motor 3 and a second position signal 45 that indicates the relative position of the mover 3b of the second motor 3 and the stator 3a of the second motor 3. Here, the first position command 31 can be a command that specifies the position of the mover 2b based on the relative position of the mover 2b of the first motor 2 and the stator 2a of the first motor 2. As the second position command 41, a command specifying the position of the mover 3b of the second motor 3 based on the relative position between the mover 3b and the stator 3a of the second motor 3 can be used.

[0017] The motor control device 101 has a detector 13a that detects the first motor end relative displacement, which is the relative position between the position of the mover 2b of the first motor 2 and the base 1. Here, the transfer characteristic H1(s) from the first motor end relative displacement to the first position signal 35 is expressed by the following equation (1). Therefore, the first position signal 35 indicates the first motor end relative displacement detected by the detector 13a.

[0018]

number

[0019] The motor control device 101 also has a detector 13b that detects the second motor end relative displacement, which is the relative position between the position of the mover 3b of the second motor 3 and the pedestal 1. Here, the transfer characteristic H2(s) from the second motor end relative displacement to the second position signal 45 is expressed by the following equation (2). Therefore, the second position signal 45 indicates the second motor end relative displacement detected by the detector 13b.

[0020]

number

[0021] The first controller 7 includes a calculator 7a that outputs a first position error signal obtained by subtracting a first position signal 35 from a first position command 31, and a calculator 7b that calculates a first position error signal K pp1The first controller 7 further includes a differentiator 7c that differentiates the first position signal 35, and a calculator 7d that outputs a first speed error signal based on the first speed correction signal and a signal obtained by differentiating the first position signal 35 with the differentiator 7c. Specifically, the calculator 7d subtracts the signal obtained by differentiating the first position signal 35 with the differentiator 7c from the first speed correction signal, and outputs the first speed error signal. The first controller 7 also includes a first speed controller 7e that outputs a first drive signal 32 based on the first speed error signal. In the first embodiment, the first speed controller 7e is a PI (Proportional Integral) controller. The transfer characteristic C of the first speed controller 7e is v1 (s) is expressed by the following equation (3).

[0022]

number

[0023] s is the Laplace operator. K vp1 is the proportional gain of the speed control, and K vi1 is the integral gain of the speed control. The transfer characteristic C1(s) from the first position signal 35 to the first drive signal 32 can be expressed by the following equation (4).

[0024]

number

[0025] In the first embodiment, the first controller 7 is a P-PI controller. However, the first controller 7 is not limited to a P-PI controller, and may be a PID (Proportional Integral Differential) controller or other controllers.

[0026] The second controller 8 includes a calculator 8a that outputs a second position error signal obtained by subtracting the second position signal 45 from the second position command 41, and a calculator 8b that calculates the second position error signal by subtracting the second position signal 45 from the second position command 41. pp2The second controller 8 further includes a differentiator 8c that differentiates the second position signal 45, and a calculator 8d that outputs a second speed error signal based on the second speed correction signal and a signal obtained by differentiating the second position signal 45 with the differentiator 8c. Specifically, the calculator 8d subtracts the signal obtained by differentiating the second position signal 45 with the differentiator 8c from the second speed correction signal, and outputs the second speed error signal. The second controller 8 also includes a second speed controller 8e that outputs a second drive signal 42 based on the second speed error signal. In the first embodiment, the second speed controller 8e is a PI controller. The transfer characteristic C of the second speed controller 8e is v2 (s) is expressed by the following equation (5).

[0027]

number

[0028] s is the Laplace operator. K vp2 is the proportional gain of the speed control, and K vi2 is the integral gain of the speed control. The transfer characteristic C2(s) from the second position signal 45 to the second drive signal 42 can be expressed by the following equation (6).

[0029]

number

[0030] In the first embodiment, the second controller 8 is a P-PI controller. However, the second controller 8 is not limited to a P-PI controller, and may be a PID controller or other controllers.

[0031] The motor control device 101 includes a gantry action force calculator 9a and a gantry action force calculator 9b that calculate a gantry action force acting on the gantry 1 based on the first drive signal 32 output from the first controller 7 and the second drive signal 42 output from the second controller 8. The gantry action force is a force that is generated by driving the first motor 2 and the second motor 3 and causes the gantry to vibrate. The gantry action force calculator 9a and the gantry action force calculator 9b calculate the gantry action force and output gantry action force information that indicates the gantry action force. The gantry action force calculator 9a and the gantry action force calculator 9b each perform a calculation expressed by the following equation (7).

[0032]

number

[0033] T i is the driving signal of the i-th motor, and k i is the driving force conversion coefficient of the i-th motor. T p is the gantry acting force calculated based on the drive signals of each motor. In the first embodiment, it is assumed that a total of two motors, the first motor 2 installed in the gantry upper part 1b and the second motor 3 installed in the gantry upper part 4b, are driven, so n=2.

[0034] Driving force conversion coefficient k i is used when converting the motor drive signal into a force acting on the gantry 1. When the motor is a linear motor as in the first embodiment, ideally, k i = 1. The force acting on the platform T p is expressed in thrust [N].

[0035] k i = 1, the force acting on the platform T p In other words, the gantry action force calculator 9a and the gantry action force calculator 9b calculate the gantry action force T based on the sum of the first drive signal 32 and the second drive signal . p are calculated respectively.

[0036] Even when a linear motor is used as the motor, k i Appropriate constants may be set as k1 and k2, respectively, instead of k = 1. In this case, the gantry action force calculator 9a and the gantry action force calculator 9b calculate the gantry action force T based on the sum of the first drive signal 32 multiplied by the first coefficient k1 and the second drive signal 42 multiplied by the second coefficient k2. p are calculated respectively.

[0037] In addition, when a rotary motor is used as the motor and a ball screw is used to drive the mover, the force acting on the base T p is expressed in thrust [N], while the driving force of a rotary motor is expressed in torque [Nm]. In this case, the driving force conversion coefficient k i is expressed by the following equation (8).

[0038]

number

[0039] η i is the conversion efficiency of the ball screw installed in the i-th motor, and r i is the radius [m] of the ball screw installed in the i-th motor.

[0040] Therefore, when a rotary motor is used as the motor, the gantry action force calculator 9a and the gantry action force calculator 9b use the above formulas (7) and (8) to calculate the gantry action force T based on the sum of the first drive signal 32 multiplied by the first coefficient k1 and the second drive signal 42 multiplied by the second coefficient k2. p are calculated respectively.

[0041] The motor control device 101 includes a gantry position calculator 10a that calculates a gantry model position representing an estimated value of the position of the gantry 1, more specifically, the absolute position of the gantry upper part 1b, based on the gantry acting force information output from the gantry acting force calculator 9a. The gantry position calculator 10a calculates a gantry model position representing an estimated value of the absolute position of the gantry upper part 1b, and outputs gantry model position information that is information indicating this gantry model position. The motor control device 101 also includes a gantry position calculator 10b that calculates a gantry model position representing an estimated value of the absolute position of the gantry upper part 4b, based on the gantry acting force information output from the gantry acting force calculator 9b. The gantry position calculator 10b calculates a gantry model position representing an estimated value of the absolute position of the gantry upper part 4b, and outputs gantry model position information that is information indicating this gantry model position.

[0042] Transfer characteristics G of the gantry position calculator 10a and the gantry position calculator 10b si By using a known method, the displacement of the elastically deforming frame 1 is modeled using a spring-mass-damper to obtain the transfer characteristic G si Since the transfer characteristic G can be derived, a detailed explanation of the derivation process will be omitted. si (s) can be expressed by the following equation (9).

[0043]

number

[0044] M b is the mass of frame 1, ζ ni is the damping ratio of frame 1, ω ni is the natural angular frequency of the gantry 1. In the first embodiment, G s1 (s) is the transfer characteristic of the gantry position calculator 10a, and G s2 (s) is the transfer characteristic of the gantry position calculator 10b. When the gantry 1 vibrates in the rotation direction due to the driving force of the mover of the motor, or when the frequency of the relative vibration between the mover and the gantry 1 differs for each mover, ζ n1 is ζ n2 may be different from ω n1 ωn2 Here, in the first embodiment, the transfer function of the gantry 1 is expressed as a second-order function for simplicity, but it may be modeled as a third-order or higher function to express complex vibration characteristics.

[0045] Here, the entire gantry 1 is treated as a single vibration model, so even if multiple motors installed on the gantry 1 are driven simultaneously, the position of each gantry model can be calculated taking into account the force acting on the gantry 1 from each motor.

[0046] The motor control device 101 includes a first position correction signal calculator 11a that outputs a first position correction signal 33 based on the gantry model position information output from the gantry position calculator 10a. The motor control device 101 also includes a second position correction signal calculator 11b that outputs a second position correction signal 43 based on the gantry model position information output from the gantry position calculator 10b.

[0047] The transfer characteristic G of the first position correction signal calculator 11a and the second position correction signal calculator 11b ti (s) will be explained. By using a known method, the transfer characteristic G ti Since the transfer characteristic G can be derived, a detailed explanation of the derivation process will be omitted. ti (s) can be expressed by the following equation (10).

[0048]

number

[0049] m ai is the mass of the mover of the i-th motor. P k is the frame vibration amplitude ratio, which is the ratio of the maximum amplitude B of the lower frame 1c to the maximum amplitude A, where A is the larger of the maximum amplitude of the upper frame 1b and the maximum amplitude of the upper frame 4b, and P k =B / A. C i(s) is the transfer characteristic from the i-th position signal to the i-th drive signal, C1(s) is expressed by the above formula (4), and C2(s) is expressed by the above formula (6). In the first embodiment, G t1 (s) is the transfer characteristic of the first position correction signal calculator 11a, and G t2 (s) is the transfer characteristic of the second position correction signal calculator 11b.

[0050] The motor control device 101 includes a first correction drive signal calculator 12a that outputs a first correction drive signal 34 for driving the first motor 2 based on the first position correction signal 33 output from the first position correction signal calculator 11a and the first drive signal 32. More specifically, the first correction drive signal calculator 12a calculates the first correction drive signal 34 by adding the first position correction signal 33 and the first drive signal 32 together.

[0051] The motor control device 101 includes a second correction drive signal calculator 12b that outputs a second correction drive signal 44 for driving the second motor 3 based on the second position correction signal 43 output from the second position correction signal calculator 11b and the second drive signal 42. More specifically, the second correction drive signal calculator 12b calculates the second correction drive signal 44 by adding the second position correction signal 43 and the second drive signal 42 together.

[0052] The first motor 2 is driven by inputting the first correction drive signal 34 output from the first correction drive signal calculator 12a to the first motor 2. The second motor 3 is driven by inputting the second correction drive signal 44 output from the second correction drive signal calculator 12b to the second motor 3.

[0053] Next, we will explain P1(s) and P2(s) shown in Figure 2. P1(s) is a model that represents the characteristics from the first correction drive signal 34 to the absolute position of the mover 2b of the first motor 2. P2(s) is a model that represents the characteristics from the second correction drive signal 44 to the absolute position of the mover 3b of the second motor 3. If P1(s) and P2(s) are rigid body models, P1(s) can be expressed by the following equation (11), and P2(s) can be expressed by the following equation (12).

[0054]

number

[0055]

number

[0056] m b1 is the sum of the mass of the mover 2b of the first motor 2 and the mass of the first driving body 5, and m b2 is the sum of the mass of the mover 3b of the second motor 3 and the mass of the second driving body 6.

[0057] Next, P shown in Figure 2 s (s) is explained. P s (s) is a model that represents the characteristics from the force applied to the base 1 to the absolute position of the base 1. The force applied to the base 1 here is the reaction force caused by the driving of the first motor 2 and the second motor 3. When the first motor 2 and the second motor 3 are driven, the reaction force caused by the driving is transmitted to the base 1, and the base 1 undergoes elastic deformation due to the low rigidity of the base 1. When the displacement of the base 1 is modeled using a spring-mass-damper, P s (s) can be expressed by the following equation (13).

[0058]

number

[0059] K b is the spring constant and Db is the damping coefficient, and M b is the mass of the gantry 1. As shown in equation (13), the transfer function of the gantry 1 is expressed by a second-order vibration system. It is assumed that the model of the gantry 1 expressed by equation (13) includes resonance characteristics, and in this case, the poles of equation (13) are complex numbers. By expressing the model of the gantry 1 as a second-order vibration system in this way, it is possible to model the gantry 1 including the resonance characteristics of the gantry 1. Here, in the first embodiment, the transfer function of the gantry 1 is expressed by a second-order system for simplification, but it may be modeled by a third-order or higher order system to express complex vibration characteristics.

[0060] Here, it is assumed that the gantry 1 vibrates in rocking mode. When the gantry 1 vibrates in rocking mode, it vibrates while rotating around a leveling block (not shown). At this time, the gantry upper part 1b and the gantry lower part 1c, and the gantry upper part 4b and the gantry lower part 1c can be modeled as vibrating with the same frequency, the same phase, and different amplitudes. Then, as described above, the gantry vibration amplitude ratio P k The maximum amplitude A is the larger of the maximum amplitude of the upper frame 1b and the maximum amplitude of the upper frame 4b, and the ratio of the maximum amplitude B of the lower frame 1c to the maximum amplitude A, that is, P k =B / A.

[0061] The second machine end relative displacement x shown in Figure 2 tip is obtained by subtracting the position of the base lower part 1c from the position of the mover 3b of the second motor 3. The second machine end relative displacement x tip Therefore, detailed description thereof will be omitted.

[0062] The motor control device 101 in the first embodiment includes a first controller 7 that outputs a first drive signal 32 so as to reduce the difference between a first position command 31 that specifies the position of a mover 2 b of a first motor 2 that is installed on a gantry 1 and a first position signal 35 that indicates the position of the mover 2 b of the first motor 2, a gantry action force calculator 9 a that outputs gantry action force information that indicates a gantry action force acting on the gantry 1 based on the first drive signal 32 output from the first controller 7, and a gantry action force calculator 9 b that calculates the gantry action force information output from the gantry action force calculator 9 a. The control system includes a gantry position calculator 10a that outputs gantry position information indicating the position of the gantry 1 based on the gantry acting force information input thereto, a first position correction signal calculator 11a that outputs a first position correction signal 33 based on the gantry position information output from the gantry position calculator 10a, and a first correction drive signal calculator 12a that outputs a first correction drive signal 34 for driving the first motor 2 based on the first position correction signal 33 output from the first position correction signal calculator 11a and a first drive signal 32. The motor control device 101 in embodiment 1 further includes a second controller 8 that outputs a second drive signal 42 so as to reduce the difference between a second position command 41 that specifies the position of the mover 3b of a second motor 3 that is different from the first motor 2 installed on the gantry 1, and a second position signal 45 that indicates the position of the mover 3b of the second motor 3, and the gantry action force calculator 9a outputs gantry action force information based on the first drive signal 32 output from the first controller 7 and the second drive signal 42 output from the second controller 8.

[0063] With the above configuration, in order to correct the signal that drives the first motor 2, it is possible to take into consideration the acting force generated on the gantry 1 by the driving of the first motor 2 itself and the acting force generated on the gantry 1 by the driving of the second motor 3, i.e., the vibration generated on the gantry 1 by the driving of the first motor 2 itself and the vibration generated on the gantry 1 by the driving of the second motor 3. Therefore, it is possible to improve the positioning accuracy of the mover 2b of the first motor 2.

[0064] Moreover, the motor control device 101 of the first embodiment further includes a gantry acting force calculator 9b, a gantry position calculator 10b, and a second position correction signal calculator 11b. As a result, in order to correct the signal that drives the second motor 3, it is possible to take into consideration the acting force generated on the gantry 1 due to the driving of the second motor 3 itself and the acting force generated on the gantry 1 due to the driving of the first motor 2, i.e., the vibration generated on the gantry 1 due to the driving of the second motor 3 itself and the vibration generated on the gantry 1 due to the driving of the first motor 2. Therefore, it is possible to improve the positioning accuracy of the mover 3b of the second motor 3.

[0065] Here, a more specific explanation will be given using an example in which the mechanical device 100 is a machine tool. When the mechanical device 100 is a machine tool, the tool serving as the work implement 5b is, for example, a drill or an end mill. A workpiece to be machined by the tool is placed on the lower pedestal 1c. To machine a desired portion of the workpiece, the tool serving as the work implement 5b must be moved and positioned. To do this, the first motor 2 is driven to move the mover 2b. Driving the first motor 2 generates vibrations in the pedestal 1. As described above, the vibrations of the lower pedestal 1c and the upper pedestal 1b have different amplitudes. Here, when the motor control device 101 in the first embodiment is not used, the mover 2b is driven and positioned by the first drive signal 32, which specifies the relative position of the mover 2b with respect to the stator 2a fixed to the upper pedestal 1b. Therefore, when the upper pedestal 1b vibrates, the mover 2b and the work implement 5b fixed to the mover 2b vibrate with approximately the same amplitude as the upper pedestal 1b. When the lower pedestal 1c vibrates, the workpiece vibrates with approximately the same amplitude as the lower pedestal 1c. Therefore, the relative position of the working implement 5b with respect to the workpiece, in other words, the relative position of the upper gantry 1b with respect to the lower gantry 1c, fluctuates due to vibrations generated by driving the first motor 2. Meanwhile, the motor control device 101 of the first embodiment includes a gantry action force calculator 9a, a gantry position calculator 10a, a first position correction signal calculator 11a, and a first correction drive signal calculator 12a, and outputs a first correction drive signal 34. This first correction drive signal 34 drives the first motor 2. The first correction drive signal 34 is a signal corrected to bring the relative position of the upper gantry 1b with respect to the lower gantry 1c closer to zero, taking into account vibrations generated by driving the first motor 2. By correcting the signal that drives the first motor 2 so that the relative position of the upper gantry 1b with respect to the lower gantry 1c approaches zero, the relative position of the working implement 5b with respect to the workpiece also approaches zero, improving the positioning accuracy of the working implement 5b with respect to the workpiece. In other words, the positioning accuracy of the mover 2b relative to the workpiece or the base lower part 1c is improved.The same is true for second correction drive signal 44, which is a signal that drives second motor 3, and by using motor control device 101 of embodiment 1, the positioning accuracy of working tool 6b relative to the workpiece, in other words, the positioning accuracy of mover 3b relative to the workpiece or lower frame portion 1c, is improved. Note that although the example in which mechanical device 100 is a machine tool has been described, this is not limiting, and the same applies to cases in which the mechanical device is, for example, an electronic component mounter, an exposure device, or the like.

[0066] In the motor control device 101 of the first embodiment, the gantry action force calculator 9a and the gantry action force calculator 9b calculate the gantry action force by the calculation expressed by the above formula (7). That is, the gantry action force calculator 9a and the gantry action force calculator 9b calculate the gantry action force based on the sum of the first drive signal multiplied by the first coefficient, which is a driving force conversion coefficient, and the second drive signal multiplied by the second coefficient, which is a driving force conversion coefficient. This makes it possible to calculate the gantry action force by a relatively simple calculation in which the drive signal of each motor is multiplied by the driving force conversion coefficient and then the sum is calculated.

[0067] In addition, in the above equation (7), each driving force conversion coefficient k i = 1, the gantry acting force calculator 9a and the gantry acting force calculator 9b calculate the gantry acting force based on the sum of the first drive signal and the second drive signal. This makes it possible to calculate the gantry acting force by a simpler calculation than calculating the sum of the drive signals of each motor.

[0068] As described above, when the drive force of the mover of the motor causes the base 1 to vibrate in the rotational direction, or when the frequency of the relative vibration between the mover and the base 1 differs for each mover, ζ n1 is ζ n2 may be different from ω n1 ω n2The motor control device 101 of the first embodiment includes a gantry position calculator 10a for correcting the signal that drives the first motor 2, and a gantry position calculator 10b for correcting the signal that drives the second motor 3. In other words, the configuration includes one gantry position calculator for each motor. With this configuration, it is possible to calculate an appropriate gantry model position for each motor. This makes it possible to improve the positioning accuracy of the mover 2b of the first motor 2 and the positioning accuracy of the mover 3b of the second motor 3.

[0069] In the first embodiment, the first motor 2 and the second motor 3 are simultaneously driven in the +X direction in FIG. 1 . However, the present invention is not limited to this. For example, the first motor 2 may be driven in the +X direction, and the second motor 3 may be driven in the opposite direction, the −X direction. When the two motors are simultaneously driven in opposite directions, the drive reaction forces of the two motors acting on the gantry 1 cancel each other out, and no vibration occurs in the gantry 1. If only the acting force generated on the gantry 1 by the drive of the first motor 2 itself is considered to correct the signal that drives the first motor 2, or if only the acting force generated on the gantry 1 by the drive of the second motor 3 is considered to correct the signal that drives the first motor 2, the signal that drives the first motor 2 will be corrected assuming that vibration is occurring in the gantry 1, even if the drive reaction forces of the two motors cancel each other out and no vibration occurs. On the other hand, in the motor control device 101 of the first embodiment, the gantry action force calculator 9a outputs gantry action force information based on the first drive signal 32 output from the first controller 7 and the second drive signal 42 output from the second controller 8. Therefore, when the drive reaction forces of the two motors cancel each other out, the gantry action force acting on the gantry 1 is calculated to be zero, and the signal driving the first motor 2 can be corrected assuming that no vibration is occurring in the gantry 1. This improves the positioning accuracy of the mover 2b of the first motor 2. Similarly, the signal driving the second motor 3 can be corrected, improving the positioning accuracy of the mover 3b of the second motor 3.

[0070] In the first embodiment, the case where the first motor 2 and the second motor 3 are driven simultaneously has been described, but the present invention is not limited to this, and the effect of the motor control device 101 of the first embodiment can also be obtained when only the first motor 2 or only the second motor 3 is driven. As an example, a case where only the first motor 2 is driven will be described. The motor control device 101 includes a first controller 7 that outputs a first drive signal 32 so as to reduce the difference between a first position command 31 that specifies the position of the mover 2b of the first motor 2 installed on the gantry 1 and a first position signal 35 that indicates the position of the mover 2b of the first motor 2, a gantry action force calculator 9a that outputs gantry action force information that indicates the gantry action force acting on the gantry 1 based on the first drive signal 32 output from the first controller 7, and a gantry action force calculator 9b that calculates the gantry action force output from the gantry action force calculator 9a. The system includes a gantry position calculator 10a that outputs gantry position information indicating the position of the gantry 1 based on gantry acting force information, a first position correction signal calculator 11a that outputs a first position correction signal 33 based on the gantry position information output from the gantry position calculator 10a, and a first correction drive signal calculator 12a that outputs a first correction drive signal 34 for driving the first motor 2 based on the first position correction signal 33 output from the first position correction signal calculator 11a and a first drive signal 32. This makes it possible to take into account the acting force generated on the gantry 1 due to the driving of the first motor 2 itself, i.e., the vibration generated on the gantry 1 due to the driving of the first motor 2 itself, in order to correct the signal for driving the first motor 2. This improves the positioning accuracy of the mover 2b of the first motor 2.

[0071] Furthermore, the present invention is not limited to a case where the first motor 2 and the second motor 3 are driven completely simultaneously. Even when the first motor 2 and the second motor 3 are driven with a time difference, the effects of the motor control device 101 of the first embodiment can be obtained.

[0072] In the first embodiment, the first motor 2 and the second motor 3 are simultaneously driven in the X-axis direction in Fig. 1, but the motors may be driven in other directions. For example, the motors may be driven in the Y-axis direction in Fig. 1.

[0073] The mechanical device 100 is equipped with a third motor 14 and a fourth motor 15 for moving the gantry upper part 1b in the Y-axis direction. As the gantry upper part 1b moves in the Y-axis direction, the first driving body 5 attached to the mover 2b moves in the Y-axis direction. The mechanical device 100 is also equipped with a fifth motor 16 and a sixth motor 17 for moving the gantry upper part 4b in the Y-axis direction. As the gantry upper part 4b moves in the Y-axis direction, the second driving body 6 attached to the mover 3b moves in the Y-axis direction.

[0074] In this way, when third motor 14, fourth motor 15, fifth motor 16, and sixth motor 17 are driven in the Y-axis direction, the correction drive signal for each motor can be calculated using the same method as in embodiment 1. Specifically, the correction drive signal for each motor can be calculated using the above equations (7), (9), and (10).

[0075] In the first embodiment, it is assumed that the correction drive signal for each motor is calculated mainly taking into consideration vibrations that occur after the positioning of the mover of each motor is completed. However, this is not limited to this, and the correction drive signal for each motor may be calculated taking into consideration vibrations during movement of the mover of each motor and at the start of movement.

[0076] In the first embodiment, the first position command 31 is a command that specifies the position of the mover 2b based on the relative position between the mover 2b of the first motor 2 and the stator 2a of the first motor 2. However, the present invention is not limited to this. For example, a command that specifies the position of the mover 2b based on the relative position between the mover 2b of the first motor 2 and the lower part 1c of the frame, or a command that specifies the position of the mover 2b based on an absolute position may be used. The same applies to the second position command 41.

[0077] In the first embodiment, a signal indicating the relative position between the mover 2b of the first motor 2 and the stator 2a of the first motor 2 is used as the first position signal 35. However, this is not limiting, and for example, a signal indicating the relative position between the mover 2b of the first motor 2 and the lower part of the pedestal 1c may be used, or a signal indicating the absolute position of the mover 2b may be used. The same applies to the second position signal 45.

[0078] Embodiment 2 The configuration of the motor control device 102 in embodiment 2 will be described. Components that are the same as or equivalent to those in embodiment 1 will be assigned the same reference numerals, and descriptions thereof will be omitted. FIG. 3 is a diagram showing the configuration of a system including the motor control device 102 in embodiment 2. The motor control device 102 in embodiment 2 differs from embodiment 1 in that it does not include gantry acting force calculator 9b but only includes gantry acting force calculator 9a as a gantry acting force calculator, and in that it includes gantry position calculator 10c instead of gantry position calculator 10a and gantry position calculator 10b.

[0079] The gantry acting force information output from the gantry acting force calculator 9a is input to the gantry position calculator 10c. Based on the gantry acting force information output from the gantry acting force calculator 9a, the gantry position calculator 10c calculates a gantry model position representing an estimated value of the absolute position of the gantry 1. The gantry position calculator 10c calculates a gantry model position representing an estimated value of the absolute position of the gantry 1, and outputs gantry model position information which is information indicating this gantry model position.

[0080] Transfer characteristic G of the platform position calculator 10c s (s) is explained. Transfer characteristic G s (s) is the above equation (9) with ζ n1 =ζ n2 =ζ n and ω n1 =ω n2 =ω n This can be expressed by the following equation (14) with

[0081]

number

[0082] The gantry model position information output from the gantry position calculator 10c is input to a first position correction signal calculator 11a and a second position correction signal calculator 11b.

[0083] As described above, in order to correct the signal that drives the first motor 2, it is possible to take into consideration the acting force generated on the gantry 1 by the driving of the first motor 2 itself and the acting force generated on the gantry 1 by the driving of the second motor 3, i.e., the vibration generated on the gantry 1 by the driving of the first motor 2 itself and the vibration generated on the gantry 1 by the driving of the second motor 3. Therefore, it is possible to improve the positioning accuracy of the mover 2b of the first motor 2.

[0084] Furthermore, in order to correct the signal that drives the second motor 3, it is possible to take into consideration the acting force generated on the gantry 1 by the driving of the second motor 3 itself and the acting force generated on the gantry 1 by the driving of the first motor 2, that is, the vibration generated on the gantry 1 by the driving of the second motor 3 itself and the vibration generated on the gantry 1 by the driving of the first motor 2. Therefore, it is possible to improve the positioning accuracy of the mover 3b of the second motor 3.

[0085] Furthermore, the motor control device 102 of the second embodiment uses one gantry action force calculator 9a and one gantry position calculator 10c to correct the signal that drives the first motor 2 and the signal that drives the second motor 3. As a result, when the gantry action force calculator 9a and the gantry position calculator 10c are realized by hardware, the number of calculators can be reduced compared to the first embodiment, thereby reducing the power consumption of the motor control device 102, for example. When the gantry action force calculator 9a and the gantry position calculator 10c are realized by software, the calculation process can be simplified compared to the first embodiment, thereby reducing the processing load on the processor of the motor control device 102, for example.

[0086] Embodiment 3 The configuration of motor control device 103 in embodiment 3 will be described. Components that are the same as or equivalent to those in embodiment 2 will be assigned the same reference numerals and descriptions thereof will be omitted. FIG. 4 is a diagram showing the configuration of a system including motor control device 103 in embodiment 3. Motor control device 103 in embodiment 3 differs from embodiment 2 in that it includes parameter adjustment unit 50 and parameter storage unit 90.

[0087] The parameter adjustment unit 50 adjusts the values ​​of parameters used in the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b. More specifically, the parameter adjustment unit 50 acquires the value of each parameter from the parameter storage unit 90 and inputs the acquired parameter value to the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, respectively. In this way, the parameter adjustment unit 50 adjusts the values ​​of parameters used in the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, respectively.

[0088] The parameters adjusted by the parameter adjustment unit 50 include, for example, the driving force conversion coefficient k used in the gantry acting force calculator 9a. i , the natural angular frequency ω used in the gantry position calculator 10c n and damping ratio ζ n , the pedestal vibration amplitude ratio P used in the first position correction signal calculator 11a and the second position correction signal calculator 11b k is.

[0089] Depending on the configuration of the mechanical device, when vibration occurs in the frame 1 due to the driving of the motor's mover, the driving force conversion coefficient k i , the natural angular frequency ω of the frame 1 n , damping ratio ζ n and the frame vibration amplitude ratio P kIt may be more appropriate to use different values ​​depending on the spatial position of the mover as the value of . The parameter storage unit 90 stores the position information of the mover 2b and the mover 3b in association with the values ​​of the above-mentioned parameters. More specifically, the area in which the mover 2b and the mover 3b can move is divided into multiple sections, and the coordinates of each section are used as position information. The parameter values ​​to be used when the mover 2b and the mover 3b are in each section are stored in advance in the parameter storage unit 90 in association with the position information. More specifically, the parameter storage unit 90 stores a parameter table in which, for example, each piece of position information is arranged in the first row, each parameter name or ID for identifying each parameter is arranged in the first column, and the value of each parameter to be used corresponding to each piece of position information is stored in the intersecting cells. Note that in the parameter table, each parameter name or ID for identifying each parameter may be arranged in the first row, and each piece of position information may be arranged in the first column. Here, the position information of the mover 2b and the mover 3b is an example of driving status information that indicates the driving status of the first motor 2 and the second motor 3.

[0090] Next, the operation of the parameter adjustment unit 50 will be described. While the first motor 2 and the second motor 3 are driving, the parameter adjustment unit 50 acquires a first position signal 35 and a second position signal 45 as position information of the mover 2b and the mover 3b, respectively, and reads out the values ​​of each parameter associated with the position information based on the acquired position information from the parameter storage unit 90. The parameter adjustment unit 50 inputs the values ​​of each parameter read out from the parameter storage unit 90 to the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, respectively. More specifically, the read driving force conversion coefficient k i The value of the natural angular frequency ω n and damping ratio ζ n The value of the gantry position calculator 10c is input to the gantry vibration amplitude ratio P k The values ​​of are input to the first position correction signal calculator 11a and the second position correction signal calculator 11b, respectively.

[0091] The gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b each perform calculations using the values ​​of the parameters acquired from the parameter adjustment unit 50.

[0092] As described above, the motor control device 103 in the third embodiment includes a parameter adjustment unit 50 that adjusts the parameter values ​​used by the gantry action force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b while the first motor 2 and the second motor 3 are being driven. This makes it possible to appropriately select more appropriate parameter values ​​and correct the signals that drive the first motor 2 and the second motor 3 while the first motor 2 and the second motor 3 are being driven. Furthermore, the values ​​of each parameter can be switched in real time.

[0093] Furthermore, the motor control device 103 includes a parameter storage unit 90 that stores position information of the movers 2b and 3b, which is an example of drive status information indicating the drive status of the first motor 2 and the second motor 3, in association with the values ​​of each parameter. The parameter adjustment unit 50 acquires the first position signal 35 and the second position signal 45, which are position information, and acquires the values ​​of each parameter associated with the position information from the parameter storage unit 90 based on the acquired position information. Using the parameter values ​​acquired from the parameter storage unit 90, the parameter values ​​used in the gantry action force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b are adjusted. Therefore, different parameter values ​​can be used depending on the spatial positions of the movers to correct the signal that drives the first motor 2 and the signal that drives the second motor 3. This further improves the positioning accuracy of the mover 2b of the first motor 2 and the mover 3b of the second motor 3. It is also possible to change the value of each parameter in real time based on the position information.

[0094] In the third embodiment, the parameter adjustment unit 50 adjusts the values ​​of the parameters used to correct the signal that drives the first motor 2 and the signal that drives the second motor 3 while the first motor 2 and the second motor 3 are driving. However, this is not limited to this. Only the values ​​of the parameters used to correct the signal that drives the first motor 2 may be adjusted while only the first motor 2 is driving, or only the values ​​of the parameters used to correct the signal that drives the second motor 3 may be adjusted while only the second motor 3 is driving. Furthermore, only the values ​​of the parameters used to correct the signal that drives the first motor 2 may be adjusted while both the first motor 2 and the second motor 3 are driving, or only the values ​​of the parameters used to correct the signal that drives the second motor 3 may be adjusted while both the first motor 2 and the second motor 3 are driving.

[0095] In the third embodiment, the parameter storage unit 90 stores the values ​​of the parameters used by the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, and the parameter adjustment unit 50 reads out the values ​​of the parameters from the parameter storage unit 90 and inputs them to the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, respectively. However, the present invention is not limited to this, and the parameter storage unit 90 may store at least one value of the parameters used by the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b in association with position information. The parameter adjustment unit 50 only needs to adjust the value of at least one of the parameters used in the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b. Furthermore, the parameter adjustment unit 50 does not necessarily need to read out the parameter values ​​for all types of parameters stored in the parameter storage unit 90, and may read out the parameter values ​​for some of the parameters stored in the parameter storage unit 90.

[0096] In the third embodiment, the parameter storage unit 90 stores a parameter table, but the present invention is not limited to this. The parameter storage unit 90 does not necessarily have to store a parameter table in a table format as long as it stores the value of each parameter in association with the position information.

[0097] In the third embodiment, parameter-adjusting section 50 acquires first position signal 35 and second position signal 45 as position information of movers 2b and 3b, but this is not limiting. Position information may be acquired by other means.

[0098] In addition, in the third embodiment, the position information of the movers 2b and 3b is used as the driving status information, but the present invention is not limited to this. For example, information indicating the speed of the movers 2b and 3b may be used as the driving status information.

[0099] Embodiment 4 The configuration of motor control device 104 in embodiment 4 will be described. Components that are the same as or equivalent to those in embodiment 3 will be assigned the same reference numerals and will not be described again. Figure 5 is a diagram showing the configuration of a system including motor control device 104 in embodiment 4. Motor control device 104 in embodiment 4 differs from embodiment 3 in that it does not include parameter storage unit 90, but instead external controller 60 includes parameter storage unit 91, and external controller 60 and parameter adjustment unit 50 are connected so as to be able to communicate with each other.

[0100] The external controller 60 is, for example, a PLC (Programmable Logic Controller).

[0101] The parameter storage unit 91 stores, for each operation pattern, a parameter table associating position information of the movers 2b and 3b with the value of each parameter. The operation pattern is, for example, the speed or acceleration of the movers 2b and 3b. Furthermore, if it is known that the speed or acceleration of the movers 2b and 3b changes in a specific section within the range in which the movers 2b and 3b can move, the coordinates of the specific section can also be used as information indicating the operation pattern. In other words, the parameter storage unit 91 stores a different parameter table for each speed of the movers 2b and 3b, for each acceleration of the movers 2b and 3b, or for each section in which the movers 2b and 3b exist (i.e., the spatial position of the movers 2b and 3b).

[0102] Next, the operation of the external controller 60 will be described. While the first motor 2 and the second motor 3 are being driven, the external controller 60 selects the corresponding parameter table based on the current operation pattern, acquires position information of the movers 2b and 3b, and reads out the values ​​of each parameter associated with the position information from the parameter storage unit 91 based on the acquired position information. The external controller 60 then transmits the read values ​​of each parameter to the parameter adjustment unit 50.

[0103] Next, we will explain the operation of the parameter adjustment unit 50. The parameter adjustment unit 50 inputs the values ​​of each parameter acquired from the external controller 60 to the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, respectively.

[0104] As described above, in the motor control device 104 according to the fourth embodiment, the parameter adjustment unit 50 acquires parameter values ​​from the external controller 60 and adjusts the parameter values ​​used in the gantry action force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b using the parameter values ​​acquired from the external controller 60. Therefore, in order to correct the signal that drives the first motor 2 and the signal that drives the second motor 3, the value of each parameter can be adjusted taking into account the operation pattern. This further improves the positioning accuracy of the mover 2b of the first motor 2 and the mover 3b of the second motor 3. Furthermore, the parameter table to be used can be switched in real time based on the operation pattern.

[0105] In the fourth embodiment, the parameter storage unit 91 stores the values ​​of the parameters used by the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, and the external controller 60 reads the values ​​of the parameters from the parameter storage unit 91 and transmits them to the parameter adjustment unit 50. However, this is not limiting, and the parameter storage unit 91 may store at least one value of the parameters used by the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b in association with position information. Furthermore, the external controller 60 does not necessarily need to read out the values ​​of all the parameters stored in the parameter storage unit 91, and may read out the values ​​of some of the parameters stored in the parameter storage unit 91.

[0106] In the fourth embodiment, the parameter storage unit 91 stores a parameter table for each driving pattern, but the present invention is not limited to this. The parameter storage unit 90 does not necessarily have to store a table format as long as it stores the value of each parameter in association with the position information for each driving pattern.

[0107] In addition, in the fourth embodiment, an example has been described in which the speed or acceleration of the movers 2b and 3b, or the spatial positions of the movers 2b and 3b, are used as the operation pattern. However, the present invention is not limited to this, and other information related to the driving of the first motor 2 and the second motor 3 may also be used as the operation pattern.

[0108] In the fourth embodiment, an example has been described in which external controller 60 is a PLC. However, this is not limiting, and a controller other than a PLC may also be used. Furthermore, any external device having a function of transmitting parameter values ​​to parameter adjustment unit 50 can be used in place of external controller 60 of the fourth embodiment, even if it does not necessarily have the function of a controller.

[0109] Embodiment 5. The configuration of motor control device 105 in embodiment 5 will be described. Components that are the same as or equivalent to those in embodiment 3 will be assigned the same reference numerals and descriptions thereof will be omitted. FIG. 6 is a diagram showing the configuration of a system including motor control device 105 in embodiment 5. Motor control device 105 in embodiment 5 differs from embodiment 3 in that it includes external sensor 80 and natural angular frequency calculator 70.

[0110] The external sensor 80 is, for example, a position detection sensor that detects the position of the mover 2b of the first motor 2, and may be, for example, a laser length measuring device. The external sensor 80 is installed in the lower part 1c of the frame. The position of the mover 3b of the second motor 3 may also be detected by the external sensor 80.

[0111] The natural angular frequency calculator 70 extracts vibration components from the signal indicating the position of the mover 2b output from the external sensor 80, and calculates the natural angular frequency ω n Calculate the value of .

[0112] Next, the operations of the external sensor 80, the natural angular frequency calculator 70, and the parameter adjustment unit 50 will be described. The external sensor 80 detects the position of the mover 2b and outputs a signal indicating the position of the mover 2b. The natural angular frequency calculator 70 acquires the signal indicating the position of the mover 2b output from the external sensor 80, and calculates the natural angular frequency ω n The natural angular frequency ω calculated by the natural angular frequency calculator 70 is n The value of is input to the parameter adjustment unit 50. The parameter adjustment unit 50 adjusts the natural angular frequency ω n The value is input to the gantry position calculator 10c.

[0113] As described above, the motor control device 105 in the fifth embodiment controls the natural angular frequency ω 1 among the parameters used by the gantry position calculator 10c while the first motor 2 and the second motor 3 are being driven. n and obtains an output signal from an external sensor 80, which is a sensor for detecting the natural angular frequency ω n The parameter adjusting unit 50 is provided with a natural angular frequency calculator 70 that outputs the value of the natural angular frequency ω n Using the value of n Therefore, in order to correct the signal for driving the first motor 2 and the signal for driving the second motor 3, the natural angular frequency ω n This allows the positioning accuracy of the mover 2b of the first motor 2 and the mover 3b of the second motor 3 to be further improved.

[0114] In the fifth embodiment, the external sensor 80 is a position detection sensor that detects the position of the mover 2b of the first motor 2. However, the present invention is not limited to this. The external sensor 80 may be, for example, a speed detection sensor that detects the speed of the mover 2b of the first motor 2, or an acceleration detection sensor that detects the acceleration of the mover 2b of the first motor 2, or a combination of these. The external sensor 80 may be a sensor that detects at least one value of parameters used in the gantry action force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b, and multiple external sensors 80 of different types may be used to detect the values ​​of the respective parameters.

[0115] In the fifth embodiment, the natural angular frequency ω n The output signal from the external sensor 80, which is a sensor for detecting the natural angular frequency ω n In the above description, the motor control device 105 is provided with a natural angular frequency calculator 70 that calculates the natural angular frequency (NRF) of the gantry acting force calculator 9a. However, this is not limiting. Depending on the external sensor 80 provided, a parameter calculator may be provided that calculates the corresponding parameter values ​​among the parameters used in the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b based on the output signal acquired from the external sensor 80. Alternatively, a dedicated parameter calculator may be provided for each parameter, or a parameter calculator capable of calculating multiple parameters may be provided. The parameter values ​​calculated by the parameter calculators are input to the parameter adjustment unit 50. The parameter adjustment unit 50 inputs the parameter values ​​acquired from the parameter calculators to the corresponding ones of the gantry acting force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b.

[0116] Furthermore, instead of the motor control device 105 being equipped with various parameter calculators including the natural angular frequency calculator 70, for example, an external controller 61 (not shown) may be equipped with the various parameter calculators. In this case, an output signal from the external sensor 80 is input to the external controller 61, and the various parameter calculators of the external controller 61 calculate corresponding parameter values ​​among the parameters used in the gantry action force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b based on the output signal acquired from the external sensor 80. The calculated parameter values ​​are input to the parameter adjustment unit 50. The parameter adjustment unit 50 inputs the parameter values ​​acquired from the parameter calculator of the external controller 61 to the corresponding ones of the gantry action force calculator 9a, the gantry position calculator 10c, the first position correction signal calculator 11a, and the second position correction signal calculator 11b.

[0117] 7 is a diagram illustrating a processor 201 in a case where at least some of the functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry acting force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b included in the motor control device 101 in Embodiment 1 are realized by the processor 201. In other words, at least some of the functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry acting force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b may be realized by the processor 201 executing a program stored in memory 202. The processor 201 may be a central processing unit (CPU), a processing system, an arithmetic system, a microprocessor, or a digital signal processor (DSP). A memory 202 is also shown in FIG.

[0118] When at least some of the functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry action force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b are implemented by the processor 201, the at least some of the functions are implemented by the processor 201 and software, firmware, or a combination of software and firmware. The software or firmware is written as a program and stored in the memory 202. The processor 201 reads and executes the programs stored in the memory 202 to realize at least some of the functions of the first controller 7, the detectors 13a and 13b, the second controller 8, the gantry acting force calculators 9a and 9b, the gantry position calculators 10a and 10b, the first position correction signal calculator 11a, the second position correction signal calculator 11b, the first correction drive signal calculator 12a, and the second correction drive signal calculator 12b.

[0119] When at least some of the functions of the first controller 7, the detectors 13a and 13b, the second controller 8, the gantry acting force calculators 9a and 9b, the gantry position calculators 10a and 10b, the first position correction signal calculator 11a, the second position correction signal calculator 11b, the first correction drive signal calculator 12a, and the second correction drive signal calculator 12b are realized by the processor 201, the motor control device 101 in embodiment 1 has a memory 202 for storing programs that will be executed as a result by at least some of the first controller 7, the detectors 13a and 13b, the second controller 8, the gantry acting force calculators 9a and 9b, the gantry position calculators 10a and 10b, the first position correction signal calculator 11a, the second position correction signal calculator 11b, the first correction drive signal calculator 12a, and the second correction drive signal calculator 12b. It can also be said that the programs stored in memory 202 cause the computer to execute at least a portion of the procedures or methods executed by at least a portion of the first controller 7, detectors 13a and 13b, second controller 8, gantry action force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b.

[0120] The memory 202 may be, for example, a non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), EEPROM (registered trademark) (Electrically Erasable Programmable Read-Only Memory), a magnetic disk, a flexible disk, an optical disk, a compact disk, a mini disk, or a DVD (Digital Versatile Disk).

[0121] 8 is a diagram illustrating a processing circuit 203 in a case where at least some of the functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry acting force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b included in the motor control device 101 in Embodiment 1 are realized by the processing circuit 203. In other words, at least some of the functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry acting force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b may be realized by the processing circuit 203.

[0122] The processing circuitry 203 is dedicated hardware, such as a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a combination thereof.

[0123] At least some of the functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry action force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b may be realized by dedicated hardware separate from the hardware that realizes the remaining functions of the first controller 7, detectors 13a and 13b, second controller 8, gantry action force calculators 9a and 9b, gantry position calculators 10a and 10b, first position correction signal calculator 11a, second position correction signal calculator 11b, first correction drive signal calculator 12a, and second correction drive signal calculator 12b that the motor control device 101 has.

[0124] With regard to the multiple functions possessed by the first controller 7, the detectors 13a and 13b, the second controller 8, the gantry acting force calculators 9a and 9b, the gantry position calculators 10a and 10b, the first position correction signal calculator 11a, the second position correction signal calculator 11b, the first correction drive signal calculator 12a, and the second correction drive signal calculator 12b, some of the multiple functions may be realized by software or firmware, and the remaining multiple functions may be realized by dedicated hardware. In this way, the multiple functions possessed by the first controller 7, the detectors 13a and 13b, the second controller 8, the gantry acting force calculators 9a and 9b, the gantry position calculators 10a and 10b, the first position correction signal calculator 11a, the second position correction signal calculator 11b, the first correction drive signal calculator 12a, and the second correction drive signal calculator 12b may be realized by hardware, software, firmware, or a combination thereof.

[0125] 3 to 6 may be realized by a processor that executes a program stored in a memory, or may be realized by a processing circuit. The memory is a memory equivalent to memory 202, the processor is a processor equivalent to processor 201, and the processing circuit is a processing circuit equivalent to processing circuit 203.

[0126] The function of the parameter storage unit 90 shown in FIG. 4 is realized by a memory equivalent to the memory 202. [Explanation of symbols]

[0127] 1 Mounting stand 1a, 4a Side of the stand 1b, 4b Top of the stand 1c Lower part of the stand 2 First Motor 2a, 3a, 14a, 15a, 16a, 17a stator 2b, 3b, 14b, 15b, 16b, 17b mover 3 Second Motor 5 First Driver 5a, 6a Drive unit 5b, 6b Work tools 6 Secondary Driver 7 First Controller 7a, 8a computing unit 7b, 8b Proportional gain output device 7c, 8c differentiator 7d, 8d computing unit 7e First speed controller 8 Second Controller 8e Second Speed ​​Controller 9a, 9b Platform acting force calculator 10a, 10b, 10c Platform position calculator 11a first position correction signal calculator 11b Second position correction signal calculator 12a First correction drive signal calculator 12b Second correction drive signal calculator 13a, 13b detectors 14 Third Motor 15 Fourth Motor 16 Fifth Motor 17 Sixth Motor 31 First position command 32 First drive signal 33 First position correction signal 34 First correction drive signal 35 First position signal 41 Second position command 42 Second drive signal 43 Second position correction signal 44 Second correction drive signal 45 Second position signal 50 Parameter adjustment section 60, 61 External controller 70 Natural angular frequency calculator 80 External Sensor 90, 91 Parameter storage section 100 Mechanical equipment 101, 102, 103, 104, 105 Motor control device 201 processor 202 memory 203 Processing Circuit

Claims

1. a first controller that outputs a first drive signal so as to reduce a difference between a first position command that specifies a position of a mover of a first motor installed on a pedestal and a first position signal that indicates a position of the mover of the first motor; a gantry action force calculator that outputs gantry action force information indicating a gantry action force acting on the gantry based on the first drive signal output from the first controller; a gantry position calculator that outputs gantry position information indicating the position of the gantry based on the gantry acting force information output from the gantry acting force calculator; a first position correction signal calculator that outputs a first position correction signal based on the gantry position information output from the gantry position calculator; a first correction drive signal calculator that outputs a first correction drive signal for driving the first motor based on the first position correction signal output from the first position correction signal calculator and the first drive signal; A motor control device comprising:

2. a second controller that outputs a second drive signal so as to reduce a difference between a second position command that specifies a position of a mover of a second motor different from the first motor and that is installed on the frame, and a second position signal that indicates a position of the mover of the second motor; the gantry action force calculator outputs the gantry action force information based on the first drive signal output from the first controller and the second drive signal output from the second controller. The motor control device according to claim 1 .

3. a second position correction signal calculator that outputs a second position correction signal based on the gantry position information output from the gantry position calculator; a second correction drive signal calculator that outputs a second correction drive signal for driving the second motor based on the second position correction signal output from the second position correction signal calculator and the second drive signal output from the second controller; The motor control device of claim 2 further comprising:

4. The platform acting force calculator is calculating the gantry acting force based on the sum of the first drive signal and the second drive signal; The motor control device according to claim 2 or 3.

5. The platform acting force calculator is calculating the gantry acting force based on the sum of the first drive signal multiplied by a first coefficient and the second drive signal multiplied by a second coefficient; The motor control device according to claim 2 or 3.

6. a parameter adjusting unit that adjusts at least one value of parameters used in the gantry action force calculator, the gantry position calculator, and the first position correction signal calculator while the first motor is being driven; The motor control device according to any one of claims 1 to 3.

7. a parameter storage unit that stores driving status information indicating a driving status of the first motor and a value of at least one of the parameters in association with each other; The parameter adjustment unit acquiring, from the parameter storage unit, values ​​of the parameters associated with the driving status information based on the driving status information; adjusting the value of at least one of the parameters used in the gantry acting force calculator, the gantry position calculator, and the first position correction signal calculator, using the value of the parameter acquired from the parameter storage unit; The motor control device according to claim 6.

8. the driving status information is information indicating a position of a mover of the first motor or information indicating a speed of a mover of the first motor; The motor control device according to claim 7.

9. The parameter adjustment unit Obtaining the value of the parameter from an external device; adjusting the value of at least one of the parameters used in the gantry acting force calculator, the gantry position calculator, and the first position correction signal calculator, using the value of the parameter acquired from the external device; The motor control device according to claim 6.

10. a parameter calculator that, while the first motor is being driven, acquires an output signal from a sensor for detecting at least one of the parameters used in the gantry acting force calculator, the gantry position calculator, and the first position correction signal calculator, and outputs a value of the corresponding parameter based on the output signal acquired from the sensor; the parameter adjustment unit adjusts the value of at least one of the parameters used in the gantry acting force calculator, the gantry position calculator, and the first position correction signal calculator, using the value of the parameter output from the parameter calculator. The motor control device according to claim 6.

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