Slit nozzle and substrate processing apparatus

Abstract

To efficiently perform the work of evening a discharge amount in the entire discharge port in a slit nozzle having a slit-like discharge port and a substrate processing apparatus having the same.SOLUTION: A slit nozzle according to the present invention comprises: a first body part and a second body part which each have flat surfaces opposed to each other via a gap and form a flow channel and a discharge port in the gap; and a plurality of screw members which integrate the first body part and the second body part. The plurality of screw members are arranged such that a plurality of screw lines made of the plurality of screw members arranged in the line shape along the longitudinal direction of the discharge port are formed in the direction orthogonal to the longitudinal direction. Each of the screw lines includes: a narrow pitch part in which a prescribed number of screw members are arranged with a small arrangement pitch from both ends of the screw line; and a wide pitch part in which the screw members are arranged with the arrangement pitch larger than the arrangement pitch in the narrow pitch part on the inner side relative to narrow pitch part in the screw line.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a slit nozzle having a slit-shaped discharge port and a substrate processing apparatus for applying a liquid to a substrate using the slit nozzle. The substrate includes a semiconductor substrate, a photomask substrate, a liquid crystal display substrate, an organic EL display substrate, a plasma display substrate, a FED (Field Emission Display) substrate, an optical disk substrate, a magnetic disk substrate, an optical magnetic disk substrate, and the like.

Background Art

[0002] In the manufacturing process of electronic devices such as semiconductor devices and liquid crystal display devices, a substrate processing apparatus is used to supply a liquid to the surface of a substrate and apply the liquid to the substrate. The substrate processing apparatus feeds the liquid to a slit nozzle while transporting the substrate in a floating state, and discharges the liquid from the discharge port of the slit nozzle onto the surface of the substrate to apply the liquid to substantially the entire substrate. Another substrate processing apparatus adsorbs and holds the substrate on a stage, and relatively moves the slit nozzle with respect to the substrate in a state where the liquid is discharged from the discharge port of the slit nozzle toward the surface of the substrate to apply the liquid to substantially the entire substrate.

[0003] In recent years, with the demand for higher product quality, it has become important to improve the uniformity of the film thickness of the processing liquid applied by the substrate processing apparatus. For this purpose, a configuration has been proposed that enables the opening dimension of the slit-shaped discharge port to be individually adjusted for each position along the longitudinal direction of the slit.

[0004] For example, in the technology described in Patent Documents 1 and 2, two nozzle bodies are combined so as to face each other, forming a fluid flow path and discharge port in the gap between them. The two nozzle bodies are connected to each other by a plurality of screws (bolts) arranged along the longitudinal direction of the discharge port. These screws are arranged in multiple rows so as to be aligned on multiple straight lines perpendicular to the longitudinal direction at different positions from each other, and by increasing or decreasing the tightening amount of these screws, it is possible to individually adjust the opening size of the discharge port at each position along the longitudinal direction. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2008-194588 [Patent Document 2] Patent No. 4522726 [Overview of the project] [Problems that the invention aims to solve]

[0006] From the standpoint of miniaturization of electronic devices and efficient use of materials, a higher level of uniformity in coating is required than ever before. Therefore, it is necessary to finely adjust the discharge volume across the entire length of the discharge port. Thus, further improvements are desired in the conventional technology described above. In particular, there is a problem in that even if the opening dimensions of the discharge port are changed in the same way near the center and near the ends of the discharge port in the longitudinal direction, the change in discharge volume is not necessarily the same. For this reason, a technology is needed that allows for finer adjustment of the opening dimensions near the ends, where the discharge volume tends to be unstable, than in the center. However, the conventional technology described above does not meet these requirements.

[0007] This invention has been made in view of the above problems, and aims to provide a slit nozzle having a slit-shaped discharge port and a substrate processing apparatus equipped therewith for applying liquid to a substrate, which can efficiently perform the work of making the discharge amount uniform throughout the entire discharge port. [Means for solving the problem]

[0008] One embodiment of the slit nozzle according to the present invention is a slit nozzle having a discharge port that opens in a slit shape and a fluid passage communicating therewith, comprising a first body portion and a second body portion each having flat surfaces facing each other across a gap, with the passage and discharge port formed in the gap, and a plurality of screw members connecting the first body portion and the second body portion. Here, the plurality of screw members are arranged such that a plurality of screw rows, each consisting of a plurality of screw members arranged along the longitudinal direction, are formed in a direction perpendicular to the longitudinal direction, from a position corresponding to one end of the discharge port in the longitudinal direction to a position corresponding to the other end. Each of the screw rows has a narrow-pitch portion in which a predetermined number of screw members are arranged at a small arrangement pitch from both ends of the screw row, and a larger arrangement pitch in the screw row inside the narrow-pitch portion. A wide-pitch section is provided in which the screw members are arranged at a specific spacing. Furthermore, between one row of screws and another row of screws adjacent to that row in a direction perpendicular to the longitudinal direction, the arrangement positions of the screw members in the longitudinal direction are the same in the narrow-pitch section and different in the wide-pitch section.

[0009] In the invention configured in this way, the opening dimensions of the discharge port near a screw member can be changed by increasing or decreasing the tightening amount of each screw member arranged to form multiple rows of screws. Here, the arrangement pitch of the screw members in each row of screws is set to be relatively narrow near both ends in the longitudinal direction of the discharge port, while it is set to be wider in the central part of the discharge port further inside.

[0010] When the tightening amount of one screw member (referred to here as the "adjustable screw member") is changed, the opening size of the discharge port in the vicinity of the adjustable screw member changes accordingly. At this time, other screw members surrounding the adjustable screw member have the effect of restricting the range over which the tightening amount of the adjustable screw member affects the opening size. In other words, if the arrangement pitch of the screw members is large, a change in the tightening amount will result in a change in the opening size over a relatively wide range, while the range over which the opening size changes becomes narrower as the arrangement pitch decreases.

[0011] In this invention, the arrangement of the threaded members is set so that the pitch is narrower at positions corresponding to both ends of the discharge port in the longitudinal direction, while the pitch is wider further inward. In other words, the threaded members are more densely arranged at the positions corresponding to both ends of the discharge port compared to the center. Therefore, near the ends of the discharge port, the range of the discharge port where the opening size changes in response to a change in the tightening amount of a single threaded member is more limited compared to the center. Consequently, it becomes possible to adjust the opening size at each position in the longitudinal direction more precisely than in the center. This makes it possible to perform adjustment work to equalize the discharge amount across the entire discharge port, including both ends and the center, more efficiently.

[0012] Furthermore, one embodiment of the substrate processing apparatus according to the present invention comprises a slit nozzle having the above configuration, a relative movement mechanism that positions the substrate opposite the discharge port of the slit nozzle and moves the slit nozzle and the substrate relative to each other in a direction intersecting the longitudinal direction, and a liquid supply unit that supplies liquid to the slit nozzle, and applies the liquid discharged from the discharge port to the surface of the substrate.

[0013] In the invention configured in this way, it is expected that a film with a uniform thickness in the longitudinal direction can be stably formed by supplying liquid to the substrate from a slit nozzle whose opening size can be adjusted using the above configuration. [Effects of the Invention]

[0014] As described above, in this invention, the arrangement pitch of the screw members is set to be narrower near both ends in the longitudinal direction of the discharge port than in the central part, making it possible to finely adjust the opening dimensions at each position at the ends of the discharge port. This makes it possible to efficiently perform adjustment work to make the discharge volume uniform throughout the entire discharge port. [Brief explanation of the drawing]

[0015] [Figure 1] This figure shows a coating apparatus, which is one embodiment of the substrate processing apparatus according to the present invention. [Figure 2] This is a diagram showing a first embodiment of a slit nozzle. [Figure 3] This diagram shows the arrangement of screw members in a slit nozzle. [Figure 4] This figure shows the relationship between the arrangement pattern of the screw members and the adjustment range of the opening width. [Figure 5] This diagram schematically shows the main configuration of the second embodiment of the slit nozzle. [Figure 6] This figure shows a third embodiment of the slit nozzle. [Modes for carrying out the invention]

[0016] <Overall configuration of the coating apparatus> Figure 1 is a schematic diagram showing the overall configuration of a coating apparatus, which is one embodiment of the substrate processing apparatus according to the present invention. This coating apparatus 1 is a slit coater that coats a liquid coating solution (processing solution) onto the surface Sf of a substrate S that is transported in a horizontal position from the left side to the right side in Figure 1. For example, this coating apparatus 1 can be suitably used to form a uniform coating film by coating various processing solutions, such as a coating solution containing a resist film material or a coating solution containing an electrode material, onto the surface Sf of various substrates S, such as glass substrates or semiconductor substrates.

[0017] In the following figures, in order to clarify the arrangement relationship of each part of the device, as shown in FIG. 1, a right-handed XYZ orthogonal coordinate system is set. The conveyance direction of the substrate S is defined as the "X direction". The horizontal direction from the left side to the right side in FIG. 1 is referred to as the "+X direction", and the opposite direction is referred to as the "-X direction". Among the horizontal directions Y orthogonal to the X direction, the front side (the front side in the figure) of the device is referred to as the "-Y direction", and the back side of the device is referred to as the "+Y direction". Furthermore, the upward and downward directions in the vertical direction Z are referred to as the "+Z direction" and the "-Z direction", respectively.

[0018] First, the configuration and operation overview of this coating device 1 will be described using FIG. 1. Then, the detailed structure of the slit nozzle with the technical features of the present invention and the adjustment operation of the opening dimensions will be explained. In the coating device 1, along the conveyance direction Dt of the substrate S, that is, in the (+X) direction, an input conveyor 100, an input transfer unit 2, a levitation stage unit 3, an output transfer unit 4, and an output conveyor 110 are arranged in this order in proximity. As will be described in detail below, a conveyance path for the substrate S extending in a substantially horizontal direction is formed by these components.

[0019] The substrate S to be processed is carried into the input conveyor 100 from the left side in FIG. 1. The input conveyor 100 includes a roller conveyor 101 and a rotation drive mechanism 102 for rotationally driving the roller conveyor 101. By the rotation of the roller conveyor 101, the substrate S is conveyed in the horizontal posture to the downstream side, that is, in the (+X) direction. The input transfer unit 2 includes a roller conveyor 21 and a rotation / elevation drive mechanism 22 having a function of rotationally driving the roller conveyor 21 and a function of elevating and lowering it. By the rotation of the roller conveyor 21, the substrate S is further conveyed in the (+X) direction. Also, by the elevation and lowering of the roller conveyor 21, the vertical position of the substrate S is changed. By the input transfer unit 2 configured as described above, the substrate S is transferred from the input conveyor 100 to the levitation stage unit 3.

[0020] The levitation stage section 3 comprises a flat plate-shaped stage divided into three sections along the substrate transport direction Dt. Specifically, the levitation stage section 3 includes an inlet levitation stage 31, a coating stage 32, and an outlet levitation stage 33, and the surfaces of these stages form part of the same plane. Numerous ejection holes are provided in a matrix pattern on the surfaces of the inlet levitation stage 31 and the outlet levitation stage 33, for ejecting compressed air supplied from the levitation control mechanism 35, and the substrate S levitates due to the buoyancy imparted by the ejected airflow. In this way, the back surface Sb of the substrate S is supported in a horizontal position with the back surface Sb separated from the stage surface. The distance between the back surface Sb of the substrate S and the stage surface, i.e., the amount of levitation, can be, for example, 10 micrometers to 500 micrometers.

[0021] Meanwhile, on the surface of the coating stage 32, ejection holes for ejecting compressed air and suction holes for drawing in air between the back surface Sb of the substrate S and the stage surface are arranged alternately. The levitation control mechanism 35 controls the amount of compressed air ejected from the ejection holes and the amount of air drawn in from the suction holes, thereby precisely controlling the distance between the back surface Sb of the substrate S and the surface of the coating stage 32. This controls the vertical position of the surface Sf of the substrate S passing above the coating stage 32 to a specified value. As for the specific configuration of the levitation stage section 3, for example, the one described in Japanese Patent No. 5346643 can be applied. The amount of levitation on the coating stage 32 is calculated by the control unit 9 based on the detection results from sensors 61 and 62, and can be adjusted with high precision by airflow control based on the results.

[0022] Furthermore, the entrance levitation stage 31 is equipped with a lift pin, which is not shown in the diagram, and the levitation stage section 3 is provided with a lift pin drive mechanism 34 for raising and lowering this lift pin.

[0023] The substrate S, which is transported to the levitation stage section 3 via the input transfer section 2, is propelled in the (+X) direction by the rotation of the roller conveyor 21 and transported onto the inlet levitation stage 31. The inlet levitation stage 31, coating stage 32, and outlet levitation stage 33 support the substrate S in a levitated state, but do not have the function of moving the substrate S horizontally. Transport of the substrate S in the levitation stage section 3 is performed by the substrate transport section 5 located below the inlet levitation stage 31, coating stage 32, and outlet levitation stage 33.

[0024] The substrate transport unit 5 includes a chuck mechanism 51 that supports the substrate S from below by partially contacting the lower peripheral edge of the substrate S, and a suction / travel control mechanism 52 that has the function of applying negative pressure to a suction pad (not shown) provided on the suction member at the upper end of the chuck mechanism 51 to suction and hold the substrate S, and the function of reciprocating the chuck mechanism 51 in the X direction. When the chuck mechanism 51 holds the substrate S, the back surface Sb of the substrate S is located higher than the surface of each stage of the floating stage unit 3. Therefore, the substrate S maintains a horizontal posture overall due to the buoyancy applied from the floating stage unit 3 while its peripheral edge is suction and held by the chuck mechanism 51. In addition, a plate thickness measuring sensor 61 is positioned near the roller conveyor 21 in order to detect the vertical position of the surface of the substrate S when the back surface Sb of the substrate S is partially held by the chuck mechanism 51. By positioning a chuck (not shown) that is not holding the substrate S directly below the sensor 61, the sensor 61 is able to detect the vertical position of the surface of the adsorption member, i.e., the adsorption surface.

[0025] The substrate S, which has been transported from the input transfer unit 2 to the levitation stage unit 3, is held by the chuck mechanism 51 through suction. In this state, the chuck mechanism 51 moves in the (+X) direction, transporting the substrate S from above the inlet levitation stage 31, over the coating stage 32, to above the outlet levitation stage 33. The transported substrate S is then handed over to the output transfer unit 4 located on the (+X) side of the outlet levitation stage 33.

[0026] Of the stages in the floating stage section 3, the exit floating stage 33 is capable of moving up and down between a lower position where its upper surface is lower than the upper surface of the chuck mechanism 51 and an upper position where its upper surface is higher than the upper surface of the chuck mechanism 51. For this purpose, the exit floating stage 33 is supported by a lifting drive mechanism 36. The lifting drive mechanism 36 moves the exit floating stage 33 up and down in response to control commands from the control unit 9, positioning it at a predetermined height according to the progress of the processing.

[0027] The output transfer unit 4 includes a roller conveyor 41 and a rotation / lifting drive mechanism 42 that has the function of rotating and raising / lowering the roller conveyor 41. As the roller conveyor 41 rotates, a thrust force in the (+X) direction is applied to the substrate S, and the substrate S is further transported along the transport direction Dt. In addition, as the roller conveyor 41 is raised and lowered, the vertical position of the substrate S is changed. The output transfer unit 4 transfers the substrate S from above the exit floating stage 33 to the output conveyor 110.

[0028] The output conveyor 110 comprises a roller conveyor 111 and a rotational drive mechanism 112 that rotates it. The rotation of the roller conveyor 111 further transports the substrate S in the (+X) direction, and it is finally discharged outside the coating apparatus 1. The input conveyor 100 and the output conveyor 110 may be provided as part of the configuration of the coating apparatus 1, but they may also be separate from the coating apparatus 1. For example, a substrate discharge mechanism of a separate unit provided upstream of the coating apparatus 1 may be used as the input conveyor 100. Also, a substrate receiving mechanism of a separate unit provided downstream of the coating apparatus 1 may be used as the output conveyor 110.

[0029] A coating mechanism 7 for applying a coating solution to the surface Sf of the substrate S is positioned on the transport path of the substrate S being transported in this manner. The coating mechanism 7 has a slit nozzle 71. Although not shown in the figures, a positioning mechanism is connected to the slit nozzle 71, and the positioning mechanism positions the slit nozzle 71 at multiple positions, including a coating position above the coating stage 32 (the position of the nozzle 71 in Figure 1) and a maintenance position. Furthermore, a coating solution supply mechanism 8 is connected to the slit nozzle 71, and the coating solution is supplied from the coating solution supply mechanism 8 and discharged from a discharge port that opens downward at the bottom of the nozzle. The slit nozzle 71 will be described in detail later.

[0030] The slit nozzle 71 is equipped with a floating height detection sensor 62 for non-contact detection of the floating height of the substrate S. This floating height detection sensor 62 makes it possible to measure the distance between the floating substrate S and the surface of the coating stage 32, and based on the detected value, the position in which the slit nozzle 71 descends can be adjusted via the control unit 9. An optical sensor or an ultrasonic sensor can be used as the floating height detection sensor 62.

[0031] To perform predetermined maintenance on the slit nozzle 71, the coating mechanism 7 is provided with a nozzle cleaning standby unit 79. The nozzle cleaning standby unit 79 mainly consists of a roller 791, a cleaning section 792, a roller butt 793, etc. With the slit nozzle 71 positioned in the maintenance position, these components perform nozzle cleaning and liquid reservoir formation, preparing the discharge port of the slit nozzle 71 for the next coating process.

[0032] In addition, the coating apparatus 1 is equipped with a control unit 9 for controlling the operation of each part of the apparatus. The control unit 9 has a storage unit for storing predetermined programs and various recipes, a processing unit such as a CPU that executes the program to cause each part of the apparatus to perform predetermined operations, a display unit such as an LCD panel, and an input unit such as a keyboard.

[0033] The following provides a detailed description of specific configuration examples of the slit nozzle 71 and methods for adjusting the opening dimensions of the discharge port. Note that the adjustment of the opening dimensions referred to here is not aimed at making the opening dimensions constant or a predetermined value, but rather at making the thickness of the coating film formed on the surface of the substrate S as a result of discharge uniform.

[0034] <First Embodiment> Figure 2 shows a first embodiment of a slit nozzle used in the coating apparatus of Figure 1. More specifically, Figure 2 is a schematic exploded assembly diagram showing the main components of the slit nozzle 71. The slit nozzle 71 has a first body portion 711, a second body portion 712, a first side plate 713, and a second side plate 714. Each of these components is machined from a metal block such as stainless steel or aluminum. As shown by the dashed arrow, the first body portion 711 and the second body portion 712 are joined facing each other in the X direction, and the first side plate 713 is joined to the (-Y) side end face of the joined body, and the second side plate 714 is joined to the (+Y) side end face, respectively, to form the nozzle body 710.

[0035] The lower half of the main surface of the first main body 711 facing the second main body 712, that is, the main surface on the (+X) side, is finished to be a flat surface 711a parallel to the YZ plane. Hereinafter, this flat surface 711a will be referred to as the "first flat surface". The upper half of the main surface of the first main body 711 facing the second main body 712 is also finished to be a flat surface 711b parallel to the YZ plane. Furthermore, the lower part of the first main body 711 protrudes in a downward tapering shape to form the first lip portion 711c. The flat surfaces 711a and 711b are separated by a groove 711d with the Y direction as the longitudinal direction and the X direction as the depth direction. This groove 711d functions as a manifold in the flow path of the coating liquid, with its lower end extending in a substantially horizontal direction, while its upper end has a mountain-like shape that rises in the (+Z) direction as it approaches the center from both ends. In other words, the groove 711d is configured such that the vertical cross-sectional area of ​​the manifold formed therein increases from the ends towards the center.

[0036] On the other hand, the main surface of the second main body 712 facing the first main body 711, that is, the main surface on the (-X) side, is a single flat surface 712a parallel to the YZ plane. Hereafter, this flat surface 712a will be referred to as the "second flat surface". The lower part of the second main body 712 protrudes in a downward tapering shape to form the second lip portion 712c. The first main body 711 and the second main body 712 are joined by a plurality of screw members 716 such that the flat surface 711b and the upper half of the second flat surface 712a are in close contact.

[0037] More specifically, multiple screw holes 711e are provided in the region R1 enclosed by the dotted line shown in Figure 2, which is part of the flat surface 711b. Additionally, the second main body portion 712 is provided with multiple through holes 711e that penetrate from its (+X) side surface to its (-X) side surface (i.e., the second flat surface 712a). To avoid cluttering the drawing, Figure 2 shows only one screw hole 711e, one through hole 712e, and one screw member 716; however, multiple of each are provided. Their arrangement will be explained in detail later.

[0038] The through-holes 711e are positioned to correspond to each screw hole 711e of the first main body 711. In other words, when the first main body 711 and the second main body 712 are combined, the through-holes 712e of the second main body 712 are provided at positions that are coaxial with each of the screw holes 711e of the first main body 711. The region on the (+X) side surface of the second main body 712 where multiple through-holes 712e are located will be comprehensively represented by the symbol R2.

[0039] A threaded member 716 is inserted through each of the through holes 712e, and the threaded member 716 is screwed into the threaded hole 711 of the first main body 711, thereby joining the first main body 711 and the second main body 712. In addition to functioning as fixing screws that securely fasten the first main body 711 and the second main body 712 in this way, the multiple threaded members 716 also function as adjustment screws to adjust the opening size of the discharge port in the assembled slit nozzle 71, as will be described later.

[0040] The first flat surface 711a is set back slightly towards the (-X) side compared to the flat surface 711b. Therefore, when the first main body 711 and the second main body 712 are joined together, the first flat surface 711a and the second flat surface 712a face each other in parallel with a small gap between them. The gap between these opposing surfaces (first flat surface 711a, second flat surface 712a) becomes a flow path for the coating liquid from the manifold, and its lower end functions as a discharge port 715 (Figure 3) that opens downward toward the surface Sf of the substrate S. The discharge port 715 has its longitudinal direction in the Y direction and is a slit-shaped opening with a small opening dimension in the X direction.

[0041] Figure 3 shows the arrangement of the threaded members in the slit nozzle. More specifically, Figure 3(a) shows the arrangement of the through holes 712e located on the (+X) side surface of the slit nozzle 71, and Figure 3(b) is a magnified view of a portion of region R2.

[0042] In a portion of the (+X) side surface of the second main body 712 constituting the slit nozzle 71, a plurality of through holes 712e are distributed in a region R2 corresponding to the region R1 where the screw hole 711e is located in the first main body 711. The through holes 712e and the screw hole 711e are arranged coaxially, and a screw member 716 is inserted through them. Therefore, the arrangement of the through holes 712e shown below is technically equivalent to the arrangement of the screw hole 711e. Since the screw member 716 is inserted through them, the arrangement of the screw member 716 naturally follows the arrangement of the screw hole 711e or the through hole 712e.

[0043] Specifically, as shown by the dashed lines in Figure 3(b), each through-hole 712e extends generally in the Y direction and is positioned on one of several straight lines L1, L2, and L3 that are at different positions in the Z direction. Therefore, the multiple through-holes 712e form a row of through-holes 712e arranged in a line along the Y direction, and multiple such rows of through-holes 712e are arranged at different positions in the Z direction. Note that the straight lines L1, L2, and L3 on which the through-holes 712e are arranged are not strictly parallel to the Y direction, but have a slight upward slope from the ends towards the center, corresponding to the inclination of the upper end of the groove 711d which forms the manifold. Furthermore, this arrangement is symmetrical with respect to the XZ plane passing through the center of the nozzle. Such an arrangement is described in detail in Patent Document 2, and will not be explained here.

[0044] The arrangement pitch of through-holes 712e arranged on a straight line in the Y direction is not uniform. That is, in region R2, through-holes 712e are arranged at a relatively small pitch in the positions corresponding to both ends of the discharge port 715 and the nearby end regions R2a and R2b, while through-holes 712e are arranged at a larger pitch in the central region R2c, which is inside the end regions R2a and R2b. For example, on the straight line L1, a predetermined number (5 in this example) of through-holes 712e are arranged at equal intervals with a relatively small pitch Pa in the (-Y) side end region R2a. The same applies to the (+Y) side end region R2b. The number of through-holes 712e and their arrangement pitch may differ in the end region, but from the viewpoint of effectiveness in adjusting the opening dimensions, it is practical to make them the same.

[0045] On the other hand, in the central region R2c of region R2, which is located inside the end regions R2a and R2b and sandwiched between them, through holes 712e are arranged at equal intervals with a pitch Pc that is larger than the arrangement pitch Pa in the end regions.

[0046] Similarly, on both the straight line L2 and the straight line L3, through holes 712e are arranged such that they have a narrow pitch in the end regions R2a and R2b, and a wide pitch in the central region R2c. In accordance with this arrangement of through holes 712e, the screw members 716 are also arranged such that they have a narrow pitch in the end regions R2a and R2b, and a wide pitch in the central region R2c. In the first main body portion 711, in region R1 corresponding to region R2, screw holes 711e are provided at positions corresponding to each through hole 712e.

[0047] By increasing or decreasing the tightening amount of the screw member 716, it is possible to adjust the opening width of the discharge port 715, that is, the opening dimension in the X direction. In other words, by tightening the screw member 716 more firmly, at least one of the first main body portion 711 and the second main body portion 712 undergoes slight elastic deformation, and the amount of elastic deformation changes when the tightening amount is changed. As a result, the opening width of the discharge port 715 formed by the first main body portion 711 and the second main body portion 712 changes. This can be used to adjust the opening dimension in order to keep the discharge volume constant.

[0048] When the tightening amount of one screw member 716 to be adjusted is changed, the other screw members 716 surrounding it act to restrict the range of change in the opening width (more specifically, the range in the longitudinal direction of the discharge port) that results from the change in the tightening amount. In other words, the range over which the elastic deformation of the first body portion 711 and the second body portion 712 is affected by the change in the tightening amount of the screw member 716 to be adjusted is limited by the surrounding screw members 716 whose tightening amount is not changed.

[0049] Therefore, in areas where the arrangement pitch of the screw members 716 is wide, changing the tightening amount of one screw member 716 causes the opening width of the discharge port 715 to change over a relatively wide range in the longitudinal direction. On the other hand, in areas where the arrangement pitch of the screw members 716 is narrow, the range over which the opening width of the discharge port 715 changes is more limited.

[0050] In coating processes using the slit nozzle 71, the flow rate of the coating liquid flowing near both ends in the Y direction of the flow path within the nozzle is more prone to fluctuation than that of the coating liquid flowing in the center of the flow path due to the influence of the side walls of the flow path. For this reason, it is desirable that the discharge width of the discharge port 715, which is used to maintain a constant discharge volume, be adjusted more precisely near both ends than in the center.

[0051] Therefore, in the slit nozzle 71 of this embodiment, a predetermined number of through holes 712e provided in end regions R2a and R2b, which correspond to the positions of both ends of the discharge port 715 in the longitudinal direction, are arranged at relatively narrow pitches and equal intervals. This makes it possible to finely adjust the opening width of the discharge port 715 near both ends for each position in the longitudinal direction. Furthermore, since the range affected by the adjustment work of the opening width at one location is limited, for example, it is avoided that the opening width of an already adjusted location will change due to adjustments at other locations. This makes it possible to perform adjustment work at each location efficiently.

[0052] On the other hand, in the central region R2c, which is inside the end regions R2a and R2b, the through holes 712e are arranged at a wider pitch. As a result, the opening width in the central region, where the amount of coating liquid applied in the flow path is relatively stable, can be adjusted over a wider range by increasing or decreasing the tightening amount of each screw member 716, making it possible to efficiently adjust the opening dimensions in this region.

[0053] When the threaded members 716 are arranged to form multiple rows, the opening width of the discharge port 715 is affected by the difference in the relative tightening amounts of the threaded members 716 between each row. Therefore, with respect to adjusting the opening dimensions, the threaded members 716 belonging to each row act complementaryly with the threaded members 716 belonging to other rows.

[0054] For example, consider a case where the screw members 716 are arranged in two rows. If increasing the tightening amount of one screw member 716 belonging to one row increases the opening width, then naturally, the opening width can be reduced by decreasing the tightening amount of that screw member 716. Similarly, by increasing the tightening amount of another screw member 716 belonging to the other row, the tightening amount increases relative to the aforementioned screw member 716, and as a result, the opening width can be reduced.

[0055] In other words, if the screw members 716 are arranged in two rows, the opening width can be adjusted by adjusting only the screw members belonging to one row and changing the relative tightening amount with respect to the screw members belonging to the other row. Alternatively, the screw members belonging to both rows can be adjusted separately. In practical terms, in order to ensure that the first main body 711 and the second main body 712 are mechanically joined with a certain level of binding force, it is desirable not to change the tightening amount of the screw members belonging to one row.

[0056] In this embodiment, when the screw members 716 are arranged in three rows, the opening dimensions can be adjusted as follows. First, the central row, i.e., the screw members 716 arranged on the straight line L2, is tightened to a specified torque and then not changed, thereby maintaining a constant tightening amount. Then, the opening dimensions can be adjusted by targeting one or both of the other two rows, i.e., the screw members 716 arranged on the straight lines L1 and L3.

[0057] In this way, the opening dimensions, whose approximate value is defined by the screw members 716 positioned on the straight line L2, can be finely adjusted by increasing or decreasing the tightening amount of the screw members 716 positioned on the straight line L1 and / or straight line L3. This prevents the opening dimensions from fluctuating unnecessarily large during the adjustment process, making it possible to perform the work efficiently.

[0058] As described above, the threaded member 716 on the straight line L1 and the threaded member 716 on the straight line L3 work complementaryly in adjusting the opening dimensions, but the threaded member 716 on the straight line L3, which is closer to the discharge port 715, has a more pronounced effect of changes in the tightening amount on the change in the opening width. For this reason, it is also possible to use the threaded member 716 on the straight line L3 for coarse adjustment and the threaded member 716 on the straight line L1 for fine adjustment.

[0059] Furthermore, the arrangement of the screw members 716 in each row is set with a narrow pitch at positions corresponding to the ends of the discharge port 715 and a wide pitch at positions corresponding to the center. Therefore, it is possible to adjust the opening dimensions at both ends of the discharge port 715 more precisely than at the center.

[0060] Furthermore, in this embodiment, the arrangement pattern in the Y direction differs between screw members 716 belonging to adjacent rows, depending on their longitudinal position. That is, in the end regions R2a and R2b, the positions in the Y direction of the through holes 712e located on the straight lines L1, L2, and L3 are identical. Therefore, each through hole 712e is arranged on a grid with the Y and Z axes as its two axes. This arrangement will be referred to here as a "grid arrangement".

[0061] On the other hand, in the central region R2c, the through-holes 712e on line L1 and the through-hole threaded members 716 on line L3, which are positioned on either side of line L2, are at the same position in the Y direction. However, the Y-direction position of the through-holes 112e on line L2, which are adjacent to these two and sandwiched between them, differs from the threaded members 716 in the other rows by (1 / 2) of the arrangement pitch. Therefore, each through-hole 112e is arranged in a so-called "staggered" pattern. As will be explained next, these differences in arrangement patterns are provided to allow for finer adjustment of the opening dimensions at the ends of the discharge port 715 than at the center.

[0062] Figure 4 schematically shows the relationship between the arrangement pattern of the screw members and the adjustment range of the discharge port opening width. Figure 4(a) shows the case in which the screw members 716 are arranged in a staggered pattern, and Figure 4(b) shows the case in which the screw members 716 are arranged in a grid pattern. As described above, when the tightening amount of one screw member 716 is changed, the nozzle body 710 elastically deforms accordingly and the opening width of the discharge port 715 changes, while the surrounding screw members 716 act to restrain that deformation.

[0063] The manner of such deformation differs between cases where the screw members 716 are arranged in a staggered pattern as shown in Figure 4(a) and cases where they are arranged in a grid pattern as shown in Figure 4(b). In these figures, the dotted lines schematically show the range of deformation when the tightening amount of a single screw member 716a is changed.

[0064] In the staggered arrangement shown in Figure 4(a), when the tightening amount of one screw member 716a is changed, the deformation is constrained by the surrounding screw members 716, resulting in a relatively wide-ranging effect on the opening width of the discharge port 715. On the other hand, in the grid arrangement shown in Figure 4(b), the range of influence that a change in the tightening amount of one screw member 716a has on the opening width of the discharge port 715 is narrower.

[0065] Here, we have explained the function of the screw member 716a, which belongs to the lowest of the three rows, but it is possible to consider the same principle for the screw member 716b, which belongs to the upper row and acts complementaryly to it.

[0066] In this way, by changing the arrangement pattern of the screw members 716, the range of change in the opening width of the discharge port 715 when the tightening amount of one screw member 716 is changed can also be changed. In the slit nozzle 71 of this embodiment, as shown in Figure 3(a), the through holes 112e are arranged in a grid pattern in the end regions R2a and R2b, while the through holes 112e are arranged in a staggered pattern in the central region R2c. This further improves the effect of being able to adjust the opening width more finely near the ends of the discharge port 715 than in the central part.

[0067] As described above, in the slit nozzle 71 of this embodiment, (a) Arrange the multiple screw members 716 such that multiple rows of the screw members are arranged in the Z direction. (b) The arrangement pitch of the screw members 716 is narrow in the end regions R2a and R2b corresponding to both ends of the discharge port 715, while the pitch is wider in the central region R2c located inside these areas. (c) The arrangement pattern of the screw members 716 is a grid arrangement in the end regions R2a and R2b, while the arrangement is a staggered arrangement in the central region R2c. This configuration allows for more precise adjustment of the opening dimensions of the discharge port 715, particularly near the edges rather than in the center. This makes it possible to efficiently perform adjustment work to maintain a constant discharge volume of the coating liquid from the discharge port 715. While configurations (b) and (c) are effective on their own, combining them further enhances their effectiveness.

[0068] <Second Embodiment> Next, a second embodiment of a slit nozzle applicable to the coating apparatus 1 will be described. In the slit nozzle 71 of the above embodiment, the first flat surface 711a of the first body portion 711 is set back on the (-X) side compared to the other flat surface 711b, and this faces the second flat surface of the second body portion 712, thereby forming a flow path and discharge port 715 for the coating liquid. On the other hand, some slit nozzles of this type have a structure in which a thin plate-shaped shim is sandwiched between two body members made of a high-rigidity material. The slit nozzle 71A of the second embodiment shown in Figure 5 has such a structure.

[0069] Figure 5 is a schematic exploded assembly diagram showing the main components of a second embodiment of the slit nozzle used in the coating apparatus of Figure 1. In this embodiment of the slit nozzle 71A, the nozzle body 710A is formed by joining a first body portion 711A and a second body portion 712A, which have opposing flat surfaces, with a shim 73A in between. In the first body portion 711A, a groove 711g that functions as a manifold for the coating liquid is provided on the flat main surface 711f on the side facing the second body portion 712A. The shim 73A is, for example, a thin metal plate with a portion cut out to form a flow path for the coating liquid, and is sandwiched between the first body portion 711A and the second body portion 712A to define the gap between them and form a flow path for the coating liquid.

[0070] Except for these points, the shapes of the first main body 711A and the second main body 712A are the same as the corresponding configurations 711 and 712 of the first embodiment. Furthermore, the device configuration other than the slit nozzle is also common. Therefore, the same reference numerals are used for configurations that are identical or substantially identical to those of the first embodiment, and detailed explanations are omitted.

[0071] In this embodiment as well, the first main body portion 711A and the second main body portion 712A are fixed together using a screw member 716. Specifically, screw holes 711e are distributed in region R1 of the first main body portion 711, and through holes 712e are provided in region R2 of the second main body portion 712 at positions corresponding to each of the screw holes 711e. Furthermore, through holes 73e are provided in region R3 of the shim 73A, which corresponds to regions R1 and R2, at positions corresponding to the screw holes 711e and through holes 712e. The screw member 716 is inserted through these, and the first main body portion 711A and the second main body portion 712A are joined together via the shim 73A.

[0072] In addition, the first main body 711A, the second main body 712A, and the shim 73A are each provided with holes 711h, 712h, and 73h for inserting threaded members. Threaded members 716 are also inserted through these holes to prevent leakage of the coating liquid from the side of the nozzle. The tightening amount of the threaded members 716 here is maintained at a constant value and is not used to adjust the opening dimensions.

[0073] A slit nozzle 71A having such a structure has the same functionality as the slit nozzle 71 of the first embodiment. Thus, the mechanism for adjusting the opening dimensions of the discharge port based on the technical concept of the present invention is applicable to both nozzles that define the gap using shims and nozzles that do not use shims.

[0074] <Third Embodiment> Next, a third embodiment of the slit nozzle applicable to the coating apparatus 1 will be described. In each of the above embodiments, a single discharge port is provided in the longitudinal direction (Y direction) of the slit nozzle. However, in this type of coating apparatus, there are also usage configurations in which the discharge port is divided into multiple ports in the longitudinal direction, and multiple coating films are formed simultaneously. The slit nozzle 71B of the third embodiment shown below addresses this need. Here again, the same reference numerals are used for components that are the same or substantially the same as in the first and second embodiments, and detailed explanations are omitted.

[0075] Figure 6 shows a third embodiment of the slit nozzle used in the coating apparatus of Figure 1. More specifically, Figure 6(a) is a schematic exploded assembly diagram showing the main components of the slit nozzle 71B of this embodiment. Figure 6(b) is a bottom view and a side view of the slit nozzle 71B.

[0076] In this embodiment, similar to the slit nozzle 71A of the second embodiment, the main body 710B is formed by sandwiching a shim 73B between the first main body 711B and the second main body 712B. A protruding portion 731B is provided in the center of the shim 73B, which acts as a partition wall for the flow path, thereby dividing the flow path of the coating liquid into two. The protruding portion 731B extends to the lower ends of the first and second lip portions 711c and 712c, and at these lower ends, two discharge ports 715a and 715b are formed, each with its longitudinal direction in the Y direction and aligned in the Y direction. In this way, the flow path is divided into two discharge ports 715a and 715b, but the shape of the groove 711g is a single mountain shape, similar to the second embodiment, with its upper end rising higher than both ends of the nozzle at the center.

[0077] In this embodiment, as in the second embodiment, the slit nozzle 71B is formed by a screw member 716 connecting the first main body portion 711B and the second main body portion 712B with a shim 73A in between. That is, the first main body portion 711B, the second main body portion 712B, and the shim 73B are each provided with holes 711h, 712h, and 73h for inserting the screw member. The screw member 716 is inserted through these holes, integrating each component and preventing leakage of the coating liquid from the side of the nozzle. Here as well, the tightening amount of the screw member 716 is maintained at a constant value and is not used to adjust the opening size.

[0078] In this embodiment, the arrangement of the screw member 716 used as an adjustment screw for adjusting the opening dimensions is as follows. Through holes 712e are distributed in the second main body 712B in the region R21 corresponding to the first discharge port 715a and the region R22 corresponding to the second discharge port 715b. More specifically, as shown in Figure 6(b), the region R21, which is set to correspond to the spread of the first discharge port 715a in the Y direction, is divided into end regions R21a and R21b, which correspond to both ends of the discharge port 715a, and a central region R21c, which is sandwiched between these and corresponds to the center of the discharge port 715a. Through holes 712e are arranged at a relatively wide pitch in the central region R21c, while through holes 712e are arranged at a narrower pitch in the end regions R21a and R21b. The arrangement pattern can be the same as the pattern shown in Figure 3, for example, but the number of arrangements can be changed as appropriate.

[0079] The same applies to region R22 corresponding to the second discharge port 715b. That is, region R22 can be divided into end regions R22a and R22b, which correspond to both ends of the discharge port 715b and have through holes 712e arranged at a narrow pitch, and a central region R21c, which corresponds to the center of the discharge port 715b and has through holes 712e arranged at a wider pitch.

[0080] In the areas R11 of the first main body 711B and R31 of the shim 73B, which correspond to area R21 of the second main body 712B, and in the areas R12 of the first main body 711B and R32 of the shim 73B, which correspond to area R22 of the second main body 712B, screw holes 711e and through holes 73e are provided at positions corresponding to the through holes 112e, respectively. By inserting the screw member 716 through these, the screw member 716 functions as a fixing screw and an adjustment screw. The arrangement of the screw member 716 is in accordance with the arrangement of the screw holes 711e and through holes 712e.

[0081] In this embodiment, for each of the two discharge ports 715a and 715b formed side by side in the Y direction, the adjustment screws are arranged at a narrow pitch in the regions corresponding to both ends, while the adjustment screws are arranged at a wider pitch in the region corresponding to the center. Therefore, for each of the discharge ports 715a and 715b, the above-described effect, namely the ability to adjust the opening dimensions more precisely near the ends of the discharge port than in the center, can be obtained individually. In this way, when a slit nozzle is provided with multiple discharge ports, by setting the screw arrangement based on the above technical concept for each port, it is possible to improve the efficiency of the opening dimension adjustment work for each discharge port. The same applies when shims are not used.

[0082] <Other> As described above, in the slit nozzles 71, 71A, and 71B of each embodiment, the screw member 716, which serves as a fixing screw connecting the components constituting the nozzle body, also functions as an adjustment screw for adjusting the opening dimensions of the discharge port 715 (715a, 715b). The arrangement of the screw member 716 as an adjustment screw is set to a narrow pitch in the region corresponding to both ends of the discharge port and a wide pitch in the region corresponding to the center.

[0083] Therefore, the adjustment screws are arranged more densely near both ends of the discharge port compared to the central part, allowing for more precise adjustment of the opening dimensions near the ends. On the other hand, the density of adjustment screws is reduced in the central part, where adjustment is relatively easy, thereby improving the efficiency of the adjustment work. As a result, in these embodiments, it is possible to efficiently adjust the opening dimensions throughout the entire discharge port, including both ends and the central part between them.

[0084] As described above, in each of the above embodiments, the coating apparatus 1 corresponds to the "substrate processing apparatus" of the present invention. Furthermore, the first flat surface 711a of the first main body portion 711 and the second flat surface 712a of the second main body portion 712 correspond to the "flat surface" of the present invention. In addition, the shim plate 73 functions as the "spacer member" of the present invention.

[0085] Furthermore, the threaded members 716 inserted through multiple through holes 712e arranged in a row along the straight lines L1, L2, and L3 in Figure 3(b) form the "thread row" of the present invention. Of these, the threaded members 716 inserted through the through holes 712e provided in the end regions R2a and R2b constitute the "narrow pitch portion" of the present invention. On the other hand, the threaded members 716 inserted through the through holes 712e provided in the central region R2c constitute the "wide pitch portion" of the present invention.

[0086] Furthermore, the coating apparatus 1 in the above embodiment corresponds to the "substrate processing apparatus" of the present invention, and the input conveyor 100, input transfer unit 2, floating stage unit 3, output transfer unit 4, output conveyor 110, substrate transport unit 5, etc., together constitute the "relative movement mechanism" of the present invention. In addition, the coating liquid supply mechanism 8 functions as the "liquid supply unit" of the present invention.

[0087] It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the invention. For example, in the slit nozzle 71 of the above embodiment, the screw members used to adjust the opening dimensions at the ends of the discharge port 715 and the screw members used to adjust the opening dimensions in the center have different arrangement pitches and arrangement patterns. However, as long as the objective of arranging screw members at a higher density at the ends than in the center is achieved, only one of the methods may be applied. In addition, the arrangement patterns of screw members used in the above embodiment are of two types: "staggered arrangement" and "grid arrangement," but the arrangement patterns are not limited to these.

[0088] Furthermore, in the slit nozzle 71 of the above embodiment, although the arrangement of the screw members 716 differs between the end regions R2a, R2b and the central region R2c, the screw members 716 are arranged at a constant pitch within each region. In the case of the central region R2c, the structure is generally uniform in the longitudinal direction (Y direction) of the discharge port 715, so it is necessary to arrange the screw members 716 at a constant pitch. On the other hand, in the end regions R2a, R2b, the arrangement pitch of the screw members 716 may be made uneven to allow for finer adjustment according to the position. Even with such a configuration, as long as the screw members 716 are arranged at a narrower pitch than in the central region, it can be said to fall within the scope of the technical concept of the present invention.

[0089] Furthermore, in the slit nozzle 71 of the above embodiment, a threaded member 716 is inserted through a through hole 712e provided in the second main body portion 712, and the first and second main body portions are joined by screwing this into the threaded hole 711e of the first main body portion 711. Alternatively, a bolt as a threaded member may be inserted through through holes provided in both main body portions, and a nut may be screwed onto it to join the two main body portions.

[0090] Furthermore, in the above embodiment, relative movement between the slit nozzle 71 and the substrate S is achieved by transporting the substrate S below the slit nozzle 71. However, the method of achieving these relative movements is not limited to the above. For example, the present invention can also function effectively in a configuration in which the slit nozzle scans and moves relative to a substrate held on a stage. In addition, the substrate transport method is not limited to the levitation type described above, and various methods such as roller transport, belt transport, and transport by a moving stage can be applied.

[0091] Furthermore, although the above embodiment applies the present invention to a coating apparatus 1 that supplies a coating liquid to the surface Sf of a substrate S, the application of the present invention is not limited to this. It can be applied to all substrate processing technologies in which a processing liquid is supplied to a slit nozzle, and the processing liquid is supplied from the slit nozzle to the surface of the substrate while moving relative to the slit nozzle to perform a predetermined processing.

[0092] As described above with specific embodiments as examples, in the slit nozzle according to the present invention, the arrangement positions of the screw members in the longitudinal direction between one row of screws and another row of screws adjacent to that row in a direction perpendicular to the longitudinal direction may be the same in the narrow-pitch section and different in the wide-pitch section.

[0093] When the tightening amount of one screw member is changed, the surrounding screw members whose tightening amount does not change act to restrict the change in the opening size of the discharge port. Between adjacent rows of screws, the range over which this restrictive effect extends changes depending on the arrangement of screw members in the longitudinal direction. That is, when the arrangement of screw members in the longitudinal direction is the same between adjacent rows of screws, the effect of suppressing the change in the opening size is greater than when they are different. Therefore, in narrow-pitch sections where fine adjustments are required, it is effective to differ the arrangement of screw members in the longitudinal direction between rows. On the other hand, in wide-pitch sections where fine adjustments are not necessarily required, it is preferable for work efficiency if the adjustment result of one screw member extends over a wide area. For this reason, it is preferable to differ the arrangement position of screw members between adjacent rows of screws.

[0094] Furthermore, for similar reasons, by arranging the screw members at a constant spacing in the wide-pitch section, it becomes possible to efficiently perform adjustment work to ensure uniform discharge volume in the longitudinal direction.

[0095] Furthermore, in this invention, the number of screw rows can be two or three. When there are two screw rows, the opening size of the discharge port can be changed by increasing or decreasing the relative difference in tightening amount between the screw members belonging to one screw row and the screw members belonging to the other screw row. The same applies when there are three screw rows, but in this case, for example, the tightening amount of the screw members belonging to the central screw row can be fixed, while the screw members belonging to the other two rows can be adjusted. In this way, it is possible to efficiently fine-tune the opening size.

[0096] Furthermore, for example, the slit nozzle according to the present invention may have a structure in which one of the first and second main body portions is provided with a through hole for inserting each of the screw members, and a screw hole is provided at a position corresponding to the through hole of the other portion for screwing into the screw member inserted through the through hole. In the invention configured in this way, the first and second main body portions can be joined by attaching the screw member from one direction, and the opening dimensions can also be adjusted by working from the same direction.

[0097] Furthermore, for example, a thin plate-shaped spacer member may be provided, which is sandwiched between the first and second main body portions to close the gap around the flow path other than the discharge port and to define the size of the gap. In such a structure, it is possible to adjust the opening dimensions by increasing or decreasing the tightening amount of the screw member that connects the first and second main body portions with the spacer member in between.

[0098] Furthermore, for example, if multiple discharge ports are provided at different positions along the longitudinal direction, it is desirable to provide both a narrow-pitch section and a wide-pitch section for each discharge port. This makes it possible to efficiently adjust the opening dimensions for each discharge port to ensure a uniform discharge volume.

[0099] Furthermore, the substrate processing apparatus according to the present invention may form a uniform coating film on the surface of a substrate using a processing liquid. When forming a uniform coating film using a slit nozzle, the discharge amount differs between the center and the edges of the nozzle's discharge port, which can cause variations in the thickness of the coating film. By applying the present invention to such an apparatus, it becomes possible to efficiently perform adjustment work to form a uniform coating film over the entire area of ​​the discharge port. [Industrial applicability]

[0100] This invention is applicable to slit nozzles having a slit-shaped discharge port and to substrate processing apparatuses in general that use said slit nozzles to apply liquid to a substrate. [Explanation of Symbols]

[0101] 1. Coating apparatus (substrate processing apparatus) 2. Input transfer unit (relative movement mechanism) 3. Levitation stage section (relative movement mechanism) 4. Output transfer section (relative movement mechanism) 5. Substrate transport section (relative movement mechanism) 8. Coating liquid supply mechanism (processing liquid supply unit) 71 Slit Nozzle 73A Shim plate (spacer member) 100 Input Conveyor (Relative Movement Mechanism) 110 Output conveyor (relative movement mechanism) 711 First main body 711a 1st flat surface (flat surface) 711e screw hole 712 Second Main Body 712a 2nd flat surface (flat surface) 712e through hole 715 Discharge port 716 Screw component S substrate

Claims

1. A slit nozzle having a discharge port that opens in a slit shape and a fluid flow path communicating therewith, A first main body and a second main body each have flat surfaces facing each other across a gap, and the gap forms the flow path and the discharge port, A plurality of screw members connecting the first main body and the second main body Equipped with, The plurality of screw members are arranged such that, between a position corresponding to one end of the discharge port in the longitudinal direction and a position corresponding to the other end, a plurality of screw rows consisting of the plurality of screw members arranged along the longitudinal direction are formed in a direction perpendicular to the longitudinal direction. Each of the aforementioned screw rows has: A narrow-pitch section is formed in which a predetermined number of the screw members are arranged at a small spacing from both ends of the aforementioned screw row, In the aforementioned screw row, there is a wide-pitch section in which the screw members are arranged inside the narrow-pitch section and with a larger arrangement pitch than the arrangement pitch in the narrow-pitch section. A system was established, A slit nozzle in which, between one row of screws and another row of screws adjacent to it in a direction perpendicular to the longitudinal direction, the arrangement positions of the screw members in the longitudinal direction are the same in the narrow-pitch section and different in the wide-pitch section.

2. The slit nozzle according to claim 1, wherein in the wide-pitch section, the screw members are arranged at a constant spacing.

3. The slit nozzle according to claim 1 or 2, wherein the plurality of screw rows are provided in two or three rows.

4. A slit nozzle according to any one of claims 1 to 3, wherein one of the first main body portion and the second main body portion is provided with a through hole for inserting each of the screw members, and a screw hole is provided in the other portion at a position corresponding to the through hole for screwing with the screw member inserted through the through hole.

5. A slit nozzle according to any one of claims 1 to 4, comprising a thin plate-shaped spacer member that is sandwiched between the first main body and the second main body to close the gap around the flow path other than the discharge port and to define the size of the gap.

6. A slit nozzle having a discharge port that opens in a slit shape and a fluid flow path communicating therewith, A first main body and a second main body each have flat surfaces facing each other across a gap, and the gap forms the flow path and the discharge port, A plurality of screw members connecting the first main body and the second main body Equipped with, The plurality of screw members are arranged such that, between a position corresponding to one end of the discharge port in the longitudinal direction and a position corresponding to the other end, a plurality of screw rows consisting of the plurality of screw members arranged along the longitudinal direction are formed in a direction perpendicular to the longitudinal direction. Each of the aforementioned screw rows has: A narrow-pitch section is formed in which a predetermined number of the screw members are arranged at a small spacing from both ends of the aforementioned screw row, In the aforementioned screw row, there is a wide-pitch section in which the screw members are arranged inside the narrow-pitch section and with a larger arrangement pitch than the arrangement pitch in the narrow-pitch section. A system was established, A slit nozzle having a plurality of discharge ports arranged at different positions in the longitudinal direction, and each of the discharge ports being provided with a narrow-pitch portion and a wide-pitch portion.

7. A slit nozzle according to any one of claims 1 to 6, The substrate is positioned opposite the discharge port of the slit nozzle, and a relative movement mechanism moves the slit nozzle and the substrate relative to each other in a direction intersecting the longitudinal direction. A liquid supply unit that supplies liquid to the slit nozzle and A substrate processing apparatus comprising the method for applying the liquid discharged from the discharge port to the surface of the substrate.

8. The substrate processing apparatus according to claim 7, which forms a uniform coating film with the liquid on the surface of the substrate.

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