Reduced pressure drying device

Abstract

To suppress generation of uneven drying of a coating film by making a gap during decompression drying uniform within a substrate surface.SOLUTION: A decompression dryer includes: a top plate part having an opposing surface opposing to an upper surface of a substrate supported by a substrate support part; a top plate lifting / lowering part for lifting / lowering the top plate part between a lower position where the opposing surface comes close to the upper surface of the substrate supported by the substrate support part and an upper position above the lower position in a processing space; and a plurality of pressing pins mounted to the opposing surface and abutting on a peripheral edge region on one main surface to correct warp of the substrate when the top plate part is located at the lower position. A distance between the upper surface of the corrected substrate and the opposing surface (gap during decompression drying) can be made uniform within the substrate surface.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a reduced pressure drying apparatus for drying a coating film formed on a substrate. [Background technology]

[0002] One semiconductor device manufacturing process involves applying a coating liquid to a substrate surface to form a coating film, which is then dried to form a functional film such as a resist film or a protective film on the substrate surface. In recent years, the demand for smaller and thinner devices has been increasing significantly in the semiconductor device field. To meet this demand, fan-out panel-level packaging (FOPLP), which uses substrates to manufacture semiconductor packages, has attracted attention. When manufacturing semiconductor packages using FOPLP technology, the coating film applied to the substrate surface is also dried before the substrate is subjected to an exposure and development process. As an example of an apparatus for performing this drying process, a reduced-pressure drying apparatus, as described in Patent Document 1, is used as an example of a substrate processing apparatus that reduces the pressure around a substrate on which a coating film has been formed to volatilize the solvent components. In this apparatus, the substrate is placed on the upper surface of a substrate support stage, and a rectifying plate is positioned above the substrate. By controlling the distance (hereinafter referred to as the "reduced-pressure drying gap") from the lower surface of the rectifying plate (corresponding to the "opposing surface of the top plate" in this specification) to the upper surface of the substrate (substrate surface), the evaporation rate of the solvent components from the coating film formed on the substrate is uniformly adjusted across the substrate surface. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-38284 Summary of the Invention [Problem to be solved by the invention]

[0004] However, warping tends to increase due to factors such as the material of the substrate used for semiconductor packaging. As a result, when the substrate is placed on the substrate placement stage, the periphery of the substrate may be positioned higher than the center. This type of warping is also becoming a problem for other types of substrates. This substrate warping causes uneven gaps across the substrate surface during reduced-pressure drying. As a result, the coating film dries unevenly.

[0005] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a reduced-pressure drying apparatus that can make the gap uniform across the substrate surface during reduced-pressure drying, thereby suppressing the occurrence of uneven drying of the coating film. [Means for solving the problem]

[0006] This invention 1st One aspect is a reduced-pressure drying apparatus comprising: a chamber having a processing space capable of accommodating a substrate having a coating film formed on a central region of one main surface; a substrate support section that supports the substrate within the processing space with the coating film facing upward; an exhaust section that exhausts the processing space; a top plate section having an opposing surface that faces the upper surface of the substrate supported by the substrate support section; a top plate elevating section that raises and lowers the top plate section within the processing space between a lower position where the opposing surface approaches the upper surface of the substrate supported by the substrate support section and an upper position that is higher than the lower position; and a plurality of pressing pins that are attached to the opposing surface and come into contact with a peripheral region of the one main surface when the top plate section is located at the lower position. The top plate portion includes an upper top plate connected to the top plate lifting portion, and a lower top plate having an opposing surface and disposed below the upper top plate; and a plurality of connecting members that connect the upper and lower top plates at different positions within the plane of the lower top plate, and at least some of the connecting members are capable of adjusting the distance between the upper and lower top plates. It is characterized by the following. In addition, a second aspect of the present invention is a reduced-pressure drying apparatus comprising: a chamber having a processing space capable of accommodating a substrate having a coating film formed in a central region of one main surface; a substrate support section that supports the substrate within the processing space with the coating film facing upward; an exhaust section that evacuates the processing space; a top plate section having an opposing surface that faces the upper surface of the substrate supported by the substrate support section; a top plate lifting section that raises and lowers the top plate section within the processing space between a lower position where the opposing surface approaches the upper surface of the substrate supported by the substrate support section and an upper position that is higher than the lower position; and a plurality of pressure pins attached to the opposing surface that abut against a peripheral region of one main surface when the top plate section is in the lower position, and further comprising a plurality of alignment pins attached at different positions around the opposing surface that slide against edges of the substrate supported by the substrate support section so as to be freely movable horizontally while the top plate section is moving to the lower position, thereby adjusting the position of the substrate in a horizontal plane.

[0007] In this invention, the top plate has a facing surface that faces the upper surface of the substrate supported by the substrate support. Therefore, by controlling the distance from the facing surface to the upper surface of the substrate, i.e., the vacuum drying gap, the evaporation rate of the solvent from the coating film formed on the substrate can be controlled. Here, if the peripheral edge of the substrate is warped upward, the vacuum drying gap will be uneven across the substrate surface. Therefore, in this invention, when the top plate, which has multiple pressure pins provided for the peripheral edge of the facing surface, is lowered to a lower position, the pressure pins abut against the peripheral region of one main surface of the substrate, correcting the warpage of the substrate. [Effects of the Invention]

[0008] As described above, in the present invention, the top plate portion having an opposing surface facing the upper surface of the substrate supported by the substrate support portion is configured to correct the warpage of the substrate by using a plurality of pressure pins provided on the periphery of the opposing surface, thereby making it possible to make uniform the distance (gap during reduced-pressure drying) between the corrected upper surface of the substrate and the opposing surface within the substrate surface. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a diagram showing a first embodiment of a reduced pressure drying apparatus according to the present invention. [Figure 2] 2 is a perspective view showing the positional relationship between a chamber and a substrate support unit in the reduced-pressure drying apparatus shown in FIG. [Figure 3A] FIG. 2 is a perspective view of the top plate portion seen from diagonally above. [Figure 3B] FIG. 2 is a perspective view of the top plate portion viewed obliquely from below. [Figure 4] 10A and 10B are side cross-sectional views showing the configuration and adjustment operation of the top plate portion. [Figure 5] 4 is a flowchart showing a reduced-pressure drying operation performed by the reduced-pressure drying apparatus according to the present invention. [Figure 6A] 1. FIG. 4 is a diagram showing a substrate loading operation in the reduced-pressure drying apparatus shown in FIG. [Figure 6B] 1. FIG. 4 is a diagram showing a chamber closing operation in the reduced-pressure drying apparatus shown in FIG. [Figure 6C]2A to 2C are diagrams illustrating substrate correction and initial reduced-pressure drying operations in the reduced-pressure drying apparatus shown in FIG. [Figure 6D] 2 is a diagram showing a main reduced-pressure drying operation in the reduced-pressure drying apparatus shown in FIG. 1. FIG. [Figure 7A] FIG. 10 is a perspective view of a top plate portion of a second embodiment of a reduced-pressure drying apparatus according to the present invention, viewed obliquely from above. [Figure 7B] FIG. 10 is a plan view of a top plate portion of a second embodiment of a reduced-pressure drying apparatus according to the present invention, viewed obliquely from below. [Figure 8] FIG. 10 is a diagram showing a part of a third embodiment of a reduced pressure drying apparatus according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0010] FIG. 1 is a diagram showing a first embodiment of a reduced-pressure drying apparatus according to the present invention. More specifically, FIG. 1 is a combination of a cross-sectional view showing the configuration of the main parts of a reduced-pressure drying apparatus 1 according to the first embodiment of the present invention and a block diagram of a control system for the same. In order to clarify the layout relationship of each part of the apparatus in each of the following figures, a right-handed XYZ Cartesian coordinate system is set as shown in FIG. 1. The XY plane shown in this coordinate system represents the horizontal direction, and the Z direction represents the vertical direction. In particular, the (-Z) direction represents the vertical downward direction.

[0011] This reduced-pressure drying apparatus 1 can be applied to, for example, part of the manufacturing process for panel level packages (PLPs), and processes a rectangular substrate S having a coating film F made of a processing liquid formed on its surface. Specifically, the reduced-pressure drying apparatus 1 receives the substrate S with the coating film F still wet, and performs a process of volatilizing the solvent components in the coating film and drying and hardening the coating film by heating the substrate S and reducing the pressure of the surrounding space. Hereinafter, this type of substrate processing will be referred to as a "heating reduced-pressure drying process."

[0012] The substrate S may be, for example, a glass substrate for semiconductor packaging having a rectangular shape in a plan view and having semiconductor chips, wiring, etc. laminated on its surface. The coating film F may be, for example, a photoresist film. The substrate material and the type of coating film are not limited to these, and the substrate to be processed may be, for example, a substrate used in the manufacture of semiconductor devices or display devices other than semiconductor packages.

[0013] The reduced pressure drying apparatus 1 mainly comprises a chamber 10, a substrate support unit 20, an exhaust unit 30, a top plate unit 40, a top plate lifting unit 50, The apparatus includes a group of presser pins 60 and a control unit 90. The chamber 10 receives a substrate S having a coating film F formed on its upper surface Sa therein and performs a predetermined process. The exhaust unit 30 is connected to the processing space of the chamber 10 (reference symbol SP in Figures 6B to 6D, which will be described later) and exhausts the processing space. The control unit 90 includes a CPU (Central Processing Unit) 91, which executes a predetermined control program to control the operation of each part of the apparatus and realize various processes described below. Note that the dotted arrows in Figure 1 indicate the flow of control signals from the control unit 90 to each part of the apparatus.

[0014] FIG. 2 is a perspective view showing the relative positions of the chamber and the substrate support unit in the reduced-pressure drying apparatus shown in FIG. 1. The chamber 10 forms a processing space (referenced SP in FIGS. 6B to 6D) for reducing the pressure around the substrate S, prevents solvent components volatilized during processing from scattering to the surroundings, and suppresses heat dissipation and improves energy efficiency by covering the heated substrate S. For these purposes, the chamber 10 has a box-shaped structure in which a cover unit 11 and a bottom plate unit 12 are combined with a sealing member 13 interposed therebetween. More specifically, the cover unit 11, which has a hollow cavity with an open bottom, closes the top of the substantially flat bottom plate unit 12, thereby forming a processing space between the cover unit 11 and the bottom plate unit 12. The cover unit 11 and the bottom plate unit 12 are made of a metal material, such as stainless steel or aluminum. The sealing member 13 is made of an elastic material, such as rubber.

[0015] The cover part 11 is supported by a support mechanism (not shown) so as to be able to move up and down in the vertical direction (Z direction), and a chamber drive part 93 provided in the control part 90 moves the cover part 11 up and down in the Z direction. This opens and closes the chamber 10. Specifically, the chamber drive part 93 closes the chamber 10 with the cover part 11 positioned downward as shown in FIG. 1, forming a processing space inside. On the other hand, when the chamber drive part 93 moves the cover part 11 upward, the cover part 11 and the bottom plate part 12 are separated from each other as shown in FIGS. 1 and 2, and the processing space is opened. When the cover part 11 is in the closed state (FIGS. 6B to 6D), processing of the substrate S is performed, while when the cover part 11 is in the open state (FIGS. 1, 2, and 6A), it is possible to insert and remove the substrate S and perform maintenance work on the internal components.

[0016] Furthermore, a planar heater H is attached to the outer surface of the cover part 11. Each heater H is electrically connected to a heater driving part 92 of the control part 90. Therefore, when the heater H is operated by the heater driving part 92, it becomes possible to heat the substrate S with the cover part 11 in a closed state. Note that in this embodiment, a so-called panel heater is used as the heater H, but a strip-shaped or wire-shaped heater may also be used. Furthermore, the attachment position of the heater H is not limited to the outer surface of the cover part 11, and the heater H may also be attached to the inner surface or built into the cover part 11.

[0017] As shown in FIGS. 1 and 2, a substrate support section 20 is provided on the upper surface of the bottom plate section 12. The substrate support section 20 has a plurality of (four in this embodiment) base support members 21 standing upright from the upper surface of the bottom plate section 12 so as to surround an exhaust through-hole 12a provided in the center of the bottom plate section 12. A base member 22 is supported by these base support members 21. The base member 22 has a planar size wider than the substrate S, and a plurality of support pins 23 standing upright from its upper surface. In this embodiment, as shown in FIG. 2, 16 support pins 23 are arranged in a 4×4 matrix in a plan view from above, and can horizontally support the substrate S from below with the coating film F facing upward.

[0018] An exhaust pipe 31 of the exhaust unit 30 is connected to the exhaust through hole 12a. In addition to the exhaust through hole 12a, a purge through hole 12b is also provided in the bottom plate 12. A purge pipe 32 of the exhaust unit 30 is connected to the purge through hole 12b. The exhaust pipe 31 is connected to an exhaust line (not shown) via an exhaust valve 33 and a pump 34. The purge pipe 32 is connected to a purge gas source (not shown) via a purge valve 35.

[0019] The exhaust unit 30 is controlled by an atmosphere control unit 94 of the control unit 90. Specifically, the exhaust valve 33 and the pump 34 are operated in response to a control signal from the atmosphere control unit 94, thereby exhausting the gas inside the chamber 10 and reducing the pressure in the processing space. Furthermore, the purge valve 35 is operated in response to a control signal from the atmosphere control unit 94, thereby introducing a purge gas from an external gas source into the processing space. In this manner, the exhaust unit 30 is operated in response to a control signal from the atmosphere control unit 94, thereby controlling the atmosphere inside the processing space. Then, a reduced-pressure drying process is performed under atmosphere-controlled conditions. Furthermore, in this embodiment, a top plate 40 is provided to adjust the evaporation rate of the solvent from the coating film F formed on the substrate S during the reduced-pressure drying process.

[0020] 3A is a perspective view of the top plate portion and the substrate as viewed obliquely from above. FIG. 3B is a perspective view of the top plate portion as viewed obliquely from below. As shown in FIGS. 1 and 3A, the top plate portion 40 is arranged so as to cover from above the substrate S, which has a coating film F formed in a central region Sa2 of the top surface excluding a peripheral region Sa1 of the top surface. The top plate portion 40 has a lower top plate 41, the lower surface of which functions as an opposing surface 41a that faces the upper surface Sa of the substrate S and is substantially parallel to the upper surface Sa, and an upper top plate 42 arranged directly above the lower top plate 41. The opposing surface 41a of the lower top plate 41 is larger than the planar size of the substrate S, and when positioned directly above the substrate S by the top plate lifting unit 50, it covers the entire substrate as viewed from above.

[0021] An upper top plate 42 is disposed directly above the lower top plate 41. As shown in FIG. 3A, the upper top plate 42 has the same planar size as the lower top plate 41. To reduce the weight of the upper top plate 42, punched portions are provided in the upper top plate 42 in areas other than the central and peripheral portions. An elevation shaft 51 of a top plate elevation unit 50 is connected to the center of the upper surface of the upper top plate 42. The upper top plate 42 and the lower top plate 41 are connected to each other and integrated by four connecting members 43, spaced a small distance apart in the vertical direction Z. The elevation shaft 51 is attached to the cover unit 11 so as to be able to move up and down in the vertical direction Z, and an elevation mechanism 52 for raising and lowering the elevation shaft 51 is fixedly attached to the cover unit 11. Therefore, when the cover unit 11 is raised and lowered by the chamber drive unit 93 of the control unit 90, the top plate elevation unit 50 and the top plate unit 40 are raised and lowered together. 1, by moving the cover portion 11 upward, the top plate portion 40 is positioned at a position above and away from the substrate support portion 20 and the substrate S supported by the substrate support portion 20. Conversely, by moving the cover portion 11 downward, the top plate portion 40 approaches the substrate S.

[0022] In this embodiment, a presser pin group 60 and a top plate elevating unit 50 are provided to achieve the functions of correcting warpage of the substrate S and adjusting the distance between the substrate S and the lower top plate 41 in the vertical direction Z with high precision. The presser pin group 60 is made up of a plurality of presser pins 61, which protrude downward from the opposing surface 41a of the lower top plate 41. In this embodiment, in order to press down the peripheral portion of the upper surface of the substrate S, ten presser pins 61 are provided for each side of the peripheral portion of the upper surface, and are detachably attached to the lower surface (opposing surface 41a) of the lower top plate 41 so as to face the peripheral portion of the upper surface of the substrate S. Therefore, a total of 40 presser pins 61 are provided toward the peripheral portion of the upper surface of the substrate S.

[0023] In the tabletop lifting unit 50, the lifting mechanism 52 operates in response to a lifting command from the tabletop position control unit 95 of the control unit 90, and shifts the lifting shaft 51 in the vertical direction Z.

[0024] The upper top plate 42, lower top plate 41, connecting member 43, and top plate lifting unit 50 configured as described above move up and down in the vertical direction Z together with the cover unit 11. Therefore, even when the top plate lifting unit 50 is stopped, the top plate unit 40 approaches the substrate S and stops when, for example, the cover unit 11 is lowered by the chamber driving unit 93. Here, if the peripheral edge of the substrate S is warped upward relatively significantly, some of the presser pins 61 may come into contact with the peripheral edge of the substrate S along the way, pressing down on the peripheral edge of the substrate S and correcting the warpage (see FIG. 6B, which will be described later). Also, if the amount of warping of the substrate S is relatively small, all of the presser pins 61 may be upwardly spaced away from the peripheral edge of the substrate S when the cover unit 11 stops descending.

[0025] After the cover part 11 stops descending, when only the top plate part 40 (= lower top plate 41 + upper top plate 42 + connecting member 43) descends in response to a descending command from the top plate position control part 95, the gap between the lower top plate 41 and the substrate S narrows, and the central region of the opposing surface 41a of the lower top plate 41 approaches a position directly above the top surface Sa of the substrate S, covering the coating film F from above. Moreover, because all the pressing pins 61 press downward along the entire periphery of the peripheral portion of the top surface of the substrate S, the gap between the lower top plate 41 and the substrate S matches the amount of downward protrusion of the pressing pins 61 from the opposing surface 41a, and warping of the substrate S can be corrected across the entire surface of the substrate.

[0026] In this embodiment, to prevent the connecting members 43 from interfering with the substrate S during the elevation of the top panel 40, the four connecting members 43 are attached near the peripheral corners of the lower top panel 41 and the upper top panel 42, as shown in FIGS. 3A and 3B. More specifically, the four connecting members 43 are provided in areas outside the overlapping area (the area surrounded by a dashed line in FIG. 3B) where the substrates S overlap in a plan view from above. Furthermore, one of the four connecting members 43 is a fixed connecting member 43a that connects the lower top panel 41 and the upper top panel 42 with a collar (not shown) disposed between them, while the remaining three are push-pull bolts 43b that adjust the distance between the lower top panel 41 and the upper top panel 42. This allows the operator to easily and accurately adjust the horizontal position of the lower top panel 41. This adjustment operation will be described with reference to FIG. 4.

[0027] FIG. 4 is a schematic diagram illustrating the procedure for adjusting the posture of the lower top plate. As shown in FIG. 4(a), if the lower top plate 41 in the top plate unit 40 is tilted relative to the upper top plate 42, the gap during the drying process, i.e., the vacuum drying gap, will vary across the surface of the substrate S, making it difficult to achieve a uniform vacuum drying process. Such tilting of the lower top plate 41 can occur during the initial assembly stage of the apparatus or due to aging. Therefore, in this embodiment, a leveling process is performed when the vacuum drying apparatus 1 is not in operation, such as during assembly, factory installation, or maintenance of the vacuum drying apparatus 1. More specifically, an operator can adjust the lower top plate 41 to a horizontal posture by operating three push-pull bolts 43b, as shown in FIG. 4(b). In the vacuum drying apparatus 1 having the lower top plate 41 adjusted in this manner, a heating vacuum drying process is performed in the following order.

[0028] Fig. 5 is a flowchart showing the flow of the heating and reduced pressure drying process performed by the reduced pressure drying apparatus shown in Fig. 1. Figs. 6A to 6D are diagrams each showing the operation of each part of the apparatus during the heating and reduced pressure drying process. This process is realized by the CPU 91 of the control unit 90 executing a prepared control program to cause each part of the apparatus to perform a predetermined operation. The cover part 11 is previously heated to a predetermined temperature by operating the heater H (step S11).

[0029] 6A, the cover unit 11 is raised integrally with the top plate lifting unit 50 and the top plate unit 40 by the chamber driving unit 93, forming a loading / unloading space for loading and unloading the substrate S. Subsequently, the unprocessed substrate S (i.e., carrying an undried coating film F) held by the hand HD of an external transfer robot is moved to a position above the support pins 23 through the loading / unloading space. Thereafter, as indicated by the arrow in FIG. 6A, the hand HD is lowered, and the substrate S is transferred to the support pins 23 (step S12). Note that loading and unloading of the substrate S is not limited to being performed by a transfer robot, and any method using an appropriate transfer mechanism capable of transferring the substrate S in a horizontal position may be used.

[0030] When the loading of the substrate S is completed as described above, the hand HD retreats from the loading / unloading space. Subsequently, the chamber drive unit 93 lowers the cover unit 11 together with the top plate lifting unit 50 and the top plate unit 40 (step S13). As a result, the cover unit 11 comes into close contact with the bottom plate unit 12 via the seal member 13, forming a closed processing space SP. At this time, the top plate unit 40 is located at an upper position Pup spaced above the substrate S supported by the support pins 23. This upper position Pup is a position suitable for subsequent reduced-pressure drying, and refers to a height position vertically above the upper surface Sa of the substrate S by the reduced-pressure drying gap GP.

[0031] The peripheral edge of the substrate S may be warped upward. If the amount of warping is zero or relatively small, the presser pins 61 of the top plate portion 40 do not come into contact with the peripheral edge of the upper surface of the substrate S. On the other hand, as shown in FIG. 6B, if the amount of warping is relatively large, some of the presser pins 61 may come into contact with the peripheral edge of the upper surface of the substrate S and press the peripheral edge of the upper surface downward. However, even in this case, most of the presser pins 61 are spaced upward from the substrate S.

[0032] Next, in response to a descent command from the top-plate position control unit 95, only the top plate unit 40 (= lower top plate 41 + upper top plate 42 + connecting member 43) is lowered to a lower position Pdw below the upper position Pup. At this time, as shown in FIG. 6C , all the presser pins 61 contact and press against the upper surface peripheral region Sa1 of the substrate S, thereby correcting warpage of the substrate S (step S14). Concurrently, the atmosphere control unit 94 starts depressurizing the processing space SP (step S15).

[0033] In this embodiment, during the initial stages of the straightening and reduced-pressure drying of the substrate S (hereinafter referred to as the "initial drying period"), the atmosphere control unit 94 adjusts the exhaust volume to prevent a decrease in the drying quality of the coating film F due to rapid evaporation of the solvent component in the coating film F. That is, during the initial drying period, the drying speed of the coating film F is suppressed, and the exhaust speed (exhaust volume per unit time) is suppressed until the amount of solvent component in the coating film F falls below a predetermined value, reaching a state known as semi-dry or semi-dry. In this specification, exhausting in this state with the exhaust volume suppressed by the exhaust unit 30 is referred to as "slow exhaust," and the exhaust volume during slow exhaust corresponds to an example of the "first exhaust volume" of the present invention. On the other hand, as will be described later, exhausting at a higher exhaust speed than slow exhaust in order to increase the reduced-pressure drying speed is referred to as "main exhaust," and the exhaust volume during main exhaust corresponds to an example of the "second exhaust volume" of the present invention.

[0034] Once the initial drying period has elapsed ("YES" in step S16), the top-plate position control unit 95 raises only the top-plate unit 40 (= lower top plate 41 + upper top plate 42 + connecting member 43) to the upper position Pup (step S17), as shown in FIG. 6D. This process corresponds to an example of the "top-plate raising process" of the present invention. As a result, the reduced-pressure drying gap GP becomes a preset value. Furthermore, the above correction process makes the gap between the upper surface Sa and the opposing surface 41a of the lower top plate 41, i.e., the reduced-pressure drying gap GP, uniform within the plane of the upper surface Sa. Then, in this state, the atmosphere control unit 94 switches from slow exhaust to main exhaust, and the remaining solvent component of the coating film F rapidly evaporates (step S18). This makes it possible to adjust the solvent evaporation rate to a relatively high value with excellent in-plane uniformity. As a result, the coating film F on the substrate S can be dried with excellent quality while shortening the reduced-pressure drying time.

[0035] As described above, while the lower top plate 41 is positioned at the desired upper position Pup, reduced-pressure drying processing is performed using the main exhaust, and when the period until the solvent concentration in the coating film F reaches a predetermined value or less (hereinafter referred to as the "main drying period") has elapsed ("YES" in step S19), the exhaust unit 30 stops exhausting. Subsequently, the reduced-pressure state of the processing space SP is released by introducing a purge gas (step S20). Then, the cover unit 11 moves upward to a position where the substrate S can be loaded and unloaded (the position shown in FIG. 6A), thereby releasing the substrate S in the processing space SP. Subsequently, an external transfer robot is received, and the substrate S after drying processing is unloaded to the outside (step S21).

[0036] If there is a next substrate S to be processed ("YES" in step S22), the process returns to step S12 to receive the new substrate S and perform the same process as above. On the other hand, if there is no new substrate S ("NO" in step S22), the process can be terminated after a predetermined termination operation.

[0037] As described above, according to the first embodiment, a plurality of pressure pins 61 are provided on the peripheral edge of the opposing surface 41a of the lower top plate 41. Then, before vacuum drying with the opposing surface 41a facing the upper surface Sa of the substrate S, the top plate 40 is positioned at the lower position Pdw, and the warpage of the substrate S is corrected by the plurality of pressure pins 61. Therefore, the distance between the corrected upper surface Sa of the substrate S and the opposing surface 41a, i.e., the vacuum drying gap GP, can be made uniform across the substrate surface. As a result, the drying process involving vacuum and heating can be successfully performed even on a warped substrate S.

[0038] In this embodiment, the four connecting members 43 include one fixed connecting member 43a and three push-pull bolts 43b, which are provided at different positions on the surface of the lower top plate 41. Therefore, even if the lower top plate 41 is tilted relative to the horizontal plane as shown in section (a) of Figure 4, the lower top plate 41 can be adjusted to a horizontal position by adjusting the three push-pull bolts 43b, as shown in section (b) of the same figure. Therefore, the warp can be corrected well, and the gap GP during reduced-pressure drying can be made uniform within the substrate surface.

[0039] In this embodiment, three push-pull bolts 43b are used as connecting members for adjusting the gap between the upper top plate 42 and the lower top plate 41, but the gap may be adjusted using connecting members other than the push-pull bolts 43b. The number of connecting members is not limited to "3".

[0040] Furthermore, when the top panel 40 is viewed from above, the connecting member 43 is located outside the substrate S supported by the substrate support portion 20. This effectively prevents the connecting member 43 from interfering with the substrate S while the top panel 40 is moving up and down.

[0041] Furthermore, each presser pin 61 is detachable from the lower top plate 41. Therefore, multiple types of presser pins 61 that protrude downward from the lower top plate 41 by different amounts may be prepared in advance, and the type of presser pin 61 attached to the lower top plate 41 may be changed depending on the thickness of the substrate S. This makes it possible to accommodate different types of substrate S and multiple recipes, thereby improving the versatility of the reduced pressure drying apparatus 1. Furthermore, instead of changing the type of presser pin 61, the top plate position control unit 95 may be configured to change the lower position Pdw of the top plate unit 40 as appropriate.

[0042] Furthermore, in this embodiment, the reduced-pressure drying process is performed in two stages: an initial reduced-pressure drying process (steps S14 and S15) and a main reduced-pressure drying process (steps S18 and S19). This effectively prevents problems such as loss of uniformity of the coating film F due to rapid evaporation of the solvent from the coating film F during the correction process, and enables the coating film F to be dried under reduced pressure with excellent quality.

[0043] As described above, in the first embodiment, the upper surface Sa of the substrate S corresponds to the "one principal surface" of the present invention, and the upper surface peripheral region Sa1 and the upper surface central region Sa2 correspond to the "peripheral region" and the "central region" of the present invention, respectively. Also, the initial drying period and the main drying period correspond to examples of the "first predetermined time" and the "second predetermined time" of the present invention, respectively.

[0044] 7A and 7B are a perspective view and a plan view, respectively, of a second embodiment of a reduced-pressure drying apparatus according to the present invention, viewed from below. This second embodiment differs significantly from the first embodiment in that two additional alignment pin pairs, each consisting of two alignment pins 45, are added. The remaining configuration is identical to that of the first embodiment. One alignment pin pair is provided at one corner of the overlapping region (the region surrounded by a dashed line in FIG. 7B) where the substrates S overlap in a plan view from below, and the other alignment pin pair is provided at a corner diagonally opposite the overlapping region. Furthermore, when comparing the downward protrusions of each alignment pin 45 and the pressure pin 61 from the opposing surface 41a, the protrusions of each alignment pin 45 are greater than those of the pressure pin 61, and the tips of the alignment pins 45 are tapered downward. Therefore, when the top plate 40 is lowered in step S17, the alignment pins 45 also descend together with the top plate 40. Then, before the presser pins 61 contact the substrate S, the tips of the alignment pins 45 contact the corner portions of the substrate S, and the substrate S is positioned in the substrate posture defined by the two alignment pin pairs. The substrate S is then pressed down by the multiple presser pins 61, and warpage is corrected. Therefore, the reduced-pressure drying process can be performed with the substrate S always in a predetermined position and in a warpage-corrected state, making the reduced-pressure drying process even more stable and high-quality. In this second embodiment, two pairs of alignment pins are used, but three or more pairs of alignment pins may be used. Also, although the alignment pins 45 are arranged corresponding to the corner portions of the substrate S, alignment pins that engage with other portions to position the substrate S may also be used.

[0045] The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the top plate portion 40 is composed of the lower top plate 41 and the upper top plate 42. However, as shown in Fig. 8, the top plate portion 40 may be composed of only the lower top plate 41 (third embodiment). In other words, the lower surface of the lower top plate 41 may function as the "opposing surface" of the present invention, and the upper surface of the lower top plate 41 may be connected to the lift shaft 51.

[0046] In addition, in the above embodiment, 16 support pins 23 are used to support the underside of the substrate S, and 40 pressure pins 61 are used to press the upper peripheral area Sa1 of the substrate S, but the number and arrangement of the support pins 23 and pressure pins 61 can be modified as appropriate and applied.

[0047] Furthermore, in the above embodiment, the processing space SP is switched between open and closed by raising and lowering the cover portion 11, but the above switching may be performed by raising and lowering the bottom plate portion 12 or by raising and lowering both. [Industrial Applicability]

[0048] The present invention relates to a reduced pressure drying apparatus for drying a coating film formed on a substrate. [Explanation of symbols]

[0049] 1...Decompression drying device 10...Chamber 20...Substrate support part 23...Support pin 30...Exhaust section 40...Top plate 41...Lower top plate 41a...(lower top plate) opposing surface 42...Upper top plate 43...Connecting member 43a...Fixed connecting member 43b...Push-pull bolt 45...Alignment pin 50...Tabletop lifting section 60...Presser pin group 61...Presser pin 90...Control unit F...coating film GP: Gap during reduced pressure drying SP: Processing space Pdw…Downward position Pup…Upper position S...Substrate Sa...(substrate) top surface Sa1: Upper surface peripheral region Sa2…Top center area

Claims

1. a chamber having a processing space capable of accommodating a substrate having a coating film formed on a central region of one main surface; a substrate support part that supports the substrate in the processing space with the coating film facing upward; an exhaust unit that exhausts the processing space; a top plate portion having an opposing surface facing an upper surface of the substrate supported by the substrate support portion; a top plate lifting unit that lifts and lowers the top plate unit within the processing space between a lower position where the facing surface approaches an upper surface of the substrate supported by the substrate support unit and an upper position that is higher than the lower position; a plurality of pressing pins attached to the opposing surface and abutting against a peripheral region of the one main surface when the top plate portion is located at the lower position; Equipped with The top plate portion is an upper tabletop connected to the tabletop lifting unit; a lower top plate having the opposing surface and disposed below the upper top plate; a plurality of connecting members that connect the upper and lower top plates at different positions within the plane of the lower top plate; At least some of the plurality of connecting members are capable of adjusting the distance between the upper top plate and the lower top plate. A reduced pressure drying apparatus characterized by:

2. The reduced pressure drying apparatus according to claim 1, When the top plate portion is viewed from above, the plurality of connecting members are positioned outside the substrates supported by the substrate support portion.

3. The reduced pressure drying apparatus according to claim 1 or 2, The plurality of pressure pins are detachably attached to the lower top plate.

4. The reduced pressure drying apparatus according to claim 1 or 2, Further, a control unit for controlling the tabletop lifting unit is provided. The plurality of presser pins are detachable from the lower top plate, The control unit adjusts the amount of descent of the top plate portion from the upper position according to the amount by which the plurality of pressure pins attached to the lower top plate protrude downward from the opposing surface.

5. The reduced pressure drying apparatus according to claim 1 or 2, a plurality of alignment pins suspended from the opposing surface toward an edge surface of the substrate supported by the substrate support portion; a chamber driver; the chamber has a bottom plate portion and a cover portion that is lowered by the chamber driving portion to close an upper portion of the bottom plate portion and form the processing space, The alignment pin protrudes downward from the opposing surface longer than the pressing pin, a pressure-reducing drying apparatus in which, when the cover portion and the top plate portion are lowered integrally by the chamber driving portion, the tip of the alignment pin engages with the edge surface of the substrate before the pressure pin abuts against the peripheral region of one of the main surfaces, thereby adjusting the position of the substrate in a horizontal plane.

6. The reduced pressure drying apparatus according to claim 1 or 2, a control unit that controls the top board lifting unit and the exhaust unit, The control unit an initial reduced pressure drying process in which the top plate lifting unit is controlled so that a peripheral region of the one main surface abuts against the plurality of presser pins, and the exhaust unit is controlled so that an exhaust amount per unit time from the processing space becomes a first exhaust amount, while continuing reduced pressure drying of the coating film for a first predetermined time; a top plate raising process for controlling the top plate elevating unit so that the top plate unit is raised to the upper position after the initial reduced pressure drying process; and a main reduced pressure drying process for continuing reduced pressure drying of the coating film for a second predetermined time while controlling the exhaust unit so that the exhaust amount per unit time from the processing space becomes a second exhaust amount that is greater than the first exhaust amount. Run a vacuum drying device.

7. The reduced pressure drying apparatus according to claim 6, The control unit executes the main reduced-pressure drying process after the top plate raising process.

8. A chamber having a processing space capable of accommodating a substrate having a coating film formed in a central region of one main surface thereof; a substrate support part that supports the substrate in the processing space with the coating film facing upward; an exhaust unit that exhausts the processing space; a top plate portion having an opposing surface facing an upper surface of the substrate supported by the substrate support portion; a top plate lifting unit that lifts and lowers the top plate unit within the processing space between a lower position where the facing surface approaches an upper surface of the substrate supported by the substrate support unit and an upper position that is higher than the lower position; a plurality of pressing pins attached to the opposing surface and abutting against a peripheral region of the one main surface when the top plate portion is located at the lower position; Equipped with The reduced pressure drying apparatus further comprises a plurality of alignment pins that are attached at different positions around the opposing surface and that slide against the edge of the substrate, which is supported by the substrate support section so as to be freely movable horizontally, to adjust the position of the substrate in a horizontal plane while the top plate section is moving to the lower position.

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